JP2004254494A - Linear motor device, stage device, and exposure device, and method of manufacturing the linear motor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear motor device capable of suppressing the generation of temperature distribution at each position of the device, while preventing the device from getting bigger in size. <P>SOLUTION: This linear motor device 1 is provided with an coil assembly 5 formed by combining and integrating a plurality of coils 4 with a prescribed material, a first passage 21 that is formed between the recesses 10 of the coil assembly 5 and plate members 11 for making a coolant pass therethrough, a housing 6 that surrounds the coil assembly 5 to which the plate members 11 are connected, and a second passage 22 that is formed between the coil assembly 5 and the housing portion 6 for making the coolant pass therethrough. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to a linear motor device having a coil unit, a stage device, an exposure device, and a method for manufacturing a linear motor device.

  Microdevices such as semiconductor elements and liquid crystal display elements are manufactured by a so-called photolithography technique of transferring a pattern formed on a mask onto a photosensitive substrate. An exposure apparatus used in this photolithography process has a mask stage that supports a mask and moves two-dimensionally, and a substrate stage that supports a substrate and moves two-dimensionally. And transferring to the substrate via the projection optical system while sequentially moving the substrate stage. The exposure apparatus includes a batch exposure apparatus that simultaneously transfers the entire mask pattern onto the substrate, and a scanning exposure apparatus that continuously transfers the mask pattern onto the substrate while synchronously scanning the mask stage and the substrate stage. Are mainly known. In any exposure apparatus, it is required to transfer the mask pattern with the relative positions of the mask and the substrate being matched with high precision, so the positioning accuracy of the mask stage and the substrate stage is the most important performance of the exposure apparatus. One.

  Conventionally, a linear motor has been used as a drive source for the substrate stage and the mask stage (hereinafter, both are collectively referred to as a stage). However, heat generated by the linear motor affects stage positioning accuracy. For example, the heat generated by the linear motor thermally deforms surrounding members and devices, or changes the air temperature on the optical path of the optical interference type length measuring device used for detecting the position of the stage, thereby causing an error in the measured value. In recent years, the demand for high throughput and the increase in the size of the stage and the substrate supported by this stage have demanded a higher thrust of the linear motor, but the thrust of the linear motor is proportional to the drive current, Since the amount of heat generated from the coil is also proportional to the drive current, increasing the thrust increases the amount of heat generated from the coil. Therefore, it is necessary to effectively cool the coil of the linear motor and prevent the heat from the linear motor from being transmitted to the surroundings.

In order to prevent the heat generated from the linear motor from being transmitted to the surroundings, there is a conventional technique in which a coil of the linear motor is housed in a housing and a coolant is supplied into the housing. Such a linear motor has an inlet part for introducing a refrigerant into the housing and an outlet part for discharging the refrigerant inside the housing, and the refrigerant supplied from the inlet part and flowing through the inside of the housing collects heat generated from the coil, and the outlet. It is a configuration that goes out of the housing from the part. However, in such a configuration, the refrigerant supplied to the inside of the housing recovers the heat of the coil and then goes out of the housing. Therefore, the refrigerant temperature at the inlet and the refrigerant at the outlet are different, and the refrigerant temperature at the outlet is different. Is higher than the refrigerant temperature at the inlet. Due to this temperature difference, the fluctuation of the air in the apparatus occurs, and the measurement accuracy of the optical interference type length measuring device decreases, and members around the outlet portion and the like are thermally deformed (thermally expanded). Therefore, for example, Patent Literature 1 below discloses a technology related to a linear motor including a shell (inner housing) for housing a coil and an outer cover (outer housing) surrounding the shell. Cooling is supplied to the inside of the shell through the outer first main flow path and the outer second main flow path provided therebetween, and the refrigerant is cooled by flowing the refrigerant through the inner main flow path and the inner second main flow path inside the shell. The refrigerant is discharged to the outside.
JP 2001-275334 A

However, the above-described prior art has the following problems.
In the above-described conventional technique, the occurrence of a temperature difference (temperature distribution) of the refrigerant at the inlet and the outlet is reduced by forming the housing (shell or outer cover) through which the refrigerant for cooling the coil flows into a double structure. However, when the housing has a double structure, the thickness of the coil unit increases. Then, the interval between the magnets arranged opposite to each other with the coil unit therebetween is increased. When the distance between the magnets increases, the magnetic flux density decreases, and the motor efficiency decreases. Then, even with a configuration in which the influence of heat generated from the coil on the surroundings is suppressed, a large drive current is required to obtain a desired thrust due to a decrease in motor efficiency, and the amount of heat generated from the coil is eventually increased. I will. In order to obtain a more effective cooling effect, it is conceivable to increase the flow rate of the refrigerant supplied to the space. However, since the pressure in the space increases, the housing housing the coil is deformed so as to expand outward. Then, inconveniences such as contact between the housing and the magnet and plastic deformation of the housing occur. If the thickness of the housing is increased to resist the pressure, the distance between the magnets must be increased, which causes the same problem as described above.

  The present invention has been made in view of such circumstances, and a linear motor device capable of suppressing the occurrence of a temperature difference (temperature distribution) at each position of the device while suppressing an increase in the size of the device. It is an object of the present invention to provide a stage apparatus and an exposure apparatus provided with the same, and a method for manufacturing a linear motor.

In order to solve the above-described problems, the present invention employs the following configurations corresponding to FIGS. 1 to 20 shown in the embodiments.
A linear motor device (1) according to the present invention includes a coil assembly (5) in which a plurality of coils (4) are combined with a predetermined material and integrated, and a first coil assembly (5) formed through the coil assembly (5) and through which a refrigerant flows. A flow path (21), a housing part (6) surrounding the coil assembly (5), and a second flow path (22) formed between the coil assembly (5) and the housing part (6) and through which a refrigerant flows. ).
The method for manufacturing a linear motor device according to the present invention is the method for manufacturing a linear motor device (1) having a coil unit (2), wherein a plurality of coils (4) are combined and integrated with a predetermined material to form a coil assembly (5). And a second step of forming a first flow path (21) in a material portion (9) of the coil assembly (5); and a coil assembly having the first flow path (21) formed therein. And (3) forming a second flow path (22) between the coil assembly (5) and the housing part (6) by surrounding the (5) with the housing part (6). .

  According to the present invention, a plurality of coils are combined using a predetermined material such as a synthetic resin to form an integrated coil assembly, and a first flow path for flowing a coolant through the coil assembly is formed. Thus, a flow path for flowing the refrigerant can be secured without increasing the size of the coil unit. Therefore, good motor efficiency can be maintained. Then, the coil assembly in which the first flow path is formed is surrounded by a housing part, and a second flow path for circulating a coolant is formed between the coil assembly and the housing part, whereby the temperature distribution of the coil unit is reduced. Occurrence can be suppressed.

  The linear motor device (1) of the present invention is a linear motor device having a housing (6) having an internal space (40) to which a refrigerant is supplied and a coil (4) arranged in the internal space (40). A first flow path (21) provided in the internal space (40) and flowing the refrigerant, and a first flow path (21) provided in the internal space (40) and flowing the refrigerant. And two coils (22), and the coil (4) is arranged at least in part between the first channel (21) and the second channel (22). .

  ADVANTAGE OF THE INVENTION According to this invention, the 1st flow path for distribute | circulating a refrigerant | coolant inside the housing part which has the internal space to which a refrigerant | coolant is supplied, and a 2nd flow path different from this 1st flow path are provided. By arranging the coil between the first flow path and the second flow path, the coil can be efficiently placed in a state where the temperature distribution is suppressed by the refrigerant flowing through the first and second flow paths. Can be cooled. Then, by disposing the coil between the first flow path and the second flow path, the entire coil unit can be reduced in size.

A stage device (51, 52, MST, PST) of the present invention is a stage device provided with a drive device (70, 80, 90), wherein the linear motor device (1) described above is used for the drive device. It is characterized by having.
The exposure apparatus (EX) of the present invention is an exposure apparatus including a mask stage (51, MST) for holding a mask (M) and a substrate stage (52, PST) for holding a substrate (P). The stage device described above is used for at least one of the mask stage (51, MST) and the substrate stage (52, PST).

  According to the present invention, it is possible to suppress the occurrence of temperature distribution while realizing the miniaturization of the linear motor device, so that the thermal deformation of the surrounding members and devices and the optical interference type length measuring instrument can be performed without reducing the motor efficiency. In this case, it is possible to provide a stage device having high positioning accuracy and an exposure device having high exposure accuracy.

  ADVANTAGE OF THE INVENTION According to this invention, since the flow path which distribute | circulates a refrigerant can be ensured without enlarging a coil unit, while favorable motor efficiency can be maintained, generation | occurrence | production of the temperature distribution in each position of a coil unit is suppressed. As a result, it is possible to suppress the occurrence of thermal deformation of the surrounding members and devices and the occurrence of measurement errors of the optical interference type length measuring instrument, so that it is possible to provide a stage device having high positioning accuracy and an exposure device having high exposure accuracy.

Hereinafter, a linear motor device of the present invention will be described with reference to the drawings. FIG. 1 is a schematic external perspective view showing a first embodiment of the linear motor device of the present invention.
In FIG. 1, the linear motor device 1 includes a coil unit 2 and a magnet unit 3 provided corresponding to the coil unit 2. In the present embodiment, the coil unit 2 is a stator of the linear motor device 1 and the magnet unit 3 is a mover, and the coil unit (stator) 2 and the magnet unit (mover) 3 are used to move the magnet. The motor device 1 is configured.

  A coil unit 5 includes a plurality of coils 4 arranged in a predetermined direction, which are fixed by a predetermined material such as a synthetic resin to be combined and integrated (integrally molded), and a housing portion surrounding the coil assembly 5. 6 is provided. On the other hand, the magnet unit 3 includes a yoke 8 that supports a plurality of magnets 7 provided with the coil unit 2 interposed therebetween. Each of the magnets 7 is a permanent magnet, and a plurality of magnets are attached to the yoke portion 8 side by side in the predetermined direction, and magnets having different magnetic poles are alternately arranged. Further, the magnet 7 has different magnetic poles facing each other with the coil unit 2 interposed therebetween.

  Then, due to the electromagnetic interaction between the coil unit 2 and the magnet unit 3, the magnet unit 3 moves in the predetermined direction (X-axis direction) with respect to the coil unit 2. Here, in the following description, the direction in which the coils 4 are arranged and the longitudinal direction of the coil unit 2 (the moving direction of the magnet unit 3) is the X-axis direction, and the short direction of the coil unit 2 is orthogonal to the X-axis. The direction is defined as a Y-axis direction, and a direction orthogonal to the X-axis and the Y-axis is defined as a Z-axis direction. Further, directions around the X axis, Y axis, and Z axis are defined as θX, θY, and θZ directions, respectively.

  FIG. 2 is a sectional view taken along the line AA of FIG. In FIG. 2, a coil assembly 5 is a molded body formed by integrally fixing a plurality of coils 4 with a predetermined material such as a synthetic resin, and a plurality of coils 4 arranged in the X-axis direction. And a resin part (material part) 9 made of the synthetic resin. The resin portion 9 is provided so as to cover the coil 4, and is also disposed on the air core portion 4 </ b> A around the coil 4. As a material for forming the resin portion 9 constituting the coil assembly 5, for example, a polycarbonate resin, a polyphenylene sulfide resin, a polyetheretherketone resin, a polypropylene resin, a polyacetal resin, a glass fiber-filled epoxy resin, a glass fiber reinforced thermosetting plastic ( Synthetic resins such as GFRP) and carbon fiber reinforced thermosetting plastic (CFRP). These are non-conductive and non-magnetic materials.

  In the coil assembly 5, concave portions 10 are formed on both sides of the resin portion 9 in the Y-axis direction. The recess 10 is formed in a size corresponding to the coil 4 of the coil assembly 5. Due to the formation of the concave portion 10, the cross-sectional shape of the resin portion 9 (coil assembly 5) is generally D-shaped. In other words, the resin portion 9 has a configuration in which portions on both sides in the Y-axis direction corresponding to the size of the coil 4 are thinned. In the following description, a portion of the resin portion 9 in which the recess 10 is formed and thinned is appropriately referred to as a thin portion 9A, and portions other than the thin portion 9A are appropriately referred to as a thick portion 9B. The coil 4 is arranged substantially corresponding to the thin portion 9A, and the thick portion 9B is formed at each of the upper and lower ends of the resin portion 9.

  The coil unit 2 has a covering member 11 that covers each of the concave portions 10 formed on both sides of the resin portion 9 in the Y-axis direction. The covering member 11 is constituted by a plate member. The plate member (covering member) 11 is also formed of, for example, a synthetic resin. As a material for forming the plate member 11, for example, polycarbonate resin, polyphenylene sulfide resin, polyether ether ketone resin, polypropylene resin, polyacetal resin, glass fiber-filled epoxy resin, glass fiber reinforced thermosetting plastic (GFRP), carbon fiber reinforced Synthetic resins such as thermosetting plastics (CFRP) are exemplified. Alternatively, a non-conductive and non-magnetic material such as a ceramic material may be used. Further, a sheet member made of these materials may be formed, and the plate member 11 may be formed by a laminate in which a plurality of the sheet members are stacked. When a laminate is formed from a synthetic resin, for example, a co-extrusion processing method can be used. The material for forming the plate member 11 may be a metal such as stainless steel or aluminum. In this case, at least a portion of the plate member 11 facing the magnet 7 of the magnet unit 3 is preferably made of a non-conductive and non-magnetic material such as a synthetic resin or a ceramic material. By doing so, it is possible to suppress the generation of eddy current even when the coil unit 2 moves in the magnetic flux, and to suppress the influence on the operation of the linear motor, such as suppressing the viscous resistance when driving the linear motor. .

  Each of the upper and lower ends of the plate member 11 that covers the recess 10 is connected to the thick portion 9B of the resin portion 9. The plate member 11 and the thick portion 9B are fixed so as to be in close contact with each other. Further, a first flow path 21 through which a refrigerant described later flows is formed between the thin portion 9A of the resin portion 9 and each of the plate members 11. In the present embodiment, one first flow path 21 is provided on each of both sides of the coil 4 in the Y-axis direction, and the first flow paths 21 and 21 provided on both sides of the coil 4 are independent of each other. It is a flow path that has been set.

  The coil assembly 5 to which the plate member 11 is connected is surrounded by the housing portion 6, and a second flow path 22 for flowing a refrigerant between the coil assembly 5 to which the plate member 11 is connected and the housing portion 6. Is formed. The second flow path 22 is formed in a “mouth” shape in cross section. As a material for forming the housing part 6, for example, polycarbonate resin, polyphenylene sulfide resin, polyether ether ketone resin, polypropylene resin, polyacetal resin, glass fiber-filled epoxy resin, glass fiber reinforced thermosetting plastic (GFRP), carbon fiber reinforced Examples thereof include a synthetic resin such as a thermosetting plastic (CFRP) or a non-conductive and non-magnetic material such as a ceramic material. Alternatively, a housing member 6 may be formed by forming a sheet member made of these materials and stacking a plurality of the sheet members. When a laminate is formed from a synthetic resin, for example, a co-extrusion processing method can be used. The material for forming the housing portion 6 may be a metal such as stainless steel or aluminum. In this case, at least a portion of the housing unit 6 facing the magnet 7 of the magnet unit 3 is preferably made of a non-conductive and non-magnetic material such as a synthetic resin or a ceramic material. By doing so, it is possible to suppress the generation of eddy current even when the coil unit 2 moves in the magnetic flux, and to suppress the influence on the operation of the linear motor, such as suppressing the viscous resistance when driving the linear motor. .

  The plate member 11 and the thick portion 9B of the resin portion 9 are fixed by a plurality of screws 12 as fixing members. In the present embodiment, the screws 12 are provided on both sides of the thick portion 9B at the upper and lower ends. A hole 13 through which the screw 12 can be inserted is formed on a side surface of the housing portion 6, and a female screw hole corresponding to the screw 12 is formed in each of the plate member 11 and the thick portion 9 </ b> B. The plate member 11 is fixed to the resin part 9 (thick part 9B) by screwing the tip part thereof into the female screw hole formed in the plate member 11 and the thick part 9B via 13. Alternatively, the hole 13 of the housing part 6 is a female screw hole, the screw 12 is screwed into the female screw hole 13 from the outside of the housing part 6, and the tip of the screw 12 abuts on the plate member 11 to press against the thick part 9B. Thus, the plate member 11 may be fixed to the resin portion 9 (thick portion 9B). Here, the hole 13 is provided with a sealing member such as an O-ring, a sealing adhesive, or a packing in order to prevent the refrigerant flowing through the second flow path 22 from leaking to the outside of the housing 6. Also, at the connection between the resin portion 9 and the plate member 11, the refrigerant flowing through the first flow path 21 leaks to the outside and the refrigerant flowing through the second flow path 22 flows to the first flow path 21. Is provided with a seal member for preventing infiltration of the gas.

  Then, the plate member 11 and the resin portion 9 are fixed by the screw 12 to form the first flow path 21, and the coil assembly 5 to which the plate member 11 is connected and the housing portion 6 are positioned and fixed to form the coil assembly. The clearance between 5 (plate member 11) and the housing part 6 is also ensured, and the second flow path 22 is formed. In the present embodiment, the thick portion 9B and the plate member 11 are fixed by the screw 12, but the first channel 21 is formed by bonding the thick portion 9B and the plate member 11 with an adhesive. You may make it. In this case, the second flow path 22 can be formed by arranging a support member for securing clearance between the coil assembly 5 (plate member 11) and the housing portion 6.

  FIG. 3 is a sectional view taken along line BB of FIG. FIG. 3 shows only the coil unit 2. As shown in FIG. 3, the coil unit 2 is formed between the concave portion 10 of the coil assembly 5 and the plate member 11 and has a first flow path 21 through which a refrigerant flows, the coil assembly 5 and the coil assembly 5. It has a second flow path 22 formed between the connected plate member 11 and the housing part 6 and through which the refrigerant flows. Then, as shown in FIG. 3, the first flow path 21 and the second flow path 22 are in parallel. Each of the coil 4, the first flow path 21, and the second flow path 22 is provided in the internal space 40 of the housing 6.

  The coil unit 2 is connected to the first flow path 21, and is connected to the inlet 23 for introducing the refrigerant into the internal space 40 of the housing part 6 including the first flow path 21, and to the second flow path 22. An outlet part 24 for discharging the refrigerant in the internal space 40 of the housing part 6 including the second flow path 22 is provided. The refrigerant is supplied from the refrigerant supply device 100. As shown in FIGS. 1 and 3, in the present embodiment, each of the inlet portion 23 and the outlet portion 24 is provided at one longitudinal end portion (−X side end portion) of the coil unit 2 (housing portion 6). . The inlet portion 23 includes a tube member 23A provided to penetrate one end of the housing portion 6 and a connecting member 25 provided at one end of the coil unit 2 and connecting the two plate members 11, 11. It is configured. On the other hand, the outlet portion 24 is configured to include a tube member 24 </ b> A provided to penetrate one end of the housing portion 6.

  The connecting member 25 connects one end (the −X side end) of each of the two plate members 11, 11, and the first member except for a connecting portion with the pipe member 23 </ b> A constituting the inlet 23. One end of the flow path 21 is closed. On the other hand, the other ends (+ X side ends) of the plate members 11 and 11 are connected by a connection member 26 having an opening 26A. The other end of the first flow path 21 is opened by an opening 26A.

  The other end of the first flow path 21 and the other end of the second flow path 22 are continuous via the opening 26A of the connection member 26. Therefore, the refrigerant flowing into one end of the first flow path 21 from the inlet 23 flows through the first flow path 21 in the + X direction, and then opens at the other end of the first flow path 21. It flows into the other end of the second flow path 22 via 26A. The refrigerant flowing from the first flow path 21 to the other end of the second flow path 22 flows through the second flow path 22 in the −X direction, and is provided at one end of the second flow path 22. It flows out of the housing part 6 from the outlet part 24.

  The supply amount of the refrigerant (the supply amount per unit time) to the internal space 40 (the first flow path 21) by the refrigerant supply device 100 is controlled by the control device CONT. Further, the linear motor device 1 includes a temperature adjusting device 101 that adjusts the refrigerant flowing from the inlet 23 into the internal space 40 to a predetermined temperature. The temperature control device 101 is controlled by the control device CONT. The control device CONT controls the temperature of the refrigerant flowing into the internal space 40 using the temperature control device 101.

  Here, the refrigerant used is preferably a liquid or gas and particularly inert, and is preferably a hydrofluoroether (for example, “Novec HFE”: manufactured by Sumitomo 3M Limited) or a fluorine-based inert liquid (for example, “Fluorinert”). ": Manufactured by Sumitomo 3M Limited).

  Next, an operation when the refrigerant flows through the first flow path 21 and the second flow path 22 of the coil unit 2 will be described. The control device CONT drives the refrigerant supply device 100 to supply the refrigerant to the inlet 23. Here, the refrigerant supplied to the inlet 23 is adjusted to a predetermined temperature by the temperature adjusting device 101. It is desirable to control the temperature of the refrigerant in accordance with the environmental temperature in which the linear motor device 1 is installed. Alternatively, it can be performed based on at least one of the temperature of the inlet 23 and the temperature of the outlet 24. The refrigerant supplied to the inlet 23 flows through the first flow path 21 formed in the coil assembly 5 in the + X direction. The refrigerant flowing through the first flow path 21 flows toward the other end of the coil unit 2 while recovering the heat of the coil 4. Here, since the refrigerant flowing through the first flow path 21 flows while recovering the heat of the coil 4 through the resin portion 9, the temperature (temperature distribution) of the refrigerant in the X-axis direction of the first flow path 21 is As shown in the schematic diagram of FIG. 4A, the first flow path 21 gradually rises from one end to the other end. Further, as the temperature of the refrigerant increases, the surface temperature of the plate member 11 gradually increases from one end to the other end.

  The refrigerant flowing in the first flow path 21 in the + X direction is supplied to the other end of the second flow path 22 via the opening 26A. The refrigerant supplied to the other end of the second flow path 22 flows through the second flow path 22 toward one end of the coil unit 2. Here, since the refrigerant flowing through the second flow path 22 flows while recovering the heat of the plate member 11, the temperature (temperature distribution) of the refrigerant in the X-axis direction of the second flow path 22 is as shown in FIG. 2), the second flow path 22 gradually rises from the other end to the one end. The refrigerant flowing through the second flow path 22 in the −X direction is discharged from the outlet 24 to the outside of the housing 6, and is collected by, for example, the refrigerant supply device 100.

  In the present embodiment, at one end in the longitudinal direction of the coil unit 2, an inlet 23 and an outlet 24 that are respectively connected to the first flow path 21 and the second flow path 22 are provided. 21 and the other end of the second flow path 22 are connected via an opening 26A, and the first flow path 21 and the second flow path 22 are This is a configuration that is folded back via 26A. Then, the temperature distribution of the refrigerant flowing through the first flow path 21 gradually increases from one end in the longitudinal direction of the coil unit 2 to the other end as shown in FIG. As shown in FIG. 4B, the temperature distribution of the refrigerant flowing through the flow path 22 gradually increases from the other end in the longitudinal direction of the coil unit 2 toward one end. Therefore, the temperature distribution in the X-axis direction on the surface of the housing part 6 is substantially uniform as shown in FIG. Therefore, occurrence of a temperature difference between one end and the other end of the surface of the coil unit 2 (housing section 6) can be suppressed. Furthermore, since the second flow path 22 is formed outside the first flow path 21 through which the refrigerant flows, the heat generated by the coil 4 is transmitted to the surface of the housing 6. Can be effectively suppressed. The coil assembly 5 is formed by integrally fixing the plurality of coils 4 using a synthetic resin or the like, and the first flow path 21 for flowing the refrigerant through the coil assembly 5 is formed. It is possible to secure a flow path through which the refrigerant flows without increasing the size of the unit 2. Therefore, good motor efficiency can be maintained.

  Further, in the present embodiment, the size of the concave portion 10 for forming the first flow path 21 is set to correspond to the size of the coil 4, so that the first flow path 21 flows through the first flow path 21. The coil 4 can be effectively cooled by the refrigerant.

FIG. 5 is a diagram illustrating a second embodiment of the coil unit 2. Here, in the following description, the same or equivalent components as those of the above-described first embodiment are denoted by the same reference numerals, and the description thereof will be simplified or omitted.
In the coil unit 2 shown in FIG. 5, an inlet 23 for introducing the refrigerant is connected to the second flow path 22, and an outlet 24 for discharging the refrigerant is connected to the first flow path 21. The other end of the first flow path 21 and the other end of the second flow path 22 are continuous via the opening 26A of the connection member 26. Therefore, the refrigerant flowing into one end of the second flow path 22 from the inlet 23 flows through the second flow path 22 in the + X direction, and then opens at the other end of the second flow path 22. It flows into the other end of the first flow path 21 via 26A. The refrigerant flowing from the second flow path 22 to the other end of the first flow path 21 flows through the first flow path 21 in the −X direction, and is provided at one end of the first flow path 21. It flows out of the housing part 6 from the outlet part 24.

  As described above, in the coil unit 2 according to the second embodiment, the second flow path 22 disposed outside the first and second flow paths 21 and 22 forming the double flow path. In this configuration, the refrigerant is charged and discharged from the first flow path 21 disposed inside. In other words, the refrigerant whose temperature has been adjusted by the temperature adjustment device 101 flows into the second flow path 22 that is the outer flow path, and the temperature-adjusted refrigerant immediately flows through the second flow path 22. Because of the configuration, the control device CONT (temperature adjusting device 101) can accurately adjust the surface temperature of the housing portion 6, and can effectively suppress heat radiation to the outside of the coil unit 2. That is, in the coil unit 2 according to the second embodiment, the controllability regarding the surface temperature (temperature gradient) of the housing portion 6 is good.

  On the other hand, as in the coil unit 2 according to the first embodiment, the refrigerant flows into the first flow path 21 disposed inside of the first and second flow paths 21 and 22 forming the double flow path. , And the temperature of the refrigerant flowing through the first flow path 21 in contact with the coil assembly 5 can be set low. In other words, the temperature of the coil unit 2 is generally controlled with reference to the surrounding environmental temperature so that the environmental temperature and the surface temperature of the housing portion 6 are substantially equal. In the case of the configuration in which the refrigerant is caused to flow first into the first flow path 21 as compared with the configuration in which the refrigerant is caused to flow first in the second flow path 22 which is the outer flow path as in the second embodiment. The control device CONT (temperature adjusting device 101) sets the temperature of the refrigerant to be supplied from the inlet 23 to a low temperature. In this case, since the coil 4 is sufficiently cooled, it is possible to suppress the occurrence of inconvenience, for example, burning of the coil 4.

  FIG. 6 is a diagram illustrating a third embodiment of the coil unit 2. The plate member 11 of the coil unit 2 shown in FIG. 6 is provided with a plurality of pressure-loss adjusting portions 14 along the flow direction of the refrigerant. Although not shown, the pressure loss adjusting section 14 is provided not only in the flow direction of the refrigerant but also in a direction intersecting with the flow direction (in FIG. 6, along the Z axis). The pressure loss adjusting section 14 is formed of a communication hole having a diameter of about 1 mm that connects the first flow path 21 and the second flow path 22. The pressure loss adjusting unit 14 has an effect of reducing a pressure loss (pressure loss) that becomes a resistance when the refrigerant flows through the coil unit 2.

  FIG. 7 is a diagram illustrating the pressure of the refrigerant with respect to the position along the refrigerant flow path of the coil unit 2, and is a diagram illustrating the operation of the pressure loss adjusting unit 14. In FIG. 7, a graph (a) shows a pressure change of the coil unit having no pressure loss adjusting unit 14, and a graph (b) shows a pressure change of the coil unit having the pressure loss adjusting unit 14. As shown in FIG. 7, in the case of a coil unit having no pressure loss adjusting unit 14, the pressure loss between the inlet 23 and the outlet 24 shown in FIG. 6 is ΔP1. On the other hand, in the coil unit having the pressure loss adjusting unit 14, the pressure loss is ΔP2 (<ΔP1). This is because a part of the refrigerant flowing through the first flow path 21 flows into the second flow path 22 before reaching the opening 26A, whereby the flow distance of the refrigerant is shortened. This is because pressure is transmitted between the flow path 21 and the second flow path 22 and the pressure difference is reduced. Since the pressure loss of the coil unit 2 can be reduced by providing the pressure loss adjusting section 14 in this manner, a small-sized and inexpensive refrigerant supply device having a low supply capacity can be used, and the pressure inside the housing section 6 can be reduced. By lowering, the expansion of the housing part 6 can be suppressed.

  If the diameter of the communication hole of the pressure loss adjusting section 14 is too small, the effect of reducing the pressure loss is reduced. If the diameter is too large, the refrigerant does not reach the opening 26A, so that the cooling capacity is reduced. Therefore, it is desirable that the diameter of the communication hole of the pressure loss adjusting unit 14 is about 1/20 to 1/100 of the cross-sectional area of the flow path, that is, the cross-sectional area of the first flow path 21. Further, the number of the pressure loss adjusting sections 14 can be appropriately changed according to the diameter. Furthermore, the arrangement of the pressure loss adjusting sections 14 may be uniformly arranged on the plate member 11, or the number of arrangements may be changed along the flow direction of the refrigerant. The diameter, number, and arrangement of the communication holes described above can be determined in association with each other according to the pressure loss and the cooling capacity. In the third embodiment, the example in which the pressure loss adjusting unit 14 is provided for the coil unit 2 of the first embodiment has been described. However, the second embodiment in which the refrigerant flows in the opposite direction to the first embodiment. It is needless to say that the present invention can also be applied to the coil unit 2 of FIG.

  FIG. 8 is a diagram showing a fourth embodiment of the coil unit 2. A characteristic part of the coil unit 2 shown in FIG. 8 is that an opening (26A) is not provided in a connection member 26 that connects the two plate members 11, 11 at the other end. That is, the first flow path 21 and the second flow path 22 are not continuous but independent from each other. In addition, an inlet 23 for introducing the refrigerant into the first flow path 21 is provided at one end of the coil unit 2, and an outlet 27 for discharging the refrigerant flowing through the first flow path 21 is provided at the other end of the coil unit 2. Is provided. Further, the other end of the coil unit 2 is provided with an inlet 28 for introducing the refrigerant into the second flow path 22, and the other end of the coil unit 2 is provided with an outlet 24 for discharging the refrigerant flowing through the second flow path 22. Is provided. The refrigerant flowing through each of the first flow path 21 and the second flow path 22 is independent of each other. Thus, the first flow path 21 and the second flow path 22 may be discontinuous. In the fourth embodiment, the temperature of the refrigerant to be supplied to the first flow path 21 and the temperature of the refrigerant to be supplied to the second flow path 22 are adjusted by independent temperature adjusting devices 101. Since the temperature of the refrigerant supplied to the first flow path 21 and the temperature of the refrigerant supplied to the second flow path 22 can be individually adjusted, the temperature of the surface of the coil unit 2 (housing section 6) can be reduced. It can be adjusted with higher accuracy. On the other hand, as shown in the first and second embodiments, by connecting the first flow path 21 and the second flow path 22, only one refrigerant supply device 100 and one temperature adjustment device 101 are installed. Because it is good, the device configuration can be simplified.

  In the coil unit 2 in each of the above embodiments, the first flow path 21 is formed on both sides in the Y-axis direction of the coil assembly 5, and is not formed on both sides (upper and lower sides) in the Z-axis direction. (See FIG. 2). That is, the upper and lower sides of the coil unit 2 do not form a double flow path, but a single flow path is formed. In this case, since the heating area of the upper and lower end surfaces of the coil 4 is small, the amount of heat generated from the upper and lower end surfaces is small, and it is considered that the influence of the heat generation on the surroundings is small. Therefore, by making only the two sides of the coil assembly 5 in the Y-axis direction a double flow path, it is possible to obtain a good cooling effect while suppressing an increase in the size of the entire coil unit 2.

  In the above embodiments, the resin portion 9 is described as being made of one material, but may be made of a plurality of materials. For example, the thin portion 9A corresponding to the coil 4 may be made of a first material, and the thick portion 9B may be made of a second material different from the first material. Alternatively, only the material arranged in the air core portion 4A of the coil 4 may be made of a material different from the material of the other portions. Here, at least a portion of the resin portion 9 facing the magnet 7 of the magnet unit 3 is preferably made of a non-conductive and non-magnetic material such as a synthetic resin or a ceramic material. By doing so, it is possible to suppress the generation of eddy current even when the coil unit 2 moves in the magnetic flux, and to suppress the influence on the operation of the linear motor, such as suppressing the viscous resistance when driving the linear motor. . In other words, for example, when the thick portion 9B is located at a position not facing the magnet 7, the thick portion 9B may be made of a conductive material such as a metal or a magnetic material.

  In each of the above-described embodiments, the resin portion 9 is disposed all around the coil 4 and the coil 4 is completely covered with the resin portion 9. However, a part of the coil 4 is exposed from the resin portion 9. May be. For example, in FIG. 2, both upper and lower ends (+ Z side or −Z side) of the coil 4 may be partially exposed from the resin portion 9.

  In each of the above embodiments, the first flow path 21 has a configuration in which one first flow path 21 is formed on each side of the coil 4 in the Y-axis direction. For example, a partition member (support member) is disposed in the recess 10 and The first channel 21 may be divided into a plurality of channels by supporting the plate member 11 with respect to the coil assembly 5 with a member. Similarly, for the second flow path 22, a partition member (supporting member) is arranged between the plate member 11 and the housing portion 6 to support the housing portion 6 with respect to the coil assembly 5 or the plate member 11. Thus, the second flow path 22 may be divided into a plurality of flow paths.

Next, an example of a procedure for manufacturing the coil unit 2 will be described with reference to FIGS.
First, a predetermined number of coils 4 are arranged as shown in FIG. Next, as shown in FIG. 9B, the plurality of coils 4 are fixed with synthetic resin and integrally molded to form a coil assembly 5 as a molded body (first step). When the coil assembly 5 is formed by fixing the plurality of coils 4 with a synthetic resin, for example, the coil 4 is put in a mold, and the synthetic resin in a molten state is injected into the mold, whereby the coil assembly 5 is formed. It can be formed. Then, as shown in FIG. 9C, a concave portion 10 is formed by performing, for example, a cutting process or a melting process on both sides of the resin portion 9 of the coil assembly 5 as the molded body. Thereby, the coil assembly 5 having the concave portion 10 is formed. Here, as shown in FIG. 9B, the concave portion 10 is formed after the substantially rectangular parallelepiped mold is formed. However, the convex portion is formed in advance on the mold, and the coil is formed on the mold. After the mold 4 is inserted, the synthetic resin in a molten state is poured into the mold, whereby the coil assembly 5 having the concave portion 10 can be formed without performing a cutting process or a melting process.

  Next, as shown in FIG. 10A, the concave portion 10 formed in the resin portion 9 of the coil assembly 5 is covered with the plate member 11. Thereby, the first flow path 21 is formed between the recess 10 and the plate member 11 (second step). At this time, each of the other ends of the plate member 11 is connected by the connection member 26. Next, as shown in FIG. 10B, each one end of the plate member 11 is connected by a connecting member 25 having a tube member 23 </ b> A constituting the inlet 23. Further, the coil assembly 5 to which the plate member 11 is connected is surrounded by a cylindrical member 6A that forms a part of the housing portion 6. Thereby, the second flow path 22 is formed between the coil assembly 5 (the plate member 11) and the housing part 6 (the tubular member 6A) (third step). Then, as shown in FIG. 10C, the other end of the tubular member 6A is covered with a cover member 29, and one end of the tubular member 6A has a tube member 24A constituting the outlet 24. Covered with 30. Here, the cover members 29 and 30 are also members that constitute a part of the housing portion 6. Thus, the coil unit 2 is manufactured.

  In the above embodiment, the first flow path 21 is formed by covering the concave portion 10 formed in the resin portion 9 of the coil assembly 5 with the plate member 11, but the first flow passage 21 is formed in the resin portion 9 itself. Can be formed. This will be described with reference to FIG. FIG. 11 is a diagram showing another embodiment when the first flow path 21 is formed. When the coil 4 is arranged in the mold, and when the synthetic resin in a molten state is charged into the mold in which the coil 4 is arranged, the spacer member 31 is previously arranged in a portion corresponding to the first flow path 21. . Thus, a mold body (coil assembly 5) having the spacer member 31 is formed as shown in FIG. Then, as shown in FIG. 11B, the first flow path 21 is formed in the resin portion 9 of the coil assembly 5 by removing the spacer member 31. By covering the coil assembly 5 with the housing 6, the coil unit 2 having the first and second flow paths 21 and 22 can be manufactured.

  In the description with reference to FIG. 11, a spacer member 31 is provided in a portion corresponding to the first flow path 21, and after forming a molded body with a synthetic resin, the spacer member 31 is removed to remove the first flow path. Although the first channel 21 is formed, for example, a wax material is disposed in place of the spacer member 31 to form a mold body, and then the wax material is melted and flown out to form the first flow path 21. It is. Alternatively, a portion corresponding to the first flow path 21 may be made of a wax material, and after connecting the plate member 11 to a mold having the wax material portion, the wax material may be melted and flown out. Further, the first flow path 21 may be formed by performing a drilling process on the resin portion 9 of the mold body.

  According to the method of forming the first flow path 21 using the spacer member 31 or the wax material, as shown in FIG. The first flow path 21 can be easily formed on both sides in the direction. Further, as shown in FIG. 12B, the first flow path 21 is formed on each side of the coil assembly 5 in the Y-axis direction by using the concave portion 10 and the plate member 11, and the spacer member 31 and the wax are formed. The first flow path 21 may be formed by combining different methods, such as forming the first flow path 21 on both sides of the coil assembly 5 in the Z-axis direction using a material.

  Further, in each of the above embodiments, the coil assembly 5 has a configuration in which the coil assembly 5 is integrally molded by the resin portion 9. The first flow path 21 may be formed by forming the portion 9B. This configuration will be described with reference to FIG.

  FIG. 13 is a view showing a fifth embodiment of the coil assembly 5. The coil assembly 5 illustrated in FIG. 13A includes the coil 4 and a frame member 35 that forms the thick portion 9B. The plurality of coils 4 arranged in a predetermined direction (X-axis direction) are sandwiched by two frame members 35 at both ends in the Z-axis direction and integrated. The coil assembly 5 has a concave portion 10 formed by the coil 4 and the frame member 35 (thick portion 9B). The recess 10 is covered with the plate member 11 to form the first flow path 21. This is the same as in the above-described embodiment described with reference to FIG.

  FIG. 13B is a sectional view of the coil assembly 5 according to the present embodiment. The frame member 35 has a U-shaped cross section, and holds the plurality of coils 4. Further, the first channel 21 is formed between the frame member 35 and the coil 4. In the present embodiment, the frame member 35 and the plate member 11 are joined by bonding, but as described in the above embodiment, both can be joined by screws. The frame member 35 is preferably made of a non-magnetic / non-conductive material such as a plastic material and a ceramic material. Thereby, even if the coil unit 2 moves in the magnetic flux, the generation of the eddy current can be suppressed, and the viscous resistance at the time of driving the linear motor can be suppressed. When the thick portion 9B is at a position where it does not move in the magnetic flux, that is, at a position where it does not face the magnet 7, the frame member 35 may be made of a conductive material such as a metal or a magnetic material. According to the coil assembly 5 of the present embodiment, even when the length of the linear motor device is increased, the coil assembly 5 can be easily manufactured as compared with the integral molding by molding, and the concave portion 10 is easily formed. be able to.

  FIG. 14 is a diagram showing a sixth embodiment of the coil unit 2. In the coil unit 2 shown in FIG. 14, a plurality of (two) coils 4 are provided side by side in the Y-axis direction, and two or more coils 4, 4 arranged in the Y-axis direction are arranged in the X-axis direction. In. As described above, a plurality of (two) coils 4 may be arranged in the Y-axis direction. The first flow path 21 is provided between the recessed part 10 and the plate member 11 provided on both sides of the resin part 9 of the coil assembly 5 in the Y-axis direction, and two first flow paths 21 are arranged in the Y-axis direction. It is also provided between the coils 4 and 4. When the first flow path 21 is formed between the two coils 4 arranged in the Y-axis direction, the method using the spacer member 31, the method using the wax material, and the drilling are also used. Any method such as a method can be used.

Next, a seventh embodiment of the coil unit 2 will be described with reference to FIGS. FIG. 15 is a sectional view of the coil unit 2 and the magnet unit 3, and FIG. 16 is an external perspective view of the coil assembly 5 of the coil unit 2.
15 and 16, the coil unit 2 has a plurality of coils 4 arranged in the X-axis direction, and the plurality of coils 4 are arranged so as to connect the air core 4A. The plurality of coils 4 arranged in the X-axis direction have V-phase coil groups 4 (V)..., U-phase coil groups 4 (U) in accordance with the waveforms (V-phase, U-phase, W-phase) of the current flowing therethrough. ), And a W-phase coil group 4 (W). Then, for each coil group, currents Iv, Iu, Iw having a predetermined phase difference are supplied from the control unit CONT, and the magnet unit 3 as the mover moves with respect to the coil unit 2 as the stator. At this time, whether a switch unit (not shown) supplies a current to each coil 4 is turned on (energized) / off (cut off).

  The coil assembly 5 is formed by integrally molding a plurality of coils 4 in which the air core portions 4A are arranged so as to be continuous with a predetermined material such as a synthetic resin. Reference numeral 21 is formed on the resin portion 9 provided on the air core portion 4A of the coil 4. When forming the first flow path 21 according to the present embodiment, as described above, a method using a spacer member 31, a method using a wax material, a method using a drilling process, and the like are adopted. Further, in the present embodiment, as shown in FIG. 15, two first flow paths 21 are provided in the air core 4A, but the number and the formation position thereof can be arbitrarily set.

  By surrounding the coil assembly 5 with the housing 6, a second flow path 22 is formed between the coil assembly 5 and the housing 6. In the present embodiment, the first flow path 21 is formed in the air core 4A of the coil 4, and the second flow path 22 is formed between the outer surface of the coil 4 and the housing part 6. That is, the coil 4 is arranged between the first flow path 21 and the second flow path 22 in the internal space 40 of the housing portion 6. The first flow path 21 and the second flow path 22 are continuous at the other end in the longitudinal direction of the coil unit 2, and the refrigerant flows with respect to the first flow path 21 formed in the air core 4 </ b> A. An inlet 23 for receiving the refrigerant is connected, and an outlet 24 for discharging the refrigerant to the second flow path 22 is connected. Of course, the inlet 23 for introducing the refrigerant may be connected to the second flow path 22, and the outlet 24 for discharging the refrigerant may be connected to the first flow path 21. Furthermore, the first flow path 21 and the second flow path 22 may not be continuous, but may be independent flow paths. In this case, the first flow path 21 and the second flow path 22 are respectively connected to an inlet for introducing the refrigerant and an outlet for discharging the refrigerant.

  Note that, in the coil assembly 5 according to the seventh embodiment, the material (synthetic resin) for fixing and integrating the plurality of coils 4 together and the material (synthetic resin) to be disposed in the air core portion 4A are the same. Or different materials.

  When forming the coil unit 2 according to the seventh embodiment, for example, a tubular member having a through hole constituting the first flow path 21 is used as a core material, and the coil 4 is wound around the core member. Is also good. That is, in the present embodiment, the plurality of coils 4 do not necessarily need to be fixedly formed of a predetermined material such as a synthetic resin and integrally molded. In this case, the outer surface of the coil 4 is not covered with the synthetic resin and is exposed to the second flow path 22.

  FIG. 17 is a view showing an example of an exposure apparatus provided with a stage device having the linear motor device of the present invention as a driving device. The exposure apparatus EX shown in FIG. 17 is a so-called scanning stepper (scanning type) that transfers a pattern provided on the mask M onto the photosensitive substrate P via the projection optical system PL while moving the mask M and the photosensitive substrate P synchronously. Exposure apparatus). Here, the “photosensitive substrate” includes a semiconductor wafer coated with a resist, and the “mask” includes a reticle on which a device pattern to be reduced and projected onto the photosensitive substrate is formed.

  In FIG. 17, an exposure apparatus EX has a mask stage MST that holds and moves a mask M, a stage device 51 having a mask surface plate 53 that supports the mask stage MST, a light source, and is supported by the mask stage MST. An illumination optical system IL that illuminates the mask M with the exposure light EL, a substrate stage PST that holds and moves the photosensitive substrate P, and a stage device 52 that includes a substrate surface plate 54 that supports the substrate stage PST; A projection optical system PL for projecting a pattern image of the mask M illuminated by EL onto a photosensitive substrate P supported on a substrate stage PST, a reaction frame 55 supporting the stage device 51 and the projection optical system PL, and an exposure device EX And a control device CONT for overall control of the operation. The reaction frame 55 is installed on a base plate 56 placed horizontally on the floor. Steps 55a and 55b projecting inward are formed on the upper and lower sides of the reaction frame 55, respectively. I have.

The illumination optical system IL is supported by a support column 57 fixed to the upper surface of the reaction frame 55. The exposure light EL emitted from the illumination optical system IL includes, for example, ultraviolet bright lines (g-line, h-line, i-line) emitted from a mercury lamp and far ultraviolet light (KrF excimer laser light (wavelength: 248 nm)). DUV light) and, ArF excimer laser light (wavelength 193 nm) and _{F 2} laser beam (wavelength 157 nm) vacuum ultraviolet light (VUV light) and the like.

  The mask surface plate 53 of the stage device 51 is substantially horizontally supported by a step portion 55a of the reaction frame 55 at each corner via a vibration isolating unit 58, and an opening 53a through which a pattern image of the mask M passes at the center thereof. It has. The mask stage MST is provided on the mask surface plate 53, and has an opening K in the center thereof, which communicates with the opening 53a of the mask surface plate 53 and through which the pattern image of the mask M passes. A plurality of air bearings 59, which are non-contact bearings, are provided on the bottom surface of the mask stage MST. The mask stage MST is levitated and supported by the air bearings 59 with respect to the mask surface plate 53 via a predetermined clearance.

  The pattern image of the mask M that has passed through the opening K and the opening 53a enters the projection optical system PL. The projection optical system PL includes a plurality of optical elements, and these optical elements are supported by a lens barrel. The projection optical system PL is a reduction system having a projection magnification of, for example, 1/4 or 1/5. Note that the projection optical system PL may be either a unity magnification system or an enlargement system. A flange portion 60 integrated with the lens barrel of the projection optical system PL is provided on the outer periphery of the lens barrel. In addition, the projection optical system PL engages the flange portion 60 with a lens barrel base 62 that is supported substantially horizontally on the step portion 55 b of the reaction frame 55 via the vibration isolating unit 61.

  The stage device 52 supports the substrate stage PST, the substrate surface plate 54 that supports the substrate stage PST so as to be movable in a two-dimensional direction along the XY plane, and the substrate stage PST that is movably supported while being guided in the X-axis direction. An X guide stage 85, an X linear motor (linear motor device) 90 provided on the X guide stage 85 and capable of moving the substrate stage PST in the X axis direction, and a pair of X linear motors capable of moving the X guide stage 85 in the Y axis direction. And Y linear motors (linear motor devices) 80, 80. The substrate stage PST has a substrate holder PH that holds the photosensitive substrate P by vacuum suction, and the photosensitive substrate P is supported by the substrate stage PST via the substrate holder PH. Further, a plurality of air bearings 87 as non-contact bearings are provided on the bottom surface of the substrate stage PST, and the substrate stage PST is supported by the air bearings 87 in a non-contact manner with respect to the substrate surface plate 54. The substrate surface plate 54 is supported substantially horizontally above the base plate 56 via a vibration isolation unit 63.

  On the + X side of the X guide stage 85, a mover 84a of an X trim motor 84 is mounted. The stator 84 b of the X trim motor 84 is provided on the reaction frame 55. Therefore, a reaction force when driving the substrate stage PST in the X-axis direction is transmitted to the base plate 56 via the X trim motor 84 and the reaction frame 55.

  An X movable mirror 101 extending along the Y-axis direction is provided on the −X side edge of the substrate stage PST, and a laser interferometer 100 is provided at a position facing the X movable mirror 101. The laser interferometer 100 irradiates laser light (detection light) to each of the reflecting surface of the X movable mirror 101 and the reference mirror 102 provided at the lower end of the barrel of the projection optical system PL, and reflects the reflected light and incident light. By measuring the relative displacement between the X movable mirror 101 and the reference mirror 102 based on interference with light, the position of the substrate stage PST, and thus the photosensitive substrate P, in the X-axis direction is detected in real time with a predetermined resolution. Similarly, a Y movable mirror 103 (not shown in FIG. 17; see FIG. 19) extending along the X-axis direction is provided at a side edge on the + Y side on the substrate stage PST. A Y laser interferometer (not shown) is provided at an opposite position, and the Y laser interferometer is a reference mirror (not shown) provided at the reflecting surface of the Y moving mirror 103 and at the lower end of the lens barrel of the projection optical system PL. And the relative displacement between the Y-moving mirror and the reference mirror is measured based on the interference between the reflected light and the incident light, so that the substrate stage PST and thus the photosensitive substrate P The position in the Y-axis direction is detected in real time with a predetermined resolution. The detection result of the laser interferometer is output to the controller CONT, and the controller CONT controls the position of the substrate stage PST via the linear motors 80 and 90 based on the detection result of the laser interferometer.

  FIG. 18 is a schematic perspective view of a stage device 51 having a mask stage MST. As shown in FIG. 18, the stage device 51 (mask stage MST) includes a mask coarse movement stage 66 provided on the mask base plate 53, a mask fine movement stage 68 provided on the mask coarse movement stage 66, and a mask. A pair of Y linear motors (linear motor devices) 70, 70 capable of moving the coarse movement stage 66 in the Y-axis direction at a predetermined stroke on the surface plate 53 and the upper surface of the upper protruding portion 53b at the center of the mask surface plate 53. A pair of Y guide portions 74, 74 for guiding the coarse movement stage 66 moving in the Y-axis direction, and the fine movement stage 68 being finely movable in the X-axis, Y-axis, and θZ directions on the coarse movement stage 66. It has a pair of X voice coil motors 67X and a pair of Y voice coil motors 67Y. In FIG. 17, the coarse movement stage 66 and the fine movement stage 68 are simplified and shown as one stage.

  The linear motor device of the present invention is applied to the Y linear motor 70. In the Y linear motor 70, a pair of stators 71 formed of a coil unit is provided so as to extend in the Y-axis direction on the mask platen 53, and a mover 72 formed of a magnet unit corresponds to the stator 71. And is fixed to the coarse movement stage 66 via a connecting member 73. Then, when the mover 72 moves with respect to the stator 71, the coarse movement stage 66 (mask stage MST) moves in the Y-axis direction.

  The fine movement stage 68 suction-holds the mask M via a vacuum chuck (not shown). A pair of Y moving mirrors 75a and 75b each formed of a corner cube are fixed to an end in the + Y direction of fine movement stage 68, and an X movement formed of a plane mirror extending in the Y-axis direction is provided at an end in the -X direction of fine movement stage 68. The mirror 76 is fixed. Then, three laser interferometers (all not shown) for irradiating the movable mirrors 75a, 75b, and 76 with a measurement beam measure the distance to each of the movable mirrors, whereby the X-axis of the mask stage MST, The positions in the Y axis and in the θZ direction are detected with high accuracy. The control device CONT drives each motor including the Y linear motor 70, the X voice coil motor 67X, and the Y voice coil motor 67Y based on the detection result of these laser interferometers, and the mask M supported on the fine movement stage 68. (Mask stage MST) position control.

  FIG. 19 is a schematic perspective view of a stage device 52 having a substrate stage PST. As shown in FIG. 19, the stage device 52 has an X guide stage 85 having a long shape along the X axis direction, and can move the substrate stage PST by a predetermined stroke in the X axis direction while being guided by the X guide stage 85. And a pair of Y linear motors 80, 80 provided at both ends in the longitudinal direction of the X guide stage 85 and capable of moving the X guide stage 85 together with the substrate stage PST in the Y axis direction. The linear motor device of the present invention is applied to at least one of the X linear motor 90 and the Y linear motor 80.

  The X linear motor 90 includes a stator 91 composed of a coil unit provided on the X guide stage 85 so as to extend in the X-axis direction, and a magnet unit provided corresponding to the stator 91 and fixed to the substrate stage PST. And a mover 92 composed of Then, as the mover 92 moves with respect to the stator 91, the substrate stage PST moves in the X-axis direction.

  Each of the Y linear motors 80 includes a mover 82 formed of a magnet unit provided at both ends in the longitudinal direction of an X guide stage 85, and a stator 81 provided corresponding to the mover 82 and formed of a coil unit. I have. Here, the stator 81 is provided on a support portion 86 (see FIG. 17) protruding from the base plate 56. In FIG. 17, the stator 81 and the mover 82 are illustrated in a simplified manner. When the mover 82 moves with respect to the stator 81, the X guide stage 85 moves in the Y-axis direction. The X guide stage 85 is also rotatable in the θZ direction by adjusting the driving of each of the Y linear motors 80. Accordingly, the substrate stage PST can be moved in the Y-axis direction and the θZ direction almost integrally with the X guide stage 85 by the Y linear motors 80.

  Although the linear motor device in each of the above embodiments has been described as a so-called moving magnet type linear motor in which the coil unit is a stator and the magnet unit is a mover, the coil unit is a mover and the magnet unit is a stator. It is also applicable to moving coil type linear motors. In this case, a coil unit as a mover is connected to the stages PST and MST, and a magnet unit as a stator is provided on the moving surface side (base) of the stages PST and MST.

  The photosensitive substrate P of the above embodiment is not limited to a semiconductor wafer for a semiconductor device, but also a glass substrate for a liquid crystal display device, a ceramic wafer for a thin film magnetic head, or an original mask or reticle used in an exposure apparatus. (Synthetic quartz, silicon wafer) and the like are applied.

  The exposure apparatus EX includes a step-and-scan type scanning exposure apparatus (scanning stepper) that scans and exposes the pattern of the mask M by synchronously moving the mask M and the photosensitive substrate P. The present invention can also be applied to a step-and-repeat type projection exposure apparatus in which the pattern of the mask M is exposed while the P and P are stationary and the photosensitive substrate P is sequentially moved stepwise.

  The type of the exposure apparatus EX is not limited to an exposure apparatus for manufacturing a semiconductor device that exposes a semiconductor device pattern to a wafer, and an exposure apparatus for manufacturing a liquid crystal display element that exposes a liquid crystal display element pattern to a square glass plate, The present invention can be widely applied to an exposure apparatus for manufacturing a thin film magnetic head, an imaging device (CCD), a mask, and the like.

In addition, as a light source of the illumination light for exposure, a bright line (g line (436 nm), h line (404.7 nm), i line (365 nm)) generated from an ultra-high pressure mercury lamp, a KrF excimer laser (248 nm), an ArF excimer laser (193 nm), not only the _{F 2} laser (157 nm) only, it is possible to use a charged particle beam such as X-ray or electron beam. For example, when an electron beam is used, a thermionic emission type lanthanum hexaborite (LaB ₆ ) or tantalum (Ta) can be used as an electron gun. Further, when an electron beam is used, a structure using a mask M may be used, or a pattern may be formed directly on a wafer without using the mask M. Alternatively, a high frequency such as a YAG laser or a semiconductor laser may be used.

As projection optical system PL, using a material which transmits far ultraviolet rays such as quartz and fluorite as the glass material when using a far ultraviolet ray such as an excimer laser, catadioptric or refractive system when using a F ₂ laser or X-ray (A reflection type mask is used as the mask M). When an electron beam is used, an electron optical system including an electron lens and a deflector may be used as the optical system. It is needless to say that the optical path through which the electron beam passes is in a vacuum state. Further, the present invention can also be applied to a proximity exposure apparatus that exposes the pattern of the mask M by bringing the mask M into close contact with the substrate P without using the projection optical system PL.

  When a linear motor is used for the substrate stage PST and the mask stage MST as in the above embodiment, the present invention is not limited to the air levitation type using an air bearing, and a magnetic levitation type using Lorentz force may be used. Each of the stages PST and MST may be of a type that moves along a guide, or may be a guideless type that does not have a guide.

  The reaction force generated by the movement of the substrate stage PST may be mechanically released to the floor (ground) by using a frame member as described in Japanese Patent Application Laid-Open No. 8-166475. Further, the reaction force generated by the movement of the mask stage MST may be mechanically released to the floor (ground) using a frame member as described in JP-A-8-330224.

  As described above, the exposure apparatus EX according to the embodiment of the present invention controls various subsystems including the respective components described in the claims of the present application so as to maintain predetermined mechanical accuracy, electrical accuracy, and optical accuracy. Manufactured by assembling. Before and after this assembly, adjustments to achieve optical accuracy for various optical systems, adjustments to achieve mechanical accuracy for various mechanical systems, and various electric systems to ensure these various accuracy Are adjusted to achieve electrical accuracy. The process of assembling the exposure apparatus from the various subsystems includes mechanical connection, wiring connection of an electric circuit, and piping connection of a pneumatic circuit among the various subsystems. It goes without saying that there is an assembling process for each subsystem before the assembling process from these various subsystems to the exposure apparatus. When the process of assembling the various subsystems into the exposure apparatus is completed, comprehensive adjustment is performed, and various precisions of the entire exposure apparatus are secured. It is desirable that the manufacture of the exposure apparatus be performed in a clean room in which the temperature, cleanliness, and the like are controlled.

  As shown in FIG. 20, for a semiconductor device, a step 201 for designing the function and performance of the device, a step 202 for manufacturing a mask (reticle) based on the design step, and a step 203 for manufacturing a substrate which is a base material of the device The substrate is manufactured through a substrate processing step 204 of exposing a mask pattern to a substrate by the exposure apparatus EX of the above-described embodiment, a device assembling step (including a dicing step, a bonding step, and a package step) 205, and an inspection step 206.

1 is a schematic external perspective view illustrating a first embodiment of a linear motor device according to the present invention. FIG. 2 is a view taken along line AA of FIG. 1. FIG. 2 is a view taken along line BB of the coil unit in FIG. 1. It is a figure for explaining an operation of a linear motor device of the present invention. It is a figure showing a 2nd embodiment of the linear motor device of the present invention. It is a figure showing a 3rd embodiment of a linear motor device of the present invention. It is a figure for explaining an operation of a linear motor device concerning a 3rd embodiment. It is a figure showing a 4th embodiment of a linear motor device of the present invention. It is a schematic diagram for explaining an example of the manufacturing method of the linear motor device of the present invention. It is a schematic diagram for explaining an example of the manufacturing method of the linear motor device of the present invention. It is a schematic diagram for explaining an example of the manufacturing method of the linear motor device of the present invention. It is a schematic diagram for explaining an example of the manufacturing method of the linear motor device of the present invention. It is a figure showing a 5th embodiment of a linear motor device of the present invention. It is a figure showing a 6th embodiment of a linear motor device of the present invention. It is a figure showing a 7th embodiment of a linear motor device of the present invention. It is an appearance perspective view showing the coil assembly concerning a 7th embodiment of the linear motor device of the present invention. FIG. 1 is a schematic configuration diagram illustrating an embodiment of an exposure apparatus of the present invention. 1 is a schematic external perspective view showing an embodiment of a stage device of the present invention. 1 is a schematic external perspective view showing an embodiment of a stage device of the present invention. It is a flowchart figure which shows an example of the manufacturing process of a semiconductor device.

Explanation of reference numerals

DESCRIPTION OF SYMBOLS 1 ... Linear motor apparatus, 2 ... Coil unit (stator), 3 ... Magnet unit (movable element), 4 ... Coil, 4A ... Air core part, 5 ... Coil assembly, 6 ... Housing part,
9: resin portion (material portion), 10: concave portion, 11: covering member (plate member), 14: pressure loss adjusting portion,
21: first flow path, 22: second flow path, 23: inlet part, 24 ... outlet part, 40 ... internal space,
51: Stage device, 52: Stage device, EX: Exposure device, M: Mask,
MST: mask stage, P: photosensitive substrate (substrate), PST: substrate stage

Claims (13)

A coil assembly in which a plurality of coils are combined with a predetermined material and integrated,
A first flow path formed in the coil assembly and flowing a refrigerant;
A housing part surrounding the coil assembly;
A linear motor device, comprising: a second flow passage formed between the coil assembly and the housing portion, and through which a refrigerant flows.   The linear motor device according to claim 1, wherein the first flow path is formed in the material portion of the coil assembly.   The linear motor device according to claim 2, wherein the first flow path is formed between a concave portion formed in the material portion and a covering member that covers the concave portion.   The linear motor device according to claim 3, wherein the recess is formed in a size corresponding to the coil.   4. The linear motor device according to claim 3, wherein the covering member includes a pressure loss adjusting unit that communicates the first flow path and the second flow path. 5.   The said plurality of coils are arrange | positioned so that the air core parts may be connected, The said 1st flow path is formed in the said material part provided in the air core part of the said coil. Item 3. The linear motor device according to Item 2.   The linear motor device according to any one of claims 1 to 6, wherein the first flow path and the second flow path are arranged in parallel. The linear motor device according to claim 1, wherein the first flow path and the second flow path are continuous. An inlet connected to one of the first and second flow paths and for introducing a refrigerant;
9. The linear motor device according to claim 8, further comprising: an outlet connected to the other side to discharge the refrigerant. In a linear motor device having a housing portion having an internal space to which a refrigerant is supplied, and a coil disposed in the internal space,
A first flow path provided in the internal space and circulating a refrigerant;
A second flow path that is provided in the internal space and is different from the first flow path that circulates a refrigerant;
A linear motor device, wherein the coil is arranged at least in a part between the first flow path and the second flow path. In a stage device having a driving device,
A stage device, wherein the linear motor device according to any one of claims 1 to 10 is used for the driving device. In an exposure apparatus including a mask stage that holds a mask and a substrate stage that holds a substrate,
An exposure apparatus, wherein the stage device according to claim 10 is used for at least one of the mask stage and the substrate stage. In a method for manufacturing a linear motor device having a coil unit,
A first step of combining and integrating a plurality of coils with a predetermined material to manufacture a coil assembly;
A second step of forming a first flow path in the material portion of the coil assembly;
A third step of forming a second flow path between the coil assembly and the housing part by surrounding the coil assembly in which the first flow path is formed with a housing part. Manufacturing method of linear motor device.

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