JP2003329540A - Aspherical lens measuring device and measuring method - Google Patents

Abstract

(57) [Summary] (With correction) [Problem] To measure the center shake amount and the surface shake amount in the same state as when an aspheric lens is put in a lens frame. An aspherical lens to be inspected having a circular outer shape and a spherical surface on one side is rotated by a rotational suction means with a center of curvature of the spherical surface.
An outer diameter fluctuation detecting means S1 for detecting an outer diameter fluctuation amount of the outer peripheral surface in a state where the outer diameter fluctuation amount is zero, and a central portion of the aspheric surface of the aspherical lens when the outer diameter fluctuation amount is zero. First center-curvature-measurement-quantity light-transmitting means 1 for irradiating light toward
7, first light-receiving means for measuring the amount of deflection of the center of curvature capable of receiving the reflected light and recognizing the light-receiving position, and the center of the aspheric surface with respect to the rotation axis based on the light-receiving position of the reflected light. A curvature center vibration amount calculating means for calculating a curvature center vibration amount of the portion, and a surface for detecting the surface vibration amount of the peripheral portion by abutting on the peripheral portion of the aspheric surface in a state where the outer diameter vibration amount is zero. A measuring device for an aspherical lens, comprising a shake detecting means S2.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention provides a measuring device and a measuring device for measuring the amount of center deviation or the amount of surface deviation of a curvature of one surface or both surfaces of an aspherical lens in the same state as when an aspherical lens is put in a lens frame. Regarding the method.

[0002]

2. Description of the Related Art If the aspherical lens is placed in the same state as the lens frame and the center of curvature or the amount of surface deflection of one or both surfaces of this aspherical lens can be measured, the center of curvature can be measured. By investigating the lens performance of a large number of aspherical lenses that have measured the shake amount and surface shake amount, and by examining the correlation between the curvature center shake amount and the surface shake amount and the lens performance, it is possible to detect the aspherical lens in the lens frame. It is possible to know what kind of influence the curvature center shake amount and the surface shake amount have on the lens performance.

However, heretofore, there has been no apparatus and method for measuring the amount of deflection of the center of curvature and the amount of surface deflection of both surfaces of the aspherical lens in the same state as when the aspherical lens was put in the lens frame.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a measuring device capable of measuring the center-of-curvature deflection amount or the surface deflection amount of one surface or both surfaces of an aspherical lens in the same state as when the aspherical lens is put in a lens frame. The purpose is to provide a measuring method.

[0005]

SUMMARY OF THE INVENTION An aspherical lens measuring device of the present invention comprises a test aspherical lens having a circular outer shape and one spherical surface,
Suction rotation means for rotating the spherical surface in a suction state,
Outer diameter deviation detecting means for detecting the outer diameter deviation of the outer peripheral surface by contacting the outer peripheral surface of the aspherical lens in a state where the center of curvature of the spherical surface is located on the rotation axis of the rotary suction means. A first curvature center shake amount measuring light transmitting means for irradiating light toward the central portion of the aspherical surface of the aspherical lens in a state where the outer diameter shake amount is zero, and the first curvature center shake A first curvature center shake amount measuring light receiving means capable of recognizing a light receiving position for receiving the light emitted from the quantity measuring light transmitting means and reflected by the aspherical surface, and the first curvature center shake amount measuring means Based on the light receiving position of the reflected light by the light receiving means, a curvature center shake amount calculating means for calculating the curvature center shake amount of the central portion of the aspherical surface with respect to the rotation axis, and the outside diameter shake amount being zero, the above Contact the peripheral part of the aspherical surface to detect the surface runout amount of the peripheral part. It is characterized by comprising a vibration detecting means.

The contact portion of the suction rotation means with the spherical surface has a circular shape in a plan view and is orthogonal to the rotation axis in a side view, and the light is directed toward the spherical surface of the aspherical lens. And the light transmitted from the confirmation light-transmitting means and reflected by the spherical surface are received, and the center of curvature of the spherical surface is on the rotation axis of the suction rotation means from the light-receiving position. It is preferable to include a confirmation determination means for determining whether or not the determination is made.

Further, the aspherical lens to be tested, which has a circular outer shape and one of which is a spherical surface, is brought into contact with the outer peripheral surface of the aspherical lens by adsorbing and rotating means for rotating the aspherical surface of the aspherical lens under suction. Outer-diameter shake detection means for detecting the outer-diameter shake of the outer peripheral surface, and for measuring the first center-of-curvature shake amount that irradiates light toward the spherical surface of the aspherical lens when the outer-diameter shake amount is zero. A light transmitting means, and a first curvature center shake amount measuring light receiving means capable of recognizing a light receiving position for receiving the light emitted from the first curvature center shake amount measuring light transmitting means and reflected by the spherical surface. A second curvature center shake amount measuring light transmitting means for irradiating light toward the central portion of the aspherical surface in a state where the outer diameter shake amount is zero; and a second curvature center shake amount measuring light transmitter. The light receiving position, which receives the light emitted from the means and reflected by the aspherical surface, Based on the recognizable second curvature center shake amount measuring light receiving means and the light receiving position of the reflected light by the first and second curvature center shake amount measuring light receiving means, the above-mentioned relative to the rotation axis of the suction rotation means. A curvature center shake amount calculation means for calculating the curvature center shake amount of the central portion of the spherical surface and the aspherical surface can be provided.

Further, the aspherical lens to be inspected, which has a circular outer shape and has aspherical surfaces on both sides, is brought into contact with the outer peripheral surface of the aspherical lens, and an adsorbing and rotating means for rotating one aspherical surface in an adsorbed state. The outer diameter deviation detecting means for detecting the outer diameter deviation of the outer peripheral surface and the outer surface deviation of the other aspherical surface in contact with the peripheral portion of the other aspherical surface with the outer diameter deviation amount being zero. Surface deviation detecting means for detecting the amount, and a first curvature center deviation amount measuring transmission for irradiating light toward the central portion of the other aspherical surface of the aspherical lens in a state where the outer diameter deviation is zero. A light unit, and receives light emitted from the first curvature center shake amount measuring light transmitting unit and reflected by the other aspherical surface,
A first curvature center shake amount measuring light receiving means capable of recognizing a light receiving position, and a second curvature center for irradiating light toward a central portion of the one aspherical surface in a state where the outer diameter shake amount is zero. Shake amount measuring light transmitting means and second curvature center Second curvature center capable of recognizing a light receiving position for receiving light emitted from the shake amount measuring light transmitting means and reflected by the one aspherical surface Based on the light receiving means for measuring the shake amount, and the light receiving position of the reflected light by the first and second light receiving means for measuring the shake amount of the curvature center, the central portion of the one aspherical surface with respect to the rotation axis of the suction rotation means, A curvature center shake amount calculating means for calculating the curvature center shake amount of the center portion of the other aspherical surface can be provided.

Further, the aspherical lens measuring method of the present invention comprises a step of adsorbing and rotating the spherical surface of the aspherical lens to be inspected having a circular outer diameter and one surface of which is a spherical surface, A step of detecting an outer diameter deflection amount of the outer peripheral surface of the aspherical lens in a state where the center of curvature is located on the rotation axis of the rotary suction means, and the outer diameter deflection amount is zero; Irradiating the central part with light,
A step of causing the first curvature center shake amount measuring light receiving means capable of recognizing the light receiving position to receive the light reflected by the aspherical surface, and a light receiving position of the reflected light by the first curvature center shake amount measuring light receiving means. Based on the step of calculating the center of curvature deflection of the central portion of the aspherical surface with respect to the rotation axis,
And a step of detecting the amount of surface runout of the peripheral portion of the aspherical surface when the amount of runout of the outer diameter is zero.

The shape of the contact portion of the suction rotation means with the spherical surface is circular in plan view and orthogonal to the rotation axis in side view, and the center of curvature of the spherical surface is the rotation suction means. Irradiating the spherical surface of the aspherical lens with light after positioning it on the axis of rotation of the aspherical lens, and reflecting the light reflected by the spherical surface such that the center of curvature of the spherical surface is rotated by the suction rotation means. It is preferable to have a step of causing the confirmation discriminating means for discriminating whether or not it is on the axis to receive light.

Further, a step of rotating an aspherical lens under test having a circular outer shape and a spherical surface on one side by adsorbing the aspherical surface to an adsorbing and rotating means, and adjusting the outer diameter deviation of the outer peripheral surface of the aspherical lens. A step of detecting, a step of radiating light toward the spherical surface in a state where the outer diameter deflection amount is zero,
The step of causing the light reflected by the spherical surface to be received by the first curvature center shake amount measuring light receiving means capable of recognizing the light receiving position, and directing the light toward the center of the aspherical surface with the outer diameter shake amount being zero. Irradiating light, the step of causing the light reflected by the aspherical surface to be received by the second curvature center shake amount measurement light receiving means capable of recognizing the light receiving position, and the first and second curvature center shake amount measurements It is possible to have a step of calculating a center-of-curvature amount of curvature of the central portion of the spherical surface and the aspherical surface with respect to the rotation axis of the suction rotation means based on the light receiving position of the reflected light by the light receiving means.

Further, a step of rotating an aspherical lens to be tested, which has a circular outer diameter and whose both surfaces are aspherical surfaces, by adsorbing one of the aspherical surfaces to an adsorption rotating means, and rotating the outer peripheral surface of the aspherical lens. The step of detecting the radial runout amount, the step of detecting the surface runout amount of the peripheral portion of the other aspherical surface in the state in which the outer radial runout amount is zero, the aspherical surface in the state of the outer radial runout amount of zero Step of irradiating light toward the center of the other aspherical surface of the lens, and causing the light reflected by the other aspherical surface to be received by the first curvature center shake amount measuring light receiving means capable of recognizing the light receiving position. A step of irradiating light toward the central portion of the one aspherical surface in a state where the outer diameter deflection amount is zero, and a second position capable of recognizing a light receiving position of the light reflected by the one aspherical surface. Is received by the light receiving means for measuring And the aspherical center of the one aspherical surface with respect to the rotation axis of the suction rotation means, and the other aspherical surface based on the receiving position of the reflected light by the first and second curvature center shake amount light receiving means. It is possible to have a step of calculating the curvature center shake amount of the central part of the.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIG. This embodiment is
The curvature of the aspherical surface r2 of the aspherical surface lens L1 is set in the same state as when the aspherical surface lens L1 having one surface forming the spherical surface r1 and the other surface forming the aspherical surface r2 is put in a lens frame (not shown). The amount of center runout and the amount of runout are measured. Here, the curvature center shake amount of the central portion of the aspherical surface r2 of the aspherical lens L1 is determined by the center holes 3a, 5a, 7a of the fixed member 3, the first rotating member 5, the second rotating member 7, and the lens holder 11. 1
It is defined as the radial distance of the aspherical lens L1 between the central axis (rotational axis) A1 of 1a and the center of curvature Oo of the central portion of the aspherical surface r2.

First, the configuration of the measuring device for the aspherical lens L1 of this embodiment will be described. A mounting hole 1a is formed on the upper surface of the hollow box-shaped base 1A. Inside the base 1A, there is provided a fixing member 3 having a center hole 3a formed in a vertical direction and having a bottom closed by a glass plate G. A substantially cylindrical first rotating member 5 linked to a motor (not shown) is fitted on the fixed member 3 via a bearing so as to be rotatable about an axis in the vertical direction. The upper portion of the first rotating member 5 projects from the mounting hole 1a to above the base 1A, and the first rotating member 5 is provided with a central hole 5a that is concentric with and communicates with the central hole 3a. An annular second rotating member 7 is fixed to the upper surface of the first rotating member 5, and the second rotating member 7 is provided with a central hole 7a that is concentric with and communicates with the central hole 5a. The bottom surface of the second rotating member 7 is rotatably supported on the upper surface of an annular fixing member 9 fixed to the upper surface of the base 1A. On the upper surface of the second rotation member 7, a substantially cylindrical lens holder (adsorption rotation means) 11 that supports a slightly inner side of the peripheral surface of the spherical surface r1 of the aspherical lens L1 is fixed. The upper edge of the lens holder 11 has a circular shape in a plan view and is orthogonal to the central axis A1 in a side view. Further, inside the lens holder 11, a center hole 11a is formed which is concentric with and communicates with the center hole 7a.

The suction pipe 1 is provided on the inner bottom surface of the base 1A.
A vacuum device 15 that communicates with the center hole 3 a of the fixing member 3 via 3 is installed. The vacuum device 15 creates a vacuum in each of the central holes 3a, 5a, 7a, 11a,
The aspherical lens L1 which is a lens to be inspected mounted on the upper surface of the lens holder 11 is sucked onto the lens holder 11. Above the lens holder 11, the lens holder 1
1. The outer peripheral surface L1a of the aspherical lens L1 attracted to the upper surface of
A first contact type sensor (outer diameter shake detecting means) S1 and a second contact type sensor (surface shake detecting means), which are provided with swing-type contactors S1a and S2a that come into contact with the peripheral portion of the aspherical surface r2. S2 is provided. These contact sensors S
Reference numerals 1 and S2 are connected to a processor (curvature center shake amount calculating means) (not shown), and this processor is connected to a television monitor (not shown).

Above the lens holder 11, a first curvature center shake amount measuring light transmitting device (first curvature center shake amount measuring light transmitting means) 17 is disposed. The first curvature center shake amount measuring light transmitting device 17 includes a case 19 having a hole 19a formed in a lower surface thereof, and a light source 21 arranged inside the case 19.
A mirror M, a lens L4, a prism P1, a lens L5, a lens L6, and a first curvature center shake amount measuring sensor (first curvature center shake amount measuring light receiving means) 23. is there. The first curvature center shake amount measuring sensor 23 is connected to the processor.

Next, with the aspherical lens L1 placed in a lens frame (not shown), the center of curvature of the aspherical surface of the aspherical surface r2 of the aspherical lens L1 and the amount of surface runout of the peripheral portion thereof. The procedure for measuring is explained.

After the aspherical surface r1 of the aspherical lens L1 processed so that the aspherical surface r2 has an accurate aspherical shape is placed on the upper surface of the lens holder 11, the vacuum device 15 is actuated to operate the respective central holes 3a, The inside of 5a, 7a, and 11a is evacuated, and the spherical surface r1 of the aspherical lens L1 is attracted to the lens holder 11. Since the frictional resistance between the spherical surface r1 and the lens holder 11 is designed to be extremely small, the center of curvature Os of the spherical surface r1 is the center axis of each central hole 3a, 5a, 7a, 11a due to its own weight at this time. (Rotation axis) A
It automatically moves to the position above 1. Therefore, in this embodiment, the curvature center shake amount of the spherical surface r1 becomes zero.
In this state, the motor is operated to move the first rotating member 5 and the second rotating member 5.
The rotating member 7, the lens holder 11, and the aspherical lens L1 are
Rotate around the central axis A1.

At this time, if the center of the outer diameter of the aspherical lens L1 is not located on the central axis A1, the first contact sensor S
The first contactor S1a sways in the lateral direction, the processor calculates the swing amount, and the calculated swing amount is displayed on the television monitor. If the amount of swing displayed on the television monitor is zero, the aspherical lens L1 is held in that state. If the swing amount is not zero, the position and direction of the aspherical lens L1 with respect to the lens holder 11 are changed while watching the television monitor, and when the swing amount becomes zero, the aspherical lens L1 is held in that state. When the swing amount becomes zero in this way, the center of the outer diameter of the aspherical lens L1 is located on the central axis A1, and the aspherical lens L1 is in the same state as when it has entered the lens frame. The swing amount of the contactor S1a being zero means that the contactor S1a is not completely stationary but also the contactor S1a is slightly swinging within a predetermined allowable range. Yes (the same applies to the second to fourth embodiments).

When light is emitted from the light source 21 in this state, the light is reflected by the mirror M and the lens L4, the prism P1, the lens L5, the lens L6, and the hole 19 of the case 19 are reflected.
It irradiates the central part of the aspherical surface r2 through a. Aspherical surface r
The light radiated to the central portion of 2 is reflected by the aspherical surface r2, the direction is changed by the prism P1 through the lens L6 and the lens L5, and is guided to the first curvature center shake amount measuring sensor 23.

Light is the first sensor 2 for measuring the center-of-curvature shake.
The processor calculates the amount of deflection of the center of curvature Oo of the center of curvature of the aspherical surface r2 with respect to the center axis A1 in accordance with the position of the light receiving surface of the light receiving surface 3 and displays the result on the television monitor. If the light is received at the reference position of the light-receiving surface, the curvature center shake amount is displayed on the TV monitor, and if the light is received at a position other than the reference position, the curvature center shake amount is displayed as a numerical value. To be done.

Further, the center of curvature Oz of the peripheral portion of the aspherical surface r2
Is displaced from the central axis A1, the second contact sensor S2
The contactor S2a of FIG. 2 swings up and down, and the surface wobbling amount calculated by the processor based on this wobbling amount is displayed on the television monitor. In this way, under the same conditions as in the case where the lens is placed in the lens frame, the curvature center shake amount of the central portion of the aspherical surface and the surface shake amount of the peripheral portion of many aspherical lenses are measured, and the lenses of these aspherical lenses are measured. The performance is investigated using a master lens (not shown), and the correlation between the curvature center shake amount and the surface shake amount and the lens performance is investigated, and when the aspherical lens is put in the lens frame, the curvature center shake amount and the surface shake amount are measured. It is possible to know how the shake amount affects the lens performance.

The decenter amount of the aspherical lens may be calculated by the processor based on the amount of surface deflection of the peripheral portion of the aspherical surface, and the decentered amount may be displayed on the television monitor. In this case, it is possible to know how the curvature center shake amount and the decenter amount affect the lens performance. Here, the decenter amount means, as shown in FIG. 2, an intersection point Q of the central axis A1 and the aspherical surface r2 and a vertex P of the aspherical surface r2 (a straight line passing through all the centers of curvature at each position of the aspherical surface r2 and the aspherical surface r2). (Intersection point) with the radial distance of the aspherical lens L1.

The decenter amount D in this case is approximately obtained as follows. If the angle formed by the line connecting Q and Oo and the line connecting P and Oo is ε, then ε≈d / φ. In addition, d is the aspherical surface r2 measured by the contactor S2a.
Is the amount of surface runout of the peripheral portion of, and φ is a value obtained by doubling the distance from the outer diameter center of the aspherical lens L1 to the contact point of the aspherical surface r2 and the contactor S2a. Then, by multiplying the distance L from P to Oo by ε, the decenter amount D is approximately obtained. That is, D≈ε × L.

Next, a second embodiment of the present invention will be described with reference to FIG. The same members as those in the first embodiment are given the same reference numerals and detailed description thereof will be omitted.

First, the components of the measuring device for the aspherical lens L1 according to the present embodiment, which are not included in the first embodiment, will be described. In addition to the mounting hole 1a, a lighting hole 1b is formed on the upper surface of the base 1B. On the inner bottom surface of the base 1B, a pair of left and right total reflection prisms 25 and 27 located directly below the mounting hole 1a and the lighting hole 1b are installed.

A confirmation light transmitting device (confirmation light transmitting means) 29 is disposed above the light collecting hole 1b. The confirmation light transmitting device 29 includes a case 31 in which holes 31a and 31b are formed on the lower surface and the side surface, a light source 33 disposed inside the case 31, two prisms P2 and P3, and three sheets. Lens L
7, L8, L9 and confirmation sensor (confirmation determination means) 3
5 and. The confirmation sensor 35 is connected to the processor (confirmation determination means) and (curvature center shake amount calculation means).

Above the lens holder 11, there is provided a first light source for measuring the amount of curvature of curvature (light transmitting means for measuring the first amount of curvature of curvature) 37. This first curvature center shake amount measuring light transmitting device 37 has holes 39a on the side surface and the lower surface,
A case 39 having a hole 39b formed therein, a reflecting mirror M provided inside the case 39, a prism P4, three lenses L10, L11, and L12, and a first curvature center shake amount measuring sensor ( (Light receiving means for measuring first amount of deflection of center of curvature) 41
It consists of and. The first curvature center shake amount measuring sensor 41 is connected to the processor.

Next, with the aspherical lens L1 placed in a lens frame (not shown), the center of curvature of the aspherical surface of the aspherical surface r2 of the aspherical lens L1 and the amount of surface runout of the peripheral portion thereof. The procedure for measuring is explained.

First, the spherical surface r1 of the aspherical lens L1 is placed on the upper surface of the lens holder 11 to be adsorbed, and when the motor is operated, the light source 33 emits light. Part of the emitted light passes through the prism P2, the lens L7, the prism P3, the lens L8, and the lens L9 of the confirmation light transmitting device 29, is reflected by the total reflection prisms 27 and 25, and is irradiated on the spherical surface r1. . Then, the light reflected by the spherical surface r1 is guided inside the confirmation light transmitting device 29 by the total reflection prisms 25 and 27, transmitted through the lenses L9 and L8, and is changed in direction by the prism P3, and the confirmation sensor 35. Be led to. Then, the processor determines whether or not the light is received at the reference position of the confirmation sensor 35.

If the light is received at the reference position, the spherical surface r
The fact that the center of curvature Os of 1 is located on the central axis A1 is displayed on the television monitor, and if the light is received at a position other than the reference position, the center of curvature Os is not located on the central axis A1. Is displayed.

In this way, the center of curvature O on the central axis A1
If it is confirmed that s is located, that is, the amount of deflection of the center of curvature of the spherical surface r1 is zero, the amount of swing of the contactor S1a of the first contact sensor S1 is determined in the same manner as in the first embodiment. Is changed to zero so that the position and the inclination of the aspherical lens L1 with respect to the lens holder 11 are changed.
Make 1 the same as putting it in the lens frame.

A part of the light emitted from the light source 33 passes through the prism P2 and is guided to the inside of the first curvature center shake amount measuring light transmitting device 37 through the holes 31b and 39a.
The light is reflected by the mirror M, the lens L10, the prism P4, the lens L11, the lens L12, and the hole 3 of the case 39.
It irradiates the central part of the aspherical surface r2 through 9a. The light radiated to the central portion of the aspherical surface r2 is reflected by the aspherical surface r2, passes through the lenses L12 and L11, is redirected by the prism P4, and is guided to the first curvature center shake amount measuring sensor 41. .

The light is the first sensor 4 for measuring the center shake amount of curvature.
The processor calculates the amount of deflection of the center of curvature Oo of the center of curvature of the aspherical surface r2 with respect to the center axis A1 in accordance with the position of the light receiving surface of No. 1 on which light is received, and displays the result on the television monitor.

The contact S2 of the second contact type sensor S2
The surface wobbling amount calculated by the processor based on the wobbling amount of a is displayed on the television monitor.

As described above, according to this embodiment, like the first embodiment, the aspherical surface r2 with respect to the central axis A1 is set in the same state as that in which the aspherical lens L1 having a single-sided aspherical surface is put in the lens frame. It is possible to easily measure the amount of center-of-curvature deviation of the center of curvature and the amount of surface-side deviation of the peripheral part, and it is possible to confirm on the television monitor whether or not the center of curvature Os of the spherical surface r1 is located on the central axis A1.

As in the first embodiment, the decenter amount is obtained based on the surface wobbling amount, and the influence of the curvature center wobbling amount and the decentering amount on the lens performance is investigated. You can also

Next, a third embodiment of the present invention will be described with reference to FIG. The same members as those in the second embodiment are given the same reference numerals and detailed description thereof will be omitted. In this embodiment, the aspherical lens L2, one surface of which is a spherical surface r4, is placed in the same state as that in which the aspherical lens L2 is placed in the lens frame in the opposite direction to that of the first embodiment, and both surfaces r3 and r4 of the aspherical lens L2 are The amount of deflection of the center of curvature is measured. Here, the curvature center deflection amount of the spherical surface r4 is defined as the radial distance between the central axis A1 and the curvature center Oo of the spherical surface r4.

First, the components of the measuring device for the aspherical lens L2 of this embodiment, which are different from those of the second embodiment, will be described. Inside the second curvature center shake amount measurement light transmission device (second curvature center shake amount measurement light transmission means) 40 having substantially the same components as the confirmation light transmission device 29, the confirmation sensor 35 is provided. Instead, a second curvature center shake amount measuring sensor (second curvature center shake amount measuring light receiving means) 43 is provided, and the second curvature center shake amount measuring sensor 43.
Is connected to the processor (curvature center shake amount calculation means). Further, the second contact sensor S2 is not provided.

Next, the procedure for measuring the curvature center deflection of both surfaces r3 and r4 will be described. First, in the same manner as in the first embodiment, the position and inclination of the aspherical lens L2 with respect to the lens holder 11 are changed so that the swing amount of the contactor S1a of the first contact sensor S1 becomes zero, and the aspherical surface is changed. The same state as when the lens L2 is put in the lens frame is set.

Next, the aspherical surface r3 of the aspherical lens L2 is placed on the upper surface of the lens holder 11 to be adsorbed, and when the motor is operated, the light source 33 emits light. Part of the emitted light passes through the prism P2, the hole 31b, and the hole 39a,
Reflected by the mirror M, the lens L10 and the prism P
4, through the lens L11, the lens L12, and the hole 39b, the spherical surface r4 is irradiated. The light radiated to the spherical surface r4 is reflected by the spherical surface r4, passes through the lenses L12 and L11, has its direction changed by the prism P4, and is guided to the first curvature center shake amount measuring sensor 41. The processor calculates the curvature center shake amount of the curvature center Oo of the spherical surface r4 with respect to the center axis A1 in accordance with the position of the light receiving surface of the first curvature center shake amount measuring sensor 41,
The result is displayed on the TV monitor.

A part of the light emitted from the light source 33 passes through the prism P2, the lens L7, the prism P3, the lens L8, and the lens L9 of the second curvature center shake amount measuring light transmitting device 40, and is totally transmitted. The light is reflected by the reflection prisms 27 and 25 and is irradiated on the central portion of the aspherical surface r3. Then, the light reflected by the aspherical surface r3 is reflected by the total reflection prisms 25, 2
7 is guided to the inside of the second curvature center shake amount measurement amount light-transmitting device 40, passes through the lenses L9 and L8, and the prism P
The direction is changed by 3 and is guided to the second curvature center shake amount measuring sensor 43. The processor calculates the amount of center-of-curvature deflection of the center of curvature Os of the central portion of the aspherical surface r3 with respect to the central axis A1 according to the position of the light-receiving surface of the second sensor 43 for measuring the amount of center-of-curvature curvature measurement. Then, the result is displayed on the TV monitor.

As described above, according to this embodiment, the aspherical lens r2 is placed in the same state as the lens frame, and the aspherical surface r
It is possible to accurately measure the amount of deflection of the center of curvature of the central portion of 3 and the spherical surface r4.

Finally, a fourth embodiment of the present invention will be described with reference to FIG. The same members as those in the third embodiment are designated by the same reference numerals, and detailed description thereof will be omitted. In this embodiment, the curvature center shake amounts of both surfaces r5 and r6 of an aspherical lens L3 whose both surfaces are aspherical surfaces are measured.

The measuring apparatus of this embodiment is the measuring apparatus of the third embodiment with a second contact sensor S2 added, and the second contact sensor S2 is connected to the processor.

Next, both surfaces r5 and r6 of the aspherical lens L3.
The procedure for measuring the amount of center-of-curvature deflection and the amount of surface deflection of the peripheral portion of the aspherical surface r6 will be described. First, the first contact sensor S1 is used to bring the aspherical lens L3 into the same state as the lens frame.

A part of the light emitted from the light source 33 passes through the prism P2, is guided through the holes 31b and 39a to the inside of the first curvature center shake amount measuring light transmitting device 37, and is reflected by the mirror M. Is reflected by the lens L10, the prism P4,
The light is irradiated to the central portion of the aspherical surface r6 through the lens L11, the lens L12, and the hole 39a. The light reflected by the aspherical surface r6 is the lens L12, the lens L11, and the prism P4.
Through the first curvature center shake amount measurement sensor 41. The processor determines the curvature center shake amount of the curvature center Oo of the central portion of the aspherical surface r6 with respect to the center axis A1 according to the position on the light receiving surface of the first sensor 41 for measuring the curvature center shake amount. Calculate and display the result on the TV monitor.

Further, the contactor S of the second contact type sensor S2
The surface wobbling amount calculated by the processor based on the wobbling amount of 2a is displayed on the television monitor.

Further, similarly to the third embodiment, the light emitted from the second curvature center shake amount measuring light transmitting device 40 to the central portion of the aspherical surface r5 is reflected by the central portion of the aspherical surface r5. , And finally, the second curvature center shake amount measuring sensor 43
Be led to. The light is the second curvature center shake amount measurement sensor 4
The processor calculates the amount of deflection of the center of curvature Os of the central portion of the aspherical surface r5 with respect to the center axis A1 according to the position of the light receiving surface of the light receiving surface 3 and displays the result on the television monitor.

Thus, according to this embodiment, both sides r
Accurately measuring the amount of center wobbling of the center of curvature and the amount of wobbling of the peripheral part of both surfaces r5 and r6 in the same state as that in which the aspherical lens L3 having an aspherical surface is placed in the lens frame. You can

[0051]

According to the present invention, one surface of the aspherical lens is formed in the same state as when the aspherical lens is put in the lens frame.
Alternatively, it is possible to measure the curvature center shake amount and the surface shake amount of both surfaces.

[Brief description of drawings]

FIG. 1 is an overall view of a measuring device according to a first embodiment of the present invention.

FIG. 2 is a simplified explanatory diagram in a case of obtaining a decenter amount based on a surface wobbling amount.

FIG. 3 is an overall view of a measuring device according to a second embodiment of the present invention.

FIG. 4 is an overall view of a measuring device according to a third embodiment of the present invention.

FIG. 5 is an overall view of a measuring device according to a fourth embodiment of the present invention.

[Explanation of symbols]

1A 1B Base 1a Mounting hole 1b Lighting hole 3 Fixing member 3a Central hole 5 First rotating member 5a Central hole 7 Second rotating member 7a Central hole 9 Fixing member 11 Lens holder (suction rotating means) 11a Central hole 13 Suction pipe 15 Vacuum device 17 First curvature center shake amount measuring light transmitting device (first curvature center shake amount measuring light transmitting means) 19 Case 19a 19b Hole 21 Light source 23 First curvature center shake amount measuring sensor (first 25 27 Total reflection prism 29 Light transmitting device for confirmation (light transmitting device for confirmation) 31 Case 31a 31b Hole 33 Light source 35 Sensor for confirmation (discrimination device for confirmation) 37 First curvature Center shake amount measuring light transmitting device (first curvature center shake amount measuring light transmitting means) 39 Case 39a 39b Hole 40 Second curvature center shake amount measuring light transmitting device 41 First curvature Sensor for measuring the amount of eccentricity (first light receiving means for measuring the amount of deflection of the center of curvature) 43 Second sensor for measuring the amount of center deflection of the curvature (light receiving means for measuring the second amount of curvature of the center of curvature) A1 central axis (rotating axis) G glass plate L1 L2 L3 aspherical lens L1a L2a L3a outer peripheral surface L4 L5 L6 L7 L8 L9 L10 L11
L12 lens M reflecting mirror Oo Os Oz center of curvature P1 P2 P3 P4 prism r1 r4 spherical surface r2 r3 r5 r6 aspherical surface S1 first contact type sensor (outer diameter shake detecting means) S1a contactor S2 second contact type sensor (surface shake detection) Means) S2a contactor

Claims (8)

[Claims] 1. An adsorption rotating means for rotating an aspherical lens under test, which has a circular outer shape and one side of which is a spherical surface, in a state in which the spherical surface is adsorbed, and a center of curvature of the spherical surface on a rotation axis of the rotational adsorbing means. The outer diameter deflection detecting means for contacting the outer peripheral surface of the aspherical lens to detect the outer diameter deflection amount of the outer peripheral surface in a state where the outer diameter deflection amount is zero. First curvature center shake amount measuring light transmitting means for irradiating light toward the center of the aspherical surface of the spherical lens, and light emitted from the first curvature center shake amount measuring light transmitting means and reflected by the aspherical surface. The first rotation center shake amount measuring light receiving means for receiving the reflected light and recognizing the light receiving position, and the rotation position based on the light receiving position of the reflected light by the first curvature center shake amount measuring light receiving means. Calculate the amount of deflection of the center of curvature of the center of the aspherical surface with respect to the axis A curvature center shake amount calculating means, and a surface shake detecting means for contacting the peripheral part of the aspherical surface and detecting the surface shake amount of the peripheral part in a state where the outside diameter shake amount is zero. A measuring device for an aspherical lens. 2. The aspherical lens measuring device according to claim 1, wherein a shape of a contact portion of the suction rotation means with the spherical surface is circular in a plan view and orthogonal to the rotation axis in a side view. Furthermore, the confirmation light-transmitting means for irradiating the light toward the spherical surface of the aspherical lens, the light emitted from the confirmation light-transmitting means and reflected by the spherical surface, and receiving from the light-receiving position An aspherical lens measuring device comprising: a confirmation determining unit that determines whether the center of curvature of the spherical surface is on the rotation axis of the suction rotation unit. 3. A suction rotation means for rotating an aspherical lens under test, the outer shape of which is circular and one side of which is spherical, in a state in which the aspherical surface is suctioned, and abutting the outer peripheral surface of the aspherical lens, Outer diameter deviation detecting means for detecting the outer diameter deviation of the outer peripheral surface, and for measuring the first curvature center deviation amount for irradiating light toward the spherical surface of the aspherical lens when the outer diameter deviation amount is zero. A light transmitting means, and a first curvature center shake amount measuring light receiving means capable of recognizing a light receiving position for receiving light emitted from the first curvature center shake amount measuring light transmitting means and reflected by the spherical surface. A second curvature center shake amount measuring light transmitting means for irradiating light toward a central portion of the aspherical surface in a state where the outer diameter shake amount is zero; and a second curvature center shake amount measuring light transmitter. Receiving the light emitted from the means and reflected by the aspherical surface, recognizing the light receiving position Based on the possible second curvature center shake amount measuring light receiving means and the light receiving position of the reflected light by the first and second curvature center shake amount measuring light receiving means, the spherical surface with respect to the rotation axis of the suction rotation means. And a curvature center shake amount calculating means for calculating the curvature center shake amount of the central portion of the aspherical surface, and an aspherical lens measuring device. 4. A suction rotation means for rotating an aspherical lens under test, the outer shape of which is circular and both surfaces of which are aspherical surfaces, in a state where one of the aspherical surfaces is attracted, and abutting against the outer peripheral surface of the aspherical lens. And an outer diameter deviation detecting means for detecting an outer diameter deviation of the outer peripheral surface, and a surface deviation of the peripheral portion contacting the peripheral portion of the other aspherical surface with the outer diameter deviation amount being zero. Surface deviation detecting means for detecting the amount of deviation, and a first curvature center deviation amount measuring transmitter for irradiating light toward the central portion of the other aspherical surface of the aspherical lens in a state where the outer diameter deviation is zero. A light means and a first curvature center shake amount measuring light receiving device capable of recognizing a light receiving position for receiving the light emitted from the first curvature center shake amount measuring light transmitting device and reflected by the other aspherical surface. Means, and with the outer diameter runout being zero, face the center of the one aspherical surface. Second curvature center shake amount measuring light transmitting means for irradiating light, and light receiving position for receiving the light emitted from the second curvature center shake amount measuring light transmitting means and reflected by the one aspherical surface With respect to the rotation axis of the suction rotation means based on the second curvature center shake amount measuring light receiving means capable of recognizing the above and the light receiving position of the reflected light by the first and second curvature center shake amount measuring light receiving means. A curvature center shake amount calculating means for calculating the curvature center shake amount of the center part of the one aspherical surface and the center part of the other aspherical surface, and a measuring device for an aspherical lens. 5. A step of adsorbing and rotating the spherical surface of an aspherical lens to be inspected, which has a circular outer diameter and one surface of which is a spherical surface, by adsorbing and rotating the spherical surface of the spherical surface on the rotation axis of the rotary adsorbing means. Detecting the amount of outer diameter deflection of the outer peripheral surface of the aspherical lens in a state of being positioned at, the step of irradiating the central portion of the aspherical surface with light with the amount of outer diameter deflection being zero, the aspherical surface Receiving the light reflected by the first curvature center shake amount measuring light receiving means capable of recognizing the light receiving position, based on the light receiving position of the reflected light by the first curvature center shake amount measuring light receiving means. A step of calculating a curvature center shake amount of a central portion of the aspherical surface with respect to the rotation axis, and a step of detecting a surface shake amount of a peripheral portion of the aspherical surface in a state where the outer diameter shake amount is zero. Characterized by Method of measuring the spherical lens. 6. The method for measuring an aspherical lens according to claim 5, wherein a shape of a contact portion of the suction rotation means with the spherical surface is circular in a plan view and orthogonal to the rotation axis in a side view. Further, after arranging the center of curvature of the spherical surface on the rotation axis of the rotary suction means, irradiating the spherical surface of the aspherical lens with light, and the light reflected by the spherical surface at a light receiving position. A method for measuring an aspherical lens, which has a step of causing a confirmation discriminating means for discriminating whether or not the center of curvature of the spherical surface is on the rotation axis of the suction rotation means based on the above. 7. A step of rotating an aspherical lens under test, which has a circular outer shape and one side of which is a spherical surface, by adsorbing the aspherical surface to an adsorbing and rotating means, and adjusting the outer diameter deviation of the outer peripheral surface of the aspherical lens. A step of detecting, a step of irradiating light to the spherical surface in a state where the outer diameter shake amount is zero, a first curvature center shake amount measurement for recognizing a light receiving position of the light reflected by the spherical surface. A step of causing the light receiving means to receive the light; a step of irradiating light toward the central portion of the aspherical surface with the outer diameter deflection amount being zero; and a second step of recognizing the light receiving position of the light reflected by the aspherical surface. Based on the step of causing the light receiving means for curvature center shake amount measurement to receive light, and the light receiving position of the reflected light by the first and second light receiving means for curvature center shake amount measurement, the spherical surface with respect to the rotation axis of the suction rotation means is set. Non Method of measuring the aspheric lens characterized by having a step of calculating a center of curvature deflection of the central portion of the surface. 8. A step of rotating an aspherical lens to be inspected, which has a circular outer diameter and whose both surfaces are aspherical surfaces, by adsorbing one aspherical surface to an adsorbing and rotating means, and rotating the aspherical lens outer peripheral surface. A step of detecting a radial runout amount, a step of detecting a surface runout amount of a peripheral portion of the other aspherical surface in a state where the outer radial runout amount is zero, the aspherical surface surface in a state where the outer radial runout amount is zero Step of irradiating light toward the central portion of the other aspherical surface of the lens, and causing the light reflected by the other aspherical surface to be received by the first curvature center shake amount measuring light receiving means capable of recognizing the light receiving position. A step of irradiating light toward a central portion of the one aspherical surface in a state where the outer diameter deflection amount is zero, and a second position capable of recognizing a light receiving position of the light reflected by the one aspherical surface. Is received by the light receiving means for measuring Step of, and on the basis of the light receiving position of the reflected light by the first and second center of curvature deflection amount measurement light receiving means,
A method for measuring an aspherical lens, comprising a step of calculating a curvature center shake amount of a central portion of the one aspherical surface and a central portion of the other aspherical surface with respect to a rotation axis of the suction rotation means.