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JP2004020221A5 - - Google Patents

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Publication number
JP2004020221A5
JP2004020221A5 JP2002171620A JP2002171620A JP2004020221A5 JP 2004020221 A5 JP2004020221 A5 JP 2004020221A5 JP 2002171620 A JP2002171620 A JP 2002171620A JP 2002171620 A JP2002171620 A JP 2002171620A JP 2004020221 A5 JP2004020221 A5 JP 2004020221A5
Authority
JP
Japan
Prior art keywords
holder
piezoelectric
cantilever
piezoelectric element
end connected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002171620A
Other languages
Japanese (ja)
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JP2004020221A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2002171620A priority Critical patent/JP2004020221A/en
Priority claimed from JP2002171620A external-priority patent/JP2004020221A/en
Publication of JP2004020221A publication Critical patent/JP2004020221A/en
Publication of JP2004020221A5 publication Critical patent/JP2004020221A5/ja
Pending legal-status Critical Current

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Claims (4)

ホルダ本体と、
前記ホルダ本体に固定されたカンチレバーチップと、
圧電体とこの圧電体を挟んでいる２つの電極とを有する圧電素子と、
一端が前記圧電素子の前記２つの電極にそれぞれ接続され、他端が前記圧電体を励振する電圧を供給する励振信号発生器にそれぞれ接続されている２つのケーブルとを備え、
前記圧電素子は絶縁体を介して前記ホルダ本体に取り付けられることを特徴とするカンチレバーホルダ。A holder body;
A cantilever tip fixed to the holder body;
A piezoelectric element having a piezoelectric body and two electrodes sandwiching the piezoelectric body;
Two cables each having one end connected to each of the two electrodes of the piezoelectric element and the other end connected to an excitation signal generator for supplying a voltage for exciting the piezoelectric body,
The cantilever holder, wherein the piezoelectric element is attached to the holder body through an insulator. ホルダ本体と、A holder body;
カンチレバーの先端に探針を備えたカンチレバーチップとを有するレバーホルダであって、A lever holder having a cantilever tip with a probe at the tip of the cantilever,
圧電体とこの圧電体を挟んでいる２つの電極とを有する圧電素子と、A piezoelectric element having a piezoelectric body and two electrodes sandwiching the piezoelectric body;
一端が前記圧電素子の前記２つの電極にそれぞれ接続され、他端が前記圧電体を励振する電圧を供給する励振信号発生器にそれぞれ接続されている２つのケーブルとを備え、Two cables each having one end connected to each of the two electrodes of the piezoelectric element and the other end connected to an excitation signal generator for supplying a voltage for exciting the piezoelectric body,
前記圧電素子は絶縁体を介して前記ホルダ本体に取り付けられることを特徴とするカンチレバーホルダ。The cantilever holder, wherein the piezoelectric element is attached to the holder body through an insulator. 前記絶縁体は、前記圧電体と同一材質であって、分極処理が施されていない材料で形成されていることを特徴とする請求項１又は２記載のカンチレバーホルダ。 3. The cantilever holder according to claim 1, wherein the insulator is made of the same material as that of the piezoelectric body and is not subjected to polarization treatment. 前記請求項１ないし請求項３のいずれか一つに記載のカンチレバーホルダを有する走査型プローブ顕微鏡。A scanning probe microscope having the cantilever holder according to any one of claims 1 to 3.
JP2002171620A 2002-06-12 2002-06-12 Cantilever holder Pending JP2004020221A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002171620A JP2004020221A (en) 2002-06-12 2002-06-12 Cantilever holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002171620A JP2004020221A (en) 2002-06-12 2002-06-12 Cantilever holder

Publications (2)

Publication Number Publication Date
JP2004020221A JP2004020221A (en) 2004-01-22
JP2004020221A5 true JP2004020221A5 (en) 2005-10-06

Family

ID=31171425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002171620A Pending JP2004020221A (en) 2002-06-12 2002-06-12 Cantilever holder

Country Status (1)

Country Link
JP (1) JP2004020221A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4895379B2 (en) * 2007-02-20 2012-03-14 セイコーインスツル株式会社 Lever excitation mechanism and scanning probe microscope
KR101007816B1 (en) 2008-06-16 2011-01-25 두산메카텍 주식회사 Fixture of cantilever for atomic force microscope
ES2438021B1 (en) * 2011-08-02 2014-12-12 Universidad De Castilla La Mancha Micro lever for atomic force microscope and microscope incorporating said micro lever

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