JP2003075356A - Method and device for inspecting transparent subject - Google Patents
Method and device for inspecting transparent subjectInfo
- Publication number
- JP2003075356A JP2003075356A JP2001263949A JP2001263949A JP2003075356A JP 2003075356 A JP2003075356 A JP 2003075356A JP 2001263949 A JP2001263949 A JP 2001263949A JP 2001263949 A JP2001263949 A JP 2001263949A JP 2003075356 A JP2003075356 A JP 2003075356A
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- JP
- Japan
- Prior art keywords
- light
- inspection
- light receiving
- transparent
- scattered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 10
- 238000007689 inspection Methods 0.000 claims abstract description 95
- 230000002950 deficient Effects 0.000 claims abstract description 28
- 230000000007 visual effect Effects 0.000 claims abstract description 27
- 230000001678 irradiating effect Effects 0.000 claims abstract description 7
- 230000007547 defect Effects 0.000 claims description 18
- 238000012360 testing method Methods 0.000 claims description 15
- 238000007493 shaping process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 12
- 238000012545 processing Methods 0.000 description 7
- 238000012937 correction Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000012780 transparent material Substances 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、透明または半透
明なフィルムなどの透明物からなる被検物に形成された
擦り傷などの欠陥を自動的に検出することができる透明
物の検査方法および装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transparent material inspection method and apparatus capable of automatically detecting defects such as scratches formed on a transparent material such as a transparent or translucent film. It is about.
【０００２】[0002]
【従来の技術】ラインとして搬送されてくる（インライ
ン中の）シート状の透明物などからなる被検物に対し
て、その表面に擦り傷などの欠陥があるか否かを検査す
る検査装置として、例えば図６に示す構成のものが知ら
れている。即ち、この検査装置は、レーザ光源１０１
Ａ、コリメータレンズ１０１Ｂ及びスキャナ１０１Ｃな
どからなる投光ユニット１０１と、ＣＣＤラインセンサ
などからなる受光ユニット１０２と、処理部１０３等と
を有しており、投光ユニット１０１と受光ユニット１０
２との間に搬送されてくる透明シート状の被検物１０４
に向けてレーザ光を走査させ、欠陥部分でレーザ光が散
乱することから、欠陥部分の位置などを検出するように
構成されている。2. Description of the Related Art As an inspection apparatus for inspecting a surface of an object to be inspected made of a transparent material (in-line) conveyed as a line, whether or not there is a defect such as a scratch or the like, For example, the configuration shown in FIG. 6 is known. That is, this inspection apparatus is based on the laser light source 101
A, a collimator lens 101B, a scanner 101C and the like, a light projecting unit 101, a light receiving unit 102 including a CCD line sensor, a processing unit 103 and the like, and the light projecting unit 101 and the light receiving unit 10.
The transparent sheet-like object 104 conveyed between the two
Since the laser light is scanned toward and the laser light is scattered at the defective portion, the position of the defective portion is detected.
【０００３】この欠陥部分での散乱光には、搬送（Ｚ）
方向を含めほぼ全方向に散乱するような欠陥（以下、こ
れを「第２タイプ」とよぶ）ばかりでなく、散乱方向に
指向性の強いものもある。例えば、レーザ光の走査
（Ｘ）方向に垂直な（Ｚ）方向に欠陥部分が長く発生す
るためにそのＺ方向に対して垂直な（Ｘ−Ｙ）面内で強
く散乱するもの（以下、これを「第１タイプ」とよぶ）
もある。The scattered light at the defect portion is transported (Z).
Not only are there defects that are scattered in almost all directions including directions (hereinafter referred to as "second type"), but there are also those with strong directivity in the scattering direction. For example, a defect portion is generated long in the (Z) direction perpendicular to the scanning (X) direction of the laser light, so that it is strongly scattered in the (XY) plane perpendicular to the Z direction (hereinafter, this Is called "first type")
There is also.
【０００４】とおろで、このような散乱光に対して、図
６に示す検査装置では、第２タイプの散乱光には有効で
あるが、第１欠陥タイプ、つまりＺ方向と直交する垂直
（Ｘ-Ｙ）面内での散乱光成分が強い反面、Ｚ方向での
散乱光成分が弱いと、検出力も弱くなり欠陥位置を検出
することが難しかった。On the other hand, with respect to such scattered light, the inspection apparatus shown in FIG. 6 is effective for the second type of scattered light, but it is effective for the first defect type, that is, the vertical direction orthogonal to the Z direction ( While the scattered light component in the (XY) plane is strong, when the scattered light component in the Z direction is weak, the detection power becomes weak and it is difficult to detect the defect position.
【０００５】また、被検物に対する検査装置として、例
えば図７（Ａ）に示すように、被検物１０４の移動
（Ｚ）方向（長手方向）に直交する幅（Ｘ）方向に沿っ
てライン状光源１０５を配設するとともに、撮像素子と
してラインセンサカメラ１０６を設け、処理部１０７で
画像処理を行って欠陥部分を検出するものも知られてい
る。この検査装置では、同図（Ａ）に示すように、ライ
ン状光源１０５の照明光（検査光）が直接ラインセンサ
カメラ１０６に入射しないようにする（間接光透過法）
ため、同図（Ｂ）に示すように、ライン状光源１０５を
ラインセンサカメラとの正対位置よりも被検物１０４の
搬送方向にｄだけずらして配置させてある。つまり、被
検物１０４に対して搬送方向の上流側（又は下流側）か
ら斜め照明を行っているわけである。Further, as an inspection device for an object to be inspected, for example, as shown in FIG. 7A, a line is formed along a width (X) direction orthogonal to a movement (Z) direction (longitudinal direction) of the object to be inspected 104. It is also known that the linear light source 105 is provided, a line sensor camera 106 is provided as an imaging element, and the processing unit 107 performs image processing to detect a defective portion. In this inspection apparatus, as shown in FIG. 3A, the illumination light (inspection light) of the line-shaped light source 105 is prevented from directly entering the line sensor camera 106 (indirect light transmission method).
Therefore, as shown in FIG. 6B, the line-shaped light source 105 is arranged so as to be displaced by d in the transport direction of the object 104 from the position facing the line sensor camera. That is, the object 104 is obliquely illuminated from the upstream side (or the downstream side) in the transport direction.
【０００６】この検査装置では、図６に示す検査装置と
同様に、第２タイプの散乱光を検出するには有効である
が、第１タイプの散乱光を検出する場合、垂直（Ｘ−
Ｙ）面成分の強い散乱光に対して、ラインセンサカメラ
１０６で観察する方向が多少ずれる。従って、この検査
装置でも、第１タイプの散乱光については検出力が弱く
なり、欠陥位置を検出することが難しかった。Similar to the inspection apparatus shown in FIG. 6, this inspection apparatus is effective for detecting the second type scattered light, but when detecting the first type scattered light, the vertical (X-
The direction of observation by the line sensor camera 106 is slightly shifted with respect to the scattered light having a strong Y) surface component. Therefore, even with this inspection device, the detection power for the first type scattered light is weak, and it is difficult to detect the defect position.
【０００７】そこで、この改善策として、第２タイプの
散乱光ばかりでなく、第１タイプの散乱光を検出する場
合にも有効な検査装置として、例えば特開２００１−１
６５８６４（特願平１１-３５１０４２）号公報に記載
のものが提案されている。この検査装置では、図８に示
すように、第１タイプの散乱光に対しては、光源１０８
からの検査光を、ラインセンサカメラ１０６の視野外
（斜線で囲まれた領域）であって、視野内との境界部分
近傍の両側から照射する構成となっている。つまり、こ
の検査装置では、光源１０８からの光が直接ラインセン
サカメラ１０６には入射しないように構成されている。
従って、ラインセンサカメラ１０６の視野内に欠陥部分
が移送されてきて検査光が散乱すると、光源１０８から
の直接光に邪魔されずに、この散乱光をラインセンサカ
メラ１０６で確実に受光することができるわけである。Therefore, as a countermeasure for this, as an inspection device effective not only for detecting the second type scattered light but also for detecting the first type scattered light, for example, Japanese Patent Laid-Open No. 2001-1
The one described in Japanese Patent Application No. 65864 (Japanese Patent Application No. 11-351042) has been proposed. In this inspection device, as shown in FIG. 8, for the first type scattered light, the light source 108
The inspection light is emitted from both sides outside the visual field of the line sensor camera 106 (area surrounded by diagonal lines) and near the boundary with the visual field. That is, this inspection apparatus is configured so that the light from the light source 108 does not directly enter the line sensor camera 106.
Therefore, when the defective portion is transferred into the field of view of the line sensor camera 106 and the inspection light is scattered, the scattered light can be reliably received by the line sensor camera 106 without being disturbed by the direct light from the light source 108. It can be done.
【０００８】一方、第２タイプの散乱光に対しては、図
７の検査装置と同様の構成のもの、即ち、ラインセンサ
カメラ１０６の光軸Ｌより若干移動（Ｚ）方向にずらし
て設置したライン状光源１０５を用いている。そのた
め、このライン状光源１０５からの検査光がラインセン
サカメラ１０６に直接入射せず、視野内を欠陥部分が通
過する場合には、その欠陥部分で検査光（第１タイプ）
が散乱してこれをラインセンサカメラ１０６で受光する
ことができる。これにより、双方のタイプの欠陥をとも
に検出できる。On the other hand, the second type of scattered light has the same structure as that of the inspection apparatus shown in FIG. 7, that is, the line sensor camera 106 is slightly displaced from the optical axis L in the Z direction. The line light source 105 is used. Therefore, when the inspection light from the linear light source 105 does not directly enter the line sensor camera 106 and the defective portion passes through the field of view, the inspection light (first type) at the defective portion is obtained.
Are scattered and can be received by the line sensor camera 106. This makes it possible to detect both types of defects.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、図８に
示す検査装置では、２種類の光源を２箇所に設置する必
要があるばかりでなく、特に、擦り傷などの欠陥部分の
移動するＺ方向に対して垂直（Ｘ−Ｙ）面内に強く散乱
する第１タイプの散乱光については、光源１０８からの
検査光を光ファイバ１０９を介して照射する出射端部１
１０の配置角度と、ラインセンサカメラ１０６での観察
する角度との角度差が大きい。その結果、十分な量の散
乱光をラインセンサカメラ１０６に入射させることがで
きず、このため検出能力を十分に高めることができな
い、といった問題を生じている。However, in the inspection apparatus shown in FIG. 8, not only two types of light sources need to be installed in two places, but especially in the Z direction in which a defective portion such as a scratch moves. As for the first type of scattered light strongly scattered in the vertical (X-Y) plane, the emission end portion 1 that irradiates the inspection light from the light source 108 through the optical fiber 109.
The angle difference between the arrangement angle of 10 and the angle observed by the line sensor camera 106 is large. As a result, a sufficient amount of scattered light cannot be incident on the line sensor camera 106, so that there is a problem that the detection capability cannot be sufficiently enhanced.
【００１０】そこで、この発明は、上記した事情に鑑
み、シート状の被検物に検査光を照射したときに、被検
物（欠陥部分）の移動方向に垂直な面内で強く散乱する
もの（第１タイプ）と、範囲は狭いが被検物（欠陥部
分）の移動方向を含め全体方向に亙って散乱するもの
（第２タイプ）とのいずれの散乱光に対しても、欠陥部
分を同時に、感度良く、しかも安定した検出を行うこと
ができる透明物の検査方法および装置を提供することを
目的とするものである。In view of the above circumstances, the present invention strongly scatters in a plane perpendicular to the moving direction of the test object (defective portion) when the sheet-shaped test object is irradiated with the inspection light. (First type) and a narrow range (second type) that scatters over the entire direction including the moving direction of the test object (defective portion) (second type) At the same time, it is an object of the present invention to provide a method and an apparatus for inspecting a transparent object, which can perform detection with high sensitivity and stability.
【００１１】[0011]
【課題を解決するための手段】上記目的を達成するため
に、この発明は、投光部から透明なシート状の被検物に
検査光を照射し、この検査光が前記被検物の欠陥部で散
乱反射した光を受光部に入射することで欠陥部分の存在
を光学的に検出する透明物の検査方法であって、前記受
光部の視野の外側から視野内の被測定物を照射すること
で、受光部が直接、検査光を受光することがないように
するとともに、前記受光部と前記被検物との間に配置し
たテレセントリック若しくはそれに近い機能を有する光
学系を構成するレンズでより強い散乱強度光を受光部に
入射させることを特徴としている。In order to achieve the above object, the present invention irradiates a transparent sheet-like object to be inspected with light from a light projecting section, and the light to be inspected causes a defect in the object. A method of inspecting a transparent object which optically detects the presence of a defective portion by making light scattered and reflected by a light receiving section enter a light receiving section, and irradiates an object to be measured in the field of view from outside the field of view of the light receiving section. Thus, the light receiving unit is prevented from directly receiving the inspection light, and a lens forming an optical system having a function close to or telecentric disposed between the light receiving unit and the object to be inspected is more preferable. The feature is that light with strong scattered intensity is incident on the light receiving portion.
【００１２】また、この発明の透明物の検査方法では、
被検物を移送しながら欠陥部分の検査を行うようにして
もよい。Further, according to the transparent material inspection method of the present invention,
You may make it inspect a defective part, transferring an inspected object.
【００１３】また、この発明は、透明なシート状の被検
物に照射する投光部と、前記被検物に対して前記投光部
とは反対側に配置され、前記光源からの照明光が前記被
検物の欠陥部で散乱または反射した光を入射すること
で、欠陥部分の存在を検出する受光部とを備えた透明物
の検査装置であって、前記受光部の視野の外側から視野
内の被測定物を照射することで、受光部が直接、検査光
を受光することがないようにするために、前記投光部を
前記受光部の視野の外側に配置するとともに、前記受光
部と前記被検物との間にテレセントリック若しくはそれ
に近い機能を有する光学系を構成するレンズを配置する
ように構成したことを特徴としている。Further, according to the present invention, a light projecting portion for irradiating a transparent sheet-shaped object to be inspected and an illumination light from the light source, which is arranged on the side opposite to the light projecting portion with respect to the object to be inspected. Is an inspection device of a transparent object having a light receiving section for detecting the presence of a defective section by entering light scattered or reflected by the defective section of the object to be inspected, from the outside of the visual field of the light receiving section. In order to prevent the light receiving unit from directly receiving the inspection light by irradiating the object to be measured in the field of view, the light projecting unit is arranged outside the field of view of the light receiving unit, and the light receiving unit is provided. It is characterized in that a lens constituting an optical system having a telecentric function or a function close to it is arranged between the portion and the object to be inspected.
【００１４】また、請求項４の透明物の検査装置は、投
光部から出射する検査光の被検物への入射角度を所定の
角度以下となるような状態に投光部を配置してもよい。According to a fourth aspect of the present invention, in the transparent object inspection apparatus, the light projecting section is arranged in such a state that the angle of incidence of the test light emitted from the light projecting section on the object under inspection is equal to or less than a predetermined angle. Good.
【００１５】また、請求項５に記載の透明物の検査装置
は、被検物をラインによって搬送しながら、欠陥部分の
検査を行うように構成してもよい。The transparent object inspection apparatus according to the fifth aspect may be configured to inspect the defective portion while the object to be inspected is conveyed by a line.
【００１６】[0016]
【発明の実施の形態】以下、この発明に係る実施の形態
について、添付図面を参照しながら詳細に説明する。図
１はこの発明の透明物の検査装置を示すものであり、こ
の透明物の検査装置には、投光部１と、受光部２と、処
理部３との他に、テレセントリック若しくはそれに近い
機能を有する光学系を構成するレンズ４を備えており、
連続して移送されるフィルムなどの被検物５の擦り傷な
どの欠陥部分を検出・検査するように構成されている。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 shows a transparent object inspection apparatus according to the present invention. The transparent object inspection apparatus includes a light-projecting section 1, a light-receiving section 2, a processing section 3, and a telecentric function or a function close thereto. Is equipped with a lens 4 forming an optical system having
It is configured to detect and inspect defective portions such as scratches on the object to be inspected 5 such as a film that is continuously transferred.
【００１７】投光部１は、単一の光源からの光を２つに
分割して２箇所から出射するように構成されており、こ
の実施形態では、光源１１と、ライトガイド１２とを備
えている。The light projecting section 1 is constructed so that light from a single light source is divided into two and emitted from two locations. In this embodiment, a light source 11 and a light guide 12 are provided. ing.
【００１８】光源１１には、輝度を高めるためにハロゲ
ンランプ（林時計工業製、ハロゲン光源装置ＬＡ−１５
０ＳＥ）を用いている。なお、この光源１１としては、
とくにこのハロゲンランプに限定されるものではなく、
同様の効果を有するものであれば適宜のものが可能であ
る。The light source 11 includes a halogen lamp (Halogen Light Source Device LA-15, manufactured by Hayashi Clock Industry Co., Ltd.) for increasing the brightness.
0SE) is used. In addition, as the light source 11,
It is not particularly limited to this halogen lamp,
Appropriate ones can be used as long as they have the same effect.
【００１９】一方、ライトガイド１２は、光源１１から
の光路を２つに分岐して各出射端部１３まで検査光を導
光するものであり、光ファイバ（ＬＧＢ２−３Ｌ１００
０ＬＳ）が用いられている。また、このこのライトガイ
ド１２の各出射端部１３からは、出射端部１３の中心軸
（或は軸線）Ｌ0（図２参照）方向を中心として、左右
に広がる光量分布（又は光強度分布）特性の検査光を出
射している。特に、この出射端部１３は、受光部２の視
野の外側（図２において、斜線部で示す領域）であって
視野内との境界近傍から、視野内の被測定物５へ向けて
検査光を照射するようになっており、これによって検査
光が受光部２へ直接受光するのを防止している。On the other hand, the light guide 12 splits the optical path from the light source 11 into two and guides the inspection light to each emission end 13, and the optical fiber (LGB2-3L100).
0LS) is used. Also, from each emission end portion 13 of this light guide 12, a light amount distribution (or a light intensity distribution) that spreads left and right around the center axis (or axis line) L 0 (see FIG. 2) direction of the emission end portion 13. ) The inspection light of the characteristic is emitted. In particular, this emission end 13 is located outside the visual field of the light-receiving unit 2 (a region shown by the shaded area in FIG. 2) and near the boundary with the visual field toward the DUT 5 in the visual field. The inspection light is prevented from being directly received by the light receiving section 2.
【００２０】各出射端部１３は被検物５から距離Ｓだけ
離間しているとともに、双方の出射端部１３は距離Ｗ
（つまり、視野間隔程度）だけ離間して配置されてい
る。また、この出射端部１３の配置方向は、受光部２の
視野内の中央部Ｍ方向に向けられている。従って、左右
の各出射端部１３から出射する検査光の光軸（出射端部
１３の中心軸Ｌ0に相当）は、視野領域の中央部Ｍに対
する入射角θ0が次式θ0＝ｔａｎ-1［Ｗ／２Ｓ］で与え
られる。なお、この実施形態では、被検物５からの距離
Ｓがおよそ１７０ｍｍ、視野間隔Ｗを７０ｍｍに設定し
てあるため、入射角θ0がおよそ１２度程度に設定され
ている。Each emission end 13 is separated from the object 5 by a distance S, and both emission ends 13 are separated by a distance W.
(That is, about the visual field interval). In addition, the arrangement direction of the emitting end portion 13 is directed toward the central portion M direction in the visual field of the light receiving portion 2. Therefore, regarding the optical axis of the inspection light emitted from each of the left and right emission end portions 13 (corresponding to the central axis L 0 of the emission end portion 13), the incident angle θ 0 with respect to the central portion M of the visual field region is the following expression θ 0 = tan. -1 [W / 2S] In this embodiment, the distance S from the object to be inspected 5 is set to about 170 mm and the visual field interval W is set to 70 mm, so that the incident angle θ 0 is set to about 12 degrees.
【００２１】受光部２には、受光した光量（又は光強
度）に応じた信号を出力する撮像素子を用いたラインセ
ンサカメラで構成されており、例えばこの実施形態で
は、竹中システム機器社製のＬＳ−３０Ｊを用いてい
る。また、この受光部２では、後述する視野角補正用の
レンズ４で視野領域（斜線で囲まれた領域）を狭めるよ
うに構成されている。具体的には、図３に符号βで示す
円錐台形状を呈する視野領域の下部側の部分に対して、
視野角補正用のレンズ４を配置することにより、このレ
ンズ４における物空間での視野領域、つまり、図２に符
号γで示す円筒形状に視野領域を狭めている。その結
果、出射端部１３から出射する検査光の光軸Ｌ0と、受
光部２の主軸Ｌとのなす角度θ0を可及的に小さくし
て、欠陥部分での散乱光のうちＸ−Ｙ面成分の散乱光
（第１タイプ）をより多く受光部２に受光させるてい
る。なお、この受光部２を構成するカメラには、このラ
インセンサカメラ以外に、例えばエリアセンサカメラな
どを用いても良い。The light receiving section 2 is composed of a line sensor camera using an image pickup device that outputs a signal according to the received light quantity (or light intensity). For example, in this embodiment, a line sensor camera manufactured by Takenaka System Equipment Co., Ltd. LS-30J is used. Further, the light receiving unit 2 is configured to narrow a visual field region (a region surrounded by diagonal lines) by a lens 4 for correcting a visual angle described later. Specifically, with respect to the lower side portion of the visual field region having a truncated cone shape indicated by reference sign β in FIG.
By disposing the lens 4 for correcting the viewing angle, the field of view in the object space in the lens 4, that is, the field of view is narrowed into a cylindrical shape indicated by the symbol γ in FIG. As a result, the angle θ 0 formed by the optical axis L 0 of the inspection light emitted from the emission end portion 13 and the main axis L of the light receiving portion 2 is made as small as possible, and X− of the scattered light at the defect portion is A larger amount of scattered light of the Y-plane component (first type) is received by the light receiving unit 2. In addition to the line sensor camera, for example, an area sensor camera may be used as the camera that constitutes the light receiving unit 2.
【００２２】処理部３は、受光部２からの出力信号を入
力すると、この入力した信号に基づき欠陥部の検出のた
めに画像処理などを行うものであり、入力が受光部２の
出力に接続されており、例えばこの実施形態では、竹中
システム機器製のＬＳ−３０Ｊが用いられている。When the output signal from the light receiving unit 2 is input, the processing unit 3 performs image processing or the like for detecting a defective portion based on the input signal, and the input is connected to the output of the light receiving unit 2. For example, in this embodiment, LS-30J manufactured by Takenaka System Equipment Co., Ltd. is used.
【００２３】レンズ４は、受光部２の視野を狭めるため
のものであり、この実施形態では、このレンズ４の物空
間において、視野領域を６０ｍｍのほぼ円筒状（平行
光）に狭めるようになっている。つまり、このレンズ４
が受光部２の入射瞳を構成するように配置しているわけ
である。なお、この実施形態のレンズ４には、テレセン
トリック又はこれに近い機能を有する光学系を構成する
レンズ、具体的には、富士写真光機社製の視野角補正用
のレンズ（以下、これを視野角補正レンズとよぶ）を用
いている。The lens 4 is for narrowing the field of view of the light receiving portion 2. In this embodiment, the field of view of the lens 4 is narrowed to a substantially cylindrical shape (parallel light) of 60 mm. ing. That is, this lens 4
Are arranged so as to form the entrance pupil of the light receiving section 2. The lens 4 of this embodiment includes a lens that constitutes an optical system having a telecentric function or a function close to this, specifically, a lens for correcting a viewing angle manufactured by Fuji Photo Optical Co., Ltd. It is called an angle correction lens).
【００２４】次に、この実施形態の作用について比較例
と比較しながら説明する。透明又は半透明なフィルムな
どの被検物５に擦り傷などの欠陥を生じていると、検査
光を照射したときに、検査光が被検物５の流れるＺ方向
に垂直な（Ｘ−Ｙ）面内に強く散乱するような散乱光
（第１タイプ）や、範囲は狭いが、被検物５の流れる方
向を含め全方向に散乱するような散乱光（第２タイプ）
を生じることがある。Next, the operation of this embodiment will be described in comparison with a comparative example. When the inspection object 5 such as a transparent or semitransparent film has a defect such as a scratch, when the inspection light is irradiated, the inspection light is perpendicular to the Z direction in which the inspection object 5 flows (X-Y). Scattered light that scatters strongly in the plane (first type) or scattered light that has a narrow range but scatters in all directions including the direction in which the object 5 flows (second type)
May occur.
【００２５】［第１タイプの散乱光について］特に、こ
の第１タイプの散乱光については、検査光がラインの流
れるＺ方向に垂直な（Ｘ−Ｙ面）面内に強く散乱する
が、その面内において、各出射端部１３から出射する検
査光（欠陥部分での散乱光）の光量分布は、出射端部１
３の中心軸Ｌ0方向へ集中し（指向性が強く）、中心軸
Ｌ0から左右方向にずれるに従って光量が減衰する傾向
にある。[First Type Scattered Light] Particularly, regarding the first type scattered light, the inspection light is strongly scattered in the (XY plane) plane perpendicular to the Z direction in which the line flows. Within the plane, the light amount distribution of the inspection light (scattered light at the defect portion) emitted from each emission end portion 13 is determined by the emission end portion 1
3 tends to concentrate in the direction of the central axis L 0 (strong directivity), and the amount of light tends to attenuate as it shifts from the central axis L 0 in the left-right direction.
【００２６】従って、双方の出射端部１３からの検査光
（散乱光）の光量を合成した光量分布については、図２
に示す入射角θ0が小さいほど、受光部２の主軸Ｌ方向
への光量が増大する傾向が強い。このような事情から、
入射角θ0がなるべく小さくなるような状態に出射端部
１３を配置することで、受光部２に入射する欠陥部分か
らの散乱光の光量を増大させることができる。一方、光
源１１からの検査光が受光部２へ直接受光するのを回避
するため、出射端部１３を受光部の視野内に配置するの
を避けることも、第１タイプの散乱光の検出能力を高め
るためには重要である。Therefore, the light amount distribution obtained by combining the light amounts of the inspection light (scattered light) from both emission end portions 13 is shown in FIG.
The smaller the incident angle θ 0 is, the stronger the tendency that the amount of light of the light receiving unit 2 in the direction of the main axis L increases. Because of this,
By arranging the emitting end portion 13 in such a state that the incident angle θ 0 is as small as possible, it is possible to increase the amount of scattered light from the defective portion incident on the light receiving portion 2. On the other hand, in order to prevent the inspection light from the light source 11 from being directly received by the light receiving portion 2, it is also possible to avoid disposing the emitting end portion 13 within the field of view of the light receiving portion. Is important to increase.
【００２７】そこで、図２に示すこの実施形態の検査装
置では、被検物５と受光部２との間に視野角補正レンズ
４を配設させており、物空間における受光部２の視野を
狭めている。これにより、出射端部１３からの検査光の
出射角度を受光部２の向きに近づけることができる、換
言すれば、散乱光を強めることが可能になる一方、光源
１１からの検査光が直接受光部２へ入射するのを防止で
きる。その結果、被検物５に擦り傷のような欠陥部分が
あると、検査光がこの欠陥部分で反射・散乱して第１タ
イプの散乱光を生じるときには、その散乱光を受光部２
により多く入射させることができるようになる。これに
より、第１タイプの散乱光について、検査能力を高める
ことができる。Therefore, in the inspection apparatus of this embodiment shown in FIG. 2, the view angle correction lens 4 is arranged between the object 5 to be detected and the light receiving section 2, and the field of view of the light receiving section 2 in the object space is set. It is narrowing. As a result, the emission angle of the inspection light from the emission end portion 13 can be made closer to the direction of the light receiving portion 2, in other words, the scattered light can be strengthened, while the inspection light from the light source 11 is directly received. It is possible to prevent the light from entering the portion 2. As a result, when the inspection object 5 has a defective portion such as a scratch, when the inspection light is reflected / scattered at this defective portion to generate the first type scattered light, the scattered light is received.
It becomes possible to make more incident. As a result, the inspection capability for the first type of scattered light can be improved.
【００２８】一方、図３に示す比較例の検査装置では、
被検物５と受光部２との間に視野角補正レンズ４を配設
させておらず、従って受光部２の視野領域（斜線で示
す）はその受光部２から離れるほど拡大している。この
ような条件下で、双方の出射端部１３を被検物５から所
要の距離Ｓ内に収め、かつ、出射端部１３からの光が直
接受光部２に入射しないようにするためには、出射端部
１３の視野中央部Ｍに対する入射角θは、どんなに小さ
くしても、図２に示す検査装置での入射角θ0より大き
な角度になってしまう。このため、第１タイプの散乱光
については、受光部２への光量がどうしても少なくなる
ので、この実施形態のものに比べて検査能力が劣ること
となる。On the other hand, in the inspection apparatus of the comparative example shown in FIG.
The viewing angle correction lens 4 is not provided between the object to be inspected 5 and the light receiving section 2, and therefore the viewing area (indicated by diagonal lines) of the light receiving section 2 is enlarged as the distance from the light receiving section 2 increases. Under such conditions, in order to keep both the emission ends 13 within the required distance S from the object 5 and to prevent the light from the emission ends 13 from directly entering the light receiving unit 2. The incident angle θ of the emitting end portion 13 with respect to the central portion M of the visual field becomes larger than the incident angle θ 0 in the inspection device shown in FIG. Therefore, with respect to the scattered light of the first type, the light amount to the light receiving section 2 is inevitably small, so that the inspection capability is inferior to that of this embodiment.
【００２９】［第２タイプの散乱光について］次に、前
述した第１タイプの散乱光ばかりではなく、第２タイプ
の散乱光についても、この実施形態の検査装置によれ
ば、検出誤差の少ない検査能力の高い検査を行うことが
できる。即ち、この実施形態の検査装置では、前述した
ように、受光部２の視野角αは同一のまま、視野角補正
レンズ４の物空間における受光部２の視野が狭められて
いる。従って、図４（Ａ）に示すように、出射端部１３
については、前述したように、視野外に配置することが
できる。このため、出射端部１３の設置角度を入射角θ
0まで小さくすることができる（つまり、出射端部１３
からの検査光の出射角度を受光部２の向きに近づけるこ
とができる）ばかりでなく、同図（Ｂ）に示すように、
出射端部１３の中心軸Ｌ0を、Ｘ−Ｙ面に平行で、か
つ、受光部２の主軸Ｌと一致した方向に揃えることがで
きる。[Second-Type Scattered Light] Next, not only the above-mentioned first-type scattered light but also the second-type scattered light is small in detection error by the inspection apparatus of this embodiment. The inspection with high inspection ability can be performed. That is, in the inspection device of this embodiment, as described above, the view angle of the light receiving section 2 remains the same, but the view of the light receiving section 2 in the object space of the view angle correction lens 4 is narrowed. Therefore, as shown in FIG.
Can be placed outside the visual field, as described above. Therefore, the installation angle of the exit end 13 is set to the incident angle θ.
It can be reduced to 0 (that is, the exit end 13
(The emission angle of the inspection light from can be made closer to the direction of the light receiving portion 2), as shown in FIG.
The central axis L 0 of the emitting end portion 13 can be aligned in the direction parallel to the XY plane and coincident with the main axis L of the light receiving portion 2.
【００３０】従って、この実施形態の検査装置では、出
射端部１３をこの中心軸Ｌ0と受光部２の主軸Ｌとが同
一面内で一致するような状態に配置しても、出射端部１
３からの光が直接受光部２に入射させないようにでき
る。つまり、ラインの流れるＺ方向を含め全方向につい
て、出射端部１３からの検査光が直接入射するのを回避
できるわけである。Therefore, in the inspection apparatus of this embodiment, even if the emission end portion 13 is arranged such that the central axis L 0 and the main axis L of the light receiving portion 2 are in the same plane, the emission end portion 13 is arranged. 1
It is possible to prevent the light from 3 from directly entering the light receiving portion 2. That is, it is possible to prevent the inspection light from directly entering from the emission end portion 13 in all directions including the Z direction in which the line flows.
【００３１】これにより、この実施形態の検査装置をそ
のまま用いて、第２タイプの散乱光、即ち、ラインの流
れるＺ方向に垂直な（Ｘ−Ｙ）面内での角度範囲は狭い
が、ラインの流れるＺ方向を含め全方向に散乱する散乱
光に対しても、検査誤差の少ない、検査能力の高いもの
を実現できるようになる。As a result, by using the inspection apparatus of this embodiment as it is, the scattered light of the second type, that is, the angle range in the (XY) plane perpendicular to the Z direction in which the line flows is narrow, but the line is narrow. Even with respect to scattered light scattered in all directions including the flowing Z direction, it is possible to realize a device with a small inspection error and a high inspection capability.
【００３２】一方、例えば図５に示すように、被検物５
（図示せず）と受光部２との間に視野角補正レンズ４を
配設させていない比較例の検査装置では、光源（出射端
部１３）からの検査光が受光部２に直接入射しないよう
にするために、間接光透過光法を用いることが必要にな
る。即ち、この検査装置では、図７に示す従来のものと
同様に、ライン状光源６を受光部２の主軸Ｌから若干ず
らして設けた検査装置が別途必要である。つまり、第
１、第２の２種類のタイプの散乱光に応じて検査装置を
２種類用意しておいて使い分けを行い、それぞれの検査
装置で、各タイプの欠陥を検出することが必要になる。On the other hand, for example, as shown in FIG.
In the inspection device of the comparative example in which the viewing angle correction lens 4 is not provided between the light receiving unit 2 (not shown), the inspection light from the light source (emission end portion 13) does not directly enter the light receiving unit 2. In order to do so, it is necessary to use the indirect light transmission method. That is, in this inspection apparatus, similarly to the conventional apparatus shown in FIG. 7, an inspection apparatus in which the linear light source 6 is provided slightly displaced from the main axis L of the light receiving section 2 is required. In other words, it is necessary to prepare two types of inspection devices according to the first and second types of scattered light and use them properly, and to detect defects of each type with each inspection device. .
【００３３】なお、この実施形態では、被検査物５とし
て、透明フィルムを用いたが、これ以外に、例えば半透
明フィルム、透明又は半透明シート状物、ガラス板など
でも適用可能である。また、この実施形態では被検物を
一定方向に搬送移動させながら欠陥部分の自動検査を流
れ作業で行うインライン測定を対象としたが、例えば、
静止する被検物を対象とするオフライン測定であっても
よい。なお、長尺状の被検物について、このオフライン
測定を行う場合には、ラインセンサカメラ（受光部）と
光源（出射端部）とを被検物に対して連続移動させても
良い。In this embodiment, a transparent film is used as the inspection object 5, but other than this, for example, a semitransparent film, a transparent or semitransparent sheet material, a glass plate or the like can be applied. Further, in this embodiment, an in-line measurement in which an automatic inspection of a defective portion is performed by a flow work while the test object is conveyed and moved in a certain direction is targeted, but, for example,
It may be an offline measurement targeting a stationary test object. When performing this off-line measurement for a long test object, the line sensor camera (light receiving unit) and the light source (exit end) may be continuously moved with respect to the test object.
【００３４】[0034]
【発明の効果】以上説明してきたように、この発明は、
受光部の視野の外側から視野内の被検物に検査光を照射
することで、受光部が直接検査光を受光することがない
ようにするために、投光部を受光部の視野の外側に配置
すると、投光部から受光部に入射する検査光の光量又は
光強度が減少する傾向にあるといった事情を考慮して、
受光部と被検物との間にテレセントリック若しくはそれ
に近い機能を有する光学系を構成するレンズを配置して
受光部の視野を狭め、この狭まった視野の外であって、
かつ、この視野内との境界近傍に投光部を配置してい
る。As described above, the present invention is
In order to prevent the light receiving unit from receiving the inspection light directly by irradiating the inspection object in the visual field from the outside of the light receiving unit's visual field, the light emitting unit is set outside the visual field of the light receiving unit. In consideration of the situation that the light quantity or light intensity of the inspection light that enters the light receiving section from the light projecting section tends to decrease,
A field of view of the light receiving section is narrowed by arranging a lens forming an optical system having a telecentric function or a function close to it between the light receiving section and the object to be examined, and outside the narrowed field of view,
In addition, the light projecting portion is arranged near the boundary with the field of view.
【００３５】したがって、受光部の視野外から検査光を
照射する場合であっても、投光部の配置角度を受光部方
向に近づけることができるようになるので、十分な光量
または光強度の散乱光を受光部へ入射させることがで
き、しかも、第１タイプと、第２タイプとの双方のタイ
プの散乱光を検出する際に、光源からの検査光が受光部
へ直接入射しないようにできる。これにより、双方のタ
イプの散乱光を、同時に、しかも感度良く安定した状態
で欠陥検出を行うことができるようになる。Therefore, even when the inspection light is emitted from the outside of the field of view of the light receiving section, the arrangement angle of the light projecting section can be made closer to the direction of the light receiving section, so that a sufficient amount of light or light intensity is scattered. Light can be made incident on the light receiving portion, and further, when detecting scattered light of both the first type and the second type, the inspection light from the light source can be prevented from directly entering the light receiving portion. . As a result, it becomes possible to detect defects of both types of scattered light simultaneously and in a stable state with high sensitivity.
【図１】この発明の検査装置の構成を示すブロック図で
ある。FIG. 1 is a block diagram showing a configuration of an inspection apparatus of the present invention.
【図２】この発明の検査装置により第１タイプの散乱光
を検出するときの作用を示す説明図である。FIG. 2 is an explanatory view showing an operation when detecting the first type scattered light by the inspection device of the present invention.
【図３】比較例として従来の検査装置を用いて第１タイ
プの散乱光を検出するときの欠点を示す説明図である。FIG. 3 is an explanatory diagram showing a defect when detecting a first type of scattered light using a conventional inspection apparatus as a comparative example.
【図４】この発明の検査装置により第２タイプの散乱光
を検出するときの作用を示す説明図である。FIG. 4 is an explanatory diagram showing an operation when detecting the second type scattered light by the inspection device of the present invention.
【図５】比較例として従来の検査装置を用いて第１タイ
プの散乱光を検出するときの欠点を示す説明図である。FIG. 5 is an explanatory diagram showing a defect when detecting a first type of scattered light using a conventional inspection apparatus as a comparative example.
【図６】従来の検査装置を示すブロック図である。FIG. 6 is a block diagram showing a conventional inspection device.
【図７】従来の他の（第２タイプ用）検査装置を示すも
のであり、（Ａ）は正面図、（Ｂ）は側面図である。7A and 7B show another conventional inspection apparatus (for second type), in which (A) is a front view and (B) is a side view.
【図８】従来の更に他の（第１、２タイプ用）検査装置
を示すものであり、（Ａ）は正面図、（Ｂ）は側面図で
ある。要部拡大図である。FIG. 8 shows still another conventional inspection apparatus (for first and second types), (A) is a front view and (B) is a side view. FIG.
１ 投光部 １１ レーザ光源 １２ ライトガイド（光ファイバ） １３ 出射端部 ２ 受光部（ラインセンサカメラ） ３ 処理部 ４ （視野角補正）レンズ ５ 被検物（透明フィルム） α 視角 θ 入射角 Ｌ （受光部）光軸 Ｚ 被検物の搬送方向 1 Projector 11 Laser light source 12 Light guide (optical fiber) 13 Output end 2 Light receiving part (line sensor camera) 3 processing units 4 (viewing angle correction) lens 5 Test object (transparent film) α viewing angle θ incident angle L (light receiving part) optical axis Z Transport direction of object
Claims (5)
部から検査光を照射し、この検査光が前記被検物の欠陥
部で散乱または反射して受光部に入射することで欠陥部
分の存在を光学的に検出する透明物の検査方法であっ
て、 前記受光部と前記被検物との間に配置したレンズで受光
部の視野空間を成形し、 前記受光部の成形された視野の外側に配置した投光部か
らその視野内の被検物へ検査光を照射することを特徴と
する透明物の検査方法。1. A transparent or semi-transparent object to be inspected is irradiated with inspection light from a light projecting portion, and this inspection light is scattered or reflected by a defective portion of the object to be incident on a light receiving portion. In the method of inspecting a transparent object to optically detect the presence of a defective portion, the view field space of the light receiving portion is formed by a lens disposed between the light receiving portion and the object to be inspected, and the light receiving portion is formed. A method for inspecting a transparent object, which comprises irradiating an inspecting object in the visual field with an inspection light from a light projecting section arranged outside the visual field.
行うことを特徴とする請求項１に記載の透明物の検査方
法。2. The method for inspecting a transparent object according to claim 1, wherein the defect is inspected while the object to be inspected is transferred.
する投光部と、前記被検物に対して前記投光部とは反対
側に配置され、前記光源からの検査光が前記被検物の欠
陥部で散乱または反射した光を入射することで欠陥部分
の存在を検出する受光部とを備えた透明物の検査装置で
あって、 前記受光部と前記被検物との間に、受光部の視野空間を
成形するレンズを配置するとともに、 前記投光部を前記受光部の成形された視野の外側に配置
して視野外から視野内の被検物を照射するように構成し
たことを特徴とする透明物の検査装置。3. A light projecting unit for irradiating a transparent or semi-transparent test object with test light, and a test unit arranged on the opposite side of the test object from the light projecting unit, for testing light from the light source. A transparent object inspection device including a light receiving unit that detects the presence of a defective portion by entering light scattered or reflected by the defective portion of the inspection object, wherein the light receiving unit and the inspection object are In between, a lens for shaping the visual field space of the light receiving section is arranged, and the light projecting section is arranged outside the molded visual field of the light receiving section so that the test object in the visual field is irradiated from outside the visual field. A transparent object inspection device characterized by being configured.
入射角度が特定の角度以下となるような状態に投光部を
配置したことを特徴とする請求項３に記載の透明物の検
査装置。4. The transparent part according to claim 3, wherein the light projecting part is arranged in such a state that an angle of incidence of the inspection light emitted from the light projecting part on the object to be inspected is a specific angle or less. Inspection device for objects.
行うように構成したことを特徴とする請求項３に記載の
透明物の検査装置。5. An apparatus for inspecting a transparent object according to claim 3, wherein the inspecting apparatus is configured to inspect the defective portion while transferring the object to be inspected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001263949A JP2003075356A (en) | 2001-08-31 | 2001-08-31 | Method and device for inspecting transparent subject |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001263949A JP2003075356A (en) | 2001-08-31 | 2001-08-31 | Method and device for inspecting transparent subject |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003075356A true JP2003075356A (en) | 2003-03-12 |
Family
ID=19090626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001263949A Pending JP2003075356A (en) | 2001-08-31 | 2001-08-31 | Method and device for inspecting transparent subject |
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| Country | Link |
|---|---|
| JP (1) | JP2003075356A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015182541A1 (en) * | 2014-05-29 | 2015-12-03 | 住友化学株式会社 | Laminated polarizing film defect inspection method, production method, and production device |
| KR101744643B1 (en) * | 2016-04-28 | 2017-06-09 | (주)워프비전 | Inspecting device for preventing distortion of image |
-
2001
- 2001-08-31 JP JP2001263949A patent/JP2003075356A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015182541A1 (en) * | 2014-05-29 | 2015-12-03 | 住友化学株式会社 | Laminated polarizing film defect inspection method, production method, and production device |
| KR101744643B1 (en) * | 2016-04-28 | 2017-06-09 | (주)워프비전 | Inspecting device for preventing distortion of image |
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