JP2002169122A - Galvanomirror device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a galvanomirror device, whose driving characteristics to a mirror is excellent, whose entire shape can be made compact and high impact resistance is assured of delivery. SOLUTION: The galvanomirror is provided with at least a movable part 30 having the mirror 12, a support means 34 to support the movable part 30 to a fixed member 35, so as to be inclined around a first shaft 20 and a second shaft 21 and a driving means. The supporting means 34 is arranged in the direction of the first shaft 20 to the mirror 12, and a first driving means and a second driving means are constituted of a magnet 38 to supply the movable part 30 with a static magnetic field and of electromagnetic coils 32 and 33 to generate an electromagnetic field, by which the movable part 30 is inclined and driven around the first shaft 20 and the second shaft 21 with respect to the static magnetic field generated by the magnet.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for recording and / or recording information on an optical recording medium such as a magneto-optical disk drive, a write-once disk drive, a phase-change disk drive, a CD-ROM, a DVD, and an optical card. Also, the present invention relates to a galvanomirror device used for an information recording / reproducing apparatus for reproducing, an optical scanner, an optical deflector for optical communication, and the like.

[0002]

2. Description of the Related Art Magneto-optical disk drives, write-once disk drives, phase change disk drives, CD-ROs
In an information recording / reproducing apparatus for recording and / or reproducing information on / from an optical recording medium such as an M, DVD, or optical card, or an optical apparatus such as an optical scanner or an optical deflector such as optical communication,
For example, the inclination adjustment of the light beam for projecting the light beam on the predetermined data recording track provided on the optical recording medium with high definition, or the optical communication light beam for relaying the optical communication signal to the predetermined line in the optical communication. For switching, a galvano mirror device that can adjust the inclination of the reflection mirror is used.

A galvanomirror device for adjusting the tilt of a light beam projected on an optical recording medium from an optical pickup used in the information recording / reproducing apparatus is disclosed, for example, in Japanese Patent Laid-Open No. 5-1268.
No. 6 discloses this.

[0004] A galvanomirror device disclosed in Japanese Patent Application Laid-Open No. Hei 5-12686 will be described with reference to FIG.
FIG. 7 is a sectional view of the galvanomirror device.

In the galvano mirror device shown in FIG. 7, an electromagnetic coil 75 composed of a plurality of coils wound in a rectangular shape on the back surface of a circular reflecting mirror 74 has a center D of the reflecting mirror 74.
The short side of the electromagnetic coil 75 is bent and fixed to the side surface of the reflection mirror 74. The reflection mirror 74 is fixed to the upper surface of the mirror support 76. The mirror support 76 includes an integrated support column 77 and a base 78 formed at the center of the back surface of the support 76.
The support column 77 is provided with a hinge 77a. The reflection mirror 74 is supported by the hinge 77a so as to be tiltable and rotatable in an arbitrary direction.

The housing 71 has a ring-shaped back yoke 7 facing the side surface of the reflection mirror 74.
The multi-pole magnet 73 is provided on the inner peripheral surface of the back yoke 72. The multi-pole magnetized magnet 73 is provided such that its magnetic poles correspond one-to-one with the bent portion of the electromagnetic coil 75 provided on the side surface of the reflection mirror 74.

In such a galvanomirror device,
By supplying current to a desired coil of the electromagnetic coil 75,
When a magnetic field in a direction opposite to that of the magnetized magnet 73 corresponding to the coil is generated on both sides of the coil, the reflection mirror 74 is turned in the direction of arrows S and T in the drawing by electromagnetic action of the left-hand rule. A directional force is generated to generate a rotational torque around the center D1.

In this way, a predetermined current is supplied to the plurality of coils of the electromagnetic coil 74, and the magnetic field generated in the plurality of coils and the electromagnetic action of the magnetizing magnet 73 cause the hinge 77a to be centered. It is possible to tilt and rotate in any direction.

[0009]

SUMMARY OF THE INVENTION The above-mentioned Japanese Patent Laid-Open No. 5-12 / 1993
In Japanese Patent Publication No. 686, a galvanomirror device of an optical pickup used in an information recording / reproducing apparatus has a short side of an electromagnetic coil 75 composed of five coils for driving in five directions. It is arranged so as to surround the side surface of the mirror support 76 to be fixed.

Further, a multi-pole magnetized magnet 73 is provided so as to surround the short side of the electromagnetic coil 75.

For this reason, the mirror support 76 extends from the center of the rear end of the reflection surface of the reflection mirror 74 and is supported by a support column 77 having a hinge 77a.

As a result, the hinge 77a is the center of rotation of the mirror support 76, ie, the center of rotation when the reflection mirror 74 is tilted. On the other hand, the center of gravity of the mirror support portion 76 is a point indicated by G in the drawing near the center of the movable portion that is inclined integrally with the reflection mirror 74, and the rotation center 77a of the reflection mirror 74 is greatly shifted. When the center of gravity G of the mirror supporting portion 76 and the center of rotation 77a are largely displaced, resonance is likely to occur when the reflecting mirror 74 is driven to rotate, and the rotational drive control is deteriorated. In addition, the entire shape of the reflecting mirror 74 and the housing 71 of the galvano mirror device increases in the direction perpendicular to the reflecting surface of the reflecting mirror 74.

It is desired to reduce the size and weight of the optical pickup and the optical polarizer of the information recording / reproducing apparatus, and it is required to adjust the inclination of the light beam with high precision by using a galvanomirror device. However, there is a problem that the size of the reflection mirror 74 in the direction perpendicular to the reflection surface becomes large.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a galvanomirror device which has good mirror driving characteristics, can be miniaturized in overall shape, and can sufficiently withstand an impact during transportation. I do.

[0015]

SUMMARY OF THE INVENTION A galvanomirror device of the present invention supports a movable portion having at least a mirror, and the movable portion is tiltably supported on a fixed member about a first axis and a second axis. A galvanomirror having a supporting means, a first driving means for driving the movable portion around the first axis, and a second driving means for driving the movable section around the second axis; And the second driving means,
The mirror is arranged on both sides of a plane perpendicular to the reflection surface of the mirror including the first axis with respect to one axis, and the support means is arranged in the first axial direction with respect to the mirror. Features.

The first driving means 32 of the galvanomirror device of the present invention is characterized by having a magnet whose surface is multipolarly magnetized.

The galvanomirror device of the present invention is characterized in that the first
And a coil which is used for both the driving means and the second driving means.

Further, the galvanomirror device of the present invention is characterized in that it has a magnet which is used for both the first driving means and the second driving means.

Further, the first driving means and the second driving means of the galvanomirror device of the present invention include a magnet for supplying a static magnetic field to the movable portion, and the movable portion for responding to a static magnetic field from the magnet. It is characterized by comprising an electromagnetic coil for generating an electromagnetic field for tilting and driving around the first axis and the second axis.

The galvanomirror device according to the present invention is characterized in that the electromagnetic coil is arranged on the movable part and the magnet is arranged on the fixed member.

The galvanomirror device according to the present invention is characterized in that the magnet is arranged on the movable part and the electromagnetic coil is arranged on the fixed member.

The supporting means of the galvanomirror device of the present invention is formed into a shape which can be deformed and restored when the movable portion is tilted and driven around the first and second axes by using an elastic member. It is a support spring.

According to the present invention, there is provided a driving means for tilting and driving around the first axis and the second axis in parallel with the first axial direction of the movable part, and further comprises a driving means for driving the movable part in the first axial direction. A supporting means for supporting the fixed member can be provided, and the center of rotation of the movable portion can be easily matched with or approximated to the center of gravity, so that the size of the galvanomirror device can be reduced.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view illustrating the configuration of an embodiment of a galvano mirror device according to the present invention, FIG. 2 is an explanatory diagram illustrating an example of use of the galvano mirror device according to the present invention, and FIG. FIG. 4 is a front view showing an assembled state of one embodiment of the galvanomirror device, and FIG. 4 is a side view showing an assembled state of one embodiment of the galvanomirror device according to the present invention.

First, referring to FIG. 2, an example in which a galvanomirror device according to the present invention is applied to an optical path switching device for optical communication will be described. The galvanomirror device 11
The light for transmitting an optical communication signal emitted from the end of one optical fiber 13 is converted into a parallel light 17 by a parallel optical lens 14 and projected on the reflecting surface of a reflecting mirror 12 of the galvanomirror device 11. The reflection mirror 12 can be tilted around the first rotation axis 20 and the second rotation axis 21 in the drawing. The reflected light 18 reflected by the reflection mirror 12 is:
One of a total of nine condenser lenses 15a to 15i arranged in three rows and three rows on a plane substantially perpendicular to the reflected light 18 is provided around the first and second rotation axes 20 and 21 of the reflection mirror 12. Selective incidence by adjusting the tilt to The ends of optical fibers 16a to 16i are connected to the plurality of condenser lenses 15a to 15i, respectively.

That is, the parallel light 17 emitted from the optical fiber 13 and converted by the parallel lens 14 enters the reflection mirror 12. This reflecting mirror 12 is
And the second rotary shafts 20 and 21 are selected so that the reflected light 18 is incident on any of the condenser lenses 15a to 15i. Selected condenser lens 15a
15i is transmitted to the optical fibers 16a to 16i connected to the selected condenser lenses 15a to 15i.

The galvanomirror device 1 shown in FIG.
Assuming that 1 is used for an optical pickup of an information recording / reproducing apparatus, although not shown, the condensing lenses 15a to 15i are not shown.
Is a single condenser lens, and the light incident on the single condenser lens is tilted in two directions by the reflection mirror 12 so that the light spot of the condenser lens on the optical recording medium is moved in the tracking direction and the tangential direction. Can be moved. In order for the light to be projected on the optical recording medium to be accurately projected on the information recording track formed on the optical recording medium,
A first rotation axis 20 and a second rotation axis 21 of the reflection mirror 12
Adjust by tilting around.

The specific structure of the galvanomirror device 11 of the present invention used in the optical path switching device for optical communication and the optical pickup of the information recording / reproducing device will be described with reference to FIGS. 1, 3, and 4.

The rectangular reflecting mirror 12 is housed and fixed in the movable part 30. The movable portion 30 includes a box-shaped mirror holding member 31 for storing and fixing the outer peripheral surface of the rectangular reflection mirror 12, first electromagnetic coils 32a and 32b, second electromagnetic coils 33a and 33b, and support springs 34a to 34a. 34d. The mirror holding member 31 has the reflection mirror 12 on the inner surface thereof and the first and second rotation shafts 20 and 2 in the drawing.
It is stored and arranged in parallel with 1. The mirror holding member 3
In the left and right outer surfaces parallel to the first rotation shaft 20 in FIG.
Convex portions 31a, 31 into which first electromagnetic coils 32a, 32b and second electromagnetic coils 33a, 33b described later are fitted.
b, 31d, and 31e, and the protrusion 31
a, 31b, a concave portion 31c, and the convex portion 31d,
A concave portion 31f is provided between 31e. FIG. 1 does not show the convex portions 31d and 31e and the concave portion 31f for the sake of illustration.

Further, the first of the mirror holding members 31
One end of a pair of support springs 34a, 34b formed in a substantially S-shape is implanted on the upper side surface of the rotary shaft 20 in the direction of the rotation shaft 20, and one end of a pair of support springs 34c, 34d of the same shape is implanted on the lower side surface. Fixed. Each of these paired support springs 34a, 3
Reference numerals 4b, 34c and 34d are formed of elastic members and are implanted and fixed at equal positions with reference to the center of the reflection mirror 12 housed and fixed in the movable portion 30.

The first electromagnetic coils 32a and 32b are
Convex parts 31a, 31b, 31 on both sides of the movable part 30
A coil wound so as to be fitted to the outer periphery of d and 31e, and is an electromagnetic coil that generates electromagnetic fields having different directions and magnitudes according to the direction and magnitude of current supplied to the coils. The first electromagnetic coils 32a and 32b generate a rotational torque around the rotation shaft 20, and the center of the torque is at a point D1 on the rotation shaft 20.

The second electromagnetic coil 33a is wound so as to be fitted on the outer periphery of each of the projections 31a and 31b, and has coils 33c and 33d having different winding directions.
And the second electromagnetic coil 33b is
The coils are wound so as to fit on the outer circumferences of 1d and 31e, respectively, and include coils 33e and 33f having different winding directions. In the concave portion 31c, coils 33c and 33d of the second electromagnetic coil are provided side by side.
3c and 33d are connected in series. The coils 33e and 33f of the second electromagnetic coil 33b are arranged in parallel with the recess 31f, and the coils 33e and 33f are connected in series. An electromagnetic coil that generates electromagnetic fields having different directions and magnitudes depending on the direction and magnitude of the current supplied to these coils 33c to 33f. The second electromagnetic coil 33a,
The rotation torque is generated around the rotation shaft 21 by 33b, and the center of the torque is at a point D1 on the rotation shaft 21.

In other words, the mirror holding member is arranged so that the reflection mirror 12 is parallel to the first rotation axis 20 and the second rotation axis 21 and the reflection surface is vertical as shown in FIG. 31 is fixed. The center D1 of the torque generated by the first electromagnetic coil 32a, 32b or the second electromagnetic coil 33a, 33b, the reflection mirror 12, the mirror holding member 31, the first electromagnetic coil 32a, 32b, and the second
The center of gravity G of the movable part 30 constituted by the electromagnetic coils 33a and 33b is identical. Further, the reflection mirror 12 is stored and fixed in the mirror holding member 31. This reflection mirror 12
The first electromagnetic coils 32a and 32b are fitted and fixed to both side surfaces of the mirror holding member 31 in which is stored and fixed.
The second electromagnetic coils 32a and 32b are fitted and fixed.

As described above, the reflection mirror 12, the first electromagnetic coils 32a and 32b, and the second electromagnetic coils 33a and 33b are attached and fixed to the mirror holding member 31, and the support springs 34a to 34d are fixed. The movable portion 30 that has been implanted and fixed is attached to the fixed member 35 by the support springs 34a to 34a.
It is fixed via 34d. The first electromagnetic coil 32a,
The four support springs 34a are used for the four power supplies required for the 32b.
Power is supplied using .about.34d.

The fixing member 35 has a substantially U-shape in its entire shape, and is provided between the lower surface 36 and the upper surface 37 by the movable member 30.
The other ends of the support springs 34a to 34d for supporting are fixedly implanted. Jetty 36a, 36b, 37 is provided on both sides of the lower surface 36 and the upper surface 37.
a and 37b are provided respectively. The jetty 36a
Between magnet 38a and yoke 39a
However, there is a magnet 38b between the jetty 36b and 37b.
And the yoke 39b are fitted and fixed.

As shown in FIG. 1, the magnets 38a and 38b have two magnetic pole surfaces magnetized and opposite poles face each other, and are opposed to the first electromagnetic coils 32a and 32b and the second electromagnetic coils 33a and 33b. It gives a static magnetic field.
The yokes 39a, 39b are connected to the magnets 38a,
This is a closed magnetic circuit member for preventing the static magnetic field 38b from leaking to the outside of both sides of the fixing member 35.

The fixing member 35 includes the support springs 34a to 34a.
When a current in a certain direction is supplied to the first electromagnetic coils 32a and 32b of the movable section 30 supported and fixed by the first electromagnetic coil 34d, the electromagnetic field generated by the first electromagnetic coils 32a and 32b and the magnets 38a and 38b Due to the electromagnetic action of the left hand rule with the static magnetic field, a force is generated in the direction indicated by the arrow in FIG.
a to 34d are deformed and tilted counterclockwise around the first rotation axis 20 in the figure, and the first electromagnetic coils 32a,
When the direction of the supply current to 32b is changed, a force is generated by an electromagnetic action in the direction opposite to the arrow in the figure, and the movable unit 30
Tilt clockwise in the figure.

On the other hand, the second electromagnetic coils 33a, 33
b, the respective currents in a certain direction are supplied.
Since the winding directions of the coils 33c and 33d of the electromagnetic coil 33a and the coils 33e and 33f of the second electromagnetic coil 33b are different, electromagnetic fields having different directions are generated. By the electromagnetic action of the electromagnetic fields generated from the coils 33c to 33f of the second electromagnetic coils 33a and 33b and the static magnetic fields of the magnets 38a and 38b,
As shown by arrows in the drawing, forces in different directions are generated, and the movable portion 30 deforms the support springs 34a to 34d, and tilts around the second rotation shaft 21 clockwise in the drawing,
If the direction of the current supplied to the second electromagnetic coils 33a, 33b is changed to a direction different from the above, the current will tilt counterclockwise in the drawing.

That is, the first electromagnetic coils 32a,
32b, the second electromagnetic coils 33a and 33b, and the magnets 38a and 38b are arranged symmetrically with respect to a plane 20a perpendicular to the reflection surface of the reflection mirror 12 including the first rotation axis 20, and furthermore, the plane 20a Are arranged so as not to include the flat surface 20a therein. Further, both sides of the reflection mirror 12 and the movable portion 30 in a direction parallel to the second rotation axis 21 (the reflection mirror 12
The first electromagnetic coils 32a and 32b, the second electromagnetic coils 33a and 33b, and the magnets 38a and 38b are arranged only in a direction parallel to the reflection surface of the Are arranged symmetrically with respect to a plane 21b perpendicular to the reflection surface of the reflection mirror 12 including the second rotation axis 21, but are arranged so as not to include the plane 21b therein. ing.

An electromagnetic field generated by the direction and magnitude of the current supplied to the first electromagnetic coils 32a and 32b and the second electromagnetic coils 33a and 33b arranged as described above,
By the electromagnetic action of the magnets 38a and 38b with the static magnetic field, the tilt angle and direction of the movable unit 30 around the first rotation shaft 20 and the second rotation shaft 21 can be adjusted and controlled.
The tilt angle and direction of the reflection surface of the reflection mirror 12 housed and fixed in the movable portion 30 are adjusted and controlled.

Further, since the movable portion 30 can be supported by the support members 34a to 34d disposed in the direction of the first rotation axis 20 of the movable portion 30 with respect to the fixed member 35, the entire galvanomirror device 11 can be supported. The shape can be formed small and thin.

Since the support springs 34a to 34d are disposed on the side surface of the movable portion 30 in the direction parallel to the first rotation shaft 20, the second spring perpendicular to the first rotation shaft 20 is provided.
Are arranged on a side surface parallel to the rotation shaft 21 of the first embodiment. A first electromagnetic coil 32a serving as a tilt driving unit of the reflection mirror 12,
32b, the second electromagnetic coils 33a and 33b, and the magnets 38a and 38b, and the support springs 34a to 34d can be arranged in a direction orthogonal to each other so as not to interfere with each other.

Therefore, the center of gravity G of the movable portion 30 can be easily matched with the support center of the support springs 34a to 34d (the rotation center when the movable portion 30 is tilted).

Further, the first and second electromagnetic coils 32a, 32b, 33 with respect to the first and second rotating shafts 20, 21.
a, 33b and the magnets 38a, 38b can be arranged completely symmetrically, and the first and second electromagnetic coils 32a, 32b can be arranged.
b, the center D of the torque due to the force generated at 33a, 33b
Since 1 can completely match the center of gravity G of the movable section 30 of the first and second rotating shafts 20 and 21, no resonance occurs when the movable section 30 is driven.

Further, the first and second electromagnetic coils 32a, 32b, 33a, 33b and support springs 34a to 34a-3
4d can be arranged on different side surfaces of the reflection mirror 12, so that the dimension in the direction perpendicular to the reflection surface of the reflection mirror 12 can be reduced.

Although not shown, a so-called moving magnet in which a magnet is arranged on a movable portion and a coil is arranged on a fixed portion can be used. The movable portion 30 includes first electromagnetic coils 32 provided on both side surfaces of the mirror holding member 31.
a, 32b and magnets 38 attached and fixed to the fixing member 35 instead of the second electromagnetic coils 33a, 33b.
a and 38b are fixed to both side surfaces of the mirror holding member 31. On the other hand, the first electromagnetic coils 32a, 32b and the second electromagnetic coils 33a, 33a, between the ridges 36a, 36b and 37a, 37b on both sides of the fixing member 35.
33b is arranged. Electromagnetic fields generated by currents supplied to the first electromagnetic coils 32a and 32b and the second electronic coils 33a and 33b provided on both sides of the fixing member 35, and magnets 38a provided on both sides of the mirror holding member 31 , 38b, the movable portion 30 can be tilted around the first rotation shaft 20 and around the second rotation shaft 21 by the electromagnetic action of the static magnetic field.

Next, another embodiment of the galvanomirror device according to the present invention will be described with reference to FIGS. FIG. 5 is a perspective view illustrating the overall configuration of another embodiment of the present invention, and FIG. 6 is an explanatory diagram illustrating the operation of another embodiment of the present invention. 1 to 4 are denoted by the same reference numerals, and detailed description is omitted.

The movable part 30 ′ according to another embodiment of the present invention comprises:
The shape and fixing method of the storage and fixing of the reflection mirror 12 are the same as those of the movable part 30.
The two electromagnetic coils 51a and 51b are respectively provided on the reflection surface of the reflection mirror 12 parallel to the rotation axis 20 and both side surfaces in the vertical direction.
And 52a and 52b are arranged. This electromagnetic coil 5
Movable part 3 on which 1a, 51b and 52a, 52b are arranged
The reference numeral 0 'is attached and supported on the lower surface 36 and the upper surface 37 of the fixing member 35 by support springs 53a to 53d.

The support springs 53a to 53d are formed in a substantially Ω shape using an elastic member, and the base ends thereof are the movable portion 30 '.
The other end is a lower surface portion 36 and an upper surface portion 37 of the fixing member 35.
Planted and fixed.

The electromagnetic coils 51a, 5a of the movable portion 30 '
Two magnets 54 magnetized in two poles in parallel with 1b
a and 54b are joined together, and a static magnetic field magnet 5 is joined to two magnets 55a and 55b magnetized in two poles in parallel with the electromagnetic coils 52a and 52b.
5 is attached and fixed between the lower surface 36 and the upper surface 37 of the fixing member 35. That is, the static magnetic field magnets 54 and 55 are connected to the electromagnetic coils 51a, 51b and 52
a, 52b are arranged to supply a static magnetic field.

The electromagnetic coils 51a, 51b and 52a,
The electromagnetic field generating currents are individually supplied to 52b.

The operation of the galvanomirror device having such a configuration will be described with reference to FIG. The electromagnetic coils 51a and 51b include the static magnetic field magnets 54 and 55, respectively.
In response to the static magnetic field, the movable portion 30 ′ supplies a current that generates an electromagnetic field in which a force is generated in the N direction in FIG.
In FIG. 6B, the movable portion 30 'is electromagnetically actuated by the electromagnetic action with respect to the static magnetic field from the static magnetic field magnets 54 and 55.
When a current that generates a force in the L direction in FIG.
The movable part 30 ′ rotates about the first rotation shaft 20 in the counterclockwise direction in the figure. Further, the electromagnetic coil 5
When the directions of the currents supplied to 1a, 51b and 52a, 52b are changed, the movable portion 30 'is tilted and rotated clockwise in FIG.

Next, in the electromagnetic coils 51a and 52a, the movable portion 30 'is electromagnetically actuated by a static magnetic field from the static magnetic field magnets 54 and 55, as shown in FIG.
A current for generating an electromagnetic field in which a force is generated in the L direction in the drawing is supplied, and the movable portions 30 ′ are provided to the electromagnetic coils 51 b and 52 b in response to a static magnetic field from the static magnetic field magnets 54 and 55. When a current for generating an electromagnetic field in which a force is generated in the N direction in FIG. 6B by the electromagnetic action is supplied,
The movable part 30 ′ tilts and rotates counterclockwise in the figure about the second rotation shaft 21. Further, the electromagnetic coil 5
When the direction of the supply current to 1a, 52a, and 51b, 52b is changed, the movable portion 30 'is inclined and rotated around the second rotation shaft 21 in the clockwise direction in the drawing.

That is, by controlling and adjusting the direction and value of the current supplied to the electromagnetic coils 51a, 51b and 52a, 52b, the direction and magnitude of the generated electromagnetic field can be controlled.
By the electromagnetic field and the static magnetic field from the static magnetic field magnets 54 and 55, the movable unit 30 'can be tilted around the first rotation axis 20 and the second rotation axis 21.

As a result, the number of electromagnetic coils provided on the movable portion 30 'can be reduced, and the size and weight can be further reduced as compared with the above-described embodiment of the present invention.

In another embodiment of the present invention, the electromagnetic coils 51a, 51d and 52a, 52b, 52
Is fixed to the movable part 30 ', and the electromagnetic coils 51a,
A static magnetic field is applied to 51b, 52a and 52b from static magnetic field magnets 54 and 55 attached and fixed to the fixing member 35. However, although not shown, the movable part 3
Attach and fix the static magnetic field magnets 54 and 55 to 0 ',
The fixing member 35 is provided with the electromagnetic coils 51a, 51b and 5
2a and 52b are attached and fixed, the electromagnetic fields from the electromagnetic coils 51a and 51b and 52a and 52b attached and fixed to the fixing member 35, and the static magnetic field magnet 5 attached to the movable portion 30 '.
The inclination of the movable part 30 'can be controlled by the electromagnetic action with the 4,55 static magnetic fields.

In the embodiment of the present invention, it is necessary to supply independent currents to the four electromagnetic coils 51a, 51b, 52a, 52b. A total of eight power supply lines are required. For this purpose, the four support springs 53a to 53d are made of beryllium copper foil, and a polyimide insulating layer is formed on both surfaces thereof, and a copper pattern is further formed thereon to obtain a total of eight power supply lines. The current supply paths of the electromagnetic coils 51a, 51b and 52a, 52b are
An insulating layer is provided on both surfaces of 3a to 53d, and one conductive layer to which the coil ends of the electromagnetic coils 51a, 51b and 52a, 52b are connected is formed on the insulating layer to form a material for the support springs 53a to 53d. And the electromagnetic coil 51 in the conductive layer.
a, 51b and the coil ends of 52a, 52b are connected.

Specifically, for example, the support spring 53a
An insulating layer is formed on the surface of the conductive elastic member of polyimide or the like, and a conductive layer is formed on the insulating layer by plating or printing a copper foil. One end of the electromagnetic coil 52a is connected to the conductive elastic member of the support spring 53a. Direct connection is made, and the other end of the electromagnetic coil 52a is connected to the conductive layer.

As a result, the number of electromagnetic field generating current supply lines can be reduced. Further, by forming the movable portion 30 'and the fixed member 35 with non-conductive insulating members, it is possible to secure contact and insulation between the support springs 53a to 53d. Further, such power supply is performed by the support spring 34.
a to 34d.

In the description of the other embodiment of the present invention, the shapes of the support springs 53a to 53d are substantially Ω-shaped.
It is also possible to make it substantially S-shaped for 34d. That is, the support springs 34a to 34d or 53a to 53d can support the movable portion 30 or 30 'on the fixed member 35 in the direction of the first rotation axis 20, and can also support the movable portion 30 or 30'.
Any shape can be used as long as it can be deformed and restored when tilted and rotated around the first rotation axis 20 and the second rotation axis 21, and is not limited to the above-described shape.

[0061]

According to the galvano mirror device of the present invention, the drive means for driving the movable portion to which the reflection mirror is fixedly mounted in two directions is disposed on one of both side surfaces of the reflection mirror, and the supporting member of the movable portion is formed by the reflection mirror. By arranging them opposite to each other on both sides, it becomes easy to make the center of gravity of the movable portion coincide with or close to the center of inclination, and this has the effect that the size of the galvanomirror can be reduced.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view illustrating the configuration of an embodiment of a galvano mirror device according to the present invention.

FIG. 2 is an explanatory diagram illustrating a usage example of the galvanomirror device of the present invention.

FIG. 3 is a front view showing an assembled state of one embodiment of the galvanomirror device according to the present invention.

FIG. 4 is a side view showing an assembled state of an embodiment of the galvanomirror device according to the present invention.

FIG. 5 is a perspective view illustrating the configuration of another embodiment of the galvanomirror device according to the present invention.

FIG. 6 is an explanatory diagram illustrating the operation of another embodiment of the galvanomirror device according to the present invention.

FIG. 7 is a cross-sectional view illustrating a conventional galvanomirror device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 ... Galvano mirror 12 ... Reflection mirror 20 ... 1st axis 21 ... 2nd axis 30 ... Movable part 31 ... Mirror holding member 32 ... 1st electromagnetic coil 33 ... 2nd electromagnetic coil 34 ... Support spring 35 ... Fixed Member 36 ... Lower surface part 37 ... Upper surface part 38 ... Magnet

Claims (8)

[Claims] A movable member having at least a mirror; support means for supporting the movable member so that the movable member can be tilted around a first axis and a second axis with respect to a fixed member;
A galvanomirror having first driving means for driving about a second axis and second driving means for driving about the second axis, wherein the first driving means and the second driving means The mirror is arranged on both sides of a plane perpendicular to the reflection surface of the mirror including the first axis with respect to one axis, and the support means is arranged in the first axial direction with respect to the mirror. Characteristic galvanometer mirror device. 2. The galvanomirror device according to claim 1, wherein said first driving means has a magnet whose surface is multipolarly magnetized. 3. The galvanomirror device according to claim 1, further comprising a coil used for both said first driving means and said second driving means. 4. The galvanomirror device according to claim 1, further comprising a magnet used for both said first driving means and said second driving means. 5. The first driving means and the second driving means,
A magnet for supplying a static magnetic field to the movable section; and an electromagnetic coil for generating an electromagnetic field for tilting and driving the movable section around the first axis and the second axis with respect to the static magnetic field from the magnet. The galvanomirror device according to claim 1, wherein: 6. The galvanomirror device according to claim 5, wherein said electromagnetic coil is disposed on said movable portion, and said magnet is disposed on said fixed member. 7. The galvanomirror device according to claim 5, wherein said magnet is arranged on said movable portion, and said electromagnetic coil is arranged on said fixed member. 8. The support means is a support spring formed into a shape which can be deformed and restored when the movable portion is tilted and driven around first and second axes by using an elastic member. The galvanomirror device according to claim 1, wherein: