JP2005340011A - Electro-optical device and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electro-optical device that can improve the light extraction efficiency of a light-emitting element and can be manufactured by a simple manufacturing process, and a manufacturing method thereof.
An organic EL device according to the present invention includes an organic EL element including a pixel electrode, an organic functional layer, and a common electrode laminated on a planarization insulating film, and the organic functional layer is provided. A reflective layer 141a is provided on the lower layer side of 140, and the reflective layer 141a extends to the outside of the organic functional layer 140 in a plan view, and a slope portion facing the organic functional layer 140 side in the extended portion 141a1 is formed. The sloped portion 141a1 is formed by partially reflecting the reflective layer 141a on the convex portion 240a on the surface of the planarizing insulating film 240.
[Selection] Figure 4

Description

  The present invention relates to an electro-optical device and an electronic apparatus.

As a flat display device (flat panel display), an organic EL (electroluminescence) element in which a light emitting layer made of an organic light emitting material is formed between an anode and a cathode is known. The structure of a conventional light emitting device (organic electroluminescence device; organic EL device) containing an organic compound is a structure in which respective functional layers of anode / hole injection layer / organic light emitting layer / electron injection layer / cathode are laminated. is there. Since the light generated in the light emitting layer containing the organic compound emits isotropically, in the conventional structure in which the respective functional layers are laminated in a planar shape, the light emitted in the normal direction of the laminated plane is directly or predetermined. However, it is difficult to extract the light emitted in a direction substantially parallel to the lamination plane to the outside of the substrate, which reduces the efficiency of the light emitting element. It was the cause.
Therefore, in Patent Document 1, it is proposed to increase the light extraction efficiency by providing irregularities in the pixel region. Japanese Patent Application Laid-Open No. H11-228707 proposes to increase the light extraction efficiency by forming a reflective wall surface when etching the reflective electrode around the pixel.
JP 2002-202737 A JP 2002-17273 A

  According to the technology disclosed in each of the above patent documents, light propagating in the surface direction of the functional layer can be extracted even partially, so it is considered that the luminous efficiency can surely be improved. However, in the technique described in Patent Document 1, since the light emitting portion and the non-light emitting portion are provided in the pixel, the light extraction efficiency in the light emitting portion is improved, but the efficiency of the entire pixel including the non-light emitting portion is not so much. There is a problem of not improving. Further, in the technique described in Patent Document 2, since the light extraction efficiency depends on the taper angle of the reflecting wall surface, it is necessary to manage the taper angle with high accuracy during the production, which increases the difficulty of production. is there. Further, when the taper angle is large, there is a problem in that when the functional layer constituting the light emitting element is formed, the film thickness becomes thin on the side surface of the opening region, resulting in luminance unevenness or short circuit between the electrodes.

  The present invention has been made in view of the above-described problems of the prior art, and an object thereof is to provide an electro-optical device capable of improving the light extraction efficiency of a light-emitting element without increasing the load of a manufacturing process. It is said.

In order to solve the above problems, the present invention is provided with a light emitting element in which a first electrode, a functional layer including a light emitting layer, and a second electrode having translucency are sequentially stacked on a substrate. In the electro-optical device, a reflective layer that reflects light generated in the light emitting layer is provided on a base side of the functional layer, and an insulating film having a convex portion on a surface is provided on the base side of the reflective layer. The reflective layer extends to the outside of the functional layer in plan view, and forms a sloped portion facing the functional layer side in the extended portion, and the sloped portion is An electro-optical device is provided that is formed due to the convex portion disposed so as to overlap with an extension portion of a reflective layer in a planar manner.
According to this configuration, a part of the reflective layer extended to the outside of the functional layer is disposed on the convex portion of the insulating film directly or via another member, so that the reflective layer extends. The protruding part forms a slope. And by forming such a slope part, it becomes possible to take out the component scattered in the surface direction of the functional layer out of the light generated in the functional layer in the vertical direction of the substrate by reflecting the slope part. Yes. As a result, the light generated in the functional layer can be efficiently used as display light, and the electro-optical device can obtain a bright display. In the prior art, the reflective layer is etched to form a tapered shape at the peripheral edge of the pixel. In the prior art, since the taper angle is managed according to the etching conditions, the angle management is difficult. In addition, since the slope layer is formed by running the reflective layer on the convex portion formed on the insulating film, it is not necessary to consider the etching conditions of the reflective layer when managing the tilt angle, and it can be manufactured by a simple process. It has become.

  In the electro-optical device according to the aspect of the invention, it is preferable that the slope portion is disposed so as to surround the functional layer in a plan view. According to this configuration, the light scattered in the surface direction of the functional layer can be efficiently reflected and extracted by the slope portion surrounding the functional layer, so that the loss of light can be minimized and a high luminance display can be achieved. Can be obtained.

  In the electro-optical device according to the aspect of the invention, it is preferable that the slope portion protrudes toward the second electrode from the interface between the second electrode and the functional layer. By setting it as such a structure, most light scattered in the surface direction of a functional layer can be reflected in the said slope part, and the extraction efficiency of light can be improved. When the height of the slope portion is lower than the thickness of the functional layer, the amount of light leaking outside the slope portion increases.

  In the electro-optical device according to the aspect of the invention, a partition member that surrounds the light emitting element is erected on the base, and the inclined surface portion of the reflective layer and the partition member are disposed so as to overlap in a plane. Is preferred. With such a configuration, it is possible to form the bottom surface portion of the region surrounded by the partition wall member with a flat surface, and improve the flatness of the functional layer when the functional layer is formed on the bottom surface portion. be able to. As a result, it is possible to reduce point defects and brightness variations caused by non-uniformity of the functional layer thickness and provide a high-quality display.

  In the electro-optical device according to the aspect of the invention, a circuit layer electrically connected to the light emitting element is provided on the base side of the insulating film, and a convex portion on the surface of the insulating film is provided in the circuit layer. It can also be set as the structure formed resulting from the electrically-conductive member. According to this configuration, since the convex portion is formed by using the concave and convex shape due to the wiring or the like formed in the circuit layer, the convex portion itself is easily formed and the protruding height of the convex portion is Etc. can be adjusted easily.

  In the electro-optical device according to the aspect of the invention, the convex portion on the surface of the insulating film is caused by the conductive member disposed closest to the reflective layer among the conductive members provided on the circuit layer. Also good. According to this configuration, since the formation height and the planar area of the convex portion can be controlled by the thickness and the formation range of the conductive member on the outermost surface side, the shape control of the convex portion is facilitated, and the convex portion is formed. Adjustment of the inclination angle of the reflection layer to be performed is facilitated.

  In the electro-optical device according to the aspect of the invention, it is preferable that the conductive member disposed closest to the reflective layer has the maximum thickness among the conductive members provided in the circuit layer.

  In the electro-optical device according to the aspect of the invention, it is preferable that the conductive member disposed closest to the reflective layer is disposed so as to substantially surround the functional layer in a plan view. According to this configuration, since the slope portion of the reflective layer can be formed so as to surround the functional layer, the extraction efficiency of light scattered in the surface direction of the functional layer is increased, and the brightness of the display can be improved.

  In the electro-optical device according to the aspect of the invention, the circuit layer has a structure in which a plurality of the conductive members are stacked with an interlayer insulating film interposed therebetween, and the plurality of layers of the conductive members are arranged in a planar manner. The convex portion is preferably formed. According to this configuration, the convex portion can be more easily protruded in the vertical direction of the base body, and it becomes easier to form a slope portion having a desired height.

  In the electro-optical device according to the aspect of the invention, the convex portion is formed due to the plurality of conductive members arranged in a stacked manner, and the convex portion has a substantially frame shape in plan view, and the functional layer is formed. It is also possible to have a configuration in which the number of conductive members stacked is the same in the planar region of the convex portion. According to this configuration, since the number of conductive members surrounding the functional layer is constant around the functional layer, the height of the convex portion formed due to the laminated structure of the conductive member is also the height of the functional layer. It becomes almost constant height around. Therefore, the reflection characteristics at the slope portion of the reflection layer are uniform around the functional layer, and the intensity of light reflected by the slope portion and extracted in the vertical direction of the substrate can be made uniform.

  As a specific aspect of the conductive member in the electro-optical device according to the aspect of the invention, it is preferable that the plurality of stacked conductive members have a substantially frame shape in a plan view surrounding the functional layer in each layer. In the electro-optical device according to the aspect of the invention, at least a part of the conductive member having a substantially frame shape in a plan view may be a dummy member that is insulated from other portions.

  In the electro-optical device according to the aspect of the invention, the circuit layer may include a conductive member that is electrically connected to the second electrode. According to this configuration, it is possible to provide a structure for preventing a voltage drop in the second electrode, which is likely to cause a voltage drop because it is formed of a light-transmitting conductive material, and to display a uniform brightness. The electro-optical device can be obtained.

  In the electro-optical device according to the aspect of the invention, the light-emitting element is an organic electroluminescence element including an organic light-emitting layer. According to this configuration, an organic EL device capable of displaying bright images with high image quality is provided.

  Next, an electronic apparatus according to the invention includes the electro-optical device according to the invention described above. According to this configuration, an electronic apparatus including a display unit that can display bright and high-quality images is provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
First, a first embodiment of the present invention will be described with reference to the drawings. Hereinafter, as an embodiment of the electro-optical device of the present invention, an organic EL device (organic electroluminescence device) in which organic EL elements are arranged on a substrate as pixels will be described as an example. This organic EL device can be suitably used as display means for electronic devices, for example.

<Configuration of organic EL device>
1 is a circuit configuration diagram of the organic EL device of the present embodiment, FIG. 2 is a plan configuration diagram thereof, FIG. 3 is a diagram showing a cross-sectional structure of a pixel region 71 of the device, and FIG. It is a partial section lineblock diagram expanding and showing the organic EL element to show.
As shown in FIG. 1, the organic EL device 70 includes a plurality of scanning lines 131 on the substrate, a plurality of signal lines 132 extending in a direction intersecting the scanning lines 131, and the signal lines 132 extending in parallel. A plurality of power supply lines 133 are wired, and a pixel region 71 is provided at each intersection of the scanning lines 131 and the signal lines 132.

  For the signal line 132, a data side driving circuit 72 including a shift register, a level shifter, a video line, an analog switch, and the like is provided. On the other hand, for the scanning line 131, a scanning side driving circuit 73 including a shift register, a level shifter, and the like is provided. Each pixel region 71 includes a switching TFT (thin film transistor) 142 including a gate electrode to which a scanning signal is supplied via a scanning line 131, and a signal line 132 via the switching TFT (thin film transistor) 142. A holding capacitor cap that holds the supplied image signal (power), a driving TFT 143 that includes a gate electrode to which the image signal held by the holding capacitor cap is supplied, and the power supply line 133 is electrically connected to the driving TFT 143. A pixel electrode 141 (first electrode) through which a driving current flows from the power supply line 133 when connected electrically, and a light emitting unit 140 sandwiched between the pixel electrode 141 and the common electrode (second electrode) 154. It has been. An element formed by the pixel electrode 141, the common electrode 154, and the light emitting unit 140 is an organic EL element.

  Under such a configuration, when the scanning line 131 is driven and the switching TFT 142 is turned on, the potential of the signal line 132 at that time is held in the holding capacitor cap, and depending on the state of the holding capacitor cap, The on / off state of the driving TFT 143 is determined. Then, a current flows from the power supply line 133 to the pixel electrode 141 through the channel of the driving TFT 143, and further, a current flows to the common electrode 154 through the light emitting unit 140, so that the light emitting unit 140 responds to the amount of current flowing therethrough. Lights up.

As shown in FIG. 2, an organic EL device 70 having the circuit configuration shown in FIG. 1 has a pixel electrode connected to a switching TFT (not shown) on a substrate 201 having electrical insulation and translucency. Is configured to include a pixel portion 3 (inside the one-dot chain line frame in FIG. 2) having a substantially rectangular shape in a plan view arranged in a matrix on the substrate 201. The pixel unit 3 is divided into a display region 4 in the center part (within a one-dot chain line in the pixel unit 3) and a dummy region 5 arranged around the display region 4. In the display area 4, display dots R, G, and B of three colors each having a pixel electrode are arranged in a matrix so as to be separated from each other in the vertical direction and the horizontal direction on the paper surface. In the present embodiment, a pixel region 71 is provided corresponding to each display dot.
Further, scanning line driving circuits 73 are arranged on the left and right sides of the display area 4 in FIG. 2, while data line driving circuits 72 are arranged on the upper and lower sides of the display area 4 in FIG. The scanning line driving circuit 73 and the data line driving circuit 72 are arranged at the peripheral edge of the dummy region 5.

  Further, an inspection circuit 90 is disposed above the data line driving circuit 72 in FIG. The inspection circuit 90 is a circuit that inspects the operating state of the organic EL device 70, and includes, for example, inspection information output means (not shown) for outputting the inspection result to the outside, and is a display device at the time of manufacture or at the time of shipment. Quality and defects can be inspected. The inspection circuit 90 is also arranged on the lower layer side of the dummy region 5. Further, a driving external substrate 101 made of a flexible printed circuit board or the like is connected to the substrate 201, and the external driving circuit 100 is mounted on the driving external substrate 101.

Next, the cross-sectional structure of the organic EL device 70 will be described with reference to FIGS.
FIG. 3 is a cross-sectional configuration diagram of the pixel region 71 provided in the display region 4 of FIG. In the pixel region 71 of the organic EL device 70, a driving TFT 143 is provided on a light-transmitting substrate 201 such as glass, and the substrate is interposed through a plurality of insulating films formed to cover the driving TFT 143. An organic EL element 200 is formed on 201. The organic EL element 200 mainly includes an organic functional layer 140 provided in a partition region 151 surrounded by a bank (partition wall member) 150 erected on the substrate 201, and the organic functional layer 140 is used as a pixel electrode (first electrode). 1 electrode) 141 and a common electrode (second electrode) 154.

  The driving TFT 143 includes a semiconductor layer 210 patterned on the substrate 201 with a base insulating film 215 interposed therebetween, and a source region 143a, a drain region 143b, a channel region 143c formed in the semiconductor layer 210, and The gate electrode 143A is opposed to the channel region 143c through the gate insulating film 220 formed on the semiconductor layer surface. The member denoted by reference numeral 231 is a conductive member provided in the same layer as the gate electrode 143A, and may be a dummy member that is electrically insulated from other wirings, or as shown in FIG. It may constitute an electrode or the like of the storage capacitor cap.

  An interlayer insulating film 230 is formed on the semiconductor layer 210 and the gate insulating film 220 so as to cover them. In the contact holes 232 and 234 that penetrate the interlayer insulating film 230 and reach the semiconductor layer 210, A source electrode 236 and a drain electrode 238 are buried, and each electrode is conductively connected to the source region 143a and the drain region 143b. In the interlayer insulating film 230, a convex portion 230a caused by the conductive member 231 provided on the lower layer side is formed. On the convex portion 230a, the same layer as the source electrode 236 and the drain electrode 238 is formed. A conductive member 239 is provided. Since the conductive member 239 is formed on the convex portion 230a, the vertical direction of the substrate is higher than the source electrode 236, the drain electrode 238 and the like formed in the same layer due to the protruding shape of the convex portion 230a. Is protruding. The conductive member 239 may be a wiring connected to the TFTs 142, 143 and the like that drive the pixels, or may be a dummy member that is electrically insulated from other wiring.

  A protective insulating film 235 is formed over the interlayer insulating film 230 covering the source electrode 236 and the drain electrode 238, and a planarizing insulating film 240 is formed so as to cover the protective insulating film 235. A part of the pixel electrode 141 is embedded in a contact hole 240 b penetrating the planarization insulating film 240. The portion embedded in the contact hole 240b of the pixel electrode 141 is conductively connected to the drain electrode 238, so that the driving TFT 143 and the pixel electrode 141 (organic EL element 200) are electrically connected. In the present embodiment, the pixel electrode 141 includes a reflective layer 141a made of a light-reflective metal film such as aluminum or silver, and a transparent electrode 141b made of a light-transmitting conductive film such as ITO (indium tin oxide). It has a laminated structure.

  Of the formation region of the planarization insulating film 240, a region where an organic functional layer 140 (to be described later) is to be formed is a flat region, while a region corresponding to the conductive member 239 follows the protruding shape of the conductive member 239. Thus, a convex portion 240a protruding in the vertical direction of the substrate is formed. The pixel electrode 141 is formed in a flat region of the planarization insulating film 240, and its outer peripheral portion runs over the convex portion 240a. As a result, the pixel electrode 141 forms a flat surface at the center of the pixel region 71 and has a shape having an inclined portion rising in the vertical direction of the substrate at the outer periphery thereof.

  On the planarization insulating film 240, an inorganic bank (first partition wall layer) 149 made of an inorganic insulating material is formed so as to partially run on the peripheral edge of the pixel electrode 141. Further, a bank (second partition layer) 150 made of an organic material is laminated on the inorganic bank 149 to form a partition member in the organic EL device 70. In the organic EL device 70 according to the present embodiment, light is reflected at the slope portion provided at the peripheral portion of the pixel electrode 141, and therefore both the inorganic bank 149 and the bank 150 have translucency. The inorganic bank 149 is preferably made of silicon oxide or silicon oxynitride, and the bank 150 is preferably made of a transparent resin material such as acrylic resin.

  The organic EL element 200 includes an organic functional layer including a hole injection layer (charge transport layer), a light emitting layer, an electron injection layer, and the like in a region formed as a flat surface in the planar region of the pixel electrode 141. 140, and a common electrode 154 covering the bank 150 is formed on the organic functional layer 140. The organic functional layer 140 covers the pixel electrode 141 and is formed inside an inorganic bank 149 provided on the lower layer side of the bank 150. The specific configuration of the organic functional layer 140 is described in detail in the description of the subsequent manufacturing method.

  Since the organic EL device 70 of this embodiment is a top emission type that extracts light from the side where the organic EL element 200 is disposed, the substrate 201 may be an opaque substrate in addition to a transparent substrate such as glass. it can. Examples of opaque substrates include ceramics such as alumina, metal sheets such as stainless steel that have been subjected to insulation treatment such as surface oxidation, thermosetting resins and thermoplastic resins, and films thereof (plastic films). It is done.

  The common electrode 154 is formed on the substrate 201 so as to cover the organic functional layer 140 and the upper surfaces of the banks 150 and the wall surfaces forming the side portions of the banks 150. As a material for forming the common electrode 154, a translucent conductive material is used. As the translucent conductive material, ITO is suitable, but other translucent conductive materials may be used.

  A cathode protective layer may be formed on the upper layer side of the common electrode 154. By providing such a cathode protective layer, an effect of preventing the common electrode 154 from being corroded during the manufacturing process can be obtained, and an inorganic compound such as silicon oxide, silicon nitride, silicon nitride oxide or the like can be used. Can be formed. Thus, by covering the common electrode 154 with the cathode protective layer made of an inorganic compound, intrusion of oxygen or the like into the common electrode 154 made of an inorganic oxide can be satisfactorily prevented. In addition, this cathode protective layer is extended to the outer peripheral part of the board | substrate 201 shown in FIG. 2 planarly, and the thickness shall be about 10 nm to 300 nm.

  In the organic EL device 70 of the present embodiment having the above configuration, as shown in the enlarged cross-sectional view of FIG. 4, a convex portion 240a is formed on the surface of the planarization insulating film 240, and the periphery of the reflective layer 141a that rides on the convex portion 240a. An inclined surface 141a1 is formed in the part. The transparent electrode 141b laminated on the reflective layer 141a has the same shape. In addition, the peripheral edge of the inorganic bank 149 extending from the outer peripheral side of the pixel electrode 141 to the central portion is also inclined so as to follow the inclined surface 141a1 of the reflective layer 141a. The organic functional layer 140 is formed on the pixel electrode 141 that forms a flat surface inside the inorganic bank 149. In the case of this embodiment, the organic functional layer 140 has a configuration in which a hole injection layer 140A and a light emitting layer 140B are sequentially stacked on the pixel electrode 141.

  In such a configuration, light generated in the light emitting layer 140B of the organic functional layer 140 isotropically scatters from the light emitting position. Therefore, when the reflective layer and the organic functional layer have a planar shape as in the conventional configuration, Light scattered in the normal direction (upward direction in the figure) can be taken out as display light directly or after being reflected by the reflective layer, but the light scattered in the surface direction (left and right direction in the figure) of the substrate 201 remains as it is. Since it is emitted outside the pixel, it cannot be extracted as light contributing to display. In the technique described in Patent Document 2, a tapered portion is formed at the peripheral portion of the pixel so that light scattered in the surface direction is extracted. However, it is difficult to manage the taper angle. Had the above challenges.

  On the other hand, in the organic EL device 70 of the present invention, the slope portion 141a1 that follows the convex portion 240a formed on the planarization insulating film 240 is formed on the peripheral portion of the reflective layer 141a as described above. Since the functional layer 140 is formed in a planar shape inside the slope portion 141a1, light scattered in the normal direction of the organic functional layer 140 (light Ld shown in FIG. 4) can be extracted as display light. Of course, the light scattered in the surface direction of the organic functional layer 140 (light Lr shown in FIG. 4) is also reflected by the inclined surface 141a1 of the reflective layer 141a disposed so as to surround the organic functional layer 140, and observed. It can be taken out to the person side (upward in the figure).

  Thus, according to the organic EL element 200 having the above-described configuration, the light generated in the organic functional layer 140 can be output with high efficiency, so that a bright display can be obtained. In the organic EL element 200, the power consumption for obtaining the same luminance can be reduced as compared with the conventional case. In other words, a bright display can be obtained with respect to the same injected current. In addition, since the organic functional layer 140 has a planar shape as a whole, it is easy to form a uniform film thickness in the substrate surface direction, and a point defect is generated in the pixel region as in the case of being formed on a slope. Does not occur. In addition, even when the large pixel region 71 is formed for a large display application or the like, it is difficult for luminance variations to occur in the pixel region, and a display with high luminance and high image quality can be provided.

  In the case of the present embodiment, the structure for taking out light scattered in the surface direction in the vertical direction is formed as a sloped portion 141a1 in the plane area of the reflective layer 141, but is provided on the lower layer side of the reflective layer 141. Therefore, it is necessary to control the taper angle by high-precision control of the etching conditions as in the case of forming the taper by etching the reflective layer as in the prior art. Absent. In the present embodiment, when the inclination angle of the slope portion 141a1 is changed, for example, it is only necessary to change the film thickness of the conductive member 239 or the conductive member 231 disposed on the lower layer side of the convex portion 240a. The inclination angle of the portion 141a1 can be adjusted.

  In the organic EL element 200, among the light emitted from the organic functional layer 140, the light scattered in the surface direction of the organic functional layer 140 is reflected by the inclined surface portion 141a1 of the reflective layer 141 as described above, and the organic EL element. Ejected from 200. Therefore, in order to increase the extraction efficiency of the light Lr, it is preferable that the inclined surface portion 141 a 1 is formed to have a sufficient height with respect to the film thickness of the organic functional layer 140.

<Plane configuration form>
In the present embodiment, the configuration and operation of the organic EL device have been described with reference to the cross-sectional configuration diagram of the pixel region 71. However, in the present embodiment, various configurations can be adopted as the planar configuration of the pixel region 71. . 5 and 6 are schematic plan views showing a plurality of forms of the arrangement of the scanning lines 131, the signal lines 132, and the power supply lines 133 in the pixel region 71. FIG. In FIG. 5 and FIG. 6, display of components that are not necessary for description is omitted.

  5A and 5B show a planar configuration of the pixel region 71 according to this embodiment. In this figure, a signal line 132 and a power supply line 133 extending in parallel with each other are arranged in a direction orthogonal to the scanning line 131 extending in the horizontal direction in the figure. The organic functional layer 140 is provided in a rectangular region surrounded by the scanning lines 131, the signal lines 132, and the power supply lines 133. Further, as shown in FIG. 5, the pixel electrode 141 provided in the lower layer of the organic functional layer 140 is arranged so that the peripheral portion thereof partially overlaps the scanning line 131, the signal line 132, and the power supply line 133 in a plane. The

  In FIG. 5A, the signal line 132 and the dummy wiring 134 in the same layer as the power supply line 133 are formed on the upper layer side overlapping the scanning line 131 in a plane, and in FIG. A dummy wiring 135 in the same layer as the scanning line 131 is formed on the lower layer side overlapping the power supply line 133 in a plan view. These dummy wires 134 and 135 do not substantially function as wires, and indicate conductive members that are electrically insulated from other wires (scanning line 131, signal line 132, power supply line 133, etc.). is there.

  The convex portion 240a in the cross-sectional configuration diagram shown in FIG. 3 projects in the substrate vertical direction by laminating a plurality of layers of conductive members on the lower layer side. Therefore, if the planar position of the convex portion 240a is shown in FIG. 5A, it corresponds to a portion where the dummy wiring 134 and the scanning line 131 are arranged in a planar manner, and the conductive portion of FIG. The scanning line 131 in FIG. 5A corresponds to the member 231, and the dummy wiring 134 corresponds to the conductive member 239. In the form shown in FIG. 5B, the position of the convex portion 240a corresponds to a portion where the dummy wiring 135, the signal line 132, and the power supply line 133 overlap each other in a plane, and the conductive portion in FIG. The dummy wiring 135 in FIG. 5B corresponds to the member 231, and the signal line 132 or the power supply line 133 corresponds to the conductive member 239.

  In FIG. 5A, the peripheral edge of the pixel electrode 141 is formed so as to overlap with the signal line 132 or the power line 133 in a planar manner, and even in this region, a portion (plurality) corresponding to the above-described convex portion 240a. Although the surface of the planarization insulating film 240 protrudes in the vertical direction of the substrate, the pixel electrode 141 can be partially moved over the organic functional layer 140, although the surface of the planarization insulating film 240 protrudes in the vertical direction of the substrate. It will have the slope part which faces the side. The same applies to a portion where the scanning line 131 and the pixel electrode 141 in FIG.

  Therefore, in the pixel region 71 shown in FIGS. 5A and 5B, the slope formed on the peripheral edge of the pixel electrode 141 is formed so as to surround the organic functional layer 140, and the organic functional layer is formed. Not only the light scattered in the layer thickness direction of 140 but also the light scattered in the surface direction of the same layer can be taken out in the vertical direction of the substrate by being reflected by the inclined portion of the reflective layer 141a included in the pixel electrode 141. Thus, the light generated in the organic functional layer 140 can be used as display light very efficiently.

  Next, the form shown in FIG. 6 will be described. Also in the form shown in FIG. 6, the basic planar configuration of the pixel region 71 is the same, and the scanning lines 131, the signal lines 132, and the power supply lines 133 are provided in a lattice shape surrounding the organic functional layer 140. The form shown in FIG. 6A is a form in which the dummy wirings 134 and 135 as shown in FIG. 5 are not provided, and the form shown in FIG. Is provided.

  In the form shown in FIG. 6A, no other wiring overlapping therewith is formed in the upper layer or the lower layer of the wiring surrounding the organic functional layer 140, so that it is prominent like the convex portion 240a shown in FIG. The portion protruding in the line is not formed except at the intersection of the scanning line 131 and the signal line 132 (or the power line 133), but as described above, wiring is provided even in such a configuration. Thus, the surface of the planarization insulating film 240 can be partially protruded. If the pixel electrode 141 is formed so as to run over the protruding portion, a sloped portion facing the organic functional layer 140 side can be formed. Is possible. Therefore, also in the embodiment shown in FIG. 6A, the slope portion of the pixel electrode 141 (reflective layer 141a) is arranged so as to surround the organic functional layer 140, and the light scattered in the surface direction of the organic functional layer 140 is emitted from the slope portion. It can be reflected and taken out as display light.

  On the other hand, the form shown in FIG. 6B has a structure in which a plurality of conductive members are stacked in almost the entire wiring formation region surrounding the organic functional layer 140. According to this configuration, since the convex portion 240a shown in FIG. 3 is arranged so as to surround the organic functional layer 140, the light scattered in the surface direction of the organic functional layer 140 is extremely scattered on the slope portion of the pixel electrode 141. Reflected efficiently and used as light contributing to display. Therefore, according to such an embodiment, a display with higher luminance can be obtained.

<Method for manufacturing organic EL device>
Hereinafter, an outline of a method for manufacturing the organic EL device 70 of the present embodiment will be described with reference to the drawings. In the present embodiment, the case where the organic functional layer 140 is formed by using a droplet discharge method in which a predetermined liquid material is discharged from a droplet discharge head and selectively disposed on a substrate is illustrated.

<Droplet ejection head>
First, an example of an ejection head used for a droplet ejection method will be described prior to a description of a specific method for manufacturing the organic EL device 70. As shown in FIGS. 7A and 7B, the ejection head 34 includes, for example, a stainless nozzle plate 12 and a diaphragm 13, which are joined via a partition member (reservoir plate) 14. . A plurality of cavities 15 and reservoirs 16 are formed between the nozzle plate 12 and the diaphragm 13 by the partition member 14, and the cavities 15 and the reservoirs 16 communicate with each other via a flow path 17. Yes.

Each cavity 15 and the inside of the reservoir 16 are filled with a liquid material, and a flow path 17 between them functions as a supply port for supplying the liquid material from the reservoir 16 to the cavity 15. . The nozzle plate 12 is formed with a plurality of hole-shaped nozzles 18 for injecting a liquid material from the cavity 15 in a state of being aligned vertically and horizontally. On the other hand, a hole 19 that opens into the reservoir 16 is formed in the diaphragm 13, and a liquid tank (not shown) is connected to the hole 19 via a tube to supply a liquid material. ing.
Further, a piezoelectric element (piezo element) 20 is joined to the surface of the diaphragm 13 opposite to the surface facing the cavity 15 as shown in FIG. The piezoelectric element 20 is sandwiched between a pair of electrodes 21 and 21 and is configured to bend so as to protrude outward when energized.

The diaphragm 13 to which the piezoelectric element 20 is bonded in such a configuration is integrally bent with the piezoelectric element 20 and bent outward at the same time, thereby increasing the volume of the cavity 15. Then, the cavity 15 and the reservoir 16 communicate with each other, and when the reservoir 16 is filled with the liquid material, the liquid material corresponding to the increased volume in the cavity 15 flows from the reservoir 16. It flows in through the path 17.
When the energization to the piezoelectric element 20 is released from such a state, both the piezoelectric element 20 and the diaphragm 13 return to their original shapes. Therefore, since the cavity 15 also returns to its original volume, the pressure of the liquid material inside the cavity 15 rises, and a predetermined amount of the liquid material droplet 22 is discharged from the nozzle 18.

  In the manufacturing method according to the present embodiment, the organic functional layer 140 is formed in the region surrounded by the bank 150 by using the droplet discharge head 34 that can discharge and arrange a predetermined amount of droplets at a predetermined position. A liquid material including the material is selectively disposed to form the organic functional layer 140 having a predetermined thickness.

  The ejection means of the ejection head may be other than the electromechanical transducer using the piezoelectric element (piezo element) 20, for example, a method using an electrothermal transducer as an energy generating element, a charge control type, It is also possible to employ a continuous method such as a pressure vibration type, an electrostatic suction method, or a method in which an electromagnetic wave such as a laser is irradiated to generate heat and a liquid material is discharged by the action of this heat generation.

<Method for manufacturing organic EL device>
Next, a method for manufacturing an organic EL device (organic electroluminescence device) using the above-described droplet discharge head will be described. However, the following procedure and the material configuration of the liquid material are examples and are limited to this. is not.

  Hereinafter, a method for manufacturing the organic EL device 70 will be described with reference to FIG. In FIG. 8, only a single pixel region 71 is shown for the sake of simplicity, but each pixel region 71 of the organic EL device 70 has a common configuration. .

First, as shown in FIG. 8A, a circuit layer 250 including a driving TFT 143, electrodes 236 and 238, an interlayer insulating film 230, and the like is formed on a substrate 201, and further a planarization insulating film 240 and the like are formed thereon. Then, a reflection layer 141a and a transparent electrode 140b are formed, and an inorganic bank 149 and a bank 150 are further prepared.
Note that the planarization insulating film 240 is provided with a convex portion 240a that follows a convex shape by a conductive member such as a wiring provided in the lower circuit layer 250, and the reflective layer 141a and the transparent electrode 141b are convex. A part is placed on the part 240a. The inorganic bank 149 and the bank 150 are stacked in a region corresponding to the convex portion 240a.

In the top emission type, since the substrate may be opaque, a ceramic sheet such as alumina, a metal sheet such as stainless steel that has been subjected to an insulation treatment such as surface oxidation, a thermosetting resin, a thermoplastic resin, or the like may be used. However, it may be a glass substrate conventionally used in a liquid crystal device or the like.
The reflective layer 141a can be formed by depositing and patterning a light reflective material such as aluminum or silver by sputtering or the like. The transparent electrode 141b can be formed in the same manner as the reflective layer 141a using a light-transmitting conductive material such as ITO as a forming material.

  In the inorganic bank 149, a silicon oxide film is formed so as to cover the transparent electrode 141b and the planarization insulating film 240, and then the silicon oxide film is patterned using a known photolithography technique to partially cover the surface of the transparent electrode 141b. It can be formed by opening. Note that the surface of the transparent electrode 141b exposed in the opening region of the inorganic bank 149 forms a flat surface.

  The bank 150 can be formed of an organic insulating material such as acrylic or polyimide. The height of the bank 150 is set to about 1 to 2 μm, for example, and functions as a partition member for the organic EL element on the substrate 201. With such a configuration, the hole injection layer and the light emitting layer of the organic EL element are formed, that is, an opening having a sufficiently high step between the application position of these forming materials and the surrounding bank 150. A part (partition area) 151 is formed. Further, when forming the bank 150, it is preferable that the wall surface of the bank 150 is formed slightly backward from the opening of the inorganic bank 149. That is, by partially exposing the inorganic bank 149 in the partition region 151 surrounded by the bank 150, the wetting and spreading of the liquid material in the bank 150 can be improved.

After the bank 150 is formed, a liquid repellent treatment is performed on the region on the substrate including the bank 150 and the transparent electrode 141b. Since the bank 150 functions as a partition member for partitioning the organic EL element, the bank 150 preferably exhibits non-affinity (liquid repellency) with respect to the liquid material discharged from the droplet discharge head 34. By liquid treatment, non-affinity can be selectively expressed in the bank 150. As such liquid repellent treatment, for example, a method of treating the surface of the bank with a fluorine compound or the like can be employed. Examples of the fluorine compound include CF ₄ , SF ₆ , and CHF ₃ , and examples of the surface treatment include plasma treatment and UV irradiation treatment.

  In such a liquid repellent treatment, even if the entire surface of the substrate is treated, the surface of the transparent electrode 141b made of an inorganic material made of an ITO film or the like is less liable to be made liquid repellent than the surface of the bank 150 made of an organic material. Only the surface of 150 is selectively lyophobic, and a plurality of regions having different affinity for the liquid material are formed in the region surrounded by the bank 150. In addition, in order to form a plurality of regions having different surface characteristics (liquid repellency / lyophilicity) in the partition region 151, in addition to the liquid repellency treatment, a resin material mixed with a fluorine compound or the like as a material for forming the bank 150 is used. It can also be used. In this case, the liquid repellency can be expressed on the surface of the bank 150 without performing the liquid repellency treatment.

  Thereafter, as shown in FIG. 8A, the liquid material 114a containing the hole injection layer forming material is applied to the application position surrounded by the bank 150 by the droplet discharge head 34 with the upper surface of the substrate 201 facing upward. Apply selectively. The liquid material 114a for forming the hole injection layer includes a hole injection layer forming material and a solvent.

  As the hole injection layer forming material, polyphenylene vinylene whose polymer precursor is polytetrahydrothiophenylphenylene, 1,1-bis- (4-N, N-ditolylaminophenyl) cyclohexane, tris (8-hydroxyquinolinol) Aluminum, Vitron P, polystyrene sulfonic acid, etc. can be illustrated. Examples of the solvent include polar solvents such as isopropyl alcohol, N-methylpyrrolidone, and 1,3-dimethyl-imidazolinone.

  When the liquid material 114a including the hole injection layer forming material described above is discharged onto the substrate 201 from the droplet discharge head 34, the liquid material 114a tends to spread in the horizontal direction due to its high fluidity, but surrounds the applied position. Since the bank 150 is formed, the liquid material 114a does not spread beyond the bank 150 to the outside thereof. In the present embodiment, the surface of the transparent electrode 141b is a lyophilic region, and the surface is concave, so that the liquid material 114a applied on the transparent electrode 141b is placed on the transparent electrode 141b. Holds well.

Subsequently, the solvent of the liquid material 114a is evaporated by heating or light irradiation to form a solid hole injection layer 140A on the transparent electrode 141b (see FIG. 8B). Alternatively, firing may be performed at a predetermined temperature and time (for example, 200 ° C., 10 minutes) in an air environment or a nitrogen gas atmosphere. Or you may make it remove a solvent by arrange | positioning under the pressure environment (vacuum environment) lower than atmospheric pressure.
As shown in FIG. 8B, the hole injection layer 140A formed on the transparent electrode 141b is formed with good film thickness uniformity because the surface of the transparent electrode 141b is a flat surface. The

  Subsequently, as shown in FIG. 8B, the liquid material 114b containing the light emitting layer forming material and the solvent is injected from the droplet discharge head 34 with the upper surface of the substrate 201 facing upward to inject holes into the bank 150. Selectively apply on layer 140A. As this light emitting layer forming material, for example, a material containing a precursor of a conjugated polymer organic compound and a fluorescent dye for changing the light emission characteristics of the light emitting layer to be obtained can be suitably used. The precursor of the conjugated polymer organic compound is ejected from the droplet ejection head 34 together with a fluorescent dye, etc., formed into a thin film, and then cured by heating to produce a light emitting layer that becomes a conjugated polymer organic EL layer. For example, in the case of a precursor sulfonium salt, the sulfonium group is eliminated by heat treatment to become a conjugated polymer organic compound.

  Such a conjugated polymer organic compound is solid and has strong fluorescence, and can form a homogeneous solid ultrathin film. In addition, it has high forming ability and high adhesion to the ITO electrode. Furthermore, since the precursor of such a compound forms a strong conjugated polymer film after curing, the precursor solution can be applied to a droplet discharge patterning described later before heating and curing. Therefore, it is possible to form a film under optimum conditions in a simple and short time.

  As the precursor, for example, PPV (poly (para-phenylene vinylene)) or a precursor thereof is preferable. A precursor of PPV or a derivative thereof is soluble in water or an organic solvent, and can be polymerized, so that a high-quality thin film can be obtained optically. Furthermore, since PPV has strong fluorescence and is also a conductive polymer in which double bond π electrons are non-polarized on the polymer chain, a high-performance organic EL device can be obtained. As precursors of such PPV or PPV derivatives, for example, PPV (poly (para-phenylene vinylene)) precursor, MO-PPV (poly (2,5-dimethoxy-1,4-phenylene vinylene)) precursor, CN, -PPV (poly (2,5-bishexyloxy-1,4-phenylene- (1-cyanovinylene))) precursor, MEH-PPV (poly [2-methoxy-5- (2'-ethylhexyloxy)]- Para-phenylene vinylene) precursor and the like.

  The precursor of the PPV or PPV derivative is soluble in water as described above, and is polymerized by heating after film formation to form a PPV layer. The content of the precursor typified by the PPV precursor is preferably 0.01 to 10.0 wt%, more preferably 0.1 to 5.0 wt% with respect to the entire liquid material composition. If the added amount of the precursor is too small, it is insufficient to form a conjugated polymer film. If the added amount is too large, the viscosity of the liquid material composition increases, and high-precision patterning by the droplet discharge method (inkjet method) is performed. May not be suitable.

  Further, the light emitting layer forming material preferably contains at least one fluorescent dye. Thereby, the light emission characteristics of the light emitting layer can be changed. For example, it is effective as a means for improving the light emission efficiency of the light emitting layer or changing the light absorption maximum wavelength (light emission color).

  As the fluorescent dye, rhodamine or a rhodamine derivative that emits red light can be preferably used when a red light emitting layer is formed. Since these fluorescent dyes are low in molecular weight, they are soluble in an aqueous solution, have good compatibility with PPV, and can easily form a uniform and stable light emitting layer. Specific examples of such fluorescent dyes include rhodamine B, rhodamine B base, rhodamine 6G, rhodamine 101 perchlorate and the like, and a mixture of two or more thereof may be used. Moreover, when forming a green light emitting layer, the quinacridone and its derivative which light-emit green can be used preferably. These fluorescent dyes, like the red fluorescent dyes, are low in molecular weight and therefore soluble in aqueous solutions, and are compatible with PPV and can easily form a light emitting layer. Furthermore, when forming a blue light emitting layer, distyryl biphenyl and its derivatives which emit blue light can be preferably used. These fluorescent dyes, like the red fluorescent dyes, are low in molecular weight and therefore are soluble in a water / alcohol mixed solution, and have good compatibility with PPV and facilitate the formation of a light emitting layer.

  Further, as other fluorescent dyes that develop blue color, coumarin and its derivatives can be exemplified. These fluorescent dyes, like the above-mentioned red fluorescent dyes, are low in molecular weight and therefore are soluble in aqueous solutions, and have good compatibility with PPV and facilitate the formation of a light emitting layer.

These fluorescent dyes are preferably added in an amount of 0.5 to 10 wt%, more preferably 1.0 to 5.0 wt%, based on the solid precursor of the conjugated polymer organic compound. If the amount of fluorescent dye added is too large, it will be difficult to maintain the weather resistance and durability of the light-emitting layer. On the other hand, if the amount added is too small, the effects of adding the fluorescent dye as described above cannot be obtained sufficiently. It is.
The precursor and the fluorescent dye are preferably dissolved or dispersed in a polar solvent to form a liquid material, and this liquid material is preferably discharged from the droplet discharge head 34. Since the polar solvent can easily dissolve or uniformly disperse the precursor, the fluorescent dye, etc., the solid component in the light emitting layer forming material in the nozzle hole of the droplet discharge head 34 is attached or clogged. Can be prevented.

  Specific examples of such a polar solvent include water, alcohols compatible with water such as methanol and ethanol, N, N-dimethylformamide (DMF), N-methylpyrrolidone (NMP), dimethylimidazoline (DMI), Examples include organic solvents or inorganic solvents such as dimethyl sulfoxide (DMSO), xylene, cyclohexylbenzene, and 2,3-dihydrobenzofuran, and two or more of these solvents may be appropriately mixed.

  Furthermore, it is preferable to add a wetting agent to the forming material. Thereby, it is possible to effectively prevent the forming material from drying and solidifying in the nozzle holes of the droplet discharge head 34. Examples of the wetting agent include polyhydric alcohols such as glycerin and diethylene glycol, and a mixture of two or more of these may be used. The amount of the wetting agent added is preferably about 5 to 20 wt% with respect to the total amount of the forming material. In addition, you may add another additive and a film stabilization material, For example, a stabilizer, a viscosity modifier, an anti-aging agent, a pH adjuster, an antiseptic | preservative, a resin emulsion, a leveling agent etc. can be used.

  The formation of the light emitting layer by discharging the liquid material 114b from the droplet discharge head 34 includes a liquid material including a light emitting layer forming material that emits red colored light, and a light emitting layer forming material that emits green colored light. The liquid material containing and the liquid material containing the light emitting layer forming material which emits blue colored light are discharged and applied to the corresponding pixel regions 71 (partition regions 151). The pixel areas 71 corresponding to the respective colors are determined in advance so that they are regularly arranged.

  When the liquid material 114b containing the light emitting layer forming material of each color is discharged and applied in this manner, the solvent in the liquid material 114b is evaporated. By this step, as shown in FIG. 8C, a solid light emitting layer 140B is formed on the hole injection layer 140A, and thereby an organic functional layer 140 composed of the hole injection layer 140A and the light emitting layer 140B is obtained. . Similar to the hole injection layer 140A, the light emitting layer 140B is formed in a planar shape with a uniform film thickness.

  Here, regarding the evaporation of the solvent in the liquid material 114b containing the light emitting layer forming material, treatment such as heating or decompression is performed as necessary. However, the light emitting layer forming material usually has a good drying property and a fast drying property. Therefore, the light emitting layer 140B of each color can be formed in the order of application by sequentially discharging and applying the light emitting layer forming material of each color without performing such a process.

  Thereafter, as shown in FIG. 8C, a common electrode 154 made of a transparent conductive material such as ITO is formed on the entire surface of the substrate 201 or in a stripe shape. Thus, the organic EL element 200 can be manufactured. In this embodiment, the organic EL element 200 includes a reflective layer 141a, a transparent electrode 141b, a hole injection layer 140A, a light emitting layer 140B, and a common electrode 154.

  In such an organic EL element manufacturing method, since the thin film that is a constituent element of the organic EL element such as the hole injection layer 140A and the light emitting layer 140B is formed of a liquid material discharged from the droplet discharge head, There is little loss of the liquid material used as the material for forming the injection layer 140A and the light emitting layer 140B, and the hole injection layer 140A and the light emitting layer 140B are formed relatively inexpensively and stably.

  In the above-described embodiment, the case where the organic functional layer 140 is formed by applying a liquid material by a droplet discharge method using the droplet discharge head 34 has been described. Other coating methods such as slit coating (or curtain coating) and die coating can also be used. Further, the liquid material generation step and the film formation step may be performed in an air environment or in an inert gas atmosphere such as nitrogen gas. In addition, it is desirable to perform the liquid material preparation process and the film forming process by the droplet discharge head 34 in an environment in which cleanliness is maintained in a clean room by particles and chemicals.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 9A is a diagram showing a schematic plan configuration of the pixel region 71 of the organic EL device according to the present embodiment, and FIG. 9B is a partial sectional configuration diagram taken along the line AA ′ in FIG. . FIG. 10 is a circuit configuration diagram of the pixel region 71 shown in FIG.

  The organic EL device of this embodiment is characterized in that an auxiliary wiring 136 is further provided in the organic EL device of the first embodiment, and the auxiliary wiring 136 and a connection structure to the wiring are provided. Other configurations are substantially the same as those in the first embodiment. Therefore, in FIG. 9 and FIG. 10, the same components as those in FIG. 1 to FIG.

  As shown in FIG. 9A, the pixel region 71 according to the present embodiment is provided with a scanning line 131, a signal line 132 and a power supply line 133 extending perpendicularly thereto, and is surrounded by these wirings. A region having a substantially rectangular shape in plan view is a region where the organic functional layer 140 is to be formed. Further, the pixel electrode 141 includes a planar region of the organic functional layer 140 and is formed in a region that partially overlaps the scanning line 131, the signal line 132, and the power supply line 133 at the periphery. In the present embodiment, auxiliary wiring 136 having a substantially lattice shape in plan view that overlaps the scanning line 131, the signal line 132, and the power supply line 133 in a plane is provided. The auxiliary wiring 136 is conductively connected to a rectangular relay electrode 141c provided near the intersection of the scanning line 131 and the signal line 132 via a contact hole 141h.

FIG. 9B shows a partial cross-sectional structure in the conductive connection structure between the auxiliary wiring 136 and the relay electrode 141c. As shown in FIG. 9B, the auxiliary wiring 136 covers the signal line 132 and the power supply line 133. An interlayer insulating film 242 is formed to cover the auxiliary wiring 136 and the interlayer insulating film 241. The interlayer insulating film 241 and the interlayer insulating film 242 constitute a planarization insulating film 240, and although not shown, a flat surface is formed in a region where the organic functional layer 140 is to be formed.
The auxiliary wiring 136 and the relay electrode 141c are conductively connected through a contact hole 141h that passes through the interlayer insulating film 242 and reaches the auxiliary wiring 136. Note that the relay electrode 141c is formed in the same layer as the pixel electrode 141 on the interlayer insulating film 242, and can be formed at the same time when the pixel electrode 141 is patterned.

  Although not shown, the relay electrode 141c is conductively connected to the common electrode 154 through a through hole provided through the banks 149 and 150 shown in FIG. Alternatively, a configuration in which the relay electrode 141c is not provided can be applied. In that case, a contact hole penetrating the interlayer insulating film 242, the banks 149, 150, and the like is formed, and the common electrode 154 and the auxiliary wiring 136 are formed through the contact hole. And are directly conductively connected.

  FIG. 10 shows a circuit configuration of the pixel region 71 shown in FIG. As shown in the figure, an auxiliary wiring 136 extending in parallel with the scanning line 131 is provided for the circuit configuration shown in FIG. 1, and the auxiliary wiring 136 is an organic functional layer (light emitting element). Part) 140 is electrically connected to the common electrode 154 connected to 140. The auxiliary wiring 136 may extend in parallel to the signal line 132 and the power supply line 133.

  In the organic EL device of the present embodiment having the above-described configuration, the auxiliary wiring 136 that is conductively connected to the common electrode 154 is provided, which is particularly suitable when a large-screen display device is configured. Yes. That is, in the top emission type organic EL device, the common electrode 154 disposed on the display surface side (light emission side) is formed of a light-transmitting conductive material such as ITO. The electric resistance is large, and particularly in a large display area, the voltage drop is noticeable, and the current amount in the pixel at the center of the panel is reduced, leading to a reduction in luminance. Therefore, if the auxiliary wiring 136 is formed of a low-resistance material such as a metal material and is connected to the common electrode 154 in each pixel region 71, a voltage drop in the common electrode 154 can be prevented, and a uniform luminance display can be achieved on the entire panel surface. Can be obtained.

  As shown in FIG. 9, in the pixel region 71 according to the present embodiment, the signal line 132, the power supply line 133, and the auxiliary wiring 136 are arranged so as to overlap in a plane. As a result, in the region where the signal line 132, the power supply line 133, and the like are formed, the height of the auxiliary wiring 136 is added to the height of these wirings, and the planarization insulating film 240 is greatly projected in the substrate vertical direction. Thus, the convex portion 240a having a larger height can be formed on the surface portion of the planarization insulating film 240. Accordingly, a slope portion having a larger height is formed at the peripheral edge portion of the pixel electrode 141 formed on the convex portion 240a, and the slope portion of the reflective layer 141a included in the pixel electrode 141 is formed. The effect of reflecting the scattered light in the surface direction of the organic functional layer 140 in the substrate vertical direction can be made more remarkable.

(Electronics)
FIG. 11 is a perspective configuration diagram illustrating an example of an electronic apparatus according to the invention.
A video monitor 1200 illustrated in FIG. 11 includes a display unit 1201 including the organic EL device of the previous embodiment, a housing 1202, a speaker 1203, and the like. The video monitor 1200 can display with high brightness and high image quality and less unevenness by the above organic EL device.

  The organic EL device of the above embodiment is not limited to the video monitor, but is a mobile phone, electronic book, personal computer, digital still camera, viewfinder type or monitor direct-view type video tape recorder, car navigation device, pager, electronic notebook. , Calculators, word processors, workstations, videophones, POS terminals, devices equipped with a touch panel, etc., can be suitably used as image display means, and any electronic device can obtain a bright and high-quality display. ing.

FIG. 1 is a circuit configuration diagram of an organic EL device according to an embodiment. FIG. 2 is a plan configuration diagram of the same. FIG. 3 is a partial cross-sectional configuration diagram of the pixel region. FIG. 4 is an enlarged cross-sectional view showing an organic EL element. FIG. 5 is a plan view of the pixel area. FIG. 6 is a plan view showing another form of the pixel region. FIG. 7 is a schematic configuration diagram of a droplet discharge head. FIG. 8 is a view showing a manufacturing process of the organic EL device according to the first embodiment. FIG. 9 is a diagram illustrating a pixel region according to the second embodiment. FIG. 10 is a circuit configuration diagram of the pixel region. FIG. 11 is a perspective configuration diagram illustrating an example of an electronic apparatus according to the invention.

Explanation of symbols

  70 organic EL device (electro-optical device), 71 pixel region, 131 scanning line, 132 signal line, 133 power supply line, 140 organic functional layer (functional layer), 141 pixel electrode (first electrode), 141a reflective layer, 141b transparent Electrode, 150 banks (partition member), 154 common electrode (second electrode), 142 switching TFT (switching element), 143 driving TFT (switching element), 200 organic EL element (light emitting element), 201 substrate (base) 240, planarization insulating film, 240a convex portion, 231 conductive member

Claims (15)

An electro-optical device provided with a light emitting element in which a first electrode, a functional layer including a light emitting layer, and a second electrode having translucency are sequentially laminated on a substrate,
A reflective layer for reflecting light generated in the light emitting layer is provided on the base side of the functional layer, and an insulating film having a convex portion on the surface is provided on the base side of the reflective layer,
The reflective layer extends to the outside of the functional layer in plan view, and forms an inclined surface facing the functional layer side at the extended portion,
2. The electro-optical device according to claim 1, wherein the slope portion is formed due to a convex portion of the insulating film disposed so as to overlap with an extension portion of the reflective layer.   The electro-optical device according to claim 1, wherein the slope portion is disposed so as to surround the functional layer in a plan view.   3. The electro-optical device according to claim 1, wherein the inclined portion protrudes toward the second electrode from an interface between the second electrode and the functional layer. A partition member surrounding the light emitting element is erected on the base,
4. The electro-optical device according to claim 1, wherein the inclined surface portion of the reflective layer and the partition wall member are disposed so as to overlap in a planar manner. A circuit layer electrically connected to the light emitting element is provided on the base side of the insulating film,
5. The electro-optical device according to claim 1, wherein the convex portion on the surface of the insulating film is formed due to a conductive member provided in the circuit layer.   6. The convex portion on the surface of the insulating film is caused by a conductive member disposed closest to the reflective layer among conductive members provided on the circuit layer. The electro-optical device described.   The electro-optical device according to claim 6, wherein the conductive member disposed closest to the reflective layer has a maximum thickness among the conductive members provided in the circuit layer. .   The electro-optical device according to claim 6, wherein the conductive member disposed closest to the reflective layer is disposed so as to substantially surround the functional layer in a plan view. The circuit layer has a structure in which a plurality of the conductive members are stacked via an interlayer insulating film,
9. The electro-optical device according to claim 5, wherein the convex portion is formed at a position where the conductive members of a plurality of layers are arranged in a planar manner. The convex portion is formed due to the plurality of conductive members arranged in a stacked manner, and the convex portion surrounds the functional layer in a substantially frame shape in plan view,
The electro-optical device according to claim 8, wherein the number of stacked conductive members in the planar area of the convex portion is the same.   The electro-optical device according to claim 9, wherein the plurality of conductive members arranged in a stacked manner have a substantially frame shape in plan view surrounding the functional layer in each layer.   The electro-optical device according to claim 10, wherein at least a part of the conductive member having a substantially frame shape in a plan view is a dummy member insulated from other portions.   The electro-optical device according to claim 5, wherein a conductive member electrically connected to the second electrode is provided in the circuit layer.   The electro-optical device according to claim 1, wherein the light-emitting element is an organic electroluminescence element including an organic light-emitting layer.   An electronic apparatus comprising the electro-optical device according to claim 1.

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