JP2003019411A - Particulate matter removal filter and method of manufacturing the same - Google Patents

Abstract

(57) [Abstract] [Problem] A dust collection rate of particulate matter is higher than a conventional product, and
Provided is a particulate matter removal filter capable of suppressing pressure loss to a low level. A bellows-shaped particulate matter removal filter is provided.
A base portion 2 made of a woven or non-woven fabric in which the filter portion 1a is made of one or more fibers selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride;
And a single layer laminated on the filtration surface and / or the back surface of the base portion 2 and composed of one or more fibers selected from silicon carbide, carbon, alumina, alumina / silica and silicon nitride. Or, it is composed of a fiber layer 8 having a composite structure. In addition, a coating layer is formed on the surface of the fibers forming the base portion 2 and the fiber layer 8 by one or more vapor deposition methods selected from silicon carbide, carbon, alumina, and silicon nitride.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particulate matter removal filter for removing particulate matter contained in the exhaust gas of a diesel engine and a method for producing the same.

[0002]

2. Description of the Related Art Conventionally, as a diesel particulate filter (particulate matter removal filter) for removing particulates (particulate matter) contained in the exhaust gas of a diesel engine, silicon carbide, cordierite, etc. have been used. There is also known a honeycomb filter made of sintered ceramics, or a bellows type filter made of ceramic fiber, which is formed into a bellows shape by sandwiching both sides of felt-like silicon carbide fibers with a heat-resistant wire mesh.

[0003]

However, the honeycomb filter made of sintered ceramics is easily broken when mechanical or thermal stress is applied, so that the type of vehicle that can be used and the running conditions are extremely limited.

On the other hand, since the bellows type filter made of ceramic fiber is formed by sandwiching both sides of the felt-like silicon carbide fiber with the wire mesh as described above, the dust collection rate of the particulate matter is not necessarily high. In addition, since the fibers are oxidized and deteriorated during soot combustion, the service life was short.

In order to increase the dust collection rate of the particulate matter, it is conceivable to thicken the layer of silicon carbide fibers constituting the filter, but in that case, the pressure loss becomes high and the price becomes high. The problem occurs.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a particulate matter which has a higher dust collection rate of the particulate matter and a pressure loss which can be suppressed lower than that of the conventional article. It is intended to provide a substance removal filter and a manufacturing method thereof.

[0007]

In order to solve the above problems, the present invention is configured as follows.

(1) A bellows-shaped particulate matter removing filter, wherein the filter portion comprises silicon carbide, carbon, alumina,
1 or 2 selected from alumina / silica and silicon nitride
A base portion made of a woven or non-woven fabric composed of one or more kinds of fibers, and a filter surface of the base portion and / or laminated on the back surface thereof, and selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride. A single layer or a fiber layer having a composite structure composed of one or more kinds of fibers, and silicon carbide, carbon, alumina, and alumina on the surface of the fiber forming the base portion and the fiber layer. A particulate matter removal filter having a coating layer by one or more vapor deposition methods selected from silicon nitride.

(2) The particulate material according to (1), characterized in that the pores of the fiber layer constituting the filter portion are impregnated with ceramic or metal particles, and at least the particle surface is coated with ceramics. Material removal filter.

(3) The particulate catalyst according to (1) or (2), characterized in that an oxidation catalyst is attached to the surface of the fiber forming the filter portion or the surface of the fiber forming the filtration layer. Material removal filter.

(4) The particulate matter removing filter according to (1), (2) or (3), characterized in that an electrode is attached to the filter portion.

(5) A method of manufacturing a bellows type filter, comprising: (a) a woven fabric composed of one or more kinds of fibers selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride. A step of forming a base part from a cloth or a non-woven fabric, (b) a step of impregnating the base part with a fiber binder, and (c) silicon carbide, carbon, alumina, alumina.
A step of forming a fiber layer having a single layer or a composite structure with one or more kinds of fibers selected from silica and silicon nitride; and (d) a step of impregnating the fiber layer with a fiber binder.
(E) Filtration surface of base part impregnated with fiber binder and /
Or a step of forming a laminate by laminating a fiber layer impregnated with a fiber binder on the back surface thereof, (f) a step of attaching the laminate to a peripheral surface of a bellows-shaped mold, and (g) a mold The process of attaching the release cloth and the suction cloth to the laminate on the frame, the step of (h) coating the uncured product attached to the peripheral surface of the frame with a plastic film, and (re) fiber bonding in the autoclave. Curing the agent, and (nu) mineralizing the cured fiber binder in a high temperature inert gas, after which the surface of the fiber is selected from one or more of silicon carbide, carbon, alumina and silicon nitride. A method for producing a particulate matter removal filter, comprising a step of depositing a coating layer by two or more vapor deposition methods.

The following members are preferably used as the fiber layer. (A) Paper, mat or felt (b) Paper, mat or felt having short fibers in the pores or having short fibers in the pores and on the surface (f) Paper, mat or felt also in the outermost layer And having short fibers in the pores, or having short fibers in the pores and the surface, and as short fibers, the diameter of the fiber of the above paper, mat, or felt Thin and above paper, mat,
Alternatively, those having a length that penetrates into the pores of the felt are preferable.

Further, ceramic or metal is preferable as the particles for filling the pores. Further, as a coating material for the particles, a ceramic paint, a ceramic adhesive, or silicon carbide deposited by a vapor deposition method is preferable.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numeral 1 denotes a bellows-shaped particulate matter removing filter (hereinafter referred to as a filter), and a main body portion 1a of the filter 1 is made of silicon carbide fiber as shown in FIG. The base portion 2 is made of a coarse plain woven fabric, and the fiber layer 8 is laminated on the filtration surface of the base portion 2.

As shown in FIG. 3, the fiber layer 8 has a mat 9 made of silicon carbide fiber and an extremely short silicon carbide fiber (milled fiber) 1 with which the upper surface (filtration surface) of the mat 9 is impregnated.
0, and a portion of the milled fiber 10 is impregnated into the pores 12 existing between the fibers 11 forming the mat 9, as shown in FIG.

The fiber binder impregnated in the base portion 2 and the fiber layer 8 is hardened in an autoclave (not shown) and then mineralized into a carbon or graphite in a high temperature inert gas atmosphere. It has the role of a binder that connects each other. In addition, the base portion 2 and the fiber layer 8
Silicon carbide (not shown) is deposited on the surfaces of the fibers 10, 11, and 13 forming the by a vapor deposition method (CVD method).

FIG. 5 is an explanatory view of the use of the filter according to the present invention. The filter 1 arranged in the case 20 incorporated in the exhaust passage (not shown) of the diesel engine is a porous plate or a wire mesh. Inner cylinder 21 and outer cylinder 2
Supported by 2. An insulating seal 23 seals between the two tubes 21 and 22. Also, the inner cylinder 2
The upstream end of 1 is closed by an end plate 24. Further, the downstream end of the inner cylinder 21 is fixed inside the case 20 via a flange 25. An electrode 26 is attached to the inner surface of the downstream end of the filter 1. In the case of direct energization, a conductive substance such as silver paste is attached to both ends of the filter 1 and brought into contact with the energizing electrodes.

Exhaust gas discharged from the diesel engine is sent from the inlet 27 of the case 20 through the annular passage 28 into the filter 1. The exhaust gas passes through the filter 1 and, at that time, impregnates the upper surface of the fiber layer 8, particularly the mat 9, and is coated with a coating (not shown) by a vapor deposition method (CVD method). Particulate matter (particulate matter) contained in the exhaust gas is collected by 10 and the cleaned exhaust gas is supplied to the inner cylinder 21.
From the hole to the outlet passage 29, and then discharged from the outlet 30 to the outside.

Therefore, when a predetermined amount of particulates is collected in the filter 1, electric power is supplied from the DC power supply to the electrode 26 and the filter 1 is energized. Then, the filter 1 is heated, the particulates collected in the filter 1 are heated and incinerated, and the filter 1 is regenerated.

As described above, the present invention provides the filter 1
Is formed of a base portion 2 made of a coarse plain weave fabric made of silicon carbide fiber, and a fiber layer 8 laminated on the filtration surface of the base portion 2, and the fiber layer 8 is a mat made of silicon carbide fiber. 9 and the extremely short silicon carbide fiber (milled fiber) 10 impregnated on one side of the mat 9, the dust collection rate of the particulate matter is high and the pressure loss is suppressed as compared with the conventional case. You can Also, filter 1
Is made of a composite ceramic reinforced with silicon carbide fibers, it has high strength, high toughness, and is extremely difficult to crack.

As the base portion, a non-woven fabric may be applied instead of the woven fabric. The base portion is preferably made of one or more kinds of fibers selected from silicon carbide, carbon, alumina, alumina-silica, and silicon nitride.

As the fiber layer, in the case of a composite structure, the milled fiber 10 may be impregnated on the lower surface of the mat 9 instead of impregnating the upper surface (filtering surface) of the mat 9, or on both upper and lower surfaces of the mat 9. It may be impregnated. Further, the fiber layer may have a single layer structure.

The fiber layer is preferably composed of one or more fibers selected from silicon carbide, carbon, alumina, alumina-silica, and silicon nitride.

The coating layer deposited on the surface of the fiber forming the base portion and the fiber layer is selected from silicon carbide, carbon, alumina and silicon nitride by a chemical vapor deposition method (CVD method). Alternatively, two or more kinds of precipitates are preferable. Next, a method for manufacturing the particulate matter removal filter will be described.

First, a plain woven fabric (base portion) 2 of silicon carbide fiber (fiber diameter: 15 μm) 2 (weight per unit weight: 150 g)
/ M ² ) with a fiber binder (phenolic resin diluted with carbon tetrachloride).

Next, a mat 9 of silicon carbide fiber (fiber diameter 15 μm, length 6 mm) (weight per unit area 60 g,
Carbon fiber milled fiber 1 on top of 0.7 mm thick
0 (fiber diameter 7 μm, length 500 μm) slurry (dispersed in ethanol) is sprinkled to form a nonwoven fabric (fiber layer) 8 having a thickness of 0.9 mm.

Next, the nonwoven fabric (fiber layer) 8 is impregnated with the above fiber binder. Then, a non-woven fabric (fiber layer) 8 impregnated with the fiber binder is laminated on the plain woven fabric (base portion) 2 impregnated with the fiber binder.

Next, this laminate is attached to the surface (peripheral surface) of the bellows-shaped inner mold (the milled fiber layer (outer side)).

Next, a release cloth and a cotton cloth for impregnating excess resin are attached to the surface, and the uncured product is covered with a plastic film. Next, the resin (fiber binder) is cured in the autoclave.

Then, after the above-mentioned molded product is made inorganic in argon gas at 800 ° C., CVD (chemical vapor deposition method) is performed.
To coat silicon carbide (average thickness of 13 μm at 50 points on the surface of plain woven cloth).

If desired, the size of the pores 12 existing between the fibers 11 forming the fiber layer 8 can be easily adjusted by impregnating the filter 1 with the ceramic or metal particles 18. (See FIGS. 6A and 6B). As a method for coating the particles 18 with ceramics, a vapor deposition method, a ceramics adhesive coating method, a thermal spraying method, or the like can be applied.

If desired, the oxidation catalyst 1 may be added to the filter 1.
9 can be attached (see FIG. 7). Then,
In the case of diesel exhaust gas having a high temperature, the particulate matter collected in the fiber layer 8 can be catalytically burned. In the case of low temperature diesel exhaust gas, the collected particulate matter can be catalytically burned by directly energizing the filter 1 and heating it to a temperature at which the oxidation catalyst 19 is activated, which corresponds to all running conditions. It will be possible.

Examples of the method for attaching the oxidation catalyst to the filter body include a method in which the oxidation catalyst is made into a slurry and sprinkled on the filter body, or a method in which the filter body is dipped in a slurry liquid of the oxidation catalyst. Next, the present invention will be described in more detail with reference to examples.

[0036]

EXAMPLES Example 1 (1) Filter (a) Structure: Silicon Carbide Fiber / Silicon Carbide by Chemical Vapor Deposition Method (b) Molding of Filter: (a) Silicon Carbide Fiber (Nicalon (Fiber Diameter 15 Micron )) Plain woven fabric (weight per unit area of 150 g / m ² ) impregnated with the following fiber binder. -Fiber binder: Phenolic resin diluted with carbon tetrachloride (weight concentration: 20%) (b) Silicon carbide fiber (Nicalon (fiber diameter 15 micron meter, length 6 mm)) mat (weight per unit area 60 g, thickness 0) 0.7 mm) one side of carbon fiber milled fiber (Torayca T300 (fiber diameter 7 μm, length 500
Micron meter)) (dispersed in ethanol) and sprinkled to form a non-woven fabric with a thickness of 0.9 mm.

(C) The above (ii) is impregnated with the fiber binder of (ii). (D) The above (c) is laminated on the above (a). (E) Attaching (d) above to the surface of the bellows-shaped inner mold. (Note) The short fiber layer is the filtration surface (outside). (F) A release cloth and a cotton cloth for impregnating excess resin are attached to the surface. (G) Cover with a plastic film. (H) Curing the resin (fiber binder) in the autoclave.

(C) After inorganicizing the above-mentioned molded product in argon gas at 800 ° C., silicon carbide is coated by CVD (chemical vapor deposition) (average film thickness 13 at 50 points on the surface of plain woven cloth). Micron meter).

(D) Filter size ・ Outer diameter 320 mm × inner diameter 140 mm × length 400 mm ・ Thickness: 1.3 mm

-Surface area: 1.8 m ² (2) Characteristics (a) Attached to the muffler downstream of a truck with a payload of 4.5 tons manufactured in 1993 and operated in 13 modes for 8 hours. (B) Pressure loss of the filter (filtration speed 50 m / min, temperature 20
(In air at 65 ° C and 65% humidity) ・ Before starting operation: 1210 mmH ₂ O ・ After operation: 2130 mmH ₂ O (c) Dust collection rate: 91.5% (However, weight of particulate matter collected without filter When,
Calculated from the weight of the particulate matter collected with the filter attached. )

(Comparative Example 1) (a) Sintered silicon carbide honeycomb filter (manufactured by IBIDEN) (a) Pressure loss of filter ・ Before starting operation: 1580 mmH ₂ O ・ After operation: 2600 mmH ₂ O (b) Dust collection rate: 90.1% (b) Bellows filter made of sintered silicon carbide fiber (made by Isuzu) (a) Pressure loss of filter ・ Before operation start: 1350 mmH ₂ O ・ After operation: 2270 mmH ₂ O (b) Dust collection rate: 76. 5%

Example 2 (1) Filter (a) Structure: Silicon Carbide Fiber / Silicon Carbide by Chemical Vapor Deposition Method (b) Molding of Filter: (a) Silicon Carbide Fiber (Nicalon (Fiber Diameter 15 μm) )) Plain woven fabric (weight per unit area 150 g / m ² ) is impregnated with the following fiber binder. -Fiber binder: Phenolic resin diluted with carbon tetrachloride (weight concentration: 20%) (b) Silicon carbide fiber (Nicalon (fiber diameter 15 micron meter, length 6 mm)) mat (weight per unit area 60 g, thickness 0) 0.7 mm) one side of carbon fiber milled fiber (Torayca T300 (fiber diameter 7 μm, length 500
Micron meter)) (dispersed in ethanol) and sprinkled to form a non-woven fabric with a thickness of 0.9 mm.

(C) The above (ii) is impregnated with the fiber binder of (ii). (D) The above (c) is laminated on the above (a). (E) Attaching (d) above to the surface of the bellows-shaped inner mold. (Note) The short fiber layer is the filtration surface (outside). (F) A release cloth and a cotton cloth for impregnating excess resin are attached to the surface. (G) Cover with a plastic film. (H) Curing the resin (fiber binder) in the autoclave.

(C) After inorganicizing the above-mentioned molded product in argon gas at 800 ° C., silicon carbide is coated by CVD (Chemical Vapor Deposition) (average film thickness 13 at 50 points on the surface of plain woven cloth). Micron meter). (D) Impregnation of SiC grains into the pores of the filter-Abrasive grains: grain size # 2500 (Showa Denko "Green Densic") (e) Filter dimensions-outer diameter 320 mm x inner diameter 140 mm x length 400 mm-thickness: 1. 3mm ・ Surface area: 1.8m ²

(2) Characteristics (a) A truck with a payload of 4.5 tons manufactured in 1993 was installed downstream of the muffler and operated in 13 modes for 8 hours. (B) Pressure loss of the filter (filtration speed 50 m / min, temperature 20
℃, humidity of 65%) ・ Before start of operation: 1510mmH ₂ O ・ After operation: 2430mmH ₂ O (c) Dust collection rate: 95.5% (however, weight of particulate matter collected without filter) When,
Calculated from the weight of the particulate matter collected with the filter attached. ) (D) Median diameter of passing particles (μm): 0.16

(Comparative Example 2) (a) Sintered silicon carbide honeycomb filter (manufactured by Ibiden) (a) Filter pressure loss-Before starting operation: 1580 mmH ₂ O-After operation: 2600 mmH ₂ O (b) Dust collection rate: 90.1% (c) Median diameter (μm) of passing particles: 0.55 (b) Bellows filter made of sintered silicon carbide fiber (manufactured by Isuzu) (a) Pressure loss of filter ・ Before starting operation: 1350 mmH ₂ O ・After operation: 2270 mmH ₂ O (b) Dust collection rate: 76.5% (c) Median diameter of passing particles (μm): 1.2

Example 3 (1) Filter (a) Structure: Silicon Carbide Fiber / Silicon Carbide by Chemical Vapor Deposition Method (b) Molding of Filter: (a) Silicon Carbide Fiber (Nicalon (fiber diameter 15 μm) )) Plain woven fabric (weight per unit area 150 g / m ² ) is impregnated with the following fiber binder. -Fiber binder: Phenolic resin diluted with carbon tetrachloride (weight concentration: 20%) (b) Silicon carbide fiber (Nicalon (fiber diameter 15 micron meter, length 6 mm)) mat (weight per unit area 60 g, thickness 0) 0.7 mm) one side of carbon fiber milled fiber (Torayca T300 (fiber diameter 7 μm, length 500
Micron meter)) (dispersed in ethanol) and sprinkled to form a non-woven fabric with a thickness of 0.9 mm.

(C) The above (B) is impregnated with the fiber binder of the above (A). (D) The above (c) is laminated on the above (a). (E) Attaching (d) above to the surface of the bellows-shaped inner mold. (Note) The short fiber layer is the filtration surface (outside). (F) A release cloth and a cotton cloth for impregnating excess resin are attached to the surface. (G) Cover with a plastic film. (H) Curing the resin (fiber binder) in the autoclave.

(C) After inorganicizing the above molded product in argon gas at 800 ° C., silicon carbide is coated by CVD (chemical vapor deposition) (average film thickness 13 at 50 points on the surface of plain woven cloth). Micron meter). (D) Impregnation of SiC grains into the pores of the filter-Abrasive grains: grain size # 2500 (Showa Denko "Green Densic") (e) Filter dimensions-outer diameter 320 mm x inner diameter 140 mm x length 400 mm-thickness: 1. 3mm ・ Surface area: 1.8m ²

(2) Characteristics (a) A truck with a loading capacity of 4.5 tons manufactured in 1993 was installed downstream of the muffler and operated in 13 modes for 8 hours. (B) reproduction condition and reproduction start pressure loss: 2500mmH ₂ O · energization conditions: 0.5 kW, time required for regeneration: 3 min (c) pressure loss and operation before starting the filter: 1210mmH ₂ O · luck after rolling: 2500MmH ₂ O (d) dust collection rate: 96.5% (however, the weight of the particulate matter collected without the filter,
Calculated from the weight of the particulate matter collected with the filter attached. ) (E) Median diameter of passing particles (μm): 0.10.

(Comparative Example 3) (a) Sintered silicon carbide honeycomb filter (manufactured by IBIDEN) (a) Pressure loss of filter ・ Before starting operation: 1580 mmH ₂ O ・ After operation: 2600 mmH ₂ O (b) Dust collection rate: 90.1% (c) Median diameter of passing particles (μm): 0.55 (d) Regeneration condition: 2.3 kW (e) Time required for regeneration: 50 minutes (b) Bellows made of sintered silicon carbide fiber Filter (manufactured by Isuzu) (a) Pressure loss of filter ・ Before operation: 1350 mmH ₂ O ・ After operation: 2270 mmH ₂ O (b) Dust collection rate: 76.5% (c) Median diameter of passing particles (μm) : 1.2 (d) Playback condition: 2 kW (e) Time required for playback: 10 minutes

Example 4 (1) Filter (a) Configuration: Silicon Carbide Fiber / Silicon Carbide by Chemical Vapor Deposition Method (b) Molding of Filter: (a) Silicon Carbide Fiber (Nicalon (fiber diameter 15 μm) )) Plain woven fabric (weight per unit area 150 g / m ² ) is impregnated with the following fiber binder. -Fiber binder: Phenolic resin diluted with carbon tetrachloride (weight concentration: 20%) (b) Silicon carbide fiber (Nicalon (fiber diameter 15 micron meter, length 6 mm)) mat (weight per unit area 60 g, thickness 0) 0.7 mm) one side of carbon fiber milled fiber (Torayca T300 (fiber diameter 7 μm, length 500
Micron meter)) (dispersed in ethanol) and sprinkled to form a non-woven fabric with a thickness of 0.9 mm.

(C) The above (b) is impregnated with the above-mentioned fiber binder (a). (D) The above (c) is laminated on the above (a). (E) Attaching (d) above to the surface of the bellows-shaped inner mold. (Note) The short fiber layer is the filtration surface (outside). (F) A release cloth and a cotton cloth for impregnating excess resin are attached to the surface. (G) Cover with a plastic film. (H) Curing the resin (fiber binder) in the autoclave.

(C) After inorganicizing the above-mentioned molded product in argon gas at 800 ° C., silicon carbide is coated by CVD (Chemical Vapor Deposition) (average film thickness 13 at 50 points on the surface of plain woven cloth). Micron meter).

(D) Oxidation catalyst-Material: Pt (platinum) -Soaked in a slurry to attach the catalyst to the filter surface.

(E) Filter dimensions-Outer diameter 320 mm x inner diameter 140 mm x length 200 mm are two-Thickness: 1.3 mm-Surface area: 1.8 m ²

(2) Characteristics (a) A truck with a loading capacity of 4.5 tons manufactured in 1993 was mounted on the downstream of the muffler and run for 8 hours in the suburbs and in the urban areas. (B) Regeneration conditions-Energize and heat so that the surface temperature of the filter does not drop below 400 ° C. (C) Pressure loss of filter ・ During operation: 1320 to 1750 mmH ₂ O ・ Average energization condition: 0.3 kW (d) Dust collection rate: 93.6% (e) Median diameter (μm) of passing particles: 0.35

[0058]

As described above, in the filter of the present invention, the filter is formed by a base portion made of a plain weave cloth made of silicon carbide fiber and a fiber layer laminated on the filtration surface of the base portion. , Further, the fiber layer is a mat made of silicon carbide fiber,
Further, since it is formed of extremely short silicon carbide fiber (milled fiber) impregnated on one surface of the mat, the dust collection rate of the particulate matter is higher and the pressure loss can be suppressed lower than in the conventional case. Further, since the filter 1 is formed of the composite ceramic reinforced with silicon carbide fibers, it has high strength, high toughness, and is extremely difficult to crack.

On the other hand, according to the filter manufacturing method, the filter having the excellent function as described above can be manufactured relatively easily, which is industrially useful.

When the filter portion is impregnated with ceramic or metal particles, the size of the pores existing between the fibers forming the filtration layer can be easily adjusted.

Further, when an oxidation catalyst is attached to the filter portion, in the case of diesel exhaust gas having a high temperature, the particulate matter collected in the filtration layer can be catalytically burned.
In the case of low temperature diesel exhaust gas, it is possible to meet all running conditions by directly energizing the filter body and heating it until the oxidation catalyst is activated.

[Brief description of drawings]

FIG. 1 is a perspective view of a bellows filter according to the present invention.

FIG. 2 is an enlarged view of part A of FIG.

FIG. 3 is an enlarged view of part B in FIG.

FIG. 4 is an enlarged view of portion C in FIG.

FIG. 5 is an operation explanatory view of the bellows filter according to the present invention.

6 (a) and 6 (b) are explanatory views for adjusting the clearance between the holes with particles.

FIG. 7 is an explanatory diagram showing a state in which an oxidation catalyst is attached.

[Explanation of symbols]

1 Particulate matter removal filter 1a Filter section 2 base 8 fiber layers

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) B01D 53/94 B01J 35/06 E 4L031 B01J 35/06 H 4L032 F01N 3/02 321A D06M 11/45 341L 11 / 74 C23C 16/30 11/77 D06M 101: 00 17/00 B01D 53/36 103C F01N 3/02 321 D06M 17/00 J 341 11/00 C // C23C 16/30 D06M 101: 00 (72) Invention Person Masakata Hashimoto 5-6-4 Tsukiji, Chuo-ku, Tokyo F-term within Mitsui & Co., Ltd. (reference) 3G090 AA03 BA04 CB11 4D019 AA01 BA01 BA03 BA05 BB10 BC07 CA10 CB04 CB06 CB09 4D048 AA14 AB01 BA03X BA05Y BA06X BA10X BA45 BB08 BB12 BB18 CC41 CC53 CD05 EA02 4G069 AA03 AA08 AA11 BA01A BA03A BA08A BB11A BB15A BB15B BD05A BD05B CA07 CA18 EA06 EA09 EA10 EB02 EB08 EE03 FA01 FA03 FB01 FB33 FB66 FB73 4K030 BA27 BA37 BA40 BA43 BB12 CA08 LA11 4L031 AA25 AA27 AA29 AB32 AB34 CB13 DA00 4L032 AA08 AB02 AB04 AC01 BA03 BD01 DA00 EA00

Claims (5)

[Claims] 1. A bellows type particulate matter removing filter, wherein the filter portion is a woven fabric made of one or more kinds of fibers selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride. A base portion made of cloth or non-woven fabric, and one or more fibers selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride, which are laminated on the filtration surface and / or the back surface of the base portion. 1 or 2 selected from the group consisting of silicon carbide, carbon, alumina and silicon nitride on the surface of the fiber forming the base portion and the fiber layer A particulate matter removal filter having a coating layer by one or more vapor deposition methods. 2. A ceramic or metal particle is impregnated into the pores of the fiber layer constituting the filter portion, and
The particulate matter removal filter according to claim 1, wherein at least the particle surface is coated with ceramics. 3. The particulate matter removal filter according to claim 1 or 2, wherein an oxidation catalyst is attached to the surface of the fiber forming the filter portion or the surface of the fiber forming the filtration layer. 4. The particulate matter removal filter according to claim 1, 2 or 3, wherein an electrode is attached to the filter portion. 5. A method of manufacturing a bellows type filter, comprising: (a) a woven fabric composed of one or more fibers selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride. Or a step of forming a base part from a non-woven fabric, (b) a step of impregnating the base part with a fiber binder, and (c) 1 or 2 selected from silicon carbide, carbon, alumina, alumina-silica and silicon nitride A step of forming a fiber layer having a single layer or a composite structure with at least one kind of fiber; and (d) a step of impregnating the fiber layer with a fiber binder.
(E) Filtration surface of base part impregnated with fiber binder and /
Or a step of forming a laminate by laminating a fiber layer impregnated with a fiber binder on the back surface thereof, (f) a step of attaching the laminate to a peripheral surface of a bellows-shaped mold, and (g) a mold The process of attaching the release cloth and the suction cloth to the laminate on the frame, the step of (h) coating the uncured product attached to the peripheral surface of the frame with a plastic film, and (re) fiber bonding in the autoclave. Curing the agent, and (nu) mineralizing the cured fiber binder in a high temperature inert gas, after which the surface of the fiber is selected from one or more of silicon carbide, carbon, alumina and silicon nitride. A method for producing a particulate matter removal filter, comprising a step of depositing a coating layer by two or more vapor deposition methods.