JP2005327861A - Ferromagnetic particle detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ferromagnetic fine particle detector exhibiting excellent temperature characteristics while suppressing variation in characteristics. <P>SOLUTION: The ferromagnetic fine particle detector comprises a magnetic sensor 10M having an operation layer 12 of a compound semiconductor thin film formed on an insulating substrate 11, a plurality of terminal electrodes 13 and a large number of short circuit electrodes 14; and a metal case 18 provided on the side opposite to ferromagnetic fine particles 3 printed on the surface of a magnetic printed matter 2 for protecting a permanent magnet 15 applying a bias magnetic field vertically to the compound semiconductor thin film composing the operation layer 12 and a magnetic sensor 10M wherein temperature dependency of resistance has uniformity within ±1.0% under a state applied with a magnetic field over the entire surface of the operation layer 12. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a ferromagnetic fine particle detection apparatus that includes a magnetoresistive element having a magnetic sensitive portion made of a compound semiconductor thin film and detects a pattern of ferromagnetic fine particles printed on a bill or the like.

2. Description of the Related Art Conventionally, a method for detecting an array pattern of extremely fine ferromagnetic particles printed on a banknote has been adopted as a means for authenticating banknotes. In recent years, the demand has been increasing. For this purpose, a compound semiconductor such as a magnetoresistive element manufactured by polishing bulk single crystal InSb thinly from several μm to several tens of μm, or an InSb thin film formed by vacuum deposition. A magnetoresistive element made of a thin film has been used (see, for example, Patent Document 1).
JP-A-3-259578

Incidentally, as described above, the bulk single crystal InSb magnetoresistive element needs to be thinly processed by polishing and further processed into a desired shape by polishing. In particular, bulk single crystal InSb manufactured by polishing is difficult to apply standard semiconductor microfabrication technology, and it is difficult to control the thickness by the most important polishing, as well as its planar processing accuracy. In particular, the resistance value and sensitivity are linked to variations in the thickness of InSb and large variations in planar processing accuracy. For this reason, the product characteristics of the manufactured magnetoresistive element often vary. Furthermore, mass production of magnetoresistive elements using bulk single crystals is difficult, costly, and it is difficult to mass produce products with uniform characteristics. Therefore, development of a ferromagnetic fine particle detection apparatus with little characteristic variation, high sensitivity, and good productivity has been awaited. However, the development of mass-produced ferromagnetic fine particle detectors has been extremely difficult.
Furthermore, in the conventional InSb magnetoresistive element, the InSb forming the magnetosensitive portion has a large temperature dependency of about 2% per 1 ° C., and the magnetoresistive element has a current dependency on the ambient temperature and operation. There is a problem that the resistance value changes, and this often causes the output voltage to fluctuate.
On the other hand, when an InSb magnetoresistive element is formed by a vacuum deposition method, not only is it difficult to align the characteristics of the magnetoresistive element because of variations in film thickness and composition, but also sufficient electron mobility is obtained. Moreover, the temperature dependence was also large.

  In general, since the detection signal (magnetic pattern detection signal) of ferromagnetic fine particles used for magnetic printed matter such as banknotes is extremely small, the change in temperature of the magnetoresistive element and the variation in sensitivity are synergistic, and noise and This makes it extremely difficult to extract the original ferromagnetic fine particle detection signal (magnetic pattern detection signal). As a result, it is necessary to provide driving conditions that eliminate these effects during actual use, and there has been a problem that the driving circuit and the signal processing circuit are complicated and expensive.

  The present invention has been made in view of the conventional problems, and an object of the present invention is to provide a ferromagnetic fine particle detection device with little characteristic variation and excellent temperature characteristics.

The inventor of the present invention relates to a ferromagnetic fine particle detection device that detects a pattern of ferromagnetic fine particles arranged in a plane in a predetermined pattern.
・ Development of highly sensitive compound semiconductor thin film materials with excellent microfabrication accuracy and technology for reducing temperature characteristics ・ Advanced compound semiconductor thin film thickness control technology and highly uniform impurity doping technology to suppress variations in device characteristics・ Device structure capable of highly sensitive detection of ferromagnetic fine particles (magnetic patterns) ・ Low-cost mass production process technology ・ Development of highly sensitive and reliable device structures As a result, development of thin film materials with excellent microfabrication and good film thickness uniformity, impurity doping technology with high in-plane uniformity, single crystal growth technology for thin films with high electron mobility, and low contact resistance By developing multiple technologies such as compound semiconductor electrode formation technology, highly sensitive and reliable device structure, bias magnetic field application means, and combining them with appropriate and optimized configurations, The present invention has found that a compound semiconductor thin film capable of detecting a small weak magnetic field for the first time can be used in the magnetic detection part, and that it is possible to obtain a high-performance ferromagnetic fine particle detection device with excellent mass production and little variation in characteristics. It has arrived.
That is, the invention described in claim 1 of the present invention includes a magnetic sensing portion made of a compound semiconductor thin film whose resistance value varies depending on the magnetic field, and means for applying a magnetic field having a component perpendicular to the surface of the magnetic sensing portion. An apparatus for detecting the arrangement state of the ferromagnetic fine particles arranged in accordance with a predetermined pattern, the temperature dependence of the resistance value in a state where a magnetic field is applied across the entire surface of the magnetic sensing portion. It is characterized by being within ± 1.0%.

The ferromagnetic fine particle detection device according to claim 2 is provided with a short-circuit electrode in contact with the compound semiconductor thin film constituting the magnetosensitive portion.
The ferromagnetic fine particle detection device according to claim 3, wherein the short-circuit electrode is provided in a direction perpendicular to the current flowing through the compound semiconductor thin film, and the contact resistance value of the short-circuit electrode is 0.1Ω or less. Is.

According to a fourth aspect of the present invention, the compound semiconductor thin film constituting the magnetosensitive portion is made of a compound semiconductor containing In.
The ferromagnetic fine particle detection apparatus according to claim 5, wherein the compound semiconductor thin film constituting the magnetosensitive portion is formed by epitaxial growth on an insulating substrate or a substrate on which a semiconductor insulating layer is formed. It is a thing.
According to a sixth aspect of the present invention, the compound semiconductor thin film is doped with at least one or more donor impurities selected from Si, Sn, S, Se, Te, Ge, and C.

The ferromagnetic fine particle detection device according to claim 7, wherein the compound semiconductor thin film constituting the magnetosensitive portion is formed on an insulating substrate or a substrate having a semiconductor insulating layer formed on the surface, and the sensitivity of the substrate is determined. A soft magnetic thin plate or soft magnetic thin layer thicker than the film thickness of the compound semiconductor thin film is provided in parallel with the compound semiconductor thin film on the side opposite to the magnetic part, in close contact with or close to the substrate.
The ferromagnetic fine particle detection apparatus according to claim 8 includes an insulating or high-resistance compound semiconductor thin film formed in close contact with any one surface of the compound semiconductor thin film constituting the magnetosensitive portion. It is characterized by.

According to the present invention, there is provided a magnetic sensing portion made of a compound semiconductor thin film whose resistance value varies depending on the magnetic field, and means for applying a magnetic field having a component perpendicular to the magnetic sensing portion, and arranged on the surface according to a predetermined pattern. In the ferromagnetic fine particle detection apparatus for detecting the arrangement state of the formed ferromagnetic fine particles, the uniformity of the temperature dependence of the resistance value in a state where a magnetic field is applied is ± 1.0% over the entire surface of the magnetic sensitive portion. Therefore, the temperature drift of the detection signal can be reduced, and the magnetic pattern can be detected with high accuracy.
At this time, if the short circuit electrode is provided in a direction perpendicular to the current flowing through the compound semiconductor thin film in contact with the compound semiconductor thin film constituting the magnetic sensing section, and the contact resistance value of the short circuit electrode is 0.1Ω or less, the magnetic sensing section Since the magnetoresistive effect can be further enhanced, the detection sensitivity can be improved.

  Further, the compound semiconductor thin film constituting the magnetosensitive portion is a compound semiconductor thin film containing In, and this compound semiconductor thin film is formed by epitaxial growth on an insulating substrate or a substrate on which a semiconductor insulating layer is formed. The blur can improve the detection sensitivity of the magnetic sensitive part. Furthermore, if the compound semiconductor thin film is doped with at least one or more donor impurities selected from Si, Sn, S, Se, Te, Ge, and C, the temperature drift can be greatly reduced.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Embodiment 1]
FIG. 1 is a cross-sectional view showing a configuration of a ferromagnetic fine particle detection device 1 according to the first embodiment, and FIG. 2 shows a configuration of a magnetoresistive effect type magnetic sensor 10 used in the ferromagnetic fine particle detection device 1. FIG. The ferromagnetic fine particle detection device 1 according to the present invention includes a sensor unit 1A and a drive detection unit 1B. The sensor unit 1A includes two magnetoresistive elements 12a formed of a compound semiconductor thin film formed on an insulating substrate 11. , 12b, a plurality of terminal electrodes 13 (13a, 13b, 13c), a magnetic sensor 10 including a three-terminal magnetoresistive element including a plurality of short-circuit electrodes 14, and a detection object of the magnetic sensor 10. A permanent magnet 15 provided on the side opposite to the ferromagnetic fine particle 3 printed on the surface of the magnetic printed matter 2 and for applying a bias magnetic field perpendicularly to the magnetoresistive elements 12a and 12b serving as the magnetic sensitive portions, and this permanent A mold resin 16 for holding the magnet 15; a terminal pin 17 connected to the terminal electrode 13 for supplying a voltage to the magnetic sensor 10 and taking out an output of the magnetic sensor 10; And a metal case 18 for protecting the sensor 10, the drive detection section 1B, and an amplifier circuit 19b for amplifying the output from the drive circuit 19a and the magnetic sensor 10 that drives the magnetic sensor 10.
Hereinafter, magnetoresistive elements made of a compound semiconductor thin film, such as the magnetoresistive elements 12a and 12b, are collectively referred to as an operation layer 12. The operation layer 12 constitutes a magnetic sensing portion (a portion where the resistance value changes due to a magnetic field) of the magnetic sensor 10, and the film surface of the compound semiconductor thin film constituting the operation layer 12 is referred to as a magnetic sensing portion surface.
The short-circuit electrode 14 is installed for the purpose of increasing the resistance change at the time of detecting the magnetic field (to increase the sensitivity to the magnetic field) as necessary. As shown in FIG. 2, the current flowing through the magnetoresistive elements 12a and 12b flows. Is formed in a direction orthogonal to the flowing direction of the magnetic resistance elements 12a and 12b. When the short-circuit electrode 14 is installed as in this example, the shape of the compound semiconductor between the short-circuit electrodes 14 and 14 is such that the length L in the current direction is smaller than the width W in the direction orthogonal to the current. That is, it is preferable to set L / W to 1.0 or less, and 0.3 or less is preferable because the resistance change in the magnetic field is further increased, and the practical merit is increased.

As the compound semiconductor constituting the operating layer 12 of the magnetic sensor 10, generally used is a compound semiconductor having a forbidden band width of 0.4 eV or less and composed of elements of Group III and Group V in the periodic table. However, since it is preferable to have as high an electron mobility as possible in order to obtain a high magnetoresistance change rate, the compound semiconductor thin film is preferably composed of a compound semiconductor containing In. In particular, InSb, InAs, InAs _x Sb _1-x , In _x Ga _1-x Sb, and In _x Ga _1-x As (0 ≦ x ≦ 1) are preferable materials.
The film thickness of the compound semiconductor thin film constituting the operation layer 12 is preferably in the range of 0.1 to 4 μm, more preferably 3 μm or less. Further, it should be noted that a thickness of 1.5 μm or less is often used because a high resistance element can be easily manufactured and a high sensor output can be obtained.
In the process of manufacturing the magnetoresistive element, a normal photolithography technique is used. At this time, the compound semiconductor thin film is often mesa-etched into a desired shape by wet etching. In the wet etching, both the etching in the film thickness direction and the side etching in the direction perpendicular to the film thickness direction proceed. Therefore, if the film thickness is too thick, the side etching proceeds considerably when the etching in the film thickness direction ends. For this reason, not only does the design value of the element resistance value deviate from the actual element resistance value, but individual differences in the element resistance values also increase. That is, when the film thickness exceeds 4 μm, the accuracy of photolithography deteriorates, so that not only the device characteristics deteriorate, but also the device characteristics vary greatly. Further, if the film thickness is less than 0.1 μm, the volume of the operation layer 12 becomes small and sufficient device characteristics cannot be obtained. Therefore, the film thickness of the compound semiconductor thin film is preferably in the range of 0.1 to 4 μm.

In order to reduce the temperature change of the resistance value of the magnetoresistive element, it is preferable to add a donor impurity to increase carriers in the operation layer 12. The donor impurity may be added simultaneously with the formation of the compound semiconductor thin film, or may be implanted using an ion implantation method after film formation. As a donor impurity used at this time, for example, when the compound semiconductor is a III-V group compound semiconductor such as InSb or InAs, a group IV element such as C, Si, Ge, or Sn, or S, Se, A group VI element typified by Te may be added. Of these, Si and Sn are particularly preferable.
However, if too much donor impurity is added, there is a problem that the electron mobility that affects the sensitivity of the magnetoresistive element is lowered. Therefore, the number of added carriers is 2 × 10 ¹⁶ cm ^−. It is preferably ³ to 1 × 10 ¹⁸ cm ⁻³ , more preferably 5 × 10 ¹⁶ cm ⁻³ to 5 × 10 ¹⁷ cm ⁻³ .

The insulating substrate 11 for forming the operating layer 12 made of a compound semiconductor thin film is preferably a substrate having an insulating surface or an insulating semiconductor insulating layer. Among the semiconductor substrates, the use of a substrate such as GaAs, InP, or GaP is particularly preferable because the electron mobility of the operation layer 12 can be increased. The compound semiconductor thin film is formed on the insulating substrate 11 by epitaxial growth. At this time, the (100) plane or the (111) plane is often used as the plane orientation of the insulating substrate 11. . In addition, although a surface that forms an angle with these surfaces is preferably used, the surface orientation is not particularly limited.
In addition, the compound semiconductor thin film can be formed on an insulating substrate, but it is more preferable that the compound semiconductor thin film is manufactured on an insulating semiconductor substrate. Therefore, if possible, as shown in FIG. 3A, an insulating or high-resistance compound semiconductor thin film that is close to or coincides with the operating layer 12 in advance before growing the compound semiconductor thin film that becomes the operating layer 12. The insulating layer 11A may be formed, and then the compound semiconductor thin film that is the operation layer 12 may be formed on the insulating layer 11A. Further, as shown in FIG. 3 (b), it is often preferable to have insulating layers 11A and 11B made of an insulating or high-resistance compound semiconductor thin film above and below the compound semiconductor thin film, respectively. Used.
In such a structure, the compound semiconductor constituting the insulating layers 11A and 11B needs to have a generally large forbidden band width as compared with the compound semiconductor constituting the operation layer 12 such as InSb. Further, the insulating layers 11A and 11B are not essential, but preferably have the same or close lattice constant as the compound semiconductor thin film constituting the operation layer 12. In particular, when the film thickness of the operation layer 12 is 1 μm or less, and further 0.5 μm or less, the compound semiconductor constituting the insulating layers 11A and 11B is the same as or close to the compound semiconductor thin film constituting the operation layer 12 It preferably has a lattice constant of value.

  The electrode material used for the terminal electrode 13 and the short-circuit electrode 14 is a Cu single layer, Ti / Au, Ni / Au, Cr / Cu, Cu / Ni / Au, Ti / Au / Ni, Cr / Au / Ni. , Cr / Ni / Au / Ni, etc. The electrode material may be any material as long as it can withstand the operating conditions and environmental conditions in which the manufactured element is used. Moreover, as a method for forming the electrode, it may be formed by a general vacuum vapor deposition method such as electron beam vapor deposition or resistance heating vapor deposition, a sputtering method or a plating method. Further, in order to improve the ohmic contact between the terminal electrode 13 and the short-circuit electrode 14 and the operation layer 12 after the electrodes are formed, it is also preferable to perform a heat treatment using a rapid temperature rising thermal annealing (RTA) method.

By the way, the terminal electrode 13 and the short-circuit electrode 14 are formed on the compound semiconductor thin film which is the operation layer 12, but what is important is the contact resistance value between the electrodes 13 and 14 and the compound semiconductor thin film. It is essential that the resistance is due to contact, and basically, the size is preferably 0.5Ω or less, more preferably 0.1Ω or less, and still more preferably 0 per electrode. 0.02Ω or less.
Further, when the compound semiconductor thin film is manufactured, at least a portion where the compound semiconductor thin film is in contact with the terminal electrode 13 and the short-circuit electrode 14 is not in contact with the electrodes 13 and 14 in order to reduce contact resistance. It is preferable that the electron density is made larger than that of other portions. Specifically, the electron concentration is 10 times or more or 2 × 10 ¹⁷ cm ⁻³ or more, preferably 1 or more compared with other parts, at least in the vicinity of the surface in contact with the electrode or part or the whole in contact with the electrode. × 10 ¹⁸ cm ⁻³ or more, more preferably 5 × 10 ¹⁸ cm ⁻³ or more is preferable. For this reason, it is preferable that the portion of the compound semiconductor thin film that is in contact with the plurality of terminal electrodes 13 and the short-circuit electrode 14 is doped with a donor impurity as described above at least for the purpose of increasing the electron concentration. Note that the doping profile of the donor impurity may be at least in the vicinity of the surface in contact with the electrodes 13, 14, the part in contact with the electrodes 13, 14, or the entire contact part with the electrodes 13, 14.
Further, the doping of the donor impurity may be the entire thickness of the compound semiconductor, or only the surface, and if the surface in contact with the electrodes 13 and 14 satisfies the above-mentioned electron concentration conditions, There may be a gradient or change in electron concentration.

  Moreover, as the permanent magnet 15, there are a ferrite magnet, a samarium cobalt magnet (SmCo magnet), a neodymium magnet, etc., and the temperature coefficient of the residual magnetic flux density is -0.18% / ° C, -0.03% / ° C, respectively. -0.12% / ° C. Therefore, from the viewpoint of temperature characteristics, an SmCo magnet is optimal as the permanent magnet 15.

Next, a manufacturing method of the magnetic sensor 10 composed of a three-terminal magnetoresistive element will be described.
4 and 5 are diagrams showing a manufacturing process flow of the magnetic sensor 10, and a normal photolithography technique can be used as the process.
First, as shown in FIG. 4A, an InSb thin film 12F for forming the operation layer 12 is formed on a GaAs substrate 11 which is an insulating substrate. Specifically, an Sn-doped InSb thin film 12F is epitaxially grown as a compound semiconductor thin film on the (100) plane of a semi-insulating GaAs single crystal substrate by using molecular beam epitaxy (MBE).
Next, as shown in FIG. 4B, the pattern of the working layer 12 is exposed and developed using a photomask for InSb mesa etching, and then the InSb thin film 12F is etched with a hydrochloric acid / hydrogen peroxide etching solution. Then, mesa etching into a desired shape is performed to form the previous two magnetoresistive elements 12a and 12b.
Thereafter, as shown in FIG. 5A, a plurality of short-circuit electrodes 14 are formed on the magnetoresistive elements 12a and 12b, and further, as shown in FIG. 5B, an insulating layer 11B made of a silicon nitride thin film. Is formed by plasma CVD. Then, as shown in FIG. 5C, the terminal electrode 13 is formed after removing the silicon nitride film of only the terminal electrode 13 using a reactive ion etching apparatus.
In this way, the magnetoresistive elements 12a and 12b made of Sn-doped InSb thin film are used as the operation layer 12, the three terminal electrodes 13 are provided, and the plurality of short-circuit electrodes 14 are provided between the terminal electrodes 13 and 13. A large number of magnetic sensors 10 can be manufactured on a single wafer by applying a microfabrication process using photolithography.
In this example, in order to relieve stress on the compound semiconductor thin film by a mold to be described later, as shown in FIG. 5D, further on the operating layer 12 (actually on the insulating layer 11B) of the magnetic sensor 10. The soft resin layer 20 made of a soft silicon resin layer is formed so as to cover the part.

Thereafter, the individual magnetic sensors 10 are separated from the wafer by dicing. The chip of the magnetic sensor 10 thus manufactured was bonded using the lead frame 21. That is, the chip of the magnetic sensor 10 was die-bonded on the island of the lead frame using a die bonder. Next, the wire bonding was performed between the three terminal electrodes 13 and the leads by using the gold wire 22 using a wire bonder. Next, the magnetic sensor is packaged with a hard resin 23 such as an epoxy resin by a transfer molding method, and then formed with a hard resin 23 as shown in FIG. 10 is produced. Then, after this bonding package is housed in the metal case 18 together with the permanent magnet 15, it is molded with the molding resin 16 so that the sensor part 1A of the ferromagnetic fine particle detection apparatus 1 of the present invention as shown in FIG. Is produced. Finally, the ferromagnetic fine particle detection device 1 is assembled by connecting the terminal pin 17 of the sensor unit 1A and the drive detection unit 1B. Instead of the metal case 18, a resin case may be used.
In order to detect a more sensitive magnetic pattern, the thickness of the tip of the metal case 18 is preferably in the range of 0.01 to 0.15 mm from a practical point of view. In particular, the range of 0.10 to 0.15 mm is a frequently used range because high-sensitivity detection of the magnetic pattern is possible because it does not hinder practical robustness and proximity to the magnetic pattern.

In this example, in order to detect a very small change in the weak magnetic field due to the pattern of the ferromagnetic fine particles 3 printed on the surface of the magnetic printed matter 2, the magnetic sensor 10 interferes with the entire surface of the magnetic sensing portion and is applied with a magnetic field. The uniformity of the temperature dependence of the resistance value is set to be within ± 1.0%.
Here, it will be described using the two-terminal magnetoresistive element 12S as shown in FIG. 7 that the magnetic sensor 10 is highly sensitive and the temperature drift becomes extremely small by the above setting.
When the width of the InSb thin film 12k after mesa etching (width in the direction orthogonal to the current: element width) is W and the distance (element length) between the short-circuit electrodes 14 is L, L / W is called a shape factor. However, in this example, this form factor is L / W = 0.2.
A uniform magnetic field is applied to the magnetoresistive element 12S with an electromagnet, the relationship between the resistance value between the terminal electrodes 13p and 13q and the magnetic flux density is measured, and the result is shown in FIG.
As can be seen from FIG. 8, as the magnetic flux density increases, the slope of the magnetoresistance change rate ΔR / R ₀ increases. That is, the sensitivity to the magnetic field is increased. This rate of change in magnetoresistance ΔR / R ₀ corresponds to the product μB, where μ is the electron mobility and B is the magnetic flux density, and this curve increases almost quadratic in the low magnetic field region. In the high magnetic field region, it changes almost linearly. That is, the magnetoresistive element having a higher electron mobility μ changes linearly from a region having a lower magnetic field. In order to improve the sensitivity of the magnetoresistive element, it is preferable that the magnetoresistive change rate ΔR / R ₀ be used at a magnetic flux density higher than 50%.
Incidentally, since the surface magnetic flux density of the ferrite magnet is about 0.1 to 0.15 T and the surface magnetic flux density of the SmCo magnet is about 0.25 T, in order to improve the sensitivity of the magnetoresistive element, an SmCo magnet or the like is used. It is preferable to use a rare earth alloy permanent magnet.

Further, in order to check whether or not there is a temperature drift in the signal output voltage, which is most important when detecting a weak magnetic field such as ferromagnetic fine particles, as shown in FIG. 10, a drive circuit 19a is provided between the terminal electrodes 13a and 13b of the magnetic sensor 10. Is connected to a constant voltage power source 19E (V _in = 5V), and an output signal is taken out from the terminal electrode 13c at the midpoint of the magnetoresistive elements 12a and 12b, which are the magnetic sensing portions, and a change in signal output voltage with respect to a change in environmental temperature is obtained. The detected results are shown in FIG. At this time, the magnitude of the magnetic field applied to the magnetoresistive elements 12a and 12b was set to a place where ΔR / R ₀ was about 100%.
The vertical axis in FIG. 11 is obtained by subtracting half of the power supply voltage (V _in / 2) from the signal output voltage V _out (hereinafter referred to as offset voltage e). This shows that there is almost no temperature drift of the signal output voltage.
This means that in the magnetic sensor 10 of the present invention, the temperature dependence of the resistance value in a state where a magnetic field is applied is uniform over the entire surface of the magnetic sensing portion.

Next, the principle of detecting a magnetic pattern will be described.
In this example, as shown in FIG. 12, a magnetic pattern printed on the magnetic printed matter 2 is detected using a magnetic ink containing the ferromagnetic fine particles 3 using a three-terminal magnetic sensor 10. The magnetoresistive elements 12a and 12b of the magnetic sensor 10 are arranged in a uniform bias magnetic field formed by the permanent magnet 15, and the magnetoresistive elements 12a and 12b are shown in FIG. As shown, they are connected in series and connected to a constant voltage power source 19E. In this example, the ferromagnetic fine particles 3 are fine particles made of a soft magnetic material that collects the magnetic field from the permanent magnet 15.
When the magnetic print 2 is scanned, the magnetic field from the permanent magnet 15 changes as shown in (a) → (b) → (c) of FIG. Here, the arrows in the figure represent the lines of magnetic force. The scanning direction of the magnetic printed material 2 is from the left to the right in the figure. (A) In the state of the figure, the magnetic flux density immediately below the magnetoresistive element 12a increases, so the resistance value of the magnetoresistive element 12a increases. Therefore, the potential of the terminal electrode 3c that is an output terminal is lowered. Next, in the state shown in FIG. 5B, the magnetic flux densities immediately below the magnetoresistive element 12a and the magnetoresistive element 12b are equal, and the resistance values are also the same. Therefore, the terminal electrode 3c is in an intermediate state. Further, in the state shown in FIG. 5C, the magnetic flux density immediately below the magnetoresistive element 12b increases and the resistance value of the magnetoresistive element 12b increases. Therefore, the potential of the terminal electrode 3c becomes high.
Thus, by the magnetic prints 2 are scanned, from the terminal electrodes 3c, as shown in FIG. 13, the signal amplitude detection signal of the differential type V _pp is output.
In the detection device 1 of the present invention, the operating layer 12 which is the magnetosensitive surface of the magnetic sensor 10 is composed of a Sn-doped InSb thin film having high electron mobility, and the change rate of the resistance value is 50% or more by the permanent magnet 15. Since a magnetic field having a magnetic flux density is applied, a differential detection signal having high detection sensitivity and a large signal amplitude of _Vpp can be obtained. Therefore, the magnetic pattern printed on the magnetic print 2 with the magnetic ink containing the ferromagnetic fine particles 3 can be detected with high accuracy. Further, in the magnetic sensor 10 of the present invention, the uniformity of the temperature dependency of the resistance value in a state where a magnetic field is applied is within ± 1.0% over the entire surface of the magnetic sensitive portion, However, since a stable output can be obtained, the detection accuracy of the magnetic pattern can be improved.

As described above, according to the first embodiment, the ferromagnetic fine particle detection device 1 includes the operating layer 12 made of the compound semiconductor thin film formed on the insulating substrate 11, the plurality of terminal electrodes 13, and a large number of terminals. A bias magnetic field is applied perpendicularly to the compound semiconductor thin film that is provided on the side opposite to the ferromagnetic fine particle 3 side printed on the surface of the magnetic print 2 and the magnetic sensor 10 provided with the short-circuit electrode 14. 1A including a sensor unit 1A including a permanent magnet 15 that protects and a metal case 18 that protects the magnetic sensor 10, a drive circuit 19a that drives the magnetic sensor 10, and an amplifier circuit 19b that amplifies the output from the magnetic sensor 10. The detection unit 1B is configured to extend over the entire surface of the operation layer 12 so that the temperature dependence uniformity of the resistance value in a state where a magnetic field is applied is within ± 1.0%. Temperature drill The door can be greatly reduced.
Furthermore, if a magnetic field having a magnetic flux density with a magnetoresistance change rate ΔR / R ₀ of 50% or more is applied to the working layer 12 serving as the magnetosensitive surface, the detection signal amplitude from the magnetic pattern of the ferromagnetic fine particles 3 is further increased. Can be bigger.

In the first embodiment, the permanent magnet 15 is used as means for applying a magnetic field perpendicularly to the operation layer 12 made of a compound semiconductor thin film. However, the present invention is not limited to this, and an electromagnet 24 is used as shown in FIG. May be.
In the above example, the sensor unit 1A and the drive detection unit 1B are separately manufactured. However, the drive detection unit 1B is housed in the metal case 18, and the sensor unit 1A and the drive detection unit 1B are integrated. good.

Further, the magnetic sensor 10 may be configured to be packaged with an epoxy resin using a lead frame 25 having a shape bent toward the operation layer 12 as shown in FIG. Thereby, the magnetic sensor 10 can be reduced in size. In addition, F of the figure shows a detection surface.
Alternatively, as shown in FIG. 16, the insulating resin 11 on which the package resin on the surface side opposite to the operation layer 12 of the magnetic sensor 10 in FIG. 15, the metal portion of the island, and the operation layer 12 is formed. If the working layer 12 which is a magnetic sensitive part is brought closer to the surface by removing a part of the working layer 12 by polishing, the working layer 12 and the magnetic printed material 2 can be brought closer to each other. In this case, the back surface side of the insulating substrate 11 indicated by R in FIG. Although the position of the action | operation layer 12 is based also on the location to grind | polish, it can be made close to the distance within 0.05 mm from the surface of a detection surface. In this structure, the distance between the operation layer 12 and the outer surface of the metal case 18 can be within 0.10 mm even when the case is reinforced with a nonmagnetic metal case. Accordingly, the magnetic pattern of the magnetic sensor 10 serving as the magnetic detection unit and the magnetic pattern 2 of the magnetic print 2 serving as the detected unit can be made extremely close to each other, and high-sensitivity ferromagnetic fine particle detection (magnetic pattern detection) becomes possible.
In the above example, the ferromagnetic fine particles 3 are fine particles made of a soft magnetic material that collects the magnetic field from the permanent magnet 15. However, even if the ferromagnetic fine particles 3 are permanent magnet fine particles, the magnetic pattern can be detected. Is possible.

[Embodiment 2]
In the first embodiment, the permanent magnet 15 held by the mold resin 16 is arranged on the back side of the magnetic sensor 10 packaged by the hard resin 23. However, as shown in FIG. If the permanent magnet 15 is fixed with an adhesive or the like on the side opposite to the side where the magnetic sensor 10 is disposed, the ferromagnetic fine particle detection device having the magnetic sensor 10M in which the magnetic sensor 10 and the permanent magnet 15 are integrated. Can be configured.
At this time, as shown in FIG. 18, if the lead frame 25F is housed in the cylindrical metal case 18 so as to be bent in a direction perpendicular to the surface of the compound semiconductor thin film constituting the operation layer 12, the sensor portion is obtained. It can be easily cylindrical. Since the lead frame 25F is bent as described above, it does not contact the metal case 18.

Further, if the ferromagnetic fine particle detection device is manufactured using the magnetic sensor 10T having the magnetic induction layer 26 made of a ferrite thin plate which is a soft magnetic material as shown in FIG. 19, the output signal amplitude can be further increased. it can.
Since the magnetic induction layer 26 has a function of collecting the magnetic field from the permanent magnet 15 on the operating layer 12 that is a magnetic sensing portion, the magnitude of the magnetic field acting on the operating layer 12 is further increased by this magnetic collection effect. In addition, the vertical component of the magnetic field also increases at the end of the operating layer 12, so that the output amplitude increases and the detection sensitivity improves.
For example, as shown in FIG. 20, the magnetic induction layer 26 is manufactured by manufacturing a large number of elements on a single wafer 11P by applying a microfabrication process, and then polishing a wafer 11P to be an insulating substrate 11 by polishing the back surface. The thickness is polished, and the back surface is bonded to a ferrite thin plate 26P having a thickness of about 0.25 mm by an adhesive, and then separated into individual magnetic sensors 10T by dicing. The separation is usually performed after the above-described soft resin layer 20 is formed.

EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, the structure of the magnetic sensor and ferromagnetic fine particle detection apparatus of this invention is not limited to the following.
[Example 1]
As an example of the thin film formation method, a Sn-doped InSb thin film was epitaxially grown on the (100) plane of a semi-insulating GaAs single crystal substrate using a molecular beam epitaxy method.
First, surface oxygen is desorbed by heating at 650 ° C. while irradiating a semi-insulating GaAs single crystal substrate having a thickness of 0.35 mm with As. Next, the temperature is lowered at 580 ° C. to form a GaAs buffer layer with a thickness of 200 nm. Next, the temperature was lowered to 400 ° C. while irradiating As, and then a Sn-doped InSb single crystal thin film having a film thickness of 1 μm was formed while simultaneously irradiating the substrate with Sn, In, and Sb. At this time, the Sn cell temperature was adjusted so that the electron concentration of the InSb single crystal thin film was 7 × 10 ¹⁶ cm ⁻³ . When the electrical characteristics of the formed InSb single crystal thin film were measured, the electron concentration was 7 × 10 ¹⁶ cm ⁻³ and the electron mobility was 40,000 cm / Vs.
Next, a photoresist is uniformly applied to the InSb surface of the InSb / GaAs substrate by a spin coater. The photoresist coating condition is 2.5 μm when rotated for 20 seconds at a rotational speed of 3200 rpm with a viscosity of 100 cp. Using an InSb mesa etching photomask, the InSb thin film was mesa-etched into a desired shape with a hydrochloric acid / hydrogen peroxide etching solution after exposure and development.
Then, after applying a photoresist again, exposure and development for forming a short-circuit electrode were performed, an electrode was deposited by a vacuum deposition method, and a short-circuit electrode was formed by a lift-off method. Specifically, after forming a resist pattern with a photoresist, a stacked electrode made of 50 nm thick Ti, 400 nm thick Au, and 50 nm thick Ni is formed as a short-circuit electrode by an electron beam method, and desired using a lift-off method. The short-circuit electrode was formed.
Further, a silicon nitride thin film having a thickness of 300 nm is formed as an insulating layer by plasma CVD, and the silicon nitride film only on the terminal electrode portion is removed using a reactive ion etching apparatus. Similarly, a terminal electrode was formed. As the terminal electrode, a laminated electrode made of Ti having a thickness of 50 nm and Au having a thickness of 400 nm was used. In order to improve the contact with the operation layer made of the compound semiconductor thin film, a heat treatment was performed at 500 ° C. for 2 minutes in an inert gas atmosphere.
A magnetic sensor having the same configuration as that of the magnetic sensor 10 shown in FIG. 2, having the compound semiconductor thin film as a magnetic sensing portion, having three terminal electrodes, and having a plurality of short-circuit electrodes between these terminal electrodes. Many were manufactured on one wafer by applying a microfabrication process using photolithography.

Next, in order to relieve pressure and in-plane stress due to the mold resin, a soft resin layer made of a soft silicone resin was formed on the magnetically sensitive part surface of the magnetic sensor so as to cover the above-mentioned part.
Thereafter, it was separated into individual magnetic sensors by dicing. The magnetic sensor element chip thus manufactured was bonded to a package using a lead frame. Specifically, a magnetic sensor chip is die-bonded on the island of the lead frame using a die bonder, and then a wire bonder is connected between the three terminals of the magnetoresistive element constituting the magnetic sensor and the lead by a 30 μm gold wire. After wire bonding, it was packaged with an epoxy resin by a transfer mold method. After that, lead forming is performed by tie bar cutting and lead cutting, and finally, the packaged magnetic sensor and permanent magnet are housed in a cylindrical case, and the ferromagnetic fine particle detection is provided with a sensor part that is entirely cylindrical. A device was made.
When the temperature drift of this ferromagnetic fine particle detector was measured, as shown in FIG. 11, no temperature drift was observed in the measurement temperature range (−60 ° C. to 160 ° C.). Thereby, it was confirmed that the ferromagnetic fine particle detection device of the present invention has excellent resistance value temperature dependency with little temperature drift of the signal output voltage. This means that the uniformity of the temperature dependence of the resistance value in the state where a magnetic field is applied is very good, affecting the entire surface of the magnetosensitive part, and is an insulating substrate made of a semi-insulating GaAs single crystal. On top of that, a magnetoresistive element using a Sn-doped InSb thin film grown by molecular beam epitaxy and using this as a magnetosensitive part has the characteristics of each element, and the temperature dependence of the resistance value is extremely small. Show.

[Example 2]
FIG. 22 shows an output signal waveform when a test-printed magnetic pattern as shown in FIG. 21 is detected using the ferromagnetic fine particle detection apparatus provided with the magnet-integrated magnetic sensor 10M shown in FIG. Among the magnetic patterns, the pattern A on the right side of the figure is a pattern in which bars having a length of 8.0 mm and a width of 0.8 mm are arranged at intervals of 3.0 mm, and the pattern B on the left side of the figure has a length. Is a bar having a width of 8.0 mm and a width of 0.3 mm arranged at intervals of 1.5 mm. 22 is a signal obtained by passing the output of the output terminal of the magnetic sensor 10 through an amplification circuit of about 10,000 times.
As a result, it was confirmed that a fine pattern was detected with high sensitivity in the ferromagnetic fine particle detection device of the present invention. Further, from the detailed calculation of the sensor output, the magnetic flux of the magnetic sensor of the present invention can be detected stably, that is, the bias magnetic flux density (0.25 Tesla) at which the magnetoresistance change rate ΔR / R ₀ is about 75%. ) The minimum detectable magnetic flux density change (absolute minimum magnetic flux density sensitivity) detectable below was ± 1.0 μT.

[Example 3]
Further, similarly to the second embodiment, using the ferromagnetic fine particle detection device including the magnetic sensor 10T having the magnetic induction layer shown in FIG. 19, the detection signal when the test printed magnetic pattern is detected is shown in FIG. Shown in As can be seen from comparison between FIG. 22 and FIG. 23, it can be seen that the signal amplitude is further increased in the ferromagnetic fine particle detection device including the magnetic sensor 10 </ b> T as compared with the second embodiment. According to the detailed magnetic field analysis calculation, it was found to be due to the magnetic flux collection effect of the ferrite thin plate under the GaAs substrate.

[Example 4]
By manufacturing the compound semiconductor thin film constituting the operating layer 12 with an electron concentration at least at a portion in contact with the terminal electrode 13 and the short-circuit electrode 14 larger than other portions of the compound semiconductor thin film not in contact with the electrodes 13 and 14. In order to confirm that the contact resistance value between the compound semiconductor thin film and the electrodes 13 and 14 can be lowered to increase the magnetoresistance change rate of the magnetic sensor, the following experiment was conducted.
In the same manner as in Example 1, a magnetic sensor 10J as shown in FIG. The difference from Example 1 is that there is no silicon nitride thin film (insulating layer 11B), and one magnetoresistive element 12P has a short-circuit electrode 14, but the other magnetoresistive element 12Q has no short-circuit electrode. That is. Here, when the short-circuit electrode 14 is formed on one of the magnetoresistive elements 12P, as shown in FIG. 25A, the electron concentration grown on the GaAs substrate 11 is 7 × 10 ¹⁶ cm ⁻³ and the thickness. After forming the short-circuit electrode 14 and the terminal electrode 13 by laminating the intermediate layer 12m made of an InSb thin film having an electron concentration of 5 × 10 ¹⁸ cm ⁻³ and a thickness of 50 nm on the 1 μm InSb thin film (operation layer) 12, As shown in FIG. 25B, the intermediate layer other than the electrode portion was removed by wet etching, and an intermediate layer having a high electron concentration was interposed between the operation layer 12, the short-circuit electrode 14, and the terminal electrode 13. FIG. 25C is a cross-sectional view of the magnetoresistive element 12Q having a structure without a short-circuit electrode.
As a comparative example, a magnetic sensor including a magnetoresistive element 12p without an intermediate layer and a magnetoresistive element 12q having a structure without a short-circuit electrode as shown in FIGS. .

FIG. 27 (a) is an enlarged view showing the connection of resistance between the short-circuit electrodes 14 in the magnetoresistive element 12P, and shows the connection of resistance between the terminal electrodes 13 in the magnetoresistive element 12P. FIG. 27 (c) shows the connection of the resistance between the terminal electrodes 13 in the magnetoresistive element 12Q. Here, R _s1 is the resistance value of the compound semiconductor thin film sandwiched between the short-circuit electrodes in the magnetoresistive element 12P, R _s2 is the resistance value of the compound semiconductor thin film immediately below the short-circuit electrode in the magneto-resistive element 12P, and R _m is the short-circuit electrode. 14, R _c is the contact resistance between the semiconductor thin film as the operation layer 12 and the short-circuit electrode 14, n is the number of the short-circuit electrodes 14, and R _s3 is the resistance value of the magnetoresistive element 12Q.
From these schematic diagrams, when the resistance value of the magnetoresistive element 12P is MR1, and the resistance value of the magnetoresistive element 12Q is MR2,
MR1 = {R _s2 (R _m + 2R _c ) / (R _c2 + R _m + 2R _c ) + R _s1 } × n + R _s1 (1)
MR2 = R _s3 (2)
It becomes.
In addition, when the area of the compound semiconductor thin film where the short-circuit electrode 14 of the magnetoresistive element 12P is not placed and the area of the compound semiconductor thin film of the magnetoresistive element 12Q are designed to be equal,
(N + 1) R _s1 = R _s3 = MR2 (3)
And the contact resistance R _c is
_{R c = {nR s2 R m} - (MR1-MR2) (R s2 + R m)} / 2 {(MR1-MR2)
−nRs2} (4)
It can be expressed.
MR1 and MR2 were measured from the elements.
Also, R _m was measured by the following method. A film having the same layer structure as the short-circuit electrode material of Example 1 was formed directly on the GaAs substrate 11 in a pattern as shown in FIG. In the figure, reference numeral 31 denotes a terminal electrode, and the electrode film 32 has three dimensions of 1 mm × 10 mm, 1 mm × 20 mm, and 1 mm × 30 mm, and the resistance value is measured. And what divided the resistance value by each area was set as Rm _□ , and the average value was adopted. That is, R _m = R _{m □} × (area of the short-circuit electrode portion).
R _s2 was determined from MR2 in terms of area.
By substituting the above calculated value to the equation (4), the result of obtaining the contact resistance R _c, the contact resistance R _c is of about 0.02 ohm.
In addition, as for the comparative example shown in FIGS. 26A and 26B, the contact resistance was about 0.25Ω as a result of performing the same calculation to obtain the contact resistance.
Next, the magnetoresistive effect of the magnetoresistive element 12p having a contact resistance of about 0.25Ω and the magnetoresistive element 12P having a contact resistance of about 0.02Ω shown in the comparative example was measured. The result is shown in FIG. As is clear from FIG. 29, it was confirmed that the magnetoresistance effect can be increased by reducing the contact resistance.

As described above, according to the present invention, the temperature drift of the detection signal of the magnetic pattern of the ferromagnetic fine particles is reduced and the magnetic pattern can be detected with high accuracy. Can be detected with high accuracy, and the safety of bill circulation can be improved. In addition, since the reliability of the detection signal is improved, the number of repetitions due to detection and reading of a wrong signal often found in a vending machine is reduced. This has made it possible to develop and implement various systems that require automatic banknote identification, as well as systems such as vending machines and automatic payment and acceptance of banknotes.
Further, conventionally, reading of magnetic recording has been centered on a coil head, but the magnetic detection unit for reading a magnetic pattern according to the present invention is a thin film, and a fine detection unit can be manufactured using photolithography. Many elements can be integrated and manufactured. Since magnetic pattern detection in which a large number of magnetic detection units are integrated in this way also leads to detection of a two-dimensional pattern signal, signal reading accuracy is greatly improved, and pattern replication is extremely difficult. The reliability of authenticity identification by detecting magnetic patterns such as banknotes is greatly improved. Further, the realization of the apparatus of the present invention in which a large number of magnetic detection units are integrated as described above makes it possible to read a magnetic pattern with multiple tracks.
Furthermore, by using the present invention, it is possible to detect and read magnetic recording. In particular, it has become possible to read out multi-track magnetic recording, which has been difficult until now. As a result, it has become possible to practically use sophisticated magnetic recording patterns and printed magnetic patterns that are difficult to replicate.

It is a figure which shows the structure of the ferromagnetic fine particle detection apparatus which concerns on Embodiment 1 of this invention. It is sectional drawing which shows the basic composition of the magnetic sensor which concerns on this Embodiment 1. FIG. It is a figure which shows the relationship between a compound semiconductor thin film and an insulating layer. It is a figure which shows the preparation processes of the magnetic sensor which concerns on this Embodiment 1. FIG. It is a figure which shows the preparation processes of the magnetic sensor which concerns on this Embodiment 1. FIG. It is sectional drawing which shows the magnetic sensor after a mold. It is a top view which shows the structure of the 2 terminal magnetoresistive element by this invention. It is a figure which shows the magnetic flux density of the resistance value of the magnetoresistive element by this invention. It is a figure which shows the magnetoresistive change rate of the magnetoresistive element by this invention. It is a figure which shows the measuring method of the temperature drift of a magnetic sensor. It is a figure which shows the measurement result of the temperature drift of the magnetic sensor by this invention. It is a figure which shows the detection principle of the magnetic pattern by the magnetic sensor of this invention. It is a figure which shows the detection signal waveform by the magnetic sensor of this invention. It is a figure which shows the other structure of the ferromagnetic fine particle detection apparatus by this invention. It is sectional drawing which shows the other structure of the magnetic sensor by this invention. It is sectional drawing which shows the other structure of the magnetic sensor by this invention. It is a figure which shows the structure of the magnet integrated magnetic sensor which concerns on this Embodiment 2. FIG. It is a figure which shows the magnet integrated magnetic sensor after a mold. It is sectional drawing which shows the other structure of the magnetic sensor by this invention. It is a figure which shows the formation method of a magnetic induction layer. It is a figure which shows an example of the magnetic pattern printed on the magnetic printed matter. It is a figure which shows an example of the output waveform of the magnetic pattern detected with the ferromagnetic fine particle detection apparatus provided with the magnetic sensor of this invention. It is a figure which shows an example of the output waveform of the magnetic pattern detected with the ferromagnetic fine particle detection apparatus provided with the magnetic sensor which has a magnetic induction layer. It is a figure which shows the structure of the magnetic sensor used in Example 4. FIG. It is a figure which shows the formation method of an electrode. It is a figure which shows the structure of the magnetic sensor of a comparative example. It is a figure which shows the calculation method of contact resistance. It is a figure which shows how to obtain | require the resistance value of a short circuit electrode. It is the graph which compared the magnetoresistive change rate of the magnetic sensor from which the formation method of an electrode differs.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ferromagnetic fine particle detection apparatus, 1A sensor part, 1B drive detection part, 2 magnetic printed matter,
3 ferromagnetic fine particles, 10 magnetic sensor, 11 insulating substrate, 11P wafer,
12 operation layer, 12a, 12b magnetoresistive element, 12F InSb thin film,
13, 13a, 13b, 13c Terminal electrode, 14 Short-circuit electrode, 15 Permanent magnet,
16 mold resin, 17 terminal pin, 18 metal case, 19a drive circuit,
19b amplifier circuit, 20 soft resin layer, 21,25 lead frame,
22 gold wire, 23 hard resin, 24 electromagnet, 26 magnetic induction layer,
26P Ferrite thin plate.

Claims (8)

  An arrangement state of ferromagnetic fine particles comprising a compound semiconductor thin film having a resistance value that varies depending on a magnetic field, and means for applying a magnetic field having a component perpendicular to the surface of the magnetic sensing part, and arranged according to a predetermined pattern A temperature detecting device that has a temperature dependency uniformity within a range of ± 1.0% in a state where a magnetic field is applied to the entire magnetosensitive portion. Magnetic particle detector.   The ferromagnetic fine particle detection device according to claim 1, wherein a short-circuit electrode is provided in contact with the compound semiconductor thin film constituting the magnetically sensitive portion.   3. The ferromagnetic fine particle detection device according to claim 2, wherein the short-circuit electrode is provided in a direction perpendicular to a current flowing through the compound semiconductor thin film, and a contact resistance value of the short-circuit electrode is 0.1Ω or less.   4. The ferromagnetic fine particle detection device according to claim 1, wherein the compound semiconductor thin film constituting the magnetosensitive portion is made of a compound semiconductor containing In.   5. The compound semiconductor thin film constituting the magnetosensitive portion is a thin film formed by epitaxial growth on an insulating substrate or a substrate having a semiconductor insulating layer formed on a surface thereof. The ferromagnetic fine particle detection device according to any one of the above.   6. The compound semiconductor thin film is doped with at least one or more donor impurities selected from Si, Sn, S, Se, Te, Ge, and C. 6. Ferromagnetic fine particle detector.   The compound semiconductor thin film constituting the magnetically sensitive portion is formed on an insulating substrate or a substrate having a semiconductor insulating layer formed on the surface, and the substrate is in close contact with the substrate on the side opposite to the magnetically sensitive portion. The soft magnetic thin plate or soft magnetic thin layer thicker than the film thickness of the compound semiconductor thin film is provided close to the compound semiconductor thin film in parallel with the compound semiconductor thin film. Ferromagnetic fine particle detector.   8. An insulating or high-resistance compound semiconductor thin film formed in close contact with any one surface of the compound semiconductor thin film constituting the magnetically sensitive portion. The ferromagnetic fine particle detection apparatus according to claim 1.

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