JP2005258081A - Electrode structure and optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrode structure and an optical device capable of increasing a movable range of a movable electrode even if the size of the structure is limited.
An electrode structure includes a substrate, and a fixed electrode and a movable electrode are provided on the substrate. The fixed electrode 4 is fixed to the upper surface 6a of the electrode base 6 with respect to the substrate 3 and the electrode base 6 fixed to the upper surface of the substrate 3, and is formed in a comb shape so as to extend to the movable electrode 5 side. And an auxiliary electrode portion 7. The movable electrode 5 is fixed to the upper surface 8a of the electrode base 8 with respect to the substrate 3 and the electrode base 8 fixed to the upper surface of the substrate 3 so as to be opposed to the electrode base 6 of the fixed electrode 4, and on the fixed electrode 4 side. And an auxiliary electrode portion 9 formed in a comb shape so as to extend. The teeth forming the auxiliary electrode portion 9 are arranged so that the positions thereof are different from the auxiliary electrode portion 7 of the fixed electrode 4.
[Selection] Figure 1

Description

  The present invention relates to an electrode structure including a fixed electrode and a movable electrode, and an optical device.

As an optical device provided with an electrode structure having a fixed electrode and a movable electrode, for example, one described in Patent Document 1 is known. The electrode structure includes a movable comb electrode fixed to a movable plate and a fixed comb electrode opposed to the movable comb electrode, and a voltage is applied between the movable comb electrode and the fixed comb electrode. By applying an electrostatic force when applied, the movable comb electrode is moved to the fixed comb electrode side, and the movable plate is displaced.
JP 2003-241120 A

  However, in the above prior art, the movable comb electrode can be driven only to the position where the comb teeth of the movable comb electrode hit the base of the fixed comb electrode. For this reason, for example, in terms of devices, it is necessary to narrow the arrangement pitch of the electrode structures. When the size of the electrode structures is limited, the movable range of the movable comb electrode is narrowed. .

  An object of the present invention is to provide an electrode structure and an optical device that can increase the movable range of the movable electrode even if the size of the structure is limited.

  The present invention is an electrode structure having a fixed electrode and a movable electrode, the fixed electrode is fixed to a surface different from the first electrode base and the surface of the first electrode base facing the movable electrode, A first auxiliary electrode portion having a portion extending toward the movable electrode, the movable electrode including a second electrode base disposed to face the first electrode base, and a fixed electrode in the second electrode base And a second auxiliary electrode portion fixed to a surface different from the surface on the opposite side and having a portion extending to the fixed electrode side.

  With this configuration, when a voltage is applied between the fixed electrode and the movable electrode and the movable electrode is driven to the fixed electrode side by electrostatic force generated between the two, the second electrode auxiliary of the movable electrode The portion can move to a position beyond the first electrode base of the fixed electrode. Thereby, even if it is a case where the size of the width direction (parallel arrangement direction of a fixed electrode and a movable electrode) of an electrode structure is restricted, the movable range of a movable electrode can be enlarged. In addition, for this reason, in the initial state in which no voltage is applied between the fixed electrode and the movable electrode, the overlap amount between the first electrode auxiliary portion of the fixed electrode and the second electrode auxiliary portion of the movable electrode can be increased. it can. In this case, since the driving force of the movable electrode with respect to the predetermined applied voltage is increased, the initial applied voltage can be kept low.

  Preferably, at least two fixed electrodes are provided, and the two fixed electrodes are arranged to face each other with the movable electrode interposed therebetween. In this case, when an optical component such as a mirror is coupled to the movable electrode, the optical component can be moved to both sides by moving the movable electrode with respect to the two fixed electrodes.

  Further, at least two movable electrodes may be provided, and the two movable electrodes may be arranged to face each other with the fixed electrode interposed therebetween. In this case, for example, when an optical component such as a single mirror is coupled to two movable electrodes, the optical component can be deformed by moving the two movable electrodes with respect to the fixed electrode.

  In this case, it is preferable that the arrangement position of the second auxiliary electrode portion of either one of the two movable electrodes is different from that of the other second auxiliary electrode portion of the two movable electrodes. This reliably prevents the second electrode auxiliary portions of the two movable electrodes from contacting each other, so that the movable electrodes are not electrically connected to each other.

  Preferably, both the first auxiliary electrode portion and the second auxiliary electrode portion are formed in a comb shape. As a result, when a voltage is applied between the fixed electrode and the movable electrode, the electrostatic force generated between the fixed electrode and the movable electrode increases, so that the driving force of the movable electrode can be increased.

  In the configuration in which there are at least two fixed electrodes and the two fixed electrodes are arranged opposite to each other with the movable electrode interposed therebetween, the first auxiliary electrode portion is formed in a comb-like shape, and the second auxiliary electrode portion is formed in a zigzag shape. It may be formed. In this case, when a voltage is applied between the fixed electrode and the movable electrode, the electrostatic force generated between the fixed electrode and the movable electrode increases, so that the driving force of the movable electrode can be increased.

  In the configuration in which there are at least two movable electrodes and the two movable electrodes are arranged opposite to each other with the fixed electrode interposed therebetween, the first auxiliary electrode portion is formed in a zigzag shape, and the second auxiliary electrode portion is formed in a comb-tooth shape. It may be formed. In this case, since the first auxiliary electrode portion of the fixed electrode is formed in a zigzag shape, the second electrode auxiliary portions of the two movable electrodes are reliably prevented from contacting each other. In addition, when a voltage is applied between the fixed electrode and the movable electrode, the electrostatic force generated between the fixed electrode and the movable electrode increases, so that the driving force of the movable electrode can be increased.

  More preferably, the first electrode base and the second electrode base are provided on the substrate, the first auxiliary electrode is fixed to the upper surface of the first electrode base, and the second auxiliary electrode is the second electrode base. It is fixed to the upper surface of the. In this case, the electrode structure can be easily manufactured.

  The optical device of the present invention is characterized by comprising the above electrode structure and an optical component coupled to the second electrode base.

  By providing the electrode structure as described above, the movable range of the movable electrode can be increased even when the size in the width direction of the electrode structure is limited as described above. In the initial state of the electrode structure, the amount of overlap between the first auxiliary electrode portion of the fixed electrode and the second auxiliary electrode portion of the movable electrode can be increased, so that the initial applied voltage can be kept low.

  According to the present invention, the movable range of the movable electrode can be increased regardless of the size limit of the electrode structure. Also, in the initial state of the electrode structure, the amount of overlap between the first auxiliary electrode portion of the fixed electrode and the second auxiliary electrode portion of the movable electrode can be increased, so that the voltage applied between the fixed electrode and the movable electrode can be It is possible to reduce the power consumption.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of an electrode structure and an optical device according to the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view showing an electrostatic actuator provided with a first embodiment of an electrode structure according to the present invention. In the figure, an electrostatic actuator 1 is manufactured using a micro electro mechanical system (MEMS) technique and includes an electrode structure 2. The electrode structure 2 has a substrate 3, and a fixed electrode 4 and a movable electrode 5 are provided on the substrate 3.

  The fixed electrode 4 has a rectangular parallelepiped electrode base 6 fixed to the upper surface of the substrate 3 and is fixed to the upper surface 6a of the electrode base 6 with respect to the substrate 3 and has a comb-tooth shape so as to extend to the movable electrode 5 side. The auxiliary electrode portion 7 is formed. The teeth forming the auxiliary electrode portion 7 have a rectangular shape and are arranged at an equal pitch in the extending direction of the electrode base portion 6.

  The movable electrode 5 has a rectangular parallelepiped electrode base 8 fixed to the upper surface of the substrate 3 so as to face the electrode base 6 of the fixed electrode 4, and is fixed to the upper surface 8 a of the electrode base 8 with respect to the substrate 3. And an auxiliary electrode portion 9 formed in a comb-like shape so as to extend to the four sides. The teeth forming the auxiliary electrode portion 9 have a rectangular shape and are arranged at an equal pitch so that the positions thereof are different from the auxiliary electrode portion 7 of the fixed electrode 4. Thereby, when the movable electrode 5 moves, it can prevent that the auxiliary electrode part 9 contacts the auxiliary electrode part 7. FIG. A mirror 10, which is an optical component that reflects light, is coupled to one end of the electrode base 8.

Here, in the fixed electrode 4, most of the lower surface of the electrode base 6 is fixed to the upper surface of the substrate 3 via an SiO ₂ layer (not shown). Thereby, the fixed electrode 4 does not move with respect to the substrate 3. On the other hand, in the movable electrode 5, the lower surface of one end portion (the end portion opposite to the mirror 10) of the electrode base 8 is fixed to the upper surface of the substrate 3 via a SiO ₂ layer (not shown). As a result, when a voltage is applied between the fixed electrode 4 and the movable electrode 5, the movable electrode 5 moves with one end of the electrode base 8 as a fulcrum.

In the fixed electrode 4 and the movable electrode 5, by providing the comb-like auxiliary electrode portions 7 and 9, a strong electrostatic driving force can be obtained. Further, when the height of the electrode base parts 6 and 8 is H _m and the height of the auxiliary electrode parts 7 and 9 is H _t ,
H _m ≧ H _t / 2
It is desirable that Thereby, sufficient rigidity as the electrode structure 2 can be maintained.

  A voltage source 11 is connected between the electrode base 6 of the fixed electrode 4 and the electrode base 8 of the movable electrode 5. In an initial state where no voltage is applied by the voltage source 11, the tips of the teeth forming the auxiliary electrode portion 7 of the fixed electrode 4 overlap the tips of the teeth forming the auxiliary electrode portion 9 of the movable electrode 5. is doing. When a voltage is applied to the fixed electrode 4 by the voltage source 11, an electrostatic force is generated between the fixed electrode 4 and the movable electrode 5, and the movable electrode 5 is attracted to the fixed electrode 4 by this electrostatic force and bends. Thus, the mirror 10 moves to the fixed electrode 4 side (see the broken line in the figure).

  Here, the width direction of the electrode structure 2 (the direction in which the fixed electrode 4 and the movable electrode 5 are arranged in parallel) is the x direction, the extending direction of the electrode bases 6 and 8 is the y direction, and the height direction of the electrode structure 2 Is the z direction.

  FIG. 2 shows one conventional electrostatic actuator as a comparative example. In the figure, an electrode structure 101 of the electrostatic actuator 100 has a fixed electrode 102 and a movable electrode 103.

  The fixed electrode 102 includes an electrode base 104 fixed to the upper surface of the substrate 3 and a comb-shaped auxiliary electrode portion 105 fixed to a side surface 104 a of the electrode base 104 facing the movable electrode 103. The movable electrode 103 includes an electrode base 106 fixed to the upper surface of the substrate 3 so as to face the electrode base 104, and a comb-shaped auxiliary electrode portion fixed to a side surface 106a of the electrode base 106 facing the fixed electrode 103. 107.

In such an electrode structure 101, when a voltage is applied to the fixed electrode 102 by the voltage source 11, capacitances C ₁ and C ₂ as shown in FIG. 3 are present between the fixed electrode 102 and the movable electrode 103. appear. The electrostatic capacitance C ₁ is generated between the auxiliary electrode portion 105 and the electrode base portion 106 and between the auxiliary electrode portion 107 and the electrode base portion 104, respectively. A capacitance C ₂ is generated between the auxiliary electrode portions 105 and 107.

Here, the amount by which the auxiliary electrode 107 moves in the x direction is x (variable), the initial gap between the auxiliary electrode 105 and the electrode base 106, and the initial gap between the auxiliary electrode 107 and the electrode base 104 is s. The thickness of the teeth forming the electrode parts 105 and 107 is w, the length of the teeth forming the auxiliary electrode parts 105 and 107 is l, the height of the auxiliary electrode parts 105 and 107 is h, and the auxiliary electrode part 105 , 107, the capacitances C ₁ and C ₂ are expressed by the following equations.

  From the above formula, it can be seen that the amount of overlap between the auxiliary electrode portions 105 and 107 (corresponding to the numerator of formula 2) affects the capacitance generated between the fixed electrode 102 and the movable electrode 103.

  By the way, in the electrode structure 101, the auxiliary electrode portion 105 of the fixed electrode 102 is fixed to the side surface 104a of the electrode base portion 104, and the auxiliary electrode portion 107 of the movable electrode 103 is fixed to the side surface 106a of the electrode base portion 106. When the electrode 103 is driven in the x direction, the movable electrode 103 can be moved only to a position where the auxiliary electrode portion 107 hits the side surface 104 a of the electrode base portion 104. For this reason, from the viewpoint of narrowing the pitch of the electrostatic actuator and the like, when the dimension in the width direction (x direction) of the electrostatic actuator 100 is limited, the movable range of the movable electrode 102 is small. End up.

  Further, as can be seen from the above equation 2, the overlap area between the auxiliary electrode portions 105 and 107 is greatly related to the driving force of the movable electrode 102, but there is a limitation on the movable range of the movable electrode 103 as described above. In the initial state where no voltage is applied, the overlap area between the auxiliary electrode portions 105 and 107 cannot be increased. For this reason, in order to sufficiently obtain the initial driving force of the movable electrode 103, it is necessary to increase the initial applied voltage, resulting in an increase in power consumption.

  On the other hand, in the electrode structure 2 of the present embodiment, the auxiliary electrode portion 7 of the fixed electrode 4 is fixed to the upper surface 6a of the electrode base portion 6, and the auxiliary electrode portion 9 of the movable electrode 5 is fixed to the upper surface 8a of the electrode base portion 8. Therefore, the movable electrode 5 can be moved to a position where the distal end portion of the auxiliary electrode portion 9 passes the electrode base portion 6. Thereby, even if it is a case where the dimension of the width direction of the electrostatic actuator 1 is restricted, the movable range of the movable electrode 5 can be enlarged.

  Further, since there is no restriction on the movable range of the movable electrode 5, the overlap amount between the auxiliary electrode portions 7 and 9 can be increased in the initial state of the electrode structure 2. In this case, since the driving force of the movable electrode 5 with respect to a predetermined applied voltage (electrostatic force generated between the fixed electrode 4 and the movable electrode 5) increases, the initial voltage applied to the fixed electrode 4 can be reduced. The movable electrode 5 can be moved by a desired amount. As a result, an increase in power consumption can be suppressed.

Furthermore, since the auxiliary electrode portion 7 is fixed to the upper surface 6a of the electrode base portion 6 and the auxiliary electrode portion 9 is fixed to the upper surface 8a of the electrode base portion 8, when a voltage is applied to the fixed electrode 4, it is movable with the fixed electrode 4. Between the electrode 5, only the capacitance C ₂ of the above equation 2 is generated without generating the capacitance C ₁ of the above equation 1. Accordingly, since the relationship between the applied voltage and the driving force of the movable electrode 5 is linear, the movable electrode 5 operates stably.

  FIG. 4 is a configuration diagram illustrating an example of an optical device including the electrostatic actuator 1 described above. In the figure, the optical device 20 is, for example, a 1 × 2 type optical switch.

  The optical switch 20 includes a planar optical waveguide 21 and the electrostatic actuator 1 disposed on the planar optical waveguide 21. The planar optical waveguide 21 has a groove 22 and optical waveguide cores 23 </ b> A to 23 </ b> D formed so as to be connected to the groove 22. The electrostatic actuator 1 is fixed to the upper surface of the planar optical waveguide 21 so as to be turned over from the state shown in FIG. In FIG. 4, the substrate 3 of the electrode structure 2 is omitted.

  In such an optical switch 20, in the initial state of the electrostatic actuator 1, the electrode base 8 of the movable electrode 5 extends straight. In this state, the light emitted from the optical waveguide core 23A is reflected by the mirror 10 and enters the optical waveguide core 23B. On the other hand, when a predetermined voltage is applied to the fixed electrode 4 by the voltage source 11, the movable electrode 5 is deflected to the fixed electrode 4 side by the electrostatic force generated between the fixed electrode 4 and the movable electrode 5, and the mirror 10 is fixed to the fixed electrode 4 side. Move to. In this state, the light emitted from the optical waveguide core 23A passes through the groove portion 22 and enters the opposite optical waveguide core 23C.

  The electrostatic actuator 1 according to the present embodiment can be applied to an optical variable attenuator or the like in addition to the optical switch as described above.

  FIG. 5 is a perspective view showing an electrostatic actuator provided with the second embodiment of the electrode structure according to the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the electrostatic actuator 30 includes an electrode structure 31, and the electrode structure 31 has fixed electrodes 32 A and 32 B and a movable electrode 33 fixed on the substrate 3. The fixed electrodes 32A and 32B are arranged to face each other with the movable electrode 33 interposed therebetween.

  The fixed electrodes 32A and 32B are an electrode base 34 fixed to the upper surface of the substrate 3, and an auxiliary electrode fixed to the upper surface 34a of the electrode base 34 and formed in a comb shape so as to extend toward the movable electrode 33. Part 35.

  The movable electrode 33 is fixed to the upper surface 36a of the electrode base 36 and the electrode base 36 fixed to the upper surface of the substrate 3 so as to face the electrode base 34 of the fixed electrodes 32A and 32B, and is fixed to the fixed electrodes 32A and 32B. And an auxiliary electrode portion 37 formed in a comb shape so as to extend. The mirror 10 is coupled to one end of the electrode base 36. The teeth forming the auxiliary electrode portion 37 are arranged at an equal pitch so that the positions thereof are different from the teeth forming the auxiliary electrode portion 35.

  Voltage sources 38A and 38B are connected between the electrode base 34 of the fixed electrodes 32A and 32B and the electrode base 36 of the movable electrode 33, respectively. In the initial state in which no voltage is applied by the voltage sources 38A and 38B, the tips of the teeth forming the auxiliary electrode portion 35 of the fixed electrodes 32A and 32B and the both ends of the teeth forming the auxiliary electrode portion 37 of the movable electrode 33 are used. And are overlapping.

  In such an electrostatic actuator 30, when a voltage is applied to the fixed electrode 32A by the voltage source 38A, the movable electrode 33 is attracted to the fixed electrode 32A by the electrostatic force generated between the fixed electrode 32A and the movable electrode 33 and bent. Accordingly, the mirror 10 moves to the fixed electrode 32A side. On the other hand, when a voltage is applied to the fixed electrode 32B by the voltage source 38B, the movable electrode 33 is attracted to the fixed electrode 32B by the electrostatic force generated between the fixed electrode 32B and the movable electrode 33, and is bent accordingly. Moves to the fixed electrode 32B side. Thus, the mirror 10 can be moved to both sides.

  FIG. 6 is a perspective view showing an electrostatic actuator provided with a third embodiment of an electrode structure according to the present invention. In the figure, the same or equivalent members as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the electrostatic actuator 40 includes an electrode structure 41, and the electrode structure 41 includes a fixed electrode 42 and movable electrodes 43 </ b> A and 43 </ b> B fixed on the substrate 3. The movable electrodes 43A and 43B are arranged to face each other with the fixed electrode 42 interposed therebetween.

  The fixed electrode 42 includes an electrode base 44 fixed to the upper surface of the substrate 3 and an auxiliary electrode fixed to the upper surface 44a of the electrode base 44 and formed in a comb shape so as to extend toward the movable electrodes 43A and 43B. Part 45.

  The movable electrodes 43A and 43B are fixed to the upper surface 46a of the electrode base 46 and fixed to the upper surface 46a of the electrode base 46 so as to face the electrode base 44 of the fixed electrode 42, and extend to the fixed electrode 42 side. Thus, it has an auxiliary electrode portion 47 formed in a comb-like shape. Both end portions of a mirror 48 are coupled to the electrode base portions 46 of the movable electrodes 43A and 43B. The teeth forming the auxiliary electrode portion 47 are arranged at an equal pitch so that the positions thereof are different from the teeth forming the auxiliary electrode portion 45.

  In such an electrostatic actuator 40, when a voltage is applied to the fixed electrode 44 by the voltage sources 38A and 38B, the movable electrodes 43A and 43B are fixed by the electrostatic force generated between the fixed electrode 42 and the movable electrodes 43A and 43B. It is pulled by 42 and bends. As a result, the mirror 48 is deformed from a flat state into a curved shape. Therefore, the electrostatic actuator 40 can be applied to, for example, a dispersion compensator.

  FIG. 7 is a perspective view showing an electrostatic actuator provided with a fourth embodiment of an electrode structure according to the present invention. In the figure, the same or equivalent members as those in the third embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the electrostatic actuator 50 includes an electrode structure 51. The electrode structure 51 includes movable electrodes 52A and 52B instead of the movable electrodes 43A and 43B in the third embodiment.

  The movable electrode 52A has a comb-shaped auxiliary electrode portion 53A fixed to the upper surface 46a of the electrode base 46, and the movable electrode 52B is a comb-shaped auxiliary electrode portion 53B fixed to the upper surface 46a of the electrode base 46. have. Each tooth that forms the auxiliary electrode portion 53A has a different arrangement position from each tooth that forms the auxiliary electrode portion 53B. That is, the teeth forming the auxiliary electrode portions 53A and 53B are arranged alternately with respect to the teeth forming the auxiliary electrode portion 45 of the fixed electrode 42. At this time, the arrangement pitch of the teeth forming the auxiliary electrode portions 53A and 53B is twice or more the arrangement pitch of the teeth forming the auxiliary electrode portion 45.

  With this configuration, when the movable electrodes 52A and 52B are moved toward the fixed electrode 42, the auxiliary electrode portions 53A and 53B do not contact each other. Therefore, it is possible to prevent the movable electrodes 52A and 52B from being electrically connected without increasing the distance between the electrode base 44 of the fixed electrode 42 and the electrode base 46 of the movable electrodes 52A and 52B.

  FIG. 8 is a perspective view showing an electrostatic actuator provided with a fifth embodiment of an electrode structure according to the present invention. In the figure, the same or equivalent members as those in the fourth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the electrostatic actuator 60 includes an electrode structure 61, and this electrode structure 61 has a fixed electrode 62 instead of the fixed electrode 42 in the fourth embodiment. The fixed electrode 62 has an auxiliary electrode portion 63 which is fixed to the upper surface 44a of the electrode base portion 44 and is formed in a zigzag shape so as to have a portion extending toward the movable electrodes 52A and 52B. The teeth forming the auxiliary electrode portions 53A and 53B are configured to be alternately sandwiched between the auxiliary electrode portions 63.

In this way, by forming the auxiliary electrode portion 63 of the fixed electrode 62 in a zigzag shape, when a voltage is applied to the fixed electrode 62 by the voltage sources 38A and 38B, there is no gap between the fixed electrode 62 and the movable electrodes 52A and 52B. In addition to the capacitance C ₂ in the y direction (see FIG. 3), the capacitance C _{1 in the} x direction (see FIG. 3) is also generated. Therefore, the driving force of the movable electrodes 52A and 52B can be increased.

  FIG. 9 is a perspective view showing an electrostatic actuator provided with a sixth embodiment of an electrode structure according to the present invention. In the figure, the same or equivalent members as those in the second embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the electrostatic actuator 70 includes an electrode structure 71, and the electrode structure 71 has fixed electrodes 72 A and 72 B and a movable electrode 73 fixed on the substrate 3. The fixed electrodes 72A and 72B are disposed to face each other with the movable electrode 73 interposed therebetween.

  The fixed electrodes 72A and 72B have comb-like auxiliary electrode portions 74A and 74B fixed to the upper surface 34a of each electrode base 34, respectively. Each tooth forming the auxiliary electrode portion 74A and each tooth forming the auxiliary electrode portion 74B are arranged in different positions as in the auxiliary electrode portions 53A and 53B in the fourth embodiment.

  The movable electrode 73 has an auxiliary electrode portion 75 which is fixed to the upper surface 36a of the electrode base portion 36 and is formed in a zigzag shape so as to have a portion extending toward the fixed electrodes 72A and 72B. The teeth forming the auxiliary electrode portions 74A and 74B are configured to be alternately sandwiched between the auxiliary electrode portions 75. Thereby, the mirror 10 can be moved to both sides while increasing the driving force of the movable electrode 73.

  The present invention is not limited to the above embodiment. For example, in the above embodiment, the fixed electrode and the auxiliary electrode portion of the movable electrode are fixed to the upper surface of the electrode base, but the auxiliary electrode portion of the fixed electrode is different from the surface of the electrode base on the side facing the movable electrode. The auxiliary electrode portion of the movable electrode may be fixed to a surface different from the surface on the side facing the fixed electrode in the electrode base.

It is a perspective view which shows the electrostatic actuator provided with 1st Embodiment of the electrode structure concerning this invention. It is a perspective view which shows one of the conventional general electrostatic actuators as a comparative example. It is a conceptual diagram which shows the electrostatic capacitance which generate | occur | produces between the fixed electrode and movable electrode shown in FIG. It is a block diagram which shows an example of the optical device provided with the electrostatic actuator shown in FIG. It is a perspective view which shows the electrostatic actuator provided with 2nd Embodiment of the electrode structure concerning this invention. It is a perspective view which shows the electrostatic actuator provided with 3rd Embodiment of the electrode structure concerning this invention. It is a perspective view which shows the electrostatic actuator provided with 4th Embodiment of the electrode structure concerning this invention. It is a perspective view which shows the electrostatic actuator provided with 5th Embodiment of the electrode structure concerning this invention. It is a perspective view which shows the electrostatic actuator provided with 6th Embodiment of the electrode structure concerning this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 2 ... Electrode structure, 3 ... Board | substrate, 4 ... Fixed electrode, 5 ... Movable electrode, 6 ... Electrode base (1st electrode base), 6a ... Upper surface, 7 ... Auxiliary electrode part (1st auxiliary electrode part), 8 ... Electrode base (second electrode base), 8a ... upper surface, 9 ... auxiliary electrode part (second auxiliary electrode part), 10 ... mirror (optical component), 20 ... optical switch (optical device), 31 ... electrode structure, 32A , 32B ... fixed electrode, 33 ... movable electrode, 34 ... electrode base (first electrode base), 34a ... upper surface, 35 ... auxiliary electrode part (first auxiliary electrode part), 36 ... electrode base (second electrode base), 36a ... upper surface, 37 ... auxiliary electrode portion (second auxiliary electrode portion), 41 ... electrode structure, 42 ... fixed electrode, 43A, 43B ... movable electrode, 44 ... electrode base (first electrode base), 44a ... upper surface, 45 ... auxiliary electrode part (first auxiliary electrode part), 46 ... electrode base part (second electrode base part), 46a Upper surface, 47 ... auxiliary electrode part (second auxiliary electrode part), 48 ... mirror (optical component), 51 ... electrode structure, 52A, 52B ... movable electrode, 53A, 53B ... auxiliary electrode part (second auxiliary electrode part) , 61 ... Electrode structure, 62 ... Fixed electrode, 63 ... Auxiliary electrode part (first auxiliary electrode part), 71 ... Electrode structure, 72A, 72B ... Fixed electrode, 73 ... Movable electrode, 74A, 74B ... Auxiliary electrode part (First auxiliary electrode portion), 75... Auxiliary electrode portion (second auxiliary electrode portion).

Claims (9)

An electrode structure having a fixed electrode and a movable electrode,
The fixed electrode is fixed to a first electrode base and a surface different from a surface of the first electrode base opposite to the movable electrode, and a first auxiliary electrode having a portion extending to the movable electrode side And
The movable electrode is fixed to a surface different from a surface of the second electrode base that is disposed to face the first electrode base and a surface of the second electrode base that faces the fixed electrode, and the fixed electrode An electrode structure comprising: a second auxiliary electrode portion having a portion extending to the side.   2. The electrode structure according to claim 1, wherein the electrode structure has at least two fixed electrodes, and the two fixed electrodes are arranged to face each other with the movable electrode interposed therebetween.   2. The electrode structure according to claim 1, wherein the movable electrode has at least two movable electrodes, and the two movable electrodes are arranged to face each other with the fixed electrode interposed therebetween.   The arrangement of the second auxiliary electrode portion of one of the two movable electrodes is different from that of the second auxiliary electrode portion of the other of the two movable electrodes. Electrode structure.   5. The electrode structure according to claim 1, wherein each of the first auxiliary electrode portion and the second auxiliary electrode portion is formed in a comb shape.   3. The electrode structure according to claim 2, wherein the first auxiliary electrode portion is formed in a comb-like shape, and the second auxiliary electrode portion is formed in a zigzag shape.   The electrode structure according to claim 3, wherein the first auxiliary electrode portion is formed in a zigzag shape, and the second auxiliary electrode portion is formed in a comb shape. The first electrode base and the second electrode base are provided on a substrate,
The said 1st auxiliary electrode part is fixed to the upper surface of the said 1st electrode base, The said 2nd auxiliary electrode part is fixed to the upper surface of the said 2nd electrode base, The any one of Claims 1-7 characterized by the above-mentioned. The electrode structure according to one item. The electrode structure according to any one of claims 1 to 8,
An optical device comprising: an optical component coupled to the second electrode base.

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