[go: up one dir, main page]

JP2006074291A - Manufacturing method of electronic device - Google Patents

Manufacturing method of electronic device Download PDF

Info

Publication number
JP2006074291A
JP2006074291A JP2004253599A JP2004253599A JP2006074291A JP 2006074291 A JP2006074291 A JP 2006074291A JP 2004253599 A JP2004253599 A JP 2004253599A JP 2004253599 A JP2004253599 A JP 2004253599A JP 2006074291 A JP2006074291 A JP 2006074291A
Authority
JP
Japan
Prior art keywords
substrate
case member
electronic device
mother
crystal resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004253599A
Other languages
Japanese (ja)
Inventor
Toshio Nakazawa
利夫 中澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP2004253599A priority Critical patent/JP2006074291A/en
Publication of JP2006074291A publication Critical patent/JP2006074291A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

【課題】組み立て工程を簡略化して生産性を向上させることができる電子装置を提供する。
【解決手段】本発明の電子装置の製造方法は、マトリクス状に配列された複数個の基板領域を有する母基板を準備し、該母基板の各基板領域に電子部品素子を搭載する工程Aと、前記電子部品素子を封止する外周部に環状の側壁部が立設されているケース部材を、前記基板領域に載置・接合する工程Bと、前記母基板の各基板領域に載置されている前記ケース部材の外周部を一括的に切断することにより複数個の電子装置を同時に得る工程Cと、を含むものである。
【選択図】図2
An electronic device capable of improving productivity by simplifying an assembling process is provided.
A method of manufacturing an electronic device according to the present invention includes a step A of preparing a mother board having a plurality of substrate areas arranged in a matrix and mounting an electronic component element on each board area of the mother board. And a step B of placing and bonding a case member having an annular side wall portion standing on the outer peripheral portion for sealing the electronic component element on the substrate region, and the case member placed on each substrate region of the mother substrate. And a step C of simultaneously obtaining a plurality of electronic devices by collectively cutting the outer periphery of the case member.
[Selection] Figure 2

Description

本発明は、携帯用通信機器や電子計算機等の電子機器に用いられる水晶振動子等の電子装置に関するものである。   The present invention relates to an electronic device such as a crystal resonator used in an electronic device such as a portable communication device or an electronic computer.

従来より、携帯用通信機器や電子計算機等の電子機器に水晶振動子が用いられている。
かかる従来の水晶振動子としては、例えば図6に示す如く、一対の接続パッドが設けられている絶縁基体21の上面に、前記接続パッドに導電性接着剤を介して電気的に接続される一対の振動電極を有した水晶振動素子25と、該水晶振動素子25を囲繞するシールリング26とを取着させるとともに、前記シールリング26の上部に金属製の蓋体27をシーム溶接等で接合することにより水晶振動素子25の搭載領域を気密封止した構造のものが知られており(例えば、特許文献1参照)、かかる水晶振動子は、絶縁基体21の下面に設けられる入出力端子を介して水晶振動素子25の振動電極間に外部からの変動電圧が印加されると、水晶振動素子25の特性に応じた所定の周波数で厚みすべり振動を起こすようになっており、その共振周波数に基づいて外部の発振回路で所定周波数の基準信号が発振・出力される。このような基準信号は携帯用通信機器等の電子機器におけるクロック信号として利用されることとなる。
Conventionally, crystal resonators have been used in electronic devices such as portable communication devices and electronic computers.
As such a conventional crystal resonator, for example, as shown in FIG. 6, a pair of electrodes that are electrically connected to the upper surface of an insulating base 21 provided with a pair of connection pads via a conductive adhesive. A crystal resonator element 25 having a plurality of vibration electrodes and a seal ring 26 surrounding the crystal resonator element 25 are attached, and a metal lid 27 is joined to the upper portion of the seal ring 26 by seam welding or the like. Accordingly, there is known a structure in which the mounting region of the crystal resonator element 25 is hermetically sealed (see, for example, Patent Document 1). The crystal resonator is connected via an input / output terminal provided on the lower surface of the insulating base 21. When a fluctuation voltage from the outside is applied between the vibrating electrodes of the quartz vibrating element 25, thickness shear vibration is caused at a predetermined frequency according to the characteristics of the quartz vibrating element 25, and the resonance Reference signal having a predetermined frequency is oscillated and output by the external oscillation circuit based on the wave number. Such a reference signal is used as a clock signal in an electronic device such as a portable communication device.

また、上述した水晶振動子の絶縁基体21は、複数個の絶縁基体21を切り出すことができる大型の母基板を分割して個片を得る多数個取りの手法によって形成されるようになっており、得られた個片(絶縁基体21)に水晶振動素子25とシールリング26とを取着させた上、シールリング26の上部に蓋体27を接合することによって水晶振動子が製作される。   Further, the above-described insulating base 21 of the crystal resonator is formed by a multi-cavity technique in which a large mother substrate from which a plurality of insulating bases 21 can be cut is obtained to obtain individual pieces. Then, the quartz resonator element 25 and the seal ring 26 are attached to the obtained piece (insulating base member 21), and the lid 27 is joined to the upper portion of the seal ring 26, whereby the crystal resonator is manufactured.

尚、上述した水晶振動素子の蓋体27も、絶縁基体21と同様に、複数個の蓋体27を切り出すことができる大型の金属板を分割して得るのが一般的であり、水晶振動子の使用時、この蓋体27をグランド電位に保持しておくことにより外部からのノイズが遮蔽される。このような蓋体27は、シールリング26や絶縁基体21の導体パターンを介して絶縁基体21下面のグランド端子に電気的に接続される。
特開2001−274649号公報 特開2001−028517号公報
The lid 27 of the crystal resonator element described above is also generally obtained by dividing a large metal plate from which a plurality of lids 27 can be cut out, like the insulating base 21. During use, external noise is shielded by holding the lid 27 at the ground potential. Such a lid 27 is electrically connected to the ground terminal on the lower surface of the insulating base 21 via the seal ring 26 and the conductor pattern of the insulating base 21.
JP 2001-274649 A JP 2001-028517 A

しかしながら、上述した従来の水晶振動子においては、その組み立てに先立って、大型の母基板を分割することにより絶縁基体21を得ておく必要があり、前記絶縁基板21をそれぞれ別個の分割工程で得るようにしていたことから、水晶振動子の組み立て工程が煩雑なものとなり、生産性の向上に供しないという欠点を有していた。   However, in the above-described conventional crystal resonator, it is necessary to obtain an insulating base 21 by dividing a large mother substrate prior to its assembly, and the insulating substrates 21 are obtained in separate dividing steps. As a result, the assembling process of the crystal unit becomes complicated, and there is a disadvantage that the productivity is not improved.

また上述したように、絶縁基体21と蓋体27とを事前に準備してから水晶振動子を組み立てる場合、複数個の絶縁基体21を個々にキャリアに保持させるための作業が必要となり、これによっても水晶振動子の組み立て工程が煩雑なものとなる欠点を有していた。
本発明は上述の欠点に鑑み案出されたもので、その目的は、組み立て工程を簡略化して生産性を向上させることができる電子装置を提供することにある。
Further, as described above, when assembling the crystal resonator after the insulating base 21 and the lid 27 are prepared in advance, it is necessary to perform a work for holding the plurality of insulating bases 21 individually on the carrier. However, there is a drawback that the assembly process of the crystal resonator becomes complicated.
The present invention has been devised in view of the above-described drawbacks, and an object of the present invention is to provide an electronic device that can simplify an assembly process and improve productivity.

マトリクス状に配列された複数個の基板領域を有する母基板を準備し、該母基板の各基板領域に電子部品素子を搭載する工程Aと、
前記電子部品素子を封止する外周部に環状の側壁部が立設されているケース部材を、前記基板領域に載置・接合する工程Bと、
前記母基板の各基板領域に載置されている前記ケース部材の外周部を一括的に切断することにより複数個の電子装置を同時に得る工程Cと、を含むことを特徴とするものである。
Preparing a mother board having a plurality of substrate areas arranged in a matrix and mounting electronic component elements on each board area of the mother board; and
A step B of mounting and joining a case member in which an annular side wall portion is erected on an outer peripheral portion for sealing the electronic component element to the substrate region;
And a step C of simultaneously obtaining a plurality of electronic devices by collectively cutting the outer peripheral portion of the case member placed on each substrate region of the mother board.

また本発明の電子装置の製造方法は、前記電子部品素子が水晶振動素子であることを特徴とするものである。
さらに本発明の電子装置の製造方法は、前記工程Bにおいて、前記ケース部材に形成されている凸部が、前記母基板の基板領域にある外周壁部のへこみとを嵌合した後、嵌合箇所を仮止することを特徴とするものである。
The electronic device manufacturing method of the present invention is characterized in that the electronic component element is a crystal resonator element.
Furthermore, in the manufacturing method of the electronic device according to the present invention, in the step B, the protrusion formed on the case member is fitted to the recess of the outer peripheral wall portion in the substrate region of the mother board. The location is temporarily fixed.

また更に、本発明の電子装置の製造方法は、前記工程Cにおいて、前記母基板の切断箇所は前記基板領域にある外周壁部の内側で、一括的に切断し、切断後は前記ケース部材の少なくとも一箇所の凸部を切除することを特徴とするものである。   Still further, in the method of manufacturing an electronic device according to the present invention, in the step C, the cut portion of the mother substrate is collectively cut inside the outer peripheral wall portion in the substrate region, and after cutting, the case member is cut. At least one convex portion is cut out.

本発明の電子装置の製造方法によれば、まず各基板領域に電子部品素子が搭載されている母基板と該母基板の基板領域に対応する部材とを準備し、この環状の側壁部が立設されているケース部材を前記電子部品素子が封止されるようにして前記母基板上に載置・接合し、しかる後、前記母基板の各基板領域に接合されている前記ケース部材搭載箇所の外周部に沿って、一括的に切断することにより複数個の電子装置を同時に得るようにしたことから、電子装置の組み立てに先立って、基板を予め個片に分割しておく必要はなく、一括的な分割によって基板を切断することができる。   According to the method for manufacturing an electronic device of the present invention, first, a mother board on which electronic component elements are mounted in each board area and a member corresponding to the board area of the mother board are prepared, and the annular side wall portion stands. Place the case member on the mother board so that the electronic component element is sealed, and then join the case member, and then, the case member mounting location joined to each substrate region of the mother board In order to obtain a plurality of electronic devices at the same time by collectively cutting along the outer peripheral portion of the substrate, it is not necessary to divide the substrate into individual pieces prior to assembly of the electronic device, The substrate can be cut by batch division.

しかもこの場合、電子装置の組み立てに際して、母基板そのものがキャリアとして機能するようになっていることから、母基板より分割した個片を個々にキャリアに保持させるといった煩雑な作業は一切不要となる。
これにより、電子装置の組み立て工程が大幅に簡素化されるようになり、電子装置の生産性向上に供することが可能となる。
In addition, in this case, when the electronic device is assembled, the mother board itself functions as a carrier, so that a complicated operation of individually holding the pieces divided from the mother board on the carrier becomes unnecessary.
As a result, the assembly process of the electronic device is greatly simplified, and the productivity of the electronic device can be improved.

また本発明の電子装置の製造方法によれば、前記基板領域と前記ケース部材との位置決めはケース部材に形成する少なくとも一箇所の凸部と、前記基板領域の外周壁部のへこみとを嵌合し、嵌合箇所を仮止した後、熱処理をすることによって接合されている。前記母基板の前記基板領域で一括的に切断し、切断後は前記ケース部材の少なくとも一箇所の凸部を切除するようにすれば、前記ケース部材がずれることにより、気密封止が出来ない為におこるリーク不良等の不具合が生じるのを防止する。   According to the electronic device manufacturing method of the present invention, the positioning of the substrate region and the case member is performed by fitting at least one convex portion formed on the case member and a recess in the outer peripheral wall portion of the substrate region. And after joining a fitting location temporarily, it joins by heat-processing. If the substrate region of the mother substrate is cut in a lump and, after cutting, at least one convex portion of the case member is cut off, the case member is displaced, so that hermetic sealing cannot be performed. To prevent problems such as leakage failure.

さらに本発明の電子装置の製造方法によれば、前記母基板の切断箇所は前記基板領域に形成する外周壁部の内側で一括的に切断し、前記基板領域と前記ケース部材との位置決めは前記ケース部材に形成する複数箇所の凸部と、前記凸部と対応する前記基板領域の前記外周壁部のへこみとを嵌合し、切断後は前記ケース部材の少なくとも一箇所の凸部を切除することにより、前記母基板の切断に際してダイサーが接合材に接触することは少なく、これによってダイサーとの接触により、接合材にクラック等の不具合が生じるのを有効に防止することができる。   Further, according to the method for manufacturing an electronic device of the present invention, the cut portion of the mother substrate is collectively cut inside the outer peripheral wall portion formed in the substrate region, and the positioning of the substrate region and the case member is performed as described above. A plurality of convex portions formed on the case member and a dent in the outer peripheral wall portion of the substrate region corresponding to the convex portion are fitted, and after cutting, at least one convex portion of the case member is cut off. As a result, the dicer is less likely to come into contact with the bonding material when the mother substrate is cut, so that it is possible to effectively prevent defects such as cracks in the bonding material due to contact with the dicer.

発明の実施するための最良の形態BEST MODE FOR CARRYING OUT THE INVENTION

以下、本発明を添付図面に基づいて詳細に説明する。
図1は本発明の製造方法を水晶振動子の製造に適用した場合に得られる水晶振動子の分解斜視図であり、同図に示す水晶振動子は、大略的に、絶縁基体1と、電子部品素子としての水晶振動素子5と、ケース部材8とで構成されている。
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is an exploded perspective view of a crystal resonator obtained when the manufacturing method of the present invention is applied to the manufacture of a crystal resonator. The crystal resonator shown in FIG. It is composed of a crystal resonator element 5 as a component element and a case member 8.

絶縁基体1は、例えば、ガラス−セラミック、アルミナセラミックス等のセラミック材料によって形成されており、その上面側には、一対の接続パッド2と周縁を囲む接合用の導体層4とが設けられており、また下面側には入力端子、出力端子、グランド端子等の外部端子3が設けられている。   The insulating substrate 1 is made of, for example, a ceramic material such as glass-ceramic or alumina ceramic, and a pair of connection pads 2 and a bonding conductor layer 4 surrounding the periphery are provided on the upper surface side. In addition, external terminals 3 such as an input terminal, an output terminal, and a ground terminal are provided on the lower surface side.

かかる絶縁基体1の上面側に設けられている一対の接続パッド2は、その上面側で後述する水晶振動素子5の振動電極6に導電性接着剤を介して電気的に接続され、下面側で絶縁基体1上の導体層4や絶縁基体内部のビア導体等を介して絶縁基体下面の入出力端子(入力端子、出力端子)に電気的に接続される。   A pair of connection pads 2 provided on the upper surface side of the insulating base 1 are electrically connected to a vibration electrode 6 of a crystal resonator element 5 described later on the upper surface side via a conductive adhesive, and on the lower surface side. It is electrically connected to an input / output terminal (input terminal, output terminal) on the lower surface of the insulating substrate via the conductor layer 4 on the insulating substrate 1 and via conductors inside the insulating substrate.

一方、前記導体層4は、その上面側で後述するケース部材8に接合材9を介して電気的に接続され、下面側で絶縁基体内部のビア導体等を介して絶縁基体下面のグランド端子に電気的に接続される。
前記導体層4は、後述するケース部材8を接合材6を介して容器体1の上面に接合させるためのものであり、かかる導体層4を、上述したように、WもしくはMoから成る基層の表面にNi層及びAu層を順次被着させた構成となしておく。
On the other hand, the conductor layer 4 is electrically connected to a case member 8 (described later) via a bonding material 9 on the upper surface side, and is connected to a ground terminal on the lower surface of the insulating substrate via a via conductor or the like inside the insulating substrate on the lower surface side. Electrically connected.
The conductor layer 4 is for joining a case member 8 to be described later to the upper surface of the container body 1 via the joining material 6, and the conductor layer 4 is a base layer made of W or Mo as described above. The structure is such that a Ni layer and an Au layer are sequentially deposited on the surface.

尚、上述した外部端子は、水晶振動子をマザーボード等の外部電気回路に搭載する際、外部電気回路の回路配線と半田等の導電性接着剤を介して電気的に接続されるようになっている。
また、上述した絶縁基体1の上面側には水晶振動素子5が搭載される。
水晶振動素子5は、所定の結晶軸でカットした水晶片の両主面に一対の振動電極6を被着・形成してなり、外部からの変動電圧が一対の振動電極6を介して水晶片に印加されると、所定の周波数で厚みすべり振動を起こす。
The external terminal described above is electrically connected to the circuit wiring of the external electric circuit via a conductive adhesive such as solder when the crystal resonator is mounted on an external electric circuit such as a mother board. Yes.
In addition, a crystal resonator element 5 is mounted on the upper surface side of the insulating base 1 described above.
The quartz resonator element 5 is formed by attaching and forming a pair of vibrating electrodes 6 on both main surfaces of a quartz piece cut along a predetermined crystal axis, and a fluctuation voltage from the outside passes through the pair of vibrating electrodes 6 and the quartz piece. When applied to, thickness shear vibration occurs at a predetermined frequency.

このような水晶振動素子5は、その両主面に被着されている振動電極6と絶縁基体上面の対応する接続パッド2とを導電性接着剤7を介して電気的・機械的に接続することによって絶縁基体1の上面側に搭載される。
ケース部材8の側壁が絶縁基体1の露出面に沿って外側に折り曲げられており、該折り曲げ部にわたってケース部材8と絶縁基体1とがロウ付けされているので、ケース部材8と絶縁基体1との接合部の面積が増加し、ケース部材8と絶縁基体1との接合強度が向上すると共に、気密性も向上する。
Such a quartz-crystal vibrating element 5 electrically and mechanically connects the vibrating electrode 6 attached to both main surfaces thereof and the corresponding connection pad 2 on the upper surface of the insulating base via the conductive adhesive 7. Thus, the insulating substrate 1 is mounted on the upper surface side.
The side wall of the case member 8 is bent outward along the exposed surface of the insulating base 1, and the case member 8 and the insulating base 1 are brazed across the bent portion. The area of the joint portion increases, the joint strength between the case member 8 and the insulating substrate 1 is improved, and the airtightness is also improved.

ケース部材8は、絶縁基体1の領域に水晶振動素子5を収容して気密封止するためのものであり、また先に述べた導体層4を介して絶縁基体下面のグランド端子に電気的に接続される。よって、水晶振動子の使用時、ケース部材8はグランド電位に保持されることとなり、水晶振動素子5がケース部材8のシールド効果によって外部からの不要な電気的作用、例えばノイズ等から良好に保護される。   The case member 8 is for accommodating the quartz vibrating element 5 in the region of the insulating base 1 and hermetically sealing it, and is electrically connected to the ground terminal on the lower surface of the insulating base via the conductor layer 4 described above. Connected. Therefore, when the crystal resonator is used, the case member 8 is held at the ground potential, and the crystal vibration element 5 is well protected from unnecessary external electrical action such as noise due to the shielding effect of the case member 8. Is done.

かくして上述した水晶振動子は、絶縁基体1の下面に設けられる入出力端子を介して水晶振動素子5の振動電極6−6間に外部からの変動電圧を印加し、水晶振動素子5の特性に応じた所定の周波数で厚みすべり振動を起こさせることによって水晶振動子として機能し、かかる水晶振動子の共振周波数に基づいて外部の発振回路で所定周波数の基準信号が発振・出力される。そして、このような基準信号は携帯用通信機器等の電子機器におけるクロック信号として利用されることとなる。   Thus, the crystal resonator described above applies a variable voltage from the outside between the vibration electrodes 6-6 of the crystal resonator element 5 via the input / output terminal provided on the lower surface of the insulating base 1. A thickness-shear vibration is caused at a predetermined frequency according to the function of the crystal resonator, and a reference signal having a predetermined frequency is oscillated and output by an external oscillation circuit based on the resonance frequency of the crystal resonator. Such a reference signal is used as a clock signal in an electronic device such as a portable communication device.

次に上述した水晶振動子の製造方法について図2を用いて説明する。
(工程A)
まず、図2(a)に示す如く、マトリクス状に配列された複数個の基板領域を有する母基板14を準備し、母基板14の各基板領域に水晶振動素子5を搭載する。
前記母基板14は、例えば、ガラス−セラミック、アルミナセラミックス等のセラミック材料からなる矩形状の平板状基板が3層積層され、さらにセラミック材料からなるマトリクス状、即ち、縦m列×横n行(m,nは2以上の自然数。)の行列状に配置された多数の矩形状の孔を有する基板を積層して形成されており、マトリクス状に配置された前記孔を中心に有する個々の基板領域には、上面側にキャビティ部底面の一対の接続パッド2と開口周縁を囲む接合用の導体層4が被着・形成され、下面側には入出力端子やグランド端子等の外部端子3が被着・形成されている。
Next, a manufacturing method of the above-described crystal resonator will be described with reference to FIG.
(Process A)
First, as shown in FIG. 2A, a mother substrate 14 having a plurality of substrate regions arranged in a matrix is prepared, and the crystal resonator element 5 is mounted on each substrate region of the mother substrate 14.
The mother substrate 14 includes, for example, three layers of rectangular flat plate substrates made of a ceramic material such as glass-ceramic and alumina ceramic, and further a matrix shape made of a ceramic material, that is, vertical m columns × horizontal n rows ( m and n are natural numbers of 2 or more.) Each substrate is formed by laminating a plurality of substrates having a plurality of rectangular holes arranged in a matrix and having the holes arranged in a matrix at the center. In the region, a pair of connection pads 2 on the bottom surface of the cavity portion and a bonding conductor layer 4 surrounding the periphery of the opening are deposited and formed on the upper surface side, and external terminals 3 such as input / output terminals and ground terminals are formed on the lower surface side. Deposited and formed.

このような母基板14は、例えば、アルミナセラミックス等から成るセラミック材料粉末に適当な有機溶剤等を添加・混合して得たセラミックグリーンシートの表面等に接続パッド2や外部端子3、導体パターン等となる導体ペーストを所定パターンに印刷・塗布するとともに、これを複数枚積層してプレス成形した後、高温で焼成することによって製作される。
また、得られた母基板14の各基板領域には水晶振動素子5が1個ずつ搭載され、水晶振動素子5の振動電極6と母基板上面の搭載パッド2とが導電性接着剤7を介して電気的・機械的に接続される。
尚、本実施形態においては、図2に示すように、マトリクス状に配された基板領域の間に所定の捨代領域が設けられている。
Such a mother substrate 14 is formed, for example, on the surface of a ceramic green sheet obtained by adding and mixing a suitable organic solvent or the like to a ceramic material powder made of alumina ceramic or the like, and the connection pads 2, external terminals 3, conductor patterns, etc. The conductor paste is printed and applied in a predetermined pattern, and a plurality of the pastes are stacked, press-molded, and then fired at a high temperature.
Further, one crystal resonator element 5 is mounted on each substrate region of the obtained mother substrate 14, and the vibration electrode 6 of the crystal resonator element 5 and the mounting pad 2 on the upper surface of the mother substrate are interposed via the conductive adhesive 7. Connected electrically and mechanically.
In the present embodiment, as shown in FIG. 2, a predetermined spare area is provided between the substrate areas arranged in a matrix.

(工程B)
次に、図2(b)に示す如く、母基板14の基板領域と1対1に対応するケース部材8を、前記基板領域に搭載されている水晶振動素子5が封止されるようにして母基板14上に載置する。
前記基板領域には、外周壁部13が設けられており、前記ケース部材8には、凸部10が形成されている。前記ケース部材8の凸部10と前記外周壁部13のへこみ12とを嵌合し、レーザーや超音波等を使用し、仮止を行う。
前記ケース部材8は、例えば、42アロイやコバール,リン青銅等の金属から成る、厚み60μm〜100μmの金属板を従来周知の板金加工にて所定形状に加工することによって製作される。
(Process B)
Next, as shown in FIG. 2B, the case member 8 corresponding to the substrate region of the mother substrate 14 is placed in a one-to-one manner so that the crystal resonator element 5 mounted on the substrate region is sealed. Place on the mother board 14.
An outer peripheral wall portion 13 is provided in the substrate region, and a convex portion 10 is formed on the case member 8. The convex part 10 of the said case member 8 and the dent 12 of the said outer peripheral wall part 13 are fitted, and a temporary stop is performed using a laser, an ultrasonic wave, etc.
The case member 8 is manufactured by processing a metal plate having a thickness of 60 μm to 100 μm made of metal such as 42 alloy, Kovar, or phosphor bronze into a predetermined shape by a conventionally known sheet metal processing.

かかるケース部材8の下面には、ニッケル(Ni)層、金錫(Au−Sn)層とからなる接合材9が形成されている。かかる接合材9は前記ケース部材8を絶縁基体1に対して接合するためのろう材層として機能するものであり、金錫の組成比率は、例えば、金80%、錫20%に設定され、その厚みは、例えば、10μm〜30μmに設定される。 A bonding material 9 made of a nickel (Ni) layer and a gold tin (Au—Sn) layer is formed on the lower surface of the case member 8. The bonding material 9 functions as a brazing material layer for bonding the case member 8 to the insulating base 1, and the composition ratio of gold tin is set to, for example, 80% gold and 20% tin, The thickness is set to 10 μm to 30 μm, for example.

このようなケース部材8を、各カバー領域11の内側に対応する基板領域の水晶振動素子5が配されるようにして母基板14上に載置させ、しかる後、これを例えば、300℃〜350℃の温度に保たれた加熱炉の中に入れ、前記接合材9を高温で加熱・溶融させることによってケース部材8が母基板14に接合される。その後、一体化された母基板14とケース部材8は徐々に室温まで冷却される。
尚、上述した一連の接合工程は、窒素ガスやアルゴンガス等の不活性ガス雰囲気中若しくは、真空雰囲気中で行うのが好ましく、これによって水晶振動素子5が収納される空間には不活性ガスが充満されるため、水晶振動素子5が酸素や大気中の水分等によって腐食・劣化するのを有効に防止することができる。
Such a case member 8 is placed on the mother substrate 14 such that the crystal resonator elements 5 of the substrate region corresponding to the inside of each cover region 11 are arranged, and thereafter, this is, for example, 300 ° C. to The case member 8 is joined to the mother board 14 by placing in a heating furnace maintained at a temperature of 350 ° C. and heating and melting the joining material 9 at a high temperature. Thereafter, the integrated mother board 14 and case member 8 are gradually cooled to room temperature.
The series of bonding steps described above is preferably performed in an inert gas atmosphere such as nitrogen gas or argon gas, or in a vacuum atmosphere, whereby an inert gas is contained in the space in which the crystal resonator element 5 is accommodated. Since it is filled, it is possible to effectively prevent the quartz resonator element 5 from being corroded and deteriorated by oxygen, moisture in the atmosphere, or the like.

(工程C)
そして最後に、図2(c)に示す如く、工程Bにおいて一体化した母基板14の切断箇所は前記基板領域の外周壁部で一括的に切断し、切断後は前記ケース部材8の少なくとも一箇所の凸部10を切除する。よって、母基板14の切断に際してダイサーが接合材に接触することは少なく、これによってダイサーとの接触により接合材にクラック等の不具合が生じるのを有効に防止することができる。
(Process C)
Finally, as shown in FIG. 2C, the cut portions of the mother substrate 14 integrated in the step B are collectively cut at the outer peripheral wall portion of the substrate region, and after cutting, at least one of the case members 8 is cut. The convex part 10 of the location is excised. Therefore, the dicer is less likely to come into contact with the bonding material when the mother substrate 14 is cut, thereby effectively preventing a defect such as a crack from occurring in the bonding material due to the contact with the dicer.

母基板14の切断は、例えば、ダイサー等を用いて母基板14を母基板側から一括的に切断することによって行われ、これによって複数個の水晶振動子が同時に得られる。
しかもこの場合、水晶振動子の組み立てに際して、母基板そのものがキャリアとして機能するようになっていることから、母基板14より分割した個片を個々にキャリアに保持させるといった煩雑な作業は一切不要となる。
The mother substrate 14 is cut by, for example, collectively cutting the mother substrate 14 from the mother substrate side using a dicer or the like, whereby a plurality of crystal resonators are obtained simultaneously.
In addition, in this case, since the mother board itself functions as a carrier when assembling the crystal unit, there is no need for complicated operations such as individually holding pieces divided from the mother board 14 on the carrier. Become.

これにより、水晶振動子の組み立て工程が大幅に簡素化されるようになり、水晶振動子の生産性向上に供することが可能となる。
尚、本発明は上述の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。
また上述した実施形態の工程Cにおいて、図2(b)に示す如く、母基板14の切断箇所に両者を接合する接合材9を存在させないでおくようにすれば、母基板14及びケース部材8の切断に際してダイサーが接合材9に接触することは少なく、これによってダイサーとの接触により接合材9にクラック等の不具合が生じて封止性が劣化するのを有効に防止することができる。従って、工程Cにおいて母基板14の切断箇所に前記母基板と前記ケース部材8とを接合する接合材9を存在させないでおくことが好ましい。
As a result, the assembly process of the crystal unit is greatly simplified, and the productivity of the crystal unit can be improved.
In addition, this invention is not limited to the above-mentioned embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention.
Further, in the step C of the above-described embodiment, as shown in FIG. 2B, if the bonding material 9 for bonding both is not present at the cut portion of the mother substrate 14, the mother substrate 14 and the case member 8 are removed. The dicer rarely comes into contact with the bonding material 9 at the time of cutting, so that it is possible to effectively prevent defects such as cracks in the bonding material 9 due to the contact with the dicer, and deterioration of the sealing performance. Therefore, it is preferable that the bonding material 9 for bonding the mother substrate and the case member 8 does not exist at the cut portion of the mother substrate 14 in the process C.

更に上述した実施形態においては、母基板14の基板領域間に捨代領域を設けるようにしたが、間に捨代領域を設けることなく基板領域同士を近接させて配置するようにしても構わない。このことはケース部材8においても同様である。
更にまた上述した実施形態においては、電子部品素子として水晶振動素子を用いることにより水晶振動子を構成するようにしたが、それ以外の電子装置、例えば、電子部品素子としてIC素子や他の圧電素子を用いるようにした電子装置においても本発明は適用可能である。
なお、本明細中に記載するケース部材8は逆凹状形状で描画しているが、ケース形状が平坦であっても本発明で意図する思想で応用することができる。
Further, in the above-described embodiment, the spare area is provided between the substrate areas of the mother board 14, but the board areas may be arranged close to each other without providing a spare area therebetween. . The same applies to the case member 8.
Furthermore, in the above-described embodiment, the crystal resonator is configured by using a crystal resonator element as an electronic component element. However, other electronic devices, for example, an IC element or other piezoelectric element as an electronic component element are used. The present invention can also be applied to an electronic apparatus using the above.
In addition, although the case member 8 described in this specification is drawn by reverse concave shape, even if the case shape is flat, it can be applied with the idea intended by the present invention.

本発明の製造方法によって製作した水晶振動子(電子装置)の分解斜視図である。It is a disassembled perspective view of the crystal oscillator (electronic device) manufactured with the manufacturing method of this invention. (a)乃至(c)は本発明の一実施形態にかかる製造方法を説明するための斜視図である。(A) thru | or (c) is a perspective view for demonstrating the manufacturing method concerning one Embodiment of this invention. 従来の製造方法によって製作した水晶振動子(電子装置)の断面図である。It is sectional drawing of the crystal oscillator (electronic device) manufactured with the conventional manufacturing method.

符号の説明Explanation of symbols

1・・・絶縁基体
2・・・接続パッド
3・・・外部端子
4・・・導体層
5・・・水晶振動素子(電子部品素子)
6・・・振動電極
7・・・導電性接着剤
8・・・カバー部材
9・・・接合材
10・・・凸部
11・・・カバー領域
12・・・へこみ
13・・・外周壁部
14・・・母基板
DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 2 ... Connection pad 3 ... External terminal 4 ... Conductor layer 5 ... Crystal oscillation element (electronic component element)
DESCRIPTION OF SYMBOLS 6 ... Vibrating electrode 7 ... Conductive adhesive 8 ... Cover member 9 ... Bonding material 10 ... Convex part 11 ... Cover area | region 12 ... Indentation 13 ... Outer peripheral wall part 14 ... Mother board

Claims (4)

マトリクス状に配列された複数個の基板領域を有する母基板を準備し、該母基板の各基板領域に電子部品素子を搭載する工程Aと、
前記電子部品素子を封止する外周部に環状の側壁部が立設されているケース部材を、前記基板領域に載置・接合する工程Bと、
前記母基板の各基板領域に載置されている前記ケース部材の外周部を一括的に切断することにより複数個の電子装置を同時に得る工程Cと、を含む電子装置の製造方法。
Preparing a mother board having a plurality of substrate areas arranged in a matrix, and mounting an electronic component element on each board area of the mother board; and
A step B of mounting and joining a case member in which an annular side wall portion is erected on an outer peripheral portion for sealing the electronic component element to the substrate region;
And a step C of simultaneously obtaining a plurality of electronic devices by collectively cutting the outer peripheral portion of the case member placed on each substrate region of the mother substrate.
前記電子部品素子が水晶振動素子であることを特徴とする請求項1に記載の電子装置の製造方法。 The method of manufacturing an electronic device according to claim 1, wherein the electronic component element is a crystal resonator element. 前記工程Bにおいて、前記ケース部材に形成されている凸部が、前記母基板の基板領域にある外周壁部のへこみとを嵌合した後、嵌合箇所を仮止することを特徴とする請求項1または請求項2記載の電子装置の製造方法。 In the step B, the projecting portion formed on the case member temporarily fits the fitting portion after fitting the recess of the outer peripheral wall portion in the substrate region of the mother board. An electronic device manufacturing method according to claim 1 or 2. 前記工程Cにおいて、前記母基板の切断箇所は前記基板領域にある外周壁部で一括的に切断し、切断後は前記ケース部材の少なくとも一箇所の凸部を切除することを特徴とする請求項1又は請求項2に記載の電子装置の製造方法。
The step C is characterized in that, in the step C, the cut portion of the mother substrate is collectively cut by an outer peripheral wall portion in the substrate region, and after the cutting, at least one convex portion of the case member is cut off. A method for manufacturing an electronic device according to claim 1.
JP2004253599A 2004-08-31 2004-08-31 Manufacturing method of electronic device Pending JP2006074291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004253599A JP2006074291A (en) 2004-08-31 2004-08-31 Manufacturing method of electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004253599A JP2006074291A (en) 2004-08-31 2004-08-31 Manufacturing method of electronic device

Publications (1)

Publication Number Publication Date
JP2006074291A true JP2006074291A (en) 2006-03-16

Family

ID=36154447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004253599A Pending JP2006074291A (en) 2004-08-31 2004-08-31 Manufacturing method of electronic device

Country Status (1)

Country Link
JP (1) JP2006074291A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011253951A (en) * 2010-06-02 2011-12-15 Mitsubishi Electric Corp Electronic component package, and method of manufacturing the same
US9343382B2 (en) 2011-11-22 2016-05-17 Fujitsu Limited Electronic device and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011253951A (en) * 2010-06-02 2011-12-15 Mitsubishi Electric Corp Electronic component package, and method of manufacturing the same
US9343382B2 (en) 2011-11-22 2016-05-17 Fujitsu Limited Electronic device and manufacturing method thereof

Similar Documents

Publication Publication Date Title
JP2006279872A (en) Piezoelectric vibrator, manufacturing method thereof, and manufacturing method of piezoelectric oscillator using the piezoelectric vibrator
JP2011147054A (en) Electronic apparatus, and method of manufacturing the same
JP4545004B2 (en) Piezoelectric oscillator
JP4493382B2 (en) Manufacturing method of electronic device
JP4380419B2 (en) Manufacturing method of electronic device
JP4262116B2 (en) Manufacturing method of electronic device
JP2007060593A (en) Piezoelectric device and manufacturing method thereof
JP4512186B2 (en) Method for manufacturing piezoelectric vibrator
JP4262117B2 (en) Manufacturing method of electronic device
JP2006074291A (en) Manufacturing method of electronic device
JP4384546B2 (en) Method of manufacturing electronic parts
JP4578231B2 (en) Piezoelectric oscillator and manufacturing method thereof
JP4409361B2 (en) Manufacturing method of electronic device
JP4585908B2 (en) Method for manufacturing piezoelectric device
JP4472445B2 (en) Method for manufacturing piezoelectric oscillator
JP2005347881A (en) Method for manufacturing piezoelectric oscillator
JP4384567B2 (en) Manufacturing method of temperature compensated crystal oscillator
JP4113459B2 (en) Manufacturing method of temperature compensated crystal oscillator
JP2007180885A (en) Piezoelectric device
JP4673670B2 (en) Method for manufacturing piezoelectric device
JP2009065205A (en) Manufacturing method of electronic device
JP2009105422A (en) Manufacturing method of electronic device
JP2007097040A (en) Piezoelectric vibrator and piezoelectric oscillator
JP2007180701A (en) Piezoelectric oscillator and manufacturing method thereof
JP2005184759A (en) Manufacturing method of electronic device