JP2002157730A - Magnetic recording medium, its manufacturing method and magnetic recording/reproducing device - Google Patents
Magnetic recording medium, its manufacturing method and magnetic recording/reproducing deviceInfo
- Publication number
- JP2002157730A JP2002157730A JP2001275603A JP2001275603A JP2002157730A JP 2002157730 A JP2002157730 A JP 2002157730A JP 2001275603 A JP2001275603 A JP 2001275603A JP 2001275603 A JP2001275603 A JP 2001275603A JP 2002157730 A JP2002157730 A JP 2002157730A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- magnetic
- film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 46
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 239000000463 material Substances 0.000 claims abstract description 35
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 25
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 22
- 238000004544 sputter deposition Methods 0.000 claims abstract description 19
- 230000005415 magnetization Effects 0.000 claims abstract description 9
- 229910000510 noble metal Inorganic materials 0.000 claims description 17
- 229910017052 cobalt Inorganic materials 0.000 claims description 12
- 239000010941 cobalt Substances 0.000 claims description 12
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 230000005381 magnetic domain Effects 0.000 abstract description 12
- 239000010408 film Substances 0.000 description 81
- 239000010410 layer Substances 0.000 description 27
- 230000006911 nucleation Effects 0.000 description 12
- 238000010899 nucleation Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 239000006249 magnetic particle Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- LFYJSSARVMHQJB-QIXNEVBVSA-N bakuchiol Chemical compound CC(C)=CCC[C@@](C)(C=C)\C=C\C1=CC=C(O)C=C1 LFYJSSARVMHQJB-QIXNEVBVSA-N 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁化容易軸が基板
に対し主に垂直に配向した垂直磁性膜を有する磁気記録
媒体、その製造方法、および磁気記録再生装置に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium having a perpendicular magnetic film whose easy axis is mainly oriented perpendicular to a substrate, a method of manufacturing the same, and a magnetic recording / reproducing apparatus.
【０００２】[0002]
【従来の技術】現在市販されている磁気記録媒体は、磁
性膜内の磁化容易軸が主に基板に対し水平に配向した面
内磁気記録媒体がほとんどである。面内磁気記録媒体に
おいて、高記録密度化を実現するには、磁性粒子を小粒
径化し、ノイズ低減を図ることが有効であるが、磁性粒
子の粒径を小さくすると、この粒子の体積が小さくなる
ため、熱揺らぎに起因する再生特性の悪化が生じやすく
なる。また記録密度を高めた際に、記録ビット境界での
反磁界の影響により媒体ノイズが増加することがある。
これに対し、磁性膜内の磁化容易軸が主に基板に対し垂
直に配向した、いわゆる垂直磁気記録媒体は、高記録密
度化した場合でもビット境界での反磁界の影響が小さ
く、境界が鮮明な記録磁区が形成されるため低ノイズ化
が可能である。さらに、垂直磁気記録媒体は、比較的磁
性粒子の体積が大きくても高記録密度化が可能であるた
め熱揺らぎ耐性を高めることができることから、近年大
きな注目を集めている。例えば、特開昭６０−２１４４
１７号公報には、Ｃｏ合金からなる垂直磁性膜の下地膜
の材料としてＧｅ、Ｓｉを用いた垂直磁気記録媒体が開
示されている。また特開昭６３−２１１１１７号公報に
は、Ｃｏ合金からなる垂直磁性膜の下地膜として１〜１
００Åの厚さの炭素含有材料膜を形成した垂直磁気記録
媒体が開示されている。しかしながら、これら従来の磁
気記録媒体では、角型比を高めるのが難しく、逆磁区核
形成磁界Ｈｎが低くなる問題があった。このため、低記
録密度における熱揺らぎ耐性に劣る問題があった。これ
に対し、Ｈｎを向上させ得る磁気記録媒体として、遷移
金属（Ｃｏなど）と貴金属（Ｐｔなど）とを多層に積層
した多層膜を設けた磁気記録媒体が提案されている。
（特開平６−１１１４０３号公報、特開平８−３０９５
１号公報、ＵＳ５６６０９３０）2. Description of the Related Art Most magnetic recording media currently on the market are in-plane magnetic recording media in which the axis of easy magnetization in a magnetic film is mainly oriented horizontally to a substrate. In order to achieve a high recording density in an in-plane magnetic recording medium, it is effective to reduce the size of magnetic particles and reduce noise. However, when the particle size of the magnetic particles is reduced, the volume of the particles increases. Because of the small size, the deterioration of the reproduction characteristics due to the thermal fluctuation is likely to occur. Also, when the recording density is increased, medium noise may increase due to the influence of the demagnetizing field at the recording bit boundary.
In contrast, so-called perpendicular magnetic recording media, in which the easy axis of magnetization in the magnetic film is mainly oriented perpendicular to the substrate, are less affected by the demagnetizing field at the bit boundaries even when the recording density is increased, and the boundaries are sharp. Since low recording magnetic domains are formed, low noise can be achieved. Furthermore, perpendicular magnetic recording media have attracted much attention in recent years because they can increase the recording density even when the volume of magnetic particles is relatively large and can improve the resistance to thermal fluctuation. For example, Japanese Patent Application Laid-Open No. Sho 60-2144
No. 17 discloses a perpendicular magnetic recording medium using Ge and Si as a material of a base film of a perpendicular magnetic film made of a Co alloy. Japanese Patent Application Laid-Open No. 63-111117 discloses that a perpendicular magnetic film made of a Co alloy has
A perpendicular magnetic recording medium in which a carbon-containing material film having a thickness of 00 ° is formed is disclosed. However, these conventional magnetic recording media have a problem that it is difficult to increase the squareness ratio and the inverse magnetic domain nucleation magnetic field Hn is reduced. For this reason, there is a problem that the thermal fluctuation resistance at low recording density is inferior. On the other hand, as a magnetic recording medium capable of improving Hn, a magnetic recording medium provided with a multilayer film in which a transition metal (such as Co) and a noble metal (such as Pt) are stacked in multiple layers has been proposed.
(JP-A-6-111403, JP-A-8-3095)
No. 1, US Pat. No. 5,660,930)
【０００３】[0003]
【発明が解決しようとする課題】近年では、磁気記録媒
体の更なる高記録密度化が要望されており、これに伴い
ノイズ特性の向上が要求されている。しかしながら上記
従来の磁気記録媒体（遷移金属／貴金属多層膜を設けた
もの）は、ノイズ特性の点で満足できるものでなく、よ
りノイズ特性に優れた磁気記録媒体が要望されていた。
本発明は、上記事情に鑑みてなされたもので、角型比お
よび逆磁区核形成磁界Ｈｎを高めることができ、かつノ
イズ特性に優れた磁気記録媒体、その製造方法、および
磁気記録再生装置を提供することを目的とする。In recent years, there has been a demand for higher recording densities of magnetic recording media, and accordingly, improvement of noise characteristics has been demanded. However, the conventional magnetic recording medium (provided with a transition metal / noble metal multilayer film) is not satisfactory in terms of noise characteristics, and a magnetic recording medium having more excellent noise characteristics has been demanded.
The present invention has been made in view of the above circumstances, and provides a magnetic recording medium that can increase the squareness ratio and the reverse magnetic domain nucleation magnetic field Hn and has excellent noise characteristics, a method of manufacturing the same, and a magnetic recording and reproducing apparatus. The purpose is to provide.
【０００４】[0004]
【課題を解決するための手段】本発明の磁気記録媒体
は、基板上に、カーボンを含むカーボン下地膜が設けら
れ、その上に磁化容易軸が基板に対し主に垂直に配向し
た垂直磁性膜が設けられ、垂直磁性膜が、ＰｔとＰｄの
うち少なくとも１種とＣｏ含有材料とを、それぞれ複数
回にわたってスパッタすることによって形成されたもの
であることを特徴とする。カーボン下地膜の厚さは、１
ｎｍを越え、１００ｎｍ以下である範囲とするのが好ま
しい。カーボン下地膜の厚さは、３０〜１００ｎｍとす
るのがより好ましい。垂直磁性膜は、ＰｔとＰｄのうち
少なくとも１種からなる貴金属層と、Ｃｏを含むコバル
ト層とを複数積層した多層構造を有する構成とすること
ができる。本発明の磁気記録媒体は、Ｈｎを１５００〜
４５００（Ｏｅ）とするのが好ましい。貴金属層は、厚
さが０．４〜１．４ｎｍとなるように形成するのが好ま
しい。コバルト層は、厚さが０．１〜０．６ｎｍとなる
ように形成するのが好ましい。垂直磁性膜は、少なくと
も一部が、ＰｔとＰｄのうち少なくとも１種とＣｏとを
含む合金からなるものとすることができる。基板とカー
ボン下地膜との間には、軟磁性膜を設けることができ
る。本発明の磁気記録媒体の製造方法は、基板上に、カ
ーボンを含むカーボン下地膜を設け、その上に磁化容易
軸が基板に対し主に垂直に配向した垂直磁性膜を設けた
磁気記録媒体を製造する方法であって、ＰｔとＰｄのう
ち少なくとも１種と、Ｃｏ含有材料とをそれぞれ複数回
にわたってスパッタすることにより垂直磁性膜を形成す
ることを特徴とする。本発明の磁気記録再生装置は、磁
気記録媒体と、該磁気記録媒体に情報を記録再生する磁
気ヘッドとを備え、磁気記録媒体が、基板上にカーボン
下地膜が設けられ、その上に磁化容易軸が基板に対し主
に垂直に配向した垂直磁性膜が設けられ、カーボン下地
膜が、カーボンを含むものであり、垂直磁性膜が、Ｐｔ
とＰｄのうち少なくとも１種と、Ｃｏ含有材料とを複数
回にわたってスパッタしたものであることを特徴とす
る。According to the magnetic recording medium of the present invention, there is provided a perpendicular magnetic film in which a carbon base film containing carbon is provided on a substrate and an easy axis of magnetization is oriented mainly perpendicular to the substrate. And the perpendicular magnetic film is formed by sputtering at least one of Pt and Pd and a Co-containing material a plurality of times, respectively. The thickness of the carbon underlayer is 1
It is preferable that the thickness be in a range exceeding 100 nm and 100 nm or less. More preferably, the thickness of the carbon underlayer is 30 to 100 nm. The perpendicular magnetic film may have a multilayer structure in which a plurality of noble metal layers made of at least one of Pt and Pd and a cobalt layer containing Co are stacked. The magnetic recording medium of the present invention has Hn of 1500 to
It is preferably set to 4500 (Oe). The noble metal layer is preferably formed to have a thickness of 0.4 to 1.4 nm. The cobalt layer is preferably formed so as to have a thickness of 0.1 to 0.6 nm. The perpendicular magnetic film may be at least partially made of an alloy containing at least one of Pt and Pd and Co. A soft magnetic film can be provided between the substrate and the carbon base film. The method for producing a magnetic recording medium of the present invention is directed to a magnetic recording medium in which a carbon underlayer containing carbon is provided on a substrate, and a perpendicular magnetic film in which an axis of easy magnetization is oriented mainly perpendicular to the substrate is provided thereon. A method for manufacturing, characterized in that at least one of Pt and Pd and a Co-containing material are each sputtered a plurality of times to form a perpendicular magnetic film. A magnetic recording / reproducing apparatus according to the present invention includes a magnetic recording medium and a magnetic head for recording / reproducing information on / from the magnetic recording medium. A perpendicular magnetic film whose axis is oriented mainly perpendicular to the substrate is provided, the carbon underlayer contains carbon, and the perpendicular magnetic film is made of Pt.
And at least one of Pd and a Co-containing material sputtered a plurality of times.
【０００５】[0005]
【発明の実施の形態】図１は、本発明の磁気記録媒体の
一実施形態を示すもので、ここに示す磁気記録媒体は、
基板１上にカーボン下地膜２が設けられ、その上に磁化
容易軸が基板に対し主に垂直に配向した垂直磁性膜３が
設けられ、その上に保護膜４、潤滑膜５が設けられたも
のである。基板１としては、磁気記録媒体用基板として
一般に用いられるＮｉＰメッキ膜が形成されたアルミニ
ウム合金基板（以下、「ＮｉＰメッキＡｌ基板」とい
う）、ガラス基板、セラミック基板、カーボン基板、可
撓性樹脂基板、またはこれらの基板にＮｉＰ膜をメッキ
あるいはスパッタ法により形成した基板などを用いるこ
とができる。FIG. 1 shows an embodiment of a magnetic recording medium according to the present invention. The magnetic recording medium shown in FIG.
A carbon base film 2 is provided on a substrate 1, a perpendicular magnetic film 3 having an easy axis of magnetization oriented mainly perpendicular to the substrate is provided thereon, and a protective film 4 and a lubricating film 5 are provided thereon. Things. As the substrate 1, an aluminum alloy substrate on which a NiP plating film generally used as a substrate for a magnetic recording medium is formed (hereinafter, referred to as “NiP plating Al substrate”), a glass substrate, a ceramic substrate, a carbon substrate, a flexible resin substrate Alternatively, a substrate in which a NiP film is formed on these substrates by plating or sputtering can be used.
【０００６】カーボン下地膜２は、カーボンを含む材料
からなるものである。カーボン下地膜２の厚さは、１ｎ
ｍを越え、１００ｎｍ以下となる範囲（すなわち１０Å
を越え、１０００Å以下となる範囲）とするのが好まし
い。この厚さは、ノイズ特性、保磁力、逆磁区核形成磁
界Ｈｎなどの点から３０〜１００ｎｍ（３００〜１００
０Å）、好ましくは４０〜９０ｎｍ（４００〜９００
Å）とするのが望ましい。この厚さが上記範囲未満であ
ると、保磁力、ノイズ特性が低下しやすくなる。また上
記範囲を越えると、カーボン下地膜２の表面性が悪化し
やすくなる。The carbon base film 2 is made of a material containing carbon. The thickness of the carbon base film 2 is 1 n
m to 100 nm or less (ie, 10 °).
Over the range of 1000 ° or less). This thickness is 30 to 100 nm (300 to 100 nm) in view of noise characteristics, coercive force, reverse domain nucleation magnetic field Hn, and the like.
0 °), preferably 40 to 90 nm (400 to 900 nm).
Å) is desirable. If the thickness is less than the above range, the coercive force and noise characteristics are likely to be reduced. If the ratio exceeds the above range, the surface properties of the carbon base film 2 tend to deteriorate.
【０００７】垂直磁性膜３は、ＰｔとＰｄのうち少なく
とも１種とＣｏ含有材料とを複数回にわたってスパッタ
することによって形成されたものである。図１（ｂ）に
示すように、本実施形態では、垂直磁性膜３は、Ｐｔと
Ｐｄのうち少なくとも１種からなる複数の貴金属層３ａ
と、Ｃｏを含む材料からなる複数のコバルト層３ｂとを
交互に積層した多層構造を有する。貴金属層３ａの材料
としては、Ｐｔ、Ｐｄのほか、ＰｔとＰｄの合金が使用
可能である。貴金属層３ａの厚さは、０．４〜１．４ｎ
ｍ（４〜１４Å）（好ましくは０．６〜１．０ｎｍ）と
するのが好ましい。この厚さが上記範囲を外れると、保
磁力および逆磁区核形成磁界Ｈｎが低下する。またノイ
ズ特性が劣化しやすくなる。The perpendicular magnetic film 3 is formed by sputtering at least one of Pt and Pd and a Co-containing material a plurality of times. As shown in FIG. 1B, in the present embodiment, the perpendicular magnetic film 3 includes a plurality of noble metal layers 3a made of at least one of Pt and Pd.
And a plurality of cobalt layers 3b made of a material containing Co are alternately stacked. As a material of the noble metal layer 3a, an alloy of Pt and Pd can be used in addition to Pt and Pd. The thickness of the noble metal layer 3a is 0.4 to 1.4 n
m (4 to 14 °) (preferably 0.6 to 1.0 nm). If the thickness is out of the above range, the coercive force and the reverse magnetic domain nucleation magnetic field Hn decrease. In addition, noise characteristics are likely to deteriorate.
【０００８】コバルト層３ｂの材料としては、Ｃｏを用
いてもよいし、Ｃｏを主成分とし、他の元素（Ｃｒ、Ｔ
ａ、Ｃなど）を含むＣｏ合金を用いてもよい。コバルト
層３ｂの厚さは０．１〜０．６ｎｍ（１〜６Å）（好ま
しくは０．１〜０．４ｎｍ）とするのが好ましい。この
厚さが上記範囲を外れると、保磁力および逆磁区核形成
磁界Ｈｎが低下する。またノイズ特性が劣化しやすくな
る。貴金属層３ａおよびコバルト層３ｂの形成数は、合
計で１０〜６０とするのが好ましい。垂直磁性膜３は、
最下層側に貴金属層３ａを形成してもよいし、コバルト
層３ｂを形成してもよいが、特に、貴金属層３ａを最下
層側に形成するのが好ましい。垂直磁性膜３の厚さは、
５〜４０ｎｍとするのが好ましい。As the material of the cobalt layer 3b, Co may be used, or Co may be used as a main component and other elements (Cr, T
a, C, etc.). It is preferable that the thickness of the cobalt layer 3b be 0.1 to 0.6 nm (1 to 6 °) (preferably 0.1 to 0.4 nm). If the thickness is out of the above range, the coercive force and the reverse magnetic domain nucleation magnetic field Hn decrease. In addition, noise characteristics are likely to deteriorate. It is preferable that the total number of the noble metal layer 3a and the cobalt layer 3b is 10 to 60. The perpendicular magnetic film 3
The noble metal layer 3a or the cobalt layer 3b may be formed on the lowermost layer side, but it is particularly preferable to form the noble metal layer 3a on the lowermost layer side. The thickness of the perpendicular magnetic film 3 is
It is preferably 5 to 40 nm.
【０００９】保護膜４は、垂直磁性膜３の腐食を防ぐと
ともに、ヘッドが媒体に接触したときに媒体表面の損傷
を防ぎ、かつヘッドと媒体の間の潤滑特性を確保するた
めのもので、従来公知の材料を使用でき、例えばＣ、Ｓ
ｉＯ2、ＺｒＯ2の単一組成、またはこれらを主成分とし
他元素を含むものが使用可能である。保護膜４の厚さ
は、１〜１０ｎｍ（１０〜１００Å）が望ましい。The protective film 4 is for preventing corrosion of the perpendicular magnetic film 3, preventing damage to the medium surface when the head comes in contact with the medium, and ensuring lubrication characteristics between the head and the medium. Conventionally known materials can be used, for example, C, S
A single composition of iO 2 or ZrO 2 or a composition containing these as a main component and containing other elements can be used. The thickness of the protective film 4 is desirably 1 to 10 nm (10 to 100 °).
【００１０】潤滑膜５には、パーフルオロポリエーテ
ル、フッ素化アルコール、フッ素化カルボン酸などの潤
滑剤を使用できる。For the lubricating film 5, a lubricant such as perfluoropolyether, fluorinated alcohol, or fluorinated carboxylic acid can be used.
【００１１】この磁気記録媒体は、逆磁区核形成磁界Ｈ
ｎを１５００〜４５００（Ｏｅ）とすることが好まし
い。Ｈｎが上記範囲未満であると、低記録密度における
熱揺らぎ耐性が低下し、上記範囲を越えると、記録特性
が低下する。ここで、逆磁区核形成磁界Ｈｎとは、一方
向に外部磁界を加えて磁気記録媒体を十分に磁化した
後、外部磁界を反転させ、逆方向の磁界強度を高めてい
ったときに、磁化反転を起こすときの外部磁界を指す。
逆磁区核形成磁界Ｈｎは、図２に示すヒステリシスルー
プ（ＭＨループ）において、上記逆方向の磁界強度を高
めていったときに、外部磁界が０となる点ａから磁化反
転を起こす点ｂまでの距離で表すことができる。This magnetic recording medium has a reverse magnetic domain nucleation magnetic field H
It is preferable that n is 1500 to 4500 (Oe). If Hn is less than the above range, the resistance to thermal fluctuations at low recording density decreases, and if it exceeds the above range, the recording characteristics deteriorate. Here, the reverse magnetic domain nucleation magnetic field Hn refers to a magnetization when the external magnetic field is reversed after applying an external magnetic field in one direction to sufficiently magnetize the magnetic recording medium and increasing the magnetic field strength in the opposite direction. Refers to the external magnetic field when inversion occurs.
In the hysteresis loop (MH loop) shown in FIG. 2, when the magnetic field strength in the reverse direction is increased, the reverse magnetic domain nucleation magnetic field Hn extends from point a at which the external magnetic field becomes 0 to point b at which magnetization reversal occurs. Can be expressed as
【００１２】図３は、上記磁気記録媒体を用いた磁気記
録再生装置の例を示すものである。ここに示す磁気記録
再生装置は、図１に示す構成の磁気記録媒体７と、磁気
記録媒体７を回転駆動させる媒体駆動部８と、磁気記録
媒体７に情報を記録再生する磁気ヘッド９と、ヘッド駆
動部１０と、記録再生信号処理系１１とを備えている。
記録再生信号処理系１１は、入力されたデータを処理し
て記録信号を磁気ヘッド９に送ったり、磁気ヘッド９か
らの再生信号を処理してデータを出力することができる
ようになっている。FIG. 3 shows an example of a magnetic recording and reproducing apparatus using the magnetic recording medium. The magnetic recording / reproducing apparatus shown here includes a magnetic recording medium 7 having a configuration shown in FIG. 1, a medium driving unit 8 for driving the magnetic recording medium 7 to rotate, a magnetic head 9 for recording / reproducing information on / from the magnetic recording medium 7, A head drive unit 10 and a recording / reproducing signal processing system 11 are provided.
The recording / reproducing signal processing system 11 can process input data and send a recording signal to the magnetic head 9, or can process a reproducing signal from the magnetic head 9 and output data.
【００１３】上記構成の磁気記録媒体を製造するには、
基板１上に、スパッタ法などによりカーボン下地膜２を
形成し、次いで垂直磁性膜３をスパッタ法により形成す
る。垂直磁性膜３を形成するには、貴金属層３ａを構成
する材料（ＰｔとＰｄのうち少なくとも１種）からなる
第１ターゲットと、コバルト層３ｂを構成する材料（Ｃ
ｏ含有材料）からなる第２ターゲットとを交互に用い
て、貴金属層３ａの構成材料と、コバルト層３ｂの構成
材料とを積層させて、垂直磁性膜３を形成する。なおカ
ーボン下地膜２の形成には、真空蒸着、イオンプレーテ
ィングなどを用いることもできる。次いで保護膜４を、
好ましくはプラズマＣＶＤ法、イオンビーム法、スパッ
タリング法により形成する。次いで、ディッピング法、
スピンコート法などによって潤滑膜５を形成する。To manufacture the magnetic recording medium having the above structure,
A carbon base film 2 is formed on a substrate 1 by a sputtering method or the like, and then a perpendicular magnetic film 3 is formed by a sputtering method. To form the perpendicular magnetic film 3, a first target made of a material (at least one of Pt and Pd) constituting the noble metal layer 3a and a material (C
The constituent material of the noble metal layer 3a and the constituent material of the cobalt layer 3b are laminated by alternately using the second targets made of (o-containing material) to form the perpendicular magnetic film 3. Note that vacuum deposition, ion plating, or the like can also be used to form the carbon base film 2. Next, the protective film 4 is
It is preferably formed by a plasma CVD method, an ion beam method, or a sputtering method. Then, dipping method,
The lubrication film 5 is formed by a spin coating method or the like.
【００１４】上記構成の磁気記録媒体にあっては、垂直
磁性膜３が、ＰｔとＰｄのうち少なくとも１種と、Ｃｏ
含有材料とを複数回にわたってスパッタすることによっ
て形成されたものであるので、角型比およびＨｎを高め
ることができる。また媒体ノイズを低減させ、ノイズ特
性を向上させることができる。また角型比およびＨｎに
優れていることから、熱揺らぎ耐性を向上させ、熱揺ら
ぎに起因するデータ消失などのトラブルを未然に防ぐこ
とができる。In the magnetic recording medium having the above-described structure, the perpendicular magnetic film 3 is composed of at least one of Pt and Pd and Co.
Since it is formed by sputtering the contained material a plurality of times, the squareness ratio and Hn can be increased. Further, the medium noise can be reduced and the noise characteristics can be improved. Further, since it is excellent in squareness ratio and Hn, it is possible to improve the resistance to thermal fluctuations and prevent troubles such as data loss due to thermal fluctuations.
【００１５】また上記製造方法にあっては、貴金属層３
ａを構成する材料からなる第１ターゲットと、コバルト
層３ｂを構成する材料からなる第２ターゲットとを交互
に用いて、貴金属層３ａの構成材料（ＰｔとＰｄのうち
少なくとも１種）と、コバルト層３ｂの構成材料（Ｃｏ
含有材料）とを積層させることによって、垂直磁性膜３
を形成するので、角型比、Ｈｎ、ノイズ特性に優れた磁
気記録媒体を容易に製造することができる。In the above manufacturing method, the noble metal layer 3
a, using a first target made of a material constituting the first material a and a second target made of a material constituting the cobalt layer 3b alternately, a material (at least one of Pt and Pd) of the noble metal layer 3a, The constituent material of the layer 3b (Co
Of the perpendicular magnetic film 3
Is formed, a magnetic recording medium having excellent squareness ratio, Hn, and noise characteristics can be easily manufactured.
【００１６】また上記磁気記録再生装置では、磁気記録
媒体の角型比およびＨｎを高め、かつノイズ特性を向上
させることができるため、高記録密度化が可能となる。
また角型比およびＨｎに優れていることから、熱揺らぎ
耐性を向上させ、熱揺らぎに起因するデータ消失などの
トラブルを未然に防ぐことができる。In the magnetic recording / reproducing apparatus, since the squareness ratio and Hn of the magnetic recording medium can be increased and the noise characteristics can be improved, it is possible to increase the recording density.
Further, since it is excellent in squareness ratio and Hn, it is possible to improve the resistance to thermal fluctuations and prevent troubles such as data loss due to thermal fluctuations.
【００１７】また本発明の磁気記録媒体において、垂直
磁性膜は、ＰｔとＰｄのうち少なくとも１種と、Ｃｏ含
有材料とを複数回にわたってスパッタすることによって
形成されたものであればよく、図１（ｂ）に示すような
多層構造を有するものに限定されない。すなわちＰｔと
Ｐｄのうち少なくとも１種と、Ｃｏ含有材料とが、明確
な境界を形成することなく垂直磁性膜を構成するものも
本発明の範囲に含まれる。例えば、図４に示すように、
符号１３で示す垂直磁性膜が、ＰｔとＰｄのうち少なく
とも１種とＣｏ含有材料とを複数回にわたってスパッタ
することによって形成されたものであり、かつ多層構造
でなく単層構造をなすものも本発明の磁気記録媒体の一
例として挙げることができる。ここに示す磁気記録媒体
では、成膜時において、ＰｔとＰｄのうち少なくとも１
種とＣｏ含有材料とが、少なくとも一部において互いに
混合するために、これら２種の材料が明確な境界を形成
することなく垂直磁性膜１３が形成されている。このた
め、この垂直磁性膜１３では、少なくとも一部が、Ｐｔ
とＰｄのうち少なくとも１種とＣｏとを含む合金となっ
ている。ここに示す例の磁気記録媒体においても、角型
比、Ｈｎ、およびノイズ特性を向上させることができる
という効果を得ることができる。In the magnetic recording medium of the present invention, the perpendicular magnetic film may be formed by sputtering at least one of Pt and Pd and a Co-containing material a plurality of times. It is not limited to the one having a multilayer structure as shown in (b). That is, a material in which at least one of Pt and Pd and the Co-containing material form a perpendicular magnetic film without forming a clear boundary is also included in the scope of the present invention. For example, as shown in FIG.
The perpendicular magnetic film denoted by reference numeral 13 is formed by sputtering at least one of Pt and Pd and a Co-containing material a plurality of times, and also has a single layer structure instead of a multilayer structure. It can be cited as an example of the magnetic recording medium of the invention. In the magnetic recording medium shown here, at least one of Pt and Pd
Since the seed and the Co-containing material are at least partially mixed with each other, the perpendicular magnetic film 13 is formed without forming a clear boundary between these two materials. Therefore, at least a part of the perpendicular magnetic film 13 is made of Pt.
And an alloy containing at least one of Pd and Co. Even in the magnetic recording medium of the example shown here, the effect that the squareness ratio, Hn, and noise characteristics can be improved can be obtained.
【００１８】また本発明では、基板１とカーボン下地膜
２との間に、軟磁性膜を設けることもできる。図５は、
基板１とカーボン下地膜２との間に軟磁性膜６を設けた
例を示すものである。この軟磁性膜６は、特に限定され
るものでないが、Ｆｅ、Ｎｉ、Ｃｏの単一組成膜、また
はＦｅ、Ｎｉ、Ｃｏに他の元素を含有させた合金からな
るものとするのが好ましい。軟磁性膜の材料の具体例と
しては、ＮｉＦｅ、ＦｅＣ、ＦｅＡｌＳｉ、ＣｏＺｒＮ
ｂ、ＣｏＴａＺｒ、ＦｅＴａＣ等の各種合金を挙げるこ
とができる。なお本明細書において主成分とは当該成分
を５０ａｔ％を越えて含むことを指す。Further, in the present invention, a soft magnetic film can be provided between the substrate 1 and the carbon base film 2. FIG.
1 shows an example in which a soft magnetic film 6 is provided between a substrate 1 and a carbon base film 2. The soft magnetic film 6 is not particularly limited, but is preferably made of a single composition film of Fe, Ni, and Co, or an alloy containing Fe, Ni, and Co containing another element. Specific examples of the soft magnetic film material include NiFe, FeC, FeAlSi, and CoZrN.
b, various alloys such as CoTaZr and FeTaC. In the present specification, the main component means that the component is contained in an amount exceeding 50 at%.
【００１９】[0019]
【実施例】（実施例１）以下、具体例を示して本発明の
作用効果を明確にする。洗浄済みのガラス製基板１（オ
ハラ社製。外径２．５インチ）をＤＣマグネトロンスパ
ッタ装置（アネルバ社製３０１０）のチャンバ内に収容
し、チャンバ内を真空到達度２×１０-7Ｔｏｒｒとなる
まで排気した後、この基板１上に、カーボンからなるカ
ーボン下地膜２を形成した。次いで、カーボン下地膜２
上に、Ｐｄからなる第１ターゲット、およびＣｏからな
る第２ターゲットを交互に用いて、ＰｄとＣｏとを１０
回ずつ交互にスパッタすることにより垂直磁性膜３を形
成した。第１ターゲットを用いたＰｄのスパッタ量は、
１回あたり厚さ０．８ｎｍ（８Å）に相当する量とし
た。第２ターゲットを用いたＣｏのスパッタ量は、１回
あたり厚さ０．２ｎｍ（２Å）に相当する量とした。垂
直磁性膜３の厚さは２０ｎｍ（２００Å）となった。垂
直磁性膜３上には、カーボンからなる保護膜４（厚さ７
ｎｍ（７０Å））を形成し、保護膜４上にはパーフルオ
ロポリエーテルからなる潤滑膜５をディッピング法によ
り形成した。EXAMPLES (Example 1) Hereinafter, the working effects of the present invention will be clarified by showing specific examples. The cleaned glass substrate 1 (manufactured by OHARA CORPORATION; outer diameter: 2.5 inches) is housed in a chamber of a DC magnetron sputtering apparatus (3010 manufactured by Anelva), and the inside of the chamber is set to a vacuum degree of 2 × 10 −7 Torr. After evacuating to the extent necessary, a carbon base film 2 made of carbon was formed on the substrate 1. Next, the carbon base film 2
On the top, Pd and Co are set to 10 by alternately using a first target made of Pd and a second target made of Co.
The perpendicular magnetic film 3 was formed by alternately sputtering each time. The sputtering amount of Pd using the first target is:
The amount was equivalent to a thickness of 0.8 nm (8 °) per time. The sputtering amount of Co using the second target was set to an amount corresponding to a thickness of 0.2 nm (2 °) per time. The thickness of the perpendicular magnetic film 3 became 20 nm (200 °). On the perpendicular magnetic film 3, a protective film 4 (thickness 7) made of carbon is formed.
nm (70 °)), and a lubricating film 5 made of perfluoropolyether was formed on the protective film 4 by a dipping method.
【００２０】（実施例２〜４）カーボン下地膜２の厚さ
を変えたこと以外は試験例１と同様にして磁気記録媒体
を作製した。Examples 2 to 4 Magnetic recording media were manufactured in the same manner as in Test Example 1 except that the thickness of the carbon underlayer 2 was changed.
【００２１】（実施例５）Ｐｄからなる第１ターゲット
に代えて、Ｐｔからなる第１ターゲットを用いること以
外は実施例２と同様にして磁気記録媒体を作製した。Example 5 A magnetic recording medium was manufactured in the same manner as in Example 2 except that a first target made of Pt was used instead of the first target made of Pd.
【００２２】（実施例６）基板１とカーボン下地膜２と
の間に、ＣｏＺｒＮｂ合金からなる軟磁性膜６（厚さ２
５０ｎｍ）を設けたこと以外は実施例１と同様にして磁
気記録媒体を作製した。(Embodiment 6) A soft magnetic film 6 (thickness 2) made of a CoZrNb alloy is provided between a substrate 1 and a carbon underlayer 2.
A magnetic recording medium was produced in the same manner as in Example 1 except that the thickness of the magnetic recording medium was 50 nm.
【００２３】（比較例１）カーボン下地膜２に代えて、
Ｐｄからなる下地膜を設けること以外は試験例１と同様
にして磁気記録媒体を作製した。(Comparative Example 1) Instead of the carbon base film 2,
A magnetic recording medium was manufactured in the same manner as in Test Example 1 except that a base film made of Pd was provided.
【００２４】（比較例２）垂直磁性膜３に代えて、Ｃｏ
ＣｒＰｔＴａ合金からなる垂直磁性膜（厚さ２０ｎｍ
（２００Å））を設けること以外は試験例１と同様にし
て磁気記録媒体を作製した。この垂直磁性膜は、ＣｏＣ
ｒＰｔＴａ合金からなるターゲットを用いたスパッタ法
により形成した。Comparative Example 2 Instead of the perpendicular magnetic film 3, Co
Perpendicular magnetic film (20 nm thick) made of CrPtTa alloy
A magnetic recording medium was produced in the same manner as in Test Example 1 except that (200 °)) was provided. This perpendicular magnetic film is made of CoC
It was formed by a sputtering method using a target made of an rPtTa alloy.
【００２５】上記実施例１〜６および比較例１、２の磁
気記録媒体の静磁気特性を振動式磁気特性測定装置（Ｖ
ＳＭ）を用いて測定した。また、これら磁気記録媒体の
電磁変換特性を、ＧＵＺＩＫ社製リードライトアナライ
ザＲＷＡ１６３２、およびスピンスタンドＳ１７０１Ｍ
Ｐを用いて測定した。電磁変換特性の評価には、磁気ヘ
ッドとして、再生部に巨大磁気抵抗（ＧＭＲ）素子を有
する複合型薄膜磁気記録ヘッドを用い、記録条件を線記
録密度２５０ｋＦＣＩとして測定を行った。熱揺らぎ特
性は、媒体を７０℃に加熱しておき、線記録密度５０ｋ
ＦＣＩにて書き込みを行った後、経時的な出力の低下を
測定する方法によって評価した。結果を表１に示す。な
お表中、積層数とは、垂直磁性膜３を形成する際の、第
１ターゲットを用いてスパッタする工程の数と、第２タ
ーゲットを用いてスパッタする工程の数との合計を示す
ものである。The magnetostatic characteristics of the magnetic recording media of Examples 1 to 6 and Comparative Examples 1 and 2 were measured by using a vibration type magnetic characteristic measuring device (V
SM). Further, the electromagnetic conversion characteristics of these magnetic recording media were measured using a read / write analyzer RWA1632 manufactured by GUZIK and a spin stand S1701M.
It was measured using P. For the evaluation of the electromagnetic conversion characteristics, a composite thin film magnetic recording head having a giant magnetoresistive (GMR) element in the reproducing section was used as a magnetic head, and the recording conditions were measured at a linear recording density of 250 kFCI. The thermal fluctuation characteristics are as follows: the medium is heated to 70 ° C., and the linear recording density is 50 k.
After writing by FCI, evaluation was made by a method of measuring a decrease in output over time. Table 1 shows the results. In the table, the number of layers indicates the total of the number of steps of sputtering using the first target and the number of steps of sputtering using the second target when forming the perpendicular magnetic film 3. is there.
【００２６】[0026]
【表１】 [Table 1]
【００２７】表１より、カーボン下地膜２を設け、垂直
磁性膜３を多層構造（または単層構造）とした実施例１
〜６の磁気記録媒体は、下地膜にＰｄを用いた比較例１
に比べ、ＨｃおよびＨｎが高く、しかもノイズ特性およ
び熱揺らぎ耐性の点でも優れた結果が得られたことがわ
かる。また実施例１〜６の磁気記録媒体は、垂直磁性膜
をＣｏＣｒＰｔＴａ合金からなるものとした比較例２に
比べ、ＨｃおよびＨｎが高く、熱揺らぎ耐性にも優れて
いることがわかる。From Table 1, it can be seen that the carbon underlayer 2 is provided and the perpendicular magnetic film 3 has a multilayer structure (or a single-layer structure).
Comparative Examples 1 to 6 using Pd for the underlayer
It can be seen that Hc and Hn were higher than those of Example 1, and excellent results were also obtained in terms of noise characteristics and thermal fluctuation resistance. Further, it can be seen that the magnetic recording media of Examples 1 to 6 have higher Hc and Hn and are excellent in thermal fluctuation resistance as compared with Comparative Example 2 in which the perpendicular magnetic film is made of a CoCrPtTa alloy.
【００２８】（比較例３）カーボン下地膜２を設けない
こと以外は実施例２と同様にして磁気記録媒体を作製し
た。実施例２および比較例３の磁気記録媒体のヒステリ
シスループを図６に示す（符号Ｂは実施例２、符号Ａは
比較例３）。この図より、カーボン下地膜２を設けるこ
とによって、逆磁区核形成磁界Ｈｎの値が高くなること
がわかる。Comparative Example 3 A magnetic recording medium was manufactured in the same manner as in Example 2 except that the carbon base film 2 was not provided. FIG. 6 shows the hysteresis loops of the magnetic recording media of Example 2 and Comparative Example 3 (reference numeral B is Example 2 and reference numeral A is Comparative Example 3). From this figure, it can be seen that the provision of the carbon underlayer 2 increases the value of the reversed magnetic domain nucleation magnetic field Hn.
【００２９】（実施例７）カーボン下地膜２の厚さを０
〜１００ｎｍの範囲で変化させること以外は実施例１と
同様にして磁気記録媒体を作製した。カーボン下地膜２
の厚さδｃと、保磁力Ｈｃ（垂直方向）および逆磁区核
形成磁界Ｈｎとの関係を図７に示す。この図より、カー
ボン下地膜２の厚さを３０〜１００ｎｍ、特に４０〜９
０ｎｍとすることによって保磁力Ｈｃおよび逆磁区核形
成磁界Ｈｎを向上させることができることがわかる。(Embodiment 7) The thickness of the carbon base film 2 is set to 0
A magnetic recording medium was manufactured in the same manner as in Example 1 except that the magnetic recording medium was changed in the range of 100 nm to 100 nm. Carbon underlayer 2
FIG. 7 shows a relationship between the thickness δc of the magnetic field and the coercive force Hc (in the vertical direction) and the reverse magnetic domain nucleation magnetic field Hn. As shown in this figure, the thickness of the carbon underlayer 2 is 30 to 100 nm, particularly 40 to 9 nm.
It is understood that the coercive force Hc and the reverse magnetic domain nucleation magnetic field Hn can be improved by setting the thickness to 0 nm.
【００３０】[0030]
【発明の効果】以上説明したように、本発明の磁気記録
媒体は、垂直磁性膜が、ＰｔとＰｄのうち少なくとも１
種とＣｏ含有材料とを複数回にわたってスパッタするこ
とによって形成されたものであるので、角型比およびＨ
ｎを高めることができる。またノイズ特性、熱揺らぎ耐
性を向上させることができる。As described above, in the magnetic recording medium of the present invention, the perpendicular magnetic film has at least one of Pt and Pd.
Since the seed and the Co-containing material are formed by sputtering a plurality of times, the squareness ratio and H
n can be increased. In addition, noise characteristics and thermal fluctuation resistance can be improved.
【００３１】また本発明の磁気記録媒体の製造方法にあ
っては、ＰｔとＰｄのうち少なくとも１種と、Ｃｏ含有
材料とをそれぞれ複数回にわたってスパッタすることに
より垂直磁性膜を形成するので、角型比、Ｈｎ、ノイズ
特性、熱揺らぎ耐性に優れた磁気記録媒体を容易に製造
することができる。In the method of manufacturing a magnetic recording medium of the present invention, a perpendicular magnetic film is formed by sputtering at least one of Pt and Pd and a Co-containing material a plurality of times, respectively. A magnetic recording medium excellent in mold ratio, Hn, noise characteristics, and resistance to thermal fluctuation can be easily manufactured.
【００３２】また本発明の磁気記録再生装置では、磁気
記録媒体の角型比およびＨｎを高め、かつノイズ特性を
向上させることができるため、高記録密度化が可能とな
る。また角型比およびＨｎに優れていることから、熱揺
らぎ耐性を向上させ、熱揺らぎに起因するデータ消失な
どのトラブルを未然に防ぐことができる。Further, in the magnetic recording / reproducing apparatus of the present invention, since the squareness ratio and Hn of the magnetic recording medium can be increased and the noise characteristics can be improved, it is possible to increase the recording density. Further, since it is excellent in squareness ratio and Hn, it is possible to improve the resistance to thermal fluctuations and prevent troubles such as data loss due to thermal fluctuations.
【図１】 （ａ）本発明の磁気記録媒体の一実施形態
を示す一部断面図である。（ｂ）（ａ）に示す磁気記録
媒体の要部拡大図である。FIG. 1A is a partial cross-sectional view showing one embodiment of a magnetic recording medium of the present invention. 3B is an enlarged view of a main part of the magnetic recording medium shown in FIG.
【図２】 逆磁区核形成磁界Ｈｎについての説明図で
ある。FIG. 2 is an explanatory diagram of a reversed domain nucleation magnetic field Hn.
【図３】 図１に示す磁気記録媒体を用いた磁気記録
再生装置の一例を示す概略構成図である。FIG. 3 is a schematic configuration diagram showing an example of a magnetic recording / reproducing apparatus using the magnetic recording medium shown in FIG.
【図４】 （ａ）本発明の磁気記録媒体の他の実施形
態を示す一部断面図である。（ｂ）（ａ）に示す磁気記
録媒体の要部拡大図である。FIG. 4A is a partial sectional view showing another embodiment of the magnetic recording medium of the present invention. 3B is an enlarged view of a main part of the magnetic recording medium shown in FIG.
【図５】 本発明の磁気記録媒体の他の実施形態を示
す一部断面図である。FIG. 5 is a partial sectional view showing another embodiment of the magnetic recording medium of the present invention.
【図６】 試験結果を示すグラフである。FIG. 6 is a graph showing test results.
【図７】 試験結果を示すグラフである。FIG. 7 is a graph showing test results.
１・・・基板、２・・・カーボン下地膜、３・・・垂直磁性膜、
３ａ・・・貴金属層、３ｂ・・・コバルト層DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... Carbon base film, 3 ... Perpendicular magnetic film,
3a: Noble metal layer, 3b: Cobalt layer
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｈ０１Ｆ 10/30 Ｈ０１Ｆ 10/30 41/18 41/18 (72)発明者 酒井 浩志 千葉県市原市八幡海岸通５番の１ 昭和電 工エイチ・ディー株式会社内 Ｆターム(参考） 5D006 BB01 BB07 BB08 CA01 CA05 DA03 DA08 EA03 FA09 5D112 AA03 AA05 AA24 BB01 BB05 BB06 BD01 FA04 5E049 AA04 BA08 DB12 GC01 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01F 10/30 H01F 10/30 41/18 41/18 (72) Inventor Hiroshi Sakai Yawata Coast, Ichihara City, Chiba Prefecture 5th No. 1 Showa Denko H.D. Co., Ltd. F-term (reference) 5D006 BB01 BB07 BB08 CA01 CA05 DA03 DA08 EA03 FA09 5D112 AA03 AA05 AA24 BB01 BB05 BB06 BD01 FA04 5E049 AA04 BA08 DB12 GC01
Claims (11)
ボン下地膜（２）が設けられ、その上に磁化容易軸が基
板に対し主に垂直に配向した垂直磁性膜（３）が設けら
れ、 垂直磁性膜が、ＰｔとＰｄのうち少なくとも１種とＣｏ
含有材料とを、それぞれ複数回にわたってスパッタする
ことによって形成されたものであることを特徴とする磁
気記録媒体。1. A carbon base film (2) containing carbon is provided on a substrate (1), and a perpendicular magnetic film (3) having an easy axis of magnetization oriented substantially perpendicular to the substrate is provided thereon. The perpendicular magnetic film is made of at least one of Pt and Pd and Co.
A magnetic recording medium characterized by being formed by sputtering a contained material a plurality of times.
え、１００ｎｍ以下であることを特徴とする請求項１記
載の磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein the thickness of the carbon underlayer is more than 1 nm and not more than 100 nm.
ｎｍであることを特徴とする請求項１記載の磁気記録媒
体。3. The thickness of the carbon underlayer is 30 to 100.
2. The magnetic recording medium according to claim 1, wherein
くとも１種からなる貴金属層（３ａ）と、Ｃｏを含むコ
バルト層（３ｂ）とを複数積層した多層構造を有するこ
とを特徴とする請求項１〜３のうちいずれか１項記載の
磁気記録媒体。4. The perpendicular magnetic film has a multilayer structure in which a plurality of noble metal layers (3a) made of at least one of Pt and Pd and a plurality of cobalt layers (3b) containing Co are laminated. Item 4. The magnetic recording medium according to any one of Items 1 to 3.
あることを特徴とする請求項１〜４のうちいずれか１項
記載の磁気記録媒体。5. The magnetic recording medium according to claim 1, wherein Hn is 1500 to 4500 (Oe).
ｍとなるように形成されていることを特徴とする請求項
４または５記載の磁気記録媒体。6. The noble metal layer has a thickness of 0.4 to 1.4 n.
The magnetic recording medium according to claim 4, wherein the magnetic recording medium is formed so as to be m.
ｎｍとなるように形成されていることを特徴とする請求
項４〜６のうちいずれか１項記載の磁気記録媒体。7. The cobalt layer has a thickness of 0.1 to 0.6.
The magnetic recording medium according to any one of claims 4 to 6, wherein the magnetic recording medium is formed to have a thickness of nm.
ｔとＰｄのうち少なくとも１種とＣｏとを含む合金から
なるものであることを特徴とする請求項１〜７のうちい
ずれか１項記載の磁気記録媒体。8. The perpendicular magnetic film at least partially includes P
8. The magnetic recording medium according to claim 1, wherein the magnetic recording medium is made of an alloy containing at least one of t and Pd and Co.
性膜が設けられていることを特徴とする請求項１〜８の
うちいずれか１項記載の磁気記録媒体。9. The magnetic recording medium according to claim 1, wherein a soft magnetic film is provided between the substrate and the carbon underlayer.
下地膜を設け、その上に磁化容易軸が基板に対し主に垂
直に配向した垂直磁性膜を設けた磁気記録媒体を製造す
る方法であって、 ＰｔとＰｄのうち少なくとも１種と、Ｃｏ含有材料とを
それぞれ複数回にわたってスパッタすることにより垂直
磁性膜を形成することを特徴とする磁気記録媒体の製造
方法。10. A method for producing a magnetic recording medium comprising: providing a carbon base film containing carbon on a substrate; and providing a perpendicular magnetic film on which an easy axis is mainly oriented perpendicular to the substrate. , Pt and Pd, and a Co-containing material, each of which is sputtered a plurality of times to form a perpendicular magnetic film.
情報を記録再生する磁気ヘッドとを備え、 磁気記録媒体が、基板上にカーボン下地膜が設けられ、
その上に磁化容易軸が基板に対し主に垂直に配向した垂
直磁性膜が設けられ、カーボン下地膜が、カーボンを含
むものであり、垂直磁性膜が、ＰｔとＰｄのうち少なく
とも１種と、Ｃｏ含有材料とを複数回にわたってスパッ
タしたものであることを特徴とする磁気記録再生装置。11. A magnetic recording medium comprising: a magnetic recording medium; and a magnetic head for recording and reproducing information on and from the magnetic recording medium, wherein the magnetic recording medium is provided with a carbon base film on a substrate,
A perpendicular magnetic film whose easy axis is mainly oriented perpendicular to the substrate is provided thereon, the carbon underlayer contains carbon, and the perpendicular magnetic film has at least one of Pt and Pd; A magnetic recording / reproducing apparatus characterized in that a Co-containing material is sputtered a plurality of times.
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|---|---|---|---|
| JP2001275603A JP4578737B2 (en) | 2000-09-11 | 2001-09-11 | Magnetic recording medium and magnetic recording / reproducing apparatus |
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|---|---|---|---|
| JP2000-275571 | 2000-09-11 | ||
| JP2000275571 | 2000-09-11 | ||
| JP2001275603A JP4578737B2 (en) | 2000-09-11 | 2001-09-11 | Magnetic recording medium and magnetic recording / reproducing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002157730A true JP2002157730A (en) | 2002-05-31 |
| JP4578737B2 JP4578737B2 (en) | 2010-11-10 |
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| JP2001275603A Expired - Fee Related JP4578737B2 (en) | 2000-09-11 | 2001-09-11 | Magnetic recording medium and magnetic recording / reproducing apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3451079B2 (en) | 2000-12-28 | 2003-09-29 | 日立マクセル株式会社 | Magnetic recording medium, method of manufacturing the same, and magnetic storage device |
| WO2004019322A1 (en) * | 2002-08-26 | 2004-03-04 | Fujitsu Limited | Lining magnetic film |
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| JPS62241122A (en) * | 1986-04-11 | 1987-10-21 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| JPS6413219A (en) * | 1987-07-07 | 1989-01-18 | Denki Kagaku Kogyo Kk | Magnetic recording medium |
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| JP3451079B2 (en) | 2000-12-28 | 2003-09-29 | 日立マクセル株式会社 | Magnetic recording medium, method of manufacturing the same, and magnetic storage device |
| WO2004019322A1 (en) * | 2002-08-26 | 2004-03-04 | Fujitsu Limited | Lining magnetic film |
| US7144641B2 (en) | 2002-08-26 | 2006-12-05 | Fujitsu Limited | Magnetic backlayer |
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| Publication number | Publication date |
|---|---|
| JP4578737B2 (en) | 2010-11-10 |
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