JP2003094370A - Vacuum suction pad and vacuum sucker using it - Google Patents
Vacuum suction pad and vacuum sucker using itInfo
- Publication number
- JP2003094370A JP2003094370A JP2001290440A JP2001290440A JP2003094370A JP 2003094370 A JP2003094370 A JP 2003094370A JP 2001290440 A JP2001290440 A JP 2001290440A JP 2001290440 A JP2001290440 A JP 2001290440A JP 2003094370 A JP2003094370 A JP 2003094370A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- suction
- suction pad
- pad
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 230000005611 electricity Effects 0.000 abstract description 16
- 230000003068 static effect Effects 0.000 abstract description 16
- 230000003472 neutralizing effect Effects 0.000 abstract description 4
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Manipulator (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、基板を真空吸着し
て保持するための真空吸着パッド及びそれを用いた真空
吸着装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction pad for holding a substrate by vacuum suction and a vacuum suction device using the same.
【０００２】[0002]
【従来の技術】例えば、液晶表示パネルや液晶表示モジ
ュールの製造工程、検査工程、修正工程等においては、
基板の下部を支持するバキュームハンドや、基板の反り
を調節する機能を付加した搬送装置が使用されている。
このような搬送装置は、実公平５−１１９９２号公報や
特開平８−１０７１３６号公報に記載されている。2. Description of the Related Art For example, in a manufacturing process, an inspection process, a correction process, etc. of a liquid crystal display panel or a liquid crystal display module,
A vacuum hand that supports the lower part of the substrate and a transfer device that has a function of adjusting the warp of the substrate are used.
Such a transfer device is described in Japanese Utility Model Publication No. 5-11992 and Japanese Patent Application Laid-Open No. 8-107136.
【０００３】例えば、最近の大型のマザーガラスを用い
る液晶表示装置の生産ラインでは、基板サイズは８８０
ｍｍ×６８０ｍｍ（厚さ０．７ｍｍ〜１．１ｍｍ）とな
り、搬送装置においては大きな吸着力が要求される。さ
らに、最近の液晶表示パネルでは、基板の大型化ととも
に、細管の蛍光ランプ、導光板、反射、拡散等の光学シ
ート等の組立て部材が大きくなり重量が増加しているた
め、今まで以上に吸着力が要求されるようになってい
る。For example, in a recent production line of a liquid crystal display device using a large mother glass, the substrate size is 880.
mm × 680 mm (thickness 0.7 mm to 1.1 mm), and a large suction force is required in the transport device. Furthermore, in recent liquid crystal display panels, as the size of the substrate has increased, the assembly members such as thin tube fluorescent lamps, light guide plates, optical sheets for reflection and diffusion, etc. have become larger and the weight has increased. Power is required.
【０００４】従来より用いられている吸着方式に、液晶
表示パネルや液晶表示モジュールの上面を複数のゴム製
吸着パッドで保持して搬送するゴム製吸着パッド方式が
ある。この方式では、ゴム製吸着パッドの内部を真空状
態にして液晶表示パネルを吸着している。As a conventional suction method, there is a rubber suction pad method in which an upper surface of a liquid crystal display panel or a liquid crystal display module is held by a plurality of rubber suction pads and conveyed. In this method, the inside of the rubber suction pad is vacuumed to suck the liquid crystal display panel.
【０００５】一方、液晶表示パネルはその周囲のごく一
部を除いて全面に画素パターンが形成されている。ま
た、表示品位はリタデーション値（Δｎ×ｄ）で表わさ
れるようにセルギャップｄに影響される。On the other hand, the liquid crystal display panel has a pixel pattern formed on the entire surface except for a small part of the periphery thereof. The display quality is affected by the cell gap d as represented by the retardation value (Δn × d).
【０００６】このため、吸着する場合には、セルギャッ
プｄを変動させる不要な応力は加わらないよう、真空度
を下げた状態で十分な吸着力を得る必要がある。尚、Δ
ｎは、液晶分子の異常光屈折率と常光屈折率の差であ
る。また、異常光屈折率とは、液晶分子の長軸方向に直
線偏光が入射したときの屈折率であり、常光屈折率とは
液晶分子の短軸方向に直線偏光が入射したときの屈折率
である。Therefore, when adsorbing, it is necessary to obtain a sufficient adsorbing force in a state where the degree of vacuum is lowered so that unnecessary stress for varying the cell gap d is not applied. In addition, Δ
n is the difference between the extraordinary light refractive index and the ordinary light refractive index of the liquid crystal molecules. The extraordinary light refractive index is the refractive index when linearly polarized light is incident in the long axis direction of the liquid crystal molecule, and the ordinary light refractive index is the refractive index when linearly polarized light is incident in the short axis direction of the liquid crystal molecule. is there.
【０００７】[0007]
【発明が解決しようとする課題】真空吸着装置の吸着力
と真空度と吸着パッド面積は次の関係にある。
Ｗ＝Ｐ×Ａ／７６０
ここでＷは吸着力（Ｋｇｆ）、Ｐは吸着パッド内部の真
空度（−ｍｍＨｇ）、Ａは吸着パッド面積（ｃｍ2）で
ある。The suction force of the vacuum suction device, the degree of vacuum, and the suction pad area have the following relationship. W = P × A / 760 where W is the suction force (Kgf), P is the degree of vacuum inside the suction pad (-mmHg), and A is the suction pad area (cm 2).
【０００８】液晶表示パネルの大型化に伴い基板重量が
増加すると、真空吸着装置の吸着力を増すため、吸着真
空度や吸着パッド面積を上げなければならないが、その
際、液晶表示部の表面ガラスや他の層は真空度に耐えら
れず吸着パッド部に引込まれ、画像表示面に歪みが生じ
る。その結果、セルギャップｄのムラによる色味の変
化、すなわちニュートンリング（リング状の模様）が発
生し、表示品位を損う問題があった。When the weight of the substrate increases as the size of the liquid crystal display panel increases, the suction power of the vacuum suction device increases, so that the suction vacuum degree and the suction pad area must be increased. The other layers cannot withstand the degree of vacuum and are drawn into the suction pad portion, causing distortion on the image display surface. As a result, there is a problem that a change in color due to unevenness of the cell gap d, that is, a Newton ring (ring-shaped pattern) occurs, and the display quality is impaired.
【０００９】また、吸着した液晶表示パネルを離脱させ
る場合には、吸着パッドと液晶表示パネルとが離れる際
に静電気が発生し、この静電気を抑制するには液晶表示
パネルの離脱に長時間を要する。また、静電気を抑制し
ないとパーティクルの付着が助長されるので、液晶表示
パネルや液晶表示モジュールの着脱を繰り返す毎に長時
間を要し、生産歩留を低下させる問題点があった。Further, when the sucked liquid crystal display panel is removed, static electricity is generated when the suction pad and the liquid crystal display panel are separated from each other, and in order to suppress this static electricity, it takes a long time to remove the liquid crystal display panel. . Further, if the static electricity is not suppressed, the adhesion of particles is promoted, so that it takes a long time each time the liquid crystal display panel and the liquid crystal display module are repeatedly attached and detached, which causes a problem of reducing the production yield.
【００１０】本発明は上記問題点を鑑み、真空吸着パッ
ドによりガラス等の基板を吸着保持する際に、吸着箇所
が歪み等の変形を起こすことがなく、また、吸着状態を
解除する際の静電気発生を抑制することを可能とした真
空吸着パッド及び真空吸着装置を提供することにある。In view of the above-mentioned problems, the present invention does not cause deformation such as distortion at a sucked portion when a substrate such as glass is sucked and held by a vacuum sucking pad, and static electricity when releasing the sucked state. It is to provide a vacuum suction pad and a vacuum suction device capable of suppressing the generation.
【００１１】[0011]
【課題を解決するための手段】本発明の真空吸着パッド
は、弾性体からなる円錐状の真空吸着パッドにおいて、
吸着パッド内側に吸引穴を備え、吸着面には放射状の溝
と同心円状の溝が形成されていることを特徴としてい
る。The vacuum suction pad of the present invention is a conical vacuum suction pad made of an elastic material,
A suction hole is provided inside the suction pad, and a radial groove and a concentric groove are formed on the suction surface.
【００１２】また、本発明の真空吸着パッドは、真空吸
着パッドの端部が蛇腹になっていることを特徴としてい
る。Further, the vacuum suction pad of the present invention is characterized in that the end portion of the vacuum suction pad is bellows.
【００１３】また、本発明の真空吸着装置は、基板の吸
着を解除する際に、真空吸着パッドの吸引穴からイオン
気体を供給することを特徴としている。Further, the vacuum suction device of the present invention is characterized in that when the suction of the substrate is released, the ion gas is supplied from the suction holes of the vacuum suction pad.
【００１４】以下、上記構成による作用を説明する。The operation of the above configuration will be described below.
【００１５】真空吸着パッドの吸着面に放射状及び同心
円状の溝を形成し、また、真空吸着パッドの端部を蛇腹
にすることにより、吸着パッドと基板との接触面積を増
加させることができる。このため、吸着時の真空度を高
め吸着力が増した場合でも基板に局所的な吸引力が加わ
ることが防止される。The contact area between the suction pad and the substrate can be increased by forming radial and concentric grooves on the suction surface of the vacuum suction pad, and by making the end of the vacuum suction pad bellows. Therefore, even if the degree of vacuum during suction is increased and the suction force is increased, the local suction force is prevented from being applied to the substrate.
【００１６】また、基板の吸着を解除する際に、真空吸
着パッドの吸引穴からイオン気体を供給するので、静電
気発生を抑制して基板を確実にかつ高速に搬送できる。Further, since the ion gas is supplied from the suction holes of the vacuum suction pad when the suction of the substrate is released, the generation of static electricity can be suppressed and the substrate can be transported reliably and at high speed.
【００１７】[0017]
【発明の実施の形態】本発明の実施の形態について以下
に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.
【００１８】（実施の形態1）本発明の実施の形態１に
ついて、図面を参照して説明する。図１は本発明の真空
吸着パッドの第１の実施形態を示す要部断面図であり、
図２は基板面に接する吸着側から見た吸着パッドの正面
図である。(Embodiment 1) Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of an essential part showing a first embodiment of a vacuum suction pad of the present invention.
FIG. 2 is a front view of the suction pad viewed from the suction side in contact with the substrate surface.
【００１９】本発明の真空吸着パッド６は、負圧吸引穴
３と吸着溝８が形成された凸形状支持部７から構成され
ている。吸着パッド６は適正硬度を有する弾性体であ
り、例えば外径３０ｍｍ、高さ１１ｍｍの導電性シリコ
ーンゴム等から成る。また、吸着パッド６の内部に設け
られた凸形状支持部７は、内径（φＣ）が従来吸着パッ
ドの外径（φＡ）より小さく（例えばφ８ｍｍ以下）、
吸着面に吸着溝８が放射状及び同心円状に複数個形成さ
れている。The vacuum suction pad 6 of the present invention comprises a negative pressure suction hole 3 and a convex support portion 7 in which a suction groove 8 is formed. The suction pad 6 is an elastic body having an appropriate hardness, and is made of, for example, a conductive silicone rubber having an outer diameter of 30 mm and a height of 11 mm. In addition, the convex support portion 7 provided inside the suction pad 6 has an inner diameter (φC) smaller than the outer diameter (φA) of the conventional suction pad (for example, φ8 mm or less),
A plurality of suction grooves 8 are radially and concentrically formed on the suction surface.
【００２０】図３は本発明の真空吸着パッドの他の実施
の形態を示す断面図であり、凸形状支持部７の外側に蛇
腹Ｂを設けたものである。また、本発明の液晶表示パネ
ル用吸着パッド形状は円形状に限定するものでなく、楕
円形状（図示せず）としてもよい。FIG. 3 is a sectional view showing another embodiment of the vacuum suction pad of the present invention, in which a bellows B is provided on the outer side of the convex supporting portion 7. The shape of the suction pad for a liquid crystal display panel of the present invention is not limited to a circular shape, and may be an elliptical shape (not shown).
【００２１】本発明の真空吸着パッドによれば、吸着溝
が形成された凸形状支持部７を内部に備えることによ
り、基板との接触面積が増加するため、パッドの外径を
大きくして真空度を高めても基板の変形を抑えることが
できる。According to the vacuum suction pad of the present invention, the contact area with the substrate is increased by providing the convex support portion 7 having the suction groove formed therein. Even if the degree is increased, the deformation of the substrate can be suppressed.
【００２２】真空度を調べると、従来の外径φ８のパッ
ドでは約２９０ｍｍＨｇの真空度であるのに対し、外径
φ３０の本発明のパッドでは約５６０ｍｍＨｇとなり、
従来の約２倍の真空度が得られた。The degree of vacuum is about 290 mmHg for the conventional pad having an outer diameter of φ8, whereas it is about 560 mmHg for the pad of the present invention having an outer diameter of φ30.
A vacuum degree about twice that of the conventional one was obtained.
【００２３】例えば重量が１．３Ｋｇの基板を水平吊り
上げする場合、安全係数を乗じて計算した必要真空度は
約７８７０ｍｍＨｇとなり、従来の外径φ８の吸着パッ
ドでは２８個を要するが、本発明では凸形状支持部７を
有することにより外径φ３０にすることができ、吸着パ
ッドの個数を１４個に減らせるとともにエアーリークの
危険性も減少するため、安定した吸着装置を提供するこ
とができる。For example, when a substrate having a weight of 1.3 kg is hoisted horizontally, the required vacuum degree calculated by multiplying the safety factor is about 7870 mmHg, which is 28 with the conventional suction pad having an outer diameter φ8, but according to the present invention. By having the convex-shaped supporting portion 7, the outer diameter can be set to φ30, the number of suction pads can be reduced to 14, and the risk of air leak can be reduced, so that a stable suction device can be provided.
【００２４】（比較例）図７は従来の吸着溝を形成して
いない真空吸着パッド形状を示す断面図である。また、
図８は一例として、図７の吸着パットを複数個使用して
液晶パネルを吸着保持した時の平面図である。図８から
判るように、従来は、各吸着パッドの保持部に同心円状
のニュートンリングが発生し基板が変形していたが、本
発明の真空吸着パッドでは、ニュートンリングは観察さ
れず、基板を変形させていないことを確認した。(Comparative Example) FIG. 7 is a sectional view showing the shape of a vacuum suction pad in which a conventional suction groove is not formed. Also,
FIG. 8 is, as an example, a plan view when a plurality of suction pads of FIG. 7 are used to suck and hold a liquid crystal panel. As can be seen from FIG. 8, conventionally, a concentric Newton ring is generated in the holding portion of each suction pad and the substrate is deformed, but in the vacuum suction pad of the present invention, the Newton ring is not observed and the substrate is It was confirmed that it was not deformed.
【００２５】（実施の形態２）図４は本発明の真空吸着
パッドを複数個使用して、吸着装置を構成したシステム
図である。圧縮空気発生源のコンプレッサー１０からフ
ィルター１６を通り、真空度調整レギュレータ１１を介
して、排気孔１２を備えたエジェクター９にて負圧を発
生させて、分岐管４を介して複数の吸着パッド６を真空
吸引するシステムである。(Embodiment 2) FIG. 4 is a system diagram in which a suction device is constructed by using a plurality of vacuum suction pads of the present invention. A negative pressure is generated by the ejector 9 provided with the exhaust hole 12 through the filter 16 from the compressor 10 as the compressed air generation source, the vacuum degree adjusting regulator 11, and the plurality of adsorption pads 6 through the branch pipe 4. Is a system for vacuum suction.
【００２６】また、図示していないタイマー、電磁弁を
併設して吸着パッド６への負圧（真空）供給のオン、オ
フ制御および分岐点や吸着パッド６のアーム部分等を上
下、左右、回転（反転動作を含む）位置認識等のロボッ
ト制御機能を付加させることにより、真空吸着装置を搬
送装置に利用することができる。Further, a timer and a solenoid valve (not shown) are provided together to control ON / OFF of the negative pressure (vacuum) supply to the suction pad 6 and to rotate the branch point and the arm portion of the suction pad 6 up, down, left and right. By adding a robot control function such as position recognition (including inversion operation), the vacuum suction device can be used as a transfer device.
【００２７】例えば、図５のように、本願の真空吸着装
置を用いて液晶表示パネル５の平板部を吸着保持するよ
うにした搬送装置では、液晶表示パネルの変形が防止さ
れるので、セル厚異常が減少し、製造ラインの歩留りを
向上することができる。For example, as shown in FIG. 5, in the transport device in which the flat plate portion of the liquid crystal display panel 5 is suction-held by using the vacuum suction device of the present application, the liquid crystal display panel is prevented from being deformed, so that the cell thickness is reduced. Abnormalities can be reduced, and the production line yield can be improved.
【００２８】このような液晶表示パネル用の搬送装置で
は、液晶表示パネルを吸着して生産装置のステージに移
動した後、分岐管４を大気圧に戻して排出することで、
従来と同様に液晶表示パネルを生産装置のステージにセ
ットすることができた。In such a liquid crystal display panel conveying device, the liquid crystal display panel is sucked and moved to the stage of the production apparatus, and then the branch pipe 4 is returned to atmospheric pressure and discharged.
The liquid crystal display panel could be set on the stage of the production equipment as in the past.
【００２９】（実施の形態３）図６は、本発明の真空吸
着装置において、静電気発生量を抑制するシステム図で
ある。(Embodiment 3) FIG. 6 is a system diagram for suppressing the amount of static electricity generated in the vacuum suction device of the present invention.
【００３０】基本構成は実施の形態２と同様に、圧縮空
気発生源のコンプレッサーから、真空度調整レギュレー
タを介して、排気孔を備えたエジェクターにて負圧を発
生させて、分岐管を介した複数の真空吸着パッドを真空
に吸引するシステムである。As in the second embodiment, the basic structure is such that a negative pressure is generated from a compressor of a compressed air generating source via a vacuum adjusting regulator by an ejector having an exhaust hole, and a negative pressure is generated via a branch pipe. It is a system that sucks a plurality of vacuum suction pads into a vacuum.
【００３１】従来より、静電気対策として、吸着パッド
材に例えばカーボンが含入されたゴム材を用いて電気抵
抗を小さくすることにより、液晶表示パネルの平板部か
ら離れる際の静電気を抑制する方法があるが、その場合
でも未だ十分満足できる静電気対策は得られず、歩留り
低下の原因となっている。Conventionally, as a countermeasure against static electricity, there has been a method of suppressing static electricity when the sheet is separated from the flat plate portion of the liquid crystal display panel by reducing the electric resistance by using, for example, a rubber material containing carbon as the suction pad material. However, even in that case, a satisfactory countermeasure against static electricity cannot be obtained yet, which causes a decrease in yield.
【００３２】本発明の図６の真空吸着装置は、イオナイ
ザにより発生させた静電気を中和するイオン気体１３
を、減圧状態の解除と同時にシーケンサ（図示せず）で
電磁弁１４、１５を切換えて吸着パッド６に送り込むよ
うにしたものである。The vacuum adsorption device of FIG. 6 of the present invention is an ion gas 13 for neutralizing the static electricity generated by the ionizer.
At the same time that the depressurized state is released, the solenoid valves 14 and 15 are switched by a sequencer (not shown) and sent to the suction pad 6.
【００３３】この様に構成した真空吸着装置を用いたと
ころ、液晶表示パネルを様々な帯電状態にある各種生産
装置へ搬送したり、または、吸着パッドから高速で離脱
させても、静電気の発生を完全に抑制することができ
た。By using the vacuum suction device constructed as described above, static electricity is generated even if the liquid crystal display panel is transported to various production devices in various charged states or is removed from the suction pad at high speed. I was able to suppress it completely.
【００３４】[0034]
【発明の効果】以上説明したように、本発明の真空吸着
パッドにおいては、吸着面に放射状及び同心円状の溝を
形成することにより、パッドと基板の接触面積が増加
し、基板の局所的な変形を防止するという効果を奏す
る。As described above, in the vacuum suction pad of the present invention, by forming the radial and concentric grooves on the suction surface, the contact area between the pad and the substrate increases, and the local area of the substrate is increased. This has the effect of preventing deformation.
【００３５】また、真空吸着パッドの端部を蛇腹にする
ことにより、パッドと基板の接触を容易にするという効
果を奏する。Further, the bellows at the end of the vacuum suction pad brings about an effect of facilitating contact between the pad and the substrate.
【００３６】また、本発明の真空吸着装置においては、
基板の吸着を解除する際に、真空吸着パッドの吸引穴か
ら静電気を中和するイオン気体を供給することにより、
静電気発生を抑制して基板を確実にかつ高速に搬送でき
るという効果を奏する。Further, in the vacuum suction device of the present invention,
When releasing the adsorption of the substrate, by supplying ion gas that neutralizes static electricity from the suction hole of the vacuum suction pad,
The effect that the generation of static electricity is suppressed and the substrate can be transported reliably and at high speed is achieved.
【図１】本発明の真空吸着パッドの第１の実施の形態を
示す要部断面図である。FIG. 1 is a sectional view of an essential part showing a first embodiment of a vacuum suction pad of the present invention.
【図２】本発明の真空吸着パッドの吸着面の正面図であ
る。FIG. 2 is a front view of the suction surface of the vacuum suction pad of the present invention.
【図３】本発明の他の実施例を示す要部断面図である。FIG. 3 is a cross-sectional view of an essential part showing another embodiment of the present invention.
【図４】本発明の真空吸着装置の構成図である。FIG. 4 is a configuration diagram of a vacuum suction device of the present invention.
【図５】本発明の真空吸着装置により液晶パネルを吸着
した状態を示す正面図である。FIG. 5 is a front view showing a state where a liquid crystal panel is sucked by the vacuum suction device of the present invention.
【図６】本発明の真空吸着装置の他の実施例を示す構成
図である。FIG. 6 is a configuration diagram showing another embodiment of the vacuum suction device of the present invention.
【図７】従来の真空吸着パッドの要部断面図である。FIG. 7 is a sectional view of a main part of a conventional vacuum suction pad.
【図８】従来の真空吸着パッドを用いたときに発生する
リング状の模様である。FIG. 8 is a ring-shaped pattern that occurs when a conventional vacuum suction pad is used.
１ 従来の吸着パッド ２ パッド内部 ３ 真空吸引穴 ４ 分岐管 ５ 液晶表示パネル ６ 本発明の吸着パッド ７ 凸形状支持部 ８ 吸着溝 ９ エジェクタ（真空度調整器） １０ コンプレッサ １１ 真空度調整レギュレタ １２ 排気孔 １３ 中和イオン気体 １４ 吸着弁 １５ 解除弁 １６ フィルタ １７ 圧力計（正圧表示計） １９ 真空計（負圧表示計） ２０ 中和イオン発生器 1 Conventional suction pad 2 Inside the pad 3 vacuum suction holes 4 branch pipes 5 Liquid crystal display panel 6 Suction pad of the present invention 7 Convex support 8 suction groove 9 ejector (vacuum degree adjuster) 10 compressor 11 Vacuum adjustment regulator 12 Exhaust hole 13 Neutralizing ionic gas 14 Adsorption valve 15 Release valve 16 filters 17 Pressure gauge (Positive pressure indicator) 19 Vacuum gauge (negative pressure indicator) 20 Neutralizing ion generator
Claims (3)
において、 吸着パッド内側に吸引穴を備え、吸着面には放射状の溝
と同心円状の溝が形成されていることを特徴とする真空
吸着パッド。1. A vacuum suction pad having a conical shape made of an elastic body, wherein suction holes are provided inside the suction pad, and radial grooves and concentric grooves are formed on the suction surface. pad.
ていることを特徴とする請求項１記載の真空吸着パッ
ド。2. The vacuum suction pad according to claim 1, wherein an end portion of the vacuum suction pad has a bellows shape.
用い、基板の吸着を解除する際に、真空吸着パッドの吸
引穴からイオン気体を供給することを特徴とする真空吸
着装置。3. A vacuum suction device using the vacuum suction pad according to claim 1 or 2, wherein ion vacuum gas is supplied from a suction hole of the vacuum suction pad when the suction of the substrate is released.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001290440A JP2003094370A (en) | 2001-09-25 | 2001-09-25 | Vacuum suction pad and vacuum sucker using it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001290440A JP2003094370A (en) | 2001-09-25 | 2001-09-25 | Vacuum suction pad and vacuum sucker using it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003094370A true JP2003094370A (en) | 2003-04-03 |
Family
ID=19112743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001290440A Pending JP2003094370A (en) | 2001-09-25 | 2001-09-25 | Vacuum suction pad and vacuum sucker using it |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003094370A (en) |
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| JP2004299814A (en) * | 2003-03-28 | 2004-10-28 | Takasago Thermal Eng Co Ltd | Method and apparatus for manufacturing static-free insulator substrate |
| JP2010524712A (en) * | 2007-04-26 | 2010-07-22 | ペース イノベーションズ， エル．シー． | Vacuum gripping device |
| CN102205541A (en) * | 2010-03-29 | 2011-10-05 | 鸿富锦精密工业（深圳）有限公司 | Sucking device |
| CN102951442A (en) * | 2011-08-25 | 2013-03-06 | 三星电机株式会社 | Vacuum pad |
| KR101403491B1 (en) | 2013-11-19 | 2014-06-05 | 주식회사 비에프테크 | A vacuum pad for polarizer attacher |
| JP2014217912A (en) * | 2013-05-08 | 2014-11-20 | サンビット株式会社 | Suction pad, transfer robot, and suction mechanism |
| CN104526302A (en) * | 2014-12-19 | 2015-04-22 | 广东长虹电子有限公司 | An auxiliary anti-static chuck architecture |
| KR101568252B1 (en) * | 2009-05-13 | 2015-11-11 | 엘지디스플레이 주식회사 | Apparatus for fabricating liquid crystal display panel |
| JP2017200712A (en) * | 2016-05-02 | 2017-11-09 | Ｔｏｗａ株式会社 | Adsorption unit, plate-shaped member conveying unit, resin sealing device, plate-shaped member conveying method and resin sealing method |
| CN108621190A (en) * | 2017-03-17 | 2018-10-09 | 通快机床两合公司 | The method and apparatus for carrying out state prosecution for the vacuum aspirator to capture apparatus |
| CN110925289A (en) * | 2019-03-13 | 2020-03-27 | 中山市太力家庭用品制造有限公司 | Elastic colloid for sucking disc and vacuum sucking disc using same |
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2001
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004299814A (en) * | 2003-03-28 | 2004-10-28 | Takasago Thermal Eng Co Ltd | Method and apparatus for manufacturing static-free insulator substrate |
| JP2010524712A (en) * | 2007-04-26 | 2010-07-22 | ペース イノベーションズ， エル．シー． | Vacuum gripping device |
| KR101568252B1 (en) * | 2009-05-13 | 2015-11-11 | 엘지디스플레이 주식회사 | Apparatus for fabricating liquid crystal display panel |
| CN102205541A (en) * | 2010-03-29 | 2011-10-05 | 鸿富锦精密工业（深圳）有限公司 | Sucking device |
| CN102951442A (en) * | 2011-08-25 | 2013-03-06 | 三星电机株式会社 | Vacuum pad |
| JP2014217912A (en) * | 2013-05-08 | 2014-11-20 | サンビット株式会社 | Suction pad, transfer robot, and suction mechanism |
| KR101403491B1 (en) | 2013-11-19 | 2014-06-05 | 주식회사 비에프테크 | A vacuum pad for polarizer attacher |
| CN104526302A (en) * | 2014-12-19 | 2015-04-22 | 广东长虹电子有限公司 | An auxiliary anti-static chuck architecture |
| JP2017200712A (en) * | 2016-05-02 | 2017-11-09 | Ｔｏｗａ株式会社 | Adsorption unit, plate-shaped member conveying unit, resin sealing device, plate-shaped member conveying method and resin sealing method |
| CN107342247A (en) * | 2016-05-02 | 2017-11-10 | 东和株式会社 | Absorbing unit, tabular component supply unit, resin sealing apparatus, tabular component carrying method and method of resin-sealing |
| KR20170124452A (en) * | 2016-05-02 | 2017-11-10 | 토와 가부시기가이샤 | Adsorption unit, plate-like member transporting unit, resin sealing apparatus, transporting method for plate-like member and sealing method for resin |
| KR102019542B1 (en) * | 2016-05-02 | 2019-09-06 | 토와 가부시기가이샤 | Adsorption unit, plate-like member transporting unit, resin sealing apparatus, transporting method for plate-like member and sealing method for resin |
| CN108621190A (en) * | 2017-03-17 | 2018-10-09 | 通快机床两合公司 | The method and apparatus for carrying out state prosecution for the vacuum aspirator to capture apparatus |
| CN110925289A (en) * | 2019-03-13 | 2020-03-27 | 中山市太力家庭用品制造有限公司 | Elastic colloid for sucking disc and vacuum sucking disc using same |
| WO2023005551A1 (en) * | 2021-07-28 | 2023-02-02 | 上海悦肤达生物科技有限公司 | Suction structure and sheet-grabbing apparatus |
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