JP2006133411A - Photomask delivery management system and photomask delivery management method - Google Patents

Abstract

Even a photomask using a radio wave absorber is managed by RFID tags to improve delivery efficiency and prevent erroneous delivery.
Product management data in a first RFID tag 15 attached to a pellicle frame 13 of a photomask 10 and product management data in a second RFID tag 45 attached to a product container 42 containing a photomask. Match. Thereafter, the product management data in the second RFID tag and the product management data in the third RFID tag 65 attached to the packing box 62 for packing the product container are collated. Thus, even when the radio wave absorbing material of the photomask weakens the radio wave of the first RFID tag from the outside of the packaging box, the second RFID tag that has been verified with the first RFID tag in advance and the third RFID tag outside the packaging box You can match tags. Therefore, the above problem can be solved.
[Selection] Figure 1

Description

  The present invention relates to a delivery management system and delivery management method capable of detecting an RFID tag in a packaging box, managing a product without unpacking, and preventing erroneous delivery, and in particular, a photo using a radio wave absorber. The present invention relates to a delivery management system and delivery management method for a mask.

  Conventionally, when managing the delivery of products, the operator visually checks the product, inspection table, other forms, etc., confirms the match, packs them in a packing box, and delivers them to the customer. Yes.

  On the other hand, in recent years, a method for managing an article by attaching an RFID tag to the article has become widespread. Since the RFID tag can be detected wirelessly in a non-contact manner, the attribute information of the article to which the RFID tag is attached can be examined from a remote location. Therefore, it is expected to be applied to improving the delivery efficiency when managing the delivery of the product, compared with the case where there is a manual verification operation. Specifically, since a visual check operation is not performed, application to a delivery management system capable of preventing erroneous delivery is expected.

As an application example of such a delivery management system, there is a delivery management system capable of verifying the number of products in the obtained packaging box by detecting the RFID tag in the packaging box without unpacking (for example, , See Patent Document 1).
JP 2004-91088 A

  However, in the above delivery management system, there are products that are difficult to manage with RFID tags. For example, a product using a radio wave absorbing material (pellicle frame) such as a photomask cannot detect because the radio wave becomes weak when an RFID tag is attached. For this reason, the RFID tag cannot be used for photomask delivery management, and the product, inspection table, other forms and the like are visually checked and packed in a cardboard box or the like, as in the past. Therefore, the delivery management of the photomask has low delivery efficiency and the possibility of erroneous delivery remains.

  The present invention has been made in view of the above circumstances, and a photomask delivery management system and a photomask that can deliver and manage even a photomask using a radio wave absorber by an RFID tag, improve delivery efficiency, and prevent erroneous delivery. An object is to provide a delivery management method.

  The invention corresponding to claim 1 is a photomask delivery management system for managing delivery of a photomask having a pellicle frame made of an electromagnetic wave absorbing material, and data storage means for storing product management data of the photomask; Write means for writing product management data in the data storage means to a first RFID tag affixed to the pellicle frame, and second RFID for issuing a second RFID tag in which product management data in the data storage means is written Tag verification means, product management data in the first RFID tag, and product verification means for verifying product management data in the second RFID tag affixed to a product container containing the photomask; As a result, when both coincide, the third R in which the product management data in the data storage means is written Third RFID tag issuing means for issuing an ID tag, product management data in the second RFID tag attached to the product container, and product management data in the third RFID tag attached to a packaging box for packing the product container Is a photomask delivery management system comprising: a packing collating unit that collates with each other; and an error output unit that outputs an error signal when they do not match as a result of the collation.

  According to a second aspect of the present invention, in the photomask delivery management system corresponding to the first aspect, the product management data in the third RFID tag and the data storage unit are stored in parallel with the verification by the packing verification unit. A photomask delivery management system further comprising latest data collating means for collating with the latest product management data.

  The invention corresponding to claim 3 is a photomask delivery management system corresponding to claim 1 or claim 2, further comprising a collation result recording means for recording a collation result by the packing collating means. is there.

  The invention corresponding to claim 4 is the photomask delivery management system according to any one of claims 1 to 3, wherein the first RFID tag, the second RFID tag, and the third RFID tag are 13.56 MHz. This is a photomask delivery management system that transmits and receives radio waves.

  The invention corresponding to claim 5 is the photomask delivery management system according to any one of claims 1 to 4, wherein the packing verification means is a product separately from the second and third RFID tags by radio. This is a photomask delivery management system that is a pair of gate antenna devices that have a function of reading management data and a function of collating each read product management data with a distance of about 1 m.

  An invention corresponding to claim 6 is a photomask delivery management method executed by a photomask delivery management system that manages delivery of a photomask having a pellicle frame made of a radio wave absorber, and includes data of the photomask delivery management system A storage step of storing the product management data of the photomask in a storage unit; a writing step of writing the product management data in the data storage unit into a first RFID tag affixed to the pellicle frame; and the data storage unit A second RFID tag issuance step for issuing a second RFID tag in which product management data is written, and when the second RFID tag is attached to a product container and the photomask is stored in the product container, the first RFID tag Product management data in the tag and product pipe in the second RFID tag A product collation step for collating data, a third RFID tag issuance step for issuing a third RFID tag in which product management data in the data storage means is written when both coincide with each other as a result of the collation, and the third RFID A packing collation step for collating product management data in the second RFID tag and product management data in the third RFID tag when a tag is attached to the packaging box and the product container is stored in the packaging box; This photomask delivery management method includes an error output step of outputting an error signal when the two do not match as a result of the collation.

  The invention corresponding to claim 7 is the photomask delivery management method corresponding to claim 6, wherein the product management data in the third RFID tag and the data storage means are stored in parallel with the verification in the packing verification step. The photomask delivery management method further comprises a latest data collating step for collating with the latest product management data.

  The invention corresponding to claim 8 is the photomask delivery management method corresponding to claim 7, wherein when the collation result is confirmed to be normal by the packaging collation step, the data storage means indicates that the packaging is normal. A photomask delivery management method further comprising a packing collation recording step for recording.

  According to a ninth aspect of the present invention, in the photomask delivery management method according to the sixth to eighth aspects, the sales destination of the photomask is recorded between the product verification step and the third RFID tag issuance step. The photomask delivery management method further comprises a sales processing step for performing the sales processing.

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Therefore, the invention corresponding to claim 1 is the product management data in the first RFID tag attached to the pellicle frame of the photomask and the product management data in the second RFID tag attached to the product container containing the photomask. Product verification means for verifying the product, product management data in the second RFID tag attached to the product container, and product verification data in the third RFID tag attached to the packaging box for packing the product container With the configuration including the means, after collating the photomask and the product container, the product container and the packaging box are collated.

  For this reason, even when the radio wave absorbing material of the photomask weakens the radio wave of the first RFID tag from the outside of the packaging box, the second RFID tag that has been verified with the first RFID tag in advance and the third RFID tag outside the packaging box You can match tags.

  Therefore, even in a photomask using a radio wave absorbing material, delivery management can be performed without unpacking using an RFID tag. In addition, since there is no need to visually check products, inspection tables, other forms, etc., and pack them in cardboard boxes, a photomask delivery management system that improves delivery efficiency and prevents misdelivery Can be provided.

  In the invention corresponding to claim 2, the latest data collating means collates the product management data in the third RFID tag and the latest product management data stored in the data storage means in parallel with the collation by the packing collating means. Therefore, in addition to the operation corresponding to claim 1, it is possible to verify whether or not the product management data recorded in the third RFID tag is up-to-date immediately before delivery of the packaging box in which the product container is packed. It is possible to provide a photomask delivery management system that can be more prevented.

In the invention corresponding to claim 3, since the packing collation recording means records the collation result by the packing collating means, in addition to the operation corresponding to claims 1 and 2, the delivery record can be confirmed periodically, and erroneous delivery is detected. A photomask delivery management system that can be prevented can be provided. Further, if necessary, the delivery destination operator can be connected to the server to obtain the delivery record, so that the delivery status can be confirmed.

  In the invention corresponding to claim 4, since the first RFID tag, the second RFID tag, and the third RFID tag transmit and receive radio waves in the 13.56 MHz band, the directivity of the antenna is wide. wide. That is, since collation can be easily performed and reliability is improved, in addition to the operation corresponding to claims 1 to 3, the possibility of erroneous delivery can be reduced.

  In the invention corresponding to claim 5, since the packing verification means is a gate antenna device arranged at an interval of about 1 m, verification by the RFID tag reader / writer can be performed reliably. That is, since reliability improves, in addition to the effect | action corresponding to Claims 1-4, the possibility of misdelivery can be reduced.

  According to a sixth aspect of the present invention, there is provided a product verification step for verifying product management data of the first RFID tag and product management data of the second RFID tag attached to a product container containing a photomask, and attaching the product management data to the product container. And a packing collation step for collating the second RFID tag and the third RFID tag affixed to the packaging box for packaging the product container. It is possible to provide a photomask delivery management method that can manage delivery using a RFID tag even with a photomask using an absorbing material, improve delivery efficiency, and prevent erroneous delivery.

  In the invention corresponding to claim 7, the latest data collation step collates the product management data in the third RFID tag with the latest product management data stored in the data storage means in parallel with the collation in the packing collation step. Therefore, in addition to the operation corresponding to claim 6, it is possible to verify whether or not the product management data recorded in the third RFID tag is up-to-date immediately before delivery of the packaging box in which the product container is packed. Can be provided.

  The invention corresponding to claim 8 records the fact that the packing is normal or abnormal in the data storage means when the verification result is confirmed in the packing verification step by the packing verification recording step. In addition to the actions corresponding to 6 and 7, it is possible to provide a photomask delivery management method capable of periodically checking delivery records and preventing erroneous delivery. Further, if necessary, the delivery destination operator can be connected to the server to obtain the delivery record, so that the delivery status can be confirmed.

  The invention corresponding to claim 9 is provided with a sales processing step for performing sales processing between the product verification step and the third RFID tag issuing step, in addition to the operation corresponding to claims 6-8, It is easy to process.

  As described above, according to the present invention, there is provided a photomask delivery management system and a photomask delivery management method that can deliver and manage even a photomask using a radio wave absorber by an RFID tag, improve delivery efficiency, and prevent erroneous delivery. Can be provided.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a schematic diagram showing a configuration of a photomask delivery management system according to the first embodiment of the present invention.

  This photomask delivery management system includes a server 20 that records product management data of a photomask 10, a first RFID tag reader / writer 30, a second RFID tag issuer 40, a product verification unit 50, and a third RFID tag. An issuing machine 60 and a packing verification machine 70 are provided.

  Here, the photomask 10 is a product used in the manufacture of a semiconductor element such as LSI or VLSI or a liquid crystal display device. In the photomask 10, the pattern formation surface is protected by the pellicle 11 in order to prevent generation of pattern defects during exposure due to dust adhering to the pattern formation surface.

  The pellicle 11 is configured by bonding a pellicle film 12 made of a material that transmits exposure light to a pellicle frame 13. A first RFID tag 15 is attached to the pellicle frame 13.

  The pellicle frame 13 is mainly made of a radio wave absorbing material such as various metals such as aluminum, titanium, silicon, and nickel alloy. Therefore, the pellicle frame 13 has a property of absorbing radio waves from the RFID tag reader / writer 30 for the attached first RFID tag 15 and reducing communication sensitivity.

  The first RFID tag 15 is attached to the pellicle frame 13 and product management data is written by the first RFID tag reader / writer 30. Here, an RFID tag that communicates at a frequency of 13.56 MHz band is used. As RFID tags, RFID tags of 13.56 MHz band, UHF band, and 2.45 GHz band are generally widespread. In the RFID tag, as shown in the concept of FIG. 2, when the communication frequency from the reader / writer is low (for example, 13.56 MHz band), the transmission distance is shortened, but the use area is widened (FIG. 2A). On the other hand, when the communication frequency is high (for example, 2.45 GHz band), the transmission distance becomes long, but the use area becomes narrow (FIG. 2B). If an RFID tag of 2.45 GHz band or the like is used in the product delivery management system, the use area of the RFID tag reader / writer used in the product verification machine 50 becomes narrow, making verification difficult and suitable for practical use. Disappear. For example, in FIG. 2, only 15b of the first RFID tags 15a, 15b, and 15c can be verified. Therefore, in the product delivery management system, an RFID tag that communicates at a frequency of 13.56 MHz band is used from the viewpoint of widening the use area.

  The server 20 is a server for product management in which product management data is recorded in a memory (not shown), and is connected so as to be accessible from each of the devices 30, 40, 50, 60, and 70 described above. The product management data is data such as a management number, delivery company name, delivery personal name, photomask ID, photomask name, order number, photomask plate, photomask material, photomask size, and remarks. .

  Further, the server 20 has a function of collating whether or not the product data written in the third RFID tag 65 matches the latest product management data when transmitted from the packing collator 70. When the product management data is matched, the fact that the packaging is normal is recorded, and when the product data is not matched, the fact that the packaging is abnormal is recorded.

  The first RFID tag reader / writer 30 is connected to the server 20, reads product management data from the server 20, and writes product management data to the first RFID tag 15. Also, it has a function of reading product management data from the first RFID tag 15 and updating product management data in the server 20. Furthermore, even if not connected to the server 20, the product management data recorded in the first RFID tag 15 is read and the product management data of the first RFID tag is directly written in another RFID tag.

  The second RFID tag issuer 40 is connected to the server 20, reads product management data from the server 20, and issues a second RFID tag 45 in which product management data is written. When the second RFID tag 45 is issued, it is issued in the form of a product label 41. The second RFID tag issuer 40 also has a function of printing product information or the like on the product label 41 when writing product management data on the second RFID tag 45. Thereby, the data printed on the product label 41 can also be confirmed visually.

  The second RFID tag 45 is an RFID tag issued by the second RFID tag issuer 40. Here, an RFID tag that communicates at a frequency of 13.56 MHz is used. For example, as shown in FIG. 3, the second RFID tag 45 is issued in a form in which an IC chip 45 ′ and an antenna 45 ″ are incorporated in a product label 41. The product label 41 stores the photomask 10 therein. Affixed to the product container 42.

  The product verification device 50 is an RFID tag reader / writer or the like for verifying the recorded contents of the first RFID tag 15 and the second RFID 45. The product collator 50 collates whether the product management data in the first RFID tag 15 and the product management data in the second RFID tag 45 match from the outside of the product container 42 in which the photomask 10 is stored. However, since the first RFID tag 15 is affixed to the pellicle frame 13, it is difficult to receive radio waves from the product verification device 50. Specifically, when the product verification device 50 and the first RFID tag are separated from each other by 20 cm or more, radio waves can hardly be received. For this reason, even if a plurality of products are collated at once, the accuracy of collation becomes extremely poor. Therefore, the first RFID tag 15 and the second RFID tag 45 need to be verified one-on-one.

  Further, for example, as shown in the concept of FIG. 4, by using an automated electric line 51, the second RFID tag 45 can be automatically labeled and product verification can be easily performed.

  The third RFID tag issuer 60 is connected to the server 20, reads product management data from the server 20, and issues a third RFID tag 65 in which the product management data is written. When the third RFID tag 65 is issued, it is issued in the form of a delivery destination label 61. The third RFID tag issuer 60 also has a function of printing delivery destination information and the like on the delivery destination label 61 when writing product management data to the third RFID tag 65. Thereby, the data printed on the delivery destination label 61 can also be confirmed visually.

  The third RFID tag 65 is an RFID tag issued by the third RFID tag issuer 60. Here, an RFID tag that communicates at a frequency of 13.56 MHz band is used. The third RFID tag 65 is issued in a form embedded in the delivery destination label 61, for example, as in FIG. This delivery destination label 61 is affixed to a packing box 62 in which the product container 42 is packed.

  The packing collator 70 is an RFID tag gate antenna or the like that collates the second RFID tag 45 and the third RFID 65. The packing collator 70 collates whether the product management data in the second RFID tag 45 matches the product management data in the third RFID tag 65 from the outside of the packaging box 62 in which the product container 42 is packed.

  By using a pair of gate antennas having a two-antenna configuration so as to face each other at an interval of about 1 m, the detection sensitivity of the RFID tag is increased, and packing verification of a plurality of product containers can be performed at a time.

  Further, when the packing collator 70 communicates with the third RFID tag 65, it connects to the server 20 and transmits the product management data in the third RFID tag 65 to the server 20.

  Next, the operation of the photomask delivery management system configured as described above will be described with reference to the flowchart of FIG.

  First, the first RFID tag reader / writer 30 writes product management data to the first RFID tag 15 attached to the pellicle frame 13 of the photomask (S1). At this time, the first RFID tag reader / writer 30 reads the product management data from the server 20 and writes it in the first RFID tag 15.

  Subsequently, the second RFID tag issuer 40 is connected to the server 20 to read the product management data, and issues the second RFID tag 45 in which the product management data is written (S2). The second RFID tag 45 is issued in the form of a product label 41 on which product information or the like is printed, and in addition to product management data that can be confirmed wirelessly, the data printed on the product label 41 can be visually confirmed.

  Next, the product label 41 is attached to the product container 42 in which the photomask 10 is stored (S3).

  Subsequently, the product collator 50 collates the product from the outside of the product container 42 as to whether or not the product management data in the first RFID tag 15 and the product management data in the second RFID tag 45 match ( S4).

  As a result of product verification, if the two do not match (S4-No), the first RFID tag reader / writer 30 reads the data in the first RFID tag 15 from the outside of the product container 42, and the obtained product management data is stored as it is. 2 Write to the RFID tag 45 (T1). Then, product verification by the product verification machine 50 is executed again, and the product management data of the first RFID tag 15 and the product management data of the second RFID tag 45 are matched.

  On the other hand, if they match as a result of product verification in step S4 (S4-Yes), the third RFID tag issuer 60 connects to the server 20 to read the product management data, and this product management data is written. 3 The RFID tag 65 is issued (S5). The third RFID tag 65 is issued in the form of a delivery destination label 61 printed with delivery destination information and the like, and the data printed on the delivery destination label 61 can be visually confirmed.

  Subsequently, the delivery destination label 61 is affixed to the packaging box 62 (S6).

  Next, the product container 42 is packed in the packing box 62 (S7). At the time of packing, product management data in the second RFID tag 45 can be written into the third RFID tag 65 as necessary using an RFID tag reader / writer.

  Subsequently, whether or not the product management data in the second RFID tag 45 and the product management data in the third RFID tag 65 coincide with each other from the outside of the packaging box 62 in which the product container 42 is packed by the packing collator 70. The package is verified (S8).

  As a result of the packing verification, if the two do not match (S8-No), the operator unpacks and confirms the product container 42 and repacks only the product to be delivered. Then, the packing verification by the packing verification machine 70 is executed again, and this operation is repeated until the product management data of the second RFID tag 45 and the product management data of the third RFID tag 65 match.

  On the other hand, as a result of the packing verification in step S8, if both match (S8-Yes), the packing verification machine 70 connects to the server 20 and transmits the product management data in the third RFID tag 65 to the server 20.

  When receiving the product management data, the server 20 checks whether or not the product management data matches the latest product management data (S9).

  When it is verified that the product management data does not match (S9-No), the server 20 records that the packaging is abnormal and outputs an error signal for unpacking to an alarm buzzer (not shown) or the like. .

  When the packaging is abnormal, after the operator unpacks the packaging box 62, the first RFID tag reader / writer 30 is connected to the server 20 to read the product management data, and the product management in the first RFID tag 15 is performed. Data is rewritten (V1).

  Next, the first RFID tag reader / writer 30 reads the data in the first RFID tag 15 from the outside of the product container 42, and writes the obtained product management data as it is in the second RFID tag 45 (V2). And the product collation of step S4 is performed again.

  On the other hand, if the server 20 verifies that the product management data matches (S9-Yes), the server 20 records that the packaging is normal.

  When the fact that the packaging is normal is recorded in the server 20, preparation for shipment of the product is completed.

  As described above, according to the present embodiment, the product management data in the first RFID tag 15 affixed to the pellicle frame 13 of the photomask 10 and the second RFID tag affixed to the product container 42 that stores the photomask 10 are used. 45, a product verification device 50 for verifying product management data in 45, and a third RFID tag affixed to a packaging box 62 for packing product management data in the second RFID tag 45 affixed to the product container 42 and the product container 42 After the photomask 10 and the product container 42 are collated by the configuration including the packaging collator 70 that collates the product management data in 65, the product container 42 and the packaging box 62 are collated. For this reason, even when the radio wave absorbing material (pellicle frame 13) of the photomask 10 weakens the radio wave of the first RFID tag 15 from the outside of the packing box 62, the second RFID that has been collated with the first RFID tag 15 in advance. The tag 45 and the third RFID tag 65 outside the packing box 62 can be collated.

  Therefore, even the photomask 10 using the radio wave absorber can be managed by the RFID tag without unpacking. In addition, since it is not necessary to visually check products, inspection tables, other forms, etc., and pack them in a cardboard box or the like, it is possible to improve delivery efficiency and prevent erroneous delivery.

  The packaging collator 70 collates the product management data in the second RFID tag 45 with the product management data in the third RFID tag 65, and at the same time, compares the product management data in the third RFID tag 65 and the latest product management data to the server. Therefore, the product management data recorded in the third RFID tag 65 can be collated immediately before delivery of the packaging box 62 in which the product container 42 is packed, thereby preventing erroneous delivery. A possible photomask delivery management system can be provided.

  Further, when the packaging collator 70 confirms whether the packaging is normal or abnormal, the server 20 records that the packaging is normal or abnormal, so the delivery records are periodically checked. It is possible to provide a photomask delivery management system that can prevent misdelivery. Further, if necessary, the delivery destination operator can be connected to the server 20 to obtain the delivery record, so that the delivery status can be confirmed.

  Further, since the first to third RFID tags 15, 45, 65 are RFID tags that can be used by receiving radio waves in the 13.56 MHz band, the use area of the RFID tag reader / writer is wide. That is, since collation can be performed easily and reliability is improved, the possibility of erroneous delivery can be reduced.

  Furthermore, since the packing verification machine 70 is a gate antenna arranged at an interval of about 1 m, verification by the RFID tag reader / writer can be performed reliably. That is, since the reliability is improved, the possibility of erroneous delivery can be reduced.

(Second embodiment; usage example)
Next, a second embodiment of the present invention will be described. The present embodiment is an example of use of the first embodiment. Here, a photomask delivery management task using the photomask delivery management system according to the first embodiment will be described in detail.

  In the photomask delivery management business, as shown in FIG. 6, the photomask is managed and delivered through a step-by-step process.

  Specifically, a “pellicle sticking step” for sticking the pellicle to the photomask is performed (A1), and after passing through the “quality assurance step” (A2), the pellicle is sent to the shipping department. When the “acceptance process” is completed in the shipping department (A3), the “sales processing / shipment slip issuance process” is performed (A4), and the product is shipped to the delivery destination through the “verification / packing / shipment process” (A5). ). At the delivery destination, delivery confirmation is performed by a “delivery confirmation process” as required (A6).

  Next, each step will be described in detail below.

  In the “pellicle sticking step”, as shown in FIGS. 7 and 8, the process of writing product management data to the first RFID tag 15, the process of issuing the second RFID tag 45, and the photomask 10 are stored in the product container 42. Process. This pellicle sticking step is performed in a clean room because the photomask 10 is required to be dustproof.

  First, the barcode reader 18 individually reads a management number from each barcode of the pellicle case 16 and the management slip 17 (FIG. 7A; B1, B2). This management number is associated with the product management data of the photomask in advance and stored in the server 20, and is databased together with this product management data.

  Next, the first RFID tag reader / writer 30 reads the photomask product management data from the server 20 based on the management number, and writes the product management data to the first RFID tag 15 in the pellicle case 16 (FIG. 7 ( A); B3).

  Subsequently, the pellicle 11 is attached to the photomask 10 and stored in the product container 42 (FIG. 7B; B4, B5).

  Next, the bar code reader 18 reads the management number from the bar code of the management slip 17 by the operation of the operator (FIG. 8A; C1), and sends the obtained management number to the second RFID tag issuer 40. To do.

  Subsequently, the first RFID tag reader / writer 30 reads product management data from the first RFID tag 15 stored in the product container 42 (FIG. 8A; C2), and issues the obtained product management data to the second RFID tag. To the machine 40.

  The second RFID tag issuer 40 checks whether the management number received from the barcode reader 30 matches the management number included in the product management data received from the first RFID tag reader / writer 30.

  If they match, the second RFID tag issuer 40 issues this product management data in the form of a product label 41 (FIG. 8A; C3).

  Subsequently, the product label 41 is attached to the product container 42 by an operator (not shown) (FIG. 8B).

  The product container 42 is wrapped with an air cap 44 together with the inspection slip 43. Since the photomask is a precision instrument, the product container 42 is wrapped in layers by the air cap. In such a state, the product container 42 is carried out of the clean room (FIG. 8C).

  In the “quality assurance process”, product verification processing is performed. If necessary, the product management data in the first RFID tag 15 and the product management data in the second RFID tag 45 are collated from the outside of the product container 42 in which the photomask 10 is stored. For example, by using the automated electric line 51, the second RFID tag 45 can be automatically labeled and product verification can be easily performed.

  Further, the order number and the like are simply confirmed visually from the information printed on the product label 41.

  In the “acceptance process”, for example, products are collected in the shipping department, and data such as the personal name of the delivery destination is confirmed, and the data is updated as necessary. Generally, the delivery destination company name is not changed, but the delivery destination personal name is frequently updated.

  In the “sales processing / shipping slip issuing process”, sales processing and shipping destination label issuing processing are performed.

  First, sales information is recorded in the server 20 according to the order number and sales processing is executed. Here, the sales information is, for example, a customer code (photomask sales customer), an order number, the number of sheets, and the like.

  Next, after the sales information is input, the third RFID tag issuer 60 is connected to the server 20, reads the product management data from the server 20, and issues the third RFID tag 65 in which the product management data is written. The third RFID tag 65 is issued in the form of a delivery destination label 61 on which delivery destination information or the like is printed, and the data printed on the delivery destination label 61 can be visually confirmed (FIG. 9; D1).

  In the “verification / packing / shipping process”, the product is shipped by performing a process of packing the product container into the packaging box, a process of comparing the product container and the packaging box, and a process of recording the verification result.

  First, the product container 42 is packed in the packing box 62 in a state of being wrapped in the air cap 44. At the time of packing, product management data of the second RFID tag 45 is written into the third RFID tag 65 as necessary using the RFID tag reader / writer 71 (FIG. 10A; E1, E2).

  Next, when the second RFID tag 45 receives radio waves from the gate antennas 70a and 70b which are packing collators, it transmits the stored product management data (FIG. 10 (B); F1). Similarly, the third RFID tag 65 receives radio waves from the gate antennas 70a and 70b and transmits stored product management data (FIG. 10B; F2).

  The gate antennas 70a and 70b individually receive product management data from the second and third RFID tags 45 and 65. In this way, the gate antennas 70a and 70b receive the product management data written in the second RFID tag 45 and the product management data written in the third RFID tag 65 from the outside of the packing box 62 in which the product container 42 is packed. Check whether they match.

  Further, the gate antennas 70 a and 70 b are connected to the server 20 via the terminal device 72 and transmit the product management data received from the third RFID tag 65 to the server 20.

  The server 20 collates whether or not this product management data matches the latest product management data.

  As a result of this collation, the server 20 records that the packaging is normal when the two product management data match.

  After this recording, a delivery record memo 73 is printed as necessary, and the packaging box 62 in which the photomask 10 is packed is delivered by a truck 74 or the like (FIGS. 10C and 10D).

  In the “delivery confirmation process”, the delivery record is confirmed at the delivery destination as necessary.

  That is, when the packaging box 62 is delivered, the third RFID tag 65 attached to the delivery destination label is read by the RFID tag reader / writer 71 as necessary, and the server 20 is accessed to deliver product management data. The record is confirmed (FIG. 11).

  As described above, by using the photomask delivery management system, it is possible to provide a photomask delivery management business that can manage photomasks without unpacking and prevent erroneous delivery.

  Further, the sales process is performed between the process of product verification and the process step of issuing the third RFID tag, thereby facilitating the sales process.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine a component suitably in different embodiment.

It is a schematic diagram which shows the structure of the photomask delivery management system which concerns on the 1st Embodiment of this invention. It is a figure which shows the concept of an RFID tag. It is a figure which shows an example of a product label. It is a figure which shows the concept of automation by an electric line. It is a flowchart which shows operation | movement of a photomask delivery management system. It is a figure which shows each process of the photomask delivery management service which concerns on the 2nd Embodiment of this invention. It is a figure which shows the process of a "pellicle sticking process." It is a figure which shows the process of a "quality assurance process." It is a figure which shows the process of a "sales process / shipment slip issue process". It is a figure which shows the process of "a collation / packing / shipping process". It is a figure which shows the process of a "delivery confirmation process."

Explanation of symbols

      DESCRIPTION OF SYMBOLS 10 ... Photomask, 11 ... Pellicle, 12 ... Pellicle film, 13 ... Pellicle frame, 15 ... First RFID tag, 16 ... Pellicle case, 17 ... Management slip, 18・ ・ ・ Bar code reader, 20 ... Server, 30 ... First RFID tag reader / writer, 40 ... Second RFID tag issuing machine, 41 ... Product label, 42 ... Product container, 43 ..Inspection sheet, 44 ... Air cap, 45 ... Second RFID tag, 50 ... Product verification machine, 51 ... Electric line, 60 ... Third RFID tag issuing machine, 61 ... Delivery First label, 62 ... packing box, 65 ... third RFID tag, 70 ... packing verification machine, 71 ... RFID tag reader / writer, 72 ... terminal device, 73 ... delivery record memo 74 ... Tiger Cook.

Claims (9)

A photomask delivery management system for managing delivery of a photomask having a pellicle frame made of an electromagnetic wave absorbing material,
Data storage means for storing product management data of the photomask;
Writing means for writing product management data in the data storage means to a first RFID tag affixed to the pellicle frame;
Second RFID tag issuing means for issuing a second RFID tag in which product management data in the data storage means is written;
Product verification means for verifying product management data in the first RFID tag and product management data in the second RFID tag attached to a product container containing the photomask;
A third RFID tag issuing means for issuing a third RFID tag in which product management data in the data storage means is written when both match as a result of the verification;
Packing collation means for collating product management data in the second RFID tag affixed to the product container with product management data in a third RFID tag affixed to a packaging box for packing the product container;
A photomask delivery management system comprising: error output means for outputting an error signal when the two do not match as a result of the collation. In the photomask delivery management system according to claim 1,
In parallel with the collation by the packing collation means, it further comprises a latest data collation means for collating the product management data in the third RFID tag with the latest product management data stored in the data storage means. Photomask delivery management system. In the photomask delivery management system according to claim 1 or 2,
A photomask delivery management system, further comprising verification result recording means for recording a verification result by the packing verification means. In the photomask delivery management system according to any one of claims 1 to 3,
The photomask delivery management system, wherein the first RFID tag, the second RFID tag, and the third RFID tag transmit and receive radio waves in a 13.56 MHz band. In the photomask delivery management system according to any one of claims 1 to 4,
The packing collation means has a function of reading product management data individually from the second and third RFID tags by radio and a function of collating each read product management data with each other and facing each other at an interval of about 1 m. A photomask delivery management system, characterized in that the photomask delivery management system is a pair of gate antenna devices arranged in a row. A photomask delivery management method executed by a photomask delivery management system that manages delivery of a photomask having a pellicle frame made of an electromagnetic wave absorbing material,
A storage step of storing product management data of the photomask in the data storage means of the photomask delivery management system;
A writing step of writing product management data in the data storage means to a first RFID tag attached to the pellicle frame;
A second RFID tag issuing step for issuing a second RFID tag in which product management data in the data storage means is written;
Product verification for verifying product management data in the first RFID tag and product management data in the second RFID tag when the second RFID tag is attached to a product container and the photomask is stored in the product container Steps,
A third RFID tag issuance step for issuing a third RFID tag in which product management data in the data storage means is written when both match as a result of the collation;
When the third RFID tag is affixed to a packing box and the product container is stored in the packing box, the packing check for checking the product management data in the second RFID tag and the product management data in the third RFID tag Steps,
An error output step of outputting an error signal when the two do not match as a result of the verification, a photomask delivery management method, comprising: The photomask delivery management method according to claim 6,
In parallel with the collation by the packing collation step, it further comprises a latest data collation step for collating the product management data in the third RFID tag with the latest product management data stored in the data storage means. Photomask delivery management method. In the photomask delivery management method according to claim 7,
The photomask delivery management method further comprising a packing verification recording step of recording that the packing is normal in the data storage means when the verification result is confirmed to be normal by the packing verification step. The photomask delivery management method according to any one of claims 6 to 8,
A photomask delivery management method further comprising a sales processing step of performing a sales process of recording a sales destination of the photomask between the product verification step and the third RFID tag issue step.

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