JP2003082380A - Nonflammable aqueous cutting fluid composition and nonflammable aqueous cutting fluid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nonflammable aqueous cutting fluid composition which has good dispersibility of abrasive grains and no problem of flammability even when used in the cutting processing of hard brittle materials, exhibits rust preventive properties when used in the facilities of the oil system, and is easy to wash with water. SOLUTION: The nonflammable aqueous cutting fluid composition comprises a polycarboxylic acid based polymeric compound and/or its salt, and a carboxylic acid and/or its salt. The polycarboxylic acid based polymeric compound and/or its salt has a weight average molecular weight of 1,000-200,000 is incorporated in an amount of 5-45 wt.%. The carboxylic acid and/or its salt, and is incorporated in an amount of 0.05-5 wt.%. At least one kind of addition auxiliaries to be selected from the group consisting of a water-soluble solvent, a lubricant, a viscosity modifier, a rust preventive for non-ferrous metals, and an anti-foaming agent may further be incorporated into this composition.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-flammable water-based cutting fluid composition and a non-flammable water-based cutting fluid that can be used in oil-based equipment, and more specifically, single crystal silicon or polycrystalline silicon as a semiconductor crystal material. The present invention relates to a water-based cutting fluid suitable for cutting ingots such as quartz, quartz, and ceramics, and a non-flammable water-based cutting fluid in the form of slurry in which abrasive particles are mixed.

[0002]

2. Description of the Related Art Conventionally, in cutting fluids for cutting hard and brittle materials such as silicon ingots, as an abrasive dispersion medium,
A non-aqueous cutting fluid mainly composed of mineral oil is used. This non-aqueous cutting fluid is a slurry in which abrasive grains such as silicon carbide are dispersed in cutting oil at a ratio of 1: 1 (weight ratio), and this slurry is continuously supplied to the cutting surface. A chlorine-based organic solvent such as trichloroethane or methylene chloride or a high-concentration nonionic surfactant is used as a cleaning liquid for cleaning the cut wafer.

However, since mineral oil is a flammable dangerous substance, explosion proof equipment is required and the storage quantity is limited, which may cause problems in environmental protection and manufacturing control. Further, the above-mentioned chlorine-based organic solvent cleaning agent used for cleaning a wafer cut with a mineral oil has a carcinogenic property, which is a safety and health problem. In addition, its use has been banned in recent years because it is the main cause of air pollution and destruction of the ozone layer. A nonionic surfactant is used as an alternative cleaning agent.
Cleaning of this nonionic surfactant requires a large cleaning facility due to its low cleaning power, and since it needs to be used at a high concentration, it causes problems in wastewater treatment and disposal. There is.

On the other hand, a glycol-type water containing water-soluble ethers such as polyoxyalkylene glycol and its derivatives as a main component, which does not contain mineral oil as a main component and can be washed with water after the cutting step, is used. Melting water-soluble cutting fluid (JP-A-3-181598 and JP-A-11-1)
98016) is proposed.

[0005]

However, the glycol type water-soluble cutting fluid needs to be mixed with water in order to eliminate the flash point. However, when the water content is low, it causes flammability and the water content. When a large amount is mixed, the dispersibility of the abrasive grains deteriorates, which causes problems in manufacturing control. Also,
Even if the glycol type water-soluble cutting fluid is easy to wash with water, the waste water load of the washing water is high and there is a problem in waste fluid treatment. Also, if water-soluble cutting fluid is introduced into conventional equipment that used mineral oil-based cutting fluid, rust will occur, so investment is required to improve equipment and introduce specialized equipment. .

[0006]

The present invention has been made by paying attention to such conventional problems, and a specific polycarboxylic acid type polymer compound and / or a salt thereof, a carboxylic acid and / or Or by using the salt thereof, the dispersibility of the abrasive grains becomes good even in a composition containing a large amount of water, and there is no problem of flammability when used for cutting hard and brittle materials,
It is possible to provide a non-flammable water-based cutting fluid composition that exhibits rust resistance even when used in oil-based equipment and is easy to wash with water.

That is, the non-flammable water-based cutting fluid composition of the present invention comprises a polycarboxylic acid polymer compound having a weight average molecular weight of 1,000 to 200,000 and / or a salt thereof in an amount of 5 to 4
5% by weight and 0.0% of carboxylic acid and / or its salt
It is characterized by containing 5 to 5% by weight.

It is considered that the polycarboxylic acid type polymer compound is adsorbed on the abrasive grains and exhibits a stable dispersion effect due to the protective colloid effect. Further, since the salt of the polycarboxylic acid-based polymer compound is provided with ionicity, it is considered that an electrostatic repulsion force is generated and further excellent dispersibility is obtained. When the molecular weight or blending amount of this polycarboxylic acid type polymer compound is lower than 1,000, a uniform protective colloid layer is not formed on the particle surface, the repulsive force between particles becomes weak, and the dispersibility and redispersion are reduced. It is thought that the sex will deteriorate. Further, when the molecular weight exceeds 200,000, it is considered that the aggregating action appears and the redispersibility decreases.

In addition, the non-flammable water-based cutting fluid composition of the present invention contains the carboxylic acid and / or its salt in an amount of 0.05-5.
It is contained by weight%. Carboxylic acid and its salts are added to enhance the anticorrosive function.

The non-flammable water-based cutting fluid composition of the present invention comprises at least one additive aid selected from the group consisting of water-soluble solvents, lubricants, viscosity modifiers, anti-corrosion agents for non-ferrous metals and defoamers. May be further contained. Among them, those containing one or more water-soluble solvents selected from polyoxyalkylene glycols and their derivatives as the above-mentioned addition aid are preferable.

The polycarboxylic acid type polymer compound and /
Alternatively, the salt thereof is a polymer prepared from one or more monomers selected from the group consisting of acrylic acid, maleic acid and methacrylic acid, an alkali metal salt of the polymer, an onium salt of the polymer and one of these. It is preferably selected from the group consisting of one kind or a mixture of two or more kinds.

Further, the polycarboxylic acid type polymer compound and / or its salt is preferably a polymer represented by the general formula (1).

[0013]

[Chemical 3]

In the general formula (1), R is a hydrogen atom or a methyl group, and M ₁ , M ₂ and M ₃ are any of a hydrogen atom, an alkali metal atom or onium. It may be the same or different from each other. n is an integer of 1 or more,
m is an integer of 0 or more.

The carboxylic acid and / or its salt is
Is preferably selected from the group consisting of the aliphatic dicarboxylic acid represented by the general formula (2), the alkali metal salt of the aliphatic dicarboxylic acid, and the onium salt of the aliphatic dicarboxylic acid.

[0016]

[Chemical 4]

Here, in the general formula (2), k is 6 to
It is an integer of 12.

The non-flammable water-based cutting fluid of the present invention is characterized by containing the above non-flammable water-based cutting fluid composition and abrasive grains.

Here, the grain size of the abrasive grains is 0.5 to 50.
It is preferably μm. Further, a cutting fluid in which a non-flammable water-based cutting fluid composition and abrasive grains are dispersed in a weight ratio of 1: 0.5 to 1: 1.5 is preferable.

The non-flammable water-based cutting fluid of the present invention is preferably used for a wire saw or a band saw, and particularly preferably for cutting an ingot made of a hard and brittle material. Examples of the hard and brittle material include materials selected from silicon, quartz and quartz.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

As the polycarboxylic acid type polymer compound used in the present invention, homopolymers or copolymers of acrylic acid, maleic acid or methacrylic acid, or ethylene, propylene, styrene, methacrylic acid ester, maleic acid monoester, maleic acid with these. Copolymers with acid diesters, vinyl acetate and the like can be used. Further, an alkali metal salt and / or onium salt of the above polycarboxylic acid type polymer compound can also be used. Here, as the type of salt, salts of metal ions such as sodium, potassium and lithium, ammonia, monoethanolamine, diethanolamine, triethanolamine, methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, triethylamine, methylethanolamine , Salts of onium ions such as dimethylethanolamine, methyldiethanolamine, ethylethanolamine, diethylethanolamine and ethyldiethanolamine. Of these salts, the preferred ones are sodium, potassium, ammonia, monoethanolamine and diethanolamine salts.

Among the above-mentioned polycarboxylic acid type polymer compounds, particularly preferably used are homopolymers of acrylic acid represented by the general formula (1) of Chemical Formula 3 and / or acrylic acid and maleic acid. Alkali metal salt and / or onium salt of the copolymer of

The weight average molecular weight of the polycarboxylic acid type polymer compound and / or its salt is 1,000 to 200,000.
0 is preferable, but 5,000 to 20,000
The product is easy to handle, and an appropriate viscosity can be obtained when it is made into an aqueous solution. If the molecular weight is less than 1,000, the dispersibility of the abrasive grains is low, and a compounding amount of more than 50% by weight is required, and the waste water load increases. When the molecular weight is more than 200,000, it is necessary to reduce the compounding amount in order to obtain an appropriate viscosity, and in addition, the dispersibility of abrasive grains is lowered.

The lower limit of the compounding amount of the polycarboxylic acid type polymer compound and / or its salt is 5% by weight or more, preferably 2%.
It is 0% by weight or more, and the upper limit is 45% by weight or less, preferably 40% by weight or less. If the content is less than 5% by weight, sufficient dispersibility of abrasive grains cannot be obtained, and if it exceeds 45% by weight, the viscosity of the cutting fluid increases and it becomes difficult to mix the abrasive grains.
Continuous supply to the cutting equipment is also impossible.

Examples of the carboxylic acid used in the present invention include propanoic acid, butanoic acid, pentanoic acid, hexanoic acid, heptanoic acid, octanoic acid, nonanoic acid, decanoic acid, undecanoic acid, dodecanoic acid, tetradecanoic acid, heptadecanoic acid, octadecanoic acid. , Aliphatic monocarboxylic acids such as oleic acid,
Benzoic acid, o-methylbenzoic acid (toluic acid), m-methylbenzoic acid, p-methylbenzoic acid, o-ethylbenzoic acid, m-ethylbenzoic acid, p-ethylbenzoic acid, o-propylbenzoic acid, m -Aromatic monocarboxylic acids such as propylbenzoic acid, p-propylbenzoic acid, pt-butylbenzoic acid and naphthalenecarboxylic acid, oxalic acid, malonic acid,
Succinic acid, glutaric acid, adipic acid, heptanedioic acid (pimelic acid), octanedioic acid (suberic acid), nonanedioic acid (azelaic acid), decanedioic acid (sebacic acid), undecanedioic acid, dodecanedioic acid And aliphatic dicarboxylic acids such as tridecanedioic acid, tetradecanedioic acid, pentadecanedioic acid, and hexadecanedioic acid, and aromatic dicarboxylic acids such as phthalic acid, isophthalic acid, and terephthalic acid. Further, these alkali metal salts and onium salts can also be used. The types of salts include salts of metal ions such as sodium, potassium and lithium, ammonia, monoethanolamine, diethanolamine, triethanolamine, methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, triethylamine, methylethanolamine, dimethyl. Salts of onium ions such as ethanolamine, methyldiethanolamine, ethylethanolamine, diethylethanolamine, ethyldiethanolamine and the like can be mentioned. Of these salts, the salts of sodium, potassium, ammonia, monoethanolamine and diethanolamine are preferable.

Particularly preferred carboxylic acid is a neutralized product of an alkali metal salt and an ammonium salt of an aliphatic dicarboxylic acid represented by the general formula (2) of Chemical formula 4, and an alkanolamine salt, and specifically, octane dicarboxylic acid. Acid (suberic acid),
Examples thereof include sodium salts of nonanedioic acid (azelaic acid), decanedioic acid (sebacic acid), undecanedioic acid, dodecanedioic acid, tridecanedioic acid, tetradecanedioic acid, and diethanolamine salts. These have a low foaming property and do not require an auxiliary agent for adding an antifoaming agent.

The lower limit of the blending amount of the carboxylic acid and / or its salt is 0.05% by weight or more, preferably 0.2% by weight or more, and the upper limit is 5% by weight or less, preferably 2% by weight or less. . If the blending amount is less than 0.05% by weight, sufficient rust preventive properties cannot be obtained, and if it exceeds 5% by weight, dispersibility decreases, and it becomes difficult to mix the abrasive grains, and continuous to the cutting device. Supply will also be impossible.

The water content of the non-flammable water-based cutting fluid is 5
If it is 0% by weight or more and less than 50% by weight, the polycarboxylic acid salt type polymer compound cannot be uniformly dissolved, which is not preferable. Further, by blending the water content of 50% by weight or more, it is possible to remove the slurry of the non-flammable water-based cutting fluid of the present invention only with water even when washing the cut object (wafer, etc.) after cutting. Therefore, cleaning becomes easy. In addition, the cutting fluid of the present invention is preferably adjusted to pH 7 to 9 by using a neutralizing salt. Rust is recognized in the iron-based material in the acidic region of pH 4 or less, and the rust is detected in the alkaline region of pH 10 or more. If it adheres to the skin, there is a risk of rough hands.

If desired, various additives may be added to the non-flammable water-based cutting fluid of the present invention. Examples of such addition aids include water-soluble solvents, lubricants, viscosity modifiers, anti-corrosion agents for non-ferrous metals, defoaming agents and the like. Examples of the water-soluble solvent include ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, dipropylene glycol, tripropylene glycol, hexylene glycol, glycerin, polyethylene glycol, polypropylene glycol, polyethylene glycol-polypropylene glycol copolymer. ,
Hexylene glycol, 1,3-propanediol,
1,4-butanediol, 1,6-hexanediol,
Pentaerythritol, sorbitol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, triethylene Mention may be made of glycol monobutyl ether, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, tripropylene glycol monomethyl ether and mixtures thereof. Further, examples of the lubricant include nonionic surfactants, anionic surfactants, fatty acids, and fatty acid polycondensates. Examples of the viscosity modifier include bentonite, aqueous silica sol, polyvinylpyrrolidone,
Carboxymethyl cellulose etc. can be mentioned.
Examples of the anticorrosive agent for non-ferrous metals include benzotriazole compounds, and examples of the defoaming agent include silicone compounds, acetylene diol compounds, polyglycol compounds, and alcohols. A particularly suitable addition aid is a polyoxyalkylene glycol-based solvent such as ethylene glycol, diethylene glycol, or propylene glycol, which is a water-soluble solvent, and these are effective for preventing sedimentation of abrasive grains.

The abrasive grains to be dispersed in the non-flammable water-based cutting fluid of the present invention are not particularly limited, and examples thereof include silicon carbide, aluminum oxide, zirconium oxide, silicon dioxide, cesium dioxide and diamond. The average grain size of the abrasive grains is preferably 0.5 to 50 μm, more preferably 5
˜30 μm. When the average particle size of the abrasive grains exceeds 50 μm, the sedimentation speed of the abrasive grains is increased and it becomes difficult to disperse the abrasive grains. If the average grain size of the abrasive grains is smaller than 0.5 μm, the cutting ability of the cutting fluid is reduced, which is not preferable. The lower limit of the compounding ratio of the abrasive grains to the non-flammable water-based cutting fluid 1 is 0.5 (weight ratio) or more, preferably 0.8 or more. Further, the upper limit of the mixing ratio of the abrasive grains is 1.5 (weight ratio) or less, and preferably 1.2 or less. If the mixing ratio of the abrasive grains is less than 0.5, the amount of abrasive grains in the slurry is too small,
It takes a long time for cutting. Further, if the mixing ratio of the abrasive grains exceeds 1.5, the dispersibility of the abrasive grains is poor and it becomes difficult to continuously supply the cutting fluid in the form of slurry of the present invention to the cutting device, which is not preferable.

The non-flammable water-based cutting fluid of the present invention is used for cutting hard and brittle materials, and the hard and brittle materials are not particularly limited, but single crystal silicon, polycrystalline silicon, quartz, quartz, glass,
It can be preferably used for hard and brittle materials such as gallium-arsenic and ceramics, and more preferably applied to a single crystal silicon ingot or a quartz (quartz) ingot. Further, the non-flammable water-based cutting fluid of the present invention uses free abrasive grains,
Any type of cutting device can be used as long as it is a cutting device for cutting hard and brittle materials, but preferable cutting devices include, for example, a wire saw and a band saw.

[0033]

EXAMPLES Next, the present invention will be explained based on Examples and Comparative Examples, but the present invention is not limited to these Examples.

(Examples 1 to 18 and Comparative Examples 1 to 10) The components shown in Tables 1 and 2 were blended in the proportions shown to obtain cutting fluid compositions. A cutting fluid was prepared by adding abrasive grains to the obtained cutting fluid composition, and the dispersibility of each cutting fluid, redispersibility, viscosity change, cutting accuracy, cleaning property and rust preventive property were measured as follows. The results are shown in Tables 3 and 4.

[0035]

[Table 1]

[0036]

[Table 2]

(Dispersibility and Redispersibility of Abrasive Grains) Tables 1 and 2
500 g of the cutting agent composition and silicon carbide abrasive grains (GP
# 800, made by Fujimi Incorporated) 500
g and 1,000 ml in a plastic container and store at room temperature (25
(C) using a homodisper (manufactured by Tokushu Kika Kogyo Co., Ltd.) at a rotation speed of 3,000 rpm for 3 minutes to obtain a uniform slurry-like non-flammable water-based cutting fluid.

100 ml of this water-based cutting fluid was put into a 100 ml Nessler tube (diameter 24 mm, height 200 mm),
At 1 hour, 6 hours, 24 hours and 48 hours after standing, the volume of the lower layer abrasive grains was measured and the sedimentation state was observed. It can be judged that the lower layer having a large capacity has a small amount of upper separated water and is excellent in the dispersibility of the abrasive grains.

The redispersibility of the abrasive grains was judged by the following criteria from the fluidity of the abrasive grain layer after tilting the Nessler tube containing the slurry horizontally after 48 hours of standing.

[0040] ◎… The entire abrasive grain layer flows smoothly ○: The entire abrasive grain layer slowly flows △: Only the upper part of the abrasive layer flows X: The abrasive grain layer hardly flows.

As is clear from Tables 3 and 4, the non-flammable water-based cutting fluid of each Example exhibits a stable dispersion effect comparable to the mineral oil-based cutting fluid (Comparative Example 10). This indicates that the polycarboxylic acid type polymer compound blended in the non-flammable water-based cutting fluid of each example is adsorbed on the abrasive grain to form a protective colloid. Further, since the alkali metal salt and onium salt of the polycarboxylic acid type polymer compound have ionicity, it is considered that electrostatic repulsion force is exerted, and further excellent dispersibility is obtained. . When the polycarboxylic acid polymer compound has a certain molecular weight or less or when the compounding amount is low, it is considered that a uniform protective colloid layer is not formed on the particle surface and the repulsive force between particles becomes weak, Dispersibility and redispersibility are reduced. Further, when the molecular weight exceeds 200,000, the aggregating action is exhibited and the redispersibility is deteriorated.

(Viscosity Change) 500 g of the cutting fluid composition listed in Tables 1 and 2 and silicon carbide abrasive grains (GP # 800, manufactured by Co., Ltd.)
Made by Fujimi Incorporated) 500g and 1,00
Collect in a 0 ml poly container and rotate at room temperature (25 ° C) with a homodisper (manufactured by Tokushu Kika Kogyo Co., Ltd.) rotation speed of 3,000r.
The mixture was stirred at pm for 3 minutes to obtain a uniform slurry-like non-flammable water-based cutting fluid. The viscosity of this water-based cutting fluid at 25 ° C. was measured with a BM type viscometer. Next, using a homomixer (disper blade), the mixture was stirred at a rotation speed of 10,000 rpm for 1 hour, adjusted to 25 ° C., and then the viscosity was measured.
The rate of change in viscosity before and after stirring = (viscosity after stirring for 1 hour at 10,000 rpm) / (viscosity before stirring) was determined, and the effect of shearing force was investigated. It is shown that the closer the viscosity change rate is to 1, the smaller the viscosity change at the time of cutting an ingot or the like and the more stable workability can be obtained.

As is clear from Tables 3 and 4, when the non-flammable water-based cutting fluid of each Example is used, the viscosity change is smaller than that of the cutting fluid of Comparative Example, and the mineral oil-based cutting fluid ( It can be seen that it has a viscosity stability equal to or higher than that of Comparative Example 10).

(Cutting processing accuracy) The cutting fluid compositions listed in Tables 1 and 2 and silicon carbide abrasive grains (GP # 800, manufactured by Fujimi Incorporated) were stirred and mixed at a ratio of 1: 1 (weight ratio). A non-flammable water-based cutting fluid in the form of a uniform slurry was obtained. Using this cutting fluid, an 8-inch diameter single crystal silicon ingot was cut with a wire saw cutting device having a wire wire diameter of 180 μm, and the processing accuracy of the cut wafer was evaluated.

The processing accuracy is measured by measuring the warp of the wafer (WARP, the maximum value of the height difference between the central part and the outer peripheral part at a total of 5 points), obtaining the average value of 10 wafers, and the cutting processing accuracy according to the following criteria. Was judged.

[0046] ◎ ... 0 μm or more and less than 10 μm ○: 10 μm or more and less than 20 μm Δ: 20 μm or more and less than 30 μm X: 30 μm or more.

As is clear from Tables 3 and 4, when the non-flammable water-based cutting fluid of each example is used, the cutting accuracy is higher than that of the comparative example, and the mineral oil-based cutting fluid is used. It can be seen that cutting processing accuracy equal to or higher than that of (Comparative Example 10) can be exhibited.

(Washability) 1,000 g of the cutting fluid composition shown in Tables 1 and 2 and 500 g of silicon carbide abrasive grains (GP # 800, manufactured by Fujimi Incorporated) are used.
Collect in a ml plastic container and homogenize at room temperature (25 ° C) (disper blade) at a rotation speed of 3,000 rpm for 3 times.
After stirring for a minute, a uniform slurry-like non-flammable water-based cutting fluid was obtained.

The above cutting fluid was applied to a silicon wafer and a quartz wafer, dried at 80 ° C. for 1 hour, and used as a simulated sample after cutting. The wafer of this simulated sample was washed with running water (room temperature 25 ° C.) for 3 minutes, and the washability was judged according to the following criteria.

[0050] ○: Those that can be washed off without any abrasive residue ×: Abrasive particles remain and cannot be washed off.

As is clear from Tables 3 and 4, when the non-flammable water-based cutting fluid of each example was used, and when the cutting fluid of the comparative example was used for both silicon wafers and quartz wafers Detergency equal to or higher than that of is obtained. Incidentally, the mineral oil-based cutting fluid (Comparative Example 10) could not be washed with water, and the cleaning performance was evaluated as x. However, in this case, the removal of the abrasive grains could not be performed at all. The detergency is obviously inferior to that of the example.

(Rustproofness) 2 ml of the cutting fluid listed in Tables 1 and 2 was dropped on cast iron powder (FC20), and the rusting condition was confirmed at room temperature for 3 hours, 1 day and 3 days. The following criteria were compared.

[0053] ◎ ... No rusting ○: Rust area less than 5%, △: Rust area 5% to less than 25% ×: Rust area is 25% or more.

As is clear from Tables 3 and 4, when the non-flammable water-based cutting fluid of each example is used, it exhibits a rust-preventing property equal to or higher than that of the cutting fluid of the comparative example, and a mineral oil-based cutting fluid. It can be seen that the rust preventive property is equal to or close to that of (Comparative Example 10).

[0055]

[Table 3]

[0056]

[Table 4]

[0057]

The non-flammable water-based cutting fluid composition of the present invention comprises:
Since it contains a polycarboxylic acid-based polymer compound and / or a salt thereof and a carboxylic acid and / or a salt thereof, the dispersibility of the abrasive grains becomes good even if the composition contains a large amount of water, and the hard particles are hard. There is no problem of flammability when used for cutting brittle materials. Further, since the non-flammable water-based cutting fluid composition of the present invention has a high rust preventive property, rust does not occur even when used in oil-based equipment. In addition, it becomes possible to easily wash away by washing with water.

Further, since the non-flammable water-based cutting fluid for oil-based equipment of the present invention contains abrasive grains in the above composition, it can be continuously supplied to a cutting device such as a wire saw or band saw. Highly accurate wafer cutting can be performed.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) C10M 125/28 C10M 125/28 129/26 129/26 129/34 129/34 129/42 129/42 145 / 14 145/14 145/16 145/16 145/26 145/26 // C10N 10:02 C10N 10:02 10:06 10:06 10:08 10:08 20:04 20:04 20:06 20: 06 Z 30:00 30:00 Z 30:04 30:04 30:12 30:12 30:18 30:18 40:22 40:22 F term (reference) 4H104 AA01Z AA04C AA13C AA22C BB14C BB18C CB08A CB08C CB09A CB09C CB14C EA03A EA03C EA08C FA01 FA03 FA04 LA02 LA06 LA20 PA22 QA01 RA01

Claims (13)

[Claims] 1. A weight average molecular weight of 1,000 to 200,
Non-flammable water-based cutting fluid composition containing 5 to 45% by weight of polycarboxylic acid type polymer compound and / or salt thereof and 0.05 to 5% by weight of carboxylic acid and / or salt thereof . 2. The method according to claim 1, further comprising at least one additive aid selected from the group consisting of a water-soluble solvent, a lubricant, a viscosity modifier, a corrosion inhibitor for non-ferrous metals and an antifoaming agent. Non-flammable water-based cutting fluid composition. 3. The non-flammable water-based cutting fluid composition according to claim 2, wherein the additive aid contains one or more water-soluble solvents selected from polyoxyalkylene glycol and its derivatives. . 4. A polymer prepared from one or more monomers selected from the group consisting of acrylic acid, maleic acid and methacrylic acid, wherein the polycarboxylic acid-based polymer compound and / or its salt is a polymer. Alkali metal salts of polymers, onium salts of said polymers and one or two of these
The non-flammable water-based cutting fluid composition according to any one of claims 1 to 3, which is selected from the group consisting of a mixture of one or more kinds. 5. The non-flammable water-based cutting fluid according to claim 1, wherein the polycarboxylic acid-based polymer compound and / or its salt is a polymer represented by the general formula (1) of Chemical formula 1. Composition. [Chemical 1] (In the formula, R is a hydrogen atom or a methyl group, M ₁ , M ₂ , and M ₃ are either a hydrogen atom, an alkali metal atom or onium and may be the same or different, and n is 1 The above integers and m are integers of 0 or more.) 6. The carboxylic acid and / or salt thereof comprises an aliphatic dicarboxylic acid represented by the general formula (2) of Chemical formula 2, an alkali metal salt of the aliphatic dicarboxylic acid and an onium salt of the aliphatic dicarboxylic acid. The non-flammable water-based cutting fluid composition according to any one of claims 1 to 5, which is selected from the group. [Chemical 2] (In the formula, k is an integer of 6 to 12.) 7. The alkali metal salt and / or onium salt of a homopolymer of acrylic acid, wherein the polycarboxylic acid-based polymer compound and / or its salt has a weight average molecular weight of 5,000 to 150,000. And / or an alkali metal salt and / or onium salt of a copolymer of acrylic acid and maleic acid, and the content of the polycarboxylic acid-based polymer compound and / or salt thereof is 20 to 40% by weight.
And the carboxylic acid and / or salt thereof is selected from the group consisting of an aliphatic dicarboxylic acid represented by the general formula (2) of Chemical formula 2, an alkali metal salt of the aliphatic dicarboxylic acid and an onium salt of the aliphatic dicarboxylic acid. The content of the carboxylic acid and / or salt thereof is 0.5 to 2% by weight, and the addition aid is a water-soluble solvent selected from polyoxyalkylene glycol and its derivatives which are water-soluble solvents. The non-flammable water-based cutting fluid composition according to claim 2, which is a solvent, and the content of the water-soluble solvent is 5 to 20% by weight. 8. A non-flammable water-based cutting fluid containing the non-flammable water-based cutting fluid composition according to claim 1 and abrasive grains. 9. The non-flammable water-based cutting fluid according to claim 8, wherein the grain size of the abrasive grains is 0.5 to 50 μm. 10. The non-flammable water-based cutting fluid composition according to claim 1 and abrasive grains in a weight ratio of 1: 0.
The non-flammable water-based cutting fluid according to claim 8 or 9, which is dispersed at a ratio of 5 to 1: 1.5. 11. The non-flammable water-based cutting fluid according to claim 8, which is used for a wire saw or a band saw. 12. The non-flammable water-based cutting fluid according to claim 8, which is used for cutting an ingot made of a hard and brittle material. 13. The non-flammable water-based cutting fluid according to claim 12, wherein the hard and brittle material is selected from silicon, quartz and quartz.