JP2006234653A - Test contact - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a test contact for inspecting electric characteristics of an electronic component such as a semiconductor element, capable of setting and controlling uniformly the interval between contacts and optionally the interval in accordance with a specification of the electronic component, namely, the electrode width of the electronic component, and securing a necessary insulation degree. <P>SOLUTION: This test contact is formed by laminating two contacts 2 which are two contacts comprising beryllium copper having the thickness of 0.1 mm respectively, after applying an insulating adhesive 3 onto the contacts 2 and spraying an insulating spherical resin 4 (diameter 50 μm) into the insulating adhesive 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a test contact for accurately inspecting electrical characteristics (voltage, current, resistance, frequency, etc.) of an electronic component such as a semiconductor element.

  A number of semiconductor elements are produced on a Si wafer in a process called a pre-process, and then separated into individual pieces in a process called a post-process, and then subjected to processes such as electrical characteristic inspection, characteristic classification, marking, and appearance inspection. After that, they are packed in a tape or container tube and shipped.

  Such a semiconductor element is held by a holding mechanism and transported by a transport mechanism in a process after being separated into individual pieces, and various processes are performed in each process processing unit provided along the transport path. The

  Among such process processes, in the electrical characteristic inspection for measuring and inspecting the voltage, current, resistance, frequency, etc. of the semiconductor element, the test contact is made in contact with the electrode of the semiconductor element, as shown in FIG. As described above, in a method in which one test contact is brought into contact with one electrode, that is, a so-called single method, an accurate value cannot be measured when the contact resistance value upon contact is high. Therefore, as shown in FIG. 4B, a so-called Kelvin method is generally used in which two test contacts with insulation are brought into contact with one electrode.

  However, when the electrode width is very small, such as 100 μm or less, the gap between the plurality of contacts is inevitably narrow, and it is difficult to ensure the necessary insulation with this narrow gap. In addition, with this miniaturization, the density and precision of the manufacturing apparatus are required at a higher level, so that the test contacts themselves are very expensive.

As such a test contact, conventionally, as shown in FIG. 5A, a structure in which a plurality of contacts are laminated so as to sandwich an insulating sheet (Patent Document 1) and FIG. As shown in the drawing, a structure in which a plurality of contacts are formed by hardening with an adhesive or a resin is known.
JP 2004-170360 A

  However, the conventional test contacts as described above have the following problems. That is, in the test contact configured by sandwiching the insulating sheet, the insulating sheet sandwiched between the contact gaps may be broken and the contacts may be short-circuited, and a necessary insulation degree between the contacts cannot be ensured. In addition, since only an insulating sheet is provided between a plurality of contacts, and there is no guide that uniforms the interval between the plurality of contacts, the minimum insulating gap required between the contacts is ensured uniformly over the entire length of the contacts. I couldn't.

  In addition, test contacts made of adhesive or resin, etc., have a very narrow minimum insulation gap, so the method of hardening with adhesive or resin itself is difficult, and in fact, it must be manufactured almost manually. There were problems in terms of manufacturing efficiency and cost.

  The present invention has been proposed in order to solve the above-described problems of the prior art. The purpose of the present invention is to make the gap between the contacts uniform and arbitrarily set according to the specifications of the electronic component. An object of the present invention is to provide a test contact for inspecting electrical characteristics of an electronic component such as a semiconductor element, which can be set and controlled and can ensure a necessary insulation degree.

  In order to achieve the above object, a first aspect of the present invention provides a test contact for inspecting electrical characteristics of a component by contacting the contact with an electrode of an electronic component such as a semiconductor element. A granular insulating resin that has high heat resistance and is not deformed, and an insulating material that adheres the contacts are sandwiched therebetween.

  In the invention of claim 1 as described above, since not only the insulating material but also the insulating resin is sandwiched and laminated in the gap of the contact, the gap of the contact is defined by the size of the insulating resin. In addition, it is possible to ensure insulation and a uniform gap. Further, by adjusting the size of the insulating resin, the gap between the two contacts can be arbitrarily designed according to the specifications of the electronic component, and the gap can be made uniform. As a result, it is possible to perform an accurate electrical characteristic inspection according to the specifications of the electronic component, and it is possible to easily manufacture even a test contact having a very small minimum insulation gap.

According to a second aspect of the invention, in the first aspect of the invention, the insulating resin is formed in a spherical shape.
In claim 2 as described above, since the insulating resin that guides the contact interval is formed in a spherical shape, when the contacts are bonded together, the contact gap becomes the diameter of the spherical insulating resin. The gap between the two contacts can be arbitrarily designed according to the specifications of the electronic component, and the gap can be made uniform.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the insulating material is made of a curable resin or a flexible resin.
In claim 3 as described above, when the insulating material for adhering the contacts is made of a curable resin, it is possible to reliably contact the electrodes of the electronic component by increasing the rigidity of the contacts. . In addition, when the insulating material is made of a flexible resin, the contact can have a degree of freedom. For example, even when the electrodes of the electronic component are provided with an inclination, A plurality of contacts can be accurately brought into contact with the electrode.

The invention of claim 4 is the invention according to any one of claims 1 to 3, wherein the contact is plate-shaped or needle-shaped.
According to the fourth aspect as described above, the shapes of the two contacts can be arbitrarily selected such as a plate shape and a needle shape according to the specifications of the electronic component. Therefore, it is possible to perform an accurate electrical characteristic inspection that matches the specifications of the electronic component.

  According to the present invention as described above, the gap between contacts can be set uniformly according to the specifications of the electronic component, that is, the width of the electrode of the electronic component, and the required insulation can be obtained. A test contact for inspecting electrical characteristics of an electronic component such as a semiconductor element that can be secured can be provided.

  Next, the best mode for carrying out the present invention (hereinafter referred to as an embodiment) will be described with reference to FIGS.

  As shown in FIG. 1, the test contact 1 of the present embodiment has, for example, two contacts 2 made of beryllium copper having a thickness of 0.1 mm and an insulating adhesive 3 applied to the contact 2. Insulating spherical resin 4 (diameter 50 μm) is dispersed in insulating adhesive 3 to bond two contacts 2 together. The gap between the contacts 2 is kept uniform with the diameter of the insulating spherical resin 4. And the front-end | tip part of the contact 2 contacts the electrode of an electronic component, and it is comprised so that an electrical test | inspection of an electronic component may be performed.

  Here, the insulating adhesive 3 is made of a thermosetting material, and is cured when a certain amount of heat is applied. The insulating spherical resin 4 is made of a material that has high heat resistance and does not deform due to heat.

  Next, a method for manufacturing such a test contact 1 will be described with a specific example. First, two pieces of beryllium copper having a length and width of 5 mm × 20 mm and a thickness of 0.1 mm constituting the contact 2 are prepared (contacts 2a and 2b). Next, an insulating adhesive 3 is applied onto the contacts 2a and 2b in a 15 mm section as shown in FIG. As the adhesive 3, for example, EW2010 (trademark) manufactured by Sumitomo 3M is used.

  Further, a spherical resin 4 having a diameter of 50 μm is sprayed on a section of the two contacts 2a and 2b where the adhesive 3 of the contact 2a is applied. In addition, as this spherical resin 4, Micropearl (registered trademark) manufactured by Sekisui Chemical Co., Ltd. is used. And as shown in FIG.2 (b), the surfaces which apply | coated the adhesive agent of these two contacts 2a and 2b are bonded together.

  Next, the contacts 2a and 2b to which the adhesive 3 is applied are placed in a thermostatic bath and kept at a temperature of 120 ° C. for 60 minutes to be cured.

  As shown in FIG. 2 (b), the test contact 1 created in this way has an insulating spherical resin 4 sandwiched so that the gap between the contacts 2 is always uniform, and the insulation always required at any measurement point. It can be seen that the degree can be secured.

  According to the present embodiment as described above, the gap between the two contacts can be controlled to an arbitrary gap by appropriately adjusting the size of the insulating resin in accordance with the specification of the electronic component to be inspected. And the gap can be made uniform. Therefore, it is possible to ensure a necessary insulation degree between the contacts. Accordingly, an accurate electrical characteristic inspection can be performed in accordance with the specifications of the electronic component, and even a test contact with a narrow gap between contacts can be easily manufactured. Moreover, even if the contacts are mass-produced, variation in the insulation degree can be suppressed.

[Other Embodiments]
The present invention is not limited to the embodiment as described above, and includes the following embodiment. That is, the shape of the contact is not limited to the rectangular shape as described above, and can be configured as a needle-shaped contact as shown in FIG. 3 according to the specification of the electronic component to be subjected to the electrical inspection. is there. In this case, as in FIG. 2, two needle-shaped contacts are prepared, a guide is attached to the side, the adhesive is applied between the contacts, and a spherical resin is sprayed thereon. Then, it can manufacture by bonding two contacts, putting in a thermostat, and making it harden | cure.

  Further, as a method for producing the test contact in the above embodiment, the contact is bonded and then put into a thermostatic bath and stuck. However, the present invention is not limited to this. It can be appropriately changed, such as curing at room temperature or curing at room temperature. Further, when the insulating material is in the form of a sheet, the contacts on both sides may be thermocompression bonded after embedding an insulating resin in one of the contacts.

  Furthermore, whether the insulating resin is made of a curable material or a flexible material can be appropriately changed according to the type of electronic component. As a result, when the insulating material is made of a curable resin, it is possible to reliably contact the electrode of the electronic component by increasing the rigidity of the contact, and when the insulating material is made of a flexible resin. Since the contact can have a degree of freedom, for example, even when an electrode of an electronic component is provided with an inclination, a plurality of contacts are accurately brought into contact with the electrode. Will be able to.

  The specific dimensions of the test contacts shown in the above embodiment are all arbitrary. In particular, the size of the insulating spherical resin can be appropriately changed according to the standard of the electronic component to be processed.

The figure which shows the whole structure of the test contact in embodiment of this invention. The schematic diagram which shows the manufacture process of the test contact in embodiment of this invention. The figure which shows the whole structure of the test contact in other embodiment of this invention. The schematic diagram which shows the structure of the conventional test contact. The schematic diagram which shows the structure of the conventional test contact.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Test contact 2, 2a, 2b ... Contact 3 ... Insulating adhesive 4 ... Insulating spherical resin 5 ... Needle-shaped contact

Claims (4)

In the test contact that inspects the electrical characteristics of the component by contacting the contact with the electrode of the electronic component such as a semiconductor element,
A test contact comprising a plurality of the contacts, wherein a granular insulating resin that has high heat resistance and is not deformed, and an insulating material that adheres the contacts are sandwiched between the contacts.   The test contact according to claim 1, wherein the insulating resin is formed in a spherical shape.   The test contact according to claim 1, wherein the insulating material is made of a curable resin or a flexible resin.   The test contact according to claim 1, wherein the contact has a plate shape or a needle shape.

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