JP2005130198A - High frequency equipment - Google Patents

Abstract

A reflected power generated when high-frequency power is supplied is quickly guided to a minimum value so that the high-frequency power can be stably supplied with good reproducibility.
High frequency power supplies 11a, 11b and matching boxes 12a, 12b capable of supplying high frequency power to a load are provided so as to be capable of switching operation. High-frequency reflected power detection means 13a, 13b and a control signal generator 14 are provided between the high-frequency power source and the matching box, and a basic control signal is output from the control signal generator to the high-frequency power source to detect the matching box and the high-frequency reflected power. An external control signal is output to the means with a predetermined time delay. In synchronization with this, the reflected power signal is fed back to the control signal generator, and matching is performed by adjusting the control signal parameter of the external control signal with respect to the temporal variation of the load so that the reflected power signal becomes the minimum value. .
[Selection] Figure 1

Description

  The present invention is a high-frequency apparatus used in a wide range of processes such as etching, chemical vapor deposition, physical vapor deposition, and high-frequency heating that can stably supply high-frequency power from a high-frequency power source with high reproducibility. And those that perform synchronous matching.

  In a conventional high-frequency device, a matching box including a matching variable capacitor and a tuning variable capacitor is provided between a high-frequency power source and a load to which a high-frequency output (for example, 13, 56 MHz) is supplied. Detection means for detecting the input impedance and the phase of the input high-frequency current voltage is provided between the high-frequency power source. Then, the capacitance of the matching variable capacitor is adjusted based on the input impedance detected by the detection means, and the impedance matching is performed by adjusting the capacitance of the tuning variable capacitor based on the phase of the current voltage. In this case, the high frequency output is supplied to the load as a continuous wave, and if the load is constant, the high frequency output is supplied relatively stably.

However, for example, when the load exceeds a certain threshold and time fluctuation occurs, reflected power is generated, and the process performance and reproducibility of the high-frequency device are impaired. It breaks down. For this reason, it is considered that high-frequency power from a high-frequency power source is modulated with a pulse from a change signal generation circuit and is repeatedly turned on and off in a pulse manner. Then, a transient state of power rise (occurrence of reflected power) that occurs when high-frequency power is turned on is detected, and matching is stopped in a time zone in which this transient phenomenon occurs, thereby avoiding a malfunction of the matching box. Whether or not to stop matching at this time is determined based on a signal from a circuit element that takes into account the power rise time immediately after power-on with a time constant determined from a resistor and a capacitor (see Patent Document 1). ).
JP 2000-151329 A (for example, description of claims).

  By the way, the rise time of the power of the high frequency power supply varies greatly depending on the state of the load to which the high frequency power is supplied. For this reason, in the above, the arbitrary rise time of the input power, the followability and durability of the RC circuit with respect to the nonlinearity are problems, and high frequency power cannot be stably supplied to the load with good reproducibility. Also, this does not take into account the reflected power that occurs when the input power falls, but for future high-quality processes such as VLSI manufacturing, the matching operating point shift caused by this fall It is necessary to consider.

  In view of the above, an object of the present invention is to quickly guide the reflected power generated when high-frequency power is turned on to a minimum value so that the high-frequency power can be stably supplied with good reproducibility.

  In order to solve the above-described problems, a high-frequency device according to the present invention includes a high-frequency power source capable of supplying high-frequency power to a load, and a matching box that performs current voltage phase tuning and impedance matching, and is capable of switching operation. A high-frequency reflected power detection means is provided between the high-frequency power source and the matching box, and a pulse-modulated basic control signal is output to the high-frequency power source and a pulse-modulated external control signal is output to the matching box with a predetermined time delay. A high-frequency device provided with a control signal generator for operating a high-frequency power supply and a matching box, respectively, wherein the control signal generator outputs an external control signal to the high-frequency reflected power detector, and the reflected power is synchronized with it. The signal is either a high frequency power supply, a matching box or a control signal generator So as to be fed back to, as the reflected power signal is a minimum value, characterized in that so as to adjust the control parameter of an external control signal for matching with respect to the temporal variation of the load.

  According to the present invention, the control signal parameter of the external control signal with respect to the temporal variation of the load is adjusted according to the reflected power signal generated when the high-frequency power is turned on, and the operation with the high-frequency power source and the matching box is controlled for matching. Therefore, high frequency power can be stably supplied with good reproducibility.

  The control signal parameters may include a repetition frequency of a pulse-modulated external control signal, a duty ratio, a phase of a current voltage, and a gate width of an ON time.

  In this case, it is preferable to correct in advance the time delay component corresponding to the response time delay for the output of each external control signal in consideration of the delay due to the characteristic impedance of each wiring.

  Further, a CPU may be provided in any one of the high frequency power supply, the matching box, and the control signal generator, and the reflected power signal detected by the high frequency reflected power detector may be guided to the minimum value by the CPU.

  When the reflected power signal detected by the high-frequency reflected power detector is guided to the minimum value by the CPU, the reflected power is sequentially or stepwise according to a predetermined criterion, so that the high-frequency power can be stably reproduced with high reproducibility. Can supply.

  When the control signal parameter is adjusted so that the reflected power signal becomes the minimum value, the operation of at least one of the high-frequency power source and the matching box may be feedback-controlled.

  The high-frequency reflected power detector can perform an input time setting process of the elementary signal from the high-frequency reflected power detector or a processing process after the input of the elementary signal inside the control signal generator. It is desirable to be able to detect reflected power based on sampling in an arbitrary period, phase and time width against fluctuations.

  Connect a high-frequency power supply system consisting of a high-frequency power supply, matching box, and high-frequency reflected power to multiple loads, output basic control signals to one of the high-frequency power supplies, and output external control signals to the other Each high frequency power supply system may be controlled by a single control signal generator.

  As described above, the high-frequency device of the present invention has an effect that the generated reflected power can be quickly guided to the minimum value and the high-frequency power can be stably supplied to the load with good reproducibility.

  FIG. 1 shows a high-frequency device 1 of the present invention that generates, for example, an inductively coupled discharge. The high-frequency device 1 includes first and second high-frequency power supplies 11a and 11b that supply high-frequency power to a load 2 via a cable. The first high-frequency power source 11a supplies power for main discharge (antenna) (first high-frequency power supply system S1), and the second high-frequency power source 11b causes ion species generated by the main discharge to enter the substrate. Substrate bias power is supplied (second high-frequency power supply system S2). Matching boxes 12a and 12b having a known structure are provided between the high-frequency power supplies 11a and 11b and the load 2, respectively. The matching boxes 12a and 12b have a matching variable capacitor and a tuning variable capacitor, and perform impedance matching by adjusting the capacitance of the matching variable capacitor and the tuning variable capacitor based on the input impedance and the phase of the input high-frequency current voltage. .

  By the way, as a cause of generation of unstable reflected power due to mismatch at the time of conventional matching, a mismatch between the temporal variation of the load 2 and the operation timing of the high-frequency power supply systems S1 and S2 can be considered. Factors of this mismatch include (1) the difference between the time fluctuation period of the load 2 and the time fluctuation period of the matching operation, and (2) matching due to the fluctuation of the load 2 during one period of time modulation of the high-frequency power 11a, 11b. The phase shift between the set load of the operation target and the actual load 2, and (3) a long time that the actual load 2 with respect to the load set as the target changes with time according to the time fluctuation of the load 2. The matching operation, and (4) the monitoring of reflected power that is not synchronized with the modulation period and phase of the high-frequency power 11a, 11b and the time width or time delay of the high-frequency power supply in the detection of the reflected power. In other words, for the high-frequency power supply systems S1 and S2 that are stable and have good reproducibility while suppressing the reflected power, the period, phase, and time width (hereinafter referred to as “synchronization”) with respect to the temporal variation of the load 2 are considered. Matching and reflected power monitoring is important.

Therefore, in the present embodiment, the high frequency reflected power detectors 13a and 13b are provided between the matching boxes 12a and 12b and the high frequency power supplies 11a and 11b. The high-frequency reflected power detectors 13a and 13b have a voltage detection circuit and a current detection circuit having a known structure. The input impedance and the phase of the input high-frequency current voltage are used to adjust the capacitance of the matching variable capacitor and the tuning variable capacitor. , And the reflected power when the high frequency power is turned on is detected from the phase difference of the voltage and current of the reflected wave reflected by the fluctuation of the load 2. Further, the high frequency device 1 is provided with a control signal generator 14 having a CPU (not shown) provided with each terminal of digital reflected power signal input, and the first high frequency device is provided via the control signal generator 14. A pulse-modulated basic control signal (basic pulse) C10 is output to the power supply 11a, and the period, phase, and time width (gate width of the ON time) with respect to the temporal variation of the load 2 are optimized with respect to the basic pulse C10. The five types of external control signals (delayed pulses) C11, C12, C20, C21, and C22 ( _Cmn ) are output to operate the high frequency power supplies 11a and 11b and the matching boxes 12a and 12b. The high-frequency reflected power detectors 13 a and 13 b are configured to output a reflected power signal in synchronization with the control signal from the control signal generator 14, and the reflected power signal is fed back to the control signal generator 14. It has become. When power for main discharge is supplied from one high-frequency power source 11a by the control signal generator 14, synchronous matching is performed in order to suppress reflected power at both high-frequency power sources 11a and 11b when the power is pulse-modulated. Is called.

Each high-frequency power source 11a, 11b and each matching box 12a, 12b are configured to perform switching operation according to a clock-type basic control signal and an external control signal (including an external trigger) as required. In this case, the switching operation of the high frequency power supplies 11a and 11b and the matching boxes 12a and 12b by the external control signal C _mn corresponds to the time change of the intensity of the basic control signal and the external control signal for the high frequency power supplies 11a and 11b. This means time modulation (pulse modulation) of the high-frequency power value. For matching boxes 12a and 12b, current voltage phase tuning and impedance matching automatic operation when the external control signal strength is below a certain threshold level (or above a certain threshold level, or a combination of a certain signal waveform or a certain clock signal). To stop or start.

In the high-frequency device 1 having the control signal generator 14, the main discharge high-frequency power is supplied to the load 2 by the first high-frequency power supply system S1, and the ion incidence is promoted by the second high-frequency power supply system S2. Supply bias power. In this case, the control signal generator 14 outputs external control signals C12 and C22 to the high-frequency reflected power detectors 13a and 13b, and the reflected power signals D12 and D22 are fed back to the control signal generator 14 in synchronization therewith. Is done. It should be noted that the external control signals C11, C12, C20 for switching from the control signal generator 14 consisting of a set of a plurality of clocks, one clock cycle (t _c ) of the basic element signals constituting the external control signal C _mn , The minimum ON time width (Δt _{on @ Rmn} ) of C21 and C22 and the switching response time (t _{τ @ Rmn} :) of each high frequency power supply 11a, 11b are t _c <t _{τ @ Rmn} << Δt _{on @ Rmn} .

Further, during the ON time ton _{@ Rmn} in the external control signals C11, C12, C20, C21, and C22 from the control signal generator 14, gate signals that are equal to or higher than the threshold level at which the corresponding high frequency power supplies 11a and 11b can be operated. Therefore, during the OFF time (t _{off @ Rmn} ) deviating from t _{on @ Rmn} , the high frequency power supplies 11a, 11b are stopped. When the outputs from the high-frequency reflected power detectors 13a and 13b are used as feedback control signals, in order to avoid oscillation or malfunction in the high-frequency device 1, processing such as synchronization or appropriate delay is applied to the high-frequency power modulation. Based on the sampling (hereinafter referred to as “synchronous sampling”), it is preferable to suppress feedback processing of signals unnecessary for matching.

FIG. 2 shows the relationship between the initial values of the external control signals C11, C12, C20, C21, and C22 output from the control signal generator 14 to the high-frequency power supply systems S1 and S2. Each external control signal C11 from the moment when it is output from the control signal generator 14 to each high frequency power source 11a, 11b is a delay caused by the characteristic impedance of each cable leading from each high frequency power source 11a, 11b to the load 2. , C12, C20, C21, C22 are taken into account in consideration of delays in response time (t _{L @ Rmn} ), and time delay components are corrected in advance for the outputs of the respective external control signals C11, C12, C20, C21, C22. . In this case, the reference square wave signal C10 (period T = ton _{@ R10} + with the gate width t _{on @ R10} = 2 ms (constant) of the ON time and the width t _{off @ R10} = 2 ms (constant) of the OFF time is set. t _{off @ R10} = 4 ms, repetition frequency f = 250 Hz, and duty ratio D = ton _{@ R10} / T = 50%) were used as the fundamental wave trigger.

In this case, load 2 is O.D. An Ar gas atmosphere of 67 Pa was used, the high frequency power for main discharge was set to 800 W from the high frequency power supply system S1, and this was pulse-modulated. Next, from time t = 0, the matching box 12a is feedback-controlled so that the feedback signal D12 of the high-frequency reflected power in the high-frequency power supply system S1 is minimized, and the convergence of the feedback signal D12 to the minimum value ( _ton1 : convergence) Time), the feedback control of the matching box 12b is performed so that the reflected power in the substrate bias high-frequency power supply system S2 is minimized from t = _ton1 . The algorithm for each of the first and second high-frequency power supply systems S1 and S2 by this feedback control basically follows a flowchart of the same elements. Hereinafter, as a representative example will be described an algorithm a feedback signal D12 to the minimum of the reflected power at the high frequency power supply system S1 of a main discharge the time of initial conditions and t = 0 to t _on1 of each external control signal.

In this case, the basic control signal C10, the external control signal C11, respectively t _on the initial gate width of the ON time in _{C12 @ R10 = 2ms, t on} @ R11i = t on @ R10 -t d, t on @ R12i = t on _{@ R11i,} and the operation start times t of the first high-frequency power supply 11a, the matching box 12a, and the high-frequency reflected power detector 13a are t = t ₁₀ + t _{L @ R10} = 0, t = t ₁₁ + t _{L @ R11} = t _d , t = t ₁₂ + t _{L @ R12} = t _d Generally, when glow discharge is pulse-modulated, a transient phenomenon of several μs to several tens μs is observed from the time of applying a pulse voltage. During this transition period, the time change of the load 2 is large, and unstable reflected power is generated in the high-frequency circuit, which is likely to cause oscillation and the like in the feedback control system. For this reason, in this embodiment, a delay time of t _d = 0.1 ms is provided for the outputs of all the external control signals C11 and C12 other than the basic control signal C10 for the purpose of removing this transition period. Further, since the glow discharge shifts to the after glow with the turning off of the basic control signal C10, and the temporal fluctuation of the load 2 starts to occur as in the transition period when the pulse voltage is applied, each external control signal C11. The time when C12 is turned off is synchronized with the basic control signal C10. The external control signals C20, C21, C22 of the second high-frequency power supply system S2 at t < _ton1 are considered in consideration of the matching transition period in the first high-frequency power supply system S1 with respect to the inductively coupled discharge. For the purpose of stopping the operation of the second high-frequency power supply system S2, the entire operation is stopped. Synchronous matching was started under these initial conditions, and the gate widths of the ON times of the external control signals C11 and C12 were sequentially adjusted to suppress reflected power.

Next, the principle of suppressing the reflected power by defining variables such as the gate width of the ON time of the external control signal and the reflected power detected by the synchronous sampling will be described. FIG. 3A shows an outline when the gate width of the ON time and the initial value of the gate width are divided into N as initial conditions of the external control signals C11 and C12. The larger the division number N, the more advantageous for delicate control of reflected power suppression. However, the response time of the high frequency power supplies 11a and 11b, the matching boxes 12a and 12b, and the high frequency reflected power detectors 13a and 13b and the convergence time td of the feedback signal. It is necessary to consider. In this embodiment, t == 0.1 ms and N = 19. In this case, the width of each minimum ON time is sequentially adjusted external control signals C11, C12 is _{(t on @ R10 -t d)} /N=0.1ms (≡ △), for each element of their time width As shown in FIG. 3 (a), numbers are assigned sequentially. Further, the gate width of the continuous ON time composed of the elements of the external control signals C11 and C12 (i: element number when the gate signal is applied, k: element number when the gate signal is cut off) is set to t _on , respectively. _{@ R11} (i, k), ton _{@ R12} (i, k), and the average reflected power P _r (i, k) is detected by synchronous sampling within the ON time, and the signal D12 (i, k) Was fed back to the control signal generator 14 incorporating the operator for determining the reflected power.

FIG. 3B shows a reset state of the ON time for the external control signals C11 and C12 determined by the initial determination algorithm for suppressing the reflected power from FIG. Then, the convergence to the condition of the control signal (i = 9 and k = 12, see FIG. 3 (c)) where the reflected power is finally minimized will be described from FIG. 3 (a). That is, when investigating P _r (2, 19) and P _r (1, 18) as comparison data for the average reflected power P _r (1, 19) shown in FIG. _{3 (a), P r (} 2 Among them 19) was the smallest. Therefore, the ON times of the external control signals C11 and C12 for the next synchronization matching are changed to t _{on @ R11} (2, 19) and t _{on @ R12} (2, 19), respectively (FIG. 3 (b )reference). Then, as in the case of FIG. 3A, the reference data P _r (3, 19) and P _r (2, 18) for P _r (2, 19) in FIG. The minimum reflected power was detected. As a result, since the minimum value was P _r (3, 19), the ON time of the subsequent synchronization matching was reset to t _{on @ R12} (3, 19) and t _{on @ R11} (3, 19).

Then, P _r (i, k), P _r (i + 1) at the ON times t _{on @ R11} (i, k) and t _{on @ R12} (i, k) of the external control signals C11 and C12 at a certain time point. , k) and P _r (i, k−1), and when P _r (i + 1, k) is the minimum value, the _on- time of the next synchronization matching is determined as t _{on @ R11} If (i + 1, k) and t _{on @ R12} (i + 1, k), or P _r (i, k−1) is minimum, the ON time of the synchronous matching immediately after that is set to t _{on @ R11} ( i, k−1) and ton _{@ R12} (i, k−1). As long as the average reflected power is suppressed by changing to a combination of differences that shortens the ON time of synchronous matching, the comparison reflected power of the combination that also shortens the ON time is sampled and detected as soon as possible. (Or conversely, when the reflected power is suppressed for a difference in which the ON time increases, immediately after that, a sampling measurement of the combined reflected power for determining the ON time is added).

By the way, when the reflected power before the change becomes the minimum before and after the change of the ON time of the synchronous matching, the gate width of the synchronous matching is rearranged into a combination in which the sign of the difference of the ON time is changed thereafter. As a result, FIG. 3B shows the ON times of the external control signals C11 and C12 for the third synchronization matching first by a series of reflected power suppression determination algorithms starting from that of FIG. 3A. FIG. 3C shows the condition when the external control signals C11 and C12 that minimize the reflected power of the synchronous matching converge. Next, the time difference of the time that appeared for the third time in FIG. 3C from the time in FIG. 3A was _defined as t _{on1 as} the convergence time of the synchronous matching in the high-frequency power supply system S1. FIG. 4A and FIG. 4 show the measurement results of the supply power for main discharge (power consumed by the Ar discharge load 2) and the reflected power from the load 2 when the synchronous matching in FIG. Shown in (b). Thereby, it can be seen that the average reflected power is suppressed to 8 W or less and the temporal fluctuation component of the reflected power caused by the pulse modulation is suppressed to ± 3 W or less.

  Further, FIG. 5 shows an example of synchronous matching similar to that shown in FIG. 4 under the condition of repetition frequency f = 1 KHz and N = 4. At this time, in the control signals i = 4 and k = 4 to the matching box 12a, it was found that the reflected power was suppressed to 18W ± 7W when the input power was 700W. FIGS. 4 and 5 also show the detection results when the matching box is operated without performing synchronous matching. Thereby, it was confirmed that the effect of the synchronous matching in the pulse modulation is drastically improved.

Next, initial conditions of ON time for each gate signal C2n for synchronous matching in the second high-frequency power supply system S2 are shown as t _on1 ≦ t ≦ t _on1 + T in FIG. In this case, the high-frequency power supply 11b initially set to the power P _RF2 = 20 W at the ON time _rises after a delay time of t _d avoiding the transition period immediately after the operation of the high-frequency power supply 11a by the gate signal C20 in the figure, and thereafter The condition was such that the signal falls in synchronization with the high-frequency power supply 11a after a certain ON time t _{on @ R20} (= ton _{@ R10−} t _d ). Further, for each high-frequency reflected power detector 13a, 13b, when t> _ton1 , the high-frequency reflected power in the first high-frequency power supply system S1 is suppressed, and the synchronous matching is stable. T _{on @ R22i} = ton _{@ R21i} = ton _{@ R12} as the initial value of the control signals C21 and C22 for synchronous matching of the second high-frequency power supply system S2. The subsequent synchronous matching flowchart for the second high-frequency power supply system S2 is substantially the same as that of the first high-frequency power supply system S1 described above.

  As a result, the reflected power in the second high-frequency power supply system S2 quickly converges to the minimum value as compared with the first high-frequency power supply system S1, the average reflected power value is 3 W or less, and the time-varying component of the reflected power Was confirmed to be ± 2 W or less.

The above is an example of synchronous matching for time-modulated high-frequency power supply systems S1 and S2. As a comparative example, control signals C10 and C20 for comparison were set in the same manner as t ≧ _{ton1 in} FIG. 2, and the external control signals C11, C12, C21 and C22 were all operated as a continuous wave. In this case, in the first high-frequency power supply system S1 (see FIG. 4) and the second high-frequency power supply system S2, unstable reflected power is generated, and there is a sign of convergence in the operation of each matching box. For example, the main discharge maintained by the high-frequency power supply by the first high-frequency power supply system S1 is frequently stopped temporarily (in this case, the first and second high-frequency power supply systems S1 and S2 Matching did not converge.

 In the above embodiment, the synchronous matching for the two high-frequency power supply systems S1 and S2 in which the main discharge is inductively coupled has been described. However, the present invention is not limited to this, and at least the repetition in this system is repeated. Even when the frequency is increased to f = 1 KHz, stable operation in which reflected power is suppressed is realized, and the inductively coupled discharge exceeding 1 KHz or a combination of the main discharge that does not close to the inductively coupled type is a capacitively coupled type, or Application of the present invention to a complex high-frequency power drive system in which not only one system but also two or more systems are arbitrarily combined is effective for various power supply systems such as VHF and microwave frequency bands that are not limited to RF frequencies. is there.

  In addition, as an application example of the present invention, the external control signal group for matching on the substrate bias side arbitrarily set for the main discharge is limited to, for example, only the after glow region of the main discharge, or in one cycle of the main discharge. The operation timing of the main discharge is thinned out from an arbitrary time of the ON time to a time of afterglow or at a low repetition frequency different from the repetition frequency of the main discharge, or within the ON time in one period of the main discharge New substrate bias methods that could not be achieved with conventional technology can be realized by complex combination with high repetition rate and various other patterns including these, reactive ion etching, radical etching, chemical vapor phase It is possible to propose completely new process methods that have not been developed so far in a wide range of fields such as deposition or physical vapor deposition and high-frequency heating. That.

The figure which shows schematically the high frequency apparatus of this invention provided with the control signal generator. The figure explaining the mutual relationship of each external control signal. (A) thru | or (c) is a figure explaining the relationship from the matching start of the matching of the minimum of reflected power to the matching convergence of ON time of a high frequency electric power supply system. (A) And (b) is a graph which shows the time change of the reflected electric power sampled and measured about every 0.1 second in the conditions where the synchronous matching converged. (A) And (b) is a graph which shows the characteristic when matched in the synchronous and asynchronous state in the repetition frequency of 1 KHz.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 High frequency apparatus 11a, 11b High frequency power supply 12a, 12b Matching box 13a, 13b High frequency reflected power detector 14 Control signal generator 2 Load S1, S2 High frequency power supply system

Claims (8)

A high-frequency power source capable of supplying high-frequency power to the load and a matching box for tuning the phase of current voltage and matching impedance can be switched, and a high-frequency reflected power detection means is provided between the high-frequency power source and the matching box. In addition to providing a control signal generator that outputs a pulse-modulated basic control signal to the high-frequency power source and outputs a pulse-modulated external control signal with a predetermined time delay to the matching box to operate the high-frequency power source and the matching box, respectively. A high frequency device,
The control signal generator outputs an external control signal to the high frequency reflected power detector, and the reflected power signal is fed back to any one of the high frequency power source, the matching box, and the control signal generator in synchronization with the external control signal. A high-frequency device characterized in that matching is performed by adjusting a control signal parameter of an external control signal with respect to temporal variation of a load so that the reflected power signal becomes a minimum value. 2. The high-frequency device according to claim 1, wherein the control signal parameters include a repetition frequency of a pulse-modulated external control signal, a duty ratio, a phase of a current voltage, and a gate width of an ON time. 3. The high frequency device according to claim 1, wherein a time delay component corresponding to a response time delay is corrected in advance for the output of each external control signal. A CPU is provided in any one of the high-frequency power supply, the matching box, and the control signal generator, and the reflected power signal detected by the high-frequency reflected power detector is guided to a minimum value by the CPU. Item 4. The high-frequency device according to any one of Items 3 to 4. 5. The high frequency apparatus according to claim 4, wherein when the reflected power signal detected by the high frequency reflected power detector is guided to a minimum value by the CPU, the reflected power is sequentially or stepwise according to a predetermined criterion. The feedback control is performed on at least one of the high-frequency power supply and the matching box when the control signal parameter is adjusted so that the reflected power signal becomes a minimum value. High frequency equipment. The high-frequency reflected power detector can perform an input time setting process of the elementary signal from the high-frequency reflected power detector or a processing process after the input of the elementary signal inside the control signal generator, and the time variation of the load can be reduced. On the other hand, the high-frequency device according to any one of claims 1 to 6, wherein reflected power can be detected based on sampling in an arbitrary period, phase, and gate width of an ON time. Connect a high-frequency power supply system consisting of a high-frequency power supply, matching box, and high-frequency reflected power to multiple loads, output basic control signals to one of the high-frequency power supplies, and output external control signals to the other 8. The high frequency device according to claim 1, wherein each high frequency power supply system is controlled by a single control signal generator.

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