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JP2002289998A - Circuit board and manufacturing method thereof - Google Patents

Circuit board and manufacturing method thereof

Info

Publication number
JP2002289998A
JP2002289998A JP2001084199A JP2001084199A JP2002289998A JP 2002289998 A JP2002289998 A JP 2002289998A JP 2001084199 A JP2001084199 A JP 2001084199A JP 2001084199 A JP2001084199 A JP 2001084199A JP 2002289998 A JP2002289998 A JP 2002289998A
Authority
JP
Japan
Prior art keywords
circuit board
metal
wiring
substrate
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001084199A
Other languages
Japanese (ja)
Inventor
Tetsuhiro Nakamura
中村  哲浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP2001084199A priority Critical patent/JP2002289998A/en
Publication of JP2002289998A publication Critical patent/JP2002289998A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To solve the problem that the conventional circuit board has a structure provided with through-holes for making conductive wirings formed on the upside and downside of the board but the area occupied by the through-holes impedes making a high density circuit board. SOLUTION: The circuit board uses a board having rod-like metal pieces regularly disposed through an insulation resin and makes conductive wirings formed on the upside and downside of the board through fine rod-like metal pieces. This makes a high density circuit board realizable, compared with that using through-holes and allows the area of the board to be reduced.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は回路基板とその製造
方法に関するものである。
The present invention relates to a circuit board and a method for manufacturing the same.

【0002】[0002]

【従来の技術】以下、図面を用いて従来技術の一例を説
明する。図11は従来例の回路基板の構造を示す断面図
である。図11に図示するように、基板8の上下面に接
続材料6を用いて電子部品7を接続するための配線4を
有し、上下面の配線4を導通させるためのスルーホール
9を有し、配線を保護するための保護膜5とを有する構
造となっている。
2. Description of the Related Art An example of the prior art will be described below with reference to the drawings. FIG. 11 is a sectional view showing the structure of a conventional circuit board. As shown in FIG. 11, the upper and lower surfaces of the substrate 8 have wirings 4 for connecting the electronic components 7 using the connection material 6, and have through holes 9 for conducting the wirings 4 on the upper and lower surfaces. , And a protective film 5 for protecting the wiring.

【0003】基板8は四角形で板厚が0.2mm程度のガ
ラスエポキシ樹脂からなり、その基板8には、複数のス
ルーホール9を切削ドリル加工によって設ける。スルー
ホール9の壁面を含む基板面を洗浄した後、基板8の全
表面には、無電解銅メッキ層を設け、その銅メッキ層は
スルーホール9の内部にまで形成されている。
The substrate 8 is made of a glass epoxy resin having a rectangular shape and a thickness of about 0.2 mm. The substrate 8 is provided with a plurality of through holes 9 by cutting drilling. After cleaning the substrate surface including the wall surface of the through hole 9, an electroless copper plating layer is provided on the entire surface of the substrate 8, and the copper plating layer is formed up to the inside of the through hole 9.

【0004】次に基板8の上下両面に、エッチングレジ
ストを露光現像し、エッチングを行うことで配線4のパ
ターンを形成し、その後エッチングレジストを除去す
る。このようにして基板上下両面には厚さ18μm程度
の配線4が設けられる。
Next, an etching resist is exposed and developed on both upper and lower surfaces of the substrate 8, and a pattern of the wiring 4 is formed by performing etching. Thereafter, the etching resist is removed. In this way, the wiring 4 having a thickness of about 18 μm is provided on both upper and lower surfaces of the substrate.

【0005】さらに基板8の両面に保護膜5をラミネー
トし、露光現像を行うことにより保護膜5を設け、電子
部品7を実装する部分には保護膜5に開口部を設ける。
保護膜5の開口部で露出している配線4の表面に、ニッ
ケルメッキ層を設ける。そのニッケルメッキ層の表面
に、さらに金メッキ層を設けることもある。
Further, the protective film 5 is laminated on both surfaces of the substrate 8 and exposed and developed to provide the protective film 5, and an opening is provided in the protective film 5 at a portion where the electronic component 7 is mounted.
A nickel plating layer is provided on the surface of the wiring 4 exposed at the opening of the protective film 5. A gold plating layer may be further provided on the surface of the nickel plating layer.

【0006】その後、抵抗、ダイオード、トランジス
タ、ICなどの電子部品7をハンダや導電接着剤などの
接続材料6を用いて、保護膜5の開口部で露出している
配線4と電気的接続を行う。
Thereafter, the electronic components 7 such as resistors, diodes, transistors, and ICs are electrically connected to the wirings 4 exposed at the openings of the protective film 5 by using a connection material 6 such as solder or conductive adhesive. Do.

【0007】[0007]

【発明が解決しようとする課題】従来の回路基板の構造
では、基板上下面に形成した配線と導通させるために、
スルーホールを設けており、そのスルーホールの面積が
回路基板を高密度化する上での障害となっている。従来
の技術では切削ドリル加工によってスルーホールを形成
しているためスルーホールの直径が最小で0.5mm程度
となってしまう。本発明の目的は、上記課題を解決し
て、スルーホールの面積に影響を受けない高密度回路基
板を提供することにある。
In the structure of a conventional circuit board, in order to electrically connect with wiring formed on the upper and lower surfaces of the board,
A through hole is provided, and the area of the through hole is an obstacle in increasing the density of the circuit board. In the prior art, the through hole is formed by cutting drilling, so that the diameter of the through hole is at least about 0.5 mm. An object of the present invention is to solve the above problems and to provide a high-density circuit board that is not affected by the area of a through hole.

【0008】[0008]

【課題を解決するための手段】上記の目的を達成するた
めに、本発明の回路基板の構造およびその製造方法は、
下記記載の構成と製造方法を採用する。
In order to achieve the above object, a circuit board structure and a method of manufacturing the same according to the present invention are provided.
The following configuration and manufacturing method are adopted.

【0009】本発明の回路基板の構成は、絶縁樹脂を介
して複数の金属を並べた母材基板を用意し、この母材基
板の片面上、あるいは両面上に、金属の端面に開口部を
有するように絶縁膜を設置し、開口部と開口部を電気的
に接続するように配線を備えていることを特徴とする。
The circuit board according to the present invention has a structure in which a base material substrate in which a plurality of metals are arranged via an insulating resin is prepared, and an opening is formed on one or both sides of the base material substrate at an end surface of the metal. An insulating film is provided so as to have the wiring, and wiring is provided so as to electrically connect the openings.

【0010】また、本発明の回路基板の製造方法は、台
座部上に複数の金属を並べて配置した基台基板を用意す
る工程と、金属と金属の間に絶縁樹脂を設置する工程
と、基台基板から台座部を除去して母材基板を形成する
工程と、母材基板における金属の端面に開口部を残して
絶縁膜を形成する工程と、開口部に配線となる金属膜を
形成する工程とを有することを特徴としている。
The method of manufacturing a circuit board according to the present invention includes a step of preparing a base board having a plurality of metals arranged on a pedestal portion; a step of installing an insulating resin between the metals; Removing a pedestal portion from the base substrate to form a base material substrate, forming an insulating film while leaving an opening at an end surface of the metal in the base material substrate, and forming a metal film to be a wiring in the opening portion And a process.

【0011】この基台基板を用意する工程では、金属ブ
ロックを用意し、台座部となる箇所を除いた位置に複数
の溝を形成することによって、台座部上に複数の金属を
並べて配置した基台基板を形成することを特徴としてい
る。あるいは、基台基板の形成は台座部となる板状の基
板に接着材料を介して複数の金属を貼り付け、台座部上
に複数の金属を並べて配置してもよい。
In the step of preparing the base substrate, a metal block is prepared, and a plurality of grooves are formed at positions other than a portion serving as a pedestal portion, so that a plurality of metals are arranged and arranged on the pedestal portion. It is characterized in that a base substrate is formed. Alternatively, in forming the base substrate, a plurality of metals may be attached to a plate-shaped substrate serving as a pedestal via an adhesive material, and the plurality of metals may be arranged on the pedestal.

【0012】金属の端面に開口部を残して絶縁膜を形成
する工程で用いた絶縁膜は、感光性樹脂を使用すること
を特徴としている。また、開口部に配線となる金属膜を
形成する工程では、絶縁膜上に触媒金属を吸着させ、無
電解メッキ液に浸漬して、配線となる金属膜を形成する
ことを特徴としている。
The insulating film used in the step of forming the insulating film while leaving the opening on the end face of the metal is characterized by using a photosensitive resin. In the step of forming a metal film to be a wiring in the opening, a catalyst metal is adsorbed on an insulating film and immersed in an electroless plating solution to form a metal film to be a wiring.

【0013】さらに、母材基板における金属の端面側の
全面に金属膜を形成した後、前記金属膜をエッチングし
て、配線を形成する工程を有することを特徴としてい
る。さらに配線上に保護膜を形成する工程を有すること
が好ましい。
Further, the method is characterized in that a metal film is formed on the entire surface of the base material substrate on the end face side of the metal, and then the metal film is etched to form wiring. It is preferable that the method further includes a step of forming a protective film on the wiring.

【0014】[0014]

【発明の実施の形態】図1に本発明の回路基板の断面図
を示す。図1に記載するように棒状の金属1が絶縁樹脂
2を介して規則的に配置した母材基板を有し、上下面の
配線4を導通させる部分のみを開口した絶縁膜3を備
え、さらに母材基板の上下面に形成した配線4によっ
て、棒状の金属を部分的に導通させることができる。こ
のようにスルーホールを用いずに、基板上面と基板下面
を微少な棒状の金属1により母材基板の上下面に形成し
た配線4で導通させることができる。さらに配線を保護
するための保護膜を有する構造となっている。
FIG. 1 is a sectional view of a circuit board according to the present invention. As shown in FIG. 1, a bar-shaped metal 1 has a base material substrate regularly arranged with an insulating resin 2 interposed therebetween, and has an insulating film 3 having openings only at portions where the upper and lower wirings 4 are conducted. The bar-shaped metal can be partially conducted by the wirings 4 formed on the upper and lower surfaces of the base material substrate. As described above, without using the through holes, the upper surface and the lower surface of the substrate can be electrically connected by the wiring 4 formed on the upper and lower surfaces of the base material substrate by the fine rod-shaped metal 1. Further, the structure has a protective film for protecting the wiring.

【0015】[0015]

【実施例】次に実施例における回路基板の製造方法を説
明する。図1から図10は、実施例の回路基板の製造工
程を示す断面図である。
Next, a method of manufacturing a circuit board according to an embodiment will be described. 1 to 10 are cross-sectional views illustrating the steps of manufacturing the circuit board of the embodiment.

【0016】本実施例では直方体の金属ブロックをダイ
シングソーやワイヤーソーなどで、図2に示すように櫛
歯部分10と台座部分11とを備えるように加工し、さ
らに、最初に加工した溝に垂直に交わる方向にダイシン
グソーやワイヤーソーなどでさらに溝を形成する。この
ように溝を複数形成することによって、図4に示すよう
な、棒状の金属1が台座部分上に並んだ構造の基台基板
を形成する。棒状に加工した金属1の大きさは100μ
m□で高さが200μm程度、隣接する棒状の金属1間
は100μm程度とした。
In this embodiment, a rectangular parallelepiped metal block is processed with a dicing saw or a wire saw so as to have a comb portion 10 and a pedestal portion 11 as shown in FIG. Further grooves are formed with a dicing saw or a wire saw in a direction intersecting vertically. By forming a plurality of grooves in this manner, a base substrate having a structure in which rod-shaped metals 1 are arranged on a pedestal portion as shown in FIG. 4 is formed. The size of metal 1 processed into a rod shape is 100μ
The height was about 200 μm in m □, and the distance between adjacent rod-shaped metals 1 was about 100 μm.

【0017】この時、台座部分は金属1でなくてもよ
く、図3に示すように、ガラスやプラスチックなどの基
台基板12にワックスや接着剤などの接着材料13を用
いて棒状の金属を貼り付けて、形成してもよい。この時
使用する金属1は金、銅、ニッケルなどを用いることが
可能であるが、特に限定されない。本実施例では、加工
性が良好なニッケルを使用した。
At this time, the pedestal portion does not need to be made of the metal 1, but as shown in FIG. It may be attached and formed. The metal 1 used at this time can be gold, copper, nickel or the like, but is not particularly limited. In this example, nickel having good workability was used.

【0018】次に、図5に示すように絶縁樹脂2を棒状
の金属1の隙間に流し込み熱処理により硬化させる。本
実施例では絶縁樹脂に熱硬化型エポキシ樹脂を使用し
た。その後、不要な絶縁樹脂2と金属1の台座部分11
を研削により除去し、図6に示すような構造の、絶縁樹
脂を介して複数の金属が配列している母材基板8を得
た。台座部分と櫛歯部分が同一金属ではなく、台座部と
なる板状の基板に金属を接着した基台基板の場合には、
溶剤等を用いて接着材料を除去し、台座部分を分離し、
金属と絶縁樹脂とからなる母材基板を形成する。
Next, as shown in FIG. 5, the insulating resin 2 is poured into the gap between the rod-shaped metals 1 and hardened by heat treatment. In this embodiment, a thermosetting epoxy resin is used as the insulating resin. Then, the pedestal portion 11 of the unnecessary insulating resin 2 and metal 1
Was removed by grinding to obtain a base material substrate 8 having a structure as shown in FIG. 6 and having a plurality of metals arranged via an insulating resin. In the case of a base substrate in which the pedestal portion and the comb tooth portion are not the same metal, and the metal is bonded to a plate-shaped substrate serving as the pedestal portion,
Remove the adhesive material using a solvent etc., separate the pedestal part,
A base material substrate made of a metal and an insulating resin is formed.

【0019】次に、図7に示すように母材基板8上に絶
縁膜3を形成する。最初に母材基板8の上下面に感光性
の樹脂を全面に塗布し、露光現像により開口部を設けた
絶縁膜を形成する。開口部は母材基板8の上下面を導通
させる金属1の端面である。
Next, an insulating film 3 is formed on the base material substrate 8 as shown in FIG. First, a photosensitive resin is applied to the entire upper and lower surfaces of the base material substrate 8, and an insulating film having openings is formed by exposure and development. The opening is an end surface of the metal 1 that connects the upper and lower surfaces of the base material substrate 8.

【0020】配線4の形成方法は、まず図7に示す絶縁
膜3を設けた母材基板8表面の全面に、無電解メッキが
可能となる触媒金属をセンシタイザー・アクチベータ
法、またはキャタリスト法により吸着させておく。その
後、無電解メッキ液に浸漬することで図8に示すように
絶縁膜3を設けた母材基板8全面に配線4となる金属膜
を形成することができる。無電解メッキを行う前後でア
ルカリ脱脂や流水洗浄などの洗浄工程を行うとより効果
的である。
The method of forming the wiring 4 is as follows. First, a catalytic metal capable of electroless plating is applied to the entire surface of the base material substrate 8 provided with the insulating film 3 shown in FIG. To be adsorbed. Thereafter, by immersing the substrate in an electroless plating solution, a metal film to be the wiring 4 can be formed on the entire surface of the base material substrate 8 provided with the insulating film 3 as shown in FIG. It is more effective to perform a cleaning process such as alkali degreasing or running water cleaning before and after performing the electroless plating.

【0021】その後、配線4となる金属膜上にエッチン
グレジストを露光現像し、配線4となる金属膜をエッチ
ングし、エッチングレジストを除去することで、図9に
示すような配線4のパターンを形成する。
Thereafter, an etching resist is exposed and developed on the metal film to be the wiring 4, the metal film to be the wiring 4 is etched, and the etching resist is removed to form a pattern of the wiring 4 as shown in FIG. I do.

【0022】図10に示すように、配線4を保護するた
めに感光性樹脂を用いて、電子部品を実装する部分につ
いては露光現像により開口するようにし、保護膜5を形
成する。保護膜5の開口部で露出している配線4の表面
に、ニッケルメッキ層を設け、そのニッケルメッキ層の
表面に、金メッキ層を設けてもかまわない。
As shown in FIG. 10, a protective film 5 is formed by using a photosensitive resin to protect the wiring 4 and opening the portion where the electronic component is to be mounted by exposure and development. A nickel plating layer may be provided on the surface of the wiring 4 exposed at the opening of the protective film 5, and a gold plating layer may be provided on the surface of the nickel plating layer.

【0023】その後、図1に示すように、抵抗、ダイオ
ード、トランジスタ、ICなどの電子部品7をハンダや
導電接着剤などの接続材料6を用いて、保護膜5の開口
部で露出している配線4と電気的接続を行う。
Thereafter, as shown in FIG. 1, electronic components 7 such as resistors, diodes, transistors, and ICs are exposed at the openings of the protective film 5 using a connection material 6 such as solder or conductive adhesive. Electrical connection with the wiring 4 is performed.

【0024】上記記載の方法により回路基板を形成する
ことで、従来技術で使用していたスルーホール9を形成
することなく、微少な面積で母材基板8の上下面に形成
した配線4同士を導通させることができ、回路基板の高
密度化が可能となった。
By forming the circuit board by the above-described method, the wires 4 formed on the upper and lower surfaces of the base material substrate 8 with a small area can be formed without forming the through holes 9 used in the prior art. The conduction can be achieved, and the density of the circuit board can be increased.

【0025】[0025]

【発明の効果】以上の説明で明らかなように、本発明で
は、棒状の金属が絶縁樹脂を介して規則的に配置した母
材基板を用いており、母材基板の上下面に形成した配線
を微少な棒状の金属により導通させているので、スルー
ホールを用いた場合より回路基板の高密度化が可能とな
り、回路基板の面積を小さくすることができる。
As is apparent from the above description, in the present invention, the base material substrate in which rod-shaped metals are regularly arranged via the insulating resin is used, and the wiring formed on the upper and lower surfaces of the base material substrate is used. Is made conductive by a fine rod-shaped metal, so that the density of the circuit board can be increased and the area of the circuit board can be reduced as compared with the case where through holes are used.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例における回路基板を示す断面図
である。
FIG. 1 is a sectional view showing a circuit board according to an embodiment of the present invention.

【図2】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 2 is a cross-sectional view illustrating a method of manufacturing a circuit board according to an embodiment of the present invention.

【図3】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 3 is a cross-sectional view illustrating a method of manufacturing a circuit board according to an embodiment of the present invention.

【図4】本発明の実施例における回路基板の製造方法を
示す斜視図である。
FIG. 4 is a perspective view illustrating a method for manufacturing a circuit board according to an embodiment of the present invention.

【図5】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 5 is a cross-sectional view illustrating a method of manufacturing a circuit board according to an embodiment of the present invention.

【図6】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 6 is a sectional view illustrating a method of manufacturing a circuit board according to an embodiment of the present invention.

【図7】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 7 is a cross-sectional view illustrating a method of manufacturing a circuit board according to an embodiment of the present invention.

【図8】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 8 is a cross-sectional view illustrating a method of manufacturing a circuit board according to an embodiment of the present invention.

【図9】本発明の実施例における回路基板の製造方法を
示す断面図である。
FIG. 9 is a cross-sectional view illustrating a method for manufacturing a circuit board according to an embodiment of the present invention.

【図10】本発明の実施例における回路基板の製造方法
を示す断面図である。
FIG. 10 is a sectional view illustrating the method of manufacturing the circuit board according to the embodiment of the present invention.

【図11】従来例における回路基板の構造を示す断面図
である。
FIG. 11 is a cross-sectional view showing a structure of a circuit board in a conventional example.

【符号の説明】[Explanation of symbols]

1 金属 2 絶縁樹脂 3 絶縁膜 4 配線 5 保護膜 6 接続材料 7 電子部品 8 母材基板 9 スルーホール 10 櫛歯部 11 台座部 12 基台基板 13 接着材料 DESCRIPTION OF SYMBOLS 1 Metal 2 Insulating resin 3 Insulating film 4 Wiring 5 Protective film 6 Connection material 7 Electronic component 8 Base material substrate 9 Through hole 10 Comb part 11 Base part 12 Base substrate 13 Adhesive material

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H05K 3/40 H01L 23/12 N 3/42 620 23/52 B ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H05K 3/40 H01L 23/12 N 3/42 620 23/52 B

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 絶縁樹脂を介して複数の金属を配列した
母材基板を備え、前記母材基板の片面上、あるいは両面
上には、前記金属の端面に開口部を有する絶縁膜を備
え、前記開口部には配線を備えていることを特徴とする
回路基板。
1. A base material substrate in which a plurality of metals are arranged via an insulating resin, and an insulating film having an opening at an end surface of the metal is provided on one side or both sides of the base material substrate, A circuit board, wherein the opening is provided with wiring.
【請求項2】 台座部上に複数の金属を並べて配置した
基台基板を用意する工程と、前記複数の金属間に絶縁樹
脂を設置する工程と、前記基台基板から台座部を除去
し、母材基板を形成する工程と、母材基板における金属
の端面に開口部を残して絶縁膜を形成する工程と、開口
部に配線となる金属膜を形成する工程とを有する回路基
板の製造方法。
2. A step of preparing a base substrate having a plurality of metals arranged side by side on a pedestal portion, a step of installing an insulating resin between the plurality of metals, removing the pedestal portion from the base substrate, A method of manufacturing a circuit board, comprising: a step of forming a base material substrate; a step of forming an insulating film while leaving an opening at a metal end surface in the base material substrate; and a step of forming a metal film serving as a wiring in the opening. .
【請求項3】 前記基台基板を用意する工程では、金属
ブロックを用意し、台座部となる箇所を除いた位置に複
数の溝を形成することによって、台座部上に複数の金属
を並べて配置した基台基板を形成することを特徴とする
請求項2に記載の回路基板の製造方法。
3. In the step of preparing the base substrate, a metal block is prepared, and a plurality of grooves are formed at positions other than a portion serving as a pedestal portion, so that a plurality of metals are arranged side by side on the pedestal portion. The method for manufacturing a circuit board according to claim 2, wherein the base board is formed.
【請求項4】 前記基台基板を用意する工程では、台座
部上に接着材料を介して複数の金属を貼り付け、台座部
上に複数の金属を並べて配置した金属基板を形成するこ
とを特徴とする請求項2に記載の回路基板の製造方法。
4. In the step of preparing the base substrate, a plurality of metals are attached to the pedestal via an adhesive material, and a metal substrate in which the plurality of metals are arranged and arranged on the pedestal is formed. The method for manufacturing a circuit board according to claim 2.
【請求項5】 前記母材基板における金属の端面に開口
部を残して絶縁膜を形成する工程で用いた絶縁膜は、感
光性樹脂であることを特徴とする請求項2に記載の回路
基板の製造方法。
5. The circuit board according to claim 2, wherein the insulating film used in the step of forming the insulating film while leaving an opening at the end face of the metal in the base material substrate is a photosensitive resin. Manufacturing method.
【請求項6】 前記開口部に配線となる金属膜を形成す
る工程では、絶縁膜上に触媒金属を吸着させ、無電解メ
ッキ液に浸漬して、配線となる金属膜を形成することを
行う請求項2に記載の回路基板の製造方法。
6. In the step of forming a metal film to be a wiring in the opening, a catalyst metal is adsorbed on an insulating film and immersed in an electroless plating solution to form a metal film to be a wiring. A method for manufacturing a circuit board according to claim 2.
【請求項7】 前記開口部に配線となる金属膜を形成す
る工程では、金属の端面側の全面に金属膜を形成した
後、前記金属膜をエッチングして、配線を形成する工程
を有することを特徴とする請求項2に記載の回路基板の
製造方法。
7. The step of forming a metal film serving as a wiring in the opening includes a step of forming a metal film on the entire end face side of the metal and then etching the metal film to form a wiring. 3. The method for manufacturing a circuit board according to claim 2, wherein:
【請求項8】 前記配線上に保護膜を形成する工程を有
することを特徴とする請求項2に記載の回路基板の製造
方法。
8. The method according to claim 2, further comprising a step of forming a protective film on the wiring.
JP2001084199A 2001-03-23 2001-03-23 Circuit board and manufacturing method thereof Pending JP2002289998A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001084199A JP2002289998A (en) 2001-03-23 2001-03-23 Circuit board and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001084199A JP2002289998A (en) 2001-03-23 2001-03-23 Circuit board and manufacturing method thereof

Publications (1)

Publication Number Publication Date
JP2002289998A true JP2002289998A (en) 2002-10-04

Family

ID=18939904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001084199A Pending JP2002289998A (en) 2001-03-23 2001-03-23 Circuit board and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP2002289998A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007294863A (en) * 2006-03-31 2007-11-08 Sanyo Electric Co Ltd Circuit apparatus
JP2009289964A (en) * 2008-05-29 2009-12-10 Aoi Electronics Co Ltd Through wiring board, multilayer through wiring board, method of manufacturing through wiring board, and method of manufacturing multilayer through wiring board
WO2012133380A1 (en) * 2011-03-28 2012-10-04 株式会社村田製作所 Circuit board, and method for manufacturing circuit board
JP2014179411A (en) * 2013-03-14 2014-09-25 Shinko Electric Ind Co Ltd Wiring board and method of manufacturing the same
JP2020092152A (en) * 2018-12-04 2020-06-11 板橋精機株式会社 Printed circuit board and manufacturing method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007294863A (en) * 2006-03-31 2007-11-08 Sanyo Electric Co Ltd Circuit apparatus
JP2009289964A (en) * 2008-05-29 2009-12-10 Aoi Electronics Co Ltd Through wiring board, multilayer through wiring board, method of manufacturing through wiring board, and method of manufacturing multilayer through wiring board
WO2012133380A1 (en) * 2011-03-28 2012-10-04 株式会社村田製作所 Circuit board, and method for manufacturing circuit board
JP2014135502A (en) * 2011-03-28 2014-07-24 Murata Mfg Co Ltd Circuit board manufacturing method and circuit board
JPWO2012133380A1 (en) * 2011-03-28 2014-07-28 株式会社村田製作所 Circuit board and circuit board manufacturing method
JP2014179411A (en) * 2013-03-14 2014-09-25 Shinko Electric Ind Co Ltd Wiring board and method of manufacturing the same
JP2020092152A (en) * 2018-12-04 2020-06-11 板橋精機株式会社 Printed circuit board and manufacturing method thereof

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