JP2003075505A - Parts tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the weight and size of a parts tester. SOLUTION: In this part tester, tray storing areas Sa1, Sa2 (tray placing part) are provided on the both sides of a test head 4 for carrying out a test, and the respective storing areas Sa1, Sa2 are provided with first to fourth tray storing parts 11 to 14 for placing parts storing trays Tr. The storing areas Sa1, Sa2 are respectively provided with conveying robots 20a, 20b (conveying device). The respective conveying robots 20a, 20b are formed of a scalar type robot, whereby parts conveyance between each tray Tr and the test head 4 is directly performed in the condition where the parts are sucked by nozzle members carried on the tips of the arms of the conveying robots 20a, 20b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component testing apparatus for testing electronic components such as IC chips.

[0002]

2. Description of the Related Art In the process of manufacturing semiconductor devices,
It is necessary to perform various tests on electronic components such as finally manufactured IC chips, and many devices (component testing devices) for automatically performing such tests have been proposed.

The general structure of this type is as follows.
That is, a tray mounting portion is provided facing the test head for testing the component, and the tray mounting portion stores the tray storing the untested component and the component after the test according to the test result. It has a layout configuration in which a plurality of types of trays are arranged side by side in a row. A shuttle robot (single-axis robot) that conveys components between the tray mounting portion and the test head, and a first transfer that conveys components between each tray and the shuttle robot are used as robots for conveying components. Robot (orthogonal coordinate type robot),
A second transfer robot (orthogonal coordinate robot) that conveys the parts between the shuttle robot and the test head is provided. First, the first transfer robot takes out the parts from the tray and transfers them to the shuttle robot. After being transported to the vicinity of the test head by the shuttle robot, the second
The transfer robot is configured to pick up parts from the shuttle robot and set them on the test head. After the test, the components are stored in the tray of the tray mounting unit in the reverse order of the above.

[0004]

In this type of component testing apparatus, the test head, tray (tray mounting portion), transfer robot, etc. are laid out compactly to save space, and the configuration is simplified. It is preferable to reduce the weight of the entire device. That is, there is a need to reduce the weight and size of the device.

In this respect, the above-described conventional component testing apparatus has a layout configuration in which a plurality of types of trays are arranged in a horizontal row so as to face the test head, and a plurality of types of robots are used to convey the components. Since it is configured, it cannot be said that it can always meet such a request, and there is room for improvement in this respect.

The present invention has been made in view of the above problems, and an object thereof is to reduce the weight and size of the apparatus.

[0007]

In order to solve the above problems, the present invention provides a test head for conducting a test, a tray mounting portion for mounting a tray for storing components, a test head and a tray mounting portion. In a component testing device including a transport device that transports a component between the tray mounting unit and the unit, the tray mounting unit is provided on at least both sides of a test head, and the transport unit serves as a component loading / unloading unit for the tray and a tray mounting unit. There is provided a transporting device for transporting the components to and from the test head and loading and unloading the components to and from the test head by a common device (claim 1).

According to this structure, since the trays are collectively arranged around the test head, space can be saved, and the components can be conveyed between the tray and the test head by the common conveying device. Therefore, the number of transport devices and the occupied space can be small. Therefore, it is possible to reduce the weight and size of the component testing device.

In particular, if a transfer device consisting of a SCARA robot having excellent flexibility is applied (claim 2), the space occupied by the transfer device itself can be made smaller, which is advantageous from the viewpoint of compact layout. Become.

It should be noted that the tray mounting portions on both sides of the test head are respectively mounted with the trays containing the components before the test and the trays containing the components after the test, and the trays corresponding to these tray mounting portions are respectively described above. If the carrying device is provided (Claim 3), the parts can be supplied and discharged to and from the test head alternately by the two carrying devices, and the parts can be efficiently carried.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. In the drawings, the X axis and the Y axis are added to clarify the directionality.

1) First Embodiment FIG. 1 is a plan view schematically showing a first embodiment of the component testing apparatus according to the present invention. As shown in these drawings, the component testing apparatus 1A includes a handler 2 that plays a mechanical role of transporting components and retaining (fixing) components during testing.
The test apparatus main body 3 is incorporated in the handler 2.

The test apparatus body 3 has a test head 4 on the upper surface.
A box-shaped device equipped with a component that sets a component in a socket (not shown) provided in the test head 4 and supplies a test current to an input terminal of the component while receiving an output current from an output terminal of the component. Is configured to judge the quality of parts.

The test apparatus main body 3 is constructed so that it can be attached to and detached from the handler 2. Although not shown in the drawing, for example, the test apparatus main body 3 is mounted on a dedicated trolley so as to be predetermined from below the handler 2. The test head 4
Is fixed to the handler 2 with the opening facing the base of the handler 2 facing the base. Note that the test head 4 and the test apparatus body 3 do not necessarily have to be integrated, and the test head 4
Only assemble to Handler 2 and other parts to Handler 2
The test head 4 may be arranged at a position spaced apart from and electrically connected to the test head 4 by an electric cable or the like. In this case, the handler 2 itself excluding the test apparatus body 3 can be regarded as the component test apparatus of the present invention.

The handler 2 is configured to take out the components stored in the tray, convey them to the test head 4, and sort the components after the test according to the test result. It is configured like.

That is, on the base of the handler 2, tray storage areas Sa1 and Sa2 (first tray storage) for storing trays Tr on both sides (both sides in the X-axis direction) of the test head 4 with a space for disposing the test head 4 therebetween. Area Sa1, second
A tray storage area Sa2; a tray mounting portion) is provided.

In each of the tray storage areas Sa1 and Sa2, a plurality of tray storage portions are arranged in parallel in the Y-axis direction. In this embodiment, the first to fourth tray storage portions are arranged in order from the right side of FIG. The parts 11 to 14 are provided in a line. Then, the tray Tr on which the pre-test (uninspected) parts are placed in the first tray storage unit 11 and the tray Tr on which the pass product (Pass) among the post-test parts is placed in the second tray storage unit 12 are Three
After the test, the tray storage unit 13 failed (Fai
An empty tray Tr is stored in the fourth tray storage portion 14, and a tray Tr on which l) is placed.

Each tray Tr has a common structure, and although not shown, for example, a plurality of component storage recesses (storage spaces) are formed on the surface of the tray Tr.
Components such as C chips are configured to be stored in the respective component storage recesses.

Each of the tray storage units 11 to 14 is configured to store a plurality of trays Tr in a stacked state on a table that can be raised and lowered, and only the uppermost tray Tr is arranged on the base. The other trays Tr are configured to be housed in a housing below the base.

Specifically, as shown in FIGS. 2 and 3,
Each tray storage unit 11 to 14 has a vertical direction (Z-axis direction).
A rail 17 extending in the direction is provided, and a table 16 is movably mounted on the rail 17. Further, a ball screw shaft 19 which is driven to rotate by a servo motor 18 and extends parallel to the rail 17 is provided, and the ball screw shaft 19 is screwed and mounted on a nut portion 16a of the table 16. Then, a plurality of trays Tr are placed in a stacked state on the table 16, and the trays stacked on the table 16 are moved up and down as the ball screw shaft 19 is rotationally driven by the servo motor 18. The uppermost one of the Trs is arranged on the base through the openings 11a to 14a according to the number of Trs. At this time, the uppermost tray Tr of each of the tray accommodating units 11 to 14 is positioned at a predetermined component take-out height position by the transfer robots 20a and 20b described later.

The side wall of the handler 2 is provided with doors 11b to 14b (only the door 12b is shown in FIG. 2) corresponding to the tray storages 11 to 14, respectively.
By opening b to 14b, the tray storage units 11 to 14 are opened.
With respect to the tray Tr, the tray Tr can be taken in and out.

Considering that most of the parts used in the test are acceptable products, the tray storage units 11 to 11 are
The second tray storage portion 12 that stores the acceptable parts among the 14 trays is more than the other tray storage portions 11, 13 and 14 in the tray Tr.
Has a large storage capacity. As a result, the frequency of loading and unloading the tray Tr with respect to the second tray storage unit 12 is configured so as not to become too large as compared with other tray storage units.

Between the tray storage areas Sa1 and Sa2 and on the opposite side of the test head 4, each tray storage area S is provided.
Transport robots 20a and 20b corresponding to a1 and Sa2
(First transfer robot 20a, second transfer robot 20b;
A transport device) is provided.

The transfer robots 20a and 20b are so-called SCARA type robots, and all the parts transfer work in the parts tester 1A, that is, the tray storage areas Sa1 and S are performed.
Putting parts in and out of the tray Tr of a2, tray Tr
~ Transporting of components between the test heads 4 and loading / unloading of components to / from the test heads 4 are performed, and trays are provided between the fourth tray storage portion 14 of each tray storage area Sa1, Sa2 and the other tray storage portions 11 to 13. It also functions as a tray transfer device that transfers Tr.

As shown in FIG. 4, each of the transfer robots 20a and 20b has a main body 21, a horizontal joint type arm 22, and
The head 23 is attached to the tip of the arm 22. The arm 22 includes a first arm 22a and a second arm 22a.
The first arm 22a is rotatably connected to the main body 21 via a vertical joint shaft, and the second arm 22b is attached to the tip end of the first arm 22a. Is rotatably connected via. Then, each of the joint shafts is rotationally driven by a servo motor, so that the first arm 22a is moved relative to the main body 21.
However, the arms 22b rotate with respect to the first arm 22a, respectively, and as a result, the head 23 moves two-dimensionally in a range including each tray storage section 11 to 15 and the test head 4 in each tray storage area Sa1 or Sa2 ( (Move on XY plane)
Is configured to be able to.

A nozzle member 24 for picking up components is mounted on the head 23. The test head 4 can be moved up and down and rotated (rotated around the nozzle axis) with respect to the head 23, and although not shown, it is configured to be operated by a drive mechanism having a servo motor as a drive source. There is. Further, the nozzle member 24 is connected to a negative pressure generating source via an electromagnetic valve or the like (not shown), and when negative pressure for attracting components is supplied, the components are attracted by the action of the negative pressure. Is configured.

Although not shown, the handler 2
A nozzle exchange station is provided on the base of the above, and a plurality of types of nozzle members 24 having different tip shapes and the like are exchangeably supported by this station. And
When the type of parts is changed, the head 23 is arranged on the station as needed, so that the optimum nozzle member 24 is selectively mounted to the head 23. There is.

A nozzle member for tray transfer is also supported by the station, and the nozzle member 24 for tray transfer is mounted on the head 23 in place of the nozzle member 24 for part transfer during tray transfer. Is configured. Although not particularly shown, the nozzle member 24 for transporting the components has, for example, a rectangular plate-shaped suction pad attached to the front end portion (lower end portion) thereof in order to favorably suck the tray Tr.

In FIG. 1, reference numeral 26 is a component recognition camera 26 such as a CCD area sensor installed in the center of the handler 2. The camera 26 images the suction state of the components sucked by the transport robots 20a and 20b from the lower side, and detects the components before the test to the test head 4 or after the test is finished. Tray Tr
It is configured to capture an image prior to storage in the.

Next, the test operation by the component testing apparatus 1A will be described.

First, the first transfer robot 20a operates to take out a component (untested component) from the tray Tr in the first tray storage area Sa1. To take out the component, the head 23 is arranged above the tray Tr of the first tray storage unit 11 by the operation of the arm 22 of the first transfer robot 20a, and then the component is adsorbed as the nozzle member 24 moves up and down. Done.

When the component is taken out from the tray Tr in this manner, the first transfer robot 20a further places the component at a predetermined image pickup position on the component recognition camera 26, and the component suction state (based on the image recognition of the component). (Adsorption shift)
Can be examined.

When the recognition of the components is completed in this way, the head 23 is placed above the test head 4 and the nozzle member 2
Along with the lowering operation of 4, the parts are positioned while being pressed against the socket (not shown) of the test head 4. This starts the test of the part. The test head 4
When positioning the component in the (socket), position correction of the head 23 in the X-axis and Y-axis directions or rotation correction of the nozzle member 24 (nozzle axis) is performed according to the suction state (suction displacement) of the component checked by image recognition. By performing the rotation correction of the circumference, the components are properly set in the test head 4 (socket) in a predetermined direction.

When the test is completed, the parts are first removed from the test head 4 (socket) as the nozzle member 24 moves up, and the parts are again placed above the recognition camera 26 by the operation of the arm 22 of the first transfer robot 20a. It Thereby, the suction state (suction deviation) of the component is checked based on the image recognition of the component.

After that, the head 23 is arranged above the second tray accommodating portion 12 or the third tray accommodating portion 13 in accordance with the test result of the test head 4, and as the nozzle member 24 moves up and down, the parts are transferred to the tray Tr. Is stored in. In addition,
Even when the components are stored in such a tray Tr, position correction of the head 23 in the X-axis and Y-axis directions or rotation correction of the nozzle member 24 (rotation around the nozzle axis) is performed according to the suction state (suction displacement) of the components. By performing (correction), the component is properly stored in the component storage recess of the tray Tr in a predetermined direction.

In this way, one of the first transfer robots 2
While the component test operation by 0a is being performed, the other second transfer robot 20b takes out the component to be tested next from the second tray storage area Sa2, and performs the image recognition of the component by the component recognition camera 26. Is waiting in the completed state. Then, the first transfer robot 20 as described above
When the test operation by a is completed, specifically, when the preceding component is removed from the test head 4, the second transfer robot 20b operates and the next component is positioned in the test head 4 (socket). Testing of parts begins.

Thereafter, the tray storage area Sa is set by the first transfer robot 20a and the second transfer robot 20b.
The parts are alternately taken out of 1 and Sa2 while being carried into the test head 4 so that the parts are continuously tested.

When it is necessary to replace the tray Tr with the removal of components from the tray Tr or the storage of components in the tray Tr as the test progresses, for example, during the component test operation. The following tray exchange operation is performed.

That is, as the test progresses, the tray T of the first tray storage section 11 in each of the tray storage areas Sa1 and Sa2.
When r (the top tray) becomes empty, the transfer robot 20
After the empty tray Tr is adsorbed by a and 20b and carried out from the first tray storing section 11 to the fourth tray storing section 14, the table 16 is lifted by the operation of the servo motor 18 in the first tray storing section 11. , Next tray Tr
Is positioned at the component take-out height position with respect to the transfer robots 20a and 20b. As a result, it becomes possible to take out the component from the next tray Tr in the first tray storage section 11. In such a tray Tr exchange operation, the nozzle member 24 of the transfer robots 20a and 20b is exchanged in advance from the component suction type to the tray suction type.

On the other hand, in the second tray storage section 12 or the third tray storage section 13, the tray Tr (topmost tray)
When the parts are fully loaded, the empty tray Tr stored in the fourth tray storage unit 14 is moved to the transfer robots 20a, 20
It is adsorbed by b and carried into the second tray storage section 12 or the like. In this case, for example, in the second tray storage unit 12 or the like, the table 16 is first lowered by the operation of the servo motor 18, and in this state, the empty tray Tr is stacked on the fully loaded tray, so that the empty tray Tr is transferred. It is positioned at the component storage height position with respect to 20a and 20b. As a result, it becomes possible to store the next component after the test is completed in the second tray storage portion 12 or the like.

In the component testing apparatus 1A as described above, two tray storage areas Sa1 and Sa are provided on both sides of the test head 4.
Since the two tray storage areas are provided, the tray Tr can be compactly arranged around the test head 4 as compared with a case where two tray storage areas are arranged side by side in a row so as to face the test head.

Further, in this component testing apparatus 1A, the first transfer robot 20a corresponding to the first tray storage area Sa1.
The second transfer robots 20b are provided corresponding to the second tray storage areas Sa2.
a and 20b are the tray Tr to the test head 4 as described above.
Since each device is configured to carry all parts between the trays and test heads, the number of transfer devices compared to the conventional device that transfers parts while transferring parts to multiple types of robots between tray and test head And it occupies less space.

Therefore, according to this component testing apparatus 1A,
Compact layout configuration of tray Tr (space saving), component transfer device (each transfer robot 20a,
There is an effect that the component testing apparatus 1A can be made lighter and smaller by reducing the number of 20b) and saving space.

2) Second Embodiment FIG. 5 is a plan view schematically showing the second embodiment of the component testing apparatus according to the present invention. In the component test apparatus 1B shown in this figure, two test heads 4 are provided in the test apparatus body 3.
The components a and 4b are provided side by side in the X-axis direction, and in this respect, the configuration differs from the component testing apparatus 1A of the first embodiment.

The test operation by this component testing apparatus 1B is as follows.
Similar to the component testing apparatus 1A of the first embodiment, the components are taken out from the tray storage areas Sa1 and Sa2 by the first transport robot 20a and the second transport robot 20b, respectively, and are subjected to the test. 1B
Since the test apparatus main body 3 is provided with the pair of test heads 4a and 4b as described above, each transfer robot 20
The parts conveying operation by a and 20b is performed in parallel, and the test by the test heads 4a and 4b is also performed in parallel. However, since the component recognition camera 26 is commonly used,
The component transport operation by each of the transport robots 20a and 20b is performed with a certain time difference so that the image recognition processing of the components does not overlap.

The component testing apparatus 1B of the second embodiment as described above also has a basic configuration common to that of the component testing apparatus 1A of the first embodiment. Therefore, like the component testing apparatus 1A, the component testing apparatus 1A. It is possible to reduce the weight and size of 1B.

In the component testing apparatus 1B, the pair of test heads 4a and 4b can be provided in the testing apparatus body 3 to test two components at the same time, as described above. Compared with the component testing apparatus 1A of the embodiment, there is an effect that a component can be tested more efficiently.

2) Third Embodiment FIG. 6 is a plan view schematically showing a third embodiment of the component testing apparatus according to the present invention. As shown in this figure, the component testing apparatus 1C is provided with an inverted U-shaped tray storage area Sa3 surrounding the test head 4 in a plan view.

A first tray storage portion 31 and a second tray storage portion 32 are provided on both sides of the test head 4 in the tray storage area Sa3, and the tray storage area Sa3 is provided.
In the portion facing the test head 4, third to sixth four tray accommodating portions 33 to 36 are provided in a line in order from the first tray accommodating portion side (upper side in the drawing). Then, the tray Tr on which the components before the test (uninspected) are placed in the first tray storage unit 31 passes the tested components in the second, fifth, and sixth tray storage units 32, 35, and 36. Product (Pas
s) is placed in the third tray storage section 33, an empty tray Tr is stored in the third tray storage section 33, and a tray Tr in which failed parts (Fail) are placed among the tested parts is stored in the fourth tray storage section 34. ing.

The second tray storage section 32 among the second, fifth, and sixth tray storage sections 32, 35, and 36 has the highest occurrence according to the passing level (rank classified by the test result). The tray Tr on which the frequently used level component (Pass1) is placed is the tray Tr on which the next most frequently generated level component (Pass2) is placed in the sixth tray storage section 36.
However, the tray Tr on which the component (Pass3) having the lowest occurrence frequency is placed is stored in the fifth tray storage portion 35, respectively.

Further, in this component testing apparatus 1C, a Cartesian coordinate type transfer robot 40 is provided as a transfer robot.

That is, a pair of fixed rails 41 extending in the Y-axis direction are provided on the base of the handler 2, and a head support member 42 is movably mounted on these fixed rails 41. Although not shown, a ball screw shaft that is driven to rotate by a servo motor and extends parallel to the fixed rail 41 is provided on the base, and the ball screw shaft is provided on the support member 42. It is screwed on (not shown). Further, although not shown in detail, a fixed rail extending in the X-axis direction is provided on the support member 42, and the nozzle member 2 for sucking components is attached to the fixed rail.
4 is mounted movably, and a ball screw shaft that is driven to rotate by a servo motor and extends parallel to the fixed rail is provided. The ball screw shaft is attached to a nut portion provided on the head 43. It is screwed on. Then, the support member 42 moves in the Y-axis direction and the head 43 moves in the X-axis direction in response to the rotational driving of the ball screw shaft by each of the servo motors, so that the head 43 moves the tray 43 to the tray storage sections 31 to 16 and the test. Head 4
It is configured so that it can be moved in a plane (moved on the XY plane) in a range including.

The component testing apparatus 1C other than the above points
Is basically the component testing apparatus 1A of the first embodiment.
Is the same as.

In the component testing apparatus 1C of the third embodiment, many trays Tr can be arranged more compactly because the trays Tr are arranged not only on both sides of the test head 4 but also at the facing portions. . Also, the tray Tr
Space saving is achieved because one device (the transfer robot 40) carries the parts between the test heads 4.

Therefore, also in the component testing apparatus 1C, the weight and size of the component testing apparatus 1C can be reduced as in the component testing apparatus 1A of the first embodiment.

The component testing apparatuses 1A to 1C according to the first to third embodiments described above are typical embodiments of the component testing apparatus according to the present invention, and the specific configuration thereof is the same as that of the present invention. It can be appropriately changed without departing from the gist.

For example, in the above-described embodiment, the tray storage areas are provided on both sides of the test head 4 or at locations facing the both sides. If it is necessary to sort the products by more levels, the tray Tr
The tray storage area may be provided so as to surround the entire circumference of the tray.

Further, in the third embodiment, the transfer robot 40 which is a rectangular coordinate type robot is adopted as the transfer robot, but if possible, for example, the first and second transfer robots are used.
As in the above embodiment, a transfer robot composed of a SCARA type robot may be adopted. Such a SCARA type robot occupies a smaller space than that of the Cartesian type robot, which is advantageous from the viewpoint of making the layout configuration on the handler 2 compact.

[0059]

As described above, in the component testing apparatus of the present invention, the tray mounting portions are provided on at least both sides of the test head so that the trays are gathered and arranged. By carrying out the transportation of the parts of FIG. 1 by the common transportation device, the weight of the transportation device itself and the space saving are attempted, so that there is an effect that the weight reduction and miniaturization of the component testing device can be favorably achieved. .

[Brief description of drawings]

FIG. 1 is a parts testing apparatus according to the present invention (first embodiment).
It is a schematic plan view showing.

FIG. 2 is a schematic cross-sectional view showing the configuration of each tray storage portion in the tray storage area.

FIG. 3 is a cross-sectional view taken along the line AA of FIG. 2 showing the configuration of the tray storage section.

FIG. 4 is a side view showing a configuration of a transfer robot.

FIG. 5 is a parts test apparatus according to the present invention (second embodiment).
It is a schematic plan view showing.

FIG. 6 is a parts test apparatus according to the present invention (third embodiment).
It is a schematic plan view showing.

[Explanation of symbols]

1 Parts test equipment 2 handler 3 Test equipment body 4 test head 11 First tray storage 12 Second tray storage 13 Third tray storage 14 Fourth tray storage 20a, 20b Transfer robot (transfer device) Sa1 first tray storage area (tray mounting portion) Sa2 Second tray storage area (tray mounting section) Tr tray

Claims (3)

[Claims] 1. A component including a test head for performing a test, a tray mounting part for mounting a tray for storing a component, and a transport device for transporting a component between the test head and the tray mounting part. In the test apparatus, the tray mounting section is provided on at least both sides of the test head, and as the transporting apparatus, loading and unloading of components with respect to the tray, transportation of components from the tray loading section to the test head, and loading and unloading of components with respect to the test head are performed. A parts testing device, which is provided with a carrying device that is operated by a common device. 2. The component testing apparatus according to claim 1, wherein a SCARA type robot is provided as the transfer device. 3. The component testing apparatus according to claim 1 or 2, wherein trays on both sides of the test head are provided with trays for storing components before the test and trays for storing components after the test, respectively. At the same time, the component testing device is characterized in that each of the tray mounting portions is provided with the transport device.