JP2003111455A - Vibration wave driving device and method of manufacturing vibration wave driving device - Google Patents

Abstract

(57) Abstract: A vibration wave motor using a vibrating body configured by sandwiching a piezoelectric element between disc-shaped elastic bodies, and improves the flatness of a friction drive unit of the vibrating body. A piezoelectric element is sandwiched between a pair of vibrating members and fastened and fixed by hollow bolts and nuts to complete the vibrating member.
Is mounted, but in the completed state of the vibrating body, flattening is performed to further increase the flatness of friction driving of the elastic body.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration wave driving device such as a vibration wave motor and a method for manufacturing the vibration wave driving device.

[0002]

2. Description of the Related Art A vibration wave driving device has a vibrating body formed in an annular shape, a rod shape, or a disc shape. For example, in the case of a disc vibrating body, it is driven between, for example, substantially disc-shaped elastic bodies. A piezoelectric element sandwiched as an electro-mechanical energy conversion element is used as a vibrating body, and an AC voltage for driving is applied to this piezoelectric element to drive the vibrating body on the driving surface of the vibrating body. Form a movement for. A vibration wave motor as a vibration wave driving device has a moving body that is frictionally driven by being pressed against a driving surface of the vibrating body via a pressing means, and is described in JP-A-7-95777. Is configured as is. FIG. 6 is a side sectional view showing the conventional example.

In FIG. 6, 101 is a main vibration elastic body formed in a disk shape having a driving surface, 103 is a sub vibration elastic body, and the main vibration elastic body 101 and the sub vibration elastic body 103 are formed in the central portion. A plurality of piezoelectric elements 102, which are concentrically screw-coupled with each other by a screw portion 113, and which are formed of a disk-shaped piezoelectric element for driving and a piezoelectric element for vibration detection.
Is sandwiched and fixed between the main vibrating elastic body and the sub vibrating elastic body 103 via an electrode plate (not shown).
3, the piezoelectric element 102 and the electrode plate constitute a vibrating body. Then, the vibrating body is fixed by fixing the support rod 109 extending coaxially with the screw portion 113 to the fixing member 110.

The main vibration elastic body 101 has a drive portion 101a as an outer peripheral portion, and a peripheral groove 101b for enlarging vibration displacement of the drive portion is formed on the inner peripheral side of the drive portion 101a. The body 103 is formed to have a smaller diameter than the main vibration elastic body 101, and a flange portion 103a as a vibration balancer is formed on the outer peripheral portion. The sub-vibration elastic body 103
The peripheral groove 10 for enlarging the vibration displacement of the flange portion 103a.
3b is formed, but this is not necessary.

Reference numeral 104 denotes a moving body, which has a flange spring-shaped sliding portion 105 that abuts the driving portion 101a of the main vibration elastic body 101 on the outer peripheral portion thereof, and a claw portion 111 of the output member 107 arranged coaxially. The output member 107 is engaged and connected to the output member 107 so as to be axially movable but immovable circumferentially.
The disc spring 106 mounted between the sliding portion 105 and
Is in pressure contact with the drive unit 101a. Output member 107
Is fixed to the outer race of the ball bearing 108 mounted on the support rod 109, and the rotation of the moving body 104 can be taken out by the gear portion 112 provided on the outer peripheral portion.

In the vibrating body having the above-described structure, the piezoelectric element 102 sandwiched between the main vibrating elastic body 101 and the sub vibrating elastic body 103 has their polarization directions staggered as shown in FIG. 8 (b). It is possible to form a vibration having a nodal diameter shown in FIG. 7B, more specifically, in FIG. 9B using a quadrant type, which will be described.

In the case of the piezoelectric element 102 shown in FIG. 8B, for example, an upper electrode plate of the A-phase PZT (not shown)
When a voltage of the positive electrode is applied to the positive electrode and a voltage of the negative electrode is applied to the lower electrode plate (not shown), expansion and contraction in the thickness direction are formed symmetrically, and similarly, the B phase PZT has a phase shift of 45 degrees around the Z axis. Then A
Similar to the phase PZT, extension and contraction in the thickness direction are formed symmetrically. Therefore, when an AC voltage having a temporal phase difference of 90 degrees is applied to the A-phase PZT and the B-phase PZT, the vibrating body moves toward both ends in the radial direction as shown in FIGS. 7B and 9B. Main vibration elastic body 101 and sub vibration elastic body 1 in
The elliptic motions formed in 03 are in the same phase but opposite in sign, as shown by arrows, that is, they are plane-symmetrical elliptic motions.

However, as shown in FIG. 9B, the elliptic motion is formed with a phase shift of 180 degrees (opposite phase) at the position where the phase is shifted by 90 degrees.

As described above, a traveling wave having a node diameter shown in FIG. 7B is formed by the out-of-plane displacement of the piezoelectric element 2 in the driving portion 101a of the main vibrating elastic body 101 which constitutes the vibrating body. The moving body 1 that is brought into pressure contact with the driving unit 101a
04 is rotated by friction drive, and its rotational force is applied to the output member 1
07, and output is taken out via the gear part 112.

However, in the above-mentioned conventional example, since the main vibrating elastic body 101 has a thin disk shape, it is deformed by sandwiching the piezoelectric element 102 together with the sub vibrating elastic body 103.

As a result, the flatness of the drive unit 101a is deteriorated, and the amplitude of the vibrating body of the normal vibration wave motor is about several μm, whereas the flatness of the drive unit 101a in the conventional example is small. The value becomes larger than several μm, and the contact with the brim spring-shaped sliding portion 105 of the moving body 104 becomes uneven,
In some cases, good performance could not be obtained.

An object of the invention according to the present application is to provide a vibration wave driving device using a vibrating body formed by sandwiching a piezoelectric element with a substantially disc-shaped elastic body. An object of the present invention is to provide a vibration wave driving device and a method for manufacturing the vibration wave driving device, which do not deteriorate the flatness and consequently enable uniform contact with the moving body and realize good performance.

[0012]

According to a first aspect of the present invention, an electro-mechanical energy conversion element is sandwiched between elastic bodies, and an alternating signal is applied to the electro-mechanical energy conversion element to cause friction of the elastic body. A vibrating-wave driving device comprising: a vibrating body that forms a driving motion in a driving section; and a contact body that is pressed by a frictional driving section of the vibrating body via a pressurizing means and moves relative to the vibrating body. The friction drive unit is subjected to flat surface processing with reference to the assembled vibrating body.

According to a second aspect of the present invention, an electro-mechanical energy conversion element is sandwiched between elastic bodies, and an alternating signal is applied to the electro-mechanical energy conversion element, so that a driving movement is applied to a friction drive portion of the elastic body. In a vibration wave driving device having a vibrating body to be formed and a contact body that is pressed against a frictional drive section of the vibrating body via a pressurizing means and moves relative to the vibrating body,
The contact body includes a contact body, and a contact body contacting member that is attached to the contact body and has a spring property for contacting the vibrating body. The contact body contact member is a friction drive unit of the elastic body. It is characterized in that the flattening of the contact surface that contacts the side is performed with reference to the contact body in the assembled state.

A third invention is characterized in that, in any one of the above inventions, the vibrating body is equipped with a vibrating body contact member which comes into contact with the contact body in a friction drive portion of the elastic body.

In a fourth invention according to any one of the above inventions, one or a plurality of the vibrating bodies are arranged with respect to an output shaft rotatably passing therethrough, and the output shaft is provided with respect to a friction drive portion of the vibrating body. Is characterized in that the contact body is integrated with the contact body.

A fifth invention is characterized in that, in any one of the above inventions, the elastic body is formed in a substantially disc shape.

According to a sixth aspect of the invention, an electro-mechanical energy conversion element is sandwiched between elastic bodies, and an alternating signal is applied to the electro-mechanical energy conversion element, so that a driving motion is applied to a friction drive portion of the elastic body. A method for manufacturing a vibration wave drive device, comprising: a vibrating body to be formed; and a contact body that is pressed against a frictional drive section of the vibrating body via a pressing means and moves relative to the vibrating body. -After sandwiching the mechanical energy conversion element, flattening is performed to further increase the flatness of the friction drive portion of the vibrating body.

According to a seventh aspect of the present invention, an electro-mechanical energy conversion element is sandwiched between elastic bodies, and an alternating signal is applied to the electro-mechanical energy conversion element, so that the frictional drive portion of the elastic body is driven. A vibrating body to be formed and a contact body that is pressed by a friction drive unit of the vibrating body via a pressing means and moves relative to the vibrating body. In a method of manufacturing a vibration wave drive device having a contact body contact member having a spring property for contacting a body, in a state where the contact body is assembled, the contact body contact member is brought into contact with the friction drive portion side of the elastic body. It is characterized in that flattening is performed to further increase the flatness of the contact surface.

With such a vibration wave driving device and the method of manufacturing the vibration wave driving device, the flatness of the friction drive portion of the vibration body deteriorates due to the deformation of the elastic body due to the sandwiching of the electro-mechanical energy conversion element such as a piezoelectric element. This enables uniform contact between the friction drive unit of the vibrating body and the moving body, and realizes good performance.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 is a side sectional view showing a first embodiment of the present invention.

Reference numeral 1 denotes a piezoelectric element, which is an electromechanical conversion element, for example, PZT, 2 denotes a flexible printed circuit board for applying a voltage to the piezoelectric element, 3 denotes a vibrating body supporting member, and these are made of brass, for example. It is sandwiched by the hollow bolt 6 and the nut 7 together with the two elastic bodies 4 and the polyimide film 5 to form a vibrating body 8 having a substantially vertical symmetrical shape as shown in FIG.

When the piezoelectric film 1, the flexible printed circuit board 2, the vibrating body supporting member 3, and the two elastic bodies 4 are held between the polyimide film 5 by the hollow bolt 6 and the nut 7,
The friction between the hollow bolt 6 and the nut 7 is reduced to obtain a large clamping axial force with a small clamping torque, or the clamping axial force distribution of the hollow bolt 6 and the nut 7 is made uniform to improve the vibration characteristics of the vibrating body 8. It has a function.

Further, in the vibrating body supporting member 3 sandwiched between the piezoelectric element 1 and the elastic body 4, as shown in FIG. 2 which is a top view, three supporting pieces are radially arranged at equal angles. It has an extended shape, and an annular portion near the center is sandwiched so as to be in contact with the piezoelectric element 1 and the elastic body 4, and a supporting piece portion extending from the annular portion is bent to form the cases 9a and 9b. It is fixed by being sandwiched between the fitting portions, and the position of the vibrating body 8 is determined and fixed in this way.

Reference numeral 10 denotes a hollow bolt inner bearing for reducing friction between the output shaft 11 that rotates through the hollow hole of the hollow bolt and the vibrating body, and is press-fitted into the open end of the hollow bolt 6. ing.

Reference numeral 12 denotes a moving body main ring, which is a moving body contact member 13.
Are joined to the outer peripheral portion by a method such as adhesion, press-fitting, and welding to integrally form the moving body 14.

Although the moving body 14 rotates around the output shaft 11 by a method described later, the moving body contact member 13 that makes frictional contact with the vibrating body 8 is, for example, stainless steel formed by pressing, and is connected to the vibrating body. It is a brim-shaped spring that provides uniform contact. In addition, the hardness is increased by quenching and tempering to improve wear resistance. Further, the friction drive portion of the vibrating body 8 is also provided with a vibrating body contact member 4a bonded to the elastic body 4 in order to improve wear resistance. The vibrating body contact member 4a is also made of, for example, quenched and tempered stainless steel.

The moving bodies 14 are provided on the upper and lower sides of the vibrating body 8, respectively, and similarly, the rotary output transmission member 15 and the moving body 14 fixed to the output shafts 11 provided on the upper and lower sides of the vibrating body 8, respectively. Two pressure springs 1 provided between
The vibrating body 8 is sandwiched by 6 and is in pressure contact with the vibrating body 8.

A rotary output transmission groove 12a formed in the diametrical direction is formed in the main body ring 12, and a rotary output transmission tooth 15a also formed in the diametrical direction is formed in the rotary output member 15. By engaging these, the moving body 14 is integrated with the rotation output transmitting member 15 in the circumferential direction,
The rotation output transmission member 15 can freely move in the axial direction.

The output shaft 11 is pivotally supported by a bearing 17 fixed to the cases 9a and 9b.

The inside of the piezoelectric element 2 is shown in FIG.
The configuration is substantially the same as that of, but an A-phase electrode (not shown) between the two A-phase patterns, a B-phase electrode (not shown) between the two B-phase patterns, an A-phase pattern and a B-phase electrode Ground electrodes are provided between the phase pattern and between the B-phase pattern and the sensor pattern.

A sensor electrode (not shown) is provided on the lower surface of the sensor pattern, and an insulating layer (not shown) is further provided on the lower surface of the sensor electrode. These A-phase electrode, B-phase electrode, ground electrode, sensor electrode, and insulating layer are integrally formed with the A-phase pattern, B-phase pattern, and sensor pattern to form the piezoelectric element 1.
Electrodes that are electrically connected to the A-phase electrode, the B-phase electrode, the ground electrode, and the sensor electrode are formed on the upper end surface of the piezoelectric element 1 by through-hole wiring (not shown) inside the piezoelectric element 1, and these electrodes are connected via the flexible printed circuit board 2. A voltage is applied to the electrodes. The flexible printed circuit board 2 extends to the outside of the case via a notch portion (not shown) of the case 9a.

An AC voltage is applied to the A-phase electrode of the thus constructed vibration wave motor through the flexible printed board 2.

The frequency of the AC voltage is the same as that of the elastic body 4 shown in FIG.
Assuming a frequency near the resonance frequency of the radial primary / circumferential secondary out-of-plane flexural vibration as shown in (b), the two elastic bodies 4 are vertically symmetrical in radial primary / circumferential direction 2. The following standing wave of out-of-plane flexural vibration occurs.

Further, an AC voltage having the same frequency as the voltage applied to the A-phase electrode is applied to the B-phase electrode via the flexible printed board 2. However, the AC voltage applied to the B-phase electrode gives a phase difference of 90 ° with respect to the AC voltage applied to the A-phase electrode.

Since the spatial phase difference of the B phase pattern of the piezoelectric element is displaced from the A phase pattern by 90 °, both the temporal phase difference and the spatial phase difference are 90 °.
Standing waves of different radial primary and circumferential secondary out-of-plane flexural vibrations are further generated.

These two standing waves are combined, and as a result, a progressive wave of radial primary / circumferential secondary out-of-plane bending vibration is generated in the two elastic bodies 4 in a vertically symmetrical manner.

As a result, the vibrating body contacting member 4a, which is the upper and lower end portions of the vibrating body 8, is brought into pressure contact with the moving body contacting member 1a.
Since an elliptic motion for rotating 3 in the same direction occurs, the two moving bodies 14 rotate in the same direction, and this rotational force is transmitted to the output shaft 11 via the rotation output member 15 engaging with the moving body 14. .

The vibrating body 8 of the vibrating wave motor of the present embodiment having such a configuration and operation is provided with vibrating body contact members 4a at the uppermost end and the lowermost end thereof. Both end portions of the elastic member 4 are surfaces that come into contact with the moving body contact member 13, and since these two surfaces are polished after the assembly of the vibrating body 8, the elastic body 4 is deformed due to the hollow bolt 6 and the nut 7 being clamped. Also, the flatness of the surface of the vibrating body contacting member 4a that contacts the moving body contacting member 13 is good, and the moving body contacting member 13 comes into contact with the vibrating body contacting member 4a with a uniform pressure, and a stable and high output is obtained. Is obtained.

The tip of the moving body 14 on the side of the vibrating body 8 is the surface of the moving body contacting member 13 that contacts the vibrating body contacting member 4a, and this surface is polished after the moving body 14 is assembled. Even if the moving body contact member 13 is deformed when the moving body contact member 13 is joined to the moving body main ring 12 by a method such as bonding, press fitting, or welding, the vibrating body contact member of the moving body contact member 13 The flatness of the surface in contact with 4a is good,
The moving body contact member 13 comes into contact with the vibrating body contact member 4a with a uniform pressure, and a stable and high output is obtained.

In the above embodiment, the mode of two waves in the circumferential direction is used, but the piezoelectric element in the polarization direction shown in FIG. 8 (a) is used, and FIGS. 7 (a) and 9 (a) are used. The same applies when the mode of one wave in the circumferential direction indicated by () is used.

(Second Embodiment) FIGS. 3 and 4 are side sectional views showing a second embodiment of the present invention.

Although one vibrating body is provided in the first embodiment, two vibrating bodies 8 are provided in the present embodiment, and the intermediate moving body 18 is sandwiched between the two vibrating bodies 8. It is provided so that

Further, two moving bodies 14 are provided outside the two vibrating bodies as in the first embodiment.

In the intermediate moving body 18, two moving body contact members 13 are joined to both sides of the intermediate moving body main ring 19 by a method such as adhesion, press-fitting, welding, etc., and as shown in FIG. Since the body contact member 13 comes into pressure contact with the vibrating body contact members of the two vibrating bodies, the intermediate moving body 18 also rotates, like the moving body in the first embodiment.

The inner diameter of the intermediate moving body main ring 19 is 180 °
Two axially extending spline grooves are formed at opposing positions and engage with the teeth 20a of the intermediate rotation output member shown in FIG.

The outer diameter of the annular portion of the intermediate rotation output member 20 is slightly smaller than the innermost diameter of the intermediate moving body main ring 19 to some extent.
Is constrained in the radial direction and the circumferential direction with respect to the intermediate rotation output member 20, and is slightly tilted with respect to the axial direction and free in the axial direction.

The intermediate rotation output member 20 is the output shaft 1
It is fixed to 1 by press fitting or the like.

Regarding the pressure applied from the vibrating bodies 8 on both sides of the intermediate moving body 18, the vibrating body supporting member 3 for supporting the vibrating body 8 is a thin metal plate and is an extremely weak spring in the axial direction. Therefore, the pressure is applied by the pressure springs 16 arranged on both sides.

When the intermediate moving body 18 rotates in such a configuration, the rotational force is transmitted through the intermediate rotating member 20 to the output shaft 1.
1 is transmitted.

Further, the moving body 1 similar to that of the first embodiment
The rotational force associated with the rotation of No. 4 is also transmitted to the output shaft 11 as in the first embodiment.

As described above, the number of friction drive surfaces is two in the first embodiment, whereas it is four in the present embodiment, so that a double rotational torque can be obtained. .

Also in this embodiment, the vibrating body 8 and the moving body 14 are assembled in the same manner as in the first embodiment and then polished, so that the surface of the vibrating body contacting member contacting the moving body contacting member is The flatness and the flatness of the surface of the moving body contacting member that comes into contact with the vibrating body contacting member are good, and the moving body contacting member comes into contact with the vibrating body contacting member at a uniform pressure, and stable high output is obtained. .

Further, the outermost end of the intermediate moving body 18 on the side of the vibrating body 8 is a surface of the moving body contacting member 13 that comes into contact with the vibrating body, and this surface is polished after the intermediate moving body 18 is assembled. Even if the moving body contact member 13 is deformed when the moving body contact member 13 is joined to the intermediate moving body main ring 19 by a method such as adhesion, press fitting, or welding, the moving body contact member 13 is brought into contact with the vibrating body of the moving body contact member 13. The flatness of the surface to be contacted is good, and the movable body contact member 13 contacts the vibrating body contact member 15 with a uniform pressure, so that a high output can be stably obtained.

In the present embodiment, the case where the number of vibrating bodies is 2 is shown, but the number is not limited to this.

(Third Embodiment) FIG. 5 shows a third embodiment of the present invention.
It is a side sectional view showing an embodiment.

While the vibrating body in the above-described first and second embodiments is substantially vertically symmetrical and has the friction driving surfaces on both sides, in the present embodiment, the friction driving surface is provided on only one side. Similarly, the moving body is also arranged on one side of the vibrating body.

That is, as shown in FIG.
Is a configuration in which the piezoelectric element 1, the elastic body 4, the polyimide film 5, and the flexible printed circuit board 2 are sandwiched between the hollow bolt 22 and the nut 7 having a large base portion.

A rotary output member 15 fixed to the output shaft 11.
By the pressure spring 16 arranged between the moving body 14 and
The point that the moving body friction member of the moving body 14 comes into pressure contact with the vibrating body friction member 4a provided in the vibrating body 21 is the same as in the first and second embodiments.

The reaction force of the pressure spring 16 is the same as that of the case 23 fixed to the base of the hollow bolt 22.
And the rotation output member 15 through a thrust bearing 24 provided between the rotation output member 15 and the rotation output member 15.

A bearing 25 is fixed to the hollow bolt 22, and the lower end of the output shaft 11 is rotatably supported.

The vibrating body 21 of the vibrating wave motor of the present embodiment configured as described above has the uppermost end portion which is the surface of the vibrating body contacting member 4a which comes into contact with the moving body contacting member 13. Since the surface is polished after the assembly of the vibrating body 21, the elastic body 4 is formed by sandwiching the hollow bolt 22 and the nut 7.
Even if there is deformation, the flatness of the surface of the vibrating body contacting member 4a that contacts the moving body contacting member 13 is good, and the moving body contacting member 13 contacts the vibrating body contacting member 15 with a uniform pressure, Stable high output can be obtained.

The outermost end of the moving body 14 on the side of the vibrating body 21 is the surface of the moving body contacting member 13 that comes into contact with the vibrating body contacting member 4a, and this surface is polished after the moving body 14 is assembled. Even if the moving body contact member 13 is deformed when the moving body contact member 13 is joined to the moving body main ring 12 by a method such as bonding, press fitting, or welding, the vibrating body contact member of the moving body contact member 13 The flatness of the surface in contact with 4a is good,
The moving body contact member 13 comes into contact with the vibrating body contact member 4a with a uniform pressure, and a stable and high output is obtained.

[0063]

As described above, according to the present invention,
Prevents deterioration of the flatness of the friction drive unit of the vibrating body caused by deformation of the elastic body due to the sandwiching of the electro-mechanical energy conversion element such as a piezoelectric element, and enables uniform contact between the friction drive unit of the vibrating body and the moving body. , It has become possible to achieve good performance.

[Brief description of drawings]

FIG. 1 is a side sectional view showing a first embodiment of the present invention.

FIG. 2 is a top view of the vibrating body support member of FIG.

FIG. 3 is a side sectional view showing a second embodiment of the present invention.

FIG. 4 is a diagram showing the intermediate rotation output member of FIG. 3;

FIG. 5 is a side sectional view showing a third embodiment of the present invention.

FIG. 6 is a side sectional view showing a conventional example.

7A and 7B are diagrams for explaining a vibration mode.

8A and 8B are exploded perspective views showing a pattern of a piezoelectric element.

9A and 9B are diagrams for explaining a vibration mode.

[Explanation of symbols]

1 ... Piezoelectric element 2 ... Flexible printed circuit board 3 ... Vibrating body support member 4 ... Elastic body 5: Polyimide film 6 ... Hollow bolt 7 ... Nut 8 ... Vibrating body 9A, 9b ... Case 10 ... Hollow bolt inner bearing 11 ... Output shaft 12 ... Moving object main ring 13 ... Moving body contact member 14 ... Mobile 15 ... Rotation output member 16 ... Pressure spring 17 ... Bearing 18 ... Intermediate moving body 19 ... Intermediate moving object main ring 20 ... Intermediate rotation output member.

Claims (7)

[Claims] 1. A vibrating body for sandwiching an electro-mechanical energy conversion element between elastic bodies and applying an alternating signal to the electro-mechanical energy conversion element to form a driving motion in a friction drive portion of the elastic body. And a contact body that is pressed by a friction drive unit of the vibrating body via a pressurizing unit and moves relative to the vibrating body, wherein planar processing in the friction drive unit of the elastic body is in an assembled state. The vibration wave drive device is characterized in that the vibration wave drive device is applied on the basis of the vibration body. 2. A vibrating body for sandwiching an electro-mechanical energy conversion element between elastic bodies, and applying an alternating signal to the electro-mechanical energy conversion element to form a driving motion in a friction drive portion of the elastic body. And a contact body that is pressed by a friction drive unit of the vibrating body via a pressing means and moves relative to the vibrating body, wherein the contact body comprises a contact body and a contact body. A contact body contact member having a spring property that is attached to the main body and comes into contact with the vibrating body, wherein the contact surface of the contact body contacting the friction drive unit side of the elastic body is in the assembled state in planar processing. A vibration wave drive device, wherein the vibration wave drive device is provided with reference to the contact body. 3. The vibration wave drive device according to claim 1, wherein the vibrating body is provided with a vibrating body contact member that is in contact with the contact body at a friction drive portion of the elastic body. . 4. One or a plurality of the vibrating bodies are arranged with respect to an output shaft that rotatably penetrates, and the contact body that is integral with the output shaft is arranged with respect to a friction drive portion of the vibrating body. The vibration wave driving device according to any one of claims 1 to 3, wherein 5. The vibration wave drive device according to claim 1, wherein the elastic body is formed in a substantially disc shape. 6. A vibrating body which sandwiches an electro-mechanical energy conversion element between elastic bodies, and applies an alternating signal to the electro-mechanical energy conversion element to form a driving motion in a friction drive portion of the elastic body. And a contact body that is pressed by a friction drive unit of the vibrating body via a pressurizing means and moves relative to the vibrating body, wherein the electromechanical energy conversion is performed by the elastic body. A method for manufacturing a vibration wave drive device, comprising: after sandwiching the element, performing flattening to further increase the flatness of the friction drive portion of the vibrating body. 7. A vibrating body for sandwiching an electro-mechanical energy conversion element between elastic bodies, and applying an alternating signal to the electro-mechanical energy conversion element to form a driving motion in a friction drive section of the elastic body. And a contact body that is pressed by a friction drive unit of the vibrating body via a pressing means and moves relative to the vibrating body, and the contact body is mounted on the contact body and contacts the vibrating body. In a method of manufacturing a vibration wave drive device having a contact body contact member having a spring property, in a state in which the contact body is assembled, a contact surface of the contact body contact member that comes into contact with the friction drive portion side of the elastic body A method for manufacturing an oscillatory wave drive device, which is characterized by performing flattening for further increasing flatness.