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JP2003337285A - Liquid immersion apochromatic microscope objective lens - Google Patents

Liquid immersion apochromatic microscope objective lens

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Publication number
JP2003337285A
JP2003337285A JP2002146571A JP2002146571A JP2003337285A JP 2003337285 A JP2003337285 A JP 2003337285A JP 2002146571 A JP2002146571 A JP 2002146571A JP 2002146571 A JP2002146571 A JP 2002146571A JP 2003337285 A JP2003337285 A JP 2003337285A
Authority
JP
Japan
Prior art keywords
lens
cemented
object side
lens group
convex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002146571A
Other languages
Japanese (ja)
Inventor
Miwako Mandai
三環子 万袋
Katsuya Watanabe
勝也 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2002146571A priority Critical patent/JP2003337285A/en
Publication of JP2003337285A publication Critical patent/JP2003337285A/en
Withdrawn legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid immersion apochromatic microscope objective lens which can maintain the flatness of an image plane over the entire part of a visual field and is to be well corrected in various aberrations while maintaining a magnification of about 60 times and a large NA of 1.4 without forming a lens group of the extreme image side to a Gauss type. <P>SOLUTION: The objective lens is provided, successively from an object side, with a first lens group G1 including a cemented planoconvex lens G11 of a planoconves lens L11 with the plane nearly directed to the object side and a negative meniscus lens L12 with the concave face directed to the object side, a second lens group G2 including a cementing surface having negative refracting power and converging the luminous flux past the first lens group G1 to a convergent luminous flux and a third lens group G3 having at least two or more (G31, G32, G33) cemented lenses formed by directing their concave surfaces to the image side and satisfies respective conditions. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、顕微鏡対物レンズ
に関し、特に液浸系アポクロマート顕微鏡対物レンズに
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope objective lens, and more particularly to an immersion apochromat microscope objective lens.

【0002】[0002]

【従来技術】顕微鏡観察において、解像力を向上させる
ためには開口数(NA)を大きくすれば良く、このため
には観察する標本と対物レンズとの間の光路を液体(以
下、「浸液」と言う)で満たせばよい。このため液浸系
アポクロマート顕微鏡対物レンズでは、浸液と接する最
も物体側の面は浸液中に空気(泡)の混入を防ぐ目的や
使用後のレンズ面の拭き取りの容易さから、ほぼ平面状
に形成されていることが要求される。
2. Description of the Related Art In microscope observation, in order to improve the resolution, it is sufficient to increase the numerical aperture (NA), and for this purpose, the optical path between the sample to be observed and the objective lens is made into a liquid (hereinafter, "immersion liquid"). )). For this reason, in the immersion apochromat microscope objective lens, the surface closest to the object that comes into contact with the immersion liquid has a substantially flat surface for the purpose of preventing air (bubbles) from entering the immersion liquid and the ease of wiping the lens surface after use. It is required to be formed in.

【0003】そこで、液浸系アポクロマート顕微鏡対物
レンズでは、浸液に接する面を平面状とし、なおかつペ
ッツバール和を低減させるという目的から、非常に曲率
半径の小さい平凸レンズとそれに対して屈折率の高い負
メニスカスレンズを接合し、負の屈折力を有する接合面
を含む接合平凸レンズを最も物体側に配置することが行
われている。
Therefore, in an immersion apochromat microscope objective lens, a plano-convex lens having a very small radius of curvature and a high refractive index relative to it are used for the purpose of making the surface in contact with the immersion liquid flat and reducing the Petzval sum. It is known that a negative meniscus lens is cemented and a cemented plano-convex lens including a cemented surface having a negative refractive power is arranged closest to the object side.

【0004】しかし、このような構成の接合平凸レンズ
を用いてもペッツバール和の低減は不十分で、これを補
うため光束径の小さい位置に互いに向かい合った強い凹
面を配置して構成するいわゆるガウスタイプのレンズ群
を設けることによってペッツバール和を低減し、視野全
体の像面の平坦性を維持している。
However, even if the cemented plano-convex lens having such a structure is used, the Petzval sum is not sufficiently reduced, and in order to compensate for this, a so-called Gauss type in which strong concave surfaces facing each other are arranged at positions where the light beam diameter is small. By providing this lens group, the Petzval sum is reduced and the flatness of the image surface over the entire field of view is maintained.

【0005】このようなガウスタイプのレンズ群を有す
る高倍率の液浸系アポクロマート顕微鏡対物レンズは、
例えば、特開平7−35983号公報や特開2000−
35541号公報に開示されている。
A high magnification immersion type apochromat microscope objective lens having such a Gauss type lens group is
For example, JP-A-7-35983 and JP-A-2000-
It is disclosed in Japanese Patent No. 35541.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、ガウス
タイプのレンズ群を有する高倍率の液浸系アポクロマー
ト顕微鏡対物レンズは、光束を一度絞り込まなければな
らず、凸面、凹面それぞれで光線が強く曲げられるた
め、ここで発生する諸収差は相対的に大きくなるという
問題を有している。
However, in a high-magnification immersion-type apochromat microscope objective lens having a Gauss type lens group, the light flux must be narrowed down once, and the light rays are strongly bent on each of the convex and concave surfaces. However, there is a problem that the various aberrations generated here are relatively large.

【0007】特に高NAの対物レンズでは大きな高次収
差が発生するため、それを利用して球面収差やメリジオ
ナルコマ収差の高次成分を補正することが行われている
が、収差係数の大きいもの同士で相殺するため、すべて
の収差を良好に補正することが難しく、サジタルコマ収
差等が残存するなどの問題がある。
Particularly in a high NA objective lens, a large high-order aberration is generated, and it is used to correct the high-order components of spherical aberration and meridional coma aberration. Therefore, it is difficult to satisfactorily correct all aberrations, and sagittal coma aberration remains.

【0008】また、光線の入射角が大きくなることか
ら、レンズの面精度やレンズ厚公差等が厳しく、製造上
の問題もある。
Further, since the incident angle of the light beam becomes large, the surface accuracy of the lens, the lens thickness tolerance and the like become strict, which causes a problem in manufacturing.

【0009】本発明は、上記問題に鑑みて行われたもの
であり、像側のレンズ群をガウスタイプにすることな
く、倍率が60倍程度で1.4という高NAを維持しつ
つ、視野全体にわたって像面の平坦性を維持でき、かつ
諸収差が良好に補正される液浸系アポクロマート顕微鏡
対物レンズを提供することを目的としている。
The present invention has been made in view of the above problems, and the field of view is maintained while maintaining a high NA of 1.4 at a magnification of about 60 times without making the image side lens unit a Gauss type. An object of the present invention is to provide an immersion apochromat microscope objective lens capable of maintaining the flatness of the image plane as a whole and satisfactorily correcting various aberrations.

【0010】[0010]

【課題を解決するための手段】上記目的を達成するため
に、本発明では、物体側から順に、物体側にほぼ平面を
向けた平凸レンズと物体側に凹面を向けた負メニスカス
レンズとの接合平凸レンズを含む第1レンズ群と、負の
屈折力を有する接合面を含み、前記第1レンズ群を通過
した光束を収斂光束に変換する第2レンズ群と、像側に
凹面を向けて形成されている接合レンズを少なくとも2
つ以上有する第3レンズ群と、を具備し、前記第1レン
ズ群の接合平凸レンズの接合面の屈折力をφs2、前記第
3レンズ群の最も像側の接合レンズの凸レンズのアッベ
数をν33+、および凹レンズのアッベ数をν33-、前記第
3レンズ群の前記接合レンズの物体側に続く接合レンズ
の凸レンズのアッベ数をν32+、および凹レンズのアッ
ベ数をν32-、とするとき、 φs2<−0.45 (ν32+−ν32-)+(ν33+−ν33-)<−50 であることを特徴とする液浸系アポクロマート顕微鏡対
物レンズを提供する。
In order to achieve the above object, in the present invention, a plano-convex lens having a substantially flat surface facing the object side and a negative meniscus lens having a concave surface facing the object side are cemented in order from the object side. Formed with a concave surface facing the image side, a first lens group including a plano-convex lens, a second lens group including a cemented surface having a negative refracting power and converting a light flux passing through the first lens group into a convergent light flux. At least 2 cemented lenses
And a third lens group having three or more, the refractive power of the cemented surface of the cemented plano-convex lens of the first lens group is φ s2 , and the Abbe number of the convex lens of the cemented lens closest to the image side of the third lens group is ν 33+ , the Abbe number of the concave lens is ν 33 −, the Abbe number of the convex lens of the cemented lens following the object side of the cemented lens of the third lens group is ν 32+ , and the Abbe number of the concave lens is ν 32- , Where φ s2 <−0.45 (ν 32+ −ν 32 − ) + (ν 33+ −ν 33− ) <− 50, an immersion type apochromat microscope objective lens is provided. .

【0011】また、本発明の液浸系アポクロマート顕微
鏡対物レンズは、前記第1レンズ群の接合平凸レンズの
該平凸レンズの焦点距離をf1、および該負メニスカス
レンズの焦点距離をf2、前記第3レンズ群の最も像側
の前記接合レンズとその物体側に続く前記接合レンズそ
れぞれの物体側を向いている面と像側を向いている面の
曲率半径をr、有効径をDとすると、 |f2/f1|<2 |r/D|>0.8 であることが好ましい。
In the immersion apochromat microscope objective lens of the present invention, the focal length of the plano-convex lens of the cemented plano-convex lens of the first lens group is f1, the focal length of the negative meniscus lens is f2, and the third lens is the third lens. If the radius of curvature of the surface facing the object side and the surface facing the image side of each of the cemented lens closest to the image side of the lens group and the cemented lens following the object side thereof are r, and the effective diameter is D, then | It is preferable that f2 / f1 | <2 | r / D |> 0.8.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の形態にかか
る液浸系アポクロマート顕微鏡対物レンズについて説明
する。
BEST MODE FOR CARRYING OUT THE INVENTION An immersion apochromat microscope objective lens according to an embodiment of the present invention will be described below.

【0013】本発明の液浸系アポクロマート顕微鏡対物
レンズは、物体側から順に、物体側にほぼ平面を向けた
平凸レンズと物体側に凹面を向けた負メニスカスレンズ
との接合平凸レンズを含む第1レンズ群と、負の屈折力
を有する接合面を含む接合レンズからなり、前記第1レ
ンズ群を通過した光束を収斂光束に変換する第2レンズ
群と、像側に凹面を向けて形成されている接合レンズを
少なくとも2つ以上有する第3レンズ群とを備えた3群
レンズを基本構成としている。
The immersion type apochromat microscope objective lens of the present invention includes, in order from the object side, a cemented plano-convex lens of a plano-convex lens having a substantially flat surface facing the object side and a negative meniscus lens having a concave surface facing the object side. A second lens group which is composed of a lens group and a cemented lens including a cemented surface having a negative refractive power, and which is formed with a concave surface facing the image side, and a second lens group which converts the light flux that has passed through the first lens group into a convergent light flux. A third lens group including a third lens group having at least two cemented lenses is used as a basic configuration.

【0014】そして、本発明の液浸系アポクロマート顕
微鏡対物レンズは、前記第1レンズ群の前記接合平凸レ
ンズの接合面の屈折力をφs2、前記第3レンズ群の最も
像側の接合レンズの凸レンズのアッベ数をν33+、およ
び凹レンズのアッベ数をν33-、前記第3レンズ群の前記
接合レンズの物体側に続く接合レンズの凸レンズのアッ
ベ数をν32+、および凹レンズのアッベ数をν32-、とす
るとき、 (1) φs2<−0.45 (2) (ν32+−ν32-)+(ν33+−ν33-)<−50 なる条件を満足している。
In the immersion type apochromatic microscope objective lens of the present invention, the refractive power of the cemented surface of the cemented plano-convex lens of the first lens group is φ s2 , and the cemented lens of the most image side cemented lens of the third lens group is The Abbe number of the convex lens is ν 33+ , the Abbe number of the concave lens is ν 33 −, the Abbe number of the convex lens of the cemented lens following the object side of the cemented lens of the third lens group is ν 32+ , and the Abbe number of the concave lens is Is defined as ν 32- , then (1) φ s2 <−0.45 (2) (ν 32+ −ν 32- ) + (ν 33+ −ν 33− ) <− 50 is satisfied. There is.

【0015】第1レンズ群でペッツバール和を低減し視
野全体にわたる像面の平坦性を維持するためには、第1
レンズ群中の物体側に凹面を向けた負メニスカスレンズ
に屈折率が非常に大きな材料を使用する必要があるが、
現時点での硝子材で最も屈折率の大きいものでもd線
(587.56nm)の屈折率は約2.02が限界であ
る。
In order to reduce the Petzval sum in the first lens group and maintain the flatness of the image plane over the entire visual field,
It is necessary to use a material with a very large refractive index for the negative meniscus lens with the concave surface facing the object side in the lens group,
Even the glass material having the largest refractive index at the present time has a limit of about 2.02 for the d-line (587.56 nm).

【0016】そこで、本発明では、高屈折率、無色、光
学的に等方、硬度が硝子並、可視光を透過する結晶材の
チタン酸ストロンチウム(SrTiO3)を第1レンズ
群中で物体側に凹面を向けた負メニスカスレンズに使用
した。この材料のd線の屈折率は約2.408である。
Therefore, in the present invention, strontium titanate (SrTiO3), which is a crystalline material having a high refractive index, a colorless property, an optically isotropic property, a hardness comparable to that of glass, and a visible light transmitting property, is applied to the object side in the first lens group. Used for negative meniscus lens with concave surface. The d-line refractive index of this material is about 2.408.

【0017】この結果、負メニスカスレンズは、浸液の
屈折率(約1.515)にほぼ等しい屈折率を有する平
凸レンズとの屈折率差が大きくなりペッツバール和を低
減することが可能となる。
As a result, the negative meniscus lens has a large difference in refractive index from the plano-convex lens having a refractive index substantially equal to the refractive index of the immersion liquid (about 1.515), and the Petzval sum can be reduced.

【0018】このとき、条件式(1)を満たしていない
と第1レンズ群の負の屈折率だけでは視野全体の像面の
平坦性を維持することが難しく、第3レンズ群を従来の
ようなガウスタイプにしなければならない。
At this time, if the conditional expression (1) is not satisfied, it is difficult to maintain the flatness of the image plane of the entire field of view only by the negative refractive index of the first lens group, and the third lens group can be formed as in the conventional case. It must be a Gaussian type.

【0019】また、第2レンズ群は負の屈折力を有する
接合面を含む接合レンズを使用することにより球面収差
および色収差を補正している。
Further, the second lens group corrects spherical aberration and chromatic aberration by using a cemented lens including a cemented surface having a negative refractive power.

【0020】また、第1レンズ群の負メニスカスレンズ
に用いたチタン酸ストロンチウムのアッベ数はνst=1
2.66と非常に小さく、接合平凸レンズの像面側の面
は対物レンズの主光線と光軸が交わる位置に対して物体
面に近く、かつこの面は非常に曲率が大きいため、大き
な倍率色収差が発生してしまう。
The Abbe number of strontium titanate used for the negative meniscus lens of the first lens group is ν st = 1.
It is very small as 2.66, and the image-side surface of the cemented plano-convex lens is close to the object plane with respect to the position where the principal ray of the objective lens intersects the optical axis, and this surface has a very large curvature, so a large magnification Chromatic aberration will occur.

【0021】そこで、対物レンズの主光線と光軸が交わ
る位置に対して像面に近い第3レンズ群の2つの接合レ
ンズで、接合平凸レンズで発生する倍率色収差と逆向き
の倍率色収差を発生させてやることにより倍率色収差を
補正している。このとき、第3レンズ群の2つの接合レ
ンズの凹面が像側を向き、条件式(2)を満足していな
ければ接合平凸レンズの像面側の面で発生した倍率色収
差を良好に補正することはできない。
Therefore, in the two cemented lenses of the third lens group near the image plane with respect to the position where the principal ray of the objective lens intersects the optical axis, lateral chromatic aberration that is opposite to the lateral chromatic aberration that occurs in the cemented plano-convex lens is generated. By doing so, the chromatic aberration of magnification is corrected. At this time, the concave surfaces of the two cemented lenses of the third lens group face the image side, and if the conditional expression (2) is not satisfied, the lateral chromatic aberration generated on the image plane side surface of the cemented plano-convex lens is favorably corrected. It is not possible.

【0022】さらに、本発明では、液浸系アポクロマー
ト顕微鏡対物レンズは、第1レンズ群の接合平凸レンズ
の該平凸レンズの焦点距離をf1、および負メニスカス
レンズの焦点距離をf2、第3レンズ群の最も像側の接
合レンズとその物体側に続く接合レンズそれぞれの物体
側を向いている面と像側を向いている面の曲率半径を
r、有効径をDとすると、 (3) |f2/f1|<2 (4) |r/D|>0.8 の条件を満足している。
Further, according to the present invention, the immersion apochromat microscope objective lens has a focal length of the plano-convex lens of the cemented plano-convex lens of the first lens group is f1, a focal length of the negative meniscus lens is f2, and a third lens group. Let r be the radius of curvature of the surface facing the object side and r be the effective diameter of each of the cemented lens closest to the image side and the cemented lens succeeding the object side thereof, and the effective diameter is (3) | f2 / F1 | <2 (4) | r / D |> 0.8 is satisfied.

【0023】上記条件式(3)は、第1レンズ群の接合
平凸レンズの像面側の面の曲率を小さくし、この面での
倍率色収差の発生をなるべく小さく抑えるための条件式
である。
Conditional expression (3) is a conditional expression for reducing the curvature of the image-side surface of the cemented plano-convex lens of the first lens group and suppressing the occurrence of lateral chromatic aberration on this surface as much as possible.

【0024】また、上述のように、接合平レンズの負メ
ニスカスレンズにチタン酸ストロンチウムを使用するた
め、第3レンズ群をガウスタイプにする必要がなくな
り、第3レンズ群の最も像側の接合レンズとそれに続く
物体側の接合レンズそれぞれの物体側および像側を向い
ているレンズ面の曲率を小さくすることができる。した
がって、これらの面で発生する諸収差量が少なくなる。
このとき、上記第3レンズ群の2つの接合レンズが条件
式(4)を外れると、ガウスタイプと同様に光線が強く
曲げられることになり、諸収差を良好に補正することが
できなくなる。
Further, as described above, since strontium titanate is used for the negative meniscus lens of the cemented plano lens, it is not necessary to make the third lens group a Gauss type, and the cemented lens closest to the image side of the third lens group. It is possible to reduce the curvature of the lens surface facing the object side and the image side of each of the cemented lenses on the object side and the following. Therefore, the amount of various aberrations generated on these surfaces is reduced.
At this time, if the two cemented lenses of the third lens group deviate from the conditional expression (4), the light rays are strongly bent as in the Gauss type, and it becomes impossible to satisfactorily correct various aberrations.

【0025】また、本実施の形態の液浸系アポクロマー
ト顕微鏡対物レンズは物体面と第1レンズ群との間に配
置される厚さt=0.17mm、d線における屈折率n
d=1.522、d線におけるアッベ数νd=58.8
を有する平行平面板(カバーガラス)を基準状態として
設計されている。
The immersion apochromat microscope objective lens of this embodiment has a thickness t = 0.17 mm arranged between the object surface and the first lens group and a refractive index n at the d-line.
d = 1.522, Abbe number νd = 58.8 on d line
It is designed with a plane parallel plate (cover glass) having a standard state.

【0026】次に、本発明の液浸系アポクロマート顕微
鏡対物レンズにかかる各実施例を示す。 (第1実施例)図1は本発明の液浸系アポクロマート顕
微鏡対物レンズにかかる第1実施例のレンズ系を示す図
である。
Next, examples of the immersion type apochromat microscope objective lens of the present invention will be shown. (First Embodiment) FIG. 1 is a view showing the lens system of the first embodiment according to the liquid immersion type apochromat microscope objective lens of the present invention.

【0027】図1において、液浸系アポクロマート顕微
鏡対物レンズは、物体側から順に物体側に平面を向けた
平凸レンズL11と物体側に凹面を向けた負メニスカス
レンズL12との接合平凸レンズG11、および物体側
に凹面を向けた2枚の正メニスカスレンズL13、L1
4とから構成される第1レンズ群G1と、物体側から順
に物体側に凸面を向けた正メニスカスレンズL21と物
体側に凸面を向けた負メニスカスレンズL22と両凸レ
ンズL23との接合正レンズG21、および物体側に凸
面を向けた負メニスカスレンズL24と両凸レンズL2
5との接合正レンズG22、および物体側に凸面を向け
た負メニスカスレンズL26と物体側に凸面を向けた正
メニスカスレンズL27との接合正レンズG23とから
構成される第2レンズ群G2と、物体側から順に物体側
に凸面を向けた負メニスカスレンズL31と両凸レンズ
L32と両凹レンズL33との接合負レンズG31、お
よび両凸レンズL34と両凹レンズL35との接合負レ
ンズG32、および両凸レンズL36と両凹レンズL3
7との接合負レンズG33とから構成される第3レンズ
群G3の3群レンズで構成されている。
In FIG. 1, an immersion apochromat microscope objective lens is a cemented plano-convex lens G11 consisting of a plano-convex lens L11 having a flat surface facing the object side and a negative meniscus lens L12 having a concave surface facing the object side in order from the object side. Two positive meniscus lenses L13, L1 with concave surfaces facing the object side
A first lens group G1 composed of 4; a positive meniscus lens L21 having a convex surface facing the object side in order from the object side; a negative meniscus lens L22 having a convex surface facing the object side; and a biconvex lens L23. , And a negative meniscus lens L24 having a convex surface directed toward the object side and a biconvex lens L2
5, a second lens group G2 including a positive lens cemented with a positive lens G22 cemented with 5 and a negative positive meniscus lens L26 having a convex surface directed toward the object side and a positive meniscus lens L27 having a convex surface directed toward the object side. A negative meniscus lens L31 having a convex surface facing the object side in order from the object side, a cemented negative lens G31 of a biconvex lens L32, and a biconcave lens L33; a cemented negative lens G32 of a biconvex lens L34 and a biconcave lens L35; and a biconvex lens L36. Biconcave lens L3
It is composed of a third lens group of a third lens group G3, which is composed of a cemented negative lens G33 of 7 and 7.

【0028】表1に第1実施例にかかる液浸系アポクロ
マート顕微鏡対物レンズの諸元値を掲げる。表1におい
て、βは結像レンズを用いた際の倍率を、NAは開口数
を、WDは物体面と第1レンズ群G1との間に配置され
る平行平面板(カバーガラス)CGと液浸系アポクロマ
ート顕微鏡対物レンズの端面までの距離を、fは液浸系
アポクロマート顕微鏡対物レンズのみの焦点距離をそれ
ぞれ示している。また、レンズデータにおいて、面番号
は物体からのレンズ面の順番を、rはレンズ面の曲率半
径を、dはレンズ面間隔を、ndはd線(λ=587.
56nm)に対する屈折率を、νdはd線におけるアッ
ベ数をそれぞれ示している。
Table 1 lists specifications of the immersion type apochromat microscope objective lens according to the first example. In Table 1, β is the magnification when using the imaging lens, NA is the numerical aperture, and WD is the plane-parallel plate (cover glass) CG arranged between the object plane and the first lens group G1 and the liquid. The distance to the end surface of the immersion apochromat microscope objective lens is shown, and f is the focal length of only the liquid immersion apochromat microscope objective lens. In the lens data, the surface number is the order of the lens surface from the object, r is the radius of curvature of the lens surface, d is the lens surface interval, and nd is the d line (λ = 587.
56 nm) and vd is the Abbe number at the d-line.

【0029】また、条件対応値において、|r/D|32
物、|r/D|32像は、第3レンズ群G3の接合負レン
ズG32の最も物体面側の面と最も像面側の面の値をそ
れぞれ示し、|r/D|33物、|r/D|33像は、第3
レンズ群G3の接合負レンズG33の最も物体面側の面
と最も像面側の面の値をそれぞれ示している。
Further, in the condition corresponding value, | r / D | 32
Things, | r / D | 32 image indicates the value of the most image side surface of the most object side surface of the cemented negative lens G32 of the third lens group G3, | r / D | 33 thereof, | r / D | 33 image is the third
The values of the most object-side surface and the most image-side surface of the cemented negative lens G33 of the lens group G3 are shown.

【0030】なお、以下の全ての諸元値において、掲載
されている焦点距離f、曲率半径r、面間隔dその他の
長さは、特記の無い場合一般に「mm」が使われるが、
光学系は比例拡大または比例縮小しても同等の光学性能
が得られるので、これに限られるものではない。また、
単位は「mm」に限定されること無く他の適当な単位を
用いることもできる。さらに、以上の説明は他の実施例
においても同様である。
In all of the following specification values, "mm" is generally used for the focal length f, the radius of curvature r, the surface distance d, and other lengths described, unless otherwise specified.
The optical system is not limited to this, because the same optical performance can be obtained even if the optical system is enlarged or reduced proportionally. Also,
The unit is not limited to "mm", and other suitable unit can be used. Furthermore, the above description is the same for other embodiments.

【0031】[0031]

【表1】 (諸元値) β=−60 NA=1.4 WD=0.12 f=3.33 [レンズデータ] 面番号 曲率r 面間隔d nd νd 1) ∞ 0.60 1.51823 58.90 2) -1.561 3.46 2.40782 12.66 3) -4.661 0.40 4) -7.496 4.50 1.59240 68.33 5) -6.484 0.15 6) -27.714 4.90 1.59240 68.33 7) -13.155 0.15 8) 34.999 3.50 1.49782 82.52 9) 108.615 1.50 1.80810 22.76 10) 24.426 7.50 1.43385 95.25 11) -21.859 0.15 12) 30.200 1.50 1.65412 39.68 13) 15.187 8.00 1.43385 95.25 14) -43.967 0.15 15) 22.499 1.50 1.84666 23.78 16) 12.252 6.00 1.43385 95.25 17) 128.571 0.15 18) 23.464 1.50 1.84666 23.78 19) 13.559 5.40 1.66755 41.96 20) -23.555 1.50 1.80400 46.57 21) 27.174 1.00 22) 74.164 3.40 1.80810 22.76 23) -13.699 1.30 1.64000 60.08 24) 28.235 0.30 25) 28.639 3.20 1.80810 22.76 26) -15.477 1.30 1.81600 46.62 27) 11.588 [条件対応値] (1) φs2=−0.57 (2) (ν32+−ν32-)+(ν33+−ν33-)=−61.176 (3) |f2/f1|=1.594 (4) |r/D|32物=5.347 |r/D|32像=2.304 |r/D|33物=2.353 |r/D|33像=1.130 図2に第1実施例にかかる液浸系アポクロマート顕微鏡
対物レンズにおける各収差図を示す。球面収差図、倍率
色収差図、およびコマ収差図において、実線はd線(λ
=587.56nm)、点線はC線(λ=656.27
nm)、鎖線はF線(λ=486.13nm)、二点鎖
線はg線(λ=435.83nm)をそれぞれ示してい
る。また、非点収差図中、実線はサジタル像面を表し、
点線はメリジオナル像面をそれぞれ示している。また、
NAは開口数を、Yは像高をそれぞれ示している。
[Table 1] (Specifications) β = −60 NA = 1.4 WD = 0.12 f = 3.33 [Lens data] Surface number Curvature r Surface spacing d nd νd 1) ∞ 0.60 1.51823 58.90 2)- 1.561 3.46 2.40782 12.66 3) -4.661 0.40 4) -7.496 4.50 1.59240 68.33 5) -6.484 0.15 6) -27.714 4.90 1.59240 68.33 7) -13.155 0.15 8) 34.999 3.50 1.49782 82.52 9) 108.615 1.50 1.80810 22.76 10) 24.426 7.50 1.43385 95.25 11) -21.859 0.15 12) 30.200 1.50 1.65412 39.68 13) 15.187 8.00 1.43385 95.25 14) -43.967 0.15 15) 22.499 1.50 1.84666 23.78 16) 12.252 6.00 1.43385 95.25 17) 128.571 0.15 18) 23.464 1.50 1.84666 23.78 19) 13.559 5.40 1.66755 41.96 20) -23.555 1.50 1.80400 46.57 21) 27.174 1.00 22) 74.164 3.40 1.80810 22.76 23) -13.699 1.30 1.64000 60.08 24) 28.235 0.30 25) 28.639 3.20 1.80810 22.76 26) -15.477 1.30 1.81600 46.62 27) 11.588 [Values] (1) φ s2 = -0.57 ( 2) (ν 32+ -ν 32-) + (ν 33+ -ν 33-) = - 61.176 (3) | f2 / f | = 1.594 (4) | r / D | 32 product = 5.347 | r / D | 32 images = 2.304 | r / D | 33 product = 2.353 | r / D | 33 image = 1 .130 is a diagram showing each aberration in the liquid immersion apochromat microscope objective lens according to the first example. In the spherical aberration diagram, the chromatic aberration of magnification diagram, and the coma diagram, the solid line is the d line (λ
= 587.56 nm), the dotted line is the C line (λ = 656.27).
nm), the chain line indicates the F line (λ = 486.13 nm), and the two-dot chain line indicates the g line (λ = 435.83 nm). Also, in the astigmatism diagram, the solid line represents the sagittal image plane,
The dotted lines indicate the meridional image planes, respectively. Also,
NA indicates the numerical aperture, and Y indicates the image height.

【0032】なお、以下に示す他の実施例の諸収差図に
おいても、本実施例と同様の符号を用い説明を省略す
る。
In the various aberration diagrams of the other examples described below, the same reference numerals as those in the present example are used and the description thereof is omitted.

【0033】各収差図から明らかなように、視野全体に
わたって像面の平坦性を維持しつつ、各収差が良好に補
正されていることが分かる。 (第2実施例)図3は本発明の液浸系アポクロマート顕
微鏡対物レンズにかかる第2実施例のレンズ系を示す図
である。
As can be seen from the aberration diagrams, each aberration is well corrected while maintaining the flatness of the image plane over the entire visual field. (Second Embodiment) FIG. 3 is a diagram showing a lens system of a second embodiment according to the liquid immersion type apochromat microscope objective lens of the present invention.

【0034】図3において、液浸系アポクロマート顕微
鏡対物レンズは、物体側から順に物体側に平面を向けた
平凸レンズL11と物体側に凹面を向けた負メニスカス
レンズL12との接合平凸レンズG11、および物体側
に凹面を向けた2枚の正メニスカスレンズL13、L1
4、および両凸レンズL15とから構成される第1レン
ズ群G1と、物体側から順に物体側に両凹レンズL21
と両凸レンズL22との接合正レンズG21、および物
体側に凸面を向けた負メニスカスレンズL23と両凸レ
ンズL24との接合正レンズG22、および物体側に凸
面を向けた負メニスカスレンズL25と物体側に凸面を
向けた正メニスカスレンズL26との接合正レンズG2
3とから構成される第2レンズ群G2と、物体側から順
に物体側に凸面を向けた負メニスカスレンズL31と両
凸レンズL32と両凹レンズL33との接合負レンズG
31、および両凸レンズL34と両凹レンズL35との
接合負レンズG32、および両凸レンズL36と両凹レ
ンズL37との接合負レンズG33とから構成される第
3レンズ群G3の3群レンズで構成されている。
In FIG. 3, the immersion apochromatic microscope objective lens is a cemented plano-convex lens G11 consisting of a plano-convex lens L11 having a flat surface facing the object side and a negative meniscus lens L12 having a concave surface facing the object side in order from the object side. Two positive meniscus lenses L13, L1 with concave surfaces facing the object side
4 and a biconvex lens L15, and a biconcave lens L21 in order from the object side to the object side.
And a biconvex lens L22, a cemented positive lens G21, a cemented positive lens G22, which is a negative meniscus lens L23 having a convex surface facing the object side and a biconvex lens L24, and a negative meniscus lens L25 having a convex surface facing the object side, and the object side. A positive lens G2 cemented with a positive meniscus lens L26 having a convex surface
A second lens group G2 including a negative meniscus lens L31 having a convex surface facing the object side in order from the object side, a biconvex lens L32, and a biconcave lens L33;
31 and a cemented negative lens G32 composed of a biconvex lens L34 and a biconcave lens L35, and a cemented negative lens G33 composed of a biconvex lens L36 and a biconcave lens L37. .

【0035】表2に第2実施例かかる液浸系アポクロマ
ート顕微鏡対物レンズの諸元値を示す。
Table 2 shows the specifications of the immersion type apochromat microscope objective lens according to the second embodiment.

【0036】[0036]

【表2】 (諸元値) β=−60 NA=1.4 WD=0.12 f=3.33 [レンズデータ] 面番号 曲率r 面間隔d nd νd 1) ∞ 0.65 1.51823 58.90 2) -1.332 3.40 2.40782 12.66 3) -4.582 0.15 4) -7.702 3.80 1.74810 52.30 5) -6.242 0.10 6) -22.565 3.60 1.56907 71.31 7) -12.827 0.15 8) 56.846 2.50 1.49782 82.52 9) -104.278 0.15 10) -6383.435 1.10 1.79504 28.55 11) 26.823 6.10 1.56907 71.31 12) -38.407 0.15 13) 55.573 1.10 1.75692 31.62 14) 25.031 8.40 1.43385 95.25 15) -23.609 0.15 16) 24.478 1.60 1.78472 25.68 17) 12.175 7.30 1.43385 95.25 18) -43.889 0.15 19) 25.822 1.70 1.72047 34.71 20) 11.389 6.70 1.43385 95.25 21) -20.806 1.10 1.65160 58.54 22) 116.788 1.00 23) 26.288 3.40 1.78472 25.68 24) -14.213 1.20 1.73350 51.09 25) 17.244 1.00 26) 37.218 3.70 1.79504 28.55 27) -11.256 2.30 1.69680 55.60 38) 11.119 [条件対応値] (1) φs2=−0.668 (2) (ν32+−ν32-)+(ν33+−ν33-)=−52.464 (3) |f2/f1|=1.338 (4) |r/D|32物=1.918 |r/D|32像=1.463 |r/D|33物=3.142 |r/D|33像=1.134 図4に第2実施例にかかる液浸系アポクロマート顕微鏡
対物レンズにおける諸収差図を示す。各収差図から明ら
かなように、視野全体にわたって像面の平坦性を維持し
つつ、各収差が良好に補正されていることが分かる。 (第3実施例)図5は本発明の液浸系アポクロマート顕
微鏡対物レンズにかかる第3実施例のレンズ系を示す図
である。
[Table 2] (Specifications) β = −60 NA = 1.4 WD = 0.12 f = 3.33 [Lens data] Surface number Curvature r Surface spacing d nd νd 1) ∞ 0.65 1.51823 58.90 2)- 1.332 3.40 2.40782 12.66 3) -4.582 0.15 4) -7.702 3.80 1.74810 52.30 5) -6.242 0.10 6) -22.565 3.60 1.56907 71.31 7) -12.827 0.15 8) 56.846 2.50 1.49782 82.52 9) -104.278 0.15 10) -6383.435 1.10 1.79504 28.55 11) 26.823 6.10 1.56907 71.31 12) -38.407 0.15 13) 55.573 1.10 1.75692 31.62 14) 25.031 8.40 1.43385 95.25 15) -23.609 0.15 16) 24.478 1.60 1.78472 25.68 17) 12.175 7.30 1.43385 95.25 18) -43.889 0.15 19) 25.822 1.70 1.72047 34.71 20) 11.389 6.70 1.43385 95.25 21) -20.806 1.10 1.65160 58.54 22) 116.788 1.00 23) 26.288 3.40 1.78472 25.68 24) -14.213 1.20 1.73350 51.09 25) 17.244 1.00 26) 37.218 3.70 1.79504 28.55 27) -11.256 2.30 1.69680 55. ) 11.119 condition corresponding values] (1) φ s2 = -0.668 (2) (ν 32+ -ν 32-) + (ν 33+ -ν 33-) = - 52.464 3) | f2 / f1 | = 1.338 (4) | r / D | 32 product = 1.918 | r / D | 32 images = 1.463 | r / D | 33 product = 3.142 | r / D | 33 image = 1.134 FIG. 4 shows various aberration diagrams of the immersion type apochromat microscope objective lens according to the second example. As is apparent from each aberration diagram, it is understood that each aberration is favorably corrected while maintaining the flatness of the image plane over the entire visual field. (Third Embodiment) FIG. 5 is a diagram showing a lens system of a third embodiment according to the liquid immersion type apochromat microscope objective lens of the present invention.

【0037】図5において、液浸系アポクロマート顕微
鏡対物レンズは、物体側から順に物体側に平面を向けた
平凸レンズL11と物体側に凹面を向けた負メニスカス
レンズL12との接合平凸レンズG11、および物体側
に凹面を向けた2枚の正メニスカスレンズL13、L1
4とから構成される第1レンズ群G1と、物体側から順
に物体側に両凹レンズL21と両凸レンズL22との接
合正レンズG21、および物体側に凸面を向けた負メニ
スカスレンズL23と両凸レンズL24との接合正レン
ズG22、および物体側に凸面を向けた負メニスカスレ
ンズL25と物体側に凸面を向けた正メニスカスレンズ
L26との接合正レンズG23とから構成される第2レ
ンズ群G2と、物体側から順に物体側に凸面を向けた負
メニスカスレンズL31と両凸レンズL32と両凹レン
ズL33との接合負レンズG31、および物体側に凹面
を向けた正メニスカスレンズL34と物体側に凹面を向
けた負メニスカスレンズL35との接合負レンズG3
2、および物体側に凹面を向けた正メニスカスレンズL
36と両凹レンズL37との接合負レンズG33とから
構成される第3レンズ群G3の3群レンズで構成されて
いる。
In FIG. 5, the immersion apochromat microscope objective lens is a cemented plano-convex lens G11 consisting of a plano-convex lens L11 having a flat surface directed toward the object side and a negative meniscus lens L12 having a concave surface directed toward the object side. Two positive meniscus lenses L13, L1 with concave surfaces facing the object side
4, a cemented positive lens G21 including a biconcave lens L21 and a biconvex lens L22 on the object side in order from the object side, and a negative meniscus lens L23 and a biconvex lens L24 having a convex surface on the object side. A second lens group G2 including a positive lens cemented with a positive lens G22 cemented with a positive meniscus lens L25 having a convex surface facing the object side, and a positive meniscus lens L26 having a positive meniscus lens facing a convex surface facing the object side; From the side, a negative meniscus lens L31 having a convex surface directed toward the object side, a cemented negative lens G31 composed of a biconvex lens L32, and a biconcave lens L33, a positive meniscus lens L34 having a concave surface facing the object side, and a negative lens having a concave surface facing the object side. Negative lens G3 cemented with meniscus lens L35
2, and a positive meniscus lens L having a concave surface facing the object side
The third lens group G3 includes a cemented negative lens G33 composed of a cemented lens 36 and a biconcave lens L37.

【0038】表3に第3実施例かかる液浸系アポクロマ
ート顕微鏡対物レンズの諸元値を示す。
Table 3 shows specifications of the immersion type apochromat microscope objective lens according to the third embodiment.

【0039】[0039]

【表3】 (諸元値) β=−60 NA=1.4 WD=0.12 f=3.33 [レンズデータ] 面番号 曲率r 面間隔d nd νd 1) ∞ 0.60 1.51823 58.90 2) -1.550 3.46 2.40782 12.66 3) -4.650 0.30 4) -7.496 4.50 1.62041 60.29 5) -6.540 0.20 6) -108.489 4.90 1.56907 71.31 7) -15.770 0.20 8) -204.241 1.50 1.80810 22.76 9) 32.920 8.50 1.43385 95.25 10) -18.536 0.20 11) 31.613 1.50 1.67163 38.80 12) 18.312 7.80 1.43385 95.25 13) -35.974 0.20 14) 30.562 1.50 1.80810 22.76 15) 15.081 6.00 1.43385 95.25 16) -81.825 0.15 17) 30.020 1.50 1.67163 38.80 18) 16.100 6.50 1.66755 41.96 19) -21.306 1.50 1.80400 46.57 20) 145.056 1.00 21) -151.723 3.80 1.92286 18.90 22) -21.149 1.30 1.75500 52.32 23) -305.789 0.60 24) -185.082 3.90 1.92286 18.90 25) -14.819 1.60 1.80400 46.57 26) 10.015 [条件対応値] (1) φs2=−0.574 (2) (ν32+−ν32-)+(ν33+−ν33-)=−61.094 (3) |f2/f1|= 1.590 (4) |r/D|32物= 9.994 |r/D|32像=22.885 |r/D|33物=14.325 |r/D|33像= 0.994 図6に第3実施例かかる液浸系アポクロマート顕微鏡対
物レンズにおける諸収差図を示す。各収差図から明らか
なように、視野全体にわたって像面の平坦性を維持しつ
つ、各収差が良好に補正されていることが分かる。
[Table 3] (Specifications) β = −60 NA = 1.4 WD = 0.12 f = 3.33 [Lens data] Surface number Curvature r Surface spacing d nd νd 1) ∞ 0.60 1.51823 58.90 2)- 1.550 3.46 2.40782 12.66 3) -4.650 0.30 4) -7.496 4.50 1.62041 60.29 5) -6.540 0.20 6) -108.489 4.90 1.56907 71.31 7) -15.770 0.20 8) -204.241 1.50 1.80810 22.76 9) 32.920 8.50 1.43385 95.25 10) -18.536 0.20 11) 31.613 1.50 1.67163 38.80 12) 18.312 7.80 1.43385 95.25 13) -35.974 0.20 14) 30.562 1.50 1.80810 22.76 15) 15.081 6.00 1.43385 95.25 16) -81.825 0.15 17) 30.020 1.50 1.67163 38.80 18) 16.100 6.50 1.66755 41.96 19)- 21.306 1.50 1.80400 46.57 20) 145.056 1.00 21) -151.723 3.80 1.92286 18.90 22) -21.149 1.30 1.75500 52.32 23) -305.789 0.60 24) -185.082 3.90 1.92286 18.90 25) -14.819 1.60 1.80400 46.57 26) 10.015 [Conformance value] ( 1) φ s2 = -0.574 (2) (ν 32+32- ) + (ν 33+33- ) =-61.094 (3) | f2 / f1 | = 1.5 90 (4) | r / D | 32 objects = 9.994 | r / D | 32 images = 22.885 | r / D | 33 objects = 14.325 | r / D | 33 images = 0.994 FIG. 6 shows various aberration diagrams of the immersion type apochromat microscope objective lens according to the third example. As is apparent from each aberration diagram, it is understood that each aberration is favorably corrected while maintaining the flatness of the image plane over the entire visual field.

【0040】また、各実施例の液浸系アポクロマート顕
微鏡対物レンズは無限遠補正系であり、例えば表4に掲
げる諸元値を有し、図7に示す結像レンズと組み合わせ
て用いられる。結像レンズと顕微鏡レンズとの間の間隔
は約150mmであるが、これに限られるものではな
く、50mm〜180mmのいずれの位置でも良い。
Further, the liquid immersion type apochromat microscope objective lens of each embodiment is an infinity correction system, has the specifications shown in Table 4, and is used in combination with the imaging lens shown in FIG. The distance between the imaging lens and the microscope lens is about 150 mm, but it is not limited to this and may be any position between 50 mm and 180 mm.

【0041】[0041]

【表4】 (諸元値) [レンズデータ] 面番号 曲率r 面間隔d nd νd 1) 75.043 5.10 1.62280 57.03 2) -75.043 2.00 1.74950 35.19 3) 1600.580 7.50 4) 50.256 5.10 1.66755 41.96 5) -84.541 1.80 1.61266 44.41 6) 36.911 なお、この実施の形態は例に過ぎず、本発明の範囲内に
おいて適宜修正、変更が可能である。
[Table 4] (Specifications) [Lens data] Surface number Curvature r Surface spacing d nd νd 1) 75.043 5.10 1.62280 57.03 2) -75.043 2.00 1.74950 35.19 3) 1600.580 7.50 4) 50.256 5.10 1.66755 41.96 5) -84.541 1.80 1.61266 44.41 6) 36.911 Note that this embodiment is merely an example, and can be appropriately modified and changed within the scope of the present invention.

【0042】[0042]

【発明の効果】上述のように、本発明によれば、最も像
側のレンズ群をガウスタイプにすることなく、倍率が6
0倍程度で1.4という高NAを維持しつつ、視野全体
にわたって像面の平坦性を維持でき、かつ諸収差が良好
に補正される液浸系アポクロマート顕微鏡対物レンズを
提供することができる。
As described above, according to the present invention, the magnification is 6 without making the most image side lens unit a Gauss type.
It is possible to provide an immersion apochromat microscope objective lens capable of maintaining the flatness of the image plane over the entire field of view while maintaining a high NA of 1.4 at 0 times the magnification and satisfactorily correcting various aberrations.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の液浸系アポクロマート顕微鏡対物レン
ズにかかる第1実施例のレンズ系を示す図である。
FIG. 1 is a diagram showing a lens system according to a first example of an immersion-type apochromat microscope objective lens of the present invention.

【図2】第1実施例における諸収差図を示す。FIG. 2 is a diagram showing various types of aberration in the first example.

【図3】本発明の液浸系アポクロマート顕微鏡対物レン
ズにかかる第2実施例のレンズ系を示す図である。
FIG. 3 is a diagram showing a lens system of a second example according to the liquid immersion type apochromat microscope objective lens of the present invention.

【図4】第2実施例における諸収差図を示す。FIG. 4 is a diagram showing various types of aberration in the second example.

【図5】本発明の液浸系アポクロマート顕微鏡対物レン
ズにかかる第3実施例のレンズ系を示す図である。
FIG. 5 is a diagram showing a lens system according to a third example of the liquid immersion type apochromat microscope objective lens of the present invention.

【図6】第3実施例における諸収差図を示す。FIG. 6 is a diagram showing various types of aberration in the third example.

【図7】本発明の液浸系アポクロマート顕微鏡対物レン
ズに組み合わせて用いる結像レンズの例。
FIG. 7 shows an example of an image forming lens used in combination with the immersion apochromat microscope objective lens of the present invention.

【符号の説明】[Explanation of symbols]

G1 第1レンズ群 G2 第2レンズ群 G3 第3レンズ群 L11 平凸レンズ L12 負メニスカスレンズ CG 平行平面版(カバーガラス) G1 first lens group G2 Second lens group G3 Third lens group L11 Plano-convex lens L12 negative meniscus lens CG parallel plane plate (cover glass)

フロントページの続き Fターム(参考) 2H087 KA09 LA01 MA01 NA01 PA09 PA16 PB18 QA01 QA06 QA13 QA22 QA26 QA39 QA41 QA46 UA09 Continued front page    F term (reference) 2H087 KA09 LA01 MA01 NA01 PA09                       PA16 PB18 QA01 QA06 QA13                       QA22 QA26 QA39 QA41 QA46                       UA09

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】物体側から順に、物体側にほぼ平面を向け
た平凸レンズと物体側に凹面を向けた負メニスカスレン
ズとの接合平凸レンズを含む第1レンズ群と、 負の屈折力を有する接合面を含み、前記第1レンズ群を
通過した光束を収斂光束に変換する第2レンズ群と、 像側に凹面を向けて形成されている接合レンズを少なく
とも2つ以上有する第3レンズ群と、を具備し、 前記第1レンズ群の接合平凸レンズの接合面の屈折力を
φs2、前記第3レンズ群の最も像側の接合レンズの凸レ
ンズのアッベ数をν33+、および凹レンズのアッベ数を
ν33-、前記第3レンズ群の前記接合レンズの物体側に続
く接合レンズの凸レンズのアッベ数をν32+、および凹
レンズのアッベ数をν32-、とするとき、 φs2<−0.45 (ν32+−ν32-)+(ν33+−ν33-)<−50 であることを特徴とする液浸系アポクロマート顕微鏡対
物レンズ。
1. A first lens group including, in order from the object side, a plano-convex lens having a substantially flat surface facing the object side and a negative meniscus lens having a concave surface facing the object side, and a first lens group having a negative refracting power. A second lens group that includes a cemented surface and converts a light flux that has passed through the first lens group into a convergent light flux; and a third lens group that has at least two cemented lenses that are formed with their concave surfaces facing the image side. , The refractive power of the cemented surface of the cemented plano-convex lens of the first lens group is φ s2 , the Abbe number of the convex lens of the most image-side cemented lens of the third lens group is ν 33+ , and the Abbe number of the concave lens is the number [nu 33-, the third lens group of the cemented lens that follows the object side of the cemented lens and the Abbe number of the convex lens [nu 32+, and 32 the Abbe number of the concave lens [nu, that when, phi s2 <- 0.45 (ν 32+ −ν 32- ) + (ν 33+ −ν 3 3- ) <-50, an immersion-type apochromat microscope objective lens.
【請求項2】前記第1レンズ群の接合平凸レンズの該平
凸レンズの焦点距離をf1、および該負メニスカスレン
ズの焦点距離をf2、前記第3レンズ群の最も像側の前
記接合レンズとその物体側に続く前記接合レンズそれぞ
れの物体側を向いている面と像側を向いている面の曲率
半径をr、有効径をDとすると、 |f2/f1|<2 |r/D|>0.8 であることを特徴とする請求項1に記載の液浸系アポク
ロマート顕微鏡対物レンズ。
2. A cemented plano-convex lens of the first lens group, wherein the plano-convex lens has a focal length of f1, and the negative meniscus lens has a focal length of f2, and the cemented lens closest to the image in the third lens group and its Let r be the radius of curvature of the surface facing the object side and the surface facing the image side of each cemented lens following the object side, and let D be the effective diameter: | f2 / f1 | <2 | r / D |> The immersion type apochromat microscope objective lens according to claim 1, wherein the objective lens is 0.8.
JP2002146571A 2002-05-21 2002-05-21 Liquid immersion apochromatic microscope objective lens Withdrawn JP2003337285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
JP2003337285A true JP2003337285A (en) 2003-11-28

Family

ID=29705523

Family Applications (1)

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Country Status (1)

Country Link
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007516613A (en) * 2003-12-15 2007-06-21 カール・ツアイス・エスエムテイ・アーゲー Objective lens as a microlithographic projection objective comprising at least one liquid lens
US7486445B2 (en) 2006-12-11 2009-02-03 Olympus Corporation Immersion type microscope objective
CN107076966A (en) * 2014-09-29 2017-08-18 Asml控股股份有限公司 High-NA objective system
WO2023120104A1 (en) * 2021-12-23 2023-06-29 株式会社ニコン Microscope objective lens, microscope optical system, and microscope device
CN116909007A (en) * 2023-09-13 2023-10-20 长春长光智欧科技有限公司 Large-view-field flat-field apochromatic microscope objective lens
WO2024090587A1 (en) * 2022-10-27 2024-05-02 株式会社ニコン Microscope objective lens, microscope optical system, and microscope device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007516613A (en) * 2003-12-15 2007-06-21 カール・ツアイス・エスエムテイ・アーゲー Objective lens as a microlithographic projection objective comprising at least one liquid lens
US7486445B2 (en) 2006-12-11 2009-02-03 Olympus Corporation Immersion type microscope objective
US7642525B2 (en) 2006-12-11 2010-01-05 Olympus Corporation Microscope objective and fluorescent observation apparatus therewith
CN107076966A (en) * 2014-09-29 2017-08-18 Asml控股股份有限公司 High-NA objective system
JP2017530394A (en) * 2014-09-29 2017-10-12 エーエスエムエル ホールディング エヌ.ブイ. High numerical aperture objective lens system
CN107076966B (en) * 2014-09-29 2022-05-24 Asml控股股份有限公司 High numerical aperture objective system
WO2023120104A1 (en) * 2021-12-23 2023-06-29 株式会社ニコン Microscope objective lens, microscope optical system, and microscope device
WO2024090587A1 (en) * 2022-10-27 2024-05-02 株式会社ニコン Microscope objective lens, microscope optical system, and microscope device
CN116909007A (en) * 2023-09-13 2023-10-20 长春长光智欧科技有限公司 Large-view-field flat-field apochromatic microscope objective lens
CN116909007B (en) * 2023-09-13 2023-11-28 长春长光智欧科技有限公司 Large-view-field flat-field apochromatic microscope objective lens

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