JP2005517814A - 有機酸錯化剤を含む電気めっき溶液 - Google Patents
有機酸錯化剤を含む電気めっき溶液 Download PDFInfo
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- JP2005517814A JP2005517814A JP2003569890A JP2003569890A JP2005517814A JP 2005517814 A JP2005517814 A JP 2005517814A JP 2003569890 A JP2003569890 A JP 2003569890A JP 2003569890 A JP2003569890 A JP 2003569890A JP 2005517814 A JP2005517814 A JP 2005517814A
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- metal
- electroplatable
- tin
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- 239000008139 complexing agent Substances 0.000 title claims abstract description 28
- 238000009713 electroplating Methods 0.000 title claims abstract description 26
- 150000007524 organic acids Chemical class 0.000 title description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract description 51
- 239000002184 metal Substances 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000002131 composite material Substances 0.000 claims abstract description 25
- 150000001875 compounds Chemical class 0.000 claims abstract description 12
- 230000002411 adverse Effects 0.000 claims abstract description 10
- 150000002739 metals Chemical class 0.000 claims abstract description 7
- 230000003647 oxidation Effects 0.000 claims abstract description 7
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 7
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 5
- 230000008021 deposition Effects 0.000 claims abstract description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 4
- 150000002894 organic compounds Chemical class 0.000 claims abstract description 4
- 239000003002 pH adjusting agent Substances 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 3
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims description 58
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 44
- 150000003839 salts Chemical class 0.000 claims description 24
- 229960005070 ascorbic acid Drugs 0.000 claims description 23
- 235000010323 ascorbic acid Nutrition 0.000 claims description 21
- 239000011668 ascorbic acid Substances 0.000 claims description 21
- 239000002244 precipitate Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 16
- 239000004094 surface-active agent Substances 0.000 claims description 15
- 239000002253 acid Substances 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- SBJKKFFYIZUCET-JLAZNSOCSA-N Dehydro-L-ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(=O)C1=O SBJKKFFYIZUCET-JLAZNSOCSA-N 0.000 claims description 7
- 229910001174 tin-lead alloy Inorganic materials 0.000 claims description 7
- 239000002659 electrodeposit Substances 0.000 claims description 6
- -1 acetate compound Chemical class 0.000 claims description 5
- 238000009833 condensation Methods 0.000 claims description 5
- 230000005494 condensation Effects 0.000 claims description 5
- 230000002829 reductive effect Effects 0.000 claims description 5
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical class [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 4
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 claims description 4
- CIWBSHSKHKDKBQ-DUZGATOHSA-N D-isoascorbic acid Chemical compound OC[C@@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-DUZGATOHSA-N 0.000 claims description 4
- 229940072107 ascorbate Drugs 0.000 claims description 4
- 239000002585 base Substances 0.000 claims description 4
- 238000004090 dissolution Methods 0.000 claims description 4
- 235000010350 erythorbic acid Nutrition 0.000 claims description 4
- 229940026239 isoascorbic acid Drugs 0.000 claims description 4
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical compound [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 claims description 4
- ILBBPBRROBHKQL-SAMGZKJBSA-N (2s)-3,4-dihydroxy-2-[(1r,2r)-1,2,3-trihydroxypropyl]-2h-furan-5-one Chemical compound OC[C@@H](O)[C@@H](O)[C@@H]1OC(=O)C(O)=C1O ILBBPBRROBHKQL-SAMGZKJBSA-N 0.000 claims description 3
- AEMOLEFTQBMNLQ-YMDCURPLSA-N D-galactopyranuronic acid Chemical compound OC1O[C@H](C(O)=O)[C@H](O)[C@H](O)[C@H]1O AEMOLEFTQBMNLQ-YMDCURPLSA-N 0.000 claims description 3
- SBJKKFFYIZUCET-UHFFFAOYSA-N Dehydroascorbic acid Natural products OCC(O)C1OC(=O)C(=O)C1=O SBJKKFFYIZUCET-UHFFFAOYSA-N 0.000 claims description 3
- IAJILQKETJEXLJ-UHFFFAOYSA-N Galacturonsaeure Natural products O=CC(O)C(O)C(O)C(O)C(O)=O IAJILQKETJEXLJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003513 alkali Substances 0.000 claims description 3
- 125000002947 alkylene group Chemical group 0.000 claims description 3
- 235000020960 dehydroascorbic acid Nutrition 0.000 claims description 3
- 239000011615 dehydroascorbic acid Substances 0.000 claims description 3
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 235000019270 ammonium chloride Nutrition 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052976 metal sulfide Chemical class 0.000 claims description 2
- XWIJIXWOZCRYEL-UHFFFAOYSA-M potassium;methanesulfonate Chemical class [K+].CS([O-])(=O)=O XWIJIXWOZCRYEL-UHFFFAOYSA-M 0.000 claims description 2
- 239000001119 stannous chloride Substances 0.000 claims description 2
- 235000011150 stannous chloride Nutrition 0.000 claims description 2
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 claims description 2
- 150000003568 thioethers Chemical class 0.000 claims description 2
- 229910000375 tin(II) sulfate Inorganic materials 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 230000001737 promoting effect Effects 0.000 claims 2
- 230000032683 aging Effects 0.000 claims 1
- 229910052936 alkali metal sulfate Inorganic materials 0.000 claims 1
- 150000008052 alkyl sulfonates Chemical class 0.000 claims 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims 1
- 239000000243 solution Substances 0.000 description 89
- 238000007747 plating Methods 0.000 description 49
- 239000003792 electrolyte Substances 0.000 description 28
- 239000000919 ceramic Substances 0.000 description 15
- 230000004927 fusion Effects 0.000 description 15
- 239000000654 additive Substances 0.000 description 12
- 238000012360 testing method Methods 0.000 description 11
- 230000007935 neutral effect Effects 0.000 description 10
- 238000004070 electrodeposition Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 229910001128 Sn alloy Inorganic materials 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000002211 L-ascorbic acid Substances 0.000 description 6
- 235000000069 L-ascorbic acid Nutrition 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000003153 chemical reaction reagent Substances 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 4
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 3
- 238000004581 coalescence Methods 0.000 description 3
- 238000009472 formulation Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000978 Pb alloy Inorganic materials 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 235000006708 antioxidants Nutrition 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 2
- 235000011180 diphosphates Nutrition 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- LLABTCPIBSAMGS-UHFFFAOYSA-L lead(2+);methanesulfonate Chemical compound [Pb+2].CS([O-])(=O)=O.CS([O-])(=O)=O LLABTCPIBSAMGS-UHFFFAOYSA-L 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229940098779 methanesulfonic acid Drugs 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000006259 organic additive Substances 0.000 description 2
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000005382 thermal cycling Methods 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
- AEQDJSLRWYMAQI-UHFFFAOYSA-N 2,3,9,10-tetramethoxy-6,8,13,13a-tetrahydro-5H-isoquinolino[2,1-b]isoquinoline Chemical compound C1CN2CC(C(=C(OC)C=C3)OC)=C3CC2C2=C1C=C(OC)C(OC)=C2 AEQDJSLRWYMAQI-UHFFFAOYSA-N 0.000 description 1
- RTZZCYNQPHTPPL-UHFFFAOYSA-N 3-nitrophenol Chemical compound OC1=CC=CC([N+]([O-])=O)=C1 RTZZCYNQPHTPPL-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- NBSCHQHZLSJFNQ-GASJEMHNSA-N D-Glucose 6-phosphate Chemical compound OC1O[C@H](COP(O)(O)=O)[C@@H](O)[C@H](O)[C@H]1O NBSCHQHZLSJFNQ-GASJEMHNSA-N 0.000 description 1
- RGHNJXZEOKUKBD-SQOUGZDYSA-M D-gluconate Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O RGHNJXZEOKUKBD-SQOUGZDYSA-M 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- VFRROHXSMXFLSN-UHFFFAOYSA-N Glc6P Natural products OP(=O)(O)OCC(O)C(O)C(O)C(O)C=O VFRROHXSMXFLSN-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 150000000994 L-ascorbates Chemical class 0.000 description 1
- 239000004260 Potassium ascorbate Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 150000003934 aromatic aldehydes Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- JALQQBGHJJURDQ-UHFFFAOYSA-L bis(methylsulfonyloxy)tin Chemical compound [Sn+2].CS([O-])(=O)=O.CS([O-])(=O)=O JALQQBGHJJURDQ-UHFFFAOYSA-L 0.000 description 1
- GSHQMEDDMAFHJX-ZZMNMWMASA-L bis[[(2R)-2-[(1S)-1,2-dihydroxyethyl]-4-hydroxy-5-oxo-2H-furan-3-yl]oxy]lead Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O[Pb]OC1=C(O)C(=O)O[C@@H]1[C@@H](O)CO GSHQMEDDMAFHJX-ZZMNMWMASA-L 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000004318 erythorbic acid Substances 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 239000012458 free base Substances 0.000 description 1
- 229940050410 gluconate Drugs 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- 229940093915 gynecological organic acid Drugs 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 125000000468 ketone group Chemical group 0.000 description 1
- 229940046892 lead acetate Drugs 0.000 description 1
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 235000011056 potassium acetate Nutrition 0.000 description 1
- 235000019275 potassium ascorbate Nutrition 0.000 description 1
- 229940017794 potassium ascorbate Drugs 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- CONVKSGEGAVTMB-RXSVEWSESA-M potassium-L-ascorbate Chemical compound [K+].OC[C@H](O)[C@H]1OC(=O)C(O)=C1[O-] CONVKSGEGAVTMB-RXSVEWSESA-M 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000009666 routine test Methods 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- PPASLZSBLFJQEF-RKJRWTFHSA-M sodium ascorbate Substances [Na+].OC[C@@H](O)[C@H]1OC(=O)C(O)=C1[O-] PPASLZSBLFJQEF-RKJRWTFHSA-M 0.000 description 1
- 235000010378 sodium ascorbate Nutrition 0.000 description 1
- 239000000176 sodium gluconate Substances 0.000 description 1
- 229940005574 sodium gluconate Drugs 0.000 description 1
- 235000012207 sodium gluconate Nutrition 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001432 tin ion Inorganic materials 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/60—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of tin
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/30—Electroplating: Baths therefor from solutions of tin
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/30—Electroplating: Baths therefor from solutions of tin
- C25D3/32—Electroplating: Baths therefor from solutions of tin characterised by the organic bath constituents used
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
のうちの1つを有するか、または錯化剤はこのような構造の可溶性塩である。最も好ましい化合物としては、アスコルビン酸、イソアスコルビン酸(またエリトルビン酸と呼ぶ)、デヒドロアスコルビン酸、グルコアスコルビン酸、ガラクツロン酸、グルコロン酸(glucoronic acid)、及びグルコース−6−リン酸、またはこれらの塩が挙げられる。典型的な塩としては、アルカリ金属またはアルカリ土類金属が挙げられる。こうした試剤は一般に、約25〜200g/lの量で存在する。
このような電気部品を電気めっきするために特に有用な装置は、米国特許第6,193,858号において開示されており、本明細書においてさらに説明する必要は無い。必要な範囲内で、この特許の全内容を特に本明細書において参考のために開示する。
1.これは、白色のマットから半光沢析出物までを析出しよう。
2.これは、被覆する予定の部品を損傷しないだろう。
3.これは、低電流密度で金属を析出しないだろう。
4.これは、析出物を後に熱条件にさらした場合に、ホイスカー生成を低減するかまたは無くすことさえもできる。
実施例1:
純粋なスズの電着を、以下の溶液から、以下の電気めっき条件下で得る。
1.5g/lのメタンスルホン酸鉛を請求項1の溶液に加え、同じ条件でめっきすることで、半光沢スズ−鉛析出物を得る。
実施例の配合物を使用して、2.5インチ×4インチバレル中で250個の直径8mmの平座金表面にスズをめっきし、140mlの直径2.5mmの伝導性ボールを媒質として使用した。負荷を5A、6.5Vで15分間めっきした。めっきサイクルの終りに、平座金のいずれも一緒になって融合しなかった。
以下の実施例は、従来技術の電気めっき溶液と比較して、本発明の電気めっき溶液によって生じた析出物中のスズホイスカー生成の低減を示す。
Claims (12)
- 電気めっき可能な基板表面での1種以上の金属の析出に関連して使用するための溶液であって:
水と;
めっき可能な基板上に金属析出物を形成するのに十分な量の金属イオンと;
少なくとも2つのヒドロキシル基及び少なくとも1個の酸素原子を含む5または6員環を含み4〜18個の炭素原子を有する有機化合物であり、前記金属と錯体を形成して、これを前記溶液中に可溶にするのに、また、前記金属の酸化を阻害するのに十分な量で存在する錯化剤と;
必要ならば、前記溶液のpHを2〜10の範囲内に維持するための適切なpH調節剤と;
を含む溶液。 - 前記錯化剤は、アスコルビン酸、イソアスコルビン酸、デヒドロアスコルビン酸、グルコアスコルビン酸、ガラクツロン酸、グルコロン酸、若しくはこれらの塩、またはケトグルコン酸塩若しくはヘプタグルコン酸塩から誘導され、約25〜200g/lの量で存在する、請求項2に記載の溶液。
- 前記金属はスズであり、前記溶液にアルキルスルホン酸第一スズ塩、硫酸第一スズ塩、塩化第一スズ塩、アスコルビン酸第一スズ塩、または酸化第一スズとして加えられ、約5〜100g/lの量で存在する、請求項1に記載の溶液。
- 前記溶液からスズ−鉛合金を析出するのに十分な量で二価鉛塩をさらに含む、請求項4に記載の溶液。
- 前記溶液の伝導率を増大させるに十分な量で伝導性の塩のうちの1種以上を、析出物の品質及び結晶粒構造を向上するのに十分な量で界面活性剤を、または陽極溶解を促進するための試剤をさらに含む、請求項1に記載の溶液。
- 前記伝導性の塩は、アルカリ若しくはアルカリ金属サルフェート、スルホネート、またはアセテート化合物であり、前記界面活性剤はアルキレンオキシド縮合化合物であり、約0.01〜20g/lの量で存在し、或いは前記陽極溶解を促進するための試剤は、メタンスルホン酸カリウム、塩化アンモニウムまたは金属スルフィド塩である、請求項6に記載の溶液。
- 前記基板は電気めっき可能及び非電気めっき可能な部分を有する複合体物品であり、前記pH調節剤は酸または塩基であり、前記pHは約3.5〜5.5の範囲に調節されて、前記非電気めっき可能な部分に有害に影響することなく、前記物品の前記電気めっき可能な部分の電気めっきを可能にする、請求項1に記載の溶液。
- 基板表面に金属析出物を電気めっきする方法であって、前記基板を請求項1に記載の溶液と接触させることと、電流に前記溶液を通過させて、表面に金属電着物を形成させることと、を含む方法。
- 電気めっき可能及び非電気めっき可能な部分を含む複合体物品表面に金属析出物を電気めっきする方法であって、複数のこのような物品を請求項1に記載の溶液と接触させることと、電流に前記溶液を通過させて、前記物品の前記非電気めっき可能な部分に有害に影響することなく前記物品の前記電気めっき可能な部分表面に金属電着物を形成させることと、を含む方法。
- 基板表面の金属析出物のホイスカー形成を低減する方法であって、前記基板を請求項1に記載の溶液と接触させることと、電流に前記溶液を通過させて、前記基板表面に金属電着物を形成し、同時に、前記析出物のホイスカー形成を低減するかまたは無くすことと、を含む方法。
- 前記基板は電気めっき可能及び非電気めっき可能な部分を含む複合体物品であり、複数のこのような物品を前記溶液と接触させて、前記物品の前記電気めっき可能な部分表面にホイスカーが無いかまたはホイスカーが低減された析出物を形成することをさらに含む、請求項11に記載の方法。
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WO2007088600A1 (ja) * | 2006-02-01 | 2007-08-09 | Murata Manufacturing Co., Ltd. | セラミック電子部品の製造方法及びめっき浴 |
JPWO2007088600A1 (ja) * | 2006-02-01 | 2009-06-25 | 株式会社村田製作所 | セラミック電子部品の製造方法及びめっき浴 |
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US20030159938A1 (en) | 2003-08-28 |
MY151335A (en) | 2014-05-15 |
CN100469942C (zh) | 2009-03-18 |
AU2003217344A1 (en) | 2003-09-09 |
KR20040085194A (ko) | 2004-10-07 |
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