JP2003337106A - Macro inspection equipment - Google Patents

Abstract

(57) [Summary] To provide a macro inspection apparatus which aims to reduce the heat resistance of an object to be inspected and the size of the apparatus. A shutter (50a, 50b) for switching projection light (L1, L3), a Fresnel lens (5) and a Fresnel lens (8) for parallelizing the projection light (L1, L3), respectively;
A fixed support member 43 for supporting the inspection object holder 1 on which the inspection object 2 is placed, and a telescopic support member 4 for supporting the inspection object 2 so as to extend and contract.
4, 45, the fixed support member 43 and the telescopic support members 44, 4
And a control means 60 for controlling the attitude of the object 2, and the parallel light L 3 according to the attitude of the object 2.
Is reflected on the surface of the inspection object 2 or the parallel light L4 is transmitted to the back surface of the inspection object 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a macro inspection apparatus, for example, in a manufacturing process of liquid crystal substrates, PDPs, etc.
The present invention relates to a macro inspection device that inspects for defects such as scratches and stains on the surface.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a liquid crystal substrate or a PDP, it is necessary to inspect defects such as scratches and stains on the surface of an object to be inspected. Conventionally, as a device for inspecting defects such as scratches and dirt on the surface, generally, macroscopic inspection is performed by projecting multicolor light illumination on the inspection object and visually moving it while moving the inspection object at an arbitrary angle. Is already known.

Conventionally, for such an inspection apparatus, a macro inspection apparatus as shown in FIG. 4, for example, has been used. FIG. 4 is a structural explanatory view of a macro inspection device of a conventional technique. In the macro inspection apparatus 100, two reflection light sources 3a and 3b (only 3a is displayed because they are seen to overlap in the drawing) are provided on the top of the housing 100B, and a transmission light source 4 is vertically provided on the bottom surface of the housing 100A. It is set up. The reflective light source 3
Illustrations of the attachment mechanisms of a and 3b and the transmitted light source 4 are omitted. The electrical wiring from the control device (not shown) is also troublesome and will not be described.

A base 4 rotatably controlled by a controller (not shown) provided on the bottom surface of the housing 100B.
2, a predetermined fixed support member 43 on the base 42, and expandable and contractible support members 44 and 45 that can be expanded and contracted in the vertical direction (only 44 close to the paper surface is shown in the drawing because they appear to overlap). The fixed support member 43 includes a shaft joint (not shown), and the expansion and contraction support members 44 and 45 displaceably supported via a universal shaft joint (not shown).

When the expansion and contraction support members 44 and 45 are controlled to expand and contract in the same vertical direction by the control device, the subject holding unit 1 is elevated while keeping the same height in the direction perpendicular to the paper surface. It takes a posture to When the expansion and contraction support members 44 and 45 are controlled by the control device so as to expand and contract in the opposite vertical directions, the inspection object holding unit 1
While holding different heights of both ends perpendicular to the plane of the paper, it takes a posture of raising. For example, when the expansion and contraction support member 44 is controlled to expand and the expansion and contraction support member 45 is contracted, the inspection object holding unit 1 becomes high on the paper surface side and becomes low on the opposite side. The elastic support member 44,
When the expansion and contraction of 45 is controlled to be opposite, the height of the inspection object holding unit 1 becomes opposite.

In the macro inspection apparatus having such a structure, the inspection object 2 (not shown) is mounted on the inspection object holding unit 1, and the control unit controls the base 42, the fixed support member 43, and the expansion / contraction support. The inspection object holding unit 1 by the members 44 and 45
In an arbitrary posture, and the reflective illumination 3 of the polychromatic light and the transmissive illumination 4 of the polychromatic light are switched and projected in accordance with the posture of the object holding unit 1, and the surface is scratched from the front (the left side of the paper) visually. , Macro inspection for dirt etc. is performed.

[0007]

However, conventionally, the reflection illumination and the transmission illumination used for inspecting for defects such as scratches and stains on the surface of the object to be inspected are only polychromatic light emission. As a result, defects such as scratches and stains on the surface that are difficult to find with the polychromatic light may be missed. Further, there is a problem that the unevenness of the film of the inspection object cannot be detected.

Further, since the illumination is projected directly onto the object to be inspected, the heat resistance of the object to be inspected is not taken into consideration, and further, the illumination is not folded back by the mirror, so that the apparatus is large in size. was there.

The present invention has been made in order to solve the above-mentioned problems of the prior art. According to the configuration of the present invention, a lamp is provided by using a projector device, an instantaneous light control filter and a Fresnel lens for reflected light and transmitted light. The first is to improve the quickness and accuracy of finding defects such as scratches and stains on the surface of the object to be inspected by selecting an arbitrary projection light without blinking and stabilizing the lamp characteristics. It is intended.

Further, according to the finding by the inventor of the present invention that the most sensitive wavelengths for human vision to find defects such as scratches and stains are yellow and green, yellow and green monochromatic lights are used to improve sensitivity. The second purpose is to do well.

Furthermore, the projection light is reflected by a mirror and then projected onto an object to be inspected, so that the heat resistance of the object to be inspected is taken into consideration and the size of the apparatus can be reduced. It is intended.

[0012]

In order to achieve the above object, the structure of a macro inspection apparatus according to the present invention is such that a reflected light is projected onto an object to be inspected, and the projected reflected light is transmitted or blocked. A first light source having one switching means, a second light source having a second switching means for projecting transmitted light on an object to be inspected, and transmitting and blocking the projected transmitted light; An inspection object holding unit that holds the inspection object, a support member that supports the inspection object holding unit, and a posture of the inspection object holding unit that drives the support member to control the posture, and according to the posture, A control means for controlling the first and second switching means, wherein the reflected light is projected onto the surface of the object to be inspected or the transmitted light is projected onto the back surface of the object to be inspected. The defect is characterized in that it is visually observed.

Another structure of the macro inspection apparatus according to the present invention is the macro inspection apparatus described in the preceding paragraph, wherein the reflected light system includes a first lamp section for projecting reflected light and an optical path of the reflected light. Parallel light that is inserted and transmits either the first momentary light control glass or the momentary light control filter that transmits or blocks the reflected light and the light that passes through either the first momentary light control glass or the momentary light control filter. A second Fresnel lens for projecting the transmitted light, and a second Fresnel lens for transmitting the transmitted light and blocking the transmitted light. And a second Fresnel lens for collimating the light transmitted through either the second instantaneous light control glass or the instantaneous light control filter, and the second Fresnel lens. Characteristic It is intended to.

In the macro inspection apparatus described in the preceding paragraph, the support member includes a fixed support member that supports the object holding portion through a shaft joint and a telescopic support member that supports through a universal shaft joint. A base to which the fixed support member and the expansion and contraction support member are attached and which rotates in the horizontal direction, and the control means drives the expansion and contraction support member and the base to adjust the posture of the inspection object holder and Depending on the posture, either the first momentary light control glass or the momentary light control filter is made to transmit or block light, and the second momentary light control glass or moment is set for transmission or block of the light. It is characterized in that any one of the light control filters is controlled so as to be in a state of blocking or transmitting light.

In the macro inspection apparatus according to any one of the preceding paragraphs, each of the first lamp section and the second lamp section comprises a lamp for projecting projected light and a homogenizer for making the projected light uniform. The projector device is characterized in that a filter for transmitting yellow or green light is switchably arranged between the lamp and the homogenizer.

The macro inspection apparatus according to any one of the preceding paragraphs is characterized in that a CCD camera is arranged at the visual position.

The macro inspection apparatus according to any one of the preceding paragraphs is characterized in that a reflection mirror for changing the optical axis is arranged between the projector device and the inspection object.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a macro inspection apparatus according to the present invention will be described below with reference to FIGS. FIG. 1 is an explanatory view of an embodiment of a macro inspection apparatus according to the present invention, FIG. 2 is a front partial explanatory view of the macro inspection apparatus of FIG. 1, and FIG. 3 is a light source section used in the macro inspection apparatus of FIG. FIG. It should be noted that the same functions and the same members as those in FIG. 4 showing the macro inspection device of the prior art will be described using the same reference numerals. In addition, the electrical wiring between the control device 60 (described later) and each member is omitted because it avoids the trouble of FIGS.

As shown in FIG. 1, the macro inspection apparatus 100
Is an inspection object holding unit 1 on which the inspection object 2 is placed, a reflected light system R for projecting reflected light on the inspection object holding unit 1, and a transmitted light system for projecting transmitted light on the inspection object holding unit 1. T and a fixed support member 43 that supports the inspection object holding unit 1 via a shaft joint,
A plurality of telescopic support members 44 supported via a universal shaft joint,
45, the fixed support member 43, the expansion and contraction support members 44, 4
5, the base 42 to which the 5 is attached, the reflected light system R and the transmitted light system T, the base 42, and the expansion and contraction support members 44 and 4.
The control unit 60 controls the control unit 5 and the like, and each of the above-mentioned members is arranged in a housing 100A that also serves as a light shielding case. At the time of measurement, the upper part of the housing 100A is
Except for the front monitoring window (on the left side in the figure), either an instantaneous light control glass or an instantaneous light control filter (no code) is installed to block light.

Here, the instantaneous light control glass is a transparent electrode formed on the inner surface of each of two glass plates, and a liquid crystal spherical droplet dispersed in a polymer matrix. By applying a voltage to the electrodes, the optical axis of the spherical small droplets of liquid crystal is controlled so that the liquid crystal is in a light transmitting state or a light blocking state. The instantaneous light control filter is adapted to switch between a light transmission state and a light blocking state depending on the state of the power source, and is usually composed of a liquid crystal filter or the like. In the following embodiments, a case where an instantaneous light control filter is used will be described.

The reflected light system R uses a light source system 10 for projecting the projection light L1 and an optical system for projecting the projection light L1 onto the object 2 to be inspected as well as the projection light L2 which can be inspected. Two
It consists of 0. As shown in FIG. 3, the light source system 1
Reference numeral 0 denotes one lamp Lp for projecting the projected light, and the projected light from the lamp Lp having a single wavelength of a predetermined wavelength (referred to as single wavelength light), for example, yellow or green which is most sensitive to human vision. Of the monochromatic light F, and a homogenizer H for converting the monochromatic light from the color filter F into the light L1 of uniform intensity. This is hereinafter referred to as the projector device 3.

The projector device 3 is attached to a predetermined position on the upper wall surface of the housing 100A by appropriate means. Further, in the drawing, the color filter F is a color filter F, for example, a green or yellow color filter F, which is a driving unit Fd.
Shows a parallel movement type in which the color filter F is rotated and moved back and forth to be replaced, but a rotation type in which the color filter F is rotated may be used. Although not shown in detail, in the rotary type, a plurality of narrow band filters are housed in a disk-shaped container, and the disk-shaped container is rotated by a motor or the like. In this way, the desired color filter F can be inserted into the projection light in both the parallel movement type and the rotation type.

The optical system 20 transmits and blocks the single-wavelength light L1 of uniform intensity from the homogenizer H according to the posture of the inspection object holding unit 1 controlled by the control device 60 (the control of these postures will be described later). Yes, for example, the instantaneous light control filter 5
0a, and a reflection mirror 6 for changing the optical axis to a set angle of the single-wavelength light L1 of uniform intensity from the homogenizer H that has passed through the instantaneous light control filter 50a, the downward direction in the figure,
It is composed of a Fresnel lens 5 for projecting the object to be inspected 2 by converting the reflected light from the reflecting mirror 6 into parallel light L2. In this way, the light source system 10 and the optical system 20 constitute a first light source which is the reflected light system R. The parallel light L2
Is configured to vertically project the inspection object 2 placed on the inspection object holding portion 1 from above. The instantaneous light control filter 50a has a sufficient size so as not to leak the single-wavelength light L1 when it is shielded from light, and is attached to the housing 100A by an appropriate means.

Since the transmitted light system T has the same structure as the reflected light system R, the illustration thereof is omitted and the detailed description is complicated, so that it will be briefly described. The transmitted light system T is a light source system 30 for projecting the projection light L3, and an optical system 40 for reflecting the projection light L3 to the inspection object 2 and for making the projection light L3 into the inspectable projection light L4. It consists of Similar to the light source system 10 shown in FIG. 3, the light source system 30 includes one lamp Lp for projecting projection light and a color filter F for making the projection light from the lamp Lp a single wavelength light of a predetermined wavelength.
And a homogenizer H for converting the single-wavelength light into light L3 having a uniform intensity. Hereinafter, this is referred to as the projector device 4
Say. The projector device 4 is attached to a required position on the upper wall surface of the housing 100A by appropriate means. In addition,
Appropriate means for attaching the projector devices 3 and 4 to the housing 100A is complicated, and therefore illustration and description thereof are omitted. Further, the color filter F is a drive unit F in the figure.
Although a parallel movement type by d is shown, a rotary type may also be used.

The optical system 40 transmits and blocks the single-wavelength light L3 of uniform intensity from the homogenizer H according to the postures of the inspection object holding unit 1 controlled by the control device 60 (the control of these postures will be described later). For example, instantaneous light control filter 50
b, a reflection mirror 6 that changes the optical axis of the single-wavelength light L3 of uniform intensity from the homogenizer H that has passed through the instantaneous light control filter 50b to a set angle, and the reflection light from the reflection mirror 6 is parallel. It is composed of a Fresnel lens 8T which projects light L4 into the object 2 to be inspected. In this way, the light source system 30 and the optical system 40 constitute a second light source which is the transmitted light system T. Since the instantaneous light control filter 50b is similar to the instantaneous light control filter 50a, a description thereof will be omitted.

By thus installing the instantaneous light control filter 50a and the instantaneous light control filter 50b, it is not necessary to blink the lamp Lp, so that the characteristics of the lamp Lp are stabilized and the detection accuracy is improved. In addition, since the reflection mirrors 6 and 7 are installed in this manner, the projection lights L1 and L2 can be reflected by the reflection mirrors 6 and 7, respectively, and then projected onto the object to be inspected 2. The macro inspection device can be miniaturized.

The parallel light L4 is adapted to horizontally project the inspection object 2 placed on the inspection object holding portion 1 from the rear surface. For this reason, the inspected object holding portion 1 on which the inspected object 2 is placed is provided with a glass plate on the back surface of which an instantaneous light control filter is stretched, although detailed illustration is omitted. The function of the glass plate will be described later.

Next, a supporting member for supporting the object holding portion 1 will be described. As shown in Fig. 1, the housing 100A
A base 42 which is provided on the bottom surface of the base plate and is rotatably controlled by a control device 60 on a horizontal plane;
In addition, the expansion and contraction support members 44 and 45 that are controlled to expand and contract with respect to the base 42, the fixed support member 43 that has a predetermined height on the base 42, and is provided at a predetermined position, and the fixed member. The support member 43 has a bearing at the tip of the upper portion (on the side opposite to the base 42) via a bearing, and the universal member 80a, 8 at the tip of the upper portion (on the side opposite to the base 42) of the telescopic support members 44, 45.
0b, for example, the inspected object holding portion 1 which is displaceably supported via spherical bearings. The elastic support members 44 and 45 are elastic rod members 44a and 45b that are expanded and contracted by being driven by a motor (not shown) provided in the cylindrical body from the cylindrical body.
It is connected to 0a and 80b.

As shown by the arrow in FIG. 2, the elastic support member 4
When the control device 60 expands and contracts 4 and 45 in the same vertical direction, the inspection object holding unit 1 is elevated while keeping the same height in the direction perpendicular to the paper surface. When the expansion and contraction support members 44 and 45 are respectively expanded and contracted in the upside-down direction by the control device 60, both ends of the inspection object holding unit 1 in the direction perpendicular to the paper surface (the left and right directions in FIG. 2, the same applies below). It is designed to look up while holding different heights. For example, when the expansion / contraction support member 44 expands and the expansion / contraction support member 45 contracts, the inspection object holding unit 1 becomes higher on the paper surface side (right side in FIG. 2) and lower on the opposite side. When the expansion and contraction of the expansion and contraction support members 44 and 45 are opposite, the height of the inspected object holding unit 1 is reversed. In these cases, the universal shaft couplings 80a and 80b function to freely adjust the object holding unit 1.

The control device 60 is provided on the inclined portion 70 on the front side (left side in the drawing) of the housing 100A. An operation unit 60a is provided on the surface thereof, and various operation buttons are provided on the operation unit 60a. By operating these, depending on the posture of the inspection object holding unit 1 (these will be described later), For example, the instantaneous light control filters 50a and 50b are activated, and the lights L1 and L2 from the homogenizer H have uniform intensity.
Permeate and block. Further, the base 42 is attached to the telescopic support member 4
4 (illustrated), 45 or the base portion of the fixed support member 43 as a center, and horizontally rotates, while leaving the fixed support member 43 as it is, the expansion and contraction support members 44 and 45 are expanded and contracted in the same direction or in opposite directions. It is like this.

Further, the color filter F is driven by the driving device Fd, is put in the optical path of the light source Lp, and is controlled so as to become a single wavelength light of yellow light or green light which is sensitive to human vision. Has become. By controlling in this way, a single-wavelength light of yellow light or green light is obtained, the inspection object holding unit 1 is controlled to a desired posture, and the reflected light system R and the transmitted light system T are set in accordance with the desired posture. The shutters 50a and 50b are opened and closed while the light is on, and the reflected light system R or the transmitted light system T is switched to project on the inspection object 2.

Further, although not shown in detail, the control device 60 responds to the switching of the reflected light system R and the transmitted light system T, as described above, and the instantaneous light control filter provided in the inspection object holding unit 1. Is provided so that the glass plate 50 is in a light blocking state when the reflected light R is projected, and the glass plate 50 is in a light transmitting state when transmitted light is projected. It is controlled by.
When the expansion / contraction support members 44 and 45 are expanded / contracted only in the same vertical direction by the control device 60 and are elevated while keeping the same height of the inspection object holding unit 1 in the direction perpendicular to the paper surface, the fixed support member is used. A normal shaft coupling is sufficient for the tips of the upper portions (opposite to the base 42 side) of 43 and the expansion and contraction support members 44, 45. Further, the expansion and contraction support members 44 and 45 may be provided only one at an intermediate position between them.

The operation of the macro inspection apparatus 100 having the above configuration will be described. The inspection object 2 is mounted on the inspection object holding unit 1. The lamps Lp of the projector devices 3 and 4 of the reflected light system R and the transmitted light system T are turned on (hereinafter, the reflected light system R is turned on, and the transmitted light system T is turned on). The control device 60 controls the color filter F of the reflected light system R.
Is made yellow, and single-wavelength light is selected. The homogenizer H produces a single-wavelength light L1 of uniform intensity.

Next, the control unit 60 controls the instantaneous light control filter 50a so that it is in a light transmitting state, and the single wavelength light L
Make 1 transparent. The optical axis of the single wavelength light L1 is changed by the reflection mirror 6, and the parallel light L2 is changed by the Fresnel lens 5. In this case, the instantaneous light control filter 50b of the transmissive system T is in a light blocking state, and the single wavelength light L3 of the projector device 4 is blocked.

Next, the expansion / contraction rods 44a, 45b are expanded / contracted from the inside of the tubular body of the expansion / contraction support members 44, 45 to control (hereinafter, the expansion / contraction support members 44, 45 are controlled to expand and contract,
That is, the test object holding unit 1 of the macro test apparatus 100 is made horizontal, and at this time, the test object holding unit 1 is parallel to the base 42 of the macro test apparatus 100. Next, the control unit 60 sets the glass plate of the inspection object holding unit 1 in a light-shielded state so that the parallel light L2 from the Fresnel lens 5 is sufficiently reflected. The inspector M inspects the defect of the inspection object 2 by the reflection of the reflected light L2.

Next, the expansion and contraction support member 4 is controlled by the control device 60.
4, 45 are controlled to expand and contract in the same direction, and the inspection object holding unit 1 is raised. In the case of the upright posture, the inspector M directly inspects the inspection object 2 for defects. In the case of the downward posture, since the inspector M cannot inspect the defect of the inspection object 2 as it is, the control device 60 rotates the base 42 in the horizontal direction and the front side of the inspection object 2 ( (Left side in the figure)
Is set so that the inspector M can easily inspect the inspection object 2 for defects.

Next, the controller 60 selects a color filter of the reflected light system R to make it a green single-wavelength light, and the same macro inspection as in the case of the yellow single-wavelength light is carried out. In this way, the object to be inspected 1 is held at the arbitrary position by the object to be inspected 2
It is possible to macro-inspect the surface for scratches, stains, etc. with reflected light of yellow single-wavelength light or green single-wavelength light, which is free of visual sensitivity.

Next, the control device 60 controls the inspection object holding unit 1
With the object to be inspected 2 mounted thereon, the instantaneous light control filter 50a of the reflected light system R is put in the light-shielding state, and the single-wavelength light L1 is cut off. In this case, the transmission system T instantaneous light control filter 50b
Sets the light transmission state. Next, the control device 60 makes the color filter F of the transmitted light system T yellow, for example, and selects single wavelength light. Single wavelength light L with uniform intensity by homogenizer H
Set to 3. The optical axis of the single-wavelength light L3 is changed by the reflection mirror 6, and the parallel light L4 is changed by the Fresnel lens 5.

Next, the control device 60 opens the opening surface portion 50 of the inspection object holding portion 1 so that the transmitted light L4 from the Fresnel lens 5 is sufficiently transmitted. Further, the expansion and contraction support members 44 and 45 are expanded and contracted in the same direction, and the inspection object holding unit 1 is raised. In the case of an upright posture, if the elevation angle is greater than or equal to a predetermined value, the transmitted light L is transmitted from the rear surface (right side in the drawing) of the inspection object 2.
4 is projected and the defect is inspected from the front (the left side in the drawing). In the downward posture, the inspector M cannot inspect the inspection object 2 for defects.

Next, the color filter of the transmitted light system T is selected to be green single-wavelength light, and the same macro inspection as in the case of yellow single-wavelength light is carried out. In this way, the inspection object holding unit 1 macro-inspects the inspection object 2 freely at any position with the visually insensitive yellow single-wavelength light or the transmitted light of the yellow single-wavelength light for surface scratches, stains, and the like. be able to.

By the control device 60, the telescopic support member 44,
When 45 is expanded and contracted in the upside down direction, detailed description is omitted for the case where the inspection object holding unit 1 is lifted while being held so that the heights of both ends in the direction perpendicular to the paper surface are different. However, the reflected light system R and the transmitted light system T can be inspected by the reflected light and the transmitted light by switching the instantaneous light control filters 50a and 50b.

In this way, the base 42, the fixed support member 43, the expansion and contraction support members 44 and 45, and the universal shaft coupling 80a,
The object to be inspected 1 can be set to an arbitrary position by 80b, and the object to be inspected 2 placed on the object to be inspected 1 can be freely macro-inspected for scratches, dirt and the like. . Further, a CCD camera may be provided at the visual position to record an image. Further, although the case where the instant light control filters 50a and 50b are used has been described in the present embodiment, the same effect can be obtained by using the instant light control glass.

[0043]

As is apparent from the above detailed description, according to the configuration of the macro inspection apparatus of the present invention, the projector apparatus, the instantaneous light control filter, and the Fresnel lens are used for the reflected light system and the transmitted light system. , A macro inspection device that selects any projection light without blinking the lamp and stabilizes the lamp characteristics to find defects such as scratches and dirt on the surface of the object to be inspected quickly and with improved accuracy Can be provided. Furthermore, since the wavelengths most sensitive to human vision for finding defects such as scratches and stains are yellow and green, it is possible to provide a macro inspection apparatus with higher sensitivity using monochromatic light of yellow and green. Furthermore, after returning the projected light with a mirror,
It is possible to provide a macro inspection apparatus in which the heat resistance of the inspection object is taken into consideration and the size of the apparatus is reduced by projecting onto the inspection object.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of an embodiment of a macro inspection apparatus according to the present invention.

FIG. 2 is a front part explanatory view of the macro inspection apparatus of FIG.

FIG. 3 is an explanatory diagram of a light source unit used in the macro inspection apparatus of FIG.

FIG. 4 is a structural explanatory view of a conventional macro inspection apparatus.

[Explanation of symbols]

1 Inspection object holder 2 Inspected R reflected light system T transmitted light system 3 Reflected light projector device 4 Transmitted light projector device 5 Fresnel lens of reflected light system 6 Reflective mirror of reflected light system 7 Fresnel lens of transmitted light system 8 Reflection mirror of transmitted light system 42 base 43 Fixed support member 44, 45 telescopic support member 44a, 45b Telescopic rod material 50 glass plate 50a, b Instantaneous light control filter 60 control device 80a, 80b Universal shaft coupling Lp light source H homogenizer F color filter Fd filter drive M inspector 100 macro inspection equipment 100A macro inspection device housing

Continued front page    F term (reference) 2G051 AA90 AB02 BA01 BB01 BB07                       CA04 CA11 CB01 CB02 DA05                 2H088 FA13 HA01                 2H090 JC18

Claims (6)

[Claims] 1. A reflected light system having a first switching means for projecting reflected light onto an object to be inspected and transmitting and blocking the reflected light projected thereon, and projecting transmitted light onto the object to be inspected, A transmitted light system having a second switching means for transmitting and blocking the transmitted transmitted light, an inspection object holding portion for holding the inspection object, and a support member for supporting the inspection object holding portion. And a control unit that drives the support member to control the posture of the inspection object holding unit, and controls the first and second switching units according to the posture. A macro inspection apparatus, characterized in that reflected light is projected onto the surface of the object to be inspected, or light transmitted from the second light source is projected onto the back surface of the object to be inspected. 2. The macro inspection apparatus according to claim 1, wherein the reflected light system includes a first lamp unit that projects reflected light,
Either the first instantaneous light control glass or the instantaneous light control filter which is inserted into the optical path of the reflected light and transmits or blocks the reflected light, and either the first instantaneous light control glass or the instantaneous light control filter. A first Fresnel lens for collimating the light transmitted through to, and the transmitted light system, a second lamp unit for projecting the transmitted light,
Either the second instantaneous light control glass or the instantaneous light control filter, which is inserted in the optical path of the transmitted light and transmits or blocks the transmitted light, and either the second instantaneous light control glass or the instantaneous light control filter. A second Fresnel lens for collimating the light transmitted through the second parallel light, and a macro inspection device. 3. The macro inspection apparatus according to claim 2, wherein the support member is a fixed support member that supports the object-to-be-inspected holding portion via a shaft joint, and an expandable and contractable member that supports the support member via a universal shaft joint. It comprises an expansion and contraction support member, and a base on which the fixed support member and the expansion and contraction support member are attached and which rotates in the horizontal direction, and the control means drives the expansion and contraction support member and the base to hold the inspection object. Depending on the posture of the part and the posture, either the first instantaneous light control glass or the instantaneous light control filter is made to transmit or block light, and the second instantaneous light control is made for transmission or block of the light. A macro inspection apparatus characterized in that either the optical glass or the instantaneous light control filter is configured to be controlled so as to block or transmit light. 4. The macro inspection apparatus according to claim 2, wherein the first lamp section and the second lamp section respectively project a projection light and a uniform projection light. A macroinspection device comprising a homogenizer, which is a projector device in which a filter that transmits yellow or green light is switchably arranged between the lamp and the homogenizer. 5. The macro inspection apparatus according to any one of claims 1, 2, 3 and 4, wherein a CCD camera is provided at the visual position. 6. The macro inspection apparatus according to claim 4, wherein a reflecting mirror for changing an optical axis is arranged between the projector device and the inspection object. apparatus.