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JP2003031917A - Structure for embedding conductive paste in blind hole of circuit board - Google Patents

Structure for embedding conductive paste in blind hole of circuit board

Info

Publication number
JP2003031917A
JP2003031917A JP2001220417A JP2001220417A JP2003031917A JP 2003031917 A JP2003031917 A JP 2003031917A JP 2001220417 A JP2001220417 A JP 2001220417A JP 2001220417 A JP2001220417 A JP 2001220417A JP 2003031917 A JP2003031917 A JP 2003031917A
Authority
JP
Japan
Prior art keywords
conductive paste
conductive
opening
circuit board
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001220417A
Other languages
Japanese (ja)
Inventor
Yasuo Fukuda
泰生 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP2001220417A priority Critical patent/JP2003031917A/en
Publication of JP2003031917A publication Critical patent/JP2003031917A/en
Pending legal-status Critical Current

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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a structure for embedding conductive paste in blind hole of circuit board that can improve the embedded reliability of conductive paste at low cost. SOLUTION: A circuit board 1, constituted by respectively forming conductor layers 3a and 3b on both surfaces of a resin substrate 2, is prepared, and a prescribed circuit pattern and an opening 4 are formed in the conductor layer 3a, formed on the blind hole 10 forming-side surface of the substrate 2 through etching. At the same time, a plurality of very small openings 5, having prescribed opened diameters, is made through the conductor layer 3b at the position corresponding to the opening 4 of the conductor layer 3a. In addition, a blind hole 10, having the same diameter as the opening 4 has, is made through the substrate 2. A screen 20 is placed on the board 1 from the conductor layer 3a side and conductive paste 11 is applied from the upside of the screen 20. Then printing is performed by scratching the applied paste 11, in the direction shown by the arrow in the figure by means of a squeegee 12. Since air escapes through the very small openings 5, formed through the conductor layer 3b as the paste 11 enters the blind hole 10, no bubble is generated, and accordingly, hollow section will not be formed in the hole 10.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、プリント回路基
板や検査装置、半導体装置などに用いられる回路基板等
の両面に導電層を有する回路基板の一方の導電層から他
方の導電層に向けて貫通し、他方の導電層が穴の底部を
構成するように穿設された有底穴への導電性ペーストの
埋め込み構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention penetrates from one conductive layer of a circuit board having conductive layers on both sides of a printed circuit board, a circuit board used for an inspection device, a semiconductor device or the like to the other conductive layer. However, the present invention relates to a structure in which a conductive paste is embedded in a bottomed hole formed so that the other conductive layer constitutes the bottom of the hole.

【0002】[0002]

【従来の技術】従来より、複数の導電層を備えた回路基
板の導電層間の導通をとるためには、導通をとる導電層
をそれぞれ貫通するようにして穿設した貫通穴や、一方
の導電層を貫通しつつ他方の導電層を貫通させないで、
その他方の導電層が穴の底部を形成するように穿設した
有底穴の内部側面に、銅などの導電材によるメッキを施
したり、導電性ペーストを埋め込んだりする方式が用い
られている。
2. Description of the Related Art Conventionally, in order to establish conduction between conductive layers of a circuit board having a plurality of conductive layers, a through hole formed so as to penetrate each conductive layer for conduction or one of the conductive layers is formed. Without penetrating the other conductive layer while penetrating the layer,
A method is used in which the inner side surface of the bottomed hole formed so that the other conductive layer forms the bottom of the hole is plated with a conductive material such as copper, or a conductive paste is embedded.

【0003】例えば、導電性ペーストを埋め込む方式で
は、主にスクリーン印刷により導電性ペーストを埋め込
むことが行われている。図2は、スクリーン印刷による
導電性ペーストの埋込構造を説明するための一部断面図
である。同図(a)に示すように、まず、例えば層間絶
縁層101の両面に導電層102a,102bを備えて
なる回路基板100の導電層102a側から、導電層1
02bにまで到達するように導電層102a及び層間絶
縁層101を貫通するようにして有底穴104を形成す
る。そして、形成した有底穴104の開口径よりも大き
な径を有する開口部201が形成されたスクリーン20
0を導電層102a側から回路基板100上に載置す
る。こうして回路基板100上に載置したスクリーン2
00の上から導電性ペースト300を塗布し、塗布した
導電性ペースト300をスキージ301により図中実線
矢印方向に掻いて印刷し、有底穴104内に導電性ペー
スト300を埋め込んで導電層102a,102b間の
導通をとるようにしている。
For example, in the method of embedding a conductive paste, the conductive paste is mainly embedded by screen printing. FIG. 2 is a partial cross-sectional view for explaining a conductive paste embedding structure by screen printing. As shown in FIG. 1A, first, for example, from the conductive layer 102a side of the circuit board 100 including the conductive layers 102a and 102b on both surfaces of the interlayer insulating layer 101, the conductive layer 1 is formed.
A bottomed hole 104 is formed so as to penetrate through the conductive layer 102a and the interlayer insulating layer 101 so as to reach 02b. Then, the screen 20 in which the opening 201 having a diameter larger than the opening diameter of the formed bottomed hole 104 is formed.
0 is placed on the circuit board 100 from the side of the conductive layer 102a. The screen 2 thus placed on the circuit board 100.
00, the conductive paste 300 is applied from above, and the applied conductive paste 300 is scratched and printed by a squeegee 301 in the direction of the solid line arrow in the figure, the conductive paste 300 is embedded in the bottomed hole 104, and the conductive layer 102a, The continuity between 102b is established.

【0004】[0004]

【発明が解決しようとする課題】しかし、例えばメッキ
による方式で導通をとる場合は、大規模な新規設備(メ
ッキ処理ライン)が必要となり、コストが高くなってし
まう。一方、導電性ペーストを埋め込む方式のうち、貫
通穴で導通をとる場合は、貫通穴の上下開口部からの導
電性ペーストの突出量を調整・管理することが技術的に
難しく、また、有底穴で導通をとる場合は、図2(b)
に示すように、十分に導電性ペースト300を有底穴1
04内に埋め込むことができず、有底穴104内に気泡
を含んでしまい中空部(ボイド)105が形成され、埋
め込み信頼性の低下を招くおそれがあるという問題があ
る。特に、有底穴104の深さが深い場合は、この問題
は顕著に表れる。
However, for example, in the case of conducting electricity by a plating method, a large-scale new facility (plating processing line) is required, resulting in high cost. On the other hand, of the methods of embedding a conductive paste, when conducting through a through hole, it is technically difficult to adjust and control the amount of projection of the conductive paste from the upper and lower openings of the through hole, and When using a hole for conduction, see Fig. 2 (b).
As shown in FIG.
There is a problem that it is not possible to embed it in 04, and bubbles are included in the bottomed hole 104 to form a hollow portion (void) 105, which may lead to a decrease in embedding reliability. In particular, when the bottomed hole 104 is deep, this problem becomes remarkable.

【0005】そこで、図3に示すように、真空スクリー
ン印刷により導電性ペーストを埋め込むことが行われて
いる。図3は、真空スクリーン印刷による導電性ペース
トの埋込構造を説明するための一部断面図である。同図
(a)に示すように、回路基板100の導電層102a
側から、導電層102bにまで到達するように導電層1
02a及び層間絶縁層101を貫通するように有底穴1
04を形成し、開口部201が形成されたスクリーン2
00を導電層102a側から回路基板100上に載置す
る。そして、チャンバ内を真空状態にすることができる
真空チャンバ302内でスクリーン200上に塗布した
導電性ペースト300をスキージ301により図中実線
矢印方向に掻いて有底穴104内に導電性ペースト30
0を埋め込むことが行われている。これにより、同図
(b)に示すように、有底穴104内に気泡が発生せ
ず、ボイド105が形成されてしまうことはない。この
ため、真空スクリーン印刷では、高い埋め込み信頼性を
確保することができる。
Therefore, as shown in FIG. 3, a conductive paste is embedded by vacuum screen printing. FIG. 3 is a partial cross-sectional view for explaining a conductive paste embedding structure by vacuum screen printing. As shown in FIG. 3A, the conductive layer 102a of the circuit board 100.
From the side to reach the conductive layer 102b.
02a and the interlayer insulating layer 101 so as to penetrate the bottomed hole 1
04 formed with an opening 201
00 is placed on the circuit board 100 from the conductive layer 102a side. Then, the conductive paste 300 applied on the screen 200 is scraped in the vacuum chamber 302 capable of making the inside of the chamber into a vacuum state with a squeegee 301 in the direction of the solid line arrow in the figure, and the conductive paste 30 is placed in the bottomed hole 104.
Embedding 0 is performed. As a result, as shown in FIG. 7B, no bubbles are generated in the bottomed hole 104 and the void 105 is not formed. Therefore, in vacuum screen printing, high embedding reliability can be ensured.

【0006】しかしながら、真空スクリーン印刷では、
印刷機が通常のスクリーン印刷用の印刷機よりも高価で
あり、また、真空チャンバ302内を真空状態にするた
めのある程度の準備する時間が必要なため、生産性があ
まり良くないという問題がある。
However, in vacuum screen printing,
The printing machine is more expensive than a normal printing machine for screen printing, and there is a problem that productivity is not so good because some time is required to prepare the vacuum chamber 302 to be in a vacuum state. .

【0007】この発明は、このような問題点を解決する
ためになされたもので、安価で埋め込み信頼性を向上さ
せることができる回路基板の有底穴への導電性ペースト
埋込構造を提供することを目的とする。
The present invention has been made to solve the above problems, and provides a conductive paste burying structure in a bottomed hole of a circuit board which is inexpensive and can improve burying reliability. The purpose is to

【0008】[0008]

【課題を解決するための手段】この発明に係る回路基板
の有底穴への導電性ペースト埋込構造は、両面に第1及
び第2の導電層を備えると共に、これら第1及び第2の
導電層間を絶縁する層間絶縁層を備える回路基板の前記
第1の導電層側から前記第2の導電層側へ、前記第1の
導電層及び層間絶縁層を貫通しつつ前記第2の導電層が
穴の底部を形成するように穿設された有底穴への前記第
1及び第2の導電層間の導通をとるために埋め込まれる
導電性ペーストの埋込構造であって、前記有底穴の底部
に位置する第2の導電層に所定の開口径を有する開口部
を少なくとも一つ穿設し、前記第1の導電層側からスク
リーン印刷により前記導電性ペーストを前記有底穴内に
埋め込むようにしたことを特徴とする。
A structure for embedding a conductive paste in a bottomed hole of a circuit board according to the present invention is provided with first and second conductive layers on both sides, and the first and second conductive layers are provided. The second conductive layer, which penetrates the first conductive layer and the interlayer insulating layer from the first conductive layer side to the second conductive layer side of a circuit board including an interlayer insulating layer for insulating conductive layers. Is a structure for embedding a conductive paste in a bottomed hole formed so as to form the bottom of the hole to establish conduction between the first and second conductive layers, the bottomed hole At least one opening having a predetermined opening diameter is formed in the second conductive layer located at the bottom of the first conductive layer, and the conductive paste is embedded in the bottomed hole by screen printing from the first conductive layer side. It is characterized by having done.

【0009】この発明によれば、回路基板に形成した有
底穴の底部に開口部を形成したうえで、通常のスクリー
ン印刷により導電性ペーストを有底穴内に埋め込む構造
のため、有底穴内に気泡が入り込んで中空部が形成され
ることはなく、且つ真空スクリーン印刷を行う必要もな
いので、安価に埋め込み信頼性の高い導電性ペーストの
埋込構造を実現することができる。これにより、コスト
が低く生産性の高い両面に導電層を備える回路基板を製
造することが可能となる。
According to the present invention, the opening is formed at the bottom of the bottomed hole formed in the circuit board, and the conductive paste is embedded in the bottomed hole by the usual screen printing. Since air bubbles do not enter to form a hollow portion and it is not necessary to perform vacuum screen printing, it is possible to realize an inexpensive conductive paste embedding structure with high reliability. As a result, it is possible to manufacture a circuit board having conductive layers on both surfaces, which is low in cost and high in productivity.

【0010】なお、前記開口部は、10μm〜100μ
mの開口径を有するものであり、エッチング法又はレー
ザ照射法により形成されるものであることが望ましい。
開口径を10μm〜100μmとしたのは、導電性ペー
ストの粘度によって最適な開口径が異なるからであり、
エッチング法又はレーザ照射法としたのは、簡単且つ安
価に開口部を形成することができるからである。なお、
エッチング法としては、プラズマエッチング法なども考
えられる。
The opening is 10 μm to 100 μm.
It has an opening diameter of m and is preferably formed by an etching method or a laser irradiation method.
The reason why the opening diameter is 10 μm to 100 μm is that the optimum opening diameter varies depending on the viscosity of the conductive paste.
The reason why the etching method or the laser irradiation method is adopted is that the opening can be formed easily and inexpensively. In addition,
As an etching method, a plasma etching method or the like can be considered.

【0011】また、前記第1及び第2の導電層は、銅か
らなるものであると良いが、その他の導電材を用いても
良い。
The first and second conductive layers are preferably made of copper, but other conductive materials may be used.

【0012】同様に、前記層間絶縁層は、ポリイミド系
樹脂からなるものであると良いが、その他の絶縁樹脂を
用いても良い。
Similarly, the interlayer insulating layer is preferably made of polyimide resin, but other insulating resin may be used.

【0013】[0013]

【発明の実施の形態】以下、添付の図面を参照して、こ
の発明の好ましい実施の形態を説明する。図1は、この
発明の一実施形態に係る導電性ペーストの埋込構造を説
明するための一部を断面で示す工程図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a process view showing a part in section for explaining a conductive paste embedding structure according to an embodiment of the present invention.

【0014】まず、図1(a)に示すように、ポリイミ
ド系などの絶縁樹脂からなる層間絶縁層としての樹脂基
板2の両面に、銅箔などの導電材からなる導体層3a,
3bを形成してなる回路基板1を準備する。
First, as shown in FIG. 1A, conductor layers 3a made of a conductive material such as copper foil are formed on both surfaces of a resin substrate 2 as an interlayer insulating layer made of an insulating resin such as polyimide.
A circuit board 1 formed with 3b is prepared.

【0015】回路基板1を準備した後、同図(b)に示
すように、有底穴10(同図(c)参照)を開ける方側
の導体層3aに、所定の回路パターンや有底穴10の開
口径を有する開口部4をエッチング法などにより形成す
ると共に、有底穴10の底部となる方側の開口部4と対
応する位置の導体層3bに、有底穴10の開口径内に収
まるように、所定の開口径、例えば10μm〜100μ
mの微小開口部5を同じくエッチング法などの方法によ
り複数穿設する。
After the circuit board 1 is prepared, as shown in FIG. 2B, a predetermined circuit pattern or a bottomed pattern is formed on the conductor layer 3a on the side where the bottomed hole 10 (see FIG. 1C) is to be formed. The opening 4 having the opening diameter of the hole 10 is formed by an etching method or the like, and the opening diameter of the bottomed hole 10 is formed in the conductor layer 3b at a position corresponding to the opening 4 on the side which becomes the bottom of the bottomed hole 10. A predetermined opening diameter, for example, 10 μm to 100 μ
A plurality of m minute openings 5 are also formed by a method such as an etching method.

【0016】こうして有底穴10の開口部4と微小開口
部5とを形成した後、同図(c)に示すように、例えば
図示しないレーザ照射装置の照射先端部から所定強度の
レーザ光を開口部4に合わせて照射し、樹脂基板2に開
口部4の開口径と同様の穴径を有する有底穴10を穿設
する。この場合、有底穴10と導体層3bに形成された
微小開口部5とは連通することとなる。なお、開口部4
の開口径と有底穴10の穴径は、0.3mm程度である
と良好である。なぜなら、これより大きい穴径だと回路
設計の自由度が低くなるためなるべく小さい方がいい
が、これより小さい穴径だと埋め込み性が極端に悪くな
るからである。
After the opening 4 and the minute opening 5 of the bottomed hole 10 are formed in this way, as shown in FIG. 3C, for example, laser light of a predetermined intensity is emitted from the irradiation tip of a laser irradiation device (not shown). Irradiation is performed in accordance with the opening 4, and a bottomed hole 10 having a hole diameter similar to the opening diameter of the opening 4 is formed in the resin substrate 2. In this case, the bottomed hole 10 and the minute opening 5 formed in the conductor layer 3b communicate with each other. The opening 4
It is preferable that the opening diameter of and the hole diameter of the bottomed hole 10 be about 0.3 mm. The reason is that if the hole diameter is larger than this, the degree of freedom in circuit design is lowered, so it is preferable that the hole diameter is as small as possible, but if the hole diameter is smaller than this, the embedding property becomes extremely poor.

【0017】有底穴10を形成した後、同図(d)に示
すように、開口部4の開口径(有底穴10の穴径)より
も大きな径を有する開口部21が形成されたスクリーン
20を導電層3a側から回路基板1上に載置し、更にス
クリーン20の上から導電性ペースト11を塗布する。
そして、塗布した導電性ペースト11を、スキージ12
により図中実線矢印方向に掻いて印刷する。
After forming the bottomed hole 10, an opening 21 having a diameter larger than the opening diameter of the opening 4 (hole diameter of the bottomed hole 10) was formed as shown in FIG. The screen 20 is placed on the circuit board 1 from the side of the conductive layer 3a, and the conductive paste 11 is applied from above the screen 20.
Then, apply the conductive paste 11 to the squeegee 12
Print by scraping in the direction of the solid line arrow in the figure.

【0018】導電性ペースト11をスキージ12により
スクリーン20上で掻いて印刷することにより、同図
(e)に示すように、開口部21及び有底穴10を埋め
るように導電性ペースト11が有底穴10内に埋め込ま
れることになる。そして、導電性ペースト11が有底穴
10内に入れば入るほど、導体層3bに形成された微小
開口部5からは空気が逃げるので、有底穴10内に気泡
が発生することはなく、中空部が形成されてしまうおそ
れは少なくなる。
By printing the conductive paste 11 on the screen 20 with a squeegee 12 to print, the conductive paste 11 is filled so as to fill the openings 21 and the bottomed holes 10 as shown in FIG. It will be embedded in the bottom hole 10. Then, as the conductive paste 11 enters the bottomed hole 10, air escapes from the minute openings 5 formed in the conductor layer 3b, so that no bubbles are generated in the bottomed hole 10. The possibility that a hollow portion will be formed is reduced.

【0019】このようにして導電性ペースト11が有底
穴10内に完全に埋め込まれると、同図(f)に示すよ
うに、有底穴10内にあったすべての空気は微小開口部
5から逃げ、有底穴10内は導電性ペースト11で埋ま
った状態となる。なお、導電性ペースト11は所定の粘
性を備えるため、表面張力により有底穴10の底部に到
達した導電性ペースト11微小開口部5から外に漏れる
ことは起こり難いと考えられる。
When the conductive paste 11 is completely embedded in the bottomed hole 10 in this manner, all the air in the bottomed hole 10 becomes a small opening 5 as shown in FIG. It escapes from the inside, and the inside of the bottomed hole 10 is filled with the conductive paste 11. Since the conductive paste 11 has a predetermined viscosity, it is considered that it is unlikely that the conductive paste 11 leaks to the outside from the minute openings 5 of the conductive paste 11 reaching the bottom of the bottomed hole 10 due to surface tension.

【0020】このように、この埋込構造によれば、有底
穴10の底部に微小開口部5を設けることにより、そこ
が空気の逃げ穴となるため、高価な真空スクリーン印刷
を施さなくても有底穴10内に気泡を含まない埋め込み
信頼性の高い導電性ペースト11の埋め込みを実現する
ことができる。
As described above, according to this embedding structure, since the minute opening 5 is provided in the bottom of the bottomed hole 10 to serve as an air escape hole, expensive vacuum screen printing is not required. Also, it is possible to embed the conductive paste 11 that does not contain bubbles and has high reliability in the bottomed hole 10.

【0021】なお、微小開口部5はレーザ照射により形
成するようにしても良い。この場合、レーザを照射する
方向は、有底穴10の形成前であれば導体層3b側か
ら、有底穴10の形成後であれば有底穴10側から照射
することができる。
The minute openings 5 may be formed by laser irradiation. In this case, the direction of laser irradiation may be from the conductor layer 3b side before the bottomed hole 10 is formed and from the bottomed hole 10 side after the bottomed hole 10 is formed.

【0022】[0022]

【発明の効果】以上述べたように、この発明によれば、
回路基板に形成した有底穴の底部に開口部を形成したう
えで、通常のスクリーン印刷により導電性ペーストを有
底穴内に埋め込む構造のため、有底穴内に気泡が入り込
んで中空部が形成されることはなく、且つ真空スクリー
ン印刷を行う必要もないので、安価に埋め込み信頼性の
高い導電性ペーストの埋込構造を実現することができ
る。これにより、コストが低く生産性の高い両面に導電
層を備える回路基板を製造することが可能となるという
効果を奏する。
As described above, according to the present invention,
After the opening is formed at the bottom of the bottomed hole formed on the circuit board, the conductive paste is embedded in the bottomed hole by normal screen printing.Therefore, bubbles enter the bottomed hole to form a hollow part. Since there is no need to perform vacuum screen printing, it is possible to realize a highly reliable conductive paste embedding structure at a low cost. As a result, there is an effect that it is possible to manufacture a circuit board having conductive layers on both surfaces, which has low cost and high productivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】 この発明の一実施形態に係る導電性ペースト
の埋込構造を説明するための一部を断面で示す工程図で
ある。
FIG. 1 is a process drawing showing a part in cross section for explaining an embedded structure of a conductive paste according to an embodiment of the present invention.

【図2】 スクリーン印刷による導電性ペーストの埋込
構造を説明するための一部断面図である。
FIG. 2 is a partial cross-sectional view for explaining a conductive paste embedding structure by screen printing.

【図3】 真空スクリーン印刷による導電性ペーストの
埋込構造を説明するための一部断面図である。
FIG. 3 is a partial cross-sectional view for explaining an embedded structure of a conductive paste by vacuum screen printing.

【符号の説明】[Explanation of symbols]

1…回路基板、2…樹脂基板、3…導電層、4…開口
部、5…微小開口部、10…有底穴、11…導電性ペー
スト、12…スキージ。
DESCRIPTION OF SYMBOLS 1 ... Circuit board, 2 ... Resin board, 3 ... Conductive layer, 4 ... Opening part, 5 ... Small opening part, 10 ... Bottom hole, 11 ... Conductive paste, 12 ... Squeegee.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 両面に第1及び第2の導電層を備えると
共に、これら第1及び第2の導電層間を絶縁する層間絶
縁層を備える回路基板の前記第1の導電層側から前記第
2の導電層側へ、前記第1の導電層及び層間絶縁層を貫
通しつつ前記第2の導電層が穴の底部を形成するように
穿設された有底穴への前記第1及び第2の導電層間の導
通をとるために埋め込まれる導電性ペーストの埋込構造
であって、 前記有底穴の底部に位置する第2の導電層に所定の開口
径を有する開口部を少なくとも一つ穿設し、 前記第1の導電層側からスクリーン印刷により前記導電
性ペーストを前記有底穴内に埋め込むようにしたことを
特徴とする回路基板の有底穴への導電性ペースト埋込構
造。
1. A circuit board comprising first and second conductive layers on both sides thereof, and an interlayer insulating layer for insulating the first and second conductive layers from the first conductive layer side to the second conductive layer side. To the conductive layer side of the first and second bottomed holes formed so that the second conductive layer forms the bottom of the hole while penetrating the first conductive layer and the interlayer insulating layer. A conductive paste embedding structure for electrical connection between the conductive layers, wherein at least one opening having a predetermined opening diameter is formed in the second conductive layer located at the bottom of the bottomed hole. A conductive paste embedding structure in a bottomed hole of a circuit board, wherein the conductive paste is embedded in the bottomed hole by screen printing from the first conductive layer side.
【請求項2】 前記開口部は、10μm〜100μmの
開口径を有するものであることを特徴とする請求項1記
載の埋込構造。
2. The embedded structure according to claim 1, wherein the opening has an opening diameter of 10 μm to 100 μm.
【請求項3】 前記開口部は、エッチング法又はレーザ
照射法により形成されるものであることを特徴とする請
求項1又は2記載の埋込構造。
3. The embedded structure according to claim 1, wherein the opening is formed by an etching method or a laser irradiation method.
【請求項4】 前記第1及び第2の導電層は、銅からな
るものであることを特徴とする請求項1〜3のいずれか
1項記載の埋込構造。
4. The embedded structure according to claim 1, wherein the first and second conductive layers are made of copper.
【請求項5】 前記層間絶縁層は、ポリイミド系樹脂か
らなるものであることを特徴とする請求項1〜4のいず
れか1項記載の埋込構造。
5. The embedded structure according to claim 1, wherein the interlayer insulating layer is made of a polyimide resin.
JP2001220417A 2001-07-19 2001-07-19 Structure for embedding conductive paste in blind hole of circuit board Pending JP2003031917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001220417A JP2003031917A (en) 2001-07-19 2001-07-19 Structure for embedding conductive paste in blind hole of circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001220417A JP2003031917A (en) 2001-07-19 2001-07-19 Structure for embedding conductive paste in blind hole of circuit board

Publications (1)

Publication Number Publication Date
JP2003031917A true JP2003031917A (en) 2003-01-31

Family

ID=19054237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001220417A Pending JP2003031917A (en) 2001-07-19 2001-07-19 Structure for embedding conductive paste in blind hole of circuit board

Country Status (1)

Country Link
JP (1) JP2003031917A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100657405B1 (en) 2005-12-14 2006-12-14 삼성전기주식회사 Solder Paste Applicator
KR100797710B1 (en) 2006-11-13 2008-01-23 삼성전기주식회사 Solder Paste Applicator
WO2008047718A1 (en) * 2006-10-19 2008-04-24 Sumitomo Electric Industries, Ltd. Multilayer printed wiring board and method for manufacturing the same
CN114980521A (en) * 2022-06-06 2022-08-30 北京梦之墨科技有限公司 Electronic structure and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100657405B1 (en) 2005-12-14 2006-12-14 삼성전기주식회사 Solder Paste Applicator
WO2008047718A1 (en) * 2006-10-19 2008-04-24 Sumitomo Electric Industries, Ltd. Multilayer printed wiring board and method for manufacturing the same
JP2008103548A (en) * 2006-10-19 2008-05-01 Sumitomo Electric Ind Ltd Multilayer printed wiring board and manufacturing method thereof
KR100797710B1 (en) 2006-11-13 2008-01-23 삼성전기주식회사 Solder Paste Applicator
CN114980521A (en) * 2022-06-06 2022-08-30 北京梦之墨科技有限公司 Electronic structure and manufacturing method thereof

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