JP2002214073A

JP2002214073A - Scanning beam measuring device and measuring method

Info

Publication number: JP2002214073A
Application number: JP2001008924A
Authority: JP
Inventors: Tadahiro Kamijo; 直裕上条
Original assignee: Ricoh Co Ltd
Current assignee: Ricoh Co Ltd
Priority date: 2001-01-17
Filing date: 2001-01-17
Publication date: 2002-07-31
Anticipated expiration: 2021-01-17
Also published as: JP3920027B2

Abstract

(57)【要約】【課題】ドット点灯パターンの位置および間隔から走
査ビームの特徴量を検出可能な走査ビーム測定装置およ
び測定方法を提供する。【解決手段】走査光学系１からの走査ビームを入射
し、受光側へ射出して結像する結像レンズ７と、２次元
の受光面を持ち、走査ビームを取得するＣＣＤエリアセ
ンサ８と、これらを走査光学系１の主走査方向に移動す
る駆動ステージ６と、走査ビームの点滅を制御するとと
もに、走査ビームの特徴量を導出する制御部２０とを設
け、走査ビームをドットパターンで点灯し、ＣＣＤエリ
アセンサ８を移動しながら受光・取得した走査ビームの
画像から、ドット位置および隣接するドット間距離を求
めることで、走査光学系１の性能を全走査線で評価す
る。 (57) [Problem] To provide a scanning beam measuring apparatus and a measuring method capable of detecting a feature amount of a scanning beam from a position and an interval of a dot lighting pattern. An imaging lens (7) that receives a scanning beam from a scanning optical system (1), emits it to a light receiving side and forms an image, a CCD area sensor (8) having a two-dimensional light receiving surface and acquiring a scanning beam; A drive stage 6 for moving these in the main scanning direction of the scanning optical system 1 and a control unit 20 for controlling blinking of the scanning beam and deriving a characteristic amount of the scanning beam are provided, and the scanning beam is turned on in a dot pattern. The position of the dot and the distance between adjacent dots are obtained from the image of the scanning beam received and acquired while moving the CCD area sensor 8 to evaluate the performance of the scanning optical system 1 for all scanning lines.

Description

DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、複写機、プリンタ
などに使用されている走査型の書込みユニットの検査、
検証で、検査ビームを測定してビーム特性を取得する走
査ビーム測定装置および測定方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection of a scanning type writing unit used in a copying machine, a printer and the like.
The present invention relates to a scanning beam measuring apparatus and a measuring method for measuring an inspection beam and acquiring a beam characteristic in verification.

【０００２】[0002]

【従来の技術】複写機、プリンタなどに使用されている
走査型の書込みユニットにおいて、走査光学系は電子写
真方式を応用した画像製品などの主要機構であって、画
像形成のための重要な構成ユニットである。特に、前述
の書込みユニットを構成する個々の光学素子を透過、反
射してくる光の走査面での光量、形状、挙動は、形成さ
れる画像の品質に大きな影響を与える。書込みユニット
の走査光学系においては、多面鏡を回転して光源からの
単一若しくは複数ビームを走査する走査形態が一般的で
ある。前記走査光学系の走査面での結像状態は、走査光
学系の焦点位置が直線状に並ぶことが理想的であるが、
実際は像面湾曲や走査ビームの非点収差などが生じやす
く、走査光学系中の光学素子の仕様、構成、ばらつきや
組付け誤差などで走査線に曲りが生じる。走査線曲りが
検出された場合には、画素ずれがあったり、あるいは像
面湾曲が生じたりして、走査ビームのドット間距離測定
精度がばらついてしまう。ここで、ドット間距離が大き
くなるか、あるいは小さくなる場合は、画像のその部分
に縦スジが生じる原因の一つとなり得る。2. Description of the Related Art In a scanning type writing unit used in a copying machine, a printer, or the like, a scanning optical system is a main mechanism of an image product or the like to which an electrophotographic system is applied. Unit. In particular, the amount, shape, and behavior of light transmitted and reflected by the individual optical elements constituting the writing unit on the scanning surface greatly affect the quality of a formed image. In a scanning optical system of a writing unit, a scanning mode in which a polygon mirror is rotated to scan a single beam or a plurality of beams from a light source is generally used. The imaging state on the scanning surface of the scanning optical system, ideally, the focal position of the scanning optical system is arranged in a straight line,
Actually, curvature of field, astigmatism of the scanning beam, and the like are likely to occur, and the scanning line is bent due to the specification, configuration, variation, and assembly error of the optical element in the scanning optical system. When the scanning line bending is detected, the accuracy of measuring the distance between dots of the scanning beam varies due to a pixel shift or a curvature of field. Here, when the distance between the dots becomes larger or smaller, this may be one of the causes of the occurrence of vertical stripes in that portion of the image.

【０００３】このような走査光学系を検査、検証する
際、検査および検証装置を主副両走査方向や走査光学径
の光軸方向へ移動する機構は省くことのできないもので
あるが、検出対象の光学特性と検出光学系の光学特性は
分離して把握する必要がある。例えば、走査ビームの走
査線曲りと検出光学系の受光面との間に相対角度が生じ
ると、主走査方向の隣接ビーム間隔、走査ビームのドッ
ト位置を正確に導出することができない。また、複数光
源を有する場合あるいはカラープリンタなどでは、画素
ずれへの影響が懸念される。さらに、隣接ドット間距離
が正確に検出できなければ、縦スジ画像の原因の一つで
あるドット位置ばらつきが保証できない。When inspecting and verifying such a scanning optical system, a mechanism for moving the inspection and verification apparatus in both the main and sub scanning directions and the optical axis direction of the scanning optical diameter cannot be omitted. It is necessary to grasp the optical characteristics of the optical system and the optical characteristics of the detection optical system separately. For example, if there is a relative angle between the scanning line bending of the scanning beam and the light receiving surface of the detection optical system, it is impossible to accurately derive the interval between adjacent beams in the main scanning direction and the dot position of the scanning beam. In the case of having a plurality of light sources or a color printer, there is a concern about the influence on the pixel shift. Further, if the distance between adjacent dots cannot be accurately detected, dot position variation, which is one of the causes of a vertical stripe image, cannot be guaranteed.

【０００４】このような問題に対処するため、走査線曲
りが生じていてもその影響を受けないビーム径検出方
法、走査ビーム位置を検出してその位置でビーム光量や
ビーム径を検出する方法、あるいは装置が提案されてい
る。In order to cope with such a problem, a method of detecting a beam diameter which is not affected even when a scanning line is bent, a method of detecting a scanning beam position and detecting a beam light amount and a beam diameter at the position, Alternatively, a device has been proposed.

【０００５】例えば、特開平５−３４６３１０号公報に
開示された技術では、走査ビームを対象に副走査方向の
間隔を調整可能とした１組のセンサとビーム全体の量を
取得できるセンサとを備え、これらのセンサの検知情報
から副走査の径を検出している。For example, the technique disclosed in Japanese Patent Application Laid-Open No. 5-346310 is provided with a set of sensors capable of adjusting the interval in the sub-scanning direction for a scanning beam and a sensor capable of acquiring the entire beam amount. The diameter of the sub-scan is detected from the detection information of these sensors.

【０００６】また、特開平９−４３５２７号公報に開示
された技術では、副走査方向のビーム位置を検出するビ
ーム位置センサにより走査ビームの走査位置を検出し、
その位置で光量センサ、ビーム径センサにより走査ビー
ムの測定評価を実施している。In the technique disclosed in Japanese Patent Application Laid-Open No. 9-43527, a scanning position of a scanning beam is detected by a beam position sensor for detecting a beam position in a sub-scanning direction.
At that position, the measurement and evaluation of the scanning beam are performed by the light amount sensor and the beam diameter sensor.

【０００７】[0007]

【発明が解決しようとする課題】しかしながら、前記特
開平５−３４６３１０号公報に開示された技術では、副
走査方向の幅を可変としたスリットを設定し、走査方向
が曲がっていても、スリットを通過する際の光量比より
副走査方向のビーム径を検出することを可能としている
が、ビーム径は微小なものであり、ビーム径と同程度の
間隔のスリットでは、走査線自体の曲りが大きい場合に
ビームを取得しきれない。また、スリット自体が角度を
持つ場合には、検出精度の信頼性に支障を来すという問
題がある。However, according to the technique disclosed in Japanese Patent Application Laid-Open No. 5-346310, a slit having a variable width in the sub-scanning direction is set, and even if the scanning direction is bent, the slit is formed. Although it is possible to detect the beam diameter in the sub-scanning direction from the light amount ratio when passing, the beam diameter is very small, and the scanning line itself has a large bend in slits with the same interval as the beam diameter. If you can not get the beam. Further, when the slit itself has an angle, there is a problem that reliability of detection accuracy is hindered.

【０００８】また、前記特開平９−４３５２７号公報に
開示された技術でも、ビーム径センサと検出対象光学系
との相対角度がある場合、微小領域での走査線曲り、角
度によって正確なドット間距離が検出できない。In the technique disclosed in Japanese Patent Application Laid-Open No. 9-43527, if there is a relative angle between the beam diameter sensor and the optical system to be detected, the scanning line bends in a minute area, and an accurate dot-to-dot difference is determined by the angle. Distance cannot be detected.

【０００９】本発明の目的は、このような問題点を改善
し、ドット点灯パターンの位置および間隔から走査ビー
ムの特徴量を検出可能な走査ビーム測定装置および測定
方法を提供することにある。An object of the present invention is to improve such a problem and to provide a scanning beam measuring apparatus and a measuring method capable of detecting a characteristic amount of a scanning beam from the positions and intervals of a dot lighting pattern.

【００１０】[0010]

【課題を解決するための手段】請求項１に記載の発明
は、ビーム走査によって走査光学系の検査、検証を行な
う走査ビーム測定装置であって、前記走査光学系からの
走査ビームを入射して結像するための結像手段と、２次
元の受光面を持ち、前記結像手段からの走査ビームを受
光するビーム受光手段と、前記結像手段および前記ビー
ム受光手段を走査光学系の主走査方向に移動する主走査
方向移動手段と、走査ビームの点滅を制御する制御手段
と、前記ビーム受光手段で取得した走査ビームの特徴量
を導出する特徴量導出手段とを有することに特徴があ
る。According to a first aspect of the present invention, there is provided a scanning beam measuring apparatus for inspecting and verifying a scanning optical system by beam scanning, wherein a scanning beam from the scanning optical system is incident. Image forming means for forming an image, beam receiving means having a two-dimensional light receiving surface and receiving a scanning beam from the image forming means, and main scanning of the image forming means and the beam light receiving means by a scanning optical system It is characterized by comprising a main scanning direction moving means for moving in the direction, a control means for controlling blinking of the scanning beam, and a feature quantity deriving means for deriving the feature quantity of the scanning beam acquired by the beam receiving means.

【００１１】走査ビームの点滅を制御して所定のドット
点灯パターンを設定しながら、対物レンズなどの結像手
段やＣＣＤエリアセンサなどのビーム受光手段を主走査
方向に移動させ、走査ビームの画像よりドット位置やド
ット間距離などを検出することで、走査光学系の走査ビ
ームの特徴量を全走査面で検出できることとなる。[0011] While controlling the blinking of the scanning beam and setting a predetermined dot lighting pattern, the imaging means such as an objective lens and the beam receiving means such as a CCD area sensor are moved in the main scanning direction. By detecting the dot position, the distance between the dots, and the like, the characteristic amount of the scanning beam of the scanning optical system can be detected on the entire scanning surface.

【００１２】請求項２に記載の発明は、請求項１に記載
の走査ビーム測定装置を用いた走査ビーム測定方法であ
って、走査ビームを一定または可変のドットパターンで
点滅させる点滅工程と、前記結像手段で前記走査ビーム
を結像させる結像工程と、前記ビーム受光手段で前記走
査ビームを受光する受光工程と、受光した前記走査ビー
ムの画像を格納する格納工程と、格納した前記走査ビー
ムの画像よりドット位置を検出する位置検出工程と、隣
接するドット間距離を導出する距離導出工程とを有する
ことに特徴がある。According to a second aspect of the present invention, there is provided a scanning beam measuring method using the scanning beam measuring apparatus according to the first aspect, wherein a blinking step of blinking a scanning beam in a constant or variable dot pattern is provided. An imaging step of forming an image of the scanning beam by an imaging unit; a light receiving step of receiving the scanning beam by the beam receiving unit; a storing step of storing an image of the received scanning beam; And a distance deriving step of deriving a distance between adjacent dots.

【００１３】走査光学系において、走査ビームの画像よ
りドット位置を検出し、さらに隣接するドット間距離を
導出することで、縦スジ画像の原因の一つであるドット
間距離のばらつきや画素ずれを生じる原因の一つである
走査線ばらつきを検出できることとなる。In a scanning optical system, a dot position is detected from an image of a scanning beam, and a distance between adjacent dots is derived, so that a variation in a distance between dots and a pixel shift which are one of causes of a vertical stripe image are eliminated. Scan line variation, which is one of the causes, can be detected.

【００１４】請求項３に記載の発明は、請求項１に記載
の走査ビーム測定装置を用いた走査ビーム測定方法であ
って、走査ビームを一定または可変のドットパターンで
点滅させる点滅工程と、前記結像手段で前記走査ビーム
を結像させる結像工程と、前記ビーム受光手段で前記走
査ビームを受光する受光工程と、受光した前記走査ビー
ムの画像を格納する格納工程と、格納した前記走査ビー
ムの画像よりドット位置を検出する位置検出工程と、前
記ドット位置から第１の近似直線を導出する第１近似直
線導出工程と、前記走査ビームの走査線が持つ角度を検
出する角度検出工程と、前記ビーム受光手段を移動しな
がら、１ドットまたは複数ドットの副走査方向位置と前
記ビーム受光手段の移動距離を検出する位置／距離検出
工程と、前記ビーム受光手段の移動幅においてドットの
副走査方向の位置を第２の直線に近似する第２近似直線
導出工程と、前記走査ビームの走査線が持つ角度から第
２の近似直線がもつ角度を差し引く減算工程とを有する
ことに特徴がある。According to a third aspect of the present invention, there is provided a scanning beam measuring method using the scanning beam measuring apparatus according to the first aspect, wherein a blinking step of blinking a scanning beam in a constant or variable dot pattern is provided. An imaging step of forming an image of the scanning beam by an imaging unit; a light receiving step of receiving the scanning beam by the beam receiving unit; a storing step of storing an image of the received scanning beam; A position detection step of detecting a dot position from the image, a first approximate straight line derivation step of deriving a first approximate straight line from the dot position, and an angle detection step of detecting an angle of a scanning line of the scanning beam, A position / distance detecting step of detecting a position of one dot or a plurality of dots in the sub-scanning direction and a moving distance of the beam receiving means while moving the beam receiving means; A second approximate straight line deriving step of approximating the position of the dot in the sub-scanning direction to a second straight line in the movement width of the light receiving means, and subtracting the angle of the second approximate straight line from the angle of the scanning line of the scanning beam; And a process.

【００１５】前記ドット位置に基づく第１の近似直線に
よって走査ビームの走査線がもつ第１の角度を求め、前
記第２の直線によって検出光学系の傾き（水平方向の傾
き）を示す第２の角度を求め、第１の角度から第２の角
度を減算することで、ＣＣＤエリアセンサなどのビーム
受光手段を含む検出光学系と走査光学系との相対角度を
除去し、検出光学系の位置による傾きを補正する。こう
して、走査光学系の主走査方向に対する走査ビームの走
査線ばらつきを検出できることとなる。A first angle of the scanning line of the scanning beam is obtained by a first approximate straight line based on the dot position, and a second angle indicating a tilt (horizontal tilt) of the detection optical system is obtained by the second straight line. Obtaining the angle and subtracting the second angle from the first angle removes the relative angle between the detection optical system including the beam receiving means such as a CCD area sensor and the scanning optical system, and determines the angle based on the position of the detection optical system. Correct the tilt. In this way, it is possible to detect the scanning line variation of the scanning beam in the main scanning direction of the scanning optical system.

【００１６】請求項４に記載の発明は、請求項３におい
て、前記ビーム受光手段の位置による高さを検出する高
さ検出工程と、前記ビーム受光手段を走査ビームの走査
方向に移動する移動工程とを有することに特徴がある。According to a fourth aspect of the present invention, in the third aspect, a height detecting step of detecting a height based on a position of the beam receiving means and a moving step of moving the beam receiving means in a scanning direction of a scanning beam. It is characterized by having

【００１７】ＣＣＤエリアセンサなどのビーム受光手段
の高さとともに、前記ビーム受光手段を含む検出光学系
と走査光学系との相対角度を検出しながら、前記ビーム
受光手段を走査ビームの走査方向に移動させることで、
走査光学系の全走査幅で走査線ばらつきを検出できるこ
ととなる。The beam receiving means is moved in the scanning direction of the scanning beam while detecting the height of the beam receiving means such as a CCD area sensor and the relative angle between the detection optical system including the beam receiving means and the scanning optical system. By letting
Scanning line variations can be detected over the entire scanning width of the scanning optical system.

【００１８】請求項５に記載の発明は、請求項４におい
て、前記ビーム受光手段の位置による高さを複数箇所で
検出し、複数箇所の高さデータより前記ビーム受光手段
の光軸周りの回転角度を検出し、前記ビーム受光手段の
角度を差し引くことにより、前記ビーム受光手段と走査
ビームを用いた走査光学系との相対角度を補正し、走査
ビームの走査線ばらつきを検出することに特徴がある。According to a fifth aspect of the present invention, in the fourth aspect, the height of the beam receiving means is detected at a plurality of locations at a plurality of locations, and the rotation of the beam receiving means around the optical axis is obtained from the height data at the plurality of locations. By detecting the angle and subtracting the angle of the beam receiving means, the relative angle between the beam receiving means and the scanning optical system using the scanning beam is corrected, and the variation in the scanning line of the scanning beam is detected. is there.

【００１９】ＣＣＤエリアセンサなどのビーム受光手段
の光軸周りの回転角度（ＣＣＤエリアセンサを搭載した
駆動ステージの水平方向の傾き）を検出し、全走査幅で
前記ビーム受光手段の傾き角度を差し引くことにより、
検出光学系と走査光学系の相対的傾きを除去し、本来の
主走査方向の走査線ばらつきを検出できることとなる。The rotation angle of the beam receiving means such as a CCD area sensor around the optical axis (horizontal inclination of the drive stage equipped with the CCD area sensor) is detected, and the inclination angle of the beam receiving means is subtracted over the entire scanning width. By doing
By removing the relative inclination between the detection optical system and the scanning optical system, it is possible to detect the original scanning line variation in the main scanning direction.

【００２０】請求項６に記載の発明は、請求項３〜５の
いずれかにおいて、前記ビーム受光手段の角度が零とな
る方向を主走査方向として、各ドットの位置から主走査
方向の距離を検出し、走査ビームの主走査方向の隣接ド
ット間距離を検出することに特徴がある。According to a sixth aspect of the present invention, in any one of the third to fifth aspects, the direction in which the angle of the beam receiving means is zero is defined as the main scanning direction, and the distance in the main scanning direction from the position of each dot is determined. It is characterized by detecting the distance between adjacent dots in the main scanning direction of the scanning beam.

【００２１】検出光学系の角度と走査ビームの近似直線
の角度を差し引くことで、ＣＣＤエリアセンサなどのビ
ーム受光手段と主走査方向の角度が零となるように設定
し、各ドット位置から主走査方向の距離を検出すること
で、検出光学系と走査光学系の相対的傾きを除去し、縦
スジ画像の発生原因の一つである、主走査方向における
隣接ドット間距離を検出できることとなる。By subtracting the angle of the detection optical system and the angle of the approximate straight line of the scanning beam, the angle in the main scanning direction with the beam receiving means such as a CCD area sensor is set to zero, and the main scanning is started from each dot position. By detecting the distance in the direction, the relative inclination between the detection optical system and the scanning optical system is removed, and the distance between adjacent dots in the main scanning direction, which is one of the causes of the generation of a vertical stripe image, can be detected.

【００２２】請求項７に記載の発明は、請求項３〜５の
いずれかにおいて、前記ドットパターンを一定値に固定
して点灯し、前記ビーム受光手段の受光面両端の副走査
方向の光量に関して最明位置を検出し、最後列の光量分
布の最明位置が移動後の最前列の最明位置高さになるま
で前記ビーム受光手段を移動することにより、全走査幅
をつなぐことに特徴がある。According to a seventh aspect of the present invention, in any one of the third to fifth aspects, the dot pattern is lit with the dot pattern fixed at a constant value, and the light amount in the sub-scanning direction at both ends of the light receiving surface of the beam light receiving means. By detecting the brightest position and moving the beam receiving means until the brightest position of the light amount distribution of the last row becomes the brightest position height of the front row after the movement, the entire scanning width is connected. is there.

【００２３】ドット点灯パターンを一定として検出光学
系を移動し、輝線のみの画像を取得して、前記最後列の
光量分布の最明位置が移動後の最前列の最明位置高さに
なるまで前記ビーム受光手段を移動することで、前記ビ
ーム受光手段の移動に伴う位置ずれを補正し、全走査幅
での検出データをつなぐようにできることとなる。The detection optical system is moved while keeping the dot lighting pattern constant, an image of only the bright line is acquired, and the brightest position of the light quantity distribution in the last row becomes the brightest position height of the front row after the movement. By moving the beam receiving means, it is possible to correct a positional shift due to the movement of the beam receiving means, and to connect the detection data over the entire scanning width.

【００２４】請求項８に記載の発明は、請求項３〜５の
いずれかにおいて、前記ドットパターンを一定値に固定
して点灯し、前記ビーム受光手段の受光面両端の副走査
方向の光量に関して重心位置を検出し、最後列の光量分
布の重心位置が移動後の最前列の重心位置高さになる位
置まで前記ビーム受光手段を移動することにより、全走
査幅をつなぐことに特徴がある。According to an eighth aspect of the present invention, in any one of the third to fifth aspects, the dot pattern is turned on with the dot pattern fixed at a fixed value, and the light quantity in the sub-scanning direction at both ends of the light receiving surface of the beam receiving means. It is characterized in that the entire scanning width is connected by detecting the position of the center of gravity and moving the beam receiving means to a position where the position of the center of gravity of the light quantity distribution in the last row becomes the height of the center of gravity of the front row after the movement.

【００２５】副走査方向の光量分布にばらつきがある場
合には、前記最後列の光量分布の重心位置が移動後の最
前列の重心位置高さになる位置まで前記ビーム受光手段
を移動することで、前記ビーム受光手段の移動に伴う位
置ずれを補正し、受光ばらつきを低減して全走査幅での
検出データをつなぐようにできることとなる。If there is a variation in the light quantity distribution in the sub-scanning direction, the beam receiving means is moved to a position where the center of gravity of the light quantity distribution in the last row becomes the height of the center of gravity of the front row after the movement. In addition, it is possible to correct the positional shift due to the movement of the beam receiving unit, reduce the variation in the received light, and connect the detection data over the entire scanning width.

【００２６】請求項９に記載の発明は、請求項８におい
て、前記最前列から最後列まで、各列の重心位置を主走
査方向につないで重心位置曲線を求め、最後列の光量分
布の重心位置高さを重心位置曲線が横切る回数を計数
し、最後列の光量分布の重心位置が移動後の最前列の重
心位置高さになる位置まで前記ビーム受光手段を移動す
ることにより、全走査幅をつなぐことに特徴がある。According to a ninth aspect of the present invention, in the eighth aspect, a barycentric position curve is obtained by connecting the barycentric positions of the respective columns from the front row to the last row in the main scanning direction, and the barycenter of the light quantity distribution of the last row is obtained. By counting the number of times that the barycentric position curve crosses the position height, the beam receiving means is moved to a position where the barycentric position of the light quantity distribution in the last row becomes the barycentric position height of the front row after the movement, thereby obtaining the entire scanning width. There is a feature in connecting.

【００２７】全走査幅での検出データをつなぐために、
この検出データの基準位置を決定する際、前記最後列の
光量分布の重心位置が移動後の最前列の重心位置高さに
なる位置まで、ＣＣＤエリアセンサなどのビーム受光手
段を移動することで、前記ビーム受光手段の位置データ
を同一高さの別のデータと誤認識することなく、正確に
位置決めできることとなる。In order to connect the detection data in the entire scanning width,
When determining the reference position of this detection data, by moving the beam receiving means such as a CCD area sensor to a position where the center of gravity of the light amount distribution of the last row becomes the height of the center of gravity of the front row after the movement, Accurate positioning can be achieved without erroneously recognizing the position data of the beam receiving means as another data of the same height.

【００２８】請求項１０に記載の発明は、請求項３〜５
のいずれかにおいて、前記ビーム受光手段の受光面内の
最初のドットが最後尾となる距離だけ、前記ビーム受光
手段を移動させ、重複したドット位置を基準にして検出
データを全走査幅でつなぐことに特徴がある。[0028] The invention described in claim 10 is the invention according to claims 3 to 5.
In any one of the above, the beam receiving means is moved by a distance such that the first dot in the light receiving surface of the beam receiving means is at the end, and the detection data is connected with the entire scanning width based on the overlapping dot position. There is a feature.

【００２９】全走査幅での検出データをつなぐ際、走査
ミラーの回転むらなどで生じる移動前と移動後のビーム
位置のオフセットや、ＣＣＤエリアセンサなどのビーム
受光手段を移動する機構に位置決め精度ばらつきがあっ
ても、ドット位置を基準としながら前記ビーム受光手段
を移動することで、高精度のデータつなぎができること
となる。When connecting the detection data over the entire scanning width, the offset of the beam position before and after the movement caused by the uneven rotation of the scanning mirror and the positioning accuracy variation due to the mechanism for moving the beam receiving means such as the CCD area sensor. Even if there is, by moving the beam receiving means with reference to the dot position, it is possible to connect data with high accuracy.

【００３０】請求項１１に記載の発明は、請求項１にお
いて、前記ビーム受光手段を高さ方向に移動する高さ方
向移動手段を備えたことに特徴がある。An eleventh aspect of the present invention is characterized in that, in the first aspect, a height direction moving means for moving the beam receiving means in a height direction is provided.

【００３１】走査ビームの走査線角度が大きく画面内か
ら外れても、つなぎ位置を基準としてＣＣＤエリアセン
サなどのビーム受光手段を副走査方向に移動すること
で、走査ビームを受光し、その特徴量を検出できること
となる。Even if the scanning line angle of the scanning beam is large and deviates from the screen, the scanning beam is received by moving the beam receiving means such as a CCD area sensor in the sub-scanning direction based on the connection position, and the characteristic amount thereof is obtained. Can be detected.

【００３２】[0032]

【発明の実施の形態】以下、本発明の実施の一形態を図
面を用いて説明する。［第１の実施形態］図１に、本発明の第１の実施の形態
に係る走査ビーム測定装置の構成を示す。本実施形態
は、請求項１、２に係る発明の一実施形態である。An embodiment of the present invention will be described below with reference to the drawings. [First Embodiment] FIG. 1 shows a configuration of a scanning beam measuring apparatus according to a first embodiment of the present invention. This embodiment is an embodiment of the invention according to claims 1 and 2.

【００３３】図１において、走査光学系１には、レーザ
ビーム（走査ビーム）を照射するためのレーザ光源（Ｌ
Ｄユニット）２、回転可能な多面鏡（ポリゴンミラー）
３、Ｆθ特性をもつ結像レンズ４などを備え、ＬＤユニ
ット２からのレーザビームをポリゴンミラー３で偏向
し、結像レンズ４で収束したレーザビーム（走査ビー
ム）を走査面５に向けて射出するように構成されてい
る。In FIG. 1, a scanning optical system 1 has a laser light source (L) for irradiating a laser beam (scanning beam).
D unit) 2, rotatable polygon mirror (polygon mirror)
3. An imaging lens 4 having Fθ characteristics is provided. A laser beam from the LD unit 2 is deflected by the polygon mirror 3 and a laser beam (scanning beam) converged by the imaging lens 4 is emitted toward the scanning surface 5. It is configured to be.

【００３４】また、検出光学系２５には、前記ポリゴン
ミラー３からの走査ビームをＣＣＤエリアセンサ８に導
光する対物レンズ７、前記走査ビームを受光して位置情
報を検出可能なＣＣＤエリアセンサ８、このＣＣＤエリ
アセンサ８を主走査方向に移動するための駆動ステージ
（主走査方向駆動ステージ）６、この駆動ステージ６を
上下方向に移動するための昇降機構（図示せず）などを
備え、前記ＣＣＤエリアセンサ８に入射された走査ビー
ムを光電変換した後、光量信号として制御部２０に出力
するように構成されている。The detection optical system 25 includes an objective lens 7 for guiding the scanning beam from the polygon mirror 3 to the CCD area sensor 8, and a CCD area sensor 8 for receiving the scanning beam and detecting position information. A driving stage (main scanning direction driving stage) 6 for moving the CCD area sensor 8 in the main scanning direction, an elevating mechanism (not shown) for moving the driving stage 6 in the vertical direction, and the like. After the scanning beam incident on the CCD area sensor 8 is photoelectrically converted, it is output to the control unit 20 as a light amount signal.

【００３５】この制御部２０は、例えばＣＰＵ、ＲＡ
Ｍ、ＲＯＭ、入出力装置、通信装置、走査光学系１およ
び表示部３０とのインタフェース装置、増幅用アンプな
どで構成されたパーソナルコンピュータやワークステー
ションであって、ＣＣＤエリアセンサ８からの光量信号
を増幅入力して、副走査方向の走査ビーム位置における
光量とそのばらつき（走査ビームの特徴量）を求め、さ
らに表示部３０に対して表示制御信号を出力して副走査
方向の走査ビーム位置などを表示させるものである。ま
た、制御部２０は、ＬＤユニット２のＯＮ／ＯＦＦ（走
査ビームの点滅）を制御するとともに、ビーム走査と同
期をとりながらポリゴンミラー３用の駆動モータ（図示
せず）を所定のタイミングで駆動し、ポリゴンミラー３
を回転させる。The control unit 20 includes, for example, a CPU, RA
A personal computer or a workstation including an M, a ROM, an input / output device, a communication device, an interface device with the scanning optical system 1 and the display unit 30, and an amplifier for amplification. Amplification is input, the light quantity at the scanning beam position in the sub-scanning direction and its variation (the characteristic amount of the scanning beam) are obtained, and a display control signal is output to the display unit 30 to determine the scanning beam position in the sub-scanning direction. Is to be displayed. The control unit 20 controls ON / OFF (flashing of the scanning beam) of the LD unit 2 and drives a driving motor (not shown) for the polygon mirror 3 at a predetermined timing while synchronizing with beam scanning. And polygon mirror 3
To rotate.

【００３６】このような構成により、焦点位置を走査面
５に設定した対物レンズ７をＣＣＤエリアセンサ８に固
定し、駆動ステージ６により走査光学系１の主走査方向
へ移動することにより、走査ビームを画像データとして
取得し、走査光学系１の性能を全走査線で評価する。With such a configuration, the objective lens 7 whose focal position is set on the scanning surface 5 is fixed to the CCD area sensor 8, and is moved by the drive stage 6 in the main scanning direction of the scanning optical system 1. Is obtained as image data, and the performance of the scanning optical system 1 is evaluated for all scanning lines.

【００３７】次に、本実施形態の走査ビーム測定方法を
説明する。本実施形態の走査ビーム測定方法は、走査
光学系１で、前記走査ビームを所定のドットパターン
（一定あるいは可変）で点滅させる点滅工程と、結像レ
ンズ４によって前記走査ビームを結像する結像工程と、
前記走査ビームをＣＣＤエリアセンサ８で受光する受光
工程と、受光した前記走査ビームの画像を制御部２０で
格納する格納工程と、格納した前記走査ビームの画像に
基づき、制御部２０でドット位置を検出する位置検出工
程と、制御部２０で、隣接するドット間距離を導出する
距離導出工程とを有する。Next, the scanning beam measuring method of this embodiment will be described. In the scanning beam measuring method according to the present embodiment, the scanning optical system 1 blinks the scanning beam in a predetermined dot pattern (constant or variable), and forms an image by imaging the scanning beam by the imaging lens 4. Process and
A light receiving step of receiving the scanning beam by the CCD area sensor 8, a storing step of storing the received image of the scanning beam by the control unit 20, and a dot position by the control unit 20 based on the stored image of the scanning beam. The control unit 20 includes a position detecting step of detecting a position and a distance deriving step of deriving a distance between adjacent dots.

【００３８】具体的には、図２に示すように、制御部２
０で前述のＬＤユニット２をドットパターンで点灯させ
る。通常、ガウシアンビームの光量の定義は最明点の１
３．５％（＝１／ｅ²）以上の明るさ領域を基準とする
が、ドットパターンや走査光学系の欠陥などでビーム位
置にばらつきが生じることにより、隣接するビームと領
域が重複したり、または隣接するビームのサイドローブ
が影響してビーム領域全域を抽出することが困難な場合
があるため、ビーム領域をさらに明るい領域（例えば、
最明点の５０％〜８０％の領域）を抽出して、その抽出
した領域内で重心位置をドット位置とする（図中、▼で
示す）。前記重心位置（ドット位置）は、次式で表され
る。Ｘｇ＝∫ｘ×ｆ（ｘ、ｙ）／ｆ（ｘ、ｙ）ｄｘＹｇ＝∫ｙ×ｆ（ｘ、ｙ）／ｆ（ｘ、ｙ）ｄｙMore specifically, as shown in FIG.
At 0, the aforementioned LD unit 2 is turned on in a dot pattern. Normally, the definition of the light amount of a Gaussian beam is one of the brightest points.
A brightness region of 3.5% (= 1 / e ² ) or more is used as a reference. However, a beam position varies due to a dot pattern or a defect of a scanning optical system, so that an adjacent beam may overlap with a region. , Or because it may be difficult to extract the entire beam region due to the influence of side lobes of adjacent beams,
A region of 50% to 80% of the brightest point) is extracted, and the position of the center of gravity is set as a dot position in the extracted region (indicated by ▼ in the figure). The position of the center of gravity (dot position) is represented by the following equation. Xg = ∫x × f (x, y) / f (x, y) dx Yg = ∫y × f (x, y) / f (x, y) dy

【００３９】こうしてドット位置を求め、ビーム位置と
して主走査方向のドット間隔Ｓ１〜Ｓ４を検出する。ま
た、副走査方向のドット位置より平均座標９を検出し、
この副走査方向の平均座標９からのばらつきを検出す
る。In this manner, the dot positions are obtained, and dot intervals S1 to S4 in the main scanning direction are detected as beam positions. Also, the average coordinates 9 are detected from the dot positions in the sub-scanning direction,
The variation from the average coordinates 9 in the sub-scanning direction is detected.

【００４０】主走査方向の位置ずれについては、ドット
点灯パターンの最短クロックと回転多面鏡３の角速度、
走査光学系１の光学性能によって決まる走査面での走査
スピードとビーム径などによって仕様値が決まる。この
仕様値の公差をσ１とすると、Ｓｎ（ｎ＝１、２，３，４）＜σ１を満たしていることが条件となる。なお、副走査方向の
位置ずれについても、同様に前述の公差以下のばらつき
であることが条件となる。Regarding the displacement in the main scanning direction, the shortest clock of the dot lighting pattern, the angular velocity of the rotary polygon mirror 3,
The specification value is determined by the scanning speed on the scanning surface and the beam diameter determined by the optical performance of the scanning optical system 1. Assuming that the tolerance of this specification value is σ1, the condition is that Sn (n = 1, 2, 3, 4) <σ1 is satisfied. It is to be noted that the positional deviation in the sub-scanning direction also has a condition that the deviation is equal to or less than the above-described tolerance.

【００４１】［第２の実施形態］図３および図４に、本
発明の第２の実施の形態に係る検出光学系の傾きを検出
する方法を示す。本実施形態は、請求項３に係る発明の
一実施形態である。本実施形態の全体構成は、第１の実
施形態と同様であるため、図１を用いるとともに同一構
成には同一符号を付与して説明を省略する。[Second Embodiment] FIGS. 3 and 4 show a method for detecting the inclination of a detection optical system according to a second embodiment of the present invention. This embodiment is an embodiment of the third aspect of the present invention. Since the overall configuration of this embodiment is the same as that of the first embodiment, FIG. 1 is used and the same components are given the same reference numerals, and description thereof is omitted.

【００４２】本実施形態の走査ビーム測定方法は、走査
光学系１で、前記走査ビームを所定のドットパターン
（一定あるいは可変）で点滅させる点滅工程と、結像レ
ンズ４によって前記走査ビームを結像する結像工程と、
前記走査ビームをＣＣＤエリアセンサ８で受光する受光
工程と、受光した前記走査ビームの画像を制御部２０で
格納する格納工程と、格納した前記走査ビームの画像に
基づき、制御部２０でドット位置を検出する位置検出工
程と、制御部２０で、前記ドット位置から第１の近似直
線９ａを導出する第１近似直線導出工程と、制御部２０
で、前記走査ビームの走査線が持つ角度を検出する角度
検出工程と、前記昇降機構あるいは駆動ステージ６で、
ＣＣＤエリアセンサ８を移動しながら、制御部２０で、
１ドットまたは複数ドットの副走査方向位置とＣＣＤエ
リアセンサ８の移動距離を検出する位置／距離検出工程
と、制御部２０で、ＣＣＤエリアセンサ８の移動幅にお
いて副走査方向のドット位置から第２の近似直線１０を
導出する第２近似直線導出工程と、前記走査ビームの走
査線が持つ第１の角度から第２の近似直線１０がもつ第
２の角度を差し引く減算工程とを有する。According to the scanning beam measuring method of the present embodiment, the scanning optical system 1 blinks the scanning beam in a predetermined dot pattern (constant or variable), and forms an image of the scanning beam by the imaging lens 4. An imaging process,
A light receiving step of receiving the scanning beam by the CCD area sensor 8, a storing step of storing the received image of the scanning beam by the control unit 20, and a dot position by the control unit 20 based on the stored image of the scanning beam. A position detecting step of detecting, a first approximate straight line deriving step of deriving a first approximate straight line 9a from the dot position in the control unit 20, and a control unit 20
An angle detecting step of detecting an angle of a scanning line of the scanning beam, and the elevating mechanism or the driving stage 6,
While moving the CCD area sensor 8, the control unit 20
A position / distance detecting step of detecting the position of one or more dots in the sub-scanning direction and the moving distance of the CCD area sensor 8; And a subtraction step of subtracting the second angle of the second approximate straight line 10 from the first angle of the scanning line of the scanning beam.

【００４３】例えば、第１の実施形態に準じ、図３に示
すように、ＬＤユニット２をドットパターンで点灯さ
せ、前述のドット位置（前記重心位置）を検出する。さ
らに、主走査方向および副走査方向の各ドット位置の座
標より、最小自乗法などの手法を用い、ドット位置近似
直線９ａを導出する。続いて、図４に示すように、ドッ
トパターンの間隔を長く取り（Ｓ１、Ｓ２、Ｓ３、Ｓ４
＜Ｌ１、Ｌ２）、さらに、移動方向から一番遠いドット
のみを点灯させる。ここで、駆動ステージ６を移動して
いく際、ドットの座標変化から走査光学系１の変動要因
は無視して、受光面幅での検出光学系２５の傾きを反映
した近似直線（ステージ傾斜直線）１０のみを取得す
る。さらに、複数ドット点灯時の近似直線９ｂの角度
（第１の角度）から検出光学系２５の傾き直線（ステー
ジ傾斜直線）１０の角度（第２の角度）を差し引くこと
により、検出光学系２５の傾きを検出する。For example, according to the first embodiment, as shown in FIG. 3, the LD unit 2 is turned on in a dot pattern, and the above-described dot position (the center of gravity position) is detected. Further, a dot position approximate straight line 9a is derived from the coordinates of each dot position in the main scanning direction and the sub scanning direction by using a method such as the least square method. Subsequently, as shown in FIG. 4, the intervals between the dot patterns are made longer (S1, S2, S3, S4
<L1, L2) Further, only the dot farthest from the moving direction is turned on. Here, when moving the drive stage 6, the variation factor of the scanning optical system 1 is ignored due to the change in dot coordinates, and an approximation straight line reflecting the inclination of the detection optical system 25 at the light receiving surface width (stage inclination straight line) ) Acquire only 10. Further, the angle (second angle) of the inclination straight line (stage inclination straight line) 10 of the detection optical system 25 is subtracted from the angle (first angle) of the approximate straight line 9b when the plurality of dots are turned on, thereby obtaining the detection optical system 25. Detect tilt.

【００４４】［第３の実施形態］図５に、本発明の第３
の実施の形態に係る走査ビーム測定装置の要部構成を示
す。本実施形態は、請求項４に係る発明の一実施形態で
ある。なお、ミラー１２、ＣＣＤエリアセンサホルダ１
３、ミラー固定フレーム１１、距離センサ（測長器）１
５を除く構成は、第１の実施形態と概ね同様であるた
め、図１を用いるとともに同一構成には同一符号を付与
して説明を省略する。[Third Embodiment] FIG. 5 shows a third embodiment of the present invention.
1 shows a main configuration of a scanning beam measuring apparatus according to an embodiment. This embodiment is one embodiment of the invention according to claim 4. The mirror 12, the CCD area sensor holder 1
3. Mirror fixed frame 11, distance sensor (length measuring device) 1
Structures other than 5 are substantially the same as those of the first embodiment, so that FIG. 1 is used and the same structures are denoted by the same reference numerals and description thereof is omitted.

【００４５】図５に示すように、主走査方向に移動可能
な駆動ステージ６上には、ＣＣＤエリアセンサホルダ１
３を設置し、このＣＣＤエリアセンサホルダ１３にはＣ
ＣＤエリアセンサ８および距離センサ１５を設置する。
また、駆動ステージ６の上方にはミラー１２を設置し、
このミラー１２はミラー固定フレーム１１に固設されて
いる。As shown in FIG. 5, a CCD area sensor holder 1 is mounted on a drive stage 6 movable in the main scanning direction.
3 and the CCD area sensor holder 13 has C
The CD area sensor 8 and the distance sensor 15 are installed.
In addition, a mirror 12 is installed above the drive stage 6,
The mirror 12 is fixed to the mirror fixing frame 11.

【００４６】次に、本実施形態の走査ビーム測定方法を
説明する。本実施形態の走査ビーム測定方法は、駆動
ステージ６で、ＣＣＤエリアセンサ８を走査ビームの走
査方向に移動する移動工程と、距離センサ１５の検知情
報から、ＣＣＤエリアセンサ８の位置による上下方向
（高さ方向）の変動を検出する高さ検出工程とを有す
る。Next, the scanning beam measuring method of the present embodiment will be described. The scanning beam measuring method according to the present embodiment is based on a moving step of moving the CCD area sensor 8 in the scanning direction of the scanning beam on the drive stage 6 and the vertical direction of the position of the CCD area sensor 8 based on the detection information of the distance sensor 15. (Height direction).

【００４７】すなわち、第１の実施形態に準じ、制御部
２０でＬＤユニット２をドットパターンで点灯させ、駆
動ステージ６によって検出光学系２５を主走査方向に移
動させながら、ドット位置（前記重心位置）を検出す
る。また、距離センサ１５によって、駆動ステージ６に
より検出光学系２５が主走査方向に移動した際に生じる
高さ方向の変動を検出する。この距離センサ１５の検知
情報に基づき、制御部２０は、ＣＣＤエリアセンサ８で
取得したドット画像からの副走査方向の位置ばらつきを
補正する。That is, in accordance with the first embodiment, the control unit 20 turns on the LD unit 2 in a dot pattern, and moves the detection optical system 25 in the main scanning direction by the drive stage 6 to adjust the dot position (the center of gravity position). ) Is detected. The distance sensor 15 detects a change in the height direction caused when the detection optical system 25 is moved in the main scanning direction by the drive stage 6. Based on the detection information of the distance sensor 15, the control unit 20 corrects the position variation in the sub-scanning direction from the dot image acquired by the CCD area sensor 8.

【００４８】［第４の実施形態］図６に、本発明の第４
の実施の形態に係る走査ビーム測定装置の要部構成を示
す。本実施形態は、請求項５に係る発明の一実施形態で
ある。なお、ミラー１２、ＣＣＤエリアセンサホルダ１
３、距離センサ（測長器）１５ａ、１５ｂを除く構成
は、第１の実施形態と概ね同様であるため、図１を用い
るとともに同一構成には同一符号を付与して説明を省略
する。[Fourth Embodiment] FIG. 6 shows a fourth embodiment of the present invention.
1 shows a main configuration of a scanning beam measuring apparatus according to an embodiment. This embodiment is an embodiment of the invention according to claim 5. The mirror 12, the CCD area sensor holder 1
3. Since the configuration excluding the distance sensors (length measuring devices) 15a and 15b is substantially the same as that of the first embodiment, FIG. 1 will be used and the same components will be denoted by the same reference numerals and description thereof will be omitted.

【００４９】図６に示すように、主走査方向に移動可能
な駆動ステージ６上には、ＣＣＤエリアセンサホルダ１
３を設置し、このＣＣＤエリアセンサホルダ１３にはＣ
ＣＤエリアセンサ８および２個の距離センサ１５ａ、１
５ｂ（水平方向に所定の間隔を持つように配置してい
る）を設置する。また、駆動ステージ６の上方には、ミ
ラー１２を設置し、このミラー１２はミラー固定フレー
ム（図示せず）に固設されている。As shown in FIG. 6, a CCD area sensor holder 1 is mounted on a drive stage 6 movable in the main scanning direction.
3 and the CCD area sensor holder 13 has C
CD area sensor 8 and two distance sensors 15a, 1
5b (arranged so as to have a predetermined interval in the horizontal direction). A mirror 12 is provided above the drive stage 6, and the mirror 12 is fixed to a mirror fixing frame (not shown).

【００５０】次に、本実施形態の走査ビーム測定方法を
説明する。本実施形態の走査ビーム測定方法において
は、第１の実施形態に準じ、ＬＤユニット２をドットパ
ターンで点灯させ、駆動ステージ６によって検出光学系
２５を主走査方向に移動させながら、ドット位置（前記
重心位置）を検出する。また、第３の実施形態に準じ、
複数（例えば、２個）の距離センサ１５ａ、１５ｂによ
って、ＣＣＤエリアセンサ８の高さを複数箇所で検出す
る。この距離センサ１５ａ、１５ｂの検知情報に基づ
き、制御部２０は、ＣＣＤエリアセンサ８で取得したド
ット画像からの副走査方向の位置ばらつきを補正する。
また、距離センサ１５ａ、１５ｂで取得した複数箇所の
高さデータより、ＣＣＤエリアセンサ８の光軸周りの回
転角度を検出し、予め設定したＣＣＤエリアセンサ８の
角度を差し引くことにより、ＣＣＤエリアセンサ８と走
査ビームを用いた走査光学系１との相対角度を補正す
る。このように、距離センサ１５ａ、１５ｂの検出値よ
りＣＣＤエリアセンサ８ｂを含む検出光学系１の高さ方
向のばらつきと傾きを検出して、ドット位置の副走査方
向の位置ずれと走査線の曲り角度を補正する。Next, the scanning beam measuring method of this embodiment will be described. In the scanning beam measuring method according to the present embodiment, the LD unit 2 is turned on in a dot pattern according to the first embodiment, and the driving stage 6 moves the detection optical system 25 in the main scanning direction while the dot position (the Position of the center of gravity). Further, according to the third embodiment,
The height of the CCD area sensor 8 is detected at a plurality of locations by a plurality (for example, two) of the distance sensors 15a and 15b. Based on the detection information of the distance sensors 15a and 15b, the control unit 20 corrects the position variation in the sub-scanning direction from the dot image acquired by the CCD area sensor 8.
Further, the rotation angle of the CCD area sensor 8 around the optical axis is detected from the height data of a plurality of locations acquired by the distance sensors 15a and 15b, and the preset angle of the CCD area sensor 8 is subtracted to obtain the CCD area sensor. The relative angle between the scanning optical system 8 and the scanning optical system 1 using the scanning beam is corrected. As described above, the variation in the height direction and the inclination of the detection optical system 1 including the CCD area sensor 8b are detected from the detection values of the distance sensors 15a and 15b, and the displacement of the dot position in the sub-scanning direction and the bending angle of the scanning line are detected. Correct the degree.

【００５１】［第５の実施形態］図７に、本発明の第５
の実施の形態に係る走査ビーム測定方法を示す。本実施
形態は、請求項６に係る発明の一実施形態である。な
お、装置の全体構成は、第１の実施形態と概ね同様であ
るため、図１を用いるとともに同一構成には同一符号を
付与して説明を省略する。[Fifth Embodiment] FIG. 7 shows a fifth embodiment of the present invention.
1 shows a scanning beam measuring method according to the embodiment. This embodiment is one embodiment of the invention according to claim 6. Since the overall configuration of the device is substantially the same as that of the first embodiment, FIG. 1 is used and the same components are denoted by the same reference numerals, and description thereof is omitted.

【００５２】本実施形態の走査ビーム測定方法において
は、第１の実施形態に準じ、ＬＤユニット２をドットパ
ターンで点灯させ、駆動ステージ６によって検出光学系
２５を主走査方向に移動させながら、ドット位置（前記
重心位置）を検出する。ここで、ＣＣＤエリアセンサ８
の角度が零となる方向（水平方向）を主走査方向とし
て、各ドット位置から主走査方向の距離を検出し、走査
ビームの主走査方向の隣接ドット間距離を検出する。In the scanning beam measuring method according to the present embodiment, the LD unit 2 is turned on in a dot pattern according to the first embodiment, and the drive stage 6 moves the detection optical system 25 in the main scanning direction while the dot is turned on. The position (the position of the center of gravity) is detected. Here, the CCD area sensor 8
With the direction (horizontal direction) in which the angle becomes zero as the main scanning direction, the distance in the main scanning direction from each dot position is detected, and the distance between adjacent dots of the scanning beam in the main scanning direction is detected.

【００５３】例えば、図７に示すように、検出光学系２
５の角度（駆動ステージ面が水平の場合は水平面と直線
１０ａとの角度）と走査ビームの近似直線９ｃの角度
（駆動ステージ面が水平の場合は水平面と近似直線９ｃ
との角度）を差し引き、座標変換することで、主走査方
向の隣接ドット間距離Ｓ１０、Ｓ２０、Ｓ３０、Ｓ４０
を検出する。なお、本実施形態の走査ビーム測定方法を
第３、第４の実施形態に適用してもよい。For example, as shown in FIG.
5 (the angle between the horizontal plane and the straight line 10a when the driving stage surface is horizontal) and the angle between the approximate straight line 9c of the scanning beam (when the driving stage surface is horizontal, the horizontal plane and the approximate straight line 9c)
Is subtracted, and the coordinates are converted to obtain the distances S10, S20, S30, S40 between adjacent dots in the main scanning direction.
Is detected. Note that the scanning beam measurement method of the present embodiment may be applied to the third and fourth embodiments.

【００５４】［第６の実施形態］図８に、本発明の第６
の実施の形態に係る走査ビーム測定方法を示す。本実施
形態は、請求項７に係る発明の一実施形態である。な
お、装置の全体構成は、第１の実施形態と概ね同様であ
るため、図１を用いるとともに同一構成には同一符号を
付与して説明を省略する。[Sixth Embodiment] FIG. 8 shows a sixth embodiment of the present invention.
1 shows a scanning beam measuring method according to the embodiment. This embodiment is one embodiment of the invention according to claim 7. Since the overall configuration of the device is substantially the same as that of the first embodiment, FIG. 1 is used and the same components are denoted by the same reference numerals, and description thereof is omitted.

【００５５】本実施形態の走査ビーム測定方法において
は、ドットパターンを一定値に固定してＬＤユニット２
を点灯し、ＣＣＤエリアセンサ８の受光面両端の副走査
方向の光量に関して最明位置を検出し、最後列の光量分
布の最明位置が移動後の最前列の最明位置高さになるま
で、駆動ステージ６によってＣＣＤエリアセンサ８を含
む検出光学系を主走査方向に移動させる。In the scanning beam measuring method of this embodiment, the dot pattern is fixed at a constant value and the LD unit 2
Is turned on to detect the brightest position with respect to the light amount in the sub-scanning direction at both ends of the light receiving surface of the CCD area sensor 8 until the brightest position in the light amount distribution in the last row becomes the brightest position height in the front row after the movement. The detection optical system including the CCD area sensor 8 is moved by the drive stage 6 in the main scanning direction.

【００５６】例えば、図８に示すように、検出光学系２
５の移動時に、制御部２０でＬＤ点灯のドットパターン
を一定とし、輝線のみの画像を取得する。また、制御部
２０は、検出光学系２５の移動方向から受光面内の最前
端の最明点１６を副走査方向の基準位置として記憶す
る。さらに、制御部２０は、受光面内の最後端の最明点
１６ａ（図９に示す）が基準位置になるように検出光学
系２５を移動させることで、検出光学系２５の移動前後
で、受光面をつなぐことが可能となる。よって、全走査
線で一連のドットデータを検出できることとなる。な
お、本実施形態の走査ビーム測定方法を第３、第４、第
５の実施形態に適用してもよい。For example, as shown in FIG.
At the time of the movement of 5, the control unit 20 makes the dot pattern of the LD lighting constant, and acquires an image of only the bright line. The control unit 20 stores the brightest point 16 at the forefront end in the light receiving surface from the moving direction of the detection optical system 25 as a reference position in the sub-scanning direction. Further, the control unit 20 moves the detection optical system 25 so that the rearmost brightest point 16a (shown in FIG. 9) in the light receiving surface becomes the reference position. Light receiving surfaces can be connected. Therefore, a series of dot data can be detected on all scanning lines. Note that the scanning beam measurement method of this embodiment may be applied to the third, fourth, and fifth embodiments.

【００５７】［第７の実施形態］図１０に、走査ビーム
測定時、副走査方向で走査光学系の光量にばらつきがあ
る場合を示す。本実施形態は、請求項８に係る発明の一
実施形態である。なお、装置の全体構成は、第１の実施
形態と概ね同様であるため、図１を用いるとともに同一
構成には同一符号を付与して説明を省略する。[Seventh Embodiment] FIG. 10 shows a case where the amount of light of the scanning optical system varies in the sub-scanning direction during scanning beam measurement. This embodiment is one embodiment of the invention according to claim 8. Since the overall configuration of the device is substantially the same as that of the first embodiment, FIG. 1 is used and the same components are denoted by the same reference numerals, and description thereof is omitted.

【００５８】本実施形態の走査ビーム測定方法において
は、第６の実施形態に準じ、制御部２０でドットパター
ンを一定値に固定して、輝線のみの画像を取得する。ま
た、制御部２０は、ＣＣＤエリアセンサ８の受光面両端
の副走査方向の光量に関して前述のように重心位置を検
出し、最後列の光量分布の重心位置が移動後の最前列の
重心位置高さになる位置まで、ＣＣＤエリアセンサ８を
移動させる。In the scanning beam measuring method according to the present embodiment, according to the sixth embodiment, the control unit 20 fixes the dot pattern at a constant value, and acquires an image consisting only of bright lines. Further, the control unit 20 detects the position of the center of gravity with respect to the light amount in the sub-scanning direction at both ends of the light receiving surface of the CCD area sensor 8 as described above. The CCD area sensor 8 is moved to a position where the CCD area sensor is located.

【００５９】例えば、図１０に示すように、ＣＣＤエリ
アセンサ８の受光面両端の副走査方向の光量分布１７に
ばらつきがあると、受光面内の最明点の位置がずれる場
合があるため、受光面内の最前端の副走査方向で光量に
関する重心を次式により検出して、基準位置とする。Ｙfront＝∫ｙ×ｆ（ｘ_f、ｙ）／ｆ（ｘ_f、ｙ）ｄ但し、ｘ_fは受光面内の主走査方向の最前端座標を示
す。For example, as shown in FIG. 10, if the light quantity distribution 17 in the sub-scanning direction at both ends of the light receiving surface of the CCD area sensor 8 varies, the position of the brightest point in the light receiving surface may be shifted. The center of gravity with respect to the amount of light in the sub-scanning direction at the forefront end in the light receiving surface is detected by the following equation and is set as a reference position. _{Yfront = ∫y × f (x f} , y) / f (x f, y) d where, x _f denotes the foremost end coordinates in the main scanning direction in the light-receiving surface.

【００６０】次いで、受光面内の最後端の副走査方向で
光量に関する重心を次式により検出し、位置合せする。Ｙback＝∫ｙ×ｆ（ｘ_b、ｙ）／ｆ（ｘ_b、ｙ）ｄｙ但し、ｘ_bは受光面内の主走査方向の最後端座標を示
す。Next, the center of gravity with respect to the amount of light in the sub-scanning direction at the rearmost end in the light receiving surface is detected by the following equation and aligned. Yback = ∫y × f (x _b , y) / f (x _b , y) dy where x _b indicates the last coordinate in the main scanning direction in the light receiving surface.

【００６１】こうして、画素ばらつきを低減しながら基
準位置の検出および位置合わせができることとなる。In this way, the reference position can be detected and aligned while reducing pixel variations.

【００６２】［第８の実施形態］図１１に、ＣＣＤエリ
アセンサの受光面内の副走査方向における最明値または
重心位置と走査の最先端での副走査座標との一致点が多
数存在する場合を示す。なお、装置の全体構成は、第１
の実施形態と概ね同様であるため、図１を用いるととも
に同一構成には同一符号を付与して説明を省略する。本
実施形態は、請求項９に係る発明の一実施形態である。[Eighth Embodiment] In FIG. 11, there are many coincidence points between the brightest value or the position of the center of gravity in the sub-scanning direction in the light receiving surface of the CCD area sensor and the sub-scanning coordinates at the forefront of scanning. Show the case. The overall configuration of the device is the first
Since this embodiment is substantially the same as that of the first embodiment, FIG. 1 is used and the same components are given the same reference numerals, and description thereof is omitted. This embodiment is one embodiment of the invention according to claim 9.

【００６３】本実施形態の走査ビーム測定方法において
は、第６の実施形態に準じ、制御部２０でドットパター
ンを一定値に固定して、輝線のみの画像を取得する。ま
た、制御部２０は、ビーム走査の各列の重心位置を主走
査方向につないで重心位置曲線を求め、最後列の光量分
布の重心位置高さを重心位置曲線が横切る回数を計数
し、最後列の光量分布の重心位置が移動後の最前列の重
心位置高さになる位置まで、ＣＣＤエリアセンサ８を移
動させて全走査幅をつなぐ。In the scanning beam measuring method according to the present embodiment, according to the sixth embodiment, the control unit 20 fixes the dot pattern to a fixed value and acquires an image consisting of only bright lines. Further, the control unit 20 obtains a barycentric position curve by connecting the barycentric position of each column of the beam scanning in the main scanning direction, counts the number of times the barycentric position curve crosses the barycentric position height of the light amount distribution of the last column, The CCD area sensor 8 is moved to connect the entire scanning width to a position where the barycentric position of the light quantity distribution of the row becomes the height of the barycentric position of the front row after the movement.

【００６４】例えば、図１１のような最明値分布１８と
基準位置光量１９が検出され、ＣＣＤエリアセンサ８の
受光面内の副走査方向における最明値または重心の位置
が、最前端での副走査方向の座標と一致する点が多数存
在した場合は、基準位置を誤検出することが懸念され
る。For example, the brightest value distribution 18 and the reference position light amount 19 as shown in FIG. 11 are detected, and the position of the brightest value or the center of gravity in the sub-scanning direction in the light receiving surface of the CCD area sensor 8 is determined at the front end. If there are many points that match the coordinates in the sub-scanning direction, there is a concern that the reference position may be erroneously detected.

【００６５】そこで、次式により主走査方向の各座標で
重心位置を検出する。Ｙｋ＝∫ｙ×ｆ（ｘ_k、ｙ）／ｆ（ｘ_k、ｙ）ｄｙ但し、ｋ＝１〜ｎ；ｎは主走査方向の座標範囲を示す。Therefore, the position of the center of gravity is detected at each coordinate in the main scanning direction by the following equation. Yk = ∫y × f (x _k , y) / f (x _k , y) dy where k = 1 to n; n indicates a coordinate range in the main scanning direction.

【００６６】次いで、最後端の重心位置における副走査
方向での座標と、主走査方向の各座標で重心位置Ｙｋと
が交差する回数を、例えば両者を差し引きし、符号が変
化する回数をカウントして、基準位置に位置決めする。
なお、本実施形態の走査ビーム測定方法を第７の実施形
態に適用してもよい。Next, the number of intersections between the coordinates in the sub-scanning direction at the center of gravity position at the rearmost end and the center of gravity position Yk at each coordinate in the main scanning direction is subtracted, for example, to count the number of times the sign changes. To the reference position.
Note that the scanning beam measurement method of the present embodiment may be applied to the seventh embodiment.

【００６７】［第９の実施形態］図１２に、本発明の第
９の実施の形態に係る走査ビーム測定方法を示す。本実
施形態は、請求項１０に係る発明の一実施形態である。
なお、装置の全体構成は、第１の実施形態と概ね同様で
あるため、図１を用いるとともに同一構成には同一符号
を付与して説明を省略する。[Ninth Embodiment] FIG. 12 shows a scanning beam measuring method according to a ninth embodiment of the present invention. This embodiment is one embodiment of the invention according to claim 10.
Since the overall configuration of the device is substantially the same as that of the first embodiment, FIG. 1 is used and the same components are denoted by the same reference numerals, and description thereof is omitted.

【００６８】本実施形態の走査ビーム測定方法は、第２
の実施形態に準じ、制御部２０でＬＤユニット２をドッ
トパターンで点灯させ、駆動ステージ６によって検出光
学系２５を主走査方向に移動させながら、ドット位置
（前記重心位置）を検出する。ここで、ＣＣＤエリアセ
ンサ８の移動幅を、このＣＣＤエリアセンサ８の受光面
内の最初のドットが最後尾となる距離とし、重複したド
ット位置を基準にして検出データを全走査幅でつなぐ。The scanning beam measuring method of the present embodiment
According to the second embodiment, the control unit 20 turns on the LD unit 2 in a dot pattern, and moves the detection optical system 25 in the main scanning direction by the drive stage 6 to detect the dot position (the center of gravity position). Here, the movement width of the CCD area sensor 8 is defined as the distance where the first dot in the light receiving surface of the CCD area sensor 8 is the last, and the detection data is connected with the entire scanning width based on the overlapping dot position.

【００６９】例えば、図１２に示すように、ＣＣＤエリ
アセンサ８の移動前は、ドットＤ１の位置を検出データ
の基準とし、移動方向に対して、ドットＤ２の副走査方
向の座標を制御部２０で保存する。次いで、主走査方向
の座標を約Ｓだけ移動して、ドットＤ２の位置近傍に移
動し、移動後の検出データの基準位置をドットＤ２の座
標とする。このような動作を繰り返すことにより、全走
査面での検出データをつなぐことが可能となる。For example, as shown in FIG. 12, before the movement of the CCD area sensor 8, the position of the dot D1 is used as a reference for the detection data, and the coordinates of the dot D2 in the sub-scanning direction with respect to the moving direction are controlled by the control unit 20. To save. Next, the coordinates in the main scanning direction are moved by about S to move to the vicinity of the position of the dot D2, and the reference position of the moved detection data is set as the coordinates of the dot D2. By repeating such an operation, it is possible to connect detection data on all scanning planes.

【００７０】［第１０の実施形態］図１３に、本発明の
第１０の実施の形態に係る走査ビーム測定装置を示す。
本実施形態は、請求項１１に係る発明の一実施形態であ
る。なお、装置の全体構成は、第１の実施形態と概ね同
様であるため、図１を用いるとともに同一構成には同一
符号を付与して説明を省略する。[Tenth Embodiment] FIG. 13 shows a scanning beam measuring apparatus according to a tenth embodiment of the present invention.
This embodiment is one embodiment of the invention according to claim 11. Since the overall configuration of the device is substantially the same as that of the first embodiment, FIG. 1 is used and the same components are denoted by the same reference numerals, and description thereof is omitted.

【００７１】図１３に示すように、ＣＣＤエリアセンサ
８などを搭載して主走査方向に移動可能な駆動ステージ
６は、上下方向（高さ方向）に移動可能な駆動ステージ
（高さ方向駆動ステージ）４０上に設置されている。こ
の駆動ステージ４０を適宜上下移動させることで、前述
のように検出された検出光学系２５の高さ変動（ＣＣＤ
エリアセンサ８の移動時）あるいは走査ビームの曲りを
補正できることとなる。なお、本実施形態の構成を第
３、第４の実施形態に適用してもよい。As shown in FIG. 13, a drive stage 6 mounted with a CCD area sensor 8 or the like and movable in the main scanning direction is a drive stage (height direction drive stage) movable in the vertical direction (height direction). ) 40. By appropriately moving the drive stage 40 up and down, the height variation of the detection optical system 25 (CCD
Thus, the bending of the scanning beam can be corrected. Note that the configuration of this embodiment may be applied to the third and fourth embodiments.

【００７２】ここで、ＣＣＤエリアセンサ８などが前記
ビーム受光手段を構成し、結像レンズ４などが前記結像
手段を構成し、駆動ステージ６などが前記主走査方向移
動手段を構成し、制御部２０などが前記制御手段を構成
し、制御部２０などが前記特徴量導出手段を構成し、駆
動ステージ４０などが前記高さ方向移動手段を構成す
る。Here, the CCD area sensor 8 and the like constitute the beam receiving means, the imaging lens 4 and the like constitute the imaging means, and the drive stage 6 and the like constitute the main scanning direction moving means. The unit 20 and the like constitute the control unit, the control unit 20 and the like constitute the feature amount deriving unit, and the drive stage 40 and the like constitute the height direction moving unit.

【００７３】なお、本発明は、複写機やプリンタに用い
られる走査型の書込みユニットで、検査ビームのドット
パターンが所定の位置、間隔で点灯しているか否かを検
証する場合に限らず、例えば、ＬＥＤアレイの光源列の
検査など、さらに広範囲に適用可能なものである。The present invention is not limited to the case where the scanning write unit used in a copying machine or a printer is used to verify whether or not the dot pattern of the inspection beam is lit at predetermined positions and intervals. In addition, the present invention can be applied to a wider range such as inspection of a light source array of an LED array.

【００７４】[0074]

【発明の効果】請求項１に記載の発明によれば、走査光
学系の走査ビームの特徴量を全走査面で検出することが
可能である。According to the first aspect of the present invention, it is possible to detect the characteristic amount of the scanning beam of the scanning optical system on the entire scanning surface.

【００７５】請求項２に記載の発明によれば、縦スジ画
像の原因の一つであるドット間距離のばらつきや画素ず
れを生じる原因の一つである走査線ばらつきを検出する
ことが可能である。According to the second aspect of the present invention, it is possible to detect a variation in the distance between dots, which is one of the causes of a vertical stripe image, and a variation in a scanning line, which is one of the causes of a pixel shift. is there.

【００７６】請求項３に記載の発明によれば、請求項２
に記載の発明の作用効果に加え、検出光学系の走査光学
系に対する相対角度を除去して、本来の主走査方向の走
査線ばらつきを検出することが可能である。According to the invention described in claim 3, according to claim 2
In addition to the functions and effects of the invention described in (1), the relative angle of the detection optical system with respect to the scanning optical system can be removed to detect the original scanning line variation in the main scanning direction.

【００７７】請求項４に記載の発明によれば、請求項３
に記載の発明の作用効果に加え、走査光学系の全走査幅
で走査線ばらつきを検出することが可能である。According to the invention set forth in claim 4, according to claim 3,
In addition to the functions and effects of the invention described in (1), it is possible to detect a scanning line variation over the entire scanning width of the scanning optical system.

【００７８】請求項５に記載の発明によれば、請求項２
に記載の発明の作用効果に加え、検出光学系の走査光学
系に対する相対角度を除去して、本来の主走査方向の走
査線ばらつきを検出することが可能である。According to the invention set forth in claim 5, according to claim 2,
In addition to the functions and effects of the invention described in (1), the relative angle of the detection optical system with respect to the scanning optical system can be removed to detect the original scanning line variation in the main scanning direction.

【００７９】請求項６に記載の発明によれば、請求項３
〜５に記載の発明の作用効果に加え、縦スジ画像の発生
原因の一つであるドット間距離のばらつきを検出するこ
とが可能である。According to the invention described in claim 6, according to claim 3,
In addition to the functions and effects of the inventions described in (1) to (5), it is possible to detect a variation in the distance between dots, which is one of the causes of the generation of a vertical stripe image.

【００８０】請求項７に記載の発明によれば、請求項３
〜５に記載の発明の作用効果に加え、ビーム受光手段の
移動に伴う位置ずれを補正して、全走査幅での検出デー
タをつなぐことが可能である。According to the invention described in claim 7, claim 3 is provided.
In addition to the functions and effects of the inventions described in (1) to (5), it is possible to correct the displacement caused by the movement of the beam receiving means and connect the detection data over the entire scanning width.

【００８１】請求項８に記載の発明によれば、請求項３
〜５に記載の発明の作用効果に加え、ビーム受光手段の
移動に伴う位置ずれを補正し、前記ビーム受光手段の受
光ばらつきを低減して全走査幅での検出データをつなぐ
ことが可能である。According to the invention of claim 8, according to claim 3,
In addition to the functions and effects of the inventions described in (1) to (5), it is possible to correct the positional deviation due to the movement of the beam receiving means, reduce the variation in the light receiving of the beam receiving means, and connect the detection data over the entire scanning width. .

【００８２】請求項９に記載の発明によれば、請求項８
において、ビーム受光手段を位置を誤検出することな
く、ビーム受光手段を移動することが可能である。According to the ninth aspect of the present invention, there is provided an eighth aspect of the present invention.
In, the beam receiving means can be moved without erroneously detecting the position of the beam receiving means.

【００８３】請求項１０に記載の発明によれば、走査ミ
ラーの回転むら、ビーム受光手段の移動機構の位置決め
精度にばらつきがあっても、高精度に検出データをつな
ぐことが可能である。According to the tenth aspect of the present invention, it is possible to connect detection data with high accuracy even if there is unevenness in the rotation of the scanning mirror and the positioning accuracy of the moving mechanism of the beam receiving means.

【００８４】請求項１１に記載の発明によれば、走査ビ
ームの走査線角度が大きく画面内から外れても、検出デ
ータのつなぎ位置を基準にビーム受光手段を副走査方向
に移動し、走査ビームの受光が可能である。According to the eleventh aspect of the present invention, even if the scanning line angle of the scanning beam is large and deviates from the screen, the beam receiving means is moved in the sub-scanning direction based on the connection position of the detection data, and the scanning beam is scanned. Can be received.

【００８５】以上説明したように、本発明によれば、検
出光学系と走査光学系の相対角度を補正して、走査線の
曲りを検出し、走査ビームの点滅によるドットの主走査
方向の距離を全走査線幅において検出することが可能で
ある。As described above, according to the present invention, the relative angle between the detection optical system and the scanning optical system is corrected, the bending of the scanning line is detected, and the distance between the dots in the main scanning direction due to the blinking of the scanning beam. Can be detected in the entire scanning line width.

[Brief description of the drawings]

【図１】本発明の第１の実施の形態に係る走査ビーム測
定装置の構成を示す平面図である。FIG. 1 is a plan view showing a configuration of a scanning beam measuring device according to a first embodiment of the present invention.

【図２】本発明の第１の実施の形態に係る走査ビーム測
定方法を示す図である。FIG. 2 is a diagram illustrating a scanning beam measurement method according to the first embodiment of the present invention.

【図３】本発明の第２の実施の形態に係る走査ビーム測
定方法（第１の近似直線の導出方法）を示す図である。FIG. 3 is a diagram illustrating a scanning beam measurement method (a method of deriving a first approximate straight line) according to a second embodiment of the present invention.

【図４】本発明の第２の実施の形態に係る走査ビーム測
定方法（第２の近似直線の導出方法）を示す図である。FIG. 4 is a diagram showing a scanning beam measurement method (a method of deriving a second approximate straight line) according to a second embodiment of the present invention.

【図５】本発明の第３の実施の形態に係る走査ビーム測
定装置の構成を示す側断面図である。FIG. 5 is a side sectional view showing a configuration of a scanning beam measuring device according to a third embodiment of the present invention.

【図６】本発明の第４の実施の形態に係る走査ビーム測
定装置の構成を示す側断面図である。FIG. 6 is a side sectional view showing a configuration of a scanning beam measuring device according to a fourth embodiment of the present invention.

【図７】本発明の第５の実施の形態に係る走査ビーム測
定方法を示す図である。FIG. 7 is a diagram showing a scanning beam measurement method according to a fifth embodiment of the present invention.

【図８】本発明の第６の実施の形態に係る走査ビーム測
定方法を示す図（最前端の最明点を示す）である。FIG. 8 is a diagram illustrating a scanning beam measuring method according to a sixth embodiment of the present invention (indicating the brightest point at the forefront).

【図９】本発明の第６の実施の形態に係る走査ビーム測
定方法を示す図（最後端の最明点を示す）である。FIG. 9 is a diagram showing a scanning beam measurement method according to a sixth embodiment of the present invention (showing the brightest point at the rear end).

【図１０】本発明の第７の実施の形態に係る走査ビーム
測定方法に関し、走査ビーム測定装置のＣＣＤエリアセ
ンサの受光面で走査ビームの光量にばらつきがある場合
を示す図である。FIG. 10 is a view showing a scanning beam measuring method according to a seventh embodiment of the present invention, showing a case where the light quantity of the scanning beam varies on the light receiving surface of the CCD area sensor of the scanning beam measuring device.

【図１１】本発明の第８の実施の形態に係る走査ビーム
測定方法に関し、走査ビーム測定装置の走査面での検出
データの基準位置が誤検出されやすい場合を示す図であ
る。FIG. 11 is a diagram illustrating a scanning beam measurement method according to an eighth embodiment of the present invention, in which a reference position of detection data on a scanning surface of a scanning beam measurement device is likely to be erroneously detected.

【図１２】本発明の第９の実施の形態に係る走査ビーム
測定方法を示す図である。FIG. 12 is a diagram illustrating a scanning beam measurement method according to a ninth embodiment of the present invention.

【図１３】本発明の第１０の実施の形態に係る走査ビー
ム測定装置の構成を示す側断面図である。FIG. 13 is a side sectional view showing a configuration of a scanning beam measuring device according to a tenth embodiment of the present invention.

[Explanation of symbols]

１走査光学系（走査光学系ユニット）２ＬＤユニット３回転多面鏡４走査ビーム結像レンズ５走査面６駆動ステージ（主走査方向駆動ステージ）７対物レンズ８ＣＣＤエリアセンサ９副走査方向位置平均座標９ａ、９ｂ、９ｃドット位置近似直線１０、１０ａステージ傾斜直線１１ミラー固定フレーム１２ミラー１３ＣＣＤエリアセンサホルダ１５、１５ａ、１５ｂ距離センサ（測長器）１６、１６ａ走査ビーム基準位置１７副走査方向の光量分布１８最明値分布１９基準位置光量２０制御部３０表示部４０駆動ステージ（高さ方向駆動ステージ） Reference Signs List 1 scanning optical system (scanning optical system unit) 2 LD unit 3 rotating polygon mirror 4 scanning beam imaging lens 5 scanning surface 6 driving stage (main scanning direction driving stage) 7 objective lens 8 CCD area sensor 9 sub-scanning direction position average coordinates 9a, 9b, 9c Dot position approximation straight line 10, 10a Stage inclination straight line 11 Mirror fixed frame 12 Mirror 13 CCD area sensor holder 15, 15a, 15b Distance sensor (length measuring device) 16, 16a Scan beam reference position 17 Sub-scanning direction Light intensity distribution 18 Brightest value distribution 19 Reference position light intensity 20 Control unit 30 Display unit 40 Driving stage (height direction driving stage)

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.⁷ 識別記号ＦＩテーマコート゛(参考）Ｇ０２Ｂ 26/10 Ｇ０６Ｔ 1/00 ４３０Ｊ５Ｃ０７２Ｇ０６Ｔ 1/00 ４３０ 7/60 １５０Ｂ５Ｌ０９６ 7/60 １５０Ｂ４１Ｊ 3/00 ＤＨ０４Ｎ 1/113 Ｈ０４Ｎ 1/04 １０４ＡＦターム(参考） 2C362 AA20 AA48 BA69 BA71 BA89 2F065 AA17 CC00 FF04 FF67 GG06 HH04 JJ03 JJ26 LL15 LL62 MM07 MM16 NN02 PP02 QQ17 QQ18 QQ25 QQ42 2G086 EE03 2H045 AA01 CA82 CB24 DA46 5B047 AA11 BB04 BC01 BC05 BC09 BC11 BC16 BC23 CA05 CA19 CB23 DC02 5C072 AA01 CA06 CA12 DA02 DA04 EA05 EA08 HA02 HA09 HA13 HB08 MB04 XA01 XA05 5L096 BA07 CA14 FA66 FA69 ──────────────────────────────────────────────────続き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G02B 26/10 G06T 1/00 430J 5C072 G06T 1/00 430 7/60 150B 5L096 7/60 150 B41J 3 / 00 D H04N 1/113 H04N 1/04 104A F-term (reference) 2C362 AA20 AA48 BA69 BA71 BA89 2F065 AA17 CC00 FF04 FF67 GG06 HH04 JJ03 JJ26 LL15 LL62 MM07 MM16 NN02 PP02 QQ17 QQ18 QQ25 QQA2A02282 BB04 BC01 BC05 BC09 BC11 BC16 BC23 CA05 CA19 CB23 DC02 5C072 AA01 CA06 CA12 DA02 DA04 EA05 EA08 HA02 HA09 HA13 HB08 MB04 XA01 XA05 5L096 BA07 CA14 FA66 FA69

Claims

[Claims]

1. A scanning beam measuring apparatus for inspecting and verifying a scanning optical system by beam scanning, comprising: an image forming means for entering a scanning beam to form an image; and a two-dimensional light receiving surface. Beam receiving means for receiving a scanning beam from an imaging means; main scanning direction moving means for moving the imaging means and the beam receiving means in the main scanning direction of a scanning optical system; and control for controlling blinking of the scanning beam. A scanning beam measuring apparatus, comprising: means for obtaining a characteristic value of a scanning beam acquired by the beam receiving means.

2. A scanning beam measuring method using the scanning beam measuring apparatus according to claim 1, wherein: a blinking step of blinking the scanning beam in a fixed or variable dot pattern; and an imaging step of imaging the scanning beam. An imaging step, a light receiving step of receiving the scanning beam by the beam receiving means, a storing step of storing an image of the received scanning beam, and a position detecting step of detecting a dot position from the stored image of the scanning beam. A distance deriving step of deriving a distance between adjacent dots.

3. A scanning beam measuring method using the scanning beam measuring apparatus according to claim 1, wherein a blinking step of blinking the scanning beam in a fixed or variable dot pattern, and an imaging step of imaging the scanning beam. An imaging step, a light receiving step of receiving the scanning beam by the beam receiving means, a storing step of storing an image of the received scanning beam, and a position detecting step of detecting a dot position from the stored image of the scanning beam. , The first from the dot position
A first approximate straight line deriving step for deriving an approximate straight line, an angle detecting step for detecting an angle of a scanning line of the scanning beam, and a position of one dot or a plurality of dots in the sub-scanning direction while moving the beam receiving means. And a position / distance detecting step of detecting a moving distance of the beam receiving means, a second approximate straight line deriving step of approximating a position of the dot in the sub-scanning direction with a second straight line in a moving width of the beam receiving means, Subtracting the angle of the second approximation straight line from the angle of the scanning line of the scanning beam.

4. The apparatus according to claim 3, further comprising a height detecting step of detecting a height based on a position of said beam receiving means, and a moving step of moving said beam receiving means in a scanning direction of a scanning beam. Scanning beam measurement method as described.

5. The apparatus according to claim 1, wherein the height of the beam receiving means is detected at a plurality of locations, and the rotation angle of the beam receiving means around the optical axis is detected from the height data at the plurality of locations. 5. The scanning beam measuring method according to claim 4, wherein the subtraction corrects a relative angle between the beam receiving unit and a scanning optical system using a scanning beam, and detects a scanning line variation of the scanning beam.

6. A distance in the main scanning direction from the position of each dot, and a distance between adjacent dots in the main scanning direction of the scanning beam is detected by setting a direction in which the angle of the beam receiving means becomes zero as a main scanning direction. The scanning beam measuring method according to any one of claims 3 to 5, wherein:

7. A light source, wherein the dot pattern is fixed at a fixed value and illuminated, a lightest position in the sub-scanning direction at both ends of a light receiving surface of the beam receiving means is detected, and a lightest position in a light intensity distribution in the last row is detected. 6. The scanning beam measuring method according to claim 3, wherein the entire scanning width is connected by moving the beam receiving unit until the height of the brightest position in the front row after the movement is reached.

8. A method of lighting the dot pattern with a fixed value, detecting a barycentric position with respect to the amount of light in the sub-scanning direction at both ends of the light receiving surface of the beam receiving means, and after the barycentric position of the light amount distribution in the last row has moved. The scanning beam measuring method according to any one of claims 3 to 5, wherein the whole scanning width is connected by moving the beam receiving means to a position at which the height of the center of gravity of the front row becomes the height.

9. A center-of-gravity position curve is obtained by connecting the positions of the centers of gravity of the respective columns in the main scanning direction from the front row to the last row, and the number of times the center-of-gravity position curve crosses the height of the center of gravity of the light quantity distribution of the last row is counted. The whole scanning width is connected by moving the beam receiving means to a position where the center of gravity of the light quantity distribution in the last row becomes the height of the center of gravity of the front row after the movement. Scanning beam measurement method.

10. The method according to claim 1, wherein the beam receiving means is moved by a distance such that the first dot on the light receiving surface of the beam receiving means is at the end, and the detection data is connected over the entire scanning width with reference to the overlapping dot position. The scanning beam measuring method according to claim 3, wherein:

11. The apparatus according to claim 1, further comprising a height direction moving means for moving said beam receiving means in a height direction.
3. The scanning beam measuring device according to 1.