JP2004205384A - X-ray inspection equipment - Google Patents

Abstract

An X-ray inspection apparatus capable of irradiating an inspection object with X-rays from an arbitrary direction is provided.
Kind Code: A1 A collimator (5) for inputting X-rays emitted from a monochromator and aligning its phase, and X-rays emitted from the collimator (5) and transmitted through a test object (W) are input and further scattered by aligning their phases. 1. An X-ray inspection apparatus comprising an analyzer 6 for removing X-rays and an X-ray detector for detecting X-rays passing through the analyzer 6, wherein the collimator 5, the analyzer 6, and the X-ray detector are lifted and lowered. A conveyer device 8 for disposing the inspection object W in an inspection space 36 formed between the collimator 5 and the analyzer 6 while being disposed on a rotating frame 14 rotatably provided on the body 13. It is.
[Selection] Fig. 2

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an X-ray inspection apparatus that can inspect the inside of an object using X-rays.
[0002]
[Prior art]
When inspecting the inside of an object in a non-destructive manner, X-rays are used, and normally, a transmission image in which the internal state of the object can be obtained based on the difference in the amount of X-ray transmitted to the object, that is, the difference in the amount of absorption.
[0003]
In a conventional X-ray inspection apparatus, X-rays emitted from an X-ray source are first monochromatized by a monochromator, adjusted to a predetermined width, and incident on a collimator (half mirror). After the X-rays whose directions are aligned by the collimator are irradiated on the inspection object, the X-ray transmitted through the inspection object is incident on the analyzer (half mirror), where the direction of the transmitted X-ray is further increased. And the influence of scattered light or the like is removed, and transmitted X-rays are made clearer. Then, the X-rays emphasized by the analyzer are detected as image data by an X-ray detector or the like, and then input to an image analysis processing device for analysis (see Patent Document 1).
[0004]
[Patent Document 1]
JP 10-248833 A
[Problems to be solved by the invention]
By the way, in the above configuration, the object to be inspected is disposed between the collimator and the analyzer, but the irradiation direction of the X-rays is constant, and transmission images from different directions cannot be obtained. Was.
[0006]
Therefore, an object of the present invention is to provide an X-ray inspection apparatus capable of irradiating an inspection object with X-rays from an arbitrary direction.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, an X-ray inspection apparatus according to claim 1 of the present invention includes a collimator that receives X-rays emitted from a monochromator and aligns the phases thereof, and an object to be inspected that is emitted from the collimator. An X-ray inspection apparatus comprising: an analyzer that receives X-rays that have passed through the X-ray detector and further removes scattered X-rays by aligning the phases thereof; and an X-ray detector that detects X-rays that have passed through the analyzer.
The collimator, the analyzer, and the X-ray detector are arranged on a rotating body rotatably provided on the support body side, and a guide tool for guiding an object to be inspected is arranged in an examination space formed between the collimator and the analyzer. It was done.
[0008]
According to a second aspect of the present invention, there is provided an X-ray inspection apparatus including an elevating device that raises and lowers a support in the inspection apparatus according to the first aspect.
The X-ray inspection apparatus according to claim 3 adjusts the distance between the collimator and the analyzer in a connecting member that connects the collimator and the analyzer in the rotating body of the inspection apparatus according to claim 1 or 2. In this case, an adjustable member is arranged.
[0009]
Furthermore, an X-ray inspection apparatus according to a fourth aspect uses a piezo element or a magnetostrictive element as the adjustment member in the inspection apparatus according to any one of the first to third aspects.
[0010]
According to each of the above-described configurations, the collimator and the analyzer are rotated with respect to the inspection space in which the inspection object is moved, so that in the conventional example, X-rays can be emitted only from a certain direction. X-rays can be irradiated to the inspection object from any direction.
[0011]
Further, since the rotating body is moved up and down, it can be moved to the optimum irradiation position regardless of the size of the inspection object guided to the inspection space.
Furthermore, since the adjusting member is disposed on the connecting member that connects the collimator and the analyzer, the position of the collimator with respect to the monochromator can be adjusted, for example, to adjust the X-ray incident angle to the optimum.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an X-ray inspection apparatus according to an embodiment of the present invention will be described with reference to FIGS.
[0013]
As shown in FIG. 1, this X-ray inspection apparatus generates an X-ray and emits X-rays from an emission port, and an X-ray generation apparatus (X-ray source) 1. The emitted X-rays are made incident to adjust the amount of X-ray energy (X-ray energy density) (for example, by narrowing down the X-rays and increasing the energy density, the transmission power of the object is increased) and the X-ray energy of the predetermined wavelength is increased. A monochromator 2 for expanding the X-rays to a predetermined width and outputting the X-rays, and an X-ray for irradiating the inspection object with X-rays of a predetermined wavelength emitted from the monochromator 2 and detecting the intensity of the transmitted X-rays An irradiation detection unit 3 and an image analysis processing device 4 that inputs X-rays detected by the X-ray irradiation detection unit 3 and performs image processing to create a transmission image of the inspection object and display the image on a display screen. It is configured.
[0014]
As shown in FIGS. 2 to 5, X-rays of a predetermined wavelength emitted from the monochromator 2 are incident on the X-ray irradiation detector 3 at a Bragg angle to reduce the parallelism to 0.1 second or less. A collimator (using a Si half mirror) 5 for outputting in a predetermined direction X-rays having improved directivity without deviation (having the same phase) in a predetermined direction, and X-rays emitted from the collimator 5 are covered with the collimator. By transmitting the transmitted X-rays obtained by transmitting the inspection object W and further improving the directionality (aligning the phases), that is, removing the scattered light (scattered X-rays), An analyzer (in which a Si half mirror is used) 6 for emphasizing the intensity, and an X-ray detector 7 for inputting the X-ray emitted from the analyzer 6 to detect the intensity and take out as a digital signal are provided. When Moni, these collimator 5, the analyzer 6 and the X-ray detector 7 is configured to be rotated in the vertical plane.
[0015]
That is, the X-ray irradiation detection unit 3 is provided on a base 11 by an elevating device (for example, a cylinder device, an electric motor that drives a screw mechanism, or the like), and is provided so as to be able to move up and down by an elevating frame (a support member). An example) 13, a rotating frame (rotating body) 14 rotatably supported in the elevating frame 13 about a horizontal axis and having the collimator 5, the analyzer 6, and the X-ray detector 7 attached thereto; And a rotating device 15 for rotating the rotating frame 14.
[0016]
The elevating frame 13 includes a rectangular front frame member 22 and a rear frame member 23 erected from the front and rear end edges of the support plate 21, and a connecting member 24 connecting the upper ends of the front and rear frame members 22 and 23. Thus, a rectangular parallelepiped is formed. The front-back direction is based on a moving direction of the inspection object, which will be described later. The lower side is referred to as a front portion, and the upper side is referred to as a rear portion. The rotation axis of the rotary frame 14 is also referred to as the front-rear direction. The horizontal axis in the direction.
[0017]
In the rotating frame 14, rectangular first to third mounting plates 31 to 33 are vertically separated from each other by a predetermined distance by four connecting strut members (connecting members) 34 arranged vertically. At the same time, a pair of ring-shaped gears (external gears) 35 attached to the front and rear surfaces of the rotary frame 14 are provided at equal angles on the front and rear end surfaces of the lifting frame 13. For example, it is rotatably supported around a horizontal axis by support gears 25 provided at five places, for example.
[0018]
The space between the first mounting plate 31 at the uppermost portion and the second mounting plate 32 at the intermediate portion is widened to provide an inspection space 36 for guiding the inspection object W. , For example, a conveyor device 8 is inserted and arranged as a guide for the inspection object W.
[0019]
The collimator 5 is attached to the center opening of the first attachment plate 31, the analyzer 6 is attached to the center opening of the second attachment plate 32, and the XYZ moving device (tertiary) is attached to the third attachment plate 33. The X-ray detector 7 is attached via a source moving device 37.
[0020]
A rotating device 15 for rotating the rotating frame body 14 is rotatably supported via a support bracket 41 at a lower center portion of the lifting frame body 13 on the front frame member 22 side, and is meshed with the ring gear 35. And a motor 45 disposed on the support plate 21 and rotating the drive-side gear 42 via a drive pinion 43 and an intermediate gear 44.
[0021]
Further, a piezo element 51 is interposed (inserted) as an adjusting member for adjusting the distance between the first mounting plate 31 and the second mounting plate 32 in each of the connecting support members 34 constituting the rotary frame 14. At the same time, the piezo element 51 is controlled by the image analysis processing device 4 via the control device 52. The XYZ moving device 37 is connected to the control device 52, and the three-dimensional position of the X-ray detector 7 is also adjusted by the image analysis processing device 4.
[0022]
That is, based on the transmission image (detected image) detected by the image analysis processing device 4, a predetermined voltage is applied to the piezo elements 51 provided at four locations so that the transmission image becomes clear, The incident angle of X-rays from the meter 2 to the collimator 5 is adjusted, and the X-ray detector 7 is moved by the XYZ moving device 37 so that an optimum imaging light amount (X-ray dose) is obtained for the inspection object. You.
[0023]
When the drive gear 42 is rotated by the electric motor 45, the rotary frame 14 rotates in a vertical plane, that is, the collimator 5 and the analyzer 6 rotate together, and the inspection object W on the conveyor device 8 is moved. X-rays can be emitted from any direction. The X-ray generator 1 and the monochromator 2 are also configured to rotate in accordance with the rotation of the rotating frame 14.
[0024]
In the above configuration, a method of inspecting an inspection object will be described.
First, the inspection object W is moved into the inspection space 36 by the conveyor device 8, and then the X-ray generator 1 emits X-rays. The emitted X-rays enter the monochromator 2, where the X-rays are expanded at a predetermined wavelength and a predetermined width, and then are incident on the collimator 3, the directions thereof are aligned, and the X-ray is irradiated on the inspection object W. Then, the X-ray transmitted through the inspection object W enters the analyzer 4, where the direction is further aligned and the scattered light is removed, thereby enhancing the transmitted X-ray.
[0025]
The emphasized X-rays are input to the X-ray detector 7 where the X-ray intensity is detected and input to the image analysis processing device 4 as a digital signal. In the image analysis processing device 4, a transmission image that shows the internal state of the inspection object W is created and displayed on the display screen.
[0026]
When it is desired to change the inspection direction of the inspection object W, that is, the irradiation direction of the X-rays, the rotating frame 14 is rotated by the electric motor 45 so that the X-rays can be applied to the inspection object W from any direction. Can be irradiated.
[0027]
FIG. 6 shows a state in which a tall inspection object W is tilted horizontally and an X-ray inspection of the side surface is performed.
Of course, as described above, the piezo element 51 and the XYZ moving device 37 are controlled via the control device 52 so that the transmitted image becomes clear according to an instruction from the image analysis processing device 4, and the posture of the collimator 5 and the The position of the X-ray detector 7 with respect to the analyzer 6 is adjusted to be optimal.
[0028]
In addition, as shown by the imaginary line in FIG. 4, the lifting device 12 raises and lowers the lifting frame 13, that is, the rotating frame 14 provided with the collimator 5 and the analyzer 6, according to the size of the inspection object. Therefore, it is possible to always irradiate the X-ray at the optimum position regardless of the size of the inspection object.
[0029]
As described above, since the collimator and the analyzer are rotated along the outer periphery of the inspection space 36 for moving the inspection object W, conventionally, the X-rays can be emitted only from a certain direction. And the X-ray inspection can be easily performed. Of course, continuous imaging of the inspection object W can also be performed.
[0030]
By the way, in the above embodiment, the collimator 5 is supported with respect to the analyzer 6, and the four connecting struts 34 in which the piezo elements 51 are interposed are arranged on the way, but as shown in FIGS. 7 and 8, for example. The number of the connecting support members 34 in the rotating frame body 14 may be two on one side and one on the other side, and a total of three connecting post members 34 may be arranged. In this case, the shapes of the mounting plates 31 and 32 of the collimator 5 and the analyzer 6 in plan view are, for example, circular.
[0031]
Further, in the above embodiment, the piezo element is used as the adjusting member, but a magnetostrictive element may be used, for example. The magnetostrictive element is composed of a lanthanoid element having a large magnetic moment and an iron group element (Fe, Ni, Co, or the like). A strain is generated according to the strength of a magnetic field, and the size of the element changes. is there.
[0032]
【The invention's effect】
As described above, according to the configuration of the X-ray inspection apparatus of the present invention, the collimator and the analyzer are rotated with respect to the inspection space in which the inspection object is moved. Can not be irradiated, whereas the object can be irradiated with X-rays from an arbitrary direction, and thus the X-ray inspection can be easily performed.
[0033]
In addition, since the rotating body is moved up and down, it can be moved to the optimum irradiation position regardless of the size of the inspection object guided to the inspection space.
Furthermore, since the adjusting member is arranged on the connecting member that connects the collimator and the analyzer, it is possible to adjust the posture of the collimator with respect to the monochromator, for example, to adjust the X-ray incident angle to the optimum.
[Brief description of the drawings]
FIG. 1 is an overall perspective view showing a schematic configuration of an X-ray inspection apparatus according to an embodiment of the present invention.
FIG. 2 is a perspective view of an X-ray irradiation detection unit in the X-ray inspection apparatus.
FIG. 3 is a view as viewed in the direction of arrows AA in FIG. 2;
FIG. 4 is a sectional view of the X-ray irradiation detection unit.
FIG. 5 is a schematic diagram showing a control system in the X-ray irradiation detection unit.
FIG. 6 is a schematic front view illustrating the operation of the X-ray irradiation detection unit.
FIG. 7 is a schematic plan view of an X-ray irradiation detection section according to a modification of the present invention.
8 is a view taken in the direction of arrows BB in FIG. 7;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 X-ray generator 2 Monochromator 3 X-ray irradiation detection part 4 Image analysis processing device 5 Collimator 6 Analyzer 7 X-ray detector 8 Conveyor device 12 Elevating device 14 Rotating frame 15 Rotating device 22 Front frame material 23 Rear frame material 24 Connecting member 25 Supporting gear 31 First mounting plate 32 Second mounting plate 33 Third mounting plate 34 Connection support member 35 Ring-shaped gear 36 Inspection space 37 XYZ moving device 42 Drive side gear 43 Drive pinion 45 Electric motor 51 Piezo element 52 Control device

Claims (4)

A collimator for inputting X-rays emitted from the monochromator and aligning the phases thereof, and an analyzer for inputting X-rays emitted from the collimator and transmitting through the object to be inspected and removing the scattered X-rays by aligning the phases thereof. An X-ray inspection apparatus comprising: an X-ray detector that detects X-rays passing through the analyzer.
The collimator, the analyzer and the X-ray detector are arranged on a rotatable member rotatably provided on the support side, and a guide for guiding an object to be inspected is arranged in an inspection space formed between the collimator and the analyzer. An X-ray inspection apparatus characterized in that: 2. The X-ray inspection apparatus according to claim 1, further comprising a lifting device that raises and lowers the rotating body. The X-ray inspection apparatus according to claim 1, wherein an adjusting member that can adjust a distance between the collimator and the analyzer is arranged on a connecting member that connects the collimator and the analyzer in the rotating body. . 4. The X-ray inspection apparatus according to claim 1, wherein a piezo element or a magnetostrictive element is used as the adjustment member.

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