JP2006172580A - Magnetic transfer method, magnetic transfer device and perpendicular magnetic recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform easy and appropriate magnetic transfer to a perpendicular magnetic recording medium. <P>SOLUTION: A recording medium 2, having a perpendicular magnetic recording layer 22 and patterned master support 3 in which, on a surface of a nonmagnetic substrate 31, a magnetic layer pattern consisting of a magnetic element 32 mutually isolated in accordance with a required transfer pattern are formed using a magnetic field generating means 5 consisting of a main pole 6 having an end face 6a of a designated area, an auxiliary magnetic pole 7 having an end face 7a sufficiently larger area than the end surface 6a of the main pole 6, a coil 8 wound around the auxiliary magnetic pole 7, a connection magnetic member 9 for connecting the main pole 6 and the auxiliary magnetic pole 7, is arranged so that the master carrier 3 is at the side of the main pole 6 and the auxiliary magnetic pole 7 in a state where suface on the side of the magnetic layer pattern of master support 3 and the surface on the side of the perpendicular magnetic recording layer 22 of the recording medium 2 are closely contacted, current is fed to the coil 8, the transfer pattern expressed by the magnetic layer pattern is transferred as a perpendicular magnetization pattern in the perpendicular magnetic recording layer 22 by a perpendicular magnetic field Hdu1 generated in neighborhood of the main pole 6 when the current is fed to the coil 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a magnetic transfer method and apparatus for magnetically transferring a magnetic pattern corresponding to a transfer pattern from a patterned master carrier having a desired transfer pattern on the surface thereof to a recording medium having a magnetic layer, and more particularly to a magnetic layer. The present invention relates to a method and apparatus for magnetic transfer to a recording medium having a perpendicular magnetic recording layer, and a perpendicular magnetic recording medium.

  In general, with the increase in the amount of information, a magnetic recording medium is desired that has a large capacity for recording a large amount of information, is inexpensive, and can read out a necessary portion preferably in a short time and can perform so-called high-speed access. It is rare. For example, a high-density magnetic recording medium (magnetic disk medium) used in a hard disk device or a flexible disk device is known, and in order to realize a large capacity, a magnetic head accurately scans a narrow track width, A so-called tracking servo technique for reproducing a signal with a high S / N ratio plays a major role. In order to perform this tracking servo, a servo signal for tracking, an address information signal, a reproduction clock signal, and the like are recorded in a so-called preformat on the disk at certain intervals.

  As a method for accurately and efficiently performing this preformatting, Patent Documents 1 and 2 disclose a magnetic transfer method in which information such as a servo signal carried by a master carrier is magnetically transferred to a magnetic recording medium.

  This magnetic transfer is performed by applying a transfer magnetic field in a state where a master carrier having a concavo-convex pattern corresponding to information to be transferred to a magnetic recording medium (slave medium) such as a magnetic disk medium and a slave medium are in close contact with each other. The magnetic pattern corresponding to the information (for example, servo signal) carried by the concave / convex pattern on the carrier is transferred to the slave medium, and recording can be performed statically without changing the relative positions of the master carrier and the slave medium. Therefore, there is an advantage that accurate preformat recording is possible and the time required for recording is extremely short.

  By the way, as the magnetic recording medium, an in-plane magnetic recording medium having an easy axis in the in-plane direction of the magnetic layer and a perpendicular magnetic recording medium having an easy axis in the direction perpendicular to the magnetic layer can be considered. Conventionally, an in-plane magnetic recording medium has been generally used, and the above-mentioned Peripheral Documents 1 and 2 and the like also describe magnetic transfer for the in-plane magnetic recording medium as a main object. On the other hand, the use of a perpendicular magnetic recording medium is expected to further increase the capacity as compared with the in-plane magnetic recording medium.

It is considered that magnetic transfer to a perpendicular magnetic recording medium requires different magnetic field applying means and conditions than magnetic transfer to an in-plane magnetic recording medium. Also, an apparatus and a method for magnetic transfer to this perpendicular magnetic recording medium have been proposed in Patent Documents 3 to 5.
JP 10-40544 A Japanese Patent Laid-Open No. 10-269566 JP 2002-83421 A JP 2002-342923 A JP 200345024 A

  Patent Documents 3 to 5 describe a vertical magnetic field applying apparatus and method for performing magnetic transfer to a perpendicular magnetic recording medium, and further, transfer to a perpendicular magnetic recording medium has better signal quality, more Development of a magnetic transfer method and apparatus for simple execution is desired.

  In view of the above circumstances, an object of the present invention is to provide a magnetic transfer method and apparatus for easily and satisfactorily performing magnetic transfer on a perpendicular magnetic recording medium.

The magnetic transfer method of the present invention comprises a main magnetic pole having an end face of a predetermined area, an end face having an area sufficiently larger than the predetermined area, a coil to which a current for generating a magnetic field is passed, and a magnetic member And an auxiliary magnetic pole connected to the main magnetic pole by
A patterned master carrier having a magnetic layer pattern formed of independent magnetic elements corresponding to a desired transfer pattern on the surface of a nonmagnetic substrate, and a recording medium having a perpendicular magnetic recording layer, the magnetic layer pattern A surface having the perpendicular magnetic recording layer in close contact, and an end surface of the main magnetic pole and an end surface of the auxiliary magnetic pole are disposed to face the back surface of the nonmagnetic substrate of the patterned master carrier, and current is supplied to the coil. The transfer pattern represented by the magnetic layer pattern is transferred to the perpendicular magnetic recording layer as a perpendicular magnetization pattern by a magnetic field generated in the vicinity of the main magnetic pole when a current flows through the coil. .

The magnetic transfer apparatus of the present invention is provided on a recording medium using a patterned master carrier in which a magnetic layer pattern composed of independent magnetic elements corresponding to a desired transfer pattern is formed on the surface of a nonmagnetic substrate. A magnetic transfer device for transferring the transfer pattern represented by the magnetic layer pattern as a magnetization pattern to a perpendicular magnetic recording layer,
A main pole having an end face of a predetermined area;
An auxiliary magnetic pole having an end face with an area sufficiently larger than the predetermined area;
A coil wound around the auxiliary magnetic pole and carrying a current for generating a magnetic field;
It consists of a connecting magnetic member that connects the main magnetic pole and the auxiliary magnetic pole at portions other than the respective end faces,
The end face of the main magnetic pole and the end face of the auxiliary magnetic pole are opposed to the back surface of the non-magnetic substrate of the patterned master carrier, and are provided with magnetic field generating means arranged at a predetermined distance in the extending direction of the back surface. It is characterized by this.

  It is desirable that the maximum length in the track direction of the end face of a predetermined area is larger than the maximum bit length of the transfer pattern of the patterned master carrier.

  Here, the “close contact” includes not only a state in which they are completely in close contact but also includes a state in which they are arranged close to each other at a uniform interval.

  The “track direction” means a direction that coincides with the arrangement direction of the bits of the transfer pattern when magnetic transfer is actually performed from the patterned master carrier to the recording medium.

  The “patterned master carrier in which magnetic layer patterns made of magnetic elements isolated from each other in accordance with a desired transfer pattern are formed on the surface of a nonmagnetic substrate” is made of a nonmagnetic material having an uneven pattern on the surface. Consisting of a substrate and a magnetic element embedded only in the concave / convex concave portion, a substrate made of a non-magnetic material having a concave / convex pattern on the surface, and a magnetic element provided only on the convex upper surface of the concave / convex, Examples thereof include a flat substrate made of a magnetic material and a magnetic element arranged on the substrate in a pattern. The patterned master carrier may have a protective layer, a lubricant layer, etc. laminated on the surface.

  The “area sufficiently larger than the predetermined area” means an area that is 2 or more, more preferably 10 or more with respect to the predetermined area 1.

  The perpendicular magnetic recording medium of the present invention is characterized in that a perpendicular magnetization pattern is transferred to a perpendicular magnetic recording layer by the magnetic transfer method of the present invention.

  In the magnetic transfer method of the present invention, a main magnetic pole having an end face of a predetermined area, an end face having an area sufficiently larger than the predetermined area, a coil through which a current for generating a magnetic field is passed, and a magnetic member is used. Since the auxiliary magnetic pole connected to the main magnetic pole is used, when a magnetic field is generated between the main magnetic pole and the auxiliary magnetic pole, a strong vertical magnetic field generated by the concentration of the magnetic flux in the vicinity of the main magnetic pole is transferred. The transfer pattern of the patterned master carrier in which the magnetic layer pattern composed of the magnetic elements isolated from each other according to the desired transfer pattern is formed on the surface of the nonmagnetic substrate can be used as the perpendicular of the recording medium. The magnetic recording layer can be satisfactorily transferred as a perpendicular magnetization pattern. By using a non-magnetic substrate and a magnetic layer pattern comprising independent magnetic elements provided on the substrate as the patterned master carrier, each magnetic element of the patterned master carrier and its surface The magnetic flux from the auxiliary magnetic pole toward the main magnetic pole efficiently enters the magnetic recording layer portion of the recording medium, and a good transfer magnetic field (perpendicular magnetic field) can be generated in the vicinity of the main magnetic pole.

  The magnetic transfer apparatus of the present invention is provided on a recording medium using a patterned master carrier in which a magnetic layer pattern composed of independent magnetic elements corresponding to a desired transfer pattern is formed on the surface of a nonmagnetic substrate. A magnetic transfer device for transferring a transfer pattern represented by a magnetic layer pattern to a perpendicular magnetic recording layer as a perpendicular magnetization pattern, wherein the main magnetic pole has an end face of a predetermined area, and has an area sufficiently larger than the predetermined area. An auxiliary magnetic pole having an end face; a coil wound around the auxiliary magnetic pole through which a current for generating a magnetic field flows; and a connecting magnetic member that connects the main magnetic pole and the auxiliary magnetic pole at portions other than the respective end faces. The end face of the magnetic pole and the end face of the auxiliary magnetic pole face the back surface of the non-magnetic substrate of the patterned master carrier, and are arranged at a predetermined distance in the extending direction of the back surface. Magnetic field generating means is provided, so that a strong perpendicular magnetic field can be generated in the vicinity of the main magnetic pole, and the transfer pattern of the patterned master carrier can be satisfactorily transferred as a magnetization pattern to the perpendicular magnetic recording layer of the recording medium. .

  In particular, the transfer quality can be improved by making the maximum length in the track direction of the end face of the main pole in a predetermined area larger than the maximum bit length of the transfer pattern of the patterned master carrier.

  The perpendicular magnetic recording medium of the present invention can have a perpendicular magnetic recording layer in which a perpendicular magnetization pattern is transferred with high quality by the magnetic transfer method of the present invention.

  Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 is a perspective view of a main part of a magnetic field generating means of a magnetic transfer method and a magnetic transfer apparatus according to a first embodiment of the present invention, and FIG. 2 is a partially enlarged view of a section taken along line II-II in FIG. .

  The magnetic field generating means 5 shown in FIG. 1 uses a patterned master carrier in which magnetic layer patterns composed of magnetic elements independent of each other according to a desired transfer pattern are formed on the surface of a nonmagnetic substrate. A magnetic transfer apparatus for transferring a transfer pattern shown as a magnetization pattern to a perpendicular magnetic recording layer provided on a recording medium. The main magnetic pole 6 has an end face 6 a having a predetermined area, and the main magnetic pole 6. The auxiliary magnetic pole 7 having an end face 7a having a sufficiently larger area than the end face 6a, the coil 8 wound around the auxiliary magnetic pole 7, and the main magnetic pole 6 and the auxiliary magnetic pole 7 are connected at portions other than the end faces 6a and 7a. The connecting magnetic member 9 is made of a magnetic material. The main magnetic pole 6, the auxiliary magnetic pole 7 and the connecting magnetic member 9 may be constituted by one continuous member or may be constituted by connecting them. The main magnetic pole 6 and the auxiliary magnetic pole 7 have at least a width ranging from the smallest radius track to the largest radius track of the recording medium 2 so that the respective end faces 6a and 7a face the back surface of the substrate of the patterned master carrier, and Both end surfaces 6a and 7a are arranged at a predetermined distance in the extending direction of the back surface. Note that the magnetic transfer device rotates the disc-shaped recording medium 2 and the disc-shaped patterned master carrier 3 disposed in opposition to the end faces of the main magnetic pole 6 and the auxiliary magnetic pole 7 in the direction of arrow A. Rotating means (not shown) is provided.

  The recording medium 2 and the master carrier 3 are arranged such that the master carrier 3 is on the both magnetic poles 6 and 7 side in a state where the magnetic recording surface and the information carrying surface are in close contact.

  The patterned master carrier 3 of this embodiment is formed in a disk shape, and has a magnetic layer pattern corresponding to information to be transferred to a recording medium as a slave medium as a transfer pattern on the surface thereof. The master carrier 3 includes a nonmagnetic substrate 31 and magnetic elements 32 formed on the substrate 31 in a convex pattern. The master carrier 3 preferably has a magnetic layer partially. For example, the master carrier 3 preferably has a magnetic layer only on the convex portion rather than the magnetic layer on the entire concave and convex portion of the substrate 31. Further, the magnetic element 32 may be embedded in the concave portion of the surface unevenness pattern of the substrate 31 to make the surface flat. By applying a magnetic field by bringing the information carrying surface carrying the transfer pattern of the master carrier 3 into close contact with the magnetic recording layer of the recording medium 2, a magnetization pattern corresponding to the transfer pattern carried by the master carrier 3 is applied to the magnetic recording layer. Transcript.

  The recording medium 2 as a slave medium of the present embodiment is a disk-shaped magnetic recording medium such as a hard disk or a flexible disk having a magnetic recording layer formed on both sides, and in particular, the direction of easy magnetization of the magnetic recording layer is the recording surface. The perpendicular magnetic recording medium is formed in a direction perpendicular to the vertical direction. This recording medium 2 is a perpendicular magnetic recording medium capable of double-sided recording, in which perpendicular magnetic recording layers 22 and 23 are formed on both sides of a disk-shaped substrate 21, respectively. Note that soft magnetic layers 24 and 25 are disposed between the perpendicular magnetic recording layers 22 and 23 of the recording medium 2 and the substrate 21 in order to stabilize the magnetization.

  In the magnetic field generating means 5 shown in FIG. 1, a magnetic field is generated between the auxiliary magnetic pole 7 and the main magnetic pole 6 by passing a current through the coil 8. As shown in FIG. 2, the magnetic flux 10 emitted from the end face 7 a of the auxiliary magnetic pole 7 passes through the magnetic element 32 of the master carrier 3, the perpendicular magnetic recording layer 22 and the soft magnetic layer 24 of the recording medium 2, and the end face of the main pole 6. It converges to 6a. At this time, a vertical magnetic field having a large magnetic flux density is generated in the vicinity immediately below the main magnetic pole 6. Since the magnetic flux 10 is concentrated on the magnetic element 32a directly below the main pole 6 in the magnetic layer pattern facing the perpendicular magnetic recording layer 22 of the recording medium 21, the portion of the perpendicular magnetic recording layer 22 facing this magnetic element 32a Thus, the transfer magnetic field Hdu1 is applied.

  Here, since the magnetic circuit is constituted by the main magnetic pole 6, the auxiliary magnetic pole 7, the coupling magnetic member 8, the master carrier 4, and the recording layer 22 and the soft magnetic layer 23 of the recording medium 2, a very stable magnetic field is generated. be able to.

  A transfer magnetic field can be applied to the entire surface of the recording medium 2 by causing the master carrier 3 and the recording medium 2 in close contact with the magnetic field generating means 5 to rotate one or more times in the direction of arrow A.

  The track width L0 (see FIG. 2) of the end face 6a of the main pole 6 is longer than the maximum bit length Lmax of the magnetic layer pattern of the master carrier 3. For the maximum bit length of this magnetic layer pattern, the distance between the magnetic elements where the magnetic element does not exist is also regarded as one bit, and the bit length of the magnetic element and the bit length of the part where the magnetic element does not exist between the magnetic elements The biggest thing. When the width L0 of the main magnetic pole 6 is shorter than the maximum bit length Lmax of the magnetic layer pattern, the magnetic flux that should be concentrated on the magnetic element does not pass through the magnetic element when the magnetic pole is directly above the portion where no magnetic element exists. There is a possibility that the magnetic field pattern directly enters a portion where the magnetic element does not exist. For this reason, there is a possibility that a part of the magnetic recording layer of the recording medium which should not be reversed is partially reversed. In the present embodiment, since the track direction width L0 of the end face 6a of the main pole 6 is longer than the maximum bit length Lmax, the quality of magnetic transfer can be improved.

  Next, a magnetic transfer method using the transfer magnetic field applying means 1 shown in FIG. 1 will be described. FIG. 3 shows a basic process diagram of the magnetic transfer method of the present embodiment, which will be described with reference to this.

  First, initial DC magnetization of the magnetic layers 22 and 23 of the recording medium 2 is performed by an initial DC magnetization means (not shown). That is, as shown in FIG. 3A, an initial direct current magnetic field Hin in a direction perpendicular to the magnetic layers 22 and 23 is applied to cause the magnetic layer to undergo initial direct current magnetization.

  Thereafter, the information carrier surface of the master carrier 3 is brought into close contact with the surface of the recording medium 2 on the magnetic layer 22 side, and the master carrier 3 is disposed on the main magnetic pole 6 side. The recording medium 2 and the master carrier 3 are arranged so that the radial direction thereof coincides with the direction in which the end face 6a of the magnetic pole 6 extends.

  Thereafter, a current is passed through the coil 8 to apply a transfer magnetic field Hdu1 opposite to the initial magnetization direction to the magnetic recording layer 22 in close contact with the magnetic layer pattern of the master carrier 3, as shown in FIG. As a result, the magnetization of the portion of the magnetic recording layer 22 facing the magnetic element 32 of the master carrier 3 is reversed. As described above, the magnetic field Hdu1 is absorbed by the magnetic element 32 of the master carrier 3 where the recording medium 2 and the magnetic element 32 of the magnetic layer pattern of the master carrier 3 are in close contact, and the magnetic recording layer 22 corresponding to this portion. The magnetization of the portion of the magnetic recording layer 22 corresponding to the portion of the master carrier 3 where the magnetic element 32 does not exist is not reversed. As a result, as shown in FIG. 3B, information (for example, servo signal) corresponding to the magnetic layer pattern of the master carrier 3 is transferred to the magnetic recording layer 22 of the recording medium 2 as a magnetization pattern. At this time, as shown in FIG. 2, a perpendicular magnetic field is also applied to the magnetic layer pattern of the master carrier 3 and the portion immediately below the auxiliary magnetic pole 7 of the magnetic recording layer 23 of the recording medium 2, but the magnetic flux density on the auxiliary magnetic pole side Therefore, the magnetization of the magnetic recording layer 23 in this part does not reverse.

  With the transfer magnetic field Hdu1 applied, the recording medium 2 and the master carrier 3 that are brought into close contact with the magnetic field generating means 5 are rotated once in the direction of arrow A by a rotating means (not shown) so that the magnetism over the entire surface of the recording medium 2 is achieved. Transcription. The recording medium 2 and the master carrier 3 may be fixed and the magnetic field generating means 5 may be rotated.

  Once the current of the coil 8 is stopped, the main magnetic pole 6 and the auxiliary magnetic pole 7 are sufficiently separated, the master carrier 3 and the recording medium 2 are taken out, the adhesion between the master carrier 3 and the recording medium 2 is released, and the recording medium 2 The master carrier 4 for the recording layer 23 is brought into close contact with the magnetic recording layer 23 side. Similar to the master carrier 3, the master carrier 4 includes a nonmagnetic substrate 41 and magnetic elements 42 formed on the surface thereof in a convex pattern. This is different from the master carrier 3 only in that the transfer pattern is for the magnetic recording layer 23. Thereafter, the recording medium 2 and the master carrier 4 that are in close contact with each other are arranged so that the master carrier 4 is on the main magnetic pole 6 side, and magnetic transfer to the magnetic recording layer 23 of the recording medium 2 is performed in the same manner as the previous procedure. Perform (see FIG. 3C). A portion of the magnetic recording layer 23 facing the magnetic element 42 of the master carrier 4 by applying a transfer magnetic field Hdu2 opposite to the initial magnetization direction to the magnetic recording layer 23 in close contact with the magnetic element 42 of the master carrier 4 Is reversed. In this case, since the magnetic recording medium 2 itself is upside down from the case where the transfer to the magnetic recording layer 22 is performed, a transfer magnetic field Hdu2 opposite to the initial magnetization direction of the magnetic recording layer 23 is applied. In order to apply, it is necessary to flow a current in the direction opposite to that when applying the transfer magnetic field Hdu1 to the coil 8.

  As described above, perpendicular magnetization patterns are formed on both magnetic recording layers 23 and 24 of the recording medium 2 as shown in FIG. In FIG. 3, the magnetization patterns of the magnetic recording layers 23 and 24 of the recording medium 2 are the same, but the arrangement of the magnetization patterns on the front and back is not necessarily the same.

  According to the magnetic transfer apparatus of the present embodiment, it is possible to easily perform magnetic transfer to a perpendicular magnetic recording medium and to achieve good magnetic transfer. By enabling good magnetic transfer to the perpendicular magnetic recording medium, it is possible to easily obtain a recording medium having a larger capacity than a conventional high-density in-plane magnetic recording medium.

  The initial DC magnetic field and transfer magnetic field need to adopt values determined in consideration of the coercivity of the magnetic recording layer of the recording medium, the relative permeability of the master carrier and the slave medium, and the like. However, the strength of the magnetic field for transfer is preferably 0.5 to 2 times the coercivity Hcs of the slave medium.

  In the first embodiment, the magnetic transfer to each surface of the recording medium having the perpendicular magnetic recording layer on both surfaces is sequentially performed. However, both surfaces of the recording medium are simultaneously adhered to the master carrier at the same time. Magnetic transfer may be performed.

  FIG. 4 is a perspective view of a magnetic field generating means provided in the magnetic transfer apparatus of the second embodiment when performing double-sided simultaneous magnetic transfer. Elements similar to those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the present embodiment, in addition to the first magnetic field generating means 5 similar to that shown in FIG. 1, a second magnetic field generating means 5 'is further provided. The first magnetic field generating means 5 is used exclusively for applying a transfer magnetic field for transferring the transfer pattern of the upper master carrier 3 to the perpendicular magnetic recording layer of the recording medium 2 facing the master carrier 3. The second magnetic field generating means 5 ′ is exclusively used for transferring the transfer pattern of the lower master carrier 4 to the perpendicular magnetic recording layer of the recording medium 2 facing the master carrier 4.

  The second magnetic field generating means 5 ′ has a main magnetic pole 16 having an end face 16 a having a predetermined area disposed on the side facing the back surface of the lower master carrier 4, and an area sufficiently larger than the end face 16 a of the main magnetic pole 16. An auxiliary magnetic pole 17 having an end face 17a, a coil 18 wound around the auxiliary magnetic pole 17 and carrying a current for generating a magnetic field, and the main magnetic pole 16 and the auxiliary magnetic pole 17 are connected at portions other than both end faces 16a and 17a. And a connecting magnetic member 19 made of a magnetic material. The area, ratio, and the like of the end face 16a of the main magnetic pole 16 and the end face 17a of the auxiliary magnetic pole 17 are the same as the relationship between the main magnetic pole 6 and the auxiliary magnetic pole 7 of the first magnetic field generating means 5.

  The first magnetic field generating means 5 applies an electric current to the coil 8 to apply a transfer magnetic field of Hdu1 to the magnetic recording layer facing the upper master carrier 3 of the recording medium 2, and the second magnetic field generating means 5 ' A current is passed through the coil 18 to apply a transfer magnetic field of Hdu2 to the magnetic recording layer facing the lower master carrier 4 of the recording medium 2.

  As in the case of the first embodiment, the recording medium 2 can be obtained by rotating the closely attached master carriers 3 and 4 and the recording medium 2 in the direction of arrow A one or more times in a state where current is passed through the coils 8 and 18. Magnetic transfer to the entire surface can be performed.

  The patterned master carrier 3 and the recording medium 2 of each of the above embodiments will be described more specifically. As described above, the patterned master carrier 3 includes the substrate 31 made of a nonmagnetic material having a concavo-convex pattern on the surface, and the magnetic element 32 embedded in the concave portion of the substrate 31. The substrate 31 may be made of a non-magnetic material, and examples of the material include Si and glass. The substrate 31 having a concavo-convex pattern on the surface can be produced using a photolithography method or the like. The convex part height (concave part depth) of a board | substrate is 50-800 nm, for example, the radial direction length of the convex part of an uneven | corrugated pattern is 0.05-20 micrometers, and the circumferential direction is 0.05-5 micrometers.

  Examples of the magnetic material of the magnetic layer 32 include Co, Co alloys (CoNi, CoNiZr, CoNbTaZr, etc.), Fe, Fe alloys (FeCo, FeCoNi, FeNiMo, FeAlSi, FeAl, FeTaN), Ni, and Ni alloys (NiFe). . As the magnetic layer 32, a magnetic layer having a small coercive force such as soft magnetism or semi-hard magnetism is mainly used. Note that the thickness of the magnetic layer (the thickness of the magnetic layer on the top surface of the convex portion) is 50 to 500 nm.

  In addition, a protective film such as diamond-like carbon (DLC) of 5 to 30 nm may be provided on the magnetic layer 32 in order to improve durability, and a lubricant layer may be further provided. Further, an adhesion reinforcing layer such as Si may be provided between the magnetic layer and the protective film.

  The patterned master carrier used in the magnetic transfer method and apparatus of the present invention is not limited to the master carrier of the above-described embodiment, and magnetic elements are provided only on the convex portions of the nonmagnetic substrate having the concavo-convex pattern. Or a magnetic element arranged in a pattern on a flat non-magnetic substrate.

  On the other hand, as described above, the recording medium 2 is a disk-shaped magnetic recording medium such as a hard disk or a high-density flexible disk. The magnetic recording layers 22 and 23 include a coating type magnetic recording layer or a metal thin film type magnetic recording layer. Is formed. The magnetic recording layers 22 and 23 are perpendicular magnetic recording layers having magnetic anisotropy having an easy axis of magnetization in a direction perpendicular to the track surface. As the magnetic material of the metal thin film type magnetic recording layer, Co, Co alloy (CoPtCr, CoCr, CoPtCrTa, CoPtCrNbTa, CoCrB, CoNi, etc.), Fe, Fe alloy (FeCo, FePt, FeCoNi) can be used. In order to give necessary magnetic anisotropy under the magnetic material (on the support side), it is preferable to provide a nonmagnetic underlayer. This nonmagnetic underlayer needs to match the crystal structure and lattice constant to the magnetic recording layer, and such materials include Ti, Cr, CrTi, CoCr, CrTa, CrMo, NiAl, Ru, Pd, etc. Is mentioned. Further, in order to stabilize the perpendicular magnetization state of the magnetic layer and to improve the sensitivity during recording and reproduction, a backing layer comprising soft magnetic layers 24 and 25 is further provided under the nonmagnetic underlayer.

  The magnetic recording layer thickness is preferably 10 nm or more and 500 nm or less, and more preferably 20 nm or more and 200 nm or less. The nonmagnetic layer thickness is preferably 10 nm or more and 150 nm or less, and more preferably 20 nm or more and 80 nm or less. Further, the backing layer thickness is preferably 50 nm or more and 2000 nm or less, more preferably 80 nm or more and 400 nm or less.

The perspective view of the magnetic field generation means with which the magnetic transfer apparatus concerning 1st embodiment is equipped. Partly enlarged view of the cross section taken along line II-II in FIG. Diagram showing basic steps of magnetic transfer method The perspective view of the magnetic field generation means with which the magnetic transfer apparatus concerning 2nd embodiment is equipped.

Explanation of symbols

2 perpendicular magnetic recording medium 3, 4 patterned master carrier 5, 5 'magnetic field generating means 6, 16 main magnetic pole 7, 17 auxiliary magnetic pole 8, 18 coil 9, 19 linked magnetic member
21 Recording media support
22, 23 Perpendicular magnetic recording layer
24, 25 Soft magnetic layer
31, 41 Master carrier substrate
32, 42 Magnetic element

Claims (4)

A main magnetic pole having an end face of a predetermined area, an end face having an area sufficiently larger than the predetermined area, a coil through which a current for generating a magnetic field flows is wound, and connected to the main magnetic pole by a magnetic member Using the auxiliary magnetic pole
A patterned master carrier having a magnetic layer pattern formed of independent magnetic elements corresponding to a desired transfer pattern on the surface of a nonmagnetic substrate, and a recording medium having a perpendicular magnetic recording layer, the magnetic layer pattern A surface having the perpendicular magnetic recording layer in close contact, and an end surface of the main magnetic pole and an end surface of the auxiliary magnetic pole are disposed to face the back surface of the nonmagnetic substrate of the patterned master carrier, and current is supplied to the coil. The transfer pattern represented by the magnetic layer pattern is transferred to the perpendicular magnetic recording layer as a perpendicular magnetization pattern by a magnetic field generated in the vicinity of the main magnetic pole when a current flows through the coil. Magnetic transfer method. Using a patterned master carrier in which magnetic layer patterns composed of magnetic elements independent of each other according to a desired transfer pattern are formed on the surface of a nonmagnetic substrate, the magnetic layer is applied to the perpendicular magnetic recording layer provided on the recording medium. A magnetic transfer device for transferring the transfer pattern represented by the layer pattern as a perpendicular magnetization pattern,
A main pole having an end face of a predetermined area;
An auxiliary magnetic pole having an end face with an area sufficiently larger than the predetermined area;
A coil wound around the auxiliary magnetic pole and carrying a current for generating a magnetic field;
It consists of a connecting magnetic member that connects the main magnetic pole and the auxiliary magnetic pole at portions other than the respective end faces,
The end face of the main magnetic pole and the end face of the auxiliary magnetic pole are opposed to the back surface of the non-magnetic substrate of the patterned master carrier, and are provided with magnetic field generating means arranged at a predetermined distance in the extending direction of the back surface. A magnetic transfer apparatus characterized by that.   3. The magnetic transfer apparatus according to claim 2, wherein the maximum length in the track direction of the end surface of the predetermined area is larger than the maximum bit length of the transfer pattern of the patterned master carrier.   A perpendicular magnetic recording medium, wherein a perpendicular magnetization pattern is transferred to a perpendicular magnetic recording layer by the magnetic transfer method according to claim 1.

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