JP2004243512A - Planar type electromagnetic actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small and inexpensive planar electromagnetic actuator constituted by arranging a plurality of movable plates. <P>SOLUTION: This actuator comprises one yoke member 5 formed like a frame; a plurality of movable plates 3 rotatably supported and aligned with a fixing part 1 inside the yoke member 5 by a torsion bar 2; a driving coil installed along an peripheral edge of each movable plate 3; and a static magnetic field generating means 4 installed outside the fixing part 1, and arranged in a manner that reverse magnetic poles are opposed to each other between the movable plates 3. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to an electromagnetically driven planar electromagnetic actuator, and more particularly to a small and inexpensive planar electromagnetic actuator having a plurality of movable plates arranged.

  A conventional planar type electromagnetic actuator includes, for example, a movable plate 3 rotatably supported by a torsion bar 2 on a frame-shaped fixed portion 1 shown in FIG. And a pair of movable coils 3 arranged outside the fixed portion 1 in a direction perpendicular to the axis of the torsion bar 2 with the movable plate 3 interposed therebetween. Static magnetic field generating means 4 for generating a rotating force on the opposite side of the movable plate 3 parallel to the axial direction of the torsion bar 2 by the generated electromagnetic force, and the pair of static magnetic field generating means 4 outside the fixed portion 1. And a one-dimensional scanning planar type electromagnetic actuator including a frame-shaped yoke member 5 for magnetically coupling the movable plate 3 to the inner movable plate 6 and the inner movable plate 6 as shown in FIG. Provided outside the inner movable plate 6 A frame-shaped outer movable plate 7, the outer movable plate 7 is rotatably supported by the fixed portion 1 by an outer torsion bar 8, and the inner movable plate 6 is fixed to the outer movable plate 7 by the outer torsion. A drive coil (not shown) is rotatably supported by an inner torsion bar 9 orthogonal to the axial direction of the bar 8, and a drive coil (not shown) is laid along a peripheral edge of each movable plate, and the outer torsion bar 8 and the inner torsion bar 9 are provided. There is a two-dimensional scanning planar electromagnetic actuator in which a pair of static magnetic field generating means 4 and 10 are arranged opposite to each other with the movable plates interposed therebetween, in the direction orthogonal to the axis of the fixed portion 1. By providing a reflecting mirror on the movable plate 3 of the planar type electromagnetic actuator, a one-dimensional and two-dimensional scanning actuator can be obtained.

On the other hand, optical MEMS (Micro Electro Mechanical Systems) has recently received particular attention. This optical MEMS is a fusion of micro-machine technology and micro-optical technology, and research and development and application development are proceeding in various fields such as optical fiber communication, optical disk memory, opto-electronic equipment, image processing, and optical calculation. This optical MEMS uses, for example, an optical switch for optical fiber communication that reflects light by quickly moving micromirrors arranged in an array (see, for example, Patent Document 1), and hundreds of thousands of micromirrors. There is a device in which light is emitted from a light source to a semiconductor optical switch that is also integrated, and individual micromirrors are quickly tilted according to image information to turn on / off reflected light, thereby displaying an image (for example, see Patents). Reference 2).
JP-A-11-258527 JP-A-8-146911

  However, such conventional optical switches are all configured by movable plates that are electrostatically driven, and there is no optical switch configured by arranging a plurality of planar-type electromagnetic actuators in an array.

  By the way, when an array of optical switches is to be constructed using the planar type electromagnetic actuator shown in FIG. 20, for example, the configuration shown in FIG. 21 or FIG. 22 is obtained. That is, as shown in FIG. 21A, a plurality of one-dimensional scanning planar electromagnetic actuators shown in FIG. 20A are arranged in a line in a direction perpendicular to the axis of the torsion bar 2, or FIG. A configuration in which the components are arranged in a matrix as shown in b) is conceivable. Similarly, a two-dimensional scanning planar type electromagnetic actuator shown in FIG. 20B is arranged in a plurality of lines as shown in FIG. 22A, or as shown in FIG. 22B. A configuration in which they are arranged in a matrix is also conceivable.

  However, in the case where an optical switch is formed by arranging the individually manufactured one-dimensional or two-dimensional scanning planar electromagnetic actuators as they are in an array, the presence of the yoke member 5 increases the size of the optical switch, There is a problem that the score increases and the cost increases.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide a small and inexpensive planar-type electromagnetic actuator configured by arranging a plurality of movable plates.

  For this purpose, the invention according to claim 1 includes one yoke member formed in a frame shape, and a plurality of yoke members which are rotatably supported by a torsion bar on a fixed portion and are aligned and provided inside the yoke member. A movable plate, a driving coil laid along a peripheral edge of each movable plate, and a static magnetic field generating means provided outside the fixed portion and having opposite magnetic poles opposed to each other with the movable plate interposed therebetween. And was provided.

  With such a configuration, a fixed portion is fixed to a movable plate that is rotatably supported by a torsion bar on a fixed portion inside a frame-shaped yoke member and that has a plurality of drive coils laid along a peripheral portion and arranged in a line. A static magnetic field is applied from outside the portion by static magnetic field generating means.

  Specifically, in the planar-type electromagnetic actuator according to the present invention, the plurality of movable plates are arranged such that a normal to a pole face of the static magnetic field generating means and an axis of the torsion bar are orthogonal to each other. It is preferable to adopt a configuration in which Alternatively, the plurality of movable plates may be arranged so that a normal to a magnetic pole surface of the static magnetic field generating means and an axis of the torsion bar obliquely intersect.

  In this case, a configuration may be adopted in which each of the movable plates is axially supported by a torsion bar on a separately formed frame-shaped fixing portion and arranged separately, as in claim 4, and individually as in claim 5. The frame-shaped fixing portion may be pivotally supported by a torsion bar, and the respective fixing portions may be arranged in close contact with each other. It may be configured to be integrally formed.

  In the case of the seventh aspect, the plurality of movable plates are arranged in a direction facing the static magnetic field generating means.

  Alternatively, the plurality of movable plates may be arranged and arranged in a direction orthogonal to the facing direction of the static magnetic field generating means as in claim 8, and further, as in claim 9, the static magnetic field generating means May be arranged in alignment with each other in the facing direction and the direction orthogonal to the facing direction. In this case, a pair of the static magnetic field generating means may be disposed so as to straddle a plurality of movable plates. Further, the plurality of movable plates may be arranged in a staggered manner.

  Further, the movable plate may be formed in a circular shape.

  In the case of the third aspect, it is preferable that the joint surface of the fixing portion with the torsion bar is formed in a symmetrical shape with the axis of the torsion bar interposed therebetween. It is preferable that the side surface of the fixed portion facing the static magnetic field generating means has a shape parallel to the arrangement direction of the movable plates.

  Further, in the configuration of claim 15, the movable plate includes an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is fixed to the fixed portion by an outer torsion bar. The inner movable plate is rotatably supported, and the inner movable plate is rotatably supported on the outer movable plate by an inner torsion bar orthogonal to the axial direction of the outer torsion bar, and is orthogonal to the axis of each of the torsion bars. Static magnetic field generating means were arranged in each direction.

  Further, in the configuration of claim 16, the movable plate includes an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is fixed to the fixed portion by an outer torsion bar. The inner movable plate is rotatably supported, and the inner movable plate is rotatably supported on the outer movable plate by an inner torsion bar orthogonal to the axial direction of the outer torsion bar, and a pair of static magnetic field generating means is disposed. .

  According to the planar type electromagnetic actuator of the present invention, a plurality of movable plates rotatably supported by a torsion bar on a fixed portion are arranged and arranged inside one yoke member, and the movable plates are fixed with the movable plates therebetween. With the configuration in which the static magnetic field generating means is arranged outside the portion, the number of parts of a planar type electromagnetic actuator configured by arranging a plurality of movable plates in an array can be reduced. Accordingly, the size and cost of the planar electromagnetic actuator can be reduced.

  In addition, if the static magnetic field generating means is arranged so that the normal to the magnetic pole surface of the static magnetic field generating means and the axis of each torsion bar obliquely intersect each other, the distance from the static magnetic field generating means to each movable plate is substantially reduced. It can be made equal, and a substantially uniform static magnetic field can be applied to a required portion of the movable plate. Therefore, it is possible to suppress variations in the rotation angle of each movable plate.

  Further, if a plurality of movable plates are pivotally supported by one fixed portion, the plurality of movable plates, the torsion bar, and the fixed portion can be integrally formed by micromachining technology, and the distance between the movable plates can be increased. And the movable plate can be densely arranged. Therefore, the size and cost of the planar electromagnetic actuator can be further reduced.

  If a plurality of movable plates are arranged in a staggered manner, the movable plates can be densely arranged in a multi-array planar electromagnetic actuator. Therefore, the size of the planar type electromagnetic actuator can be further reduced.

  Furthermore, if a static magnetic field is applied to a plurality of movable plates by a pair of static magnetic field generating means, the number of components can be further reduced, and the cost of the planar type electromagnetic actuator can be further reduced. .

  Further, if the movable plate is formed in a circular shape, each movable plate can be arranged closer to each other, and the size of the planar electromagnetic actuator can be further reduced.

  If the movable plate is configured to be rotatable around the axis of the two torsion bars, the optical path can be switched in a two-dimensional direction.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 shows a schematic configuration diagram of a first embodiment of a planar electromagnetic actuator according to the present invention when applied to, for example, an optical switch. The same elements as those of the planar electromagnetic actuator shown in FIG. 20 are denoted by the same reference numerals.

  In FIG. 1, the planar electromagnetic actuator according to the first embodiment is a planar electromagnetic actuator for an optical switch having a plurality of movable plates arranged in an array, and includes a frame-shaped yoke member 5 and a plurality of movable chips. 11 and a static magnetic field generating means 4.

  The yoke member 5 improves the magnetic efficiency of the static magnetic field generating means 4 by magnetically coupling different magnetic pole portions of the static magnetic field generating means 4 described later, and is generally formed of a soft magnetic material. .

  A movable tip 11 is provided inside the yoke member 5. The movable chip 11 is an optical switch unit that rotates to switch an optical path, and is rotatable by a torsion bar 2 on a frame-shaped fixed unit 1 in which a movable plate 3 having a reflection mirror 12 on the surface is individually formed. As shown in FIG. 1, three torsion bars 2 are arranged in a direction perpendicular to the axis of the torsion bar 2 and sandwiched by a static magnetic field generating means 4 described later. Alternatively, as shown in FIG. 2, the individually formed frame-shaped fixing portions 1 are closely contacted with each other, and three in the direction orthogonal to the axis of the torsion bar 2 in the direction facing the static magnetic field generating means 4 (see FIG. a)) or three in the axial direction of the torsion bar 2 in a direction perpendicular to the opposing direction of the static magnetic field generating means 4 (see FIG. 3B).

  A drive coil (not shown) is laid on each of the movable plates 3 along the periphery thereof. The drive coil is connected to an electrode terminal (not shown) provided on the fixed portion 1 via the torsion bar 2. As a result, a drive current can be supplied from outside.

  Outside the fixed part 1, a pair of static magnetic field generating means 4 are provided with the movable plate 3 interposed therebetween such that the normal to the magnetic pole surface and the axis of the torsion bar 2 are perpendicular to each other and the opposite magnetic poles are opposed to each other. Are placed. The static magnetic field generating means 4 applies a static magnetic field to the drive coil portion near the opposite side of the movable plate 3 parallel to the axial direction of the torsion bar 2, and interacts with the current flowing through the drive coil at the portion. , For generating a rotating force on the movable plate 3 and is constituted by, for example, a permanent magnet. The static magnetic field generating means 4 may be inserted and arranged between the movable chips 11 arranged in three rows as shown in FIG. 1, or as shown in FIG. 2 (a). Two movable chips 11 closely arranged in a direction perpendicular to the axis 2 may be interposed and a pair of movable chips 11 may be arranged at both ends thereof, as shown in FIG. 2 (b), in the axial direction of the torsion bar 2. A pair of elongated static magnetic field generating means 4 that straddles the three movable chips 11 may be arranged with the three movable chips 11 arranged closely.

  In this case, in the configuration of FIG. 1, since the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 is equal for each movable plate 3, the opposite side of each movable plate 3 parallel to the axial direction of the torsion bar 2. A uniform static magnetic field can be applied to the drive coil portion in the vicinity. Thereby, the current of the drive coil portion near the opposite side of the movable plate 3 parallel to the axial direction of the torsion bar 2 interacts with the static magnetic field to rotate each movable plate 3 at substantially the same rotation angle, The optical path of the incident light is switched in a one-dimensional direction by a reflection mirror 12 provided on the surface of each movable plate 3. On the other hand, the configuration in FIG. 2A is the same as the configuration in which the static magnetic field generating means 4 is eliminated from between the movable chips 11 in FIG. 1, and can be reduced in size by the thickness of the eliminated static magnetic field generating means 4. The number of parts is reduced by an amount corresponding to the elimination of the static magnetic field generating means 4, and cost reduction is possible. However, in this case, the movable plate 3 in the middle shown in FIG. 2A has a longer distance from the static magnetic field generating means 4 than the other movable plates 3. The working static magnetic field strength is reduced. Therefore, when the driving current is the same as the driving current of the other movable plates 3, the rotation angle of the movable plate 3 becomes small. The rotation angles can be matched. In the configuration of FIG. 2B, the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 is equal for each movable plate 3 as in FIG. Can work.

  With this configuration, the first embodiment can provide an array-type planar electromagnetic actuator for an optical switch that switches an optical path in a one-dimensional direction, and surrounds the movable chips 11 arranged in an array. Only one frame-shaped yoke member 5 needs to be provided, and the size can be reduced as compared with the case of FIG. 21A in which a plurality of individual planar type electromagnetic actuators of FIG. 20A are arranged. Further, it is possible to provide an inexpensive array type planar electromagnetic actuator with a reduced number of components.

  In the case of the configuration shown in FIG. 1 or FIG. 2B, the intensity of the static magnetic field acting on each movable plate 3 of the plurality of movable chips 11 can be equalized, and the variation in the rotation angle of each movable plate 3 can be made. Can be suppressed. In the case of the configuration shown in FIG. 2A, the size and cost of the array-type planar electromagnetic actuator can be further reduced.

Next, a second embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals, and here, the parts different from the first embodiment will be described.
In the second embodiment shown in FIG. 3, the movable chip 11 is configured such that three movable plates 3 are rotatably supported by one torsion bar 2 on one fixed portion 1 in a direction perpendicular to the axis of the torsion bar 2. A fixed chip 1, a torsion bar 2, a movable plate 3, and a drive coil (not shown) laid along the periphery of the movable plate 3 are integrally formed by a micro-machining technique in a one-chip configuration arranged close to each other. It was formed in a typical manner. Alternatively, the movable chip 11 may be configured by arranging a plurality of movable plates 3 in the axial direction of the torsion bar 2 as shown in FIG. In this case, a pair of the static magnetic field generating means 4 are arranged with the opposite magnetic poles facing each other with the movable chip 11 therebetween in a direction orthogonal to the axis of the torsion bar 2.

  With such a configuration, according to the second embodiment, in addition to the effects of the first embodiment, the movable chip 11 can be integrally formed by the micromachining technology, which facilitates manufacturing. Further, in this case, only one pair of the required static magnetic field generating means 4 is required, so that the number of components is reduced and the cost of the array type planar electromagnetic actuator can be reduced.

  Further, in the case of the configuration shown in FIG. 3, a plurality of movable plates 3 can be arranged close to each other, so that it is possible to provide a planar type electromagnetic actuator for an optical switch having a dense structure. However, in this case, as in FIG. 2A, the middle movable plate 3 shown in FIG. 3 is far from the static magnetic field generating means 4 and therefore acts on the drive coil laid on the movable plate 3. Although the magnetic field strength decreases and the rotation angle of the movable plate 3 decreases, the rotation angle of each movable plate 3 can be matched by adjusting the drive current or the number of turns of the drive coil. On the other hand, in the case of the configuration shown in FIG. 4, the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 is equal for each movable plate 3 as in FIG. A uniform static magnetic field can be applied to necessary portions, and the rotation angles of the movable plates 3 can be made substantially the same.

Next, a third embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals, and here, the parts different from the first embodiment will be described.
In the third embodiment shown in FIG. 5, two movable plates 3 are rotatably supported on one fixed part 1 by a torsion bar 2 so as to be rotatable, and are arranged in the axial direction of the torsion bar 2. In this configuration, three movable chips 11 are sandwiched between static magnetic field generating means 4 in a direction perpendicular to the axis of the torsion bar 2 and arranged in three rows to form a matrix-shaped optical switch.

  With this configuration, in the third embodiment, the size can be reduced as compared with the configuration in FIG. 21B in which the one-dimensional scanning actuators in FIG. 20A are individually arranged in a matrix. In addition, it is possible to provide an inexpensive matrix-type planar electromagnetic actuator with a reduced number of components. Further, a uniform static magnetic field can be applied to each of the movable plates 3 of the movable chips 11 arranged in the same manner as in FIG. 1, and variation in the rotation angle of each of the movable plates 3 can be suppressed. In this case as well, as in FIG. 2A, the movable chips 11 are arranged in close contact with each other, and a pair of static magnetic field generating means 4 are arranged at both ends of the movable chips 11 with the movable chips 11 interposed therebetween. Good.

Next, a fourth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 3 are denoted by the same reference numerals, and here, only the parts different from the second embodiment will be described.
In the fourth embodiment shown in FIG. 6, the movable chip 11 is provided with three movable plates 3 rotatably supported by the torsion bar 2 in a direction orthogonal to the axis of the torsion bar 2. In addition, two movable plates 3 are arranged in the axial direction of the torsion bar 2, and each movable plate 3 is supported by one fixed portion 1 in a one-chip configuration. The static magnetic field generating means 4 is arranged to face the outside of the fixed part 1 with the movable chip 11 therebetween in a direction orthogonal to the axis of the torsion bar 2.

  With this configuration, the fourth embodiment can further reduce the cost of the matrix-type planar electromagnetic actuator in addition to the effects of the second embodiment. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

Next, a fifth embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals, and here, the parts different from the first embodiment will be described.
In the fifth embodiment shown in FIG. 7, the movable chip 11 is constituted by the inner movable plate 6 in which the movable plate 3 in the first embodiment is provided and the frame-shaped outer movable plate 7 provided outside the inner movable plate 6. The inner movable plate 6 is rotatably supported on the outer movable plate 7 by an inner torsion bar 9, and the outer movable plate 7 is turned around the fixed portion 1 by an outer torsion bar 8 orthogonal to the axial direction of the inner torsion bar 9. The movable tip 11 is arranged in three rows in a direction perpendicular to the axis of the inner torsion bar 9. In addition, a drive coil (not shown) is laid on the inner movable plate 6 and the outer movable plate 7 along the periphery thereof. Then, static magnetic field generating means 4 and 10 are arranged outside the fixed portion 1 in a direction perpendicular to the axis of each torsion bar and opposite magnetic poles with the movable chip 11 interposed therebetween. In this case, since the distance from the static magnetic field generating means 4, 10 to the opposite side of each of the inner and outer movable plates 6, 7 is equal for each of the inner and outer movable plates 6, 7, an even static magnetic field acts on the drive coil. Can be done.

  As a result, a static magnetic field is applied to the current in the drive coil portion near the opposite side of the inner movable plate 6 parallel to the axial direction of the inner torsion bar 9 by the static magnetic field generating means 10, and the inner side is generated by the interaction between the current and the static magnetic field. The movable plate 6 is rotated, and the static magnetic field generating means 4 applies a static magnetic field to the current in the drive coil portion near the opposite side of the outer movable plate 7 parallel to the axis of the outer torsion bar 8. The outer movable plate 7 is rotated by the interaction, and the optical path of the incident light is switched in the two-dimensional direction by the reflection mirror 12.

  Here, the static magnetic field generating means 4 of the static magnetic field generating means 4 and 10 may be provided individually corresponding to each movable chip 11 as shown in FIG. 7A, or as shown in FIG. Thus, it may be an elongated shape that straddles the three movable chips 11 as described above. 2, three movable chips 11 may be arranged in close contact with each other, and a pair of static magnetic field generating means 10 may be provided at both ends with the three movable chips 11 interposed therebetween.

  With this configuration, according to the fifth embodiment, it is possible to provide an array-type planar electromagnetic actuator for an optical switch that switches an optical path in a two-dimensional direction. To provide an inexpensive array-type planar electromagnetic actuator which can be reduced in size as compared with the case of FIG. 22A in which scanning planar electromagnetic actuators are individually arranged in a line, and which has a reduced number of parts. Can be.

  The movable chips 11 may be arranged close to each other, and the static magnetic field generating means 10 may be arranged outside the fixed portions 1 at both ends.

Next, a sixth embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 7 are denoted by the same reference numerals, and only the parts different from the fifth embodiment will be described.
In the sixth embodiment shown in FIG. 8, the movable chip 11 is configured such that three movable plates 3 each including an inner movable plate 6 and an outer movable plate 7 are arranged in the axial direction of the outer torsion bar 8, and each movable plate 11 Reference numeral 3 denotes a one-chip configuration in which the outer torsion bar 8 is pivotally supported by one fixed part 1, and is integrally formed by a micromachining technique in the same manner as the movable tip 11 shown in FIG. As shown in FIG. 9, for example, three movable plates 3 may be arranged in the axial direction of the inner torsion bar 9. Then, static magnetic field generating means 4 and 10 are disposed outside the fixed portion 1 in a direction perpendicular to the axis of each torsion bar, with the opposite magnetic poles facing each other with the movable chip 11 interposed therebetween.

  Here, in the configuration shown in FIG. 8, since the distance from the static magnetic field generating means 4 to the opposite side of each outer movable plate 7 is equal for each outer movable plate 7, as in the fifth embodiment of FIG. Although a uniform static magnetic field can be applied to the drive coil laid on the outer movable plate 7, the middle inner movable plate 6 shown in FIG. Therefore, the static magnetic field acting on the drive coil laid on the inner movable plate 6 becomes weaker. On the other hand, in the configuration shown in FIG. 9, the relationship is the reverse of the configuration shown in FIG. 8, and although a uniform static magnetic field acts on the drive coil of each inner movable plate 6, the outer movable plate 7 shown in FIG. The static magnetic field that acts on the drive coil of the motor is weakened. Accordingly, for the inner movable plate 6 in the middle shown in FIG. 8 or the outer movable plate 7 in the middle shown in FIG. 9 in which the acting static magnetic field is weakened, the drive current or the number of turns of the drive coil is adjusted to adjust the other movable plates. It is necessary to match with the rotation angle of.

  With such a configuration, according to the sixth embodiment, the movable chip 11 can be integrally formed by the micromachining technology in the same manner as in the second embodiment, and the array shape that switches the optical path in the two-dimensional direction can be formed. Can easily be manufactured. Further, the number of static magnetic field generating means used can be reduced as compared with the fifth embodiment, and the cost of the array type planar electromagnetic actuator can be reduced. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

Next, a seventh embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 7 are denoted by the same reference numerals, and only the parts different from the fifth embodiment will be described.
In the seventh embodiment shown in FIG. 10, three movable chips 11 for two-dimensional scanning having the movable plate 3 that rotates about two axes are three in the axial direction of the outer torsion bar 8 and two in the axial direction of the inner torsion bar 9. Are aligned. Then, the static magnetic field generating means 4 and 10 are arranged at both ends of the movable chip 11 in the direction orthogonal to the axis of each of the torsion bars with the movable chip 11 therebetween. FIG. 10A shows that the static magnetic field generating means 4 among the static magnetic field generating means 4 and 10 arranged outside the plurality of aligned movable chips 11 are individually associated with the respective movable chips 11. FIG. 2B shows a static magnetic field generating means 4 formed by an elongated static magnetic field generating means extending over three movable chips 11. Also in the seventh embodiment, as shown in FIG. 2, the static magnetic field generating means 4 and 10 sandwiched between the movable chips 11 are eliminated, and the movable chips 11 are arranged in close contact with each other. A static magnetic field may be applied to a required portion of the movable plate 3 by a pair of static magnetic field generating means 4 and 10 from two directions orthogonal to each torsion bar with the chip 11 therebetween. Further, three movable tips 11 arranged in the axial direction of the outer torsion bar 8 may be integrally formed as shown in FIG. 8, and two movable tips 11 arranged in the axial direction of the inner torsion bar 9 as shown in FIG. The two movable tips 11 may be formed integrally.

  With this configuration, according to the seventh embodiment, the size is reduced as compared with the case of FIG. 22B in which the two-dimensional scanning planar electromagnetic actuators shown in FIG. 20B are individually arranged in a matrix. It is possible to provide an inexpensive matrix-type planar electromagnetic actuator with a reduced number of components.

Next, an eighth embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 7 are denoted by the same reference numerals, and only the parts different from the fifth embodiment will be described.
In the eighth embodiment shown in FIG. 11, the movable tip 11 is provided with three movable plates 3 which are pivoted below two axes arranged in the axial direction of the outer torsion bar 8. Are arranged in the axial direction, and each movable plate 3 is pivotally supported by one fixed portion 1 to form a one-chip configuration having a matrix structure. In this case, the static magnetic field generating means 4 and 10 are arranged facing the outside of the fixed portion 1 with the movable chip 11 therebetween in a direction perpendicular to the axis of each torsion bar.

  With this configuration, according to the eighth embodiment, similarly to the fourth embodiment in FIG. 6, the movable chip 11 in which the two-dimensional scanning movable plates 3 are arranged in a matrix is formed by micromachining. It can be integrally formed by the technology, manufacturing becomes easy, the number of parts is reduced, and the cost of the matrix type planar type electromagnetic actuator can be further reduced. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

Next, a ninth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 3 are denoted by the same reference numerals, and here, only the parts different from the second embodiment will be described.
In a ninth embodiment shown in FIG. 12, a circular movable plate 3 rotatably supported by one fixed portion 1 by a torsion bar 2 is provided between a pair of static magnetic field generating means 4. The normal line P on the pole face 4a of the means 4 and the axis O of the torsion bar 2 are inclined so as to obliquely intersect each other at an angle θ, and come close to each other in a direction orthogonal to the opposing direction of the static magnetic field generating means 4. For example, three chips are arranged and arranged to form one chip. In the movable chip 11, the fixed portion 1, the torsion bar 2, and the movable plate 3 are integrally formed by using a micromachining technique. The inclination angle θ of the magnetic pole surface 4a of the torsion bar 2 with respect to the normal P is arbitrary. For example, when it is desired to lengthen the torsion bar 2 while maintaining the arrangement state of the movable plate 3 and the distance from the static magnetic field generating means 4 to the movable plate 3, it can be realized by setting the inclination angle θ to around 45 degrees. . Conversely, if the torsion bar 2 is shortened but it is desired to increase the magnetic force acting on the drive coil, the inclination angle θ may be set to around 90 degrees.

  Further, the joint surface 1a of the fixed portion 1 with the torsion bar 2 is formed in a substantially symmetric shape with the axis O of the torsion bar 2 interposed therebetween. Thereby, the length from the movable plate 3 to the fixed part 1 of the torsion bar 2 is made equal on any side surface of the torsion bar 2 so that the torsion stress is generated almost uniformly on the torsion bar 2. I have.

  Further, a side surface portion 1b of the fixed portion 1 facing the static magnetic field generating means 4 is formed parallel to the arrangement direction of the movable plates 3. As a result, the static magnetic field generating means 4 can be arranged close to the movable plate 3, thereby increasing the intensity of the static magnetic field acting on the movable plate 3 and improving the driving efficiency.

  As shown in FIG. 13, a movable chip 11 is formed by rotatably supporting a movable plate 3 on a separately formed fixed portion 1 with a torsion bar 2, and the movable chip 11 is arranged to face the movable chip 3. The movable chip 11 is inclined by tilting the movable tip 11 so that the normal to the magnetic pole surface 4a of the static magnetic field generating means 4 and the axis of the torsion bar 2 intersect obliquely with each other. A plurality of lines may be arranged in a direction orthogonal to the facing direction. As shown in FIG. 14, the movable plate 3 is rotatably supported by the torsion bar 2 in the diagonal direction of the individually formed rectangular fixing portion 1 to form the movable chip 11. A plurality of 11 may be arranged in a line between the opposingly arranged static magnetic field generating means 4 in close contact with each other in a direction orthogonal to the opposing direction of the static magnetic field generating means 4.

  With such a configuration, a static magnetic field is applied to the opposite side of the movable plate 3 parallel to the axial direction of the torsion bar 2 by the static magnetic field generating means 4, and the current of the drive coil near the opposite side and the current of the torsion bar 2 are reduced. The movable plate 3 is rotated by an interaction with a static magnetic field component orthogonal to the axis, and the reflection mirror 12 switches the optical path of the incident light in a one-dimensional direction.

  With this configuration, according to the ninth embodiment, in addition to the effects of the second embodiment, in addition to the effects of the second embodiment, the movable plate 3 is connected to the normal to the magnetic pole surface 4a of the static magnetic field generating means 4 and the torsion. By arranging the bars 2 so as to obliquely intersect with each other, the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 can be made substantially equal for each movable plate 3. A substantially uniform static magnetic field can be made to act on the necessary portions of (3). Thereby, it is possible to suppress variation in the rotation angle of each movable plate 3.

  Furthermore, if the movable plate 3 is formed in a circular shape, the adjacent movable plates 3 can be arranged close to each other, and the size of the array type planar electromagnetic actuator can be further reduced.

  In addition, it is also possible to arrange the plurality of movable plates 3 in alignment with the direction in which the static magnetic field generating means 4 faces. In this case, with respect to the movable plate 3 in the middle where the distance from the static magnetic field generating means 4 is long, the strength of the static magnetic field acting on the middle is weakened. It is necessary to adjust the drive current of the movable plate 3 or the number of turns of the drive coil.

  Further, the individually formed movable chips 11 may be arranged in a direction facing the static magnetic field generating means 4 and the static magnetic field generating means 4 may be arranged between the movable chips 11 as in FIG. . In this case, the intensity of the static magnetic field acting on each movable plate 3 becomes equal.

Next, a tenth embodiment of the planar type electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 12 are denoted by the same reference numerals, and here, the parts different from the ninth embodiment will be described.
In the tenth embodiment shown in FIG. 15, the movable chip 11 is pivotally supported by the torsion bar 2, and the movable plate 3 is arranged in a matrix, and is rotatably supported by one fixed part 1. It has a one-chip configuration. Then, as in the ninth embodiment, the torsion bar 2 is inclined so that the normal to the magnetic pole surface 4a of the static magnetic field generating means 4 and the torsion bar 2 obliquely intersect each other, and the movable plate 3 is moved to the static magnetic field generating means 4. Are arranged in a zigzag pattern in two rows in a direction orthogonal to the facing direction of.

  With this configuration, according to the tenth embodiment, in addition to the effects of the ninth embodiment, it is possible to reduce the cost of the matrix-type planar electromagnetic actuator. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

  The arrangement of the movable plates 3 is not limited to the above-described two-row staggered arrangement, but may be a three-row or more staggered arrangement. In this case, for the movable plate 3 which is far from the static magnetic field generating means 4 and has a weak static magnetic field acting on the drive coil, the drive current or the drive coil of each drive coil depends on the strength of the static magnetic field acting on the movable plate 3. The variation in the rotation angle can be suppressed by changing the number of turns and the length of a necessary portion of the drive coil.

Next, an eleventh embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 12 are denoted by the same reference numerals, and here, the parts different from the ninth embodiment will be described.
In the eleventh embodiment shown in FIG. 16, the movable plate 3 includes a circular inner movable plate 6 and a circular frame-shaped outer movable plate 7, and the inner movable plate 6 is rotated by the inner movable plate 7 with the inner torsion bar 9. The outer movable plate 7 is rotatably supported on the fixed portion 1 by an outer torsion bar 8 orthogonal to the axis of the inner torsion bar 9. The movable chip 3 is formed by arranging a plurality of movable plates 3 on one fixed portion 1 in close proximity to each other.

  With such a configuration, the pair of static magnetic field generating means 4 statically moves the opposite side of the movable plate 3 parallel to the axial direction of the inner torsion bar 9 and the opposite side of the outer movable plate 7 parallel to the axial direction of the outer torsion bar 8. A magnetic field is actuated, and the current in the drive coil portion near the opposite side is interacted with a static magnetic field component orthogonal to the axis of the inner torsion bar 9 and a static magnetic field component orthogonal to the axis of the outer torsion bar 8 to move inward. The plate 6 and the outer movable plate 7 are rotated, and the optical path of the incident light is switched in the two-dimensional direction by the reflection mirror 12.

  In FIG. 16, the movable plate 3 is shown in a circular shape, but is not limited to this. For example, the movable plate 3 may have a square shape as shown in FIG. 17, or may have any other shape.

  Further, as shown in FIG. 18, movable chips 11 each having a movable plate 3 rotatably supported by the fixed portion 1 are separately formed, and the movable chips 11 are arranged opposite to each other to generate a static magnetic field. The outer and inner torsion bars 8, 9 are tilted between the means 4 so that the normal to the pole face 4a of the static magnetic field generating means 4 and the outer and inner torsion bars 8, 9 obliquely intersect each other. A plurality of generators 4 may be arranged in a direction orthogonal to the facing direction.

  With this configuration, according to the eleventh embodiment, in addition to the effects of the ninth embodiment, it is possible to provide an array-type planar electromagnetic actuator for an optical switch that switches an optical path in a two-dimensional direction.

Next, a twelfth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 16 are denoted by the same reference numerals, and only the parts different from the eleventh embodiment will be described.
In the twelfth embodiment shown in FIG. 19, a movable chip 11 is formed by arranging a movable plate 3 that rotates around an axis of two torsion bars in a matrix, and a plurality of movable plates 3 are integrated as in the eleventh embodiment. This is a single chip configuration. The movable tip 11 is tilted by tilting the outer and inner torsion bars 8, 9 so that the normal to the magnetic pole surface 4a of the static magnetic field generating means 4 and the outer and inner torsion bars 8, 9 obliquely cross each other. The magnetic field generating means 4 are arranged in a staggered manner in two rows in a direction orthogonal to the facing direction of the magnetic field generating means 4.

  With this configuration, in the twelfth embodiment, in addition to the effects of the eleventh embodiment, it is possible to reduce the cost of a matrix-type planar electromagnetic actuator that switches an optical path in a two-dimensional direction. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

  Note that, as described in the tenth embodiment, the arrangement of the movable plates 3 may be a staggered arrangement of three or more rows. Also in this case, since the distance from the static magnetic field generating means 4 is large, the drive current of each drive coil or the drive current of each drive coil depends on the intensity of the static magnetic field acting on the movable plate 3 having a weak static magnetic field acting on the drive coil. Variations in the rotation angle can be suppressed by changing the number of turns of the drive coil or the length of a necessary portion of the drive coil.

  The planar type electromagnetic actuator of the present invention is not limited to an optical switch, but may be applied to any type of actuator having a plurality of movable plates 3 arranged in an array. Further, the shape of the movable plate 3 is not limited to a square shape or a circular shape, but may be any shape. Further, the number of the movable plates 3 is not limited to that shown in each figure, and may be any number as long as it is plural.

FIG. 1 is a schematic configuration diagram illustrating a first embodiment of a planar electromagnetic actuator according to the present invention. It is a schematic structure figure showing other examples of arrangement of a movable chip in a 1st embodiment. FIG. 4 is a schematic configuration diagram showing a second embodiment of the planar electromagnetic actuator according to the present invention. It is a schematic structure figure showing the modification of the movable tip in a 2nd embodiment. It is a schematic structure figure showing a 3rd embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing a 4th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing a 5th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing a 6th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing the modification of the movable tip in a 6th embodiment. It is a schematic structure figure showing a 7th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing an 8th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing a 9th embodiment of a planar type electromagnetic actuator by the present invention. FIG. 13 is a schematic configuration diagram illustrating another configuration of the movable chip illustrated in FIG. 12 and an arrangement example thereof. FIG. 13 is a schematic configuration diagram showing still another configuration of the movable chip shown in FIG. 12 and an example of its arrangement. It is a schematic structure figure showing a 10th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic structure figure showing an eleventh embodiment of a planar type electromagnetic actuator by the present invention. FIG. 17 is a schematic configuration diagram illustrating another configuration example of the movable plate illustrated in FIG. 16. It is a schematic structure figure showing an example of arrangement of a movable chip formed individually in an 11th embodiment. It is a schematic structure figure showing a 12th embodiment of a planar type electromagnetic actuator by the present invention. It is a schematic block diagram of a planar type electromagnetic actuator, (a) shows for one-dimensional scanning, (b) shows for two-dimensional scanning. 21A is an explanatory diagram showing a configuration example in which a plurality of primary scanning planar electromagnetic actuators are arranged in FIG. 21B is an explanatory diagram illustrating a configuration example in which a plurality of two-dimensional scanning planar electromagnetic actuators in FIG. 20B are arranged.

Explanation of reference numerals

DESCRIPTION OF SYMBOLS 1 ... Fixed part 1a ... Joint surface part 1b ... Side surface part 2 ... Torsion bar 3 ... Movable plate 4, 10 ... Static magnetic field generation means 4a ... Magnetic pole surface 5 ... Yoke member 6 ... Inner movable plate 7 ... Outer movable plate 8 ... Outer torsion Bar 9 ... Inside torsion bar

Claims (16)

One yoke member formed in a frame shape,
Inside the yoke member, a plurality of movable plates that are rotatably supported by a torsion bar on a fixed portion and are aligned and provided,
A drive coil laid along the periphery of each movable plate,
Static magnetic field generating means provided outside the fixed portion with the opposite magnetic poles facing each other with the movable plates in between, and applying a static magnetic field to the opposite side of the movable plate parallel to the axial direction of the torsion bar; ,
A planar electromagnetic actuator characterized by comprising:   2. The planar electromagnetic actuator according to claim 1, wherein the plurality of movable plates are arranged so that a normal to a magnetic pole surface of the static magnetic field generating means and an axis of the torsion bar are orthogonal to each other.   2. The planar electromagnetic device according to claim 1, wherein the plurality of movable plates are arranged so that a normal line of a magnetic pole surface of the static magnetic field generating means and an axis of the torsion bar obliquely intersect. Actuator.   The planar type according to any one of claims 1 to 3, wherein each of the movable plates is arranged so as to be pivotally supported by a torsion bar on a frame-shaped fixing portion formed separately. Electromagnetic actuator.   4. The movable plate according to claim 1, wherein each of the movable plates is rotatably supported by a torsion bar on a frame-shaped fixing portion formed individually, and the fixing portions are closely arranged to each other. A planar type electromagnetic actuator according to any one of the first to third aspects.   The planar type electromagnetic actuator according to any one of claims 1 to 3, wherein the plurality of movable plates are formed integrally with one fixed portion by being pivotally supported by a torsion bar.   The planar type electromagnetic actuator according to any one of claims 1 to 6, wherein the plurality of movable plates are arranged in a direction facing the static magnetic field generating means.   The planar type electromagnetic actuator according to any one of claims 1 to 6, wherein the plurality of movable plates are arranged in a direction orthogonal to a direction in which the static magnetic field generating means faces.   The planar type electromagnetic actuator according to any one of claims 1 to 6, wherein the plurality of movable plates are arranged in a direction facing the static magnetic field generating unit and in a direction orthogonal to the facing direction. .   The planar electromagnetic actuator according to any one of claims 7 to 9, wherein a pair of the static magnetic field generating means are arranged so as to straddle a plurality of movable plates.   The planar type electromagnetic actuator according to any one of claims 7 to 9, wherein the plurality of movable plates are arranged in a staggered manner.   The planar type electromagnetic actuator according to claim 1, wherein the movable plate is formed in a circular shape.   The planar type electromagnetic actuator according to claim 3, wherein a joint surface of the fixed portion with the torsion bar is formed symmetrically with respect to an axis of the torsion bar.   4. The planar type electromagnetic actuator according to claim 3, wherein a side surface of the fixed portion facing the static magnetic field generating means is formed in a shape parallel to an arrangement direction of the movable plates.   The movable plate includes an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is rotatably supported on the fixed portion by an outer torsion bar. The inner movable plate is rotatably supported on the outer movable plate by an inner torsion bar orthogonal to the axial direction of the outer torsion bar, and static magnetic field generating means are arranged in a direction orthogonal to the axis of each torsion bar. 3. The planar type electromagnetic actuator according to claim 2, wherein: The movable plate includes an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is rotatably supported on the fixed portion by an outer torsion bar. The inner movable plate is rotatably supported on the outer movable plate by an inner torsion bar orthogonal to the axial direction of the outer torsion bar, and a pair of static magnetic field generating means is disposed. The planar electromagnetic actuator as described.

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