JP2004069040A - Pressure reducing valve provided with manual closure mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure reducing valve provided with a manual closure valve capable of saving space and reducing cost by integrating the pressure reducing valve with the manual closure mechanism. <P>SOLUTION: An actuation member 81 is disposed on the back of a first pressure means through a spring member 82, and a manual operation part 86 and the actuation member are connected to each other to make it possible to advance and retreat the actuation member by rotation of the manual operation part 86. When the actuation member is advanced, the first pressure means M1 is forcedly advanced to apply a valve mechanism body to a valve seat for forming a valve closed state. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a pressure reducing valve for controlling a flow rate of a fluid (liquid or gas) to be constant, and more particularly to a pressure reducing valve having a manual closing mechanism used for controlling a fluid such as a chemical solution or pure water in a semiconductor manufacturing line or the like. About.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in a semiconductor production line or a production line for various chemicals, the supply of various chemicals or pure water is controlled by a valve member having a diaphragm valve or the like. For example, in a device that performs fluid control, a pressure reducing valve that controls a flow rate of a fluid (liquid or gas) to be constant and a manual closing mechanism that manually shuts off a line in an emergency or the like are arranged in series.
[0003]
However, arranging and piping the pressure reducing valve and the manual closing mechanism separately and independently in series requires a space for two devices, and also has a problem that the number of liquid pools increases due to a complicated flow path. Come out. Naturally, an increase in the number of devices not only increases the cost, but also tends to complicate the management of the devices due to an increase in the number of complicated components.
[0004]
[Problems to be solved by the invention]
The present invention has been proposed in order to address the above-mentioned problem, and a novel manual closing which can realize space saving and low cost can be realized by integrating the pressure reducing valve and the manual closing mechanism. A pressure reducing valve provided with a mechanism is provided.
[0005]
[Means for Solving the Problems]
That is, the present invention provides a chamber (20) having a controlled fluid inflow portion (13) on one side and a controlled fluid outflow portion (15) formed on the other side via a valve seat (16). A main body (12), a valve part (41) for opening and closing the valve seat, a first diaphragm part (50) arranged on the inflow part side, and a second diaphragm part (60) arranged on the outflow part side. ), And each of the diaphragm portions is mounted inside the chamber with its outer peripheral portion fixed to the body main body, and the chamber is connected to the outside of the first diaphragm portion. A first pressure chamber (21), a valve chamber (25) surrounded by the first and second diaphragm portions and having the inflow portion, the valve seat and the outflow portion, and a second pressurization outside the second diaphragm portion. Divided into rooms (30) The first diaphragm section and the second diaphragm section are always kept constant in the valve chamber direction by the first pressurizing means (M1) and the second pressurizing means (M2) provided in the first pressurizing chamber and the second pressurizing chamber. A pressure reducing valve (10) configured to apply pressure, wherein an operating member (81) is disposed via a spring member (82) at a rear portion of the first pressurizing means, and a manual operating portion (86); The operating member is connected to the operating member so that the operating member can move forward and backward by rotating the operating portion. When the operating member moves forward, the first pressurizing means is forcibly advanced to move the valve mechanism body to a valve seat. The present invention relates to a pressure reducing valve provided with a manual closing mechanism, which is brought into contact with the valve to create a valve closed state.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a longitudinal sectional view of a pressure reducing valve having a manual closing mechanism according to an embodiment of the present invention, FIG. 2 is an exploded perspective view showing the structure of the manual closing mechanism, and FIG. FIG. 4 is a schematic view showing a mating groove portion, FIG. 4 is a sectional view showing a valve closing state of the pressure reducing valve provided with the manual closing mechanism of FIG. 1, FIG. 5 is a sectional view showing a valve closing state by the manual closing mechanism, and FIG. FIG. 7 is a partial sectional view showing an embodiment of the manual closing mechanism, and FIG. 7 is a partial sectional view showing a valve closed state by the manual closing mechanism of FIG.
[0007]
A pressure reducing valve 10 having a manual closing mechanism shown in FIG. 1 according to an embodiment of the present invention includes a pressure reducing valve section 11 for controlling a flow rate of a fluid (liquid or gas) to be constant, and a manual closing mechanism section 80. Consists of
[0008]
First, the pressure reducing valve section 11 shown in the lower part of the drawing of this embodiment will be described.
The body main body 12 is formed of a resin having high corrosion resistance and chemical resistance such as fluororesin, has an inflow portion 13 for a controlled fluid on one side, and has a controlled fluid on the other side via a valve seat 16. Has a chamber 20 in which an outlet 15 is formed. As shown, the body main body 12 of the present embodiment is divided into a first block 12a, a second block 12b, and a third block 12c, and these are integrally assembled. In addition, an orifice (not shown) having an appropriate diameter may be attached to the outflow portion 15. The inflow section 13 is connected to an inflow pipe, and the outflow section 15 is connected to an outflow pipe (both not shown).
[0009]
The valve mechanism body 40 is formed of a resin having high corrosion resistance and chemical resistance such as a fluororesin similarly to the body main body 12, and is provided with a first diaphragm portion 50 disposed on the inflow portion 13 side and the outflow portion 15. And a second diaphragm portion 60 disposed on the side.
[0010]
The first diaphragm portion 50 and the second diaphragm portion 60 are attached to the inside of the chamber 20 with their outer peripheral portions 50b and 60b fixed to the body 12, and the first diaphragm portion 50 and the second diaphragm portion 60 are disposed outside the first diaphragm portion 50. One pressurizing chamber 21, a valve chamber 25 surrounded by the first diaphragm part 50 and the second diaphragm part 60 and having the inflow part 13, the valve seat 16 and the outflow part 15, and the second pressurization outside the second diaphragm part 60. It is divided into a room 30. Reference numeral 71 in the figure denotes a sealing member for sealing between the body main body 12 (12a, 12b) and the first diaphragm part 50, and reference numeral 72 denotes a sealing member for sealing between the body main body 12 (12b, 12c) and the second diaphragm part 60. It is a sealing member.
[0011]
The first diaphragm part 50 and the second diaphragm part 60 constituting the valve mechanism 40 are provided with first pressurizing means M1 and second pressurizing means M1 provided in the first pressurizing chamber 21 and the second pressurizing chamber 30, respectively. The pressurizing means M2 is configured to constantly apply a constant pressure in the valve chamber direction. The first pressing means M1 in the embodiment comprises a spring S1, and a spring S1 having a predetermined spring constant is mounted between the bottom of the first pressing chamber 21 and a spring receiving part 70 formed in the first diaphragm part 50. Is done. The pressurizing means M1 is not limited to the spring S1, and may employ a pressurized gas, or may employ both a spring and a pressurized gas, and may employ a solenoid (electromagnet) or the like. Good. When the spring is used alone, although not shown, it is desirable that a spring holding member be screwed into the spring device to adjust the load. Further, a servo motor or the like may be connected to the load-adjustable spring device so that the spring constant can be automatically controlled. Reference numeral 22 shown in the drawing represents a respiratory path through which air enters and exits the first pressurizing chamber 21.
[0012]
Further, the second pressurizing means M2 of the embodiment is constituted by a pressurized gas A1. When the second pressurizing means M2 is a pressurized gas A1, there is an advantage that the set pressure can be easily adjusted and is effective when a large set pressure is required. Regarding the illustrated second pressurizing chamber 30, reference numeral 31 denotes a supply / exhaust port for pressurized gas, to which a pressurizing device having an appropriate air valve or the like is connected. In addition, as the second pressurizing means M2, the above-described load-adjustable spring device or solenoid may be employed.
[0013]
The first diaphragm portion 50 of the valve mechanism body 40 is integrally provided with a first member 51 having a valve portion 41, and the second diaphragm portion 60 is connected to the first member 51 so as to be freely detachably fitted to the first member 51. Two members 61 are provided integrally. The loosely-fitted connection between the first member 51 and the second member 61 is constituted by a frustoconical concave portion 52 formed on the first member 51 and a frustoconical convex portion 62 formed on the second member 61. Have been. Contrary to this example, a frustum-shaped convex portion may be formed on the first member 51, and a frustum-shaped concave portion may be formed on the second member 61. With this configuration, there is an advantage that the positioning of the first member 51 and the second member 61 at the time of connection can be reliably performed. Note that the first member 51 and the second member 61 may be formed integrally with the diaphragm main body, or may be formed independently and integrally connected by screwing or the like.
[0014]
Next, the manual closing mechanism 80 arranges an operating member 81 at the rear of the first pressurizing means M1 via a spring member 82, and connects the manual operating section 86 and the operating member 81 to the operating section 81. When the operating member 81 moves forward, the spring receiving portion 70 at the rear of the first pressurizing means M1 is forcibly advanced by rotating the operating member 81 to rotate the valve mechanism body 40 to the valve seat 16. To create a valve-closed state. In the drawing, reference numeral 83 indicates a respiratory path through which air enters and exits when the operating member 81 advances and retreats, and reference numeral 88 indicates a mark indicating the direction of the manual operation unit 86.
[0015]
The operating member 81 is connected to the manual operating section 86, and the locking rod 87 of the manual operating section 86 is engaged with engaging grooves 91 and 92 having a difference in height formed on the outer periphery of the operating member 81. Since the length of the operating member 81 inserted into the device 10 is changed by the engagement, the operating member 81 can be moved forward and backward. Further, since the operating member 81 is always disposed via the spring member 52 which urges the inside of the apparatus 10 (downward in the drawing), the locking bar 87 of the manual operation unit 86 always engages with the engaging groove 91. (Open) and the state engaged with the engaging groove 92 (closed) are maintained, so that malfunction can be prevented.
[0016]
As can be clearly understood from the exploded perspective view of FIG. 2, when the manual operation portion 86 is rotated by 90 degrees, the engagement groove portions 91 and 92 are formed such that the locking rod portions 87 are formed as shallow grooves. It is formed around the operating member 81 so as to engage with the groove 91 or the engagement groove 92 which is a deep groove. In the embodiment, as shown in a schematic plan view in FIG. 3, the engagement grooves 91 and 92 have a height difference between the grooves 91 and 92 so that the manual operation section 86 can be easily reciprocated. Was formed smaller than the other parts.
[0017]
As another example of the manual closing mechanism, as shown in FIGS. 6 and 7, an operating member 81A is provided via a spring member 82 at the rear of the first pressing means (spring receiving portion 70 in the figure). The operation member 81A is connected to a manual operation lever 86A having a cam portion 85A at the tip and the operation member 81A by turning (tilting) the operation lever 86A. At the time of forward movement, a mechanism (80A) for forcibly advancing the spring receiving portion 70 to bring the valve mechanism body 40 into contact with the valve seat 16 to create a valve-closed state can be used in the same manner as in the above embodiment.
[0018]
The operation member 81A is connected to the manual operation lever 86A, and the length of the operation member 81A inserted into the device 10 is changed by the cam portion 85A of the manual operation lever 86A. Can be advanced and retreated. Reference numeral 89A is a rotation preventing member that restricts rotation of the operating member 81A. In addition, the same members as those in the above embodiment are denoted by the same reference numerals.
[0019]
In the pressure reducing valve 10 of this embodiment, in a normal state, as shown in FIG. 4, the manual operation portion 86 is engaged with the locking rod portion 87 in the engagement groove portion 91 of the shallow groove, and the operating member 81 is retracted. In this state, since the operating member 81 and the spring receiving portion 70 of the first pressurizing means M1 are not connected to each other, the valve mechanism body 40 is always operated by the urging action of the spring member S1 of the first pressurizing means M1. In forward position.
[0020]
The pressure reducing valve 10 shown in FIG. 1 has a locking rod 87 of a manual operation unit 86 engaged with an engagement groove 91 of a shallow groove, and the operating member 81 is retracted. This is an example showing a valve open state in which air flows in from an air inflow / outflow portion 31 of a pressure means to retreat a first diaphragm valve mechanism 40 to separate a valve portion 41 from a valve seat 16 and allow fluid to flow.
[0021]
In the pressure reducing valve 10 shown in FIG. 4, the operating member 81 is retracted by engaging the locking rod portion 87 of the manual operating portion 86 with the engaging groove portion 92 of the shallow groove. Since no air is allowed to flow from the air inflow portion 31 as in the example, the valve mechanism body 40 is advanced by the spring member S1 of the first pressurizing means M1 to bring the valve portion 41 into contact with the valve seat 16. It is closed.
[0022]
Further, the pressure reducing valve 10 shown in FIG. 5 rotates the manual operating portion 86 to engage the locking rod portion 87 with the engaging groove portion 91 which is a deep groove, thereby moving the operating member 81 forward, and further moving the spring member. The valve mechanism 40 is advanced by pushing the receiving portion 70, and the valve portion 41 is brought into contact with the valve seat 16 in a closed state. When the locking rod portion 87 is engaged with the engagement groove portion 91 to perform an emergency cutoff of the fluid in this manner, the air pressure is applied to the valve mechanism body 40 by the second pressurizing means M2 on the second diaphragm portion 60. Even when the valve is in the open state where the spring pressure is applied, since the urging force of the spring member 82 that pushes down the operating member 81 is stronger, the valve mechanism body 40 is forcibly closed, and the valve closed state is maintained. be able to.
[0023]
【The invention's effect】
As shown and described above, according to the valve mechanism of the pressure reducing valve provided with the manual closing mechanism of the present invention, the pressure reducing valve is provided with the operating member at the rear of the first pressurizing means via the spring member. A manual operation unit and the operating member are connected to each other to allow the operating member to advance and retreat by rotation of the operating unit, and when the operating member advances, the first pressurizing means is forcibly advanced to thereby increase the valve mechanism body. Is brought into contact with the valve seat to create a valve-closed state, so that the fluid can be quickly and manually shut off at the site in an emergency.
[0024]
Further, according to the valve mechanism of the pressure reducing valve having the manual closing mechanism having this structure, the space for piping is reduced, the cost is reduced, and the number of parts is reduced. Management and breakdowns are also reduced.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a pressure reducing valve provided with a manual closing mechanism according to one embodiment of the present invention.
FIG. 2 is an exploded perspective view showing a structure of a manual closing mechanism.
FIG. 3 is a schematic view showing an engagement groove in a manual closing mechanism.
FIG. 4 is a sectional view showing a valve closing state of the pressure reducing valve provided with the manual closing mechanism of FIG. 1;
FIG. 5 is a sectional view showing a valve closing state by a manual closing mechanism.
FIG. 6 is a partial cross-sectional view showing another embodiment of the manual closing mechanism.
FIG. 7 is a partial sectional view showing a valve closed state by the manual closing mechanism of FIG. 6;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Pressure-reducing valve provided with the manual closing mechanism 11 Pressure-reducing valve part 12 Body main body 13 Inflow part 15 Outflow part 16 Valve seat 20 Chamber 21 First pressurization room 25 Valve room 30 Second pressurization room 40 Valve mechanism body 50 First diaphragm Part 51 first member 60 second diaphragm part 61 second member 80 manual closing mechanism 81 operating member 82 spring member 86 manual operating part M1 first pressing means M2 second pressing means

Claims (1)

A body body (12) having a chamber (20) having a controlled fluid inflow portion (13) on one side and a controlled fluid outflow portion (15) formed on the other side via a valve seat (16). A valve mechanism having a valve part (41) for opening and closing the valve seat, a first diaphragm part (50) arranged on the inflow part side, and a second diaphragm part (60) arranged on the outflow part side. A body (40), wherein each of the diaphragm portions is fixed to the body body with its outer peripheral portion attached to the chamber, and the chamber is connected to a first pressurizing chamber (1) outside the first diaphragm portion. 21) a valve chamber (25) surrounded by the first diaphragm section and the second diaphragm section and having the inflow section, the valve seat, and the outflow section; and a second pressurization chamber (30) outside the second diaphragm section. The first pressurizing chamber and the second A pressure reducing valve (1) that constantly applies a constant pressure to the first diaphragm section and the second diaphragm section in the valve chamber direction by a first pressurizing means (M1) and a second pressurizing means (M2) provided in the chamber. 10)
An actuating member (81) is disposed at the rear of the first pressurizing means via a spring member (82), and a manual operating portion (86) is connected to the actuating member so that the operating portion rotates by rotating the operating portion. The operating member can be moved forward and backward, and when the operating member is advanced, the first pressurizing means is forcibly advanced to bring the valve mechanism body into contact with a valve seat to create a valve closed state. Pressure reducing valve with a manual closing mechanism.

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