JP2005324115A - Coating device - Google Patents

Abstract

【Task】
In a coating apparatus using an inkjet head, the tendency of the ejection port array to be curved is acquired in advance, and the acquisition result is reflected in the ejection operation.
[Solution]
An application apparatus comprising: an information collecting unit that obtains center position information of each discharge port of an ink jet head; and a control unit that determines driving specifications of the ink jet head based on position information of each discharge port obtained by the information collecting unit provide.
In addition, when the control unit determines that the ejection operation cannot be performed on the aggregate in the current inkjet head scanning direction, the scanning direction is perpendicular to the longer of the width and the depth.
[Selection] Figure 1

Description

  The present invention relates to a coating apparatus using an inkjet head, and more particularly, to a coating apparatus provided with a mechanism that controls ejection variation of an inkjet head, in particular, landing variation caused by the curvature of an inkjet head discharge port array.

  2. Description of the Related Art Conventionally, it has been proposed to form a color filter or an organic EL light-emitting layer using an inkjet head having a plurality of ejection openings. By the way, in an inkjet head having a plurality of ejection openings, there arises a problem that droplets cannot be applied at regular positions due to warpage of the ejection opening array (warping of the inkjet head). As a method for deciding this problem, in Patent Document 1, when manufacturing a color filter, it is performed using a warp correction means for correcting the warp of an inkjet head in which a plurality of ink discharge nozzles are arranged in the longitudinal direction. Yes. The warp correction means of Patent Document 1 is provided with a plurality of through holes and threaded holes on the ink jet head side to attach the ink jet head to the plate, and adjusts the tightening force of the bolts inserted into the respective holes and screws. This is to correct the warp.

Japanese Patent No. 3459811

  However, when the technique described in Patent Document 1 is applied to an inkjet head used in the present coating apparatus, the following problems may occur.

  That is, it takes time and effort to correct the warp using a plurality of bolts. In addition, the inkjet head subjected to the warp correction means may be restored to the original warped shape again during the coating operation, and the amount of restoration cannot be predicted. For this reason, it is necessary to monitor the state of the inkjet head at appropriate intervals.

  An object of the present invention is to provide a coating apparatus that can be applied with high accuracy without using a warp correction means.

  In order to achieve the above object, the present invention provides an information collecting unit that obtains center position information of each discharge port of an ink jet head, and driving parameters of the ink jet head based on position information of each discharge port obtained by the information collecting unit. A drive control unit for determining, and the drive control unit obtains an approximate straight line from the center position information of each discharge port, uses it as a discharge port array of the inkjet head, and obtains an approximate curve from the center position information, The ejection port array deviation of the inkjet head, the width at the ejection port between these two as the ejection port correction value, and obtaining this ejection port correction value for each ejection port, whether the correction value is within the reference range, In the case of out of the reference range, a configuration is provided in which a determination unit is provided for determining whether the substrate can be handled by rotating.

  According to the present invention, it is possible to grasp the degree of curvature of the ejection port array due to the structural properties of the ink jet head body, and to appropriately correct the ejection position and optimize the scanning direction according to the information. As a result, it is possible to suppress a decrease in landing accuracy due to bending.

  The inkjet method is not limited to simply printing documents and printing color photographs, but is applied as a technology for forming functional devices by forming multiple thin film patterns on a single substrate using different coating materials. It is actively done. As its application destination, RGB color filters used in full-color liquid crystal displays, and image display devices (hereinafter referred to as organic EL display devices) using organic ELs that are attracting attention as next-generation FPDs (flat panel displays) Etc.

  In the inkjet system at the application destination, an inkjet head capable of ejecting a very small amount of droplets and an XY stage on which a substrate having a large number of droplet landing portions serving as a base of an image display device is mounted and fixed are relatively driven. In this method, a predetermined coating material is discharged onto a predetermined droplet landing portion. In recent years, as the resolution of an image display device is increased, the reliability of an inkjet coating apparatus (such as droplet landing accuracy and substrate positioning accuracy) is also improved. High precision is required.

  Here, in order to ensure the reliability described above, it is necessary to improve the manufacturing accuracy of the inkjet head itself. In other words, the manufacturing accuracy of the fine discharge ports arranged linearly below the ink jet head greatly occupies the reliability of the ink jet coating apparatus. However, depending on the manufacturing process of the ink jet head, the ink jet head discharge port array is curved, which causes variations in the discharge port position, and it has been found that it is not easy to form an image display device. The reason is shown below.

  FIG. 2 shows the discharge port surface of the curved inkjet head. A piezoelectric ceramic substrate having a large number of grooves, and electrodes provided on partition walls of the groove, and a large number of grooves of the piezoelectric ceramic substrate are joined so as to cover the upper surface thereof, and the piezoelectric ceramic A cover plate having a surface that is coplanar with one end surface of the substrate, and a plurality of discharge ports arranged in a straight line so as to correspond to the groove portions when bonded to the one end surface of the piezoelectric ceramic substrate In an inkjet head comprising a discharge port plate, applying a voltage to the electrodes, and discharging the desired liquid from the fine holes by shear deformation of the partition walls, each surface in the bonding is instantaneously applied by, for example, an epoxy-based strong adhesive However, due to the residual stress generated in each member due to the volume change of the adhesive after bonding and fixing, the adhesive expands and contracts, etc. Outlet row after does not become straight 30, although there varying degrees, is from being curved as approximate curve 31.

  In view of the above, the inventors of the present invention carried out detection of the ejection port positions for all the inkjet heads owned by the present inventors, and confirmed that the ejection port arrays were curved in all the inkjet heads.

  In this state, if the inkjet head is aligned and the ejection operation is performed from each ejection port at the same timing so that the droplets ejected from the ejection port can land on the application target, the landing position of each ejection port is 2 is shifted in the Y-coordinate direction of FIG.

  In addition, it is a well-known idea that the use of an inkjet head tilted is a desirable method because it can be used for general purposes, such as being able to apply multiple types of coated substrates with a single inkjet head. In the state, when the inkjet head is aligned and the discharge operation is performed at the same timing from each discharge port so that the droplet discharged from the discharge port can land on the application target, the landing position of each discharge port is It shifts in both the Y coordinate direction and the X coordinate direction in FIG. 2, and similarly, it cannot land with high accuracy.

  As described above, according to the present invention, the curved state of the ejection port array is confirmed and grasped in advance before the inkjet head is mounted on the coating apparatus and the ejection operation is performed, and the curved state is within an allowable range or the substrate is rotated. Is provided with a determination unit that determines whether it can be handled or whether it is necessary to replace it.

  FIG. 1 shows a schematic view of a coating apparatus according to an embodiment of the present invention. In this coating apparatus, a portal frame 2 is provided on a base 1 serving as a base. The portal frame 2 is provided with a Z-axis stage 3, which can be moved in the Z-axis direction by a Z-axis drive motor 4, and an inkjet head body 5 can be rotated in the θ direction on the Z-axis stage 3. A head bracket 6 having a gonio stage (not shown) is attached. Further, the portal stage 2 is provided with an ink jet head control unit 38 that stores application data and transmits an ejection operation command to the ink jet head body 5 in accordance with the application data.

  An X stage 9 and an X-axis drive motor 10 are fixed to the center of the leg portion of the portal frame 2 and the upper surface of the gantry 1, and a Y stage 11 and a Y-axis drive are fixed to the upper surface of the X stage 9. A motor 12 is mounted so that their strokes are orthogonal. A θ rotation unit 13 is mounted on the upper surface of the Y stage 11 and a suction table 14 is mounted on the θ rotation unit 13, respectively. Finally, the upper surface of the suction table 14 and the upper surface of the gantry 1 are parallel to each other. Positioned and attached.

  A plurality of fine suction holes are provided on the upper surface of the suction table 14. Since the suction holes provided on the upper surface of the suction table 14 communicate with a vacuum generator (not shown), the substrate 32 can be sucked and held on the upper surface of the table. A cleaning device 15 is attached to the front end surface of the suction table 14 for the purpose of preventing clogging of the inkjet head body 5 and eliminating clogging factors.

  With the above configuration, the surface of the substrate 32 placed on the suction stage 14 and the discharge port surface of the inkjet head body 5 are driven in parallel with each other while the suction table 14 is driven in the X direction and the Y direction. The center of the upper surface of the plate 14 can be rotationally driven as a rotation axis. The ink jet head body 5 can be driven in the Z direction.

  The descending stroke of the Z-axis drive motor 4 that drives the ink jet head main body 5 is set so that at least the cleaning device 15 can move with respect to the ink jet head main body 5 at a distance larger than various cleaning distances.

  A coating material bottle 16 is attached to a bottle holder 17 that can move vertically up and down on the right leg of the portal frame 2 in the drawing. A cleaning liquid bottle 19 containing a cleaning solvent for cleaning the internal flow path of the inkjet head 5 is provided in the vicinity of the coating material bottle 16. These can be supplied to the ink jet head main body 5 by a supply means (not shown), and can be appropriately switched.

  A PC (sometimes referred to as a control device) 18 is provided in the vicinity of the coating device. The PC 18 performs drive control, state monitoring, and the like of component devices attached to the coating apparatus.

  FIG. 3 shows a substrate applied to the coating apparatus and a coating method thereof, which is an embodiment of the present invention. Here, a correction method for the ejection port displaced in the X direction due to the curvature and the inclination angle θX will be described.

  An arrow 33 with respect to the substrate 32 represents the scanning direction of the ink jet head, and alternate long and short dash lines in the figure are a reference line 35a that is parallel to the X coordinate and serves as a reference for the inclination angle θX, and an ideal straight line 35b that has the inclination angle θX. It shows. The other alternate long and short dash lines indicate trajectories 36a, 36d, and 36g of liquid droplets discharged from the discharge ports 22a, 22d, and 22g to the substrate 32, respectively. In order to clarify the explanation, in this drawing, the degree of curvature is exaggerated and the number of discharge ports is limited (originally, there are 128 to 512 nozzles). The inclination angle θX and the ideal straight line 35b will be described in detail with reference to FIG.

  The substrate 32 is provided with an elliptical droplet landing area, that is, a bank having a prescribed depth, and a red (R) light emitting layer bank row 34AR, a green (G) light emitting layer bank row 34AG, and a blue ( B) A common bank width 38 and bank depth 39 are arranged in the order of the light emitting layer bank row 34AB, and are arranged at regular intervals. In this embodiment, it is assumed that the discharge operation is performed on the red (R) light emitting layer bank array 34AR, and all other banks are indicated by dotted lines.

  In general, in an organic EL panel, the RGB color light emitting layer bank rows 34AR, 34AG, and 34AB are collectively set as one pixel, and the pixel width (X direction bank pitch) and pixel depth (Y direction bank pitch) per pixel are set. The length is assumed to be equal. For this reason, the bank width 38 and the bank depth 39 are at least three times as long.

  As described above with reference to FIG. 2, it is difficult to land droplets with high accuracy when the inkjet head discharge port array is curved. Also in FIG. 3, it can be seen that the landing position of the discharge port 22d, particularly the positional deviation in the X-coordinate direction in the figure is significant.

  Here, the relationship between the bank width 38 and the bank depth 39 in the scanning direction is shown in FIG. 3 by taking advantage of the structural characteristics of the substrate 32 used in this coating apparatus, that is, the characteristics in which the pixel width per pixel is equal to the pixel depth length. The substrate is replaced as shown in the following figure. That is, by rotating the suction table 14 by 90 ° by the θ rotation unit 13, the substrate 32 is rotated so that the bank in the scanning direction becomes shorter as shown in the figure. Thus, by making the scanning direction of the inkjet head main body 5 perpendicular to the longitudinal direction of the bank, the deviation in the X coordinate direction due to the curvature and the inclination angle θX of the inkjet head main body 5 is the size of the bank width. Can be absorbed.

  On the other hand, there is a case where a plurality of droplets need to be ejected instead of one droplet per bank. In this case, in the discharge operation to the substrate 32 in the lower diagram of FIG. 3, it is necessary to move the substrate in the direction perpendicular to the scanning direction 33 by the number of droplets to be discharged. In this coating method, the substrate processing speed is slow. Problem occurs. In addition, since the substrate 32 shown in the upper diagram of FIG. 3 is applied in parallel with the longitudinal direction of the substrate, there is a margin in the longitudinal direction, and the margin can be used to improve the liquid balance using the margin in the scanning direction. Since the droplet can be landed while moving to 33, the problem does not occur.

On the other hand, the degree of bending of the inkjet head main body 5 varies, and even if it is curved, the discharge port position located at the maximum bending displacement portion is within the landing error range, and a sufficient discharge operation is possible even in the substrate 32 state. Therefore, in this embodiment, when the ejection port array is curved, first, the curvature of the ejection port array of the inkjet head main body 5 is recognized, and the scanning direction 33 of the inkjet head is determined according to the state.

  For example, specifically, a case where an inkjet head capable of discharging about 130 picoliters per discharge port at the same time to a substrate on which a 130 dpi image display device is formed by discharging one droplet at a time is applied. Consider. It should be noted that if the inclination angle of the ink jet head main body 5 in an uncurved state is formed at 30 ° on the substrate used in this case, it can be landed accurately at the center of the bank depending on the discharge timing. Here, if the maximum displacement of the discharge port curve is about 20 μm, the discharge port located at the maximum displacement part is already 20 × sin 30 ° = 10 μm in the X direction from the center of the bank, which is a droplet discharge target. It will be shifted to the left.

  On the other hand, if a bank corresponding to three locations of RGB adjacent in the horizontal direction on the substrate is defined as one pixel and the width per pixel and the length of the depth are substantially equal, the depth 39 per bank location is between banks. Considering the pitch, the width 38 is divided into three equal parts of the above-mentioned one pixel, and is about 60 μm. For this reason, in the state immediately before the landing of the 42 picoliter droplet having a sphere diameter of about 43 μm, the droplet already protrudes from the bank by 1.5 μm.

  Even in this state, it is possible to draw droplets by the surface tension action of the hydrophilic surface of the bottom surface of the bank, but the coating material that cannot be drawn in and remains at an unintended position of the substrate causes the substrate to become dirty. Furthermore, if landing errors (approximately ± 4 μm) due to variations in the flying angle of the droplets and mechanical accuracy errors due to the structure of the coating device are taken into consideration, the landing position of the droplets will be outside the bank to be ejected, and color mixing will occur. Cause. Therefore, the substrate is rotated 90 degrees so that the apparent width is long, and dropping is performed by discharging one column while moving the inkjet head in the sub-scanning direction (width direction). After the discharge of the row is completed, the substrate is moved by three rows in the main scanning direction and the discharge operation is performed again in the same manner.

  FIG. 4 shows an information collecting means for collecting information on the arrangement state of the inkjet head discharge port arrays applied to the coating apparatus according to an embodiment of the present invention. The information collecting means is provided in the inkjet head main body 5 through the transparent protective plate 54 by the CCD camera 53 while moving the camera driving mechanism 52 attached with the CCD camera 53 on the rail provided on the support plate 50. The discharge port 22a is observed (imaged). The observed (imaged) information is sent to the control device (PC 18) through the signal line 55.

  Information collection for each discharge port of the inkjet head body 5 is performed as follows. First, after the CCD camera 53 is driven to a predetermined reference position by the camera drive mechanism 52 according to the rail 51, the discharge port (discharge port 22a in the figure) that is recognized first among the discharge ports of the inkjet head body 5 is the CCD camera. The X stage 9 and the Y stage 11 are driven so as to fall within the field of view 53, the head bracket 6 or the θ rotation unit 13 is adjusted, and the Z-axis stage 3 is raised or lowered to adjust the focus of the CCD camera 53.

  The ejection port 22a is imaged in order to protect the CCD camera 53 from unintentional drops of droplets from the ejection port of the inkjet head body 5 and fine dust from the apparatus components and its surroundings. Perform over plate 54.

  Next, an image is taken of the discharge port that is first recognized in the field of view of the CCD camera 53, and the image information is transmitted to the PC 18. In the PC 18, the center of the ejection port imaged from the imaging information is indexed and the coordinate information is recorded. After recording, the camera drive mechanism 52 is driven until the discharge port to be recognized next can be recognized by the CCD camera 53. Thereafter, the above operation is repeated until there are no more discharge ports to be recognized.

  In this figure, the rail 51 and the camera drive mechanism 52 are used for the movement in the discharge port array direction. However, a CCD camera is attached to the end of the suction table of the coating device, and the X stage 9 and the Y stage 11 are driven. By adopting such a configuration, the rail 51 and the camera driving mechanism 52 may be omitted. In addition, the information collecting means may be installed in a place that does not hinder the discharge operation of the coating apparatus, and may be installed anywhere as long as it can function as the information collecting means. Furthermore, you may install separately in the coating device vicinity as an information collection device.

  FIG. 5 shows a method for deriving correction values necessary for the ejection operation of an inkjet head applied to a coating apparatus, according to an embodiment of the present invention. Here, a correction method for the ejection port displaced in the Y direction due to the curvature and the inclination angle θX will be described.

  θX is an inclination angle of the inkjet head body 5, 31 is an approximate curve of curvature, 33 is a scanning direction, 35a is a reference line parallel to the X coordinate in the figure and serves as a reference for the inclination angle θX, and 35b is given an inclination angle θX. Each of them is an inclined line and shows an ideal straight line. For the sake of clarity, the degree of bending is exaggerated and the number of discharge ports is limited in this figure as in FIG.

  First, the reference line 35a of the ink jet head body 5 mounted on the coating apparatus is obtained. The reference line 35a is a reference line for giving the specified inclination angle θX to the inkjet head body 5, in other words, the inclination line 35b when the inclination angle θX = 0 °. In this embodiment, a straight line connecting one end point of the discharge port and the other end point is set to an angle equivalent to the inclination of the straight line drawn by the stroke of the X stage 9 (see FIG. 1). Here, the center position information of all the acquired ejection ports is corrected with reference to the reference line 35a, and the recorded contents of the PC 18 are updated.

  Subsequently, the bending displacement ΔHn (n is a number unique to the discharge port) at each discharge port derived from the curve is obtained. The curve displacement ΔHn is a graph of the coordinates of all the recognized discharge ports on the XY coordinates. From the graph, the ideal straight line 35b of the discharge port array and the approximate curve 31 of the curve are drawn. The Y component distance difference is associated with each outlet and is sequentially recorded on the PC 18.

  The element for obtaining the distance difference is not limited to this, and may be, for example, the position information of each discharge port stored in the PC 18 and either the curved approximate curve 31 or the ideal straight line 35b. When the information is acquired from the ideal straight line 35b and the curved approximate curve 31, it is not necessary to acquire the center position information of all the discharge ports in the information collecting unit shown in FIG. 4 described above, so that the operation can be simplified. In this case, it is only necessary to recognize the three points of the discharge ports located at both ends and the discharge ports (often located at the center of the discharge port array) that are likely to be located at the maximum displacement portion of the curve. The number of acquisitions of the center position information may be varied according to the tendency.

  Subsequently, the inclination angle θX of the inkjet head body 5 is obtained. The inclination angle θX is determined by the same color bank pitch of the substrate on which the ejection operation is performed. Depending on the inclination angle θX, not all of the ejection ports of the ink jet head main body are used in one scan, and the ejection operation is performed for each prescribed ejection port pitch. Further, it is desirable that the inclination angle θX is an acute angle in order to reduce the displacement of the discharge port in the X direction as much as possible. The origin of the tilt angle θX may be the center point of the discharge port located at the end, the center of the discharge port array, or the center of rotation of the head bracket 6 or the θ rotation unit 13, etc. It may be a point formed.

  Here, the scanning direction of the substrate on which the ejection operation is performed is determined. The maximum X displacement ΔXn of the bending displacement ΔHn is compared with a preset threshold value for determining the substrate scanning direction, and when the threshold value is exceeded, that is, the discharge operation is not desired to be performed in the current substrate scanning direction. In this case, the ejection operation is performed such that the scanning direction of the inkjet head body 5 is perpendicular to the longitudinal direction of the bank.

  Subsequently, the discharge waiting distance Dn of each discharge port at the inclination angle θX is obtained. In this embodiment, the distance difference between the reference line 35a and the ideal straight line 35b is obtained by a trigonometric function of the inclination waiting distance Pn, the bending displacement ΔHn and the inclination angle θX, and the distance difference parallel to the scanning direction is determined as the bending waiting distance Wn. And the sum of them is set as a discharge waiting distance Dn. These units may be time.

  As described above, it is possible to correct an error in the Y direction by adding a component due to curvature to the ejection waiting distance.

  FIG. 6 shows an operation flowchart of the coating apparatus according to an embodiment of the present invention. In addition, operation | movement of each part of a coating device is demonstrated based on FIG.

  First, a head protection device (not shown) attached to the inkjet head body 5 is removed. This head protection device is used to prevent clogging due to drying of the discharge port of the inkjet head main body 5 and its peripheral portion. Then, the PC 18 is activated, the remaining amount in the coating material bottle 16 and the cleaning solvent bottle 19 is confirmed as appropriate, self-diagnosis of each component device is performed, and the coating preparation is completed (step 401). Then, the cleaning device 15 cleans the discharge port of the ink jet head main body 5 and its peripheral portion to eliminate the clogging factor (step 402).

  Subsequently, the degree of bending of the inkjet head body 5 is recognized (step 403), the correction value necessary for the ejection operation is calculated (step 409), and the inkjet head body 5 is moved according to the obtained correction value. The tilt angle θX is set by the head bracket 6 or the θ rotation unit 13, the scanning direction is determined, and coating data corresponding to the substrate 32 on which the ejection operation is performed is formed.

  Then, the substrate 32 conveyed from the substrate pre-processing unit (not shown) is mounted at a predetermined position on the suction plate, the vacuum generation means (not shown) is driven and the substrate 32 is sucked and fixed (step 404), and the set scanning direction And the Z stage 3 is driven, and the discharge head surface of the inkjet head body 5 and the surface of the substrate 32 are set to a prescribed inter-substrate distance.

  Subsequently, the coating operation is started (step 405). When the coating operation is completed, the vacuum generating means (not shown) is driven to release the suction of the substrate 32 and transport to the substrate post-processing section (step 406).

  Here, when the prescribed number of processed substrates has been reached (step 406) and the number has reached the number necessary for cleaning the inkjet head 5 (step 407), the cleaning device 15 is driven to perform various cleanings. . As soon as the cleaning is completed, the coating operation (step 404, step 405, step 406) is performed again.

  When the prescribed number of processed substrates is reached, the coating operation in the coating apparatus is finished. Before the end, the cleaning device 15 is driven to perform various cleanings. Finally, a head protection device (not shown) is attached to the inkjet head 5 and the operation is completed.

1 shows a schematic view of a coating apparatus according to an embodiment of the present invention. As a background art, a discharge port surface of a curved inkjet head is shown. It shows about the substrate applied to this coating device and its coating method which become one embodiment of the present invention. 2 shows an information collection unit of an inkjet head discharge port array applied to a coating apparatus according to an embodiment of the present invention. 2 shows a method for deriving driving parameters necessary for an ejection operation of an inkjet head applied to a coating apparatus according to an embodiment of the present invention. The operation | movement flowchart of the coating device which becomes one Embodiment of this invention is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Stand, 2 ... Portal stage, 3 ... Z-axis stage, 4 ... Z-axis drive motor, 5 ... Inkjet main body, 6 ... Goniometer stage, 9 ... X stage, 11 ... Y stage, 13 ... Rotation unit, 14 DESCRIPTION OF SYMBOLS ... Adsorption table, 15 ... Cleaning device, 16 ... Luminescent material bottle, 18 ... Control device, 19 ... Cleaning liquid bottle.

Claims (5)

In the coating apparatus for applying ink for each color on the substrate, provided for each color to apply an inkjet head having a plurality of ejection openings,
An information collection unit that obtains center position information of each ejection port of each inkjet head; and a drive control unit that determines drive parameters of the inkjet head based on the positional information of each ejection port obtained by the information collection unit; With
The drive control unit obtains an approximate straight line from the center position information of each discharge port, sets it as a discharge port array of the inkjet head, and obtains an approximate curve from the center position information, and uses this as a discharge line of the inkjet head. An application apparatus, wherein an outlet row deviation is set, a width at the discharge port between the two is set as a discharge port correction value, and the discharge port correction value is acquired for each discharge port. In the coating apparatus for applying ink for each color on the substrate, provided for each color to apply an inkjet head having a plurality of ejection openings,
An information collecting unit that obtains center position information of each ejection port of the inkjet head; and a drive control unit that determines drive parameters of the inkjet head based on the positional information of each ejection port obtained by the information collecting unit. Prepared,
The drive control unit obtains an approximate straight line from the center position information of each of the discharge ports, uses it as a discharge port array of the inkjet head, and discharges the width between the approximate line and the center position information corresponding to the discharge port. An application apparatus characterized in that an outlet correction value is obtained and the discharge port correction value is obtained for each of the discharge ports. In the coating device in any one of Claim 1 or Claim 2,
The approximating straight line is obtained by the least square method from the center position information of each discharge port. In the coating device in any one of Claim 1 or Claim 2,
The approximating straight line is obtained by a straight line connecting the center position information at two locations on both ends of each discharge port. In the coating device according to any one of claims 1 to 4,
The surface of the substrate has an assembly having a plurality of recesses whose width and depth are not the same at any position thereof,
When it is determined by the drive control unit that an ejection operation cannot be performed on the aggregate in the current inkjet head scanning direction, the scanning direction is set to the longer of the width and the depth. A coating apparatus characterized by being vertical.

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