JP2003315015A - Measuring microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring microscope with simple operable stage and capable of improving working efficiency at the time of re-measurement. <P>SOLUTION: The height of each point to be measured on an object is detected while positioning the point, the Z-coordinate corresponding to the detected height of the point is obtained from an X,Y,Z-counter 6 together with the X,Y,Z- coordinate, and a 3-D image is constructed by using the X,Y,Z-coordinates and displayed on a monitor 13. The direction of re-measuring region of the object 7 to be measured is displayed on the viewing image by specifying a region of re-measure desired to be re-measured on the 3-D graphic image. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring microscope suitable for height measurement, particularly height measurement of minute dimensions.

[0002]

2. Description of the Related Art Conventionally, measuring microscopes have been known as being suitable for measuring the height of the surface of an object to be measured having a particularly small size such as a plastic molded product, a mold, a lead frame, and a ball grit array (BGA). .

Among these, in a manually operated measurement microscope for manually measuring the height of an object to be measured, first, the object to be measured is placed on a table, and the table is manually moved to measure the measuring point of the object to be measured. Is positioned on the optical axis of the observation optical system of the microscope. Then, the portion to be measured of the object to be measured is magnified at a necessary magnification, this observation image is displayed on the monitor, and height measurement is performed using the height measurement sensor. Then, when the height measurement is completed, the table is manually moved again to position the next measurement position, the height measurement is performed in the same manner, and the same operation is repeated manually thereafter to measure the object on the object to be measured. The height of each place is measured.

[0004]

However, when the shape of the object to be measured is measured from the height data of various parts of the object to be measured measured by such a manually operated measuring microscope, the data is insufficient. Accurate shape measurement may not be possible, and in such a case, height measurement may be restarted again.

However, when the magnification of the observed image of the object to be measured is high, it is sufficient to move the stage in either direction and with respect to the place to be re-measured, only by looking at the screen of the observed image displayed on the monitor. I can't figure out easily.

Therefore, the observer must move the stage while visually checking both the object to be measured on the stage and the observation image on the monitor, which is a very troublesome task. Occurs.

Further, in order to avoid such troublesome work, even if it is sufficient to partially re-measure, it is often necessary to re-measure all from the beginning, which further reduces the efficiency of the measurement work. There was also.

On the other hand, if there is little reflection on the surface of the object to be measured, or if the surface has a large inclination, it may not be possible to measure the height accurately in some areas. This is also the case when the user wants to restart, and there are problems that he is forced to perform troublesome work and that work efficiency is lowered due to re-measurement.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a measuring microscope capable of simplifying the stage operation and improving the work efficiency during remeasurement.

[0010]

The invention according to claim 1 is
A movable stage on which an object to be measured is placed, a display unit for displaying an observation image of the object to be measured, and a height of a measurement point of the object to be measured which is positioned at a predetermined measurement position by movement of the stage. And a control means for displaying on the display means the height measurement results of the measurement points of the measured object measured by the height measurement means. When a remeasurement area on the object to be measured is designated on the height measurement result displayed on the display means, at least the remeasurement area on the observed image of the object to be measured on the display means. It is characterized in that the direction is displayed and the moving direction of the stage can be designated.

According to a second aspect of the present invention, in the first aspect of the invention, the control means three-dimensionally displays the height measurement results of the measurement points of the object measured by the height measurement means. It is characterized in that it is displayed on the display means as a graphic image.

According to a third aspect of the present invention, in the first aspect of the invention, the control means can display the direction of the remeasurement area on the observed image of the measured object by the display means by an arrow. It is characterized by that.

As a result, according to the present invention, by designating the remeasurement area on the object to be measured on the height measurement result displayed on the display means, the remeasurement area is displayed on the observed image of the object to be measured. The position and direction of will be displayed, and by simply moving the stage according to this display, the re-measurement area of the DUT can be easily moved to the specified measurement position. Therefore, the work efficiency of remeasurement can be improved.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 shows a schematic structure of a measuring microscope according to a first embodiment of the present invention. In the figure, 1 is a measuring microscope main body, and this measuring microscope main body 1 is composed of a stage section 2 and an observation section 3.

The stage unit 2 comprises an XY stage which moves in the X and Y directions. The stage unit 2 includes an X-direction moving handle 4 and a Y-direction moving handle 5.
Is provided. The operator can move the stage unit 2 in the X and Y directions by operating the X-direction moving handle 4 and the Y-direction moving handle 5.

The stage section 2 can also be moved up and down in the Z direction, that is, along the optical axis direction of the observation section 3 by a focusing mechanism (not shown).

An XYZ counter 6 is connected to the stage section 2. The XYZ counter 6 includes a stage unit 2
X, Y, and Z movement amounts are counted, and XY
The Z coordinate is detected.

An object 7 to be measured is placed on the upper surface of the stage portion 2. Illumination light (not shown) illuminates the DUT 7 from above or below.

An observation section 3 is arranged so as to face the upper surface of the stage section 2. The observing section 3 includes an objective lens 8 and a CCD.
A camera 9 and a height measuring sensor 10 are provided so that reflected light (or transmitted light) from the DUT 7 irradiated with illumination light is imaged on the image pickup surface of the CCD camera 9 via the objective lens 8. It has become. The CCD camera 9 images the light imaged on the imaging surface and outputs the imaged image as an observation image of the DUT 7. Also, the height measuring sensor 1
0 is used to measure the height of a predetermined measurement point of the DUT 7. For example, the light from the DUT 7 irradiated with the illumination light is detected, and the measurement point is focused. It is composed of a photodetector that generates the maximum output by the light from the DUT 7 when it matches.

On the other hand, 11 is a control section which is a control means, and the control section 11 is provided with a computer 12. The computer 12 has a monitor 1 as display means.
3, a keyboard 14, a mouse 15 and a foot switch 16 are connected, an XYZ counter 6 and a CCD
The camera 9 and the height measuring sensor 10 are connected.

The monitor 13 displays an operation menu and an observation image of the object 7 imaged by the CCD camera 9 according to an instruction from the computer 12, and also displays a three-dimensional graphic image constructed from XYZ coordinates described later. It has become. The mouse 15 is used for selecting an operation menu displayed on the monitor 13 and selecting a measurement point of the DUT 7. The foot switch 16 is turned on / off by a foot operation, and is used to determine the measurement point of the DUT 7.

The computer 12 gives a control command to the XYZ counter 6, the CCD camera 9 and the height measuring sensor 10, and also on the optical axis (measurement position) of the observing section 3.
In addition, it has a height measuring function for measuring the height of the object to be measured 7 in which the measuring point is positioned. In this case, the computer 12 causes the object 7 to be measured on the optical axis (measurement position) of the observation unit 3.
When the object to be measured 7 is moved in the Z-axis direction together with the stage portion 2 in a state in which the measurement point is positioned, the output of the height measurement sensor 10 that changes with this movement is taken in,
The Z position of the stage portion 2 when this output becomes maximum is obtained, and the height of the measurement point of the object 7 to be measured is obtained from the Z coordinate of the stage portion 2 corresponding to this Z position.

Next, the operation of the measuring microscope thus constructed will be described.

First, when the object to be measured 7 is placed on the stage unit 2 and illumination light is emitted from an illumination unit (not shown), the light from the object to be measured 7 passes through the objective lens 8 and the CCD camera 9
The observation image of the DUT 7 imaged by the CCD camera 9 is formed on the image pickup surface of the monitor 13 of the computer 12.
(Fig. 2).

The observer operates the X-direction moving handle 4 and the Y-direction moving handle 5 while looking at the observation image on the monitor 13 to move the stage portion 2 in the XY directions to make the object 7 to be measured desired. The measurement point is located on the optical axis (measurement position) of the observation section 3. Then, in this state, the foot switch 16 is turned on by operating the foot, or the confirmation button (not shown) on the monitor 13 is clicked by the mouse 15 to determine the measurement point.

Next, when the object 7 to be measured is moved in the Z-axis direction together with the stage portion 2, the computer 12 maximizes the output of the height measuring sensor 10 for detecting the light from the measurement point of the object 7 to be measured. Find the Z position of the stage unit 2
The height of the measurement point of the DUT 7 is detected from the output of the Z coordinate of the XYZ counter 6 corresponding to the position. Then, the Z coordinate corresponding to this height is temporarily stored in a memory (not shown) together with the XY coordinate of the XYZ counter 6.

In the same manner, the respective heights are detected while positioning the respective measurement points on the object to be measured 7 in the same manner, and the Z coordinate corresponding to these detected heights is determined as X.
It is stored in a memory (not shown) together with the XY coordinates of the YZ counter 6.

After that, the computer 12 constructs a three-dimensional graphic image A from these stored XYZ coordinates and displays it on the monitor 13 as shown in FIG. 3, for example.

The observer confirms the surface shape of the DUT 7 from the three-dimensional graphic image A on the monitor 13 as a measurement result.

Here, in the case where the surface shape of the object to be measured 7 is to be measured at a finer pitch,
The remeasurement area 17 to be remeasured is designated on the three-dimensional graphic image A shown in FIG. In this case, click the re-measurement button (not shown) on the monitor 13 with the mouse 15,
Remeasurement area 17 on mouse 3D graphic image A
Use 5 to set. Remeasurement area 1 set at this time
The XYZ coordinates of 7 are read and stored in a memory (not shown).

In this state, the monitor 13 is switched to the display screen of the observed image of the DUT 7 shown in FIG. Then, the XYZ coordinates of the remeasurement area 17 stored in the memory are read out by the computer 12, and as shown in FIG.
The direction of the remeasurement area 17 is displayed by the arrow 18 on the observation image of.

The observer operates the X-direction moving handle 4 and the Y-direction moving handle 5 according to the direction of the arrow 18 to move the re-measurement area 17 of the DUT 7 on the optical axis of the observation section 3 (measurement). Position). When this movement is completed, the display of the arrow 18 disappears.

It should be noted that the distance can be expressed together with the location direction of the remeasurement area 17. In this case, for example, the arrow 18 is made to blink, and when the remeasurement area 17 is far from the measurement position, the blinking interval is made longer, and when it approaches, the blinking interval is made shorter, and when it reaches the measurement position, it is turned off. You can do it like this. Further, it is possible to change the color instead of the blinking. Furthermore, the distance can be displayed by the length and size of the arrow, and the actual distance can also be displayed.

After moving the remeasurement area 17 of the object to be measured 7 to the optical axis (measurement position) of the observing section 3, the observer observes the observation image on the monitor 13 while looking at the X-axis in the same manner as described above. The directional movement handle 4 and the Y-direction movement handle 5 are operated to move the stage unit 2 in the XY directions to position the measurement point of the re-measurement region 17 at the measurement position and detect the height of each. The Z coordinate corresponding to the detected height is stored in a memory (not shown) together with the XY coordinate of the XYZ counter 6. Thereby, the XYZ coordinate data in the remeasurement area 17 of the three-dimensional graphic image A shown in FIG. 3 is rewritten as the data after the remeasurement.

In this case, it is also effective to change the color of the re-measurement area 17 so that it can be distinguished from others so that it can be visually distinguished.

Therefore, in this way, the respective heights are detected while positioning the respective measurement points on the object to be measured 7, and the Z coordinate corresponding to these detected heights is calculated as X.
The three-dimensional graphic image is acquired from these XYZ coordinates while being acquired together with the Y coordinate, and the remeasurement area 17 to be remeasured is specified on this three-dimensional graphic image, so that the observation image of the DUT 7 is re-measured. Since the direction of the measurement area 17 is indicated by the arrow 18, it is possible to easily move the re-measurement area 17 of the DUT 7 to a predetermined measurement position only by moving the stage unit 2 according to the arrow 18. This makes it possible to easily operate the stage and dramatically improve the work efficiency during remeasurement.

In the above-described embodiment, the remeasurement area 17 is designated on the three-dimensional graphic image A when there is a place on the object 7 to be remeasured.
Part of the surface of the object to be measured has little reflection, or the surface has a large inclination, so it is not possible to measure the height partially accurately,
Even if you want to re-measure these parts, if you specify those parts that could not be measured accurately on the three-dimensional graphic image as the re-measurement area, the direction of the re-measurement area is indicated by the arrow. By operating the stage unit 2 in accordance with the above, remeasurement in the remeasurement region can be efficiently performed.

(Second Embodiment) Next, the second embodiment of the present invention will be described.
An embodiment will be described.

FIG. 5 shows a schematic structure of a measuring microscope according to the second embodiment of the present invention. The same parts as those in FIG. 1 are designated by the same reference numerals.

In this case, the stage unit 2 is composed of an XY stage which moves in the X and Y directions. The stage portion 2 is provided with an X-direction moving motor 21 and a Y-direction moving motor 22.

A joystick 23 is connected to the stage section 2. The joystick 23 has a motor 21 for moving in the X direction according to its tilt direction and tilt angle.
Also, the selection of the Y-direction moving motor 22 and the rotation direction are determined, and the stage portion 2 can be automatically moved in the XY directions by operating the joystick 23.

Instead of the joystick 23, it is possible to use a mouse 15 to click a button (not shown) on the monitor 13, input predetermined data from the keyboard 14, or use a rotary encoder.

Others are the same as those described with reference to FIG. 1, and description thereof will be omitted here.

Even with such a configuration, the observer can see C
While observing the observation image of the object to be measured 7 captured by the CD camera 9 on the monitor 13, the joystick 23 is operated to move the stage portion 2 in the XY directions to observe a desired measurement position of the object to be measured 7. It is located on the optical axis (measurement position) of the section 3. Then, the foot switch 16 is turned on by a foot operation, or a confirmation button (not shown) on the monitor 13 is clicked by the mouse 15 to determine the measurement location.

In this state, the object 7 to be measured is moved along with the stage portion 2 in the Z-axis direction to obtain the Z coordinate corresponding to the height of the measurement point of the object 7 to be stored in a memory (not shown) together with the XY coordinates. Store temporarily. Such an operation is repeated for each measurement location on the DUT 7.

Then, the computer 12 constructs a three-dimensional graphic image A from these stored XYZ coordinates and displays it on the monitor 13 (FIG. 3). Then, when the remeasurement area 17 to be remeasured is designated on the three-dimensional graphic image A, the remeasurement area 17 is stored. Further, when the monitor 13 is switched to the display screen of the observation image of the object to be measured 7, the XYZ coordinates of the remeasurement area 17 stored in the memory are read out, and as shown in FIG. The direction of the remeasurement area 17 is indicated by the arrow 18.

The observer operates the joystick 23 according to the direction of the arrow 18 to move the stage unit 2 in the XY direction.
In the direction, the remeasurement area 17 of the DUT 7 is positioned on the optical axis (measurement position) of the observation section 3. After moving the re-measurement area 17 to the optical axis (measurement position) of the observation section 3, the observer operates the joystick 23 while watching the observation image on the monitor 13 in the same manner as described above. The part 2 is moved in the XY directions to move the measurement points of the re-measurement area 17 to the measurement positions to detect the respective heights, and the Z coordinates corresponding to these detected heights are set to XY.
The coordinates are stored in a memory (not shown). Thereby, the XYZ coordinate data in the remeasurement area 17 of the three-dimensional graphic image A shown in FIG. 3 is rewritten as the data after the remeasurement.

Therefore, even in this case, the same effect as that described in the first embodiment can be obtained, and the stage portion 2 can be automatically moved in the XY directions by the operation of the joystick 23. The operation can be further simplified, and the work efficiency at the time of remeasurement can be further improved.

In addition, the present invention is not limited to the above-described embodiment, and can be variously modified at the stage of carrying out the invention without departing from the spirit of the invention.

Furthermore, the above-described embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the section of the problem to be solved by the invention can be solved, and it is described in the section of the effect of the invention. In the case where the effect described above is obtained, a configuration in which this constituent element is deleted can be extracted as an invention.

[0052]

As described above, according to the present invention, it is possible to provide a measuring microscope in which the operation of the stage can be simplified and the work efficiency at the time of re-measurement can be improved.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.

FIG. 2 is a diagram showing a display example of a monitor used in the first embodiment.

FIG. 3 is a diagram showing another display example of the monitor used in the first embodiment.

FIG. 4 is a diagram showing another display example of the monitor used in the first embodiment.

FIG. 5 is a diagram showing a schematic configuration of a second embodiment of the present invention.

[Explanation of symbols]

1. Measuring microscope body 2 ... Stage 3 ... Observation section 4 ... X direction moving handle 5 ... Y direction moving handle 6 ... XYZ counter 7 ... DUT 8 ... Objective lens 9 ... CCD camera 10 ... Measuring sensor 11 ... Control unit 12 ... Computer 13 ... Monitor 14 ... Keyboard 15 ... Mouse 16 ... Foot switch 17 ... Remeasurement area 18 ... Arrow 21 ... X-direction movement motor 22 ... Y direction movement motor 23 ... Joystick

Claims (3)

[Claims] 1. A movable stage on which an object to be measured is placed, display means for displaying an observation image of the object to be measured, and the object to be measured positioned at a predetermined measurement position by the movement of the stage. Height measuring means for measuring the height of the measurement point, and a control means for displaying on the display means the height measurement result of each measurement point of the measured object measured by the height measuring means. However, the control means, when a remeasurement area on the measured object is designated on the height measurement result displayed on the display means, the control means displays the observed image of the measured object on the display means. A measuring microscope, wherein at least a direction of a remeasurement area is displayed so that a moving direction of the stage can be indicated. 2. The control means causes the display means to display a height measurement result of each of the measurement points of the object measured by the height measurement means as a three-dimensional graphic image. The measuring microscope according to claim 1. 3. The measuring microscope according to claim 1, wherein the control means can display the direction of the remeasurement region on an observed image of the measured object of the display means by an arrow.