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JP2003048271A - Transparent water vapor barrier film - Google Patents

Transparent water vapor barrier film

Info

Publication number
JP2003048271A
JP2003048271A JP2001239715A JP2001239715A JP2003048271A JP 2003048271 A JP2003048271 A JP 2003048271A JP 2001239715 A JP2001239715 A JP 2001239715A JP 2001239715 A JP2001239715 A JP 2001239715A JP 2003048271 A JP2003048271 A JP 2003048271A
Authority
JP
Japan
Prior art keywords
water vapor
vapor barrier
material layer
barrier film
transparent water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001239715A
Other languages
Japanese (ja)
Other versions
JP3933894B2 (en
Inventor
Hironori Maruyama
宏典 丸山
Hisashi Ito
寿 伊東
Toshimasa Eguchi
敏正 江口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP2001239715A priority Critical patent/JP3933894B2/en
Publication of JP2003048271A publication Critical patent/JP2003048271A/en
Application granted granted Critical
Publication of JP3933894B2 publication Critical patent/JP3933894B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a transparent film which has a higher water vapor barrier performance than that of a prior art and in which the barrier performance is not deteriorated even by bending. SOLUTION: The transparent water vapor barrier film comprises an organic material layer (1), an inorganic material layer (1), an organic material layer (2), and an inorganic material layer (2) laminated in this order on a rein base. In this case, a thickness of the layer (2) is 0.01 μm to 3 μm.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、光学部材、エレク
トロニクス部材、一般包装部材、薬品包装部材などの幅
広い用途に応用が可能な透明で水蒸気バリア性の高いフ
ィルムに関する。
TECHNICAL FIELD The present invention relates to a transparent film having a high water vapor barrier property, which can be applied to a wide range of applications such as optical members, electronic members, general packaging members, and chemical packaging members.

【0002】[0002]

【従来の技術】従来より、プラスチック基板やフィルム
の表面に酸化アルミニウム、酸化マグネシウム、酸化珪
素等の金属酸化物の薄膜を形成した水蒸気バリア性フィ
ルムは、水蒸気の遮断を必要とする物品の包装、食品や
工業用品及び医薬品等の変質を防止するための包装用途
に広く用いられている。また、包装用途以外にも液晶表
示素子、太陽電池、エレクトロルミネッセンス(EL)
基板等で使用されている。特に液晶表示素子EL素子な
どへの応用が進んでいる透明基材には、近年、軽量化、
大型化という要求に加え、長期信頼性や形状の自由度が
高いこと、曲面表示が可能であること等の高度な要求が
加わり、重くて割れやすく大面積化が困難なガラス基板
に代わって透明プラスチック等のフィルム基材が採用さ
れ始めている。また、プラスチックフィルムは上記要求
に応えるだけでなく、ロールトゥロール方式が可能であ
ることからガラスよりも生産性が良くコストダウンの点
でも有利である。
2. Description of the Related Art Conventionally, a water vapor barrier film in which a thin film of a metal oxide such as aluminum oxide, magnesium oxide or silicon oxide is formed on the surface of a plastic substrate or a film is used for packaging an article which needs to block water vapor, It is widely used for packaging purposes to prevent the deterioration of foods, industrial supplies and pharmaceuticals. In addition to packaging applications, liquid crystal display devices, solar cells, electroluminescence (EL)
Used in substrates, etc. In recent years, the weight of transparent base materials, which have been increasingly applied to liquid crystal display elements, EL elements, etc.
In addition to the demand for larger size, high demands such as long-term reliability, high degree of freedom of shape, and ability to display curved surfaces are added, making it transparent instead of a glass substrate that is heavy and easily broken and difficult to increase in area. Film base materials such as plastics are beginning to be adopted. Further, the plastic film not only meets the above-mentioned requirements but also has the advantage of being more productive and cost-effective than glass since it can be used in a roll-to-roll system.

【0003】しかしながら、透明プラスチック等のフィ
ルム基材はガラスに対し水蒸気バリア性が劣るという問
題がある。水蒸気バリア性が劣る基材を用いると、水蒸
気が浸透し、例えば液晶セル内の液晶を劣化させ、表示
欠陥となって表示品位を劣化させてしまう。この様な問
題を解決するためにフィルム基板上に金属酸化物薄膜を
形成してガスバリア性フィルム基材とすることが知られ
ている。包装材や液晶表示素子に使用される水蒸気バリ
ア性フィルムとしてはプラスチックフィルム上に酸化珪
素を蒸着したもの(特公昭53-12953号公報)や酸化アル
ミニウムを蒸着したもの(特開昭58-217344号公報)が
知られており、いずれも1g/m2/day程度の水蒸気バリア
性を有する。近年では、液晶ディスプレイの大型化、高
精細ディスプレイ等の開発によりフィルム基板への水蒸
気バリア性能について0.1g/m2/day程度まで要求が上が
ってきている。これに応えるためにより高い水蒸気バリ
ア性能が期待できる手段としてスパッタリング法やCV
D法による成膜検討が行われている。ところが、ごく近
年においてさらなる水蒸気バリア性を要求される有機E
Lディスプレイや高精彩カラー液晶ディスプレイなどの
開発が進み、これに使用可能な透明性を維持しつつもさ
らなる高水蒸気バリア性0.1g/m2/day未満の性能をもつ
基材が要求されるようになってきた。さらに、曲げる事
が可能な表示デバイスとしての要望も大きく、曲げても
水蒸気バリア性能が劣化しないバリア層が必要となって
きた。
However, there is a problem that the film base material such as transparent plastic is inferior in water vapor barrier property to glass. When a base material having a poor water vapor barrier property is used, water vapor penetrates and deteriorates, for example, the liquid crystal in the liquid crystal cell, resulting in a display defect and deterioration in display quality. In order to solve such a problem, it is known to form a metal oxide thin film on a film substrate and use it as a gas barrier film substrate. As a water vapor barrier film used for a packaging material or a liquid crystal display device, a plastic film on which silicon oxide is vapor-deposited (Japanese Patent Publication No. 53-12953) or aluminum oxide is vapor-deposited (JP-A-58-217344). Gazette) is known, and all have a water vapor barrier property of about 1 g / m 2 / day. In recent years, the demand for water vapor barrier performance on film substrates has increased to about 0.1 g / m 2 / day due to the development of large liquid crystal displays and high-definition displays. In order to respond to this, as a means by which higher water vapor barrier performance can be expected, sputtering method and CV
Film formation studies by the D method are being conducted. However, in recent years, organic E has been required to have a further water vapor barrier property.
The development of L-displays and high-definition color liquid crystal displays is progressing, and there is a need for a base material that has a high water vapor barrier property of less than 0.1 g / m 2 / day while maintaining the transparency that can be used. Has become. Furthermore, there is a great demand for a display device that can be bent, and a barrier layer that does not deteriorate the water vapor barrier performance even when bent has been required.

【0004】[0004]

【発明が解決しようとする課題】本発明の目的は、従来
よりも高い水蒸気バリア性能を持ちかつ曲げてもそのバ
リア性能が劣化しない透明フィルムを提供することにあ
る。
SUMMARY OF THE INVENTION An object of the present invention is to provide a transparent film which has a higher water vapor barrier performance than ever and does not deteriorate even when bent.

【0005】[0005]

【課題を解決するための手段】すなわち本発明は、 (1)樹脂基材上に有機物層、無機物層、有機物層
、無機物層の順に積層し構成された透明水蒸気バリ
アフィルムにおいて、有機物層の厚みが0.01μm
以上、3μm以下である透明水蒸気バリアフィルム。 (2)前記有機物層が、アクリロイル基を有するモノマ
ーを架橋させて得られる高分子を主成分とする(1)の
透明水蒸気バリアフィルム。 (3)前記有機物層が、2官能以上のアクリロイル基を
有する1種類以上のモノマー、または2官能以上のアク
リロイル基を有する1種類以上のモノマーと単官能以上
のアクリロイル基を有する1種類以上のモノマーとの混
合物を、架橋させて得られる高分子を主成分とする
(1)の透明水蒸気バリアフィルム。 (4)2官能以上のアクリロイル基を有するモノマーが
2官能以上のイソシアヌル酸アクリレートまたはエポキ
シアクリレートまたはウレタンアクリレートである
(3)の透明水蒸気バリアフィルム。 (5)前記無機物層が珪素酸化物または珪素窒化物また
は珪素窒化酸化物を主成分とする(1)〜(4)の透明
水蒸気バリアフィルム。 (6)前記樹脂基材のガラス転移温度が200℃以上であ
る(1)〜(5)の透明水蒸気バリアフィルム。 (7)前記樹脂基材がノルボルネン系樹脂またはポリエ
ーテルスルホンを主成分とする(1)〜(6)の透明水
蒸気バリアフィルム。 である。
Means for Solving the Problems That is, the present invention provides (1) a transparent water vapor barrier film comprising an organic material layer, an inorganic material layer, an organic material layer, and an inorganic material layer laminated in this order on a resin substrate, and the thickness of the organic material layer. Is 0.01 μm
The transparent water vapor barrier film having a thickness of 3 μm or less. (2) The transparent water vapor barrier film according to (1), wherein the organic material layer contains a polymer obtained by crosslinking a monomer having an acryloyl group as a main component. (3) The organic material layer has one or more kinds of monomers having a bifunctional or higher functional acryloyl group, or one or more kinds of monomers having a bifunctional or higher functional acryloyl group and one or more kinds of monomers having a monofunctional or higher functional acryloyl group. (1) A transparent water vapor barrier film, which comprises a polymer obtained by crosslinking a mixture of (4) The transparent water vapor barrier film according to (3), wherein the monomer having a bifunctional or higher functional acryloyl group is a bifunctional or higher functional isocyanuric acid acrylate, epoxy acrylate or urethane acrylate. (5) The transparent water vapor barrier film according to (1) to (4), wherein the inorganic layer contains silicon oxide, silicon nitride, or silicon nitride oxide as a main component. (6) The transparent water vapor barrier film according to (1) to (5), wherein the glass transition temperature of the resin substrate is 200 ° C. or higher. (7) The transparent water vapor barrier film according to (1) to (6), wherein the resin substrate has a norbornene-based resin or polyether sulfone as a main component. Is.

【0006】[0006]

【発明の実施の形態】本発明は、樹脂基材上に有機物層
、無機物層、有機物層、無機物層の順に積層し
することで、第1層(有機物層、無機物層)だけで
は無くしきれない層構造の欠陥部分を第2層(有機物層
、無機物層)で埋め、水蒸気バリア性を高めた透明
フィルムである。また、無機物層およびの間に挟ま
れた有機物層の厚みは0.01〜3μmの範囲とする
ことで、曲げてもそのバリア性能を劣化させず、且つ良
好な無機物層の密着性が得られる。本発明の無機物層に
関しては何ら制限はないが、例えばSi、Al、In、Sn、Z
n、Ti、Cu、Ce等の1種以上を含む酸化物もしくは窒化
物もしくは酸化窒化物などを用いることができる。無機
物層は厚すぎると曲げ応力によるクラックの恐れがあ
り、薄すぎると膜が島状に分布するため、いずれも水蒸
気バリア性が悪くなる。上記のことより、それぞれの無
機物層の厚みは5nm〜500nmの範囲が好ましいが、特に限
定はしない。また、それぞれの無機物層は同じ組成でも
別の組成でも良く制限はない。水蒸気バリア性と高透明
性を両立させるには無機物層として珪素酸化物や珪素酸
化窒化物を使うのが好ましい。珪素酸化物はSiOxと表記
され、たとえば、無機物層としてSiOxを用いる場合、良
好な水蒸気バリア性と高い光線透過率を両立させるため
には1.6<x<1.9であることが望ましい。珪素酸化窒化物
はSiOxNyと表記されるが、このxとyの比率は密着性向上
を重視する場合、酸素リッチの膜とし、1<x<2、0<y<1が
好ましく、水蒸気バリア性向上を重視する場合、窒素リ
ッチの膜とし、0<x<0.8、0.8<y<1.3が好ましい。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention is not limited to the first layer (organic material layer, inorganic material layer) by stacking an organic material layer, an inorganic material layer, an organic material layer, and an inorganic material layer in this order on a resin substrate. It is a transparent film in which the defective portion of the layer structure is filled with a second layer (organic material layer, inorganic material layer) to improve the water vapor barrier property. Further, by setting the thickness of the inorganic material layer and the organic material layer sandwiched between the inorganic material layer and the inorganic material layer to be in the range of 0.01 to 3 μm, the barrier performance thereof is not deteriorated even when bent, and good adhesion of the inorganic material layer is obtained. . There is no limitation on the inorganic layer of the present invention, for example, Si, Al, In, Sn, Z
An oxide, a nitride, an oxynitride, or the like containing one or more of n, Ti, Cu, Ce, or the like can be used. If the inorganic layer is too thick, there is a risk of cracks due to bending stress, and if it is too thin, the film will be distributed in islands, and the water vapor barrier property will deteriorate in both cases. From the above, the thickness of each inorganic layer is preferably in the range of 5 nm to 500 nm, but is not particularly limited. Further, the respective inorganic layers may have the same composition or different compositions, and there is no limitation. In order to achieve both the water vapor barrier property and the high transparency, it is preferable to use silicon oxide or silicon oxynitride as the inorganic layer. Silicon oxide is referred to as SiOx. For example, when SiOx is used as the inorganic layer, 1.6 <x <1.9 is desirable in order to achieve both good water vapor barrier properties and high light transmittance. Silicon oxynitride is described as SiOxNy, but if the emphasis is on improving adhesion, the ratio of x and y should be an oxygen-rich film, with 1 <x <2 and 0 <y <1 being preferred, and water vapor barrier properties. When importance is placed on improvement, a nitrogen-rich film is preferably used, and 0 <x <0.8 and 0.8 <y <1.3 are preferable.

【0007】本発明の有機物層の材質については特に制
限はないが、アクリル系樹脂やウレタン系樹脂、ポリエ
ステル系樹脂等を使用することができる。中でも、エポ
キシアクリレート、ウレタンアクリレート、イソシアヌ
ル酸アクリレート、ペンタエリスリトールアクリレー
ト、トリメチロールプロパンアクリレート、エチレング
リコールアクリレート、ポリエステルアクリレートなど
のうち、2官能以上のアクリロイル基を有するモノマー
を塗工後、架橋させて得られる高分子を主成分とするこ
とが塗工性も良く好ましい。特に架橋度が高く、ガラス
転移温度が200℃以上である、イソシアヌル酸アクリレ
ート、エポキシアクリレート、ウレタンアクリレートを
主成分とすることが好ましい。これらの2官能以上のア
クリロイル基を有するモノマーは2種類以上を混合して
用いても、また1官能のアクリレートを混合して用いて
も良い。また、それ自体で比較的バリア性のあるPVA
系やEVA系、ポリ塩化ビニリデン、もしくはこれらの
樹脂の複数を混用することもできる。樹脂基材直上の有
機物層については、その厚みの制限は特に無いが、
0.01〜10μmが好ましい。本発明の樹脂基材とし
ては何ら制限はないが、ポリスルホン樹脂、ポリエーテ
ルスルホン樹脂、ポリカーボネート樹脂、ポリアリレー
ト樹脂、ポリアクリレート樹脂、ポリエステル樹脂、ポ
リアミド樹脂、エポキシ樹脂、ポリイミド樹脂、ポリオ
レフィン樹脂、ポリ塩化ビニリデン樹脂等を使用するこ
とができる。特に、ガラス転移温度が200℃以上のノ
ルボルネン系樹脂やポリエーテルサルホンは光学特性が
良好で耐熱性が高く、有機物層無機物層形成プロセスに
おいて高温処理による変形や劣化が無いので好ましい。
The material of the organic layer of the present invention is not particularly limited, but acrylic resin, urethane resin, polyester resin and the like can be used. Among them, among epoxy acrylates, urethane acrylates, isocyanuric acid acrylates, pentaerythritol acrylates, trimethylolpropane acrylates, ethylene glycol acrylates, polyester acrylates, etc., they are obtained by applying a monomer having a bifunctional or higher acryloyl group and then crosslinking it. It is preferable to use a polymer as the main component because the coatability is good. Particularly, it is preferable that the main component is isocyanuric acid acrylate, epoxy acrylate, or urethane acrylate, which has a high degree of crosslinking and a glass transition temperature of 200 ° C. or higher. These monomers having a bifunctional or higher functional acryloyl group may be used as a mixture of two or more kinds, or a monofunctional acrylate may be used as a mixture. In addition, PVA which is relatively barrier by itself
A system, EVA system, polyvinylidene chloride, or a plurality of these resins may be mixed. There is no particular limitation on the thickness of the organic material layer directly on the resin substrate,
0.01 to 10 μm is preferable. The resin base material of the present invention is not particularly limited, but polysulfone resin, polyether sulfone resin, polycarbonate resin, polyarylate resin, polyacrylate resin, polyester resin, polyamide resin, epoxy resin, polyimide resin, polyolefin resin, polychlorinated resin. Vinylidene resin or the like can be used. In particular, a norbornene-based resin having a glass transition temperature of 200 ° C. or higher and polyether sulfone are preferable because they have good optical characteristics and high heat resistance and are not deformed or deteriorated by high-temperature treatment in the organic layer / inorganic layer forming process.

【0008】[0008]

【実施例】以下本発明の実施例について詳細に説明する
が、本発明は、何ら下記実施例に限定されるものではな
い。 (実施例1)ポリエーテルサルホンフィルムに2官能の
エポキシアクリレート(昭和高分子:VR-60-LAV)25wt%、
ジエチレングリコール50wt%、酢酸エチル24wt%、シラン
カップリング剤1wt%からなる均一な混合溶液をスピン
コーターで塗布し、80℃10分加熱乾燥後さらにUV照射
で硬化させて2μmの樹脂層を形成した。つぎに、スパ
ッタ装置の真空槽内に前記有機物層を形成したフィルム
をセットし10-4Pa台まで真空引きし、放電ガスとしてア
ルゴンを分圧で0.04Pa導入、反応ガスとして酸素を分圧
で0.04Pa導入した。雰囲気圧力が安定したところで放電
を開始しSiターゲット上にプラズマを発生させ、スパッ
タリングプロセスを開始した。プロセスが安定したとこ
ろでシャッターを開きフィルムへのSiOx無機膜の形成を
開始した。50nmの膜が堆積したところでシャッターを閉
じて成膜を終了した。その後、真空槽(1)内に大気を導
入しSiOx無機物層の形成されたフィルムを取り出した。
さらに、該フィルムのSiOx無機膜堆積面にアクリル系樹
脂(昭和高分子:VR-60-LAV)25wt%、ジエチレングリコー
ル50wt%、酢酸エチル24wt%、シランカップリング剤1wt
%からなる均一な混合溶液をスピンコーターで塗布し、8
0℃10分加熱乾燥後さらにUV照射で硬化させて0.5μm
の樹脂層を形成した。再び該フィルムをスパッタ装置の
真空槽内にセットし10-4Pa台まで真空引きし、放電ガス
としてアルゴンを分圧で0.04Pa導入、反応ガスとして酸
素を分圧で0.04Pa導入した。雰囲気圧力が安定したとこ
ろで放電を開始しSiターゲット上にプラズマを発生さ
せ、スパッタリングプロセスを開始した。プロセスが安
定したところでシャッターを開きフィルムへのSiOx無機
膜の形成を開始した。50nmの膜が堆積したところでシャ
ッターを閉じて成膜を終了した。その後、真空槽(1)内
に大気を導入しSiOx無機物層の形成されたフィルムを取
り出した。
EXAMPLES Examples of the present invention will be described in detail below, but the present invention is not limited to the following examples. (Example 1) Bifunctional epoxy acrylate (Showa High Polymer: VR-60-LAV) 25 wt% on a polyether sulfone film,
A uniform mixed solution of 50 wt% of diethylene glycol, 24 wt% of ethyl acetate and 1 wt% of silane coupling agent was applied by a spin coater, dried by heating at 80 ° C. for 10 minutes, and further cured by UV irradiation to form a 2 μm resin layer. Next, set the film on which the organic material layer is formed in the vacuum chamber of the sputtering device and evacuate to a level of 10 -4 Pa, introduce argon as a discharge gas at a partial pressure of 0.04 Pa, and oxygen as a reaction gas at a partial pressure. Introduced 0.04Pa. When the atmospheric pressure became stable, discharge was started, plasma was generated on the Si target, and the sputtering process was started. When the process became stable, the shutter was opened and the formation of the SiOx inorganic film on the film was started. When the 50 nm film was deposited, the shutter was closed to complete the film formation. Then, the atmosphere was introduced into the vacuum chamber (1), and the film having the SiOx inorganic layer formed thereon was taken out.
Furthermore, on the SiOx inorganic film deposition surface of the film, acrylic resin (Showa High Polymer: VR-60-LAV) 25 wt%, diethylene glycol 50 wt%, ethyl acetate 24 wt%, silane coupling agent 1 wt
Apply a uniform mixed solution consisting of
After heating and drying at 0 ℃ for 10 minutes, it is further cured by UV irradiation to 0.5 μm
The resin layer of was formed. The film was set again in the vacuum tank of the sputtering apparatus, and the vacuum was evacuated to the level of 10 −4 Pa. Argon was introduced as a discharge gas at a partial pressure of 0.04 Pa and oxygen was introduced as a reaction gas at a partial pressure of 0.04 Pa. When the atmospheric pressure became stable, discharge was started, plasma was generated on the Si target, and the sputtering process was started. When the process became stable, the shutter was opened and the formation of the SiOx inorganic film on the film was started. When the 50 nm film was deposited, the shutter was closed to complete the film formation. Then, the atmosphere was introduced into the vacuum chamber (1), and the film having the SiOx inorganic layer formed thereon was taken out.

【0009】(実施例2)実施例1と同様に、ポリエー
テルサルホンフィルム上に有機物層/無機物層/有機
物層/無機物層の形成を行ったが、無機物層に挟ま
れた有機物層の厚みを0.01μmとした。 (実施例3)実施例1と同様に、ポリエーテルサルホン
フィルム上に有機物層/無機物層/有機物層/無機
物層の形成を行ったが、本実施例では有機物層の厚
みを3μmとした。 (実施例4)実施例1で使用した2官能のエポキシアク
リレートの代わりに、イソシアヌル酸トリアクリレート
(東亜合成:アロニックスM−315)を用いた他は実
施例1と同様に、ポリエーテルサルホンフィルム上に有
機物層/無機物層/有機物層/無機物層の形成を
行った。
(Example 2) The organic layer / inorganic layer / organic layer / inorganic layer was formed on the polyethersulfone film in the same manner as in Example 1, but the thickness of the organic layer sandwiched between the inorganic layers was Was 0.01 μm. (Example 3) An organic material layer / inorganic material layer / organic material layer / inorganic material layer was formed on a polyethersulfone film in the same manner as in Example 1, but in this embodiment, the thickness of the organic material layer was 3 μm. (Example 4) The polyether sulfone film was used in the same manner as in Example 1 except that isocyanuric acid triacrylate (Toagosei: Aronix M-315) was used in place of the bifunctional epoxy acrylate used in Example 1. An organic layer / inorganic layer / organic layer / inorganic layer was formed on the top.

【0010】(実施例5)実施例1で使用した2官能の
エポキシアクリレートと、イソシアヌル酸トリアクリレ
ート(東亜合成:アロニックスM−315)を1:1に
混合したものを用いた他は実施例1と同様に、ポリエー
テルサルホンフィルム上に有機物層/無機物層/有機
物層/無機物層の形成を行った。 (実施例6)実施例1で使用したポリエーテルスルホン
フィルムの代わりに、ポリカーボネートフィルムを用い
た他は実施例1と同様に、ポリカーボネートフィルム上
に有機物層/無機物層/有機物層/無機物層の形
成を行った。
Example 5 Example 1 was repeated except that the bifunctional epoxy acrylate used in Example 1 and isocyanuric acid triacrylate (Toagosei: Aronix M-315) were mixed in a ratio of 1: 1. In the same manner as above, formation of an organic material layer / inorganic material layer / organic material layer / inorganic material layer was performed on the polyether sulfone film. (Example 6) Formation of organic material layer / inorganic material layer / organic material layer / inorganic material layer on a polycarbonate film in the same manner as in Example 1 except that a polycarbonate film was used instead of the polyether sulfone film used in Example 1. I went.

【0011】(比較例1)実施例1と同様に、ポリエー
テルサルホンフィルム上に有機物層/無機物層/有機
物層/無機物層の形成を行ったが、本実施例では有
機物層の厚みを0.005μmとした。とした。 (比較例2)実施例1と同様に、ポリエーテルサルホン
フィルム上に有機物層/無機物層/有機物層/無機
物層の形成を行ったが、本実施例では有機物層の厚
みを5μmとした。
Comparative Example 1 In the same manner as in Example 1, the organic layer / inorganic layer / organic layer / inorganic layer was formed on the polyethersulfone film. In this example, the thickness of the organic layer was 0.005. μm. And (Comparative Example 2) In the same manner as in Example 1, the organic layer / inorganic layer / organic layer / inorganic layer was formed on the polyether sulfone film. In this example, the thickness of the organic layer was 5 μm.

【0012】(評価)各フィルムの水蒸気透過度をJISK
7129B法にて測定した。また、目視により外観を評価し
た。さらに、30mmφの棒に1回巻きつけた後、再度水蒸
気透過度をJISK7129B法にて測定した。結果を表1に示
す。
(Evaluation) The water vapor permeability of each film is determined by JISK
It was measured by the 7129B method. The appearance was visually evaluated. Furthermore, after being wound once around a 30 mmφ rod, the water vapor permeability was measured again by the JIS K7129B method. The results are shown in Table 1.

【0013】[0013]

【表1】 [Table 1]

【0014】実施例1〜6においては、いずれの評価結
果も表示素子用としての要求特性を十分に満たしていた
が、有機物層の厚みが薄い比較例1では、表面にまだ
ら状模様が発生し実施例に比較して水蒸気透過度がやや
高い値となった。これは、有機層と無機層との密着
が所々で悪く、バリア性にも影響しているものと推定さ
れる。また、有機物層の厚みが厚い比較例2では、曲
げ処理前のバリア性および外観は実施例と変わらなかっ
たが、曲げ処理によって、水蒸気透過とが大きく増大し
た。これは有機層が破壊され、これによって両無機層
に影響を及ぼしているものと考えられる。
In each of Examples 1 to 6, all the evaluation results sufficiently satisfied the required characteristics for a display device, but in Comparative Example 1 in which the organic material layer was thin, a mottled pattern was generated on the surface. The water vapor permeability was slightly higher than that of the example. It is presumed that this is because the adhesion between the organic layer and the inorganic layer is poor in some places and the barrier property is also affected. Further, in Comparative Example 2 in which the thickness of the organic material layer was large, the barrier property and the appearance before the bending treatment were the same as those of the Examples, but the bending treatment greatly increased the water vapor permeability. It is considered that this is because the organic layer is destroyed and this affects both inorganic layers.

【0015】[0015]

【発明の効果】本発明は、高い水蒸気バリアをもつ透明
フィルムであり、しかも曲げることで水蒸気バリア性が
低下しないという特性を持つものである。本発明のフィ
ルムをたとえば表示用素子として適用すれば、軽くて割
れないディスプレイが実現できる。また、薬品などの保
存に適用すれば中身が見えて、落としても割れないよう
な保存容器を実現することも可能であり、その工業的価
値は極めて高い。
INDUSTRIAL APPLICABILITY The present invention is a transparent film having a high water vapor barrier and has a characteristic that the water vapor barrier property is not deteriorated by bending. When the film of the present invention is applied as a display element, for example, a light and non-breakable display can be realized. In addition, if it is applied to the storage of chemicals, it is possible to realize a storage container whose contents can be seen and does not break when dropped, and its industrial value is extremely high.

フロントページの続き Fターム(参考) 4F100 AA01C AA01E AA20C AA20E AH00B AH00D AH06 AK01A AK01B AK01D AK02A AK25B AK25D AK54A AL05B AL05D AT00A BA05 BA07 BA10A BA10E CA02 EH46 EH462 EH66 EH662 EJ24 EJ242 EJ42 EJ422 EJ54 EJ542 EJ86 EJ862 GB15 GB41 GB66 JA05A JD04 JK17 JN01 Continued front page    F-term (reference) 4F100 AA01C AA01E AA20C AA20E                       AH00B AH00D AH06 AK01A                       AK01B AK01D AK02A AK25B                       AK25D AK54A AL05B AL05D                       AT00A BA05 BA07 BA10A                       BA10E CA02 EH46 EH462                       EH66 EH662 EJ24 EJ242                       EJ42 EJ422 EJ54 EJ542                       EJ86 EJ862 GB15 GB41                       GB66 JA05A JD04 JK17                       JN01

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 樹脂基材上に有機物層、無機物層、
有機物層、無機物層の順に積層し構成された透明水
蒸気バリアフィルムにおいて、有機物層の厚みが0.
01μm以上、3μm以下である透明水蒸気バリアフィ
ルム。
1. An organic material layer, an inorganic material layer, and
In a transparent water vapor barrier film formed by laminating an organic material layer and an inorganic material layer in this order, the thickness of the organic material layer is 0.
A transparent water vapor barrier film having a thickness of 01 μm or more and 3 μm or less.
【請求項2】 前記有機物層が、アクリロイル基を有す
るモノマーを架橋させて得られる高分子を主成分とする
請求項1記載の透明水蒸気バリアフィルム。
2. The transparent water vapor barrier film according to claim 1, wherein the organic material layer is mainly composed of a polymer obtained by crosslinking a monomer having an acryloyl group.
【請求項3】 前記有機物層が、2官能以上のアクリロ
イル基を有する1種類以上のモノマー、または2官能以
上のアクリロイル基を有する1種類以上のモノマーと単
官能以上のアクリロイル基を有する1種類以上のモノマ
ーとの混合物を、架橋させて得られる高分子を主成分と
する請求項1記載の透明水蒸気バリアフィルム。
3. The organic layer comprises at least one kind of monomer having a bifunctional or higher functional acryloyl group, or at least one kind of monomer having a bifunctional or higher functional acryloyl group and a monofunctional or higher functional acryloyl group. The transparent water vapor barrier film according to claim 1, which comprises a polymer obtained by cross-linking a mixture with the above monomer as a main component.
【請求項4】 2官能以上のアクリロイル基を有するモ
ノマーが2官能以上のイソシアヌル酸アクリレートまた
はエポキシアクリレートまたはウレタンアクリレートで
ある請求項3記載の透明水蒸気バリアフィルム。
4. The transparent water vapor barrier film according to claim 3, wherein the monomer having a bifunctional or higher functional acryloyl group is a bifunctional or higher functional isocyanuric acid acrylate, epoxy acrylate or urethane acrylate.
【請求項5】 前記無機物層が珪素酸化物または珪素窒
化物または珪素窒化酸化物を主成分とする請求項1〜4
いずれか1項記載の透明水蒸気バリアフィルム。
5. The inorganic layer mainly contains silicon oxide, silicon nitride or silicon nitride oxide.
The transparent water vapor barrier film according to any one of items.
【請求項6】 前記樹脂基材のガラス転移温度が200℃
以上である請求項1〜5いずれか1項記載の透明水蒸気
バリアフィルム。
6. The glass transition temperature of the resin base material is 200 ° C.
It is above, The transparent water vapor barrier film of any one of Claims 1-5.
【請求項7】 前記樹脂基材がノルボルネン系樹脂また
はポリエーテルスルホンを主成分とする請求項1〜6い
ずれか1項記載の透明水蒸気バリアフィルム。
7. The transparent water vapor barrier film according to claim 1, wherein the resin base material contains norbornene-based resin or polyether sulfone as a main component.
JP2001239715A 2001-08-07 2001-08-07 Transparent water vapor barrier film Expired - Lifetime JP3933894B2 (en)

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