JP2003136013A - Method for manufacturing film laminate, method for manufacturing electro-optical panel, method for manufacturing liquid crystal panel, and method for manufacturing electronic equipment - Google Patents

Abstract

[PROBLEMS] To dramatically improve the wettability of a film material with respect to a substrate, that is, a material to be coated, by devising the timing of ultraviolet irradiation. A method of manufacturing a film stack for forming a film of polyimide or the like on a substrate is provided. This method includes a step P1 of applying a film material to a substrate, a step P2 of irradiating the substrate with ultraviolet rays, and a step P3 of solidifying the film material applied to the substrate. By performing the ultraviolet irradiation step P2 from the start of the application of the film material to the substrate until the film material is solidified, the wettability of the film material can be expressed most effectively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a film laminated body formed by forming a film on a material to be coated such as a substrate, a method for producing an electro-optical panel using the method for producing the film laminated body, The present invention relates to a method for manufacturing a liquid crystal panel using the method for manufacturing the film laminate and a method for manufacturing electronic equipment using the method for manufacturing the electro-optical panel.

[0002]

2. Description of the Related Art At present, a liquid crystal panel is used in a display section of an electronic device such as a mobile phone, a personal digital assistant, and a video camera.
Electro-optical panels such as EL (Electro Luminescence) panels are widely used. Here, in a liquid crystal panel, in general, liquid crystal as an electro-optical material is formed as a liquid crystal layer on a substrate, and an alignment film is formed under the liquid crystal layer with a polyimide resin or the like, and further below it. The acrylic resin or the like may form an overcoat alignment film.

Conventionally, as a method for forming a film with a uniform thickness on a wide area of a substrate surface, there is known a flexographic printing method in which printing is performed by using a plate cylinder around which a flexible plate is wound, that is, a film is formed. Also known is a spin coating method in which a coating solution is dropped on a substrate and the substrate is rotated at a high speed to form a uniform coating film by centrifugal force.

[0004]

However, when a film is formed directly on the surface of a substrate formed of glass or the like, an inorganic material such as a metal oxide film which is a material of the film or an organic material such as polyimide is There is a problem that the wettability to the substrate is low and it is difficult to spread, and therefore it is difficult to form those film materials in a wide area on the surface of the substrate with a uniform thickness.

The present inventor has conducted various experiments in order to solve the above problems, and irradiating the substrate with ultraviolet rays is effective in improving the wettability of the film material with respect to the substrate. It was found that the irradiation timing of ultraviolet rays greatly affects the degree of improvement in wettability.

As a film forming method utilizing ultraviolet irradiation, Japanese Patent Application Laid-Open No. 3-054818 discloses a technique of irradiating a substrate with ultraviolet rays prior to forming a film such as a photoresist. According to this technology,
It is said that the adhesiveness of the resist to the substrate is enhanced, so that it is possible to prevent bubbles from being generated in the resist, and thus to prevent resist defects such as holes and pinholes from being generated in the resist.

However, there is no direct description in this document that UV irradiation improves the wettability of the film material,
Further, it does not mention the relationship between the timing of ultraviolet irradiation and the change in wettability of the film material. According to the experiments of the present inventor, it was found that, according to the above-mentioned literature, when the film was formed on the surface of the substrate after irradiating the substrate with ultraviolet rays, the wettability of the film material could be certainly improved compared to the case where the substrate was not irradiated with ultraviolet rays. However, the degree of improvement was not satisfactory in practical use.

The present invention was made on the basis of the above findings, and the wettability of the film material with respect to the substrate, that is, the material to be coated is remarkably improved by devising the timing of ultraviolet irradiation. The purpose is to

[0009]

(1) In order to achieve the above object, a method for producing a film laminate according to the present invention is a method for producing a film laminate by forming a film on a material to be coated. In the step of applying a film material to the coating material, irradiating the coating material with ultraviolet light, and solidifying the coating material applied to the coating material, The irradiation step is performed during the period from the start of application of the film material to the coating target material to the solidification of the film material.

In the above structure, the "material to be coated" may be, for example, a substrate made of glass, plastic, or the like. Further, as the “membrane”, for example,
Overlay film or alignment film used for liquid crystal panels, coverlay formed on wiring board, protective overcoat film formed on the surface of eyeglasses for vision correction, formed on the surface of automobile window glass A coat layer or the like to be used is conceivable. As the "step of solidifying the membrane material",
For example, drying, firing, or the like, heat treatment performed by placing the substrate on a hot plate, or the like can be considered.

According to the method for manufacturing a film laminate having the above structure,
By irradiating the material to be coated with ultraviolet rays, for example, organic substances adhering to the material to be coated can be decomposed and removed by ultraviolet rays and ozone into volatile substances. As a result, the wettability of the film material with respect to the material to be coated is increased, and the film material can be uniformly spread over a wide area of the surface of the substrate. It should be noted that ozone does not have to be specially supplied, and it can be replaced by oxygen existing in the air.

In particular, in the present invention, the ultraviolet rays are not irradiated before the coating of the film material, but the ultraviolet rays are irradiated between the start of the coating of the film material on the coated material and the solidification of the film material. Therefore, the coating of the film material is performed under the condition that the cleaning effect of the ultraviolet rays and ozone is most effectively received, and therefore, the coating can be performed at the highest wettability of the film material. Therefore, the film material can be spread very uniformly over a large area of the surface of the substrate.

(2) Next, in the method for producing a film laminate according to the present invention, the material to be coated may be a substrate formed of glass or plastic. When the manufacturing method of the present invention is applied when such a substrate is used,
It is considered to be very effective in improving the wettability of the film material.

(3) Next, in the method for producing a film laminate according to the present invention, the film material can be a fluid material. In the present invention, since the film material is supplied to the material to be coated by coating, it is preferable that the material be a fluid material rather than a material made of powder, solid, gas or the like. Thereby, the wettability of the film material can be surely enhanced.

(4) Next, in the method for producing a film laminate according to the present invention, it is desirable that the film material is a material that does not harden even when irradiated with ultraviolet rays. As such materials, not only materials that do not harden at all even when receiving ultraviolet rays, but also some materials that harden by ultraviolet rays,
It also includes materials that do not seem to solidify as a whole. Thereby, the wettability of the film material can be surely enhanced.

(5) Next, in the method for manufacturing a film laminate according to the present invention, it is preferable that the film material is applied as a plurality of dots on the material to be coated in the step of applying the film material. . In this case, the film material can be uniformly spread over a wide area, as compared with the case where the film material is supplied in a large lump state onto the material to be coated.

(6) Next, in the method for producing a film laminate according to the present invention, in the step of applying the film material, the film material can be applied to the material to be coated by an inkjet method. Here, the inkjet method means that a film material as an ink is ejected in a state of fine particles by an inkjet head and a material to be coated is planarly scanned by the inkjet head to thereby form a film material on the material to be coated. This is a supply type coating method.

Several concrete structures for implementing this method are known at present, and all of these methods can be adopted in the present invention. For example, a piezoelectric element which is flexibly deformed by applying a voltage is used. A structure or the like that ejects ink by changing the volume of the ink chamber can be adopted. According to the present invention using the ink jet method, it is possible to freely decide how to apply the film material to the material to be coated, and thus it is possible to easily find the best coating pattern for enhancing the wettability when receiving ultraviolet rays. realizable. (7) Next, in the method for producing a film laminate according to the present invention, it is desirable that the ultraviolet irradiation step be performed simultaneously while the step of solidifying the film material is performed.
In the present invention, it is sufficient that the irradiation of ultraviolet rays is performed from the start of coating of the film material to the end of solidification of the film material. It has been found that the wettability of the film material can be most enhanced at the same time as the chemical treatment, for example, at the same time as firing, at the same time as drying, or while being heated by a hot plate.

(8) Next, in the method for manufacturing a film laminate according to the present invention, in the ultraviolet irradiation step, the material to be coated can be irradiated with ultraviolet rays at an irradiation dose of 12,000 mJ / cm ² . According to the experiments of the present inventor, it was found that the wettability of the film material can be most enhanced at this irradiation amount. It is desirable that the wavelength of the ultraviolet rays is 200 to 350 nm and the irradiation time of the ultraviolet rays is 5 to 15 minutes.

(9) Next, a method of manufacturing an electro-optical panel according to the present invention is a method of manufacturing an electro-optical panel having an overcoat film on a substrate supporting an electro-optical material,
Applying an overcoat film material on the substrate,
It has a step of irradiating the substrate with ultraviolet rays, and a step of solidifying the overcoat film material applied to the substrate, and the ultraviolet ray irradiation step is a step of applying the overcoat film material to the substrate. It is carried out from the start to the solidification of the overcoat film material.

According to the method of manufacturing an electro-optical panel having the above structure, by irradiating the material to be coated with ultraviolet rays, for example, organic substances attached to the material to be coated are decomposed into volatile substances by ultraviolet rays and ozone. Can be removed. As a result, the wettability of the film material with respect to the material to be coated is increased, and the film material can be uniformly spread over a wide area of the surface of the substrate. It should be noted that ozone does not have to be specially supplied,
Oxygen present in the air can be substituted.

In particular, in the present invention, the ultraviolet rays are not irradiated before the coating of the film material, but the ultraviolet rays are irradiated during the period from the start of the coating of the film material to the coated material to the solidification of the film material. Therefore, the coating of the film material is performed under the condition that the cleaning effect of the ultraviolet rays and ozone is most effectively received, and therefore, the coating can be performed at the highest wettability of the film material. Therefore, the film material can be spread very uniformly over a large area of the surface of the substrate.

(10) Next, in the method of manufacturing an electro-optical panel according to the present invention, the electro-optical panel can have an ink repellent layer under the overcoat film. Generally, when an overcoat film is formed on an ink repellent layer, the wettability of the overcoat film with respect to the ink repellent layer is very low. However, the wettability of the overcoat film can be improved by using the present invention in such a case.

(11) Next, in the method of manufacturing an electro-optical panel according to the present invention, the electro-optical material may be liquid crystal, and the overcoat film is formed on the substrate on which a color filter is formed. Can be formed. This configuration relates to a method for manufacturing a liquid crystal panel. In this case, the overcoat film has functions such as flattening the surface of the substrate on which the color filter is formed and protecting the color filter. (12) Next, in the method for manufacturing an electro-optical panel according to the present invention, the overcoat film is a method for manufacturing a film laminate having the above-described configuration, in which the material to be coated is a substrate and the film material is It can be formed by a method for producing a film laminate which is an overcoat film material.

(13) Next, a method of manufacturing a liquid crystal panel according to the present invention is a method of manufacturing a liquid crystal panel having an alignment film on at least one of a pair of substrates sandwiching a liquid crystal layer.
A step of applying an alignment film material to at least one of the pair of substrates, and a step of irradiating the one substrate with ultraviolet rays,
Solidifying the alignment film material applied to the one substrate, the ultraviolet irradiation step, solidification of the alignment film material from the start of application of the alignment film material to the one substrate. It is characterized in that it is performed before.

According to the method of manufacturing a liquid crystal panel having the above structure, by irradiating the substrate with ultraviolet rays, for example, organic substances adhering to the substrate can be decomposed and removed by the ultraviolet rays and ozone into volatile substances. it can. As a result, the wettability of the alignment film material with respect to the substrate is enhanced, and the alignment film material can be uniformly spread over a wide area on the surface of the substrate.
It should be noted that ozone does not have to be specially supplied, and oxygen existing in the air can be substituted.

In particular, in the present invention, the ultraviolet ray is not irradiated before coating the alignment film material, but is irradiated with the ultraviolet ray from the start of the coating of the alignment film material on the substrate to the solidification of the alignment film material. Therefore, it is necessary to apply the alignment film material under the condition that the cleaning effect by ultraviolet rays and ozone is most effectively received, and therefore, the application is performed where the wettability of the alignment film material is maximized. It is possible to do so, so that the alignment film material can be spread very uniformly over a large area of the surface of the substrate.

(14) Next, in the method for producing a liquid crystal panel according to the present invention, the alignment film is a method for producing a film laminate having the above-mentioned structure, wherein the material to be coated is a substrate,
It can be formed by a method for producing a film laminate using the film material as an alignment film material.

(15) Next, a method for manufacturing an electronic device according to the present invention is a method for manufacturing an electronic device including an electro-optical panel, wherein the electro-optical panel has the above-described structure. It can be formed by the manufacturing method of. Here, a liquid crystal panel or the like can be considered as the electro-optical panel.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) FIG. 1 shows one embodiment of a method for producing a film laminate according to the present invention.
In this manufacturing method, the film laminate 1 shown in FIGS. 4A and 4B is manufactured. The film stack 1 includes a substrate 2 as a material to be coated, which is formed of glass, for example.
On the surface of, for example, polyimide, thickness T = 500Å
It is formed by forming the film 3 of. Membrane 3
May be formed directly on the substrate 2, or may be formed after forming an appropriate pattern other than the film 3 on the surface of the substrate 2.

The film laminate 1 having such a structure can be used to perform various functions in various industrial fields. For example, in an electro-optical panel such as a liquid crystal panel, thin films such as an overcoat film and an alignment film are formed on a substrate made of glass or the like. These thin films are shown in FIGS. 4 (a) and 4 (b). Membrane 3 shown
Can be configured by

In FIG. 1, the method for manufacturing a film laminate according to this embodiment is performed by sequentially performing a coating process P1, an ultraviolet irradiation process P2, and a solidification process P3. The coating step P1 is performed using an inkjet head 6 having a plurality of ejection nozzles 4 as shown in FIG. 2, for example.

Specifically, the ink jet head 6 is moved in the main scanning direction in the direction of arrow A and is moved in the sub scanning direction in the direction of arrow B so that the surface of the substrate 2 is scanned by the ink jet head 6 while the ink is ejected from each ejection nozzle 4. The film material M is formed in a predetermined pattern on the substrate 2 by ejecting ink, that is, polyimide as a film material as droplets at a predetermined timing. When the length of the inkjet head 6 in the main scanning direction A is long, the main scanning of the inkjet head 6 can be omitted.

As the predetermined pattern, in the present embodiment, a plurality of dots having a dot diameter D = 0.1 to 0.5 mm are provided with a pitch P = 0.6 to 1.2 mm and a thickness T = 100 to 400.
A pattern arranged in a matrix with a size of about nm is adopted.

The ink jet head 6 can have any structure as long as it can discharge the film material in the form of liquid droplets having a minute diameter. For example, the ink jet head 6 can be structured as shown in FIG. In FIG. 5, the inkjet head 6 has a nozzle plate 7 formed of, for example, stainless steel, a diaphragm 8 arranged to face the nozzle plate 7, and a plurality of partition members 9 that join them together. Nozzle plate 7
The partition member 9 forms a plurality of ink chambers 11 and a liquid pool 12 between the diaphragm 8 and the diaphragm 8. The plurality of ink chambers 11 and the liquid pool 12 communicate with each other via a passage 13.

An ink supply hole 14 is formed at an appropriate position on the vibration plate 8, and an ink supply device 16 is connected to the ink supply hole 14. The ink supply device 16 supplies the polyimide solution as the film material M to the ink supply hole 14. The supplied membrane material M fills the liquid pool 12, and the passage 13
Through to fill the ink chamber 11.

The nozzle plate 7 is provided with nozzles 4 for ejecting the film material M from the ink chamber 11.
An ink pressurizing member 17 is attached to the back surface of the vibrating plate 8 on which the ink chamber 11 is formed so as to correspond to the ink chamber 11. As shown in FIG. 6, the ink pressurizing body 17 has a piezoelectric element 18 and a pair of electrodes 19a and 19b sandwiching the piezoelectric element 18.

The piezoelectric element 18 includes an electrode 19a and an electrode 19
By energizing b, the ink is flexed and deformed so as to project to the outside as indicated by the arrow C, whereby the volume of the ink chamber 11 increases. Then, the film material M corresponding to the increased volume flows into the ink chamber 11 from the liquid pool 12 through the passage 13.

When the piezoelectric element 18 is de-energized, both the piezoelectric element 18 and the diaphragm 8 return to their original shape.
As a result, the ink chamber 11 also returns to its original volume, so that the pressure of the film material M inside the ink chamber 11 rises, and the nozzle 4
The film material M is discharged as droplets Q from. An ink repellent layer 21 made of, for example, a Ni-tetrafluoroethylene eutectoid plating layer is provided in the peripheral portion of the nozzle 4 in order to prevent flight bending of the droplet Q and clogging of the nozzle 4.

When the coating step P1 of FIG. 1 is completed and the polyimide solution as the film material M is formed in a dot matrix form on the surface of the substrate 2 as shown in FIG. 2, the ultraviolet irradiation step P2 of FIG. Done. Specifically, as shown in FIG. 3, the substrate 2 is transported as indicated by an arrow D so as to pass through the region of the ultraviolet rays R emitted from the ultraviolet lamp 22. As a result, for example, the irradiation dose is 12,000 mJ /
The substrate 2 is irradiated with ultraviolet rays of cm ² .

By the irradiation of the ultraviolet rays, the wettability of the film material M with respect to the substrate 2 is enhanced, so that the film material M can be uniformly spread over a wide area of the surface of the substrate 2. It is considered that the reason why the wettability of the film material M is improved is that the organic substances attached to the substrate 2 are decomposed and removed by the ultraviolet rays and ozone into volatile substances. . Note that ozone does not have to be specially supplied, and oxygen existing in the air may be used.

In this embodiment, the ultraviolet rays are not irradiated before the coating of the film material M, but the ultraviolet rays are irradiated onto the substrate 2 after the coating step P1 of FIG. 1 is completed. The film material M can be stretched into a film under the condition that the cleaning effect is effectively received, and therefore, the film-like coating can be performed where the wettability of the film material M is maximized, and thus the film can be applied. The material M can be spread very uniformly over a large area of the surface of the substrate 2.

As described above, by receiving the ultraviolet ray irradiation step P2, the dot matrix film material M is spread over a wide area of the surface of the substrate 2, and then the solidification step P of FIG.
At 3, the solidification process is performed. Specifically, for example, as shown in FIG. 3B, the substrate 2 having the fluidized film material M is heated by the hot plate 23, so that the film material M is solidified and is transferred onto the surface of the substrate 2. It is fixed. As described above, the film laminated body 1 having the uniform polyimide thin film 3 as shown in FIGS. 4A and 4B is formed.

(Modification) In the above embodiment, the film material M is formed in a dot matrix on the substrate 2 as shown in FIG. 2 in the coating step P1 of FIG. 1, but the present invention is such a dot. The present invention is not limited to the case of forming a matrix-shaped coating pattern, but includes the case of coating one or several film materials M on the substrate 2 in a large lump state.

The method of applying the film material M is not limited to the ink jet head method using the piezoelectric element, and an ink jet head method based on another principle can be used. Further, a coating method other than the inkjet head method, for example, a coating method using a dispenser that forms relatively large droplets or fluid droplets can be used.

(Second Embodiment) FIG. 7 shows another embodiment of the method for manufacturing a film laminate according to the present invention. The manufacturing method shown here is different from the manufacturing method shown in FIG. 1 in that in step P1, the coating step and the ultraviolet irradiation step are simultaneously performed.
The solidification step P2 is performed after the completion of those steps.

In this embodiment, in step P1, the process shown in FIG.
The coating process shown in FIG. 3 and the ultraviolet irradiation process shown in FIG. 3 are performed simultaneously. Simultaneously here means that the coating by the inkjet head 6 is the first in the scanning direction B in FIG.
This means that the ultraviolet irradiation step according to FIG. 3 is started by the inkjet head 6 until the application of the last row in the scanning direction B is completed after the start of the row.

The ultraviolet irradiation may be ended immediately after the application of the last row in the sub-scanning direction B by the ink jet head 6 is completed, or after an appropriate time has elapsed from the application of the last row. You can also

(Third Embodiment) FIG. 8 shows still another embodiment of the method for manufacturing a film laminate according to the present invention.
The manufacturing method shown here is different from the manufacturing method shown in FIG. 1 in that after the application step shown in FIG. 2 is performed in step P1 and the coating step is completed, in step P2 in FIG. That is, the irradiation step is performed at the same time. That is, in this embodiment, the irradiation of ultraviolet rays as shown in FIG. 3A can be performed with the substrate 2 placed on the hot plate 23 as shown in FIG. 3B.

It is to be noted that the term "simultaneous" means not only when the ultraviolet irradiation shown in FIG. 3A and the heat treatment shown in FIG. 3B are performed at exactly the same timing from the start to the end, but whichever comes first. It also includes the case where one of the two starts and ends first. According to the experiments by the present inventor, it is found that the wettability of the film material M can be enhanced very effectively when the film material M is solidified and simultaneously irradiated with ultraviolet rays as in the present embodiment. It was

(Fourth Embodiment) FIG. 9 shows an embodiment of a method of manufacturing an electro-optical panel according to the present invention, and in particular, an embodiment of a method of manufacturing a liquid crystal panel which is an example of an electro-optical panel. ing. The liquid crystal panel manufacturing method shown here is a manufacturing method for manufacturing the liquid crystal panel 32 constituting the liquid crystal device 31 shown in FIG. 10, for example. This liquid crystal panel 32 is a COG (Chip On Gl
ass) type liquid crystal panel.

Prior to explaining the manufacturing method of FIG.
First, the liquid crystal device shown in FIG. 10 will be described. Figure 10
In the liquid crystal device 31, the driving IC 33 is mounted on the liquid crystal panel 32 which is a panel structure having the liquid crystal layer L,
Further, it is formed by additionally providing an illumination device 34 as a backlight on the opposite side of the liquid crystal panel 32 from the observation side. The illumination device 34 includes a point-shaped or linear light source 36, and a light guide 37 that receives light from the light source 36 and emits planar light toward the liquid crystal panel 32.

The liquid crystal panel 32 includes a first substrate 38a and a second substrate 38a.
An annular seal material 39 when viewed from the direction of arrow E with the substrate 38b
The liquid crystal layer L is formed by bonding the liquid crystal to each other and enclosing a liquid crystal in a so-called cell gap formed between the first substrate 38a and the second substrate 38b.

The first substrate 38a has a rectangular first base material 41a when viewed from the direction of arrow E, and the color filter 42 is provided on the liquid crystal side surface of the first base material 41a (lower surface of FIG. 10).
Are formed, an overcoat film 43 is formed thereon, a plurality of first electrodes 44a are formed thereon, and an alignment film 46a is formed thereon. A rubbing process as an alignment process is performed on the alignment film 46a. A polarizing plate 47a is attached to the observation side surface (upper surface in FIG. 10) of the first base material 41a by, for example, sticking. On the other hand,
The second substrate 38b is the first base material 41a when viewed from the arrow E direction.
It has a rectangular second base material 41b having an area smaller than that of the second base material 41b, and a semi-transmissive reflective film 48 and a plurality of second electrodes 44b are formed on the liquid crystal side surface (upper surface in FIG. 10) of the second base material 41b. And the alignment film 46b is formed on the alignment film 46b.
A rubbing process as an alignment process is performed on 6b. A polarizing plate 47b is attached to the outer surface (lower surface of FIG. 10) of the second base material 41b by, for example, sticking.

The semi-transmissive reflective film 48 is a reflective film having a function of reflecting a part of the light reaching it and transmitting the remaining part of the light. The semi-transmissive reflective film 48 allows light to pass therethrough, for example. It can be formed by partially providing an opening in the metal reflection film or by reducing the film thickness of the metal reflection film so that light can be partially transmitted.

The color filter 42 has R (red), G (green), and
It is formed by arranging three color elements of B (blue) in a predetermined array when viewed from the direction of arrow E, for example, a stripe array, a delta array, a mosaic array, or the like. An ink repellent layer may be formed on the surface of the black mask in order to enhance the formability of each color element.

The plurality of first electrodes 44a are arranged in parallel with each other when viewed in the direction of arrow E, and are formed in stripes as a whole. In addition, the plurality of second electrodes 44b
Are arranged in parallel to each other as viewed in the direction of arrow E so as to extend in a direction orthogonal to the first electrode 44a, and are formed in a stripe shape as a whole. The first electrode 44a and the second electrode 44b form a plurality of intersections, and these intersections are arranged in a dot matrix when viewed from the arrow E direction. Then, each of these intersections forms a pixel, and a collection of these pixels constitutes a display area.

The first substrate 38a has a portion 49 projecting to the outside of the second substrate 38b, and the surface of the projecting portion 49 has a plurality of external connection terminals 51 arranged in the direction perpendicular to the paper surface.
Also, a plurality of wirings 52 arranged in a direction perpendicular to the plane of the drawing are formed. The external connection terminal 51 is a terminal for establishing electrical connection between the driving IC 33 and an external circuit (not shown). Further, a part of the plurality of wirings 52 is directly connected to the first electrode 44a, and the remaining part is electrically connected to the second electrode 44b on the opposite side by the conductive material 53 mixed in the sealing material 39. As a result, the first substrate 3 which is one of the substrates
The driving IC 33 mounted on 8a can drive the second electrode 44b formed on the second substrate 38b which is the other substrate.

The driving IC 33 has terminals, that is, bumps 54, on its active surface. This drive IC 33 is an ACF
(Anisotropic Conductive Film) 56
Is mounted at a predetermined position on the surface of the overhang portion 49.
The ACF 56 is formed by mixing conductive particles 58 into a thermoplastic or thermosetting resin 57, and is used as a driving IC.
33 bumps 54, external connection terminals 51, and driving I
Each combination of the bump 54 of C33 and the wiring 52 is conductively connected by the conductive particles 58.

The first base material 41a and the second base material 41b.
Is formed of, for example, glass, plastic, or the like. The overcoat film 43 is formed of, for example, an acrylic resin, and flattens the color filter 42 and protects the color filter 42. The first electrode 44a,
The second electrode 44b, the wiring 52 and the external connection terminal 51 are I
It is formed into a predetermined pattern by photolithography using TO as a material. In addition, the alignment films 46a and 46b
Is formed of, for example, polyimide.

Since the liquid crystal device 31 according to the present embodiment is configured as described above, the liquid crystal device 31 can select two types of display forms, that is, a reflective display and a transmissive display. When the amount of external light such as sunlight or room light is sufficient, the external light is taken into the liquid crystal panel 32 through the first substrate 38a, and the taken-in light is the liquid crystal layer L and the second substrate 38b. To reach the semi-transmissive reflective film 48, is reflected by the semi-transmissive reflective film 48, and is supplied to the liquid crystal layer L again.

On the other hand, when the external light such as sunlight is insufficient, the light source 36 of the illumination device 34 is turned on. At this time, the light generated by the light source 36 is received by the light guide 37,
Further, it is emitted as planar light from the surface of the light guide 37 facing the liquid crystal panel 32. This light passes through the semi-transmissive reflection plate 48, and further passes through the second substrate 38b to pass through the liquid crystal layer L.
Is supplied to.

When light is supplied to the liquid crystal layer L as described above, one of the first electrode 44a and the second electrode 44b is supplied with either the scanning signal or the data signal by the driving IC 33, and further, One electrode 44a and second electrode 44
The other of b and the scanning signal or the data signal is supplied to the other of b by the driving IC 33. Thus, by controlling the voltage applied to the liquid crystal forming the liquid crystal layer L for each pixel, the above-mentioned light supplied to the liquid crystal layer L is modulated for each pixel, and the modulated light is polarized by the polarizing plate 47a. By selectively passing the letters, the characters are formed on the outside of the first substrate 38a,
Display images such as numbers and figures.

The liquid crystal panel 32 and the liquid crystal device 31 described above are manufactured through the steps shown in FIG. The series of steps from step P1 to step P5 in FIG. 9 is the step of forming the first substrate 38a in FIG. 10, and the series of steps from step P11 to step P14 in FIG. 9 is the second substrate 38b in FIG.
Is a step of forming. It should be noted that the first substrate forming process of steps P1 to P5 and the second substrate forming process of steps P11 to P14 are performed.
In the substrate forming process, the first substrate 3 shown in FIG.
It is assumed that the plurality of substrates 8a and the second substrate 38b are not simultaneously formed one by one, but a plurality of these substrates are simultaneously formed on one large-area, so-called large-sized substrate.

In step P1 of FIG. 9, color filters 42 for a plurality of first substrates 38a of the liquid crystal panel 32 are formed on the surface of a large-sized substrate. Next, in the process P2,
The overcoat film 43 is formed. The formation of the overcoat film 43 is performed using the method for manufacturing the film laminate shown in FIG. 1, FIG. 7 or FIG. According to these methods,
Since the wettability of the overcoat film 43 with respect to the base material can be enhanced, the overcoat film 43 having a uniform thickness can be reliably formed. Even when the ink repellent layer is formed on the surface of the black mask formed around each color element of the color filter 42, the overcoat can be formed by using the method for manufacturing the film laminate shown in FIG. 1, FIG. 7 or FIG. The wettability of the film 43 can be maintained high.

Next, in step P3 of FIG. 9, the first electrode 44a is formed of ITO, and in step P4, the alignment film 46a is formed. The formation of the alignment film 46a is performed using the method for manufacturing the film stack shown in FIG. 1, FIG. 7 or FIG. According to these methods, the alignment film 46
Since the wettability of a with respect to the base material can be enhanced, the alignment film 46a having a uniform thickness can be reliably formed.

Next, in step P5, the alignment film 46a is rubbed to determine the alignment of the liquid crystal molecules. As a result, a large-sized first substrate on which a plurality of patterns of the first substrate 38a of FIG. 10 are formed is formed.

On the other hand, in step P11, the semi-transmissive reflective film 48 is formed on the second substrate 38b of the liquid crystal panel 32 on the surface of the large-sized base material, and the second electrode 44b is further formed thereon by the IT.
Formed by O. Next, in Step P12, the alignment film 46b is formed. The formation of the alignment film 46b is performed using the method for manufacturing the film laminate shown in FIG. 1, FIG. 7 or FIG. According to these methods, the wettability of the alignment film 46b with respect to the base material can be enhanced, so that the alignment film 46b having a uniform thickness can be reliably formed.

Next, in step P13, the alignment film 46b is subjected to a rubbing treatment in order to determine the alignment of the liquid crystal molecules.
Further, the sealing material 39 is formed of, for example, an epoxy resin by, for example, seal printing. As a result,
A large-sized second substrate on which patterns corresponding to a plurality of zero second substrates 38b are formed is formed.

After the large-sized first substrate and the large-sized second substrate are formed as described above, in the process P21, these large-sized substrates are attached to each other with the sealing material 39 sandwiched therebetween to form a large-sized panel structure. Form body, and then process P22
In, the first cutting, that is, the primary break is performed. By this primary break, a so-called strip-shaped panel structure is formed in which a plurality of liquid crystal panel portions are arranged in a line in which a liquid crystal injection opening provided in a part of the sealing material is exposed to the outside. .

Next, in step P23, liquid crystal is injected into each liquid crystal panel portion from the liquid crystal injection opening of the strip-shaped panel structure, and then the opening is sealed with resin or the like to remove each liquid crystal panel portion. Liquid crystal is enclosed inside. next,
In Step P24, the second liquid crystal panel 32 shown in FIG. 10 is cut out by performing the second cutting, that is, the secondary break.

Thereafter, in step P25, the liquid crystal panel 3
The unnecessary liquid crystal and the like adhering to the outside is removed by washing No. 2, then in step P26, the polarizing plate 47a is attached to the outer surface of the first base material 41a, and the outer surface of the second substrate 41b is further attached. Then, the polarizing plate 47b is attached.

Further, in the process P27, the first substrate 3
The driving IC 33 is mounted on the overhanging portion 49 of 8a by the ACF 56, and the illumination device 34 is attached to the outside of the second substrate 38b, whereby the liquid crystal device 31 of FIG. 10 is completed.

In the above-described liquid crystal panel manufacturing method, that is, in the electro-optical panel manufacturing method, each step of the overcoat film forming step of step P2, the alignment film forming step of step P4, and the alignment film forming step of P12 is performed. Since the method for producing the film laminate shown in FIG. 1, FIG. 7 or FIG. 8 is used, the application should be performed at the highest wettability of the film material for the overcoat film or alignment film. Therefore, the overcoat film and the alignment film can be formed extremely uniformly over a wide area of the surface of the substrate.

(Fifth Embodiment) FIG. 11 shows a mobile phone manufactured by a method of manufacturing a mobile phone which is an example of a method of manufacturing an electronic device according to the present invention. The mobile phone 90 shown here has an exterior case 96 as a housing, which includes various components such as an antenna 91, a speaker 92, a liquid crystal device 100, a key switch 93, and a microphone 94.
It is configured by storing in. Further, inside the outer case 96, a control circuit board 97 having a control circuit for controlling the operation of each of the above-described components is provided. The liquid crystal device 100 is composed of, for example, the liquid crystal device 31 shown in FIG.

In this mobile phone 90, the key switch 9
A signal input through the microphone 3 and the microphone 94, received data received by the antenna 91, and the like are input to the control circuit on the control circuit board 97. Then, the control circuit displays images such as numbers, characters, and patterns on the display surface of the liquid crystal device 1 based on various input data, and further transmits transmission data via the antenna 91.

In the mobile phone 90 shown here, the liquid crystal device 100 is manufactured by using the method for manufacturing a liquid crystal panel shown in FIG. 9, the liquid crystal device 100 is incorporated into an outer case 96, and the liquid crystal device is further manufactured. It is manufactured by electrically connecting the circuit board 97 to 100 via a cable. Regarding the liquid crystal device 100, films such as an overcoat film and an alignment film contained therein are formed by using the method for manufacturing the film laminate shown in FIGS. 1, 7 and 8, and accordingly, those films are not formed. The film is formed to have a uniform thickness. Therefore, the liquid crystal device 100 can stably display high quality images.

(Sixth Embodiment) In order to prevent diffused reflection on the surface of optical glass, a plurality of layers having a refractive index gradually decreasing to approach the refractive index of air are laminated to form a so-called anti-glare layer. It may be done. A plurality of refractive index layers constituting such an anti-glare layer can be obtained by repeating the method for manufacturing a film laminate according to the present invention shown in FIG. 1, FIG. 7 or FIG. 8 by the number of required refractive index layers. Can be formed.

(Seventh Embodiment) Generally, in the field of electronic industry, a wiring board on which a wiring pattern or a circuit is mounted is widely used. Regarding this wiring board, it is required to insulate the surface of the wiring board with a coverlay which is a flexible resin film except for the soldering portion and the contact portion. In this case, the coverlay is required to be formed on the substrate to have a uniform thickness.
Such a coverlay can be formed by using, for example, the method for manufacturing a film laminate according to the present invention shown in FIG. 1, FIG. 7 or FIG.

(Eighth Embodiment) In glasses used for vision correction or the like, it is required to form a protective overcoat film on the surface of glass or plastic as a main component. This overcoat film is required to be formed on the substrate to have a uniform thickness. Such an overcoat film can be formed by using, for example, the method for manufacturing a film laminate according to the present invention shown in FIG. 1, FIG. 7 or FIG.

(Ninth Embodiment) It is required to form a protective overcoat film on the surface of an automobile window glass. This overcoat film is required to be formed on the substrate to have a uniform thickness. Such an overcoat film can be formed by using, for example, the method for manufacturing a film laminate according to the present invention shown in FIG. 1, FIG. 7 or FIG.

(Other Embodiments) The present invention has been described above with reference to the preferred embodiments. However, the present invention is not limited to the embodiments and various modifications are possible within the scope of the invention described in the claims. Can be modified to

For example, in the embodiment shown in FIG. 2, the film material is applied by using the ink jet method. However, instead of the ink jet method, a coating method using a dispenser is used and the dot matrix pattern as shown in FIG. Can also be formed. The application method using a dispenser is that a film material is put in a deformable container and the container is mechanically or physically deformed to cover a droplet having a larger volume than that of the inkjet method. This is a method of supplying it onto the coating material.

Further, the form of applying the film material to the coated material is not limited to the dot matrix array pattern as shown in FIG. 2, and may be a natural printing state printed by flexographic printing. .

The manufacturing method of the liquid crystal device shown in FIG. 9 is merely an example, and when the optical elements constituting the liquid crystal device are changed from the structure shown in FIG. 10, the steps shown in FIG. 9 are changed accordingly. .

Further, in FIG. 10, a simple matrix type liquid crystal panel having a structure not using a switching element is illustrated as one embodiment of the electro-optical panel, but instead of this, a TFD (two-terminal type active element) is used. Thin Film Diod
e) The present invention is also applicable to an active matrix type liquid crystal panel using an element as a switching element, an active matrix type liquid crystal panel using a three-terminal active element TFT (Thin Film Transistor) element as a switching element, and the like. Applicable.

[0087]

According to the present invention, the wettability of the film material with respect to the material to be coated can be enhanced by irradiating the material to be coated such as the substrate with ultraviolet rays. Can be uniformly spread over a wide area. Particularly, in the present invention, instead of irradiating the ultraviolet ray before applying the film material, the ultraviolet ray is irradiated between the start of the application of the film material to the coating material and the solidification of the film material. Therefore, the coating of the film material can be performed under the condition that the cleaning effect by the ultraviolet rays and ozone is most effectively received, and therefore, the coating can be performed at the place where the wettability of the film material is most enhanced. The film material can be spread very uniformly over a large area on the surface of the substrate.

[Brief description of drawings]

FIG. 1 is a process drawing showing an embodiment of a method for manufacturing a film laminate according to the present invention.

FIG. 2 is a diagram showing a coating step which is a main step of the manufacturing method shown in FIG. 1, and FIG. 2B is a sectional view taken along the line BB of FIG.

3A and 3B are diagrams showing main steps of the manufacturing method shown in FIG. 1, in which FIG. 3A shows an ultraviolet irradiation step and FIG. 3B shows a solidification step.

4A and 4B show an example of a film laminated body manufactured by using the manufacturing method shown in FIG. 1, FIG. 4A is a plan view thereof, and FIG. 4B is a cross section taken along line BB of FIG. 4A. The figure is shown.

5 is a perspective view showing an example of an inkjet head used in a coating step of the manufacturing method of FIG.

6 is a diagram showing a cross-sectional structure of the inkjet head according to the line VI-VI of FIG.

FIG. 7 is a process drawing showing another embodiment of the method for manufacturing a film laminate according to the present invention.

FIG. 8 is a process drawing showing still another embodiment of the method for manufacturing a film laminate according to the present invention.

FIG. 9 is a process chart showing an embodiment of a method for manufacturing a liquid crystal panel according to the present invention.

10 is a cross-sectional view showing a liquid crystal device including a liquid crystal panel manufactured using the manufacturing method of FIG.

FIG. 11 is a perspective view showing a mobile phone which is an example of an electronic device manufactured by the method for manufacturing an electronic device according to the present invention.

[Explanation of symbols]

1 membrane stack 2 Substrate (coated material) 3 membranes 4 discharge nozzles 6 inkjet head 22 UV lamp 23 hot plate 31 Liquid crystal device 32 Liquid crystal panel (electro-optical panel) 43 Overcoat film 46a, 46b Alignment film L liquid crystal layer M film material R UV

Continued front page    F-term (reference) 2H090 HB08Y HC05 HC06 HC15                       HC16 HD08 HD14 JA07 JB02                       JB03 JC07 LA04 LA09 LA15                       LA16 LA20 MB01                 4D075 AC07 AE03 BB42Z BB94Z                       CA48 CB01 DA06 DB13 DB31                       DC24 EA07 EA21 EA33 EA45                       EB39 EB56                 4F100 AG00A AK01A AK01B AT00A                       BA02 BA10A BA10B CC00B                       DC21B EH462 EJ082 EJ542                       GB41 JL02

Claims (15)

[Claims] 1. A method for manufacturing a film laminate, which comprises forming a film on a material to be coated, applying a film material to the material to be coated, and irradiating the material to be coated with ultraviolet rays. And a step of solidifying the film material applied to the coating material, the ultraviolet irradiation step, from the start of coating of the coating material of the film material to the solidification of the film material A method for producing a film laminate, which is carried out in between. 2. The method for manufacturing a film laminate according to claim 1, wherein the material to be coated is a substrate formed of glass or plastic. 3. The method for manufacturing a film laminate according to claim 1, wherein the film material is a fluid material. 4. The method for manufacturing a film laminate according to claim 1, wherein the film material is a material that does not harden even when irradiated with ultraviolet rays. 5. The coating material coating method according to claim 1, wherein in the coating step of coating the film material, the film material is coated as a plurality of dots on the material to be coated. Method for producing a film laminate. 6. The film stack according to claim 1, wherein, in the step of applying the film material, the film material is applied to the material to be applied by an inkjet method. Body manufacturing method. 7. The film according to claim 1, wherein the step of irradiating the ultraviolet rays is performed simultaneously while the step of solidifying the film material is performed. Method for manufacturing laminated body. 8. At least one of claims 1 to 7, wherein in the step of irradiating ultraviolet rays, the material to be coated is exposed to ultraviolet rays of 500 mJ / cm ² or more and 100,000 or more.
Irradiating with a dose of mJ / cm ² or less, a method for producing a film laminate. 9. A method of manufacturing an electro-optical panel having an overcoat film on a substrate supporting an electro-optical material, the step of applying an overcoat film material on the substrate, and the step of irradiating the substrate with ultraviolet rays. Solidifying the overcoat film material applied to the substrate, wherein the ultraviolet irradiation step comprises solidifying the overcoat film material from the start of application of the overcoat film material to the substrate. A method for manufacturing an electro-optical panel, characterized in that the method is carried out before. 10. The method for manufacturing an electro-optical panel according to claim 9, wherein the electro-optical panel has an ink repellent layer under the overcoat film. 11. The electro-optical device according to claim 9 or 10, wherein the electro-optical material is liquid crystal, and the overcoat film is formed on the substrate having a color filter formed thereon. Panel manufacturing method. 12. The method for manufacturing a film laminate according to claim 2, wherein the overcoat film is the method for manufacturing a film laminate according to any one of claims 9 to 11, wherein the material to be coated is a substrate. A method for manufacturing an electro-optical panel, which is formed by a method for manufacturing a film laminate using the film material as an overcoat film material. 13. A method of manufacturing a liquid crystal panel having an alignment film on at least one of a pair of substrates sandwiching a liquid crystal layer, the method comprising: applying an alignment film material to at least one of the pair of substrates; Having a step of irradiating with ultraviolet light, and a step of solidifying the alignment film material applied to the one substrate, the ultraviolet irradiation step, from the start of the application of the alignment film material to the one substrate A method for manufacturing a liquid crystal panel, which is performed until the alignment film material is solidified. 14. The alignment film according to claim 13,
The method for producing a film laminate according to any one of claims 2 to 8, wherein the film is formed by the method for producing a film laminate using a substrate as a material to be coated and an alignment film material as a film material. Liquid crystal panel manufacturing method. 15. A method of manufacturing an electronic device including an electro-optical panel, wherein the electro-optical panel is formed by the method of manufacturing the electro-optical panel having the structure according to any one of claims 9 to 12. And a method of manufacturing an electronic device.