JP2004261911A

JP2004261911A - Channel structure and its method of manufacturing

Info

Publication number: JP2004261911A
Application number: JP2003053921A
Authority: JP
Inventors: Takayuki Goto; 崇之後藤; Takeshi Tsuno; 武志津野; Kenji Shinya; 謙治新屋; 正宏 ▲船▼山; Masahiro Funayama; Shozo Hirai; 章三平井; Yasutaka Aoki; 泰高青木; Katsuhiro Saito; 克弘齋藤; Keiichi Sato; 恵一佐藤; Mitsuo Tani; 光夫谷
Original assignee: Mitsubishi Heavy Industries Ltd
Current assignee: Mitsubishi Heavy Industries Ltd
Priority date: 2003-02-28
Filing date: 2003-02-28
Publication date: 2004-09-24

Abstract

<P>PROBLEM TO BE SOLVED: To simply/inexpensively manufacture a channel structure equipped with a minute flow passage. <P>SOLUTION: Flow passage corrugated plate 2 formed by plastic processing and having a minute pattern 2a is used for forming the minute flow passage. The flow passage corrugated plate 2 is fitted in a header through hole 5 of a header plate 3 in an upper side to form a flow passage unit, and the flow passage corrugated plate 2 is fitted in a header through hole 5 of a header plate 3 in a lower side to form a flow passage unit. These flow passage units and a middle partition plate 10 are laminated so as to put the middle partition plate 10 between these flow passage units. An upper surface is sealed by an upper sealing plate 1 and an upper partition plate 9, and a lower surface is sealed by a lower partition plate 11 and a lower sealing plate 4, thereby realizing a heat-exchanging function. Catalysts 8, 13 are respectively supported in the minute flow passages, thereby realizing a reacting function. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は小型熱交換器や小型反応器など、微小流路を有するチャンネル構造体に関する。
【０００２】
【従来の技術】
小型熱交換器や小型反応器の構成要素である微小流路として、例えば代表寸法１０００μｍ（ミクロン）以下の微細な凹凸パターンを有するチャンネル構造体が使用されている。この種の微小流路はマイクロチャンネルと呼ばれる。
【０００３】
平板積層型の熱交換器や反応器において１つまたは複数の流体が流れる装置内流路を形成する手法として、溝やスリット等を加工した平板を積層し接合する手法が知られている。このような熱交換器や反応器の流路の代表寸法を小さくする（例えば、１００〜５００μｍ程度）と、流路の比表面積が増大し、これにより流路表面を介した熱交換あるいは化学反応の効率が向上することが判っている。
【０００４】
従来、１０００μｍ以下の微細パターンを形成する方法として、化学的材料除去加工法や物理的材料除去加工法などがある。化学的材料除去加工法では、例えばフォトリソグラフィとエッチング加工を組み合わせて基板材料を化学的に除去することで、微細パターンを形成して、チャンネル構造体を製造する。物理的材料除去加工法では、例えば打ち抜きやカッタ、エンドミル、放電加工などの機械加工により基板材料を物理的に除去することで、微細パターンを形成して、チャンネル構造体を製造する。
【０００５】
しかし、化学的材料除去加工法であるフォトリソグラフィとエッチング加工の組み合わせでは、加工能率が機械加工に比べて低く、また、エッチング液の交換やエッチング中の条件制御が必要なために生産性が低い。また、１つの流路パターンに対して１枚のマスクと１つのエッチング槽が必要であるから、単位時間当たりの生産数を機械加工並に向上させるには、設備の増強が必要でありコスト高となる。
【０００６】
一方、打ち抜きやカッタ、エンドミルなどの機械加工による物理的材料除去加工においては、金型や工具の損耗が著しいため、微細パターンの精度維持を行うには、高価な金型などの製作コスト、修正コスト及び交換の手間が必要となる。これらは、チャンネル構造体を構成要素とする小型熱交換器や小型反応器の大量生産時のネックとなる。
【０００７】
また、微小流路が必要な熱交換器や反応器も、物理的材料除去加工法あるいは化学的材料除去加工法によって製作された積層部品を積層した構造、例えば、微小溝を打ち抜き加工した平板を積層して構成した装置に制限される。
【０００８】
【特許文献１】
特開平１０−１３９４０２号公報（第２〜第３頁、図１）
【特許文献２】
特開２００１−２５５０８２号公報
【特許文献３】
特開２００１−２２６１０４号公報
【特許文献４】
特開２００２−３２０２号公報
【０００９】
【発明が解決しようとする課題】
本発明の課題は、上記従来技術の問題点に鑑み、チャンネル構造体を簡便かつ安価に製造可能な技術を提供することである。
【００１０】
【課題を解決するための手段】
第１発明は、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートと、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、前記ヘッダ用貫通穴にはめ込まれる流路波板と、前記流路波板の上に配置され、流体の流れる領域を区画する第１の封止板と、前記流路波板の下に配置され、流体の流れる領域を区画する第２の封止板とが積層され、層間に微小流路が形成されていることを特徴とするチャンネル構造体であり、一般に熱交換器としての機能を備える。
【００１１】
第２発明は、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートと、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、前記ヘッダ用貫通穴にはめ込まれる流路波板とからなる流路ユニットが複数、流体の流れる領域を区画する中間区画板を間に挟んで積層され、前記複数の流路ユニットが積層されてなる積層体と、前記積層体の上に配置され、流体の流れる領域を区画する第１の区画板と、前記第１の区画板の上に配置される第１の封止板と、前記積層体の下に配置され、流体の流れる領域を区画する第２の区画板と、前記第２の区画板の下に配置される第２の封止板とが積層され、層間に複数系統の微小流路が形成されていることを特徴とするチャンネル構造体であり、一般に熱交換器としての機能を備える。
【００１２】
第３発明は、第１発明または第２発明において、前記流路波板が塑性加工により形成されていることを特徴とする。
【００１３】
第４発明は、第１発明または第２発明において、前記ヘッダプレートに前記ヘッダ用貫通穴が複数個並んで形成され、各ヘッダ用貫通穴に前記流路波板がはめ込まれていることを特徴とする。
【００１４】
第５発明は、第１発明において、前記微小流路に触媒が担持されていることを特徴とするチャンネル構造体であり、一般に反応器としての機能を備える。
【００１５】
第６発明は、第１発明において、前記流路波板が第１の区画板と第２の区画板とで接合されることなく挟み込まれていることを特徴とする。
【００１６】
第７発明は、第２発明において、前記複数系統の微小流路に１つまたは複数種類の触媒が担持されていることを特徴とする。
【００１７】
第８発明は、第２発明において、各流路ユニットの前記流路波板が前記第１の区画板、前記中間区画板及び前記第２の区画板に接合されることなく、前記第１の区画板と前記中間区画板との間、前記中間区画板どうしの間及び前記中間区画板と前記第２の区画板との間にそれぞれ挟み込まれていることを特徴とする。
【００１８】
第９発明は、第２発明において、前記第１の封止板が前記第１の区画板を兼ねていることを特徴とする。
【００１９】
第１０発明は、第２発明において、前記第２の封止板が前記第２の区画板を兼ねていることを特徴とする。
【００２０】
第１１発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する流路波板を塑性加工により作製する工程と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートの前記ヘッダ用貫通穴に前記流路波板をはめ込み、前記流路波板の上で流体の流れる領域を区画する第１の区画板と、前記ヘッダプレートと、前記流路波板の下で流体の流れる領域を区画する第２の区画板とを積層する工程を含み、層間に微小流路を有するチャンネル構造体を製造することを特徴とするチャンネル構造体の製造方法である。
【００２１】
第１２発明は、第１１発明において、前記流路波板の塑性加工前あるいは後に、前記微細パターンの部分に触媒を担持させることを特徴とする。
【００２２】
第１３発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する流路波板を塑性加工により作製する工程と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートの前記ヘッダ用貫通穴に前記流路波板をはめ込み流路ユニットとし、前記流路ユニットを複数、流体の流れる領域を区画する中間区画板を間に挟んで積層され、前記複数の流路ユニットが積層されてなる積層体と、前記積層体の上に配置され、流体の流れを区画する第１の区画板と、前記第１の区画板の上に配置される第１の封止板と、前記積層体の下に配置され、流体の流れを区画する第２の区画板と、前記第２の区画板の下に配置される第２の封止板とが積層されてなる構造体を作製する工程を含み、層間に複数系統の微小流路を有するチャンネル構造体を製造することを特徴とするチャンネル構造体の製造方法である。
【００２３】
第１４発明は、第１３発明において、前記流路波板の塑性加工前あるいは後に、各微細パターンの部分に１つまたは複数種類の触媒を担持させることを特徴とする。
【００２４】
第１５発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第１の隔壁板と、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートと、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第２の隔壁板とが積層され、層間に微小流路が形成されていることを特徴とするチャンネル構造体であり、一般に熱交換器としての機能を備える。
【００２５】
第１６発明は、第１５発明において、第１の隔壁板及び第２の隔壁板の各微細パターン部分が塑性加工により形成されていることを特徴とする。
【００２６】
第１７発明は、第１５発明において、前記ヘッダプレートに前記ヘッダ用貫通穴が複数個並んで形成され、第１の隔壁板及び第２の隔壁板にそれぞれ微細パターン部分が複数個並んで形成されていることを特徴とする。
【００２７】
第１８発明は、第１５発明において、前記微小流路に触媒が担持されていることを特徴とし、一般に反応器としての機能を備える。
【００２８】
第１９発明は、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートが複数、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する中間隔壁板を間に挟んで積層され、前記複数のヘッダプレートが積層されてなる積層体の上に、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第１の隔壁板が積層され、前記第１の隔壁板の上に第１の封止板が積層され、前記積層体の下に、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第２の隔壁板が積層され、前記第２の隔壁板の下に第２の封止板が積層され、層間に複数系統の微小流路が形成されていることを特徴とするチャンネル構造体であり、一般に熱交換器としての機能を備える。
【００２９】
第２０発明は、第１９発明において、前記第１の隔壁板、前記中間隔壁板及び前記第２の隔壁板の微細パターン部分が塑性加工により形成されていることを特徴とする。
【００３０】
第２１発明は、第１９発明において、前記複数系統の微小流路に１つまたは複数種類の触媒が担持されていることを特徴とし、一般に反応器としての機能を備える。
【００３１】
第２２発明は、第１９発明において、前記ヘッダプレートに前記ヘッダ用貫通穴が複数個並んで形成され、前記第１の隔壁板、前記中間隔壁板及び前記第２の隔壁板に微細パターン部分が複数個並んで形成されていることを特徴とする。
【００３２】
第２３発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個有し、流体の流れる領域を区画する第１の隔壁板と、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個有し、流体の流れる領域を区画する第２の隔壁板とを塑性加工により作製する工程と、前記第１の隔壁板と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートと、前記第２の隔壁板とを積層する工程とを含み、層間に微小流路を有するチャンネル構造体を製造することを特徴とするチャンネル構造体の製造方法である。
【００３３】
第２４発明は、第２３発明において、第１の隔壁板及び第２の隔壁板に前記微細パターンを塑性加工する前あるいは後に、前記微細パターンの部分に触媒を担持させることを特徴とする。
【００３４】
第２５発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個を有し、流体の流れる領域を区画する第１の隔壁板、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個を有し、流体の流れる領域を区画する第２の隔壁板と、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個を有し、流体の流れる領域を区画する中間隔壁板とを塑性加工により作製する工程と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートが複数、前記中間隔壁板を挟んで積層されてなる積層体と、前記積層体の上に配置される前記第１の隔壁板と、前記第１の隔壁板の上に配置される第１の封止板と、前記積層体の下に配置される前記第２の隔壁板と、前記第２の隔壁板の下に配置される第２の封止板とが積層されてなる構造体を作製する工程とを含み、層間に複数系統の微小流路を有するチャンネル構造体を製造することを特徴とするチャンネル構造体の製造方法である。
【００３５】
第２６発明は、第２５発明において、前記第１の隔壁板、前記第２の隔壁板及び前記中間隔壁に前記微細パターンを塑性加工する前あるいは後に、各微細パターンの部分に１つまたは複数種類の触媒を担持させることを特徴とする。
【００３６】
第２７発明は、第１発明または第２発明または第１５発明または第１９発明において、前記微小流路の水力直径、即ち、流路の断面積の４倍をぬれぶち長さで割った値が熱交換効率の確保に要する上限値と圧力損失の抑制に要する下限値との間の値であることを特徴とするチャンネル構造体である。
【００３７】
第２８発明は、第１発明または第２発明または第１５発明または第１９発明において、前記微小流路の水力直径、即ち、流路の断面積の４倍をぬれぶち長さで割った値が０．１ｍｍから１．４ｍｍの範囲の値であることを特徴とするチャンネル構造体である。
【００３８】
第２９発明は、チャンネル構造体の微小流路を構成する微細パターンを塑性加工により形成することを特徴とする微細パターン形成方法である。
【００３９】
【発明の実施の形態】
本発明の実施の形態では、微細な流路パターンの加工に、従来の打ち抜きやカッタ、エンドミルなどの物理的材料除去加工を用いず、また、フォトリソグラフィやエッチングなどの化学的材料除去加工を用いず、プレス成形やコルゲート成形などの塑性加工によって形成した微細チャンネルを用いて、熱交換器や反応器を構成する。このような微小流路（微小チャンネル）を備えることで体積寸法当たりの比表面積を増し、流体間の熱交換を高効率に行う機能を持った熱交換器を簡便に安価に製造することができる。また、この微小流路の表面に触媒を保持することで、これを通過する流体に触媒固有の反応を生ぜしめる機能を持った小型反応器を簡便に安価に製造することができる。もちろん、従来の打ち抜きやカッタ、エンドミルなどの物理的材料除去加工、あるいは、フォトリソグラフィやエッチングなどの化学的材料除去加工を用いて微細チャネルを形成しても良いが、塑性加工は、化学的材料除去加工に比べて高い加工効率を持ち、打ち抜きやカッタ、エンドミルなどの物理的材料除去加工に比べ、工具への負担を低減することができるため、プレス成形等により作製した部品を用いることで、製造工程における生産性や製造コスト（高精度金型の作製及び精度劣化に対するメンテナンスに伴う費用発生等）の問題を解消し、例えば小型熱交換器や小型反応器の安価かつ短時間での大量生産が可能となる。小型熱交換器や小型反応器は、例えば密閉空間に設置され、例えば燃料改質目的に使用される。
【００４０】
本発明の概要は、微細な凹凸パターンを例えば塑性加工により形成した流路波板を、流体の供給・排出機能を持つヘッダプレート、及び、封止板や区画板、中間区画板と積層することで、比表面積の高い微細流路を形成し、効率の良い例えば小型熱交換器を安価に製造する。また、上記の流路波板に触媒を担持することで、流体に効率良く化学反応作用を起させる例えば小型反応器を安価に実現する。
【００４１】
例えば、本発明では、
（１）例えば塑性加工を用いて形成した微細凹凸パターン（パターンのピッチあるいは高さが例えば０．１０ｍｍから１．４０ｍｍの範囲）を有する部品と、複数の流体の流路を区画する封止板や区画板、中間区画板と、各流体の供給・排出の機能を持つヘッダ用貫通穴を備えるヘッダプレートとを積層することで微小流路を形成し、この流路を通過する流体間で熱交換を行う小型熱交換器構造を得る。つまり、流体が流れる流路を、例えば塑性加工にて加工した微細な凹または凸または凹凸パターンを有する部品と、流体が流れる領域を規定し複数の流路を区画するための封止板や区画板、中間区画板と、流体の供給・排出の機能を果たすヘッダ用貫通穴を持つヘッダプレートとを積層することで、層間に微小流路を形成し、この流路を通過する流体との間で熱交換を行う小型熱交換器構造が得られる。この場合、外部からの加熱や冷却手段により流体と微小流路との間で熱交換を行う小型熱交換器構造、あるいは、複数の微小流路を隣接して形成し、流路壁を介して流体間で熱交換を行う小型熱交換器構造が考えられる。
（２）あるいは、上記微細凹凸パターンを持つ部品の表面に、触媒層を形成したり、触媒を担持した触媒体を成膜するなどして触媒を担持させることにより、流路を通過する流体に触媒固有の反応を生ぜしめる機能を持った小型反応器構造を得る。この場合、例えば異なる触媒を担持した触媒体を成膜することで、複数の触媒反応を進行させ、一方の反応によって得られた発熱や化学反応等の効果を他方にて利用する小型反応器構造が考えられる。
（３）あるいは、上記微細凹凸パターンを持つ部品と封止板や区画板、中間区画板との機能を一体化し、この一体物自体に例えば塑性加工により微細凹凸パターンを設け、ヘッダプレートと交互に積層することで、部品点数を減らした熱交換器構造や反応器構造を得ることが考えられる。
（４）微細凹凸パターンを有する部品は例えば塑性加工を用いて形成する。例えば、流路を形成するための微細パターンを塑性加工にて基板に形成し、ヘッダプレートと交互に積層することにより、熱交換器機能あるいは反応器機能を実現する微小流路を形成することが考えられる。
【００４２】
以下、図面を参照しながら本発明の実施の形態を説明する。
【００４３】
［第１実施例］
図１を参照して、本発明の第１実施例に係るチャンネル構造体を説明する。図１に示すチャンネル構造体は、上側封止板１と、流路波板２と、ヘッダプレート３と、下側封止板４を積層することで構成されており、例えば小型熱交換器（あるいはマイクロ熱交換器）として動作する。流路波板２は、ヘッダプレート３のヘッダ用貫通穴５にはめ込まれている。このチャンネル構造体は、例えば密閉空間に設置して使用される。
【００４４】
上側封止板１と下側封止板４は、例えば熱交換器内で、流体が流れる領域を区画あるいは規定するものである。上側封止板１及び下側封止板４の厚みは、任意である。上側封止板１と下側封止板４の外形及び大きさは基本的には任意であるが、本例では矩形例えば同じ大きさの正方形をなしている。矩形の大きさは基本的には任意であるが、例えば２〜４ｃｍ角を例示することができる。
【００４５】
流路波板２には、熱交換効率を高めるため、その全体に凹凸形状の微細パターン２ａが形成されている。微細パターン２ａは、例えばギヤ様の工具を用いたコルゲート成形あるいは型を用いたプレス成形等の塑性加工により形成されている。
【００４６】
微細パターン２ａの凹凸形状は、三角波形、矩形、エンボス形、その他の適宜な規則的形状あるいは不規則形状であって良い。
【００４７】
図１に示す例の流路波板２は、厚みが例えば１００μｍ程度の基板に、微細パターン２ａとして三角形状で、波高さ及びピッチがともに例えば数百μｍの凹凸形状を塑性加工を用いて形成している。微細パターン２ａの左右両端は開放している。例えば、基板に矩形のものを用い、流路波板２は微細パターン２ａの形成により正方形になっている。微細パターン２ａの数は基本的には任意であるが、例えば５０個と多数形成される。
【００４８】
ヘッダプレート３はその中央部にヘッダ用貫通穴５を有しており、ヘッダ用貫通穴５は流体の供給及び排出の機能を持っている。ヘッダプレート３の外形及び大きさは基本的には任意であるが、本例では上側封止板１及び下側封止板４と同じ大きさの矩形状をなしている。ヘッダ用貫通穴５の形成手法は任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【００４９】
ヘッダ用貫通穴５の形状は図１の例では、ヘッダプレート３の上辺及び下辺に対して平行な２辺と、ヘッダプレート３の右辺及び左辺に対して斜めの２辺とを持つ菱形であるが、流体の供給及び排出の機能を持つ限り、任意の形状で良い。
【００５０】
ヘッダプレート３の厚みは、流路波板２の波高さ（例えば数百μｍ）と等しいか、あるいは、微小な範囲で波高さよりも厚くまたは薄くされる。
【００５１】
本例では、上側封止板１には、流路波板２を避けるように、ヘッダ用貫通穴５と連通可能な位置、例えば右上隅に、貫通穴１ａが形成されている。また、下側封止板４にも、流路波板２を避けるように、上側封止板１の貫通穴１ａとは対角線上の反対側でヘッダ用貫通穴５と連通可能な位置、例えば左下隅に、貫通穴４ａが形成されている。つまり、本例では、上側封止板１と下側封止板４には、同形状に作製した封止板を向きを変えて使用できるようにしている。貫通穴１ａ、４ａの形成手法は任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【００５２】
そして、塑性加工を用いて基板に微細パターン２ａを形成することで流路波板２を予め作製しておき、この流路波板２をヘッダ用貫通穴５にはめ込んで収めた状態で、上側封止板１、流路波板２、ヘッダプレート３、下側封止板４を積層し、例えば、各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。これにより、例えば数百μｍの水力直径、即ち、流路断面の４倍をぶれぶち長さで割った値（以下、水力直径と呼ぶ）を持つ微小流路が形成されて、チャンネル構造体ができあがる。この場合、上記の接合を用いず、流路波板２を上側封止板１と下側封止板４とで挟み込んでも良い。挟み込みの場合、図示しない適宜なネジ止めやクリップ止めなどの保持機構により、上側封止板１、流路波板２、ヘッダプレート３及び下側封止板４の積層状態が保持される。このように流路波板２をヘッダ用貫通穴５にはめ込み、上側封止板１、流路波板２、ヘッダプレート３、下側封止板４を積層することにより、チャンネル構造体を容易に安価に形成することができる。特に、流路波板２を接合せず、上側封止板１と下側封止板４とで挟み込む場合は、チャンネル構造体をより容易・安価に形成することができる。
【００５３】
上側封止板１は流路波板２の上側を封止することで、流路波板２の上側における流れ領域を区画あるいは規定して微小流路を区画する。同様に、下側封止板４は流路波板２の下側を封止することで、流路波板２の下側における流れ領域を区画あるいは規定して微小流路を区画する。
【００５４】
従って、図１に示すチャンネル構造体は、外部からの加熱手段あるいは冷却手段により与えられる外部流体６と、微小流路を通過する液体や気体等の流体７、例えば被処理ガス７との間で熱交換を行うことができ、小型熱交換器として動作する。図１では外部流体６を上側封止板１の上面、下側封止板４の下面に流すようにしているが、上側封止板１、下側封止板４を加熱手段や冷却手段で直接加熱あるいは冷却するようにしてもよい。
【００５５】
図１の例では、矢印１０１で示すように、被処理ガス７は上側封止板１の貫通穴１ａから供給されてヘッダ用貫通穴５の右側に至り、ここから流路波板２の上下の微小流路（上側封止板１と流路波板２の間、流路波板２と下側封止板４の間）をそれぞれ通り、ヘッダ用貫通穴５の左側から下側封止板４の貫通穴４ａに至って排出される。
【００５６】
図１の例では、流路波板２が矩形で、かつ、ヘッダ用貫通穴５が菱形であるため、ヘッダ用貫通穴５のうち、上側封止板１の貫通穴１ａ及び下側封止板４の貫通穴４ａとの連通に要する部分の面積が少なくて済むという利点がある。
【００５７】
なお、ヘッダ用貫通穴５の形状及び大きさは、流路波板２をはめ込み囲むことができ、かつ、流体７の供給と排出に必要な領域を確保できる形状及び大きさを持つものであれば、任意である。
【００５８】
図１ではチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、図１に示すチャンネル構造体は上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【００５９】
［第２実施例］
次に、同じく図１を参照して、本発明の第２実施例に係るチャンネル構造体を説明する。本第２実施例のチャンネル構造体は小型反応器（あるいはマイクロ反応器）としての機能を有する。
【００６０】
本第２実施例のチャンネル構造体は、図１に示すように、上記第１実施例で説明したチャンネル構造体に対し、流路波板２の内表面または外表面の少なくとも一方に触媒８を担持させたものである。
【００６１】
本例では、触媒８の担持処理として、触媒８を予め担持した触媒体を流路波板２の内外両表面に成膜している。触媒８は流路波板２の塑性加工前に予め基板に担持させておいても良く、あるいは、塑性加工後に流路波板２の微細パターン２ａに担持させても良い。
【００６２】
そして、塑性加工を用いて基板に微細パターン２ａを形成するとともに表面に触媒８を担持させることで流路波板２を予め作製しておき、この流路波板２をヘッダ用貫通穴５にはめ込み収めた状態で、上側封止板１、流路波板２、ヘッダプレート３、下側封止板４を積層し、例えば各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。これにより、例えば数百μｍの水力直径を持ち、かつ、表面に触媒８が担持された微小流路が形成されて、チャンネル構造体ができあがる。この場合、上記の接合を用いず、流路波板２を上側封止板１と下側封止板４とで挟み込んでも良い。挟み込みの場合、図示しない適宜なネジ止めやクリップ止めなどの保持機構により、上側封止板１、流路波板２、ヘッダプレート３及び下側封止板４の積層状態が保持される。
【００６３】
従って、図１に示すように、触媒８が流路波板２の表面に担持されているチャンネル構造体は、微細流路を流れる流体（例えば被処理ガス）７に触媒８固有の触媒反応を生ぜしめる機能を持った小型反応器として動作する。被処理ガス７は矢印１０１で示すように、上側封止板１の貫通穴１ａから供給されてヘッダ用貫通穴５の右側に至り、ここから流路波板２の上下の微小流路をそれぞれ通り、ヘッダ用貫通穴５の左側から下側封止板４の貫通穴４ａに至って排出される。その際、必要に応じて、加熱または冷却用の外部流体６が上側封止板１の上面、下側封止板４の下面に流され、あるいは、上側封止板１、下側封止板４が加熱手段や冷却手段で直接加熱あるいは冷却される。
【００６４】
本例では、触媒８の担持処理が必要な流路波板２が、これを収納するヘッダプレート３及び上下の封止板１、４により構成される容器（ケーシング）とは別体であるため、触媒担持が不要な部分へのマスキング処理といった複雑な工程を必要とせず、流路波板２単体でのコーティングが可能となるメリットがある。また、触媒担持処理の工程と積層工程とを別系統とすることで、触媒８を担持した流路波板２の一括生産、触媒８の要求仕様の変更に対する即応性、触媒８の交換の容易性を実現できる。更に、用途に応じて流路波板２のみを別材料に容易に変更できるという利便性がある。
【００６５】
また、接合を用いず、流路波板２を上側封止板１と下側封止板４とで挟み込む場合は、製造工程の簡略化、接合工程での触媒８の劣化の抑制、触媒８の劣化時の交換容易、触媒８の新規開発触媒への交換容易といった利点がある。触媒８の劣化時の交換、触媒８の新規開発触媒への交換は、接合を用いた場合でも必ずしも不可能ではない。
【００６６】
上記第１実施例、第２実施例ではヘッダプレート３とそのヘッダ用貫通穴５にはめ込まれた流路波板２とがなす流路ユニットが１つであるが、図２に示すように、複数であっても良い。図２の例では、ヘッダプレート３と流路波板２との流路ユニットが３つ、流体の流れる領域を区画あるいは規定する中間区画板１０を間に挟んで積層される。そして、この積層体と、積層体の上に配置されて流体の流れる領域を区画あるいは規定する上側区画板９と、上側区画板９の上に配置される上側封止板１と、前記積層体の下に配置されて流体の流れる領域を区画あるいは規定する下側区画板１１と、下側区画板の下に配置される下側封止板４とを積層し、各層間に微小流路を形成している。本例では、上側区画板９、２つの中間区画版１０及び下側区画版１１は上側封止板１及び下側封止板４と同形状になっている。上側区画板９、中間区画版１０及び下側区画版１１の各右上隅には上側封止板１の貫通穴１ａと同位置にて貫通穴９ａ、１０ａ、１１ａがそれぞれ形成され、各左下隅には下側封止板４の貫通穴４ａと同位置にて貫通穴９ｂ、１０ｂ、１１ｂがそれぞれ形状されている。図２のチャンネル構造体では、矢印１０１で示すように、被処理ガス等の流体７は上側封止板１の貫通穴１ａから供給されて、上側区画板９の貫通穴９ａを経て、また、更に各中間区画板１０の貫通穴１０ａを経て各ヘッダプレート３のヘッダ用貫通穴５の右側に並列に流れ、ここから各流路波板２の上下の微小流路をそれぞれ通り、各ヘッダ用貫通穴５の左側から各中間区画板１０の貫通穴１０ｂ、下側区画板１１の貫通穴１１ｂを経て集まり、下側封止板４の貫通穴４ａに至って排出される。上側区画板９の貫通穴９ｂは上側封止板１により封止され、下側区画板１１の貫通穴１１ａは下側封止板４により封止され、流体７は漏れない。各流路波板２には、必要に応じて触媒が担持される。ここで、上側封止板１、上側区画板９、流路波板２、ヘッダプレート３、中間区画板１０、下側区画板１１、下側封止板４の積層手順は任意であり、例えば、下の部材あるいは上の部材から順に積層したり、ヘッダプレート３と流路波板２との流路ユニットを間に中間区画板１０を挟んで積層し、これで得た積層体の上に上側区画板９、上側封止板１を順に積層し、同積層体の下に下側区画板１１、下側封止板４を順次積層したりするなど、種々考えられる。要は、ヘッダプレート３と流路波板２との流路ユニットが複数、中間区画板１０を間に挟んで積層されてなる積層体と、この積層体の上に配置される上側区画板９と、上側区画板９の上に配置される上側封止板１と、前記積層体の下に配置される下側区画板１１と、下側区画板１１の下に配置される下側封止板４とが積層されてなる構造体が作製できれば良い。このことは、以下の説明においても同様である。更に、上側封止板１で上側区画板９を兼ねることができ、これにより上側区画板９を省略し、また、下側封止板４で下側区画板１１を兼ねることができ、これにより下側区画板１１を省略することができる。
【００６７】
［第３実施例］
図３を参照して、本発明の第３実施例に係るチャンネル構造体として、層間に複数の微細流路を有するものを説明する。図３に示すチャンネル構造体は、ヘッダプレート３とそれのヘッダ用貫通穴５にはめ込まれる流路波板２からなる流路ユニットが複数（図では２つ）、流体の流れる領域を区画または規定する中間区画板１０を間に挟んで積層され、これにより構成される積層体と、積層体の上に配置されて流体の流れる領域を区画または規定する上側区画板９と、上側区画板９の上に配置される上側封止板１と、前記積層体の下に配置されて流体の流れる領域を区画または規定する下側区画板１１と、下側区画板１１の下に配置される下側封止板４とが積層され、層間に複数系統の微小流路が形成されている。このチャンネル構造体は、例えば密閉空間に設置して使用される。
【００６８】
上側封止板１と下側封止板４は、主として封止の目的で使用される。上側区画板９と中間区画板１０と下側区画板１１は熱交換器内で流体が流れる領域を区画あるいは規定するものである。図３の例では、上側区画板９、中間区画板１０及び下側区画板１１の厚みを例えば１０〜１０００μｍとしている。上側封止板１、下側封止板４、上側区画板９、中間区画板１０及び下側区画板１１の外形及び大きさは基本的には任意であるが、本例では矩形例えば同じ大きさの正方形をなしている。矩形の大きさは基本的には任意であるが、例えば２〜４ｃｍ角を例示することができる。
【００６９】
各流路波板２にはそれぞれ、熱交換効率を高めるため、各々の全体に凹凸形状の微細パターン２ａが形成されている。微細パターン２ａ、１０ａは、例えばギヤ様の工具を用いたコルゲート成形あるいは型を用いたプレス成形等の塑性加工により形成されている。
【００７０】
微細パターン２ａの凹凸形状は、三角波形、矩形、エンボス形、その他の適宜な規則的形状あるいは不規則形状であって良い。
【００７１】
図３に示す例の流路波板２はそれぞれ、例えば厚み１００μｍ程度の基板に、微細パターン２ａとして三角形状で、波高さ及びピッチがともに数百μｍの凹凸形状を塑性加工を用いて形成している。微細パターン２ａの左右両端は開放している。例えば、基板に矩形のものを用い、流路波板２は微細パターン２ａの形成により正方形になっている。微細パターン２ａの数は、基本的には任意であるが、例えば５０本と多数形成される。
【００７２】
各ヘッダプレート３はそれぞれ中央部にヘッダ用貫通穴５を有しており、各ヘッダ用貫通穴５は流体の供給及び排出の機能を持っている。また、各ヘッダプレート３の外形及び大きさは基本的には任意であるが、本例では上側封止板１及び下側封止板４と同じ大きさの矩形状をなしている。ヘッダ用貫通穴５の形成手法は任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【００７３】
上側のヘッダプレート３のヘッダ用貫通穴５の形状は図３の例では、ヘッダプレート３の上辺及び下辺に対して平行な２辺と、ヘッダプレート３の右辺に対しては上辺に近い部分ほど右辺に近づく斜めの１辺と、ヘッダプレート３の左辺に対しては上辺に近い部分ほど左辺から遠のく斜めの１辺とを持つ菱形であるが、流体の供給及び排出の機能を持つ限り、任意の形状で良い。
【００７４】
一方、下側のヘッダプレート３のヘッダ用貫通穴５の形状は図３の例では、ヘッダプレート３の上辺及び下辺に対して平行な２辺と、ヘッダプレート３の右辺に対しては上辺に近い部分ほど右辺から遠のく斜めの１辺と、ヘッダプレート１１の左辺に対しては上辺に近い部分ほど左辺に近づく斜めの１辺とを持つ菱形であるが、流体の供給及び排出の機能を持つ限り、任意の形状で良い。
【００７５】
このように２つのヘッダプレート３間でヘッダ用貫通穴５の向きが異なっているが、同一形状の貫通穴を形成したヘッダプレートを表裏逆に配置することで、２つのヘッダプレート３に使用できるようにしている。
【００７６】
各ヘッダプレート３の厚みは、流路波板２の波高さ（例えば数百μｍ）と等しいか、あるいは、微小な範囲で波高さよりも厚くまたは薄くされる。
【００７７】
本例では、上側封止板１の右上隅に貫通穴１ａが形成され、左上隅に貫通穴１ｂが形成されている。そのうち、右上隅の貫通穴１ａは、流路波板２を避けるようにして、上側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。左上隅の貫通穴１ｂは、流路波板２を避けるようにして、上側のヘッダプレート３のヘッダ用貫通穴５とは連通せず、下側のヘッダプレート３のヘッダ用貫通穴５と連通するように形成されている。
【００７８】
同様に、下側封止板４の右下隅に貫通穴４ａが形成され、左下隅に貫通穴４ｂが形成されている。そのうち、右下隅の貫通穴４ａは、流路波板２を避けるようにして、下側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。左下隅の貫通穴４ｂは、流路波板２を避けるようにして、下側のヘッダプレート３のヘッダ用貫通穴５とは連通せず、上側のヘッダプレート３のヘッダ用貫通穴５と連通するように形成されている。
【００７９】
従って、上側封止板１と下側封止板４は貫通穴の位置を含めて同じ形状であり、同形状に作製した封止板を上側封止板１と下側封止板４に利用できるようになっている。
【００８０】
上側区画板９、中間区画板１０及び下側区画板１１にはそれぞれ４隅に、貫通穴９ａ、９ｂ、９ｃ、９ｄ、１０ａ、１０ｂ、１０ｃ、１０ｄ、１１ａ、１１ｂ、１１ｃ、１１ｄが形成されている。そのうち、右上隅の貫通穴９ａ、１０ａ、１１ａは上側封止板１の右上隅の貫通穴１ａに連通可能な位置に形成され、右下隅の貫通穴９ｂ、１０ｂ、１１ｂは下側封止板４の右下隅の貫通穴４ａに連通可能な位置に形成され、左下隅の貫通穴９ｃ、１０ｃ、１１ｃは下側封止板４の左下隅の貫通穴４ｂに連通可能な位置に形成され、左上隅の貫通穴９ｄ、１０ｄ、１１ｄは上側封止板１の左上隅の貫通穴１ａに連通可能な位置に形成されている。
【００８１】
各ヘッダプレート３には、ヘッダ用貫通穴５の外側にて、対角線上の右下隅及び左上隅にそれぞれ貫通穴３ａ、３ｂが形成されている。上側のヘッダプレート３の右下隅の貫通穴３ａは下側封止板４の右下隅の貫通穴１ａに、左上隅の貫通穴３ｂは上側封止板１の左上隅の貫通穴１ｂにそれぞれ連通可能な位置に形成されている。下側のヘッダプレート３の右上隅の貫通穴３ａは上側封止板１の右上隅の貫通穴１ａに、左下隅の貫通穴３ｂは下側封止板４の左下隅の貫通穴４ｂにそれぞれ連通可能な位置に形成されている。
【００８２】
このように上下２つのヘッダプレート３間で貫通穴３ａ、３ｂの配置が異なるが、穴位置を含めて同形状に作製したヘッダプレートを表裏逆に配置することで、各ヘッダプレート３に利用することができる。
【００８３】
上側封止板１、上側区画板９、ヘッダプレート３、中間区画板１０、下側区画板１１及び下側封止板４における貫通穴の形成手法は任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【００８４】
そして、塑性加工を用いて各基板に微細パターン２ａを形成することで流路波板２を予め作製しておき、この流路波板２を互いに微細パターン２ａが平行となるようにそれぞれヘッダプレート３のヘッダ用貫通穴５にはめ込み収めた状態で、上側封止板１、上側区画板９、上側の流路波板２、上側のヘッダプレート３、中間区画板１０、下側の流路波板２、下側のヘッダプレート３、下側区画板１１、下側封止板４を積層し、例えば各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。これにより、例えば数百μｍの水力直径を持つ複数系統の微小流路が層間に形成されて、チャンネル構造体ができあがる。この場合、上記の接合を用いず、各流路波板２を上側区画板９と中間区画板１０で、また、中間区画板１０と下側区画板１１で挟み込んでも良い。挟み込みの場合、図示しない適宜なネジ止めやクリップ止めなどの保持機構により、積層状態が保持される。このように流路波板２をヘッダ用貫通穴５にはめ込み積層することにより、チャンネル構造体を容易に安価に形成することができる。特に、流路波板２を接合せずに挟み込む場合は、チャンネル構造体をより容易・安価に形成することができる。
【００８５】
上側区画板９は上側の流路波板２の上側を封止することで、当該流路波板２の上側における流れ領域を規定して微小流路を区画する。また、中間区画板１０は上側の流路波板２の下側を封止することで、当該流路波板２の下側における流れ領域を規定して微小流路を区画し、下側の流路波板２の上側を封止することで、当該流路波板２の上側における流れ領域を規定して微小流路を区画する。下側区画板１１は下側の流路波板２の下側を封止することで、当該流路波板２の下側における流れ領域を規定して微小流路を区画する。
【００８６】
従って、上側の流路波板２の上下の微小流路が１つの流路系統となり、下側の流路波板２の上下の微小流路がもう１つの流路系統となる。そこで、別々の流体７、１２を上側封止板１の任意の２つの貫通穴から供給して別々の流路系統に通せば、中間区画板１０を介して相互間で熱交換が行うことができる。流体は任意の液体や気体などである。
【００８７】
例えば、図３に示すように、２つの流体（例えば被処理ガス）７、１２を上側封止板１の右上隅の貫通穴１ａと左上隅の貫通穴１ｂに別々に供給する場合を考える。この場合、流体７は矢印１０２で示すように、上側の流路波板２の上下の微小流路を通り、流体１２は矢印１０３で示すように、下側の流路波板２の上下の微小流路を通り、２つの流体７、１２は中間区画板１０を挟んで互いに反対方向に流れ、中間区画板１０を介した流路壁間で熱交換を行うことができる。その際、上側区画板９の貫通穴９ｂ、９ｃは上側封止板１により封止され、下側区画板１１の貫通穴１１ａ、１１ｄは下側封止板４により封止され、流体７、１２は漏れない。この場合も、上側封止板１で上側区画板９を兼ねることができ、これにより上側区画板９を省略し、また、下側封止板４で下側区画板１１を兼ねることができ、これにより下側区画板１１を省略することができる。
【００８８】
ここで、流体７は、矢印１０２で示すように、上側封止板１の右上隅の貫通穴１ａから供給されて上側の区画板９の貫通穴９ａを経て上側のヘッダプレート３のヘッダ用貫通穴５の右側に至り、ここから上側の流路波板２の上下の微小流路をそれぞれ右から左へ通り、ヘッダ用貫通穴５の左側から中間区画板１０の左下隅の貫通穴１０ｃ、下側のヘッダプレート３の左下隅の貫通穴３ｂ、下側区画板１１の貫通穴１１ｃ、下側封止板４の左下隅の貫通穴４ｂを順次経て排出される。
【００８９】
もう一方の流体１２は、矢印１０３で示すように、上側封止板１の左上隅の貫通穴１ｂから供給され、上側区画板９の貫通穴９ｄ、上側のヘッダプレート３の左上隅の貫通穴３ｂ、中間区画板１０の左上隅の貫通穴１０ｄを順次経て下側のヘッダプレート３のヘッダ用貫通穴５の左側に至り、ここから下側の流路波板２の上下の微小流路をそれぞれ左から右ヘ通り、ヘッダ用貫通穴１２の右側から下側区画板１１の貫通穴１１ｂ、下側封止板４の右下隅の貫通穴４ａを経て排出される。
【００９０】
つまり、流体７を上側封止板１の右上隅の貫通穴１ａに供給し、流体１２を上側封止板１の左上隅の貫通穴１ｂに供給する場合は、２つの流体７、１２の流れは向流型（ＣｏｕｎｔｅｒＦｌｏｗＴｙｐｅ）となる。従って、図３に示すチャンネル構造体は向流型の小型熱交換器としての機能を有する。
【００９１】
ここで、上側封止板１、下側封止板４は薄いものでも良いが、図４に示すように、厚いブロック状のものにすることができ、また、貫通穴１ａ、１ｂ、４ａ、４ｂに繋がる導管１４ａ、１４ｂを備えておくことができる。このことは、図１、図２に示した上側封止板１、下側封止板４、あるいは、後述する図５、図６、図８、図１１、図１２、図１３、図１４、図１５、図１６における上側封止板１、下側封止板４でも同様である。
【００９２】
図３ではヘッダプレート３とそのヘッダ用貫通穴５にはめ込まれた流路波板２とがなす流路ユニットが２つであるが、図５に示すように、これより多くても良い。図５の例では、ヘッダプレート３と流路波板２との流路ユニットが４つ、流体の流れる領域を区画あるいは規定する中間区画板１０を間に挟んで積層される。そして、この積層体と、積層体の上に配置されて流体の流れる領域を区画あるいは規定する上側区画板９と、上側区画板９の上に配置される上側封止板１と、前記積層体の下に配置されて流体の流れる領域を区画あるいは規定する下側区画板１１と、下側区画板の下に配置される下側封止板４とを積層し、層間毎に複数の微小流路を形成している。但し、上下に隣接する２つのヘッダプレート３間では、ヘッダ用貫通穴５の向きが逆になっている。
【００９３】
図５のチャンネル構造体では、矢印１０２で示すように、被処理ガス等の流体７は上側封止板１の貫通穴１ａから供給されて、上側区画板９の貫通穴９ａを経て、また、更には、各中間区画板１０の貫通穴１０ａ、上から偶数番目の各ヘッダプレート３の貫通穴３ａを経て上から奇数番目の各ヘッダプレート３のヘッダ用貫通穴５の右側に並列に流れ、ここから各流路波板２の上下の微小流路をそれぞれ通り、各ヘッダ用貫通穴５の左側から各中間区画板１０の貫通穴１０ｃ、上から偶数番目の各ヘッダプレート３の貫通穴３ｂ、下側区画板１１の貫通穴１１ｃを経て集まり、下側封止板４の貫通穴４ｂに至って排出される。また、矢印１０３で示すように、被処理ガス等の流体１２は上側封止板１の貫通穴１ｂから供給されて、上側区画板９の貫通穴９ｄを経て、また、更には、各中間区画板１０の貫通穴１０ｄ、上から奇数番目の各ヘッダプレート３の貫通穴３ｂを経て偶数番目の各ヘッダプレート３のヘッダ用貫通穴５の左側に並列に流れ、ここから各流路波板２の上下の微小流路をそれぞれ通り、各ヘッダ用貫通穴５の右側から各中間区画板１０の貫通穴１０ｂ、上から奇数番目の各ヘッダプレート３の貫通穴３ａ、下側区画板１１の貫通穴１１ｂを経て集まり、下側封止板４の貫通穴４ａに至って排出される。上側区画板９の貫通穴９ｂ、９ｃは上側封止板１により封止され、下側区画板１１の貫通穴１１ａ、１１ｄは下側封止板４により封止され、流体７、１２は漏れない。上側封止板１で上側区画板９を兼ねることができ、これにより上側区画板９を省略し、また、下側封止板４で下側区画板１１を兼ねることができ、これにより下側区画板１１を省略することができる。
【００９４】
次に、流体流れ方向の別の例として、図６に示すチャンネル構造体がある。図のチャンネル構造体は、図３のチャンネル構造体と比べると、上側封止板１と下側封止板４における貫通穴の位置が異なり，他は同じである。図６では、上側封止板１の右上隅と右下隅に貫通穴１ａ、１ｂを形成し、下側封止板４の左下隅と左上隅に貫通穴４ａ、４ｂを形成し、２つの流体７、１２を上側封止板１の右上隅の貫通穴１ａと右下隅の貫通穴１ｂに別々に供給する。この場合、流体７は矢印１０２で示すように、上側の流路波板２上下の微小流路を通り、流体１２は矢印１０４で示すように、下側の流路波板２上下の微小流路を通り、２つの流体７と１２は中間区画板１０を挟んで同じ方向に流れ、中間区画板１０を介した流路壁間で熱交換を行う。
【００９５】
詳しくは、図６の矢印１０２で示す流れでは、被処理ガス等の流体７は上側封止板１の貫通穴１ａから供給されて、上側区画板９の貫通穴９ａを経て上側のヘッダプレート３のヘッダ用貫通穴５の右側に流れ、ここから上側の流路波板２の上下の微小流路を通り、ヘッダ用貫通穴５の左側から中間区画板１０の貫通穴１０ｃ、下側のヘッダプレート３の貫通穴３ｂ、下側区画板１１の貫通穴１１ｃを経て、下側封止板４の貫通穴４ａに至って排出される。また、矢印１０４で示す流れでは、被処理ガス等の流体１２は上側封止板１の貫通穴１ｂから供給されて、上側区画板９の貫通穴９ｂ、上側のヘッダプレート３の貫通穴３ａ、中間区画板１０の貫通穴１０ｂを経て下側のヘッダプレート３のヘッダ用貫通穴５の右側に流れ、ここから下側の流路波板２の上下の微小流路を通り、ヘッダ用貫通穴５の左側から下側区画板１１の貫通穴１１ｄを経て、下側封止板４の貫通穴４ｂに至って排出される。上側区画板９の貫通穴９ｃ、９ｄは上側封止板１により封止され、下側区画板１１の貫通穴１１ａ、１１ｂは下側封止板４により封止され、流体７、１２は漏れない。上側封止板１で上側区画板９を兼ねることができ、これにより上側区画板９を省略し、また、下側封止板４で下側区画板１１を兼ねることができ、これにより下側区画板１１を省略することができる。
【００９６】
つまり、流体７を上側封止板１の右上隅の貫通穴１ａに供給し、流体１２を上側封止板１の右下隅の貫通穴１ｂに供給する場合は、２つの流体７、１２の流れは並流型（ＰａｒａｌｌｅｌＦｌｏｗＴｙｐｅ）となる。従って、図６に示すチャンネル構造体は並流型の小型熱交換器としての機能を有する。
【００９７】
ここで、図３、図５、図６に示した例では、複数の流路波板２を微細パターン２ａが互いに平行となるよう各にヘッダプレート３の貫通穴５に収めているが、複数の流路波板２を互いに微細パターン２ａが交差するようにヘッダプレート３のヘッダ用貫通穴５に収めることも可能である。
【００９８】
図７に示すチャンネル構造体は、図３あるいは図５、図６に示したチャンネル構造体と比べると、上下２つの流路波板２を互いに微細パターン２ａが直交するように各ヘッダプレート３のヘッダ用貫通穴５に収めている点と、各ヘッダプレート３のヘッダ用貫通穴５の形状が６角形である点と、上側区画板９、各ヘッダプレート３、中間区画板１０及び下側区画板１１の各貫通穴９ａ〜９ｄ、３ａ〜３ｂ、１０ａ〜１０ｄ、１１ａ〜１１ｄの配置位置が各部材９、３、１０、１１の辺中央部である点が異なり、他は同様である。従って、図７中で図３または図６と同一機能部材には同一符号を付すとともに、説明の重複を省く。
【００９９】
図７に示す例では、上側のヘッダプレート３のヘッダ用貫通穴５の形状は横向きの６角形であり、当該ヘッダプレート３の上辺及び下辺に対して平行な２辺を有し、これら平行２辺に右側から連なる２辺がなす頂点がヘッダプレート３の右辺中央部近くに位置し、前記平行２辺に左側から連なる２辺がなす頂点がヘッダプレート３の左辺中央部近くに位置している。
【０１００】
一方、下側のヘッダプレート３のヘッダ用貫通穴５の形状は縦向きの６角形であり、当該ヘッダプレート３の右辺及び左辺に対して平行な２辺を有し、これら平行２辺に上側から連なる２辺がなす頂点がヘッダプレート３の上辺中央部近くに位置し、前記平行２辺に下側から連なる２辺がなす頂点がヘッダプレート３の下辺中央部近くに位置している。
【０１０１】
このように２つのヘッダプレート３間でヘッダ用貫通穴５の向きが異なっているが、同一形状のヘッダ用貫通穴を形成したヘッダプレートを９０度回転して配置することで、２つのヘッダプレート３に使用できるようにしている。
【０１０２】
上側封止板１には、右辺中央部付近と上辺中央部付近に貫通穴１ａ、１ｂを形成し、下側封止板４には、下辺中央部付近と左辺中央部付近に貫通穴４ａ、４ｂを形成してある。
【０１０３】
図７では、上側区画板９の貫通穴９ａ、９ｂ、９ｃ、９ｄは４辺の各中央部付近に形成されている。そのうち、右辺中央部付近の貫通穴９ａと左辺中央部付近の貫通穴９ｃは、流路波板２を避けるようにして、上側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。一方、下辺中央部付近の貫通穴９ｂと上辺中央部付近の貫通穴９ｄは、上側のヘッダプレート３のヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０１０４】
同様に、下側区画板１１の貫通穴１１ａ、１１ｂ、１１ｃ、１１ｄは４辺の各中央部付近に形成されている。そのうち、下辺中央部付近の貫通穴１１ｂと上辺中央部付近の貫通穴１１ｄは、流路波板２を避けるようにして、下側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。一方、右辺中央部付近の貫通穴１１ａと左辺中央部付近の貫通穴１１ｃは、下側のヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０１０５】
上側のヘッダプレート３には、ヘッダ用貫通穴５の外側にて、下辺中央部付近及び上辺中央部付近にそれぞれ貫通穴３ａ、３ｂが形成されている。下辺中央部付近の貫通穴３ａは上側区画板９の下辺中央部付近の貫通穴９ｂに、上辺中央部付近の貫通穴３ｂは上側区画板９の上辺中央部付近の貫通穴９ｄにそれぞれ連通可能な位置に形成されている。
【０１０６】
一方、下側のヘッダプレート３には、ヘッダ用貫通穴３の外側にて、右辺中央部付近及び左辺中央部付近にそれぞれ貫通穴３ａ、３ｂが形成されている。右辺中央部付近の貫通穴３ａは下側区画板１１の右辺中央部付近の貫通穴１１ａに、左辺中央部付近の貫通穴３ｂは下側区画板１１の左辺中央部付近の貫通穴１１ｃにそれぞれ連通可能な位置に形成されている。
【０１０７】
中間区画板１０の貫通穴１０ａ、１０ｂ、１０ｃ、１０ｄは４辺の各中央部付近に形成されている。そのうち、右辺中央部付近の貫通穴１０ａは上側区画板９の右辺中央部付近の貫通穴９ａと下側区画板１１の右辺中央部付近の貫通穴１１ａとに連通可能な位置に形成され、下辺中央部付近の貫通穴１０ｂは上側区画板９の下辺中央部付近の貫通穴９ｂと上側のヘッダプレート３の下辺中央部付近の貫通穴３ａと下側区画板１１の下辺中央部付近の貫通穴１１ｂとに連通可能な位置に形成され、左辺中央部付近の貫通穴１０ｃは上側区画板９の左辺中央部付近の貫通穴９ｃと下側のヘッダプレート３の左辺中央部付近の貫通穴３ｂと下側区画板１１の左辺中央部付近の貫通穴１１ｃとに連通可能な位置に形成され、上辺中央部付近の貫通穴１１ｄは上側区画板９の上辺中央部付近の貫通穴９ｄと下側のヘッダプレート３の上辺中央部付近の貫通穴３ｂと下側区画板１１の上辺中央部付近の貫通穴１１ｄとに連通可能な位置に形成されている。
【０１０８】
従って、上側区画板９と中間区画板１０と下側区画板１１は貫通穴の位置を含めて同じ形状であり、同形状に作製した区画板を上側区画板９と中間区画板１０と下側区画板１１に利用できるようにしている。
【０１０９】
また、上下のヘッダプレート３間では貫通穴３ａ、３ｂの配置が異なるが、穴位置を含めて同形状に作製したヘッダプレートを９０度回転して配置することで、上下各ヘッダプレート３に利用することができる。
【０１１０】
そして、塑性加工を用いて各基板に微細パターン２ａを形成することで流路波板２を予め作製しておき、この流路波板２を互いに微細パターン２ａが例えば直交となるようにそれぞれ各ヘッダプレート３のヘッダ用貫通穴５に収めた状態（流路ユニット）で、上側封止板１、上側区画板９、上側の流路波板２、上側のヘッダプレート３、中間区画板１０、下側の流路波板２、下側のヘッダプレート３、下側区画板１１、下側封止板４を積層し、例えば、各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。これにより、例えば数百μｍの水力直径を持つ複数系統の微小流路が形成されて、チャンネル構造体ができあがる。この場合、上記の接合を用いず、上側の流路波板２を上側区画板９と中間区画板１０で挟み込み、また、下側の流路波板２を中間区画板１０と下側区画板１１で挟み込んでも良い。挟み込みの場合、図示しない適宜なネジ止めやクリップ止めなどの保持機構により、積層状態が保持される。
【０１１１】
従って、上側の流路波板２の上下の微小流路が１つの流路系統となり、下側の流路波板１０の上下の微小流路がもう１つの流路系統となり、被処理ガス等の流体７と被処理ガス等の流体１２を上側封止板１の任意の２つの貫通穴から供給して別々の流路系統に通すことにより中間区画板１０を介して相互間で熱交換が行われる。
【０１１２】
例えば、図７に示すように、２つの流体７、１２を上側封止板１の右辺中央部付近の貫通穴１ａと上辺中央部付近の貫通穴１ｂに別々に供給する場合を考える。この場合、流体７は矢印１０５で示すように、上側の流路波板２上下の微小流路を通り、流体１２は矢印１０６で示すように、下側の流路波板２の上下の微小流路を通り、２つの流体７、１２は中間区画板１０を挟んで互いに交差する方向に流れ、中間区画板１０を介した流路壁間で熱交換を行う。
【０１１３】
一方の流体７は、矢印１０５で示すように、上側封止板１の右辺中央部付近の貫通穴１ａから供給され、上側区画板９の貫通穴９ａを経て上側のヘッダプレート３のヘッダ用貫通穴５の右側に至り、ここから上側の流路波板２の上下の微小流路をそれぞれ右から左へ通り、当該ヘッダ用貫通穴５の左側から中間区画板１０の左辺中央部付近の貫通穴１０ｃ、下側のヘッダプレート３の左辺中央部付近の貫通穴３ｂ、下側区画板１１の貫通穴１１ｃ、下側封止板４の左辺中央部付近の貫通穴４ｂを順次経て排出される。
【０１１４】
もう一方の流体１２は、矢印１０６で示すように、上側封止板１の上辺中央部付近の貫通穴１ｂから供給され、上側区画板９の貫通穴９ｄ、上側のヘッダプレート３の上辺中央部付近の貫通穴３ｂ、中間区画板１０の貫通穴１１ｄを順次経て下側のヘッダプレート３のヘッダ用貫通穴５の上（奥側）に至り、ここから下側の流路波板２の上下の微小流路をそれぞれ上から下（奥側から手前側）ヘ通り、当該ヘッダ用貫通穴３の下（手前）側から下側区画板１１の貫通穴１１ｂ、下側封止板４の下辺中央部付近の貫通穴４ａを経て排出される。
【０１１５】
つまり、流体７を上側封止板１の右辺中央部付近の貫通穴１ａに供給し、流体１２を上側封止板１の上辺中央部付近の貫通穴１ｂに供給する場合は、２つの流体７、１２の流れは直交型（ＣｒｏｓｓＦｌｏｗＴｙｐｅ）となる。従って、図７に示すチャンネル構造体は直交型の小型熱交換器としての機能を有する。
【０１１６】
ここで、上側区画板９の貫通穴９ｂ、９ｃは上側封止板１により封止され、下側区画板１１の貫通穴１１ａ、１１ｄは下側封止板４により封止され、流体７、１２は漏れない。上側封止板１で上側区画板９を兼ねることができ、これにより上側区画板９を省略し、また、下側封止板４で下側区画板１１を兼ねることができ、これにより下側区画板１１を省略することができる。
【０１１７】
図６、図７を参照して説明したチャンネル構造体は２つの流路ユニットを積層したものであるが、３つ以上の流路ユニットを積層して小型熱交換器等のチャンネル構造体を構成することが可能である。例えば、図５に例示したと同様、奇数番目の流路ユニットの流路に同一の流体を並列に流し、偶数番目の流路ユニットの流路に別の流体を並列に流すことができる。
【０１１８】
ヘッダプレート３のヘッダ用貫通穴５の形状及び大きさは、流路波板２を囲むことができ、かつ、流体７、１２の供給と排出に必要な領域を確保できる形状及び大きさを持つものであれば、任意である。
【０１１９】
図３、図５、図６、図７ではチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【０１２０】
［第４実施例］
次に、図３、図６、図７を参照して、本発明の第４実施例に係るチャンネル構造体を説明する。本第４実施例のチャンネル構造体は小型反応器（あるいはマイクロ反応器）としての機能を有する。
【０１２１】
本第４実施例のチャンネル構造体は、図３、図６、図７に示すように、上記第３実施例で説明した各チャンネル構造体に対し、２つの流路ユニットのうち、一方のユニットの流路波板２の内表面または外表面の少なくとも一方に触媒８を担持させ、もう一方の流路ユニットの流路波板２の内表面または外表面の少なくとも一方の触媒１３を担持させたものである。
【０１２２】
流体７、１２は任意の液体や気体で良く、また、触媒８、１３は任意の同一の一種類あるいは異なる複数種類で良いが、本例では、流体７が燃料ガスで、流体１２が改質ガスである場合を想定し、一方の触媒８を燃焼触媒とし、もう一方の触媒１３を改質触媒とすることにより、改質ガス１２の改質反応に必要な熱を燃料ガス７の触媒反応により供給することを可能にする技術を説明する。これらの触媒の担持処理として、燃焼触媒８を予め担持した触媒体を上側の流路波板２の内外両表面に成膜し、また、改質触媒１３を予め担持した触媒体を下側の流路波板２の内外両表面に成膜している。燃焼触媒８、改質触媒１３は塑性加工前に予め基板に担持させておいても、あるいは、塑性加工後に微細パターン２ａにそれぞれ担持させても良い。
【０１２３】
そして、図３、図６、図７いずれの場合も、塑性加工を用いて基板に微細パターン２ａを形成するとともに表面に燃焼触媒８を担持させることで上側の流路波板２を予め作製しておく。また、塑性加工を用いて基板に微細パターン２ａを形成するとともに表面に改質触媒１３を担持させることで下側の流路波板２を予め作製しておき、ヘッダプレート３とそのヘッダ用貫通穴５にはめ込まれる流路波板２がなす２つの流路ユニットを間に中間区画板１０を挟んで積層し、この積層体の上面に上側区画板９を積層し、この上側区画板９の上に上側封止板１を積層し、また、前記積層体の下面に下側区画板１１を積層し、この上側区画板１１の下に下側封止板４を積層する。これにより、例えば数百μｍの水力直径を持ち、かつ、燃焼触媒８と改質触媒１４がそれぞれ担持された２系統の微小流路が形成されて、反応器の機能を有するチャンネル構造体ができあがる。
【０１２４】
図３に示す反応器の機能を有するチャンネル構造体は矢印１０２、１０３で示すように向流型（ＣｏｕｎｔｅｒＦｌｏｗＴｙｐｅ）のものであるが、図６に示す反応器の機能を有するチャンネル構造体は矢印１０２、１０４で示すような並流型（ＰａｒａｌｌｅｌＦｌｏｗＴｙｐｅ）のものであり、図７に示す反応器の機能を有するチャンネル構造体は矢印１０５、１０６で示すような直交型（ＣｒｏｓｓＦｌｏｗＴｙｐｅ）のものである。
【０１２５】
図３、図６、図７に示したいずれのチャンネル構造体でも、燃焼触媒８が上側の流路波板２の表面に担持されているため、そこの微細流路に燃焼ガス７を通すことで、発熱反応である触媒燃焼反応が生じ、得られた熱が中間区画板１０を介して改質触媒１３を担持する下側の流路波板２の微小流路に与えられる。これにより、下側の流路波板２の微小流路を通る改質ガス１２に、吸熱反応である触媒改質反応を生ぜしめるために必要な熱が供給される。
【０１２６】
上記各例では、触媒８の担持処理が必要な上側の流路波板２がこれを収納する上側区画板９、上側のヘッダプレート３及び中間区画板１０により構成される容器（ケーシング）とは別体であり、また、触媒１３の担持処理が必要な下側の流路波板２がこれを収納する中間区画板１０、下側のヘッダプレート３及び下側区画板１１により構成される容器（ケーシング）とは別体であるため、触媒担持が不要な部分へのマスキング処理といった複雑な工程を必要とせず、流路波板２単体での触媒コーティングが可能となるメリットがある。また、触媒担持処理の工程と積層工程とを別系統とすることで、触媒８、１３を担持した各流路波板２の一括生産、触媒８、１４の要求仕様の変更に対する即応性、触媒８、１４の交換の容易性を実現できる。更に、用途に応じて任意の流路波板２を別材料に容易に変更できる利便性がある。
【０１２７】
また、前述したように接合を用いず、流路波板２を挟み込む場合は、製造工程の簡略化、接合工程での触媒８、１４の劣化の抑制、触媒８、１４の劣化時の交換容易、触媒８、１４の新規開発触媒への交換容易といった利点がある。触媒８、１４の劣化時の交換、触媒８、１４の新規開発触媒への交換は、接合を用いた場合でも必ずしも不可能ではない。
【０１２８】
図３、図６、図７を参照して説明した反応器の機能を有するチャンネル構造体は２つの流路ユニットを積層したものであるが、３つ以上の流路ユニットを積層して構成することが可能である。例えば、図５に示したチャンネル構造体では、上から奇数番目の流路ユニットの流路波板２全てに同じ触媒例えば燃焼触媒を担持させ、上から偶数番目の流路ユニットの流路波板２全てにこれとは別の触媒例えば改質触媒を担持させることができる。また、反応処理の目的あるいは流路ユニットの積層数に応じて、種々の触媒を流路波板２に担持させることができる。例えば、上から順に、ある触媒Ａ、これと同じ触媒Ａ、これとは別の触媒Ｂをセットとして１セットまたは繰り返して担持させたり、ある触媒Ａ、これとは別の触媒Ｂ、更に別の触媒Ｃをセットとして１セットまたは繰り返して担持させることができる。
【０１２９】
また、図３、図５〜図７では反応器の機能を有するチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、これらは上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【０１３０】
［第５実施例］
次に、図８を参照して、本発明の第５実施例に係るチャンネル構造体を説明する。図８に示すチャンネル構造体は、微細パターン付きの上側隔壁板１５と、ヘッダ用貫通穴５を有するヘッダプレート３と、微細パターン付きの下側隔壁板１６を積層することで構成されており微細流路が形成された小型熱交換器（あるいはマイクロ熱交換器）としての機能を有する。このチャンネル構造体は、例えば密閉空間に設置して使用される。チャンネル構造体は上面に積層した上側封止板１を有し、下面に積層した下側封止板４を有している。
【０１３１】
上側封止板１には右上隅にて流体供給用の貫通穴１ａが形成され、下側封止板４には左下隅にて流体排出用の貫通穴４ａが形成されている。
【０１３２】
上側隔壁板１５と下側隔壁板１６は流体が流れる領域を規定するものであり、上側隔壁１５と下側隔壁板１６の外形及び大きさは基本的には任意であるが、本例では上側封止板１、下側封止板４と同様、矩形例えば同じ大きさの正方形をなしている。矩形の大きさは基本的には任意であるが、例えば２〜４ｃｍ角を例示することができる。
【０１３３】
上側隔壁板１５と下側隔壁板１６にはそれぞれそれ自体の中央に、熱交換効率を高めるための凹凸形状の微細パターン１７、１８が形成されている。微細パターン１７、１８は例えば型を用いたプレス成形等の塑性加工により形成されている。微細パターン１７、１８の数は基本的に任意であるが、例えば５０本と多数形成される。
【０１３４】
微細パターン１７、１８の凹凸形状は、三角波形、矩形、エンボス形、その他の適宜な規則的形状あるいは不規則形状であって良い。
【０１３５】
図８に示す例の上側隔壁板１５と下側隔壁板１６はそれぞれ、例えば、厚み１００μｍ程度の基板に、微細パターン１７、１８として三角形状で、波高さ及びピッチが例えば数百μｍの凹凸形状を塑性加工を用いて形成している。微細パターン１７、１８の左右両端は閉じている。本例では、上側隔壁板１５及び下側隔壁板１６において微細パターン１７、１８が形成されている領域は、同じ大きさの矩形例えば正方形としている。
【０１３６】
上側隔壁板１５と下側隔壁板１６の微細パターン１７、１８の幾つかの例を図９に示す。図９（ａ）の例では、微細パターン１７、１８が上側隔壁板１５、下側隔壁板１６の面より上側にて凹凸するように形成されている。図９（ｂ）の例では、微細パターン１７、１８が上側隔壁板１５、下側隔壁板１６の面より下側にて凹凸するように形成されている。図９（ｃ）では、微細パターン１７、１８が上側隔壁板１５、下側隔壁板１６の面から上下両方に凹凸するように形成されている。
【０１３７】
このような微細パターン１７、１８を有する上側隔壁板１５と下側隔壁板１６とがヘッダプレート３を間に挟んで積層される。図１０に幾つかの積層例を示す。図１０（ａ）の例では、微細パターン１７が上側にて凹凸する上側隔壁板１５と微細パターン１８が上側にて凹凸する下側隔壁板１６とが積層され、微細パターン１７，１８がヘッダ用貫通穴５を挟んで対向しており、微細パターン１７はヘッダ用貫通穴５の上方に位置し、微細パターン１８はヘッダ用貫通穴５の内部に下方から入り込んでいる。図１０（ｂ）の例では、微細パターン１７が下側にて凹凸する上側隔壁板１５と微細パターン１８が上側にて凹凸する下側隔壁板１６とが積層され、微細パターン１７、１８がヘッダ用貫通穴５を挟んで対向しており、微細パターン１７はヘッダ用貫通穴５の内部に上方から入り込み、微細パターン１８はヘッダ用貫通穴５の内部に下方から入り込んでいる。図１０（ｃ）では、微細パターン１７が上下に凹凸する上側隔壁板１５と微細パターン１８が上下に凹凸する下側隔壁板１６とが積層され、微細パターン１７、１８がヘッダ用貫通穴５を挟んで対向しており、微細パターン１７の下半分がヘッダ用貫通穴５の内部に上方から入り込み、微細パターン１８の上半分がヘッダ用貫通穴５の内部に下方から入り込んでいる。その他、図１０（ｂ）とは逆に、微細パターン１７が上側にて凹凸する上側隔壁板１５と微細パターン１８が下側にて凹凸する下側隔壁板１６とが積層され、微細パターン１７、１８がヘッダ用貫通穴５を挟んで対向し、微細パターン１７はヘッダ用貫通穴５の上方に位置し、微細パターン１８はヘッダ用貫通穴５の下方に位置する例など、積層例は種々ある。
【０１３８】
ヘッダプレート３はヘッダ用貫通穴５を中央部に有しており、ヘッダ用貫通穴５は流体の供給及び排出の機能を持っている。ヘッダプレート３の外形及び大きさは基本的には任意であるが、本例では上側封止板１、下側封止板４、上側隔壁板１５及び下側隔壁板１６と同じ大きさの矩形状をなしている。ヘッダ用貫通穴５の形成手法は任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。ヘッダ用貫通穴５の大きさ及び位置は、ヘッダ用貫通穴５を上下方向に投影したときの領域に、微細パターン１７、１８が収まるものであれば良い。
【０１３９】
ヘッダ用貫通穴５の形状は図８の例では、ヘッダプレート３の上辺及び下辺に対して平行な２辺と、ヘッダプレート３の右辺に対しては上辺に近い部分ほど右辺に近づく斜めの１辺と、ヘッダプレート３の左辺に対しては上辺に近い部分ほど左辺から遠のく斜めの１辺とを持つ菱形であるが、流体の供給及び排出の機能を持つ限り、任意の形状、大きさで良い。
【０１４０】
ヘッダプレート３の厚みは、図１０の例示から分かるように、上側隔壁板１５及び下側隔壁板１６の微細パターン１７、１８の寸法、凹凸方向に応じて設定される。
【０１４１】
本例では、上側隔壁板１５のうち微細パターン１７を避けた４隅に、貫通穴１５ａ、１５ｂ、１５ｃ、１５ｄが形成されている。そのうち、右上隅の貫通穴１５ａは、上側封止板１の貫通穴１ａ及びヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。右下隅の貫通穴１５ｂは、ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。左下隅の貫通穴１５ｃは、ヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。左上隅の貫通穴１５ｄは、ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０１４２】
下側隔壁板１６のうち微細パターン１８を避けた４隅に、貫通穴１６ａ、１６ｂ、１６ｃ、１６ｄが形成されている。そのうち、右上隅の貫通穴１６ａは、ヘッダ用貫通穴５と連通可能な位置に形成されている。右下隅の貫通穴１６ｂは、ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。左下隅の貫通穴１６ｃは、ヘッダ用貫通穴５と連通するような位置に形成されている。左上隅の貫通穴１６ｄは、ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０１４３】
従って、上側隔壁板１５と下側隔壁板１６は貫通穴の位置を含めて同じ形状であり、同形状に作製した微細パターン付き隔壁板を上側隔壁板１５と下側隔壁板１６に利用できるようにしている。
【０１４４】
ヘッダプレート３には、ヘッダ用貫通穴５の外側にて、右下隅及び左上隅にそれぞれ小さな貫通穴３ａ、３ｂが形成されている。右下隅の貫通穴３ａは上側隔壁板１５及び下側隔壁板１６それぞれの右下隅の貫通穴１５ｂ、１６ｂに、左上隅の貫通穴３ｂは上側隔壁板１５及び下側隔壁板１６それぞれの左上隅の貫通穴１５ｄ、１６ｄにそれぞれ連通可能な位置に形成されている。
【０１４５】
上側隔壁板１５における貫通穴１５ａ、１５ｂ、１５ｃ、１５ｄの形成手法、ヘッダプレート３における貫通穴３ａ、３ｂの形成手法、並びに、下側隔壁板１６における貫通穴１６ａ、１６ｂ、１６ｃ、１６ｄの形成手法はともに任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【０１４６】
そして、塑性加工を用いて各基板に微細パターン１７、１８を形成することで上側隔壁板１５と下側隔壁板１６を予め作製しておき、微細パターン１７、１８が本例では互いに平行となるように、かつ、微細パターン１７、１８がヘッダ用貫通穴５の上下方向の投影領域に収まるように、上側封止板１、上側隔壁板１５、ヘッダプレート３、下側隔壁板１６、下側封止板４を積層し、例えば各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。これにより、上側隔壁板１５と下側隔壁板１６との間にそれらの微細パターン１７、１８によって例えば数百μｍの水力直径を持つ微小流路が形成されて、チャンネル構造体ができあがる。
【０１４７】
従って、図８に例示するように、流体（例えば被処理ガス）７を例えば上側封止板１の貫通穴１ａから上側隔壁板１５の右上隅の貫通穴１５ａに供給すると、流体７は矢印１０１で示すように、この貫通穴１５ａからヘッダ用貫通穴５の右側に至り、ここから上側隔壁板１５と下側隔壁板１６間の微小流路を右から左へ通り、ヘッダ用貫通穴５の左側から下側隔壁板１６の左下隅の貫通穴１６ｃ、下側封止板４の貫通穴４ａを経て排出される。
【０１４８】
ここで、上側隔壁板１５における右下隅の貫通穴１５ｂ、左下隅の１５ｃ、左上隅の１５ｄは上側封止板１で塞がれ、下側隔壁板１６における右上隅の貫通穴１６ａ、右下隅の貫通穴１６ｂ、左上隅の貫通穴１６ｄは下側封止板４で塞がれ、流体７の漏れはない。なお、上側隔壁板１５の微細パターン１７が上方に突出する場合は、例えば、図１２に例示するように、上側封止板１の中央部など微細パターン１７よりもやや広い領域２２を上方に膨らませてその下側に微細パターン１７を収容できる深さの凹部を設けたり、図示しないが、上側封止板１がブロック状の厚いものの場合は、下側を微細パターン１７を収容できる広さと深さに抉って凹部を設けたり、図１３に例示するように、上側封止板１のうち微細パターン１７を避けた右側の一部１−１及び左側の一部１−２のみを上側封止板１として使用することにより、上側封止板１と微細パターン１７との干渉を回避することができる。下側隔壁板１６の微細パターン１８が下方に突出する場合も同様の対策により、下側封止板４と微細パターン１８との干渉を回避することができる。
【０１４９】
このように、図８に示すチャンネル構造体は、上側隔壁板１５と下側隔壁板１６間の微小流路を通過する流体（例えば被処理ガス７）と、外部からの加熱手段あるいは冷却手段により与えられる流体６の間で、上側隔壁板１５及び下側隔壁板１６を介して熱交換を行うことができ、小型熱交換器として動作する。図８のでは、例えば外部流体６を上側封止板１の上面と下側封止板４の下側に流すようにしているが、上側封止板１、下側封止板４と加熱手段や冷却手段で直接加熱あるいは冷却するようにしてもよく、または、上側封止板１、下側封止板４以外の部分を加熱あるいは冷却するようにしてもよい。
【０１５０】
本第５実施例では、第１実施例や第３実施例に比べ、別体構造であった流路波板と区画板とがそれぞれ微細パターン付きの上側隔壁板１５及び下側隔壁板１６として一体化しているため、中間区画板を省略でき、また、第１、第３実施例では別体構造で必要だった流路波板の固定方法を考慮する必要がなくなるから、部品点数及び工数の削減、即ちコストダウンのメリットがある。更に、第１、３実施例におけるような流路波板とケーシングとを別材料とする利点が少ない場合に適した構造である。
【０１５１】
図８ではチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【０１５２】
また、下側隔壁板１６を図８とは表裏逆にして、上側隔壁板１５、ヘッダプレート３及び下側隔壁板１６を積層することが可能である。
【０１５３】
なお、ヘッダプレート３のヘッダ用貫通穴５は、その上下方向の投影領域が上側隔壁板１５や下側隔壁板１６の微細パターン１７、１８の領域を囲むことができ、かつ、流体７の供給と排出に必要な領域を確保できる形状及び大きさ、位置を持つものであれば、任意である。
【０１５４】
上記第５実施例では隔壁板として上側隔壁板１５と下側隔壁板１６の２つを用いているが、図１１に示すように、３つ以上であっても良い。図１１の例では、微細パターン２０を中央部に塑性加工で形成した中間隔壁板１９が２つ追加され、上中下３つのヘッダプレート３が間にそれぞれ中間区画板１０を挟んで積層されている。そして、この積層体と、積層体の上に配置される上側隔壁板１５と、上側隔壁板１５の上に配置される上側封止板１と、前記積層体の下に配置される下側隔壁板１６と、下側隔壁板１６の下に配置される下側封止板４とを積層し、各層間に微小流路を形成している。本例では、上側隔壁板１５、２つの中間隔壁板１９及び下側隔壁板１６を貫通穴の位置を含めて互いに同形状とし、また、これらの大きさは上側封止板１及び下側封止板４と同じにしている。但し、中間隔壁板１９の微細パターン２０は、図９に例示したように種々の態様があり、上下隣接する隔壁板間の微細パターンの組合せも図１０に例示したように種々ある。ここで、上側封止板１、上側隔壁板１５、ヘッダプレート３、中間隔壁板１９、下側区画板１６、下側封止板４の積層手順は任意であり、例えば、下の部材あるいは上の部材から順に積層したり、ヘッダプレート３を間に中間隔壁板１９を挟んで積層し、これで得た積層体の上に上側隔壁板１５、上側封止板１を順に積層し、同積層体の下に下側隔壁板１６、下側封止板４を順次積層したりするなど、種々考えられる。要は、ヘッダプレート３が複数、中間隔壁板１９を間に挟んで積層されてなる積層体と、この積層体の上に配置される上側隔壁板１５と、上側隔壁板１５の上に配置される上側封止板１と、前記積層体の下に配置される下側隔壁板１６と、下側隔壁板１６の下に配置される下側封止板４とが積層されてなる構造体が作製できれば良い。このことは、以下の説明においても同様である。
【０１５５】
上側隔壁板１５、中間隔壁板１９及び下側隔壁板１６の各右上隅には上側封止板１の貫通穴１ａと同位置にて貫通穴１５ａ、１９ａ、１６ａがそれぞれ形成され、各左下隅には下側封止板４の貫通穴４ａと同位置にて貫通穴１５ｂ、１９ｂ、１６ｂがそれぞれ形成されている。図１１のチャンネル構造体では、矢印１０１で示すように、被処理ガス等の流体７は上側封止板１の貫通穴１ａから供給されて、上側隔壁板１５の貫通穴１５ａを経て、また、更に各中間隔壁板１９の貫通穴１９ａを経て各ヘッダプレート３のヘッダ用貫通穴５の右側に並列に流れ、ここから上側隔壁板１５と中間隔壁板１９との間の微小流路、中間隔壁板１９どうしの間の微小流路、中間隔壁板１９と下側隔壁板１６との間の微小流路をそれぞれ通り、各ヘッダ用貫通穴５の左側から各中間隔壁板１９の貫通穴１９ｂ、下側隔壁板１６の貫通穴１６ｂを経て集まり、下側封止板４の貫通穴４ａに至って排出される。上側隔壁板１５の貫通穴１５ｂは上側封止板１により封止され、下側隔壁板１６の貫通穴１６ａは下側封止板４により封止され、流体７は漏れない。上側隔壁板１５の微細パターン１７が上方に突出する場合は、前述したと同様、例えば、図１２に例示するように、上側封止板１の中央部など微細パターン１７よりもやや広い領域２２を上方に膨らませてその下側に微細パターン１７を収容できる深さの凹部を設けたり、図示しないが、上側封止板１がブロック状の厚いものの場合は、下側を微細パターン１７を収容できる広さと深さに抉って凹部を設けたり、図１３に例示するように、上側封止板１のうち微細パターン１７を避けた右側の一部１−１及び左側の一部１−２のみを上側封止板１として使用することにより、上側封止板１と微細パターン１７との干渉を回避することができる。下側隔壁板１６の微細パターン１８が下方に突出する場合も同様の対策により、下側封止板１と微細パターン１８との干渉を回避することができる。
【０１５６】
［第６実施例］
次に、図８を参照して、本発明の第６実施例に係る反応器として機能を有するチャンネル構造体を説明する。
【０１５７】
本第６実施例のチャンネル構造体は、図８に示すように、上記第５実施例のチャンネル構造体に対し、上側隔壁板１５の微細パターン１７の内表面あるいは下側隔壁板１６の微細パターン１８の内表面の少なくとも一方に触媒８を担持させたものである。
【０１５８】
本例では、触媒８の担持処理として、触媒８を予め担持した触媒体を上側隔壁板１５の微細パターン１７の内表面及び下側隔壁板１６の微細パターン１８の内表面の両方に成膜している。触媒８は塑性加工前に予め基板に担持させておいても、あるいは、塑性加工後に微細パターン１７、１８にそれぞれ担持させても良い。
【０１５９】
そして、塑性加工を用いて基板に微細パターン１７を形成するとともにその内表面に触媒８を担持させることで上側隔壁板１５を予め作製し、また、同じく塑性加工を用いて基板に微細パターン１８を形成するとともにその内表面に触媒８を担持させることで上側隔壁板１６を予め作製しておき、微細パターン１７、１８が互いに平行となるように、かつ、微細パターン１８がヘッダ用貫通穴５の上下方向の投影領域に収まるように、上側封止板１、上側隔壁板１５、ヘッダプレート３、下側隔壁板１６、下側封止板４を積層し、例えば、各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。これにより、上側隔壁板１５と下側隔壁板１６との間にそれらの微細パターン１７、１８によって、例えば数百μｍの水力直径を持ち、かつ、内表面に触媒８が担持された微小流路が形成されたチャンネル構造体ができあがる。
【０１６０】
図８に示すチャンネル構造体は、触媒８が上側隔壁板１５と下側隔壁板１６の間の微小流路の内表面に担持されているため、この微小流路を流れる流体（例えば被処理ガス）７に触媒８固有の触媒反応を生ぜしめる機能を持った小型反応器として動作する。流体７は、例えば矢印１０１で示すように、上側封止板１の貫通穴１ａから供給され、上側隔壁板１５の貫通穴１５ａを経てヘッダ用貫通穴５の右側に至り、ここから上側隔壁板１５と下側隔壁板１６間の微細流路を通り、ヘッダ用貫通穴５の左側から下側隔壁板１６の貫通穴１６ｃを経て下側隔壁板４の貫通穴４ａに至り排出される。
【０１６１】
本例では、第２実施例や第４実施例に比べ、別体構造であった流路波板と封止板とがそれぞれ微細パターン付きの上側隔壁板１５及び下側隔壁板１６として一体化しているため、中間区画板を省略でき、また、第２、第４実施例では別体構造で必要だった流路波板の固定方法を考慮する必要がなくなるから、部品点数及び工数の削減、即ちコストダウンのメリットがある。更に、領域を選択的にコーティング可能な触媒担持方法、例えばゾルゲル法やディップコート法、スパッタリング成膜法を用いる場合、あるいは、第２、第４実施例におけるような流路波板とケーシングとを別材料とする利点が少ない場合に適した構造である。
【０１６２】
図８では反応器の機能を有するチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、この小型反応器は上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【０１６３】
図１１に示したチャンネル構造体も、触媒を上側隔壁板１５と中間隔壁板１９との間の微小流路、中間隔壁板１９どうしの間の微小流路、中間隔壁板１９と下側隔壁板１６との間の微小流路内に担持させることにより、これらの微小流路を並列に流れる流体（例えば被処理ガス）７に触媒固有の触媒反応を生ぜしめる機能を持った小型反応器として動作する。
【０１６４】
［第７実施例］
図１２を参照して、本発明の第７実施例に係るチャンネル構造体を説明する。図１２に示すチャンネル構造体は、上側封止板１と、微細パターン付きの上側隔壁板１５と、上側のヘッダプレート３と、微細パターン付きの中間隔壁板１９と、下側のヘッダプレート３と、微細パターン付きの下側隔壁板１６と、下側封止板４を積層することで構成されており、小型熱交換器（あるいはマイクロ熱交換器）として動作する。このチャンネル構造体は、例えば密閉空間に設置されて使用される。詳細は後述するが、複数（図では２つ）のヘッダプレート３を間に中間隔壁板１９を挟んで積層し、これにより形成される積層体の上に上側隔壁板１５を積層し、積層体の下に下側隔壁板１６積層することで、例えば数百μｍの水力直径を持つ複数系統の微小流路が形成される。
【０１６５】
上側封止板１と下側封止板４は、流体の供給及び封止を目的とするものでありこれらの外形及び大きさは基本的には任意であるが、本例では矩形例えば同じ大きさの正方形をなしている。矩形の大きさは基本的には任意であるが、例えば２〜４ｃｍ角を例示することができる。
【０１６６】
上側隔壁板１５と下側隔壁板１６と中間隔壁板１９は流体が流れる領域を区画あるいは規定するものであり、これらの外形及び大きさは基本的には任意であるが、本例では矩形、例えば上側封止板１及び下側封止板４と同じ大きさの正方形をなしている。
【０１６７】
上側隔壁板１５と下側隔壁板１６と中間隔壁板１９には、それぞれ自身の中央に、熱交換効率を高めるための凹凸形状の微細パターン１７、１８、２０が形成されている。微細パターン１７、１８、２０は、例えば型を用いたプレス成形等の塑性加工により形成されている。微細パターン１７、１８、２０の数は基本的には任意であるが、例えば５０本と多数形成される。
【０１６８】
微細パターン１７、１８、２０の凹凸形状は、三角波形、矩形、エンボス形、その他の適宜な規則的形状あるいは不規則形状であって良い。
【０１６９】
図１２に示す例の上側隔壁板１５と下側隔壁板１６と中間隔壁板１９はそれぞれ、例えば厚み１００μｍ程度の基板に、微細パターン１７、１８、２０として三角波形状で、波高さ及びピッチがともに例えば数百μｍの凹凸形状を塑性加工を用いて形成している。微細パターン１７、１８、２０の左右両端は閉じている。本例では、上側隔壁板１５、下側隔壁板１６及び中間隔壁板１９において微細パターン１７、１８、２０が形成される領域は、同じ大きさの矩形例えば正方形としている。
【０１７０】
各ヘッダプレート３はそれぞれ中央部にヘッダ用貫通穴５を有しており、各ヘッダ用貫通穴５は流体の供給及び排出の機能を持っている。ヘッダプレート３の外形及び大きさは基本的には任意であるが、本例では上側封止板１、下側封止板４、上側隔壁板１５、下側隔壁板１６及び中間隔壁板１９と同じ大きさの矩形状例えば正方形をなしている。ヘッダ用貫通穴５の形成手法は任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【０１７１】
上側のヘッダプレート３のヘッダ用貫通穴５の形状は、図１２の例では、ヘッダプレート３の上辺及び下辺に対して平行な２辺と、ヘッダプレート３の右辺に対しては上辺に近い部分ほど右辺に近づく斜めの１辺と、ヘッダプレート３の左辺に対しては上辺に近い部分ほど左辺から遠のく斜めの１辺とを持つ菱形であるが、流体の供給及び排出の機能を持つ限り、任意の形状で良い。
【０１７２】
一方、下側のヘッダプレート３のヘッダ用貫通穴１２の形状は、図１２の例では、ヘッダプレート３の上辺及び下辺に対して平行な２辺と、ヘッダプレート３の右辺に対しては上辺に近い部分ほど右辺から遠のく斜めの１辺と、ヘッダプレート１１の左辺に対しては上辺に近い部分ほど左辺に近づく斜めの１辺とを持つ菱形であるが、流体の供給及び排出の機能を持つ限り、任意の形状で良い。
【０１７３】
このように２つのヘッダプレート３間でヘッダ用貫通穴５の向きが異なっているが、同一形状のヘッダ用貫通穴を形成したヘッダプレートを表裏逆に配置することで、２つのヘッダプレート３に使用できるようにしている。
【０１７４】
各ヘッダプレート３の厚みは、図１０の例示から分かるように、上側隔壁板１５、下側隔壁板１６及び中間隔壁板１９の微細パターン１７、１８、２０の寸法、凹凸方向に応じて設定される。
【０１７５】
本例では、上側隔壁板１５のうち微細パターン１７を避けた４隅に、貫通穴１５ａ、１５ｂ、１５ｃ、１５ｄが形成されている。そのうち、右上隅の貫通穴１５ａは、上側封止板１の右上隅の貫通穴１ａ及び上側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成され、右下隅の貫通穴１５ｂは、同ヘッダ用貫通穴５とは連通しないようにこれを避けて形成され、左下隅の貫通穴１５ｃは、同ヘッダ用貫通穴５と連通可能な位置に形成され、左上隅の貫通穴１５ｄは、上側封止板１の貫通穴１ｂとは連通するが、同ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０１７６】
一方、下側隔壁板１６のうち微細パターン１８を避けた４隅に、貫通穴１６ａ、１６ｂ、１６ｃ、１６ｄが形成されている。そのうち、右上隅の貫通穴１６ａは、下側のヘッダプレート３のヘッダ用貫通穴５とは連通しないようにこれを避けて形成され、右下隅の貫通穴１６ｂは、同ヘッダ用貫通穴５及び下側封止板４の貫通穴４ａと連通可能な位置に形成され、左下隅の貫通穴１６ｃは、下側封止板４の貫通穴４ｂとは連通するが、同ヘッダ用貫通穴５とは連通しないようにこれを避けて形成され、左上隅の貫通穴１６ｄは同ヘッダ用貫通穴５と連通可能な位置に形成されている。
【０１７７】
上側のヘッダプレート３には、ヘッダ用貫通穴５の外側にて、右下隅及び左上隅にそれぞれ貫通穴３ａ、３ｂが形成されている。右下隅の貫通穴３ａは上側隔壁板１の右下隅の貫通穴１５ｂに、左上隅の貫通穴３ｂは上側隔壁板１５の左上隅の貫通穴１５ｄにそれぞれ連通可能な位置に形成されている。
【０１７８】
下側のヘッダプレート３には、ヘッダ用貫通穴５の外側にて、右上隅及び左下隅にそれぞれ貫通穴３ａ、３ｂが形成されている。右上隅の貫通穴３ａは下側隔壁板１６の右上隅の貫通穴１６ａに、左下隅の貫通穴３ｂは下側隔壁板１６の左下隅の貫通穴１６ｃにそれぞれ連通可能な位置に形成されている。
【０１７９】
上下のヘッダプレート３間では貫通穴３ａ、３ｂの配置が異なるが、穴位置を含めて同形状に作製したヘッダプレートを表裏逆に配置することで、各ヘッダプレート３に利用することができる。
【０１８０】
また、中間隔壁板１９のうち微細パターン２０を避けた４隅に、貫通穴１９ａ、１９ｂ、１９ｃ、１９ｄが形成されている。そのうち、右上隅の貫通穴１９ａは、上側隔壁板１５の右上隅の貫通穴１５ａ及び下側のヘッダプレート３の右上隅の貫通穴３ａ及び下側隔壁板１６の右上隅の貫通穴１６ａに連通可能な位置に形成され、右下隅の貫通穴１９ｂは、上側隔壁板１５の右下隅の貫通穴１５ｂと上側のヘッダプレート３の右下隅の貫通穴３ｂと下側隔壁板１６の右下隅の貫通穴１６ｂとに連通可能な位置に形成され、左下隅の貫通穴１９ｃは、上側隔壁板１５の左下隅の貫通穴１５ｃと下側のヘッダプレート３の左下隅の貫通穴１１ｃと下側隔壁板１６の左下隅の貫通穴１６ｃとに連通可能な位置に形成され、左上隅の貫通穴１９ｄは、上側隔壁板１５の左上隅の貫通穴１５ｄと上側のヘッダプレート３の左上隅の貫通穴３ｂと下側隔壁板１６の左上隅の貫通穴１６ｄとに連通可能な位置に形成されている。
【０１８１】
従って、上側隔壁板１５と中間隔壁板１９と下側隔壁板１６は貫通穴の位置を含めて同じ形状であり、同形状に作製した隔壁板を上側隔壁板１５と中間隔壁板１９と下側隔壁板１６に利用できるようにしている。
【０１８２】
上側封止板１及び下側封止板４にける貫通穴１ａ、１ｂ、４ａ、４ｂの形成手法、上側隔壁板１５における貫通穴１５ａ、１５ｂ、１５ｃ、１５ｄの形成手法、各ヘッダプレート３における貫通穴３ａ、３ｂの形成手法、中間隔壁板１９における貫通穴１９ａ、１９ｂ、１９ｃ、１９ｄの形成手法、並びに、下側隔壁板１６における貫通穴１６ａ、１６ｂ、１６ｃ、１６ｄの形成手法はともに任意であり、例えば打ち抜きなど、通常の適宜な機械加工で十分である。
【０１８３】
そして、塑性加工を用いて各基板に微細パターン１７、２０、１８を形成することで上側隔壁板１５と中間隔壁板１９と下側隔壁板１６を予め作製しておき、微細パターン１７、２０、１８が互いに平行となるように、かつ、微細パターン１７、２０、１８がそれぞれヘッダ用貫通穴５の上下方向の投影領域に収まるように、上側封止板１、上側隔壁板１５、上側のヘッダプレート３、中間隔壁板１９、下側のヘッダプレート３、下側隔壁板１６、下側封止板４を積層し、例えば各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。
【０１８４】
例えば、２つのヘッダプレート３をその間に中間隔壁板１９を挟んで上下に積層し、これにより形成さされる積層体の上に上側隔壁板１５を積層し、上側隔壁板１５の上に上側封止板１を積層し、前記積層体の下に下側隔壁板１６を積層し、下側隔壁板１６の下に下側封止板４を積層する。
【０１８５】
これにより、上側隔壁板１５と中間隔壁板１９との間にそれらの微細パターン１７、２０によって例えば数百μｍの水力直径を持つ微小流路が形成され、中間隔壁板１９と下側隔壁板１６との間にそれらの微細パターン２０、１８によって数百μｍの水力直径を持つ微小流路が形成されて、複数系統の微小流路を持つチャンネル構造体ができあがる。
【０１８６】
つまり、中間隔壁板１９の微細パターン２０を境に、微細パターン１７、２０により形成される微小流路が１つの流路系統となり、微細パターン２０、１８により形成される微小流路がもう１つの流路系統となり、別々の流体７、１２を例えば上側封止板１の２つの貫通穴１ａ、１ｂから供給して別々の流路系統に通すことにより中間隔壁板１９の微細パターン２０を介して相互間で熱交換が行われる。
【０１８７】
例えば、図１２に示すように、２つの流体（例えば被処理ガス）７、１２を上側封止板１の貫通穴１ａ、１ｂから上側隔壁板１５の右上隅の貫通穴１５ａと左上隅の貫通穴１５ｄに別々に供給する場合を考える。この場合、流体７は矢印１０２で示すように、微細パターン１７、２０がなす微小流路を通り、流体１２は矢印１０３で示すように、微細パターン２０、１８がなす微小流路を通り、２つの流体７、１２は中間隔壁板１９を挟んで互いに反対方向に流れ、中間隔壁板１９の微細パターン２０を介した流路壁間で熱交換を行う。
【０１８８】
但し、上側隔壁板１５における右下隅の貫通穴１５ｂ、左下隅の１５ｃは上側封止板１で閉ざされ、下側隔壁板１６における右上隅の貫通穴１６ａ、左上隅の貫通穴１６ｄは下側封止板４で閉ざされ、流体７、１２は漏れない。
【０１８９】
これにより流体７は、矢印１０２で示すように、上側隔壁板１５の右上隅の貫通穴１５ａから供給されて上側のヘッダプレート３のヘッダ用貫通穴５の右側に至り、ここから微細パターン１７、２０がなす微小流路を右から左へ通り、同ヘッダ用貫通穴５の左側から中間隔壁板１９の左下隅の貫通穴１９ｃ、下側のヘッダプレート３の左下隅の貫通穴３ｃ、下側隔壁板１６の左下隅の貫通穴１６ｃを順次経て排出される。
【０１９０】
もう一方の流体１２は、矢印１０３で示すように、上側隔壁板１５の左上隅の貫通穴１５ｄから供給され、上側のヘッダプレート３の左上隅の貫通穴３ｂ、中間隔壁板１９の左上隅の貫通穴１９ｄを順次経て下側のヘッダプレート３のヘッダ用貫通穴５の左側に至り、ここから微細パターン２０、１８がなす微小流路を左から右ヘ通り、同ヘッダ用貫通穴５の右側から下側隔壁板１６の右下隅の貫通穴１６ｂを経て排出される。
【０１９１】
つまり、流体７を上側隔壁板１５の右上隅の貫通穴１５ａに供給し、流体１２を上側隔壁板１５の左上隅の貫通穴１５ｄに供給する場合は、２つの流体７、１２の流れは向流型（ＣｏｕｎｔｅｒＦｌｏｗＴｙｐｅ）となる。従って、図１２に示すチャンネル構造体は向流型の小型熱交換器としての機能を有する。
【０１９２】
ここで、上側隔壁板１５の微細パターン１７が上方に突出する場合は、図１２の例では、上側封止板１の中央部など微細パターン１７よりもやや広い領域２２を上方に膨らませてその下側に微細パターン１７を収容できる深さの凹部を設けることにより、上側封止板１と微細パターン１７との干渉を回避している。あるいは、図示しないが、上側封止板１がブロック状の厚いものの場合は、下側を微細パターン１７を収容できる広さと深さに抉って凹部を設けることでも、干渉を回避できる。更に、図１３に例示するように、上側封止板のうち微細パターン１７を避けた右側の一部１−１及び左側の一部１−２のみを上側封止板１として使用することにより、上側風刺場と微細パターン１７との干渉を回避することができる。下側隔壁板１６の微細パターン１８が下方に突出する場合も同様の対策により、下側封止板４と微細パターン１８との干渉を回避することができる。
【０１９３】
上記図１２、図１３ではヘッダプレート３が２つであるが、これよりも多数の場合についての例を、図１４により説明する。
【０１９４】
図１４に示すチャンネル構造体は、４つのヘッダプレート３をそれぞれの間に中間隔壁板１９を挟んで積層し、これにより形成される積層体の上に上側隔壁板１５を積層し、積層体の下に下側隔壁板１６を積層し、上側隔壁板１５の上に上側封止板１を積層し、下側隔壁板１６の下に下側封止板４を積層することで、例えば数百μｍの水力直径を持つ複数系統の微小流路を形成したものである。
【０１９５】
例えば、図１４に示すように、２つの流体（例えば被処理ガス）７、１２を上側封止板１の貫通穴１ａ、１ｂから上側隔壁板１５の右上隅の貫通穴１５ａと左上隅の貫通穴１５ｄに別々に供給する場合を考える。この場合、流体７は矢印１０２で示すように、上から奇数番目のヘッダプレート３にてそれぞれ上下の微細パターンがなす複数の微小流路を並列に通り、各中間隔壁１９の貫通穴１９ｃと偶数番目のヘッダプレート３の貫通穴３ｂを通って集まり、下側隔壁板１６の貫通穴１６ｃを経て下側封止板４の貫通穴４ｂから排出される。流体１２は矢印１０３で示すように、上から偶数番目のヘッダプレート３にてそれぞれ上下の微細パターンがなす複数の微小流路を並列に通り、中間隔壁板１９の貫通穴１９ｂと奇数番目のヘッダプレート３の貫通穴３ａを通って集まり、下側隔壁板１６の貫通穴１６ｂを経て下側封止板４の貫通穴４ａから排出される。これにより、２つの流体７、１２間での熱交換がなされる。
【０１９６】
次に、図１５に示すように、流体流れ方向の別の例として、２つのヘッダプレート３を中間隔壁板１９を挟んで積層し、上側封止板１には右上隅の貫通穴１ａと右下隅の貫通穴１ｂがあり、下側封止板４に左下隅の貫通穴４ａと左上隅の貫通穴４ｂがあり、２つの流体７、１２を上側隔壁板１５の右上隅の貫通穴１５ａと右下隅の貫通穴１５ｂに別々に供給する場合を考えられる。この場合は、流体（例えば被処理ガス）７は矢印１０２で示すように、微細パターン１７、２０がなす微小流路を通り、流体（例えば被処理ガス）１２は矢印１０４で示すように、微細パターン２０、１８がなす微小流路を通り、流体７と流体１２は中間隔壁板１９を挟んで同じ方向に流れ、中間隔壁板１９の微細パターン２０を介した流路壁間で熱交換を行う。
【０１９７】
但し、上側隔壁板１５における左下隅の貫通穴１５ｃ、左上隅の１５ｄは、上側封止板１で塞がれ、下側隔壁板１６における右上隅の貫通穴１６ａ、右下隅の貫通穴１６ｂは下側封止板４で塞がれ、流体７、１２は漏れない。
【０１９８】
つまり、流体７は、矢印１０２で示すように、上側隔壁板１５の右上隅の貫通穴１５ａから供給されて上側のヘッダプレート３のヘッダ用貫通穴５の右側に至り、ここから微細パターン１７、２０がなす微小流路を右から左へ通り、同ヘッダ用貫通穴５の左側から中間隔壁板１９の左下隅の貫通穴１９ｃ、下側のヘッダプレート３の左下隅の貫通穴３ｂ、下側隔壁板１６の左下隅の貫通穴１６ｃを順次経て排出される。
【０１９９】
もう一方の流体１２は、矢印１０４で示すように、上側隔壁板１５の右下隅の貫通穴１５ｂから供給され、上側のヘッダプレート３の右下隅の貫通穴３ａ、中間隔壁板１９の右下隅の貫通穴１９ｂを順次経て下側のヘッダプレート３のヘッダ用貫通穴５の右側に至り、ここから微細パターン２０、１８がなす微小流路を右から左ヘ通り、同ヘッダ用貫通穴５の左側から下側隔壁板１６の左上隅の貫通穴１６ｄを経て排出される。
【０２００】
このように、流体７を上側隔壁板１５の右上隅の貫通穴１５ａに供給し、流体１２を上側隔壁板１５の右下隅の貫通穴１５ｂに供給する場合は、２つの流体７，１２の流れは並流型（ＰａｒａｌｌｅｌＦｌｏｗＴｙｐｅ）となる。従って、図１５に示すチャンネル構造体は並流型の小型熱交換器として動作する。
【０２０１】
ここで、図１３、図１５に示した例では、上側隔壁板１５と中間隔壁板１９と下側隔壁板１６とを微細パターン１７、２０、１８が互いに平行となるように積層しているが、図１６に示すように、微細パターン１７、２０、１８が交互に交差するように積層することも可能である。
【０２０２】
図１６に示すチャンネル構造体は、図１３あるいは図１４に示したチャンネル構造体と比べると、上側封止板１の貫通穴１ａ、１ｂが右辺中央部付近と上辺中央部付近にあり、下側封止板４の貫通穴４ａ、４ｂが下辺中央部付近と左辺中央部付近にある点と、上側隔壁板１５と中間隔壁板１９と下側隔壁板１６の各微細パターン１７、２０、１８が交互に直交している点と、上下２つのヘッダプレート３の貫通穴５の形状が６角形である点と、上側隔壁板１５、上側のヘッダプレート３、下側隔壁板１６、下側のヘッダプレート３及び中間隔壁板１９の各貫通穴１５ａ〜１５ｄ、３ａ〜３ｂ、１６ａ〜１６ｄ、１９ａ〜１９ｂの配置位置が各部材１５、３、１６、１９の辺中央部付近である点が異なり、他は同様である。従って、図１６中で図１３または図１５と同一機能部材には同一符号を付すとともに、説明の重複を省く。
【０２０３】
図１６に示す例では、上側のヘッダプレート３のヘッダ用貫通穴５の形状は横向きの６角形であり、ヘッダプレート３の上辺及び下辺に対して平行な２辺を有し、これら平行２辺に右側から連なる２辺がなす頂点がヘッダプレート３の右辺中央部近くに位置し、前記平行２辺に左側から連なる２辺がなす頂点がヘッダプレート３の左辺中央部近くに位置している。
【０２０４】
一方、下側のヘッダプレート３のヘッダ用貫通穴５の形状は縦向きの６角形であり、ヘッダプレート３の右辺及び左辺に対して平行な２辺を有し、これら平行２辺に上側から連なる２辺がなす頂点がヘッダプレート３の上辺中央部近くに位置し、前記平行２辺に下側から連なる２辺がなす頂点がヘッダプレート３の下辺中央部近くに位置している。
【０２０５】
このように上下２つのヘッダプレート３間でヘッダ用貫通穴５の向きが異なっているが、同一形状のヘッダ用貫通穴を形成したヘッダプレートを９０度回転して配置することで、２つのヘッダプレート３に使用できるようにしている。
【０２０６】
図１６では、上側隔壁板１５の貫通穴１５ａ、１５ｂ、１５ｃ、１５ｄは４辺の各中央部付近に形成されている。そのうち、右辺中央部付近の貫通穴１５ａと左辺中央部付近の貫通穴１５ｃは、微細パターン１７を避けるようにして、上側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。下辺中央部付近の貫通穴１５ｂと上辺中央部付近の貫通穴１５ｄは、同ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０２０７】
同様に、下側隔壁板１６の貫通穴１６ａ、１６ｂ、１６ｃ、１６ｄは４辺の各中央部付近に形成されている。そのうち、下辺中央部付近の貫通穴１６ｂと上辺中央部付近の貫通穴１６ｄは、微細パターン１８を避けるようにして、下側のヘッダプレート３のヘッダ用貫通穴５と連通可能な位置に形成されている。右辺中央部付近の貫通穴１６ａと左辺中央部付近の貫通穴１６ｃは、同ヘッダ用貫通穴５とは連通しないようにこれを避けて形成されている。
【０２０８】
上側のヘッダプレート３には、ヘッダ用貫通穴５の外側にて、下辺中央部付近及び上辺中央部付近にそれぞれ貫通穴３ａ、３ｂが形成されている。下辺中央部付近の貫通穴３ａは上側隔壁板１５の下辺中央部付近の貫通穴１５ｂに、上辺中央部付近の貫通穴３ｂは上側隔壁板１５の上辺中央部付近の貫通穴１５ｄ及び上側封止板１の上辺中央部付近の貫通穴１ｂにそれぞれ連通可能な位置に形成されている。
【０２０９】
下側のヘッダプレート３には、ヘッダ用貫通穴５の外側にて、右辺中央部付近及び左辺中央部付近にそれぞれ貫通穴３ａ、３ｂが形成されている。右辺中央部付近の貫通穴３ａは下側隔壁板１６の右辺中央部付近の貫通穴１６ａに、左辺中央部付近の貫通穴３ｂは下側隔壁板１６の左辺中央部付近の貫通穴１６ｃ及び下側封止板４の左辺中央部付近の貫通穴４ｂにそれぞれ連通可能な位置に形成されている。
【０２１０】
このように上下２つのヘッダプレート３間では貫通穴３ａ、３ｂの配置が異なるが、穴位置を含めて同形状に作製したヘッダプレートを９０度回転して配置することで、両方のヘッダプレート３に利用することができる。
【０２１１】
中間隔壁板１９の貫通穴１９ａ、１９ｂ、１９ｃ、１９ｄは４辺の各中央部付近に形成されている。そのうち、右辺中央部付近の貫通穴１９ａは上側隔壁板１５の右辺中央部付近の貫通穴１５ａと下側のヘッダプレート３の右辺中央部付近の貫通穴３ａと下側隔壁板１６の右辺中央部付近の貫通穴１６ａとに連通可能な位置に形成され、下辺中央部付近の貫通穴１９ｂは上側隔壁板１５の下辺中央部付近の貫通穴１５ｂと上側のヘッダプレート３の下辺中央部付近の貫通穴３ｂと下側隔壁板１６の下辺中央部付近の貫通穴１６ｂとに連通可能な位置に形成され、左辺中央部付近の貫通穴１９ｃは上側隔壁板１５の左辺中央部付近の貫通穴１５ｃと下側のヘッダプレート３の左辺中央部付近の貫通穴３ｃと下側隔壁板１６の左辺中央部付近の貫通穴１６ｃとに連通可能な位置に形成され、上辺中央部付近の貫通穴１９ｄは上側隔壁板１５の上辺中央部付近の貫通穴１５ｄと上側のヘッダプレート３の上辺中央部付近の貫通穴３ｂと下側隔壁板１６の上辺中央部付近の貫通穴１６ｄとに連通可能な位置に形成されている。
【０２１２】
従って、上側隔壁板１５と下側隔壁板１６と中間隔壁板１９は貫通穴の位置を含めて同じ形状であり、同形状に作製した微細パターン付き隔壁板を上側隔壁板１５と下側隔壁板１６と中間隔壁板１９に利用できるようにしている。上側封止板１と下側封止板４も同じものを利用できるようにしている。
【０２１３】
そして、塑性加工を用いて各基板に微細パターン１７、２０、１８を形成することで上側隔壁板１５、中間隔壁板１９及び下側隔壁板１６を予め作製しておき、これらの微細パターン１７、２０、１８が交互に直交するように、上側封止板１、上側隔壁板１５、上側のヘッダプレート３、中間隔壁板１９、下側のヘッダプレート３、下側隔壁板１６、下側封止板４を積層し、例えば、各々を拡散接合やろう付、溶接等で代表される各種の接合法により接合する。
【０２１４】
例えば、２つのヘッダプレート３を間に中間隔壁板１９を挟んで積層し、これにより形成される積層体の上に上側隔壁版１５、上側封止板１を積層し、前記積層体の下に下側隔壁板１６、下側封止板４を積層する。
【０２１５】
これにより、上側隔壁板１５と中間隔壁板１９との間にそれらの微細パターン１７、２０によって例えば数百μｍの水力直径を持つ微小流路が形成され、中間隔壁板１９と下側隔壁板１６との間にそれらの微細パターン２０、１８によって例えば数百μｍの水力直径を持つ微細小路が形成されて、複数系統の微小流路を持つチャンネル構造体ができあがる。このチャンネル構造体は、例えば密閉空間に設置されて使用される。
【０２１６】
つまり、中間隔壁板１９の微細パターン２０を境に、微細パターン１７、２０により形成される微小流路が１つの流路系統となり、微細パターン２０、１８により形成される微小流路がもう１つの流路系統となり、別々の流体７、１２を例えば上側封止板１の２つの貫通穴１ａ、１ｂから供給して別々の流路系統に通すことにより中間隔壁板１９の微細パターン２０を介して相互間で熱交換が行われる。
【０２１７】
例えば、図１６に示すように、２つの流体（被処理ガス）７、１２を上側隔壁板１５の右辺中央部付近の貫通穴１５ａと上辺中央部付近の貫通穴１５ｄに別々に供給する場合を考える。この場合、流体７は矢印１０５で示すように、微細パターン１７、２０がなす微小流路を通り、流体１２は矢印１０６で示すように、微細パターン２０、１８がなす微小流路を通り、２つの流体７と流体１２は中間隔壁板１９を挟んで互いに交差する方向に流れ、それの微細パターン２０を介した流路壁間で熱交換を行う。
【０２１８】
但し、上側隔壁板１５における下辺中央部付近の貫通穴１５ｂ、左辺中央部付近の貫通穴１５ｃは上側封止板１により塞がれ、下側隔壁板１６における右辺中央部付近の貫通穴１６ａ、上辺中央部付近の貫通穴１６ｄは下側封止板４により塞がれ、流体７、１２は漏れない。
【０２１９】
これにより、流体７は、矢印１０５で示すように、上側隔壁板１５の右辺中央部付近の貫通穴１５ａから供給されて上側のヘッダプレート３のヘッダ用貫通穴５の右側に至り、ここから微細パターン１７、２０がなす微小流路を右から左へ通り、同ヘッダ用貫通穴５の左側から中間隔壁板１９の左辺中央部付近の貫通穴１９ｃ、下側のヘッダプレート３の左辺中央部付近の貫通穴３ｂ、下側隔壁板１６の左辺中央部付近の貫通穴１６ｃを順次経て排出される。
【０２２０】
もう一方の流体１２は、矢印１０６で示すように、上側隔壁板１５の上辺中央部付近の貫通穴１５ｄから供給され、上側のヘッダプレート３の上辺中央部付近の貫通穴３ｂ、中間隔壁板１９の上辺中央部付近の貫通穴１９ｄを順次経て下側のヘッダプレート３のヘッダ用貫通穴５の上側（奥側）に至り、ここから微細パターン２０、１８がなす微小流路を上から下ヘ通り、同ヘッダ用貫通穴５の下側（手前側）から下側隔壁板１６の下辺中央部付近の貫通穴１６ｂを経て排出される。
【０２２１】
つまり、流体７を上側隔壁板１５の右辺中央部付近の貫通穴１５ａに供給し、流体１２を上側隔壁板１５の上辺中央部付近の貫通穴１５ｄに供給する場合は、２つの流体７、１２の流れは直交型（ＣｒｏｓｓＦｌｏｗＴｙｐｅ）となる。従って、図１６の示すチャンネル構造体は直交型の小型熱交換器として動作する。
【０２２２】
図１３、図１５、図１６を参照して説明したチャンネル構造体は２つのヘッダプレート３を間に中間隔壁板１９を挟んで積層したものであるが、３つ以上のヘッダプレート３を間に中間隔壁板１９を挟んで積層してチャンネル構造体を構成することが可能である。
【０２２３】
なお、各ヘッダプレート３のヘッダ用貫通穴５の形状及び大きさは、その上下方向の投影領域に上側隔壁板１５や下側隔壁板１６、中間隔壁板１９の微細パターン１７、１８、２０が収まることができ、かつ、流体７、１２の供給と排出に必要な領域を確保できる形状及び大きさを持つものであれば、任意である。
【０２２４】
また、下側隔壁板１６を図１６とは表裏逆にして、上側隔壁板１５、上側のヘッダプレート３、中間隔壁板１９、下側のヘッダプレート３及び下側隔壁板１６を積層することが可能である。
【０２２５】
更に、図１３、図１５、図１６ではチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【０２２６】
ここで、上側隔壁板１５の微細パターン１７が上方に突出する場合は、図１２に例示するように、上側封止板１の中央部など微細パターン１７よりもやや広い領域２２を上方に膨らませてその下側に微細パターン１７を収容できる深さの凹部を設けたり、あるいは、図示しないが、上側封止板１がブロック状の厚いものの場合は、下側を微細パターン１７を収容できる広さと深さに抉って凹部を設けることにより、上側封止板１と微細パターン１７との干渉を回避することができる。下側隔壁板１６の微細パターン１８が下方に突出する場合も同様の対策により、下側封止板４と微細パターン１８との干渉を回避することができる。
【０２２７】
［第８実施例］
次に、図１３、図１５、図１６を参照して、本発明の第８実施例に係る反応器としての機能を有するチャンネル構造体を説明する。
【０２２８】
本第８実施例のチャンネル構造体は、図１３、図１５、図１６に示すように、上記第７実施例で説明した各チャンネル構造体に対し、上側隔壁板１５と上側のヘッダプレート３と中間隔壁板１９とがなす微小流路の内面に触媒８を担持させ、中間隔壁板１９と下側のヘッダプレート３と下側隔壁板１６とがなすもう一方の微小流路の内面に触媒１３を担持させたものである。
【０２２９】
本例では、流体７が燃料ガスで、流体１２が改質ガスである場合を想定し、一方の触媒８を燃焼触媒とし、もう一方の触媒１３を改質触媒とすることにより、改質ガス１２の改質反応に必要な熱を燃料ガス７の触媒反応により供給することを可能にしている。これらの触媒の担持処理として、燃焼触媒８を予め担持した触媒体を上側隔壁板１５の微細パターン１７の下面と中間隔壁板１９の微細パターン２０の上面とに成膜し、また、改質触媒１３を予め担持した触媒体を中間隔壁板１９の微細パターン２０の下面と下側隔壁板１６の微細パターン１８の上面とに成膜している。触媒８、１３は塑性加工前に予め基板に担持させておいても、あるいは、塑性加工後に微細パターン１７、１８、２０にそれぞれ担持させても良い。
【０２３０】
そして、図１３、図１５、図１６いずれの場合も、塑性加工を用いて基板に微細パターン１７を形成するとともに下面に燃焼触媒８を担持させることで上側隔壁板１５を予め作製しておき、また、塑性加工を用いて基板に微細パターン２０を形成するとともに上面に燃焼触媒８を、下面に改質触媒１３をそれぞれ担持させることで中間隔壁板１９を予め作製しておき、更に、塑性加工を用いて基板に微細パターン１８を形成するとともに上面に改質触媒１３を担持させることで下側隔壁板１６を予め作製しておき、２つのヘッダプレート３をその間に中間隔壁板１９を挟んで積層し、これにより形成される積層体の上に上側隔壁板１５と上側封止板１を積層し、前記積層体の下に下側隔壁板１６と下側封止板４を積層することで、例えば数百μｍの水力直径を持ち、かつ、複数種類の触媒（燃焼触媒８と改質触媒１３）が担持された２系統の微小流路が形成されて、チャンネル構造体ができあがる。
【０２３１】
図１３に示すチャンネル構造体では矢印１０２、１０３で示すように向流型（ＣｏｕｎｔｅｒＦｌｏｗＴｙｐｅ）であるが、図１５に示すチャンネル構造体では矢印１０２、１０４で示すような並流型（ＰａｒａｌｌｅｌＦｌｏｗＴｙｐｅ）であり、図１６に示すチャンネル構造体では矢印１０５、１０６で示すような直交型（ＣｒｏｓｓＦｌｏｗＴｙｐｅ）である。
【０２３２】
図１３、図１５、図１６に示したいずれのチャンネル構造体でも、燃焼触媒８が微細パターン１７、２０がなす微細流路の内面に担持されているため、そこの微小流路に燃焼ガス７を通じることで発熱反応である触媒燃焼反応が生じ、得られた熱が中間隔壁板１９の微細パターン２０を介して、微細パターン２０、１８がなす内面に改質触媒１３を担持する微小流路に与えられる。これにより、微細パターン２０、１８がなす微小流路を通る改質ガス１２に、吸熱反応である触媒改質反応を生ぜしめるために必要な熱が供給される。
【０２３３】
上記各例では、第４実施例に比べ、別体構造であった流路波板と区画板、中間区画板とがそれぞれ微細パターン付きの上側隔壁板１５及び下側隔壁板１６及び中間隔壁板１９として一体化しているため、中間区画板を省略でき、また、第４実施例では別体構造で必要だった流路波板の固定方法を考慮する必要がなくなるから、部品点数及び工数の削減、即ちコストダウンのメリットがある。更に、領域を選択的にコーティング可能な触媒担持方法、例えばゾルゲル法やディップコート法、スパッタリング成膜法を用いる場合、あるいは、第４実施例におけるような流路波板とケーシングとを別材料とする利点が少ない場合に適した構造である。
【０２３４】
図１３、図１５、図１６ではチャンネル構造体を横置き状態を想定して示しているため、便宜上、上下を区別して説明しているが、この小型反応器は上下逆にして使用することも、あるいは、縦置き状態で使用することも可能である。
【０２３５】
また、図１３、図１５、図１６を参照して説明したチャンネル構造体は２つのヘッダプレート３を間に中間隔壁板１９を挟んで積層したものであるが、３つ以上のヘッダプレート３を間に中間隔壁板１９を挟んで積層して反応器の機能を有するチャンネル構造体を構成することが可能である。例えば、図１４に示したチャンネル構造体の複数の微小流路に複数種類の触媒を担持させることにより、反応器の機能を持たせることができる。例えば、上から順に、ある触媒Ａ、これと同じ触媒Ａ、これとは別の触媒Ｂをセットとして１セットまたは繰り返して担持させたり、ある触媒Ａ、これとは別の触媒Ｂ、更に別の触媒Ｃをセットとして１セットまたは繰り返して担持させることができる。
【０２３６】
本発明で使用する各種部材の基板材料は特に制限されることはないが、例えばＳＵＳ、Ｎｉ、Ａｌ、Ｃｕ及びこれらの合金である各種金属材料を例示することができる。
【０２３７】
前述したように、微細パターン２ａ、１７、１８、２０の凹凸部形状としては三角波形に限らず、矩形、エンボス、その他の規則的形状あるいは不規則形状とすることができる。また、これらの微細パターンは凹凸部形状に限らず、凸形状のみあるいは凹形状のみであっても良い。
【０２３８】
図１７（ａ）（ｂ）に、凹凸形状をエンボスとした場合の隔壁板の例を示す。
【０２３９】
図１７（ａ）は、図８に示したチャンネル構造体に用いた上側隔壁板１５及び下側隔壁板１６に、それぞれエンボス２１によって凹凸形状の微細パターンを塑性加工で形成した例を示しているが、このようなエンボス２１は、上記各実施例における上側隔壁板１５及び下側隔壁板１６、中間隔壁板１９の微細パターンに適用することが可能である。３はヘッダプレートである。
【０２４０】
図１７（ｂ）は、エンボス２１によって凹凸形状の微細パターンを形成した上側隔壁板１５、２つの中間隔壁板１９及び下側隔壁板１６を用いて、図１３に示したチャンネル構造体を３つのヘッダプレート３を有する構造に拡張した例を示している。上側隔壁板１５、各中間隔壁板１９及び下側隔壁板１６にはそれぞれエンボス２１により凹凸形状の微細パターンが形成されている。上側隔壁板１５と上側の中間隔壁板１９との間、上側の中間隔壁板１９と下側の中間隔壁板１９との間、下側の中間隔壁板１９と下側隔壁板１６との間には、それぞれヘッダプレート３が配置される。５はヘッダプレート３のヘッダ用貫通穴である。
【０２４１】
上記説明では触媒８、１３を異なる種類のものとしたが、同一種類であっても差し支えない。また、３種類以上の触媒を用いることもできる。
【０２４２】
触媒８、１３の材料としては、被処理ガス等の流体７、１２に応じて適宜選択すれば良く、例えば、Ｐｔ、Ｒｕ、Ｐｄ、Ｎｉ、Ｃｕ等を例示することができる。
【０２４３】
また、これら触媒材料の粉末の担体としては、例えば、ＺｒＯ_２、Ａｌ_２Ｏ_３、ＳｉＯ_３、ＺｎＯ、ＣｅＯ_３等を例示することができる。
【０２４４】
ここで、上記各実施例では微細パターンの寸法（三角波形状の場合は、高さとピッチ）を例えば数百μｍとしているが、微細パターンで構成される微小流路の水力直径は熱交換効率の確保に要する上限値と圧力損失の抑制に要する下限値との間の値であることが好ましく、例えば、０．１ｍｍから１．４ｍｍの範囲の値とされる。以下、微細パターンの代表寸法の数値設定について、説明する。
【０２４５】
微小流路を用いた熱交換器構造の目的は、熱交換効率が良く、かつ、必要な交換熱量を満たすコンパクトな熱交換器を実現することにある。熱交換効率向上のためには熱伝達係数の増大が望ましく、このためには、水力直径（即ち、流路の断面積の４倍をぬれぶち長さで割った値。円管状流路の場合、流路内径に等しい。）を減少させる必要がある。しかし、この場合、同時に流体の圧力損失が増大するため、実際の運用では適正な範囲の値を流路内径として用いる必要がある。また、機器のコンパクト性を維持しつつ必要な交換熱量を確保するためには、流体の流量をコントロールする必要がある。このため、以下に、流体流速ｖ及び流路管内径ｄに対する圧力損失及び熱伝達係数の変化を定量的に評価し、実際にチャンネル構造体を設計する際の適正な数値範囲を示す。
【０２４６】
計算条件として円管状流路を想定し、伝熱面積Ａ及び流路管長Ｌを固定し、流速ｖ及び流路管内径ｄを独立なパラメータとする。また、流路本数ｎをｎ＝Ａ／πｄＬ、流量ＷをＷ＝ｎ・（π／４）ｄ^２・ｖとする。圧力損失ΔＰは次式（１）、次式（２）で算出され、熱伝達係数ｈは次式（３）、次式（４）で計算される。但し、式（１）と式（３）は層流の場合の算出式、式（２）と式（４）は乱流の場合の算出式である。
【０２４７】
【数１】

【０２４８】
これらの算出式を用いて、流速ｖ及び流路管内径ｄをパラメータとして圧力損失ΔＰ（単位Ｐａ）を算出した結果を図１８、図１９に示す。図１８は空気を媒体（流体）とした場合の結果、図１９は水を媒体（流体）とした場合の結果を示している。いずれの場合も、圧力損失ΔＰは、流速ｖの増加あるいは流路管内径ｄの減少に伴い、増加する傾向を示す。これは、上記の計算条件では、流路管内径ｄが１ｍｍ以下の領域では何れも層流となり、圧力損失ΔＰは式（１）に従うため、流速ｖに対しては１次元、流路管内径ｄに対しては−２次元で増減することによる。
【０２４９】
一方、熱伝達係数ｈは層流においては流速ｖに対して変化せず、流路管内径ｄの減少に対して増加する傾向を示す。これは、熱伝達係数ｈは層流においては式（３）に従うため、流速ｖに対しては一定、流路管内径ｄに対しては−１次元で増減することによる。
【０２５０】
図２０に、空気の流速を１０．０ｍ／ｓｅｃとした場合の圧力損失、熱伝達係数の変化を示す。この図２０に示す計算結果を元に、流路管内径の適正範囲について述べる。
【０２５１】
圧縮機を持たないターボブロアーをチャンネル構造体への流体供給系として適用する場合、この適用のためには圧力損失を０．２気圧以下に低減する必要がある。この場合、式（１）より流速１０．０ｍ／ｓｅｃの場合で流路管内径を０．１２１ｍｍ以上とする必要があると算出される。一方で、従来型の熱交換器（ｄ〜３ｍｍ、熱伝達係数５０Ｗ／ｍ^２Ｋ程度）と同等かそれ以上の熱交換効率を示すためには、熱伝達係数が５０Ｗ／ｍ^２Ｋ以上であることが望ましい。これは、式（３）より、流速ｖを１０．０ｍ／ｓｅｃの場合で流路管内径ｄを１．７６４ｍｍ以下とした場合に得られることが算出される。図２０中では、２本の垂直点線２０１、２０２に挟まれた領域が流路管内径の適正領域となる。
【０２５２】
図２１に、水の流速を１．０ｍ／ｓｅｃとした場合の圧力損失、熱伝達係数の変化を示す。空気の場合と同様に適正流路管内径の範囲を考えると、チャンネル構造体への流体供給系としてターボポンプを適用することを想定し、圧力損失を１０気圧程度に抑えるとすると、流速１．０ｍ／ｓｅｃの場合で流路管内径を０．０４０ｍｍ以上とする必要があると算出される。一方で、従来型の熱交換器と比較し、熱伝達係数が１５００Ｗ／ｍ^２Ｋ以上を実現するものとすると、流路管内径ｄを１．３６９ｍｍ以下に抑える必要がある。図２１中では、２本の垂直点線２０３、２０４に挟まれた領域が流路管内径の適正領域となる。
【０２５３】
表１及び図２２は、上述の条件に基づき、各流体流速について算出した流路内径寸法の適正範囲を示す（上限２０５、２０７と下限２０６、２０８参照）。これにより、０．１０ｍｍ〜１．４０ｍｍの領域を微小流路内径の代表寸法の適正範囲として挙げることができる。また、好ましくは０．１ｍｍから０．５ｍｍの範囲を微小流路の代表寸法とすることができる。微細パターンが三角波形状等、円管状以外の形状を持つ流路の場合は、それぞれの流路に対して算出される水力直径の適正範囲として上記の各数値（０．１０ｍｍから１．４０ｍｍの範囲、好ましくは０．１ｍｍから０．５ｍｍの範囲）を挙げることができる
【０２５４】
【表１】

【０２５５】
次に、上述した各実施例では、ヘッダプレートにヘッダ用貫通穴が１つだけ形成されているが、図２３に示すヘッダプレート３００のように、ヘッダ用貫通穴３０１を複数個（図では４個）面内に並べて形成し、このようなヘッダプレート３００を１枚または複数枚用いることで、複数個のチャンネル構造体を同時に並列に構成するようにしても良い。例えば、少なくとも２個のヘッダ用貫通穴にそれぞれ第１〜第４実施例と同様に流路波板２をはめ込んで積層することで、少なくとも２個のチャンネル構造体を同時に並列に構成する。あるいは、ヘッダプレート３００の複数のヘッダ用貫通穴３０１の位置に合わせて上側隔壁板、中間隔壁板、下側隔壁板に少なくとも２箇所にて微細パターンを形成し、第５〜第８実施例と同様に積層することで、少なくとも２個のチャンネル構造体を同時に並列に構成する。複数個のチャンネル構造体を並列に構成した場合の使用例として、例えば、図２３に矢印３０２で示すように一方の流体７を各チャンネル構造体に並列に供給し、また、矢印３０３で示すように他方の流体１２を各チャンネル構造体に並列に供給する。図２３では、上下２つのヘッダプレート３のヘッダ用貫通穴３０１は例えば菱形形状であり、上下２つのヘッダプレート３の間で、ヘッダ用貫通穴３０１の向きが逆になっている。
【０２５６】
更に、上記各実施例では流路波板どうし、ヘッダプレートどうし、封止板どうし、各種区画板どうし、各種隔壁板どうしの間で、同一の流路形状を持つ部材を作製し、表裏反転や９０度回転などして使用するようにしている。例えば複数系統の流路形成に同じ流路構成プレートを用いている。しかしながら、同一の流路形状を持つ部材を必ずしも使いまわす必要はなく、各流路を流れる流体の必要流量に応じて、断面形状など流路の形状を変えるようにしても良い。例えば、熱を発生する側の流路寸法を大きくし、熱を受ける側の流路寸法を小さくするように、各流路構成プレートの流路形状を変えることができる。
【０２５７】
【発明の効果】
第１発明は、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートと、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、前記ヘッダ用貫通穴にはめ込まれる流路波板と、前記流路波板の上に配置され、流体の流れる領域を区画する第１の封止板と、前記流路波板の下に配置され、流体の流れる領域を区画する第２の封止板とが積層され、層間に微小流路が形成されているので、小型熱交換器が実現する。特に、ヘッダプレート用貫通穴に流路波板がはめ込まれることから、微小流路自体並びに微小流路を持ち熱交換機能を持つチャンネル構造体が簡便容易に、且つ安価に実現する。
【０２５８】
第２発明は、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートと、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、前記ヘッダ用貫通穴にはめ込まれる流路波板とからなる流路ユニットが複数、流体の流れる領域を区画する中間区画板を間に挟んで積層され、前記複数の流路ユニットが積層されてなる積層体と、前記積層体の上に配置され、流体の流れる領域を区画する第１の区画板と、前記第１の区画板の上に配置される第１の封止板と、前記積層体の下に配置され、流体の流れる領域を区画する第２の区画板と、前記第２の区画板の下に配置される第２の封止板とが積層され、層間に複数系統の微小流路が形成されているので、熱交換機能を持つチャンネル構造体が実現する。特に、ヘッダプレート用貫通穴に流路波板がはめ込まれることから、微小流路自体並びに微小流路を持ち熱交換機能を持つチャンネル構造体が簡便容易に、且つ安価に実現する。
【０２５９】
第３発明は、第１発明または第２発明において、前記流路波板が塑性加工により形成されているので、製造コストが安価なチャンネル構造体が実現する。
【０２６０】
第４発明は、第１発明または第２発明において、前記ヘッダプレートに前記ヘッダ用貫通穴が複数個並んで形成され、各ヘッダ用貫通穴に前記流路波板がはめ込まれているので、複数のチャンネル構造体が同時に実現する。
【０２６１】
第５発明は、第１発明において、前記微小流路に触媒が担持されているので、反応機能を持つチャンネル構造体が実現する。また、触媒担持が不要な部分へのマスキング処理といった複雑な工程を必要とせず、流路波板単体での触媒コーティングが可能となるメリットがある。また、触媒担持処理の工程と積層工程とを別系統とすることで、触媒を担持した流路波板の一括生産、触媒の要求仕様の変更に対する即応性、触媒の交換の容易性を実現できる。更に、用途に応じて任意の流路波板を別材料に容易に変更できる利便性がある。
【０２６２】
第６発明は、第１発明において、前記流路波板が第１の区画板と第２の区画板とで接合されることなく挟み込まれているので、製造工程が簡略化し、流路波板の交換が容易である。
【０２６３】
第７発明は、第２発明において、前記複数系統の微小流路に１つまたは複数種類の触媒が担持されているので、反応機能を持つチャンネル構造体が実現する。また、流路波板の交換により、触媒要求仕様の変更に即応でき、触媒交換を容易に行うことができる。更に、触媒担持が不要な部分へのマスキング処理といった複雑な工程を必要とせず、流路波板単体での触媒コーティングが可能となるメリットがある。また、触媒担持処理の工程と積層工程とを別系統とすることで、触媒を担持した流路波板の一括生産を実現できる。更に、用途に応じて任意の流路波板を別材料に容易に変更できる利便性がある。
【０２６４】
第８発明は、第２発明において、各流路ユニットの前記流路波板が前記第１の区画板、前記中間区画板及び前記第２の区画板に接合されることなく、前記第１の区画板と前記中間区画板との間、前記中間区画板どうしの間及び前記中間区画板と前記第２の区画板との間にそれぞれ挟み込まれているので、製造工程が簡略化し、流路波板の交換が容易である。
【０２６５】
第９発明は、第２発明において、前記第１の封止板が前記第１の区画板を兼ねているので、部品点数が減り、製造コストが低減する。
【０２６６】
第１０発明は、第２発明において、前記第２の封止板が前記第２の区画板を兼ねているので、部品点数が減り、製造コストが低減する。
【０２６７】
第１１発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する流路波板を塑性加工により作製する工程と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートの前記ヘッダ用貫通穴に前記流路波板をはめ込み、前記流路波板の上で流体の流れる領域を区画する第１の区画板と、前記ヘッダプレートと、前記流路波板の下で流体の流れる領域を区画する第２の区画板とを積層する工程を含み、層間に微小流路を有するチャンネル構造体を製造するので、微小流路を有するチャンネル構造体を簡便容易に、安価に製造することができる。
【０２６８】
第１２発明は、第１１発明において、前記流路波板の塑性加工前あるいは後に、前記微細パターンの部分に触媒を担持させるので、反応機能を有するチャンネル構造体を簡便且つ安価に製造することができる。特に、触媒担持が不要な部分へのマスキング処理といった複雑な工程を必要とせず、流路波板単体での触媒コーティングが可能となるメリットがある。また、触媒担持処理の工程と積層工程とを別系統とすることで、触媒を担持した流路波板の一括生産、触媒の要求仕様の変更に対する即応性、触媒の交換の容易性を実現できる。更に、用途に応じて任意の流路波板を別材料に容易に変更できる利便性がある。
【０２６９】
第１３発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する流路波板を塑性加工により作製する工程と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートの前記ヘッダ用貫通穴に前記流路波板をはめ込み流路ユニットとし、前記流体ユニットが複数、流体の流れる領域を区画する中間区画板を間に挟んで積層され、前記複数の流体ユニットが積層されてなる積層体と、前記積層体の上に配置され、流体の流れを区画する第１の区画板と、前記第１の区画板の上に配置される第１の封止板と、前記積層体の下に配置され、流体の流れを区画する第２の区画板と、前記第２の区画板の下に配置される第２の封止板とが積層されてなる構造体を作製する工程を含み、層間に複数系統の微小流路を有するチャンネル構造体を製造するので、複数系統の微小流路を有するチャンネル構造体を簡便容易に、安価に製造することができる。
【０２７０】
第１４発明は、第１３発明において、前記流路波板の塑性加工前あるいは後に、各微細パターンの部分に１つまたは複数種類の触媒を担持させるので、反応機能と複数系統の微小流路を有するチャンネル構造体を簡便且つ安価に製造することができる。特に、触媒担持が不要な部分へのマスキング処理といった複雑な工程を必要とせず、流路波板単体での触媒コーティングが可能となるメリットがある。また、触媒担持処理の工程と積層工程とを別系統とすることで、触媒を担持した流路波板の一括生産、触媒の要求仕様の変更に対する即応性、触媒の交換の容易性を実現できる。更に、用途に応じて任意の流路波板を別材料に容易に変更できる利便性がある。
【０２７１】
第１５発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第１の隔壁板と、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートと、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第２の隔壁板とが積層され、層間に微小流路が形成されているので、熱交換機能を有するチャンネル構造体が実現する。特に、第１の隔壁板及び第２の隔壁板が微細パターンを有しているので、構造部材の部品点数が減り、製造コストが低減する。
【０２７２】
第１６発明は、第１５発明において、第１の隔壁板及び第２の隔壁板の各微細パターン部分が塑性加工により形成されているので、安価なチャンネル構造体が実現する。
【０２７３】
第１７発明は、第１５発明において、前記ヘッダプレートに前記ヘッダ用貫通穴が複数個並んで形成され、第１の隔壁板及び第２の隔壁板にそれぞれ微細パターン部分が複数個並んで形成されているので、複数個のチャンネル構造体が同時に実現する。
【０２７４】
第１８発明は、第１５発明において、前記微小流路に触媒が担持されているので、反応機能を有するチャンネル構造体が安価に実現する。
【０２７５】
第１９発明は、流体の供給及び排出の機能を持つヘッダ用貫通穴を有するヘッダプレートが複数、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する中間隔壁板を間に挟んで積層され、前記複数のヘッダプレートが積層されてなる積層体の上に、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第１の隔壁板が積層され、前記第１の隔壁板の上に第１の封止板が積層され、前記積層体の下に、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有し、流体の流れる領域を区画する第２の隔壁板が積層され、前記第２の隔壁板の下に第２の封止板が積層され、層間に複数系統の微小流路が形成されているので、熱交換機能を有するチャンネル構造体が安価に実現する。特に、隔壁板が微細パターンを有しているので、構造部材の部品点数が減り、製造コストが低減する。
【０２７６】
第２０発明は、第１９発明において、前記第１の隔壁板、前記中間隔壁板及び前記第２の隔壁板の微細パターン部分が塑性加工により形成されているので、製造コストが安価なチャンネル構造体が実現する。
【０２７７】
第２１発明は、第１９発明において、前記複数系統の微小流路に１つまたは複数種類の触媒が担持されているので、反応機能を有するチャンネル構造体が実現する。
【０２７８】
第２２発明は、第１９発明において、前記ヘッダプレートに前記ヘッダ用貫通穴が複数個並んで形成され、前記第１の隔壁板、前記中間隔壁板及び前記第２の隔壁板に微細パターン部分が複数個並んで形成されているので、複数個のチャンネル構造体が同時に実現する。
【０２７９】
第２３発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個有し、流体の流れる領域を区画する第１の隔壁板と、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個有し、流体の流れる領域を区画する第２の隔壁板とを塑性加工により作製する工程と、前記第１の隔壁板と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートと、前記第２の隔壁板とを積層する工程とを含み、層間に微小流路を有するチャンネル構造体を製造するので、微小流路を有し、熱交換機能を有するチャンネル構造体を安価に製造することができる。特に、第１の隔壁板と第２の隔壁板が微細パターンを有しているので、構造部材の部品点数が減り、製造コストが低減する。
【０２８０】
第２４発明は、第２３発明において、第１の隔壁板及び第２の隔壁板に前記微細パターンを塑性加工する前あるいは後に、前記微細パターンの部分に触媒を担持させるので、反応機能を有するチャンネル構造体を簡便、安価に製造することができる。
【０２８１】
第２５発明は、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個を有し、流体の流れる領域を区画する第１の隔壁板、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個を有し、流体の流れる領域を区画する第２の隔壁板と、凹形状もしくは凸形状もしくは凹凸形状の微細パターンを有する部分を少なくとも１個を有し、流体の流れる領域を区画する中間隔壁板とを塑性加工により作製する工程と、流体の供給及び排出の機能を持つヘッダ用貫通穴を少なくとも１個有するヘッダプレートが複数、前記中間隔壁板を挟んで積層されてなる積層体と、前記積層体の上に配置される前記第１の隔壁板と、前記第１の隔壁板の上に配置される第１の封止板と、前記積層体の下に配置される前記第２の隔壁板と、前記第２の隔壁板の下に配置される第２の封止板とが積層されてなる構造体を作製する工程とを含み、層間に複数系統の微小流路を有するチャンネル構造体を製造するので、微小流路を有し、熱交換機能を有するチャンネル構造体を簡便、安価に製造することができる。特に、隔壁板が微細パターンを有しているので、構造部材の部品点数が減り、製造コストが低減する。
【０２８２】
第２６発明は、第２５発明において、前記第１の隔壁板、前記第２の隔壁板及び前記中間隔壁に前記微細パターンを塑性加工する前あるいは後に、各微細パターンの部分に１つまたは複数種類の触媒を担持させるので、反応機能を有するチャンネル構造体を簡便、安価に製造することができる。
【０２８３】
第２７発明は、第１発明または第２発明または第１５発明または第１９発明において、前記微小流路の水力直径（即ち、流路の断面積の４倍をぬれぶち長さで割った値）が熱交換効率の確保に要する上限値と圧力損失の抑制に要する下限値との間の値であるので、性能が良く、熱交換機能あるいは反応機能を有する安価なチャンネル構造体が実現する。
【０２８４】
第２８発明は、第１発明または第２発明または第１５発明または第１９発明において、前記微小流路の水力直径（即ち、流路の断面積の４倍をぬれぶち長さで割った値）が０．１ｍｍから１．４ｍｍの範囲の値であるので、熱交換効率を向上でき、かつ圧力損失を抑制でき、性能が良い熱交換機能あるいは反応機能を有する安価なチャンネル構造体が実現する。
【０２８５】
第２９発明は、チャンネル構造体の微小流路を構成する微細パターンを塑性加工により形成するので、微細パターンを簡便、安価に製造することができる。
【図面の簡単な説明】
【図１】本発明の第１実施例に係る熱交換機能を有するチャンネル構造体及び第２実施例に係る反応機能を有するチャンネル構造体の構成を併せて示すとともに、流体の流れを示す図。
【図２】本発明の第１実施例及び第２実施例の変形例を示す図。
【図３】本発明の第３実施例に係る熱交換機能を有するチャンネル構造体及び第４実施例に係る反応機能を有するチャンネル構造体の構成を併せて示すとともに、流体の流れを示す図。
【図４】封止板の構造例を示す図。
【図５】本発明の第３実施例及び第４実施例の変形例を示す図。
【図６】図３に示すチャンネル構造体に対して、流体の流れが異なるチャンネル構造体を示す図。
【図７】図３、図６に示すチャンネル構造体に対して、流体の流れが異なるチャンネル構造体を示す図。
【図８】本発明の第５実施例に係る熱交換機能を有するチャンネル構造体及び第６実施例に係る反応機能を有するチャンネル構造体の構成を併せて示しとともに、流体の流れを示す図。
【図９】隔壁板における微細パターンの凹凸例を示す図。
【図１０】隔壁板間の微細パターンどうしの配置例を示す図。
【図１１】本発明の第５実施例及び第６実施例の変形例を示す図。
【図１２】本発明の第７実施例に係る熱交換機能を有するチャンネル構造体及び第８実施例に係る反応機能を有するチャンネル構造体の構成を併せて示すとともに、流体の流れを示す図。
【図１３】封止板の別の構造例を示す図。
【図１４】本発明の第７実施例及び第８実施例の変形例を示す図。
【図１５】図１２に示すチャンネル構造体に対して、流体の流れが異なるチャンネル構造体を示す図。
【図１６】図１３、図１５に示すチャンネル構造体に対して、流体の流れが異なるチャンネル構造体を示す図。
【図１７】凹凸形状をエンボスとした場合の隔壁板の例を示す図。
【図１８】空気を媒体とした場合における圧力損失の算出結果を示す図。
【図１９】水を媒体とした場合における圧力損失の算出結果を示す図。
【図２０】空気の流速を１０．０ｍ／ｓｅｃとした場合の圧力損失、熱伝達係数の変化を示す図。
【図２１】水の流速を１．０ｍ／ｓｅｃとした場合の圧力損失、熱伝達係数の変化を示す図。
【図２２】各流体流速について算出した流路内径寸法の適正範囲を示す図。
【図２３】ヘッダ用貫通穴を複数個面内に並べて形成したヘッダプレートの例を示す図。
【符号の説明】
１上側封止板
１ａ、１ｂ貫通穴
２流路波板
２ａ微細パターン
３ヘッダプレート
３ａ、３ｂ貫通穴
４下側封止板
４ａ、４ｂ貫通穴
５ヘッダ用貫通穴
６外部流体
７流体
８触媒
９上側区画板
９ａ、９ｂ、９ｃ、９ｄ貫通穴
１０中間区画板
１０ａ、１０ｂ、１０ｃ、１０ｄ貫通穴
１１下側区画板
１１ａ、１１ｂ、１１ｃ、１１ｄ貫通穴
１２流体
１３触媒
１４ａ、１４ｂ導管
１５上側隔壁板
１５ａ、１５ｂ、１５ｃ、１５ｄ貫通穴
１６下側隔壁板
１６ａ、１６ｂ、１６ｃ、１６ｄ貫通穴
１７微細パターン
１８微細パターン
１９中間隔壁板
１９ａ、１９ｂ、１９ｃ、１９ｄ貫通穴
２０微細パターン
２１エンボス
２２封止板中、隔壁板の微細パターンより広い部分
３００複数のヘッダ用貫通穴を有するヘッダプレート
３０１複数のヘッダ用貫通穴[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a channel structure having a minute channel, such as a small heat exchanger or a small reactor.
[0002]
[Prior art]
For example, a channel structure having a fine concavo-convex pattern having a typical size of 1000 μm (micron) or less is used as a microchannel which is a component of a small heat exchanger or a small reactor. This type of microchannel is called a microchannel.
[0003]
2. Description of the Related Art As a method of forming a flow path in an apparatus through which one or a plurality of fluids flow in a flat plate type heat exchanger or a reactor, a method of laminating and joining flat plates having grooves, slits, and the like processed is known. When the typical size of the flow path of such a heat exchanger or a reactor is reduced (for example, about 100 to 500 μm), the specific surface area of the flow path increases, thereby causing heat exchange or chemical reaction via the flow path surface. Has been found to improve efficiency.
[0004]
Conventionally, as a method of forming a fine pattern of 1000 μm or less, there are a chemical material removal processing method and a physical material removal processing method. In the chemical material removal processing method, a fine pattern is formed by chemically removing a substrate material by, for example, combining photolithography and etching to manufacture a channel structure. In the physical material removal processing method, a channel structure is manufactured by forming a fine pattern by physically removing a substrate material by mechanical processing such as punching, cutter, end mill, or electrical discharge machining.
[0005]
However, in the combination of photolithography and etching, which are chemical material removal processing methods, the processing efficiency is lower than that of mechanical processing, and the productivity is low due to the need to change the etching solution and control the conditions during etching. . Further, since one mask and one etching tank are required for one flow path pattern, it is necessary to reinforce the equipment and increase the cost in order to increase the number of products per unit time to the level of machining. It becomes.
[0006]
On the other hand, in physical material removal processing by machining such as punching, cutters, end mills, etc., molds and tools are significantly worn, so in order to maintain precision of fine patterns, production costs and correction of expensive molds etc. Cost and labor for replacement are required. These are bottlenecks in mass production of small heat exchangers and small reactors having a channel structure as a component.
[0007]
In addition, heat exchangers and reactors that require microchannels are also constructed by stacking laminated components manufactured by physical material removal processing or chemical material removal processing, for example, a flat plate punched out of microgrooves. It is limited to devices configured by stacking.
[0008]
[Patent Document 1]
JP-A-10-139402 (

pages

2 and 3, FIG. 1)
[Patent Document 2]
JP 2001-255082 A
[Patent Document 3]
JP 2001-226104 A
[Patent Document 4]
JP 2002-3202 A
[0009]
[Problems to be solved by the invention]
An object of the present invention is to provide a technique capable of easily and inexpensively manufacturing a channel structure in view of the above-mentioned problems of the conventional technique.
[0010]
[Means for Solving the Problems]
A first invention provides a header plate having a header through-hole having a function of supplying and discharging a fluid, and a flow path wave having a concave, convex, or uneven fine pattern, and being fitted into the header through-hole. A plate, a first sealing plate disposed above the channel corrugated plate and defining a region through which fluid flows, and a second sealing plate disposed below the channel corrugated plate and defining a region through which fluid flows. A channel structure, in which a sealing plate and a sealing plate are laminated, and a fine channel is formed between layers, and generally has a function as a heat exchanger.
[0011]
According to a second aspect of the present invention, there is provided a header plate having a header through-hole having a function of supplying and discharging a fluid, and a flow path wave having a concave, convex, or concave-convex fine pattern, and being fitted into the header through-hole. A plurality of flow path units made of plates are stacked with an intermediate partition plate separating a region in which a fluid flows therebetween being stacked therebetween, and a stacked body in which the plurality of flow path units are stacked, and disposed on the stacked body A first partition plate for partitioning a region through which the fluid flows, a first sealing plate disposed above the first partition plate, and a region through which the fluid flows, which is disposed below the laminate. A second partition plate for partitioning, and a second sealing plate disposed below the second partition plate are stacked, and a plurality of systems of microchannels are formed between layers. Channel structure, generally acting as a heat exchanger Obtain.
[0012]
A third invention is characterized in that, in the first invention or the second invention, the flow path corrugated sheet is formed by plastic working.
[0013]
A fourth invention is characterized in that, in the first invention or the second invention, a plurality of the header through holes are formed in the header plate side by side, and the flow path corrugated plate is fitted into each header through hole. And
[0014]
A fifth aspect of the invention is the channel structure according to the first aspect, wherein a catalyst is carried in the microchannel, and generally has a function as a reactor.
[0015]
A sixth invention is characterized in that, in the first invention, the channel corrugated sheet is sandwiched without being joined by the first partition plate and the second partition plate.
[0016]
A seventh invention is characterized in that, in the second invention, one or more kinds of catalysts are carried in the plurality of microchannels.
[0017]
In an eighth aspect based on the second aspect, the flow path corrugated sheet of each flow path unit is not joined to the first partition plate, the intermediate partition plate, and the second partition plate, and the first flow path corrugated sheet is provided in the first partition plate. It is characterized by being interposed between the partition plates and the intermediate partition plate, between the intermediate partition plates, and between the intermediate partition plate and the second partition plate.
[0018]
A ninth invention is characterized in that, in the second invention, the first sealing plate also serves as the first partition plate.
[0019]
In a tenth aspect based on the second aspect, the second sealing plate also serves as the second partition plate.
[0020]
An eleventh invention is directed to a step of producing a flow path corrugated sheet having a fine pattern of a concave shape, a convex shape, or an uneven shape by plastic working, and a header having at least one header through hole having a function of supplying and discharging a fluid. A first partition plate that fits the flow channel corrugated plate into the header through-hole of the plate and partitions a region where a fluid flows on the flow channel corrugated plate, the header plate, and a portion below the flow channel corrugated plate. And a step of laminating a second partition plate for partitioning a region through which the fluid flows, thereby producing a channel structure having a microchannel between layers.
[0021]
A twelfth invention is characterized in that, in the eleventh invention, a catalyst is supported on the fine pattern portion before or after the plastic working of the channel corrugated sheet.
[0022]
A thirteenth invention is directed to a step of producing a flow path corrugated sheet having a fine pattern of a concave shape, a convex shape, or an uneven shape by plastic working, and a header having at least one header through-hole having a function of supplying and discharging a fluid. The flow path corrugated plate is inserted into the header through-hole of the plate to form a flow path unit, and the flow path units are stacked, and a plurality of the flow path units are stacked with an intermediate partition plate interposed therebetween for partitioning a region through which the fluid flows. A laminated body in which units are laminated, a first partition plate disposed on the laminate and partitioning a fluid flow, and a first sealing plate disposed on the first partition plate And a second sealing plate arranged below the laminate and dividing the flow of the fluid, and a second sealing plate arranged below the second dividing plate is laminated. Including the process of fabricating A method for manufacturing a channel structure, characterized in that to produce the channel structure having road.
[0023]
A fourteenth invention is characterized in that, in the thirteenth invention, one or more kinds of catalysts are supported on each fine pattern portion before or after the plastic working of the channel corrugated sheet.
[0024]
A fifteenth invention is directed to a header having a fine pattern of a concave shape, a convex shape, or a concave-convex shape, a first partition plate for partitioning a region through which a fluid flows, and a header through-hole having a function of supplying and discharging the fluid. A plate and a second partition plate having a concave, convex, or concave-convex fine pattern and defining a region through which a fluid flows are laminated, and a microchannel is formed between the layers. A channel structure generally having a function as a heat exchanger.
[0025]
A sixteenth invention is characterized in that, in the fifteenth invention, each fine pattern portion of the first partition plate and the second partition plate is formed by plastic working.
[0026]
In a seventeenth aspect based on the fifteenth aspect, a plurality of the header through holes are formed in the header plate side by side, and a plurality of fine pattern portions are formed in the first partition board and the second partition board, respectively. It is characterized by having.
[0027]
An eighteenth invention is characterized in that, in the fifteenth invention, a catalyst is carried in the microchannel, and generally has a function as a reactor.
[0028]
A nineteenth invention is directed to an intermediate partition plate in which a header plate having a header through-hole having a function of supplying and discharging a fluid has a plurality of fine patterns of concave, convex, or irregular shapes, and partitions a region through which fluid flows. A first partition having a concave, convex, or irregular fine pattern on a laminate formed by laminating the plurality of header plates, and defining a region through which fluid flows A plate is laminated, a first sealing plate is laminated on the first partition plate, and a micro-pattern having a concave, convex, or concave-convex shape is provided below the laminate, and a fluid flowing region is provided. A second partition plate is defined, a second sealing plate is laminated below the second partition plate, and a plurality of microchannels are formed between layers. Structure A function as a heat exchanger.
[0029]
According to a twentieth aspect, in the nineteenth aspect, the fine pattern portions of the first partition plate, the intermediate partition plate, and the second partition plate are formed by plastic working.
[0030]
A twenty-first invention is characterized in that, in the nineteenth invention, one or more kinds of catalysts are carried in the plurality of microchannels, and generally has a function as a reactor.
[0031]
In a twenty-second aspect based on the nineteenth aspect, a plurality of the header through-holes are formed in the header plate side by side, and a fine pattern portion is formed in the first partition plate, the intermediate partition plate, and the second partition plate. It is characterized in that a plurality of them are formed side by side.
[0032]
A twenty-third invention is directed to a first partition plate having at least one portion having a concave, convex, or irregular fine pattern, and defining a region through which a fluid flows, a concave, convex, or irregular fine pattern. A step of forming, by plastic working, a second partition plate having at least one portion having a pattern and defining a region through which the fluid flows, and having a function of supplying and discharging the fluid; A step of laminating a header plate having at least one header through-hole and the second partition plate to produce a channel structure having a fine channel between layers. It is a manufacturing method.
[0033]
A twenty-fourth invention is characterized in that, in the twenty-third invention, a catalyst is carried on a portion of the fine pattern before or after plastic processing of the fine pattern on the first partition plate and the second partition plate.
[0034]
The twenty-fifth invention is directed to a first partition plate having at least one portion having a concave, convex, or irregular fine pattern, and defining a region through which a fluid flows, a concave, convex, or irregular fine pattern. A second partition plate having at least one portion having a pattern and defining a region through which a fluid flows, and having at least one portion having a fine pattern having a concave shape, a convex shape, or an uneven shape, having A step of forming an intermediate partition plate defining a flow region by plastic working, and a plurality of header plates having at least one header through-hole having a function of supplying and discharging a fluid are stacked with the intermediate partition plate interposed therebetween; And a first sealing plate disposed on the first partition plate, a first sealing plate disposed on the first partition plate, and a first sealing plate disposed on the first partition plate. Producing a structure in which the second partition plate to be disposed and a second sealing plate disposed below the second partition plate are laminated; A method for manufacturing a channel structure, comprising manufacturing a channel structure having a microchannel.
[0035]
According to a twenty-sixth aspect, in the twenty-fifth aspect, one or more types of fine patterns are formed before or after plastic processing of the fine patterns on the first partition plate, the second partition plate, and the intermediate partition wall. Is supported.
[0036]
According to a twenty-seventh invention, in the first invention, the second invention, the fifteenth invention, or the nineteenth invention, a value obtained by dividing the hydraulic diameter of the microchannel, that is, four times the cross-sectional area of the channel, by the wet length is used. A channel structure having a value between an upper limit value required for securing heat exchange efficiency and a lower limit value required for suppressing pressure loss.
[0037]
According to a twenty-eighth invention, in the first invention, the second invention, the fifteenth invention, or the nineteenth invention, a value obtained by dividing the hydraulic diameter of the microchannel, that is, four times the cross-sectional area of the channel, by the wet length is used. A channel structure having a value in a range of 0.1 mm to 1.4 mm.
[0038]
A twenty-ninth aspect of the present invention is a method for forming a fine pattern, which comprises forming a fine pattern constituting a fine channel of a channel structure by plastic working.
[0039]
BEST MODE FOR CARRYING OUT THE INVENTION
In the embodiment of the present invention, the processing of the fine flow path pattern is not performed by using the conventional physical material removal processing such as punching, cutter, and end mill, and by using the chemical material removal processing such as photolithography and etching. Instead, heat exchangers and reactors are constructed using fine channels formed by plastic working such as press forming or corrugating. By providing such a microchannel (microchannel), a specific surface area per volume dimension is increased, and a heat exchanger having a function of performing heat exchange between fluids with high efficiency can be easily and inexpensively manufactured. . In addition, by holding the catalyst on the surface of the microchannel, a small-sized reactor having a function of causing a reaction peculiar to the catalyst in the fluid passing therethrough can be easily and inexpensively manufactured. Of course, fine channels may be formed using physical material removal processing such as conventional punching, cutters and end mills, or chemical material removal processing such as photolithography or etching. It has a higher processing efficiency than removal processing and can reduce the burden on tools compared to physical material removal processing such as punching, cutter, end mill, etc.By using parts manufactured by press molding etc., Eliminates problems of productivity and manufacturing costs in the manufacturing process (such as costs associated with the production of high-precision molds and maintenance for deterioration of accuracy), for example, mass production of small heat exchangers and small reactors inexpensively and in a short time. Becomes possible. The small heat exchanger and the small reactor are installed in, for example, an enclosed space, and are used, for example, for the purpose of fuel reforming.
[0040]
The outline of the present invention is to stack a flow path corrugated sheet in which a fine concavo-convex pattern is formed by, for example, plastic working, with a header plate having a function of supplying and discharging fluid, and a sealing plate, a partition plate, and an intermediate partition plate. Thus, a fine channel having a high specific surface area is formed, and an efficient small heat exchanger, for example, is manufactured at low cost. In addition, by supporting a catalyst on the flow path corrugated plate, a small-sized reactor, for example, that efficiently causes a chemical reaction in a fluid can be realized at low cost.
[0041]
For example, in the present invention,
(1) For example, a component having a fine concavo-convex pattern (pattern pitch or height in a range of, for example, 0.10 mm to 1.40 mm) formed by using plastic working, and a sealing plate for partitioning a plurality of fluid flow paths A micro channel is formed by laminating a fuel cell, a partition plate, an intermediate partition plate, and a header plate having a header through hole having a function of supplying and discharging each fluid. Obtain a small heat exchanger structure for performing exchange. In other words, the flow path through which the fluid flows is, for example, a part having a fine concave or convex or concave / convex pattern processed by plastic working, and a sealing plate or partition for defining an area through which the fluid flows and partitioning the plurality of flow paths. By laminating a plate, an intermediate partition plate, and a header plate having a header through-hole that performs a function of supplying and discharging a fluid, a minute flow path is formed between layers, and the flow path between the fluid passing through the flow path is formed. Thus, a small heat exchanger structure for performing heat exchange can be obtained. In this case, a small heat exchanger structure for exchanging heat between the fluid and the microchannel by external heating or cooling means, or a plurality of microchannels are formed adjacent to each other, and the A small heat exchanger structure for exchanging heat between fluids is conceivable.
(2) Alternatively, by forming a catalyst layer on the surface of the component having the fine concavo-convex pattern or forming a catalyst on which the catalyst is supported to form a catalyst, the catalyst can be supported, so that the fluid passing through the flow path can be formed. A small reactor structure having the function of causing a reaction unique to the catalyst is obtained. In this case, for example, by forming a catalyst body supporting different catalysts, a plurality of catalytic reactions are allowed to proceed, and a small reactor structure that uses the effects of heat generation, chemical reaction, and the like obtained by one reaction on the other is used. Can be considered.
(3) Alternatively, the function of the component having the fine concavo-convex pattern and the function of the sealing plate, the partition plate, and the intermediate partition plate are integrated, and the integrated product itself is provided with a fine concavo-convex pattern by plastic working, for example, and alternately with the header plate It is conceivable to obtain a heat exchanger structure or a reactor structure with a reduced number of parts by stacking.
(4) The component having the fine concavo-convex pattern is formed by using, for example, plastic working. For example, by forming a fine pattern for forming a flow path on a substrate by plastic working and alternately stacking it with a header plate, it is possible to form a fine flow path realizing a heat exchanger function or a reactor function. Conceivable.
[0042]
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0043]
[First embodiment]
A channel structure according to a first embodiment of the present invention will be described with reference to FIG. The channel structure shown in FIG. 1 is configured by stacking an upper sealing plate 1, a flow path corrugated plate 2, a header plate 3, and a lower sealing plate 4, and for example, a small heat exchanger ( Alternatively, it operates as a micro heat exchanger. The flow path corrugated plate 2 is fitted into the header through-hole 5 of the header plate 3. This channel structure is used, for example, installed in a closed space.
[0044]
The upper sealing plate 1 and the lower sealing plate 4 define or define a region through which a fluid flows, for example, in a heat exchanger. The thicknesses of the upper sealing plate 1 and the lower sealing plate 4 are arbitrary. The outer shape and size of the upper sealing plate 1 and the lower sealing plate 4 are basically arbitrary, but in this example, they are rectangular, for example, squares of the same size. Although the size of the rectangle is basically arbitrary, for example, a 2 to 4 cm square can be exemplified.
[0045]
The channel corrugated plate 2 is formed with a fine pattern 2a having a concavo-convex shape as a whole in order to enhance the heat exchange efficiency. The fine pattern 2a is formed by plastic working such as corrugating using a gear-like tool or press forming using a mold.
[0046]
The concavo-convex shape of the fine pattern 2a may be a triangular waveform, a rectangle, an embossed shape, or any other appropriate regular or irregular shape.
[0047]
The flow path corrugated sheet 2 of the example shown in FIG. 1 is formed on a substrate having a thickness of, for example, about 100 μm, by forming a triangular fine pattern 2 a, having an irregular shape having a wave height and a pitch of, for example, several hundred μm, by plastic working. are doing. The left and right ends of the fine pattern 2a are open. For example, a rectangular substrate is used, and the channel corrugated plate 2 is formed into a square by forming the fine pattern 2a. The number of the fine patterns 2a is basically arbitrary, but is formed as many as 50, for example.
[0048]
The header plate 3 has a header through-hole 5 at the center thereof, and the header through-hole 5 has a function of supplying and discharging a fluid. The outer shape and size of the header plate 3 are basically arbitrary, but in this example, the header plate 3 has a rectangular shape having the same size as the upper sealing plate 1 and the lower sealing plate 4. The method of forming the header through-hole 5 is arbitrary, and ordinary appropriate machining such as punching is sufficient.
[0049]
In the example of FIG. 1, the shape of the header through hole 5 is a rhombus having two sides parallel to the upper side and the lower side of the header plate 3 and two sides oblique to the right side and the left side of the header plate 3. However, any shape may be used as long as it has a function of supplying and discharging a fluid.
[0050]
The thickness of the header plate 3 is equal to the wave height of the flow path corrugated plate 2 (for example, several hundred μm), or is made thicker or thinner in a minute range.
[0051]
In this example, a through hole 1 a is formed in the upper sealing plate 1 at a position that can communicate with the header through hole 5, for example, at the upper right corner, so as to avoid the flow path corrugated plate 2. The lower sealing plate 4 also has a position diagonally opposite to the through hole 1a of the upper sealing plate 1 and can communicate with the header through hole 5 so as to avoid the flow path corrugated plate 2, for example, A through hole 4a is formed in the lower left corner. That is, in the present embodiment, the upper sealing plate 1 and the lower sealing plate 4 are configured such that the sealing plates manufactured in the same shape can be used in different directions. The method of forming the through

holes

1a and 4a is arbitrary, and ordinary appropriate machining such as punching is sufficient.
[0052]
Then, the flow path corrugated sheet 2 is prepared in advance by forming a fine pattern 2a on the substrate by using plastic working, and the flow path corrugated sheet 2 is inserted into the header through-hole 5 and placed on the upper side. The sealing plate 1, the flow corrugated plate 2, the header plate 3, and the lower sealing plate 4 are laminated, and each of them is joined by various joining methods typified by diffusion joining, brazing, welding, and the like. As a result, a micro channel having a hydraulic diameter of, for example, several hundred μm, that is, a value obtained by dividing four times the cross-section of the channel by the breaking length (hereinafter referred to as a hydraulic diameter) is formed, and the channel structure is formed. It is completed. In this case, the flow path corrugated plate 2 may be sandwiched between the upper sealing plate 1 and the lower sealing plate 4 without using the above-described bonding. In the case of sandwiching, the stacked state of the upper sealing plate 1, the flow path corrugated plate 2, the header plate 3, and the lower sealing plate 4 is held by a suitable holding mechanism (not shown) such as screwing or clipping. In this way, the channel structure is easily formed by fitting the flow path corrugated sheet 2 into the header through-hole 5 and laminating the upper sealing plate 1, the flow path corrugated sheet 2, the header plate 3, and the lower sealing plate 4. It can be formed inexpensively. In particular, when the flow path corrugated sheet 2 is not joined and is sandwiched between the upper sealing plate 1 and the lower sealing plate 4, the channel structure can be formed more easily and inexpensively.
[0053]
The upper sealing plate 1 seals the upper side of the channel corrugated plate 2 to define or define a flow region on the upper side of the channel corrugated plate 2 to define a minute channel. Similarly, the lower sealing plate 4 seals the lower side of the channel corrugated plate 2 to define or define a flow region on the lower side of the channel corrugated plate 2 to define a minute channel.
[0054]
Therefore, the channel structure shown in FIG. 1 is provided between an external fluid 6 provided by an external heating means or a cooling means and a fluid 7 such as a liquid or a gas passing through the minute flow path, for example, a gas 7 to be treated. It can perform heat exchange and operates as a small heat exchanger. In FIG. 1, the external fluid 6 is caused to flow to the upper surface of the upper sealing plate 1 and the lower surface of the lower sealing plate 4, but the upper sealing plate 1 and the lower sealing plate 4 are heated and cooled by heating means and cooling means. You may make it heat or cool directly.
[0055]
In the example of FIG. 1, as indicated by an arrow 101, the gas to be treated 7 is supplied from the through hole 1 a of the upper sealing plate 1 to the right side of the header through hole 5, and from there, the upper and lower surfaces of the flow path corrugated plate 2. (Between the upper sealing plate 1 and the channel corrugated plate 2 and between the channel corrugated plate 2 and the lower sealing plate 4), and the lower sealing from the left side of the header through-hole 5. It is discharged to the through hole 4a of the plate 4.
[0056]
In the example of FIG. 1, since the flow path corrugated sheet 2 is rectangular and the header through-hole 5 is diamond-shaped, the through-hole 1 a of the upper sealing plate 1 and the lower sealing There is an advantage that the area of a portion required for communication with the through hole 4a of the plate 4 can be reduced.
[0057]
The shape and size of the header through-hole 5 may be any shape and size that can fit the flow path corrugated plate 2 and secure an area necessary for supply and discharge of the fluid 7. It is optional.
[0058]
In FIG. 1, since the channel structure is shown assuming a horizontal state, the channel structure is distinguished from the top and bottom for convenience. However, the channel structure shown in FIG. 1 may be used upside down, or It is also possible to use it vertically.
[0059]
[Second embodiment]
Next, a channel structure according to a second embodiment of the present invention will be described with reference to FIG. The channel structure of the second embodiment has a function as a small reactor (or micro reactor).
[0060]
As shown in FIG. 1, the channel structure of the second embodiment is different from the channel structure of the first embodiment in that a catalyst 8 is provided on at least one of the inner surface and the outer surface of the channel corrugated plate 2. It is carried.
[0061]
In the present embodiment, as a treatment for supporting the catalyst 8, a catalyst body previously supporting the catalyst 8 is formed on both the inner and outer surfaces of the flow path corrugated plate 2. The catalyst 8 may be supported on the substrate before the plastic processing of the channel corrugated sheet 2, or may be supported on the fine pattern 2 a of the channel corrugated sheet 2 after the plastic processing.
[0062]
Then, the flow path corrugated sheet 2 is prepared in advance by forming the fine pattern 2a on the substrate using plastic working and carrying the catalyst 8 on the surface, and the flow path corrugated sheet 2 is inserted into the through hole 5 for header. The upper sealing plate 1, the flow path corrugated plate 2, the header plate 3, and the lower sealing plate 4 are stacked in a state of being fitted, and each of them is connected to various kinds of connection represented by diffusion bonding, brazing, welding, or the like. Join legally. As a result, a microchannel having a hydraulic diameter of, for example, several hundred μm and carrying the catalyst 8 on the surface is formed, and a channel structure is completed. In this case, the flow path corrugated plate 2 may be sandwiched between the upper sealing plate 1 and the lower sealing plate 4 without using the above-described bonding. In the case of sandwiching, the stacked state of the upper sealing plate 1, the flow path corrugated plate 2, the header plate 3, and the lower sealing plate 4 is held by a suitable holding mechanism (not shown) such as screwing or clipping.
[0063]
Therefore, as shown in FIG. 1, the channel structure in which the catalyst 8 is carried on the surface of the channel corrugated plate 2 causes the fluid (for example, the gas to be treated) 7 flowing through the fine channel to perform a catalytic reaction unique to the catalyst 8. It operates as a small reactor with the function of generating. The gas to be treated 7 is supplied from the through hole 1a of the upper sealing plate 1 and reaches the right side of the through hole 5 for the header as shown by the arrow 101, from which the upper and lower micro channels of the channel corrugated plate 2 are respectively formed. As a result, the water is discharged from the left side of the header through-hole 5 to the through-hole 4a of the lower sealing plate 4. At that time, if necessary, an external fluid 6 for heating or cooling is caused to flow to the upper surface of the upper sealing plate 1 and the lower surface of the lower sealing plate 4, or the upper sealing plate 1 and the lower sealing plate 4 is directly heated or cooled by a heating means or a cooling means.
[0064]
In this example, the flow path corrugated sheet 2 that needs to carry the catalyst 8 is separate from the container (casing) formed by the header plate 3 and the upper and

lower sealing plates

1 and 4 for accommodating the same. This eliminates the need for a complicated process such as a masking process for a portion that does not need to carry a catalyst, and has an advantage that coating can be performed by the channel corrugated sheet 2 alone. In addition, since the catalyst supporting process and the laminating process are performed in different systems, batch production of the flow path corrugated sheet 2 supporting the catalyst 8, responsiveness to changes in required specifications of the catalyst 8, and easy replacement of the catalyst 8 are facilitated. Nature can be realized. Further, there is the convenience that only the channel corrugated sheet 2 can be easily changed to another material depending on the application.
[0065]
Further, when the flow path corrugated sheet 2 is sandwiched between the upper sealing plate 1 and the lower sealing plate 4 without using the joining, the manufacturing process is simplified, the deterioration of the catalyst 8 in the joining process is suppressed, There are advantages such as easy replacement at the time of deterioration of the catalyst and easy replacement of the catalyst 8 with a newly developed catalyst. Exchange at the time of deterioration of the catalyst 8 and exchange of the catalyst 8 with a newly-developed catalyst are not necessarily impossible even when the joining is used.
[0066]
In the first and second embodiments, the header plate 3 and the channel corrugated plate 2 fitted in the header through-hole 5 have one channel unit, but as shown in FIG. There may be more than one. In the example of FIG. 2, three flow path units of the header plate 3 and the flow path corrugated sheet 2 are laminated with an intermediate partition plate 10 that partitions or defines a region where a fluid flows, interposed therebetween. The laminate, an upper partition plate 9 disposed on the laminate to define or define a region through which fluid flows, an upper sealing plate 1 disposed on the upper partition plate 9, and the laminate The lower partition plate 11 that is disposed below and defines or defines a region through which a fluid flows, and the lower sealing plate 4 that is disposed below the lower partition plate are stacked, and a microchannel is formed between each layer. Has formed. In this example, the upper partition plate 9, the two intermediate partition plates 10, and the lower partition plate 11 have the same shape as the upper sealing plate 1 and the lower sealing plate 4. Through

holes

9a, 10a, and 11a are formed at the upper right corners of the upper partition plate 9, the intermediate partition plate 10, and the lower partition plate 11 at the same positions as the through holes 1a of the upper sealing plate 1, respectively. Are formed with through

holes

9b, 10b, 11b at the same positions as the through holes 4a of the lower sealing plate 4. In the channel structure of FIG. 2, as indicated by an arrow 101, a fluid 7 such as a gas to be processed is supplied from the through hole 1 a of the upper sealing plate 1, passes through the through hole 9 a of the upper partition plate 9, and Further, it flows in parallel to the right side of the header through-hole 5 of each header plate 3 through the through-hole 10a of each intermediate partition plate 10, and from there passes through the upper and lower micro flow paths of each flow path corrugated plate 2, respectively. From the left side of the through hole 5, the liquid passes through the through hole 10 b of each intermediate partition plate 10 and the through hole 11 b of the lower partition plate 11, and is discharged to the through hole 4 a of the lower sealing plate 4. The through hole 9b of the upper partition plate 9 is sealed by the upper sealing plate 1, the through hole 11a of the lower partition plate 11 is sealed by the lower sealing plate 4, and the fluid 7 does not leak. A catalyst is supported on each channel corrugated plate 2 as needed. Here, the procedure of laminating the upper sealing plate 1, the upper partitioning plate 9, the flow path corrugated plate 2, the header plate 3, the intermediate partitioning plate 10, the lower partitioning plate 11, and the lower sealing plate 4 is optional. , From the lower member or the upper member, or by laminating the flow path units of the header plate 3 and the flow path corrugated sheet 2 with the intermediate partition plate 10 interposed therebetween, and on the laminate thus obtained. Various methods are conceivable, such as laminating the upper partition plate 9 and the upper sealing plate 1 in order, and sequentially laminating the lower partition plate 11 and the lower sealing plate 4 under the laminated body. In short, a laminated body in which a plurality of flow path units of the header plate 3 and the flow path corrugated sheet 2 are laminated with the intermediate partition plate 10 interposed therebetween, and an upper partition plate 9 disposed on the laminated body An upper sealing plate 1 disposed on the upper partition plate 9; a lower partition plate 11 disposed below the laminate; and a lower seal disposed below the lower partition plate 11. It suffices if a structure formed by laminating the plate 4 can be produced. This is the same in the following description. Furthermore, the upper sealing plate 1 can also serve as the upper partition plate 9, whereby the upper partition plate 9 can be omitted, and the lower sealing plate 4 can also serve as the lower partition plate 11. The lower partition plate 11 can be omitted.
[0067]
[Third embodiment]
Referring to FIG. 3, a description will be given of a channel structure according to a third embodiment of the present invention having a plurality of fine channels between layers. The channel structure shown in FIG. 3 has a plurality of (two in the figure) flow path units each including a header plate 3 and a flow path corrugated plate 2 fitted in the header through-hole 5, and defines or defines a region through which fluid flows. A stack is formed by sandwiching the intermediate partition plate 10 therebetween, an upper partition plate 9 that is arranged on the laminate, and defines or defines an area through which a fluid flows, and an upper partition plate 9. An upper sealing plate 1 disposed above, a lower partitioning plate 11 disposed below the laminate to define or define an area through which fluid flows, and a lower side disposed below the lower partitioning plate 11 The sealing plate 4 is laminated, and a plurality of systems of microchannels are formed between the layers. This channel structure is used, for example, installed in a closed space.
[0068]
The upper sealing plate 1 and the lower sealing plate 4 are mainly used for sealing purposes. The upper partition plate 9, the intermediate partition plate 10, and the lower partition plate 11 define or define a region where a fluid flows in the heat exchanger. In the example of FIG. 3, the thickness of the upper partition plate 9, the intermediate partition plate 10, and the lower partition plate 11 is, for example, 10 to 1000 μm. The outer shape and size of the upper sealing plate 1, the lower sealing plate 4, the upper partitioning plate 9, the intermediate partitioning plate 10, and the lower partitioning plate 11 are basically arbitrary. It has a square shape. Although the size of the rectangle is basically arbitrary, for example, a 2 to 4 cm square can be exemplified.
[0069]
In order to enhance the heat exchange efficiency, each channel corrugated plate 2 is formed with a fine pattern 2a having a concavo-convex shape as a whole. The

fine patterns

2a and 10a are formed by plastic working such as corrugating using a gear-like tool or press forming using a mold.
[0070]
The concavo-convex shape of the fine pattern 2a may be a triangular waveform, a rectangle, an embossed shape, or any other appropriate regular or irregular shape.
[0071]
Each of the flow path corrugated sheets 2 in the example shown in FIG. 3 is formed on a substrate having a thickness of, for example, about 100 μm, using a plastic process to form an uneven shape having a triangular shape as a fine pattern 2a and having both a wave height and a pitch of several hundred μm. ing. The left and right ends of the fine pattern 2a are open. For example, a rectangular substrate is used, and the channel corrugated plate 2 is formed into a square by forming the fine pattern 2a. The number of the fine patterns 2a is basically arbitrary, but is formed as many as 50, for example.
[0072]
Each header plate 3 has a header through-hole 5 at the center thereof, and each header through-hole 5 has a function of supplying and discharging a fluid. The outer shape and size of each header plate 3 are basically arbitrary, but in this example, the header plate 3 has a rectangular shape having the same size as the upper sealing plate 1 and the lower sealing plate 4. The method of forming the header through-hole 5 is arbitrary, and ordinary appropriate machining such as punching is sufficient.
[0073]
In the example of FIG. 3, the shape of the header through hole 5 of the upper header plate 3 is such that two sides parallel to the upper side and the lower side of the header plate 3 and a portion closer to the upper side with respect to the right side of the header plate 3. It is a rhombus with one diagonal side approaching the right side and one diagonal side farther from the left side as the part closer to the upper side with respect to the left side of the header plate 3, but any diamond as long as it has a function of supplying and discharging fluid. The shape is good.
[0074]
On the other hand, in the example of FIG. 3, the shape of the header through hole 5 of the lower header plate 3 is two sides parallel to the upper side and the lower side of the header plate 3 and the upper side to the right side of the header plate 3. The rhombus has a diagonal side closer to the left side of the header plate 11 and a diagonal side closer to the left side toward the upper side with respect to the left side of the header plate 11, but has a function of supplying and discharging the fluid. Any shape may be used as long as it is possible.
[0075]
As described above, the direction of the header through-hole 5 is different between the two header plates 3. However, by arranging the header plates having the same shape of the through-holes upside down, the two header plates 3 can be used for the two header plates 3. Like that.
[0076]
The thickness of each header plate 3 is equal to the wave height (for example, several hundred μm) of the flow path corrugated plate 2 or is made thicker or thinner than the wave height in a minute range.
[0077]
In this example, a through hole 1a is formed in the upper right corner of the upper sealing plate 1, and a through hole 1b is formed in the upper left corner. The through hole 1a at the upper right corner is formed at a position where it can communicate with the header through hole 5 of the upper header plate 3 so as to avoid the flow path corrugated plate 2. The through hole 1b at the upper left corner does not communicate with the header through hole 5 of the upper header plate 3 but with the header through hole 5 of the lower header plate 3 so as to avoid the flow path corrugated plate 2. It is formed so that.
[0078]
Similarly, a through hole 4a is formed at the lower right corner of the lower sealing plate 4, and a through hole 4b is formed at the lower left corner. The through hole 4a at the lower right corner is formed at a position where it can communicate with the header through hole 5 of the lower header plate 3 so as to avoid the flow path corrugated plate 2. The through hole 4b at the lower left corner does not communicate with the header through hole 5 of the lower header plate 3, but communicates with the header through hole 5 of the upper header plate 3 so as to avoid the flow path corrugated plate 2. It is formed so that.
[0079]
Therefore, the upper sealing plate 1 and the lower sealing plate 4 have the same shape including the positions of the through holes, and the sealing plates manufactured in the same shape are used for the upper sealing plate 1 and the lower sealing plate 4. I can do it.
[0080]
Through

holes

9a, 9b, 9c, 9d, 10a, 10b, 10c, 10d, 11a, 11b, 11c, 11d are formed at four corners of the upper partition plate 9, the intermediate partition plate 10, and the lower partition plate 11, respectively. ing. Among them, the upper right corner through-

holes

9a, 10a, and 11a are formed at positions that can communicate with the upper right corner through-hole 1a of the upper sealing plate 1, and the lower right corner through-

holes

9b, 10b, and 11b are connected to the lower sealing plate. 4 is formed at a position that can communicate with the through hole 4a at the lower right corner, and the through

holes

9c, 10c, and 11c at the lower left corner are formed at positions that can communicate with the through hole 4b at the lower left corner of the lower sealing plate 4. The through

holes

9d, 10d and 11d at the upper left corner are formed at positions that can communicate with the through hole 1a at the upper left corner of the upper sealing plate 1.
[0081]
In each header plate 3, through

holes

3a, 3b are formed at diagonally lower right and upper left corners outside the header through hole 5, respectively. The through hole 3a at the lower right corner of the upper header plate 3 communicates with the through hole 1a at the lower right corner of the lower sealing plate 4, and the through hole 3b at the upper left corner communicates with the through hole 1b at the upper left corner of the upper sealing plate 1, respectively. It is formed where possible. The through hole 3a at the upper right corner of the lower header plate 3 is a through hole 1a at the upper right corner of the upper sealing plate 1, and the through hole 3b at the lower left corner is a through hole 4b at the lower left corner of the lower sealing plate 4, respectively. It is formed at a position where communication is possible.
[0082]
As described above, the arrangement of the through

holes

3a and 3b is different between the upper and lower two header plates 3, but the header plates manufactured in the same shape including the hole positions are arranged upside down to be used for each header plate 3. be able to.
[0083]
The method of forming the through holes in the upper sealing plate 1, the upper partitioning plate 9, the header plate 3, the intermediate partitioning plate 10, the lower partitioning plate 11, and the lower sealing plate 4 is arbitrary. Simple machining is sufficient.
[0084]
Then, by forming a fine pattern 2a on each substrate using plastic working, the flow path corrugated sheet 2 is prepared in advance, and the flow path corrugated sheet 2 is separated from the header plate so that the fine patterns 2a are parallel to each other. 3, the upper sealing plate 1, the upper partition plate 9, the upper flow path corrugated plate 2, the upper header plate 3, the intermediate partition plate 10, and the lower flow path wave. The plate 2, the lower header plate 3, the lower partition plate 11, and the lower sealing plate 4 are stacked, and each of them is bonded by various bonding methods represented by, for example, diffusion bonding, brazing, welding, and the like. As a result, a plurality of microchannels having a hydraulic diameter of, for example, several hundred μm are formed between layers, and a channel structure is completed. In this case, the flow path corrugated plate 2 may be sandwiched between the upper partition plate 9 and the intermediate partition plate 10 or between the intermediate partition plate 10 and the lower partition plate 11 without using the above-described bonding. In the case of sandwiching, the stacked state is held by a suitable holding mechanism such as screwing or clipping (not shown). In this way, the channel structure can be easily and inexpensively formed by inserting and laminating the flow path corrugated sheet 2 in the header through-hole 5. In particular, when the channel corrugated sheet 2 is sandwiched without being joined, the channel structure can be formed more easily and inexpensively.
[0085]
The upper partition plate 9 seals the upper side of the upper channel corrugated plate 2 to define a flow region on the upper side of the channel corrugated plate 2 to partition the minute flow channel. Further, the intermediate partition plate 10 seals the lower side of the upper channel corrugated plate 2 to define a flow region on the lower side of the channel corrugated plate 2 to partition the minute flow channel, By sealing the upper side of the channel corrugated sheet 2, a flow region on the upper side of the channel corrugated sheet 2 is defined to define a minute channel. The lower partition plate 11 seals the lower side of the lower flow path corrugated sheet 2 to define a flow area on the lower side of the flow path corrugated sheet 2 to partition the minute flow path.
[0086]
Therefore, the upper and lower micro channels of the upper channel corrugated plate 2 constitute one channel system, and the upper and lower micro channels of the lower channel corrugated plate 2 constitute another channel system. Therefore, if

different fluids

7 and 12 are supplied from any two through holes of the upper sealing plate 1 and passed through different flow passage systems, heat exchange can be performed between the two via the intermediate partition plate 10. it can. The fluid is any liquid or gas.
[0087]
For example, as shown in FIG. 3, a case is considered in which two fluids (for example, gases to be processed) 7 and 12 are separately supplied to the through hole 1 a at the upper right corner and the through hole 1 b at the upper left corner of the upper sealing plate 1. In this case, the fluid 7 passes through the minute flow path above and below the upper flow path corrugated sheet 2 as shown by an arrow 102, and the fluid 12 flows above and below the lower flow path corrugated sheet 2 as shown by an arrow 103. The two

fluids

7 and 12 flow through the minute flow path in opposite directions with the intermediate partition plate 10 interposed therebetween, so that heat can be exchanged between the flow path walls via the intermediate partition plate 10. At this time, the through

holes

9b and 9c of the upper partition plate 9 are sealed by the upper sealing plate 1, the through

holes

11a and 11d of the lower partition plate 11 are sealed by the lower sealing plate 4, and the

fluid

7, 12 does not leak. Also in this case, the upper sealing plate 1 can also serve as the upper partition plate 9, whereby the upper partition plate 9 can be omitted, and the lower sealing plate 4 can also serve as the lower partition plate 11. Thereby, the lower partition plate 11 can be omitted.
[0088]
Here, the fluid 7 is supplied from the through hole 1a at the upper right corner of the upper sealing plate 1 and passes through the through hole 9a of the upper partition plate 9 as shown by an arrow 102, and passes through the header for the header of the upper header plate 3. It reaches the right side of the hole 5, passes through the upper and lower micro channels of the upper channel corrugated sheet 2 from right to left, and from the left side of the header through hole 5 to the through hole 10 c at the lower left corner of the intermediate partition plate 10. The lower header plate 3 is discharged through a through hole 3b at the lower left corner, a through hole 11c of the lower partition plate 11, and a through hole 4b at the lower left corner of the lower sealing plate 4 in that order.
[0089]
The other fluid 12 is supplied from a through hole 1b at the upper left corner of the upper sealing plate 1 as shown by an arrow 103, and a through hole 9d of the upper partition plate 9 and a through hole at the upper left corner of the upper header plate 3. 3b, through the through hole 10d at the upper left corner of the intermediate partition plate 10 to the left side of the header through hole 5 of the lower header plate 3, and from there, the upper and lower micro channels of the lower channel corrugated plate 2 From the right to the header through hole 12, the liquid is discharged from the right side of the header through hole 12 through the through hole 11b of the lower partition plate 11 and the through hole 4a at the lower right corner of the lower sealing plate 4.
[0090]
That is, when the fluid 7 is supplied to the through hole 1a at the upper right corner of the upper sealing plate 1 and the fluid 12 is supplied to the through hole 1b at the upper left corner of the upper sealing plate 1, the flow of the two

fluids

7 and 12 Is a counter-current type (Counter Flow Type). Therefore, the channel structure shown in FIG. 3 has a function as a counter-current small heat exchanger.
[0091]
Here, the upper sealing plate 1 and the lower sealing plate 4 may be thin, but as shown in FIG. 4, they may be thick blocks, and the through

holes

1a, 1b, 4a, A

conduit

14a, 14b leading to 4b can be provided. This means that the upper sealing plate 1 and the lower sealing plate 4 shown in FIGS. 1 and 2 or the later-described FIGS. 5, 6, 8, 8, 11, 12, 13, and 14, The same applies to the upper sealing plate 1 and the lower sealing plate 4 in FIGS.
[0092]
In FIG. 3, there are two flow path units formed by the header plate 3 and the flow path corrugated plate 2 fitted in the header through hole 5, but as shown in FIG. 5, more flow path units may be provided. In the example of FIG. 5, four flow path units of the header plate 3 and the flow path corrugated sheet 2 are laminated with an intermediate partition plate 10 that partitions or defines a region through which fluid flows. The laminate, an upper partition plate 9 disposed on the laminate to define or define a region through which fluid flows, an upper sealing plate 1 disposed on the upper partition plate 9, and the laminate The lower partition plate 11 disposed below the lower partition plate and defining or defining a region through which the fluid flows, and the lower sealing plate 4 disposed below the lower partition plate are laminated, and a plurality of micro flow Forming a road. However, the directions of the header through holes 5 are reversed between two vertically adjacent header plates 3.
[0093]
In the channel structure shown in FIG. 5, the fluid 7 such as the gas to be processed is supplied from the through hole 1a of the upper sealing plate 1, passes through the through hole 9a of the upper partition plate 9, and Furthermore, it flows in parallel to the right side of the header through-holes 5 of the odd-numbered header plates 3 through the through-holes 10a of the intermediate partition plates 10 and the through-holes 3a of the even-numbered header plates 3 from the top, From here, the through-holes 10c of the intermediate partition plates 10 pass from the left side of the through-holes 5 for each header, and the through-holes 3b of the even-numbered header plates 3 from the top, respectively, passing through the upper and lower micro channels of each of the flow path corrugated plates 2. Gather through the through-hole 11c of the lower partition plate 11, and are discharged to the through-hole 4b of the lower sealing plate 4. Further, as shown by the arrow 103, the fluid 12 such as the gas to be processed is supplied from the through hole 1b of the upper sealing plate 1, passes through the through hole 9d of the upper partition plate 9, and further, is provided at each intermediate partition. Through the through-hole 10d of the plate 10 and the through-hole 3b of each of the odd-numbered header plates 3 from the top, they flow in parallel to the left side of the header-use through-holes 5 of each of the even-numbered header plates 3, and from there, each of the flow path corrugated plates 2 Through the microchannels above and below, through holes 10b of each intermediate partition plate 10 from the right side of each through hole 5 for header, through holes 3a of each odd-numbered header plate 3 from above, and through the lower partition plate 11. It gathers through the hole 11b and is discharged to the through hole 4a of the lower sealing plate 4. The through

holes

fluids

7 and 12 leak. Absent. The upper sealing plate 1 can also serve as the upper partition plate 9, whereby the upper partition plate 9 can be omitted, and the lower sealing plate 4 can also serve as the lower partition plate 11. The partition plate 11 can be omitted.
[0094]
Next, as another example of the fluid flow direction, there is a channel structure shown in FIG. The channel structure shown in the drawing is different from the channel structure in FIG. 3 in the position of the through-holes in the upper sealing plate 1 and the lower sealing plate 4, and is otherwise the same. In FIG. 6, through

holes

1a and 1b are formed at the upper right and lower right corners of the upper sealing plate 1, and through

holes

4a and 4b are formed at the lower left and upper left corners of the lower sealing plate 4. 7 and 12 are separately supplied to the through hole 1a at the upper right corner and the through hole 1b at the lower right corner of the upper sealing plate 1. In this case, the fluid 7 passes through the fine flow path above and below the upper flow path corrugated sheet 2 as indicated by an arrow 102, and the fluid 12 flows through the fine flow path above and below the lower flow path corrugated sheet 2 as indicated by an arrow 104. Through the path, the two

fluids

7 and 12 flow in the same direction with the intermediate partition plate 10 interposed therebetween, and exchange heat between the flow path walls via the intermediate partition plate 10.
[0095]
Specifically, in the flow indicated by the arrow 102 in FIG. 6, the fluid 7 such as the gas to be processed is supplied from the through hole 1 a of the upper sealing plate 1, passes through the through hole 9 a of the upper partition plate 9, and the upper header plate 3. Flows through the right and left of the header through-hole 5 from above, passes through the upper and lower micro-channels of the upper channel corrugated plate 2, passes through the through-hole 10 c of the intermediate partition plate 10 from the left of the header through-hole 5, and the lower header After passing through the through hole 3b of the plate 3 and the through hole 11c of the lower partition plate 11, it is discharged to the through hole 4a of the lower sealing plate 4. In the flow indicated by the arrow 104, the fluid 12 such as the gas to be processed is supplied from the through hole 1b of the upper sealing plate 1, and the through hole 9b of the upper partition plate 9, the through hole 3a of the upper header plate 3, It flows to the right side of the header through-hole 5 of the lower header plate 3 through the through-hole 10b of the intermediate partition plate 10, and from there, passes through the upper and lower micro flow paths of the lower flow path corrugated plate 2 and passes through the header through-hole. 5 through the through-hole 11d of the lower partition plate 11 to the through-hole 4b of the lower sealing plate 4 to be discharged. The through

holes

9c and 9d of the upper partition plate 9 are sealed by the upper sealing plate 1, the through

holes

11a and 11b of the lower partition plate 11 are sealed by the lower sealing plate 4, and the

fluids

7 and 12 leak. Absent. The upper sealing plate 1 can also serve as the upper partition plate 9, whereby the upper partition plate 9 can be omitted, and the lower sealing plate 4 can also serve as the lower partition plate 11. The partition plate 11 can be omitted.
[0096]
That is, when the fluid 7 is supplied to the through hole 1a at the upper right corner of the upper sealing plate 1 and the fluid 12 is supplied to the through hole 1b at the lower right corner of the upper sealing plate 1, the flow of the two

fluids

7 and 12 Is a parallel flow type. Therefore, the channel structure shown in FIG. 6 has a function as a co-current type small heat exchanger.
[0097]
Here, in the examples shown in FIGS. 3, 5, and 6, the plurality of flow path corrugated plates 2 are respectively housed in the through holes 5 of the header plate 3 so that the fine patterns 2a are parallel to each other. Can be housed in the header through-hole 5 of the header plate 3 so that the fine patterns 2a cross each other.
[0098]
The channel structure shown in FIG. 7 is different from the channel structure shown in FIG. 3 or FIGS. 5 and 6 in that the upper and lower two flow path corrugated plates 2 of each header plate 3 are arranged such that the fine patterns 2a are orthogonal to each other. The points accommodated in the header through-holes 5, the point that the shape of the header through-holes 5 of each header plate 3 is hexagonal, the upper partition plate 9, each header plate 3, the intermediate partition plate 10, and the lower partition. The difference is that the arrangement positions of the through holes 9a to 9d, 3a to 3b, 10a to 10d, and 11a to 11d of the plate 11 are the center portions of the sides of the

members

9, 3, 10, and 11, respectively. Therefore, the same reference numerals in FIG. 7 denote the same functional members as in FIG. 3 or FIG. 6, and a repetitive description will be omitted.
[0099]
In the example shown in FIG. 7, the shape of the header through hole 5 of the upper header plate 3 is a horizontal hexagon, and has two sides parallel to the upper side and the lower side of the header plate 3. The vertex formed by two sides connected to the side from the right side is located near the center of the right side of the header plate 3, and the vertex formed by the two sides connected to the parallel two sides from the left is positioned near the center of the left side of the header plate 3. .
[0100]
On the other hand, the shape of the header through hole 5 of the lower header plate 3 is a vertically oriented hexagon, and has two sides parallel to the right side and the left side of the header plate 3. Is located near the center of the upper side of the header plate 3, and the vertex formed by the two sides extending from the lower side to the two parallel sides is located near the center of the lower side of the header plate 3.
[0101]
Although the orientation of the header through-hole 5 differs between the two header plates 3 as described above, the header plate having the header through-holes having the same shape is arranged by rotating the header plate by 90 degrees. 3 can be used.
[0102]
In the upper sealing plate 1, through

holes

1a and 1b are formed near the center of the right side and near the center of the upper side, and the lower sealing plate 4 has through holes 4a near the center of the lower side and near the center of the left side. 4b is formed.
[0103]
In FIG. 7, the through

holes

9a, 9b, 9c, 9d of the upper partition plate 9 are formed near the center of each of the four sides. The through-hole 9a near the center of the right side and the through-hole 9c near the center of the left side are formed at positions that can communicate with the header through-holes 5 of the upper header plate 3 so as to avoid the flow path corrugated plate 2. Have been. On the other hand, the through hole 9b near the center of the lower side and the through hole 9d near the center of the upper side are formed so as not to communicate with the header through hole 5 of the upper header plate 3.
[0104]
Similarly, the through

holes

11a, 11b, 11c and 11d of the lower partition plate 11 are formed near the center of each of the four sides. Among them, the through hole 11b near the center of the lower side and the through hole 11d near the center of the upper side are located at positions where they can communicate with the header through holes 5 of the lower header plate 3 so as to avoid the flow path corrugated plate 2. Is formed. On the other hand, the through hole 11a near the center of the right side and the through hole 11c near the center of the left side are formed so as not to communicate with the lower through hole 5 for header.
[0105]
Through

holes

3a and 3b are formed in the upper header plate 3 near the center of the lower side and near the center of the upper side outside the through hole 5 for the header. The through hole 3a near the center of the lower side can communicate with the through hole 9b near the center of the lower side of the upper partition plate 9, and the through hole 3b near the center of the upper side can communicate with the through hole 9d near the center of the upper side of the upper partition plate 9, respectively. It is formed in a suitable position.
[0106]
On the other hand, through

holes

3a and 3b are formed in the lower header plate 3 near the center on the right side and near the center on the left side outside the header through hole 3. The through hole 3a near the center of the right side is a through hole 11a near the center of the right side of the lower partition plate 11, and the through hole 3b near the center of the left side is a through hole 11c near the center of the left side of the lower partition plate 11, respectively. It is formed at a position where communication is possible.
[0107]
The through

holes

10a, 10b, 10c, and 10d of the intermediate partition plate 10 are formed near the center of each of the four sides. The through hole 10a near the center of the right side is formed at a position where it can communicate with the through hole 9a near the center of the right side of the upper partition plate 9 and the through hole 11a near the center of the right side of the lower partition plate 11. The through hole 10b near the center is a through hole 9b near the center of the lower side of the upper partition plate 9, the through hole 3a near the center of the lower side of the upper header plate 3, and the through hole near the center of the lower side of the lower partition plate 11. The through hole 10c near the center of the left side is formed with a through hole 9c near the center of the left side of the upper partition plate 9 and the through hole 3b near the center of the left side of the lower header plate 3. The lower partition plate 11 is formed at a position where it can communicate with the through hole 11c near the left center of the lower partition plate 11, and the through hole 11d near the upper center of the lower partition plate 9 is connected to the through hole 9d near the upper center of the upper partition plate 9 at the lower side. Penetration near the center of the upper side of the header plate 3 Are formed in communicatively position in the through hole 11d in the vicinity of the upper side middle portion of the hole 3b and the lower partition plate 11.
[0108]
Therefore, the upper partition plate 9, the intermediate partition plate 10, and the lower partition plate 11 have the same shape including the position of the through hole, and the partition plates manufactured in the same shape are combined with the upper partition plate 9, the intermediate partition plate 10, and the lower partition plate. The partition plate 11 can be used.
[0109]
Although the arrangement of the through

holes

3a and 3b is different between the upper and lower header plates 3, the header plates manufactured in the same shape including the hole positions are rotated by 90 degrees and arranged to be used for the upper and lower header plates 3. can do.
[0110]
Then, the flow path corrugated sheet 2 is prepared in advance by forming a fine pattern 2a on each substrate using plastic working, and the flow path corrugated sheet 2 is formed so that the fine patterns 2a are orthogonal to each other, for example. The upper sealing plate 1, the upper partition plate 9, the upper flow channel corrugated plate 2, the upper header plate 3, the intermediate partition plate 10, with the header plate 3 housed in the header through hole 5 (flow channel unit). The lower flow path corrugated plate 2, the lower header plate 3, the lower partition plate 11, and the lower sealing plate 4 are laminated, and for example, various types are represented by diffusion bonding, brazing, welding, and the like. Joining by a joining method. As a result, a plurality of microchannels having a hydraulic diameter of, for example, several hundred μm are formed, and a channel structure is completed. In this case, the upper channel corrugated plate 2 is sandwiched between the upper partition plate 9 and the intermediate partition plate 10 without using the above-mentioned joining, and the lower channel corrugated plate 2 is connected to the intermediate partition plate 10 and the lower partition plate. 11 may be inserted. In the case of sandwiching, the stacked state is held by a suitable holding mechanism such as screwing or clipping (not shown).
[0111]
Therefore, the upper and lower micro channels of the upper channel corrugated plate 2 constitute one channel system, and the upper and lower micro channels of the lower channel corrugated plate 10 constitute another channel system, and the gas to be treated and the like are treated. The fluid 7 and the fluid 12 such as the gas to be treated are supplied from arbitrary two through holes of the upper sealing plate 1 and passed through separate flow passage systems, so that heat exchange between the two via the intermediate partition plate 10. Done.
[0112]
For example, as shown in FIG. 7, a case is considered in which two

fluids

7 and 12 are separately supplied to a through-hole 1a near the center of the right side of the upper sealing plate 1 and a through-hole 1b near the center of the upper side. In this case, the fluid 7 passes through the minute flow path above and below the upper flow path corrugated sheet 2 as indicated by an arrow 105, and the fluid 12 flows through the minute flow path above and below the lower flow path corrugated sheet 2 as indicated by an arrow 106. The two

fluids

7 and 12 pass through the flow path and flow in directions intersecting each other with the intermediate partition plate 10 interposed therebetween, and perform heat exchange between the flow path walls via the intermediate partition plate 10.
[0113]
The fluid 7 is supplied from a through hole 1a near the center of the right side of the upper sealing plate 1 as shown by an arrow 105, passes through the through hole 9a of the upper partition plate 9, and passes through the header for the header of the upper header plate 3. It reaches the right side of the hole 5, passes through the upper and lower micro channels of the upper channel corrugated sheet 2 from right to left, and passes through the vicinity of the center of the left side of the intermediate partition plate 10 from the left side of the header through hole 5. It is discharged through a hole 10c, a through hole 3b near the center of the left side of the lower header plate 3, a through hole 11c of the lower partition plate 11, and a through hole 4b near the center of the left side of the lower sealing plate 4 in this order. .
[0114]
The other fluid 12 is supplied from the through hole 1b near the center of the upper side of the upper sealing plate 1 as shown by an arrow 106, and the through hole 9d of the upper partition plate 9 and the center of the upper side of the upper header plate 3 are provided. The through-hole 3b in the vicinity and the through-hole 11d in the intermediate partition plate 10 pass through the through-hole 5 for the header of the lower header plate 3 to the top (rear side). Through the micro flow path from the top to the bottom (from the back side to the front side), from the lower side (the front side) of the header through hole 3 to the through hole 11b of the lower partition plate 11, and the lower side of the lower sealing plate 4. It is discharged through the through hole 4a near the center.
[0115]
That is, when the fluid 7 is supplied to the through hole 1a near the center of the right side of the upper sealing plate 1 and the fluid 12 is supplied to the through hole 1b near the center of the upper side of the upper sealing plate 1, two fluids 7 are provided. , 12 are of an orthogonal type (Cross Flow Type). Therefore, the channel structure shown in FIG. 7 has a function as an orthogonal small heat exchanger.
[0116]
Here, the through

holes

fluid

7, 12 does not leak. The upper sealing plate 1 can also serve as the upper partition plate 9, whereby the upper partition plate 9 can be omitted, and the lower sealing plate 4 can also serve as the lower partition plate 11. The partition plate 11 can be omitted.
[0117]
The channel structure described with reference to FIGS. 6 and 7 is a structure in which two flow path units are stacked, but three or more flow path units are stacked to form a channel structure such as a small heat exchanger. It is possible to do. For example, similarly to the example illustrated in FIG. 5, the same fluid can be caused to flow in parallel in the channels of the odd-numbered channel units, and another fluid can be caused to flow in parallel in the channels of the even-numbered channel units.
[0118]
The shape and size of the header through-hole 5 of the header plate 3 have a shape and size that can surround the flow path corrugated plate 2 and secure an area necessary for supply and discharge of the

fluids

7 and 12. If it is a thing, it is arbitrary.
[0119]
3, 5, 6, and 7, the channel structure is shown assuming a horizontal state, and thus, for convenience, the upper and lower sides are distinguished from each other. However, the channel structure may be used upside down, or It can also be used in a vertical position.
[0120]
[Fourth embodiment]
Next, a channel structure according to a fourth embodiment of the present invention will be described with reference to FIGS. 3, 6, and 7. FIG. The channel structure of the fourth embodiment has a function as a small reactor (or micro reactor).
[0121]
As shown in FIGS. 3, 6, and 7, the channel structure of the fourth embodiment is different from the channel structures described in the third embodiment in that one of the two flow path units The catalyst 8 is supported on at least one of the inner surface and the outer surface of the flow path corrugated sheet 2, and the catalyst 13 is supported on at least one of the inner surface and the outer surface of the flow path corrugated sheet 2 of the other flow path unit. Things.
[0122]
The

fluids

7 and 12 may be any liquid or gas, and the

catalysts

8 and 13 may be any one type or a plurality of different types. In this example, the fluid 7 is a fuel gas and the fluid 12 is a reforming gas. Assuming that the gas is a gas, one of the catalysts 8 is used as a combustion catalyst and the other catalyst 13 is used as a reforming catalyst. A technology enabling the supply by the following will be described. As a treatment for supporting these catalysts, a catalyst body previously supporting the combustion catalyst 8 is formed on both the inner and outer surfaces of the upper channel corrugated sheet 2, and a catalyst body previously supporting the reforming catalyst 13 is formed on the lower side. The film is formed on both the inner and outer surfaces of the channel corrugated sheet 2. The combustion catalyst 8 and the reforming catalyst 13 may be supported on the substrate before the plastic working, or may be supported on the fine pattern 2a after the plastic working.
[0123]
In any of FIGS. 3, 6, and 7, the upper channel corrugated sheet 2 is prepared in advance by forming the fine pattern 2a on the substrate using plastic working and supporting the combustion catalyst 8 on the surface. Keep it. Also, by forming the fine pattern 2a on the substrate using plastic working and carrying the reforming catalyst 13 on the surface, the lower channel corrugated sheet 2 is prepared in advance, and the header plate 3 and its header Two flow path units formed by the flow path corrugated plate 2 fitted in the holes 5 are laminated with an intermediate partition plate 10 interposed therebetween, and an upper partition plate 9 is laminated on the upper surface of the laminated body. The upper sealing plate 1 is laminated thereon, the lower partition plate 11 is laminated on the lower surface of the laminate, and the lower sealing plate 4 is laminated below the upper partition plate 11. As a result, two channels of microchannels having a hydraulic diameter of, for example, several hundred μm and carrying the combustion catalyst 8 and the reforming catalyst 14, respectively, are formed, and a channel structure having the function of a reactor is completed. .
[0124]
The channel structure having the function of the reactor shown in FIG. 3 is of a counterflow type (Counter Flow Type) as shown by

arrows

102 and 103, whereas the channel structure having the function of the reactor shown in FIG. The channel structure having the function of the reactor shown in FIG. 7 is of a cross-flow type (Parallel Flow Type) shown by

arrows

102 and 104. belongs to.
[0125]
In any of the channel structures shown in FIGS. 3, 6, and 7, since the combustion catalyst 8 is supported on the surface of the upper channel corrugated sheet 2, the combustion gas 7 is passed through the fine channels. As a result, a catalytic combustion reaction, which is an exothermic reaction, occurs, and the obtained heat is supplied to the minute flow path of the lower flow path corrugated sheet 2 supporting the reforming catalyst 13 via the intermediate partition plate 10. As a result, heat required for causing a catalytic reforming reaction, which is an endothermic reaction, is supplied to the reformed gas 12 passing through the minute flow path of the lower flow path corrugated plate 2.
[0126]
In each of the above examples, the container (casing) constituted by the upper partition plate 9, the upper header plate 3, and the intermediate partition plate 10 in which the upper flow path corrugated sheet 2 that needs to carry the catalyst 8 is stored. A container which is a separate body and in which the lower channel corrugated sheet 2 requiring the catalyst 13 carrying treatment is constituted by the intermediate partition plate 10, the lower header plate 3 and the lower partition plate 11 for accommodating the same. Since it is separate from the (casing), there is no need for a complicated process such as a masking process for a portion that does not need to carry the catalyst, and there is an advantage that the catalyst coating can be performed by the channel corrugated sheet 2 alone. In addition, by using a separate system for the catalyst supporting process and the laminating process, batch production of the flow path corrugated plates 2 supporting the

catalysts

8 and 13, responsiveness to changes in required specifications of the

catalysts

8 and 14, 8 and 14 can be easily exchanged. Furthermore, there is the convenience that any channel corrugated sheet 2 can be easily changed to another material according to the application.
[0127]
In addition, as described above, when the flow path corrugated sheet 2 is sandwiched without using the joining, the manufacturing process is simplified, the deterioration of the catalysts 8 and 14 in the joining process is suppressed, and the catalysts 8 and 14 are easily replaced when deteriorated. In addition, there is an advantage that the catalysts 8 and 14 can be easily replaced with a newly developed catalyst. It is not always impossible to exchange the catalysts 8 and 14 at the time of deterioration and exchange the catalysts 8 and 14 for a newly developed catalyst even when using a junction.
[0128]
The channel structure having the function of the reactor described with reference to FIGS. 3, 6, and 7 has a structure in which two flow path units are stacked, but is formed by stacking three or more flow path units. It is possible. For example, in the channel structure shown in FIG. 5, the same catalyst, for example, a combustion catalyst is carried on all of the flow path corrugations 2 of the odd-numbered flow path units from the top, and the flow path corrugations of the even-numbered flow path units from the top. All two can carry another catalyst, such as a reforming catalyst. In addition, various catalysts can be supported on the channel corrugated plate 2 according to the purpose of the reaction treatment or the number of stacked channel units. For example, in order from the top, a certain catalyst A, the same catalyst A, and another catalyst B may be supported as a set as one set or repeatedly, or one catalyst A, another catalyst B, and another The catalyst C can be loaded as one set or repeatedly.
[0129]
In addition, in FIGS. 3 and 5 to 7, the channel structure having the function of the reactor is illustrated assuming a horizontal state, and therefore, for convenience, the upper and lower sides are distinguished from each other. It can also be used in a vertical position.
[0130]
[Fifth embodiment]
Next, a channel structure according to a fifth embodiment of the present invention will be described with reference to FIG. The channel structure shown in FIG. 8 is formed by laminating an upper partition plate 15 having a fine pattern, a header plate 3 having a header through-hole 5, and a lower partition plate 16 having a fine pattern. It has a function as a small heat exchanger (or a micro heat exchanger) in which a flow path is formed. This channel structure is used, for example, installed in a closed space. The channel structure has an upper sealing plate 1 laminated on the upper surface and a lower sealing plate 4 laminated on the lower surface.
[0131]
The upper sealing plate 1 has a through hole 1a for supplying fluid at the upper right corner, and the lower sealing plate 4 has a through hole 4a for discharging fluid at the lower left corner.
[0132]
The upper partition plate 15 and the lower partition plate 16 define a region through which the fluid flows, and the outer shape and size of the upper partition 15 and the lower partition plate 16 are basically arbitrary. Like the sealing plate 1 and the lower sealing plate 4, they have a rectangular shape, for example, a square of the same size. Although the size of the rectangle is basically arbitrary, for example, a 2 to 4 cm square can be exemplified.
[0133]
The upper partition plate 15 and the lower partition plate 16 are respectively formed with

fine patterns

17 and 18 having irregularities at the center of the

partition walls

15 and 18 for improving heat exchange efficiency. The

fine patterns

17 and 18 are formed by plastic working such as press molding using a mold, for example. Although the number of the

fine patterns

17 and 18 is basically arbitrary, for example, a large number of

fine patterns

17 and 18 are formed.
[0134]
The concavo-convex shape of the

fine patterns

17 and 18 may be a triangular waveform, a rectangle, an embossed shape, or any other appropriate regular or irregular shape.
[0135]
Each of the upper partition plate 15 and the lower partition plate 16 in the example shown in FIG. Is formed using plastic working. The left and right ends of the

fine patterns

17 and 18 are closed. In the present example, the regions where the

fine patterns

17 and 18 are formed on the upper partition plate 15 and the lower partition plate 16 are rectangles of the same size, for example, squares.
[0136]
Some examples of the

fine patterns

17 and 18 of the upper partition plate 15 and the lower partition plate 16 are shown in FIG. In the example of FIG. 9A, the

fine patterns

17 and 18 are formed so as to be uneven above the surfaces of the upper partition plate 15 and the lower partition plate 16. In the example of FIG. 9B, the

fine patterns

17 and 18 are formed so as to be uneven on the lower side of the surfaces of the upper partition plate 15 and the lower partition plate 16. In FIG. 9C, the

fine patterns

17 and 18 are formed so as to be uneven both up and down from the surfaces of the upper partition plate 15 and the lower partition plate 16.
[0137]
The upper partition plate 15 having such

fine patterns

17 and 18 and the lower partition plate 16 are laminated with the header plate 3 interposed therebetween. FIG. 10 shows some examples of lamination. In the example shown in FIG. 10A, an upper partition plate 15 having a fine pattern 17 having unevenness on the upper side and a lower partition plate 16 having a fine pattern 18 having unevenness on the upper side are laminated, and the

fine patterns

17 and 18 are used for headers. The fine pattern 17 is positioned above the through hole 5 for the header, and the fine pattern 18 enters the inside of the through hole 5 for the header from below. In the example of FIG. 10B, the upper partition plate 15 having the fine pattern 17 uneven on the lower side and the lower partition plate 16 having the fine pattern 18 uneven on the upper side are laminated, and the

fine patterns

17 and 18 are headers. The fine pattern 17 enters the inside of the header through-hole 5 from above, and the fine pattern 18 enters the inside of the header through-hole 5 from below. In FIG. 10 (c), an upper partition plate 15 having fine patterns 17 vertically uneven and a lower partition plate 16 having fine patterns 18 vertically uneven are laminated, and the

fine patterns

17 and 18 form the through holes 5 for headers. The lower half of the fine pattern 17 enters the inside of the header through-hole 5 from above, and the upper half of the fine pattern 18 enters the inside of the header through-hole 5 from below. In addition, contrary to FIG. 10B, an upper partition plate 15 in which the fine pattern 17 is uneven on the upper side and a lower partition plate 16 in which the fine pattern 18 is uneven on the lower side are laminated. 18 are opposed to each other with the through-hole for header 5 interposed therebetween, the fine pattern 17 is located above the through-hole 5 for header, and the fine pattern 18 is located below the through-hole 5 for header. .
[0138]
The header plate 3 has a header through-hole 5 in the center, and the header through-hole 5 has a function of supplying and discharging a fluid. The outer shape and size of the header plate 3 are basically arbitrary, but in this example, the rectangular shape having the same size as the upper sealing plate 1, the lower sealing plate 4, the upper partition plate 15, and the lower partition plate 16 is used. It has a shape. The method of forming the header through-hole 5 is arbitrary, and ordinary appropriate machining such as punching is sufficient. The size and position of the header through-hole 5 may be any size as long as the

fine patterns

17 and 18 can be accommodated in an area when the header through-hole 5 is projected in the vertical direction.
[0139]
In the example of FIG. 8, the shape of the header through hole 5 is such that two sides parallel to the upper side and the lower side of the header plate 3, and the right side of the header plate 3 is closer to the upper side as it approaches the right side. The side and the left side of the header plate 3 are diamonds having a diagonal side farther from the left side as the part closer to the upper side, but any shape and size as long as they have the function of supplying and discharging the fluid. good.
[0140]
As can be seen from the example of FIG. 10, the thickness of the header plate 3 is set according to the dimensions of the

fine patterns

17, 18 of the upper partition plate 15 and the lower partition plate 16, and the uneven direction.
[0141]
In this example, through

holes

15a, 15b, 15c, and 15d are formed at four corners of the upper partition plate 15 avoiding the fine pattern 17. The through hole 15a at the upper right corner is formed at a position where it can communicate with the through hole 1a of the upper sealing plate 1 and the header through hole 5 of the header plate 3. The through hole 15b at the lower right corner is formed avoiding this so as not to communicate with the header through hole 5. The through hole 15c at the lower left corner is formed at a position where it can communicate with the header through hole 5 of the header plate 3. The through hole 15d at the upper left corner is formed avoiding the header through hole 5 so as not to communicate with the through hole 5.
[0142]
Through

holes

16a, 16b, 16c and 16d are formed at four corners of the lower partition plate 16 avoiding the fine pattern 18. Among them, the through hole 16a at the upper right corner is formed at a position where the through hole 16a can communicate with the header through hole 5. The through hole 16b at the lower right corner is formed avoiding this so as not to communicate with the header through hole 5. The through hole 16c at the lower left corner is formed at a position that communicates with the header through hole 5. The through hole 16d at the upper left corner is formed avoiding this so as not to communicate with the header through hole 5.
[0143]
Therefore, the upper partition plate 15 and the lower partition plate 16 have the same shape including the position of the through hole, and the partition plate with the fine pattern manufactured in the same shape can be used for the upper partition plate 15 and the lower partition plate 16. I have to.
[0144]
Small through

holes

3a and 3b are formed in the header plate 3 at the lower right corner and the upper left corner, respectively, outside the header through hole 5. The through hole 3a at the lower right corner is a through

hole

15b, 16b at the lower right corner of each of the upper partition plate 15 and the lower partition plate 16, and the through hole 3b at the upper left corner is an upper left corner of the upper partition plate 15 and the lower partition plate 16, respectively. Are formed at positions that can communicate with the through

holes

15d and 16d, respectively.
[0145]
A method of forming the through

holes

15a, 15b, 15c, 15d in the upper partition plate 15, a method of forming the through

holes

3a, 3b in the header plate 3, and a formation of the through

holes

16a, 16b, 16c, 16d in the lower partition plate 16. Both methods are arbitrary, and ordinary appropriate machining such as punching is sufficient.
[0146]
Then, the upper partition plate 15 and the lower partition plate 16 are prepared in advance by forming

fine patterns

17 and 18 on each substrate using plastic working, and the

fine patterns

17 and 18 are parallel to each other in this example. The upper sealing plate 1, the upper partition plate 15, the header plate 3, the lower partition plate 16, and the lower side so that the

fine patterns

17 and 18 fall within the vertical projection area of the header through-hole 5. The sealing plates 4 are laminated, and each is joined by various joining methods represented by, for example, diffusion joining, brazing, welding, and the like. Thus, a fine channel having a hydraulic diameter of, for example, several hundred μm is formed between the upper partition plate 15 and the lower partition plate 16 by the

fine patterns

17 and 18, thereby completing a channel structure.
[0147]
Therefore, as illustrated in FIG. 8, when a fluid (for example, a gas to be treated) 7 is supplied from the through hole 1 a of the upper sealing plate 1 to the through hole 15 a at the upper right corner of the upper partition plate 15, the fluid 7 becomes the arrow 101. As shown in the figure, from the through-hole 15a to the right side of the header through-hole 5, the minute flow path between the upper partition plate 15 and the lower partition plate 16 is passed from right to left. It is discharged from the left through a through hole 16c at the lower left corner of the lower partition plate 16 and a through hole 4a of the lower sealing plate 4.
[0148]
Here, the through hole 15b at the lower right corner, the lower left corner 15c, and the upper left corner 15d of the upper partition plate 15 are closed with the upper sealing plate 1, and the through hole 16a at the upper right corner of the lower partition plate 16 and the lower right corner. The through hole 16b and the through hole 16d at the upper left corner are closed by the lower sealing plate 4, so that the fluid 7 does not leak. In the case where the fine pattern 17 of the upper partition plate 15 protrudes upward, for example, as illustrated in FIG. 12, an area 22 slightly larger than the fine pattern 17, such as a central portion of the upper sealing plate 1, is expanded upward. Although not shown, a recessed portion having a depth capable of accommodating the fine pattern 17 is provided on the lower side, or when the upper sealing plate 1 is a block-shaped thick member, the lower side has a width and depth capable of accommodating the fine pattern 17. As shown in FIG. 13, only the right part 1-1 and the left part 1-2 of the upper sealing plate 1 avoiding the fine pattern 17 are formed in the upper sealing plate. By using as 1, the interference between the upper sealing plate 1 and the fine pattern 17 can be avoided. Even when the fine pattern 18 of the lower partition plate 16 projects downward, interference between the lower sealing plate 4 and the fine pattern 18 can be avoided by the same measures.
[0149]
As described above, the channel structure shown in FIG. 8 uses the fluid (for example, the gas 7 to be processed) passing through the minute flow path between the upper partition plate 15 and the lower partition plate 16 and the heating means or the cooling means from the outside. Heat can be exchanged between the supplied fluids 6 through the upper partition plate 15 and the lower partition plate 16, and the device operates as a small heat exchanger. In FIG. 8, for example, the external fluid 6 is caused to flow to the upper surface of the upper sealing plate 1 and the lower side of the lower sealing plate 4, but the upper sealing plate 1, the lower sealing plate 4, and the heating means Alternatively, heating or cooling may be performed directly by a cooling unit, or a portion other than the upper sealing plate 1 and the lower sealing plate 4 may be heated or cooled.
[0150]
In the fifth embodiment, as compared with the first embodiment and the third embodiment, the flow path corrugated plate and the partition plate, which are separate structures, are respectively provided as an upper partition plate 15 and a lower partition plate 16 with a fine pattern. Since they are integrated, the intermediate partition plate can be omitted, and in the first and third embodiments, there is no need to consider the method of fixing the flow path corrugated sheet which was required in a separate structure, so that the number of parts and the number of steps are reduced. There is a merit of reduction, that is, cost reduction. Further, this structure is suitable for the case where there is little advantage in that the flow path corrugated sheet and the casing are made of different materials as in the first and third embodiments.
[0151]
In FIG. 8, the channel structure is illustrated assuming a horizontal state, and thus, for convenience, the upper and lower sides are separately described. However, the channel structure may be used upside down, or may be used in a vertical state. It is possible.
[0152]
Also, the upper partition plate 15, the header plate 3, and the lower partition plate 16 can be stacked with the lower partition plate 16 upside down from FIG.
[0153]
In the header through-hole 5 of the header plate 3, the projection area in the vertical direction can surround the area of the

fine patterns

17 and 18 of the upper partition plate 15 and the lower partition plate 16, and supply of the fluid 7. Any shape can be used as long as it has a shape, a size, and a position that can secure an area necessary for discharge.
[0154]
In the fifth embodiment, the upper partition plate 15 and the lower partition plate 16 are used as the partition plates, but three or more partition plates may be used as shown in FIG. In the example of FIG. 11, two intermediate partition plates 19 in which a fine pattern 20 is formed in the center by plastic working are added, and three upper, middle, and lower header plates 3 are stacked with the intermediate partition plate 10 interposed therebetween. I have. Then, the laminate, an upper partition plate 15 disposed on the laminate, an upper sealing plate 1 disposed on the upper partition plate 15, and a lower partition disposed below the laminate The plate 16 and the lower sealing plate 4 arranged below the lower partition plate 16 are laminated to form a microchannel between each layer. In this example, the upper partition plate 15, the two intermediate partition plates 19, and the lower partition plate 16 have the same shape including the position of the through hole, and their sizes are the same as those of the upper sealing plate 1 and the lower sealing plate. It is the same as the stop plate 4. However, the fine pattern 20 of the intermediate partition plate 19 has various modes as illustrated in FIG. 9, and various combinations of fine patterns between vertically adjacent partition plates are also various as illustrated in FIG. 10. Here, the procedure of laminating the upper sealing plate 1, the upper partition plate 15, the header plate 3, the intermediate partition plate 19, the lower partition plate 16, and the lower sealing plate 4 is optional. , Or the header plate 3 is laminated with the intermediate partition plate 19 interposed therebetween, and the upper partition plate 15 and the upper sealing plate 1 are sequentially laminated on the laminate thus obtained. For example, the lower partition plate 16 and the lower sealing plate 4 are sequentially laminated under the body, and various other methods are conceivable. In short, a stacked body in which a plurality of header plates 3 are stacked with an intermediate partition board 19 interposed therebetween, an upper partition board 15 disposed on the stacked body, and a stacked body disposed on the upper partition board 15 An upper sealing plate 1, a lower partition plate 16 disposed below the laminate, and a lower sealing plate 4 disposed below the lower partition plate 16 are laminated. What is necessary is just to be able to manufacture. This is the same in the following description.
[0155]
Through

holes

15a, 19a, and 16a are formed at the upper right corners of the upper partition plate 15, the intermediate partition plate 19, and the lower partition plate 16 at the same positions as the through holes 1a of the upper sealing plate 1, respectively. Are formed with through

holes

15b, 19b and 16b at the same positions as the through holes 4a of the lower sealing plate 4. In the channel structure shown in FIG. 11, the fluid 7 such as a gas to be processed is supplied from the through hole 1a of the upper sealing plate 1 through the through hole 15a of the upper partition plate 15, Further, it flows in parallel to the right side of the header through hole 5 of each header plate 3 through the through hole 19 a of each intermediate partition plate 19, and from there, a minute flow path between the upper partition plate 15 and the intermediate partition plate 19, Through the micro flow path between the plates 19, the micro flow path between the intermediate partition plate 19 and the lower partition plate 16, and from the left side of each through hole 5 for header, the through hole 19b of each intermediate partition plate 19; It gathers through the through hole 16b of the lower partition plate 16, and reaches the through hole 4a of the lower sealing plate 4 and is discharged. The through hole 15b of the upper partition plate 15 is sealed by the upper sealing plate 1, the through hole 16a of the lower partition plate 16 is sealed by the lower sealing plate 4, and the fluid 7 does not leak. When the fine pattern 17 of the upper partition plate 15 protrudes upward, as described above, for example, as shown in FIG. 12, a region 22 slightly larger than the fine pattern 17 such as the central portion of the upper sealing plate 1 is formed. A concave portion having a depth capable of accommodating the fine pattern 17 may be provided below the upper sealing plate 1. If the upper sealing plate 1 is a block-shaped thick member (not shown), the lower side may have a large space capable of accommodating the fine pattern 17. As shown in FIG. 13, only the right part 1-1 and the left part 1-2 of the upper sealing plate 1 avoiding the fine pattern 17 are raised. By using as the sealing plate 1, interference between the upper sealing plate 1 and the fine pattern 17 can be avoided. Even when the fine pattern 18 of the lower partition plate 16 projects downward, interference between the lower sealing plate 1 and the fine pattern 18 can be avoided by the same measures.
[0156]
[Sixth embodiment]
Next, a channel structure having a function as a reactor according to a sixth embodiment of the present invention will be described with reference to FIG.
[0157]
As shown in FIG. 8, the channel structure of the sixth embodiment is different from the channel structure of the fifth embodiment in that the inner surface of the fine pattern 17 of the upper partition plate 15 or the fine pattern of the lower partition plate 16 is different. The catalyst 8 is supported on at least one of the inner surfaces of the catalyst 18.
[0158]
In the present example, as a treatment for supporting the catalyst 8, a catalyst body previously supporting the catalyst 8 is formed on both the inner surface of the fine pattern 17 of the upper partition plate 15 and the inner surface of the fine pattern 18 of the lower partition plate 16. ing. The catalyst 8 may be supported on the substrate in advance before the plastic working, or may be supported on the

fine patterns

17 and 18 respectively after the plastic working.
[0159]
Then, a fine pattern 17 is formed on the substrate using plastic working, and the catalyst 8 is supported on the inner surface of the substrate to prepare the upper partition plate 15 in advance. Similarly, the fine pattern 18 is formed on the substrate using plastic working. The upper partition plate 16 is prepared in advance by forming and supporting the catalyst 8 on the inner surface thereof, and the

fine patterns

17 and 18 are parallel to each other, and the fine patterns 18 are formed in the through holes 5 for the header. The upper sealing plate 1, the upper partition plate 15, the header plate 3, the lower partition plate 16, and the lower sealing plate 4 are stacked so as to be included in the projection area in the vertical direction, and for example, each is diffusion-bonded or brazed. , Welding, and the like. Thereby, the

fine channels

17 and 18 have a hydraulic diameter of, for example, several hundred μm between the upper partition plate 15 and the lower partition plate 16, and the catalyst 8 is supported on the inner surface. The channel structure in which is formed is completed.
[0160]
In the channel structure shown in FIG. 8, since the catalyst 8 is supported on the inner surface of the fine flow path between the upper partition plate 15 and the lower partition plate 16, the fluid flowing through the fine flow path (for example, the gas to be treated) 7) operates as a small reactor having a function of causing a catalytic reaction specific to the catalyst 8; The fluid 7 is supplied from the through hole 1 a of the upper sealing plate 1, as shown by an arrow 101, reaches the right side of the header through hole 5 through the through hole 15 a of the upper partition plate 15, and from there, the upper partition plate After passing through a fine flow path between the lower partition plate 16 and the lower partition plate 16, the gas is discharged from the left side of the through hole 5 for the header to the through hole 4 a of the lower partition plate 4 through the through hole 16 c of the lower partition plate 16.
[0161]
In this example, the flow path corrugated plate and the sealing plate, which were separate structures, were integrated as an upper partition plate 15 and a lower partition plate 16 with fine patterns, respectively, as compared with the second and fourth embodiments. As a result, the intermediate partition plate can be omitted, and in the second and fourth embodiments, it is not necessary to consider the method of fixing the flow path corrugated plate which was required in a separate structure, so that the number of parts and the number of steps can be reduced. That is, there is a merit of cost reduction. Further, when a catalyst supporting method capable of selectively coating a region, for example, a sol-gel method, a dip coating method, or a sputtering film forming method is used, or a flow path corrugated sheet and a casing as in the second and fourth embodiments are used. This structure is suitable when there is little advantage in using a separate material.
[0162]
In FIG. 8, the channel structure having the function of the reactor is shown assuming a horizontal state, and therefore, for convenience, the upper and lower sides are distinguished from each other, but this small reactor may be used upside down. Alternatively, it can be used in a vertically installed state.
[0163]
In the channel structure shown in FIG. 11, the catalyst is also used for supplying a fine flow path between the upper partition plate 15 and the intermediate partition plate 19, a fine flow path between the intermediate partition plates 19, the intermediate partition plate 19 and the lower partition plate. By operating in a microchannel between the microchannels 16 and 16, it operates as a small reactor having a function of generating a catalytic reaction unique to the catalyst in a fluid (for example, a gas to be processed) 7 flowing in parallel through these microchannels. I do.
[0164]
[Seventh embodiment]
A channel structure according to a seventh embodiment of the present invention will be described with reference to FIG. The channel structure shown in FIG. 12 includes an upper sealing plate 1, an upper partition plate 15 with a fine pattern, an upper header plate 3, an intermediate partition plate 19 with a fine pattern, and a lower header plate 3. The lower partition plate 16 having a fine pattern and the lower sealing plate 4 are laminated, and operates as a small heat exchanger (or a micro heat exchanger). This channel structure is used, for example, installed in a closed space. Although details will be described later, a plurality of (two in the figure) header plates 3 are laminated with the intermediate partition plate 19 interposed therebetween, and the upper partition plate 15 is laminated on a laminate formed by this. By laminating the lower partition plate 16 underneath, a plurality of systems of microchannels having a hydraulic diameter of, for example, several hundred μm are formed.
[0165]
The upper sealing plate 1 and the lower sealing plate 4 are for the purpose of supplying and sealing a fluid, and their outer shapes and sizes are basically arbitrary. It has a square shape. Although the size of the rectangle is basically arbitrary, for example, a 2 to 4 cm square can be exemplified.
[0166]
The upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 define or define a region through which fluid flows, and their outer shapes and sizes are basically arbitrary. For example, the upper sealing plate 1 and the lower sealing plate 4 are formed in a square having the same size.
[0167]
The upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 are each formed with a

fine pattern

17, 18, or 20 having a concave-convex shape at the center thereof to increase the heat exchange efficiency. The

fine patterns

17, 18, and 20 are formed by plastic working such as press molding using a mold, for example. Although the number of the

fine patterns

17, 18, and 20 is basically arbitrary, it is formed as many as 50, for example.
[0168]
The concavo-convex shape of the

fine patterns

17, 18, and 20 may be a triangular waveform, a rectangle, an embossed shape, or any other appropriate regular or irregular shape.
[0169]
Each of the upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 in the example shown in FIG. 12 is, for example, formed on a substrate having a thickness of about 100 μm in a triangular wave shape as

fine patterns

17, 18, and 20 and has both a wave height and a pitch. For example, an uneven shape of several hundred μm is formed by using plastic working. The left and right ends of the

fine patterns

17, 18, and 20 are closed. In this example, the regions where the

fine patterns

17, 18, and 20 are formed in the upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 are rectangles of the same size, for example, square.
[0170]
Each header plate 3 has a header through-hole 5 at the center thereof, and each header through-hole 5 has a function of supplying and discharging a fluid. The outer shape and size of the header plate 3 are basically arbitrary, but in this example, the upper sealing plate 1, the lower sealing plate 4, the upper partition plate 15, the lower partition plate 16, the intermediate partition plate 19 and It has a rectangular shape of the same size, for example, a square. The method of forming the header through-hole 5 is arbitrary, and ordinary appropriate machining such as punching is sufficient.
[0171]
In the example of FIG. 12, the shape of the header through hole 5 of the upper header plate 3 is such that two sides parallel to the upper side and the lower side of the header plate 3 and a portion close to the upper side with respect to the right side of the header plate 3. Is a rhombus having a diagonal side closer to the right side and a diagonal side farther from the left side to the upper side with respect to the left side of the header plate 3, but as long as it has a function of supplying and discharging fluid, Any shape is acceptable.
[0172]
On the other hand, in the example of FIG. 12, the shape of the header through hole 12 of the lower header plate 3 is two sides parallel to the upper side and the lower side of the header plate 3 and the upper side to the right side of the header plate 3. Is a rhombus having a diagonal side farther from the right side as it approaches the left side, and a diagonal side closer to the left side as it approaches the upper side of the left side of the header plate 11, but has a function of supplying and discharging the fluid. Any shape is acceptable as long as it has.
[0173]
As described above, the orientation of the header through-hole 5 differs between the two header plates 3. However, by arranging the header plates having the same shape of the header through-holes upside down, the two header plates 3 have the same configuration. Make it available for use.
[0174]
As can be seen from the example of FIG. 10, the thickness of each header plate 3 is set in accordance with the dimensions of the

fine patterns

17, 18, and 20 of the upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19, and the uneven direction. You.
[0175]
In this example, through

holes

15a, 15b, 15c, and 15d are formed at four corners of the upper partition plate 15 avoiding the fine pattern 17. The through hole 15a at the upper right corner is formed at a position where it can communicate with the through hole 1a at the upper right corner of the upper sealing plate 1 and the header through hole 5 of the upper header plate 3, and the through hole 15b at the lower right corner is The through hole 15c at the lower left corner is formed at a position capable of communicating with the through hole 5 for the header, and the through hole 15d at the upper left corner is formed so as not to communicate with the through hole 5 for the header. The upper sealing plate 1 is formed so as to communicate with the through hole 1b but not with the header through hole 5 so as not to communicate therewith.
[0176]
On the other hand, through

holes

16a, 16b, 16c and 16d are formed at four corners of the lower partition plate 16 avoiding the fine pattern 18. The through hole 16a at the upper right corner is formed so as not to communicate with the through hole 5 for header of the lower header plate 3, and the through hole 16b at the lower right corner is formed with the through hole 5 for header and The through hole 4c of the lower left corner is formed at a position that can communicate with the through hole 4a of the lower sealing plate 4, and the through hole 16c at the lower left corner communicates with the through hole 4b of the lower sealing plate 4. The through hole 16d at the upper left corner is formed at a position where it can communicate with the header through hole 5.
[0177]
In the upper header plate 3, through

holes

3a and 3b are formed at the lower right corner and the upper left corner outside the header through hole 5, respectively. The through hole 3a at the lower right corner is formed at a position capable of communicating with the through hole 15b at the lower right corner of the upper partition plate 1, and the through hole 3b at the upper left corner is formed at a position capable of communicating with the through hole 15d at the upper left corner of the upper partition plate 15.
[0178]
In the lower header plate 3, through

holes

3a and 3b are formed at the upper right corner and the lower left corner outside the header through hole 5, respectively. The through hole 3a at the upper right corner is formed at a position capable of communicating with the through hole 16a at the upper right corner of the lower partition plate 16, and the through hole 3b at the lower left corner is formed at a position capable of communicating with the through hole 16c at the lower left corner of the lower partition plate 16. I have.
[0179]
Although the arrangement of the through

holes

3a and 3b differs between the upper and lower header plates 3, the header plates manufactured in the same shape including the hole positions can be used for each header plate 3 by arranging them upside down.
[0180]
Further, through

holes

19a, 19b, 19c and 19d are formed at four corners of the intermediate partition plate 19 avoiding the fine pattern 20. The through hole 19a at the upper right corner communicates with the through hole 15a at the upper right corner of the upper partition plate 15, the through hole 3a at the upper right corner of the lower header plate 3, and the through hole 16a at the upper right corner of the lower partition plate 16. The through hole 19b at the lower right corner is formed in a possible position, and the through hole 15b at the lower right corner of the upper partition plate 15, the through hole 3b at the lower right corner of the upper header plate 3, and the lower right corner of the lower partition plate 16 penetrate. The through hole 19c at the lower left corner is formed at a position that can communicate with the hole 16b, and the through hole 15c at the lower left corner of the upper partition plate 15, the through hole 11c at the lower left corner of the lower header plate 3, and the lower partition plate. 16 is formed at a position where it can communicate with the through hole 16c at the lower left corner of the upper partition plate 15. And the through hole in the upper left corner of the lower partition plate 16 It is formed in communicatively positions in and 6d.
[0181]
Therefore, the upper partition plate 15, the intermediate partition plate 19, and the lower partition plate 16 have the same shape including the positions of the through holes, and the partition plates manufactured in the same shape are connected to the upper partition plate 15, the intermediate partition plate 19, and the lower side. It can be used for the partition plate 16.
[0182]
A method for forming the through

holes

1a, 1b, 4a, 4b in the upper sealing plate 1 and the lower sealing plate 4, a method for forming the through

holes

15a, 15b, 15c, 15d in the upper partition plate 15, and a method for forming each of the header plates 3 The method of forming the through

holes

3a, 3b, the method of forming the through

holes

19a, 19b, 19c, 19d in the intermediate partition plate 19, and the method of forming the through

holes

16a, 16b, 16c, 16d in the lower partition plate 16 are both optional. For example, ordinary appropriate machining such as punching is sufficient.
[0183]
Then, the upper partition plate 15, the intermediate partition plate 19, and the lower partition plate 16 are prepared in advance by forming

fine patterns

17, 20, and 18 on each substrate using plastic working, and the

fine patterns

17, 20, and The upper sealing plate 1, the upper partition plate 15, and the upper header so that the first and second micropatterns 18 are parallel to each other and the

fine patterns

17, 20, and 18 are respectively included in the vertical projection area of the header through-hole 5. The plate 3, the intermediate partition plate 19, the lower header plate 3, the lower partition plate 16, and the lower sealing plate 4 are laminated, and for example, various bonding methods represented by, for example, diffusion bonding, brazing, welding, etc. To join.
[0184]
For example, two header plates 3 are vertically stacked with an intermediate partition plate 19 interposed therebetween, the upper partition plate 15 is laminated on a laminate formed by this, and the upper sealing is performed on the upper partition plate 15. The plates 1 are laminated, the lower partition plate 16 is laminated below the laminate, and the lower sealing plate 4 is laminated below the lower partition plate 16.
[0185]
As a result, a microchannel having a hydraulic diameter of, for example, several hundred μm is formed by the

fine patterns

17 and 20 between the upper partition plate 15 and the intermediate partition plate 19, and the intermediate partition plate 19 and the lower partition plate 16 are formed. A microchannel having a hydraulic diameter of several hundred μm is formed between the micropatterns 20 and 18 to form a channel structure having a plurality of systems of microchannels.
[0186]
That is, the fine flow path formed by the

fine patterns

17 and 20 forms one flow path system with the fine pattern 20 of the intermediate partition plate 19 as a boundary, and the fine flow path formed by the

fine patterns

20 and 18 forms another flow path system. It becomes a flow channel system, and

separate fluids

7 and 12 are supplied from, for example, two through

holes

1 a and 1 b of the upper sealing plate 1 and passed through the different flow channel systems, so that the

fluids

7 and 12 pass through the fine pattern 20 of the intermediate partition plate 19. Heat exchange takes place between each other.
[0187]
For example, as shown in FIG. 12, two fluids (for example, gases to be processed) 7 and 12 are passed through the through

holes

1 a and 1 b of the upper sealing plate 1 and the through holes 15 a at the upper right corner and the upper left corner of the upper partition plate 15. Let us consider a case of separately supplying the holes 15d. In this case, the fluid 7 passes through the fine channel formed by the

fine patterns

17 and 20 as shown by the arrow 102, and the fluid 12 passes through the micro channel formed by the

fine patterns

20 and 18 as shown by the arrow 103. The two

fluids

7 and 12 flow in opposite directions with the intermediate partition plate 19 interposed therebetween, and perform heat exchange between the flow path walls via the fine patterns 20 of the intermediate partition plate 19.
[0188]
However, the through hole 15b at the lower right corner and the lower left corner 15c of the upper partition plate 15 are closed by the upper sealing plate 1, and the through hole 16a at the upper right corner and the through hole 16d at the upper left corner of the lower partition plate 16 are lower. It is closed by the sealing plate 4 and the

fluids

7 and 12 do not leak.
[0189]
As a result, the fluid 7 is supplied from the through hole 15a at the upper right corner of the upper partition plate 15 to the right side of the header through hole 5 of the upper header plate 3 as shown by the arrow 102, and the

fine pattern

17, 20 passes from the right to the left through the micro flow path formed by the through hole 20, the through hole 19 c at the lower left corner of the intermediate partition plate 19, the through hole 3 c at the lower left corner of the lower header plate 3, and the lower side from the left side of the header through hole 5. It is discharged through the through hole 16c at the lower left corner of the partition plate 16 in order.
[0190]
The other fluid 12 is supplied from the through hole 15d at the upper left corner of the upper partition plate 15 as shown by the arrow 103, and the through hole 3b at the upper left corner of the upper header plate 3 and the upper left corner of the intermediate partition plate 19. After passing through the through holes 19d in sequence, it reaches the left side of the header through hole 5 of the lower header plate 3, passes through the minute flow path formed by the

fine patterns

20, 18 from left to right, and to the right of the header through hole 5 Is discharged through the through hole 16b at the lower right corner of the lower partition plate 16.
[0191]
That is, when the fluid 7 is supplied to the through hole 15a at the upper right corner of the upper partition plate 15 and the fluid 12 is supplied to the through hole 15d at the upper left corner of the upper partition plate 15, the flows of the two

fluids

7 and 12 are in opposite directions. It becomes a flow type (Counter Flow Type). Therefore, the channel structure shown in FIG. 12 has a function as a countercurrent small heat exchanger.
[0192]
Here, when the fine pattern 17 of the upper partition plate 15 protrudes upward, in the example of FIG. 12, an area 22 slightly larger than the fine pattern 17, such as the center of the upper sealing plate 1, is swelled upward, and By providing a concave portion on the side having a depth capable of accommodating the fine pattern 17, interference between the upper sealing plate 1 and the fine pattern 17 is avoided. Alternatively, although not shown, in the case where the upper sealing plate 1 is a thick block-shaped member, interference can be avoided by providing a concave portion by making the lower side gouge to a width and depth capable of accommodating the fine pattern 17. Furthermore, as illustrated in FIG. 13, by using only the right part 1-1 and the left part 1-2 of the upper sealing plate avoiding the fine pattern 17 as the upper sealing plate 1, Interference between the upper satire field and the fine pattern 17 can be avoided. Even when the fine pattern 18 of the lower partition plate 16 projects downward, interference between the lower sealing plate 4 and the fine pattern 18 can be avoided by the same measures.
[0193]
In FIGS. 12 and 13, the number of the header plates 3 is two, but an example of a larger number will be described with reference to FIG.
[0194]
In the channel structure shown in FIG. 14, the four header plates 3 are laminated with the intermediate partition plate 19 interposed therebetween, and the upper partition plate 15 is laminated on the laminate formed by this. By stacking the lower partition plate 16 below, stacking the upper sealing plate 1 on the upper partition plate 15, and stacking the lower sealing plate 4 below the lower partition plate 16, for example, several hundreds A plurality of microchannels having a hydraulic diameter of μm are formed.
[0195]
For example, as shown in FIG. 14, two fluids (for example, gases to be processed) 7 and 12 are passed through the through

holes

1a and 1b of the upper sealing plate 1 through the through hole 15a at the upper right corner and the upper left corner of the upper partition plate 15. Let us consider a case of separately supplying the holes 15d. In this case, as shown by an arrow 102, the fluid 7 passes in parallel through a plurality of minute flow paths formed by upper and lower fine patterns in the odd-numbered header plates 3 from the top, and the through holes 19c of the intermediate partition walls 19 and the even number. It gathers through the through hole 3b of the header plate 3 and is discharged from the through hole 4b of the lower sealing plate 4 through the through hole 16c of the lower partition plate 16. As shown by an arrow 103, the fluid 12 passes in parallel through a plurality of microchannels formed by the upper and lower fine patterns in the even-numbered header plates 3 from the top, and the through holes 19b of the intermediate partition plate 19 and the odd-numbered headers. It gathers through the through holes 3a of the plate 3 and is discharged from the through holes 4a of the lower sealing plate 4 via the through holes 16b of the lower partition plate 16. Thus, heat is exchanged between the two

fluids

7 and 12.
[0196]
Next, as shown in FIG. 15, as another example of the fluid flow direction, two header plates 3 are laminated with the intermediate partition plate 19 interposed therebetween, and the upper sealing plate 1 has a through hole 1 a at the upper right corner and a right hole. There is a through hole 1b at the lower corner, a through hole 4a at the lower left corner and a through hole 4b at the upper left corner in the lower sealing plate 4, and two

fluids

7 and 12 are connected to the through hole 15a at the upper right corner of the upper partition plate 15. It is conceivable to supply separately to the through hole 15b at the lower right corner. In this case, the fluid (for example, the gas to be treated) 7 passes through the minute flow path formed by the

fine patterns

17 and 20 as shown by an arrow 102, and the fluid (for example, the gas to be treated) 12 becomes fine as shown by an arrow 104. The fluid 7 and the fluid 12 flow in the same direction across the intermediate partition plate 19 through the minute flow path formed by the

patterns

20 and 18, and exchange heat between the flow path walls via the fine pattern 20 of the intermediate partition plate 19. .
[0197]
However, the through hole 15c at the lower left corner and the upper left corner 15d of the upper partition plate 15 are closed by the upper sealing plate 1, and the through hole 16a at the upper right corner and the through hole 16b at the lower right corner of the lower partition plate 16 are Blocked by the lower sealing plate 4, the

fluids

7 and 12 do not leak.
[0198]
That is, the fluid 7 is supplied from the through hole 15a at the upper right corner of the upper partition plate 15 and reaches the right side of the header through hole 5 of the upper header plate 3 as shown by the arrow 102, from which the

fine pattern

17, 20 passes from right to left through the micro flow path formed by 20; through hole 19c in the lower left corner of intermediate partition plate 19; through hole 3b in the lower left corner of lower header plate 3; It is discharged through the through hole 16c at the lower left corner of the partition plate 16 in order.
[0199]
The other fluid 12 is supplied from the through hole 15b at the lower right corner of the upper partition plate 15, as shown by the arrow 104, and passes through the through hole 3a at the lower right corner of the upper header plate 3 and the lower right corner of the intermediate partition plate 19. After passing through the through holes 19b in sequence, it reaches the right side of the header through hole 5 of the lower header plate 3, and passes through the minute flow path formed by the

fine patterns

20 and 18 from right to left, and to the left of the header through hole 5 Through the through hole 16d in the upper left corner of the lower partition plate 16.
[0200]
As described above, when the fluid 7 is supplied to the through hole 15a at the upper right corner of the upper partition plate 15 and the fluid 12 is supplied to the through hole 15b at the lower right corner of the upper partition plate 15, the flow of the two

fluids

7 and 12 Is a parallel flow type. Therefore, the channel structure shown in FIG. 15 operates as a co-current small heat exchanger.
[0201]
Here, in the examples shown in FIGS. 13 and 15, the upper partition plate 15, the intermediate partition plate 19, and the lower partition plate 16 are laminated such that the

fine patterns

17, 20, and 18 are parallel to each other. As shown in FIG. 16, it is also possible to laminate such that the

fine patterns

17, 20, and 18 alternately intersect.
[0202]
The channel structure shown in FIG. 16 is different from the channel structure shown in FIG. 13 or FIG. 14 in that the through

holes

1a and 1b of the upper sealing plate 1 are located near the center of the right side and near the center of the upper side. The point that the through

holes

4a and 4b of the sealing plate 4 are near the center of the lower side and near the center of the left side, and the

fine patterns

17, 20, and 18 of the upper partition plate 15, the intermediate partition plate 19, and the lower partition plate 16 are Points that are alternately orthogonal to each other, that the shape of the through holes 5 in the upper and lower two header plates 3 is hexagonal, that the upper partition plate 15, the upper header plate 3, the lower partition plate 16, and the lower header The difference is that the arrangement positions of the through holes 15a to 15d, 3a to 3b, 16a to 16d, and 19a to 19b of the plate 3 and the intermediate partition plate 19 are near the center of the sides of the

members

15, 3, 16, and 19, Others are the same. Therefore, in FIG. 16, the same functional members as those in FIG. 13 or FIG. 15 are denoted by the same reference numerals, and the description thereof will not be repeated.
[0203]
In the example shown in FIG. 16, the shape of the header through-hole 5 of the upper header plate 3 is a horizontal hexagon, and has two sides parallel to the upper side and the lower side of the header plate 3. A vertex formed by two sides connected from the right side is located near the center of the right side of the header plate 3, and a vertex formed by two sides connected to the parallel two sides from the left is located near the center of the left side of the header plate 3.
[0204]
On the other hand, the shape of the header through hole 5 of the lower header plate 3 is a vertical hexagon, and has two sides parallel to the right side and the left side of the header plate 3. The vertex formed by the two continuous sides is located near the center of the upper side of the header plate 3, and the vertex formed by the two sides connected from the lower side to the two parallel sides is positioned near the center of the lower side of the header plate 3.
[0205]
As described above, the orientation of the header through hole 5 is different between the upper and lower two header plates 3. However, by arranging the header plate having the same shape of the header through hole formed by rotating the header plate by 90 degrees, the two header plates are rotated. It can be used for plate 3.
[0206]
In FIG. 16, the through

holes

15a, 15b, 15c, 15d of the upper partition plate 15 are formed near the center of each of the four sides. The through hole 15a near the center of the right side and the through hole 15c near the center of the left side are formed at positions that can communicate with the header through holes 5 of the upper header plate 3 so as to avoid the fine pattern 17. I have. The through hole 15b near the center of the lower side and the through hole 15d near the center of the upper side are formed so as not to communicate with the through hole 5 for header.
[0207]
Similarly, the through

holes

16a, 16b, 16c, 16d of the lower partition plate 16 are formed near the center of each of the four sides. Of these, the through hole 16b near the center of the lower side and the through hole 16d near the center of the upper side are formed at positions that can communicate with the header through holes 5 of the lower header plate 3 so as to avoid the fine pattern 18. ing. The through hole 16a near the center of the right side and the through hole 16c near the center of the left side are formed so as not to communicate with the header through hole 5.
[0208]
Through

holes

3a and 3b are formed in the upper header plate 3 near the center of the lower side and near the center of the upper side outside the through hole 5 for the header. The through hole 3a near the center of the lower side is a through hole 15b near the center of the lower side of the upper partition plate 15, and the through hole 3b near the center of the upper side is a through hole 15d near the center of the upper side of the upper partition plate 15 and the upper seal. The plate 1 is formed at a position where it can communicate with the through hole 1b near the center of the upper side.
[0209]
In the lower header plate 3, through

holes

3a and 3b are formed near the center of the right side and near the center of the left side, respectively, outside the through hole 5 for the header. The through hole 3a near the center on the right side is a through hole 16a near the center on the right side of the lower partition plate 16, and the through hole 3b near the center on the left side is a through hole 16c near the center on the left side of the lower partition plate 16 and the lower portion. The side sealing plate 4 is formed at a position where it can communicate with the through hole 4b near the center of the left side.
[0210]
As described above, the arrangement of the through

holes

3a and 3b is different between the upper and lower two header plates 3. However, by arranging the header plate manufactured in the same shape including the hole position by rotating it by 90 degrees, both the header plates 3 are formed. Can be used for
[0211]
The through

holes

19a, 19b, 19c, 19d of the intermediate partition plate 19 are formed near the center of each of the four sides. The through hole 19a near the center of the right side includes the through hole 15a near the center of the right side of the upper partition plate 15, the through hole 3a near the center of the right side of the lower header plate 3, and the center of the right side of the lower partition plate 16. The through hole 19b is formed at a position that can communicate with the through hole 16a in the vicinity, and the through hole 19b near the center of the lower side is a through hole 15b near the center of the lower side of the upper partition plate 15 and the through hole near the center of the lower side of the upper header plate 3. The hole 3b is formed at a position where it can communicate with the through hole 16b near the center of the lower side of the lower partition plate 16, and the through hole 19c near the center of the left side is connected to the through hole 15c near the center of the left side of the upper partition plate 15. The through hole 3c near the center of the left side of the lower header plate 3 and the through hole 16c near the center of the left side of the lower partition plate 16 are formed so as to be able to communicate with each other. Upper side of partition plate 15 In the through hole 16d in the vicinity of the upper side middle portion of the through-hole 3b and the lower partition plate 16 in the vicinity of the upper side middle portion of the through hole 15d and the upper header plate 3 in the vicinity of central portions are formed in the communicating positions.
[0212]
Therefore, the upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 have the same shape including the positions of the through holes, and the partition plates with the fine pattern manufactured in the same shape are combined with the upper partition plate 15 and the lower partition plate. 16 and the intermediate partition plate 19. The same material can be used for the upper sealing plate 1 and the lower sealing plate 4.
[0213]
Then, the upper partition plate 15, the intermediate partition plate 19, and the lower partition plate 16 are formed in advance by forming

fine patterns

17, 20, and 18 on each substrate by using plastic working. The upper sealing plate 1, the upper partition plate 15, the upper header plate 3, the intermediate partition plate 19, the lower header plate 3, the lower partition plate 16, and the

lower sealing plate

20 and 18 are alternately orthogonal to each other. The plates 4 are stacked, and each is joined by various joining methods represented by, for example, diffusion joining, brazing, welding, and the like.
[0214]
For example, two header plates 3 are laminated with an intermediate partition plate 19 interposed therebetween, and an upper partition plate 15 and an upper sealing plate 1 are laminated on a laminate formed by the two header plates 3. The lower partition plate 16 and the lower sealing plate 4 are laminated.
[0215]
As a result, a microchannel having a hydraulic diameter of, for example, several hundred μm is formed by the

fine patterns

17 and 20 between the upper partition plate 15 and the intermediate partition plate 19, and the intermediate partition plate 19 and the lower partition plate 16 are formed. A fine path having a hydraulic diameter of, for example, several hundred μm is formed by the

fine patterns

20 and 18 between them, thereby forming a channel structure having a plurality of systems of fine flow paths. This channel structure is used, for example, installed in a closed space.
[0216]
That is, the fine flow path formed by the

fine patterns

20 and 18 forms another flow path system. It becomes a flow channel system, and

separate fluids

7 and 12 are supplied from, for example, two through

holes

fluids

7 and 12 pass through the fine pattern 20 of the intermediate partition plate 19. Heat exchange takes place between each other.
[0219]
For example, as shown in FIG. 16, a case where two fluids (gases to be processed) 7 and 12 are separately supplied to a through hole 15 a near the center of the right side of the upper partition plate 15 and a through hole 15 d near the center of the upper side of the upper partition plate 15. Think. In this case, the fluid 7 passes through the fine channel formed by the

fine patterns

17 and 20 as shown by the arrow 105, and the fluid 12 passes through the micro channel formed by the

fine patterns

20 and 18 as shown by the arrow 106. The two

fluids

7 and 12 flow in directions intersecting each other with the intermediate partition plate 19 interposed therebetween, and perform heat exchange between the flow path walls via the fine patterns 20 thereof.
[0218]
However, a through hole 15b near the center of the lower side and a through hole 15c near the center of the left side of the upper partition plate 15 are closed by the upper sealing plate 1, and a through hole 16a near the center of the right side of the lower partition plate 16; The through hole 16d near the center of the upper side is closed by the lower sealing plate 4, and the

fluids

7 and 12 do not leak.
[0219]
As a result, the fluid 7 is supplied from the through hole 15a near the center of the right side of the upper partition plate 15 as shown by the arrow 105, reaches the right side of the header through hole 5 of the upper header plate 3, and from here the fine The through holes 19c pass through the minute flow path formed by the

patterns

17 and 20 from right to left, from the left side of the header through hole 5, near the center of the left side of the intermediate partition plate 19, and near the center of the left side of the lower header plate 3. Through the through hole 3b and the through hole 16c near the center of the left side of the lower partition plate 16.
[0220]
The other fluid 12 is supplied from a through hole 15d near the center of the upper side of the upper partition plate 15 as shown by an arrow 106, and the through hole 3b near the center of the upper side of the upper header plate 3, the intermediate partition plate 19 Through the through hole 19d near the center of the upper side to reach the upper side (rear side) of the header through hole 5 of the lower header plate 3, from which the micro flow path formed by the

fine patterns

20 and 18 is passed from top to bottom. As a result, the lower partition plate 16 is discharged from the lower side (front side) of the header through hole 5 through the through hole 16b near the center of the lower side.
[0221]
That is, when the fluid 7 is supplied to the through hole 15a near the center of the right side of the upper partition plate 15 and the fluid 12 is supplied to the through hole 15d near the center of the upper side of the upper partition plate 15, the two

fluids

7, 12 Flow is an orthogonal type (Cross Flow Type). Therefore, the channel structure shown in FIG. 16 operates as an orthogonal small heat exchanger.
[0222]
The channel structure described with reference to FIGS. 13, 15, and 16 is a structure in which two header plates 3 are stacked with an intermediate partition plate 19 interposed therebetween, but three or more header plates 3 are interposed therebetween. The channel structure can be formed by stacking the intermediate partition plate 19 therebetween.
[0223]
The shape and size of the header through-hole 5 of each header plate 3 are such that the

fine patterns

17, 18, and 20 of the upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 are projected in the vertical projection area. Any material can be used as long as it can be accommodated and has a shape and a size that can secure an area necessary for supply and discharge of the

fluids

7 and 12.
[0224]
Also, the lower partition plate 16 may be turned upside down from FIG. 16 and the upper partition plate 15, the upper header plate 3, the intermediate partition plate 19, the lower header plate 3, and the lower partition plate 16 may be laminated. It is possible.
[0225]
Further, in FIGS. 13, 15, and 16, the channel structure is shown assuming a horizontal state, and thus, for convenience, the upper and lower sides are distinguished from each other. However, the channel structure may be used upside down, or It is also possible to use it vertically.
[0226]
Here, when the fine pattern 17 of the upper partition plate 15 protrudes upward, as illustrated in FIG. 12, a region 22 slightly wider than the fine pattern 17, such as the central portion of the upper sealing plate 1, is expanded upward. A concave portion having a depth capable of accommodating the fine pattern 17 is provided on the lower side, or, although not shown, when the upper sealing plate 1 is a block-shaped thick member, the lower side is provided with a width and depth capable of accommodating the fine pattern 17. By providing a concave portion by making a gouge, interference between the upper sealing plate 1 and the fine pattern 17 can be avoided. Even when the fine pattern 18 of the lower partition plate 16 projects downward, interference between the lower sealing plate 4 and the fine pattern 18 can be avoided by the same measures.
[0227]
[Eighth embodiment]
Next, a channel structure having a function as a reactor according to an eighth embodiment of the present invention will be described with reference to FIGS.
[0228]
As shown in FIGS. 13, 15, and 16, the channel structure of the eighth embodiment is different from the channel structures described in the seventh embodiment in that an upper partition plate 15 and an upper header plate 3 are provided. The catalyst 8 is carried on the inner surface of the micro channel formed by the intermediate partition plate 19, and the catalyst 13 is formed on the inner surface of the other micro channel formed by the intermediate partition plate 19, the lower header plate 3, and the lower partition plate 16. Is carried.
[0229]
In this example, it is assumed that the fluid 7 is a fuel gas and the fluid 12 is a reformed gas, and one of the catalysts 8 is used as a combustion catalyst and the other catalyst 13 is used as a reforming catalyst. The heat required for the reforming reaction of No. 12 can be supplied by the catalytic reaction of the fuel gas 7. As a treatment for supporting these catalysts, a catalyst body previously supporting the combustion catalyst 8 is formed on the lower surface of the fine pattern 17 of the upper partition plate 15 and the upper surface of the fine pattern 20 of the intermediate partition plate 19, The catalyst body previously supporting 13 is formed on the lower surface of the fine pattern 20 of the intermediate partition plate 19 and the upper surface of the fine pattern 18 of the lower partition plate 16. The

catalysts

8 and 13 may be supported on the substrate before the plastic working, or may be supported on the

fine patterns

17, 18 and 20, respectively, after the plastic working.
[0230]
13, 15, and 16, the upper partition plate 15 is prepared in advance by forming the fine pattern 17 on the substrate using plastic working and supporting the combustion catalyst 8 on the lower surface, Also, the intermediate partition plate 19 is prepared in advance by forming the fine pattern 20 on the substrate using plastic working, and carrying the combustion catalyst 8 on the upper surface and the reforming catalyst 13 on the lower surface, respectively. The lower partition plate 16 is prepared in advance by forming the fine pattern 18 on the substrate by using and the reforming catalyst 13 is carried on the upper surface, and the two header plates 3 are sandwiched by the intermediate partition plate 19 therebetween. By laminating, the upper partition plate 15 and the upper sealing plate 1 are laminated on the laminate formed by this, and the lower partition plate 16 and the lower sealing plate 4 are laminated below the laminate. , For example, hundreds It has a hydraulic diameter of m, and, in the fine channel of two systems in which a plurality of types of catalyst (combustion catalyst 8 and the reforming catalyst 13) is supported is formed, a channel structure is completed.
[0231]
The channel structure shown in FIG. 13 is of a counter flow type (Counter Flow Type) as shown by

arrows

102 and 103, whereas the channel structure shown in FIG. 15 is of a parallel flow type (Parallel Flow) as shown by

arrows

102 and 104. In the channel structure shown in FIG. 16, the channel structure is an orthogonal type (Cross Flow Type) as shown by

arrows

105 and 106.
[0232]
In any of the channel structures shown in FIGS. 13, 15 and 16, the combustion catalyst 8 is carried on the inner surface of the fine flow path formed by the

fine patterns

17 and 20, so that the combustion gas 7 Through which a catalytic combustion reaction, which is an exothermic reaction, occurs, and the resulting heat passes through the fine pattern 20 of the intermediate partition plate 19 and carries the reforming catalyst 13 on the inner surface formed by the

fine patterns

20 and 18. Given to. As a result, heat necessary for causing a catalytic reforming reaction, which is an endothermic reaction, is supplied to the reformed gas 12 passing through the minute flow path formed by the

fine patterns

20 and 18.
[0233]
In each of the above examples, the flow path corrugated plate, the partition plate, and the intermediate partition plate, which were separate structures as compared with the fourth embodiment, were each provided with an upper partition plate 15, a lower partition plate 16, and an intermediate partition plate each having a fine pattern. Since it is integrated as 19, the intermediate partition plate can be omitted, and it is not necessary to consider the method of fixing the flow path corrugated plate which was required in the separate structure in the fourth embodiment, so that the number of parts and the number of steps are reduced. That is, there is a merit of cost reduction. Furthermore, when using a catalyst supporting method capable of selectively coating a region, for example, a sol-gel method, a dip coating method, or a sputtering film forming method, or using a flow path corrugated sheet and a casing as in the fourth embodiment as separate materials. This is a structure suitable for a case where there is little advantage in performing the operation.
[0234]
13, 15, and 16, the channel structure is shown assuming a horizontal state. Therefore, for convenience, the upper and lower sides are distinguished from each other. However, this small reactor may be used upside down. Alternatively, it can be used in a vertically installed state.
[0235]
The channel structure described with reference to FIGS. 13, 15, and 16 is obtained by stacking two header plates 3 with an intermediate partition plate 19 interposed therebetween. It is possible to configure a channel structure having the function of a reactor by laminating the intermediate partition plate 19 therebetween. For example, the function of a reactor can be imparted by supporting a plurality of types of catalysts in a plurality of microchannels of the channel structure shown in FIG. For example, in order from the top, a certain catalyst A, the same catalyst A, and another catalyst B may be supported as a set as one set or repeatedly, or one catalyst A, another catalyst B, and another The catalyst C can be loaded as one set or repeatedly.
[0236]
The substrate material of various members used in the present invention is not particularly limited, and examples thereof include various metal materials such as SUS, Ni, Al, Cu, and alloys thereof.
[0237]
As described above, the shape of the concavo-convex portions of the

fine patterns

2a, 17, 18, and 20 is not limited to a triangular waveform, but may be rectangular, embossed, or other regular or irregular shapes. Further, these fine patterns are not limited to the shape of the concavo-convex portion, and may be only the convex shape or only the concave shape.
[0238]
FIGS. 17A and 17B show examples of the partition plate in the case where the uneven shape is embossed.
[0239]
FIG. 17A shows an example in which an embossed fine pattern is formed on the upper partition plate 15 and the lower partition plate 16 used in the channel structure shown in FIG. However, such an emboss 21 can be applied to the fine pattern of the upper partition plate 15, the lower partition plate 16, and the intermediate partition plate 19 in each of the above embodiments. 3 is a header plate.
[0240]
FIG. 17B shows three channel structures shown in FIG. 13 using the upper partition plate 15, the two intermediate partition plates 19, and the lower partition plate 16 in which a fine pattern of concavo-convex shape is formed by embossing 21. The example expanded to the structure which has the header plate 3 is shown. The upper partition plate 15, the intermediate partition plates 19, and the lower partition plate 16 are each formed with an embossed fine pattern of embossed shapes. Between the upper partition plate 15 and the upper intermediate partition plate 19, between the upper intermediate partition plate 19 and the lower intermediate partition plate 19, and between the lower intermediate partition plate 19 and the lower partition plate 16. Each has a header plate 3 disposed therein. Reference numeral 5 denotes a header through-hole of the header plate 3.
[0241]
In the above description, the

catalysts

8 and 13 are of different types, but may be of the same type. Also, three or more types of catalysts can be used.
[0242]
The material of the

catalysts

8 and 13 may be appropriately selected according to the

fluids

7 and 12 such as the gas to be treated, and examples thereof include Pt, Ru, Pd, Ni, and Cu.
[0243]
As a carrier for the powder of these catalyst materials, for example, ZrO ₂ , Al ₂ O ₃ , SiO ₃ , ZnO, CeO ₃ And the like.
[0244]
Here, in each of the above embodiments, the dimensions of the fine pattern (height and pitch in the case of a triangular wave shape) are, for example, several hundred μm. Is preferably between the upper limit required for the pressure reduction and the lower limit required for the suppression of the pressure loss, for example, a value in the range of 0.1 mm to 1.4 mm. Hereinafter, setting of the numerical value of the representative dimension of the fine pattern will be described.
[0245]
The purpose of the heat exchanger structure using the minute flow path is to realize a compact heat exchanger that has a high heat exchange efficiency and satisfies a required heat exchange amount. In order to improve the heat exchange efficiency, it is desirable to increase the heat transfer coefficient. For this purpose, the hydraulic diameter (that is, the value obtained by dividing four times the cross-sectional area of the flow path by the wet length). , Equal to the inner diameter of the flow path). However, in this case, since the pressure loss of the fluid increases at the same time, it is necessary to use a value in an appropriate range as the inner diameter of the flow path in actual operation. In addition, in order to secure the required amount of exchange heat while maintaining the compactness of the device, it is necessary to control the flow rate of the fluid. For this reason, the changes in the pressure loss and the heat transfer coefficient with respect to the fluid flow velocity v and the flow path pipe inner diameter d are quantitatively evaluated, and an appropriate numerical range for actually designing the channel structure is shown below.
[0246]
Assuming a tubular flow path as a calculation condition, the heat transfer area A and the flow path pipe length L are fixed, and the flow velocity v and the flow path pipe inner diameter d are independent parameters. Further, the number n of flow paths is n = A / πdL, and the flow rate W is W = n · (π / 4) d ² ・ We assume v. The pressure loss ΔP is calculated by the following equations (1) and (2), and the heat transfer coefficient h is calculated by the following equations (3) and (4). However, equations (1) and (3) are calculation equations for laminar flow, and equations (2) and (4) are calculation equations for turbulent flow.
[0247]
(Equation 1)

[0248]
FIGS. 18 and 19 show the results of calculating the pressure loss ΔP (unit Pa) by using these formulas and using the flow velocity v and the flow path pipe inner diameter d as parameters. FIG. 18 shows the result when air is used as the medium (fluid), and FIG. 19 shows the result when water is used as the medium (fluid). In any case, the pressure loss ΔP tends to increase with an increase in the flow velocity v or a decrease in the flow path pipe inner diameter d. This is because, under the above calculation conditions, laminar flow occurs in a region where the flow pipe inner diameter d is 1 mm or less, and the pressure loss ΔP follows the equation (1). This is because d is increased or decreased in two dimensions.
[0249]
On the other hand, the heat transfer coefficient h does not change with respect to the flow velocity v in a laminar flow, but tends to increase with a decrease in the flow path pipe inner diameter d. This is because the heat transfer coefficient h follows the equation (3) in a laminar flow, so that the heat transfer coefficient h is constant with respect to the flow velocity v and increases or decreases in a −1 dimension with respect to the inner diameter d of the flow pipe.
[0250]
FIG. 20 shows changes in pressure loss and heat transfer coefficient when the air flow rate is 10.0 m / sec. Based on the calculation results shown in FIG. 20, an appropriate range of the inner diameter of the flow path pipe will be described.
[0251]
When a turbo blower without a compressor is applied as a fluid supply system to a channel structure, it is necessary to reduce the pressure loss to 0.2 atm or less for this application. In this case, it is calculated from the equation (1) that the inner diameter of the flow pipe needs to be 0.121 mm or more when the flow velocity is 10.0 m / sec. On the other hand, a conventional heat exchanger (d to 3 mm, heat transfer coefficient 50 W / m ² K), a heat transfer coefficient of 50 W / m ² It is desirably K or more. It is calculated from equation (3) that this can be obtained when the flow velocity v is 10.0 m / sec and the flow path pipe inner diameter d is 1.764 mm or less. In FIG. 20, a region sandwiched between two vertical dotted lines 201 and 202 is a proper region of the flow path tube inner diameter.
[0252]
FIG. 21 shows changes in pressure loss and heat transfer coefficient when the flow rate of water is 1.0 m / sec. As in the case of air, considering the appropriate range of the inner diameter of the flow pipe, it is assumed that a turbo pump is applied as a fluid supply system to the channel structure, and if the pressure loss is suppressed to about 10 atm, the flow velocity is 1. In the case of 0 m / sec, it is calculated that the inner diameter of the flow path tube needs to be 0.040 mm or more. On the other hand, compared with the conventional heat exchanger, the heat transfer coefficient is 1500 W / m ² Assuming that K or more is realized, it is necessary to suppress the inner diameter d of the flow pipe to 1.369 mm or less. In FIG. 21, a region sandwiched between two vertical dotted lines 203 and 204 is a proper region of the inner diameter of the flow pipe.
[0253]
Table 1 and FIG. 22 show the appropriate range of the flow path inner diameter calculated for each fluid flow rate based on the above conditions (see upper limits 205 and 207 and lower limits 206 and 208). Thereby, the area of 0.10 mm to 1.40 mm can be given as an appropriate range of the representative dimension of the microchannel inner diameter. Further, preferably, a range of 0.1 mm to 0.5 mm can be set as a representative dimension of the microchannel. In the case where the fine pattern is a flow path having a shape other than a tubular shape such as a triangular wave shape, each of the above numerical values (a range of 0.10 mm to 1.40 mm) is set as an appropriate range of the hydraulic diameter calculated for each flow path. , Preferably in the range of 0.1 mm to 0.5 mm).
[0254]
[Table 1]

[0255]
Next, in each of the above-described embodiments, only one header through-hole is formed in the header plate, but a plurality of header through-holes 301 (four in FIG. A plurality of channel structures may be simultaneously formed in parallel by forming one or more such header plates 300 in a plane. For example, the channel corrugated plate 2 is fitted into at least two header through holes in the same manner as in the first to fourth embodiments, and laminated, thereby simultaneously configuring at least two channel structures in parallel. Alternatively, a fine pattern is formed in at least two places on the upper partition plate, the intermediate partition plate, and the lower partition plate in accordance with the positions of the plurality of header through holes 301 of the header plate 300, and By similarly stacking, at least two channel structures are simultaneously configured in parallel. As an example of use when a plurality of channel structures are configured in parallel, for example, one fluid 7 is supplied to each channel structure in parallel as indicated by an arrow 302 in FIG. The other fluid 12 is supplied to each channel structure in parallel. In FIG. 23, the header through-holes 301 of the upper and lower two header plates 3 are, for example, rhombic, and the orientation of the header through-holes 301 is reversed between the upper and lower two header plates 3.
[0256]
Furthermore, in each of the above embodiments, the flow path corrugations, the header plates, the sealing plates, the various partition plates, between the various partition plates, between the various partition plates, to produce a member having the same flow path shape, front and back reverse and It is used by rotating it 90 degrees. For example, the same channel configuration plate is used for forming a plurality of channels. However, it is not always necessary to reuse members having the same flow path shape, and the shape of the flow path such as the cross-sectional shape may be changed according to the required flow rate of the fluid flowing through each flow path. For example, the flow path shape of each flow path configuration plate can be changed so that the flow path size on the heat generating side is increased and the flow path size on the heat receiving side is reduced.
[0257]
【The invention's effect】
A first invention provides a header plate having a header through-hole having a function of supplying and discharging a fluid, and a flow path wave having a concave, convex, or uneven fine pattern, and being fitted into the header through-hole. A plate, a first sealing plate disposed above the channel corrugated plate and defining a region through which fluid flows, and a second sealing plate disposed below the channel corrugated plate and defining a region through which fluid flows. Since the sealing plate and the sealing plate are laminated and the minute flow path is formed between the layers, a small heat exchanger is realized. In particular, since the flow path corrugated plate is fitted into the through hole for the header plate, the micro flow path itself and a channel structure having a micro flow path and having a heat exchange function can be easily and easily realized at low cost.
[0258]
According to a second aspect of the present invention, there is provided a header plate having a header through-hole having a function of supplying and discharging a fluid, and a flow path wave having a concave, convex, or concave-convex fine pattern, and being fitted into the header through-hole. A plurality of flow path units made of plates are stacked with an intermediate partition plate separating a region in which a fluid flows therebetween being stacked therebetween, and a stacked body in which the plurality of flow path units are stacked, and disposed on the stacked body A first partition plate for partitioning a region through which the fluid flows, a first sealing plate disposed above the first partition plate, and a region through which the fluid flows, which is disposed below the laminate. Since a second partitioning plate for partitioning and a second sealing plate disposed below the second partitioning plate are laminated and a plurality of microchannels are formed between layers, a heat exchange function is provided. Is realized. In particular, since the flow path corrugated plate is fitted into the through hole for the header plate, the micro flow path itself and a channel structure having a micro flow path and having a heat exchange function can be easily and easily realized at low cost.
[0259]
According to a third aspect of the present invention, in the first or second aspect, since the flow path corrugated sheet is formed by plastic working, a channel structure having a low manufacturing cost is realized.
[0260]
In a fourth aspect based on the first or second aspect, a plurality of the header through holes are formed in the header plate side by side, and the flow path corrugated plate is fitted into each header through hole. Channel structures are simultaneously realized.
[0261]
According to a fifth aspect of the present invention, in the first aspect, a catalyst is carried in the microchannel, so that a channel structure having a reaction function is realized. In addition, there is an advantage that a complicated process such as a masking process for a portion which does not need to carry a catalyst is required, and a catalyst coating can be performed with a single channel corrugated sheet. In addition, by using a separate system for the catalyst supporting process and the laminating process, it is possible to realize batch production of a flow path corrugated sheet supporting the catalyst, responsiveness to a change in required specifications of the catalyst, and ease of replacement of the catalyst. . Further, there is the convenience that any channel corrugated sheet can be easily changed to another material depending on the application.
[0262]
According to a sixth aspect of the present invention, in the first aspect, the flow path corrugated sheet is sandwiched between the first partition plate and the second partition plate without being joined to each other. Replacement is easy.
[0263]
In a seventh aspect based on the second aspect, one or more types of catalysts are carried in the plurality of microchannels, so that a channel structure having a reaction function is realized. In addition, the replacement of the flow path corrugated plate allows immediate response to a change in required catalyst specifications, and facilitates catalyst replacement. Further, there is an advantage that the catalyst coating can be performed by the channel corrugated sheet alone without requiring a complicated process such as a masking process on a portion that does not need to carry the catalyst. In addition, by using a separate system for the step of carrying the catalyst and the laminating step, batch production of a flow path corrugated sheet carrying the catalyst can be realized. Further, there is the convenience that any channel corrugated sheet can be easily changed to another material depending on the application.
[0264]
In an eighth aspect based on the second aspect, the flow path corrugated sheet of each flow path unit is not joined to the first partition plate, the intermediate partition plate, and the second partition plate, and the first flow path corrugated sheet is provided in the first partition plate. Since it is sandwiched between the partition plate and the intermediate partition plate, between the intermediate partition plates, and between the intermediate partition plate and the second partition plate, the manufacturing process is simplified, and the flow path wave is reduced. Easy replacement of boards.
[0265]
In a ninth aspect based on the second aspect, since the first sealing plate also serves as the first partition plate, the number of components is reduced, and the manufacturing cost is reduced.
[0266]
In a tenth aspect based on the second aspect, since the second sealing plate also functions as the second partition plate, the number of components is reduced, and the manufacturing cost is reduced.
[0267]
An eleventh invention is directed to a step of producing a flow path corrugated sheet having a fine pattern of a concave shape, a convex shape, or an uneven shape by plastic working, and a header having at least one header through hole having a function of supplying and discharging a fluid. A first partition plate that fits the flow channel corrugated plate into the header through-hole of the plate and partitions a region where a fluid flows on the flow channel corrugated plate, the header plate, and a portion below the flow channel corrugated plate. And a step of laminating a second partition plate for partitioning a region through which a fluid flows, and manufacturing a channel structure having fine channels between layers. Therefore, a channel structure having fine channels can be easily, easily, and inexpensively manufactured. Can be manufactured.
[0268]
According to a twelfth aspect, in the eleventh aspect, a catalyst is supported on the fine pattern portion before or after the plastic working of the flow path corrugated sheet, so that a channel structure having a reaction function can be easily and inexpensively manufactured. it can. In particular, there is an advantage that the catalyst coating can be performed by the channel corrugated sheet alone without requiring a complicated process such as a masking process on a portion that does not need to carry the catalyst. In addition, by using a separate system for the catalyst supporting process and the laminating process, it is possible to realize batch production of a flow path corrugated sheet supporting the catalyst, responsiveness to a change in required specifications of the catalyst, and ease of replacement of the catalyst. . Further, there is the convenience that any channel corrugated sheet can be easily changed to another material depending on the application.
[0269]
A thirteenth invention is directed to a step of producing a flow path corrugated sheet having a fine pattern of a concave shape, a convex shape, or an uneven shape by plastic working, and a header having at least one header through-hole having a function of supplying and discharging a fluid. The flow path corrugated plate is inserted into the header through-hole of the plate to form a flow path unit, and the plurality of fluid units are stacked with an intermediate partition plate for partitioning a region in which fluid flows, and the plurality of fluid units are stacked. A stacked body that is stacked, a first partition plate that is disposed on the laminate and partitions a flow of fluid, and a first sealing plate that is disposed on the first partition plate; Producing a structure in which a second partition plate that is arranged below the laminate and divides a flow of fluid and a second sealing plate that is arranged below the second partition plate are laminated. Process, and multiple layers of micro Since the production of the channel structure having a road, conveniently facilitate channel structure having a micro channel of a plurality of systems, it can be manufactured at low cost.
[0270]
According to a fourteenth aspect, in the thirteenth aspect, one or more types of catalysts are supported on each fine pattern portion before or after the plastic working of the flow path corrugated sheet, so that a reaction function and a plurality of systems of fine flow paths are provided. It is possible to easily and inexpensively manufacture a channel structure having the same. In particular, there is an advantage that the catalyst coating can be performed by the channel corrugated sheet alone without requiring a complicated process such as a masking process on a portion that does not need to carry the catalyst. In addition, by using a separate system for the catalyst supporting process and the laminating process, it is possible to realize batch production of a flow path corrugated sheet supporting the catalyst, responsiveness to a change in required specifications of the catalyst, and ease of replacement of the catalyst. . Further, there is the convenience that any channel corrugated sheet can be easily changed to another material depending on the application.
[0271]
A fifteenth invention is directed to a header having a fine pattern of a concave shape, a convex shape, or a concave-convex shape, a first partition plate for partitioning a region through which a fluid flows, and a header through-hole having a function of supplying and discharging the fluid. Since a plate and a second partition plate having a concave, convex, or irregular fine pattern and defining an area through which a fluid flows are laminated, and a fine channel is formed between the layers, a heat exchange function is provided. Is realized. In particular, since the first partition plate and the second partition plate have fine patterns, the number of components of the structural member is reduced, and the manufacturing cost is reduced.
[0272]
In a sixteenth aspect based on the fifteenth aspect, since the fine pattern portions of the first partition plate and the second partition plate are formed by plastic working, an inexpensive channel structure is realized.
[0273]
In a seventeenth aspect based on the fifteenth aspect, a plurality of the header through holes are formed in the header plate side by side, and a plurality of fine pattern portions are formed in the first partition board and the second partition board, respectively. Therefore, a plurality of channel structures are simultaneously realized.
[0274]
In an eighteenth aspect based on the fifteenth aspect, a catalyst is supported in the microchannel, so that a channel structure having a reaction function can be realized at low cost.
[0275]
A nineteenth invention is directed to an intermediate partition plate in which a header plate having a header through-hole having a function of supplying and discharging a fluid has a plurality of fine patterns of concave, convex, or irregular shapes, and partitions a region through which fluid flows. A first partition having a concave, convex, or irregular fine pattern on a laminate formed by laminating the plurality of header plates, and defining a region through which fluid flows A plate is laminated, a first sealing plate is laminated on the first partition plate, and a micro-pattern having a concave, convex, or concave-convex shape is provided below the laminate, and a fluid flowing region is provided. Are laminated, a second sealing plate is laminated below the second partition plate, and a plurality of systems of microchannels are formed between layers, so that a heat exchange function is provided. Has a channel structure To realize the value. In particular, since the partition plate has a fine pattern, the number of components of the structural member is reduced, and the manufacturing cost is reduced.
[0276]
According to a twentieth aspect, in the nineteenth aspect, since the fine pattern portions of the first partition plate, the intermediate partition plate, and the second partition plate are formed by plastic working, the channel structure has a low manufacturing cost. Is realized.
[0277]
According to a twenty-first aspect, in the nineteenth aspect, since one or more types of catalysts are carried in the plurality of microchannels, a channel structure having a reaction function is realized.
[0278]
In a twenty-second aspect based on the nineteenth aspect, a plurality of the header through-holes are formed in the header plate side by side, and a fine pattern portion is formed in the first partition plate, the intermediate partition plate, and the second partition plate. Since a plurality of channel structures are formed side by side, a plurality of channel structures are simultaneously realized.
[0279]
A twenty-third invention is directed to a first partition plate having at least one portion having a concave, convex, or irregular fine pattern, and defining a region through which a fluid flows, a concave, convex, or irregular fine pattern. A step of forming, by plastic working, a second partition plate having at least one portion having a pattern and defining a region through which the fluid flows, and having a function of supplying and discharging the fluid; Including a step of laminating a header plate having at least one through hole for a header and the second partition plate, and manufacturing a channel structure having a microchannel between layers, having a microchannel, A channel structure having a heat exchange function can be manufactured at low cost. In particular, since the first partition plate and the second partition plate have fine patterns, the number of components of the structural member is reduced, and the manufacturing cost is reduced.
[0280]
According to a twenty-fourth aspect, in the twenty-third aspect, a catalyst is supported on the fine pattern portion before or after the fine pattern is plastically worked on the first partition plate and the second partition plate. The structure can be manufactured simply and inexpensively.
[0281]
The twenty-fifth invention is directed to a first partition plate having at least one portion having a concave, convex, or irregular fine pattern, and defining a region through which a fluid flows, a concave, convex, or irregular fine pattern. A second partition plate having at least one portion having a pattern and defining a region through which a fluid flows, and having at least one portion having a fine pattern having a concave shape, a convex shape, or an uneven shape, having A step of forming an intermediate partition plate defining a flow region by plastic working, and a plurality of header plates having at least one header through-hole having a function of supplying and discharging a fluid are stacked with the intermediate partition plate interposed therebetween; And a first sealing plate disposed on the first partition plate, a first sealing plate disposed on the first partition plate, and a first sealing plate disposed on the first partition plate. Producing a structure in which the second partition plate to be disposed and a second sealing plate disposed below the second partition plate are laminated; Since the channel structure having the minute flow path is manufactured, the channel structure having the minute flow path and having the heat exchange function can be easily and inexpensively manufactured. In particular, since the partition plate has a fine pattern, the number of components of the structural member is reduced, and the manufacturing cost is reduced.
[0282]
According to a twenty-sixth aspect, in the twenty-fifth aspect, one or more types of fine patterns are formed before or after plastic processing of the fine patterns on the first partition plate, the second partition plate, and the intermediate partition wall. Thus, a channel structure having a reaction function can be easily and inexpensively manufactured.
[0283]
According to a twenty-seventh invention, in the first invention, the second invention, the fifteenth invention, or the nineteenth invention, the hydraulic diameter of the microchannel (ie, a value obtained by dividing four times the cross-sectional area of the channel by the wet length). Is a value between the upper limit value required for securing the heat exchange efficiency and the lower limit value required for suppressing the pressure loss, so that an inexpensive channel structure having good performance and having a heat exchange function or a reaction function is realized.
[0284]
According to a twenty-eighth invention, in the first invention, the second invention, the fifteenth invention, or the nineteenth invention, the hydraulic diameter of the microchannel (ie, a value obtained by dividing four times the cross-sectional area of the channel by the wet length). Is in the range of 0.1 mm to 1.4 mm, the heat exchange efficiency can be improved, the pressure loss can be suppressed, and an inexpensive channel structure having a good heat exchange function or reaction function can be realized.
[0285]
According to the twenty-ninth aspect, since the fine pattern forming the fine flow path of the channel structure is formed by plastic working, the fine pattern can be easily and inexpensively manufactured.
[Brief description of the drawings]
FIG. 1 is a diagram showing together the configurations of a channel structure having a heat exchange function according to a first embodiment of the present invention and a channel structure having a reaction function according to a second embodiment, and showing a flow of a fluid.
FIG. 2 is a diagram showing a modification of the first and second embodiments of the present invention.
FIG. 3 is a diagram showing a configuration of a channel structure having a heat exchange function according to a third embodiment of the present invention and a configuration of a channel structure having a reaction function according to a fourth embodiment, and showing a flow of a fluid.
FIG. 4 is a diagram showing a structural example of a sealing plate.
FIG. 5 is a diagram showing a modification of the third and fourth embodiments of the present invention.
FIG. 6 is a view showing a channel structure having a different fluid flow from the channel structure shown in FIG. 3;
FIG. 7 is a view showing a channel structure having a different fluid flow from the channel structure shown in FIGS. 3 and 6;
FIG. 8 is a diagram showing a configuration of a channel structure having a heat exchange function according to a fifth embodiment of the present invention and a configuration of a channel structure having a reaction function according to the sixth embodiment, and showing a flow of a fluid.
FIG. 9 is a diagram showing an example of unevenness of a fine pattern on a partition plate.
FIG. 10 is a view showing an example of arrangement of fine patterns between partition plates.
FIG. 11 is a diagram showing a modification of the fifth and sixth embodiments of the present invention.
FIG. 12 is a diagram showing together the configurations of a channel structure having a heat exchange function according to a seventh embodiment of the present invention and a channel structure having a reaction function according to the eighth embodiment, and showing the flow of a fluid.
FIG. 13 is a diagram showing another example of the structure of the sealing plate.
FIG. 14 is a view showing a modification of the seventh and eighth embodiments of the present invention.
FIG. 15 is a view showing a channel structure having a different fluid flow from the channel structure shown in FIG. 12;
FIG. 16 is a view showing a channel structure having a different fluid flow from the channel structure shown in FIGS. 13 and 15;
FIG. 17 is a diagram showing an example of a partition plate in the case where the uneven shape is embossed.
FIG. 18 is a diagram showing calculation results of pressure loss when air is used as a medium.
FIG. 19 is a diagram showing calculation results of pressure loss when water is used as a medium.
FIG. 20 is a diagram showing changes in pressure loss and heat transfer coefficient when the air flow rate is 10.0 m / sec.
FIG. 21 is a diagram showing changes in pressure loss and heat transfer coefficient when the flow rate of water is 1.0 m / sec.
FIG. 22 is a diagram showing an appropriate range of the flow path inner diameter calculated for each fluid flow velocity.
FIG. 23 is a view showing an example of a header plate in which a plurality of header through holes are formed in a plane.
[Explanation of symbols]
1 Upper sealing plate
1a, 1b Through hole
2 Corrugated sheet
2a Fine pattern
3 Header plate
3a, 3b through hole
4 Lower sealing plate
4a, 4b through hole
5 Through hole for header
6. External fluid
7 Fluid
8 Catalyst
9 Upper partition board
9a, 9b, 9c, 9d Through hole
10 Middle partition board
10a, 10b, 10c, 10d Through hole
11 Lower partition board
11a, 11b, 11c, 11d Through hole
12 fluid
13 Catalyst
14a, 14b conduit
15 Upper partition plate
15a, 15b, 15c, 15d Through hole
16 Lower partition plate
16a, 16b, 16c, 16d Through hole
17 Fine pattern
18 Fine pattern
19 Intermediate partition plate
19a, 19b, 19c, 19d Through hole
20 Fine patterns
21 Emboss
22 Part of sealing plate wider than fine pattern of partition plate
300 Header plate having a plurality of through holes for header
301 Through holes for multiple headers

Claims

A header plate having a header through-hole having a function of supplying and discharging a fluid, a flow path corrugated plate having a concave, convex, or uneven fine pattern and fitted into the header through-hole; A first sealing plate disposed on the path corrugated plate and defining a region where the fluid flows, and a second sealing plate disposed below the channel corrugated plate and defining a region where the fluid flows. A channel structure, wherein the channel structure is stacked and a microchannel is formed between layers.

A flow comprising a header plate having a header through-hole having a function of supplying and discharging a fluid, and a flow path corrugated plate having a concave, convex, or uneven fine pattern and fitted into the header through-hole. A plurality of road units are stacked with an intermediate partition plate for partitioning a region through which fluid flows, and a stacked body in which the plurality of flow path units are stacked, and the stacked units are arranged on the stacked body, and the fluid flows therethrough. A first partitioning plate for partitioning an area, a first sealing plate disposed on the first partitioning plate, and a second sealing plate disposed below the laminate and defining a fluid flowing region A channel structure, wherein a partition plate and a second sealing plate disposed below the second partition plate are stacked, and a plurality of systems of microchannels are formed between layers.

3. The channel structure according to claim 1, wherein the flow path corrugated sheet is formed by plastic working.

3. The channel structure according to claim 1, wherein a plurality of the header through holes are formed in the header plate, and the flow path corrugated plate is fitted into each of the header through holes. 4.

2. The channel structure according to claim 1, wherein a catalyst is supported on the microchannel.

2. The channel structure according to claim 1, wherein the channel corrugated sheet is sandwiched without being joined by a first partition plate and a second partition plate.

3. The channel structure according to claim 2, wherein one or more types of catalysts are carried in the plurality of microchannels.

3. The first partition plate and the intermediate partition plate according to claim 2, wherein the channel corrugated plate of each channel unit is not joined to the first partition plate, the intermediate partition plate, and the second partition plate. A channel structure sandwiched between partition plates, between the intermediate partition plates, and between the intermediate partition plate and the second partition plate.

3. The channel structure according to claim 2, wherein the first sealing plate also serves as the first partition plate.

3. The channel structure according to claim 2, wherein the second sealing plate also serves as the second partition plate.

A step of producing a flow path corrugated sheet having a fine pattern of a concave shape, a convex shape, or an uneven shape by plastic working, and a header plate having at least one through hole for a header having a function of supplying and discharging a fluid for the header A first partition plate that fits the flow path corrugated sheet into the through hole and partitions a region where the fluid flows on the flow path corrugated sheet; the header plate; and a region where the fluid flows below the flow path corrugated sheet. A step of laminating a second partitioning plate for partitioning a channel structure, and manufacturing a channel structure having fine channels between layers.

12. The method for manufacturing a channel structure according to claim 11, wherein a catalyst is supported on the fine pattern before or after the plastic working of the channel corrugated sheet.

A step of producing a flow path corrugated sheet having a fine pattern of a concave shape, a convex shape, or an uneven shape by plastic working, and a header plate having at least one through hole for a header having a function of supplying and discharging a fluid for the header The flow path corrugated plate is inserted into the through hole to form a flow path unit, and the flow path units are stacked, with a plurality of flow path units interposed therebetween, and an intermediate partition plate that partitions an area through which the fluid flows. A laminate, a first partition plate disposed on the laminate and defining an area through which a fluid flows, a first sealing plate disposed on the first partition plate, and the laminate A structure is formed in which a second partition plate that is disposed below the body and partitions a region through which a fluid flows, and a second sealing plate that is disposed below the second partition plate are stacked. Process, including multiple systems of micro flow between layers Method for manufacturing a channel structure, characterized in that to produce the channel structure having.

14. The method for manufacturing a channel structure according to claim 13, wherein one or more types of catalysts are supported on each fine pattern portion before or after the plastic working of the channel corrugated sheet.

A first partition plate having a concave, convex, or uneven fine pattern and defining a region through which a fluid flows; a header plate having a header through-hole having a function of supplying and discharging the fluid; and a concave shape. Alternatively, a channel structure having a fine pattern having a convex or concave shape, a second partition plate for partitioning a region through which a fluid flows, is laminated, and a fine channel is formed between layers.

16. The channel structure according to claim 15, wherein each fine pattern portion of the first partition plate and the second partition plate is formed by plastic working.

16. The header plate according to claim 15, wherein a plurality of the header through holes are formed in the header plate, and a plurality of fine pattern portions are formed in the first partition plate and the second partition plate, respectively. And the channel structure.

16. The channel structure according to claim 15, wherein a catalyst is supported on the microchannel.

A header plate having a header through-hole having a function of supplying and discharging a fluid has a plurality, a fine pattern of a concave shape or a convex shape or an uneven shape, and sandwiches an intermediate partition plate that partitions a region where the fluid flows. Laminated, on the laminate on which the plurality of header plates are laminated, has a fine pattern of concave or convex or irregular shape, a first partition plate that partitions the region where fluid flows is laminated, A first sealing plate is laminated on the first partition plate, and has a concave, convex, or irregular fine pattern below the laminate, and a second partition for defining an area through which fluid flows. A channel structure, wherein a partition plate is laminated, a second sealing plate is laminated below the second partition plate, and a plurality of systems of microchannels are formed between layers.

20. The channel structure according to claim 19, wherein the fine pattern portions of the first partition plate, the intermediate partition plate, and the second partition plate are formed by plastic working.

20. The channel structure according to claim 19, wherein one or more types of catalysts are carried in the plurality of microchannels.

20. The header plate according to claim 19, wherein a plurality of the header through holes are formed in the header plate, and a plurality of fine pattern portions are formed in the first partition plate, the intermediate partition plate, and the second partition plate. A channel structure characterized by being performed.

A first partition plate that has at least one portion having a concave, convex, or uneven fine pattern and partitions a region through which a fluid flows, and a portion having a concave, convex, or uneven fine pattern; A step of forming at least one second partition plate defining a region through which fluid flows by plastic working, the first partition plate, and a header through-hole having a function of supplying and discharging a fluid. A method of manufacturing a channel structure, comprising a step of stacking at least one header plate and the second partition plate, and manufacturing a channel structure having a fine channel between layers.

24. The method for manufacturing a channel structure according to claim 23, wherein a catalyst is supported on a portion of the fine pattern before or after plastic processing of the fine pattern on the first partition plate and the second partition plate.

A first partition plate having at least one portion having a concave, convex, or uneven fine pattern, and defining a region through which a fluid flows, a portion having a concave, convex, or uneven fine pattern; A second partition plate having at least one and defining a region through which the fluid flows, and at least one portion having a concave, convex, or uneven fine pattern, defining a region through which the fluid flows. A step of producing the intermediate partition plate by plastic working, a plurality of header plates having at least one header through-hole having a function of supplying and discharging a fluid, and a stacked body laminated with the intermediate partition plate interposed therebetween; A first partition plate disposed on the laminate, a first sealing plate disposed on the first partition plate, and a first sealing plate disposed under the laminate. A step of manufacturing a structure in which a second partition plate and a second sealing plate disposed below the second partition plate are laminated, and forming a plurality of systems of microchannels between layers. A method of manufacturing a channel structure, comprising manufacturing a channel structure having the same.

26. The method according to claim 25, wherein one or more types of catalysts are supported on each fine pattern portion before or after the fine pattern is plastically worked on the first partition plate, the second partition plate, and the intermediate partition. A method for manufacturing a channel structure, comprising:

20. The upper limit value and pressure required for securing heat exchange efficiency according to claim 1, 2 or 15 or 19, wherein a hydraulic diameter of the microchannel, that is, a value obtained by dividing four times a cross-sectional area of the channel by a wetting length is used. A channel structure having a value between a lower limit value required for loss control and a lower limit value.

20. The hydraulic channel according to claim 1, 2 or 15 or 19, wherein a value obtained by dividing a hydraulic diameter of the microchannel by four times a cross-sectional area of the channel by a wetting length is in a range of 0.1 mm to 1.4 mm. A channel structure, characterized in that:

A fine pattern forming method, wherein a fine pattern forming a fine channel of a channel structure is formed by plastic working.