JP2004157080A - X-ray fluorescence analyzer - Google Patents

Abstract

Provided is an X-ray fluorescence spectrometer capable of maintaining a sample direction when a sample holder is conveyed along a circumferential path and eliminating the need to initialize the sample direction at an irradiation position and a designated position.
An r driving means (37) rotates an r driving shaft (43) between an irradiation position at which a primary X-ray (2) is irradiated to a sample (3) and an input position at which a sample holder (34) is replaced. The holder 34 is conveyed in the circumferential direction around the center of the r drive shaft 43, and the measuring portion of the sample 3 is positioned in the circumferential direction by rotating the r drive shaft 43 at the irradiation position. The θ driving means 38 has a function of rotating the θ drive shaft 53 to rotate the sample holder 34 around its central axis, and rotating the θ drive shaft 53 at the irradiation position to move the measurement portion around the central axis. Position. The r drive shaft 43 and the θ drive shaft 53 form a concentric double shaft. The designated position at which the designation of the measurement portion is performed is different from the irradiation position, and the θ drive shaft is used so that the sample holder 34 does not rotate when it is conveyed by the r drive means 37 and revolves around the r drive shaft 43. Control means 111 for rotating the motor 53.
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fluorescent X-ray analyzer that transports a sample to an irradiation position where primary X-rays are irradiated, positions a measurement portion of the sample at the irradiation position, and performs analysis.
[0002]
[Prior art]
For example, the sample mounted on the sample holder and placed on the turret (plate-like rotating body) is transferred from the input position where the sample holder is replaced to the rθ stage at the irradiation position where the primary X-ray is irradiated. There is a fluorescent X-ray analyzer that transports the sample by rotating it, appropriately drives the rθ stage at the irradiation position, positions the measurement portion of the sample, and analyzes an arbitrary minute portion. In such an apparatus, mapping analysis (distribution analysis) can be performed by repeating positioning and measurement to analyze a plurality of measurement portions. The designation of the measurement portion is, for example, installing an imaging means such as a CCD camera at an appropriate position between the input position and the irradiation position, setting that position as the designated position, and temporarily stopping the sample holder at the designated position during transport, This is performed on the screen while watching the sample surface imaged by the imaging means.
[0003]
[Problems to be solved by the invention]
However, when the sample holder is transported by the rotation of the turret, that is, revolves around the rotation axis of the turret, since the sample holder is stationary with respect to the turret, the sample holder simultaneously rotates by the same rotation angle as the transport ( (Rotation about the central axis of the cylindrical sample holder itself). FIG. 7 illustrates the direction 3d of the sample 3 in the sample holder conveyed by the rotation of the turret 15 at every 90 ° rotation angle of conveyance by attaching an arrow to the upper surface of the sample 3. Therefore, the direction of the sample changes between the designated position and the irradiation position. However, it is difficult to make the designated position the same as the irradiation position, that is, to provide a CCD camera or the like so as not to interfere with the X-ray tube or the like at the irradiation position.
[0004]
In order to solve this problem, for example, in a fluorescent X-ray analyzer described in Patent Literature 1 below, the following device has been devised. A reference mark M is provided on a sample holder (sample) S, and the sample holder S is rotated at a designated position (image measurement unit) by a rotation mechanism such as a θ stage, and the reference mark M is detected by a detector 5b such as a laser displacement meter. , The θ stage is stopped so that the reference mark M is in the direction of 3 o'clock, the direction of the sample S is initialized, and then the measurement portion p is specified. Next, the sample holder S is transported to the irradiation position (the fluorescent X-ray measurement unit), and the direction of the sample S is initialized using the rotation mechanism and the detector 5B in the same manner. Do. That is, at both the irradiation position and the designated position, a rotation mechanism and a detector are required for initializing the direction of the sample, which complicates the configuration of the apparatus and takes time.
[0005]
[Patent Document 1]
JP-A-2002-39972 (paragraphs 0015 to 0018, FIG. 2)
[0006]
The present invention has been made in view of the above-described conventional problems, and can maintain the direction of a sample when transporting the sample holder along a circumferential path, thereby making it unnecessary to initialize the direction of the sample at an irradiation position and a designated position. An object of the present invention is to provide a fluorescent X-ray analyzer.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, an apparatus of the present invention is an X-ray fluorescence analyzer for measuring the intensity of secondary X-rays generated by irradiating a sample with primary X-rays. θ driving means. The r driving means rotates the r drive shaft between an irradiation position at which the primary X-ray is irradiated to the sample mounted on the sample holder and an input position at which the sample holder is exchanged, thereby causing the sample holder to rotate. The measurement part of the sample is positioned in the circumferential direction by transporting in the circumferential direction around the r drive shaft and rotating the r drive shaft at the irradiation position. The θ drive means has a function of rotating the sample holder around its central axis by rotating the θ drive axis, and rotating the θ drive axis at the irradiation position to move the measurement portion of the sample to the central axis. Position around. The r drive shaft and the θ drive shaft constitute a concentric double shaft.
[0008]
Here, the designated position where the measurement portion of the sample is designated is a position different from the irradiation position. In this X-ray fluorescence spectrometer, the sample holder is conveyed by the r driving means and revolves around the r driving axis. And a control unit for rotating the θ drive shaft so that the θ drive shaft does not rotate.
[0009]
According to the apparatus of the present invention, the control means appropriately rotates the θ drive shaft so that the sample holder is not rotated when conveyed around the r drive shaft and revolves, so that the direction of the sample is maintained and the irradiation position is maintained. Also, it is not necessary to initialize the direction of the sample at the designated position.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an apparatus according to an embodiment of the present invention will be described from the configuration. As shown in the longitudinal sectional view of FIG. 1, this apparatus first irradiates a sample 3 with primary X-rays 2 from below from an X-ray source 1 such as an X-ray tube in a chamber 39 to be evacuated. This is a bottom-illuminated X-ray fluorescence spectrometer that measures the intensity of the generated secondary X-rays 5 with the detection means 6. The detection means 6 includes a divergent solar slit, a spectral element, a light-receiving solar slit, a detector, and the like. Here, only the divergent solar slit is illustrated. When a detector having a high energy resolution such as an SSD is used, it is not necessary to provide a spectral element. Further, the present invention is not limited to the bottom irradiation type, but may be a top irradiation type in which the sample is irradiated with primary X-rays from above.
[0011]
This device includes the following r driving means 37 and θ driving means 38. The r driving means 37 irradiates the sample 3A mounted on the sample holder 34A with the primary X-ray 2 (FIG. 1) from the X-ray source 1, as shown in FIG. The r drive shaft 43 (FIG. 1) is rotated between an irradiation position (the right side in FIGS. 1 and 2) and an input position (the left side in FIGS. 1 and 2) where the sample holder 34B is replaced. Thus, the sample holders 34A and 34B are conveyed in the circumferential direction r around the r drive shaft 43, and the measured portion of the sample 3A is moved in the circumferential direction r by rotating the r drive shaft 43 at the irradiation position. Position. In FIG. 2, the semicircle from the input position on the left side to the irradiation position on the right side through the near side is defined as the transport forward path, and the semicircle returning from the irradiation position on the right side to the input position on the left side via the back side is defined as the transport return path. The entire circumference is defined as a transport route.
[0012]
More specifically, as shown in FIG. 1, the r driving means 37 includes an r driving motor 40 which is a stepping motor, and a columnar r connected to a rotating shaft of the r driving motor 40 via a transmission unit 49. A driving body 41, a pin r connected to a cylindrical lower end of the driving body 41 in a diametrical direction (a direction perpendicular to the paper surface in FIG. 1), and a cylindrical r having an upper end with a groove in which the pin 42 engages. The drive shaft 43, a horizontal disk-shaped stage 45 connected to the lower end of the r drive shaft 43, and are mounted on the stage 45 via bearings 47A and 47B, respectively, and the sample holders 34A and 34B are mounted respectively. And two holder receivers 48A and 48B. The two holder receivers 48A and 48B are provided at positions separated by 180 degrees in the circumferential direction r (FIG. 2). The transmission unit 49 includes a pulley 63 connected to the rotation shaft of the r drive motor 40, a pulley 65 connected with the r drive body 41 as a rotation shaft, and a belt 64 hung on the pulleys 63 and 65.
[0013]
The holder receivers 48A and 48B include ring gears 61A and 61B attached to the stage 45 via bearings 47A and 47B, and cup-shaped holder receiving bodies 62A and 62B mounted on the ring gears 61A and 61B. Steps (collars) are formed on the outer periphery of the upper ends of the holder receiving bodies 62A and 62B, and the upper outer peripheral sides of the holder receiving bodies 62A and 62B are fitted and engaged with the upper inner peripheral sides of the ring gears 61A and 61B. The bottom portions (lower portions) of the holder receiving bodies 62A and 62B are open except for the peripheral edge of the bottom plate, and the lower step formed on the outer periphery of the lower portions of the sample holders 34A and 34B is fitted and engaged inside the bottom portions. It is placed so that it does. Although the sample holders 34A and 34B are cylindrical with a bottom, the bottom is open except for the peripheral edge of the bottom plate, and the outer periphery of the disk-shaped samples 3A and 3B fits into and engages with the inside of the bottom. The primary X-rays 2 are applied to the lower surface of the sample 3A through the openings at the bottoms of the sample holders 34A and 34B. An upper step is formed on the outer periphery of the upper end of each of the sample holders 34A and 34B.
[0014]
The shafts of wheel-shaped bearings 46D, 46E and 46F are screwed and attached to the stage 45 at three positions on the outer peripheral portion of the upper surface as shown in FIG. 2, and the bearings are mounted on the inner surface of the cylindrical wall of the chamber 39 in FIG. The outer periphery of 46D, 46E, 46F rolls. Also, the axes of the bearings 46G, 46H, and 46I are set so that the outer circumferences of the bearings 46G, 46H, and 46I (46G and 46H are shown in FIG. 1 and 46I is shown in FIG. 2) roll around the outer peripheral portion of the lower surface of the stage 45. It is set horizontally and fixed to the chamber 39 (the fixing state is not shown). With the support structure using these bearings 46D, 46E, 46F, 46G, 46H, and 46I, the stage 45 is rotatable in the circumferential direction r around the r drive shaft 43.
[0015]
As shown in FIG. 2, the θ driving means 38 has a function of rotating the sample holders 34A and 34B around the respective central axes CA and CB (in the θA and CB directions) by rotating the θ driving shaft 53. The measurement portion of the sample 3A is positioned around the central axis CA (the θA direction) by rotating the θ drive shaft 53 at the irradiation position.
[0016]
More specifically, as shown in FIG. 1, the θ driving means 38 is connected to a θ driving motor 50 which is a stepping motor and a rotating shaft of the θ driving motor 50 via a transmission portion 59, and a bearing is provided at an intermediate portion. A stepped cylindrical θ-driving body 52 that is rotatable relative to the inner r-driving body 41 via 55, and has a projection at the upper end that engages a groove at the lower end of the θ-driving body 52. A cylindrical θ drive shaft 53 that is rotatable relative to the inner r drive shaft 43 via a bearing 54, and the holder receivers 48 </ b> A, 48 </ b> B and the like whose outer periphery meshes with gears provided on the outer periphery of the lower end of the θ drive shaft 53. Including. A cylindrical cover 80 is attached to an upper portion (top plate) of the chamber 39, and the θ driving body 52 located inside the cylindrical cover 80 is rotatable relative to the cover 80 via a bearing 81 at an intermediate portion. The r drive shaft 43 penetrates the θ drive shaft 53, and both constitute a concentric double shaft. The transmission unit 59 includes a pulley 73 connected to the rotation shaft of the θ drive motor 50, a pulley 75 connected to the θ drive body 52 as a rotation axis, and a belt 74 hung on the pulleys 73 and 75.
[0017]
The r and θ drive motors 40 and 50 need only be able to detect the rotational position, and may use a servomotor in addition to the stepping motor. Also, a motor that does not detect the rotational position and an encoder that detects the rotational position May be used in combination. Further, the space between the r drive body 41 and the θ drive body 52, the space between the θ drive body 52 and the cover 80, and the space between the cover 80 and the upper portion (top plate) of the chamber 39 are all appropriately sealed. FIG. 1 is a longitudinal sectional view of FIG. 2, but shows a section passing through the axes of the bearings 46D, 46E, 46G, and 46H in the outer periphery of the stage 45 and the chamber 39.
[0018]
Further, as shown in FIG. 1, the apparatus of this embodiment includes the following sample exchange means 90 for exchanging the sample holder 34B, that is, exchanging the sample 3B at the loading position. First, an opening 39a is provided at the top of the chamber 39 so that the sample holder 34B and the holder receiving main body 62B at the loading position can move upward as shown in FIG. A cylindrical exchange cylinder 91 communicating with the inside of the chamber 39 is attached to the upper surface of the chamber 39. The lid 92 that seals the upper part of the exchange cylinder 91 is moved in the horizontal and vertical directions by a moving mechanism (not shown) via a pair of stays 93a and 93b. A grip portion 94 having a pair of claws 94a and 94b for gripping and releasing the sample holder 34B is provided inside the lid 92.
[0019]
In addition, a column-shaped exchange shaft 95 that moves up and down along the center axis of the exchange cylinder 91 is provided, and a disk-shaped holder base 96 on which the sample holder 34B is placed is attached to a tip end thereof. Outside the exchange shaft 95, a holder receiving base 97 constituting a slidable double shaft is provided. The upper part of the holder receiving base 97 is formed in a cylindrical shape with a bottom, and the upper end of the holder receiving main body 62B is provided. It is placed so that the bottom fits. Below the holder receiving base 97, a stepped cylindrical spring stopper 98 is attached to the replacement shaft 95, and its downward movement is regulated by a ring 99 fitted in a groove of the replacement shaft 95. The extension of the coil spring 100 inserted between the holder receiving base 97 and the spring stopper 98 causes the holder receiving base 97 to be pushed upward with respect to the replacement shaft 95, so that the inner surface of the bottom of the holder receiving base 97 , The lower surface of the holder base 96 contacts.
[0020]
In addition, a step portion 91 a is formed inside the replacement cylinder 91 so that the upper end of the holder receiving body 62 </ b> B placed on the holder receiving base 97 abuts from below. Also, between the lid 92 and the exchange cylinder 91, between the exchange cylinder 91 and the chamber 39, between the step portion of the exchange cylinder 91 and the holder receiving main body 62B, and between the holder receiving main body 62B and the holder receiving base 97. The space between the holder receiving base 97 and the replacement shaft 95 is properly sealed.
[0021]
Further, in the apparatus of this embodiment, as shown in FIG. 2, an image pickup means such as a CCD camera which looks up the sample surface from below in the middle of the transport forward path from the input position on the left side to the irradiation position on the right side through the near side. 110 is set, and its position on the transport route is set as a designated position. The specification of the measurement portion is performed on the screen while the operator temporarily stops the sample holder 34 at the specified position during the outward transport and looks at the sample surface imaged by the imaging unit 110. The reason why the designated position on the transport path is different from the irradiation position and the injection position is that the imaging unit 110 is installed so as not to interfere with the X-ray source 1 at the irradiation position or the sample exchange unit 90 (FIG. 3) at the injection position. Because it is difficult to do. Further, as shown in FIG. 1, the apparatus of this embodiment rotates the θ drive shaft 53 so that the sample holder 34 does not rotate when it is conveyed by the r drive means 37 and revolves around the r drive shaft 43. Control means 111 is provided. Other configurations of this device will be described together with the following description of the operation.
[0022]
Next, the operation of the device of this embodiment will be described. The entire operation is also automatically performed by the control unit 111. Now, in FIG. 1, the sample holder 34A at the irradiation position is immediately after being conveyed and before the positioning of the measurement portion of the sample 3A. Here, the irradiation position refers to a position where the sample 3A mounted on the sample holder 34A is irradiated with the primary X-ray 2 from the X-ray source 1, and has a certain range. The position immediately after being conveyed is a predetermined reference position among them. At this time, the other sample holder 34B has already finished the intensity measurement at the irradiation position with respect to the mounted sample 3B, and is at the loading position. At this stage, as shown in FIG. 3, the holder table 96 and the holder table 97 integrated with the exchange shaft 95 are lifted from below the sample holder 34B and the holder receiving body 62B at the loading position, and the sample holder The holder 34B and the holder receiving main body 62B are placed and pushed up, and the upper end of the holder receiving main body 62B abuts on the lower surface of the step portion 91a of the replacement cylinder 91. As a result, the space SU above the holder receiving main body 62 </ b> B and the holder receiving base 97 inside the lid 92 and the replacement cylinder 91 becomes a closed space that does not communicate with the inside of the chamber 39.
[0023]
Therefore, air is introduced into the upper space SU and brought to atmospheric pressure, and as shown in FIG. 4, the holder base 96 on which the sample holder 34B is placed and the replacement shaft 95 overcome the extension force of the coil spring 100. , Rise further. Then, the gripper 94 (FIG. 3), which has opened the claws 94 a and 94 b and is on standby, closes the claws 94 a and 94 b and engages with the upper step of the sample holder 34 </ b> B to grip the sample holder 34 </ b> B. With the gripper 94 gripping the sample holder 34B, the lid 92 is moved vertically and horizontally by the moving mechanism, and the claws 94a and 94b of the gripper 94 are opened. It is returned to the position (not shown).
[0024]
Further, by the reverse procedure of returning the sample holder 34B to the standby position, the sample holder 34C mounted with the sample 3C to be analyzed next to the sample 3A (FIG. 1) at the current irradiation position is moved from the standby position to the position shown in FIG. Is moved to the position of the sample holder 34B. At this time, the upper space SU is evacuated after the lid 92 seals the upper part of the replacement cylinder 91.
[0025]
During the above-mentioned sample exchange operation, the vacuum in the chamber 39 is maintained, and the stage 45 moves in the circumferential direction r within a range where the ring gear 61B does not interfere with the exchange shaft 95 and the spring stopper 98. Can rotate. That is, while exchanging the sample at the loading position, the analysis can be performed at the irradiation position in parallel as follows. First, the control unit 111 of FIG. 1 appropriately rotates the r drive motor 40 of the r drive unit 37 and the θ drive motor 50 of the θ drive unit 38, and sets the designated measurement portion of the sample 3A (for the designation of the measurement portion, The measurement portion is positioned in the circumferential direction r and the θA direction so that the primary X-ray 2 is irradiated from the X-ray source 1 and the secondary X-ray 5 generated therefrom is incident on the detecting means 6. . Then, the intensity of the secondary X-ray 5 generated by irradiating the measurement portion with the primary X-ray 2 is measured by the detecting means 6, and the fluorescent X-ray analysis is performed. When a plurality of measurement portions are specified, positioning and intensity measurement are sequentially performed, and distribution analysis is performed.
[0026]
When it is desired to obtain the averaged data while avoiding the problem of non-uniformity in the sample 3A, the above-described positioning is not performed, and the so-called spin function of the θ driving unit 38 is used. By performing the measurement while continuously rotating the sample holder 34A, it is also possible to analyze a circular or ring-shaped wide measurement part. Note that when the holder receiver 48A is rotated at the irradiation position by rotating the θ drive shaft 53, the ring gear 61B on the loading position side idles at the same time as shown in FIG. 3, but there is no problem.
[0027]
When all the intensity measurements on the sample 3A are completed, the control unit 111 of FIG. 1 appropriately rotates the r drive motor 40 of the r drive unit 37, and moves the sample holder 34A to the position before positioning, that is, the irradiation position. Return to the predetermined reference position. Thereby, as shown in FIG. 3, the ring gear 61B is strictly located immediately below the sample holder 34C and the holder receiving main body 62B. Then, the holder table 96 on which the sample holder 34C and the holder receiving body 62B are placed, the holder receiving table 97, and the replacement shaft 95 are lowered, and the sample holder 34C comes to the loading position shown in FIG. This completes the work of replacing the sample 3B with the sample 3C at the loading position.
[0028]
Next, the control unit 111 appropriately rotates the r-drive motor 40 of the r-drive unit 37 (in the device of this embodiment, 90 degrees counterclockwise when viewed from above), and moves the sample holder 34C at the input position to the designated position. When moved, an image of the surface of the sample 3C captured by the imaging unit 110 (FIG. 2) is displayed on the screen 112a of the display unit 112 such as a CRT. At this time, the imaging unit 110 (FIG. 2) is installed such that the center of the surface of the sample 3C is located at the center of the screen 112a.
[0029]
Then, based on the image of the surface of the sample 3C displayed on the screen 112a of the display means 112, the operator specifies a measurement part (or a plurality of measurement parts) of the sample 3C. This designation is performed by using the designation means 113 included in the control means 111, moving the pointer 113b of the screen 112a on the screen to a desired portion to be measured, for example, with the mouse 113a, and clicking there. The data of the designated measurement portion is stored in the designation unit 113 as coordinate values (rθ coordinate values and XY coordinate values) having the origin at the center of the surface of the sample 3C (also the center of the screen 112a).
[0030]
When the operator designates the measurement portion of the sample 3C, the control means 111 appropriately controls the r drive motor 40 of the r drive means 37 (in the apparatus of this embodiment, counterclockwise when viewed from above) for the measurement. 90 °) to move the sample holder 34C at the designated position to the irradiation position. By the way, when the sample holder 34C is conveyed around the r drive shaft 43 and revolves, as described above, conventionally, the sample holder is rotated by the same rotation angle as the conveyance (FIG. 7). There is a problem that the direction of the sample changes between the designated position and the irradiation position.
[0031]
Also in the apparatus of this embodiment, if only the r-drive shaft 43 is rotated without rotating the θ-axis drive 53 at the time of conveyance, the holder receivers 48A and 48B together with the stage 45 around the stationary θ-drive shaft 53. Also rotates, and the ring gears 61A, 61B of the holder receivers 48A, 48B mesh with the gears provided on the outer periphery of the lower end portion of the θ drive shaft 53, so that the holder receivers 48A, 48B and the sample holder mounted thereon. 34A and 34C will rotate. For example, assuming that the gears of the ring gears 61A and 61B and the θ drive shaft 53 have the same diameter and the same number of teeth in the apparatus of this embodiment, the sample holder 34 rotates by twice the rotation angle of the conveyance. . FIG. 6 illustrates the direction 3d of the sample 3 in the sample holder 34 conveyed by the rotation of the stage 45 at every 90 ° rotation angle of conveyance by giving an arrow to the upper surface of the sample 3. As described above, when the sample is rotated at a larger angular velocity than the conventional one, the sample holder 34 shown in FIG. 1 slips with respect to the holder receiver 48 due to the inertial force of the rotation, and the direction of the sample further changes between the designated position and the irradiation position. There is also a risk that it will be lost.
[0032]
Thus, in the apparatus of the present invention, the θ drive shaft 53 is rotated by the control means 111 so that the sample holder 34 is not rotated when it is conveyed by the r drive means 37 and revolves around the r drive shaft 43. For example, in the apparatus of this embodiment, the θ drive motor 50 of the θ drive means 38 is rotated in a direction opposite to that of the r drive motor 40 by twice the rotation angle of the transport to cancel the rotation of the sample holder 34. This operation is performed in the entire transport path. FIG. 5 illustrates the direction 3d of the sample 3 in the sample holder 34 conveyed by the rotation of the stage 45 at every 90 ° rotation angle of conveyance by giving an arrow to the upper surface of the sample 3. In the present invention, the direction of the sample does not change anywhere on the transport path.
[0033]
In this way, the control unit 111 of FIG. 1 appropriately rotates the r drive motor 40 of the r drive unit 37 and the θ drive motor 50 of the θ drive unit 38 for measurement of the sample 3C, and 34C is moved to the irradiation position without rotating. Therefore, according to the apparatus of this embodiment, when the sample holder 34C is transported around the r drive shaft 43, the direction of the sample 3C is maintained, and the initialization of the direction of the sample 3C at the irradiation position and the designated position becomes unnecessary. it can.
[0034]
At the same time as moving the sample holder 34C at the designated position to the irradiation position, the other sample holder 34A is moved to the loading position, and the above procedure is repeated. If there is no sample 3C to be subsequently analyzed, the sample holder 34A mounted with the analyzed sample 3A is returned to the standby position as described above, and the analysis operation is completed.
[0035]
Note that the designated position may be outside the transport path due to the rotation of the stage 45. For example, the imaging means 110 is installed outside the main body of the X-ray fluorescence spectrometer, and a measurement portion is specified for the sample 3 mounted on the sample holder 34 in the same manner as described above, and then the sample holder 34 is moved to the respective standby positions. The sample is placed (the direction of the sample 3 as viewed from the operator is the same as the direction specified at the time of mounting), and when the sample exchange unit 90 moves from the standby position to the loading position, the sample 3 as viewed from the operator is moved. Is maintained, the direction of the sample 3 is maintained as described above in the transport path by the rotation of the stage 45 after the loading position, so that the sample 3 at the irradiation position and the designated position is also maintained. It is not necessary to initialize the direction.
[0036]
【The invention's effect】
As described above in detail, according to the X-ray fluorescence spectrometer of the present invention, the control means appropriately rotates the θ drive shaft so that the sample holder does not rotate when it is transported around the r drive shaft and revolves. Therefore, the direction of the sample is maintained, and it is not necessary to initialize the direction of the sample at the irradiation position and the designated position.
[Brief description of the drawings]
FIG. 1 is a vertical sectional view showing a bottom-illuminated X-ray fluorescence spectrometer according to an embodiment of the present invention.
FIG. 2 is a perspective view of the apparatus with a chamber removed.
FIG. 3 is a longitudinal sectional view showing a sample exchange mechanism of the same device.
FIG. 4 is a longitudinal sectional view showing another state of the sample exchange mechanism of the apparatus.
FIG. 5 is a diagram exemplifying the direction of a sample conveyed by rotation of a stage in the same apparatus at every 90 ° rotation angle of conveyance.
FIG. 6 is a diagram exemplifying the direction of a sample conveyed when the stage is rotated while the θ-axis drive is stopped in the same apparatus at every 90 ° rotation angle of conveyance.
FIG. 7 is a diagram exemplifying the direction of a sample conveyed by rotation of a turret in a conventional X-ray fluorescence spectrometer at every 90 ° rotation angle of conveyance.
[Explanation of symbols]
2: Primary X-ray, 3: Sample, 5: Secondary X-ray, 34: Sample holder, 37: r drive means, 38: θ drive means, 43: r drive axis, 53: θ drive axis, 111: control Means, C: central axis of sample holder, r: circumferential direction, θ: around central axis.

Claims (1)

A fluorescent X-ray analyzer for measuring the intensity of secondary X-rays generated by irradiating a sample with primary X-rays,
By rotating the r drive shaft between the irradiation position at which the sample mounted on the sample holder is irradiated with the primary X-ray and the input position at which the sample holder is replaced, the sample drive is moved to the r drive shaft. R driving means for transporting in the circumferential direction around the center, and positioning the measurement portion of the sample in the circumferential direction by rotating the r drive shaft at the irradiation position;
has a function of rotating the sample holder around its central axis by rotating the θ drive shaft, and positioning the measurement portion of the sample around the central axis by rotating the θ drive shaft at the irradiation position. And driving means,
The r drive axis and the θ drive axis constitute a concentric double axis,
The designated position where the designation of the measurement portion of the sample is performed is a position different from the irradiation position,
An X-ray fluorescence spectrometer comprising: a control unit for rotating the θ drive shaft so that the sample holder does not rotate when revolved around the r drive shaft by being conveyed by the r drive unit.

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