JP2005119139A - Method and apparatus for measuring the ejection amount of a functional liquid droplet ejection head, drive control method for functional liquid droplet ejection head, liquid droplet ejection apparatus, electro-optical device manufacturing method, electro-optical device, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and apparatus for measuring a discharge amount of a functional droplet discharge head capable of obtaining a highly reliable measurement result of a discharge amount of a very small amount of a functional droplet discharged from each nozzle of the functional droplet discharge head. Etc. to be provided.
A discharge amount measuring device 5 of a functional liquid droplet discharge head 16 for measuring a discharge amount of a functional liquid droplet discharged from each nozzle 65, and a discharge drive connected to each nozzle 65 of the functional liquid droplet discharge head 16. Control means 8 for controlling the drive waveform to the element 61, imaging means 102 for imaging the functional droplet landed on the inspection substrate 112 that has been surface-treated so that the landed functional droplet has a predetermined contact angle, and imaging Image analysis means for analyzing the diameter of the functional liquid droplet using the two-dimensional image of the functional liquid droplet and a calculation means for calculating the volume of the functional liquid droplet based on a predetermined contact angle and the diameter of the functional liquid droplet And.
[Selection] Figure 8

Description

  The present invention relates to a method and apparatus for measuring a discharge amount of a functional droplet discharge head for measuring the discharge amount of a functional droplet discharged from each nozzle of the functional droplet discharge head, a drive control method for the functional droplet discharge head, a liquid The present invention relates to a droplet discharge device, an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

As a conventional technique, functional droplets are discharged from each nozzle of a functional droplet discharge head typified by an inkjet head to a petri dish having a shallow recess with a predetermined depth, and the petri dish is covered with a cover glass. The size of the vertical direction is restricted to the predetermined depth so as to crush the functional droplet, and the area of spread of the functional droplet in the horizontal plane is measured by image processing. Based on the predetermined depth and area A discharge amount measuring method of a functional droplet discharge head that measures the volume of a functional droplet is known (for example, see Patent Document 1).
JP 2001-41799 A

  In such a conventional method for measuring the ejection amount of a functional liquid droplet ejection head, the amount of functional liquid droplets ejected from each nozzle of the functional liquid droplet ejection head is extremely small (about several picoliters). It is necessary to finish the dish recesses and the cover glass with high precision, but it is difficult to process the flatness of the bottom part of the dish and the cover glass with the flatness and the parallelism of both, and the measurement results may not be reliable. It was.

  The present invention relates to a method for measuring the ejection amount of a functional liquid droplet ejection head capable of obtaining a highly reliable measurement result for the ejection amount of a very small amount of functional liquid droplets ejected from each nozzle of the functional liquid droplet ejection head, and its It is an object to provide a device, a drive control method for a functional liquid droplet ejection head, a liquid droplet ejection apparatus, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  The method for measuring the discharge amount of the functional liquid droplet ejection head according to the present invention is such that each of the functional liquid droplets is ejected from a large number of nozzles on a test substrate that has been surface-treated so that the landed functional liquid droplets have a predetermined contact angle. A method for measuring a discharge amount of a functional droplet discharge head for discharging a droplet and measuring a discharge amount of a functional droplet discharged from each nozzle, wherein the functional droplet is discharged from each nozzle onto a test substrate and is substantially hemispherical. An ejection process for landing to make an image, an imaging process for imaging the functional liquid droplet on the inspection substrate, an image analysis process for analyzing the diameter of the functional liquid droplet using a two-dimensional image of the captured functional liquid droplet, And a calculation step of calculating a volume of the functional droplet based on a predetermined contact angle and a diameter of the functional droplet.

  In addition, the apparatus for measuring the discharge amount of a functional liquid droplet ejection head according to the present invention includes a plurality of nozzles of the functional liquid droplet ejection head on a test substrate that is surface-treated so that the landed functional liquid droplets have a predetermined contact angle. A functional liquid droplet ejection head for ejecting functional liquid droplets so as to form a substantially hemisphere and measuring a functional liquid droplet ejection volume ejected from each nozzle. The control means for controlling the drive waveform to the ejection drive element connected to each nozzle of the nozzle, the imaging means for imaging the functional droplet landed on the inspection substrate, and the function using the two-dimensional image of the captured functional droplet Image analyzing means for analyzing the diameter of the droplet and calculation means for calculating the volume of the functional droplet based on a predetermined contact angle and the diameter of the functional droplet are provided.

According to these configurations, the test substrate on which the functional liquid droplets land is subjected to surface treatment so that the landed functional liquid droplet has a predetermined contact angle, and forms a substantially hemisphere on the test substrate. The functional droplet diameter is analyzed by image processing, and the volume of the functional droplet is determined as the volume of the spherical crown based on the predetermined contact angle and the diameter of the functional droplet. Can be accurately measured.
As the inspection substrate, for example, a glass substrate, a plastic substrate, a metal substrate or the like subjected to surface treatment such as ultraviolet / ozone cleaning or plasma cleaning can be used.
In addition, the substantially hemisphere is a hemisphere, ie, a shape having a contact angle φ of 90 ° with respect to the inspection substrate, or a shape having a spherical crown, ie, a contact angle φ of 0 ° <φ <90 ° and 90 ° <φ <180 °, In addition, it is a concept including a shape that approximates a hemisphere or a crown.

  In the method for measuring the ejection amount of the functional liquid droplet ejection head, imaging of the functional liquid droplet in the imaging process is preferably performed in units of one or a plurality of functional liquid droplets for a large number of functional liquid droplets for a large number of nozzles. .

  In the apparatus for measuring a discharge amount of the functional liquid droplet ejection head, the imaging unit preferably images a large number of functional liquid droplets for a large number of nozzles in units of one or a plurality of functional liquid droplets.

  According to these configurations, when all of a large number of functional droplets for each of a large number of nozzles are imaged, an image analysis degree (resolution) sufficient to analyze the diameter of each functional droplet by image processing cannot be obtained. Even in such a case, it is possible to obtain a sufficient degree of image analysis for each functional liquid droplet by dividing the large number of functional liquid droplets into one or a plurality of functional liquid droplet units.

  In the method for measuring the discharge amount of the functional liquid droplet ejection head, the functional liquid droplets are ejected in units of one or a plurality of nozzles corresponding to one or a plurality of functional liquid droplet units. The imaging in the imaging process is preferably performed so that the time from each ejection to each imaging is the same.

  In the above-described functional liquid droplet ejection head ejection amount measuring apparatus, the control unit controls the functional liquid droplet ejection head to function liquid in units of one or a plurality of nozzles corresponding to one or a plurality of functional liquid droplet units. It is preferable that the droplets are ejected, and the imaging unit performs each imaging so that the time from each ejection to each imaging is the same.

  According to these configurations, by performing each imaging so that the time from each ejection to each imaging is the same, each function droplet is vaporized from each ejection to each imaging. The amount of solvent used can be made uniform. For this reason, there is no influence on the measurement accuracy due to the evaporation of the solvent from the functional droplets, and the relative discharge amount of the functional droplets between the nozzles can be accurately measured.

  The drive control method for a functional liquid droplet ejection head according to the present invention includes the steps of the method for measuring the ejection amount of the functional liquid droplet ejection head described above, and ejects functional liquid droplets from the nozzles of the functional liquid droplet ejection head to the workpiece. This is a drive control method for a functional droplet ejection head in a droplet ejection device, and based on the calculated volume of the functional droplet, the ejection volume of the functional droplet ejected onto the workpiece is made uniform among many nozzles. As described above, a control process for controlling the drive waveform to the ejection drive element connected to each nozzle is provided.

  According to this configuration, by controlling the driving of the functional droplet discharge head based on the discharge amount from each nozzle measured by the reliable discharge amount measuring method of the functional droplet discharge head, the functional droplet discharge head is discharged onto the workpiece. The amount of functional droplets discharged can be made uniform evenly among a large number of nozzles.

  In this case, it is preferable to further include a preliminary discharge step of preliminarily discharging the functional liquid droplets from each nozzle at a position different from the discharge position in the discharge step prior to the discharge step.

According to this configuration, in the droplet discharge device, the preliminary discharge was performed in the same manner as the preliminary discharge from each nozzle of the functional droplet discharge head before the functional droplet was discharged to the workpiece. It is possible to measure the ejection amount from each nozzle for the subsequent functional liquid droplet ejection head, and to control the driving of the functional liquid droplet ejection head based on the measurement result. That is, it is possible to obtain a functional droplet that becomes a measurement sample (imaging target) under the same conditions as the functional droplet that is actually ejected onto the workpiece.
In addition, as a method of preliminary discharge, a method of discharging onto a test substrate and a method of discharging to a flushing box for receiving the pre-discharged functional liquid droplets are conceivable.

  The droplet discharge device of the present invention includes the above-described discharge amount measuring device for the functional droplet discharge head, and relatively moves the functional droplet discharge head in the main scanning direction and the sub-scanning direction orthogonal to the workpiece, A liquid droplet ejection apparatus that ejects functional liquid droplets from each nozzle to form a film forming unit on a work, wherein the control means is a functional liquid that is ejected to the work based on the calculated volume of the functional liquid droplets. The functional droplet discharge head is controlled so that the droplet discharge amount is made uniform among a large number of nozzles.

  According to this configuration, the apparatus has a highly reliable functional liquid droplet ejection head ejection amount measuring device, and by controlling the driving of the functional liquid droplet ejection head based on the ejection amount from each nozzle measured thereby, The discharge amount of the functional liquid droplets discharged onto the work can be made uniform accurately among a large number of nozzles.

  In this case, the X-axis table for moving the work placed on the work table in the main scanning direction, the Y-axis table for moving the functional liquid droplet ejection head in the sub-scanning direction, and the functional recovery of the functional liquid droplet ejection head are performed. A maintenance unit, and a maintenance system moving table on which each means of the maintenance unit is movably mounted so that each means constituting the maintenance unit faces the movement path of the functional liquid droplet ejection head by the Y-axis table. The inspection board is mounted on a maintenance system moving table, and the imaging means is preferably arranged on the movement path of the inspection board by the maintenance system movement table.

  According to this configuration, the inspection substrate mounted thereon can be made to face the imaging means by the maintenance system moving table. For this reason, it is not necessary to provide a moving means for causing the inspection substrate on which the functional liquid droplets have landed to face the imaging means in addition to the maintenance system moving table, so that the entire apparatus configuration can be simplified.

  In this case, the maintenance unit has a flushing box that receives the functional liquid droplets ejected from the functional liquid droplet ejection head, and the control means controls the functional liquid droplet ejection head to eject the functional liquid droplets onto the inspection substrate. Prior to discharging, it is preferable to preliminarily discharge the functional liquid droplets from each nozzle to the flushing box a plurality of times.

  According to this configuration, the function after the preliminary ejection to the flushing box is performed in the same manner as the preliminary ejection from each nozzle of the functional liquid droplet ejection head before the functional droplet ejection to the workpiece. It is possible to measure the discharge amount from each nozzle for the droplet discharge head, and to control the driving of the functional droplet discharge head based on the measurement result. That is, it is possible to obtain a functional droplet that becomes a measurement sample (imaging target) under the same conditions as the functional droplet that is actually ejected onto the workpiece. In addition, the preliminary ejection is performed on the flushing box, so that the inspection substrate is not wasted.

  Further, in this case, with respect to the functional liquid droplet ejection head, an X axis table for moving the work placed on the work table in the main scanning direction, a Y axis table for moving the functional liquid droplet ejection head in the sub scanning direction, It is preferable that the work table is configured to be capable of mounting the inspection board.

  According to this configuration, in addition to the X-axis table for moving the work table, there is no need to provide a moving means for moving the functional liquid droplet ejection head between the inspection substrate and the work. The apparatus configuration can be simplified.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets on a workpiece.

  According to these configurations, since it is manufactured using a droplet discharge device that can accurately equalize the discharge amount of functional droplets discharged from each nozzle to a workpiece among a large number of nozzles, It is possible to manufacture a high electro-optical device. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  According to the method and apparatus for measuring the ejection amount of a functional liquid droplet ejection head according to the present invention, a highly reliable measurement result is obtained for the ejection amount of a very small amount of functional liquid droplets ejected from each nozzle of the functional liquid droplet ejection head. Can be obtained.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view schematically showing a droplet discharge device 1 to which the present invention is applied. Although details will be described later, the droplet discharge device 1 introduces a functional liquid such as special ink or a light-emitting resin liquid into the functional droplet discharge head 16, and uses functional droplets on a workpiece W such as a substrate. A film forming unit is formed.

  The droplet discharge device 1 includes a machine base 2, a drawing device 3 that is widely placed on the whole area of the machine base 2, and a head function recovery device 4 (maintenance unit) in which a main unit is installed at an end on the machine base 2. Unit), a discharge amount measuring device 5 installed adjacent to the head function recovery device 4, and the inspection substrate 112 of the head function recovery device 4 and the discharge amount measurement device 5 are placed together and placed on the machine base 2. And a maintenance system moving table 6 to be moved, and the function recovery process (maintenance) of the functional droplet discharge head 16 is periodically performed by the head function recovery device 4, and the functional droplet discharge head by the discharge amount measuring device 5. 16 is measured, and the measurement result is fed back to adjust the discharge amount of the functional liquid droplet discharge head 16, and then the drawing device 3 performs drawing with functional liquid droplets on the workpiece W. Further, although not shown in FIG. 1, the liquid droplet ejection apparatus 1 includes a functional liquid supply mechanism 7 (see FIG. 3) including a liquid supply tank that supplies functional liquid to each functional liquid droplet ejection head 16. A control device 8 (see FIG. 9) and the like for integrated control of the constituent devices such as the drawing device 3 and the discharge amount measuring device 5 are incorporated.

  The drawing apparatus 3 includes an X / Y axis moving mechanism 11 including an X axis table 12 and a Y axis table 13 orthogonal to the X axis table 12, a main carriage 14 movably attached to the Y axis table 13, and a main carriage 14. The head unit 15 is provided vertically. A functional liquid droplet ejection head 16 is mounted on the head unit 15 via a sub-carriage (not shown). In this case, the workpiece W, which is a substrate, is mounted on the X-axis table 12 by a pair of workpiece recognition cameras (not shown) facing the end of the X-axis table 12. Further, the functional liquid droplet ejection head 16 is disposed at a predetermined angle with respect to the sub-scanning direction (Y-axis direction) in order to ensure a sufficient application density of functional liquid droplets with respect to the workpiece W. In addition, although one functional liquid droplet ejection head 16 is mounted on the illustrated head unit 15, a plurality of functional liquid droplet ejection heads may be provided.

  The X-axis table 12 has a motor-driven X-axis slider 21 that constitutes a drive system in the X-axis direction, and a work table 22 including a suction table 23 on which a work W is suction-mounted and a work θ-axis table 24 is provided. It is mounted and configured to move freely. Similarly, the Y-axis table 13 has a motor-driven Y-axis slider (not shown) constituting a drive system in the Y-axis direction, and the main carriage 14 can be freely moved through the head θ-axis table 31. It is mounted and configured.

  In this case, the X-axis table 12 is directly supported on the machine base 2, while the Y-axis table 13 is supported by left and right support columns 32, 32 erected on the machine base 2. The X axis table 12 and the maintenance system moving table 6 are arranged in parallel with each other in the X axis direction, and the Y axis table 13 extends so as to straddle the X axis table 12 and the maintenance system moving table 6. doing.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 with a drawing area 41 positioned immediately above the X-axis table 12 and a function recovery measurement area 42 positioned directly above the maintenance system moving table 6. Move appropriately between each other. That is, when drawing on the workpiece W introduced into the X-axis table 12, the Y-axis table 13 causes the head unit 15 to face the drawing area 41, and restores the function recovery and discharge amount of the functional droplet discharge head 16. When performing measurement, the head unit 15 is allowed to face the function recovery measurement area 42.

  On the other hand, one end of the X-axis table 12 is a moving area for setting (replacement) the workpiece W on the X-axis table 12, and the pair of workpiece recognition cameras are arranged in this moving area. It is installed. Then, two reference marks of the workpiece W supplied onto the suction table 23 are simultaneously recognized by the pair of workpiece recognition cameras, and the workpiece W is aligned based on the recognition result.

  As shown in FIG. 2, the functional liquid droplet ejection head 16 has a so-called double structure, and includes a functional liquid introduction part 51 having two connection needles 52 and 52, and two series of functional liquid introduction parts 51 connected to the functional liquid introduction part 51. A head substrate 53 and a head main body 54 which is connected to the lower side of the functional liquid introduction portion 51 (upper side in FIG. 5A) and in which an in-head flow path filled with the functional liquid is formed. Each connection needle 52 is connected to a functional liquid supply mechanism 7 (a liquid supply tank) for storing the functional liquid via a piping adapter (not shown), and the functional liquid introduction unit 51 functions from each connection needle 52. It is designed to receive liquid supply. The head main body 54 includes a nozzle plate 62 having a nozzle surface 63 in which two pump units 61 (discharge driving elements) constituted by piezoelectric elements and the like and two nozzle rows 64 and 64 are formed in parallel to each other. And have. Each nozzle row 64 is configured by arranging a large number (180) of nozzles 65 at an equal pitch.

  The head substrate 53 is provided with two connectors 66, 66, and each connector 66 is connected to the head driver 211 (see FIG. 9) of the control device 8 via a flexible flat cable (not shown). ing. The drive waveform output from the head driver 211 is applied to each pump unit 61 via each connector 66, whereby the functional liquid is discharged from each nozzle 65. In this way, the drive of the functional liquid droplet ejection head 16 is controlled by the control device 8.

  Here, with reference to FIG. 1, the discharge operation | movement to the workpiece | work W by the drawing apparatus 3, ie, a drawing operation | movement, is demonstrated easily. First, as preparation before discharging functional droplets, the position correction of the workpiece W set on the suction table 23 is performed by correcting the position in the X-axis direction by the X-axis table 12 and the position in the θ-axis direction by the workpiece θ-axis table 24. In addition to correction, position correction of the head unit 15 set on the main carriage 14 is performed by position correction in the Y-axis direction by the Y-axis table 13 and position correction in the θ-axis direction by the head θ-axis table 31.

Next, the work W is reciprocated in the main scanning direction (X-axis direction) by the X-axis table 12, and the functional liquid droplet ejection head 16 is selectively driven in synchronism with this so that the functional liquid with respect to the work W is discharged. Discharging is performed. Then, after the work W is moved backward, the head unit 15 is moved in the sub-scanning direction (Y-axis direction) by the Y-axis table 13, and the reciprocating movement of the work W in the main scanning direction and the functional liquid droplet ejection head 16 are performed again. Is driven. Then, by repeating this a plurality of times, drawing is performed from end to end of the workpiece W.
In the droplet discharge device 1 of the present embodiment, the drawing operation is performed with the movement of the workpiece W in the X-axis direction as main scanning and the movement of the head unit 15 in the Y-axis direction as sub-scanning. The unit 15 may be moved in the main scanning direction. Alternatively, the work W may be fixed and the head unit 15 may be moved in the X-axis direction and the Y-axis direction.

  As shown in FIGS. 1 and 3, the head function recovery device 4 includes a flushing unit 71 disposed on the work table 22 and a suction unit 72 placed adjacent to each other on the maintenance system moving table 6. And a wiping unit 73.

  In the flushing unit 71, when the drawing device 3 performs a drawing operation, if a considerable time has passed since the previous drawing operation, the functional liquid in the nozzle 65 thickens due to drying, and the nozzle clogging or small diameter is caused. This is for performing functional liquid drop flushing (disposal discharge) immediately before the discharge onto the workpiece W because there is a risk of discharge failure such as the discharge of the functional liquid droplets. The flushing unit 71 has a pair of flushing boxes 76, 76 in which a liquid absorbent material is laid. The pair of flushing boxes 76, 76 moves the suction table 23 of the work table 22 to the X axis. It is arranged so as to be sandwiched in the direction. That is, the pair of flushing boxes 76 and 76 are moved together with the work table 22 (work W) by the X-axis table 12.

  In the drawing operation on the workpiece W described above, when the flushing unit 71 moves forward together with the workpiece table 22 on which the workpiece W is set, the upper flushing box 76 shown in the drawing first passes directly below the head unit 15. . At this time, the functional liquid droplet ejection head 16 performs flushing of a large number of functional liquid droplets, and the functional liquid droplet ejection head 16 proceeds to a normal liquid droplet ejection operation as it is. Similarly, when the flushing unit 71 moves backward, the lower flushing box 76 in the drawing first passes directly under the head unit 15. At this time, the functional liquid droplet ejection head 16 performs flushing, and the functional liquid droplet ejection head 16 proceeds to a normal liquid droplet ejection operation as it is. Thus, nozzle clogging or the like of the nozzle 65 can be prevented by appropriately performing flushing during the reciprocating motion for main scanning.

The suction unit 72 seals and stores the nozzle surface 63 of the functional liquid droplet ejection head 16, and forcibly sucks the functional liquid from the functional liquid droplet ejection head 16, and the nozzles of the functional liquid droplet ejection head 16. 65 is subjected to flushing of functional droplets from 65. That is, the suction unit 72 is provided with a cap 77 that is positioned corresponding to the functional liquid droplet ejection head 16 and in which a liquid absorbing material is laid on the bottom portion so as to be movable up and down. The cap 77 is raised, the nozzle surface 63 is sealed, and the functional liquid droplet ejection head 16 is stored. Further, when the functional liquid droplet ejection head 16 is filled with the functional liquid or when the functional liquid thickened in the functional liquid droplet ejection head is removed, the cap 77 is placed on the nozzle surface 63 of the functional liquid droplet ejection head 16. Adhere it closely and perform pump suction. Further, when the discharge of the functional liquid to the workpiece W is temporarily stopped, such as when the workpiece W is replaced, the cap 77 is used as a flushing box, and the flushing is performed with the cap 77 being slightly separated from the functional droplet discharge head 16. Do. Thereby, nozzle clogging is prevented or functional recovery of the functional liquid droplet ejection head 16 in which nozzle clogging occurs is achieved.
As described above, the flushing is periodically performed on the cap 77 before the discharge is performed on the flushing box 76 immediately before the functional liquid is discharged onto the workpiece W, and when the discharge of the functional liquid is stopped. And regular flushing.

  The wiping unit 73 includes a sheet supply unit 78 and a wiping unit 79, and a wiping sheet 80 is provided so that it can be fed out and wound up. The sheet supply unit 78 and the wiping unit 79 are arranged on the maintenance system moving table 6 side by side in the X-axis direction with the wiping unit 79 positioned on the suction unit 72 side. The wiping unit 79 moves to one of the wiping directions in the X-axis direction (upward in FIG. 1, rightward in FIG. 3) integrally with the sheet supply unit 78 by the movement of the maintenance system moving table 6 toward the head unit 15 located at 42. The nozzle surface 63 of the functional liquid droplet ejection head 16 of the head unit 15 is wiped off. The wiping operation of the wiping unit 73 is mainly for wiping the dirty nozzle surface 63 by the suction operation of the suction unit 72. After the functional liquid droplet ejection head 16 faces the suction unit 72, It will face the wiping unit 73.

  The maintenance system moving table 6 is configured so that the various units of the head function recovery device 4 face the above-described function recovery measurement area 42, that is, the movement path (movement axis) of the functional liquid droplet ejection head 16 by the Y-axis table 13. The function recovery device 4 is movably mounted. The maintenance system moving table 6 extends in the longitudinal direction (X-axis direction) of the main body 2, and has a common base 91 on which various units of the head function recovery device 4 are placed in a distributed manner, and a common base 91. A pair of guide rails 92, 92 slidably supported, a ball screw (not shown) disposed between the pair of guide rails 92, 92, and an X-axis motor 93 that rotates the ball screw forward and backward. ing. Although not shown, the X-axis motor 93 is connected to the end of the ball screw via a coupling, and the common base 91 is screwed to the ball screw via a female screw top. As a result, when the X-axis motor rotates forward and backward, the common base 91 advances and retracts in the X-axis direction via the ball screw. In this way, the various units of the head function recovery device 4 that are distributed and placed on the common base 91 can be moved to the function recovery measurement area 42.

  When functional recovery of the functional liquid droplet ejection head 16 is performed, the suction unit 72 is moved to the functional recovery measurement area 42 by the maintenance system moving table 6 and the head unit 15 is functionally recovered by the Y-axis table 13 as described above. It moves to the measurement area 42 and performs regular flushing of the functional liquid droplet ejection head 16 or pump suction. Further, when pump suction is performed, the wiping unit 73 is moved to the function recovery measurement area 42 by the maintenance system moving table 6 and the functional liquid droplet ejection head 16 is wiped.

On the other hand, the droplet discharge device 1 images the functional droplets discharged from the nozzles 65 of the functional droplet discharge head 16 on the inspection substrate 112 by the discharge amount measuring device 5, and mainly before starting the drawing operation. The volume (discharge amount) of functional droplets discharged from each nozzle 65 is measured. Based on the measurement result, the ejection amount of the functional liquid droplets from the nozzles 65 to the work W in the drawing operation is controlled (corrected).
The discharge amount measuring device 5 measures the volume of the functional liquid droplet when the functional liquid, which is a material of an electro-optical device such as a color filter 500 described later, is discharged from the functional liquid droplet discharge head 16. However, it is also possible to measure the volume of a droplet when another liquid such as a probe liquid including a probe such as DNA or water is ejected from the functional droplet ejection head 16.

  As shown in FIG. 3, the discharge amount measuring device 5 is landed on the landing stage 101 that receives the functional liquid droplets discharged from the nozzles 65 of the functional liquid droplet discharge head 16 and the inspection substrate 112 of the landing stage 101. An imaging camera 102 that images the functional droplet that has been captured, and a light source 103 that coaxially illuminates the functional droplet to be imaged. As shown in FIG. 9, the discharge amount measuring device 5 uses the imaging result (two-dimensional image) obtained by the imaging camera 102 to calculate an image analysis means for analyzing the diameter of the functional droplet and the volume of the functional droplet. The control device 8 functions as an image analysis unit and a calculation unit. Further, the discharge amount measuring device 5 includes a monitor 104 so that a two-dimensional image captured by the imaging camera 102 can be visually recognized.

  The landing stage 101 is disposed on the common base 91 of the maintenance system moving table 6 adjacent to the suction unit 72 on the opposite side of the wiping unit 73, and is fixed on the common base 91. And an inspection substrate 112 that is supported by the substrate stand 111 and on which the functional liquid droplets discharged from the nozzles 65 land. The landing stage 101 is moved to the function recovery measurement area 42 by the maintenance system moving table 6 with respect to the function droplet discharge head 16 moved to the function recovery measurement area 42 by the Y-axis table 13 and discharged from each nozzle 65. The functional droplets are received on the inspection substrate 112. The substrate stand 111 is preferably configured so that the height and parallelism of the inspection substrate 112 can be finely adjusted.

The inspection substrate 112 is obtained by subjecting a glass substrate to ultraviolet / ozone cleaning (hydrophilization) so that the landed functional liquid droplet forms a substantially hemisphere with a predetermined contact angle φ (see FIG. 8). . This contact angle φ is obtained in advance using an image processing type contact angle meter or the like.
In this embodiment, the inspection substrate 112 on which the functional liquid droplets land is provided on the maintenance system moving table 6 with the substrate stand 111 mounted thereon, but may be mounted on the work table 22 described above. In this case, the inspection substrate 112 mounted on the work table 22 is moved to the drawing area 41 by the X-axis table 12, and each nozzle 65 of the functional liquid droplet ejection head 16 existing in the drawing area 41 is moved onto the work table 22. Functional droplets are ejected onto the inspection substrate 112. According to this, it is not necessary to provide a moving means for relatively moving the functional liquid droplet ejection head 16 between the inspection substrate 112 and the workpiece W in addition to the X-axis table 12, so that the entire apparatus The configuration can be simplified.

  The imaging camera 102 is composed of a CCD camera, and is located on the movement locus of the inspection board 112 that moves in the X-axis direction, and a camera movement table 122 supported by a camera stand 121 on the machine base 2 (described later). It is provided so that it may be hung. Then, the movement of the inspection substrate 112 by the maintenance system moving table 6 is used to face the inspection substrate 112 and image the functional liquid droplets landed on the inspection substrate 112 from above. According to this, since there is no need to provide a moving means for causing the imaging substrate 102 to face the inspection substrate 112 on which the functional liquid droplets land in addition to the maintenance system moving table 6, the overall apparatus configuration can be simplified. Can do.

Further, the imaging camera 102 configures the nozzle row so that the control device 8 (image analysis means) can obtain an image analysis degree sufficient for analyzing the diameter of each functional droplet using the obtained two-dimensional image. A large number (180) of functional droplets for each of a large number (180) of nozzles is divided into a plurality of (for example, three) functional droplet units and imaged. That is, the imaging camera 102 is configured so that functional droplets from a plurality (three) of nozzles 65 among a large number (180) of nozzles 65 can be simultaneously captured in the field of view. For this reason, the camera stand 121 has a camera movement table 122 that moves the imaging camera 102 in the Y-axis direction (nozzle row direction). By this camera movement table 122, a large number of functional liquid droplets are a plurality of functional liquids. The imaging camera 102 moves with respect to the inspection substrate 112 so that images are sequentially taken in units of droplets.
As described above, when the inspection board 112 is mounted on the work table 22, the imaging camera 102 is provided on the movement locus of the work table 22 by the X-axis table 12.

  The light source 103 is composed of a halogen lamp so that a sufficient amount of continuous light can be obtained. The light source is disposed on the machine base 2 near the camera stand 121, and is connected to the fiber attachment 123 of the imaging camera 102 by the optical fiber 131. Light transmitted from the light source 103 to the imaging camera 102 via the optical fiber 131 is reflected by a half mirror (not shown) provided between the CCD imaging device (not shown) that connects the captured images and the objective lens 124. After that, the light is collimated by the objective lens 124 to vertically and coaxially illuminate the surface of the inspection substrate 112. Therefore, the functional droplets on the inspection substrate 112 can be illuminated uniformly, and the functional droplets can be recognized with high accuracy.

  The ejection amount measuring device 5 performs an ejection operation for ejecting the functional liquid droplets from each nozzle 65 onto the inspection substrate 112, and performs an imaging operation for imaging the functional liquid droplets on the inspection substrate 112 having a predetermined contact angle φ. Further, the diameter r of the functional droplet is image-analyzed using the captured two-dimensional image, and the volume of the functional droplet is determined as the volume of the spherical crown based on the predetermined contact angle φ and the analyzed diameter r. And the ejection amount of the functional droplet is measured. Therefore, in the weight measuring method, which is one of the other functional droplet discharge amount measuring methods, tens of thousands of discharges are made from each nozzle 65 from the minimum weighing limit (about 1 μg) of the weight measuring device used. Since the discharge amount of functional droplets can be measured only as an average value of 10,000 or more functional droplets, according to this discharge amount measuring device 5, the discharge amount is obtained for each functional droplet discharged from each nozzle 65. be able to. For this reason, for example, in the drawing operation by the drawing apparatus 3, the functional liquid droplets that are actually discharged from the nozzles 65 to the workpiece W, that is, after the flushing unit 71 is subjected to many flushing, are discharged to the workpiece W. In order to control the discharge amount of the functional liquid droplets, in the discharge amount measurement operation, after a large number of functional liquid droplets are preliminarily discharged from each nozzle, the functional liquid droplets are landed on the inspection substrate, The discharge amount can be measured for the functional liquid droplet after the preliminary discharge.

  In this case, a plurality of preliminary ejections performed before ejecting the functional liquid droplets onto the inspection substrate 112 are performed on the cap 77 of the suction unit 72 adjacent to the landing stage 101. According to this, since only the functional liquid droplets to be imaged are discharged onto the inspection substrate 112, the inspection substrate 112 is not wasted. Of course, if the functional liquid droplets that are preliminarily ejected are ejected to a position different from the functional liquid droplets to be imaged, they may be preliminarily ejected onto the inspection substrate 112. Further, as described above, when the inspection substrate 112 is mounted on the work table 22, it may be preliminarily discharged to the flushing box 76.

  Here, with reference to FIGS. 4 to 6, a series of ejection operations and imaging operations in the droplet ejection apparatus 1 will be described in detail. Since the imaging operation is performed in units of a plurality (three) of functional droplets as described above, the ejection operation is also performed in units of a plurality (three) of nozzles. First, in the ejection operation, the head unit 15 is caused to face the function recovery measurement area 42 by the Y-axis table 13. Before and after, the suction unit 72 is moved to the function recovery measurement area 42 by the maintenance system moving table 6 so that the functional liquid droplet ejection head 16 faces the cap (see FIG. 4). At this time, the head θ-axis table 31 is adjusted so that the row direction of the nozzle row 64 is parallel to the Y-axis direction.

  Subsequently, functional droplets are preliminarily discharged from each nozzle 65 of the functional droplet discharge head 16 to the cap 77. That is, for one nozzle row 64 of the two nozzle rows 64, a large number of functional droplets are preliminarily ejected from the continuous three nozzles 65a to 65c to the cap 77, respectively. Next, the inspection substrate 112 is moved to the function recovery measurement area 42 by the maintenance system moving table 6, and the functional liquid droplet ejection head 16 is made to face the inspection substrate 112 (see FIG. 5). Then, functional droplets 150A to 150C are discharged from the three nozzles 65a to 65c, respectively, onto the inspection substrate 112.

  Next, the inspection substrate 112 (landing stage 101) on which the three functional liquid droplets 150A to 150C to be imaged land is moved below the imaging camera 102 by the maintenance system moving table 6. Before and after, the imaging camera 102 is moved below the three functional droplets 150A to 150C by the camera movement table 122 (see FIG. 6). Then, the three functional liquid droplets 150A to 150C that are substantially hemispherical with a predetermined contact angle φ on the inspection substrate 112 are imaged by the imaging camera 102 (see FIG. 8).

  When the imaging of the three functional liquid droplets 150A to 150C is completed, the maintenance unit moving table 6 moves the suction unit 72 to the function recovery measurement area 42 again. Then, a large number of functional droplets are preliminarily discharged from the three consecutive nozzles 65 next to the three nozzles 65a to 65c to the cap 77 of the suction unit 72, respectively. Subsequently, the inspection substrate 112 is moved to the function recovery measurement area 42 by the maintenance system moving table 6, and the functional liquid droplets 150 are discharged from the three nozzles 65, respectively. Next, the inspection substrate 112 is moved below the imaging camera 102, and at the same time, the imaging camera 102 is moved below the three functional droplets 150 on the inspection substrate 112 by the camera movement table 122. The three functional droplets 150 are imaged by the imaging camera 102.

  Thereafter, this operation is repeated to complete the ejection operation and the imaging operation for all the nozzles 65 in one nozzle row 64. The discharge operation and the imaging operation are performed in the same manner for the other nozzle row 64 as well. Here, with respect to all the nozzles 65 (360) of the two nozzle rows 64, the ejection operation and the imaging operation are performed 120 times in units of three nozzles and in units of functional droplets, respectively. The imaging operation is performed each time so that the time from the ejection of the functional liquid droplets to the imaging camera 102 is the same for each time. According to this, since the volume of the solvent vaporized from each functional droplet can be made the same from each ejection to each imaging, it is affected by the vaporization of the solvent from the functional droplet. In addition, it is possible to accurately measure the relative functional droplet discharge amount between the nozzles 65. However, since the time from each ejection to each imaging is short (about several seconds), the amount of solvent evaporated from the functional droplet is very small. It can be obtained with a value approximately equal to the volume of the functional droplet ejected from the nozzle 65.

In the ejection amount measurement device 5 of the embodiment, the functional liquid droplet on the inspection substrate 112 is imaged from above by the imaging camera 102, but may be imaged from below or through the inspection substrate 112, in this case. In this case, immediately after the functional liquid droplets discharged from the nozzles 65 land on the inspection substrate 112, the functional liquid droplets can be imaged by the imaging camera 102 without moving the inspection substrate 112. The absolute discharge amount of the functional liquid droplets can be accurately measured without vaporization of the solvent of the functional liquid between the time of landing on the surface and the time of imaging.
In the present embodiment, only the functional droplets after a large number of preliminary discharges are imaged, but a plurality of each of the functional droplets discharged from the same nozzle 65 may be imaged. In this case, the maintenance system moving table 6 causes each functional droplet to land at different positions on the inspection substrate 112. According to this, it is possible to observe changes in functional droplets ejected from the same nozzle 65 over a plurality of shots.

  FIG. 7 schematically shows a two-dimensional image of the functional liquid droplet 150 on the inspection substrate 112 obtained by the imaging camera 102 and displayed on the monitor 104 in this way. As described above, the imaging camera 102 can simultaneously hold the functional liquid droplets 150 (150A to 150C in the figure) discharged from a plurality (three) of the nozzles 65 in the field of view. The obtained image data based on the two-dimensional image is sent to the control device 8, and the diameter r of the functional droplet 150 is analyzed by the image analysis means of the control device 8 based on the image data.

Then, the volume of the functional droplet 150 is determined based on a predetermined contact angle φ made by the functional droplet 150 landed on the inspection substrate 112 and the diameter r of the functional droplet 150 subjected to image analysis by the calculation unit of the control device 8. Calculated. Specifically, when the predetermined contact angle φ is 0 ° <φ ≦ 90 °, the functional droplet 150 on the inspection substrate 112 forms a substantially hemisphere as shown in FIG. The volume V of the functional droplet 150 is
V = πr ³ {(1/3) cos ³ φ−cos φ + (2/3)} / 8 sin ³ φ
In addition, when the predetermined contact angle φ is 90 ° ≦ φ <180 °, a substantially hemisphere is formed as shown in FIG. 8B, and the volume V of the functional droplet 150 is
V = πr ³ {(1/3) cos ³ φ−cos φ + (2/3)}
Given in. According to this, the diameter r of the functional liquid droplet 150 that is substantially hemispherical is analyzed by image processing on the inspection substrate 112 that has been surface-treated so that the landed functional liquid droplet 150 has a predetermined contact angle φ. Since the volume V of the functional liquid droplet 150 is obtained as the volume of the spherical crown based on the predetermined contact angle φ and the calculated diameter r, a complicated mechanism, an elaborately manufactured measuring instrument, or the like is used. In addition, the ejection amount of the functional liquid droplet 150 of the functional liquid droplet ejection head 16 can be accurately measured.

  In the present embodiment, the two-dimensional image obtained by imaging with the imaging camera 102 is used to calculate the volume of the functional droplet, but the functional droplet ejection head 16 and the head function recovery device 4 are normal. It may be used to determine whether or not it is functioning. That is, in the obtained two-dimensional image, when small-diameter functional droplets or missing dots are observed, it is considered that suction by the suction unit 72 is not properly performed, When flying bends are observed, wiping by the wiping unit 73 may be defective, or the nozzle surface around the nozzle 65 may be scratched. Accordingly, it is possible to determine which of the functional liquid droplet ejection head 16 or the head function recovery device 4 is the cause according to the degree and frequency of these phenomena. This adjustment may be performed by automatic control, or may be performed manually by inputting to the control device 8 through an operation panel 202 (described later).

  When the volume of the functional droplet ejected from each nozzle 65 is calculated as described above, the control device 8 causes the functional droplet that the drawing device 3 ejects to the workpiece W based on the calculated volume. The discharge amount is controlled to be uniform among a large number (360) of the nozzles 65 constituting the two nozzle rows 64. As described above, this control is performed by controlling the drive waveform from the head driver 211 of the control device 8 to the pump unit 61 connected to each nozzle 65. That is, when the calculated volume is smaller than the preset reference volume allowable value, the voltage of the drive waveform from the head driver 211 to the pump unit 61 connected to the corresponding nozzle 65 is increased, and the calculated value is reversed. When the volume is larger than the preset reference volume allowable value, the voltage of the drive waveform from the head driver 211 to the pump unit 61 connected to the corresponding nozzle 65 is lowered.

Then, after controlling the drive of the functional liquid droplet ejection head 16 in this way, the drawing operation is performed as described above. According to this, by controlling the driving of the functional liquid droplet ejection head 16 based on the ejection amount from each nozzle 65 measured by the above-described highly reliable ejection amount measuring device 5, the ejection is performed on the workpiece W. The amount of functional droplets discharged can be made uniform evenly among a large number of nozzles 65. Furthermore, after a large number of functional droplets are preliminarily ejected from each nozzle, the functional droplets are landed on the inspection substrate and the ejection amount of the functional droplets is measured. A functional droplet to be a measurement sample (imaging target) can be obtained under the same conditions as the discharged functional droplet.
Instead of controlling the drive waveform with respect to a preset reference volume, the drive waveform with respect to the average value of the volume of each functional droplet calculated for a large number of functional droplets for each of the large number of nozzles 65. May be controlled. Further, the discharge amount of the functional liquid droplets discharged onto the workpiece W may be made uniform for each nozzle row 64. In this case, the discharge amount of the functional liquid droplets constitutes each nozzle row 64. It is made uniform among many (180) nozzles 65.

  Here, a control system of the droplet discharge device 1 constituted by the control device 8 will be described. As shown in FIG. 9, the control system of the droplet discharge device 1 basically includes an input unit 201 having an operation panel 202 for inputting various data by its operation, and a monitor for displaying an imaging screen by the imaging camera 102 on the screen. A display unit 203 having 104, a drive unit 204 having various drivers for driving the functional liquid droplet ejection head 16, the monitor 104, and the like, and a control unit 205 for comprehensively controlling the liquid droplet ejection apparatus 1 including these units. ing.

  The drive unit 204 includes a head driver 211 that controls the ejection of the functional liquid droplet ejection head 16, a monitor driver 212 that controls the drive of the monitor 104, and an X / Y axis that controls the motors of the X / Y axis movement mechanism 11. The movement driver 213, the maintenance movement driver 214 that drives and controls the maintenance system movement table 6, the maintenance driver 215 that drives and controls the suction unit 72 and the wiping unit 73 of the head function recovery device 4, and the discharge amount measuring device 5 A light source driver 216 for driving and controlling the light source 103, an imaging driver 217 for controlling the imaging driving of the imaging camera 102, and a camera movement driver 218 for driving and controlling the camera movement table 122.

  The control unit 205 includes a CPU 221, a ROM 222, a RAM 223, and a P-CON 224, which are connected to each other via a bus 225. The ROM 222 has a control program area for storing control programs and control data to be processed by the CPU 221, and a control data area for storing control data for performing inspection work and drawing work. The RAM 223 has various register groups and is used as various work areas for control processing.

  In addition to the various drivers of the drive unit 204 and the input unit 201, the functional liquid supply mechanism 7 and the like are connected to the P-CON 224. In the P-CON 224, a logic circuit for supplementing the function of the CPU 221 and handling an interface signal with a peripheral circuit is configured by a gate array or a custom LSI. For this reason, the P-CON 224 receives various commands, image data, and the like from the input unit 201 as they are or are processed and fetched into the bus, and in conjunction with the CPU 221, data and control signals output from the CPU 221 and the like to the bus 225. Is output to the drive unit 204 as it is or after being processed.

  Then, with the above configuration, the CPU 221 inputs various detection signals, various commands, various data, and the like via the P-CON 224 according to the control program in the ROM 222, and processes various data in the RAM 223. The entire droplet discharge apparatus 1 is controlled by outputting various control signals to the drive unit 204 via the -CON 224.

  For example, when performing a drawing operation on the workpiece W, the CPU 221 controls the ejection driving of the functional liquid droplet ejection head 16, and the X / Y axis movement mechanism 11 controls the scanning range of the workpiece W and the head unit 15. Controls movement and other operations. When performing functional recovery or imaging operation of the functional liquid droplet ejection head 16, the movement operation of the functional liquid droplet ejection head 16 is performed by the X / Y axis movement mechanism 11 in the function recovery measurement area 42 of the head function recovery device 4. And the ejection drive of the functional liquid droplet ejection head 16, the movement operation of the maintenance system moving table 6, the imaging of the imaging camera 102, and the like are controlled.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 10 is a flowchart showing the manufacturing process of the color filter, and FIG. 11 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 11B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 11C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 503, a resin material whose coating film surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S13), as shown in FIG. 11 (d), functional droplets are ejected by the functional droplet ejection head 16, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 16 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. 11E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 12 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 11, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 12 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 16. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 16.

FIG. 13 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 14 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 15 is a cross-sectional view of a main part of a display region of the organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2 and the} like, and is laminated on the inorganic bank layer 618a. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 16, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 17, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 16, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the work table 22 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 19, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 16 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 20, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 21, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 21) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 22, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 16, as shown in FIG. 23, the same steps as in the case of the light emitting layer 617b corresponding to blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 24, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 25 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the work table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 16. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 16 to cope with it. Land in the color discharge chamber 705.

Next, FIG. 26 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 27A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a plan view schematically illustrating a droplet discharge device according to an embodiment. It is a perspective view of the functional liquid droplet ejection head concerning an embodiment. It is a front view of a function recovery device and a discharge amount measuring device concerning an embodiment. FIG. 6 is a plan view schematically illustrating a discharge operation and an imaging operation performed by the discharge amount measuring apparatus according to the embodiment. FIG. 5 is a plan view schematically showing an ejection operation and an imaging operation following FIG. 4. FIG. 6 is a plan view schematically showing an ejection operation and an imaging operation following FIG. 5. It is the figure which showed typically the two-dimensional image of the functional droplet on the test | inspection board | substrate imaged with the imaging camera which concerns on embodiment, and displayed on the monitor. (A) is a diagram schematically showing a state in which a functional droplet that has landed on a test substrate forms a substantially hemisphere with a contact angle of 90 ° or less, and (b) is a diagram that shows 90 functional droplets that have landed on a test substrate. It is the figure which showed typically the state which is making the substantially hemisphere with the contact angle more than (degree). It is a block diagram which shows the control structure of the droplet discharge apparatus which concerns on embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 4 ... Head function recovery device 5 ... Discharge amount measuring device 6 ... Maintenance system moving table 8 ... Control device 12 ... X-axis table 13 ... Y-axis table 16 ... Functional droplet discharge head 22 ... Work table 65 ... Nozzle 76 ... Flushing box 77 ... Cap 102 ... Imaging camera 112 ... Inspection substrate 150 ... Functional droplet 500 ... Color filter 508 ... Colored layer W ... Workpiece

Claims (15)

The functional liquid droplets are ejected from a large number of nozzles of the functional liquid droplet ejection head onto the inspection substrate that has been surface-treated so that the landed functional liquid droplets have a predetermined contact angle. A discharge amount measuring method of a functional liquid droplet discharge head for measuring the discharge amount of
A discharge step of discharging functional liquid droplets from the nozzles on the inspection substrate and landing in a substantially hemisphere,
An imaging step of imaging functional droplets on the inspection substrate;
An image analysis step of analyzing the diameter of the functional droplet using the captured two-dimensional image of the functional droplet;
A calculation step of calculating a volume of the functional droplet based on the predetermined contact angle and the diameter of the functional droplet;
A method for measuring a discharge amount of a functional liquid droplet discharge head, comprising:   2. The functional liquid according to claim 1, wherein the imaging of the functional liquid droplets in the imaging step is performed in units of one or a plurality of functional liquid droplets for a large number of the functional liquid droplets for each of the plurality of nozzles. A method for measuring the discharge amount of a droplet discharge head. The discharge of the functional liquid droplets in the discharge process is performed in units of one or a plurality of nozzles corresponding to the one or a plurality of functional liquid droplet units,
The ejection in the ejection step and the imaging in the imaging step are
The method of measuring a discharge amount of a functional liquid droplet discharge head according to claim 2, wherein the time from the discharge of each time to the imaging of each time is the same. A droplet comprising the steps of the method for measuring a discharge amount of a functional droplet discharge head according to any one of claims 1 to 3, wherein the droplet is discharged from each nozzle of the functional droplet discharge head onto a workpiece. A drive control method of a functional liquid droplet discharge head in a discharge device,
Based on the calculated volume of the functional droplets, a drive waveform to the ejection drive elements connected to the nozzles so that the ejection amount of the functional droplets ejected onto the workpiece is made uniform among the multiple nozzles. And a control step for controlling the function of the liquid droplet ejection head.   5. The preliminary ejection step of preliminarily ejecting functional liquid droplets from each nozzle a plurality of times at a position different from the ejection position in the ejection step prior to the ejection step. A drive control method of the described functional liquid droplet ejection head. On the inspection substrate that has been surface-treated so that the landed functional liquid droplets have a predetermined contact angle, the functional liquid droplets are ejected from a large number of nozzles of the functional liquid droplet ejection head, respectively, so as to form a substantially hemisphere, A functional droplet ejection head ejection amount measuring device that measures the ejection amount of functional droplets ejected from each nozzle,
Control means for controlling a drive waveform to an ejection drive element connected to each nozzle of the functional liquid droplet ejection head;
Imaging means for imaging functional droplets landed on the inspection substrate;
Image analysis means for analyzing the diameter of the functional droplet, using the captured two-dimensional image of the functional droplet;
Calculating means for calculating the volume of the functional droplet based on the predetermined contact angle and the diameter of the functional droplet;
A discharge amount measuring apparatus for a functional droplet discharge head, comprising:   7. The apparatus for measuring a discharge amount of a functional droplet discharge head according to claim 6, wherein the imaging unit images a large number of the functional droplets for each of the plurality of nozzles in units of one or a plurality of functional droplets. . The control unit controls the functional liquid droplet ejection head to eject functional liquid droplets in units of one or more nozzles corresponding to the one or more functional liquid droplet units,
8. The ejection amount measurement of the functional liquid droplet ejection head according to claim 7, wherein the imaging unit performs the imaging of each time such that the time from the ejection of each time to the imaging of each time is the same. apparatus. 9. The apparatus for measuring a discharge amount of a functional liquid droplet discharge head according to claim 6, wherein the functional liquid droplet discharge head is relatively moved in a main scanning direction and a sub scanning direction orthogonal to each other. A droplet discharge device that discharges functional droplets from the nozzles to form a film forming unit on the workpiece,
The control means controls the functional liquid droplet ejection head so that the ejection volume of the functional liquid droplets ejected onto the workpiece is made uniform among the multiple nozzles based on the calculated volume of the functional liquid droplets. A droplet discharge device characterized by controlling. An X-axis table for moving the work placed on the work table in the main scanning direction;
A Y-axis table for moving the functional liquid droplet ejection head in the sub-scanning direction;
A maintenance unit for performing functional recovery of the functional liquid droplet ejection head;
A maintenance system moving table on which each means of the maintenance unit is movably mounted so that each means constituting the maintenance unit faces on the movement locus of the functional liquid droplet ejection head by the Y-axis table; Prepared,
The inspection board is mounted on the maintenance system moving table,
The liquid droplet ejection apparatus according to claim 9, wherein the imaging unit is disposed on a movement locus of the inspection substrate by the maintenance system movement table. The maintenance unit has a flushing box for receiving functional droplets ejected from the functional droplet ejection head,
The control means controls the functional liquid droplet ejection head to preliminarily eject the functional liquid droplets from each nozzle a plurality of times before ejecting the functional liquid droplets onto the inspection substrate. The droplet discharge device according to claim 10, wherein the droplet discharge device is discharged. An X-axis table that moves the work placed on the work table in the main scanning direction with respect to the functional liquid droplet ejection head;
A Y-axis table for moving the functional liquid droplet ejection head in the sub-scanning direction,
The droplet discharge device according to claim 9, wherein the work table is configured to be capable of mounting the inspection substrate.   13. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 9 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to any one of claims 9 to 12, wherein a film forming portion is formed by functional droplets on the workpiece. 15. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 13 or the electro-optical device according to claim 14.

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