JP2005164896A - Optical head device, laser lithography apparatus and method for drawing pattern - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical head device which can prevent deposition of contaminations on the surface of an emission lens and decrease in the output of laser light for exposure, and keep favorable drawing accuracy, resolution or inspection capability. <P>SOLUTION: The device is provided with: a first air flow jetting means to jet gas downward through an air flow hole 6 formed on the lower face of a substrate part 3; and a second air flow jetting means to jet gas downward through a beam passing hole 5 where the exit lens 2 emits a light beam downward. A high-pressure gas layer is formed between an object 105 and the lower face of the substrate part 3 by the gas jetted by the first and second air flow jetting means, and the gap between the object 105 and the lower face of the substrate part 3 is kept constant by the equilibrium of the pressure and weight of the gas layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical head device in which an exit lens for irradiating a target with a light beam is attached in a laser drawing device, an inspection device, etc., and a laser drawing device configured to include such an optical head device and The present invention relates to a pattern drawing method performed using such a laser drawing apparatus.

  Conventionally, in manufacturing a photomask or the like, a laser drawing apparatus for drawing a desired pattern on a resist, an inspection apparatus for inspecting a defect such as a photomask, or an apparatus similar to these is shown in FIG. As shown in FIG. 2, an optical head device 101 for drawing or inspection is mounted. This optical head device is configured to include an exit lens 102 that emits a light beam downward, and is supported by a laser drawing device 103 or the like via a slider 104 so that it can be raised and lowered. As shown in FIG. 13, the optical head device is moved down toward the surface of the substrate 105 or the like as an object, and moved while moving in the horizontal direction as shown in FIG. It is supposed to be. That is, this optical head device irradiates a light beam from above the surface of the substrate or the like while moving horizontally facing the surface of the substrate 105 or the like as an object through a very narrow fixed gap. Or inspect this surface.

  The optical head device includes a large number of mirrors and lenses for guiding the light beam to the exit lens or guiding the light beam incident from the exit lens to a photodetector or the like.

  Such an optical head device includes means for maintaining a constant gap between the surface of the substrate and the like.

  For example, some optical head devices can be moved up and down by a driving force of a motor. In this optical head device, the gap between the optical head device and an object such as a substrate is adjusted and maintained constant by the driving force of the motor.

  Moreover, as this optical head device, when it is lowered toward an object such as the substrate 105, an air flow is ejected toward the object, and the pressure of the air flow and its own weight are balanced and floated. In some cases, the gap between the object and the object is kept constant. Such an optical head device 101 operates when the laser drawing device or the like is moved down by its own weight toward the object and floated by the pressure of the air flow ejected from the lower surface toward the object. .

  In such an optical head device, as shown in FIG. 14, the air flow is ejected through an air flow ejection hole 106 formed in the lower surface portion of the optical head device 101 as shown by an arrow in FIG. The In this optical head device, the number of air flow ejection holes 106 may be one or more, and may be two or three or more. In this optical head device, an air flow line is connected to the air flow ejection hole 106, and an air flow is transmitted from an air flow source such as a pump through the air flow ejection hole 106 through the air flow line. Erupted. In such an optical head device 101, the floating interval from the object due to the pressure of the air flow is an extremely short interval of about 10 μm to several hundreds of μm in order to improve the resolution and inspection capability.

  In such an optical head device 101, the size of the space between the object (the distance from the object to the lower surface portion of the optical head device) is the air jetted from the lower surface portion of the optical head device 101. It can be detected by monitoring the flow pressure. Further, the optical head device 101 resists its own weight by decreasing the pressure of the air flow ejected from the lower surface portion, and descending due to its own weight, and increasing the pressure of the air flow ejected from the lower surface portion. Rise. Therefore, in this optical head device 101, the distance from the lower surface portion of the optical head device 101 to the object is finely adjusted by controlling the pressure of the air flow ejected from the lower surface portion to be constant. At the same time, the distance can be maintained.

JP-A-6-283398

  Incidentally, as described above, in the optical head device that is made to float by jetting an air flow toward the target, the floating interval from the target due to the pressure of the air flow is as short as about 10 μm to several 100 μm. If there is foreign matter on the surface of the object, if the object is a substrate, there are foreign objects in the resist applied to this substrate, or unevenness occurs, or these resist or substrate itself When there is a step in the surface, there is a risk that the lower surface portion of the optical head device and these foreign matters, irregularities and steps will come into contact.

  As described above, when the lower surface portion of the optical head device and the foreign matter or unevenness on the object come into contact with each other, the optical head device scrapes the substrate on the target object or the resist on the substrate, and the foreign matter such as resist fragments. Will be scattered on the object.

  The foreign matter scattered on the object in this way may be further scattered by the pressure of the air flow for floating the optical head device, and may adhere to the surface portion of the exit lens. If foreign matter adheres to the surface portion of the exit lens, the output of the laser beam for exposure will decrease, and there is a risk that abnormalities such as deterioration in drawing accuracy and resolving power, and deterioration in inspection capability may occur.

  Further, even in an optical head device in which the gap between the object such as the substrate is adjusted and maintained constant by the driving force of the motor, the space between the lower surface portion of the optical head device and the object is maintained. In order to detect the distance, as shown in FIG. 15, an air flow ejection hole 106 is formed in the lower surface portion of the optical head device 101, and as shown by an arrow in FIG. 15, the air flow is ejected from the air flow ejection hole 106. I try to erupt. That is, in this case, the distance between the lower surface portion of the optical head device and the object is detected by monitoring the pressure (load) of the air flow ejected from the air flow ejection hole 106.

  Therefore, even in the optical head device in which the gap between the object and the object is maintained constant by the driving force of such a motor, the foreign matter on the object is applied to the surface portion of the exit lens by the pressure of the air flow. There is a risk of adhesion.

  Therefore, the present invention is proposed in view of the above circumstances, and the output of laser light for exposure is reduced by preventing foreign matter from adhering to the surface portion of the exit lens. In addition, the present invention is intended to provide an optical head device in which drawing accuracy, resolving power, or inspection capability is well maintained.

  In order to solve the above-described problems, an optical head device according to the present invention is directed downward through a base material portion supported so as to be movable up and down and a light beam through hole formed in a lower surface portion of the base material portion. An exit lens that emits a light beam and irradiates the object with the light beam, and a first airflow ejecting unit that ejects gas downward through an airflow through-hole formed in the lower surface portion of the base material portion; And a second air flow ejecting means for ejecting gas downward through the light flux through hole, and the object and the base material portion by the gas ejected by the first and second air flow ejecting means A high-pressure gas layer is formed between the lower surface portion of the substrate and the space between the object and the lower surface portion of the base material portion is maintained at a predetermined constant interval by the balance between the pressure of the gas layer and its own weight, The distance between the object and the exit lens is maintained at a predetermined working distance. Is shall.

  In this optical head device, since the second air flow ejecting means ejects gas downward through the light flux through hole, the first air flow ejecting means directs downward through the air flow through hole. The foreign matter on the object scattered by the gas jetted in this way does not adhere to the exit lens.

  The optical head device according to the present invention is characterized in that, in the above-described optical head device, the gas ejected by the first and second airflow ejecting means is air.

  In this optical head device, it is easy to secure the gas ejected by the first and second airflow ejecting means.

  Furthermore, the optical head device according to the present invention is characterized in that, in the above-described optical head device, the first and second airflow ejecting means are the same airflow ejecting means.

  In this optical head device, since the first and second airflow ejecting means are the same airflow ejecting means, it is not necessary to separately provide these airflow ejecting means, and the apparatus configuration can be simplified. Can do.

  A laser drawing apparatus according to the present invention includes the above-described optical head device, a support mechanism that supports the base portion of the optical head device so as to be movable up and down, and a light source unit that causes a light beam to be incident on an output lens of the optical head. And a modulating means for modulating the intensity of the light beam, a deflecting means for deflecting the optical path of the light beam, and a support base for supporting the object irradiated with the light beam emitted from the exit lens so as to be movable. It is characterized by this.

  In this laser drawing apparatus, the base portion of the optical head device is supported by the support mechanism so as to be movable up and down, the light beam from the light source means is modulated in intensity by the modulating means, and the optical path is deflected by the deflecting means. A light beam incident on the exit lens and emitted from the exit lens is irradiated onto the object supported by the support base so as to be movable.

  Further, the pattern drawing method according to the present invention uses the above-described laser drawing apparatus to apply a light beam whose intensity is modulated by the modulation unit and deflected by the deflection unit to an object supported on a support table via an exit lens. The predetermined pattern is drawn on the target object by repeating the step of irradiating and the step of moving the target object by a predetermined amount by the support base.

  In this pattern drawing method, the step of irradiating the object supported on the support table via the exit lens with the light beam modulated in intensity by the modulation means and deflected by the deflection means, and the object by the support table By repeating the step of moving by a predetermined amount, a predetermined pattern can be drawn on the object.

  The optical head device according to the present invention is an optical head device used in a laser drawing device and various inspection devices, and the second air flow ejecting means ejects gas downward through the light flux through hole. Therefore, the foreign matter on the object scattered by the gas jetted downward through the airflow through hole by the first airflow ejecting means does not adhere to the exit lens. .

  That is, the present invention prevents foreign matter from adhering to the surface portion of the exit lens, does not reduce the output of laser light for exposure, and provides good drawing accuracy, resolving power, or inspection capability. A maintained optical head device can be provided.

  In the optical head device according to the present invention, if the gas ejected by the first and second airflow ejecting means is air, the gas is ejected by the first and second airflow ejecting means. It becomes easy to secure the gas.

  Further, in the optical head device according to the present invention, if the first and second airflow ejecting means are the same airflow ejecting means, the first and second airflow ejecting means are separately provided. There is no need to provide it, and it is possible to simplify the apparatus configuration.

  In the laser drawing apparatus according to the present invention, in the optical head device, the second air flow ejecting means ejects the gas downward through the light beam through hole. Foreign matter on the object scattered by the gas jetted downward through the airflow through hole by the airflow ejecting means does not adhere to the exit lens, and the output of the laser beam for exposure decreases. In addition, the drawing accuracy and resolution are maintained well.

  In the pattern drawing method according to the present invention, since the second airflow ejecting means uses an optical head device configured to eject gas downward through the light flux through hole, The foreign matter on the object scattered by the gas jetted downward through the airflow through hole by the first airflow ejecting means does not adhere to the exit lens, and the output of the laser beam for exposure Thus, it is possible to perform drawing with the drawing accuracy and resolving power maintained satisfactorily.

  Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment of Optical Head Device]
As shown in FIG. 1, the optical head device according to the present invention is used to inspect defects such as a laser drawing device 1 for drawing a desired pattern on a resist when a photomask or the like is manufactured, or a photomask or the like. It is used by being mounted on various inspection devices such as these and other similar devices.

  As shown in FIG. 2, the optical head device includes an exit lens 2 that emits a light beam R downward, and a base member 3 that supports the exit lens. As shown by an arrow A in FIG. 2, the slider 4 is supported so that it can be raised and lowered. During the operation of the laser drawing apparatus 1 and the like, the optical head device is lowered toward the surface of the substrate 105 or the like that is an object, moves closer to the surface, and operates while being moved in the horizontal direction. That is, the optical head device moves horizontally from above the surface of the substrate 105 or the like while moving horizontally facing the surface of the substrate 105 or the like that is an object through a very narrow fixed gap. Irradiate R or inspect the surface.

  When manufacturing a photomask or the like, the substrate 105 has a surface coated with a resist, and a desired pattern is drawn on the resist by a laser beam or the like.

  As shown in FIG. 1, the optical head device is moved by a moving stage 11 supporting the slider 4 as shown by arrows X1 and Y1 in FIG. Further, an object such as the substrate 105 is supported by a moving stage serving as a support base, and as shown by arrows X2 and Y2 in FIG. You may make it move a head apparatus relatively.

  In this embodiment, the diameter of the lowermost surface of the exit lens 2 is about 2.0 mm, and the distance between the exit lens 2 and the lower surface portion of the substrate 3 is about 1.5 mm. is there.

  As shown in FIG. 3, a light beam through hole 5 is formed in the lower surface portion of the base portion 3 of the optical head device, through which the laser light beam emitted from the emission lens 2 passes downward. In this embodiment, the diameter of the light beam through hole 5 is about 1.5 mm.

  The laser drawing apparatus 1 also includes a number of mirrors and lenses (not shown) for guiding a laser beam from a light source (not shown) to the output lens 2 or for guiding a light beam incident from the output lens 2 to a photodetector or the like. Etc.

  The optical head device, as a means for maintaining a constant gap between the surface of the substrate 105 and the like, is aired toward the target when lowered toward the target such as the substrate 105. A mechanism for jetting a flow is provided. In this optical head device, the pressure of the air flow ejected toward the object and its own weight are balanced and floated, so that the gap between the object and the object is kept constant. In other words, this optical head device operates by moving downward due to its own weight and floating by the pressure of the air flow ejected from the lower surface toward the object during operation of the laser drawing apparatus 1 or the like. .

  In this optical head device, an air flow is ejected through an air flow through hole 6 formed in the lower surface portion of the optical head device, as indicated by an arrow in FIG. In this optical head device, the number of airflow through holes 6 may be one or more, and may be two or three or more. In this optical head device, as shown in FIG. 4, an air flow line is connected to each air flow through hole 6 through an airway drilled in the base material portion 3, and the first air An air flow is ejected from each air flow through hole 6 through an air flow line and an air passage from an air flow source such as a pump serving as a flow injection means.

  In this optical head device, an air flow is also ejected from the light flux through-hole 5 as indicated by the arrows in FIG. As shown in FIG. 2, an air flow line 7 is connected to the light flux through hole 5, and an air flow source such as a pump serving as a second air flow ejecting means passes through the air flow line 7. Thus, an air flow is ejected from the light flux through hole 5. As shown in FIG. 5, a plurality of air flow lines 7 are installed so as to surround the periphery of the emission lens 2. The number of the air flow lines 7 is arbitrary, but it is preferable to increase the number of air flow lines 7 as much as possible because the air flow from each air flow line 7 can be directed to the object with certainty. This is because, when the number of air flow lines 7 is small, turbulence may occur between the air flow lines 7.

  In this optical head device, the floating distance from the object due to the pressure of the air flow ejected from the air flow through hole 6 and the light beam through hole 5 is about 10 μm to several 100 μm in order to improve the resolution and inspection ability. , With very short intervals. At this time, the distance between the exit lens 2 and the object is about 3.0 mm.

  In this optical head device, the size of the gap between the object (the distance from the object to the lower surface portion of the optical head device) is determined by the pressure of the air flow ejected from the lower surface portion of the optical head device. It can be detected by monitoring. In addition, this optical head device resists its own weight by decreasing the pressure of the air flow ejected from the lower surface portion, and descending by its own weight, and increasing the pressure of the air flow ejected from the lower surface portion. Rise. Therefore, in this optical head device, the distance from the lower surface portion of the optical head device to the object is finely adjusted and controlled by controlling the pressure of the air flow ejected from the lower surface portion to be constant. Can be maintained at a distance.

  In this optical head device, since the air flow is ejected from the light beam through hole 5 toward the object, the foreign material is ejected from the air flow through hole 6 even when there is a foreign object on the object. Since the air flow is not carried to the exit lens 2 side, there is no possibility that the foreign matter adheres to the surface portion of the exit lens 2.

  Therefore, in this optical head device, foreign matter is prevented from adhering to the surface portion of the exit lens 2, the output of the laser beam for exposure is not reduced, and the drawing accuracy, resolving power, or inspection is reduced. Ability is maintained well.

  In the above-described optical head device and each of the embodiments described later, the air flow that is ejected from the light beam through hole 5 is branched from the air flow that is ejected from the air flow through hole 6. You may do it. That is, the air flow source such as a pump serving as the first air flow ejecting means and the air flow source such as the pump serving as the second air flow ejecting means may be the same supply source or separate. It is good. In order to stabilize the air flow rate, it is preferable to use the first air flow injection unit and the second air flow injection unit as separate supply sources.

  The flow rate of air ejected by each of these airflow ejecting means may be an amount that allows the optical head device to sufficiently float with respect to the airflow ejected from the airflow through-holes 6. The air flow ejected from the hole 5 may be of an amount that does not allow foreign matter to enter from the light beam through hole 5. Further, the flying height of the optical head device can be controlled by adjusting the total amount of air flow ejected from the air flow through hole 6 and the light beam through hole 5.

  In addition, the air flow ejected from the air flow through hole 6 and the light beam through hole 5 is air in the optical head device described above and in each of the embodiments described later. It is good.

  Furthermore, the optical head device according to the present invention may be configured such that a plurality of laser beams are emitted simultaneously from the emission lens.

[Second Embodiment of Optical Head Device]
The optical head device according to the present invention may be configured by providing a cylindrical outer frame member 8 surrounding the periphery of the exit lens 2 as shown in FIG. 6 instead of the air flow line 7 described above. .

  An air flow is supplied into the outer frame member 8 through an air flow line 9 from an air flow source such as a pump serving as a second air flow injection means. The outer frame member 8 has a pressure higher than atmospheric pressure, and the air in the outer frame member 8 is ejected toward an object such as the substrate 105 through the light flux through hole 5.

  Also in this optical head device, since the air flow is ejected from the light beam through hole 5 toward the object, the foreign material is ejected from the air flow through hole 6 even when there is a foreign object on the object. It is not carried to the exit lens 2 side by the air flow, and there is no possibility that the foreign matter adheres to the surface portion of the exit lens 2.

[Third Embodiment of Optical Head Device]
In the optical head device according to the present invention, as shown in FIG. 7, an air flow line 7 for ejecting an air flow from the light beam through hole 5 is formed in the base member 3 and is formed in each air flow through hole. The airway connected to 6 may be branched in the base material portion 3.

  That is, in this optical head device, a part of the air guided from the air flow line to each air flow through hole 6 through the air passage in the base material portion 3 is branched from the air passage to the air flow line 7. It is ejected from the periphery of the light beam through hole 5.

[Fourth Embodiment of Optical Head Device]
In the optical head device according to the present invention, when the airway is not drilled in the base material portion 3, the air flow line for ejecting the air flow from each air flow through hole 6 is as shown in FIG. In addition, the air flow through holes 6 may be connected from above the base material portion 3.

[Fifth Embodiment of Optical Head Device]
Furthermore, in the optical head device according to the present invention, as shown in FIG. 9, the base material portion 3 in each of the above-described embodiments is configured as a housing portion 3 a configured to accommodate the emission lens 2. Also good. That is, also in the second embodiment described above, as shown in FIG. 10, the base material portion 3 can be configured as a housing portion 3 a configured to house the emission lens 2.

[Embodiment of Laser Drawing Apparatus]
A laser drawing apparatus according to the present invention includes the optical head device according to each of the above-described embodiments and a slider 4 serving as a support mechanism that supports the base portion 3 of the optical head device so as to be movable up and down. As shown, a light source 10 serving as a light source unit that causes a light beam to be incident on the exit lens 2 of the optical head, a modulation element 11 serving as a modulation unit that modulates the intensity of the light beam R emitted from the light source 10, A deflecting element 12 serving as a deflecting unit that deflects an optical path, and a moving stage 13 serving as a support base that supports the substrate 105 serving as an object irradiated with the light beam emitted from the exit lens 2 so as to be movable. Has been.

  A resist is applied to the surface of the substrate 105, and a desired pattern is drawn on the resist by a laser beam.

  As the light source 10, for example, a He—Ca laser that emits a light beam having a wavelength of 442 nm can be used. The light beam R emitted from the light source 10 enters the modulation element 11, and the intensity is modulated by the modulation element 11. The modulation element 11 is driven by the modulation driver 14 to modulate the intensity of the transmitted light beam R.

  Data that has passed through the data input device 15, the data processing device 16, the memory 17, and the data reading device 18 is supplied to the modulation driver 14. Data corresponding to a predetermined pattern drawn on the resist coated on the substrate 105 is input to the data input device 15. The data input to the data input device 15 is sent to the data processing device 16 and processed as position data (XY coordinate data) and intensity data corresponding to the pattern to be drawn. Data processed in the data processing device 16 is accumulated in the memory 17, read from the memory 17 by the data reading device 18, and sent to the driver 14.

  The data reading device 18 and the driver 14 are controlled by the controller 19 and operate based on the clock output from the clock generator 20.

  Then, the light beam R whose intensity has been modulated by the modulation element 11 is incident on the deflection element 12 and is transmitted through the deflection element 12 so that the emission direction is deflected. The deflection element 12 is, for example, an acousto-optic conversion element, and is driven by the scanning circuit 21 to deflect the optical path of the transmitted light beam R at a constant period.

  The scanning circuit 21 is controlled by an XY controller 22 controlled by the controller 19 and operates based on a clock output from the clock generator 20.

  The light beam R whose outgoing direction has been deflected by the deflecting element 12 is incident on the outgoing lens 2, collected on the substrate 105 and irradiated. As described above, the light beam R irradiated onto the substrate 105 is deflected at a constant period and is intensity-modulated according to a pattern drawn on the substrate 105.

  Then, the XY controller 22 drives the moving stage 13 via the servo mechanisms 23, 24, 25, and 26, and as shown by arrows X2 and Y2 in FIG. By performing the moving operation, the substrate 105 and the optical head device are relatively moved.

  In this laser drawing apparatus, when the scanning of the light beam R intensity-modulated by the modulation element 11 on the substrate 105 is completed for one cycle, the substrate 105 is moved by a predetermined amount by the moving stage 13. Then, the light beam R whose intensity is modulated by the modulation element 11 is scanned with respect to the moved substrate 105. The movement of the substrate 105 at this time is such that the region adjacent to the region scanned with the light beam R in the direction perpendicular to the scanning direction of the light beam R on the substrate 105 becomes the region where the light beam R is scanned next. Just moved.

  In this way, by repeatedly scanning the light beam R intensity-modulated by the modulation element 11 on the substrate 105 and moving the substrate 105 by the moving stage 13, an input to the data input device 15 is made on the substrate 105. The predetermined pattern is drawn.

[Embodiment of Pattern Drawing Method]
The pattern drawing method according to the present invention uses the laser drawing apparatus described above to irradiate the substrate 105 with the light beam R that has been intensity-modulated by the modulation element 11 and deflected by the deflection element 12, By repeating the step of moving by a predetermined amount, a predetermined pattern is drawn on the substrate 105.

  This pattern drawing method is executed by inputting data of a predetermined pattern to be drawn into the above-described laser drawing apparatus and operating this laser drawing apparatus.

It is a perspective view which shows the structure in 1st Embodiment of the optical head apparatus based on this invention. It is sectional drawing which shows the structure of the said optical head apparatus. It is a bottom view which shows the structure of the said optical head apparatus. It is sectional drawing which shows the structure of the principal part of the said optical head apparatus. It is a perspective view which shows the structure of the principal part of the said optical head apparatus. It is sectional drawing which shows the structure in 2nd Embodiment of the optical head apparatus based on this invention. It is sectional drawing which shows the structure of the principal part in 3rd Embodiment of the optical head apparatus based on this invention. It is a perspective view which shows the structure in 4th Embodiment of the optical head apparatus based on this invention. It is sectional drawing which shows the 1st example of a structure in 5th Embodiment of the optical head apparatus based on this invention. It is sectional drawing which shows the 2nd example of a structure in 5th Embodiment of the optical head apparatus based on this invention. It is a block diagram which shows the structure of the laser drawing apparatus which concerns on this invention. It is sectional drawing which shows the structure of the conventional optical head apparatus. It is sectional drawing which shows the use condition of the conventional optical head apparatus. It is a bottom view which shows the structure of the conventional optical head apparatus. It is a bottom view which shows the other example of a structure of the conventional optical head apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Laser drawing apparatus, 2 Outgoing lens, 3 Base material part, 5 Light-beam through-hole, 6 Air flow through-hole, 7 Air flow line, 8 Outer frame member, 10 Light source, 11 Modulating element, 12 Deflection element, 13 Moving stage

Claims (5)

A base material portion supported so as to be movable up and down;
An exit lens that emits a light beam downward and irradiates an object with the light beam through the light beam through-hole formed in the base material portion,
A first air flow ejecting means for ejecting a gas downward through an air flow through hole formed in the lower surface portion of the base portion;
A second air flow ejecting means for ejecting gas downward through the light flux through hole;
A high-pressure gas layer is formed between the object and the lower surface portion of the base material portion by the gas injected by the first and second air flow injection means, and the pressure of the gas layer and its own weight Due to the balance, the distance between the object and the lower surface of the base member is maintained at a predetermined constant distance, and the distance between the object and the exit lens is maintained at a predetermined working distance. An optical head device characterized by the above. The optical head device according to claim 1,
The optical head device according to claim 1, wherein the gas ejected by the first and second airflow ejecting means is air. The optical head device according to claim 1 or 2, wherein
The optical head device according to claim 1, wherein the first and second airflow ejecting means are the same airflow ejecting means. An optical head device according to any one of claims 1 to 3, and
A support mechanism for supporting the substrate portion of the optical head device so as to be movable up and down;
Light source means for causing a light beam to enter the exit lens of the optical head;
Modulation means for modulating the intensity of the luminous flux;
Deflection means for deflecting the optical path of the luminous flux;
A support base that supports the object irradiated with the light beam emitted from the exit lens so as to be movable; and
A laser drawing apparatus comprising: Using the laser drawing apparatus according to claim 4,
A step of irradiating an object supported on the support base via the exit lens with a light beam modulated in intensity by the modulation means and deflected by the deflection means; and a predetermined amount of the object by the support base A pattern drawing method characterized in that a predetermined pattern is drawn on the object by repeating the step of moving only the object.

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