JP2002291265A5 - - Google Patents
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- JP2002291265A5 JP2002291265A5 JP2002004197A JP2002004197A JP2002291265A5 JP 2002291265 A5 JP2002291265 A5 JP 2002291265A5 JP 2002004197 A JP2002004197 A JP 2002004197A JP 2002004197 A JP2002004197 A JP 2002004197A JP 2002291265 A5 JP2002291265 A5 JP 2002291265A5
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- 238000006243 chemical reaction Methods 0.000 claims description 31
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 6
- 238000005299 abrasion Methods 0.000 claims 2
- 230000003534 oscillatory effect Effects 0.000 claims 2
- 238000005452 bending Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Description
【００１６】
【課題を解決するための手段】
上記課題を解決するために、本願の請求項１に記載の発明は、第１の弾性体と第２の弾性体との間に電気−機械エネルギー変換素子を有し、前記電気−機械エネルギー変換素子に駆動信号を印加することにより進行波を励起する振動波駆動装置に用いられる振動体において、変位方向が同一であって、かつ、振動体の両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とするものである。0016.
[Means for solving problems]
In order to solve the above problems, the invention according to claim 1 of the present application has an electric-mechanical energy conversion element between the first elastic body and the second elastic body, and the electric-mechanical energy conversion element is provided. In a vibrating body used in a vibrating wave drive device that excites a traveling wave by applying a driving signal to an element, the displacement direction is the same and the relative ratio of displacement of each end on both sides of the vibrating body. Is characterized by having a plurality of different vibration modes.
【００１７】
同様に上記課題を解決するために、本願の請求項２に記載の発明は、第１の弾性体と第２の弾性体との間に電気−機械エネルギー変換素子を有し、前記電気−機械エネルギー変換素子に駆動信号を印加することにより進行波を励起する振動波駆動装置に用いられる振動体において、前記第１の弾性体と前記第２の弾性体との間に、振動体の軸方向と直交する方向に延び、外径が前記電気−機械エネルギー変換素子よりも大きい第３の弾性部を有し、変位方向が同一であって、かつ、振動体の両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とするものである。[0017]
Similarly, in order to solve the above problems, the invention according to claim 2 of the present application has an electric-mechanical energy conversion element between the first elastic body and the second elastic body, and the electric-mechanical body is described. In a vibrating body used in a vibrating wave driving device that excites a traveling wave by applying a driving signal to an energy conversion element, the axial direction of the vibrating body is between the first elastic body and the second elastic body. Has a third elastic portion extending in a direction orthogonal to the above, and having an outer diameter larger than that of the electric-mechanical energy conversion element, having the same displacement direction, and displacement of each end portion on both sides of the vibrating body. It is characterized by having a plurality of vibration modes having different relative ratios.
【００１８】
同様に上記課題を解決するために、本願の請求項５に記載の発明は、第１の弾性体と第２の弾性体との間に電気−機械エネルギー変換素子を有する振動体と、前記振動体に接触する接触体とを備え、前記電気−機械エネルギー変換素子に駆動信号を印加することにより前記振動体に励起された進行波によって前記接触体を駆動する振動波駆動装置において、前記振動体は、変位方向が同一であって、かつ、両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とするものである。 0018.
Similarly, in order to solve the above problems, the invention according to claim 5 of the present application comprises a vibrating body having an electric-mechanical energy conversion element between the first elastic body and the second elastic body, and the vibration. In a vibration wave driving device having a contact body in contact with the body and driving the contact body by a traveling wave excited by the vibrating body by applying a drive signal to the electric-mechanical energy conversion element, the vibrating body. Is characterized by having a plurality of vibration modes having the same displacement direction and different relative displacement ratios of the respective ends on both sides.
【００１９】
同様に上記課題を解決するために、本願の請求項６に記載の発明は、第１の弾性体と第２の弾性体との間に電気−機械エネルギー変換素子を有する振動体と、前記振動体に接触する接触体とを備え、前記電気−機械エネルギー変換素子に駆動信号を印加することにより前記振動体に励起された進行波によって前記接触体を駆動する振動波駆動装置において、前記第１の弾性体と前記第２の弾性体との間に、前記振動体の軸方向と直交する方向に延び、前記電気−機械エネルギー変換素子の外径よりも外側に前記接触体が摺動する摺動面を設けた第３の弾性部を有し、前記振動体は、変位方向が同一であって、かつ、両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とするものである。 [0019]
Similarly, in order to solve the above problems, the invention according to claim 6 of the present application comprises a vibrating body having an electric-mechanical energy conversion element between the first elastic body and the second elastic body, and the vibration. In a vibration wave driving device having a contact body in contact with the body and driving the contact body by a traveling wave excited by the vibrating body by applying a driving signal to the electric-mechanical energy conversion element, the first. A slide extending between the elastic body and the second elastic body in a direction orthogonal to the axial direction of the vibrating body, and the contact body sliding outside the outer diameter of the electric-mechanical energy conversion element. It has a third elastic portion provided with a moving surface, and the vibrating body has a plurality of vibration modes in which the displacement directions are the same and the relative ratios of displacement of the respective ends on both sides are different. It is characterized by.
【００２０】
同様に上記課題を解決するために、本願の請求項７に記載の発明は、第１の弾性体と第２の弾性体との間に電気−機械エネルギー変換素子を有する振動体と、前記振動体に接触する接触体とを備え、前記電気−機械エネルギー変換素子に駆動信号を印加することにより前記振動体に励起された進行波によって前記接触体を駆動する振動波駆動装置において、前記第１の弾性体と前記第２の弾性体との間に、前記振動体の軸方向と直交する方向に延び、前記電気−機械エネルギー変換素子の外径よりも外側に前記接触体が摺動する摺動面を設けた第３の弾性部を有し、前記第３の弾性部を境として軸方向摺動面側の振動体の動剛性が、非摺動面側の動剛性よりも小さいことを特徴とするものである。 0020
Similarly, in order to solve the above problems, the invention according to claim 7 of the present application comprises a vibrating body having an electric-mechanical energy conversion element between the first elastic body and the second elastic body, and the vibration. In a vibration wave driving device having a contact body in contact with the body and driving the contact body by a traveling wave excited by the vibrating body by applying a drive signal to the electric-mechanical energy conversion element, the first. A slide extending between the elastic body and the second elastic body in a direction orthogonal to the axial direction of the vibrating body, and the contact body sliding outside the outer diameter of the electric-mechanical energy conversion element. It has a third elastic portion provided with a moving surface, and the dynamic rigidity of the vibrating body on the axial sliding surface side with the third elastic portion as a boundary is smaller than the dynamic rigidity on the non-sliding surface side. It is a feature.
【００２３】
１は中空円柱状の第１の弾性体で、真鍮等の振動減損失の小さい材料で構成されている。２は円柱状の第２の弾性体であり、第１の弾性体１と同様に振動減衰損失が小さい材料で構成されている。５は振動体の軸方向と直交する方向に延びたフランジ状（円盤状）弾性体であり、第１の弾性体１、第２の弾性体２およびフランジ状弾性体５がねじ部６ａ,６ｂを有するシャフト６により一体的に挟持固定されている。このフランジ状弾性体５は耐摩耗性の材料で構成されており、外周近傍の片面でロータ８と接触し、ロータ８を回転駆動させる。図１(ａ)から明らかなように、ロータ８と接触するフランジ状弾性体５の摺動面は、隣接する第１の弾性体１および圧電素子３の外径よりも外側に位置している。シャフト６は先端部が不図示の装置に連結される質量部７に固定され、振動体を支えるための支持ピンとして作用する。シャフト６のうち第２の弾性体２、圧電素子３およびフランジ状弾性体５の内部に位置していない部分は十分に細く形成されており、振動体が発生する振動を吸収して振動が被駆動装置等へ伝搬するのを防止できるように構成されている。[0023]
Reference numeral 1 denotes a hollow columnar first elastic body, which is made of a material having a small vibration loss loss such as brass. Reference numeral 2 is a columnar second elastic body, which is made of a material having a small vibration damping loss like the first elastic body 1 . Reference numeral 5 denotes a flange-shaped (disk-shaped) elastic body extending in a direction orthogonal to the axial direction of the vibrating body, and the first elastic body 1, the second elastic body 2, and the flange-shaped elastic body 5 have threaded portions 6a and 6b. It is integrally sandwiched and fixed by the shaft 6 having the above. The flange-shaped elastic body 5 is made of a wear-resistant material, and comes into contact with the rotor 8 on one side near the outer periphery to rotationally drive the rotor 8. As is clear from FIG. 1 (a), the sliding surface of the flange-shaped elastic body 5 in contact with the rotor 8 is located outside the outer diameters of the adjacent first elastic body 1 and the piezoelectric element 3. .. The shaft 6 is fixed to a mass portion 7 whose tip portion is connected to a device (not shown), and acts as a support pin for supporting the vibrating body. The portion of the shaft 6 that is not located inside the second elastic body 2, the piezoelectric element 3, and the flange-shaped elastic body 5 is formed to be sufficiently thin, and absorbs the vibration generated by the vibrating body to receive vibration. It is configured to prevent propagation to a drive device or the like.
【００２７】
また、図１(ｃ)に示す振動モードの固有振動数は図１(ｂ)に示す振動モードの固有振動数に比べて小さい値であり、図１(ｂ)と図１(ｃ)の振動モードでの固有振動数は大きく異なったものとなる。これは図１(ｂ)の振動モードが主に外径の大きい第２の弾性体２に合わせた振動モードであるのに対し、図１(ｃ)の振動モードが主に外径の小さい第１の弾性体１に合わせた振動モードであるためである。[0027]
Further, the natural frequency of the vibration mode shown in FIG. 1 (c) is a smaller value than the natural frequency of the vibration mode shown in FIG. 1 (b), and the vibrations of FIGS. 1 (b) and 1 (c). The natural frequencies in the mode are very different. This is a vibration mode in which the vibration mode of FIG. 1 (b) is mainly matched to the second elastic body 2 having a large outer diameter, whereas the vibration mode of FIG. 1 (c) is mainly a vibration mode having a small outer diameter. This is because the vibration mode is matched to the elastic body 1 of 1.
【００４３】
図２に示した振動体は、第１の弾性体１１の上側先端部と第２の弾性体１２の下側先端部１２ａの外径を拡大することで、曲げ振動変位の大きな自由端の質量を大きくし、振動体の固有振動数を低下させたものである。固有振動数を低下できるため、同一の固有振動数であれば、より小型化した振動体を提供することが可能である。[0043]
The vibrating body shown in FIG. 2 has a free end mass having a large bending vibration displacement by expanding the outer diameters of the upper tip portion of the first elastic body 11 and the lower tip portion 12a of the second elastic body 12. Is increased and the natural frequency of the vibrating body is lowered. Since the natural frequency can be reduced, it is possible to provide a smaller vibrating body if the natural frequency is the same.
【００４４】
本実施形態においても、フランジ状( ディスク状 )弾性体１５の下側に位置する第２の弾性体１２の部位の外径を、フランジ状弾性体１５の上側に位置する第１の弾性体１１の部位の外径よりも大きくすることで、両者の動剛性に差を持たせ、異なる２つの曲げ振動モードを励起できる構成となっている。[0044]
Also in the present embodiment, the outer diameter of the portion of the second elastic body 12 located below the flange-shaped ( disk-shaped ) elastic body 15 is set to the upper diameter of the first elastic body 11 located above the flange-shaped elastic body 15. By making it larger than the outer diameter of the part, the dynamic rigidity of the two is made different, and two different bending vibration modes can be excited.
【００４５】
図示していないがロータは第１の弾性体１１の外周側に配置される。本実施の形態においては、フランジ状弾性体１５の外周近傍には、耐摩耗性の摺動部材５１が接着され、この摺動部材５１がロータと摺動する。図１に示す振動体は、フランジ状弾性体１５がロータ８と接するため、フランジ状弾性体１５の表面にラップ等による面仕上げ加工を施す必要があるが、本実施の形態においては、摺動部材５１を設けてあるので、フランジ状弾性体１５の表面に面仕上げ加工を施す必要がなくなる。[0045]
Although not shown, the rotor is arranged on the outer peripheral side of the first elastic body 11. In the present embodiment, a wear-resistant sliding member 51 is adhered to the vicinity of the outer periphery of the flange-shaped elastic body 15, and the sliding member 51 slides with the rotor. In the vibrating body shown in FIG. 1, since the flange-shaped elastic body 15 is in contact with the rotor 8, it is necessary to perform surface finishing processing such as wrapping on the surface of the flange-shaped elastic body 15, but in the present embodiment, sliding is performed. Since the member 51 is provided, it is not necessary to perform surface finishing on the surface of the flange-shaped elastic body 15.
【００４８】
２１は第１の弾性体、２２は第２の弾性体、２３は圧電素子であり、２５は振動体の軸方向と直交する方向に延びたフランジ状（ディスク状）弾性体である。第１の弾性体２１には第２の弾性体２２、圧電素子２３、フランジ状弾性体２５を貫通する軸部を有し、軸部の先端が第２の弾性体２２の下側で質量部２７に固定され、振動体全体を支持している。この軸部にはねじ部２１ｂとフランジ部２１ｃとが形成されており、第２の弾性体２２をねじ部２１ｂに螺合させ、第２の弾性体２２とフランジ部２１ｃとの間にフランジ状弾性体２５と圧電素子２３とを挟持固定する。[0048]
21 is a first elastic body, 22 is a second elastic body, 23 is a piezoelectric element, and 25 is a flange-shaped (disk-shaped) elastic body extending in a direction orthogonal to the axial direction of the vibrating body. The first elastic body 21 has a shaft portion penetrating the second elastic body 22, the piezoelectric element 23, and the flange-shaped elastic body 25, and the tip of the shaft portion is a mass portion below the second elastic body 22. It is fixed to 27 and supports the entire vibrating body. A threaded portion 21b and a flange portion 21c are formed on this shaft portion , a second elastic body 22 is screwed into the threaded portion 21b, and a flange shape is formed between the second elastic body 22 and the flange portion 21c. The elastic body 25 and the piezoelectric element 23 are sandwiched and fixed.
【００５５】
３６はシャフトで、下部には振動体挟持用のネジ３６ａが、上部には質量部３７と結合する結合用のネジ３６ｃが設けられている。ロータ３８の外周には接触用のバネ３８ａが接着等により結合され、また内周にはバネケース３８ｂが嵌合している。３９は出力ギアで、バネケース３８ｂに対してラジアル方向に相対移動せぬよう嵌合結合している。３４は加圧用のコイルバネである。質量部３７とギア３９との結合部４０は滑り軸受けを構成している。４４は圧電素子３３への給電用のフレキシブル基板である。[0055]
Reference numeral 36 denotes a shaft, which is provided with a screw 36a for holding the vibrating body at the lower portion and a screw 36c for coupling to be coupled to the mass portion 37 at the upper portion. A contact spring 38a is bonded to the outer periphery of the rotor 38 by adhesion or the like, and a spring case 38b is fitted to the inner circumference. Reference numeral 39 is an output gear , which is fitted and coupled to the spring case 38b so as not to move relative to the radial direction. Reference numeral 34 is a coil spring for pressurization. The coupling portion 40 of the mass portion 37 and the gear 39 constitutes a sliding bearing. Reference numeral 44 denotes a flexible substrate for supplying power to the piezoelectric element 33.
Claims (17)
変位方向が同一であって、かつ、振動体の両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とする振動体。An oscillatory wave driving device that has an electro-mechanical energy conversion element between a first elastic body and a second elastic body, and applies a drive signal to the electro-mechanical energy conversion element to excite a traveling wave. In the vibrator used,
A vibrating body having a plurality of vibration modes having the same displacement direction and different relative displacement ratios of respective ends on both sides of the vibrating body.
前記第１の弾性体と前記第２の弾性体との間に、振動体の軸方向と直交する方向に延び、外径が前記電気−機械エネルギー変換素子よりも大きい第３の弾性部を有し、変位方向が同一であって、かつ、振動体の両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とする振動体。An oscillatory wave driving device that has an electro-mechanical energy conversion element between a first elastic body and a second elastic body, and applies a drive signal to the electro-mechanical energy conversion element to excite a traveling wave. In the vibrator used,
A third elastic portion extending between the first elastic member and the second elastic member in a direction perpendicular to the axial direction of the vibrating member and having an outer diameter larger than that of the electro-mechanical energy conversion element; A vibrating body having a plurality of vibration modes having the same displacement direction and different relative displacement ratios of respective ends on both sides of the vibrating body.
前記振動体は、変位方向が同一であって、かつ、両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とする振動波駆動装置。A vibrating body having an electro-mechanical energy conversion element between the first elastic body and the second elastic body; and a contact body contacting the vibrating body, wherein a drive signal is transmitted to the electro-mechanical energy conversion element. In a vibration wave driving device that drives the contact body by a traveling wave excited by the vibration body by applying,
The vibrating body has a plurality of vibration modes in which the directions of displacement are the same and the relative rates of displacement of respective ends on both sides are different.
前記第１の弾性体と前記第２の弾性体との間に、前記振動体の軸方向と直交する方向に延び、前記電気−機械エネルギー変換素子の外径よりも外側に前記接触体が摺動する摺動面を設けた第３の弾性部を有し、前記振動体は、変位方向が同一であって、かつ、両側のそれぞれの端部の変位する相対的割合が異なる複数の振動モードを有することを特徴とする振動波駆動装置。A vibrating body having an electro-mechanical energy conversion element between the first elastic body and the second elastic body; and a contact body contacting the vibrating body, wherein a drive signal is transmitted to the electro-mechanical energy conversion element. In a vibration wave driving device that drives the contact body by a traveling wave excited by the vibration body by applying,
The contact body extends between the first elastic body and the second elastic body in a direction orthogonal to the axial direction of the vibrating body, and slides outside an outer diameter of the electro-mechanical energy conversion element. A third elastic portion provided with a moving sliding surface, wherein the vibrating body has a plurality of vibration modes in which a displacement direction is the same and a relative ratio of displacement of each end on both sides is different. A vibration wave driving device comprising:
前記第１の弾性体と前記第２の弾性体との間に、前記振動体の軸方向と直交する方向に延び、前記電気−機械エネルギー変換素子の外径よりも外側に前記接触体が摺動する摺動面を設けた第３の弾性部を有し、前記第３の弾性部を境として軸方向摺動面側の振動体の動剛性が、非摺動面側の動剛性よりも小さいことを特徴とする振動波駆動装置。A vibrating body having an electro-mechanical energy conversion element between the first elastic body and the second elastic body; and a contact body contacting the vibrating body, wherein a drive signal is transmitted to the electro-mechanical energy conversion element. In a vibration wave driving device that drives the contact body by a traveling wave excited by the vibration body by applying,
The contact body extends between the first elastic body and the second elastic body in a direction orthogonal to the axial direction of the vibrating body, and slides outside an outer diameter of the electro-mechanical energy conversion element. A third elastic portion provided with a moving sliding surface, wherein the dynamic rigidity of the vibrating body on the axial sliding surface side is greater than the dynamic rigidity on the non-sliding surface side with respect to the third elastic portion. A vibration wave driving device characterized by being small.
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002004197A JP3566696B2 (en) | 2001-01-22 | 2002-01-11 | Vibration wave drive |
| US10/044,936 US6930436B2 (en) | 2001-01-22 | 2002-01-15 | Vibration element and vibration wave driving apparatus |
| DE60209266T DE60209266T2 (en) | 2001-01-22 | 2002-01-21 | Vibrating element and vibration shaft drive |
| EP05001534A EP1531500B1 (en) | 2001-01-22 | 2002-01-21 | Vibration wave driving apparatus |
| EP02001426A EP1225681B1 (en) | 2001-01-22 | 2002-01-21 | Vibration element and vibration wave driving apparatus |
| CNB021024588A CN1186825C (en) | 2001-01-22 | 2002-01-22 | Vibrating element and vibrating wave driving device |
| KR10-2002-0003487A KR100523109B1 (en) | 2001-01-22 | 2002-01-22 | Vibration wave driving apparatus |
| US10/952,762 US6989624B2 (en) | 2001-01-22 | 2004-09-30 | Vibration element and vibration wave driving apparatus |
| US11/133,395 US7215063B2 (en) | 2001-01-22 | 2005-05-20 | Vibration element and vibration wave driving apparatus |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001013366 | 2001-01-22 | ||
| JP2001-13366 | 2001-01-22 | ||
| JP2002004197A JP3566696B2 (en) | 2001-01-22 | 2002-01-11 | Vibration wave drive |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002291265A JP2002291265A (en) | 2002-10-04 |
| JP3566696B2 JP3566696B2 (en) | 2004-09-15 |
| JP2002291265A5 true JP2002291265A5 (en) | 2004-12-09 |
Family
ID=26608077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002004197A Expired - Fee Related JP3566696B2 (en) | 2001-01-22 | 2002-01-11 | Vibration wave drive |
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| Country | Link |
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| JP (1) | JP3566696B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6012226B2 (en) | 2012-04-02 | 2016-10-25 | キヤノン株式会社 | Vibration wave driving device and driving circuit thereof |
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2002
- 2002-01-11 JP JP2002004197A patent/JP3566696B2/en not_active Expired - Fee Related
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