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JP2004277878A - Apparatus and method for manufacturing three dimensionally shaped article - Google Patents

Apparatus and method for manufacturing three dimensionally shaped article Download PDF

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Publication number
JP2004277878A
JP2004277878A JP2003334248A JP2003334248A JP2004277878A JP 2004277878 A JP2004277878 A JP 2004277878A JP 2003334248 A JP2003334248 A JP 2003334248A JP 2003334248 A JP2003334248 A JP 2003334248A JP 2004277878 A JP2004277878 A JP 2004277878A
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light beam
powder
dimensional shaped
chamber
powder layer
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Inventor
Satoshi Abe
諭 阿部
Isao Fuwa
勲 不破
Tokuo Yoshida
徳雄 吉田
Yoshikazu Azuma
喜万 東
Hirohiko Tougeyama
裕彦 峠山
Masataka Takenami
正孝 武南
Takashi Shimizu
俊 清水
Shuji Kaminaga
修士 上永
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Panasonic Electric Works Co Ltd
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Matsushita Electric Works Ltd
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Priority to JP2003334248A priority Critical patent/JP2004277878A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/141Processes of additive manufacturing using only solid materials
    • B29C64/153Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Powder Metallurgy (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a three dimensionally shaped article, which eliminates the effects of fume and scattered powders, and to provide a manufacturing method. <P>SOLUTION: This manufacturing apparatus comprises a light beam irradiation means 3 for sintering powders in an irradiated portion by irradiating a predetermined portion of a powder layer 10 formed on a stage with a light beam, and a powder feeding means 2 for forming the powder layer onto the stage and an already sintered layer. The light beam irradiation means 3 is arranged at the position deviated from the position directly above an area to be irradiated with the light beam, so as to diagonally irradiate the powder layer 10 with the light beam. The fume produced by heating due to light beam radiation onto the powder layer ascends toward the just above position, but because the light beam irradiates the portion from the deviated position from the just above position, the cloudiness of the light beam irradiation means (when the means is sectioned by the chamber, an aperture arranged in a chamber so as to transmit the light beam) caused by the fume is reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は無機質あるいは有機質の粉末からなる粉末層に光ビームを照射して焼結層を形成するとともにこの焼結層を積層することで所望の三次元形状造形物を製造する三次元形状造形物の製造装置及び製造方法に関するものである。   The present invention provides a three-dimensional shaped article for producing a desired three-dimensional shaped article by forming a sintered layer by irradiating a powder layer made of inorganic or organic powder with a light beam and laminating the sintered layer. The present invention relates to a manufacturing apparatus and a manufacturing method.

ステージ上に形成した粉末層に光ビーム(指向性エネルギービーム、例えばレーザ)を照射して焼結層を形成し、この焼結層の上に新たな粉末層を形成して光ビームを照射することで焼結層を形成するということを繰り返して焼結層を積層することで三次元形状造形物を製造することは、特表平1−502890号公報(特許文献1)などにおいて知られている。   The powder layer formed on the stage is irradiated with a light beam (directional energy beam, for example, a laser) to form a sintered layer, and a new powder layer is formed on the sintered layer and irradiated with the light beam. It is known in Japanese Laid-open Patent Publication No. 1-502890 (Patent Document 1) and the like to manufacture a three-dimensional shaped object by repeatedly forming a sintered layer and laminating the sintered layers. Yes.

このものでは所定雰囲気下に保たれるチャンバー内にステージ及び粉末を供給して粉末層を形成する粉末供給手段を配置し、チャンバー外に配した光ビーム照射手段からチャンバーにおけるステージの直上部分に設けられた光透過性の窓(レンズで形成されたものを含む)を通じて粉末層に対する光ビームの照射を行っている。   In this case, a powder supply means for supplying a stage and powder to form a powder layer in a chamber maintained in a predetermined atmosphere is arranged, and a light beam irradiation means arranged outside the chamber is provided in a portion immediately above the stage in the chamber. The light beam is irradiated to the powder layer through the light-transmitting window (including those formed with lenses).

ところで粉末に高エネルギー光ビームを照射して粉末を焼結(いったん溶融させた後に凝固させる場合を含む)する際、ヒューム(粉末が金属粉末であれば金属蒸気など)が発生する。このヒュームは上昇して直上位置にある上記窓に付着したり焼き付いたりして窓を曇らせて光ビームの透過率を低下させてしまうために、焼結が安定しないとか焼結部分の密度を高くすることができなくて三次元形状造形物の強度が低下してしまうといった問題を招く。また、飛散して浮遊している粉末や窓に付着した粉末によっても光ビームの透過率の低下を招く。   By the way, when the powder is irradiated with a high energy light beam to sinter the powder (including a case where the powder is once melted and then solidified), fumes (such as metal vapor if the powder is a metal powder) are generated. This fume rises and attaches or burns onto the window at the position directly above, causing the window to fog up and lowering the light beam transmittance, so that the sintering is unstable or the density of the sintered part is increased. This can cause a problem that the strength of the three-dimensional shaped object is lowered. Moreover, the light beam transmittance is also reduced by powder that is scattered and floating or powder that adheres to the window.

このほか、焼結が完了して得られた三次元形状造形物は、上記チャンバーから取り出さなくてはならないが、特許文献1に示されたものでは取り出し機構について考慮されておらず、人力で取り出しているのが現状である。しかし、製造する造形物がたとえば500mm×500mm×100mmというようなサイズのものであり、これを比重6〜8程度の金属粉末で製造した場合、得られた造形物はその重さが150〜200kgとなり、到底人力で取り出すことはできないことから、クレーンを利用することになる。しかし、チャンバーにおけるステージ上方に光ビーム照射手段が位置している上記のものでは、クレーンによる造形物取り出し時に光ビーム照射手段を移動させなくてはならず、この場合、光軸の位置決め再現性が失われてしまうことから、加工精度が極端に低下してしまったり、造形加工の度に調整作業が必要となってしまう。   In addition, the three-dimensional shaped object obtained after the completion of sintering must be taken out from the chamber, but the one shown in Patent Document 1 does not consider the take-out mechanism, and is taken out manually. This is the current situation. However, if the modeled object to be manufactured has a size of, for example, 500 mm × 500 mm × 100 mm, and is manufactured with a metal powder having a specific gravity of about 6 to 8, the obtained modeled object has a weight of 150 to 200 kg. Therefore, since it cannot be taken out by human power, a crane is used. However, in the above case where the light beam irradiating means is located above the stage in the chamber, the light beam irradiating means must be moved when taking out the modeled object by the crane. In this case, the optical axis positioning reproducibility is high. Since it is lost, the processing accuracy is extremely lowered, or adjustment work is required for each modeling process.

特表2002−527613号公報(特許文献2)に示されているように、ステージ側を移動させることができるようにしたものでは、光ビーム照射手段とクレーンの干渉とを避けることができるが、この場合には、移動自在なステージに粉末が噛み込んで傾いたりする虞があって、ステージの位置決め再現性を確保することが困難となるとともに、機構上、非常に複雑となってしまう。
特表平1−502890号公報 特表2002−527613号公報
As shown in JP-T-2002-527613 (Patent Document 2), the stage side can be moved, so that interference between the light beam irradiation means and the crane can be avoided. In this case, there is a risk that the powder may be caught in the movable stage and tilted, so that it becomes difficult to ensure the positioning reproducibility of the stage, and the mechanism becomes very complicated.
JP-T-1-502890 JP-T-2002-527613

本発明はこのような点に鑑みなされたものであって、その主たる目的とするところはヒュームや飛散した粉末による影響をなくすことができる三次元形状造形物の製造装置及び製造方法を提供するにあり、また他の目的とするところは製造した造形物をチャンバーから取り出すことを容易に行うことができる三次元形状造形物の製造装置及び製造方法を提供するにある。   The present invention has been made in view of the above points, and the main object of the present invention is to provide a manufacturing apparatus and a manufacturing method of a three-dimensional shaped object that can eliminate the influence of fumes and scattered powder. In addition, another object is to provide a manufacturing apparatus and a manufacturing method of a three-dimensional shaped object that can easily take out the manufactured object from the chamber.

しかして本発明に係る三次元形状造形物の製造装置は、ステージ上に形成された粉末層の所定箇所に光ビームを照射して照射位置の粉末を焼結する光ビーム照射手段と、ステージ上及び既に焼結された焼結層上に粉末層を供給する粉末供給手段とを備えるとともに、光ビーム照射手段はその光ビームの照射範囲の直上位置からずれた位置に配されて粉末層に斜め方向から光ビームを照射するものであることに特徴を有しており、本発明に係る三次元形状造形物の製造方法は、粉末層の所定箇所に光ビームを照射して焼結することで形成した焼結層の表面に新たな粉末層を積層し、この新たな粉末層の所定箇所に光ビームを照射して焼結することで下層の焼結層と一体となった新たな焼結層を形成することを繰り返して三次元形状造形物を製造するにあたり、光ビームをその照射範囲の直上位置からずれた斜め方向から照射して焼結を行うことに特徴を有している。   Thus, the three-dimensional shaped article manufacturing apparatus according to the present invention includes a light beam irradiation means for irradiating a predetermined position of a powder layer formed on a stage with a light beam to sinter powder at an irradiation position, and on the stage. And a powder supply means for supplying the powder layer onto the sintered layer that has already been sintered, and the light beam irradiation means is disposed at a position shifted from a position immediately above the irradiation range of the light beam and is oblique to the powder layer. The three-dimensional shaped article manufacturing method according to the present invention is characterized by irradiating a light beam from a direction and sintering by irradiating a predetermined portion of the powder layer with a light beam. A new powder layer is laminated on the surface of the formed sintered layer, and a new sintering united with the lower sintered layer by irradiating a predetermined portion of the new powder layer with a light beam and sintering. Manufacturing a 3D model by repeating the formation of layers Upon that, is characterized in that by irradiating a light beam from an oblique direction shifted from the position immediately above the irradiation range performing sintering.

光ビームを粉末層に照射して加熱することで発生するヒュームは、上昇して直上位置に向かうことから、この直上位置を避けたところから光ビームの照射を行うことで、光ビームの照射手段(チャンバーで区画されている場合は光ビームを透過させるためにチャンバーに設けた窓)をヒュームが曇らせてしまうことが低減されるようにしたものである。   Fume generated by irradiating and heating the light beam to the powder layer rises and goes to the position directly above. By irradiating the light beam from a position avoiding this position, light beam irradiation means It is intended to reduce fume fogging (a window provided in the chamber in order to transmit a light beam when the chamber is partitioned).

この時、光ビーム照射手段は照射面での光ビームスポット形状を略円形のものとするビーム形状補正手段を備えていることが好ましい。斜め方向からの照射であるにもかかわらず、粉末層には円形スポット状の光ビームを照射することができて、安定した焼結を行うことができる。   At this time, the light beam irradiating means preferably includes beam shape correcting means for making the light beam spot shape on the irradiation surface substantially circular. Despite the irradiation from an oblique direction, the powder layer can be irradiated with a circular spot-shaped light beam, and stable sintering can be performed.

光ビーム照射手段の光ビーム出射部とこの光ビーム照射手段が出力する光ビームの照射範囲との間に、光透過性で且つ光ビーム照射による焼結部から発生するヒュームの通過を遮るヒューム遮断手段を配置するようにしておけば、より確実に光透過率の低下を防止することができる。   Fume interception between the light beam emitting part of the light beam irradiating means and the light beam irradiation range output by the light beam irradiating means, which is light transmissive and blocks the passage of fumes generated from the sintered part by the light beam irradiation. By arranging the means, it is possible to prevent the light transmittance from decreasing more reliably.

また、光ビームの照射範囲の直上位置にヒュームを捕捉する捕捉手段を設けておけば、ヒュームによる光透過率の低下をさらに確実に防止することができる。   Further, if a capturing means for capturing a fume is provided at a position immediately above the irradiation range of the light beam, it is possible to more reliably prevent a decrease in light transmittance due to the fume.

さらに、ステージ及び粉末供給手段が内部に配されているチャンバーにおける光ビームの照射範囲の直上位置に、焼結形成された三次元形状造形物の取り出し用で且つ開閉自在な蓋で閉じられた開口部を設けて、焼結完了後、ステージ上の未固化粉末の除去を行い、この後、上記開口部を開いて該開口部を通じて焼結作成された三次元形状造形物をチャンバー内から取り出すことで、光ビーム照射手段との干渉を招くことなく、造形物のクレーンなどによる取り出しを行うことができるとともに、粉末がチャンバー外に飛散してしまうことを防ぐことができる。   Furthermore, an opening for taking out the sintered three-dimensional shaped object and closing it with an openable / closable lid at a position immediately above the irradiation range of the light beam in the chamber in which the stage and the powder supply means are arranged. After the sintering is completed, the unsolidified powder on the stage is removed, and then the opening is opened and the three-dimensional shaped object that is sintered through the opening is taken out from the chamber. Thus, the molded object can be taken out with a crane or the like without causing interference with the light beam irradiation means, and the powder can be prevented from being scattered outside the chamber.

また、焼結完了後、チャンバー内雰囲気の清浄処理並びに雰囲気ガスと空気との置換処理を行いつつ、チャンバー内の残留ヒューム量の測定及びチャンバー内の酸素濃度の測定を行い、残留ヒューム量及び酸素濃度が夫々所定値を下回った時点で開口部を開いて三次元形状造形物の取り出しを行うことで、外部環境を汚すことを防ぐことができる。   In addition, after the sintering is completed, the amount of residual fumes and oxygen are measured by measuring the amount of residual fumes in the chamber and the concentration of oxygen in the chamber while cleaning the atmosphere in the chamber and replacing the atmosphere gas with air. It is possible to prevent the external environment from being soiled by opening the opening when the concentration falls below a predetermined value and taking out the three-dimensional shaped object.

本発明では、光ビームをその照射範囲の直上位置からずれた斜め方向から照射して焼結を行うものであり、光ビーム照射手段が上記直上位置に無いために、光ビームを粉末層に照射して加熱することで発生して直上位置に向かうヒュームが光ビームの照射手段(チャンバーで区画されている場合は光ビームを透過させるためにチャンバーに設けた窓)を曇らせて光ビームの透過率が低下してしまうことを防ぐことができ、またクレーン等の機材を用いた造形物のチャンバーからの取り出しも支障なく行うことができる。   In the present invention, sintering is performed by irradiating a light beam from an oblique direction shifted from a position immediately above the irradiation range, and since the light beam irradiation means is not located at the position immediately above, the light beam is irradiated onto the powder layer. The fume generated by heating and moving to the position directly above fogs the light beam irradiation means (a window provided in the chamber for transmitting the light beam when it is partitioned by the chamber), thereby transmitting the light beam. Can be prevented, and a modeled object using a crane or other equipment can be taken out from the chamber without any trouble.

以下本発明を実施の形態の一例に基づいて詳述すると、図示例の三次元形状造形物の製造装置は、粉末層形成手段2と光ビーム照射手段3と除去手段4、そして粉末層形成手段2と除去手段4とを内部に納めているチャンバー5で構成されているもので、上記粉末層形成手段2は、外周が囲まれた空間内をシリンダー駆動で上下に昇降するステージ20上に粉末タンク23内の金属粉末をスキージング用ブレード21で供給するとともに均すことで所定厚みΔt1の粉末層10をステージ20上に形成するものとして構成されている。   Hereinafter, the present invention will be described in detail based on an example of an embodiment. A three-dimensional shaped article manufacturing apparatus in the illustrated example includes a powder layer forming unit 2, a light beam irradiation unit 3, a removing unit 4, and a powder layer forming unit. 2 and the removal means 4 are composed of a chamber 5 in which the powder layer forming means 2 is powdered on a stage 20 that moves up and down by driving a cylinder in a space surrounded by the outer periphery. The metal powder in the tank 23 is supplied by the squeegee blade 21 and leveled to form the powder layer 10 having a predetermined thickness Δt1 on the stage 20.

光ビーム照射手段3は、レーザー発振器30から出力されたレーザーをガルバノミラー31等のスキャン光学系を介して上記粉末層10に照射するものであり、チャンバー5外に配設されていて、該光ビーム照射手段3から出射された光ビームはチャンバー5に設けられた光透過性の窓50を通じて粉末層に照射される。なお、窓50はレーザ光を通過させる材質のものを用いている。レーザー発振器30が炭酸ガスレーザーである場合、ZnSe製の平板等を用いることができる。レンズ(たとえばFθレンズ)として形成されたものであってもよい。   The light beam irradiating means 3 irradiates the powder layer 10 with a laser output from the laser oscillator 30 via a scanning optical system such as a galvano mirror 31, and is disposed outside the chamber 5. The light beam emitted from the beam irradiation means 3 is irradiated to the powder layer through a light-transmitting window 50 provided in the chamber 5. The window 50 is made of a material that allows laser light to pass therethrough. When the laser oscillator 30 is a carbon dioxide laser, a flat plate made of ZnSe or the like can be used. It may be formed as a lens (for example, an Fθ lens).

除去手段4は上記粉末層形成手段2のベース部にXY駆動機構40を介してミーリングヘッド41を設けたものとして構成されている。なお、本発明はこの除去手段4を備えていない三次元形状造形物の製造装置においても適用することができる。   The removing means 4 is configured such that a milling head 41 is provided on the base portion of the powder layer forming means 2 via an XY drive mechanism 40. In addition, this invention is applicable also in the manufacturing apparatus of the three-dimensional shape molded article which is not equipped with this removal means 4. FIG.

このものにおける三次元形状造形物の製造は、図2に示すように、ステージ20上面の造形用ベース22表面に粉末タンク23から溢れさせた粉末をブレード21で供給すると同時にブレード21で均すことで第1層目の粉末層10を形成し、この粉末層10の硬化させたい箇所に光ビーム(レーザー)Lを照射して粉末を焼結させてベース22と一体化した焼結層11を形成する。この後、ステージ20を少し下げて再度粉末を供給してブレード21で均すことで第1層目の粉末層10(と焼結層11)の上に第2層目の粉末層10を形成し、この第2層目の粉末層10の硬化させたい箇所に光ビーム(レーザー)Lを照射して粉末を焼結させて下層の焼結層11と一体化した焼結層11を形成する。粉末にはたとえば平均粒径3μmの鉄粉を用いることができるが、これに限るものではない。   As shown in FIG. 2, the three-dimensional shaped object manufactured in this product is supplied by the blade 21 with the powder overflowed from the powder tank 23 on the surface of the modeling base 22 on the upper surface of the stage 20 and simultaneously leveled by the blade 21. Then, the first powder layer 10 is formed, and a portion of the powder layer 10 to be cured is irradiated with a light beam (laser) L to sinter the powder, and the sintered layer 11 integrated with the base 22 is formed. Form. Thereafter, the stage 20 is lowered a little and the powder is supplied again and leveled by the blade 21 to form the second powder layer 10 on the first powder layer 10 (and the sintered layer 11). Then, the portion of the second powder layer 10 to be cured is irradiated with a light beam (laser) L to sinter the powder to form a sintered layer 11 integrated with the lower sintered layer 11. . For example, iron powder having an average particle diameter of 3 μm can be used as the powder, but is not limited thereto.

ステージ20を下降させて新たな粉末層10を形成し、光ビームを照射して所要箇所を焼結層11とする工程を繰り返すことで、焼結層の積層物として目的とする三次元形状造形物を製造するものであり、光ビームとしては炭酸ガスレーザーを好適に用いることができ、粉末層10の厚みΔt1としては、得られた三次元形状造形物を成形用金型などに利用する場合、0.05mm程度とするのが好ましい。光ビームの照射経路(ハッチング経路)は、図4に示すように、予め三次元CADデータから作成しておくことができる。たとえば、三次元CADモデルから生成したSTLデータを等ピッチ(Δt1を0.05mmとした場合、0.05mmピッチ)でスライスした各断面の輪郭形状データを用いる。   The stage 20 is lowered to form a new powder layer 10, and a process of irradiating a light beam to make the required portion a sintered layer 11 is repeated, thereby forming a desired three-dimensional shape as a laminate of the sintered layers. When a carbon dioxide laser can be suitably used as the light beam, and the thickness Δt1 of the powder layer 10 is used as a molding die, etc. The thickness is preferably about 0.05 mm. The irradiation path (hatching path) of the light beam can be created in advance from three-dimensional CAD data as shown in FIG. For example, contour shape data of each cross section obtained by slicing STL data generated from a three-dimensional CAD model at an equal pitch (0.05 mm pitch when Δt1 is 0.05 mm) is used.

そして、上記粉末層10を形成しては光ビームを照射して焼結層11を形成することを繰り返していくのであるが、焼結層11の全厚みがたとえば除去手段4におけるミーリングヘッド41の工具長さなどから求めた所要の値になれば、いったん除去手段4を作動させてそれまでに造形した造形物の表面を切削することで、造形表面に付着した粉末による低密度表面層を除去すると同時に、その内側の密度が高い部分まで削り込むことで、造形物表面に密度が高い部分を全面的に露出させることができる。除去手段4の工具が直径1mm、有効刃長(首下長さ)3mmで深さ3mmの切削加工が可能であり、粉末層10の厚みが0.05mmであるならば、焼結層11の形成時に過剰焼結部が0.1mm〜0.5mmほど垂れ下がって生じることから、たとえば40層の焼結層11を積層する毎に除去手段4を作動させ、前回の切削除去で一度切削したところも1mmほどオーバーラップさせて切削することが好ましい。   Then, the powder layer 10 is formed and the light beam is irradiated to repeatedly form the sintered layer 11. The total thickness of the sintered layer 11 is, for example, that of the milling head 41 in the removing means 4. Once the required value is obtained from the tool length, etc., the removal means 4 is operated once to cut the surface of the modeled object so far, thereby removing the low-density surface layer from the powder adhering to the modeled surface. At the same time, the portion having a high density can be entirely exposed on the surface of the modeled object by cutting into the portion having a high density inside. If the tool of the removing means 4 has a diameter of 1 mm, an effective blade length (neck length) of 3 mm and a depth of 3 mm, and the powder layer 10 has a thickness of 0.05 mm, the sintered layer 11 Since the excessively sintered portion hangs down by about 0.1 mm to 0.5 mm at the time of formation, the removing means 4 is operated each time the 40 sintered layers 11 are laminated, for example, and the cutting is performed once by the previous cutting removal. Further, it is preferable to cut with an overlap of about 1 mm.

除去手段4による切削加工経路は、光ビームの照射経路と同様に予め三次元CADデータから作成すればよい。この場合、等高線加工を適用して加工経路を決定するが、Z方向ピッチは焼結時の積層ピッチにこだわる必要はなく、緩い傾斜の場合はZ方向ピッチをより細かくして補間することで、滑らかな表面を得られるようにしておく。   The cutting path by the removing means 4 may be created in advance from three-dimensional CAD data in the same manner as the light beam irradiation path. In this case, the machining path is determined by applying contour line processing, but the Z direction pitch does not need to stick to the stacking pitch at the time of sintering, and in the case of a gentle slope, by interpolating with a finer Z direction pitch, Keep a smooth surface.

ここにおいて、粉末に光ビームを照射して焼結させる時、前述のようにヒューム6が発生する。このヒューム6は立ち上るようにして光ビームの照射範囲Aの直上位置に達することから、ここではチャンバー5における窓50を上記直上位置から横にずらした位置に配置して、粉末層10に対する光ビームの照射が斜め方向から行われるようにしている。つまり、窓50の位置を上記直上位置から外すことによってヒューム6が窓50の内面に付着したり焼き付いたりする虞を低減しているものである。なお、窓50と上記照射範囲Aとは重なることがないようにしておくのが好ましいが、一部重なったとしても、窓50における重なったところを光ビームLが通過しないのであれば、問題となることはない。   Here, when the powder is irradiated with a light beam and sintered, fumes 6 are generated as described above. Since the fumes 6 reach the position immediately above the irradiation range A of the light beam so as to stand up, here, the window 50 in the chamber 5 is arranged at a position shifted laterally from the position just above, and the light beam with respect to the powder layer 10 is disposed. Is performed from an oblique direction. That is, by removing the position of the window 50 from the position directly above, the possibility that the fume 6 adheres to or burns into the inner surface of the window 50 is reduced. Note that it is preferable that the window 50 and the irradiation range A do not overlap. However, even if they partially overlap, if the light beam L does not pass through the overlapping portion of the window 50, there is a problem. Never become.

ところで光ビームが粉末層10に常に斜め上方から照射されるということは、粉末層10に当たる光ビームスポットが円形とならずに楕円形となってしまうものであり、しかも窓50からの距離によって形状も変わってしまう。このためにここでは上記光ビーム照射手段3におけるガルバノミラー31等で構成されたスキャン光学系の前段に、ビーム形状補正手段35を配して、照射面である粉末層10には略円形のスポットビームが照射されるようにしている。   By the way, the fact that the light beam is always applied to the powder layer 10 obliquely from above means that the light beam spot that hits the powder layer 10 becomes an ellipse instead of a circle, and the shape depends on the distance from the window 50. Will also change. For this purpose, here, a beam shape correcting means 35 is arranged in front of the scanning optical system composed of the galvanometer mirror 31 and the like in the light beam irradiating means 3, and a substantially circular spot is formed on the powder layer 10 as the irradiation surface. The beam is irradiated.

図5はこのビーム形状補正手段35の一例を示しており、一対のシリンドリカルレンズ36,37、これらレンズ36,37を光ビームの軸線回りに回転させる回転駆動機構38とで構成されている。なお、一対のシリンドリカルレンズ36,37を光ビームの軸線方向に並べて配置する場合、いずれか一方もしくは両方のレンズ36、37を回転させることができるようにしておくと同時に、光ビームの光軸方向に個別に移動させて互いの間隔を変更できるようにしている。   FIG. 5 shows an example of the beam shape correcting means 35, which includes a pair of cylindrical lenses 36 and 37, and a rotation drive mechanism 38 that rotates the lenses 36 and 37 around the axis of the light beam. In the case where the pair of cylindrical lenses 36 and 37 are arranged side by side in the axial direction of the light beam, either one or both of the lenses 36 and 37 can be rotated and at the same time the optical axis direction of the light beam. The distance between each other can be changed individually.

シリンドリカルレンズ36,37であるレンズ系に光ビームを通過させる時、図5に示すように、両レンズ36,37の円弧凸面gの軸方向が直交している状態では、図6(a)に示すように、通常の断面円形状の光ビームLが得られる。そして、レンズ36,37の間隔を調整することによって、ビーム径を拡大縮小させることができる。また、レンズ36とレンズ37の円弧凸面gの軸方向が互いに平行でいずれも垂直方向を向いていれば、図6(b)に示すように長軸が垂直方向を向いた断面楕円形状の光ビームLを得ることができ、レンズ36,37の円弧凸面gの軸方向が平行で、水平あるいは斜めを向いていれば、図6(c)(d)に示すように、長軸がそれぞれの方向を向いた断面楕円形状の光ビームLを得ることができる。さらに、レンズ36,37の円弧凸面gの軸方向を平行状態と直交状態の間で一定の角度で交差する状態にすれば、断面楕円形状の長軸と短軸の比率を任意に調整することができる。   When passing the light beam through the lens system which is the cylindrical lenses 36 and 37, as shown in FIG. 5, in the state where the axial directions of the arc convex surfaces g of both the lenses 36 and 37 are orthogonal, FIG. As shown, an ordinary light beam L having a circular cross section is obtained. The beam diameter can be enlarged or reduced by adjusting the distance between the lenses 36 and 37. If the axial directions of the convex arcs g of the lens 36 and the lens 37 are parallel to each other and are oriented in the vertical direction, as shown in FIG. 6 (b), light having an elliptical cross section with the major axis oriented in the vertical direction. If the beam L can be obtained, and the axial directions of the convex arcs g of the lenses 36 and 37 are parallel and are oriented horizontally or obliquely, the major axes are respectively shown in FIGS. 6 (c) and 6 (d). A light beam L having an elliptical cross section facing the direction can be obtained. Furthermore, if the axial direction of the arc convex surface g of the lenses 36 and 37 is made to intersect at a constant angle between the parallel state and the orthogonal state, the ratio of the major axis to the minor axis of the elliptical cross section can be arbitrarily adjusted. Can do.

そして、粉末層10の表面である照射面に至った時に略円形のスポットビームとなるような楕円形の断面の光ビームLが上記ビーム形状補正手段35から出射されるようにしておくことで、斜め方向から光ビームLを照射するにもかかわらず、照射面にはほぼ円形のスポットビームを当てることができる。特に光ビームLの照射位置によって変わる照射角度に応じて光ビームの断面形状を補正していくことで、照射面には常に円形のスポットビームを当てることができる。   Then, by making the light beam L having an elliptical cross section that becomes a substantially circular spot beam when reaching the irradiation surface, which is the surface of the powder layer 10, emitted from the beam shape correcting means 35, In spite of irradiating the light beam L from an oblique direction, a substantially circular spot beam can be applied to the irradiated surface. In particular, by correcting the cross-sectional shape of the light beam according to the irradiation angle that varies depending on the irradiation position of the light beam L, a circular spot beam can always be applied to the irradiation surface.

なお、ここでは光ビーム形状補正手段35として2つのシリンドリカルレンズ36,37を用いたものを示したが、円形のスポットビームを長軸が特定方向に向いた楕円形のスポットビームに変更するだけのレンズで構成されたものであってもよい。   In this example, two cylindrical lenses 36 and 37 are used as the light beam shape correcting means 35. However, the circular spot beam is simply changed to an elliptical spot beam whose major axis is directed to a specific direction. It may be composed of a lens.

図7に他例を示す。これはチャンバー5における光ビームLを透過させる窓50を光ビームLの照射範囲の直上位置からずらしただけではヒューム6が窓50に付着することを完全に防ぐことができないことに鑑み、光透過性で且つヒューム6の通過を遮るヒューム遮断手段でチャンバー5内を二分し、その一方にステージ20を配置し、他方に光ビームLの最終出射部となる窓50を配置したものである。   FIG. 7 shows another example. This is because the fume 6 cannot be completely prevented from adhering to the window 50 simply by shifting the window 50 that transmits the light beam L in the chamber 5 from the position immediately above the irradiation range of the light beam L. The chamber 5 is bisected by a fume blocking means that blocks the passage of the fume 6, the stage 20 is disposed on one of the chambers 5, and the window 50 serving as the final emission portion of the light beam L is disposed on the other.

ここにおけるヒューム遮断手段としては、図7(a)に示すような透明板60であってもよいが、図7(b)に示すように、エアカーテン(ガスカーテン)61を好適に用いることができ、特にチャンバー5内を非酸化雰囲気とするためにチャンバー5内に供給する窒素ガスのような雰囲気ガスによるガスカーテン61を構成すると、雰囲気を保ちつつヒュームが窓50側に達してしまわないようにすることを容易に実現することができる。   The fume blocking means here may be a transparent plate 60 as shown in FIG. 7 (a), but an air curtain (gas curtain) 61 is preferably used as shown in FIG. 7 (b). In particular, if the gas curtain 61 is formed of an atmospheric gas such as nitrogen gas supplied into the chamber 5 to make the inside of the chamber 5 a non-oxidizing atmosphere, the fume does not reach the window 50 side while maintaining the atmosphere. It can be easily realized.

図8に別の例を示す。これは光ビームLの照射範囲の直上位置にヒューム捕捉手段7を配置したものである。図示例におけるヒューム捕捉手段7は、エアポンプ70とフィルター71とで構成され、上記直上位置に開口する吸い込み口からチャンバー5内の雰囲気ガスを吸引してフィルター71に通すことでヒューム6や飛散した粉末を捕捉する。なお、吸引した雰囲気ガスはチャンバー5内に環流させているが、この時、上記エアカーテン61を構成するようにしておくと、ヒューム6による光透過率の低下をきわめて確実に且つ合理的に防止することができる。   FIG. 8 shows another example. This is one in which the fume capturing means 7 is arranged at a position immediately above the irradiation range of the light beam L. The fume capturing means 7 in the illustrated example is composed of an air pump 70 and a filter 71, and the atmospheric gas in the chamber 5 is sucked from the suction port that opens to the position directly above and passed through the filter 71. To capture. The sucked atmospheric gas is circulated in the chamber 5, but if the air curtain 61 is configured at this time, a decrease in light transmittance due to the fumes 6 can be prevented extremely reliably and reasonably. can do.

フィルター71としてはヒューム6や粉末の捕捉に有効であればどのようなものであってもよく、ラビリンス型、サイクロン型のものを用いてもよい。粉末が磁性体材料である場合は磁石を用いてもよい。   The filter 71 may be any filter as long as it is effective for capturing the fume 6 and powder, and may be a labyrinth type or a cyclone type. If the powder is a magnetic material, a magnet may be used.

図9はチャンバー5における光ビームLの照射範囲の直上の天井部に蓋51によって開閉される開口部52を設けたものを示している。この開口部52は製造した造形物のクレーン8による取り出しのために設けたものであるが、チャンバー5内は上記焼結時、不活性ガスを充填しておくことから、パッキン等を用いて蓋51を閉めた時にチャンバー5が密閉されるようにしておく。   FIG. 9 shows the chamber 5 provided with an opening 52 that can be opened and closed by a lid 51 in the ceiling portion directly above the irradiation range of the light beam L. The opening 52 is provided for taking out the manufactured object by the crane 8. Since the inside of the chamber 5 is filled with an inert gas at the time of sintering, the opening 52 is covered with packing or the like. The chamber 5 is hermetically sealed when 51 is closed.

蓋51の開閉構造は図9に示すヒンジによる回転式のもののほか、図10に示すように、フォールディングタイプの蓋51を用いたり、スライド式の蓋51を用いたりしてもよく、蓋51の開閉構造は図示例に限定されるものではない。   The opening / closing structure of the lid 51 may be a rotary type with a hinge shown in FIG. 9, or a folding type lid 51 or a sliding type lid 51 as shown in FIG. The opening / closing structure is not limited to the illustrated example.

また、図11に示すように、ヒューム捕捉手段7を併用する場合は、ヒューム捕捉手段7もスライド移動などで上記直上位置から退去させることができるようにしておいたり、蓋51にヒューム捕捉手段7を設けて、開口部52を通じた造形物の取り出しを妨げることがないようにしておく。   Further, as shown in FIG. 11, when the fume capturing means 7 is used in combination, the fume capturing means 7 can also be moved away from the position immediately above by sliding movement or the like, and the fume capturing means 7 is attached to the lid 51. Is provided so as not to prevent the removal of the modeled object through the opening 52.

焼結が完了した時点では、ステージ20上には造形物のほかに、固化されなかった粉末が残っていることから、図12に示すように、吸引ノズル55を用いて未固化の粉末を吸引してストッカー56に溜めたり、あるいは図13に示すように、ステージ20を上昇させた状態でステージ20を回転させることで粉末をステージ20上から吹き飛ばすことで、ステージ20上から粉末の除去が完了した時点で蓋51が開かれるようにしておくことが好ましい。図13中の91はステージ20の回転駆動用のモータ、92はギアである。   At the time when the sintering is completed, in addition to the modeled object, the powder that has not been solidified remains on the stage 20, and as shown in FIG. 12, the unsolidified powder is sucked using the suction nozzle 55. As shown in FIG. 13, the powder is blown off from the stage 20 by rotating the stage 20 while the stage 20 is raised, and the removal of the powder from the stage 20 is completed. It is preferable that the lid 51 is opened at that time. In FIG. 13, 91 is a motor for driving the rotation of the stage 20, and 92 is a gear.

また、チャンバー5内には前述のように不活性ガスが充填されたりヒュームが残存していたりすることから、図14に示す真空ポンプ81によるチャンバー5内雰囲気ガスの吸引とコンプレッサ82によるチャンバー5内への空気供給とによるチャンバー5内の雰囲気の清浄処理並びに雰囲気ガスと空気との置換処理を行いつつ、パーティクルカウンター85によるチャンバー内の残留ヒューム量や塵の測定と、酸素濃度センサー86によるチャンバー5内の酸素濃度の測定とを行い、残留ヒューム量及び酸素濃度が夫々所定値を下回った時点で蓋51を開いて開口部52からの三次元形状造形物の取り出しを行うようにしておくことが好ましい。図中83は不活性ガス(窒素ガス)をチャンバー5内に送り込むためのポンプ、Cは該製造装置の動作を制御する制御装置であり、上記パーティクルカウンター85や酸素濃度センサー86が接続された該制御装置Cは、前記粉末層形成手段2と光ビーム照射手段3と除去手段4のほか、上記ポンプ81,83及びコンプレッサ82とチャンバー5との間に配されたバルブ86の開閉や、蓋51の開閉も制御する。   Further, as described above, the chamber 5 is filled with the inert gas or the fumes remain, so that the atmosphere gas in the chamber 5 is sucked by the vacuum pump 81 shown in FIG. While performing the cleaning process of the atmosphere in the chamber 5 by the air supply to the atmosphere and the replacement process of the atmosphere gas and air, the measurement of residual fumes and dust in the chamber by the particle counter 85, and the chamber 5 by the oxygen concentration sensor 86 The oxygen concentration is measured and the lid 51 is opened when the residual fume amount and the oxygen concentration are lower than the predetermined values, respectively, and the three-dimensional shaped object is taken out from the opening 52. preferable. In the figure, 83 is a pump for sending an inert gas (nitrogen gas) into the chamber 5, and C is a control device for controlling the operation of the manufacturing apparatus, to which the particle counter 85 and the oxygen concentration sensor 86 are connected. In addition to the powder layer forming means 2, the light beam irradiating means 3 and the removing means 4, the control device C opens and closes a valve 86 disposed between the pumps 81 and 83 and the compressor 82 and the chamber 5, and covers the lid 51. Also controls the opening and closing of.

ところで、クレーン8による造形物の取り出しを用意とするために、図15(a)に示すように吊りボルト用ねじ穴88を造形物に焼結時に形成しておいたり、図15(b)に示すようにステージ20と三次元形状造形物との間に介在させたプレート29に吊りボルト用ねじ穴88を設けておくとよい。   By the way, in order to prepare for removal of the modeled object by the crane 8, as shown in FIG. 15 (a), a screw hole 88 for a suspension bolt is formed in the modeled object at the time of sintering. As shown, a suspension bolt screw hole 88 may be provided in the plate 29 interposed between the stage 20 and the three-dimensional shaped object.

本発明の実施の形態の一例の破断斜視図である。It is a fracture perspective view of an example of an embodiment of the invention. 同上の動作説明図である。It is operation | movement explanatory drawing same as the above. 同上の概略断面図である。It is a schematic sectional drawing same as the above. 同上の説明図である。It is explanatory drawing same as the above. 同上のビーム形状補正手段の斜視図である。It is a perspective view of a beam shape correction means same as the above. (a)(b)(c)(d)は同上のビーム形状補正手段によるビーム形状補正の説明図である。(a), (b), (c), and (d) are explanatory diagrams of beam shape correction by the beam shape correction means described above. (a)(b)は夫々他例の概略断面図である。(a) (b) is a schematic sectional drawing of another example, respectively. 別の例の概略断面図である。It is a schematic sectional drawing of another example. 更に他例の断面図である。Furthermore, it is sectional drawing of another example. (a)(b)は蓋の開閉構造の他例を示す断面図である。(a) (b) is sectional drawing which shows the other example of the opening-closing structure of a lid | cover. 他の例の断面図である。It is sectional drawing of another example. 更に他の例の断面図である。It is sectional drawing of another example. (a)(b)は別の例の断面図である。(a) (b) is sectional drawing of another example. 他の例のブロック図である。It is a block diagram of another example. (a)(b)は異なる例の断面図である。(a) (b) is sectional drawing of a different example.

符号の説明Explanation of symbols

2 粉末層供給手段
3 光ビーム照射手段
L 光ビーム
2 Powder layer supply means 3 Light beam irradiation means L Light beam

Claims (8)

ステージ上に形成された粉末層の所定箇所に光ビームを照射して照射位置の粉末を焼結する光ビーム照射手段と、ステージ上及び既に焼結された焼結層上に粉末層を供給する粉末供給手段とを備えるとともに、光ビーム照射手段はその光ビームの照射範囲の直上位置からずれた位置に配されて粉末層に斜め方向から光ビームを照射するものであることを特徴とする三次元形状造形物の製造装置。   A light beam irradiation means for irradiating a predetermined portion of the powder layer formed on the stage with a light beam to sinter the powder at the irradiation position, and supplying the powder layer on the stage and on the already sintered sintered layer A powder supply means, and the light beam irradiation means is arranged at a position shifted from a position immediately above the irradiation range of the light beam and irradiates the powder layer with the light beam from an oblique direction. Production equipment for original shaped objects. 光ビーム照射手段は照射面での光ビームスポット形状を略円形のものとするビーム形状補正手段を備えていることを特徴とする請求項1記載の三次元形状造形物の製造装置。   2. The apparatus for manufacturing a three-dimensional shaped object according to claim 1, wherein the light beam irradiating means includes beam shape correcting means for making the light beam spot shape on the irradiation surface substantially circular. 光ビーム照射手段の光ビーム出射部とこの光ビーム照射手段が出力する光ビームの照射範囲との間に、光透過性で且つ光ビーム照射による焼結部から発生するヒュームの通過を遮るヒューム遮断手段を配していることを特徴とする請求項1または請求項2記載の三次元形状造形物の製造装置。   Fume interception between the light beam emitting part of the light beam irradiating means and the light beam irradiation range output by the light beam irradiating means, which is light transmissive and blocks the passage of fumes generated from the sintered part by the light beam irradiation. The apparatus for producing a three-dimensional shaped object according to claim 1 or 2, wherein means are provided. 光ビームの照射範囲の直上位置にヒュームを捕捉する捕捉手段を備えていることを特徴とする請求項1〜3のいずれか1項に記載の三次元形状造形物の製造装置。   The three-dimensional shaped article manufacturing apparatus according to any one of claims 1 to 3, further comprising a capturing unit that captures fume at a position immediately above the irradiation range of the light beam. ステージ及び粉末供給手段が内部に配されているチャンバーにおける光ビームの照射範囲の直上位置には、焼結形成された三次元形状造形物の取り出し用で且つ開閉自在な蓋で閉じられた開口部を備えていることを特徴とする請求項1〜4のいずれか1項に記載の三次元形状造形物の製造装置。   At the position directly above the light beam irradiation range in the chamber in which the stage and powder supply means are arranged, there is an opening for taking out the sintered three-dimensional shaped object and closed with an openable / closable lid The apparatus for producing a three-dimensional shaped article according to any one of claims 1 to 4, wherein the three-dimensional shaped article is provided. 粉末層の所定箇所に光ビームを照射して焼結することで形成した焼結層の表面に新たな粉末層を積層し、この新たな粉末層の所定箇所に光ビームを照射して焼結することで下層の焼結層と一体となった新たな焼結層を形成することを繰り返して三次元形状造形物を製造するにあたり、光ビームをその照射範囲の直上位置からずれた斜め方向から照射して焼結を行うことを特徴とする三次元形状造形物の製造方法。   A new powder layer is laminated on the surface of the sintered layer formed by irradiating and sintering a light beam to a predetermined part of the powder layer, and the predetermined part of the new powder layer is irradiated with a light beam and sintered. When manufacturing a three-dimensional shaped object by repeatedly forming a new sintered layer integrated with the lower sintered layer, the light beam is obliquely shifted from the position immediately above the irradiation range. A method for producing a three-dimensional shaped object characterized by performing irradiation and sintering. 焼結完了後、ステージ上の未固化粉末の除去を行い、この後、ステージ及び粉末供給手段が内部に配されているチャンバーにおける光ビームの照射範囲の直上位置に設けられている開閉自在な開口部を開いて該開口部を通じて三次元形状造形物の取り出しを行うことを特徴とする請求項6記載の三次元形状造形物の製造方法。   After the sintering is completed, the unsolidified powder on the stage is removed, and then the openable opening that is provided at a position immediately above the irradiation range of the light beam in the chamber in which the stage and the powder supply means are arranged. The method for producing a three-dimensional shaped object according to claim 6, wherein the part is opened and the three-dimensional shaped object is taken out through the opening. 焼結完了後、チャンバー内雰囲気の清浄処理並びに雰囲気ガスと空気との置換処理を行いつつ、チャンバー内の残留ヒューム量の測定及びチャンバー内の酸素濃度の測定を行い、残留ヒューム量及び酸素濃度が夫々所定値を下回った時点で開口部を開いて三次元形状造形物の取り出しを行うことを特徴とする請求項7記載の三次元形状造形物の製造方法。     After the sintering is completed, the residual fume amount and oxygen concentration are measured by measuring the residual fume amount in the chamber and the oxygen concentration in the chamber while cleaning the atmosphere in the chamber and replacing the atmospheric gas with air. 8. The method for producing a three-dimensional shaped object according to claim 7, wherein the three-dimensional shaped object is taken out by opening the opening when each of the values falls below a predetermined value.
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