JP2003112103A - Coating apparatus, coating method, and apparatus and method for producing color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating apparatus, a coating method, a color filter production apparatus, and a color filter production method capable of providing a high film thickness precision in a coating width direction, causing no solidification and accumulation of a coating liquid in slopes of cut and rising parts and in edges of step parts, preventing stripe-like defects of a coating film even if a large number of substrates are coated one by one. SOLUTION: The coating apparatus has a spraying port extending in one direction for spraying a coating liquid to a substrate positioned oppositely and has a length of the edge face in the longitudinal direction in which the spraying port is formed made longer than the length of the spraying port in the longitudinal direction by 0 to 2 mm in each end side and also has inclined faces continuous to the edge face at 5 to 90 degree to the edge face in both ends sides in the longitudinal direction of the edge face.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention is preferably used in the field of manufacturing color filters for liquid crystal displays, optical filters, coating films and the like.
The present invention relates to an applicator and a coating method capable of preventing deterioration in film thickness accuracy due to wetting and spreading in the coating width direction, and a color filter manufacturing apparatus and manufacturing method using the same.

[0002]

2. Description of the Related Art As a means for uniformly applying a coating liquid in the width direction, there is a die coater for discharging the coating liquid from a coating device having a slit-shaped discharge port to a base material at a constant distance, for coating a film or the like. It is applied to the continuous base material of (1) and the single-wafer base material such as glass. By the way, when a low-viscosity coating liquid is applied using a die coater, the coating liquid discharged from the discharge port of the applicator spreads through the narrow gap between the base material and the applicator due to the capillary phenomenon, and the actual discharge port is applied. It will be applied in a wider range than. In this case, the coating film at the end portion in the coating width direction has a film thickness extremely reduced due to the wetting and spreading, and a predetermined film thickness accuracy cannot be obtained. As an applicator for preventing this wetting and spreading in the application width direction, Japanese Patent Application Laid-Open No. 6-1703.
06 and Japanese Patent Application Laid-Open No. 9-131560. According to these, a notch or a step is provided at the end of the applicator tip surface including the discharge port, so that the wetting and spreading between the base material and the applicator is stopped at a certain place, and To prevent the coating liquid from wrapping around.

[0003]

However, the applicator of the invention described above is sufficient to prevent the coating liquid from wrapping around the back surface of the base material, but it is most suitable for notches or stepped portions. Since the shape is not clearly defined, wetting and spreading of the coating liquid cannot be completely suppressed within a narrow range, and high film thickness accuracy cannot be obtained at the end portion in the coating width direction. Further, in the application of a sheet-shaped base material, before or after the application of each sheet, a step of removing and cleaning the application liquid adhering to the discharge port is necessary, but in order to prevent this wetting and spreading, In the applicator having a notch at the end and a step, it is difficult to perform cleaning.Therefore, the notch, or the coating solution remains at the step, and the coating liquid that remains remains solidifies as the number of coatings is accumulated,
By accumulating and contacting the coating during application,
Causes streak defects on the coating film.

The present invention has been made in order to solve the above-mentioned problems, and an object thereof is to define an optimum shape of a cutout portion at the end of an applicator so as to spread wet in a short section. To achieve high film thickness accuracy at the edges in the coating width direction, and even when a large number of single-wafer substrates are coated, solidification / accumulation of coating liquid occurs at the edges of the cutouts or steps. It is an object of the present invention to provide an applicator and a coating method capable of preventing streak defects on a coating film, and a color filter manufacturing apparatus and a manufacturing method without performing the above process.

[0005]

The above objects can be achieved by the following inventions. An applicator according to the present invention is an applicator having a discharge port extending in one direction for discharging a coating liquid to a substrate located opposite to the base, and the discharge port is formed in a longitudinal direction of a front end surface. The length is 0 to 2 mm longer at one end than the length in the longitudinal direction of the discharge port, and further, both end portions in the longitudinal direction of the tip end face are connected with slopes forming an angle of 5 to 90 degrees with respect to the tip end face. It is characterized by

Here, the present applicator is characterized by satisfying the following requirements a and b. The cross section of the tip surface perpendicular to the discharge port longitudinal direction and the cross section of the inclined surface perpendicular to the discharge port longitudinal direction have substantially the same length in the coating direction. B. It is preferable that the cross section of the tip surface perpendicular to the longitudinal direction of the ejection port and the cross section of the inclined surface perpendicular to the longitudinal direction of the ejection port have substantially the same angle with respect to adjacent surfaces in the coating direction.

The color filter manufacturing apparatus of the present invention is characterized by manufacturing a color filter by using the applicator according to the first or second aspect. The coating method of the present invention, while relatively moving the applicator according to claim 1 and the base material located facing the discharge port,
The coating liquid is discharged from the discharge port to form a coating film on the surface of the base material. Here, before or after forming the coating film on the surface of the base material, the cleaning means is started to move in the ejection port longitudinal direction from a position distant from the tip surface in the ejection port longitudinal direction, It is preferable to remove the applied coating liquid from the applicator.

The color filter manufacturing method of the present invention is characterized in that a color filter is manufactured by using the coating method according to the fourth or fifth aspect. According to the applicator and the coating method according to the above invention, the position from the end of the applicator tip surface including the discharge port to the slope, the shape is properly defined, so that the wetting spread in the coating width direction is short. It can be reliably prevented, and high film thickness accuracy can be obtained at the end of the coating width. Further, even in the case of coating a sheet-shaped substrate, since the shape of the tip surface including the discharge port of the applicator and the above-mentioned notch, or the sloped surface corresponding to the step portion is properly defined, the coating remaining on these portions It is possible to completely remove the liquid by cleaning, and as a result, it is possible to prevent the coating liquid from solidifying and accumulating at the edge of the end face, and to prevent streak defects on the coating film. Furthermore, according to the color filter manufacturing apparatus and manufacturing method of the above invention, a coating film surface without streaks can be formed with high film thickness accuracy by using the coating device and coating method of the above invention, and thus a high quality color filter can be manufactured. .

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a slit die 10 which is an example of an applicator of the present invention, and a discharge port 20
FIG. 4 is a schematic perspective view showing the above.

As shown in FIG. 1, the slit die 10 is
The backup lip 11 is arranged on the upstream side in the base material conveying direction, the doctor lip 12 is arranged on the downstream side in the base material conveying direction, the spacer 13 is sandwiched between them, and they are connected by bolts 15. The discharge port 20 is a land portion 18 surrounded by the backup lip 11 and the doctor lip 12.
It is formed at the tip of (hatched portion). In addition, this land part 1
Since the spacer 13 is cut out in the region 8 (hatched portion), the gap width of the land portion 18 is equal to the thickness of the spacer 13.

When the slit die 10 is used for coating, the coating liquid is introduced from the coating liquid inlet 16 provided on the backup lip 11 side, and then the internal liquid reservoir 17 (indicated by the two-dot chain line). ), Is spread in the coating width direction, and then flows out from the discharge port 20 via the land portion 18.

Next, an example of application of this slit die 10 to a die coater will be described. FIG. 2 is a schematic front view when the slit die 10 is attached to the die coater 100, and FIG. 3 is a schematic side view of the die coater 100. Die coater 100
Is a slit die 10, a die cleaning device 120 for cleaning the slit die 10 before or after coating, a substrate holder 130 for holding the substrate 1 to be coated, and a substrate holder 130.
It is composed of a base 140 on which is mounted, a support 150 for supporting and raising and lowering the slit die 10, and a liquid feeding unit 160 for supplying the coating liquid to the slit die 10.

Here, the slit die 10 is attached to a gate-shaped support 150 through a raising / lowering movement mechanism (not shown) so that it can be raised and lowered. In addition, the substrate holding table 130 is disposed below the slit die 10 in the substrate moving directions 131A and 131B.
It is attached to the base 140 through a reciprocating mechanism (not shown) so that it can move straight. During coating, the substrate 1 is held on the substrate holder 130 by vacuum suction, and the coating liquid is supplied to the slit die 10 by the liquid feeding unit 160.

The die cleaning device 120 is composed of a cleaning tool 121 for cleaning the front end surface 21 of the slit die 10 and a cleaning tool holding member 122.
Is attached to the column 150 through a reciprocating mechanism (not shown) so that it can move linearly in the coating width directions 123A and 123B.

By moving the cleaning tool holding member 122 in the direction 123A while bringing the cleaning tool 121 into contact with the tip surface 21, the excess coating liquid adhering to the tip surface 21 is scraped off and removed. The removed coating liquid is sucked by a suction / drainage device such as a vacuum pump (not shown).
The liquid is removed and further sent to a waste liquid tank or the like (not shown).

Looking again at the slit die 10 of FIG.
In the front end surface 21 having the discharge port 20, the discharge ports are extended outward in the discharge port longitudinal direction from the discharge port both ends 20R and 20L.
Starting from a position separated by the round-up spacing distance d, the discharge-portion longitudinal directions X _R , X _L and θ _R , θ _L (hereinafter, round-up angle) are angled up to the depth h, and the rounded-up slope 30R, 30L is formed. The discharge port-rounded up separation distance d is 0 to 2 mm, more preferably 0 to 1 m.
m, depth h is 0.1 mm or more, more preferably 0.3 m
m or more, and the rounding angles θ _R and θ _L are 5 to 90 degrees,
It is more preferable to set it in the range of 10 to 90 degrees, which prevents the coating liquid from spreading to the outside of the discharge port in a narrow gap (hereinafter referred to as a clearance) between the tip surface 21 and the base material during coating. . Note that the rounding-up angles θ _R and θ _L are 9
It is difficult to set it to 0 ° or more because of the structure of the slit die.

The influence of the dimensions of the rounded-up slope portions 30R and 30L on the coating film thickness distribution will be described with reference to FIGS. FIG. 4 is a cross-sectional view in the coating width direction when coating is performed using the slit die 10 described above, and FIG. 5 shows that the discharge port to the round-up separation distance d is 2 mm or more, and the round-up angles θ _R and θ _L are Cross-sectional view in the coating width direction when coating is performed using the slit die 43 of 5 to 90 degrees, FIG.
The round-up separation distance d is 2 mm or less, but the round-up angles θ _R and θ _L are coating cross-sectional views in the coating width direction when coating is performed using the slit die 45, and FIG. It is a film thickness distribution diagram which shows film thickness distribution typically.

As shown in FIG. 4, the coating liquid discharged from the discharge port having the length L forms a pool (hereinafter, bead) 19 of the coating liquid between the clearances C.
Since the clearance C becomes large at R and 30L, it does not spread in the application width direction. The slit die 10 is
Since the amount of the coating liquid discharged from the discharge port is designed to be uniform over the length L, the coating width W on the base material 1 becomes equal to the discharge port length L, so that As shown by the solid line (70), a highly accurate film thickness distribution can be obtained except for the range L ₀ of 5 to 10 mm from the end which becomes the non-product portion in the width direction.

Next, referring to FIG. 5, this slit die 4
Since the coating liquid discharged from No. 3 has a discharge port-rounded up separation distance d of 2 mm or more, a narrow clearance C is maintained at the discharge port end portions 44R and 44L continuing to the outside in the coating width direction of the discharge port, and due to the capillary phenomenon. Wet and spread. As a result, the actual coating width W becomes wider than the discharge port length L, and as shown by the wavy line (71) in FIG. 7, the coating width end portion has a film thickness smaller than that of the coating width central portion due to wetting and spreading. It tends to be extremely low.

Further, as shown in FIG. 6, in the slit die 45, since the rounding-up angles θ _R and θ _L are 5 degrees or less, the rounding-up slope portion 46 which is outside the ejection port in the coating width direction is shown.
In R and 46L, the clearance does not become much larger than immediately below the discharge port, and the coating liquid wets and spreads in the regions of the rounded up slope portions 46R and 46L due to the capillary phenomenon. As a result, the actual coating width W becomes wider than the discharge port length L, and as shown by the wavy line (71) in FIG. Tends to decline.

Although not shown, even when the rounding-up depth h of the slit die 10 shown in FIG. 1 is set to 0.1 mm or less, a sufficiently large clearance is provided outside the rounding-up slope portions 30R and 30L with respect to immediately below the discharge port. Since it cannot be ensured, the coating liquid wets and spreads in the region of the sloped-up portion due to the capillary phenomenon, and as shown by the wavy line (71) in FIG. .

Therefore, the discharge port of the slit die 10
Notch separation distance is 2 mm or less, more preferably 1 mm
Hereafter, by setting the notch angle to 5 degrees or more, more preferably 10 degrees or more, and the cut-up depth h to 0.1 mm or more, more preferably 0.3 mm or more, it is possible to ensure wet spreading in the coating width direction during coating. The thickness can be suppressed to a range of 0 to 2 mm to prevent the film thickness from decreasing due to the wetting and spreading of the end portion in the coating width direction, and high film thickness accuracy can be achieved.

Next, an application example of the slit die 50, which is the applicator of another embodiment of the present invention, to the die coater 100 will be described with reference to FIGS. 2, 3, and 8 to 11. FIG. 8 is an enlarged schematic perspective view of a rounded-up slope portion at one end of the slit die 50, and FIGS. 9 to 11 are sectional views in the coating direction showing the positional relationship between the slit die 50 and the cleaning tool 121.

First, the structure of the slit die 50 will be described with reference to FIG. Similar to the slit die 10, the slit die 50 has a backup lip 55 on the upstream side in the substrate transport direction and a doctor lip 56 on the downstream side in the substrate transport direction.
1 is formed. The slit die 1 of FIG. 1 described above
The difference from 0 is that the tip surface 53 and the notched slope portion 60R
That is, the length Y of the tip portion in the coating direction (hereinafter referred to as the tip width) and the angles θ _a and θ _b (hereinafter, the adjacent surface angle) formed by the tip portion and the adjacent surface in the coating direction are the same. Although not shown, the rounded-up slope portion 60L has a shape similar to that of the rounded-up slope portion 60R, which is symmetrically formed at the opposite end in the coating width direction.

Next, the front end surface 53 of this slit die 50.
The cleaning tool 121 for removing the coating liquid attached to the will be described in detail. As shown in FIG. 9, the cleaning tool 121 for cleaning the tip surface 53 of the slit die 50 has a bottom 124 having a length a which is substantially the same as the tip width Y, and the adjacent surface angles θ _a and θ _{b of the} slit die. The hypotenuses 125a and 12 that are connected at the same angle
It has a cross-sectional shape having 5b, and has a shape capable of closely adhering to the vicinity of the front end surface 53.

More preferably, in order to enhance the ability of removing the coating liquid, the contact portion P of the cleaning tool 121 shown in FIG. 3 is made to contact the tip surface 53 in a substantially linear contact in the coating width directions 123A, B. , Scrape off the coating liquid. Furthermore, as shown in FIG. 9, the contact height Z of the oblique sides 125a and 125b is 2 mm or more in order to prevent the slope of the coating liquid from rising. Furthermore, although not shown, a cleaning liquid is connected to the cleaning tool by supplying a lubricating liquid, such as an organic solvent, which is most suitable for each coating liquid, to the adjacent surface that is continuous from the tip to the coating direction. 121 slit die 50
If it is slidably contacted with, the coating liquid can be prevented from remaining and solidifying on the adjacent surface.

Here, referring to FIG. 3, when the cleaning tool 121 is moved in the coating width direction 123A while being in contact with the tip surface 53, the height between the rounded up slope portions 60R, 60L and the tip surface 53 is increased. Since there is a change, the cleaning tool 121 and the cleaning tool holding member 122 are preferably connected via an elastic member such as a spring or rubber so that the cleaning tool 121 can move up and down while following the height change.

The material of the cleaning tool 121 is preferably a polymer resin so as not to damage the slit die 50, and more preferably the front end surface 53 and the rounded-up slope portions 60R, 6R.
An elastic resin such as silicon rubber, ethylene propylene rubber, or fluororubber is preferable so that it can be adhered to 0 L.

Then, the cleaning tool 121 is attached to the slit die 50.
In the step of contacting and moving the tip end surface 53 of the cleaning tool 121 to scrape and remove the coating liquid, cleaning is performed by setting the movement start position of the cleaning tool 121 to the rounded up slope portion 60R or to the outside of the rounded up slope portion 60R in the coating width direction. Since the tool 121 and the tip end portion 63 of the rounded-up slope portion 60R have the same shape, FIG.
As shown in, the cleaning tool 121 is always cut out on the sloped surface 60R.
To the tip surface 53, it can be moved in a close contact with the edge portions 61R and 61L, and the residual wiping can be prevented, so that a stripe defect does not occur on the coating surface.

When an elastic body such as rubber is used for the cleaning tool 121, the cleaning tool is elastically deformed during movement and the adhesion is improved, so that the tip surface 53 and the rounded-up slope portions 60R, 6R, 6R.
The difference between the tip width Y at 0L and the angles θ _a and θ _{b of the} adjoining surfaces in the coating direction can be allowed within a range of ± 20%.

On the other hand, like the die 10 shown in FIG. 1, the length y in the coating direction of the tips of the rounded-up slopes 30R and 30L.
FIG. 10 shows the case where (the tip width) is larger than the tip width y _{0 of the} tip surface including the ejection port. Here, since the length a of the bottom side of the cleaning tool is smaller than the tip width y of the rounded up slope section 30R in the rounded up slope section 30R at the cleaning start position, the cleaning tool 121 and the tip end of the rounded up slope section 30R are separated. There is a gap between them. In this state, the cleaning tool 121 is moved to clean the front end surface 21.
It is impossible to completely remove the applied coating liquid at the edge portion that is the boundary between the tip surface 21 and the tip surface 21. As a result,
If the number of applied sheets is increased, the rounded-up slope portion 30R and the tip end surface 21
The coating liquid remains without being scraped off in the vicinity of the edge portion which is the boundary with, and solidification and deposition of the remaining coating liquid occur,
This deposit contacts the substrate during coating, causing streak defects in the coating.

Further, FIG. 11 shows a case where the adjacent surface angles θ _a and θ _b of the rounded-up slope portion are smaller than that of the tip surface including the discharge port.
4. The oblique sides 125a and 125b do not come into contact with the tip end portion 63a of the rounded-up slope portion of the slit die. As a result, as in the case of FIG. 10 described above, the coating liquid remains in the vicinity of the edge portion of the boundary between the rounded-up slope portion and the tip end face including the discharge port during cleaning and is not scraped off. Solidifies and deposits, and this deposit contacts the substrate during application,
Causes streak defects in the coating film.

The processing accuracy of the rounded-up slope portion of the applicator described above is not particularly limited, but the maximum surface roughness is taken into consideration in consideration of the cleaning property using the cleaning tool and the wear resistance of the cleaning tool. It is preferably 2 μm or less. The edge portions 61R and 61L of the rounded-up slope portion are not particularly limited, but are 10 μm in consideration of the wear resistance of the cleaning tool.
It is preferable to provide the above R.

In the above description, the application example with the slit die has been described, but the present invention can be applied to any applicator as long as the discharge port extends in one direction. Further, the number of ejection ports is not limited to one, and an applicator having a plurality of ejection ports may be used.

Next, an embodiment of the coating operation using the slit die 50 will be described with reference to FIGS. 2 and 3. First, the origin return of each operating portion in the die coater 100,
By driving the liquid feeding unit 160, residual air inside the slit die 50 is discharged, and after the so-called air venting operation for filling the slit die 50 with the coating liquid is completed, the following coating operation is performed.

(1) When a coating start command enters a controller (not shown), the substrate 1 is set on the substrate holder 130 by a loader device (not shown) and suction-held. Further, in parallel with this, the liquid feeding unit 160 is driven to discharge the tip die 53 of the slit die 50 to such an extent that it is wet with the coating liquid,
Meanwhile, the die cleaning device 120 is driven to drive the cleaning tool 12
1 is moved in the coating width direction 123B below the slit die 50 and stopped below the rounded-up slope portion 60R (hereinafter, the cleaning start position). Next, the cleaning tool 121
The slit die 50 is lowered so that the slit die 50 comes into close contact with the raised slope portion 60R, and then the cleaning tool 121 is applied in the coating width direction 12
By moving in the 3A direction, the coating liquid adhering to the ejection port 51 and its peripheral portion is scraped off. In addition, the cleaning tool 121 is moved beyond the rounded-up slope portion 60L until it reaches the end of the slit die 50.

(2) After the substrate setting step and the slit die 50 cleaning step are completed, after the substrate holding table 130 is moved so that the coating start position of the substrate 1 is located below the slit die 50. , The substrate is moved linearly in the substrate moving direction 131A at a predetermined coating speed. Almost simultaneously with the start of this straight movement, the liquid feeding unit 160 is driven,
The coating liquid is discharged from the slit die 50 onto the substrate so as to have a predetermined film thickness. Then, when the coating end portion of the substrate 1 is located substantially below the slit die 50, the liquid feeding unit 1
60 is driven to stop the discharge of the coating liquid from the slit die 50, and at the same time as this, the slit die 5
Retract 0 upwards.

(3) When the above coating process is completed, the substrate holder 130 is moved in the substrate moving direction 131A, and when the end point is reached, the substrate 1 is taken out by an unloader device (not shown), and a downstream device is provided. Hand over to. Further, at the same time as the substrate taking out step, the die cleaning device 12
0 to drive the cleaning tool 121 down the slit die to 1
23B, and stop at the cleaning start position. Further, after sucking the coating liquid into the liquid feeding unit 160 for the next coating, the coating liquid is slightly discharged and the tip surface 53 is wetted with the coating liquid.

(4) When the above substrate taking-out step is completed, the substrate holder 130 is moved in the substrate moving direction 131B.
The substrate is moved to the first substrate receiving position at high speed, and the substrate setting step (1) is started. Simultaneously with this substrate setting step, the slit die 50 is lowered so as to come into contact with the cleaning tool 121, and then the cleaning tool 121 is applied in the coating width direction 12.
By moving in the 3A direction, the coating liquid adhering to the ejection port 51 and its peripheral portion is scraped off and removed. The cleaning tool 121
Touches and moves over the rounded-up slope portion 60L until it reaches the end of the slit die 50. Above (2)-(4)
By repeating the above process, the coating film is sequentially formed on the substrate.

According to the coating method described above, the slit die 50 to be used is the end portion of the tip surface 53 in the discharge port longitudinal direction, and the round-up angles θ _R and θ _{L of the} slopes connected to the tip surface are 5 to 5.
Since the discharge port-rounded up separation distance d is 90 mm or less, and the discharged coating liquid is rounded up sloped portion 60R.
Further, immediately before 60 L, the wetting and spreading due to the capillary phenomenon is suppressed, and the reduction in the film thickness at the end portion in the coating width direction can be prevented.

Further, the front end surface 53 and the rounded-up slope portion 60
At the tip 63 of R and 60L, the tip width Y and the adjacent surface angle θ
_With respect to the slit die 50 having substantially the same _a and θ _b , the cleaning tool 12 is applied before and after the application and before the portion wetted by the application liquid.
1 starts contact movement so as to be in close contact with the slit die 50, and scrapes and removes the coating liquid. Therefore, even when a large number of coatings are performed, the edge portions 61R and 61L of the rounded-up slope portions 60R and 60L are In addition, since wiping residue is prevented and solidification and accumulation of the coating liquid are eliminated, streak defects on the coating film do not occur.

The coating method described above is for coating a single glass substrate, but for coating a continuous base material such as a film which has no discharge port cleaning operation during coating. Also, if the coating solution is continuously discharged using the applicator of the form shown in FIG. 1 or FIG. 8, the shape of the tip of the slit die is properly configured. The spread of wetting due to the capillary phenomenon is suppressed between and, and high film thickness accuracy can be obtained even at the end portion.

The coating liquid preferably used in the present invention has a viscosity of 50 [mPa · s] or less, more preferably 20 [mPa · s] or less, and a surface tension of 70 [mN / m].
The coating liquid having a low viscosity and a surface tension of 50 [mN / m] or less is more preferable. The present invention also provides a coating liquid for each pixel of black matrix, RED, GREEN, and BLUE used in the manufacturing process of a color filter,
In addition, a high effect can be obtained for the resist liquid and the overcoating agent, especially for the photosensitive acrylic coating liquid for each pixel. Further, the coating thickness is 1 to 500 μm, more preferably 5 μm to 100 μm, and the coating speed is 0.1 m /
Min-10 m / min, more preferably 1 m / min-6 m / min,
The clearance between the base material and the applicator is 40-300μ
m, more preferably in the range of 60 to 200 μm.

[0044]

Example 1 On a 360 × 465 mm, 0.7 mm thick non-alkali glass substrate, the pitch is 254 μm in the width direction of the substrate, the pitch is 85 μm in the longitudinal direction of the substrate, the line width is 20 μm, and the number of RGB pixels is Is 4800 (longitudinal direction of substrate) x 1200 (width direction of substrate), diagonal length is 20 inches (305m in width direction of substrate)
A black matrix film having a lattice shape of m and 406 mm in the longitudinal direction of the substrate and a thickness of 1 μm was formed. The black matrix film used titanium oxynitride as a light shielding material and polyamic acid as a binder.

Subsequently, the particles on the substrate were removed by wet cleaning, and propylene glycol monomethyl ether acetate (PGMEA) and ethyl 3-ethoxypropionate (EEP) were used as solvents to obtain a solid content concentration of 20.
%, And the viscosity of the photosensitive acrylic RED coating solution for color filters adjusted to a viscosity of 4.4 mPa · s was measured with a die coater 100 shown in FIGS. 2 and 3 to measure the distance (clearance) between the die and the substrate. 100 μm, coating speed 3
It was applied with a thickness of 10 μm under the application conditions of m / min.

The slit die 50 (see FIG. 8) used here has one discharge port having a length of 330 mm and a gap of 100 μm, and further has a width (Y) of the tip surface including the discharge port.
Was 1 mm. In addition, at both ends of the slit die in the coating width direction, the discharge port-rounded up separation distance (d) is 1 m.
m, rounded up angle (θ _R , θ _L ) is 10 degrees, width of the tip surface (Y) is 1 mm, adjacent surface angle (θ _a , θ _b ) in the coating direction of the tip surface and the rounded up slope is 45 degrees. .

As the die discharge port cleaning device, one equipped with one cleaning tool made of silicon rubber was used. The contact portion of the cleaning tool with the slit die has a bottom length (a) of 1 mm so as to match the tip shape of the slit die as shown in FIG.
Then, at both ends, the hypotenuse (12 mm
5a, 125b) has a continuous cross-sectional shape, and the contact length between the cleaning tool and the tip surface in the discharge port longitudinal direction is 1 mm.

After coating using a slit die having the above shape, it was vacuum dried at 90 ° for 30 seconds and then exposed and developed to leave a color coating film only on the RED pixel portion. The same color coating film was formed for GREEN and BLUE by using the same die coater and coating conditions as above. Here, the green coating solution had a solid content concentration of 17% and a viscosity adjusted to 3.5 mPa · s, and the BLUE coating solution had a solid content concentration of 18% and a viscosity of 3.8 mPa · s. The adjusted one was used.

After forming the RED, GREEN, and BLUE pixel films, heating was performed for 30 minutes on a hot plate at 260 ° C. to perform curing. Finally, ITO was deposited by sputtering. Through the above steps, 100 color filters were continuously formed. In all coatings, wetting spread at the edge was 1mm, resulting in a coating width of 332m.
m, and the film thickness unevenness after drying is outside the product 10
A uniform film thickness distribution of 0.05 μm was obtained except for mm. After coating 100 sheets, the tip surface including the discharge port of the slit die was observed, and no solidification or accumulation of the coating liquid was observed. Further, the obtained color filter had a uniform chromaticity over the entire surface of the substrate and was satisfactory in terms of quality.

Example 2 Using the slit die 10 of FIG. 1, the round-up angle (θ _R , θ _L ) of the end of the discharge port is 10 degrees, and the width of the tip surface is 1 mm (y ₀ ) at the discharge port. In the rounded-up slope portion, the die coater 100, the coating liquid, the coating conditions, and the cleaning tool, which are exactly the same as those in the first embodiment, are used except that they are gradually expanded to 3 mm (y). It was created.

In all of the coatings, the spread of wetting at the end was suppressed to 1 mm or less, but after the number of sheets exceeded 50 to 60, the edge of the boundary between the tip surface including the discharge port of the slit die and the rounded-up slope portion was exceeded. The solidified material of the coating liquid deposited on the part contacted the coating film on the substrate, causing streak defects. The obtained color filter was also inferior in quality due to color unevenness caused by the above-mentioned streak defects at the end portions in the coating width direction.

Comparative Example 1 100% under the same conditions as in Example 2 except that a rounded-up slope portion is formed from a position where the slit die 10 shown in FIG.
I made a sheet of color filter. In all applications,
Wetting spread of 3 mm on one side was observed at one end, and this caused a decrease in film thickness at the end in the coating width direction, and unevenness of film thickness was 0.3 μm even if the end 10 mm outside the product was excluded. Further, after exceeding 50 to 60 sheets, the solidified material of the coating liquid deposited on the edge portion of the boundary between the front end surface including the discharge port of the slit die and the rounded-up slope portion was brought into contact with the substrate to cause streak defects. . The obtained color filter was also inferior in quality due to a decrease in film thickness at the end portion in the coating width direction and uneven color due to streaks.

[0053]

As described above, in the applicator of the present invention and the coating method using the same, the position and shape of the slope in the longitudinal direction of the discharge port of the applicator with respect to the tip surface are properly defined. Further, the wetting and spreading of the coating liquid due to the capillary phenomenon between the base material and the coating device can be suppressed, and high film thickness accuracy can be achieved even at the end portion in the coating width direction.

Also in the coating of the single-wafer substrate, since the shape of the tip surface including the discharge port of the applicator and the above-mentioned notch, or the sloped surface corresponding to the step portion is properly defined, it is possible to perform coating every time. Since it is possible to completely remove the coating liquid remaining on the tip surface of the applicator by cleaning and the coating liquid does not remain at the edge portion, streak defects on the coating film due to solidification and accumulation of the coating liquid can be prevented. .

Furthermore, according to the color filter manufacturing apparatus and manufacturing method of the present invention, the coating device and the coating method of the present invention are used to form a coating film having a highly accurate film thickness and no streaks even at the ends in the coating width direction. Therefore, a high quality color filter can be manufactured.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of a slit die which is an example of an applicator of the present invention.

FIG. 2 is a schematic front view when the applicator of the present invention is applied to a die coater.

FIG. 3 is a schematic side view when the applicator of the present invention is applied to a die coater.

FIG. 4 is a cross section in a coating width direction showing a state of coating with a slit die according to an embodiment.

FIG. 5 is a sectional view in a coating width direction showing a state of coating with a slit die according to another embodiment.

FIG. 6 is a sectional view in a coating width direction showing a state of coating with a slit die according to still another embodiment.

FIG. 7 is a schematic diagram of a film thickness distribution in a coating width direction when coating with a slit die.

FIG. 8 is a schematic perspective view of another slit die of the present invention.

FIG. 9 is a sectional view in a coating direction showing a positional relationship between a slit die and a cleaning tool according to an embodiment.

FIG. 10 is a sectional view in a coating direction showing a positional relationship between a slit die and a cleaning tool according to another embodiment.

FIG. 11 is a sectional view in a coating direction showing a positional relationship between a slit die and a cleaning tool according to still another embodiment.

[Explanation of symbols]

1: Substrate 10: Slit die 11: Backup lip 12: Doctor lip 13: Spacer 15: Bolt 16: Coating liquid inlet 17: Liquid reservoir 18: Land 19: Bead 20: Discharge port 21: Tip surface 20R, 20L : Discharge port both end portions 30R, 30L: Round-up slope portions 31R, 31L: Round-up direction 43: Slit die 44R, 41L: Discharge port end portion 45: Slit dies 46R, 46L: Round-up slope portion 50: Slit die 51: Discharge port 53 : Tip surface 55: Backup lip 56: Doctor lip 57: Spacers 60R, 60L: Rounded up slope portions 61R, 61L: Edge portions 63, 63a: Tip portions 70, 71: Film thickness distribution 100: Die coater 120: Die cleaning device 121: Cleaning tool 122: cleaning tool holding members 123A and 123B: application width direction 124: bottom side 24a: bottom length 125a, 125b: hypotenuse 130: substrate holder 131A, 131B: a substrate moving direction 140: base 150: support column 160: liquid-feeding unit θ _a, θ _b: slope angle θ _R, θ _L: revaluation Angle a: Bottom length d: Discharge port to round-up separation distance C: Clearance h: Round-up height L: Discharge port length L ₀ : Application width direction end non-product part X _R , _XL : Discharge port longitudinal direction Y, y, y ₀ : tip width W: application width P: contact portion of cleaning tool Z: contact height of cleaning tool

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2H048 AA09                 2H091 FA02Y FC29 LA12                 4D075 AC02 AC09 CA47 CB06 DA06                       DB13 DB31 DC24 EA07 EA10                       EA19 EB11 EB52                 4F041 AA02 AA05 AB01 BA05 BA12                       BA17 BA51 BA60 CA02

Claims (6)

[Claims] 1. An applicator having a discharge port extending in one direction for discharging a coating liquid to a base material located opposite to the substrate, wherein the length of the tip end surface in which the discharge port is formed is long in the longitudinal direction. ,
Each end is 0 to 2 mm longer than the length of the discharge port in the longitudinal direction, and slopes forming an angle of 5 to 90 degrees with respect to the tip face are connected to both ends of the tip face in the length direction. Characteristic applicator. 2. The applicator according to claim 1, which satisfies the following requirements a and b. a. The cross section of the tip surface perpendicular to the discharge port longitudinal direction and the cross section of the inclined surface perpendicular to the discharge port longitudinal direction have substantially the same length in the coating direction. B. In the cross section of the tip surface perpendicular to the discharge port longitudinal direction and the cross section of the inclined surface perpendicular to the discharge port longitudinal direction, the angles formed by the surfaces adjacent to each other in the coating direction are substantially the same. 3. A color filter manufacturing apparatus, which manufactures a color filter by using the applicator according to claim 1 or 2. 4. The coating liquid is discharged from the discharge port while relatively moving the applicator according to claim 1 or 2 and a base material located opposite to the discharge port, A coating method, which comprises forming a coating film on the surface of a substrate. 5. The coating method according to claim 4, wherein before or after forming a coating film on the surface of the base material, a cleaning unit is provided from a position distant from the tip surface in the discharge port longitudinal direction. Is started to move in the longitudinal direction of the discharge port, and the coating liquid adhering to the tip surface is removed from the applicator. 6. A color filter manufacturing method, characterized in that a color filter is manufactured by using the coating method according to claim 4 or 5.