JP2006108121A - Electron spectrometer and transmission electron microscope equipped with the same - Google Patents

Abstract

An energy spectrum of different sample positions is simultaneously separated and measured.
An electron spectrometer is provided between a sample of a transmission electron microscope and a lens group that forms an image of the electron beam, and the electron beam is dispersed by the amount of energy of the electron beam. The convergence position of the dispersed electron beam in the direction of energy dispersion of the electron spectrometer of the electron beam and the direction orthogonal to the energy dispersion direction are different.
[Selection] Figure 1

Description

  The present invention relates to a transmission electron microscope, and more particularly to a transmission electron microscope provided with an electron spectrometer that has higher energy resolution than conventional ones and can detect a slight change in energy loss due to a chemical change.

  Conventionally, when measuring an energy spectrum at different positions on a sample, for example, the amount of energy loss of electrons, it is measured separately for each position, and the respective measurement results are compared to compare components.

  For example, in a transmission electron microscope that irradiates an electron beam to pass through a measurement sample and observes the transmitted electron beam image, an electron spectrometer that identifies the component of the sample that has been transmitted from the amount of energy loss of the transmitted electron beam Can be attached to measure the energy spectrum. In that case, when comparing components at different positions on the sample, the electron beam is narrowed so that the electron beam only hits the position to be measured, and the amount of energy loss of the transmitted electron beam is measured. Identification can be performed.

  However, this method cannot measure different positions at the same time, so the amount of energy loss measured may vary depending on, for example, the drift of the acceleration voltage of the electron beam, the magnetic field from outside the electron microscope, the change in the electric field, or the instability of the electron spectrometer. There is a problem of subtle fluctuations. In this case, it was difficult to make a measurement comparing a slight amount of chemical shift such that the metal surface was slightly oxidized.

  In order to avoid the influence of disturbance (magnetic field or electric field) during measurement or fluctuations in the acceleration voltage of electrons, it is necessary to shorten the measurement time at one place as much as possible and shorten the total time required for measurement. However, if the measurement time at one place is shortened, there is a problem that the measurement error increases because sufficient intensity cannot be detected.

  In order to solve such a problem, although it is not a technique for a transmission electron microscope, AES (Auger Electron Spectroscopy) detects secondary electrons generated by scanning an electron beam, and the amount of the secondary electrons is detected. A method that improves the measurement accuracy by digitizing the distribution on the scanning plane and comparing the distribution at the start of analysis with the distribution at the time of each analysis using a computer and correcting the drift at the time of scanning the electron beam. This is disclosed in Japanese Laid-Open Patent Publication No. 5-172765 (Patent Document 1).

JP-A-5-172765

  In the method of correcting drift by using a computer as disclosed in Patent Document 1, the configuration of the apparatus becomes complicated, and the cost of the measuring instrument increases. Further, because of the correction, a slight change in energy loss may be an error.

  An object of the present invention is to provide a transmission electron microscope equipped with an electron spectrometer capable of simultaneously measuring energy spectra at different points of a sample.

  In order to achieve the above object, according to the first invention of the present invention, an electron gun, a lens group for converging an electron beam emitted from the electron gun, and a lens group for forming an image of the electron beam transmitted through the sample And an image detector for detecting the imaged sample image, the electron beam is split between the sample and the image detector by the amount of energy of the electron beam. And the convergence position of the dispersed electron beam in the direction of energy dispersion of the electron spectrometer and the direction orthogonal to the energy dispersion direction of the dispersed electron beam is different. A transmission electron microscope is provided.

  According to the second invention of the present invention, the electron gun, the lens group for converging the electron beam emitted from the electron gun, and the lens group for imaging the electron beam transmitted through the sample are imaged. A transmission electron microscope apparatus comprising: an image detector for detecting a captured image; and an electron spectrometer for separating the electron beam between the sample and the image detector based on an energy amount of the electron beam. And a transmission electron microscope comprising: a lens for differentiating the convergence position of the split electron beam along two orthogonal axes between the electron spectrometer and the image detector. .

  According to the third aspect of the present invention, the electron gun, the lens group for converging the electron beam emitted from the electron gun, the lens group for forming an image of the electron beam transmitted through the sample, and the image formed In a transmission electron microscope apparatus equipped with an image detector for detecting an electron detector, an electron spectrometer is provided between the sample and the image detector to split the electron beam according to an energy amount of the electron beam, In addition, there is provided a transmission electron microscope characterized in that the electron spectrometer is designed such that the convergence position is different between the energy dispersion direction of the electron spectrometer and the direction orthogonal to the energy dispersion direction.

  According to the first invention of the present invention, since the influence of the electron beam acceleration voltage drift, the electric field, the magnetic field disturbance, and the like is eliminated by observing simultaneously the energy spectra at different positions of the sample, it is caused by the chemical change of the sample. It is possible to observe the energy spectrum fluctuation corresponding to the subtle chemical shift.

  According to the second aspect of the present invention, the energy dispersion direction of the electron spectrometer and the convergence position of the dispersed electron beam in the direction orthogonal to the energy dispersion direction can be changed relatively freely. Therefore, in order to analyze the energy spectrum and then observe the sample image, it is possible to instantaneously make the convergence position the same.

  According to the third aspect of the present invention, the effect of the first aspect of the present invention can be obtained by replacing only the electron spectrometer of the conventional transmission electron microscope. That is, the effect of the present invention can be obtained most simply.

  According to the first aspect of the present invention, an electron gun, a lens group that converges an electron beam emitted from the electron gun, a lens group that forms an image of the electron beam that has passed through the sample, and an imaged sample In a transmission electron microscope equipped with an image detector for detecting an image, an electron spectrometer that separates the electron beam by an energy amount of the electron beam is provided between the sample and the image detector, Transmission electron characterized in that the dispersed position of the dispersed electron beam in the direction of energy dispersion of the electron spectrometer and the direction perpendicular to the energy dispersion direction of the dispersed electron beam is different A microscope is provided.

  In the above, the lens does not indicate a transparent glass having an optical uneven surface, but an electromagnetic lens composed of an electric field and a magnetic field for converging an electron beam. As an image detector, a fluorescent plate coated with phosphor, single crystal phosphor such as YAG (yttrium, aluminum, garnet), solid-state image sensor (CCD), photoelectric device, etc. Any element can be used.

  An electron spectrometer is a device that changes the traveling locus of electrons according to the difference in kinetic energy of electrons and performs spectroscopy. There are various types such as magnetic field sector type and Wien filter type. It is utilized that the electron with the larger momentum is less susceptible to the influence of the magnetic field (deflection effect by Lorentz force), and therefore the trajectory is less likely to change.

  An electron beam dispersed by an electron spectrometer sorts an electron having a large kinetic energy and an electron having a small kinetic energy based on a certain direction. This direction is called the energy dispersion direction. In a normal transmission electron microscope, the convergence position of electrons, that is, the focal position of electrons is all within one plane. If it demonstrates using FIG. 3, as shown in FIG.3 (c), in the conventional transmission electron microscope, the focal position of both x-axis and y-axis will be the same surface (12,15). This is because the sample image formed by the electron beam transmitted through the sample is not distorted.

The present invention is characterized in that the focal position is different between the x-axis and the y-axis. FIG.
As shown in (a), the focal position of the x axis is the spectral plane 12, and the focal position of the y axis is the fifteen plane. In such a configuration, the sample image transmitted through the sample is not suitable for observing the geometric shape of the sample because the magnification of the image is different between the x direction and the y direction. However, the energy spectrum in the y-axis direction of the sample can be separated and observed. That is, it becomes possible to observe simultaneously the energy spectrum of the different position of a sample.

  By observing the energy spectrum at different positions of the sample at the same time, the influence of the electron beam acceleration voltage drift, disturbance due to electric field, magnetic field, etc. is eliminated. It becomes observable.

  In order to observe the geometric form of the sample, it is preferable that the focal positions of the x axis and the y axis are the same. Further, if the difference in the focal position between the x-axis and the y-axis is increased, the degree of separation of the energy spectrum in the y-axis direction of the sample can be increased. In this way, it is preferable to provide a mechanism that can freely adjust the difference in focal position between the x-axis and the y-axis depending on the purpose.

  In the first invention, a lens group that converges an electron beam emitted from the electron gun into an electron beam shape having a short energy dispersion direction of the electron spectrometer and a direction perpendicular to the energy dispersion direction being long. It is good also as a transmission electron microscope characterized by having.

With the configuration of the first invention alone, the energy spectrum at all positions of the sample can only be displayed separately by the difference in y-axis position. If the sample has a layered structure with no difference in composition on the x axis (horizontal direction of the sample) as shown in FIG. 6 (a), even in such a configuration, the difference in the composition of each layer is considered as the difference in the energy spectrum. It can be measured. However, when it is desired to simultaneously analyze the matrix and the particulate heterogeneous phase of a sample in which a particulate heterogeneous phase exists in the matrix, it is necessary to limit the region in which the energy spectrum is measured. As a method for limiting the measurement region in this case, there is a method in which the electron beam is focused so as to hit only a specific portion of the sample. However, only by narrowing the electron beam into dots, only the energy spectrum of that portion can be obtained. Therefore, when combined with the configuration of the first invention of the present invention, the y-axis direction (vertical direction) of the sample
The irradiation shape of the electron beam may be controlled so as to be a small electron beam in the x-axis direction (horizontal direction). The above is expressed as “the electron beam is converged to a long electron beam shape in which the energy dispersion direction of the electron spectrometer is short and the direction perpendicular to the energy dispersion direction is long”. With the configuration described above, it is possible to simultaneously analyze only a portion that is desired to be comparatively analyzed.

  In the first invention, a transmission electron microscope may be provided, wherein a field slit is provided at a position corresponding to the incident image plane of the electron spectrometer.

  As a method for simultaneously analyzing only a portion to be comparatively analyzed, there is a method using a visual field selection slit in addition to a method of focusing an electron beam. This is a method of specifying a site to be analyzed by providing a slit having an opening shape that is short in the x-axis direction and long in the y-axis direction at a position corresponding to the incident image plane of the electron spectrometer. This method has a feature that the configuration is simpler than the method of focusing the electron beam. The analysis position of the sample can be adjusted by changing the position of the slit while viewing the observed image.

  The field slit preferably includes a mechanism capable of changing the direction and width of the slit. If the width of the slit is changed so that only the energy spectrum of the part to be observed is obtained, noise in the energy spectrum of the part other than the target will not be introduced.

  In the above description, it goes without saying that the slit longitudinal direction of the field slit is preferably substantially orthogonal to the energy dispersion direction of the electron spectrometer.

  1st invention WHEREIN: It consists of the light receiving element group arranged in two dimensions which consists of two axes | shafts of image detection apparatus x, y, and the energy dispersion | distribution direction of the said electron spectrometer, and the x-axis or y-axis of the said light receiving element group It is preferable that one of them is almost the same.

  In the case where the intensity of the electron beam received by the light receiving element group is quantified and displayed as a two-dimensional graph, the direction of energy dispersion coincides with either the x axis or the y axis of the light receiving element group. The display process is simplified. If this does not match, it will be necessary to perform some numerical calculation to correct it when graphing.

  According to the second invention of the present invention, the electron gun, the lens group for converging the electron beam emitted from the electron gun, and the lens group for imaging the electron beam transmitted through the sample are imaged. A transmission electron microscope apparatus comprising: an image detector for detecting a captured image; and an electron spectrometer for separating the electron beam between the sample and the image detector based on an energy amount of the electron beam. And a transmission electron microscope comprising: a lens for differentiating the convergence position of the split electron beam along two orthogonal axes between the electron spectrometer and the image detector. .

  This is one of the concrete means for realizing the first invention of the present invention.

  The electron spectrometer is a normal one, so that the energy dispersion direction of the electron spectrometer after the electron spectrometer is different from the convergence position of the dispersed electron beam in the direction perpendicular to the energy dispersion direction, for example, By providing the cylindrical lens as shown in FIG. 4, the configuration shown in the first invention can be obtained. The point of the second aspect of the invention is to provide, after the electron spectrometer, a mechanism in which the energy dispersion direction of the electron spectrometer is different from the convergence position of the dispersed electron beam in the direction orthogonal to the energy dispersion direction. is there. Therefore, although the term lens is used, it is not limited to the meaning of this term.

  In the second invention, the lens is preferably a multipole lens. The multipole lens is an electron beam converging mechanism in which an even number of poles for generating a magnetic field or an electric field are arranged to face each other, such as four, six, and eight. FIG. 8 shows an example of a quadrupole lens. The multipole lens can change the focus of the electron by the magnitude of the magnetic field or electric field applied to each pole, that is, the focal position can be changed. Therefore, the energy dispersion direction of the electron spectrometer is orthogonal to the energy dispersion direction. It is possible to instantaneously make the convergence position the same in order to analyze the energy spectrum and then observe the sample image by making the convergence position of the dispersed electron beam in the direction different.

  According to the third aspect of the present invention, the electron gun, the lens group that converges the electron beam emitted from the electron gun, and the lens group that forms an image of the electron beam transmitted through the sample are imaged. A transmission electron microscope apparatus comprising: an image detector for detecting a captured image; and an electron spectrometer for separating the electron beam between the sample and the image detector based on an energy amount of the electron beam. And a transmission electron microscope characterized in that the electron spectrometer is designed so that a convergence position is different between an energy dispersion direction of the electron spectrometer and a direction orthogonal to the energy dispersion direction. The

  The third invention shows an example of a specific method for realizing the first invention. In this case, unlike the second invention, the electron spectrometer itself is characterized in that the convergence position is designed to be different in the energy dispersion direction and in the direction orthogonal to the energy dispersion direction. In the case of this configuration, the effect of the first invention of the present invention can be obtained by replacing only the electron spectrometer of the conventional transmission electron microscope. That is, there is a feature that the effect of the present invention can be obtained most simply.

  According to the fourth aspect of the present invention, the electron gun, the lens group for converging the electron beam emitted from the electron gun, the lens group for forming an image of the electron beam transmitted through the sample, and the image formed In the electron spectrometer for a transmission electron microscope provided with an image detector for detecting the convergence of the electron spectrometer, the convergence position of the electron spectrometer differs between the direction of energy dispersion of the electron spectrometer and the direction orthogonal to the direction of energy dispersion An electron spectrometer is provided that is designed as follows.

  According to the fifth aspect of the present invention, the electron gun, the lens group for converging the electron beam emitted from the electron gun, the lens group for forming an image of the electron beam transmitted through the sample, and the image formed For a transmission electron microscope provided with an electron spectrometer that separates the electron beam by an energy amount of the electron beam between an image detector that detects the electron beam and a lens group that images the sample and the electron beam In this energy spectrum analyzer, the analyzer comprises a lens for differentiating the convergence position of the split electron beam between two orthogonal axes between the sample and the image detector. A spectrum analyzer is provided.

  In the present invention, an electron spectrometer forms an energy spectrum by imaging electrons emitted from a sample at different positions depending on the energy of the electrons. The field slit selects the image being observed in a slit shape. At this time, since the field slit is perpendicular to the energy dispersion direction, on the energy spectrum surface, a two-dimensional energy spectrum having an x-axis as an energy axis and a y-axis as an image axis selected by the slit is obtained. can get. The two-dimensional image detector detects the two-dimensional energy spectrum.

  In the present invention, since the energy spectra at different positions can be measured at a time with a two-dimensional image detector, the measurement time can be greatly shortened. In addition, since the measurement is completed in a short time, it is possible to perform measurement with little influence of drift such as electron acceleration voltage and disturbance during measurement, and the energy resolution is effectively improved.

Example 1
FIG. 1 shows an overall view of the present invention.

  The electron beam 2 emitted from the electron gun 1 is converged by the converging lens system 3 and then enters the region of the sample 4 to be observed. The electron beam transmitted through the sample 4 is magnified by the objective lens 5 and the intermediate lens system 6. As a result, a crossover of the intermediate lens system is formed at the position of the object point 7 of the electron spectrometer 10, and an electron microscope image or an electron diffraction pattern is formed on the incident image plane 8 of the electron spectrometer. Here, an arbitrary position on the incident image plane is selected in a slit shape by the field slit 9 inserted at the position of the incident image plane 8. The longitudinal direction of the area selected by the field slit 9 is taken as the y-axis. The selected region is subjected to a different deflection action due to the energy difference in the x-axis direction by the electron spectrometer 10. As a result, on the spectrum surface 12, an energy spectrum (a spectrum of electron dose with respect to the amount of energy of the transmitted electron beam) is formed in the x-axis direction. At this time, each position selected in a strip shape in the y-axis direction by the field slit 9 on the incident image plane 8 in the y-axis direction corresponds to a two-dimensional energy spectrum. The projection lens system 13 projects a two-dimensional energy spectrum formed at the position of the spectrum surface 12 onto the image detector 14, and the two-dimensional energy spectrum is detected two-dimensionally.

  Here, by changing the position and width of the visual field slit 9, it is possible to observe a spectrum of an arbitrary place and width within the observation visual field. Further, data analysis is facilitated by matching the xy axis of the image detector 14 with the xy axis of the electron spectrometer. In the present invention, the electron spectroscope 10 is not particularly limited in its system, and a Wien filter type or the like including a magnetic field sector type that is often used conventionally may be used.

  FIG. 2 is a diagram showing a measurement procedure according to the present invention. First, a target portion is selected using the visual field selection slit 9 from the electron microscope image (a) of the region to be observed (b). At this time, the regions selected by the visual field selection slit 9 are defined as regions a, b,. Next, a two-dimensional spectrum whose position x direction corresponds to the amount of energy is acquired by the electron spectrometer 10 (c). At this time, the spectra of the regions a, b,..., I are formed at different positions as shown in the figure. Further, by detecting the intensity for each strip-shaped region of the acquired two-dimensional spectrum as shown in the figure, the spectra of the regions a, b,..., I can be separated and measured.

  According to the present invention, energy spectra from different positions can be simultaneously measured as a two-dimensional energy spectrum. This has the following advantages.

  First, since multipoint measurement at different positions is completed at the same time, the measurement time is greatly reduced. For example, when acquiring a spectrum of 100 measurement points, in the case of a finely converged electron beam, it is often necessary to measure several points for several tens of seconds. It was difficult. On the other hand, in the present invention, since the measurement points are determined by the pixel size of the image detector, there are few problems with increasing the measurement points. In addition, when the electron beam is converged to a very small diameter on the order of 1 nanometer, the amount of incident electrons is about 1 nA even when a field emission electron gun having high luminance is used. Since it is not necessary to finely converge the line, the amount of incident current can be increased several times.

  Conventionally, when comparing energy spectra measured at different times, there is a problem of energy spectrum energy shift caused by energy drift, disturbance magnetic field (electric field), instability of electron spectrometer, etc. It was. Since these effects are eliminated by the present invention, it becomes possible to discuss in detail the change in the fine structure of the energy spectrum at different positions and a slight energy shift, thereby improving the effective energy resolution.

  FIG. 3 shows (a) a diagram for explaining the concept of the present invention in detail and information (b) to be measured, a conceptual diagram (c) of the conventional method, and information (d) to be measured. In FIG. 3A, the field slit is placed in the achromatic image plane. The spectrum of the region selected by the slit is formed in the x focus. Here, since the y convergence plane is different, the y direction on the x convergence plane, that is, the spectrum plane, has information on the y position. Therefore, as shown in FIG. 3B, on the spectrum surface, a two-dimensional spectrum is obtained in which the y direction is a position and the x direction is an energy spectrum.

  FIG. 2C shows a conventional method. Conventionally, since the field slit is not incident on the achromatic image surface or the incident image surface, the energy spectrum of the entire observation region is measured as one spectrum. Further, even if only the field slit is added to the configuration of the conventional method, since the y direction is also converged on the spectrum surface, position information is not transmitted in the y direction. A two-dimensional energy spectrum as shown cannot be obtained.

  FIG. 4 shows another embodiment. Here, an electron spectrometer having the same characteristics as the conventional method (for example, FIG. 3C) is used. Therefore, since the positions of the x convergence plane and the y convergence plane coincide with each other as they are, the target two-dimensional energy spectrum cannot be obtained. However, in addition to the conventional method, a cylindrical lens 16 is combined with the achromatic image surface 11. Since the cylindrical lens causes different convergence effects in the x direction and the y direction, the focal lengths in the x direction and the y direction are different, so that the x convergence is effectively as in the electron microscope shown in FIG. The surface and the y convergence surface are formed at different positions. As a result, the image detector can measure a two-dimensional energy spectrum. Here, by setting the position of the cylindrical lens to an achromatic image plane, the positions of the x focus and the y focus can be adjusted without largely changing the distortion of the image of the energy filter image.

  FIG. 5 shows another embodiment. In the configuration shown in FIG. 1, a deflection unit and a control unit for controlling the deflection unit and the image detector are newly added. The deflecting means operates to shift the position of the incident image plane while keeping the position of the object point of the electron spectrometer from changing. Control is performed by the control device so that the operation and the two-dimensional spectrum by the image detector are detected in synchronization. As a result, a two-dimensional spectrum can be obtained in the entire observation region.

(Example 2)
A cross section of a sample in which a silicon dioxide film (SiO ₂ ), a silicon nitride film (Si ₃ N ₄ ), and a silicon oxynitride film (SiO _x N _y ) are stacked on a silicon single crystal substrate by a sputtering method is observed with a transmission electron microscope. Observed.

  FIG. 6A shows a TEM image. Since the density of the TEM image varies depending on the material of the sample, each layer can be recognized. The figure also shows the region selected by the field limiting slit. In this case, the depth direction of the sample is being analyzed simultaneously.

  FIG. 6 (b) shows the two-dimensional energy spectrum of the field of view thus selected. The horizontal axis indicates the energy (energy loss amount) of electrons, and the vertical axis indicates the distribution in the depth direction of the sample. Note that the distribution width of the vertical axis can be adjusted to an arbitrary width by adjusting an electron spectrometer or a cylindrical lens.

  The bright part of the two-dimensional energy spectrum is where many electrons are observed. When the two-dimensional energy spectrum is observed in detail, it can be seen that the position of the two-dimensional spectrum shining in a band shape slightly changes from side to side as the position changes. This change is a chemical shift that means a change in the chemical bonding state.

  FIG. 7 shows a spectrum obtained by graphing the electron intensity from the two-dimensional spectrum of the sample of FIG. The energy spectrum corresponding to each layer shown in FIG. 7A is shown in FIG. In order to make a graph in this way, the difference in brightness is quantified by a CCD, and this is computer processed. In this way, the amount of chemical shift observed in the two-dimensional spectrum can be accurately evaluated. In general, the chemical shift to be observed is only a few electron volts (eV), which is as small as 1 / 100,000 of the acceleration voltage (200 kV) of incident electrons. For this reason, it is difficult to measure the absolute value of the chemical shift amount with the conventional method, but according to the present invention, the value can be measured very accurately (for example, to a unit of 0.1 V).

1 is an overall view of the present invention. The figure which showed the procedure of the measurement by this invention. The figure which showed the detailed description of this invention and the comparison with a prior art example. Another embodiment of the present invention. Another embodiment of the present invention. 2D display of energy spectrum obtained by the present invention. The graph display of the energy spectrum obtained by this invention. A configuration of a quadrupole lens which is an example of a multipole lens.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Electron gun, 2 ... Electron beam, 3 ... Converging lens system, 4 ... Sample, 5 ... Objective lens, 6 ... Intermediate lens system, 7 ... Object point of an electron spectrometer, 8 ... Incident image plane with respect to an electron spectrometer, DESCRIPTION OF SYMBOLS 9 ... Field slit, 10 ... Electron spectrometer, 11 ... Achromatic image surface, 12 ... Spectral surface, 13 ... Projection lens system, 14 ... Image detector, 15 ... Converging surface of y direction of an electron spectrometer, 16 ... Cylindrical Lens, 17, 18... Deflecting means, 19... Deflecting means and image detector control device.

Claims (12)

An electron gun, a lens group that converges an electron beam emitted from the electron gun and irradiates the sample, a lens group that forms an image of the electron beam transmitted through the sample, and an energy amount of the electron beam transmitted through the sample An electron spectrometer that splits the electron beam, and a lens that varies the convergence position of the split electron beam along two orthogonal axes;
An electron beam in the direction of energy dispersion converges, and a spectrum in which an electron beam orthogonal to the electron beam does not converge is installed at a position where the spectrum is detected through a projection lens, and a two-dimensional spectrum of the sample position information and energy spectrum is detected Having an image detector,
The lens group that converges the electron beam and irradiates the sample has a short energy dispersion direction of the electron spectrometer, and the lens group that irradiates the sample with a direction perpendicular to the energy dispersion direction converged to a long electron beam shape A transmission electron microscope. An electron gun, a lens group that converges an electron beam emitted from the electron gun and irradiates the sample, a lens group that forms an image of the electron beam transmitted through the sample, and an energy amount of the electron beam transmitted through the sample An electron spectrometer that divides the electron beam, and an electron beam in an energy dispersion direction are converged, and a spectrum in which an electron beam orthogonal to the electron beam does not converge is detected at a position through a projection lens, and the position information of the sample And an image detector for detecting a two-dimensional spectrum of energy spectrum,
The lens group that converges the electron beam and irradiates the sample has a short energy dispersion direction of the electron spectrometer, and the lens group that irradiates the sample with a direction perpendicular to the energy dispersion direction converged to a long electron beam shape And
The transmission electron microscope, wherein the electron spectrometer is designed so that a convergence position is different between an energy dispersion direction of the electron spectrometer and a direction orthogonal to the energy dispersion direction. An electron gun, a lens group that converges an electron beam emitted from the electron gun and irradiates the sample, a lens group that forms an image of the electron beam transmitted through the sample, and an energy amount of the electron beam transmitted through the sample An electron spectrometer that divides the electron beam, and a field slit provided at a position corresponding to the incident image plane of the electron spectrometer,
A lens that varies the convergence position of the split electron beam along two orthogonal axes;
Installed at a position where the electron beam in the energy dispersion direction converges and a spectrum where the electron beam orthogonal to the electron beam does not converge is detected through a projection lens, and detects a two-dimensional spectrum of the sample position information and energy spectrum And a transmission electron microscope characterized by comprising: An electron gun, a lens group that converges an electron beam emitted from the electron gun and irradiates the sample, a lens group that forms an image of the electron beam transmitted through the sample, and an energy amount of the electron beam transmitted through the sample An electron spectrometer that divides the electron beam, and an electron beam in an energy dispersion direction are converged, and a spectrum in which an electron beam orthogonal to the electron beam does not converge is detected at a position through a projection lens, and the position information of the sample And an image detector for detecting a two-dimensional spectrum of the energy spectrum, and a field slit provided at a position corresponding to the incident image plane of the electron spectrometer,
The transmission electron microscope, wherein the electron spectrometer is designed so that a convergence position is different between an energy dispersion direction of the electron spectrometer and a direction orthogonal to the energy dispersion direction. The transmission electron microscope according to claim 3 or 4,
A transmission electron microscope, wherein the field slit includes a mechanism capable of changing a direction and a width of the slit. The transmission electron microscope according to claim 3 or 4,
The transmission electron microscope characterized in that the field slit is arranged so that the longitudinal direction of the slit is substantially perpendicular to the energy dispersion direction of the electron spectrometer. The transmission electron microscope according to claim 1 or 2,
The image detector includes a two-dimensionally arranged light receiving element group composed of two axes of x and y, and the energy dispersion direction of the electron spectrometer and either the x axis or the y axis of the light receiving element group are approximately. A transmission electron microscope characterized by matching. An electron beam is emitted from an electron gun, the emitted electron beam is transmitted through a sample,
Spectroscopy the electron beam by the amount of energy of the transmitted electron beam,
The electron beam is converged by changing the energy dispersion direction of the dispersed electron beam and the convergence position of the electron beam in a direction orthogonal to the energy dispersion direction, and the electron beam in the energy dispersion direction converges, and the energy dispersion A method for measuring an energy spectrum, comprising: detecting a spectrum in which an electron beam in a direction orthogonal to the direction does not converge, and detecting a two-dimensional spectrum of the position information of the sample and the energy spectrum. The energy spectrum measurement method according to claim 8, wherein
An energy spectrum measuring method characterized in that an electron beam emitted from the electron gun is converged to an electron beam shape having a short energy dispersion direction of the electron spectrometer and a long shape perpendicular to the energy dispersion direction. . The energy spectrum measurement method according to claim 8, wherein
An energy spectrum measuring method, comprising: transmitting the electron beam through a field slit after transmitting the electron beam through a material and before analyzing the electron beam.   The energy spectrum measuring method according to claim 10, wherein the direction or width of the field slit is changed. 11. The energy spectrum measuring method according to claim 10, wherein the longitudinal direction of the field slit is arranged so as to be substantially orthogonal to the spectral direction of the electron beam.

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