JP2003233476A - Drawing pattern data generation method, drawing pattern data generation device, functional droplet discharge device provided with the same, method of manufacturing liquid crystal display device, method of manufacturing organic EL device, method of manufacturing electron emission device, method of manufacturing PDP device, electricity Electrophoretic display device manufacturing method, color filter manufacturing method, organic EL manufacturing method, spacer forming method, metal wiring forming method, lens forming method, resist forming method, and light diffuser forming method - Google Patents

Abstract

Abstract: PROBLEM TO BE SOLVED: To provide a drawing pattern data generating method for generating drawing pattern data capable of drawing a dot pattern having no fixed arrangement, a drawing pattern data generating device, a functional droplet discharge device including the same, and a liquid crystal display. Device manufacturing method, organic EL device manufacturing method, electron emission device manufacturing method, PDP
Provided are a device manufacturing method, an electrophoretic display device manufacturing method, a color filter manufacturing method, an organic EL manufacturing method, a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method, and a light diffuser forming method. . A function is provided by securing an array area of drawing pattern data based on image data, writing pattern image information in the array area, generating pattern data, and outputting the pattern data in binary. This is to generate drawing pattern data 80 for selectively discharging functional liquid droplets from the liquid droplet discharging head 7 onto a work to perform drawing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drawing pattern data generating method, a drawing pattern data generating device and a drawing pattern data generating apparatus for selectively discharging functional liquid droplets from a functional liquid droplet ejection head onto a work based on image data to perform drawing. Functional droplet discharge device having the same, manufacturing method of liquid crystal display device, manufacturing method of organic EL device, manufacturing method of electron-emitting device, manufacturing method of PDP device, manufacturing method of electrophoretic display device, manufacturing method of color filter The present invention relates to an organic EL manufacturing method, a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method, and a light diffuser forming method.

[0002]

2. Description of the Related Art Conventionally, a functional liquid droplet ejection head (printing head) based on image data in an inkjet printer or the like.
A functional liquid droplet ejecting device for performing drawing (printing) by selectively ejecting functional liquid droplets (ink) from a workpiece to a work is based on a dot pattern having a regular fixed arrangement such as a mosaic arrangement, a stripe arrangement, or a delta arrangement. I was drawing. Therefore, the drawing pattern data for driving the functional liquid droplet ejection head is directly generated in the final format (binary format receivable by the head driving device) by a program having an algorithm for generating a fixed array. It was

[0003]

However, in the method of generating drawing pattern data by such a program, it is not possible to draw a dot pattern having no fixed array.

According to the present invention, there are provided a drawing pattern data generating method for generating drawing pattern data capable of drawing a dot pattern having no fixed arrangement, a drawing pattern data generating device, and a functional liquid droplet ejecting device and a liquid crystal display device having the same. Manufacturing method, organic EL device manufacturing method, electron emission device manufacturing method, PDP device manufacturing method, electrophoretic display device manufacturing method, color filter manufacturing method, organic EL manufacturing method, spacer forming method, metal wiring forming It is an object to provide a method, a lens forming method, a resist forming method, and a light diffuser forming method.

[0005]

The drawing pattern data generating method of the present invention provides drawing pattern data for selectively discharging and drawing functional liquid droplets from a functional liquid droplet ejection head onto a workpiece based on image data. A method for generating drawing pattern data, wherein pattern data is generated by securing an array area of drawing pattern data based on image data and writing the drawing image information generated based on the image data in the array area. Then, the drawing pattern data is generated by outputting the pattern data in binary.

The drawing pattern data generator of the present invention is
A drawing pattern data generation device that generates drawing pattern data for selectively discharging functional liquid droplets from a functional liquid droplet ejection head onto a work based on image data, and drawing pattern data based on the image data. An array area securing means for securing an array area of data, a pattern data generating means for generating pattern data by writing drawing image information generated based on image data in the array area, and a binary output of the pattern data. And a drawing pattern data generating means for generating the drawing pattern data.

According to this structure, the array area is secured based on the image data, the drawing image information is written in the array area, the pattern data is generated, and the pattern data is binary-outputted. It is possible to generate binary drawing pattern data for selectively discharging the functional liquid droplets from the discharge head onto the work for drawing. That is, since a program having an algorithm for generating a fixed array does not directly generate final format (binary format) data, it is possible to draw any dot pattern regardless of whether or not it has a fixed array. it can.

In the above, when the functional liquid droplet ejection head has an inclination of a predetermined angle with respect to the printing direction, the pattern data is subjected to a rotational shift process corresponding to the predetermined angle to obtain the shift pattern data. It is preferable that the drawing pattern data is generated by generating and binary-outputting the shift pattern data.

In the above, when the functional liquid droplet ejection head has an inclination of a predetermined angle with respect to the printing direction, the pattern data is subjected to a rotational shift process corresponding to the predetermined angle to obtain the shift pattern data. It is preferable that the image forming apparatus further comprises a shift pattern generating unit for generating, and the drawing pattern data generating unit generates the drawing pattern data by outputting the shift pattern data in binary.

According to this structure, the pattern data is subjected to the rotational shift process corresponding to the inclination of the predetermined angle with respect to the printing direction of the functional liquid droplet ejection head to generate the shift pattern data, which is output in binary. By doing so, the drawing pattern data is generated, so that the drawn image does not tilt due to the tilt of the functional liquid droplet ejection head. That is, it is possible to generate drawing pattern data that can obtain a drawing result close to the original image data.

In this case, the functional liquid droplet ejection head has a plurality of nozzles, and the pattern data is subjected to rotational shift processing for each array corresponding to the plurality of nozzles to obtain shift pattern data for each array. It is preferable that the drawing pattern data is generated by generating and shifting the shift pattern data for each array in binary.

In this case, the functional liquid droplet ejection head has a plurality of nozzles, and the shift pattern data generating means is
Rotation shift processing is performed on the pattern data for each array corresponding to a plurality of nozzles to generate shift pattern data for each array, and the drawing pattern data generation means binary-outputs the shift pattern data for each array. Therefore, it is preferable to generate the drawing pattern data.

According to this structure, the pattern data is subjected to the rotational shift processing for each array corresponding to the plurality of nozzles arrayed in the functional liquid droplet ejection head to generate shift pattern data for each array, Since the drawing pattern data is generated by binary-outputting this, the rotation shift processing (arithmetic processing) can be easily performed without complication.

In the above, when the drawing image information has color information, it is preferable that the color information is written in the pattern data, and the drawing pattern data is binary-output for each color based on the color information.

In the above, when the drawing image information has color information, the pattern data generating means includes means for writing the color information, and the drawing pattern data generating means converts the drawing pattern data into the color information based on the color information. Separate binary output is preferable.

According to this structure, when the drawn image information has color information, that is, when the image data is color, this color information is written in the pattern data. It is possible to retain not only the data regarding ejection failure but also the information (data) regarding color. That is, multi-valued information can be efficiently held in one pattern data. Also,
Since the drawing pattern data is output in binary for each color, it is possible to efficiently eject color functional droplets from the functional droplet ejection head.

In the above, when the drawn image information has dot size information, the dot size information is written in the pattern data, and based on the dot size information,
It is preferable that a parameter capable of controlling the dot size is written in the drawing pattern data.

In the above, when the drawing image information has dot size information, the pattern data generating means includes means for writing the dot size information, and the drawing pattern data generating means, based on the dot size information,
It is preferable to write a parameter capable of controlling the dot size in the drawing pattern data.

According to this structure, when the drawing image information has the dot size information, the dot size information is written in the pattern data. Therefore, one pattern data is not limited to data relating to ejection or non-ejection. Information (data) about the dot size can also be held. That is, multi-valued information can be efficiently held in one pattern data. Further, since a parameter capable of controlling the dot size is written in the drawing pattern data based on the dot size information, various amounts of the functional liquid droplets can be ejected from the functional liquid droplet ejection head.

In the above description, when the drawing image information has the dot overlap number information, the dot overlap number information is written in the pattern data, and the drawing pattern data is divided into the maximum multiplex number obtained from the dot overlap number information. , Binary output is preferable.

In the above, when the drawing image information has the dot overlap frequency information, the pattern data generating means includes means for writing the dot overlap frequency information,
It is preferable that the drawing pattern data generation unit divides the drawing pattern data into the maximum number of times of multiplexing obtained from the dot overlap number information, and outputs the drawing pattern data in binary.

According to this structure, when the drawing image information has the dot overlap frequency information, that is, since the dot overlap frequency information is written in the pattern data, one pattern data is used for data relating to ejection or non-ejection. Not only that, information (data) regarding the number of times of dot overlap can be held. That is, multi-valued information can be efficiently held in one pattern data. Further, the drawing pattern data is divided into the maximum number of times of multiplexing obtained from the information of the number of times of dot overlap and is output in binary, so that the functional liquid droplets can be efficiently ejected from the functional liquid droplet ejection head.

The functional liquid droplet ejection apparatus of the present invention is characterized by including any one of the above-described drawing pattern data generation apparatuses.

According to this structure, it is possible to provide a functional liquid droplet ejection device capable of drawing any dot pattern regardless of whether or not it has a fixed array.

A method of manufacturing a liquid crystal display device according to the present invention is a method of manufacturing a liquid crystal display device in which a large number of filter elements are formed on a substrate of a color filter by using the above-mentioned functional liquid droplet ejection device, and a plurality of functions are provided. It is characterized in that a filter material of each color is introduced into the droplet discharge head, the functional droplet discharge head is relatively scanned with respect to the substrate, and the filter material is selectively discharged to form a large number of the filter elements. .

A method of manufacturing an organic EL device according to the present invention is a method of manufacturing an organic EL device in which an EL light emitting layer is formed on each of a large number of pixel pixels on a substrate by using the above-mentioned functional liquid droplet ejecting apparatus. It is possible to introduce a luminescent material of each color into a plurality of functional liquid droplet ejection heads, scan the functional liquid droplet ejection head relative to a substrate, and selectively eject the luminescent material to form a large number of EL light emitting layers. Characterize.

A method of manufacturing an electron-emitting device according to the present invention is a method of manufacturing an electron-emitting device in which a large number of phosphors are formed on electrodes by using the above-mentioned functional liquid droplet discharging device, and a plurality of functional liquid droplet discharging devices are discharged. The present invention is characterized in that a fluorescent material of each color is introduced into the head, the functional liquid droplet ejection head is scanned relative to the electrodes, and the fluorescent material is selectively ejected to form a large number of phosphors.

A method for manufacturing a PDP device according to the present invention is a method for manufacturing a PDP device in which a fluorescent substance is formed in each of a large number of recesses on a rear substrate by using the above-described functional liquid droplet ejection device, and a plurality of functional liquids are used. It is characterized in that fluorescent materials of respective colors are introduced into the droplet discharge head, the functional droplet discharge head is relatively scanned with respect to the rear substrate, and the fluorescent material is selectively discharged to form a large number of phosphors.

The method of manufacturing the electrophoretic display device of the present invention comprises:
A method of manufacturing an electrophoretic display device in which electrophoretic particles are formed in a large number of recesses on an electrode using the functional liquid droplet ejection device described above, wherein electrophoretic material of each color is introduced into a plurality of functional liquid droplet ejection heads, The functional liquid droplet ejection head is relatively scanned with respect to the electrodes to selectively eject the electrophoretic material to form a large number of electrophoretic materials.

As described above, the functional liquid droplet ejection apparatus described above is
Liquid crystal display manufacturing method, organic EL (Electro-Luminesc
ence) device manufacturing method, electron-emitting device manufacturing method, PD
By applying the method for manufacturing a P (Plasma Display Panel) device and the method for manufacturing an electrophoretic display device, a filter material, a light-emitting material, etc. required for each device are selectively supplied to an appropriate position in an appropriate amount. be able to. The scanning of the droplet discharge head is generally a main scan and a sub-scan, but when so-called one line is configured by a single droplet discharge head, only the sub-scan is performed. The electron emission device is a concept including a so-called FED (Field Emission Display) device.

A method of manufacturing a color filter according to the present invention is a method of manufacturing a color filter, in which a large number of filter elements are arranged on a substrate by using the above-mentioned functional liquid droplet ejection apparatus, Introducing a filter material of each color into the functional liquid droplet discharge head, scanning the functional liquid droplet discharge head relative to the substrate, and selectively discharging the filter material to form a large number of filter elements. To do. In this case, an overcoat film that covers a large number of filter elements is formed, and after forming the filter elements, a translucent coating material is introduced into the plurality of functional liquid droplet ejection heads to remove the functional liquid droplet ejection heads. It is preferable to scan relative to the substrate and selectively eject the coating material to form the overcoat film.

The method of manufacturing an organic EL according to the present invention is a method of manufacturing an organic EL in which a large number of pixel pixels including an EL light emitting layer are arranged on a substrate by using the above-mentioned functional liquid droplet ejecting apparatus. Then, the luminescent material of each color is introduced into the plurality of functional liquid droplet ejection heads, the functional liquid droplet ejection head is relatively scanned with respect to the substrate, and the luminescent material is selectively ejected to form a large number of EL light emitting layers. It is characterized by In this case, many ELs
A large number of pixel electrodes are formed between the light emitting layer and the substrate so as to correspond to the EL light emitting layer, and the liquid electrode material is introduced into a plurality of functional liquid droplet ejection heads so that the functional liquid droplet ejection heads are placed on the substrate. It is preferable to perform a relative scan and selectively eject the liquid electrode material to form a large number of pixel electrodes. In this case, the counter electrode is formed so as to cover a large number of EL light emitting layers, and after the EL light emitting layers are formed, the liquid electrode material is introduced into the plurality of functional liquid droplet ejection heads to form the functional liquid droplet ejection heads on the substrate. It is preferable that the counter electrode is formed by scanning relatively with respect to the liquid electrode material and selectively discharging the liquid electrode material.

The spacer forming method of the present invention is a spacer forming method for forming a large number of particulate spacers so as to form a minute cell gap between two substrates by using the above-mentioned functional liquid droplet discharging apparatus. Introducing a particle material forming a spacer into a plurality of functional liquid droplet ejection heads, scanning the functional liquid droplet ejection head relative to at least one substrate, and selectively ejecting the particle material to form a spacer on the substrate. Is formed.

The metal wiring forming method of the present invention is a method for forming a metal wiring on a substrate by using the above-mentioned functional liquid droplet ejection apparatus, wherein a liquid metal material is applied to a plurality of functional liquid droplet ejection heads. It is characterized in that the functional liquid droplet ejection head is scanned relative to the substrate and the liquid metal material is selectively ejected to form a metal wiring.

The lens forming method of the present invention is a lens forming method in which a large number of microlenses are formed on a substrate by using the above-mentioned functional liquid droplet ejection apparatus, and a lens material is introduced into a plurality of functional liquid droplet ejection heads. Then, the functional liquid droplet ejection head is relatively scanned with respect to the substrate to selectively eject the lens material to form a large number of microlenses.

The resist forming method of the present invention is a resist forming method for forming a resist having an arbitrary shape on a substrate by using the above-mentioned functional liquid droplet ejecting apparatus, wherein a resist material is introduced into a plurality of functional liquid droplet ejecting heads. Then, the functional liquid droplet ejection head is scanned relative to the substrate, and the resist material is selectively ejected to form a resist.

The light diffusing body forming method of the present invention is a method for forming a plurality of light diffusing bodies on a substrate by using the above-mentioned functional liquid droplet ejecting apparatus. Introducing a light diffusing material into the substrate, scanning the functional liquid droplet ejection head relative to the substrate, and selectively ejecting the light diffusing material to form a large number of light diffusing bodies.

As described above, the functional liquid droplet ejection apparatus described above is
By applying to a color filter manufacturing method, an organic EL manufacturing method, a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method and a light diffuser forming method, it is required for each electronic device and each optical device. It is possible to selectively supply an appropriate amount of a filter material, a light emitting material or the like to an appropriate position.

[0039]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. The functional liquid droplet ejecting device can eject minute liquid droplets in a dot shape from a plurality of nozzles arranged on the functional liquid droplet ejecting head with high accuracy, and therefore, the functional liquid ejecting a special ink, photosensitivity, or light emission. It is expected to be applied to the manufacturing field of various parts by using a flexible resin.

The drawing pattern data generating device of this embodiment and the functional liquid droplet ejecting device equipped with the device are applied to a so-called flat display manufacturing device such as a liquid crystal display device or an organic EL device. A functional liquid such as a filter material or a light emitting material is ejected from the droplet ejection head (inkjet method), and the R.I.
G. The filter element B, the EL light emitting layer and the hole injection layer of each pixel in the organic EL device are formed. Therefore, in the present embodiment, a drawing pattern data generation device and a functional liquid droplet ejection device incorporated in a manufacturing device of an organic EL device or the like will be described.

As shown in the schematic view of FIG. 1, the functional liquid droplet ejection apparatus 10 includes an X-axis table 23 and a Y-axis perpendicular to the X-axis table 23.
It has a shaft table 24, a main carriage 25 provided on the Y-axis table 24, and a head unit 26 mounted on the main carriage 25. Although details will be described later, the head unit 26 can be
A plurality of functional liquid droplet ejection heads 7 are mounted. Also,
A substrate (work) W is set on the suction table 28 of the X-axis table 23 corresponding to the plurality of functional liquid droplet ejection heads 7.

In the functional liquid droplet ejection apparatus 10 of this embodiment,
Driving the functional liquid droplet ejection head 7 (selective ejection of functional liquid droplets)
The substrate W moves in synchronism with the above, and so-called main scanning of the functional liquid droplet ejection head 7 is performed by both reciprocating operations of the X-axis table 23 in the X-axis direction. Correspondingly, so-called sub-scanning is performed by the Y-axis table 24 by the forward movement operation of the functional liquid droplet ejection head 7 in the Y-axis direction. The main scanning may be performed only by the forward (or backward) movement in the X-axis direction.

The head unit 26 is the subcarriage 4
1 and multiple (12) mounted on the sub-carriage 41
And the functional liquid droplet ejection head 7. The twelve functional liquid droplet ejection heads 7 are divided into six left and right portions, each of which is arranged at a predetermined angle with respect to the main scanning direction. The functional liquid droplet ejection head 7 of the present embodiment uses a precision head that applies the piezoelectric effect, and selectively ejects minute liquid droplets to the colored layer formation region.

Further, each of the six functional liquid droplet ejection heads 7 is
They are arranged so as to be displaced from each other in the sub-scanning direction, and all the ejection nozzles 38 (described later) of the 12 functional liquid droplet ejection heads 7 are continuous (partially overlapping) in the sub-scanning direction. . That is, in the head arrangement of the embodiment, the six functional liquid droplet ejection heads 7 arranged in the same direction on the sub-carriage 41 are arranged in two rows.
In addition, the functional liquid droplet ejection heads 7 are arranged so as to rotate 180 ° with respect to each other between the head rows. Further, in each functional liquid droplet ejection head 7, two nozzle rows 37, 37 are arranged in parallel with each other, and each nozzle row 37 has 180 nozzles (schematically shown in the figure) arranged at equal pitches. (Shown).

Here, a series of operations of the functional liquid droplet ejection apparatus 10 will be briefly described. First, as a preparatory step, the head unit 26 for the substrate to be used for the work is set to the functional liquid droplet ejection apparatus 1.
0, and this is set on the main carriage 25. When the head unit 26 is set on the main carriage 25, the Y-axis table 24 moves to the head unit 2
6 is moved to the position of the head recognition camera (not shown), and the position of the head unit 26 is recognized by the head recognition camera. Here, based on this recognition result, the head unit 26 is θ-corrected, and the position correction of the head unit 26 in the X-axis direction and the Y-axis direction is performed on the data. Head unit (main carriage 25) 26 after position correction
Returns to the home position.

On the other hand, the suction table 2 of the X-axis table 23
When a substrate (in this case, each substrate to be introduced) W is introduced onto the substrate 8, a substrate recognition camera (not shown) recognizes the substrate at this position (delivery position). Here, based on this recognition result, the substrate W is θ-corrected, and the position correction of the substrate W in the X-axis direction and the Y-axis direction is performed on the data. After the position correction, the substrate (suction table 28) W returns to the home position.

When the preparation is completed in this way, in the actual functional liquid droplet ejection work, first, the X-axis table 23 is driven to reciprocate the substrate W in the main scanning direction, and at the same time the plural functional liquid droplet ejection heads 7 are moved. By driving, the functional liquid droplets are selectively ejected onto the substrate W. After the substrate W is moved back, the Y-axis table 24 is driven this time, the head unit 26 is moved by one pitch in the sub-scanning direction, the reciprocating movement of the substrate W in the main-scanning direction and the functional liquid droplet ejection head are performed again. 7 is driven. By repeating this several times, the functional liquid droplets are ejected from one end of the substrate W to the other end (the entire region).

In this embodiment, the head unit 2
6, the substrate W which is the ejection target is moved in the main scanning direction (X-axis direction), but the head unit 26 may be moved in the main scanning direction. Further, the head unit 26 may be fixed and the substrate W may be moved in the main scanning direction and the sub scanning direction.

Next, referring to FIG. 2, the functional liquid droplet ejection apparatus 1
The control configuration of 0 will be described. Functional droplet discharge device 10
Is a head portion 110 having a functional liquid droplet ejection head 7 (piezoelectric element driving ink jet head) and a head interface substrate 111 for connecting the same, and
A pattern storage circuit board 121, an interface board 122 for connecting the pattern storage circuit board 121, and a trigger board 12 for transmitting a trigger pulse to the waveform / pattern storage circuit board 121.
And a drive unit 1 for driving the functional liquid droplet ejection head 7.
20, a DC power supply 131, a power supply unit 130 that supplies power to the waveform / pattern storage circuit board 121, a linear scale 141, a feed detection unit 140 that detects scan feed, and the entire apparatus is controlled. First PC 151
And a second P that mainly controls the drive of the functional liquid droplet ejection head 7.
And a control unit 150 having a C152.

Function of Head Unit 110 Liquid Droplet Ejecting Head 7
Is a configuration described above, and two nozzle rows of 180 nozzles are used per head. The head interface board 111 converts a signal transmitted from the waveform / pattern storage circuit board 121 into a differential signal to drive a piezo-piezoelectric element for ejecting functional liquid droplets, and drawing pattern data described later. 80 is sent to the functional liquid droplet ejection head 7.

The waveform / pattern storage circuit board 121 of the drive unit 120 receives a drive signal for the piezoelectric element from the second PC 152 and generates a drive waveform. Further, a trigger pulse is created by the trigger substrate 123 that counts the functional liquid droplet ejection distance based on the signal from the linear scale 141, and the waveform / pattern storage circuit substrate 121 receives this trigger pulse and sends it from the second PC 152 in advance. Then, the drawing pattern data is sequentially extracted from the stored drawing pattern data storage area. Further, the waveform / pattern storage circuit board 121 generates a piezo element drive waveform corresponding to the stored waveform parameter which is sent from the second PC 152 in advance, in synchronization with the trigger pulse. Further, the waveform / pattern storage circuit board 121 is supplied with power from the DC power supply 131 of the power supply unit 131 (for driving the head).

Linear scale 141 of feed detecting section 140
Detects the scan feed at a pitch of 0.5 μm and transmits the position pulse to the trigger substrate 123. In addition, the control unit 1
The second PC 152 of 50 is connected to the first PC 151 by a serial communication line (RS-232C), and
In response to the command from 51, data regarding the driving result of the functional liquid droplet ejection head 7 and the like are returned. Also, the second PC1
Reference numeral 52 generates pattern data 60 (data which is a source of the drawing pattern data 80) described later, and the waveform / pattern storage circuit board 12 is generated via the interface board 122.
1, the transfer control signal and the discharge pattern data 60 are sent to the trigger substrate 123, and the trigger control signal and the discharge control signal are sent to the trigger substrate 123.

Next, referring to the flow chart of FIG.
A method of generating the drawing pattern data 80 for selectively discharging the functional liquid droplets from the functional liquid droplet ejection head 7 onto the work to perform drawing will be described. Here, binary drawing pattern data 80, which is drive data for the functional liquid droplet ejection head 7, based on image data 50 as shown in FIG.
(See FIG. 7) is generated.

First, an array area for the drawing pattern data 80 is secured based on the image data 50 (S11). Specifically, the area of the array shown in FIG. 4A is secured, and each cell has an initial value (corresponding to non-ejection of functional droplets;
"0" is shown). Here, the column direction indicates the nozzle row (1-180), and the row direction indicates the ejection resolution (which can be set in units of 1 μm).

Next, the pattern image 60 is generated by writing the drawing image information generated based on the image data 50 in the array area of FIG. 9A (S12). The drawing image information indicates the numerical values 0, 1, 2, 3 and 9 shown in FIG. 7B, which are respectively “0: non-ejection” and “1: R (red) ejection. ",
It indicates "2: G (green) ejection", "3: B (blue) ejection" and "9: ALL ejection (all RGB ejection)".

The information assigned to each cell in the pattern data 60 is not limited to these color information, but relates to the dot size (functional liquid droplet ejection amount), the number of dot overlaps (functional liquid droplet ejection number), and the like. You may make it substitute information. According to this configuration, it is possible to efficiently hold information with one array data. Although each cell can hold 8-bit (1 byte; 0-255) information, the amount of information may be increased as long as the storage capacity permits.

Next, the pattern data 60 is subjected to a rotational shift process corresponding to the inclination of the functional liquid droplet ejection head 7 to generate shift pattern data 70 (S1).
3). As described above, the functional liquid droplet ejection head 7 has an inclination of a predetermined angle with respect to the printing direction (main scanning direction). That is, the pattern data 60 is directly converted to binary and the image drawn as the drive data is inclined by a predetermined angle. Therefore, as shown in FIG. 5, the rotation shift processing is performed on the pattern data 60, the shift pattern data 70 is generated, and the drawing pattern data 80 is generated based on the shift pattern data 70. The drawing result is obtained. When the functional liquid droplet ejection head 7 has no inclination with respect to the printing direction (main scanning direction) (in the vertical direction), the shift pattern data 7
It goes without saying that it is not necessary to generate 0.

Next, the shift pattern data 70 is output in binary to generate drawing pattern data 80 (S14). The drawing pattern data 80 is binary output for each color based on the color information included in the pattern data 60 (shift pattern data 70). The color-based division method is as shown in FIG. 6, and the pattern data 60 of FIG. 4B is divided into three (R ejection, G ejection, and B ejection) pattern data 60. Note that the color division is not limited to this, and it may be divided into more multicolors.

The drawing pattern data 80 is binary data capable of driving the functional liquid droplet ejection head 7, and a part thereof (one ejection resolution) is shown in FIG. Here, the shift pattern data 70 is converted into binary data for each array corresponding to the nozzle row (1-180) to generate drawing pattern data 81 for one array, and the drawing pattern data 81 is collected once in a file to generate a waveform
The data is transferred to the RAM of the pattern storage circuit board 121. This facilitates the generation of binary data. The shift pattern data 70 may be generated from the pattern data 60 for each array. According to this configuration, the shift pattern data 70 can be easily generated without complicating the calculation of the rotation shift process.

When the pattern data 60 includes information on the dot size (functional liquid droplet ejection amount), a parameter capable of controlling the dot size is written in the drawing pattern data 80 based on this. Specifically, the SP in the binary drawing pattern data 80
The xx part of the xx data is changed (see FIG. 7). Thereby, it is possible to draw an image composed of various dot sizes.

If the pattern data 60 includes information on the number of dot overlaps (the number of ejected functional liquid droplets), the pattern data 60 is divided into the maximum number of overlaps obtained from the dot overlap number information and is output in binary. , Drawing pattern data 80 is generated. For example, when the pattern data 60 includes information about the number of dot overlaps as shown in FIG. 8A, the maximum number of overlaps is "3."
Therefore, the binary output is performed by dividing the data for the first ejection, the data for the second ejection, and the data for the third ejection, as shown in FIG. As a result, a plurality of times of ejection can be performed at the same place (in some cases, the ejection amount is reduced once (the dot size is reduced)), and a more attractive gradation expression can be realized.

Drawing (image formation) is performed on the basis of the drawing pattern data 80 created in the above manner. The drawing method will be briefly described with reference to FIG. In addition, in fact,
As described above, drawing is performed by moving the work (X-axis table 23) with respect to the functional liquid droplet ejection head 7, but here the functional liquid droplet ejection head 7 moves on the work for ease of explanation. It will be explained as what is done.

The functional liquid droplet ejection head 7 has a length of 1 inch and 180 nozzles (180 dpi), and an image is formed by dividing this into several scans. In the example shown in the figure, scanning is performed by dividing into three times. In this case, first, the functional liquid droplet ejection head 7 is driven in the main scanning direction to perform drawing, and when scanning for the width of the work is completed, the head is returned to the original position and moved by 1 inch in the sub scanning direction. An image is formed by repeating this three times.

Various specifications are conceivable for the drawing method. For example, drawing may be performed even in the returning operation of the functional liquid droplet ejection head in the main scanning direction. (When 10 nozzles on both ends are not used), it is not moved by 1 inch in the sub-scanning direction, but 3/4 inch each so that the first scan and the second scan partially overlap. You may move.

As described above, according to the method of generating the drawing pattern data 80 of the present invention, the pattern data 60 is generated by securing the array area based on the image data 50 and writing the drawing image information into the array area. Further, the drawing pattern data 80 can be generated by binary outputting the pattern data 60. That is, by a program having an algorithm for generating a fixed sequence,
Since the final format (binary format) data is not directly generated, any dot pattern can be drawn regardless of whether or not it has a fixed array.

Further, the pattern data 60 is subjected to a rotational shift process corresponding to the inclination of the functional liquid droplet ejection head 7 to generate shift pattern data 70, and drawing pattern data 80 is generated based on the shift pattern data 70. Therefore, the drawn image does not tilt due to the tilt of the functional liquid droplet ejection head 7. That is, it is possible to generate drawing pattern data that can obtain a drawing result close to the original image data.

Next, a method of generating the visible data 90 generated on the basis of the binary drawing pattern data 80 will be described. The visible data generating method of the present invention is a method for making it possible to confirm the image to be drawn without actually ejecting the functional liquid droplets. Briefly, the procedure is the reverse of the above-mentioned drawing pattern data generating method. Is generated by. Hereinafter, description will be made step by step with reference to the flowchart of FIG. The visible data 90
Is generated based on the drawing pattern data whose drawing result is the dotted line portion in FIG.

First, from the drawing pattern data 80, drawing pattern data 81 for one row (one block = 1 ejection resolution) corresponding to the nozzle row 37 is extracted (S21;
(See FIG. 7). Next, the drawing pattern data 8 for one column
Based on 1, the pattern data 61 for one column is generated by bit operation (S22; see FIG. 4B). And
The processes of S21 and S22 are repeated until the generation of the pattern data 60 for all the columns (all pattern data) is completed (until the generation of the pattern data 61 for the last column is completed) (S23; lamination process). Next, when the rotation shift processing is performed on all the generated pattern data 60 (S2
4: Yes) performs rotation shift processing to generate shift pattern data 70 (S25), and then performs visualization processing (text conversion) to generate visible data (S26; see FIG. 12). On the other hand, when the rotation shift process is not performed (S24: No), the visualization process is performed as it is to generate visible data (S26). This makes it possible to confirm whether the functional liquid droplets are ejected normally from the functional liquid droplet ejection head 7 (whether the generated drawing pattern data 80 is normal).

The rotation shift process for the pattern data 60 is a process for generating the visible data 90 close to the image actually drawn, in consideration of the inclination of the functional liquid droplet ejection head 7. That is, by performing the rotation shift process, it is possible to generate not the visible data 90 having a predetermined angle as shown in FIG. 12 but the visible data 90 close to the drawn image as shown in FIG. Here, since the shift is the reverse of the rotation shift process in the generation of the drawing pattern data 80, when the angle θ is rotated in the generation of the drawing pattern data 80, the rotation process of − (minus) θ is performed. I do.

Although FIG. 12 and FIG. 13 show the visible data 90 in which the pattern data 60 is converted into text, it is displayed by a text editor, but the visible data in the form of bitmap may be generated. According to this configuration, it becomes easy to enlarge and display finely, or reduce and view the whole, and it is possible to obtain visible data 90 closer to an image actually drawn.

As described above, according to the method of generating the visible data 90 of the present invention, the binary drawing pattern data for selectively ejecting the functional liquid droplets from the functional liquid droplet ejecting head 7 onto the work to perform the drawing. Based on 80, pattern data 60 is generated by bit operation, and based on this, visible data 90 visualized by a visualization program.
Can be generated. Therefore, the image to be drawn can be confirmed without actually ejecting the functional liquid droplets from the functional liquid droplet ejection head 7, so that waste of time and ejection material can be saved.

Further, after extracting the drawing pattern data for one row corresponding to the plurality of nozzles 38 arranged in the functional liquid droplet ejection head 7, the pattern data 61 for one row is generated and stacked. All pattern data 60
Therefore, it is possible to easily perform the arithmetic processing for generating all the pattern data 60.

Further, the shift pattern data 70 is obtained by performing the rotation shift processing on all the pattern data 60.
Is generated and the visible data 90 is generated on the basis of the generated data.
It does not tilt due to the tilt of. That is, it is possible to generate visible data close to the image actually drawn.

In addition, the visualization program for converting the pattern data into text is used to display the visible data 9 in the text format.
0 can be generated. That is, the visible data can be easily generated by a simple program that processes a character string such as creating an image with a combination of a blank and an arbitrary character.

By the way, the functional liquid droplet ejection apparatus 10 of the present invention
As described above, can be applied to various flat display manufacturing methods, various electronic device and optical device manufacturing methods, and the like. Therefore, this functional droplet discharge device 1
A manufacturing method using 0 will be described by taking a manufacturing method of a liquid crystal display device and a manufacturing method of an organic EL device as examples.

FIG. 14 is a partially enlarged view of the color filter of the liquid crystal display device. 14A is a plan view, and FIG. 14B is a sectional view taken along the line BB ′ of FIG.
The hatching of each part of the cross-sectional view is partially omitted.

As shown in FIG. 14A, the color filter 400 includes pixels (filter elements) 412 arranged in a matrix, and the boundaries between pixels are separated by partitions 413. One of the pixels 412
For example, any one of red (R), green (G), and blue (B) ink (filter material) is introduced. In this example, the red, green and blue arrangements are so-called delta arrangements, but other arrangements such as stripe arrangements and mosaic arrangements may be used.

As shown in FIG. 14B, the color filter 400 includes a light-transmitting substrate 411 and a light-shielding partition 413. The portion where the partition 413 is not formed (removed) constitutes the pixel 412. The ink of each color introduced into the pixel 412 constitutes the coloring layer 421. An overcoat layer 422 and an electrode layer 423 are formed on the upper surfaces of the partition 413 and the coloring layer 421.

FIG. 15 is a manufacturing process sectional view illustrating a method of manufacturing a color filter according to an embodiment of the present invention.
The hatching of each part of the cross-sectional view is partially omitted.

Thickness 0.7 mm, height 38 cm, width 30 c
The surface of the transparent substrate 411 made of non-alkali glass of m is washed with a cleaning liquid containing 1% by weight of hydrogen peroxide in hot concentrated sulfuric acid, rinsed with pure water, and then air-dried to obtain a cleaned surface. On this surface, a chromium film is formed with an average film thickness of 0.2 μm by a sputtering method to obtain a metal layer 414 ′ (FIG. 15: S1).

After drying this substrate on a hot plate at 80 ° C. for 5 minutes, a photoresist layer (not shown) is formed on the surface of the metal layer 414 'by spin coating. A mask film on which a desired matrix pattern shape is drawn is brought into close contact with the surface of the substrate and exposed with ultraviolet rays. Next, this is immersed in an alkali developing solution containing potassium hydroxide in a proportion of 8% by weight to remove the photoresist in the unexposed portion and pattern the resist layer. Subsequently, the exposed metal layer is removed by etching with an etching solution containing hydrochloric acid as a main component. In this way, the light shielding layer (black matrix) 414 having a predetermined matrix pattern can be obtained (FIG. 15: S2). The thickness of the light shielding layer 414 is approximately 0.2 μm. Also,
The width of the light shielding layer 414 is approximately 22 μm.

A negative type transparent acrylic photosensitive resin composition 415 'is applied on this substrate by the spin coating method (FIG. 15: S3). 20 at 100 ℃
After pre-baking for a minute, UV exposure is performed using a mask film on which a predetermined matrix pattern shape is drawn. The resin in the unexposed portion is also developed with an alkaline developer, rinsed with pure water, and then spin-dried. After-baking as final drying is performed at 200 ° C. for 30 minutes to sufficiently cure the resin portion, whereby the bank layer 415 is formed, and the partition 413 including the light shielding layer 414 and the bank layer 415 is formed (FIG. 15: S4). ). The bank layer 415 has an average film thickness of 2.7 μm. The width of the bank layer 415 is about 14 μm.

The light shielding layer 414 and the bank layer 41 thus obtained
The colored layer formation region divided by 5 (especially the glass substrate 411
In order to improve the ink wettability of the exposed surface), dry etching, that is, plasma treatment is performed. In particular,
A high voltage is applied to a mixed gas of helium and 20% oxygen to form an etching spot in a plasma atmosphere, and the substrate is etched by passing under the etching spot.

Next, the R, G, and B inks are introduced by the ink jet method into the pixels 412 formed by being divided by the partition 413 (FIG. 15: S5). As the functional liquid droplet ejection head 7 (inkjet head), a precision head applying a piezoelectric effect is used, and 10 minute ink droplets are selectively ejected for each colored layer forming region. The drive frequency is set to 14.4 kHz, that is, the ejection interval of each ink droplet is set to 69.5 μsec. The distance between the head and the target is set to 0.3 mm. In order to prevent the flying velocity from the head to the target colored layer formation area, flight bending, and the generation of split stray droplets called satellites, in addition to the physical properties of the ink, the waveform that drives the piezoelectric element of the head (including voltage )is important. Therefore, you can program a pre-configured waveform to drop ink drops into red,
Three colors, green and blue, are applied simultaneously and ink is applied in a predetermined color arrangement pattern.

As the ink (filter material), for example, an inorganic pigment is dispersed in a polyurethane resin oligomer, cyclohexanone and butyl acetate are added as a low boiling point solvent, and butyl carbitol acetate is added as a high boiling point solvent. 0.01% by weight of an activator is added as a dispersant to give a viscosity of 6 to 8 centipoise.

Next, the applied ink is dried. First, the ink layer 416 is set by leaving it in a natural atmosphere for 3 hours, and then the ink layer 416 is set on a hot plate at 80 ° C.
The ink layer 416 is heated for 0 minutes, and finally in an oven at 200 ° C. for 30 minutes to cure the ink layer 416.
21 is obtained (FIG. 15: S6).

A transparent acrylic resin paint is spin-coated on the substrate to form an overcoat layer 422 having a smooth surface. In addition, ITO (Indium Tin Oxi
de) to form an electrode layer 423 of a required pattern,
The color filter 400 is used (FIG. 15: S7). In addition,
The overcoat layer 422 is formed on the functional liquid droplet ejection head 7
It may be formed by an inkjet method using an (inkjet head).

FIG. 16 is a sectional view of a color liquid crystal display device which is an example of an electro-optical device (flat display) manufactured by the manufacturing method of the present invention. The hatching of each part of the cross-sectional view is partially omitted.

This color liquid crystal display device 450 is manufactured by combining the color filter 400 and the counter substrate 466 and enclosing the liquid crystal composition 465 between them. TFT (thin film transistor) elements (not shown) and pixel electrodes 463 are formed in a matrix on the inner surface of one substrate 466 of the liquid crystal display device 450. In addition, as the other substrate, the color filter 400 is installed such that the red, green, and blue colored layers 421 are arranged at positions facing the pixel electrodes 463.

Alignment films 461 and 464 are formed on the respective surfaces of the substrate 466 and the color filter 400 which face each other. The alignment films 461 and 464 are subjected to rubbing treatment, and liquid crystal molecules can be aligned in a fixed direction. In addition, the substrate 466 and the color filter 400
Polarizing plates 462 and 467 are adhered to the outer surface of each. A combination of a fluorescent lamp (not shown) and a scattering plate is generally used as the backlight.
Display is performed by causing the liquid crystal composition 465 to function as an optical shutter that changes the transmittance of backlight light.

In the present invention, the electro-optical device is not limited to the color liquid crystal display device described above. For example, a thin television using a thin cathode ray tube or a liquid crystal shutter,
Various electro-optical means such as an EL display device, a plasma display, a CRT display, and an FED (Field Emission Display) panel can be used.

Next, an organic EL device (organic EL display device) and its manufacturing method will be described with reference to FIGS. 17 to 29.

17 to 29 show a manufacturing process of an organic EL device including an organic EL element and its structure. This manufacturing process includes a bank portion forming step, a plasma processing step, a light emitting element forming step including a hole injecting / transporting layer forming step and a light emitting layer forming step, a counter electrode forming step, and a sealing step. Is configured.

In the bank portion forming step, the inorganic bank layer 512a is formed at a predetermined position on the circuit element portion 502 and the electrode 511 (also referred to as a pixel electrode) previously formed on the substrate 501.
By stacking the organic material bank layer 512b with the organic material bank layer 512b, a bank portion 512 having an opening 512g is formed. As described above, the bank portion forming step includes a step of forming the inorganic bank layer 512a on a part of the electrode 511 and a step of forming the organic bank layer 512b on the inorganic bank layer.

First, in the step of forming the inorganic bank layer 512a, as shown in FIG.
An inorganic bank layer 512a is formed on the interlayer insulating film 544b and the pixel electrode 511. Inorganic bank layer 512a
For example, an inorganic film such as SiO ₂ or TiO ₂ is formed on the entire surface of the second interlayer insulating film 544b and the pixel electrode 511 by a CVD method, a coating method, a sputtering method, a vapor deposition method, or the like.

Next, this inorganic film is patterned by etching or the like to form a lower opening portion 512c corresponding to the formation position of the electrode surface 511a of the electrode 511. At this time,
It is necessary to form the inorganic bank layer 512a so as to overlap the peripheral portion of the electrode 511. Thus, the electrode 51
By forming the inorganic bank layer 512a so that the peripheral portion (part) of No. 1 and the inorganic bank layer 512a overlap, the light emitting region of the light emitting layer 510b can be controlled.

Next, in the step of forming the organic bank layer 512b, as shown in FIG. 18, the inorganic bank layer 512a is formed.
An organic bank layer 512b is formed on top. The organic bank layer 512b is etched by a photolithography technique or the like to form an upper opening 512d of the organic bank layer 512b.
To form. The upper opening 512d is provided at a position corresponding to the electrode surface 511a and the lower opening 512c.

As shown in FIG. 18, the upper opening 512d is preferably formed wider than the lower opening 512c and narrower than the electrode surface 511a. Accordingly, the first stacked unit 5 surrounding the lower opening 512c of the inorganic bank layer 512a.
12e is extended to the center side of the electrode 511 with respect to the organic bank layer 512b. By connecting the upper opening 512d and the lower opening 512c in this manner, the inorganic bank layer 512a and the organic bank layer 51 are formed.
An opening 512g penetrating 2b is formed.

Next, in the plasma processing step, the bank portion 51
A region showing ink affinity and a region showing ink repellency are formed on the second surface and the surface 511a of the pixel electrode. This plasma treatment step includes a preliminary heating step, an ink-philic step of processing the upper surface (512f) of the bank portion 512 and the wall surface of the opening 512g, and the electrode surface 511a of the pixel electrode 511 to have an ink-philic property, and an organic substance. The upper surface 512f of the bank layer 512b and the wall surface of the upper opening 512d are roughly classified into an ink repellent step of processing to have ink repellency and a cooling step.

First, in the preheating step, the bank portion 512
Substrate 501 containing is heated to a predetermined temperature. Heating
For example, a heater is attached to a stage on which the substrate 501 is placed, and the heater is used to heat the substrate 501 together with the stage. Specifically, it is preferable to set the preheating temperature of the substrate 501 in the range of 70 to 80 ° C., for example.

Next, in the ink-philic process, plasma treatment (O ₂ plasma treatment) using oxygen as a treatment gas is performed in the atmosphere. By this O ₂ plasma treatment, as shown in FIG. 19, the wall surface and the upper surface 5 of the electrode surface 511a of the pixel electrode 511, the first stacked portion 512e of the inorganic bank layer 512a, and the upper opening 512d of the organic bank layer 512b.
12f is subjected to ink-philic treatment. By this lyophilic treatment, hydroxyl groups are introduced into each of these surfaces to impart lyophilicity. In FIG. 19, the portion subjected to the ink-philic process is shown by a dashed line.

Next, in the ink repellent process, plasma treatment (CF) using methane tetrafluoride as a treatment gas in the air atmosphere (CF
₄ Plasma treatment). By CF ₄ plasma treatment, as shown in FIG. 20, the ink repellent treatment is applied to the wall surface of the upper opening 512d and the upper surface 512f of the organic bank layer. By this ink repellent treatment, a fluorine group is introduced into each of these surfaces to impart ink repellency. In FIG. 20, the area showing the ink repellency is shown by a chain double-dashed line.

Next, in the cooling step, the substrate 501 heated for plasma processing is cooled to room temperature or the control temperature of the inkjet step (functional droplet discharge step). By cooling the substrate 501 after the plasma treatment to room temperature or a predetermined temperature (for example, a control temperature at which the inkjet process is performed), the next hole injection / transport layer forming process can be performed at a constant temperature.

Next, in the light emitting element forming step, the pixel electrode 5 is formed.
A light emitting element is formed by forming a hole injection / transport layer and a light emitting layer on 11. The light emitting element forming step includes four steps. That is, a first functional liquid droplet ejecting step of ejecting a first composition for forming a hole injecting / transporting layer onto each of the pixel electrodes, and drying the ejected first composition to form the pixel electrode. A hole injection / transport layer forming step of forming a hole injection / transport layer thereon, and a second step of forming a light emitting layer
A second functional liquid droplet ejecting step of ejecting a composition onto the hole injecting / transporting layer, and drying the ejected second composition to form a light emitting layer on the hole injecting / transporting layer. And a light emitting layer forming step.

First, in the first functional liquid droplet ejection step, the first composition containing the hole injecting / transporting layer forming material is ejected onto the electrode surface 511a by the ink jet method (functional liquid droplet ejecting method). After the first functional liquid droplet discharging step, it is preferable to carry out in an inert gas atmosphere such as water, an oxygen-free nitrogen atmosphere, or an argon atmosphere. (Note that when the hole injection / transport layer is formed only on the pixel electrode, the hole injection / transport layer formed adjacent to the organic bank layer is not formed.)

As shown in FIG. 21, the ink jet head (functional liquid droplet ejection head 7) H was filled with the first composition containing the hole injection / transport layer forming material, and the ejection nozzle of the ink jet head H was opened at the lower opening. While the inkjet head H and the substrate 501 are relatively moved while facing the electrode surface 511a located inside the 512c, the first composition droplet 510c in which the amount of liquid per droplet is controlled from the discharge nozzle is placed on the electrode surface 511a. Discharge.

As the first composition used here, for example, a composition obtained by dissolving a mixture of a polythiophene derivative such as polyethylenedioxythiophene (PEDOT) and polystyrene sulfonic acid (PSS) in a polar solvent is used. it can. Examples of the polar solvent include isopropyl alcohol (IPA), normal butanol, γ-butyrolactone, N-methylpyrrolidone (NMP), 1,3-dimethyl-
Examples thereof include 2-imidazolidinone (DMI) and its derivatives, glycol ethers such as carbitol acetate and butyl carbitol acetate. The material for forming the hole injecting / transporting layer is the light emitting layer 51 of each of R, G, and B.
The same material may be used for 0b and may be changed for each light emitting layer.

As shown in FIG. 21, the discharged first composition droplet 510c spreads on the ink-philic treated electrode surface 511a and the first laminated portion 512e, and the lower and upper openings 5 are formed.
12c and 512d are filled. The amount of the first composition discharged onto the electrode surface 511a is as follows.
It is determined by the size of 512d, the thickness of the hole injection / transport layer to be formed, the concentration of the hole injection / transport layer forming material in the first composition, and the like. Further, the first composition droplets 510c may be discharged not only once but also several times onto the same electrode surface 511a.

Next, in the hole injecting / transporting layer forming step, as shown in FIG.
As shown in FIG. 2, the hole injecting / transporting layer 510 is formed on the electrode surface 511a by drying and heat treating the discharged first composition to evaporate the polar solvent contained in the first composition.
a is formed. The first composition drops 510 when dried.
The evaporation of the polar solvent contained in c is mainly caused by the inorganic bank layer 5
It occurs near 12a and the organic bank layer 512b, and the hole injection / transport layer forming material is concentrated and deposited along with the evaporation of the polar solvent.

As a result, as shown in FIG. 22, the polar solvent evaporates even on the electrode surface 511a due to the drying treatment.
As a result, the flat portion 510a made of the hole injection / transport layer forming material is formed on the electrode surface 511a. Electrode surface 511
Since the evaporation rate of the polar solvent is substantially uniform on a, the material for forming the hole injecting / transporting layer is uniformly concentrated on the electrode surface 511a, thereby forming the flat portion 510a having a uniform thickness.

Next, in the second functional liquid droplet discharging step, the second composition containing the light emitting layer forming material is discharged onto the hole injecting / transporting layer 510a by the ink jet method (functional liquid droplet discharging method). In the second functional liquid droplet discharging step, the hole injecting / transporting layer 51 is used as a solvent of the second composition used in forming the light emitting layer in order to prevent the hole injecting / transporting layer 510a from being redissolved.
A non-polar solvent insoluble in 0a is used.

On the other hand, however, the hole injection / transport layer 510
Since a has a low affinity for the nonpolar solvent, even if the second composition containing the nonpolar solvent is ejected onto the hole injecting / transporting layer 510a, the hole injecting / transporting layer 510a and the light emitting layer 510b.
May not be able to be adhered to each other, or the light emitting layer 510b may not be uniformly applied. Therefore,
Hole injection into non-polar solvent and light emitting layer forming material /
In order to increase the affinity of the surface of the transport layer 510a, it is preferable to perform a surface modification step before forming the light emitting layer.

Therefore, first, the surface modification step will be described. In the surface modification step, a surface modification solvent, which is the same solvent as the nonpolar solvent of the first composition used for forming the light emitting layer or a solvent similar thereto, is subjected to inkjet method (functional droplet discharge method) and spin coating. Method or dip method is applied on the hole injection / transport layer 510a and then dried.

For example, coating by the ink jet method
As shown in FIG. 23, the inkjet head H is filled with a surface modifying solvent, the ejection nozzle of the inkjet head H is made to face the substrate (that is, the substrate on which the hole injection / transport layer 510a is formed), and the inkjet is performed. This is performed by ejecting the surface modification solvent 510d from the ejection nozzle H onto the hole injection / transport layer 510a while moving the head H and the substrate 501 relative to each other. Then, as shown in FIG. 24, the surface modification solvent 510d is dried.

Next, in the second functional liquid droplet discharging step, the second composition containing the light emitting layer forming material is discharged onto the hole injecting / transporting layer 510a by the ink jet method (functional liquid droplet discharging method). As shown in FIG. 25, in the inkjet head H,
The second composition containing the blue (B) light emitting layer forming material is filled, and the ejection nozzle of the inkjet head H is made to face the hole injection / transport layer 510a located in the lower and upper openings 512c and 512d. While the head H and the substrate 501 are moved relative to each other, they are ejected from the ejection nozzle as a second composition droplet 510e in which the liquid amount per droplet is controlled, and the second composition droplet 510e is ejected.
It discharges on 10a.

As the material for forming the light emitting layer, a polyfluorene polymer derivative, a (poly) paraphenylene vinylene derivative, a polyphenylene derivative, polyvinylcarbazole, a polythiophene derivative, a perylene dye, a coumarin dye, a rhodamine dye, or the above It is possible to use by doping the molecule with an organic EL material. For example, rubrene, perylene, 9,10-diphenylanthracene,
It can be used by doping with tetraphenyl butadiene, Nile red, coumarin 6, quinacridone and the like.

As the non-polar solvent, the hole injecting / transporting layer 5 is used.
Those which are insoluble in 10a are preferable, and for example, cyclohexylbenzene, dihydrobenzofuran, trimethylbenzene, tetramethylbenzene and the like can be used. By using such a non-polar solvent for the second composition of the light emitting layer 510b, the second composition can be applied without redissolving the hole injection / transport layer 510a.

As shown in FIG. 25, the discharged second composition 510e spreads over the hole injecting / transporting layer 510a and is filled in the lower and upper openings 512c, 512d.
The second composition 510e may be discharged onto the same hole injecting / transporting layer 510a not only once but also several times. In this case, the amount of the second composition in each time may be the same,
The amount of the second composition may be changed each time.

Next, in the light emitting layer forming step, after the second composition is discharged, a drying process and a heat treatment are performed to form a light emitting layer 510b on the hole injecting / transporting layer 510a. The drying treatment is performed by subjecting the second composition after being discharged to the second treatment.
The non-polar solvent contained in the composition is evaporated to form a blue (B) light emitting layer 510b as shown in FIG.

Continuing, as shown in FIG. 27, blue (B)
Similar to the case of the light emitting layer 510b, the red (R) light emitting layer 510b is formed, and finally the green (G) light emitting layer 510b is formed. The order of forming the light emitting layer 510b is not limited to the order described above, and may be formed in any order. For example, it is possible to determine the order of formation according to the light emitting layer forming material.

Next, in the counter electrode forming step, as shown in FIG. 28, a cathode 503 (counter electrode) is formed on the entire surface of the light emitting layer 510b and the organic bank layer 512b. Note that the cathode 503 may be formed by stacking a plurality of materials. For example, it is preferable to form a material having a small work function on the side close to the light emitting layer, and for example, Ca, Ba or the like can be used, and depending on the material, it is better to form LiF or the like thinly in the lower layer. There is also. Also, the upper side (sealing side)
Is preferable to have a higher work function than the lower side. The cathode (cathode layer) 503 is preferably formed by, for example, a vapor deposition method, a sputtering method, a CVD method, or the like, and particularly preferably formed by a vapor deposition method in terms of preventing damage to the light emitting layer 510b due to heat.

Further, lithium fluoride is used as the light emitting layer 510b.
The blue (B) light emitting layer 510 may be formed only on the top.
It may be formed only on b. In this case, the other red (R)
The light emitting layers and the green (G) light emitting layers 510b and 510b include
The upper cathode layer 503b made of LiF is in contact with it. In addition, a vapor deposition method, a sputtering method, a C
It is preferable to use an Al film, an Ag film, or the like formed by the VD method or the like. Further, a protective layer such as SiO ₂ or SiN may be provided on the cathode 503 to prevent oxidation.

Finally, in the sealing step shown in FIG. 29, a sealing substrate 505 is laminated on the organic EL element 504 in an atmosphere of an inert gas such as nitrogen, argon or helium. The sealing step is preferably performed in an inert gas atmosphere such as nitrogen, argon or helium. When performed in air, the cathode 50
When a defect such as a pinhole is generated in No. 3, water, oxygen or the like may enter the cathode 503 from this defective portion and the cathode 503 may be oxidized, which is not preferable. Finally, by connecting the cathode 503 to the wiring of the flexible substrate and connecting the wiring of the circuit element section 502 to the drive IC, the organic EL device 500 of this embodiment is obtained.

In forming the pixel electrode 511 and the cathode (counter electrode) 503, an inkjet method using an inkjet head H may be adopted. That is,
Liquid electrode materials are introduced into the inkjet heads H, and the inkjet heads H are ejected to form the pixel electrodes 511 and the cathodes 503 (including a drying step).

Similarly, the functional liquid droplet ejection apparatus 1 of the present embodiment
0 can be applied to a method of manufacturing an electron emission device, a method of manufacturing a PDP device, a method of manufacturing an electrophoretic display device, and the like.

In the method of manufacturing the electron emission device, the fluorescent material of each color of R, G and B is introduced into the plurality of functional liquid droplet ejection heads 7, and the plurality of functional liquid droplet ejection heads 7 are subjected to main scanning and sub scanning. The fluorescent material is selectively discharged to form a large number of fluorescent substances on the electrodes. The electron emission device is a higher-level concept including an FED (field emission display).

In the method of manufacturing the PDP device, fluorescent materials of R, G, and B colors are introduced into the plurality of functional liquid droplet ejection heads 7, and the plurality of functional liquid droplet ejection heads 7 are subjected to main scanning and sub scanning. The fluorescent material is selectively ejected to form the fluorescent material in a large number of recesses on the rear substrate.

In the method of manufacturing the electrophoretic display device, the electrophoretic material of each color is introduced into the plurality of functional liquid droplet ejection heads 7 and the plurality of functional liquid droplet ejection heads 7 are subjected to the main scanning and the sub scanning to select the ink material. Are ejected to form electrophoretic particles in a large number of recesses on the electrodes. In addition, it is preferable that the electrophoretic body composed of the charged particles and the dye is enclosed in a microcapsule.

On the other hand, the functional liquid droplet ejection apparatus 10 of the present embodiment.
Can be applied to a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method, a light diffuser forming method, and the like.

The spacer forming method is to form a large number of particle-shaped spacers so as to form a minute cell gap between two substrates. Is introduced, the plurality of functional liquid droplet ejection heads 7 are main-scanned and sub-scanned to selectively eject the particulate material to form spacers on at least one substrate. For example, it is useful when forming a cell gap between two substrates in the above-mentioned liquid crystal display device or electrophoretic display device, and it can be applied to a semiconductor manufacturing technique that requires such a small gap. Nor.

In the metal wiring forming method, a liquid metal material is introduced into the plurality of functional liquid droplet ejection heads 7 and the plurality of functional liquid droplet ejection heads 7 are main-scanned and sub-scanned to selectively eject the liquid metal material. Then, metal wiring is formed on the substrate. For example, metal wiring connecting the driver and each electrode in the above liquid crystal display device, and TF in the above organic EL device.
It can be applied to a metal wiring that connects T and the like to each electrode. Needless to say, the present invention can be applied to general semiconductor manufacturing technology in addition to this type of flat display.

In the lens forming method, the lens material is introduced into the plurality of functional liquid droplet ejection heads 7, the plurality of functional liquid droplet ejection heads 7 are main-scanned and sub-scanned, and the lens material is selectively ejected to make the transparent. A large number of microlenses are formed on the substrate. For example, it can be applied as a beam converging device in the above FED apparatus. Needless to say, it can be applied to various optical devices.

In the resist forming method, a resist material is introduced into the plurality of functional liquid droplet ejection heads 7 and the plurality of functional liquid droplet ejection heads 7 are main-scanned and sub-scanned, and the resist material is selectively ejected onto the substrate. A photoresist having an arbitrary shape is formed on. For example, the formation of banks in the above-described various display devices is widely applicable to the application of photoresist in the photolithography method, which is the main component of semiconductor manufacturing technology.

The light diffuser forming method is a method of forming a large number of light diffusers on a substrate, and a light diffusing material is introduced into a plurality of functional liquid droplet ejection heads 7 to form a plurality of functional liquids. The droplet discharge head 7 is main-scanned and sub-scanned to selectively discharge the light diffusion material to form a large number of light diffusers. Needless to say, this case is also applicable to various optical devices.

[0135]

As described above, according to the drawing pattern data generating method, the drawing pattern data generating apparatus and the functional liquid droplet ejecting apparatus having the same of the present invention, the program having the algorithm for generating the constant array is used. Since the data in the final format (binary format) is not directly generated, it is possible to draw not only a dot pattern having a fixed array but also a dot pattern having no fixed array.

On the other hand, the manufacturing method of the liquid crystal display device of the present invention,
Organic EL device manufacturing method, electron-emitting device manufacturing method, P
According to the method for manufacturing the DP device and the method for manufacturing the electrophoretic display device, it is possible to easily introduce a functional liquid droplet ejection head suitable for a filter material, a light emitting material, or the like in each device, thus improving manufacturing efficiency. You can

According to the color filter manufacturing method, organic EL manufacturing method, spacer forming method, metal wiring forming method, lens forming method, resist forming method, and light diffuser forming method of the present invention, each electronic device or Since it is possible to easily introduce a functional liquid droplet ejection head suitable for a filter material, a light emitting material, or the like in each optical device, it is possible to improve manufacturing efficiency.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a functional liquid droplet ejection apparatus according to an embodiment.

FIG. 2 is a block diagram of a control system of the functional liquid droplet ejection apparatus according to the embodiment.

FIG. 3 is a flowchart showing a drawing pattern data generation method according to the embodiment.

FIG. 4 is a diagram showing pattern data according to the embodiment.

FIG. 5 is a diagram showing pattern data, shift pattern data, and a drawing result based on the pattern data according to the embodiment.

FIG. 6 is a diagram showing a method of dividing pattern data by color according to the embodiment.

FIG. 7 is a diagram showing binary drawing pattern data according to the embodiment.

FIG. 8 is a diagram showing a division method for each number of dot overlaps of pattern data according to the embodiment.

FIG. 9 is a diagram showing a drawing method according to the embodiment.

FIG. 10 is a flowchart showing a visible data generation method according to the embodiment.

FIG. 11 is a diagram showing image data according to the embodiment.

FIG. 12 is a diagram showing visible data converted into text according to the embodiment.

FIG. 13 is a diagram showing text-formatted shift visible data according to the embodiment.

FIG. 14 is a partial enlarged view of a color filter manufactured by the method for manufacturing a color filter of the embodiment.

FIG. 15 is a manufacturing step sectional view schematically showing the method for manufacturing the color filter of the embodiment.

FIG. 16 is a cross-sectional view of a liquid crystal display device manufactured by the color filter manufacturing method according to the embodiment.

FIG. 17 is a cross-sectional view of a bank portion forming step (inorganic bank) in the method for manufacturing an organic EL device according to the embodiment.

FIG. 18 is a cross-sectional view of a bank portion forming step (organic bank) in the method for manufacturing an organic EL device according to the embodiment.

FIG. 19 is a cross-sectional view of a plasma treatment step (hydrophilization treatment) in the method for manufacturing an organic EL device according to the embodiment.

FIG. 20 is a cross-sectional view of a plasma treatment step (water repellent treatment) in the method for manufacturing an organic EL device according to the embodiment.

FIG. 21 is a cross-sectional view of the hole injection layer forming step (functional liquid droplet ejection) in the method of manufacturing the organic EL device according to the embodiment.

FIG. 22 is a cross-sectional view of the hole injection layer forming step (drying) in the method of manufacturing the organic EL device according to the embodiment.

FIG. 23 is a cross-sectional view of a surface modification step (functional liquid droplet ejection) in the method of manufacturing an organic EL device according to the embodiment.

FIG. 24 is a cross-sectional view of the surface modification step (drying) in the method of manufacturing the organic EL device according to the embodiment.

FIG. 25 is a cross-sectional view of a B light emitting layer forming step (functional liquid droplet ejection) in the method of manufacturing the organic EL device according to the embodiment.

FIG. 26 is a cross-sectional view of a B light emitting layer forming step (drying) in the method for manufacturing an organic EL device according to the embodiment.

FIG. 27 is a cross-sectional view of an R, G, B light emitting layer forming step in the method for manufacturing an organic EL device according to the embodiment.

FIG. 28 is a cross-sectional view of a counter electrode forming step in the method of manufacturing the organic EL device according to the embodiment.

FIG. 29 is a cross-sectional view of a sealing step in the method of manufacturing an organic EL device according to the embodiment.

[Explanation of symbols]

7 Functional Droplet Ejecting Head 10 Functional Droplet Ejecting Device 23 X Axis Table 24 Y Axis Table 25 Main Carriage 26 Head Unit 28 Adsorption Table 37 Nozzle Row 38 Nozzle 41 Sub Carriage 50 Image Data 60 Pattern Data 70 Shift Pattern Data 80 Drawing Pattern Data 90 Visible data 110 Head unit 120 Drive unit 130 Power supply unit 140 Feed detection unit 150 Control unit 151 First PC 152 Second PC 400 Color filter 412 Pixel 415 Bank layer 416 Ink layer 422 Overcoat layer 466 Substrate 500 Organic EL device 501 Substrate 502 Circuit element part 504 Organic EL element 510a Hole injection / transport layer 510b Light emitting layer W Substrate

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G02F 1/1339 500 G06F 3/13 320K 5B021 G06F 3/13 320 G09F 9/00 342Z 5C027 G09F 9/00 342 H01J 9/02 F 5C028 H01J 9/02 9/227 C 5C040 9/227 E 5G435 11/02 B 11/02 H05B 33/10 H05B 33/10 33/14 A 33/14 B41J 3/04 101Z F Term ( reference) 2C056 EA24 FB01 2H048 BA11 BA45 BA48 BA64 BB02 BB44 2H089 LA07 NA05 NA12 NA60 QA12 2H091 FA02Y FB02 FB13 FC12 FC22 FC29 FD04 LA12 LA15 3K007 AB11 AB18 DB03 FA01 5B021 AA01 LG00 LG07 5C027 AA09 5C028 FF06 FF16 HH04 HH09 5C040 FA01 FA02 GF19 GG09 JA13 MA24 MA30 5G435 AA17 BB05 BB06 BB12 KK05 KK10 (54) [Title of Invention] Drawing pattern Data generation method, drawing pattern data generation device and functional droplet discharge device having the same, liquid crystal display device manufacturing method, organic EL device manufacturing method, electron emission device manufacturing method, PDP device manufacturing method, electrophoresis Display device manufacturing method, color filter manufacturing method, organic EL manufacturing method, spacer forming method, metal wiring forming method, lens forming method, resist forming method, and light diffuser forming method

Claims (28)

[Claims] 1. A drawing pattern data generation method for generating drawing pattern data for selectively discharging functional liquid droplets from a functional liquid droplet ejection head onto a work on the basis of image data, the image data comprising: Based on the above, the array area of the drawing pattern data is secured, and the drawing image information generated based on the image data is written in the array area to generate the pattern data and output the pattern data in binary. A drawing pattern data generation method, characterized in that the drawing pattern data is generated by. 2. When the functional liquid droplet ejection head has an inclination of a predetermined angle with respect to the printing direction, a shift pattern is obtained by performing a rotational shift process corresponding to the predetermined angle on the pattern data. The drawing pattern data generation method according to claim 1, wherein the drawing pattern data is generated by generating data and outputting the shift pattern data in binary. 3. The functional liquid droplet ejection head has a plurality of nozzles, and the pattern data is set to one corresponding to the plurality of nozzles.
The shift pattern data for each array is generated by performing the rotational shift processing for each array, and the drawing pattern data is generated by binary-outputting the shift pattern data for each array. 2. The drawing pattern data generation method described in 2. 4. When the drawing image information has color information, the color information is written in the pattern data, and the drawing pattern data is binary-output for each color based on the color information. The drawing pattern data generation method according to claim 1, 2, or 3. 5. When the drawing image information has dot size information, the dot size information is written in the pattern data, and the dot size can be controlled in the drawing pattern data based on the dot size information. 5. The drawing pattern data generation method according to claim 1, wherein various parameters are written. 6. When the drawing image information has dot overlap frequency information, the dot overlap frequency information is written in the pattern data, and the drawing pattern data is the maximum multiplexing frequency obtained from the dot overlap frequency information. 6. The drawing pattern data generation method according to claim 1, wherein the drawing pattern data is divided into two and output in binary. 7. A drawing pattern data generation device for generating drawing pattern data for selectively discharging and drawing functional liquid droplets from a functional liquid droplet ejection head onto a work based on image data, said image data And an array area securing unit that secures an array area of the drawing pattern data, and a pattern data generating unit that creates pattern data by writing the drawing image information generated based on the image data in the array area. And a drawing pattern data generating means for generating drawing pattern data by binary outputting the pattern data. 8. When the functional liquid droplet ejection head has an inclination of a predetermined angle with respect to a printing direction, a rotation shift process corresponding to the predetermined angle is performed on the pattern data to obtain a shift pattern. 8. The drawing pattern according to claim 7, further comprising shift pattern generating means for generating data, wherein the drawing pattern data generating means generates the drawing pattern data by binary-outputting the shift pattern data. Data generator. 9. The functional liquid droplet ejection head has a plurality of nozzles, and the shift pattern data generation means performs the rotation shift processing on the pattern data for each array corresponding to the plurality of nozzles. The shift pattern data for each array is generated by performing the above, and the drawing pattern data generation unit generates the drawing pattern data by binary-outputting the shift pattern data for each array. 8. The drawing pattern data generation device according to item 8. 10. When the drawing image information has color information, the pattern data generating means includes means for writing the color information, and the drawing pattern data generating means performs the drawing based on the color information. 10. The drawing pattern data generation device according to claim 7, wherein the pattern data is output in binary for each color. 11. If the drawing image information has dot size information, the pattern data generating means includes means for writing the dot size information, and the drawing pattern data generating means is based on the dot size information. 11. The drawing pattern data generation device according to claim 7, wherein a parameter capable of controlling a dot size is written in the drawing pattern data. 12. When the drawing image information has dot overlap frequency information, the pattern data generating means includes means for writing the dot overlap frequency information, and the drawing pattern data generating means is the dot overlap frequency information. The drawing pattern data generation device according to any one of claims 7 to 11, wherein the drawing pattern data is divided into a maximum number of times obtained from information and binary-outputted. 13. A functional droplet discharge device comprising the drawing pattern data generating device according to claim 7. 14. A method of manufacturing a liquid crystal display device, wherein a plurality of filter elements are formed on a substrate of a color filter by using the functional liquid droplet ejection apparatus according to claim 13, wherein a plurality of the functional liquid droplet ejection heads are provided. A liquid crystal, wherein a plurality of filter elements are formed by selectively introducing the filter material of each color into the substrate, scanning the functional liquid droplet ejection head relative to the substrate, and selectively ejecting the filter material. Manufacturing method of display device. 15. A method of manufacturing an organic EL device, wherein the functional liquid droplet ejection apparatus according to claim 13 is used to form EL light emitting layers on a large number of pixel pixels on a substrate, respectively. Introducing a luminescent material of each color into the droplet discharge head, scanning the functional droplet discharge head relative to the substrate, and selectively discharging the luminescent material to form a large number of the EL luminescent layers. A method for manufacturing a characteristic organic EL device. 16. A method of manufacturing an electron-emitting device, wherein a plurality of phosphors are formed on an electrode by using the functional liquid droplet ejection device according to claim 13, wherein a plurality of the functional liquid droplet ejection heads of each color are provided. An electron-emitting device characterized in that a fluorescent material is introduced, the functional liquid droplet ejection head is relatively scanned with respect to the electrodes, and the fluorescent material is selectively ejected to form a large number of the phosphors. Production method. 17. A method of manufacturing a PDP device, wherein the functional liquid droplet ejection device according to claim 13 is used to form phosphors in a large number of recesses on a rear substrate, wherein a plurality of the functional liquid droplet ejection heads are used. Introducing a fluorescent material of each color into, and scanning the functional liquid droplet ejection head relative to the back substrate to selectively eject the fluorescent material to form a large number of the phosphors. Manufacturing method of PDP device. 18. A method of manufacturing an electrophoretic display device, wherein the functional liquid droplet ejection device according to claim 13 is used to form electrophoretic bodies in a large number of recesses on an electrode, wherein a plurality of the functional liquid droplet ejection heads are used. Introducing electrophoretic material of each color into, and scanning the functional liquid droplet ejection head relative to the electrode to selectively eject the electrophoretic material to form a large number of electrophoretic materials. Method for manufacturing electrophoretic display device. 19. A method of manufacturing a color filter, which comprises using the functional liquid droplet ejection apparatus according to claim 13 to arrange a large number of filter elements on a substrate, the method comprising: The filter material of each color is introduced into the droplet discharge head, the functional droplet discharge head is relatively scanned with respect to the substrate, and the filter material is selectively discharged to form a large number of the filter elements. And a method of manufacturing a color filter. 20. An overcoat film is formed to cover the plurality of filter elements, and after forming the filter elements, a translucent coating material is introduced into the plurality of functional liquid droplet ejection heads, 20. The method of manufacturing a color filter according to claim 19, wherein the functional liquid droplet ejection head is relatively scanned with respect to the substrate, and the coating material is selectively ejected to form the overcoat film. 21. A method of manufacturing an organic EL, comprising a large number of pixel pixels including an EL light emitting layer arranged on a substrate by using the functional liquid droplet discharge apparatus according to claim 13. Introducing a luminescent material of each color into the droplet discharge head, scanning the functional droplet discharge head relative to the substrate, and selectively discharging the luminescent material to form a large number of EL luminescent layers. A method for manufacturing an organic EL, comprising: 22. A large number of pixel electrodes corresponding to the EL light emitting layers are formed between a large number of the EL light emitting layers and the substrate, and a liquid electrode material is formed in the plurality of functional liquid droplet ejection heads. 22. A plurality of the pixel electrodes are formed by selectively introducing the liquid droplet electrode material by scanning the functional liquid droplet discharge head relative to the substrate by introducing the liquid crystal material. The method for manufacturing an organic EL device. 23. A counter electrode is formed so as to cover a large number of the EL light emitting layers, and after forming the EL light emitting layers, a liquid electrode material is introduced into a plurality of the functional liquid droplet ejection heads, 23. The organic E according to claim 22, wherein a droplet discharge head is relatively scanned with respect to the substrate to selectively discharge the liquid electrode material to form the counter electrode.
Manufacturing method of L. 24. A spacer forming method for forming a large number of particulate spacers to form a minute cell gap between two substrates by using the functional liquid droplet ejection apparatus according to claim 13. Introducing a particulate material that constitutes a spacer into the functional liquid droplet ejection head, scanning the functional liquid droplet ejection head relative to at least one of the substrates, and selectively ejecting the particulate material to the substrate. A method of forming a spacer, comprising forming the spacer on the top. 25. A method for forming a metal wiring on a substrate using the functional liquid droplet ejection apparatus according to claim 13, wherein a liquid metal material is introduced into a plurality of the functional liquid droplet ejection heads. A method of forming a metal wiring, wherein the functional liquid droplet ejection head is relatively scanned with respect to the substrate to selectively eject the liquid metal material to form the metal wiring. 26. A method of forming a large number of microlenses on a substrate using the functional liquid droplet ejection apparatus according to claim 13, wherein a lens material is introduced into a plurality of the functional liquid droplet ejection heads. A method of forming a lens, wherein the functional liquid droplet ejection head is relatively scanned with respect to the substrate to selectively eject the lens material to form a large number of the microlenses. 27. A resist forming method for forming a resist having an arbitrary shape on a substrate by using the functional liquid droplet ejection apparatus according to claim 13, wherein a resist material is introduced into a plurality of the functional liquid droplet ejection heads. A method for forming a resist, characterized in that the functional liquid droplet ejection head is scanned relative to the substrate to selectively eject the resist material to form the resist. 28. A light diffuser forming method for forming a large number of light diffusers on a substrate by using the functional liquid droplet discharge apparatus according to claim 13, wherein the plurality of the functional liquid droplet discharge heads are light diffused. A light diffuser, wherein a large number of the light diffusers are formed by introducing a material, scanning the functional liquid droplet discharge head relative to the substrate, and selectively discharging the light diffuser material. Forming method.