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Publication number
JP2002520651A5
JP2002520651A5 JP2000559466A JP2000559466A JP2002520651A5 JP 2002520651 A5 JP2002520651 A5 JP 2002520651A5 JP 2000559466 A JP2000559466 A JP 2000559466A JP 2000559466 A JP2000559466 A JP 2000559466A JP 2002520651 A5 JP2002520651 A5 JP 2002520651A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000559466A
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JP2002520651A (ja
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Publication date
Priority claimed from US09/112,664 external-priority patent/US6072631A/en
Application filed filed Critical
Publication of JP2002520651A publication Critical patent/JP2002520651A/ja
Publication of JP2002520651A5 publication Critical patent/JP2002520651A5/ja
Withdrawn legal-status Critical Current

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JP2000559466A 1998-07-09 1998-10-28 有限空間干渉性補正を備えた回折均質化装置 Withdrawn JP2002520651A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/112,664 US6072631A (en) 1998-07-09 1998-07-09 Diffractive homogenizer with compensation for spatial coherence
US09/112,664 1998-07-09
PCT/US1998/022925 WO2000003286A1 (en) 1998-07-09 1998-10-28 Diffractive homogenizer with compensation for finite spatial coherence

Publications (2)

Publication Number Publication Date
JP2002520651A JP2002520651A (ja) 2002-07-09
JP2002520651A5 true JP2002520651A5 (ja) 2006-01-05

Family

ID=22345196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000559466A Withdrawn JP2002520651A (ja) 1998-07-09 1998-10-28 有限空間干渉性補正を備えた回折均質化装置

Country Status (6)

Country Link
US (2) US6072631A (ja)
EP (1) EP1093595A1 (ja)
JP (1) JP2002520651A (ja)
CN (1) CN1301358A (ja)
AU (1) AU1285899A (ja)
WO (1) WO2000003286A1 (ja)

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