JP2002203435A - Wiring method and wiring cable for clean room - Google Patents

Abstract

(57) [Abstract] [Problem] To reduce the amount of gas generated from a wiring cable and improve the cleanliness of a clean room. SOLUTION: An adhesive is applied to one surface of a high molecular organic film 2 such as ethylene vinyl alcohol copolymer, polyethylene, polypropylene or polyester so as to wrap and cover a wiring cable 1 used in a clean room.
In a clean room, even if a CV cable, a CE cable, a flame-retardant cross-linked polyethylene cable, etc., which constantly generate a small amount of organic gas, are used, the generation of organic gas is suppressed.
In addition, a metal foil is adhered to one side of the polymer organic film, or a polymer organic film is laminated on the upper surface of the metal, and furthermore, the effect of suppressing the generation of organic gas is prevented by preventing the metal from being exposed at the ends. Enhance more.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring processing method and a wiring cable used as a power cable or an information cable in a clean room or a manufacturing apparatus such as a semiconductor factory or a liquid crystal factory.

[0002]

2. Description of the Related Art In a semiconductor factory or a liquid crystal factory, when organic gas or other impurities are adsorbed on a silicon wafer or a glass substrate being processed, the yield of products is reduced, so that dust and It is a clean room that supplies clean air from which air has been removed. Along with the demand for higher quality products, higher cleanliness is also required for clean rooms.
Such as eliminating the use of chemical building materials that generate gas,
In addition, various considerations have been made.

[0003] There is a limit to the demand for higher cleanliness regardless of whether air is purified by an air purifier or the amount of gas generated by building materials used is suppressed. Under such circumstances, it has been found that the wiring cable used in the clean room recently is also a gas generation source that cannot be ignored. In semiconductor factories and liquid crystal factories, a large number of power cables are laid to supply power to manufacturing apparatuses. Furthermore, a large amount of power cables and information cables are used in manufacturing apparatuses. Among these, as power cables, CV cables (cross-linked polyethylene insulated vinyl sheathed cables), CE cables (cross-linked polyethylene insulated polyethylene sheathed cables), and the like, and flame-retardant cross-linked polyethylene cables in the apparatus are used. As a result, a small amount of organic gas is constantly generated from these wires, and is transported to the air circulating in the clean room and diffused, so that the organic gas is adsorbed on the silicon wafer or glass substrate being processed and lowers the product yield. ing.

FIG. 6 is a diagram showing an example of an organic gas generated from a CV cable. 600V, CV cable single core,
FIG. 6 shows a gas chromatogram obtained by putting a cable having a cross section of 200 mm ² and a length of 10 cm into a desiccator for degassing measurement, supplying clean air, and analyzing the air at the outlet side. According to FIG. 6, the main components of the organic gas generated from the cable are alpha-methylstyrene (1), acetophenone (2), benzenemethanol (3), and also include 2-ethyl-1-hexanol (4) and the like. In. Components (1), (2) and (3) are decomposition products derived from a crosslinking agent for polyethylene, and (4)
Is a decomposition product of a plasticizer dioctyl phthalate of a vinyl chloride resin as a surface coating material. 1m surface area of this cable
^{2. The} amount generated per hour is 665.5 μg as represented by the mass of carbon as shown in FIG.
C / (m ² · h).

[0005]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and aims at suppressing the amount of gas generated from a wiring cable and improving the cleanliness of a clean room.

Therefore, the present invention is characterized in that a wiring cable used in a clean room is wrapped and covered with an organic gas impermeable polymer film coated on one side with an adhesive. A film of ethylene-vinyl alcohol copolymer, polyethylene, polypropylene, or polyester, wherein a metal foil is adhered to at least one surface, and further, an organic film is laminated on the upper surface of the metal foil. Things.

Further, the width of the metal foil or the metal-deposited surface is made smaller than the width of the organic film so that the bonded metal foil or the vapor-deposited metal is not exposed on the surface, or the metal foil is adhered or the metal film is vapor-deposited. And then further wrapped and covered with a polymer organic film coated on one side with an adhesive.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of a wiring method for a clean room and a wiring cable for a clean room according to the present invention, and FIG. 2 is a diagram showing an embodiment of a film and another embodiment of the wiring process. In the figure, 1 is a wiring cable, 2, 3, 21 is a film, 4 is a welding machine,
11 and 13 are polymer organic films, 12 is aluminum, 22
Denotes a film end, 23 denotes a metal end, and 24 denotes an organic film with an adhesive.

In FIG. 1, a distribution cable 1 is a power cable or an information cable laid in a clean room and used in a manufacturing apparatus. Films 2 and 3
It uses a polymer organic film with an adhesive,
As shown in FIG. 1 (A), a tape-like film with an adhesive 2 is overlapped and wound while being superposed in the horizontal direction, and as shown in FIG. 1 (B), a film 3 with a tape-like adhesive is provided. Is wrapped and covered by a vertical winding adhesive sealing method in which the gas generated from the electric wire is not leaked. In the case of the vertical winding adhesive seal method, FIG.
As shown in FIG. 1 (C), the end portions are overlapped and bonded, and further, as shown in FIG. 1 (D), an end portion process is performed such as folding and bonding the bonding surface film. FIG. 1 (E),
As shown in (F), the end portion and the bent portion may be bonded using a welding machine 4 or may be thermally welded using a welding machine 4 such as a heat sealer.

As the film, for example, a gas barrier film that does not allow organic gas to pass through, such as a polymer organic film, such as an ethylene vinyl alcohol copolymer film, can be used, and as shown in FIG. 2 (A). A film in which a metal foil such as aluminum 12 is bonded to one surface of a polymer organic film 11 such as polyethylene, polypropylene, or polyester, or a film in which aluminum 12 is bonded to one surface of a polymer organic film 11 as shown in FIG. Aluminum 1
2, a metal foil-bonded double-sided organic film in which a polymer organic film 13 is further laminated can be used. The single-sided metal foil-bonded organic film may have an adhesive-attached surface either on the surface of the aluminum 12 opposite to the polymer organic film 11 or on the surface of the polymer organic film 11 opposite to the surface where the aluminum 12 is bonded.

In the case where a metal foil made of aluminum 12 or the like is bonded or a metal is deposited, if the metal is exposed, another adjacent bare wire may come into contact with the exposed metal portion. In addition, various problems occur due to contact of a chemical which easily reacts with a metal. For example, if another adjacent bare wire comes into contact with an exposed metal part, an obstacle such as current flowing through the metal surface will occur.If a chemical that reacts with the metal comes into contact with the exposed metal part, the metal will react and corrode. In addition, the performance of shielding gas permeation of metal is deteriorated, and further, the appearance is deteriorated.

In the films shown in FIGS. 2A and 2B, if a metal foil such as aluminum 12 is made to have the same width as the polymer organic film 11, the metal portion is exposed at the end. As shown in FIGS. 2C and 2D, a metal foil is adhered to a width smaller than the width of the polymer organic film 11 or a metal is vapor-deposited so that the metal foil or the metal-deposited surface of the polymer organic film 11 becomes smaller. The problem can be solved by forming a portion of only the polymer organic film 11 on at least one side without being formed on the entire surface. In other words, a space for only the organic film is made, and as shown in FIG. 2 (E), the surface of the wiring cable is wrapped and covered with the film 21, and the metal film or metal is formed at the film end 22 where only the organic film remains. The purpose is to prevent the metal end 23 formed of the deposition surface from being exposed.

In the case of a film in which a metal foil or a metal-deposited surface is formed on the entire surface of the polymer organic film 11, as shown in FIG. 2 (F), the metal foil is adhered or the metal-deposited film 21 is deposited. May be further wrapped and covered with an organic film 24 with an adhesive made of only a polymer organic film. By doing so, the metal end of the film can be completely covered with the polymer organic film, and the electrical safety, chemical resistance to chemicals, and strength against surface friction can be improved. . It goes without saying that the degassing prevention performance is also improved.

Next, a bare cable, a polymer organic film,
The effect of the film-wound cable will be described based on the measurement results of the organic gas generated from each of the film-wound cables. 3 shows a gas chromatogram of an organic gas generated from a CV cable heat-sealed with an aluminum-deposited polyester film, FIG. 4 shows a gas chromatogram of an organic gas generated from an aluminum-deposited polyester film, and FIG. 5 shows various environments. It is a figure which shows the organic gas generation speed in temperature.

600V, CV cable single core, section 200
A single-sided polyester film on which a 10 cm long cable with a length of ² mm is aluminum-evaporated, and as shown in FIG. 1 (E), is wrapped and covered with the polyester film surface with the aluminum-evaporated surface facing out by a vertical welding seal method to measure degassing. FIG. 3 shows a gas chromatogram when the gas was placed in a desiccator, left at room temperature for one day, and the temperature was raised to measure the amount of generated gas.

The heat resistant temperature of the CV cable is specified by the temperature of the crosslinked polyethylene insulator, and is 90 ° C. When the temperature of the cross-linked polyethylene insulator is 90 ° C., the vinyl chloride resin in the sheath portion in contact with the outside air is about 50 to 6
It is considered to be 0 ° C. Here, in order to simulate the case where the vinyl chloride resin reached the maximum temperature, the generated gas was measured at an environmental temperature of the CV cable of 60 ° C. FIG.
According to the gas chromatogram of FIG. 6, the naked C shown in FIG.
It can be seen that the amount of the main component generated from the bare cable is suppressed to an extremely small amount as compared with the organic gas generated from the V cable.

FIG. 4 shows a gas chromatogram when the amount of gas generated from the aluminum-deposited polyester film alone is measured at a temperature of 60 ° C., and the amount of gas generated from the film is extremely small.

FIG. 5 shows an organic gas generation rate at each temperature. The gas generation rate of the bare CV cable is 665.5 μgC / (m ² · h) at room temperature, but the gas generation rate increases as the temperature of the CV cable increases. 0.5 μgC
/ (M ² · h). On the other hand, the gas generation rate of the CV cable covered with the film is 16.
0 to 26.7 μgC / (m ² · h). The gas generation rate from the film alone is 0-27.2 μgC /
(M ² · h), and the gas generation rate from the CV cable covered with the film is equivalent to the gas generation rate from the film alone, so the gas generated from the CV cable is completely shut off and It can be understood that the air does not pass through.

The present invention is not limited to the above embodiment, and various modifications are possible. For example, in the above embodiment, the tape-like film is wound in the horizontal or vertical direction to wrap and cover the electric wire.However, the film is processed into a cylindrical bag having a diameter slightly larger than the diameter of the electric wire. Wrap the wires while passing them through, and remove the extra film
As shown in (C) to (F), a process of bonding or welding and integrating may be performed. Needless to say, a plurality of electric wires obtained by bundling single wires may be similarly applied.

[0020]

As is apparent from the above description, according to the present invention, an adhesive is applied to one surface of a high-molecular organic film such as ethylene-vinyl alcohol copolymer, polyethylene, polypropylene, or polyester to be used in a clean room. In this case, even when a CV cable, a CE cable, or a flame-retardant cross-linked polyethylene cable, which always generates a small amount of organic gas, is used in a clean room, the generation of organic gas can be suppressed. Further, by bonding a metal foil to one surface of the polymer organic film and laminating the polymer organic film on the upper surface of the metal, the effect of suppressing generation of organic gas can be further enhanced.

Furthermore, a metal foil or a metal-deposited surface adhered or vapor-deposited on the organic film with a width smaller than the width of the organic film, and wrapped with a film in which only the organic film remains on at least one side, or After wrapping the foil with an organic film on which the adhesive or metal has been deposited and covering it, and further wrapping and covering the adhesive with a polymer organic film coated on one side, the metal end of the film can be completely covered with the polymer organic film. Thus, electrical safety, chemical resistance to chemicals, strength against surface friction, and the like can be improved, and degassing prevention performance can be improved.

Therefore, in a clean room such as a semiconductor factory or a liquid crystal factory, it is possible to prevent the organic gas generated from the electric wires from adsorbing on the silicon wafer or the glass substrate being processed, thereby lowering the product yield.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of a clean room wiring processing method and a clean room wiring cable according to the present invention.

FIG. 2 is a diagram showing an embodiment of a film.

FIG. 3 is a diagram showing a gas chromatogram of an organic gas generated from a CV cable heat-sealed with an aluminum-evaporated polyester film.

FIG. 4 is a view showing a gas chromatogram of an organic gas generated from an aluminum vapor-deposited polyester film.

FIG. 5 is a diagram showing organic gas generation rates at various environmental temperatures.

FIG. 6 is a diagram showing an example of an organic gas generated from a CV cable.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Wiring cable, 2, 3, 21 ... Film, 4 ... Welding machine, 11, 13 ... Polymer organic film, 12 ... Aluminum,
22: film end, 23: metal end, 24: organic film with adhesive.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Tomoaki Kajima 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Corporation F-term (reference) 5G313 AA10 AB10 AC08 AD01 AD02 AE01 AE02 AE08

Claims (10)

[Claims] 1. A wiring method for a clean room, wherein a surface of a wiring cable used in a clean room is wrapped and covered with a polymer organic film which does not allow organic gas to pass therethrough. 2. The method according to claim 1, wherein the polymer organic film is a film of ethylene vinyl alcohol copolymer, polyethylene, polypropylene, or polyester. 3. The method according to claim 1, wherein the polymer organic film has a metal foil adhered to at least one surface. 4. The method according to claim 3, wherein the polymer organic film is formed by laminating an organic film on an upper surface of a metal foil. 5. A wiring cable for a clean room, wherein the surface is wrapped and covered with an organic gas-impermeable high-molecular film coated with an adhesive on one surface. 6. The wiring cable for a clean room according to claim 5, wherein the polymer organic film is a film of ethylene vinyl alcohol copolymer, polyethylene, polypropylene, or polyester. 7. The wiring cable for a clean room according to claim 5, wherein the polymer organic film has a metal foil adhered to at least one surface. 8. The wiring cable for a clean room according to claim 7, wherein the polymer organic film is formed by laminating an organic film on an upper surface of a metal. 9. A film having a metal foil or a metal vapor-deposited surface adhered or vapor-deposited on the organic film with a width smaller than the width of the organic film, and wrapping and covering the film with the organic film-only portion remaining on at least one side. Characteristic clean room wiring cable. 10. A wiring cable for a clean room, wherein a metal foil is wrapped and covered with an organic film on which an adhesive or metal is vapor-deposited, and further covered with a polymer organic film coated on one side with an adhesive.