JP2004022456A - Flash discharge lamp device - Google Patents

Abstract

An object of the present invention is to provide a flash discharge lamp device which has a long service life without breakage of an arc tube, and in which a trigger electric field is always constantly applied to an electrode so that misfiring does not occur.
A flash discharge lamp device according to the present invention includes a flash lamp including a high-voltage power supply proximity conductor extending between the electrodes outside an arc tube of the flash discharge lamp in which a pair of electrodes are arranged. In the discharge lamp device, a dielectric member 4 is disposed outside the arc tube 2 at a position facing the electrode 1, and the high-voltage power supply proximity conductor 3 is disposed inside the dielectric member 4, The dielectric member 4 and the arc tube 2 are fixed by a conductive member 4 that is not connected to the high-voltage power supply proximity conductor 3.
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a flash discharge lamp device suitably used for, for example, heat treatment of a semiconductor substrate or a liquid crystal substrate.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, as a flash discharge lamp device, for example, a flash discharge lamp having an arc tube in which a pair of electrodes are arranged to face each other, and a high voltage supply called a trigger electrode provided outside the arc tube of the flash discharge lamp. A conductor provided with a conductor (hereinafter, also simply referred to as “proximate conductor”) is widely known.
[0003]
Specifically, as shown in FIG. 7, the light-emitting tube 2 having the pair of electrodes 1 therein is linearly arranged on the outer peripheral surface of the light-emitting tube 2 in a state where the proximity conductor 3 is in contact with the light-emitting tube 2. A ring portion 31 which is a part of the proximity conductor 3 is formed at a position facing the electrode 1.
The ring portion 31 increases the trigger electric field with respect to the electrode 1. By arranging the ring portion 31 at this position, the flash discharge lamp is reliably turned on.
Such a technique is described in JP-A-10-74485 (US Pat. No. 6,008,583).
[0004]
In recent years, the use of such a flash discharge lamp device as a heating source for a heat treatment device for rapidly heat-treating a semiconductor substrate or a liquid crystal substrate, for example, has been studied. According to the heat treatment apparatus described above, it becomes possible to heat the surface layer portion of the semiconductor substrate or the liquid crystal substrate to be processed to a predetermined temperature in a very short time.
[0005]
Generally, in order to heat-treat a semiconductor substrate, it is necessary to heat only the surface layer portion of the semiconductor substrate so as to raise the temperature to 1000 to 1400 ° C. Therefore, in a flash discharge lamp device, specifically, for example, a short time of 1 msec is used. During the time, it is required to irradiate the semiconductor substrate, which is an object to be processed, with light having an energy of 20 J / cm ² or more. In order to achieve this, a peak applied to a flash discharge lamp is required. The energy is as high as 5 × 10 ⁶ W.
[0006]
However, since the light emitted from the flash discharge lamp in the flash discharge lamp device has a large energy, the proximity conductor 3 is thermally expanded by receiving this light. Since the ring portion 31 and the arc tube 2 rub against the entire outer periphery of the arc tube 2 at the position where the ring portion 31 exists due to the edge of the ring portion 31, the arc tube 2 is damaged. In addition, there is a problem that the arc tube 2 is eventually damaged due to the abrasion.
[0007]
When the ring portion 31 of the proximity conductor 3 is displaced toward the center of the arc tube 1 in the tube axis direction, the ring portion 31 is located on the discharge space, and the light emitted from the discharge space can be directly received. When the ring portion 31 becomes abnormally high in temperature and the metal material constituting the ring portion 31 is spattered and scattered, for example, the metal material adheres to the outer surface of the arc tube 2 and the metal material is removed. When exposed to a high temperature, there is a problem that cracks occur in the arc tube 2 due to a difference in expansion coefficient between the arc tube material and glass, for example.
[0008]
Further, the position of the proximity conductor 3 with respect to the arc tube 2 changes or the proximity conductor 3 is deformed as the lighting and extinguishing are repeated, so that the ring portion of the proximity conductor 3 existing at a position facing the electrode 1 is formed. In some cases, the position of the ring 31 was shifted, and the ring portion 31 was displaced to a position not facing the electrode 1. In this case, there has been a problem that the trigger electric field for the electrode 1 is weakened and the triggering action is reduced, so that even if the flash discharge lamp itself is normal, erroneous light emission occurs and the flash discharge lamp is turned off.
[0009]
[Problems to be solved by the invention]
The present invention has been made in view of the above circumstances, and has as its object the purpose of having a long service life without damage to the arc tube, and a constant trigger electric field applied to the electrodes, resulting in missed light emission. It is to provide a flash discharge lamp device that does not occur.
[0010]
[Means for Solving the Problems]
In order to solve the above problem, a flash discharge lamp device according to claim 1 has a flash discharge lamp having an arc tube in which a pair of electrodes are arranged to face each other, and an electrode between the electrodes outside the arc tube of the flash discharge lamp. A high-voltage power supply proximity conductor extending over the flash discharge lamp device, wherein a dielectric member is disposed outside the arc tube at a position facing the electrode, and the dielectric member is provided inside the dielectric member. The high-voltage power supply proximity conductor is arranged, and the dielectric member and the arc tube are fixed by a conductive member that is not connected to the high-voltage power supply proximity conductor.
[0011]
A flash discharge lamp device according to claim 2 is the flash discharge lamp device according to claim 1, wherein the conductive member is located outside the arc tube and opposed to the electrode. It is characterized by having.
[0012]
A flash discharge lamp device according to a third aspect is the flash discharge lamp device according to the second aspect, in which the dielectric member extends from a position facing one electrode to a position facing the other electrode. It is characterized by being elongated.
[0013]
The flash discharge lamp device according to claim 4 is the flash discharge lamp device according to claim 1 or 2, wherein the flash discharge lamp device is provided on the casing to which the flash discharge lamp device is attached by the conductive member. Is fixed.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
The lighting device of the present invention will be described with reference to the drawings.
FIG. 1 is an explanatory view showing a configuration of a flash discharge lamp device according to the present invention, and FIG. 2 is a sectional view taken along the line AA in FIG.
[0015]
This flash discharge lamp device includes a flash discharge lamp in which a pair of electrodes 1 are disposed in a tube-shaped light emitting tube 2 made of quartz glass, and a tungsten high voltage power supply outside the light emitting tube 2 of the flash discharge lamp. A proximity conductor (hereinafter, also simply referred to as “proximity conductor”) 3 is arranged.
The proximity conductor 3 is disposed inside a dielectric member 4 formed of a cylindrical quartz glass tube having both ends sealed, and the dielectric member 4 is disposed at least at a position facing the electrode 1. Have been.
[0016]
In this example, the conductive member 4 extends continuously from a position facing one electrode 1 (the right electrode in FIG. 1) to a position facing the other electrode 1 (the left electrode in FIG. 1). One end 31 of the proximity conductor 3 is connected to a metal foil 32, and a lead 33 is connected to the other end of the metal foil 32 so as to protrude from the dielectric member 4. By crush-sealing the body member 4, the proximity conductor 3 is hermetically held in the dielectric member 4.
The proximity conductor 3 has a structure that is not connected to a conductive member 5 described later, and the sealed dielectric member 4 is filled with an inert gas or has a vacuum atmosphere. The conductor 3 is prevented from being oxidized.
[0017]
Further, the dielectric member 4 and the arc tube 2 are fixed by a conductive member 5 made of nickel. In FIG. 1, the conductive member 5 exists outside the arc tube 2 at a position facing the electrode 1. Specifically, the conductive member 5 has a band shape, and is wound around the arc tube 2 and the dielectric member 4 in a state where the arc tube 2 and the dielectric member 4 are in contact with each other. The dielectric member 4 is fixed to the arc tube 1.
In FIG. 1, the conductive member 5 exists only at a position outside the arc tube 2 and facing the electrode 1. However, another conductive member is additionally provided at a position not facing the electrode 1. May be provided. In this case, the temperature of the conductive member 5 rises due to the light generated from the discharge space, but a means for suppressing the temperature rise may be required.
[0018]
Here, the "high voltage power supply proximity conductor" means a pre-ionization caused by an external electric field in the arc tube constituting the flash discharge lamp to cause a discharge between the main electrodes.
[0019]
As shown in FIGS. 1 and 2, since the proximity conductor 3 has a structure in which the proximity conductor 3 is disposed in the dielectric member 4 and does not contact the outer surface of the arc tube 2, lighting and extinguishing are repeated. Even if the proximity conductor 3 expands and contracts, the arc tube 2 is not damaged, and damage to the arc tube 2 can be prevented.
[0020]
Although the conductive member 5 is not directly connected to the proximity conductor 3, the high voltage applied to the proximity conductor 3 is applied to the conductive member 5 via the dielectric member 4, and Even if 5 is not directly connected to the adjacent conductor 3, a trigger electric field can be effectively applied.
[0021]
Further, the conductive member 5 has a structure that is not directly connected to the adjacent conductor 3, and the dielectric member 4 is made of the same material as the arc tube 2 and hardly expands even when the temperature becomes high during lamp operation. Even if the proximity conductor 3 expands due to light generated from the discharge space, the position of the conductive member 5 does not change, and in particular, the position of the conductive member 5 with respect to the electrode 1 can always be kept constant. In addition, the trigger electric field is always applied to the electrode 1 at a constant level, so that erroneous light emission of the flash discharge lamp can be eliminated.
[0022]
Then, the position of the conductive member 5 is not displaced with respect to the electrode 1, and more specifically, the conductive member 5 does not move over the discharge space. And the metal material constituting the conductive member 5 is not sputtered.
[0023]
Further, since the proximity conductor 3 is placed in a hermetically sealed state in the dielectric member 4, even if the proximity conductor 3 becomes hot and the metal material forming the proximity conductor 3 is sputtered, Since the material exists only in the dielectric member 4 and the metal material does not adhere to the surface of the arc tube 2, damage to the arc tube can be prevented.
[0024]
According to such a flash discharge lamp device, when a high voltage is supplied to the adjacent conductor, the flash discharge lamp can be reliably turned on, and further, a flash discharge lamp device having a long service life without breaking the arc tube. .
[0025]
Although the dielectric member 4 is sealed at both ends in FIG. 1, the dielectric member 4 may have a cylindrical shape with both ends opened.
Alternatively, as shown in FIG. 3, the dielectric member 41 may have a structure provided only at a position facing the electrode 1. In this case, the dielectric member 41 has a structure in which both ends are open and the proximity conductor 3 is inserted therein, and the dielectric member 41 and the arc tube 2 are fixed by the conductive member 5.
[0026]
In the case of the flash discharge lamp device, similar to the flash discharge lamp device shown in FIG. 1, since the conductive member 5 has a structure not directly connected to the proximity conductor 3, the proximity conductor 3 is formed by light generated from the discharge space. Even if expanded, the position of the conductive member 5 does not change, and the dielectric member 41 is made of the same material as the arc tube 2 and hardly expands. Can always be kept constant, a trigger electric field is always applied to the electrode 1 constantly, and erroneous light emission of the flash discharge lamp can be eliminated.
[0027]
A portion of the proximity conductor 3 is exposed to the outside. For example, when a cooling air for cooling the flash discharge lamp device is flowing, the metal material forming the proximity conductor 3 is sputtered. However, it is possible to prevent adhesion to the surface of the arc tube 2, and in such a case, the flash discharge lamp device shown in FIG. 3 can be suitably used.
[0028]
FIG. 4 is a sectional view of another embodiment showing the positional relationship among the flash discharge lamp, the dielectric member, and the conductive member.
In the flash discharge lamp device shown in FIG. 4, the flash discharge lamp and the dielectric member 4 are fixed to a casing or the like by a fixing member (not shown). The metal conductive member 5 has a clamping portion 51 bent in an arc shape. The clamping portion 51 clamps the surface of the arc tube 2, and is separated from the clamping portion 51 following the clamping portion 51. Is formed, and the pressing portion 52 is pressed against the surface of the dielectric member 4 in which the adjacent conductor 3 is located.
[0029]
By using such a conductive member 5, the shape of the conductive member 5 is adjusted in advance, and by utilizing its plastic deformation (elastic force), the arc tube can be formed with a simple structure and a simple mounting operation. The conductive member 5 can be arranged between the dielectric member 2 and the dielectric member 4.
[0030]
FIG. 5 is a sectional view of another embodiment showing a positional relationship among a flash lamp, a dielectric member, and a conductive member.
In the flash discharge lamp device shown in FIG. 5, the conductive member 5 made of metal has a first holding portion 53 bent in an arc shape, and the first holding portion 53 holds the surface of the arc tube 2. Following the first holding portion 53, a second holding portion 54 that is bent in an arc shape in the opposite direction is formed, and the second holding portion 54 holds the surface of the dielectric member 4 and further, the second holding portion 54 A linear fixing portion 55 is formed following the fixing portion 54, and the conductive member 5 is fixed to the casing K by using the fixing portion 55 by an appropriate structure such as a screw.
[0031]
By using such a conductive member 5, the shape of the conductive member 5 is adjusted in advance, and by utilizing its plastic deformation (elastic force), the arc tube can be formed with a simple structure and a simple mounting operation. The conductive member 5 can be arranged between the dielectric member 4 and the dielectric member 4, and the flash member and the dielectric member 4 can be integrally fixed to the casing K by the conductive member 5.
[0032]
FIG. 6 is a sectional view of another embodiment showing a positional relationship among a flash discharge lamp, a dielectric member, and a conductive member.
In the flash discharge lamp device shown in FIG. 6, the metal conductive member 5 is composed of two members, each having a first clamping portion 53a bent in an arc shape. Following the first holding portions 53a, the second holding portions 54a bent in an arc shape are formed, and the second holding portions 54a hold the surface of the dielectric member 4 between the first holding portions 53a. Further, a linear fixing portion 55a is formed following each of the second holding portions 54a, and the two conductive members 5 are formed on the casing K by using the fixing portion 55a by an appropriate structure such as a screw. It is fixed.
[0033]
By using such a conductive member 5, the shape of the conductive member 5 is adjusted in advance, and by utilizing its plastic deformation (elastic force), the arc tube can be formed with a simple structure and a simple mounting operation. 2 and the dielectric member 4 can be connected by the conductive member 5, and the flash member and the dielectric member 4 can be integrally fixed to the casing K by the conductive member 5.
[0034]
【The invention's effect】
As described above, according to the flash discharge lamp device of the present invention, the dielectric member in which the high-voltage power supply proximity conductor is arranged is provided outside the arc tube and inside the arc tube. Since the arc tube is not directly connected to the high-voltage power supply proximity conductor and is fixed by a conductive member that is not connected to the high-voltage power supply proximity conductor, even if the high-voltage power supply proximity conductor expands due to light generated from the discharge space, the conductive The position of the conductive member does not change, the position of the conductive member can be always fixed with respect to the electrode, the trigger electric field is constantly applied to the electrode, and erroneous light emission of the flash discharge lamp can be eliminated. .
[0035]
Furthermore, since the conductive member is located outside the arc tube and at a position facing the electrode, the trigger electric field is effectively and constantly applied to the electrode, thereby ensuring that the flash discharge lamp does not emit light erroneously. Can be eliminated.
[0036]
Since the dielectric member extends from a position facing one electrode to a position facing the other electrode, the high-voltage power supply proximity conductor is placed in the dielectric member and directly emits light. The structure does not come into contact with the outer surface of the tube.Even if the proximity conductor for high voltage power supply expands and contracts repeatedly after turning on and off, the arc tube is not damaged, and damage to the arc tube can be prevented. Even if the high-voltage power supply proximity conductor becomes hot and the metal material forming the high-voltage power supply proximity conductor is sputtered, the metal material exists only in the dielectric member and adheres to the arc tube. Since there is no such phenomenon, damage to the arc tube can be prevented.
That is, a flash discharge lamp device having a long service life without breaking the arc tube is obtained.
[Brief description of the drawings]
FIG. 1 is an explanatory view of a flash discharge lamp device of the present invention.
FIG. 2 is a sectional view taken along the line AA in FIG.
FIG. 3 is an explanatory view of a flash discharge lamp device according to another embodiment of the present invention. FIG. 4 is a cross-sectional view of another embodiment showing a positional relationship among a flash discharge lamp, a dielectric member, and a conductive member. is there.
FIG. 5 is a cross-sectional view of another embodiment showing a positional relationship among a flash discharge lamp, a dielectric member, and a conductive member.
FIG. 6 is a sectional view of another embodiment showing a positional relationship among a flash discharge lamp, a dielectric member, and a conductive member.
FIG. 7 is an explanatory view of a conventional flash discharge lamp device.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 electrode 2 arc tube 3 proximity conductor for high voltage power supply 4 dielectric member 5 conductive member

Claims (4)

In a flash discharge lamp device including a flash discharge lamp having an arc tube in which a pair of electrodes are arranged to face each other, and a high-voltage power supply proximity conductor extending between the electrodes outside the arc tube of the flash discharge lamp,
Outside the arc tube, a dielectric member is disposed at a position facing the electrode,
The high-voltage power supply proximity conductor is arranged inside the dielectric member, and the dielectric member and the arc tube are fixed by a conductive member that is not connected to the high-voltage power supply proximity conductor. A flash discharge lamp device characterized by the above-mentioned. 2. The flash discharge lamp device according to claim 1, wherein the conductive member is located outside the arc tube at a position facing the electrode. 3. The flash discharge lamp device according to claim 2, wherein the dielectric member extends from a position facing one electrode to a position facing the other electrode. The flash discharge lamp device according to claim 1 or 2, wherein the flash discharge lamp is fixed to the casing to which the flash discharge lamp device is attached by the conductive member.

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