JP2002372262A - Gas supply system and test system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a test system, in which a conventionally difficult test can be performed by supplying a gas having a specified humidity or an optional humidity in a wide range. SOLUTION: In the test system 2, the flow path for supplying gas from a gas supply part 3 is branched on the way, and jointed to be connected to a fuel battery 1. In a flow path 10 of branched another part, a humidifying means 12 is provided. In the humidifying means 12, gas conducted from a gas conveying part 21 is highly humidified by passing through a packing material 22. A gas humidified by the humidifying means 12 and a dry gas are mixed with each other in a regulated flow rate by control values 9, 11. Thus, the gas with humidity regulated is supplied to the fuel battery 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas supply device for supplying a gas such as hydrogen gas and an inspection system for inspecting the performance and the like of a fuel cell by supplying the gas.

[0002]

2. Description of the Related Art In recent years, technology development for extracting clean energy has been promoted in place of an internal combustion engine such as an engine, and one of them is a fuel cell. A fuel cell combines hydrogen in fuel and oxygen in air to extract electric energy. In research and development and manufacture of such fuel cells, it is necessary to establish a system for inspecting the performance and the like.

[0003] Generally, performance inspection of a fuel cell is performed by supplying hydrogen gas or the like. In such inspection, not only the supply of hydrogen gas or the like but also the factor of humidity become important. . As a system for imparting a predetermined humidity to the supplied hydrogen gas, for example, as shown in FIG.
1 may be installed.

The humidifying means 51 has a tank 52 capable of storing a predetermined amount of water, and a heater 53 for heating the stored water is provided in the tank 52. A gas introduction pipe 5 into which gas is introduced is provided at a lower portion in the tank 52.
4 are guided, and a plurality of holes 5 of the gas introduction pipe 54 are provided.
From 5, the gas is released as bubbles. The released gas passes through the heated water, contacts the heated water, is humidified, and is guided upward. In addition, a gas outlet 56 is provided in the upper portion of the tank 52, from which the humidified gas is led to a fuel cell installed downstream. Since the hot water is lost from the tank 52 by the amount of the humidification, in order to compensate for the loss, the tank 52 is supplied from the pump 57 through the water supply pipe 58.
Water is replenished inside.

In a system provided with such a humidifying means 51, the humidity is determined by the amount of replenished water measured by a flow meter 59 provided in the middle of a water supply pipe 58 and the amount of introduced gas. It is derived ex post from the quantity.

[0006]

However, in the above technique, the humidity of the supplied gas is limited,
It remained at about 0% RH (relative humidity). For this reason, it has been very difficult to perform an inspection at a humidity greatly exceeding 70% RH.

Further, as described above, since the humidity is measured only after the fact, it is not possible to measure the humidity at that time during the inspection, and since the set humidity is almost unambiguous, The humidity could not be adjusted. As a result, there is a possibility that a problem that a satisfactory inspection cannot be performed may be caused.

The present invention has been made in view of the above-described problems, and has as one of its main objects to provide a gas supply device capable of supplying a gas having a predetermined humidity, which has been difficult in the past. . Another object of the present invention is to provide a gas supply device capable of supplying a gas having an arbitrary humidity in a wide range. Furthermore, when inspecting the performance of a supplied object such as a fuel cell by gas,
An object of the present invention is to provide an inspection system capable of performing an inspection that has been difficult in the past by supplying a gas having a predetermined humidity. In addition, one of the main objects is to provide an inspection system capable of performing an inspection that has been conventionally difficult by supplying a gas having an arbitrary humidity in a wide range.

[0009]

Means for Solving the Problems and Effects There will be described below characteristic means for achieving the above object. Also,
For each means, characteristic actions and effects will be described as necessary.

Means 1. A gas supply device comprising: a gas supply source; a flow path for supplying gas from the gas supply source to the supply target; and a humidification unit provided in the middle of the flow path and humidifying the gas. , The humidifying means, a tank, an introduction portion for introducing gas from the gas supply source into the tank, provided in the tank, the gas from the introduction portion in a state where water is attached to A gas supply, comprising: a filler having a number of gaps that can pass therethrough; and a lead-out part for leading a gas humidified through the filler from the side opposite to the introduction part. apparatus.

According to the above means, the gas supplied from the gas supply source and the water attached to the filler come into contact with each other in the gap between the fillers in the humidifying means. Since there are many gaps between the fillers, the chance of contact between the gas and the water is greatly increased, so that the gas is efficiently humidified. Gases humidified in this way can have very high humidity (eg,
0% RH), which makes it possible to supply high-humidity gas from the outlet to the supply target, which was difficult in the past.

Means 2. A gas supply source, a flow path for supplying gas from the gas supply source to the supply target, a branch flow path that is branched in the middle of the flow path, and configured to be merged on the downstream side, In a gas supply device provided in one of the branch flow paths and provided with humidifying means for humidifying the gas, the humidifying means is configured to introduce a gas from the tank and the gas supply source into the tank. And a filler provided in the tank and having a number of gaps through which gas from the introduction part can pass through with water adhered thereto, and a gas humidified through the filler. And a lead-out part for drawing out from a side opposite to the introduction part.

According to the above means, the flow path for supplying gas from the gas supply source is branched. The gas flowing through one of the branch channels has a very high humidity when passed through the humidifying means. The gas that does not pass through the other humidifying unit of the branch flow path maintains the humidity before the branch, and is the same as the gas when supplied from the gas supply source. By combining the high-humidity gas and the pre-diversion gas on the downstream side, the humidity can be set to a value between the pre-diversion humidity and the high humidity. Therefore, it is possible to supply the gas of the humidity, which has been difficult in the past, from the outlet to the supply target in a wide range.

Means 3. 3. The gas supply device according to claim 2, wherein a flow rate adjusting means for adjusting a gas flow rate is provided in at least one of the branch flow paths.

According to the above means, the flow rate of the gas in the flow path provided with the flow rate adjusting means is adjusted by providing the flow rate adjusting means in at least one of the branch flow paths. For this reason, the flow rate of the gas passing through the humidifying means and the flow rate of the gas not passing through the humidifying means can be arbitrarily adjusted. That is, since the flow rate of the high-humidity gas and the flow rate of the gas of the humidity before the split can be adjusted, the humidity can be adjusted to an arbitrary value in a wide range from the humidity before the split to the high humidity.

It should be noted that the above "at least one" may be replaced with "any one" or "both." When both are provided, the adjustable humidity range can be further expanded.

Means 4. The gas supply device according to claim 3, wherein the flow rate adjusting means is configured to be able to select at least one of a plurality of valves having different flow rate adjustment ranges.

According to the above means, the flow rate adjusting means can accurately adjust the flow rate in a wide range by using a plurality of valves having different flow rate adjustment ranges. Therefore, the humidity determined by adjusting the flow rate can be adjusted with high accuracy.

Means 5 Humidity detection means for detecting the humidity of the gas immediately before being supplied to the supply target, and control means for performing feedback control of the flow rate adjustment means based on the humidity detected by the humidity detection means. The gas supply device according to claim 3 or 4, wherein the gas supply device is provided.

According to the above means, the humidity of the gas at that time can be measured by the humidity detecting means for detecting the humidity of the gas immediately before being supplied to the supply target. Based on the humidity detected by the humidity detecting means, the flow rate adjusting means is feedback-controlled by the control means, so that the flow rate can be accurately adjusted. For this reason,
The humidity determined by adjusting the flow rate can be adjusted with higher accuracy.

Means 6 The gas supply device according to any one of claims 1 to 5, wherein a heating unit for heating a gas from the gas supply source is provided in the flow path on the upstream side of the humidification unit.

According to the above means, the gas from the gas supply source is heated by the heating means provided in the flow path on the upstream side of the humidifying means. Thereby, the temperature of the gas supplied to the supply target can be adjusted. Therefore, the variety of the supplied gas is increased.

Means 7 7. A method according to claim 1, wherein a main flow rate adjusting means for adjusting a flow rate of the gas from the gas supply source is provided in the flow path on the upstream side of the humidifying means. Gas supply equipment.

According to the above means, the flow rate of the gas from the gas supply source is adjusted by the main flow rate adjusting means provided in the middle of the flow path upstream of the humidifying means.
Thereby, the flow rate of the gas mainly supplied to the supply target can be adjusted.

Means 8 The gas supply device according to any one of means 1 to 7, wherein the humidifying unit includes a water spraying unit that sprays droplet-like water on the filler.

According to the above means, the water can be relatively uniformly attached to the filler by spraying the water from the water sprinkling section to the filler.

Means 9 The gas supply device according to any one of means 1 to 8, wherein the humidifying means includes a water heating means for heating water attached to the filler.

According to the above means, the hot water heated by the water heating means is made to adhere to the filler. Therefore, when the hot water attached to the filler comes into contact with the gas, it evaporates relatively easily. Therefore, a high-humidity gas is more easily obtained.

Means 10. The gas supply device according to any one of means 1 to 9, wherein the filler is formed by stacking a plurality of mesh sheets.

According to the above-mentioned means, the filler has a very large number of gaps through which gas can pass since a plurality of mesh-like sheets are laminated. Therefore, the chance of contact between the gas and the water adhering to the filler becomes extremely large, so that the gas is efficiently humidified, and a gas with a very high humidity can be obtained efficiently.

The sheet is made of a material which is hardly corroded,
For example, it is desirable to be made of stainless steel or the like.

Means 11 The gas supply device according to any one of means 1 to 10, wherein liquid gas is not contained in the gas discharged from the discharge portion.

According to the above-described means, since the gas led out from the outlet does not contain liquid water, only the gas can be reliably supplied, and a gas with a more accurate humidity can be supplied. In addition, as a measure for preventing liquid gas from being contained in the gas derived from the deriving portion, adjusting the flow velocity of the gas introduced from the introducing portion may be mentioned. For example, setting a passage area may be mentioned.

Means 12. 12. An inspection system for inspecting the performance of a supply target based on supply to the supply target from the gas supply device according to any one of means 1 to 11.

According to the above-mentioned means, the inspection system can inspect the performance of the object to be supplied by the gas by supplying the gas whose humidity is adjusted from the gas supply device to the object to be supplied.

Means 13. The gas supply source of the gas supply device according to any one of means 1 to 12, is capable of supplying a fuel gas containing hydrogen, and the object to be supplied is a fuel cell, and at least the fuel cell is taken out of the fuel cell. An inspection system for inspecting the performance of a fuel cell based on the power generated.

According to the above-described means, the gas supply device can supply the fuel gas containing hydrogen and having a predetermined humidity to the fuel cell. The inspection system can inspect the performance of the fuel cell, which has been difficult in the past, based on the power or the like extracted from the fuel cell supplied with the gas by such a gas supply device. Further, in such an inspection, the operation and effect of each of the above-described means are exhibited.

[0038]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a schematic configuration of a fuel cell as an object to be inspected in an inspection system according to the present embodiment will be described. The fuel cell includes a casing, a pair of electrodes, and an electrolyte interposed between the electrodes. In such a fuel cell, humidified hydrogen gas is supplied to one electrode side. On the electrode, hydrogen is decomposed into hydrogen ions and electrons, and the electrons flow to an external circuit. The hydrogen ions move to the other electrode side through the electrolytic solution, and the moved hydrogen ions react with oxygen in the air supplied to the other electrode side and electrons flowing from an external circuit. Produces water. Then, the flow of the electrons is taken out as electric power.

Next, an inspection system 2 for inspecting the fuel cell 1 configured as described above will be described with reference to FIGS. The fuel cell 1 is basically supplied with a fuel gas (hydrogen gas, air) from a gas supply unit 3 as a gas supply source, and the flow of the fuel gas supplied from the gas supply unit 3 is controlled. In the middle of the passage 4, a flow meter 5 for measuring a gas flow rate, a valve 6 as a main flow rate adjusting means for adjusting the gas flow rate, and a heater 7 as a heating means for heating the gas are arranged. After passing through these steps 5, 6, and 7, the flow path 4 is branched into two. A first control valve 9 as a flow control means is disposed in one of the branched flow paths 8, and a second control valve 11 as a flow control means is provided in the other flow path 10 for humidifying gas. And the humidifying means 12 are arranged. The two control valves 9 and 11 each include three valves having different diameters, and any one of these valves can be appropriately selected.

Next, the branched flow paths 8 and 10 are joined on the downstream side of the first control valve 9 and on the downstream side of the humidifying means 12, respectively. The merged flow path 13
Is provided with a hygrometer 14 as a humidity detecting means and a thermometer 15 as a temperature detecting means, and the fuel cell 1 can be connected downstream thereof. further,
The gas from the fuel cell 1 is discharged into the flow path on the downstream side of the fuel cell 1, and a pressure gauge 16 for measuring the pressure of the discharged gas and the discharge amount are adjusted on the way. A valve 17 is provided. The terminal of the flow path downstream of the valve 17 is open to the atmosphere.

Next, the structure of the humidifying means 12 will be described. The humidifying unit 12 includes a tank whose inside is isolated from the outside air. The humidifying unit 12 includes a water storage unit 20 capable of storing water in order from a lower portion to an upper portion, and an upstream portion of the branch flow path 10. Is connected to the gas introduction unit 21;
A filler installation part 23 in which a filler 22 described below is installed,
A sprinkling section 24 to which hot water is sprinkled, and a gas outlet section 25 connected to a downstream portion of the branch channel 10 are arranged.

A water supply channel 26 and a water delivery channel 27 are connected to the water storage section 20. The water from the water supply unit 30 flows through the water supply channel 26, and a service tank 31 for temporarily storing the water, a pump 32 for sending the water, Supply channel 2
And a valve 33 for opening and closing the valve 6. That is, the water in the service tank 31 is operated by the pump 32,
When the valve 33 is opened, the water flows through the water supply flow path 26 and is supplied to the water storage section 20 of the humidifying means 12.

On the other hand, the base end of the water delivery channel 27 is
The terminal is connected to the water storage unit 20, and the terminal is connected to the water sprinkling unit 24 above the humidifying unit 12. A pump 34 for sending out water, a heater 35 as water heating means, and a thermometer 36 for measuring water temperature are arranged in the middle of the pump.

In the water sprinkling section 24, a nozzle 38 is provided at the end of the water delivery channel 27.
Drop-shaped water is sprinkled almost all over the upper surface of the filler installation section 23.

The filler 22 is provided in the filler installation section 23. More specifically, the filler 22 is provided with almost no gap on the inner surface of the tank side wall of the humidifier 12. The filler 22 is made of, for example, a stainless steel mesh, and the mesh is approximately 50 mm in the horizontal direction.
By stacking 0 sheets, the height of the filler 22 is 100
It is about 0 mm. The mesh is formed by, for example, wires of 1 mm in diameter intersecting at intervals of 10 mm in length and width. The water sprinkled from the water sprinkling section 24 adheres to each of the thus configured meshes while dripping. Water falling from the lowermost mesh is stored in the water storage section 20.

On the other hand, the gas introduced from the gas introduction section 21 passes through the filler 22 from below to above. In the present embodiment, the maximum flow rate of the gas in the humidifying means 12 is set so that the water attached to the mesh and the water sprinkled from the water sprinkling section 24 are not carried to the gas outlet section 25 in a liquid state. Is determined in advance.
In the present embodiment, for example, the maximum gas flow velocity is 0.4 m /
s, the flow rate of the gas is limited.

The water reservoir 20 is provided with a pressure gauge 39 for measuring water pressure, and the gas inlet 21 is provided with a pressure gauge 40 for measuring gas pressure.

Each of the measuring instruments described above, that is, the flow meter 5, the pressure gauges 16, 39, 40, the hygrometer 14, and the thermometers 15, 36
And the like, based on the signals of the measurement values from the controller 41, the valves 6, 17, 33, the heaters 7, 35, the first and second valves.
The control valves 9, 11 and the pump 32 are controlled.

Next, the operation and effect when the gas is supplied to the fuel cell 1 in the inspection system 2 (gas supply device) configured as described above will be described.

First, the gas supply unit 3 contains hydrogen,
A dry gas having a humidity of 0% RH is supplied. The main flow rate of the dry gas is adjusted by controlling the valve 6 by the controller 41 based on the flow rate measured by the flow meter 5. The gas whose flow rate has been adjusted is supplied to the heater 7.
Is heated and heated. Thereby, the temperature of the gas can be brought close to an arbitrary set value of, for example, 30 ° C. to 90 ° C.

Further, the gas is divided into two, and the flow rate is adjusted in each of the branched flow paths 8 and 10. That is, the gas flowing through one flow path 8 is sent as it is as a dry gas, and the flow rate is adjusted by the first control valve 9. The gas flowing through the other flow path 10 is sent to the humidifying means 12 after the flow rate is adjusted by the second control valve 11. In the humidifying means 12, the humidity of the dry gas is almost 100% RH.
Humidified to.

Here, a mechanism for humidifying the dry gas to a saturated gas having a humidity of approximately 100% RH in the humidifying means 12 will be described.

The water for humidification is supplied into the humidification means 12 through the water supply channel 26. That is, the water from the water supply unit 30 is first supplied to the service tank 31 and temporarily stored in the service tank 31. Thereby, the supplied water can be isolated from the outside. In the present embodiment, the supplied water is preferably pure water. The water stored in the service tank 31 is supplied to the valve 33
When the pump 32 is operated in a state where is opened, it is sent to the water storage section 20 of the humidifying means 12 and is replenished as appropriate. More specifically, the water storage unit 2 measured by the pressure gauge 39
The pump 32 and the valve 33 are appropriately controlled by the controller 41 based on the measured pressure signal of the water pressure of 0 and the measured pressure signal of the gas pressure of the gas introduction unit 21 measured by the pressure gauge 40. Thereby, the amount of stored water in the water storage unit 20 can be maintained at an appropriate amount.

On the other hand, the water stored in the water storage section 20 passes through the water delivery channel 27 and is sprayed by the pump 34 into the water sprinkling section 24.
Sent out to. Here, the water passing through the flow path 27 is heated by the heater 35. At this time, the heater 35
Is feedback-controlled by the controller 41 based on a measured temperature signal of the water temperature after heating measured by the thermometer 36. In the present embodiment, the heater 35 is controlled so that the temperature of the water sprinkled from the water sprinkling section 24 is maintained at, for example, 95 ° C. Thereby, the hot water sprinkled from the water sprinkling section 24 can be easily evaporated in the humidifying means 12.

From the water sprinkling section 24 (nozzle 38), the heated water is sprinkled almost uniformly over almost the entire upper surface of the filler 22. At this time, the hot water is preferably dropped not in the form of a mist but in the form of drops. If the water to be sprayed becomes mist-like, it may be wound up by the gas flowing upward and may be discharged to the gas outlet 25 without being vaporized, which is not preferable. In this way, the water in a liquid state is sprayed in the form of droplets, so that the water in the liquid state is
5 can be less likely to occur, and the filler 22 can be reliably spread.

In the filler 22, the mesh 1
Hot water sprinkled from the water sprinkling section 24 or hot water dropped from the upper mesh adheres to each sheet. For this reason, the gas introduced from the gas introduction part 21 passes through while efficiently contacting the hot water attached to the mesh. As described above, since the maximum flow velocity of the gas to be introduced is limited, the water attached to the mesh is hard to be rolled up by the gas, so that the water which is still in a liquid state is drawn out from the gas outlet 25. Is more reliably prevented.

At the time of the contact, water is taken into the gas while evaporating. In this embodiment, since water adheres to the periphery of as many as 500 mesh wires,
The chance of contact between water and gas becomes very large (the contact area between them becomes very large). Therefore, the gas is efficiently humidified. Therefore, in the present embodiment,
When the gas is introduced into the humidifying means 12, the gas having a humidity of 0% RH is humidified to a humidity of approximately 100% RH when the gas is derived.

In the first and second control valves 9 and 11, the controller 41 selects one of the three valves that is suitable for the flow rate range. By controlling the degree of opening of the selected valve, the gas distribution amount is adjusted, whereby the humidity of the gas is changed from 0% RH to 100% RH.
It can be approached to any set value up to H.

Here, the humidity adjustment of the gas supplied to the fuel cell 1 will be described in detail with reference to FIG. While the humidity of the gas flowing through one of the branched flow paths 8 is 0% RH, the humidity of the gas (humidifying gas) flowing through the other flow path 10 downstream of the humidifying means 12 is 100% RH. is there. Therefore, the humidity of the gas (supply gas) supplied to the fuel cell 1 is obtained by dividing the flow rate XW of the humidifying gas by the total flow rate XA of the gas before distribution (the gas flowing through the flow path 4) and multiplying by 100. It can be easily calculated. Therefore, when the target value of the humidity of the gas supplied to the fuel cell 1 is, for example, R% RH, the flow rate XD of the dry gas is humidified from the total flow rate XA so that the flow rate XW of the humidified gas becomes R% of the total flow rate XA. The controller 41 appropriately adjusts the first and second control valves 9 and 11 so that the flow rate XW of the gas is reduced.

As described above, in the first and second control valves 9 and 11, the controller 4 is controlled in accordance with the set flow rate.
One is selected from among valves having three diameters of large, medium and small according to 1, and the opening degree of each valve is adjusted. Specifically, as shown in FIG. 3 (b), a small-diameter valve is selected when the flow rate is small, a medium-diameter valve is selected when the flow rate is medium, and a large-diameter valve is selected when the flow rate is high. Is selected.
Here, the range of the flow rate carried by each valve is continuous, and the flow rate can be adjusted accurately by appropriately controlling the opening degree of each valve. Therefore, the humidity of the gas supplied to the fuel cell 1 can be adjusted with high accuracy.

Thereafter, the dry gas and the saturated gas are sent to one flow path 13 where they are merged to be mixed. The current humidity of the mixed gas is measured by the hygrometer 14, and a measured humidity signal is sent to the controller 41. Based on this measured humidity signal, the controller 41
And the second control valves 9 and 11 are feedback-controlled.
As described above, the opening degrees of the first and second control valves 9 and 11 are adjusted and controlled, so that the humidity of the mixed gas can be more accurately adjusted to a preset value ( (For example, within ± 10% RH relative to the set value).

The temperature of the mixed gas at that time is measured by the thermometer 15, and a measured temperature signal is sent to the controller 41. Based on this measured temperature signal,
The heater 7 is feedback-controlled by the controller 41. This makes it possible to accurately adjust the temperature of the mixed gas to a preset value (for example, within ± 2 ° C. from the set value).

Further, the mixed gas is supplied to the fuel cell 1 in the middle of the flow path 13. The gas used in the fuel cell 1 is discharged when the valve 17 is opened. At this time, the pressure of the discharged gas is measured by the pressure gauge 16, and the measured pressure signal is sent to the controller 41. The valve 41 is feedback-controlled by the controller 41 based on the measured pressure signal. This makes it possible to adjust the pressure of the discharged gas with high accuracy.

As described above, the performance of the fuel cell 1 can be inspected by adjusting the supply and discharge of the gas to and from the fuel cell 1 and then measuring the current value and the like.

As described in detail above, in this embodiment,
The humidifying means 12 is provided with a filler installation part 23 in which the filler 22 is installed, a gas introduction part 21 for introducing gas, and a gas derivation part 25 for deriving gas. Filling material 22
Has a mesh superimposed and hot water adhered thereto. In the humidifying unit 12, the gas introduced from the gas introduction unit 21 efficiently comes into contact with hot water when passing through the filler 22. Therefore, gas is humidified efficiently,
When the gas is led out from the gas outlet 25, the humidity is very high (approximately 100% RH).

The flow path for supplying gas to the fuel cell 1 is branched into two in the middle and then joined. One of the branched flow paths 8 sends a dry gas, and the other flow path 10 sends a high-humidity gas through a humidifying means 12. The first and second control valves 9 and 11 provided in the flow paths 8 and 10 are controlled by the controller 41, so that the flow rates of the gases flowing through the flow paths 8 and 10 are appropriately adjusted. Therefore, the humidity of the supply gas in which the dry gas and the high-humidity gas are mixed can be adjusted to an arbitrary wide range.

In addition, regarding the supplied gas, the thermometer 14
The humidity and temperature meter 15 measure the temperature and humidity at that time, and the controller 41 feedback-controls the first and second control valves 9 and 11 based on the measured values. Therefore, it is possible to perform the inspection under various conditions that have been difficult in the past. As a result, the inspection can be significantly enhanced.

It is to be noted that the present invention is not limited to the contents described in the above embodiment, and may be carried out, for example, as follows.

(A) The gas supplied from the gas supply unit 3 may be another kind of gas such as air instead of the gas containing hydrogen.

(B) The gas supply device of the present embodiment may be connected to a tank having a predetermined structure instead of the fuel cell 1. With such a configuration, the temperature and humidity in the tank can be kept constant, so that it can be used as a constant temperature / humidity tank.

(C) In the above embodiment, the control valves 9 and 1
Although 1 is provided with three valves having different diameters, four or more valves may be provided, or two or one valve may be provided.

(D) The valve 6 is a single valve, but may be constituted by a plurality of valves having different adjustment ranges.

(E) The material of the mesh of the filler 22 is stainless steel, but may be other metals or resins.

(F) Between the time when the gas is heated by the heater 7 and the time when the gas is supplied to the fuel cell 1, the periphery of the flow path is insulated to prevent heat transfer between the gas flow path and the outside. It may be covered with a material.

(G) The gas supplied from the gas supply section 3 does not necessarily have to have a humidity of 0% RH, and may be at or below the set humidity of the gas supplied to the fuel cell 1.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing a configuration of an inspection system according to an embodiment.

FIG. 2 is a schematic sectional view of a humidifying unit for explaining a mechanism of humidifying a gas.

FIG. 3A is a schematic configuration diagram showing first and second control valves, and FIG. 3B is a graph showing a relationship between valves having different diameters selected by the control valves and an adjustable flow rate range.

FIG. 4 is a schematic configuration diagram showing an apparatus for humidifying a gas in a conventional technique.

[Explanation of symbols]

1. Fuel cell as a supply target 2. Inspection system 3,
... gas supply unit as a gas supply source, 5 ... flow meter, 6 ... valve as main flow rate adjustment means, 7 ... heater as heating means, 9 ... first control valve constituting flow rate adjustment means, 11 ... flow rate adjustment Second control valve constituting means, 12 ... humidifying means, 1
4 ... Hygrometer as humidity detecting means, 15 ... Temperature meter, 16
... pressure gauge, 17 ... valve, 20 ... water storage part, 21 ... gas introduction part, 22 ... filler, 24 ... water sprinkling part, 25 ... gas outlet part,
Reference numeral 30: water supply unit, 31: service tank, 32: pump, 33: valve, 34: pump, 35: heater as water heating means, 36: thermometer, 38: nozzle, 41: controller.

Claims (13)

[Claims] 1. A gas supply source, a flow path for supplying a gas from a gas supply source to an object to be supplied, and a humidifier provided in the middle of the flow path for humidifying the gas. In the gas supply device, the humidifying unit may include: a tank; an introduction unit configured to introduce gas from the gas supply source into the tank; and an introduction unit provided in the tank, wherein the introduction is performed with water attached. A filler having a number of gaps capable of passing gas from the part, and a deriving part for deriving the humidified gas passing through the filler from the side opposite to the introduction part. Characteristic gas supply device. 2. A gas supply source, a flow path for supplying gas from a gas supply source to a supply target, and a branch configured to be branched in the middle of the flow path and to be joined at a downstream side. A flow path, a gas supply device provided in one of the branch flow paths, and humidifying means for humidifying the gas, wherein the humidifying means comprises: a tank; An introduction portion for introducing into the tank, a filler provided in the tank, having a number of gaps through which gas from the introduction portion can pass while water is attached, and passing through the filler And a deriving unit for deriving the humidified gas from a side opposite to the introduction unit. 3. The gas supply device according to claim 2, wherein a flow rate adjusting means for adjusting a gas flow rate is provided on at least one of the branch flow paths. 4. The gas supply device according to claim 3, wherein the flow rate adjusting means is configured to be able to select at least one of a plurality of valves having different flow rate adjustment ranges. 5. A humidity detecting means for detecting a humidity of a gas immediately before being supplied to the supply target, and a feedback control of the flow rate adjusting means based on the humidity detected by the humidity detecting means. 5. The gas supply device according to claim 3, further comprising a control unit. 6. A heating means for heating a gas from the gas supply source is provided in the flow path on the upstream side of the humidifying means. A gas supply device according to claim 1. 7. A main flow rate adjusting means for adjusting a flow rate of gas from the gas supply source is provided in the flow path on the upstream side of the humidifying means.
7. The gas supply device according to any one of claims 1 to 6. 8. The humidifying means includes a sprinkler for spraying water in a form of drops on the filler.
The gas supply device according to any one of the above. 9. The gas supply device according to claim 1, wherein the humidifying means includes a water heating means for heating water attached to the filler. 10. The filling material according to claim 1, wherein a plurality of mesh sheets are laminated.
10. The gas supply device according to any one of claims 9 to 9. 11. The liquid derived from the discharge section does not contain liquid water.
11. The gas supply device according to any one of claims 10 to 10. 12. An inspection system for inspecting performance of an object to be supplied based on supply from the gas supply device according to any one of claims 1 to 11 to the object to be supplied. 13. The gas supply source of the gas supply device according to claim 1, wherein the gas supply source is capable of supplying a fuel gas containing hydrogen, and the supply target is a fuel cell, An inspection system for inspecting the performance of a fuel cell based on at least electric power extracted from the fuel cell.