JP2003139505A5 - - Google Patents

Description

In this case, it is preferable to use stainless steel as the low thermal conductivity material and to use PTFE resin as the electrical insulation material, and further, by using a water-cooled jacket as the cooling mechanism, the apparatus can be made compact. . Then, by using a vacuum pulse motor as the rotation mechanism, the entire film thickness monitoring device can be disposed in the film forming chamber, and operations such as switching of the quartz oscillator can be reliably performed.

[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 2 is a front sectional view of the crystal oscillation type film thickness monitor sensor head 11 according to the present invention. The film thickness monitor sensor head 11 has 12 crystal plates 12 uniformly mounted on the circumference. ₁ to 12 ₁₂ (12 _X) and stainless steel disc-shaped crystal plate holder 13 for holding a vane-type electrode 14 _{1-14 12} electrically connected to each of the quartz plate _{12 1 ~12 12 (12 X)} (14 _And a ring-shaped electrode holder 15 made of PT FE resin integrally fixed to the quartz plate holder 13, and a central axis of rotation of the rotatable disc 16 comprising the quartz plate holder 13 and the electrode holder 15. A pulse motor for vacuum 18 arranged so that the drive shaft is pivotally mounted on the surface 17, and a water-cooled stainless steel jacket 19 covering the quartz plate holder 13, the electrode holder 15 and the pulse motor 18 for vacuum as a cooling mechanism; Crystal plate holder 13 It comprises and comprises a stainless steel mask 20 which is covered as a heat shielding cover from the film forming direction. The mask 20 is provided with a window 21 capable of looking at the quartz plate 12 _X to be provided to the use environment among the quartz plates 12 _{1 to} 12 ₁₂ , and the film forming material whose film thickness is to be measured is quartz via the window 21. A film is formed on the surface of the plate 12 _X (see FIG. 3). And since the mask 20 is made of stainless steel and has a heat shielding effect, it prevents the radiation heat generated in the film forming process starting thereafter from being conducted to the film thickness monitoring sensor head 11 or during the film forming process. It plays a role of protecting the film thickness monitoring sensor head 11 from substances coming in under vacuum.

[Description of the code]
11 Crystal oscillator type film thickness monitor sensor head 12 _X quartz plate (crystal oscillator)
13 stainless steel quartz plate holder 14 _X winged electrode 15 PT FE resin electrode holder 18 pulse motor for vacuum 19 stainless steel water-cooled jacket