JP2005354891A - Stage device and linear motor, and aligner and device manufacturing method using the stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage device with larger output and high accuracy. <P>SOLUTION: The stage device includes a position detecting means which detects the position of a stage 2, a command means to output a current command, based on the current position detected by the position detecting means, and a target position of the stage, power amplifiers which output currents according to the current command, and a driving means which drive the stage according to the currents, wherein as the power amplifiers and the driving means, the first power amplifier 29 of a PWM system and the first driving means 9 to drive the stage by the output current, and the second power amplifier 28 of a linear system and the driving means 8 which drives the stage by the output current are provided in parallel, respectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an exposure apparatus, and more particularly to a stage apparatus for positioning a workpiece such as a semiconductor wafer or a reticle at a predetermined position or scanning at a predetermined speed. Further, the present invention relates to a linear motor used in such a stage apparatus, and an exposure apparatus and a device production method using such a stage apparatus.

  FIG. 31 shows a semiconductor exposure apparatus which is a conventional example and is also an example of an application target of the present invention. In this exposure apparatus, a reticle pattern as an original is limited to an arc shape or a rectangular area, and an image is formed on a wafer which is an object to be exposed, and both the reticle and the wafer are mechanically scanned to scan the entire reticle pattern. This is a so-called scanning exposure apparatus that performs exposure. 32 and 33 show details of the reticle scanning system. FIG. 32 shows the drive system provided on one side of the reticle stage, and FIG. 33 shows the drive system provided on both sides of the reticle stage with the optical axis in between.

  In FIG. 31, a main body surface plate 102 is supported on a reference base 100 via vibration isolation means 101. A wafer stage 103 that can move in the XY plane (horizontal plane) is provided on the main body surface plate 102, and a projection optical system 106 is fixed above the main body support member 105 via a main body support member 105. A reticle stage base 80 is provided above the support member 105, and a reticle stage 82 is provided that can scan the reticle stage base 80 in one axial direction along a guide (not shown). Reference numeral 104 denotes an interferometer second reference for measuring the position of the wafer stage 103, 107 denotes an interferometer first reference for measuring the position of the reticle stage 82, and 108 denotes a reticle (not shown) on the reticle stage 82. It is an illumination system for giving exposure energy to a wafer (not shown) on the wafer stage 103.

  In FIG. 33, a guide 81 is fixed on a reticle stage base 80, and a reticle stage 82 is supported on the guide 81 through a lubricating means such as an air film so as to be slidable in the scanning direction. On the stage 82, a reticle 83, which is a workpiece, is held. Further, a drive coil 85 is fixed on both sides of the reticle stage 82. The drive coil 85 is composed of a yoke 86 and a permanent magnet 87 to apply a constant magnetic field perpendicular to the winding to a part of the drive coil 85 over the entire stroke of the reticle stage 82. A linear motor stator is provided. The linear motor stator is fixed on the reticle stage base 80, and a power amplifier (not shown) is connected to the drive coil 85. As the power amplifier, a linear method is used in which a current corresponding to a command value is continuously flowed, and it responds to the current command up to a high frequency. The wafer stage 103 can also be configured in the same manner as the reticle stage 82. The XY stage is configured by stacking the above-described drive mechanism (stage device) in two stages.

  The permanent magnet 87 is magnetized in the thickness direction as shown in FIG. That is, the surface in contact with the yoke 86 is magnetized to the S pole, and the surface facing the part of the drive coil 85 on the back side is magnetized to the N pole. The drive coil 85 is not in contact with the yoke 86 and the magnet 87 which are linear motor stators over the entire stroke of the reticle stage 82.

  In the above configuration, when moving a workpiece 83 such as a reticle or wafer, a linear power amplifier receives a command from a position / speed control circuit (not shown) and sends an acceleration current or a deceleration current to the drive coil 85. Even when positioning, a linear power amplifier keeps a small current flowing through the drive coil 85 every moment so that the position deviation is eliminated every moment by a command from a control circuit (not shown). In other words, the same power amplifier and the same drive coil 85 are used for acceleration / deceleration and positioning.

  In the scanning exposure apparatus shown in FIG. 31, the illumination light hits the reticle on the reticle stage 82 only in an elongated rectangular or arc region perpendicular to the scanning direction of the reticle stage 82 of the reticle. To expose the wafer, both the reticle stage 82 and the wafer stage 103 need to be scanned. The scanning is performed at a constant speed, and the speed ratio between the reticle stage 82 and the wafer stage 103 during scanning is made to exactly match the reduction magnification of the projection optical system 108. The position of the reticle stage 82 is measured by the laser interferometer (not shown) via the interferometer first reference 107 and the position of the wafer stage 103 is returned by the laser interferometer (not shown) to the control system (not shown). It is like that.

  In the above configuration, the wafer stage 103 and the reticle stage 82 are moved to the initial positions, and the wafer stage 103 and the reticle stage 82 are accelerated. Before the two enter the area where the illumination light strikes, the positional relationship becomes a predetermined positional relationship, and the velocity ratio is converged to be equal to the reduction magnification of the projection optical system 108. The exposure is performed while maintaining this state, and when the exposure is out of the area exposed to the illumination light, both are appropriately decelerated.

  FIG. 35 shows another conventional example. The configuration of the single-phase linear motor is different from that of FIG. That is, the linear motor of FIG. 35 includes a short magnet 95 whose movable portion faces the coil 98 with a single pole, a fixed yoke 96 that is arranged over the entire stroke of the movable magnet 95 and circulates the magnetic flux of the magnet 95, and the entire stroke. And a single-phase coil wound around a part of the fixed yoke 96.

  In semiconductor exposure apparatuses, demands for pattern miniaturization, productivity improvement, and workpiece diameter increase year by year. In order to improve productivity, it is necessary to shorten the exposure time and to move and position the workpiece at a higher speed. To this end, it is necessary to increase the acceleration and deceleration of the movement. At the same time, in order to achieve a larger workpiece diameter, the stage becomes larger and the transport weight increases. Therefore, it is necessary to move a heavier object with a larger acceleration, and an actuator with a large thrust and a power amplifier with a large output are required.

  A stage driving mechanism in a conventional scanning exposure apparatus or the like is provided with a linear motor stator that generates a constant magnetic field over the entire stroke of the scanning stage. In order to increase the thrust, the design is made such that the strength of the constant magnetic field is a strong magnetic field of, for example, about 5000 Gauss or more. However, since the magnetic field circulates through the yoke 86 as shown in FIG. 34, the magnetic flux for the entire stroke is concentrated at both ends of the yoke. The yoke is made of a material having a high saturation magnetic flux density such as iron, but requires a large cross-sectional area in order not to saturate concentrated magnetic flux. As a result, the volume and mass of the yoke are increased, which increases the overall size and weight of the apparatus.

  In order to generate a constant magnetic field over the entire stroke of the scanning stage, it is necessary to provide a magnet with a constant thickness over the entire stroke of the scanning stage. Since a constant magnetic field requires a strong magnetic field as described above, it is necessary to use an expensive rare earth magnet as the magnet material. Therefore, there is a drawback that the cost of the driving unit is increased.

  Further, regarding a power amplifier for driving a linear motor, a linear type power amplifier has been conventionally used. This is a good current response, but the amplifier itself generates a large amount of heat, making it difficult to increase the output.

  On the other hand, as an efficient amplifier, there is a PWM amplifier that outputs a discontinuous rectangular voltage having a constant maximum value. This PWM amplifier changes the amount of current that flows as a result by changing the width of the rectangular voltage. In the method using the PWM amplifier, the frequency of the basic rectangular wave is about 20 KHz, and it is difficult to make the current respond to a high frequency. Therefore, the control frequency during positioning or constant speed control cannot be set high, and the servo gain cannot be increased. In other words, the conventional method using the same power amplifier and drive coil in acceleration / deceleration and positioning has a problem that it is impossible to achieve both high output and high accuracy.

  A first object of the present invention is to provide a drive mechanism (stage device) having both high output and high accuracy in view of the problems of the prior art.

  Further, in the conventional single-phase linear motor shown in FIGS. 32 and 33 and FIG. 35, the movable coil 85 or the movable magnet 95 is slidably provided on the guide 81 in a one-dimensional direction. The movable portion is fixed to the movable portion, and a current is passed through the movable coil 85 or the fixed coil 98 to move the movable portion in the one-dimensional direction. In any case, the thickness of the fixed yokes 86 and 96 needs to be such that at least the magnetic flux generated by the permanent magnets 87 and 95 is not saturated. However, when the thickness of the fixed yokes 86, 96 is set to a minimum thickness that does not saturate the magnetic flux generated by the permanent magnets 87, 95, the thrust during acceleration / deceleration is increased in order to speed up the movement of the movable part. Even if a large current is passed through the coils 85 and 98 to try to take it, the yoke is saturated with the magnetic flux generated by the current, and a large thrust cannot be obtained. On the other hand, if the thickness of the yoke is increased so that the yoke is not saturated with the magnetic flux generated by the coil current, the overall thickness is increased. That is, in the conventional configuration, there is a problem in that it is not compatible to reduce the thickness of the yoke and to obtain a large thrust.

  The second object of the present invention is to provide a linear motor that achieves both a reduction in the thickness of the yoke and a large thrust.

  In order to achieve the first object described above, a stage apparatus according to the first aspect of the present invention is based on position detection means for detecting the position of the stage, the current position of the stage detected by the position detection means, and the target position. In a stage device having command means for outputting a current command, a power amplifier for outputting a current corresponding to the current command, and a drive means for driving the stage by this current, the power amplifier and the drive means are first PWM-type devices. And a first driving means for driving the stage with the output current thereof, and a second driving amplifier for driving the stage with the output power current of the linear type and the second current amplifier, in parallel. And

  In a preferred embodiment according to the first aspect, the stage is driven via the first power amplifier during acceleration / deceleration of the stage, and the stage is driven via the second power amplifier during stage positioning / speed control. As described above, it is characterized by comprising means for selecting the first or second power amplifier.

  The first and second driving means are linear motors, and the movable part includes an acceleration / deceleration coil connected to the first power amplifier and a positioning / speed control coil connected to the second power amplifier. It is characterized by comprising.

  The first and second driving means are linear motors, the movable part of which has a magnet facing the coil of the fixed part with a single pole, and the fixed part is located at the position of the magnet over the entire stroke of the stage. Correspondingly, a yoke for applying a constant magnetic field to a part of the coil, and a single-phase speed control coil and a plurality of multi-phase acceleration / deceleration coils wound around the yoke are provided. It is characterized by doing.

  The plurality of multi-phase acceleration / deceleration coils may be wound around the single-phase speed control coil. Alternatively, the yoke has a main yoke having a linear portion parallel to the moving direction of the stage and extending over at least the entire stroke of the stage, and a linear portion parallel to the linear portion of the main yoke and at least the entire stroke of the stage. And a side yoke magnetically connected to the main yoke outside the stroke, and one of the speed control coil and the acceleration / deceleration coil may be wound around the main yoke and the other around the side yoke. . Further, side yokes are arranged on both sides of the main yoke, a speed control coil is wound around the main yoke, and a plurality of multi-phase acceleration / deceleration coils are wound around each side yoke, one set at a time. Also good.

  Two sets of the movable part and the fixed part of these linear motors are arranged, one set on one side of the stage or one set on both sides.

  The second drive means is a linear motor having a coil fixed to the stage, and a magnet and a yoke for applying a magnetic field to the coil. The first drive means is a feed screw mechanism and the feed screw mechanism. And a force transmission unit that transmits force to the stage.

  Further, the first and second driving means are linear motors, the movable part has a multi-pole magnet unit, the fixed part has a plurality of flat coil units, and the flat coil unit is a first power amplifier. And an acceleration / deceleration coil connected to the second power amplifier and a positioning / speed control coil connected to the second power amplifier.

  In order to achieve the second object described above, a single-phase linear motor according to the second aspect of the present invention is capable of relative movement between a single-phase coil and the single-phase coil in the axial direction of the single-phase coil. A first permanent magnet, a first yoke made of a ferromagnetic material and passing through the single-phase coil in the axial direction, and a portion disposed outside the single-phase coil and in parallel with the first yoke. A second yoke made of a ferromagnetic material that forms a closed magnetic path for circulating the magnetic flux from the first permanent magnet across the winding of the single-phase coil together with the first yoke and the first permanent magnet; And a second permanent magnet connecting the first yoke and the second yoke.

  In a preferred embodiment according to the second aspect, the single-phase coil is movable, and the first and second yokes are fixed yokes having linear portions over the entire stroke of the single-phase coil, One permanent magnet is a magnet fixed to a straight portion of the first or second yoke and facing the single-phase coil with a single pole over the entire stroke of the single-phase coil, and the second magnet is the stroke The first yoke and the second yoke are connected outside.

  Alternatively, the first permanent magnet is a movable magnet facing the single-phase coil with a single pole, and the first and second yokes are fixed yokes having linear portions over the entire stroke of the movable magnet, The single-phase coil is wound around the first yoke over the entire stroke of the movable magnet, and the second magnet connects the first yoke and the second yoke outside the stroke. And

  The single-phase coil is for speed control, and a plurality of acceleration / deceleration coils shorter than the single-phase coil are wound in parallel with the single-phase coil for speed control in multiple phases. And

The single-phase linear motor according to the second aspect can be suitably used as the first and second driving means in the stage device according to the first aspect.
A stage movable in a predetermined direction; stage acceleration / deceleration thrust generating means disposed along the moving direction; stage speed control thrust generating means provided in parallel with the thrust generating means; Among acceleration / deceleration thrust generation means, acceleration means for generating stage acceleration thrust at a portion located in the stage acceleration section, and stage deceleration thrust is generated at a portion located in the stage deceleration section of the acceleration / deceleration thrust generation means. The acceleration / deceleration thrust generating means in a stage apparatus comprising: a deceleration means for controlling the speed control means for controlling stage thrust by the speed control thrust generating means in a predetermined range at least between the acceleration section and the deceleration section; It can be used as a speed control thrust generating means.

  Furthermore, each drive mechanism of the present invention can be suitably used as a reticle stage of a scanning exposure apparatus as shown in FIG.

According to the configuration of the first aspect of the present invention, since a PWM power amplifier and a linear amplification power amplifier are provided in parallel on one drive shaft, high accuracy can be achieved while producing a large acceleration / deceleration force. Positioning and speed control are possible.
In particular, when applied to an exposure apparatus or the like, acceleration / deceleration thrust generating means (first driving means) and positioning / speed control thrust generating means (second driving means) are provided for each drive shaft of the stage. Provided in parallel, a PWM power amplifier is connected to the acceleration / deceleration thrust generating means, and a linear power amplifier is connected to the positioning / speed control thrust generating means. Can be moved at high speed, and at the time of positioning and speed control, a linear amplifier can be used for highly accurate positioning and constant speed running.

According to the configuration of the second aspect of the present invention, in the single-phase linear motor including the first permanent magnet, the single-phase coil, and the fixed yoke made of a ferromagnetic material that circulates the magnetic flux of the permanent magnet. A second permanent magnet is arranged in series with a magnetic circuit for passing the magnetic flux of the magnet in a part of a fixed yoke for circulating the magnetic flux of the magnet, and the second permanent magnet is the first permanent magnet. By magnetizing the magnetic flux so as not to disturb the magnetic flux, only the magnetic flux due to the current flowing through the single-phase coil can be blocked by the second permanent magnet. Therefore, according to this single-phase linear motor, the yoke can be made thin and a large thrust can be obtained.
In particular, in a single-phase linear motor used as the thrust generating means of the stage device, it is possible to reduce the cross-sectional area (especially thickness) of the yoke by configuring a part of the yoke with a permanent magnet. Smaller and lighter can be achieved.

Embodiments of the present invention will be described below with reference to the drawings.
[Example 1]
1 to 3 are perspective views showing the configuration of a reticle stage using the drive mechanism according to the first embodiment of the present invention, FIG. 1 is an overall view, FIG. 2 is a partially broken view of a yoke and a coil, and FIG. FIG. 4 is an exploded view showing a movable part and a fixed part shifted from each other. In the reticle stage shown in FIGS. 1 to 3, a stage guide 1 is fixed on a vibration isolation base (not shown), and the stage 2 is slidably supported on the stage guide 1 through a lubricating means such as an air film in the scanning direction. ing. A reticle 3 is held on the stage 2. A magnet holding plate 4 having a U-shaped cross section is fixed to both sides of the stage 2, and a rectangular hole for receiving a magnet is provided in the horizontal portion 4 a of the magnet holding plate 4 as shown in the figure. Is fitted and fixed. The stage 2, the reticle 3, the magnet holding plate 4 and the magnet 5 are integrated to form a movable part.

On the other hand, the fixed part is composed of a yoke / coil unit 10 provided on both sides of the movable part. Each unit 10 is formed by a center yoke 6, two side yokes 7, a one-phase speed control coil 8 and a plurality of acceleration / deceleration coils 9.
When producing each unit, for example, first, a speed control coil 8 whose length in the longitudinal direction corresponds to substantially the entire length of the center yoke 6 is wound around the center yoke 6. The speed control coil 8 is configured to be electrically single-phased. Around the speed control coil 8, an acceleration / deceleration coil 9 whose length in the longitudinal direction is sufficiently shorter than that of the speed control coil 8 is wound. It is provided along the direction. The plurality of acceleration / deceleration coils 9 are configured to be electrically independent, that is, to control the current for each phase.
Next, the side yoke 7 is fixed so as to sandwich the center yoke 6 from above and below. The fixed portion and the movable portion are assembled in a positional relationship such that the magnet 5 portion of the magnet holding plate 4 is not contacted between the acceleration / deceleration coil 9 and the side yoke 7 in the yoke / coil unit 10. .

The magnet 5 of the movable part is magnetized in the thickness direction (vertical direction) as indicated by an arrow in the electrical system diagram of FIG. That is, the two magnets 5 attached to one magnet holding plate 4 are magnetized so that the N poles face each other, and therefore toward the center yoke 6.
Thereby, the magnetic flux generated from each magnet 5 enters the center yoke 6 and branches back and forth in the longitudinal direction, reaches both end portions (front and rear end portions) of the center yoke 6, branches up and down there and enters the side yoke 7, In each of the upper and lower side yokes 7, the magnetic flux flows from the front and rear end portions toward the position facing the magnet 5 (the central portion of the side yoke 7 in FIG. 4) and reaches the south pole of the facing magnet from there. A circuit is constructed. Therefore, when a current is passed through the speed control coil 8 in this state, the magnet 5 receives a force in the scanning direction (longitudinal direction of the yokes 6 and 7) according to Fleming's law. Further, even when an electric current is passed through the acceleration / deceleration coil 9 facing the magnet 5, the magnet 5 similarly receives a force in the scanning direction.

  FIG. 4 is a diagram showing a connection state of the electric circuit in the drive mechanism of FIGS. 1 to 3, and the actuator (movable part and fixed part) part is shown only a part of the movable part and one side of the fixed part is there. 4 (a) is a partially broken plan view of one side portion of the actuator, FIG. 4 (b) is a diagram showing a longitudinal section of the actuator portion and electrical system connection, and FIG. 4 (c) is a cross section of the magnet 5 portion. FIG. As shown in FIG. 4B, four acceleration drivers 29a, four deceleration drivers 29b, and a speed control driver 28 are provided as drive drivers. The acceleration / deceleration driver is divided into a plurality of drivers in order to provide a sufficient capacity for the driver. If there is a margin, one driver may be used for acceleration and one for deceleration. One acceleration driver 29a and one deceleration driver 29b are connected in parallel to each acceleration / deceleration coil 9 via a switch means S.

  The switch means S of the acceleration / deceleration coil 9 acts so that each coil is not connected to either the acceleration driver 29a or the deceleration driver 29b, or only one of them is connected. That is, each coil is not connected to both the acceleration driver 29a and the deceleration driver 29b.

  Here, the acceleration coil and the deceleration coil are set to four groups of four phases, and four acceleration drivers 29a or four deceleration drivers 29b are connected to these groups by the switch means S, respectively. It has become. That is, each coil is assigned to each group in order, and the same group of coils separated by four can be connected to the same acceleration driver 29a or deceleration driver 29b. In this way, the four adjacent acceleration / deceleration coils 9 can be connected to the four acceleration drivers 29a or 29b, respectively, at any position.

  FIG. 4 shows an example of the start position P1 and the stop position P2 when accelerating, running at a constant speed, and decelerating from one stroke end to the other stroke end. At this time, the switch S is closed so that the leftmost four-phase coil 9 is connected only to the acceleration driver 29a. Further, the switch S is closed so that the rightmost four-phase coil 9 is connected only to the deceleration driver 29b. The other acceleration / deceleration coils 9 are not connected to any driver. The total length of each four-phase coil 9 in the scanning direction is designed to be longer than (magnet size + acceleration stroke + deceleration stroke). That is, acceleration is completed with only four-phase coils. In other words, the coil is not switched during acceleration.

  The operation when the drive mechanism having the above-described configuration is used as the reticle stage 82 of the scanning exposure apparatus in FIG. 31 will be described below, assuming that the wafer stage 103 and the reticle stage 82 move in synchronization with each other. Only the operation of “2” in FIG. 4 will be described. 1 to 4, first, the initial position of reticle stage 2 is determined. In this case, a current in a predetermined direction is supplied to the speed control coil 8 to send the movable part in one direction, and the reticle stage position measurement interferometer (not shown) is reset when the origin switch (not shown) is turned off. Further, by passing a current through the speed control coil 8 while referring to the measurement value of the interferometer, the movable part (stage 2, magnet holding plate 4, magnet 5, etc.) is moved to the starting position P1 in FIG. Positioning control is performed by the speed control coil 8 at the position P1.

  Next, in response to a command from a control system (not shown), current is passed through the four-phase coil 9 connected for acceleration by the acceleration driver 29a to accelerate the reticle stage 2. When the exposure area is entered, acceleration is stopped and the speed is controlled by a control circuit (not shown) so that the speed becomes constant. At this time, the movable magnet 5 does not face the coil 9 connected to the acceleration driver 29a, and the speed control correction force depends on the interaction with the current of the speed control coil 8 driven by the speed control driver 28. It will be a thing. When the exposure is performed at a constant speed and the exposure area deviates, the magnet 5 of the movable part is now opposed to the four-phase coil 9 connected to the deceleration driver 29b. At 9, the moving part is decelerated and stopped at the stop position P2.

  FIG. 4 illustrates an example in which the movable portion moves from the stroke end to the stroke end. However, when the exposure angle of view is reduced in the scanning exposure apparatus, the reticle stage is not moved from end to end. The movement to the position can shorten the movement time of the reticle stage, that is, the exposure time, and the productivity is improved. In such a case, the switch means S is switched so that the acceleration / deceleration coil 9 corresponding to the starting position on the way and the stopping position on the way is connected to the acceleration or deceleration drivers 29a and 29b, and the speed is the same as in FIG. Scanning exposure may be performed after the control coil 8 performs initial positioning to the “halfway start position”.

  According to the present embodiment, in any case, the switching of the switch means S only occurs corresponding to the exposure angle of view. Which coil 9 is connected to the drivers 29a and 29b is determined corresponding to the angle of view, so that the driving coil is selected while sensing the position of the movable part like a general multiphase coil driving linear motor. Such a complicated driving sequence is not required.

In this embodiment, the length of the magnet 5 in the scanning direction corresponds to the length in the scanning direction of the coil 85 (FIG. 32) in the conventional example, and it is sufficient to pass only the magnetic flux corresponding to that length. The area is small. Further, while the acceleration / deceleration coil 9 is disposed in the entire scanning direction, only the coil 9 corresponding to the exposure angle of view is driven during acceleration / deceleration, so that no unnecessary heat is generated during acceleration / deceleration. During speed control, the speed control coil 8 is driven over the entire length in the scanning direction, which is wasteful. However, during speed control, the drive current is sufficiently smaller than the acceleration / deceleration current, that is, the absolute value of waste is sufficiently small. Must not.
Furthermore, since the acceleration / deceleration coil can be selected according to the exposure field angle, it is possible to flexibly cope with changes in the exposure field angle.

[Example 2]
FIG. 5 shows a reticle stage actuator according to a second embodiment of the present invention. FIG. 5A is a diagram showing the longitudinal section and connection of the electrical system, and FIG. 5B is a transverse sectional view of the magnet 5 portion. In this embodiment, the plurality of acceleration / deceleration coils 9 wound around the center yoke 6 in the first embodiment are wound around the upper and lower side yokes 7. Accordingly, two sets of acceleration driver groups and two sets of deceleration driver groups are configured. The movable part composed of the stage 2, the magnet holding plate 4, the magnet 5 and the like is the same as that of the first embodiment except that the position of the magnet 5 is moved to the center yoke 6 by the thickness of the acceleration / deceleration coil 9. It is configured.

  As in the first embodiment, only the movement of the reticle stage 2 will be described. After the reticle stage 2 is initially positioned, a current is passed through the drive coil to accelerate the reticle stage. When the deviation between the center of gravity of the reticle stage and the position where the driving force for acceleration is applied is Δ, and the thrust for acceleration is F, a moment of F * Δ acts on the reticle stage base and eventually the main body. In this embodiment, the amount of current flowing through the driver 29a is made different between the upper and lower acceleration coils 9, and as a result, only the above F * Δ is obtained. The moment that cancels the moment is given to the movable part.

  The current control at this time may be measured by measuring the acceleration corresponding to the shaking of the main body and making it proportional to the current difference between the upper and lower drivers. May be added.

  When the exposure area is entered, acceleration is stopped and the speed is controlled by a control circuit (not shown) so that the speed becomes constant. At this time, the movable magnet 5 does not face the coil 9 connected to the acceleration driver 29a, and the speed control correction force depends on the interaction with the current of the speed control coil 8 driven by the speed control driver 28. It will be a thing.

  When it is out of the exposure area, it is decelerated by the deceleration driver 29b and stopped. At this time, it is not always necessary to cancel the moment by giving a current difference to the upper and lower drivers 29b. This is because even if the main body shakes, it may be established before the next synchronization. The position information during the acceleration / deceleration and the constant speed control is obtained by position measuring means such as a laser interferometer (not shown).

  In the present embodiment, in addition to the effects of the first embodiment, the moment around the optical axis caused by the deviation between the center of gravity of the reticle stage 2 and the position where the driving force is applied can be canceled. As a result, it is possible to further reduce the disturbance of the main body and the synchronization between the reticle and the wafer.

  In the above description, it is assumed that the number of turns of the acceleration / deceleration coil 9 wound around the upper and lower side yokes 7 is the same, and a current difference is given to the upper and lower acceleration / deceleration coils 9 to cancel the counter moment during acceleration. However, since the deviation Δ of the force application point and the center of gravity of the movable part with respect to the optical axis position is known and often unchanged, the acceleration / deceleration coil wound around the upper and lower side yokes 7 in advance by an amount corresponding to this Δ You may make a difference in the number of turns of 9. In this way, the same current can be applied to the upper and lower acceleration / deceleration coils 9 to cancel the reaction moment, so that the acceleration driver 29a and the deceleration driver 29b can be configured by one group each as in the first embodiment. It can be simplified.

[Example 3]
6 to 8 are perspective views showing the configuration of a reticle stage according to a third embodiment of the present invention. FIG. 6 is an overall view, FIG. 7 is a partial cutaway view of a yoke and a coil, and FIG. It is the exploded view which shifted and showed the part. In the reticle stage shown in FIGS. 6 to 8, a stage guide 1 is fixed on an anti-vibration base (not shown), and the stage 2 is supported on the stage guide through a lubricating means such as an air film so as to be slidable in the scanning direction. ing. A reticle 3 is held on the stage 2. Further, a constricted magnet holding plate 4 having a U-shaped cross section is fixed to both sides of the stage 2, and four horizontal portions 4a at the front and rear ends of the magnet holding plate 4 are respectively provided as shown in FIGS. A rectangular hole into which a magnet enters is provided, and four magnets 5 are fitted and fixed in each of the rectangular holes. The distance between the magnets 5 in the front-rear direction of each magnet holding plate 4 is set to be at least larger than the maximum stroke of the stage 2. The stage 2, the reticle 3, the magnet holding plate 4 and the magnet 5 are integrated to form a movable part.

On the other hand, the fixed part is composed of a yoke / coil unit 10 provided on both sides of the movable part. Each unit 10 is formed by a center yoke 6, two side yokes 7, a one-phase speed control coil 8 and a plurality of acceleration / deceleration coils 9.
When producing each unit, for example, first, a speed control coil 8 whose length in the longitudinal direction corresponds to substantially the entire length of the center yoke 6 is wound around the center yoke 6. Although the speed control coil 8 is configured to be electrically single-phase, it is mechanically composed of two coils with the center as a boundary, and these two portions are in opposite directions around the center yoke 6. Is configured to flow. For example, what reversed the winding direction of two parts should just be connected in series.

  Around the speed control coil 8, an acceleration / deceleration coil 9 whose length in the longitudinal direction is sufficiently shorter than that of the speed control coil 8 is wound. It is provided along the direction. The plurality of acceleration / deceleration coils 9 are electrically independent, that is, configured to be able to control the current for each phase, and the two magnets 5 in front of the four magnets 5 provided on the magnet holding plate 4 Two acceleration / deceleration coils 9 spaced apart by the distance between the two subsequent magnets 5 are connected in series, and these two coils are configured such that currents in opposite directions flow around the center yoke 6.

  Next, the side yoke 7 is fixed so as to sandwich the center yoke 6 from above and below. The fixed portion and the movable portion are assembled in a positional relationship such that the magnet 5 portion of the magnet holding plate 4 is not contacted between the acceleration / deceleration coil 9 and the side yoke 7 in the yoke / coil unit 10. .

  The magnet 5 of the movable part is magnetized in the thickness direction (vertical direction) as indicated by an arrow in the electrical system diagram of FIG. That is, the front two magnets 5 attached to one magnet holding plate 4 have N poles facing each other, so that the N poles face the center yoke 6, and the rear two magnets 5 have S poles. Therefore, the S poles are magnetized so as to face each other, so that the S poles are directed toward the center yoke 6.

  As a result, the magnetic flux generated from the N pole of the front magnet 5 enters the center yoke 6 toward the position facing the rear rear magnet 5 and reaches the S pole of the rear magnet 5 facing from there. A magnetic circuit is formed in which the magnetic flux generated from the N pole enters the side yoke 7 and goes to a position facing the front front magnet 5 and reaches the S pole of the front magnet 5 facing from there. Therefore, when a current is passed through the speed control coil 8 in this state, the front and rear magnets 5 receive forces in the same direction in the scanning direction (longitudinal direction of the yokes 6 and 7) according to Fleming's law. Further, even when an electric current is passed through the acceleration / deceleration coil 9 facing the magnet 5, the front and rear magnets 5 receive the same force in the scanning direction.

  FIG. 9 is a diagram showing how electrical circuits are connected in the drive mechanism of FIGS. 6 to 8, and the actuator (movable part and fixed part) part is only part of the movable part and only one side of the fixed part. is there. FIG. 9A is a diagram showing the longitudinal section and connection of the electrical system, and FIG. 9B is a transverse sectional view of the magnet 5 portion. As shown in FIG. 9A, four acceleration drivers 29a, four deceleration drivers 29b, and one speed control driver 28 are provided as drive drivers. The acceleration / deceleration driver is divided into a plurality of drivers in order to provide a sufficient capacity for the driver. One acceleration driver 29a and one deceleration driver 29b are connected in parallel to each acceleration / deceleration coil 9 via a switch means S.

  The switch means S of the pair of acceleration / deceleration coils 9 configured so that currents in opposite directions flow around the center yoke 6 do not connect the coils to either the acceleration driver 29a or the deceleration driver 29b. Or act to connect only to one of them. That is, each coil is not connected to both the acceleration driver 29a and the deceleration driver 29b.

  Here, four successive acceleration coils and four deceleration coils are selected and connected to four acceleration drivers 29a or four deceleration drivers 29b by switch means S, respectively. When viewed from the side of the acceleration driver 29a and the deceleration driver 29b, four coils 9 separated from each driver can be connected to the acceleration driver 29a or the deceleration driver 29b via the switch means S. In this way, the four adjacent acceleration / deceleration coils 9 can be connected to the four acceleration drivers 29a or 29b, respectively, at any position.

  FIG. 9 shows an example of the start position P1 and the stop position P2 when accelerating, running at a constant speed, and decelerating from one stroke end to the other stroke end. At this time, the switch S is closed so that the leftmost four-phase coil 9 is connected only to the acceleration driver 29a. Further, the switch S is closed so that the rightmost four-phase coil 9 is connected only to the deceleration driver 29b. The other acceleration / deceleration coils 9 are not connected to any driver. The total length of each four-phase coil 9 in the scanning direction is designed to be longer than (magnet size + acceleration stroke + deceleration stroke). That is, acceleration is completed with only four-phase coils. In other words, the coil is not switched during acceleration.

  The operation when the drive mechanism having the above-described configuration is used as the reticle stage 82 of the scanning exposure apparatus of FIG. 31 is described below, assuming that the wafer stage 103 and the reticle stage 82 move synchronously. Only the operation of “2” in FIG. 8 will be described. 6 to 9, first, the initial position of reticle stage 2 is determined. In this case, a current in a predetermined direction is supplied to the speed control coil 8 to send the movable part in one direction, and the reticle stage position measurement interferometer (not shown) is reset when the origin switch (not shown) is turned off. Further, by passing a current through the speed control coil 8 while referring to the measurement value of the interferometer, the movable part (the stage 2, the magnet holding plate 4, the magnet 5, etc.) is moved to the start position P1 in FIG. Positioning control is performed by the speed control coil 8 at the position P1.

  Next, in response to a command from a control system (not shown), an electric current is passed through the four-phase coil 9 connected for acceleration by the acceleration driver 29a to accelerate the reticle stage 2. When the exposure area is entered, acceleration is stopped and the speed is controlled by a control circuit (not shown) so that the speed becomes constant. At this time, the movable magnet 5 does not face the coil 9 connected to the acceleration driver 29a, and the speed control correction force depends on the interaction with the current of the speed control coil 8 driven by the speed control driver 28. It will be a thing. When the exposure is performed at a constant speed and the exposure area deviates, the magnet 5 of the movable part is now opposed to the four-phase coil 9 connected to the deceleration driver 29b. At 9, the moving part is decelerated and stopped at the stop position P2.

  FIG. 9 illustrates an example in which the movable portion moves from the stroke end to the stroke end. However, when the exposure angle of view is reduced in the scanning exposure apparatus, the reticle stage is not moved from end to end. When moved to the position, the travel time of the reticle stage, that is, the exposure time can be shortened, and the productivity is improved. In such a case, the switch means S is switched so that the acceleration / deceleration coil 9 corresponding to the starting position on the way and the stopping position on the way is connected to the acceleration or deceleration drivers 29a and 29b, and the speed is the same as in FIG. Scanning exposure may be performed after the control coil 8 performs initial positioning to the “halfway start position”.

  According to the present embodiment, in any case, the switching of the switch means S only occurs corresponding to the exposure angle of view. Which coil 9 is connected to the drivers 29a and 29b is determined corresponding to the angle of view, so that the driving coil is selected while sensing the position of the movable part like a general multiphase coil driving linear motor. Such a complicated driving sequence is not required.

In this embodiment, the length of the magnet 5 in the scanning direction corresponds to the length in the scanning direction of the coil 85 (FIG. 32) in the conventional example, and it is sufficient to pass only the magnetic flux corresponding to that length. The area is small. Further, while the acceleration / deceleration coil 9 is disposed in the entire scanning direction, only the coil 9 corresponding to the exposure angle of view is driven during acceleration / deceleration, so that no unnecessary heat is generated during acceleration / deceleration. During speed control, the speed control coil 8 is driven over the entire length in the scanning direction, which is wasteful. However, during speed control, the drive current is sufficiently smaller than the acceleration / deceleration current, that is, the absolute value of waste is sufficiently small. Must not.
Furthermore, since the acceleration / deceleration coil can be selected according to the exposure field angle, it is possible to flexibly cope with changes in the exposure field angle.

[Example 4]
FIG. 10 shows a reticle stage actuator according to a fourth embodiment of the present invention. FIG. 10A is a diagram showing the longitudinal section and connection of the electrical system, and FIG. 10B is a transverse sectional view of the magnet 5 portion. In this embodiment, the plurality of acceleration / deceleration coils 9 wound around the center yoke 6 in the third embodiment are wound around the upper and lower side yokes 7. Accordingly, two sets of acceleration driver groups and two sets of deceleration driver groups are configured. The movable part composed of the stage 2, the magnet holding plate 4, the magnet 5, etc. is the same as that of the third embodiment except that the position of the magnet 5 is moved to the center yoke 6 by the thickness of the acceleration / deceleration coil 9. It is configured.

  Similar to the third embodiment, only the movement of the reticle stage 2 will be described. After the reticle stage 2 is initially positioned, the reticle stage 2 is accelerated by passing a current through the drive coil 9. When the deviation between the center of gravity of the reticle stage 2 and the position where the driving force for acceleration is applied is Δ, and the thrust for acceleration is F, a moment of F * Δ acts on the reticle stage base and eventually the main body. Although the main body is shaken or the main body is to be deformed, in this embodiment, the amount of current flowing through the driver 29a in synchronization with the acceleration is set to a different value between the upper and lower acceleration coils 9, and as a result, the above F * Δ The moment which cancels only the moment is given to the movable part.

  The current control at this time may be measured by measuring the acceleration corresponding to the shaking of the main body and making it proportional to the current difference between the upper and lower drivers. May be added.

  When the exposure area is entered, acceleration is stopped and the speed is controlled by a control circuit (not shown) so that the speed becomes constant. At this time, the movable magnet 5 does not face the coil 9 connected to the acceleration driver 29a, and the speed control correction force depends on the interaction with the current of the speed control coil 8 driven by the speed control driver 28. It will be a thing.

  When it is out of the exposure area, it is decelerated by the deceleration driver 29b and stopped. At this time, it is not always necessary to cancel the moment by giving a current difference to the upper and lower drivers 29b. This is because even if the main body shakes, it may be established before the next synchronization. The position information during the acceleration / deceleration and the constant speed control is obtained by position measuring means such as a laser interferometer (not shown).

  In the present embodiment, in addition to the effects of the third embodiment, the moment around the optical axis caused by the deviation between the center of gravity of the reticle stage 2 and the position where the driving force is applied can be canceled. As a result, it is possible to further reduce the disturbance of the main body and the synchronization between the reticle and the wafer.

  In the above description, it is assumed that the number of turns of the acceleration / deceleration coil 9 wound around the upper and lower side yokes 7 is the same, and a current difference is given to the upper and lower acceleration / deceleration coils 9 to cancel the counter moment during acceleration. However, since the deviation Δ of the force application point and the center of gravity of the movable part with respect to the optical axis position is known and often unchanged, the acceleration / deceleration coil wound around the upper and lower side yokes 7 in advance by an amount corresponding to this Δ You may make a difference in the number of turns of 9. In this way, the same current can be applied to the upper and lower acceleration / deceleration coils 9 to cancel the reaction moment, so that the acceleration driver 29a and the deceleration driver 29b can be configured by one group each as in the first embodiment. It can be simplified.

[Example 5]
FIG. 11 is a perspective view showing the configuration of the drive mechanism according to the fifth example of the present invention. In this mechanism, as shown in the figure, a guide 1 is fixed on a base (not shown), and a stage 2 is slidably supported on the guide 1 through a lubricating means such as an air film in the scanning direction. . A workpiece 3 is held on the stage 2. Driving coils are fixed on both sides of the stage 2. Each drive coil is composed of a positioning / speed control coil 8 disposed in front and rear and an acceleration / deceleration coil 9 disposed therebetween. The front and rear positioning / speed control coils 8 are electrically connected in the same phase, and each drive coil has a two-phase configuration. Further, a linear motor stator composed of a yoke 26 and a magnet 27 is provided in order to apply a constant magnetic field to a part of the drive coil over the entire stroke of the stage 2. The magnet 27 is magnetized so that the surface facing the yoke 26 is an S pole, and the surface facing the drive coils 8 and 9 on the back side is an N pole. The linear motor stator is fixed on a base (not shown). A power amplifier is connected to the drive coil, but a PWM amplifier 29 is connected to the acceleration / deceleration coil 9 so that a large output can be generated, and the positioning / speed control coil 8 is linear. An amplifier 28 of the type is connected to respond to the current command up to a high frequency. The position of the stage 2 is measured by a laser interferometer (not shown) and fed back to a position / speed control circuit (not shown).

  The operation in this configuration will be described with reference to the control block diagram of FIG. When a position command is output from the control device 31, an error between the position command and the position signal measured by the laser interferometer is obtained, and the error is input to the arithmetic circuit 32 in time series. The arithmetic circuit 32 performs various filter operations on the position error signal and outputs a current command. The current command is input to both the PWM amplifier 29 and the linear amplifier 28. A large value is given as a current command at the time of acceleration / deceleration, but the linear amplifier 28 is limited to a predetermined value or less because of the clamp circuit 34 inserted in the previous stage so that only a current corresponding to the limited maximum value flows. It has become. On the other hand, the PWM amplifier 29 passes a current corresponding to the command value. That is, during acceleration / deceleration, thrust is mainly given by the PWM amplifier 29.

  When the movement by acceleration / deceleration ends and the positioning operation starts, the current command value is small and the signal has a relatively high frequency. That is, in order to obtain high accuracy, the servo gain of the arithmetic circuit 32 is set high, and when the positioning operation is started, the stage 2 is vibrated with a minute displacement at a relatively high frequency by an electric spring formed by the servo system. While heading to the target position. This current command also enters both the PWM amplifier 29 and the linear amplifier 28. However, the PWM amplifier 29 cannot respond to the above-described relatively high frequency input and cannot flow a desired control current through the coil. In the worst case, an unnecessary disturbance may be generated by flowing a current having a distorted waveform with respect to the input waveform. Therefore, in this embodiment, a low-pass filter 33 is inserted in the preceding stage of the PWM amplifier 29 to perform a relatively long positioning. High current command is cut off.

  On the other hand, since the current command value is small on the linear amplifier 28 side, the current command value passes through without being clamped by the clamp circuit 34 and is input to the linear amplifier 28. The linear amplifier 28 causes a current waveform corresponding to the waveform of the current command to flow through the positioning / speed control coil 8. That is, at the time of positioning / speed control, thrust for positioning is mainly given by the linear amplifier 28, and high-accuracy positioning is achieved.

[Example 6]
FIG. 13 is a perspective view showing an external appearance of a drive mechanism according to a sixth embodiment of the present invention, and FIG. 14 is a perspective view showing a configuration of the drive mechanism of FIG. This drive mechanism is for scanning and exposing the workpiece 3 in one axial direction. As shown in FIGS. 13 and 14, in this apparatus, a stage guide 1 is fixed on a vibration isolation base (not shown), and the stage 2 is slidable in the scanning direction on the stage guide 1 via a lubricating means such as an air film. It is supported by. A workpiece 3 is held on the stage 2. A magnet holding plate 4 having a U-shaped cross section is fixed to both sides of the stage 2, and a rectangular hole into which the magnet 5 enters is provided in the horizontal portion 4 a of the magnet holding plate 4, and the magnet 5 is placed in the rectangular hole. It is fitted and fixed. The stage 2, the workpiece 3, the magnet holding plate 4, and the magnet 5 are integrated to form a movable part.

  On the other hand, the fixed part is constituted by a yoke / coil unit provided for the movable part. Each yoke / coil unit is formed of one center yoke 6, two side yokes 7, a one-phase speed control coil 8, and a plurality of acceleration / deceleration coils 9. A speed control coil 8 having a length corresponding to substantially the entire length of the center yoke 6 is wound around the center yoke 6 in the longitudinal direction so as to be electrically single-phased.

  Around the speed control coil 8, an acceleration / deceleration coil 9 having a length that is sufficiently shorter than the speed control coil 8 in the longitudinal direction is wound. It is provided along the longitudinal direction. The plurality of acceleration / deceleration coils 9 are configured to be electrically independent, that is, to control the current for each phase. Then, the side yoke 7 is fixed so as to sandwich the center yoke 6 from above and below.

  The fixed portion and the movable portion are fixed in such a positional relationship that the magnet 5 of the magnet holding plate 4 is not contacted between the acceleration / deceleration coil 9 and the side yoke 7 in the yoke / coil unit.

  As shown in FIG. 15 to be described later, the magnet 5 of the movable part is arranged in the thickness direction (vertical direction) with respect to the fixed part. More specifically, the two magnets 5 included in one magnet holding plate 4 are arranged such that the N pole faces the center yoke 6.

  Magnetic flux generated from each magnet 5 enters the center yoke 6 and branches back and forth in the longitudinal direction, reaches both end portions (front and rear end portions) of the center yoke 6, branches up and down at the front and rear end portions, and the upper and lower side yokes. 7, the upper and lower side yokes 7 constitute a magnetic circuit in which the magnetic flux from the front and rear ends flows toward the position facing the magnet 5 and reaches the S pole of the facing magnet 5 from there. Therefore, when a current is passed through the speed control coil 8 in this state, the magnet 5 receives a force in the scanning direction (longitudinal direction of the center yoke 6 and the side yoke 7) according to Fleming's law. Similarly, when a current is passed through the acceleration / deceleration coil 9 facing the magnet 5, the magnet 5 receives a force in the scanning direction.

  FIG. 15 is a diagram showing how electrical circuits are connected in the drive mechanism of FIGS. 13 and 14, and only a part of the movable part and one side of the fixed part are shown. FIG. 15 (a) is a partially broken plan view of the one side portion, FIG. 15 (b) is a view showing the longitudinal section and connection of the electric system, and FIG. 15 (c) is a transverse sectional view of the magnet 5 portion. is there. As shown in FIG. 15B, four acceleration drivers 29a, four deceleration drivers 29b, and a speed control driver 28 are provided as drive drivers. The acceleration / deceleration driver is divided into a plurality of drivers in order to provide a sufficient capacity for the driver. One acceleration driver 29a and one deceleration driver 29b are connected in parallel to each acceleration / deceleration coil 9 via a switch means S.

  The switch means S of the acceleration / deceleration coil 9 acts so that each coil is not connected to either the acceleration driver 29a or the deceleration driver 29b, or only one of them is connected. That is, each coil acts so as not to be connected to both the acceleration driver 29a and the deceleration driver 29b.

  Here, the acceleration coil and the deceleration coil are set to four groups of four phases, and four acceleration drivers 29a or four deceleration drivers 29b are connected to these groups by the switch means S, respectively. It has become. That is, each coil is assigned to each group in order, and the same group of coils separated by four can be connected to the same acceleration driver 29a or deceleration driver 29b. In this way, the four adjacent acceleration / deceleration coils 9 can be connected to the four acceleration drivers 29a or 29b, respectively, at any position.

  Further, the greatest feature of this embodiment is that a PWM amplifier is used for the acceleration driver 29a and the deceleration driver 29b, and a linear amplifier is used for the speed control driver 28.

  FIG. 15 shows an example of the start position P1 and the stop position P2 when accelerating, running at a constant speed, and decelerating from one stroke end to the other stroke end. At this time, the switch S is closed so that the leftmost four-phase acceleration / deceleration coil 9 is connected only to the acceleration driver 29a. Further, the switch S is closed so that the rightmost four-phase coil 9 is connected only to the deceleration driver 29b. The other acceleration / deceleration coils 9 are not connected to any driver. The total length of each four-phase coil 9 in the scanning direction is designed to be longer than (magnet size + acceleration / deceleration stroke). That is, acceleration is completed with only four-phase coils. In other words, the coil is not switched during acceleration.

The control block diagram is the same as that of FIG.
The operation of the above configuration will be described with reference to the control block diagram of FIG. When the position command is output from the control device 31, an error between the position command and the position signal measured by the laser interferometer is obtained, and the error is input to the arithmetic circuit 32. The arithmetic circuit 32 performs various filter operations on the position error signal input in time series and outputs a current command. The current command is input to both the PWM amplifier 29 and the linear amplifier 28. At the time of acceleration / deceleration, a large value is given as a current command. However, the input of the linear amplifier 28 is limited to a predetermined value or less because of the clamp circuit 34 inserted in the previous stage, and only a current corresponding to the maximum value flows. Yes.

  On the other hand, the PWM amplifier 29 supplies a current corresponding to the command value to the four-phase acceleration coil 9. That is, at the time of acceleration, thrust is given mainly by the acceleration PWM amplifier 29 and the four-phase coil 9 connected thereto.

  When the movement by acceleration is finished and the exposure area is entered, speed control is performed so that the speed becomes constant. At this time, the movable magnet 5 does not face the acceleration coil 9, and the correction force for the speed control is due to the interaction with the current of the speed control coil 8 driven by the speed control driver 28. In addition, since the speed is constant, the current command value is electrically small and the signal has a relatively high frequency. In order to obtain high accuracy, the servo gain of the speed loop of the arithmetic circuit 32 is set high, and the stage 2 is set to the target every moment while vibrating at a relatively high frequency with a relatively high frequency by an electric spring constituting the servo system. The position is controlled. This current command also enters both the PWM amplifier 29 and the linear amplifier 28. However, the PWM amplifier 29 cannot respond to the above-described relatively high input, and cannot supply a desired control current to the coil. In the worst case, an unnecessary disturbance may be generated by flowing a current having a distorted waveform with respect to the input waveform. Therefore, in this embodiment, a low-pass filter 33 is inserted in the preceding stage of the PWM amplifier 29 to perform a relatively long positioning. The high frequency current command is cut off.

  On the other hand, since the current command value is small on the linear amplifier 28 side, the current command value passes through without being clamped by the clamp circuit 34, and the current waveform according to the current command waveform is caused to flow through the speed control coil 8 by the linear amplifier 28. That is, at the time of speed control, thrust for speed control is mainly given by the linear amplifier 28, and highly accurate speed control can be achieved.

  When the exposure area is deviated, the four-phase deceleration coil 9 connected to the deceleration PWM driver 29 and the movable part magnet 5 face each other. Decelerate and stop. The roles and actions of the PWM amplifier 29 and the linear amplifier 28 in the deceleration operation are the same as in acceleration.

[Example 7]
FIG. 16 is a perspective view showing the configuration of the drive mechanism according to the seventh embodiment of the present invention, and FIG. 17 is a cross-sectional view taken along the line AA of FIG. As shown in FIG. 16, a guide 1 is fixed on a base (not shown), and a stage 2 is supported on the guide 1 through a lubricant such as an air film so as to be slidable in the scanning direction. A workpiece 3 is held on the stage 2. Driving coils 44 are fixed on both sides of the stage 2. Further, a linear motor stator composed of a yoke 26 and a magnet 27 is provided to apply a constant magnetic field to a part of the drive coil 44 over the entire stroke of the stage 2. The linear motor stator is fixed on a base (not shown).

  In addition, a drive mechanism using a feed screw 51 is provided in parallel with the linear motor drive mechanism described above. As shown in FIG. 17, the feed screw drive mechanism is fixed to one of two bearing units 50 arranged on a base (not shown), a feed screw 51 supported by the bearing unit 50, and the bearing unit 50. A motor 45 that rotates the feed screw 51, a ball nut 52 that is fed by the feed screw 51, a housing 53 that houses the ball nut 52, and a force transmission unit 56 that transmits a force from the housing 53 to the stage 2.

  The force transmission unit 56 includes a housing slider 55 that slidably supports the housing 53 in the scanning direction, and a housing stopper 54 that restricts the sliding range of the housing 53, and the housing 53 abuts against the housing stopper 54. A force is transmitted to the stage 2.

  In FIG. 16, a linear amplifier 28 is connected to the drive coil 44 so as to respond to a current command up to a high frequency, and a PWM amplifier 29 is connected to the motor 45 that rotates the feed screw 51. And large output can be generated. That is, acceleration / deceleration is performed by the feed screw mechanism, and positioning is performed by the drive coil 44. The position of the stage 2 is measured by a laser interferometer (not shown) and fed back to a position / speed control circuit (not shown).

  A control block diagram of this drive mechanism is shown in FIG. Portions common or corresponding to those in FIG. 12 are denoted by the same reference numerals. The drive mechanism of FIGS. 16 to 18 is substantially the same in configuration and operation as that of FIGS. 11 to 12, but differs in the method of blocking the force transmission of the feed screw mechanism during positioning. That is, at the time of positioning, the signal is not cut off at the frequency of the current waveform, but the force from the feed screw 51 is transmitted so that the housing 53 containing the ball nut 52 is not in contact with the housing stoppers 54 on both sides. The position is cut off and high-precision position control is realized only by the positioning coil 44.

[Example 8]
FIGS. 19A and 19B are perspective views showing the external appearance and configuration of the drive mechanism according to the eighth embodiment of the present invention. As shown in the figure, a guide 1 is fixed on a base (not shown), and a stage 2 is supported on the guide 1 through a lubricating means such as an air film so as to be slidable in the scanning direction. A workpiece 3 is held on the stage 2, and a yoke 66 serving as a linear motor movable element 70 and a four-pole magnet 67 are fixed to both sides of the stage 2. As the linear motor stator, there are provided a stator frame 71 and six coil units on one side fixed to the stator frame 71. The stator frame 71 is fixed on a base (not shown). Each coil unit includes an upper positioning / speed control coil 8 and a lower acceleration / deceleration coil 9. Each acceleration / deceleration coil 9 is connected to a PWM amplifier 29, and each positioning / speed control coil 8 is connected to a linear amplifier 28. 20 is an electrical system connection diagram of the drive mechanism of FIG.

  In this configuration, the driving sequence of the six coil units (only one side) when moving the stage 2 from left to right is as shown in FIG. That is, the relative position between the coils 8 and 9 and the magnet 67 is detected by an encoder (not shown), and based on this, the drive coil and the direction in which the current flows are selected. In FIG.

Outside 1

は選択されたコイルを示し、それぞれ紙面に垂直で上方向に流れる電流、および紙面に垂直で下方向に流れる電流を示す。

Indicates a selected coil, and indicates a current flowing in the upward direction perpendicular to the paper surface, and a current flowing in the downward direction perpendicular to the paper surface, respectively.

  The operation in this embodiment is the same as that in the fifth embodiment except that six coil units are selectively used as shown in FIG. 21, and the control per one coil unit is shown in FIG. Is the same as

[Example 9]
FIG. 22 shows the configuration of the drive mechanism according to the ninth embodiment of the present invention. In the figure, a guide 1 is fixed on a base 80, and a movable stage 2 is provided on the guide 1 so as to be slidable in a one-dimensional direction. The first yoke 6 is fixed on the base 80 via a spacer 71. The first yoke 6 is magnetized in the thickness direction and disposed over the entire stroke of the movable stage 2 in the same manner as the magnet 87 shown in FIG. A single pole magnet 27 is fixed. On the base 80, the second yoke 7 is fixed via a spacer 71 via a gap so that the longitudinal direction of the second yoke 7 is substantially parallel to the first yoke 6. Further, near the both ends of the first yoke 6 and the second yoke 7, a permanent magnet 72 is disposed separately from the monopolar magnet so as to bridge the first yoke 6 and the second yoke 7. These two permanent magnets 72 are magnetized so as to be parallel to the single-pole magnet 27 and opposite in direction. That is, the single pole magnet 27 faces the first yoke 6 and the S pole, and the second yoke 7 faces the N pole. However, the two permanent magnets 72 both face the first yoke 6 and the N pole. The second yoke 7 faces the S pole. Hereinafter, the permanent magnets 72 disposed at both ends of the yokes 6 and 7 are referred to as current flux restricting magnets.

  As a result of arranging the yokes 6 and 7 and the magnets 27 and 72 as described above, the magnetic flux generated from the north pole of the monopole magnet 27 over the entire stroke passes through the gap between the monopole magnet 27 and the second yoke 7. It enters the second yoke 7, flows to both ends of the second yoke 7, and enters the south pole of the current flux regulating magnet 72 at both ends of the second yoke 7. On the other hand, the magnetic flux generated from the N pole of the current flux restricting magnet 72 at both ends of the first yoke 6 enters the first yoke 6 toward the center and enters the S pole of the single pole magnet 27 over the entire stroke.

  A movable coil 44 is disposed around the first yoke 6 so as to be wound around the first yoke 6 and the monopolar magnet 27 in a non-contact manner. The movable coil 44 is slidable in the one-dimensional direction. The movable stage 2 is fixed.

  In the above configuration, when a current is passed through the movable coil 44, the movable stage 2 receives a force in the guided direction as in the conventional example shown in FIG. At this time, since the yoke is integrally formed in the conventional example, the magnetic flux generated by the coil current circulates in the yoke 86. However, in this embodiment, the yoke is connected to the first yoke 6 and the second yoke 7 by the current magnetic flux regulating magnet 72. Since they are separated, the magnetic flux due to the coil current loses the circulation path of the ferromagnetic material. As a result, the magnetic flux generated in the first yoke 6 and the second yoke 7 by the coil current becomes very small. Therefore, even if the thickness of the yokes 6 and 7 is set to a minimum thickness that can circulate the magnetic flux of the single pole magnet 27 over the entire stroke, a large current is passed through the movable coil 44 to generate a large thrust in the movable stage 2. It becomes possible.

[Example 10]
FIG. 23 shows the configuration of the drive mechanism according to the tenth embodiment of the present invention. In the mechanism shown in the figure, a guide 1 is fixed on a base (not shown), and a movable stage 2 is provided on the guide 1 so as to be slidable in a one-dimensional direction. The first yoke 6 is fixed on the base, and a current flux restricting magnet 72 is fixed on the upper portions of both end portions of the first yoke 6. A second yoke 7 is fixed on the current magnetic flux regulating magnet 72. Around the second yoke 7, a single-phase coil 8 disposed over the entire stroke of the movable stage 2 is wound and fixed. In the gap between the single-phase coil 8 and the first yoke 6, a movable magnet 5 that faces the single-phase coil 8 with a single pole is disposed and fixed to the movable stage 2 by a frame 4. In this embodiment, the movable magnet 5 is magnetized in the thickness direction so that the N pole is on the top, and the two current flux regulating magnets 72 arranged at both ends are parallel to the movable magnet 5 and opposite in direction. Magnetized. That is, the movable magnet 5 faces the first yoke 6 at the N pole, and faces the second yoke 7 at the S pole.

  The magnetic flux generated from the N pole of the movable magnet 5 enters the second yoke 7 through the gap, flows to both ends of the second yoke 7, and enters the S pole of the current flux restricting magnet 72 at both ends of the second yoke 7. On the other hand, the magnetic flux generated from the N pole of the current flux restricting magnet 72 at both ends of the first yoke 6 enters the first yoke 6 toward the center, and passes through a part of the winding of the single-phase coil 8 and the movable magnet. Enter the 5th S pole.

  In the above configuration, when a current is passed through the single-phase coil 8, the movable stage 2 receives a force in the guided direction as in the conventional example shown in FIG. At this time, since the yoke is integrally formed in the conventional example, the magnetic flux due to the coil current circulates in the yoke 96. However, in this embodiment, the yoke is the current magnetic flux regulating magnet 72 to the first yoke 6 and the second yoke 7. Since they are separated, the magnetic flux due to the coil current loses the circulation path of the ferromagnetic material. As a result, the magnetic flux generated in the first yoke 6 and the second yoke 7 by the coil current becomes very small. Therefore, even if the thickness of the yokes 6 and 7 is set to a minimum thickness that can circulate the magnetic flux of the movable magnet 5 over the entire stroke, a large current is passed through the movable coil 44 to generate a large thrust in the movable stage 2. Is possible.

[Example 11]
24 to 26 are perspective views showing the configuration of a reticle stage using a drive mechanism according to an eleventh embodiment of the present invention, where FIG. 24 is an overall view, FIG. 25 is a partial cutaway view of a yoke and a coil, and FIG. 26 is an exploded view showing the movable part and the fixed part shifted from each other. In the reticle stage shown in FIGS. 24 to 26, a stage guide 1 is fixed on an anti-vibration base (not shown), and the stage 2 is slidably supported on the stage guide 1 through a lubricating means such as an air film in the scanning direction. Has been. A reticle 3 is held on the stage 2. A magnet holding plate 4 having a U-shaped cross section is fixed on both sides of the stage 2, and a rectangular hole for receiving a magnet is provided in the horizontal portion 4 a of the magnet holding plate 4 as shown in the figure, and the magnet 5 is placed in the rectangular hole. Is fitted and fixed. The stage 2, the reticle 3, the magnet holding plate 4 and the magnet 5 are integrated to form a movable part.

On the other hand, the fixed part is composed of a yoke / coil unit 10 provided on both sides of the movable part. Each unit 10 is formed of a center yoke 6, two side yokes 7, four current flux regulating magnets 72, a one-phase speed control coil 8, and a plurality of acceleration / deceleration coils 9.
When producing the unit 10, for example, first, a speed control coil 8 whose length in the longitudinal direction corresponds to substantially the entire length of the center yoke 6 is wound around the center yoke 6. The speed control coil 8 is configured to be electrically single-phased. Around the speed control coil 8, an acceleration / deceleration coil 9 whose length in the longitudinal direction is sufficiently shorter than that of the speed control coil 8 is wound. It is provided along the direction. The plurality of acceleration / deceleration coils 9 are configured to be electrically independent, that is, to control the current for each phase. Next, the two side yokes 7 are fixed via the four current magnetic flux regulating magnets 72 so as to sandwich the center yoke 6 from above and below.

  The fixed portion and the movable portion are assembled in a positional relationship such that the magnet 5 portion of the magnet holding plate 4 is not contacted between the acceleration / deceleration coil 9 and the side yoke 7 in the yoke / coil unit 10. .

  The magnet 5 of the movable part is magnetized in the thickness direction (vertical direction) as indicated by an arrow in the electrical system diagram of FIG. That is, the two magnets 5 attached to one magnet holding plate 4 are magnetized so that the N poles face each other.

  Further, the four current magnetic flux regulating magnets 72 provided in the fixed part are also magnetized in the vertical direction. Each current magnetic flux regulating magnet 72 is disposed such that the S pole faces the center yoke 6 and the N pole faces the side yoke 7.

  The magnetic flux generated from the N pole of each magnet 5 included in the movable part passes through the gap and part of the windings of the coils 8 and 9 and enters the center yoke 6. The center yoke 6 branches back and forth in the longitudinal direction. 6 and reaches the S pole of the current flux regulating magnet 72. On the other hand, the magnetic flux generated from the S pole of the magnet 5 enters the side yoke 7 through the air gap, branches there in the longitudinal direction, and reaches both ends (front and rear end portions) of the side yoke 7, where the current magnetic flux regulating magnet 72. Enter the N pole. As described above, a magnetic circuit that circulates between the magnet 5 of the movable part and the magnet 72 of the fixed part is configured.

  When a current is passed through the speed control coil 8 in this state, the magnet 5 receives a force in the scanning direction (longitudinal direction of the yokes 6 and 7) according to Fleming's law. Further, even when an electric current is passed through the acceleration / deceleration coil 9 facing the magnet 5, the magnet 5 similarly receives a force in the scanning direction.

  Further, when a current is passed through the acceleration / deceleration coil 9 and the speed control coil 8 in this state, a magnetic flux due to the current is generated in the center yoke 6. Conventionally, this magnetic flux is about to circulate through the side yoke 7. However, in this embodiment, a current flux restricting magnet 72 is provided between the center yoke 6 and the side yoke 7, and the magnetic flux generated in the center yoke 6 by the current of the coils 8 and 9 passes through the side yoke 7. Play a role in hindering circulation. This is because in a magnetic circuit using an electric current as a magnetomotive force, a magnet is a material having a large magnetic resistance. As a result, the magnetic flux due to the current is less likely to be generated in the yoke. Therefore, it is not necessary to consider the saturation of the magnetic flux due to the current in designing the yoke cross-sectional area, and the yoke cross-sectional area can be further reduced. In addition, current transient characteristics can be improved.

  FIG. 27 is a diagram showing the connection of electrical circuits in the drive mechanism of FIGS. 24 to 26, and the actuator (movable part and fixed part) part is shown only a part of the movable part and one side of the fixed part. is there. FIG. 27A is a partially broken plan view of one side portion of the actuator, FIG. 27B is a diagram showing a longitudinal section of the actuator portion and connection of the electric system, and FIG. 27C is a view of the magnet 5 portion of the actuator. It is a cross-sectional view. As shown in FIG. 27B, four acceleration drivers 29a, four deceleration drivers 29b, and one speed control driver 28 are provided as drive drivers. The acceleration / deceleration driver is divided into a plurality of drivers in order to provide a sufficient capacity for the driver. One acceleration driver 29a and one deceleration driver 29b are connected in parallel to each acceleration / deceleration coil 9 via a switch means S.

  The switch means S of the acceleration / deceleration coil 9 acts so that each coil is not connected to either the acceleration driver 29a or the deceleration driver 29b, or only one of them is connected. That is, each coil 9 is not connected to both the acceleration driver 29a and the deceleration driver 29b.

  Here, the acceleration coil and the deceleration coil are set to four groups of four phases, and four acceleration drivers 29a or four deceleration drivers 29b are connected to these groups by the switch means S, respectively. It has become. That is, each coil is assigned to each group in order, and the same group of coils separated by four can be connected to the same acceleration driver 29a or deceleration driver 29b. In this way, the four adjacent acceleration / deceleration coils 9 can be connected to the four acceleration drivers 29a or 29b, respectively, at any position.

  FIG. 27 shows an example of the start position P1 and the stop position P2 when accelerating, running at a constant speed, and decelerating from one stroke end to the other stroke end. At this time, the switch S is closed so that the leftmost four-phase coil 9 is connected only to the acceleration driver 29a. Further, the switch S is closed so that the rightmost four-phase coil 9 is connected only to the deceleration driver 29b. The other acceleration / deceleration coils 9 are not connected to any driver. The total length of each four-phase coil 9 in the scanning direction is designed to be longer than (magnet size + acceleration stroke + deceleration stroke). That is, acceleration is completed with only four-phase coils. In other words, the coil is not switched during acceleration.

  The operation when the drive mechanism having the above-described configuration is used as the reticle stage 82 of the scanning exposure apparatus of FIG. 31 is described below, assuming that the wafer stage 103 and the reticle stage 82 move synchronously. Only the operation of the symbol “2” in FIG. 27 will be described. 24 to 27, first, the initial position of reticle stage 2 is determined. In this case, a current in a predetermined direction is supplied to the speed control coil 8 to send the movable part in one direction, and the reticle stage position measurement interferometer (not shown) is reset when the origin switch (not shown) is turned off. Further, by passing a current through the speed control coil 8 while referring to the measurement value of the interferometer, the movable part (stage 2, magnet holding plate 4, magnet 5, etc.) is moved to the starting position P1 in FIG. Positioning control is performed by the speed control coil 8 at the position P1.

  Next, in response to a command from a control system (not shown), current is passed through the four-phase coil 9 connected for acceleration by the acceleration driver 29a to accelerate the reticle stage 2. When the exposure area is entered, acceleration is stopped and the speed is controlled by a control circuit (not shown) so that the speed becomes constant. At this time, the movable magnet 5 does not face the coil 9 connected to the acceleration driver 29a, and the speed control correction force depends on the interaction with the current of the speed control coil 8 driven by the speed control driver 28. It will be a thing. When the exposure is performed at a constant speed and the exposure area deviates, the magnet 5 of the movable part is now opposed to the four-phase coil 9 connected to the deceleration driver 29b. At 9, the moving part is decelerated and stopped at the stop position P2.

  In FIG. 27, the example in which the movable portion moves from the stroke end to the stroke end has been described. However, when the exposure field angle is small in the scanning exposure apparatus, the reticle stage is not moved from end to end. The movement to the position can shorten the movement time of the reticle stage, that is, the exposure time, and the productivity is improved. In such a case, the switch means S is switched so that the acceleration / deceleration coil 9 corresponding to the starting position on the way and the stopping position on the way is connected to the acceleration or deceleration drivers 29a and 29b, and the speed is the same as in FIG. Scanning exposure may be performed after the control coil 8 performs initial positioning to the “halfway start position”.

  According to the present embodiment, in any case, the switching of the switch means S only occurs corresponding to the exposure angle of view. Which coil 9 is connected to the drivers 29a and 29b is determined corresponding to the angle of view, so that the driving coil is selected while sensing the position of the movable part like a general multiphase coil driving linear motor. Such a complicated driving sequence is not required.

In this embodiment, the length of the magnet 5 in the scanning direction corresponds to the length of the coil 85 (FIG. 262) in the conventional example in the scanning direction. The area is small. Further, while the acceleration / deceleration coil 9 is disposed in the entire scanning direction, only the coil 9 corresponding to the exposure angle of view is driven during acceleration / deceleration, so that no unnecessary heat is generated during acceleration / deceleration. During speed control, the speed control coil 8 is driven over the entire length in the scanning direction, which is wasteful, but during speed control, the drive current is sufficiently smaller than the acceleration / deceleration current, that is, the absolute value of waste is sufficiently small. Must not.
Furthermore, since the acceleration / deceleration coil can be selected according to the exposure field angle, it is possible to flexibly cope with changes in the exposure field angle.

[Example 12]
FIG. 28 shows a reticle stage actuator according to a twelfth embodiment of the present invention. FIG. 28A is a diagram showing the longitudinal section and connection of the electrical system, and FIG. 28B is a transverse sectional view of the magnet 5 portion. In this embodiment, the plurality of acceleration / deceleration coils 9 wound around the center yoke 6 in the eleventh embodiment are wound around the upper and lower side yokes 7. Accordingly, two sets of acceleration driver groups and two sets of deceleration driver groups are configured. The movable part composed of the stage 2, the magnet holding plate 4, the magnet 5, and the like is the same as that of the eleventh embodiment except that the position of the magnet 5 is moved to the center yoke 6 by the thickness of the acceleration / deceleration coil 9. It is configured.

  Similar to the eleventh embodiment, only the movement of the reticle stage 2 will be described. After the reticle stage 2 is initially positioned, a current is passed through the drive coil to accelerate the reticle stage. When the deviation between the center of gravity of the reticle stage and the position where the driving force for acceleration is applied is Δ, and the thrust for acceleration is F, a moment of F * Δ acts on the reticle stage base and eventually the main body. In this embodiment, the amount of current flowing through the driver 29a is made different between the upper and lower acceleration coils 9, and as a result, only the above F * Δ is obtained. The moment that cancels the moment is given to the movable part.

  The current control at this time may be measured by measuring the acceleration corresponding to the shaking of the main body and making it proportional to the current difference between the upper and lower drivers. May be added.

  When the exposure area is entered, acceleration is stopped and the speed is controlled by a control circuit (not shown) so that the speed becomes constant. At this time, the movable magnet 5 does not face the coil 9 connected to the acceleration driver 29a, and the speed control correction force depends on the interaction with the current of the speed control coil 8 driven by the speed control driver 28. It will be a thing.

  When it is out of the exposure area, it is decelerated by the deceleration driver 29b and stopped. At this time, it is not always necessary to cancel the moment by giving a current difference to the upper and lower drivers 29b. This is because even if the main body shakes, it may be established before the next synchronization. The position information during the acceleration / deceleration and the constant speed control is obtained by position measuring means such as a laser interferometer (not shown).

  In the present embodiment, in addition to the effects of the first embodiment, the moment around the optical axis caused by the deviation between the center of gravity of the reticle stage 2 and the position where the driving force is applied can be canceled. As a result, it is possible to further reduce the disturbance of the main body and the synchronization between the reticle and the wafer.

  In the above description, it is assumed that the number of turns of the acceleration / deceleration coil 9 wound around the upper and lower side yokes 7 is the same, and a current difference is given to the upper and lower acceleration / deceleration coils 9 to cancel the counter moment during acceleration. However, since the deviation Δ of the force application point and the center of gravity of the movable part with respect to the optical axis position is known and often unchanged, the acceleration / deceleration coil wound around the upper and lower side yokes 7 in advance by an amount corresponding to this Δ You may make a difference in the number of turns of 9. In this way, the same current can be applied to the upper and lower acceleration / deceleration coils 9 to cancel the reaction moment, so that the acceleration driver 29a and the deceleration driver 29b can be configured by one group each as in the first embodiment. It can be simplified.

[Example 13]
Any of the drive mechanisms or reticle stages shown in the first to thirteenth embodiments can be applied as the reticle stage 82 of the scanning exposure apparatus of FIG.

  In FIG. 31, a main body surface plate 102 is supported on a reference base 100 via vibration isolation means 101. A wafer stage 103 that can move in the XY plane (horizontal plane) is provided on the main body surface plate 102, and a projection optical system 106 is fixed via a main body support member 105. A reticle stage base 80 is provided above the support member 105, and a reticle stage 82 is provided that can scan the reticle stage base 80 in one axial direction along a guide (not shown). Reference numeral 104 denotes an interferometer second reference for measuring the position of the wafer stage 103, 107 denotes an interferometer first reference for measuring the position of the reticle stage 82, and 108 denotes a reticle (not shown) on the reticle stage 82. It is an illumination system for giving exposure energy to a wafer (not shown) on the wafer stage 103.

  The illumination light from the illumination system 108 is applied only to an elongated rectangular or arc region perpendicular to the scanning direction of the reticle stage 82 out of the reticles on the reticle stage 82, so that the entire pattern of the reticle is exposed on the wafer. It is necessary to scan both the reticle stage 82 and the wafer stage 103. The scanning is performed at a constant speed, and the speed ratio between the reticle stage 82 and the wafer stage 103 during scanning is made to exactly match the reduction magnification of the projection optical system 108. The position of the reticle stage 82 is measured by the laser interferometer (not shown) via the interferometer first reference 107 and the position of the wafer stage 103 is returned by the laser interferometer (not shown) to the control system (not shown). It is like that.

  In the above configuration, the wafer stage 103 and the reticle stage 82 are moved to the initial positions, and the wafer stage 103 and the reticle stage 82 are accelerated. Before the two enter the area where the illumination light strikes, the positional relationship becomes a predetermined positional relationship, and the velocity ratio is converged to be equal to the reduction magnification of the projection optical system 108. The exposure is performed while maintaining this state, and when the exposure is out of the area exposed to the illumination light, both are appropriately decelerated.

  Next, an embodiment of a device production method using the scanning exposure apparatus described above will be described.

  FIG. 29 shows a flow of manufacturing a microdevice (a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin film magnetic head, a micromachine, etc.). In step 1 (circuit design), a semiconductor device circuit is designed. In step 2 (mask production), a mask on which the designed circuit pattern is formed is produced. On the other hand, in step 3 (wafer manufacture), a wafer is manufactured using a material such as silicon. In step 4 (wafer process) called a pre-process, an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 5 (assembly) is called a post-process, and is a process for forming a semiconductor chip using the wafer produced in step 4, and is a process such as an assembly process (dicing, bonding), a packaging process (chip encapsulation), or the like. including. In step 6 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 5 are performed. Through these steps, the semiconductor device is completed and shipped (step 7).

  FIG. 30 shows a detailed flow of the wafer process (step 4). In step 11 (oxidation), the wafer surface is oxidized. In step 12 (CVD), an insulating film is formed on the wafer surface. In step 13 (electrode formation), an electrode is formed on the wafer by vapor deposition. In step 14 (ion implantation), ions are implanted into the wafer. In step 15 (resist process), a photosensitive agent is applied to the wafer. In step 16 (exposure), the circuit pattern of the mask is printed onto the wafer by exposure using the exposure apparatus described above. In step 17 (development), the exposed wafer is developed. In step 18 (etching), portions other than the developed resist image are removed. In step 19 (resist stripping), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer.

  By using the manufacturing method of this embodiment, it is possible to manufacture a highly integrated semiconductor device that has been difficult to manufacture at low cost.

It is a perspective view which shows the structure of the drive mechanism which concerns on 1st Example of this invention. It is a perspective view which fractures | ruptures and shows a part of drive mechanism of FIG. It is a disassembled perspective view of the drive mechanism of FIG. It is a control block diagram of the drive mechanism of FIG. FIG. 6 is a control block diagram and a cross-sectional configuration diagram of a drive mechanism according to a second example of the present invention. It is a perspective view which shows the structure of the drive mechanism which concerns on the 3rd Example of this invention. It is a perspective view which fractures | ruptures and shows a part of drive mechanism of FIG. FIG. 7 is an exploded perspective view of the drive mechanism of FIG. 6. It is a control block diagram of the drive mechanism of FIG. FIG. 8 is a control block diagram and a cross-sectional configuration diagram of a drive mechanism according to a fourth example of the present invention. It is a perspective view which shows the structure of the drive mechanism which concerns on the 5th Example of this invention. FIG. 12 is a control block diagram of the drive mechanism of FIG. 11. It is a perspective view which shows the external appearance of the drive mechanism which concerns on the 6th Example of this invention. It is a perspective view which shows the structure of the drive mechanism of FIG. FIG. 15 is a connection diagram illustrating an electric circuit of the drive mechanism of FIGS. 13 and 14. It is a perspective view which shows the structure of the drive mechanism which concerns on the 7th Example of this invention. It is AA sectional drawing of FIG. FIG. 18 is a control block diagram of the drive mechanism of FIGS. 16 and 17. It is a perspective view which shows the external appearance and structure of the drive mechanism which concerns on the 8th Example of this invention. FIG. 10 is a connection diagram illustrating an electric circuit of the drive mechanism of FIG. 9. It is a figure which shows the coil selection sequence of the drive mechanism of FIG. It is a perspective view which shows the external appearance and structure of the drive mechanism which concerns on the 9th Example of this invention. It is a perspective view which shows the external appearance and structure of the drive mechanism which concerns on the 10th Example of this invention. It is a perspective view which shows the structure of the drive mechanism based on the 11th Example of this invention. It is a perspective view which fractures | ruptures and shows a part of drive mechanism of FIG. It is a disassembled perspective view of the drive mechanism of FIG. FIG. 25 is a control block diagram of the drive mechanism of FIG. 24. It is the control block diagram and sectional block diagram of the drive mechanism which concern on 12th Example of this invention. It is a flowchart which shows operation | movement of the scanning exposure apparatus which concerns on 13th Example of this invention. It is a flowchart which shows operation | movement of the scanning exposure apparatus which concerns on 13th Example of this invention. It is a figure which shows the whole structure of the conventional scanning exposure apparatus which is an example of the application object of this invention. It is a perspective view which shows the structure of the conventional drive mechanism. It is a perspective view which shows the structure of the other conventional drive mechanism. It is a figure which shows the flow of the magnetic flux in the magnet and yoke in FIG. 32 and FIG. It is a perspective view which shows the structure of the further another conventional drive mechanism.

Explanation of symbols

  1: guide, 2: movable stage, 3: workpiece (reticle), 4: magnet holding plate, 4a: magnet fixing frame, 5: magnet, 6: center yoke, 7: side yoke, 8: positioning / speed control Coil: 9: acceleration / deceleration coil, 10: stator (yoke / coil unit), 26: yoke, 27: magnet, 28: linear amplifier (speed control driver), 29: PWM amplifier, 29a: acceleration driver, 29b: driver for deceleration, 31: control device, 32: arithmetic circuit, 33: low-pass filter, 34: clamp circuit, 44: drive coil, 45: motor, 50: bearing unit, 51: feed screw, 52: ball nut, 53: Housing, 54: Housing stopper, 55: Housing slider, 56: Force transmission part, 57: Air pad, 64: Drive coil, 67: Magnet, 70 Movable element, 71: Stator frame, 72: Current magnetic flux regulating magnet, 80: Reticle stage base, 81: Guide, 82: Reticle stage, 83: Reticle, 85: Moving coil, 86: Yoke, 87: Permanent magnet, 100 : Reference base, 101: vibration isolation means, 102: main body surface plate, 103: wafer stage, 104: interferometer second reference, 105: main body support member, 106: projection optical system, 107: interferometer first reference, 108 : Lighting system.

Claims (19)

Position detection means for detecting the position of the stage, command means for outputting a current command based on the current position and target position of the stage detected by the position detection means, a power amplifier for outputting a current corresponding to the current command, and In a stage apparatus having a driving means for driving the stage by this current,
The power amplifier and the driving means include: a first PWM-type power amplifier and a first driving means for driving the stage with its output current; a second linear-type power amplifier with the output current; A stage apparatus comprising a second driving means for driving in parallel.   The first or second stage is driven via the first power amplifier during acceleration / deceleration of the stage, and the stage is driven via the second power amplifier during positioning / speed control of the stage. 2. The stage apparatus according to claim 1, further comprising means for selecting two power amplifiers.   The first and second driving means are linear motors, and their movable parts include an acceleration / deceleration coil connected to the first power amplifier, and a positioning / speed control coil connected to the second power amplifier. The stage apparatus according to claim 1, further comprising:   The first and second drive means are linear motors, the movable part of which has a magnet facing the coil of the fixed part with a single pole, and the fixed part of the magnet extends over the entire stroke of the stage. A yoke for applying a constant magnetic field to a part of the coil according to the position, and a single-phase speed control coil and a plurality of multi-phase acceleration / deceleration coils wound around the yoke as the coil The stage apparatus according to claim 1, further comprising a stage apparatus.   5. The stage apparatus according to claim 4, wherein the plurality of multi-phase acceleration / deceleration coils are wound outside the single-phase speed control coil.   The yoke has a main yoke having a linear portion parallel to the moving direction of the stage and extending at least the entire stroke of the stage; and a linear portion parallel to the linear portion of the main yoke and at least the entire stroke of the stage; and 5. The stage apparatus according to claim 4, comprising a side yoke magnetically connected to the main yoke outside the stroke.   5. The stage apparatus according to claim 4, wherein the single-phase speed control coil is wound around the main yoke, and the plurality of multi-phase acceleration / deceleration coils are wound around the side yoke.   The side yokes are arranged on both sides of the main yoke, the single-phase speed control coil is one set for the main yoke, and the plurality of multi-phase acceleration / deceleration coils are one for the two side yokes. 5. The stage apparatus according to claim 4, wherein two sets are wound one by one.   The stage apparatus according to any one of claims 3 to 8, wherein one set of the movable part and the fixed part of the linear motor are arranged on both sides of the stage.   The second driving means is a linear motor having a coil fixed to the stage, a magnet and a yoke for applying a magnetic field to the coil, and the first driving means is a feed screw mechanism and the feed screw mechanism. The stage apparatus according to claim 1, further comprising: a force transmission unit that transmits the force of the above to the stage.   The first and second driving means are linear motors, the movable part has a multi-pole magnet unit, the fixed part has a plurality of flat coil units, and the flat coil unit is the first coil unit. 3. The stage apparatus according to claim 1, further comprising an acceleration / deceleration coil connected to a power amplifier and a positioning / speed control coil connected to the second power amplifier.   A single-phase coil, a first permanent magnet that can freely move relative to the single-phase coil in the axial direction of the single-phase coil, and a first yoke that is made of a ferromagnetic material and penetrates the single-phase coil in the axial direction A closed magnetic circuit having a portion arranged outside the single-phase coil in parallel with the first yoke and circulating the magnetic flux from the first permanent magnet across the winding of the single-phase coil. And a second yoke made of a ferromagnetic material formed together with the first yoke and the first permanent magnet, and a second permanent magnet connecting the first yoke and the second yoke. Linear motor.   The single-phase coil is movable, the first and second yokes are fixed yokes having straight portions over the entire stroke of the single-phase coil, and the first permanent magnet is the first or second A magnet fixed to a straight portion of the yoke and facing the single-phase coil with a single pole over the entire stroke of the single-phase coil, and the second magnet is connected to the first yoke and the second outside the stroke. The linear motor according to claim 12, wherein the yoke is connected.   The first permanent magnet is a movable magnet facing the single-phase coil with a single pole, and the first and second yokes are fixed yokes having linear portions over the entire stroke of the movable magnet, The single-phase coil is wound around the first yoke over the entire stroke of the movable magnet, and the second magnet connects the first yoke and the second yoke outside the stroke. The linear motor according to claim 12.   The single-phase coil is for speed control, and a plurality of acceleration / deceleration coils shorter than the single-phase coil are wound in parallel with the single-phase coil for speed control in multiple phases. The linear motor according to claim 14.   A stage apparatus using the linear motor according to any one of claims 12 to 15 as the first and second driving means according to claim 1.   A stage movable in a predetermined direction, stage acceleration / deceleration thrust generating means arranged along the movement direction, stage speed control thrust generating means provided in parallel with the thrust generating means, and the acceleration / deceleration Acceleration means for generating stage acceleration thrust in a portion located in the stage acceleration section of the thrust generation means for deceleration, and deceleration for generating stage deceleration thrust in a portion located in the stage deceleration section of the acceleration / deceleration thrust generation means Accelerating / decelerating thrust generating means and speed control in a stage apparatus comprising: means and speed control means for controlling stage thrust by the speed controlling thrust generating means in a predetermined range at least between the acceleration section and the deceleration section A stay using the linear motor according to any one of claims 12 to 15 as a thrust generating means. Apparatus.   18. A scanning exposure apparatus, wherein the stage apparatus according to claim 1 is used as a reticle stage.   19. A device production method comprising producing a device using the scanning exposure apparatus according to claim 18.

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