JP2002353267A - ワイヤボンディング方法 - Google Patents
ワイヤボンディング方法Info
- Publication number
- JP2002353267A JP2002353267A JP2001153526A JP2001153526A JP2002353267A JP 2002353267 A JP2002353267 A JP 2002353267A JP 2001153526 A JP2001153526 A JP 2001153526A JP 2001153526 A JP2001153526 A JP 2001153526A JP 2002353267 A JP2002353267 A JP 2002353267A
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- bonding
- wedge
- electrode pattern
- semiconductor light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
イオード等の半導体発光素子間の接合を強化することで
組立信頼性を向上させた半導体発光装置を得ること。 【解決手段】 Auワイヤ5は、まず始めに電極パター
ン1上の一方の共通端子1a上にボールボンディングに
よって接合し、そのまま隣の発光ダイオード3の上面電
極3aにウェッジボンディングする。そして、パッケー
ジ2上にマウントした複数の発光ダイオード3上に順次
ウェッジボンディングおよびこのウェッジボンディング
部6aの上から重ねてボールボンディングし、最後に電
極パターン1上のもう一方の共通端子1b上にウェッジ
ボンディングし、さらにこの共通端子1bのウェッジボ
ンディング部6bの上から重ねてボールボンディングす
る。
Description
マウントする複数の半導体発光素子間をワイヤ接合する
際のワイヤボンディング方法に関する。
電極パターン1を形成したパッケージ2上に複数の発光
ダイオード3をAgペースト4によりマウントし、発光
ダイオード3の上面電極3aおよび電極パターン1上の
共通端子1a,1b間をAuワイヤ5によって接続した
ものである。ここで、Auワイヤ5は、一方の共通端子
1aから始めてもう一方の共通端子1bまで各発光ダイ
オード3の上面電極3aに順次押し付けながら連続的に
圧着していくいわゆるステッチボンド法により接合する
のが一般的である。
ステッチボンド法によれば、図2(b)の拡大図に示す
ようにステッチボンド部7のAuワイヤ5の肉厚が薄く
なる。したがって、後の工程である樹脂封止時の熱応力
やこれに基づく内部応力の変化等によってAuワイヤ5
に引張りが生じると、ステッチボンド部7でAuワイヤ
5が破断したり、剥離したりすることがある。
ウントする複数の発光ダイオード等の半導体発光素子間
の接合を強化することで組立信頼性を向上させた半導体
発光装置を得るためのワイヤボンディング方法を提供す
る。
本発明のワイヤボンディング方法は、複数の半導体発光
素子間をワイヤ接合する際、半導体発光素子の上部電極
上および電極パターンの端子上にウェッジボンディング
したワイヤ上から重ねてボールボンディングを行うこと
を特徴とする。
極上および電極パターンの端子上にウェッジボンディン
グによって肉厚の薄くなったワイヤをボールボンディン
グによって接合強化することができ、組立信頼性を向上
させた半導体発光装置が得られる。
ターン上に複数の半導体発光素子をマウントし前記電極
パターンおよび複数の半導体発光素子間をワイヤ接合す
るワイヤボンディング方法において、前記電極パターン
上の一方の端子から始めて半導体発光素子の上部電極上
にウェッジボンディングし、前記上部電極のウェッジボ
ンディング部の上から重ねてボールボンディングし、順
次半導体発光素子の上部電極上へのウェッジボンディン
グおよびこのウェッジボンディング部の上から重ねてボ
ールボンディングし、最後に前記電極パターン上のもう
一方の端子上にウェッジボンディングし、さらにこのウ
ェッジボンディング部の上から重ねてボールボンディン
グすることを特徴とするワイヤボンディング方法であ
り、半導体発光素子の上部電極上および電極パターンの
端子上にウェッジボンディングによって肉厚の薄くなっ
たワイヤをボールボンディングによって接合強化するこ
とができる。
参照して説明する。
発光装置を示し、(a)は平面図、(b)は側面図であ
る。
体発光装置は、電極パターン1を形成したパッケージ2
上には複数の半導体発光素子としての発光ダイオード3
がAgペースト4によりマウントしてある。そして、こ
れら複数の発光ダイオード3の上面電極3aおよび電極
パターン1上の共通端子1a,1b間をAuワイヤ5に
よって接合する。
パターン1上の一方の共通端子1a上にボールボンディ
ングによって接合し、そのまま隣の発光ダイオード3の
上面電極3aにウェッジボンディングする。そして、こ
の上面電極3aのウェッジボンディング部6aの上から
重ねてボールボンディングし、さらに隣の発光ダイオー
ド3の上面電極3aにウェッジボンディングする。
複数の発光ダイオード3上に順次ウェッジボンディング
およびこのウェッジボンディング部6aの上から重ねて
ボールボンディングし、最後に電極パターン1上のもう
一方の共通端子1b上にウェッジボンディングし、さら
にこの共通端子1bのウェッジボンディング部6bの上
から重ねてボールボンディングする。
ケージ2上にマウントした複数の発光ダイオード3およ
び電極パターン1間をワイヤ接合すれば、発光ダイオー
ド3の上部電極3a上および電極パターン1の共通端子
1a,1b上のウェッジボンディング部6a,6bを強
化することができ、組立信頼性を向上させた半導体発光
装置が得られる。
電極上および電極パターンの端子上にウェッジボンディ
ングによって肉厚の薄くなったワイヤをボールボンディ
ングによって接合強化することができ、組立信頼性を向
上させた半導体発光装置が得られる。
示し、 (a)は平面図 (b)は側面図
Claims (1)
- 【請求項1】 電極パターン上に複数の半導体発光素子
をマウントし前記電極パターンおよび複数の半導体発光
素子間をワイヤ接合するワイヤボンディング方法におい
て、前記電極パターン上の一方の端子から始めて半導体
発光素子の上部電極上にウェッジボンディングし、前記
上部電極のウェッジボンディング部の上から重ねてボー
ルボンディングし、順次半導体発光素子の上部電極上へ
ウェッジボンディングおよびこのウェッジボンディング
部の上から重ねてボールボンディングし、最後に前記電
極パターン上のもう一方の端子上にウェッジボンディン
グし、さらにこのウェッジボンディング部の上から重ね
てボールボンディングすることを特徴とするワイヤボン
ディング方法。
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Cited By (6)
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---|---|---|---|---|
JP2008130863A (ja) * | 2006-11-22 | 2008-06-05 | Nichia Chem Ind Ltd | 半導体装置及びその製造方法 |
US8476726B2 (en) | 2009-04-30 | 2013-07-02 | Nichia Corporation | Semiconductor device and method of manufacturing the semiconductor device |
FR2986372A1 (fr) * | 2012-01-31 | 2013-08-02 | Commissariat Energie Atomique | Procede d'assemblage d'un element a puce micro-electronique sur un element filaire, installation permettant de realiser l'assemblage |
WO2014049973A1 (ja) * | 2012-09-26 | 2014-04-03 | パナソニック株式会社 | 発光モジュール |
US8759987B2 (en) | 2009-10-09 | 2014-06-24 | Nichia Corporation | Semiconductor device and method of manufacturing the semiconductor device |
CN108269792A (zh) * | 2011-05-18 | 2018-07-10 | 晟碟半导体(上海)有限公司 | 瀑布引线键合 |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8132709B2 (en) | 2006-11-22 | 2012-03-13 | Nichia Corporation | Semiconductor device and method for manufacturing same |
JP2008130863A (ja) * | 2006-11-22 | 2008-06-05 | Nichia Chem Ind Ltd | 半導体装置及びその製造方法 |
US8476726B2 (en) | 2009-04-30 | 2013-07-02 | Nichia Corporation | Semiconductor device and method of manufacturing the semiconductor device |
US9281457B2 (en) | 2009-04-30 | 2016-03-08 | Nichia Corporation | Semiconductor device and method of manufacturing the semiconductor device |
US8759987B2 (en) | 2009-10-09 | 2014-06-24 | Nichia Corporation | Semiconductor device and method of manufacturing the semiconductor device |
CN108269792A (zh) * | 2011-05-18 | 2018-07-10 | 晟碟半导体(上海)有限公司 | 瀑布引线键合 |
FR2986372A1 (fr) * | 2012-01-31 | 2013-08-02 | Commissariat Energie Atomique | Procede d'assemblage d'un element a puce micro-electronique sur un element filaire, installation permettant de realiser l'assemblage |
CN104170071A (zh) * | 2012-01-31 | 2014-11-26 | 原子能和代替能源委员会 | 在配线元件上组装微电子芯片元件的方法及使得组装能进行的安装设备 |
US9953953B2 (en) | 2012-01-31 | 2018-04-24 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Method for assembling a microelectronic chip element on a wire element, and installation enabling assembly to be performed |
WO2013114009A1 (fr) * | 2012-01-31 | 2013-08-08 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Procédé d'assemblage d'un élément à puce micro-électronique sur un élément filaire, installation permettant de réaliser l'assemblage |
WO2014049973A1 (ja) * | 2012-09-26 | 2014-04-03 | パナソニック株式会社 | 発光モジュール |
JPWO2014049973A1 (ja) * | 2012-09-26 | 2016-08-22 | パナソニックIpマネジメント株式会社 | 発光モジュール |
US9634211B2 (en) | 2012-09-26 | 2017-04-25 | Panasonic Intellectual Property Management Co., Ltd. | Light-emitting module |
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