JP2003068822A - Information visualizing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an information visualizing device that can visualize the information processed in an online connecting device for connecting a semiconductor manufacturing device online. SOLUTION: This information visualizing device which visualizes the information processed in the online connecting device for connecting the semiconductor manufacturing device online is provided with an interface means which monitors the information transmitted from a standardizing means incorporated in the online connecting device to a host interface means, a display means, and a control means which displays a state or animation on the screen of the display means based on the monitored information.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an information visualization device for visualizing information so that the information can be easily grasped, and in particular, it is possible to visualize information processed in an online device for bringing a semiconductor manufacturing device online. Possible information visualization device.

[0002]

2. Description of the Related Art In the conventional semiconductor industry, the diameter of wafers, the degree of integration, and the miniaturization of wafers are rapidly advancing, and online production of semiconductor manufacturing equipment is carried out for predictive and actual management, equipment abnormality monitoring, and yield improvement. Is an essential requirement.

However, in the past, in order to bring a semiconductor manufacturing apparatus online, a manufacturer has made an online operation independently, so that the cost of the online operation is increased, and the semiconductor manufacturing apparatuses between different manufacturers are collectively installed. It was not easy to go online.

Therefore, the International Association for Semiconductor Manufacturing Equipment Materials (Se
miconductor Equipment and Materials Internationa
l: Hereinafter, simply referred to as SEMI. ) Standard interface for communication related to semiconductor manufacturing (hereinafter referred to as SEMI
Call it standard. ), Information specific to the semiconductor manufacturing apparatus is standardized to the SEMI standard and transmitted to a host computer, and an on-line apparatus has been developed that enables the semiconductor manufacturing apparatus to go online.

FIG. 8 is a block diagram showing an example of a system using a conventional online device. In FIG. 8, 1 is a host computer, 2 is an online device, 3
Is a semiconductor manufacturing apparatus.

Host computer 1 and semiconductor manufacturing apparatus 3
An online device 2 is disposed between the semiconductor manufacturing device 3 and the online device 2, and communication between the host computer 1 and the online device 2 is performed using the SEMI standard. Exchange unique information.

The operation of the conventional example shown in FIG. 8 will now be described in detail with reference to FIGS. 9 and 10. FIG. 9 is a configuration block diagram showing a specific example of the online device 2, and FIG. 10 is a flow diagram for explaining the operation of the online device 2.

In FIG. 9, reference numerals 1 and 3 are the same as those in FIG. 8, 4 is a host interface means, 5 is a standardization means, and 6 is a device interface means. Further, 4 to 6 constitute the online device 50.

Inputs and outputs from the semiconductor manufacturing equipment 3 are connected to the equipment interface means 6, and inputs and outputs of the equipment interface means 6 are connected to the standardization means 5. The input / output of the standardization means 5 is connected to the host interface means 4, and the input / output of the host interface means 4 is connected to the host computer 1.

At "S001" in FIG. 10, the device interface means 6 judges whether or not there is information from the semiconductor manufacturing device 3, and if there is information from the semiconductor manufacturing device 3, at "S002" in FIG. The device interface unit 6 acquires information from the semiconductor manufacturing device 3 and outputs it to the standardization unit 5.

In "S003" in FIG. 10, the standardization means 5 uses the information acquired by the device interface means 6 as SE.
It is standardized based on the MI standard and is output to the host interface means 4.

In "S004" in FIG. 10, the host interface means 4 transmits the information standardized based on the SEMI standard to the host computer 1 of the upper level.

As a result, the host computer 1, which is a high-order host, can perform SEMI regardless of the manufacturer of the semiconductor manufacturing equipment.
Since the information based on the standard can be obtained, the semiconductor manufacturing apparatus can be easily brought online by controlling the semiconductor manufacturing apparatus based on the information.

[0014]

However, in the conventional online device shown in FIG. 8 and the like, the host computer 1 receives the events and object attributes defined by the SEMI standard that are processed inside the online device 2. It was outputting textual information for reference above.

FIG. 11 is an explanatory diagram showing an example of information output in text format. Especially, a carrier in which a plurality of wafers set in a load port of a semiconductor manufacturing apparatus is moved to a fixed position during processing, “Doc (Doc)
k) ”indicates information in text format output.

For example, the display screen of the host computer 1 shown as "DS01" in FIG. 11 shows "WI0" in FIG.
The information display screen as shown in 1 "is displayed and"
Information in text format as shown in TI01 "is displayed.

That is, although the user can refer to the event and the attribute of the object defined by the SEMI standard processed in the online device 2 as the information in the text format, it is processed in the online device 2. In order to understand the events and the attributes of objects defined by the SEMI standard, there is a problem that the information in the text format as shown in FIG. 11 must be decoded.

Although the state of an object acquired as an event due to a change in state can be grasped by decoding the information in text format, the states of other existing objects can be traced back to the history of information in text format. There was a problem that I had to investigate.

Further, although individual events and the like can be grasped by the above decoding, it is difficult to comprehensively grasp information such as the movement of the wafer being processed in the semiconductor manufacturing apparatus, the state of the process, the state of the carrier and the like. There was a problem that I said there was. Therefore, the problem to be solved by the present invention is to realize an information visualization device capable of visualizing information processed in an online device for bringing a semiconductor manufacturing device online.

[0020]

In order to achieve such a object, the invention according to claim 1 of the present invention visualizes information processed in an online device for putting a semiconductor manufacturing device online. In the information visualization device,
Interface means for intercepting the information from the standardizing means in the online device to the host interface means, display means, and control for displaying a status display or animation display on the display screen of the display means based on the intercepted information. By providing the means, the information processed in the online device can be visualized.

According to a second aspect of the present invention, in the information visualization apparatus according to the first aspect of the present invention, the control means has a function of designating a process for a material as a process execution resource of the semiconductor manufacturing apparatus and managing tracking. By changing the status display of the function on the display screen when the status changes, the statuses of all the objects existing in the online device can be easily grasped.

According to a third aspect of the present invention, in the information visualization apparatus according to the first aspect of the present invention, the control means specifies a process for a material as a process execution resource of the semiconductor manufacturing apparatus and manages tracking. When is newly generated or deleted, the state display of the newly generated function is displayed on the display screen, or
By deleting the status display of the function, it is possible to easily grasp the status of all objects existing in the semiconductor manufacturing apparatus.

According to a fourth aspect of the invention, in the information visualization apparatus according to the first aspect of the invention, the control means is 1
Alternatively, by changing the status display of the function on the display screen when the status of the function of managing the processing of the semiconductor manufacturing apparatus for one or more carriers changes,
It becomes possible to easily grasp the states of all objects existing in the semiconductor manufacturing apparatus.

According to a fifth aspect of the invention, in the information visualization apparatus according to the first aspect of the invention, the control means is
Alternatively, when a function for managing the processing of the semiconductor manufacturing apparatus for one or more carriers is newly created or deleted, a status display of the newly created function is displayed on the display screen, or the function is displayed. By erasing the state display of, it becomes possible to easily grasp the states of all objects existing in the semiconductor manufacturing apparatus.

According to a sixth aspect of the present invention, in the information visualization device according to the first aspect of the present invention, the control means moves the animation display position on the display screen based on the intercepted information, It is possible to comprehensively understand information such as the movement of the wafer being processed in the semiconductor manufacturing apparatus, the state of the process, the state of the carrier, and the like.

According to a seventh aspect of the invention, in the information visualization apparatus according to the first aspect of the invention, the control means newly displays an animation display on the display screen based on the intercepted information, or By deleting the display of the animation display, it becomes possible to comprehensively grasp the information such as the movement of the wafer, the state of the process, the state of the carrier, etc., which are processed in the semiconductor manufacturing apparatus.

According to an eighth aspect of the present invention, in the information visualization apparatus according to the first aspect of the present invention, the control means has the attribute request operation performed when the attribute request operation is performed by the operating means. It is possible to display the attributes of individual objects in detail by inquiring the standardizing means for the attributes of and displaying them on the display screen.

According to a ninth aspect of the present invention, in the information visualization device according to the eighth aspect, the control means moves the cursor to the object on the display screen and clicks, double-clicks, or clicks the right button. By recognizing the operation of the attribute request when there is a click, it becomes possible to display the attributes of each object in detail.

According to a tenth aspect of the present invention, in the information visualization apparatus according to any one of the second to seventh aspects, the control means detects the state display or the animation display as the information intercepted. By displaying them in different colors based on the colors, it is possible to easily grasp the status of each "Job" or animation on the status display screen or the operation display screen by simply identifying the display color without reading the status display characters. It will be possible.

According to an eleventh aspect of the present invention, in the information visualization apparatus according to the tenth aspect of the present invention, the control means changes and displays the gradation of the status display or the animation display based on the intercepted information. By doing so, it is possible to easily grasp the status of each "Job" or animation on the status display screen or the operation display screen by only identifying the display color without reading the display characters of the status.

According to a twelfth aspect of the present invention, in the information visualization device according to any one of the second to seventh aspects, the control means displays the information obtained by intercepting the state display or the animation display. By blinking based on the display, you can easily understand the status of each "Job" or animation on the status display screen or operation display screen by simply identifying the flashing status without reading the status display characters. Will be possible.

According to a thirteenth aspect of the present invention, in the information visualization device according to the twelfth aspect of the invention, the control means changes and displays the blinking interval of the status display or the animation display based on the intercepted information. By doing so, it is possible to easily understand the status of each "Job" or animation on the status display screen or the operation display screen by only identifying the blinking status without reading the status display characters.

[0033]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below with reference to the drawings. FIG. 1 is a configuration block diagram showing an embodiment of an information visualization device according to the present invention. 1, 3,
4, 5, 6 and 50 have the same reference numerals as those in FIG.
Is an interface unit, 8 is a control unit, 9 is a display unit, and 10 is an operation unit for operating the operation of a cursor displayed on the display unit 9 such as a mouse. In addition, 7 to 10 form an information visualization device 51.

Inputs and outputs from the semiconductor manufacturing equipment 3 are connected to the equipment interface means 6, and inputs and outputs of the equipment interface means 6 are connected to the standardization means 5. The input / output of the standardization means 5 is connected to the host interface means 4 and the interface means 7, respectively, and the input / output of the host interface means 4 is connected to the host computer 1.

The input / output of the interface means 7 is connected to the control means 8, and the output of the control means 8 is the display means 9.
The output of the operating means 10 is connected to the control means 8.

The operation of the embodiment shown in FIG. 1 will now be described with reference to FIG.
This will be described with reference to FIGS. 3, 4, 5, 6, and 7. 2 is a flow diagram illustrating an operation for controlling the status display screen, FIG. 3 is an explanatory diagram illustrating an example of the status display screen, FIG. 4 is a flow diagram illustrating an operation for controlling the operation display screen, and FIG.
Is an explanatory view showing an example of an operation display screen, FIG. 6 is a flow diagram explaining an operation of performing a process of calling an attribute of an object, and FIG. 7 is an explanatory view showing an example of a pop-up displayed attribute display screen.

First of all, the standardizing means 5 uses "Job Management (hereinafter referred to as JM)" and "Carrier Management Standard (hereinafter referred to as C" in conformity with the SEMI standard.
Call it MS. ) ”,“ Substrate Tracking Standard
(Hereinafter referred to as STS) "and" Object Service Sta.
There is a function called "ndard (hereinafter referred to as OSS)".

"JM" is "Process Job" and "Control"
It has two management functions such as "Job" and "Process Jo
“B” is a function that manages tracking by specifying a process for a material in a semiconductor manufacturing apparatus or chamber that is a process execution resource, and “Control Job” is 1 or 1
It is a function of managing the processing of the semiconductor manufacturing apparatus for the above carriers.

The "CMS" is a function for carrying out carrier management, carrier loading / transportation management, carrier ID / slot map confirmation, load port management and the like.

"STS" is a "Substrat" for wafers and the like.
It is a function that provides a service for tracking e ".

Finally, "OSS" is a function of providing a service for reading the attributes of an object and a service for setting the attributes of an object.

In "S101" in FIG. 2, the control means 8 uses the interface means 7 to send information from the standardization means 5 to the host interface means 4, specifically "J".
It judges whether or not the event from M "is intercepted and received.

If an event is received from "JM" in "S101" in FIG. 2, the control means 8 is "Process Job" or "Control J" in "S102" in FIG.
It is determined whether or not the state of ob "(hereinafter, simply referred to as Job) has changed.

Then, in "S102" in FIG.
When the state of "ob" changes, the control means 8 displays "J" on the state display screen on the display means 9 in "S103" in FIG.
change the state of ob ".

For example, the state display screen shown in "SW11" in FIG. 3 is displayed on the display screen of the display means 9 shown in "DS11" in FIG. 3, and the state display screen shown in "SW11" in FIG. A list of "Job" existing in the semiconductor manufacturing apparatus as shown by "JB11", "JB12" and "JB13" in FIG. 3 is displayed above.

Then, in the step shown in "S103" in FIG. 2, for example, the state shown in "ST11" in FIG. 3 is changed and displayed.

The state shown in "ST11" in FIG. 3 is "
For “Process Job”, for example, display the status of “Processing”, “Setting up”, “Pooling”, etc.
As for “Control Job”, for example, states such as “in execution”, “selected”, and “queuing (waiting state)” are displayed.

When the state of "Job" does not change in "S102" in FIG. 2, the control means 8 determines whether "Job" is newly generated in "S104" in FIG.

If "S104" in FIG.
When b "is newly generated," S105 "in FIG.
At, the control means 8 displays the generated "Job" on the status display screen on the display means 9.

For example, "corresponding to" JB11 "in FIG. 3"
When "Job" is newly generated, "SW1" in FIG.
A state display such as "JB11" in FIG. 3 is newly displayed on the 1 "state display screen.

When "Job" is not newly generated in "S104" in FIG. 2, "S106" in FIG.
At, the control means 8 determines whether or not "Job" has been deleted.

If "S106" in FIG.
When "b" is deleted, the control means 8 deletes the deleted "Job" from the status display screen on the display means 9 in "S107" in FIG.

For example, "corresponding to" JB12 "in FIG. 3"
When “Job” is deleted, the status display shown in “JB12” in FIG. 3 is deleted from the status display screen of “SW11” in FIG.

On the other hand, in "S201" in FIG. 4, the control means 8 uses the interface means 7 to intercept and receive information from the standardizing means 5 to the host interface means 4, specifically, an event from "CMS". Judge whether or not.

If an event is received from "CMS" in "S201" in FIG. 4, the control means 8 changes the animation display of the operation display screen based on the received event in "S202" in FIG.

For example, the operation display screen shown in "MW21" in FIG. 5 is displayed on the display screen of the display means 9 shown in "DS21" in FIG. 5, and the operation display screen shown in "MW21" in FIG. The position of the wafer being processed in the semiconductor manufacturing apparatus as shown by "WF21", "WF22", and "WF23" in FIG. 5 is displayed above, and "CR21" in FIG.
Further, as shown in "CR22", the state of the carrier is displayed.

Further, in FIG. 5, "ST21", "ST22"
And "ST23" indicate the state of each load port shown in "RP21", "RP22" and "RP23" in FIG. 5 and the state of the carrier placed in the load port.

Assuming, for example, that the carrier indicated by "CR21" in FIG. 5 receives an event "docked", the control means 8 displays the animation indicated by "CR21" in FIG. 5 from the load port. Move to a fixed position for processing.

If no event is received from "CMS" in "S201" in FIG. 4, "S20" in FIG.
In 3 ", the control means 8 uses the interface means 7 to judge whether or not the information from the standardization means 5 to the host interface means 4, specifically, the event from" JM "is intercepted and received.

If an event is received from "JM" in "S203" in FIG. 4, the control means 8 changes the animation display of the operation display screen based on the received event in "S204" in FIG. .

Assuming, for example, a case where an event in which a certain process is performed on the wafer indicated by "WF22" in FIG. 5 is received, the control means 8 uses "ST2" in FIG.
An animation showing the execution of the process is displayed as shown in 4 ".

On the other hand, in "S301" in FIG. 6, the control means 8 determines whether or not the attribute request operation by the operation means 10 has been performed.

For example, the operation display screen shown in "MW31" in FIG. 7 is displayed on the display screen of the display unit 9 shown in "DS31" in FIG. 7, and the control unit 8 operates the operation unit 10. Thus, it is determined whether or not there is an attribute request operation such as clicking, double-clicking, or right-clicking by moving the cursor shown by "CS31" in FIG. 7 to the animation of the carrier shown by "CR31" in FIG.

If "S301" in FIG.
When an attribute request operation is performed by "S3" in FIG.
In 02 ", the control means 8 requests the attribute of the designated object to the" OSS "in the standardization means 5 via the interface means 7.

For example, the control means 8 responds to "OSS" in the standardization means 5 through the interface means 7 as shown in FIG.
Request the attribute of the carrier indicated by medium "CR31".

Then, in "S303" in FIG. 6, the control means 8 waits until it receives the attribute of the requested object from "OSS", and in "S303" in FIG. 6, "OSS".
When the attribute is received from the control unit 8, the control unit 8 causes the display unit 9 to display the received attribute in "S304" in FIG.

For example, an attribute display screen as shown by "AT31" in FIG. 7 is pop-up displayed, and the carrier attribute shown by "CR31" in FIG. 7 is displayed on this attribute display screen.

As a result, the interface means 7 is used to intercept the information from the standardization means 5 to the host interface means 4, and the information displayed on the display screen of the display means 9 is changed or newly displayed based on the information. Alternatively, by deleting the information, the information processed in the online device can be visualized.

In addition, when an event from "JM" is intercepted, the state of all objects existing in the online device can be easily changed by changing, newly displaying or deleting the information displayed on the state display screen. It will be possible to grasp.

Further, by moving the animation display displayed on the operation display screen when an event from "CMS" or "JM" is intercepted, the movement or process of the wafer processed in the semiconductor manufacturing apparatus can be changed. It is possible to comprehensively understand information such as the status of the carrier and the status of the carrier.

When an attribute request operation is performed by the operating means 10, the attribute of the object for which the attribute request operation is performed is inquired to "OSS" and displayed on the attribute display screen. Can be displayed in detail.

For the sake of simplicity of explanation, the status display screen and the operation display screen are illustrated as being clearly separated. However, the present invention is not limited to this and may be mixed on the same screen. I do not care.

In the examples of FIGS. 4 and 5, only the movement of the animation is mentioned.
The animation on the operation display screen may be newly displayed or deleted based on the event from S "or" JM ".

Although the movement of the animation relating to the carrier is mentioned in the examples of FIGS. 4 and 5, individual wafers set on the carrier may be moved, newly displayed or deleted.

Further, in the examples of FIGS. 6 and 7, the animation displayed on the operation display screen, in particular, the case where the attribute request operation is performed on the carrier is shown. For other animations displayed on the screen or on the status display screen
Job (“Process Job” or “Control Job”) ”
Similarly, when the attribute request operation is performed on the attribute display screen, the attribute display screen may be pop-up displayed.

Further, the display on the status display screen or the operation display screen may be displayed in different colors depending on the status or the like. For example, "Running" is displayed in "red" and "Waiting" is displayed in "
It may be displayed in “green” or the like. Further, instead of the simple color-coded display, the gradation may be changed according to the state and the like together with the color-coded display.

In this case, it is possible to easily grasp the status of each "Job" or animation on the status display screen or the operation display screen by simply identifying the display color without reading the display characters of the status. become.

Further, the display on the status display screen or the operation display screen may be constantly lit or blinked depending on the status.

For example, it is also possible to display "execution in progress" by "blinking" and "standby" by "always on". Further, the blinking interval may be changed according to the state or the like instead of simply "blinking" or "always-on".

In this case, it is possible to easily grasp the status of each "Job" or animation on the status display screen or the operation display screen only by identifying the blinking status without reading the status display characters. It will be possible.

Of course, the color-coded display and the constantly lit display or blinking display may be combined and displayed on the status display screen or the operation display screen. Also in this case, it is possible to easily grasp the status of each "Job" or animation on the status display screen or the operation display screen.

Further, in addition to displaying the attributes of individual objects, the information intercepted by the standardizing means 5 may be associated with each other to display the relationship between the objects.

In this case, since the relation between the objects can be easily grasped, the relation of the object matters which is difficult to grasp in the conventional example can be grasped easily. For example, it is possible to grasp which processing bowl is being used.

[0084]

As is apparent from the above description,
The present invention has the following effects. According to the invention of claim 1, the interface means is used to intercept the information from the standardizing means to the host interface means, and based on the information, the information displayed on the display screen of the display means is changed, newly displayed or By deleting the information, the information processed in the online device can be visualized.

Further, according to the inventions of claims 2, 3, 4 and 5, when the event from "JM" is intercepted, the information displayed on the status display screen is changed, newly displayed or deleted. This makes it possible to easily grasp the states of all the objects existing in the online device.

According to the sixth and seventh aspects of the invention, the semiconductor manufacturing is performed by moving the animation displayed on the operation display screen when the event from "CMS" or "JM" is intercepted. It becomes possible to comprehensively grasp the information such as the movement of the wafer being processed in the apparatus, the state of the process, the state of the carrier and the like.

According to the inventions of claims 8 and 9, when an attribute request operation is performed by the operating means, the attribute of the object for which the attribute request operation is performed is set to "OS".
By referring to "S" and displaying it on the attribute display screen,
It becomes possible to display the attributes of individual objects in detail.

According to the tenth and eleventh aspects of the present invention, the display on the state display screen or the operation display screen is color-coded according to the state or the like, or gradation is displayed according to the state and the like. By changing the, it is possible to easily grasp the status of each "Job" or animation on the status display screen or the operation display screen by identifying the display color without reading the display characters of the status. .

According to the twelfth and thirteenth aspects of the present invention, the display on the status display screen or the operation display screen is constantly lit or blinked according to the state, or blinks according to the state or the like. By changing the interval, it is possible to easily understand the status of each "Job" or animation on the status display screen or operation display screen by simply identifying the blinking status without reading the status display characters. become.

[Brief description of drawings]

FIG. 1 is a configuration block diagram showing an embodiment of an information visualization device according to the present invention.

FIG. 2 is a flowchart illustrating an operation of controlling a status display screen.

FIG. 3 is an explanatory diagram showing an example of a status display screen.

FIG. 4 is a flowchart illustrating an operation of controlling an operation display screen.

FIG. 5 is an explanatory diagram showing an example of an operation display screen.

FIG. 6 is a flowchart illustrating an operation of performing a process of calling an attribute of an object.

FIG. 7 is an explanatory diagram showing an example of a pop-up displayed attribute display screen.

FIG. 8 is a configuration block diagram showing an example of a system using an online device.

FIG. 9 is a configuration block diagram showing a specific example of an online device.

FIG. 10 is a flowchart illustrating the operation of the online device.

FIG. 11 is an explanatory diagram showing an example of information output in text format.

[Explanation of symbols]

1 Host computer 2 Online equipment 3 Semiconductor manufacturing equipment 4 Host interface means 5 standardization means 6 Device interface means 7 Interface means 8 Control means 9 Display means 10 Operation means 50 Online system 51 Information Visualizer

Claims (13)

[Claims] 1. An information visualization device for visualizing information processed in an online device for bringing a semiconductor manufacturing device online, and an interface for intercepting the information from a standardization means in the online device to a host interface means. An information visualization device comprising: a means, a display means, and a control means for displaying a status display or an animation display on a display screen of the display means based on the intercepted information. 2. The control means displays a status display of the function on the display screen when a status of a function of managing a tracking by designating a process for a material as a process execution resource of the semiconductor manufacturing apparatus is changed. The information visualization device according to claim 1, wherein the information visualization device is changed. 3. The control means newly creates or deletes on the display screen when a function of managing a tracking by designating a process for a material as a process execution resource of the semiconductor manufacturing apparatus is newly created or deleted. The information visualization device according to claim 1, wherein the displayed status of the function is displayed or the displayed status of the function is erased. 4. The control means changes the status display of the function on the display screen when the status of the function managing the processing of the semiconductor manufacturing apparatus for one or more carriers changes. The information visualization device according to claim 1, which is characterized in that. 5. The function newly created on the display screen when the control means newly creates or deletes a function for managing processing of the semiconductor manufacturing apparatus for one or more carriers. 2. The information visualization device according to claim 1, wherein the status display of the function is displayed or the status display of the function is erased. 6. The control means moves the animation display position on the display screen based on the intercepted information.
Information visualization device described. 7. The information according to claim 1, wherein the control means newly displays an animation display on the display screen based on the intercepted information, or erases the display of the animation display. Visualization device. 8. The control means, when an attribute request operation is performed by an operating means, queries the target attribute for which the attribute request operation is performed to the standardizing means and displays the attribute on the display screen. The information visualization device according to claim 1, which is characterized in that. 9. The control means recognizes an operation of the attribute request when a cursor is moved to the object on the display screen and a click, a double click, or a right button click is performed. The information visualization device according to claim 8. 10. The information visualization device according to claim 2, wherein the control unit displays the status display or the animation display in different colors based on the intercepted information. . 11. The information visualization device according to claim 10, wherein the control means changes and displays the gradation of the status display or the animation display based on the intercepted information. 12. The information visualization device according to claim 2, wherein the control means blinks and displays the state display or the animation display based on the intercepted information. . 13. The information visualization device according to claim 12, wherein the control means changes and displays the blinking interval of the status display or the animation display based on the intercepted information.