JP2002155144A - Borazine-containing silicon-based copolymer and method for producing thin film thereof - Google Patents
Borazine-containing silicon-based copolymer and method for producing thin film thereofInfo
- Publication number
- JP2002155144A JP2002155144A JP2001071162A JP2001071162A JP2002155144A JP 2002155144 A JP2002155144 A JP 2002155144A JP 2001071162 A JP2001071162 A JP 2001071162A JP 2001071162 A JP2001071162 A JP 2001071162A JP 2002155144 A JP2002155144 A JP 2002155144A
- Authority
- JP
- Japan
- Prior art keywords
- group
- hydrogen atom
- general formula
- borazine
- aralkyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BGECDVWSWDRFSP-UHFFFAOYSA-N borazine Chemical compound B1NBNBN1 BGECDVWSWDRFSP-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229920001577 copolymer Polymers 0.000 title claims abstract description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 23
- 239000010703 silicon Substances 0.000 title claims abstract description 23
- 239000010409 thin film Substances 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 125000003118 aryl group Chemical group 0.000 claims abstract description 45
- 125000003710 aryl alkyl group Chemical group 0.000 claims abstract description 30
- 150000001875 compounds Chemical class 0.000 claims abstract description 30
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 29
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 25
- 125000001424 substituent group Chemical group 0.000 claims description 12
- 150000003377 silicon compounds Chemical class 0.000 claims description 10
- 230000004580 weight loss Effects 0.000 claims description 8
- 125000001931 aliphatic group Chemical group 0.000 claims description 6
- 241000271566 Aves Species 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 31
- 229910052697 platinum Inorganic materials 0.000 abstract description 16
- 239000003054 catalyst Substances 0.000 abstract description 7
- 125000000304 alkynyl group Chemical group 0.000 abstract description 2
- 238000007259 addition reaction Methods 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 description 19
- 125000004432 carbon atom Chemical group C* 0.000 description 16
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 15
- 239000000243 solution Substances 0.000 description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- -1 phenylethynyl Chemical group 0.000 description 14
- 229920000642 polymer Polymers 0.000 description 12
- 239000010408 film Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 238000002411 thermogravimetry Methods 0.000 description 6
- UHXCHUWSQRLZJS-UHFFFAOYSA-N (4-dimethylsilylidenecyclohexa-2,5-dien-1-ylidene)-dimethylsilane Chemical compound C[Si](C)C1=CC=C([Si](C)C)C=C1 UHXCHUWSQRLZJS-UHFFFAOYSA-N 0.000 description 5
- DSVRVHYFPPQFTI-UHFFFAOYSA-N bis(ethenyl)-methyl-trimethylsilyloxysilane;platinum Chemical compound [Pt].C[Si](C)(C)O[Si](C)(C=C)C=C DSVRVHYFPPQFTI-UHFFFAOYSA-N 0.000 description 5
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical group C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 5
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000008096 xylene Substances 0.000 description 4
- PNXLPYYXCOXPBM-UHFFFAOYSA-N 1,3-diethynylbenzene Chemical compound C#CC1=CC=CC(C#C)=C1 PNXLPYYXCOXPBM-UHFFFAOYSA-N 0.000 description 3
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 125000000732 arylene group Chemical group 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 125000006267 biphenyl group Chemical group 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 125000001624 naphthyl group Chemical group 0.000 description 3
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- ZDRMMTYSQSIGRY-UHFFFAOYSA-N 1,3,5-triethynylbenzene Chemical compound C#CC1=CC(C#C)=CC(C#C)=C1 ZDRMMTYSQSIGRY-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000004957 naphthylene group Chemical group 0.000 description 2
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- OQJPAHYVGNJBJK-UHFFFAOYSA-N (3-dimethylsilylphenyl)-dimethylsilane Chemical compound C[SiH](C)C1=CC=CC([SiH](C)C)=C1 OQJPAHYVGNJBJK-UHFFFAOYSA-N 0.000 description 1
- RWXCHULDBYFSOC-UHFFFAOYSA-N (3-silylphenyl)silane Chemical compound [SiH3]C1=CC=CC([SiH3])=C1 RWXCHULDBYFSOC-UHFFFAOYSA-N 0.000 description 1
- WCYFKDOYGBYXEP-UHFFFAOYSA-N (5-dimethylsilylnaphthalen-1-yl)-dimethylsilane Chemical compound C1=CC=C2C([SiH](C)C)=CC=CC2=C1[SiH](C)C WCYFKDOYGBYXEP-UHFFFAOYSA-N 0.000 description 1
- NTJBKIYOJICXGY-UHFFFAOYSA-N 1,2,4-triethynylbenzene Chemical compound C#CC1=CC=C(C#C)C(C#C)=C1 NTJBKIYOJICXGY-UHFFFAOYSA-N 0.000 description 1
- QWSJLHMWMAKOHP-UHFFFAOYSA-N 1,2,4-tris(2-phenylethynyl)benzene Chemical compound C1=CC=CC=C1C#CC(C=C1C#CC=2C=CC=CC=2)=CC=C1C#CC1=CC=CC=C1 QWSJLHMWMAKOHP-UHFFFAOYSA-N 0.000 description 1
- RJGPVUBHWOYEKJ-UHFFFAOYSA-N 1,2,4-tris(prop-1-ynyl)benzene Chemical compound CC#CC1=CC=C(C#CC)C(C#CC)=C1 RJGPVUBHWOYEKJ-UHFFFAOYSA-N 0.000 description 1
- OYEDTTNTNYKSFX-UHFFFAOYSA-N 1,3-bis(2-phenylethynyl)benzene Chemical compound C1=CC=CC=C1C#CC1=CC=CC(C#CC=2C=CC=CC=2)=C1 OYEDTTNTNYKSFX-UHFFFAOYSA-N 0.000 description 1
- ZOIGWUYXGMMUIG-UHFFFAOYSA-N 1,3-bis(prop-1-ynyl)benzene Chemical compound CC#CC1=CC=CC(C#CC)=C1 ZOIGWUYXGMMUIG-UHFFFAOYSA-N 0.000 description 1
- MVLGANVFCMOJHR-UHFFFAOYSA-N 1,4-diethynylbenzene Chemical compound C#CC1=CC=C(C#C)C=C1 MVLGANVFCMOJHR-UHFFFAOYSA-N 0.000 description 1
- UGTMUSVIKUIPCM-UHFFFAOYSA-N 1,5-diethynylnaphthalene Chemical compound C1=CC=C2C(C#C)=CC=CC2=C1C#C UGTMUSVIKUIPCM-UHFFFAOYSA-N 0.000 description 1
- TZSNBHPFGNSWPO-UHFFFAOYSA-N 1,5-diphenylpenta-1,4-dien-3-one;platinum Chemical compound [Pt].[Pt].C=1C=CC=CC=1C=CC(=O)C=CC1=CC=CC=C1.C=1C=CC=CC=1C=CC(=O)C=CC1=CC=CC=C1.C=1C=CC=CC=1C=CC(=O)C=CC1=CC=CC=C1 TZSNBHPFGNSWPO-UHFFFAOYSA-N 0.000 description 1
- MXJJMQSKDPNPSX-UHFFFAOYSA-N 1-ethynyl-4-(4-ethynylphenyl)benzene Chemical group C1=CC(C#C)=CC=C1C1=CC=C(C#C)C=C1 MXJJMQSKDPNPSX-UHFFFAOYSA-N 0.000 description 1
- 125000000530 1-propynyl group Chemical group [H]C([H])([H])C#C* 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- IIPDKVKBZNLDMD-UHFFFAOYSA-N 9,10-diethynylanthracene Chemical compound C1=CC=C2C(C#C)=C(C=CC=C3)C3=C(C#C)C2=C1 IIPDKVKBZNLDMD-UHFFFAOYSA-N 0.000 description 1
- OZWOCFSESCEMQA-UHFFFAOYSA-N C1(=CC=CC=C1)C#CB1N(BN(BN1C)C)C Chemical compound C1(=CC=CC=C1)C#CB1N(BN(BN1C)C)C OZWOCFSESCEMQA-UHFFFAOYSA-N 0.000 description 1
- XNRQDUUXKHWEOW-UHFFFAOYSA-N C1(=CC=CC=C1)C#CB1N(BN(BN1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1 Chemical compound C1(=CC=CC=C1)C#CB1N(BN(BN1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1 XNRQDUUXKHWEOW-UHFFFAOYSA-N 0.000 description 1
- OYVXAESAZQSDPN-UHFFFAOYSA-N C1(=CC=CC=C1)CC#CC1=CC(=CC=C1)C#CCC1=CC=CC=C1 Chemical compound C1(=CC=CC=C1)CC#CC1=CC(=CC=C1)C#CCC1=CC=CC=C1 OYVXAESAZQSDPN-UHFFFAOYSA-N 0.000 description 1
- SCYZNKBIDHQUGL-UHFFFAOYSA-N C1=CC=C2C([SiH](C)C)=CC=C([SiH](C)C)C2=C1 Chemical compound C1=CC=C2C([SiH](C)C)=CC=C([SiH](C)C)C2=C1 SCYZNKBIDHQUGL-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- DSVGQVZAZSZEEX-UHFFFAOYSA-N [C].[Pt] Chemical compound [C].[Pt] DSVGQVZAZSZEEX-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 125000004653 anthracenylene group Chemical group 0.000 description 1
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 150000008378 aryl ethers Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- CVFGOTDZWYUULK-UHFFFAOYSA-N benzyl-[4-[4-[benzyl(methyl)silyl]phenyl]phenyl]-methylsilane Chemical group C=1C=C(C=2C=CC(=CC=2)[SiH](C)CC=2C=CC=CC=2)C=CC=1[SiH](C)CC1=CC=CC=C1 CVFGOTDZWYUULK-UHFFFAOYSA-N 0.000 description 1
- TXRFFSSLMRVELK-UHFFFAOYSA-N cycloocta-1,3-diene platinum Chemical compound [Pt].C1CCC=CC=CC1.C1CCC=CC=CC1 TXRFFSSLMRVELK-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- CCYPIYMRPBPHSE-UHFFFAOYSA-N ethyl-[3-[ethyl(methyl)silyl]phenyl]-methylsilane Chemical compound CC[SiH](C)C1=CC=CC([SiH](C)CC)=C1 CCYPIYMRPBPHSE-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RSPZSDWVQWRAEF-UHFFFAOYSA-N hepta-1,6-diyne Chemical compound C#CCCCC#C RSPZSDWVQWRAEF-UHFFFAOYSA-N 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- YFIBSNDOVCWPBL-UHFFFAOYSA-N hexa-1,5-diyne Chemical compound C#CCCC#C YFIBSNDOVCWPBL-UHFFFAOYSA-N 0.000 description 1
- 238000006459 hydrosilylation reaction Methods 0.000 description 1
- COVVKDNMUSQQSB-UHFFFAOYSA-N icosa-1,19-diyne Chemical compound C#CCCCCCCCCCCCCCCCCC#C COVVKDNMUSQQSB-UHFFFAOYSA-N 0.000 description 1
- 125000005647 linker group Chemical group 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- FVNJPTVKGKXSEH-UHFFFAOYSA-N methyl-(3-methylsilylphenyl)silane Chemical compound C[SiH2]C1=CC=CC([SiH2]C)=C1 FVNJPTVKGKXSEH-UHFFFAOYSA-N 0.000 description 1
- HDHGICXRNDZMSB-UHFFFAOYSA-N methyl-[3-[methyl(phenyl)silyl]phenyl]-phenylsilane Chemical compound C=1C=CC([SiH](C)C=2C=CC=CC=2)=CC=1[SiH](C)C1=CC=CC=C1 HDHGICXRNDZMSB-UHFFFAOYSA-N 0.000 description 1
- JVKLCZQSSJBZOT-UHFFFAOYSA-N methyl-[4-[methyl(octyl)silyl]phenyl]-octylsilane Chemical compound CCCCCCCC[SiH](C)C1=CC=C([SiH](C)CCCCCCCC)C=C1 JVKLCZQSSJBZOT-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- DMOVPHYFYSASTC-UHFFFAOYSA-N nona-1,8-diyne Chemical compound C#CCCCCCC#C DMOVPHYFYSASTC-UHFFFAOYSA-N 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 1
- XAFJSPPHVXDRIE-UHFFFAOYSA-L platinum(2+);triphenylphosphane;dichloride Chemical compound [Cl-].[Cl-].[Pt+2].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 XAFJSPPHVXDRIE-UHFFFAOYSA-L 0.000 description 1
- SYKXNRFLNZUGAJ-UHFFFAOYSA-N platinum;triphenylphosphane Chemical compound [Pt].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 SYKXNRFLNZUGAJ-UHFFFAOYSA-N 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 125000005649 substituted arylene group Chemical group 0.000 description 1
- 125000006836 terphenylene group Chemical group 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
Landscapes
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Silicon Polymers (AREA)
Abstract
(57)【要約】 (修正有)
【課題】 新規な3元系のボラジン含有ケイ素系共重合
ポリマー、及び該共重合ポリマーの薄膜の製造方法を提
供する。
【解決手段】 一般式(1)
(式中、R1はアルキル基、アリール基、アラルキル基
または水素原子を示し、R2はアルキル基、アリール
基、アラルキル基または水素原子を示す)で表される
B,B’,B”−トリアルキニルボラジン類と、一般式
(2)
(R7C≡C)mR8 (2)
(式中、R7はアルキル基、アリール基、アラルキル基
または水素原子を示し、R8は、2価または3価の基を
示す)で表されるジイン又はトリイン化合物をともに用
いて、それらを一般式(3)
(式中、R3およびR4はアルキル基、アリール基、ア
ラルキル基または水素原子を示し、R5は2価の基)で
表されるケイ素化合物と白金含有触媒の存在下に混合
し、その溶液を塗布することによって、アルキニル基へ
のヒドロシリル基の付加反応により、3元系ボラジン含
有ケイ素系共重合ポリマーの薄膜を得る。[PROBLEMS] To provide a novel ternary borazine-containing silicon-based copolymer and a method for producing a thin film of the copolymer. SOLUTION: General formula (1) (Wherein, R 1 represents an alkyl group, an aryl group, an aralkyl group, or a hydrogen atom, and R 2 represents an alkyl group, an aryl group, an aralkyl group, or a hydrogen atom). Trialquinyl borazines and a compound represented by the general formula (2) (R 7 C≡C) m R 8 (2) (wherein R 7 represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 8 represents 2 A divalent or trivalent group) and a compound represented by the general formula (3) (Wherein, R 3 and R 4 represent an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 5 is a divalent group) in the presence of a platinum-containing catalyst. By applying the solution, a thin film of a ternary borazine-containing silicon-based copolymer is obtained by an addition reaction of a hydrosilyl group to an alkynyl group.
Description
【0001】[0001]
【発明の属する技術分野】本発明は耐燃焼性、耐熱性等
のコーティング膜として有用な、新規なボラジン含有ケ
イ素系共重合ポリマー、及び該ボラジン含有ケイ素系共
重合ポリマーの薄膜の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel borazine-containing silicon-based copolymer useful as a coating film having, for example, flame resistance and heat resistance, and a method for producing a thin film of the borazine-containing silicon-based copolymer.
【0002】[0002]
【従来の技術】ボラジン含有ケイ素系ポリマーは、空気
中でも優れた熱安定性を示し、耐燃焼性、耐熱性コーテ
ィング材料等への応用が期待されているが、薄膜の簡便
な製造例はまだ知られていなかった。また、通常のジイ
ンまたはトリイン化合物をモノマー成分として含み、ボ
ラジンモノマーの使用量を抑えることができる3元系の
ボラジン含有ケイ素系共重合ポリマーも知られていなか
った。2. Description of the Related Art Borazine-containing silicon-based polymers exhibit excellent thermal stability even in air, and are expected to be applied to combustion-resistant and heat-resistant coating materials. Had not been. Further, there has been no known tertiary borazine-containing silicon-based copolymer containing a normal diyne or triin compound as a monomer component and capable of suppressing the amount of borazine monomer used.
【0003】[0003]
【発明が解決しようとする課題】したがって、本発明は
通常のジインまたはトリイン化合物をモノマー成分とし
て含み、ボラジンモノマーの使用量を抑えることができ
る、新規な3元系のボラジン含有ケイ素系共重合ポリマ
ー、及び該共重合ポリマーの耐燃焼性、耐熱性に優れた
薄膜の効率的な製造方法を提供することを目的とする。Accordingly, the present invention provides a novel tertiary borazine-containing silicon-based copolymer containing a conventional diyne or triin compound as a monomer component and capable of suppressing the amount of borazine monomer used. It is another object of the present invention to provide a method for efficiently producing a thin film of the copolymer having excellent flame resistance and heat resistance.
【0004】[0004]
【課題を解決するための手段】本発明者らは前記課題を
解決すべく鋭意研究を重ねた結果、B,B’,B”−ト
リアルキニルボラジン類と、ジイン又はトリイン化合物
を組み合わせて、2個以上のヒドロシリル基を有するケ
イ素化合物と白金含有触媒の存在下に混合し、その溶液
を塗布することによって、アルキニル基へのヒドロシリ
ル基の付加反応により、新規な3元系ボラジン含有ケイ
素系共重合ポリマーの薄膜が容易に得られるという新規
な事実を見い出し、本発明を完成させるにいたった。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to solve the above-mentioned problems, and as a result, the combination of B, B ', B "-trialkynylborazines with a diyne or triin compound has shown A novel tertiary borazine-containing silicon-based copolymer is obtained by mixing a silicon compound having at least two hydrosilyl groups with a platinum-containing catalyst and applying the resulting solution to add a hydrosilyl group to an alkynyl group. The present inventors have found a novel fact that a polymer thin film can be easily obtained, and have completed the present invention.
【0005】すなわち、本発明は次のような構成をとる
ものである。 1.一般式(1)That is, the present invention has the following configuration. 1. General formula (1)
【0006】[0006]
【化7】 Embedded image
【0007】(式中、R1はアルキル基、アリール基、
アラルキル基または水素原子を示し、R2はアルキル
基、アリール基、アラルキル基または水素原子を示す)
で表されるB,B’,B”−トリアルキニルボラジン類
と、一般式(2) (R7C≡C)mR8 (2) (式中、R7はアルキル基、アリール基、アラルキル基
または水素原子を示し、R8は、置換基を有していても
良い芳香族または脂肪族の2価または3価の基を示し、
mはR8が2価の基では2、R8が3価の基では3であ
る)で表されるジイン又はトリイン化合物をともに用い
て、それらを一般式(3)Wherein R 1 is an alkyl group, an aryl group,
An aralkyl group or a hydrogen atom, and R 2 represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom)
And B, B ', B "-trialkynyl borazine represented by the following general formula (2) (R 7 C≡C) m R 8 (2) (where R 7 is an alkyl group, an aryl group, an aralkyl R 8 represents an aromatic or aliphatic divalent or trivalent group which may have a substituent,
m by using both the diyne or avian compound represented by R 8 is a divalent In group 2, R 8 is a trivalent group is 3), they general formula (3)
【0008】[0008]
【化8】 Embedded image
【0009】(式中、R3およびR4はアルキル基、ア
リール基、アラルキル基または水素原子の中から選ばれ
る同一あるいは相異なる1価の基を示し、R5は置換基
を有していても良い芳香族の2価の基)で表される少な
くとも2個以上のヒドロシリル基を有するケイ素化合物
と反応させて得られるボラジン含有ケイ素系共重合ポリ
マー。 2.次の、一般式(4)(Wherein R 3 and R 4 are the same or different monovalent groups selected from an alkyl group, an aryl group, an aralkyl group and a hydrogen atom, and R 5 has a substituent. A borazine-containing silicon-based copolymer obtained by reacting with a silicon compound having at least two or more hydrosilyl groups represented by an aromatic divalent group). 2. The following general formula (4)
【0010】[0010]
【化9】 Embedded image
【0011】又は一般式(5)Or the general formula (5)
【0012】[0012]
【化10】 Embedded image
【0013】(これら式中、R1、R2、R3、R4、
R5、R7およびR8は、前記一般式(1)、(2)お
よび(3)中のものと同じであり、c、d、e、f、
g、hおよびiは0以上の整数で、式(4)ではc+d
≧1およびe≧1、また式(5)ではf+g≧1および
h+i≧1である)で表される繰り返し単位を有するこ
とを特徴とする1に記載のボラジン含有ケイ素系共重合
ポリマー。 3.空気中での5%重量減温度が、200℃以上である
ことを特徴とする1又は2に記載のボラジン含有ケイ素
系共重合ポリマー。 4.一般式(1)(Wherein R 1 , R 2 , R 3 , R 4 ,
R 5 , R 7 and R 8 are the same as those in the general formulas (1), (2) and (3), and c, d, e, f,
g, h and i are integers equal to or greater than 0, and c + d
≧ 1 and e ≧ 1, and in Formula (5), f + g ≧ 1 and h + i ≧ 1). 3. 3. The borazine-containing silicon-based copolymer according to 1 or 2, wherein the 5% weight loss temperature in air is 200 ° C. or more. 4. General formula (1)
【0014】[0014]
【化11】 Embedded image
【0015】(式中、R1はアルキル基、アリール基、
アラルキル基または水素原子を示し、R2はアルキル
基、アリール基、アラルキル基または水素原子を示す)
で表されるB,B’,B”−トリアルキニルボラジン類
と、一般式(2) (R7C≡C)mR8 (2) (式中、R7はアルキル基、アリール基、アラルキル基
または水素原子を示し、R8は、置換基を有していても
良い芳香族または脂肪族の2価または3価の基を示し、
mはR8が2価の基では2、R8が3価の基では3であ
る)で表されるジインまたはトリイン化合物をともに用
いて、それらを一般式(3)(Wherein R 1 is an alkyl group, an aryl group,
An aralkyl group or a hydrogen atom, and R 2 represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom)
And B, B ', B "-trialkynyl borazine represented by the following general formula (2) (R 7 C≡C) m R 8 (2) (where R 7 is an alkyl group, an aryl group, an aralkyl R 8 represents an aromatic or aliphatic divalent or trivalent group which may have a substituent,
m by using both the diyne or avian compound represented by R 8 is a divalent In group 2, R 8 is a trivalent group is 3), they general formula (3)
【0016】[0016]
【化12】 Embedded image
【0017】(式中、R3およびR4はアルキル基、ア
リール基、アラルキル基または水素原子の中から選ばれ
る同一あるいは相異なる1価の基を示し、R5は置換基
を有していても良い芳香族の2価の基)で表される2個
のヒドロシリル基を有するケイ素化合物と、白金触媒存
在下で混合し、その溶液を塗布することを特徴とするボ
ラジン含有ケイ素系共重合ポリマーの薄膜の製造方法。(Wherein R 3 and R 4 are the same or different monovalent groups selected from an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 5 is a substituent. A borazine-containing silicon-based copolymer, which is mixed with a silicon compound having two hydrosilyl groups represented by a good aromatic divalent group) in the presence of a platinum catalyst, and applying the solution. Method of manufacturing thin film.
【0018】[0018]
【発明の実施の形態】前記一般式(1)において、R2
はアルキル基、アリール基、アラルキル基または水素原
子を示す。アルキル基の炭素数は1〜24、好ましくは
1〜12である。アリール基の炭素数は6〜20、好ま
しくは6〜10である。アラルキル基の炭素数は7〜2
4、好ましくは7〜12である。前記R2を例示する
と、メチル基、エチル基、イソプロピル基、t−ブチル
基、オクチル基等のアルキル基、フェニル基、ナフチル
基、ビフェニル基等のアリール基、ベンジル基、フェネ
チル基等のアラルキル基、水素原子等が挙げられる。BEST MODE FOR CARRYING OUT THE INVENTION In the general formula (1), R 2
Represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom. The alkyl group has 1 to 24, preferably 1 to 12 carbon atoms. The aryl group has 6 to 20 carbon atoms, preferably 6 to 10 carbon atoms. The aralkyl group has 7 to 2 carbon atoms
4, preferably 7-12. To illustrate the R 2, a methyl group, an ethyl group, an isopropyl group, t- butyl group, and an octyl group, a phenyl group, a naphthyl group, an aryl group such as a biphenyl group, a benzyl group, aralkyl groups such as phenethyl groups , A hydrogen atom and the like.
【0019】これらの置換基を有し、一般式(1)で表
されるB,B’,B”−トリアルキニルボラジン化合物
の具体例としては、B,B’,B”−トリエチニルボラ
ジン、B,B’,B”−トリエチニル−N,N’,N”
−トリメチルボラジン、B,B’,B”−トリ(1−プ
ロピニル)ボラジン、B,B’,B”−トリ(フェニル
エチニル)ボラジン、B,B’,B”−トリ(フェニル
エチニル)−N,N’,N”−トリメチルボラジン、
B,B’,B”−トリエチニル−N,N’,N”−トリ
フェニルボラジン、B,B’,B”−トリ(フェニルエ
チニル)−N,N’,N”−トリフェニルボラジン、
B,B’,B”−エチニル−N,N’,N”−トリベン
ジルボラジン等が挙げられるが、これに限定されるもの
ではない。また、1種類のB,B’,B”−トリアルキ
ニルボラジン化合物を単独で用いることもできるが、2
種類以上のB,B’,B”−トリアルキニルボラジン化
合物を合わせて用いることも、本発明の有利な態様に含
まれる。Specific examples of the B, B ', B "-trialkynylborazine compound having these substituents and represented by the general formula (1) include B, B', B" -triethynylborazine, B, B ', B "-triethynyl-N, N', N"
-Trimethylborazine, B, B ', B "-tri (1-propynyl) borazine, B, B', B" -tri (phenylethynyl) borazine, B, B ', B "-tri (phenylethynyl) -N , N ', N "-trimethylborazine,
B, B ', B "-triethynyl-N, N', N" -triphenylborazine, B, B ', B "-tri (phenylethynyl) -N, N', N" -triphenylborazine,
B, B ', B "-ethynyl-N, N', N" -tribenzylborazine and the like, but are not limited thereto. Further, one kind of B, B ′, B ″ -trialkynylborazine compound can be used alone.
Use of a combination of more than one type of B, B ', B "-trialkynylborazine compound is also included in an advantageous embodiment of the present invention.
【0020】本発明で、B,B’,B”−トリアルキニ
ルボラジン化合物とともに、2個以上のヒドロシリル基
を有するケイ素化合物と反応させるジインもしくはトリ
イン化合物は、一般式(2) (R7C≡C)mR8 (2) で表される。式中、R7はアルキル基、アリール基、ア
ラルキル基または水素原子を示す。アルキル基の炭素数
は1〜24、好ましくは1〜12である。アリール基の
炭素数は6〜20、好ましくは6〜14である。アラル
キル基の炭素数は7〜24、好ましくは7〜16であ
る。[0020] In the present invention, B, B ', B " - with tri alkynyl borazine compound, diyne or avian compound is reacted with a silicon compound having two or more hydrosilyl groups of the general formula (2) (R 7 C≡ C) m R 8 (2), wherein R 7 represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, wherein the alkyl group has 1 to 24, preferably 1 to 12 carbon atoms. The aryl group has 6 to 20, preferably 6 to 14. The aralkyl group has 7 to 24, preferably 7 to 16 carbon atoms.
【0021】前記R1を例示すると、メチル基、エチル
基、イソプロピル基、t−ブチル基、オクチル基等のア
ルキル基、フェニル基、ナフチル基、ビフェニル基等の
アリール基、ベンジル基、フェネチル基等のアラルキル
基、水素原子等が挙げられる。また、R8は、置換基を
有していても良い芳香族または脂肪族の2価または3価
の基を示す。mは、R8が2価の基では2、R8が3価
の基では3である。芳香族の2価または3価の基の炭素
数は、6〜20、好ましくは6〜14である。また脂肪
族の2価または3価の基の炭素数は2〜20、好ましく
は3〜16である。前記R8を例示すると、フェニレン
基、ベンゼントリイル基、ナフチレン基、ナフタレント
リイル基、アントリレン基、ビフェニレン基、テルフェ
ニレン基、エチレン基、トリメチレン基、ペンタメチレ
ン基、オクタメチレン基、ドデカメチレン基、ヘキサデ
カメチレン基等が挙げられる。Examples of the above R 1 include alkyl groups such as methyl group, ethyl group, isopropyl group, t-butyl group and octyl group, aryl groups such as phenyl group, naphthyl group and biphenyl group, benzyl group, phenethyl group and the like. Aralkyl group, hydrogen atom and the like. R 8 represents an aromatic or aliphatic divalent or trivalent group which may have a substituent. m, in R 8 is a divalent group in 2, R 8 is a trivalent group is three. The aromatic divalent or trivalent group has 6 to 20 carbon atoms, preferably 6 to 14 carbon atoms. The aliphatic divalent or trivalent group has 2 to 20 carbon atoms, preferably 3 to 16 carbon atoms. Examples of R 8 include a phenylene group, a benzenetriyl group, a naphthylene group, a naphthalenetriyl group, an anthrylene group, a biphenylene group, a terphenylene group, an ethylene group, a trimethylene group, a pentamethylene group, an octamethylene group, and a dodecamethylene group. And a hexadecamethylene group.
【0022】これらジインもしくはトリイン化合物を例
示すると、p−およびm−ジエチニルベンゼン、1,
3,5−および1,2,4−トリエチニルベンゼン、p
−およびm−ジ(1−プロピニル)ベンゼン、1,3,
5−および1,2,4−トリ(1−プロピニル)ベンゼ
ン、p−およびm−ジ(フェニルエチニル)ベンゼン、
p−およびm−ジ(3−フェニル−1−プロピニル)ベ
ンゼン、1,3,5−および1,2,4−トリ(フェニ
ルエチニル)ベンゼン、1,4−および1,5−ジエチ
ニルナフタレン、9,10−ジエチニルアントラセン、
4,4’−ジエチニルビフェニル、1,5−ヘキサジイ
ン、1,6−ヘプタジイン、1,8−ノナジイン、1,
11−ドデカジイン、1,15−ヘキサデカジイン、
1,19−エイコサジイン等が挙げられるが、これらに
限定されるものではない。ジインもしくはトリイン化合
物は、1種類を単独で用いることもできるが、2種類以
上を併用することも、本発明の有利な態様に含まれる。Examples of these diyne or triyne compounds include p- and m-diethynylbenzene,
3,5- and 1,2,4-triethynylbenzene, p
-And m-di (1-propynyl) benzene, 1,3,
5- and 1,2,4-tri (1-propynyl) benzene, p- and m-di (phenylethynyl) benzene,
p- and m-di (3-phenyl-1-propynyl) benzene, 1,3,5- and 1,2,4-tri (phenylethynyl) benzene, 1,4- and 1,5-diethynylnaphthalene, 9,10-diethynylanthracene,
4,4′-diethynylbiphenyl, 1,5-hexadiyne, 1,6-heptadiyne, 1,8-nonadiyne, 1,
11-dodecadine, 1,15-hexadecadine,
Examples thereof include 1,19-eicosadiyne, but are not limited thereto. One type of diyne or triin compound can be used alone, but the use of two or more types in combination is also included in an advantageous embodiment of the present invention.
【0023】本発明で用いる2個以上のヒドロシリル基
を有するケイ素化合物としては、一般式(3)で表され
るものが使用される。As the silicon compound having two or more hydrosilyl groups used in the present invention, those represented by the general formula (3) are used.
【0024】[0024]
【化13】 Embedded image
【0025】式中、R3およびR4はアルキル基、アリ
ール基、アラルキル基または水素原子の中から選ばれる
同一あるいは相異なる1価の基を示す。アルキル基の炭
素数は1〜24、好ましくは1〜12である。アリール
基の炭素数は6〜20、好ましくは6〜10である。ア
ラルキル基の炭素数は7〜24、好ましくは7〜12で
ある。前記R3およびR4を例示すると、メチル基、エ
チル基、イソプロピル基、t−ブチル基、オクチル基等
のアルキル基、フェニル基、ナフチル基、ビフェニル基
等のアリール基、ベンジル基、フェネチル基等のアラル
キル基、水素原子等が挙げられる。In the formula, R 3 and R 4 are the same or different monovalent groups selected from an alkyl group, an aryl group, an aralkyl group and a hydrogen atom. The alkyl group has 1 to 24, preferably 1 to 12 carbon atoms. The aryl group has 6 to 20 carbon atoms, preferably 6 to 10 carbon atoms. The aralkyl group has 7 to 24 carbon atoms, preferably 7 to 12 carbon atoms. Examples of the above R 3 and R 4 include alkyl groups such as methyl group, ethyl group, isopropyl group, t-butyl group and octyl group, aryl groups such as phenyl group, naphthyl group and biphenyl group, benzyl group, phenethyl group and the like. Aralkyl group, hydrogen atom and the like.
【0026】また、前記一般式(3)において、R5は
置換基を有していても良い芳香族の2価の基を示す。芳
香族の2価の基の炭素数は6〜24、好ましくは6〜1
2である。芳香族の2価の基としては、2価芳香族炭化
水素基(アリーレン基等)の他、酸素等のヘテロ原子を
連結基として含むアリーレン基等が含まれる。また前記
芳香族の2価の基に結合していても良い置換基として
は、アルキル基、アリール基、アラルキル基等が含まれ
る。このような芳香族の2価の基としては、例えばフェ
ニレン基、ナフチレン基、ビフェニレン基等のアリーレ
ン基、ジフェニルエーテル基等の置換アリーレン基等が
挙げられる。In the general formula (3), R 5 represents an aromatic divalent group which may have a substituent. The aromatic divalent group has 6 to 24 carbon atoms, preferably 6-1.
2. Examples of the aromatic divalent group include a divalent aromatic hydrocarbon group (such as an arylene group), an arylene group containing a hetero atom such as oxygen as a linking group, and the like. Examples of the substituent that may be bonded to the aromatic divalent group include an alkyl group, an aryl group, and an aralkyl group. Examples of such an aromatic divalent group include an arylene group such as a phenylene group, a naphthylene group, and a biphenylene group, and a substituted arylene group such as a diphenyl ether group.
【0027】これらの置換基を有し、一般式(3)で表
されるビス(ヒドロシラン)化合物にはビス(モノヒド
ロシラン)類、ビス(ジヒドロシラン)類、ビス(トリ
ヒドロシラン)類が含まれる。これらビス(ヒドロシラ
ン)化合物の具体例としては、m−ビス(ジメチルシリ
ル)ベンゼン、p−ビス(ジメチルシリル)ベンゼン、
1,4−ビス(ジメチルシリル)ナフタレン、1,5−
ビス(ジメチルシリル)ナフタレン、m−ビス(メチル
エチルシリル)ベンゼン、m−ビス(メチルフェニルシ
リル)ベンゼン、p−ビス(メチルオクチルシリル)ベ
ンゼン、4,4’−ビス(メチルベンジルシリル)ビフ
ェニル、4,4’−ビス(メチルフェネチルシリル)ジ
フェニルエーテル、m−ビス(メチルシリル)ベンゼ
ン、m−ジシリルベンゼン等が挙げられるが、これらに
限定されるものではない。The bis (hydrosilane) compounds having these substituents and represented by the general formula (3) include bis (monohydrosilane) s, bis (dihydrosilane) s and bis (trihydrosilane) s. . Specific examples of these bis (hydrosilane) compounds include m-bis (dimethylsilyl) benzene, p-bis (dimethylsilyl) benzene,
1,4-bis (dimethylsilyl) naphthalene, 1,5-
Bis (dimethylsilyl) naphthalene, m-bis (methylethylsilyl) benzene, m-bis (methylphenylsilyl) benzene, p-bis (methyloctylsilyl) benzene, 4,4′-bis (methylbenzylsilyl) biphenyl, Examples include, but are not limited to, 4,4'-bis (methylphenethylsilyl) diphenyl ether, m-bis (methylsilyl) benzene, and m-disilylbenzene.
【0028】本発明の反応における原料化合物の量関係
は、一般式(1)のB,B’,B”−トリアルキニルボ
ラジン化合物に対して、任意のモル比の一般式(2)の
ジイン又はトリイン化合物を使用することができるが、
一般的には、そのモル比は0.01〜200、好ましく
は0.03〜 150、より好ましくは0.05〜10
0の範囲である。 B,B’,B”−トリアルキニルボ
ラジン化合物(1)とジインまたはトリイン化合物
(2)を合わせたモル量に対する、一般式(3)の2個
のヒドロシリル基を有するケイ素化合物のモル量の比
は、一般的には0.1〜10、好ましくは0.2〜5の
範囲である。The quantity relationship of the starting compounds in the reaction of the present invention is such that the molar ratio of the B, B ', B "-trialkynylborazine compound of the general formula (1) to the diyne or the diyne of the general formula (2) in an arbitrary molar ratio is determined. Triin compounds can be used,
Generally, the molar ratio is from 0.01 to 200, preferably from 0.03 to 150, more preferably from 0.05 to 10
It is in the range of 0. Ratio of the molar amount of the silicon compound having two hydrosilyl groups of the general formula (3) to the total molar amount of the B, B ', B "-trialkynylborazine compound (1) and the diyne or triyne compound (2). Is generally in the range of 0.1 to 10, preferably 0.2 to 5.
【0029】本発明では、これらのモノマーを通常は白
金含有触媒の存在下に反応させることによって、次の、
一般式(4)In the present invention, by reacting these monomers usually in the presence of a platinum-containing catalyst, the following:
General formula (4)
【0030】[0030]
【化14】 Embedded image
【0031】又は一般式(5)Or the general formula (5)
【0032】[0032]
【化15】 Embedded image
【0033】(これら式中、R1、R2、R3、R4、
R5、R7およびR8は、前記一般式(1)、(2)お
よび(3)中のものと同じであり、c、d、e、f、
g、hおよびiは0以上の整数で、式(4)ではc+d
≧1およびe≧1、また式(5)ではf+g≧1および
h+i≧1である)で表される繰り返し単位を有する、
新規な3元系のボラジン含有ケイ素系共重合ポリマーを
得ることができる。式中、Z21、Z31、Z41は原
料化合物に由来する1価の有機基であり、例えば置換基
を有していてもよいビニル基や水素原子等である。これ
らポリマーにおける末端部の基は、ヒドロシリル基また
はエチニル基等である。(Wherein R 1 , R 2 , R 3 , R 4 ,
R 5 , R 7 and R 8 are the same as those in the general formulas (1), (2) and (3), and c, d, e, f,
g, h and i are integers equal to or greater than 0, and in the formula (4), c + d
≧ 1 and e ≧ 1, and in Formula (5), f + g ≧ 1 and h + i ≧ 1).
A novel ternary borazine-containing silicon-based copolymer can be obtained. In the formula, Z 21 , Z 31 , and Z 41 are monovalent organic groups derived from the raw material compounds, such as a vinyl group which may have a substituent, a hydrogen atom, and the like. The terminal group in these polymers is a hydrosilyl group or an ethynyl group.
【0034】また、前記一般式(4)又は(5)におけ
る下記の式(6)で表される部分は、下記の式(7)に
示す4通りの結合状態を含むことを意味する。The portion represented by the following formula (6) in the above general formula (4) or (5) means that there are four bonding states shown by the following formula (7).
【0035】[0035]
【化16】 Embedded image
【0036】[0036]
【化17】 Embedded image
【0037】本発明で用いる白金含有触媒は、従来ヒド
ロシリル化に使用されているものを用いることができ
る。これを例示すると、白金ジビニルテトラメチルジシ
ロキサン、白金環状ジビニルメチルシロキサン、塩化白
金酸、ジクロロ白金、白金カーボン、トリス(ジベンジ
リデンアセトン)二白金、ビス(エチレン)テトラクロ
ロ二白金、シクロオクタジエンジクロロ白金、ビス(シ
クロオクタジエン)白金、シクロオクタジエンジメチル
白金、ビス(トリフェニルホスフィン)ジクロロ白金、
テトラキス(トリフェニルホスフィン)白金等が挙げら
れるが、これに限定されるものではない。As the platinum-containing catalyst used in the present invention, those conventionally used for hydrosilylation can be used. For example, platinum divinyltetramethyldisiloxane, platinum cyclic divinylmethylsiloxane, chloroplatinic acid, dichloroplatinum, platinum carbon, tris (dibenzylideneacetone) diplatinum, bis (ethylene) tetrachlorodiplatinum, cyclooctadienedichloro Platinum, bis (cyclooctadiene) platinum, cyclooctadienedimethylplatinum, bis (triphenylphosphine) dichloroplatinum,
Examples include, but are not limited to, tetrakis (triphenylphosphine) platinum.
【0038】これら白金含有触媒は、B,B’,B”−
トリアルキニルボラジン化合物(1)とジイン又はトリ
イン化合物(2)の合計量、もしくはビス(ヒドロシラ
ン)化合物(3)のうちモル量の少ない原料に対する金
属原子のモル比で0.000001〜0.5の範囲で使
用される。本発明のポリマーの製造において、反応はほ
ぼ定量的に進行するため、減圧下または常圧下で溶媒を
除去する等の方法で容易に目的ポリマーが得られる。ま
た、再沈殿、ゲル浸透クロマトグラフィー等の方法で分
取することもできる。These platinum-containing catalysts are B, B ', B "-
0.000001 to 0.5 in terms of the molar ratio of the metal atom to the raw material having a smaller molar amount among the trial quinyl borazine compound (1) and the diyne or triin compound (2) or the bis (hydrosilane) compound (3). Used in range. In the production of the polymer of the present invention, since the reaction proceeds almost quantitatively, the target polymer can be easily obtained by a method such as removing the solvent under reduced pressure or normal pressure. In addition, fractionation can also be performed by a method such as reprecipitation or gel permeation chromatography.
【0039】本発明は、溶媒の有無にかかわらず実施で
きるが、溶媒を用いる場合には、原料と反応するものを
除いた種々の溶媒を用いることができる。それら溶媒と
しては、芳香族炭化水素系、飽和炭化水素系、脂肪族エ
ーテル系、芳香族エーテル系等の溶媒が挙げられ、より
具体的には、トルエン、ベンゼン、キシレン、ヘキサ
ン、テトラヒドロフラン、ジフェニルエーテル等が挙げ
られる。The present invention can be carried out irrespective of the presence or absence of a solvent. When a solvent is used, various solvents other than those which react with the raw materials can be used. Examples of such solvents include aromatic hydrocarbons, saturated hydrocarbons, aliphatic ethers, and aromatic ethers, and more specifically, toluene, benzene, xylene, hexane, tetrahydrofuran, diphenyl ether, and the like. Is mentioned.
【0040】本発明では、これらの溶媒と白金含有触媒
の存在下に反応を行い、得られる溶液を基材等に塗布す
ることによって、耐燃焼性、耐熱性等の優れたボラジン
含有ケイ素系共重合ポリマーの薄膜を得ることができ
る。本発明のボラジン含有ケイ素系共重合ポリマーの薄
膜を形成する際、基材上への溶液の塗布方法は特に制限
はなく、刷毛による塗布、スプレー塗布、スピンコート
法による塗布などいずれの方法をとることもできる。本
発明で塗布する溶液を調製する温度としては、一般的に
は室温でよいが、原料物質の構造により、好ましい速度
を達するために−20℃から200℃の範囲で冷却また
は加熱することもできる。好ましい温度としては0℃か
ら150℃、より好ましくは0℃から100℃の範囲で
実施される。In the present invention, by reacting these solvents with a platinum-containing catalyst and applying the resulting solution to a substrate or the like, a borazine-containing silicon-based compound having excellent combustion resistance and heat resistance can be obtained. A thin film of the polymer can be obtained. When forming a thin film of the borazine-containing silicon-based copolymer of the present invention, the method of applying the solution on the substrate is not particularly limited, and any method such as application by a brush, spray application, or spin coating is used. You can also. The temperature for preparing the solution to be applied in the present invention may be generally room temperature, but depending on the structure of the raw material, it may be cooled or heated in the range of −20 ° C. to 200 ° C. to achieve a preferable rate. . The preferred temperature is 0 to 150 ° C, more preferably 0 to 100 ° C.
【0041】溶液を塗布した後は、空気中、不活性雰囲
気下、または真空中で乾燥させることにより、ボラジン
含有ケイ素系共重合ポリマーの薄膜を得ることができ
る。本発明においてボラジン含有ケイ素系共重合ポリマ
ーの薄膜とは、その厚さを特に制限する意味ではなく、
塊状などの樹脂ではなく、膜状に形成したものを意味す
る。特に本発明方法によればμm単位の薄い膜から比較
的厚いmmオーダーの膜までの範囲で膜を形成すること
ができることが特徴であり、膜の厚さの上限は特にな
い。After applying the solution, a thin film of a borazine-containing silicon-based copolymer can be obtained by drying in air, under an inert atmosphere, or in vacuum. In the present invention, a thin film of a borazine-containing silicon-based copolymer is not particularly limited in its thickness,
It is not a resin such as a lump, but a resin formed into a film. In particular, the method of the present invention is characterized in that a film can be formed in a range from a thin film in μm unit to a relatively thick film in mm order, and there is no particular upper limit of the film thickness.
【0042】[0042]
【実施例】次に本発明を実施例により更に詳細に説明す
るが、本発明はこれら実施例に限定されるものではな
い。 (実施例1)B,B’,B”−トリエチニル−N,
N’,N”−トリメチルボラジン(0.125mmo
l)、m−ジエチニルベンゼン(0.125mmo
l)、p−ビス(ジメチルシリル)ベンゼン(0.25
mmol)をトルエン(5ml)に溶解し、白金ジビニ
ルテトラメチルジシロキサンの白金2%キシレン溶液
(0.00025mmol白金)を加え、窒素下室温で
4日間撹拌した。この溶液の0.1mlをガラス基板上
に塗布し、空気中で乾燥させることにより、無色透明の
薄膜を得た。タリステップを用いて測定した薄膜の膜厚
は2μmであった。この膜のポリマーの熱安定性を熱重
量分析で測定した結果、5%重量減温度は、320℃
(窒素下)および360℃(空気中)であった。1 H-NMR (C6D6, δ, ppm) 8.1-7.9 (m, 0.7H), 7.8-7.6
(m, 3.4H), 7.5-7.1 (m,0.7H), 6.9-6.7 (m, 0.9H), 6.
6-6.4 (m, 0.8H), 6.2-5.7 (m, 1.5H), 3.5-2.5(m, 5H)
, 0.6-0.2 (br s, 12H). IR (KBr disk, cm-1) 2072 (w), 1578, 1446, 1396, 12
49, 1133, 1104, 1019,839, 774.Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples. (Example 1) B, B ', B "-triethynyl-N,
N ', N "-trimethylborazine (0.125 mmol
l), m-diethynylbenzene (0.125 mmol
l), p-bis (dimethylsilyl) benzene (0.25
was dissolved in toluene (5 ml), a 2% solution of platinum divinyltetramethyldisiloxane in platinum (0.00025 mmol platinum) was added, and the mixture was stirred at room temperature under nitrogen for 4 days. 0.1 ml of this solution was applied on a glass substrate and dried in air to obtain a colorless and transparent thin film. The thickness of the thin film measured using the tally step was 2 μm. As a result of measuring the thermal stability of the polymer of this film by thermogravimetric analysis, the 5% weight loss temperature was 320 ° C.
(Under nitrogen) and 360 ° C. (in air). 1 H-NMR (C 6 D 6 , δ, ppm) 8.1-7.9 (m, 0.7H), 7.8-7.6
(m, 3.4H), 7.5-7.1 (m, 0.7H), 6.9-6.7 (m, 0.9H), 6.
6-6.4 (m, 0.8H), 6.2-5.7 (m, 1.5H), 3.5-2.5 (m, 5H)
, 0.6-0.2 (br s, 12H) .IR (KBr disk, cm -1 ) 2072 (w), 1578, 1446, 1396, 12
49, 1133, 1104, 1019,839, 774.
【0043】(実施例2)B,B’,B”−トリエチニ
ル−N,N’,N”−トリメチルボラジン(0.125
mmol)、1,3,5−トリエチニルベンゼン(0.
125mmol)、p−ビス(ジメチルシリル)ベンゼ
ン(0.25mmol)をトルエン(5ml)に溶解
し、白金ジビニルテトラメチルジシロキサンの白金2%
キシレン溶液(0.00025mmol白金)を加え、
窒素下室温で4日間撹拌した。この溶液の0.1mlを
ガラス基板上に塗布し、空気中で乾燥させることによ
り、無色透明の薄膜を得た。タリステップを用いて測定
した薄膜の膜厚は3μmであった。この膜のポリマーの
熱安定性を熱重量分析で測定した結果、5%重量減温度
は、320℃(窒素下)および380℃(空気中)であ
った。 IR (KBr disk, cm-1) 2120, 2074, 1578, 1448, 1381,
1251, 1135, 988, 880,820.Example 2 B, B ', B "-triethynyl-N, N', N" -trimethylborazine (0.125
mmol), 1,3,5-triethynylbenzene (0.
125 mmol) and p-bis (dimethylsilyl) benzene (0.25 mmol) were dissolved in toluene (5 ml), and platinum 2% of platinum divinyltetramethyldisiloxane was dissolved.
Add a xylene solution (0.00025 mmol platinum),
Stirred at room temperature under nitrogen for 4 days. 0.1 ml of this solution was applied on a glass substrate and dried in air to obtain a colorless and transparent thin film. The thickness of the thin film measured using the tally step was 3 μm. As a result of measuring the thermal stability of the polymer of this film by thermogravimetric analysis, the 5% weight loss temperature was 320 ° C. (under nitrogen) and 380 ° C. (in air). IR (KBr disk, cm -1 ) 2120, 2074, 1578, 1448, 1381,
1251, 1135, 988, 880,820.
【0044】(実施例3)B,B’,B”−トリエチニ
ル−N,N’,N”−トリメチルボラジン(0.125
mmol)、m−ジエチニルベンゼン(0.125mm
ol)、p−ビス(ジメチルシリル)ベンゼン(0.2
5mmol)を、トルエン(0.5ml)に溶解し、白
金ジビニルテトラメチルジシロキサンの白金2%キシレ
ン溶液(0.00025mmol白金)を加え、窒素
下、室温で5日間撹拌した結果、ゲル状溶液が得られ
た。反応溶液を減圧下、加熱濃縮し、粉末状のボラジン
含有ケイ素系共重合ポリマー(4a)をほぼ定量的な収
率で得た。このポリマーは、実施例1のポリマーと同じ
構造を有する。 熱重量分析(窒素中) Td5(5%重量減温度) 321℃ 63%残(985℃) 熱重量分析(空気中) Td5(5%重量減温度) 362℃ 59%残(985℃)Example 3 B, B ', B "-triethynyl-N, N', N" -trimethylborazine (0.125
mmol), m-diethynylbenzene (0.125 mm
ol), p-bis (dimethylsilyl) benzene (0.2
5 mmol) was dissolved in toluene (0.5 ml), a platinum 2% xylene solution of platinum divinyltetramethyldisiloxane (0.00025 mmol platinum) was added, and the mixture was stirred at room temperature under nitrogen for 5 days. Obtained. The reaction solution was heated and concentrated under reduced pressure to obtain a powdery borazine-containing silicon-based copolymer (4a) in almost quantitative yield. This polymer has the same structure as the polymer of Example 1. Thermogravimetric analysis (nitrogen) Td 5 (5% weight loss temperature) 321 ° C. 63% residual (985 ° C.) thermogravimetric analysis (in air) Td 5 (5% weight loss temperature) 362 ° C. 59% residual (985 ° C.)
【0045】(実施例4)B,B’,B”−トリエチニ
ル−N,N’,N”−トリメチルボラジン(0.125
mmol)、1,3,5−トリエチニルベンゼン(0.
125mmol)、p−ビス(ジメチルシリル)ベンゼ
ン(0.25mmol)を、トルエン(0.5ml)に
溶解し、白金ジビニルテトラメチルジシロキサンの白金
2%キシレン溶液(0.00025mmol白金)を加
え、窒素下、室温で6日間撹拌した結果、ゲル状溶液が
得られた。反応溶液を減圧下、加熱濃縮し、粉末状のボ
ラジン含有ケイ素系共重合ポリマー(5a)をほぼ定量
的な収率で得た。このポリマーは、実施例2のポリマー
と同じ構造を有する。 熱重量分析(窒素中) Td5(5%重量減温度) 322℃ 75%残(985℃) 熱重量分析(空気中) Td5(5%重量減温度) 382℃66%残(985
℃)Example 4 B, B ', B "-triethynyl-N, N', N" -trimethylborazine (0.125
mmol), 1,3,5-triethynylbenzene (0.
125 mmol) and p-bis (dimethylsilyl) benzene (0.25 mmol) were dissolved in toluene (0.5 ml), and a 2% solution of platinum divinyltetramethyldisiloxane in xylene (0.00025 mmol platinum) was added. Under stirring at room temperature for 6 days, a gel-like solution was obtained. The reaction solution was concentrated by heating under reduced pressure to obtain a powdery borazine-containing silicon-based copolymer (5a) in almost quantitative yield. This polymer has the same structure as the polymer of Example 2. Thermogravimetric analysis (in nitrogen) Td 5 (5% weight loss) 322 ° C. 75% residue (985 ° C.) Thermogravimetric analysis (in air) Td 5 (5% weight loss temperature) 382 ° C. 66% residue (985
℃)
【0046】[0046]
【発明の効果】本発明によれば、B,B’,B”−トリ
アルキニルボラジン化合物(1)及び通常のジインまた
はトリイン化合物(2)を、少なくとも2個のヒドロシ
リル基を有するケイ素化合物(3)と反応させることに
よって、高価なボラジンモノマーの使用量を抑えた新規
な3元系のボラジン含有ケイ素系共重合ポリマー、及び
該共重合ポリマーの耐燃焼性、耐熱性に優れた薄膜を、
簡便かつ安全に製造することができる。従って本発明の
産業的意義は多大である。According to the present invention, the B, B ', B "-trialkynylborazine compound (1) and the ordinary diyne or triyne compound (2) can be converted into a silicon compound (3) having at least two hydrosilyl groups. ) To produce a novel tertiary borazine-containing silicon-based copolymer that reduces the amount of expensive borazine monomer used, and a thin film having excellent flame resistance and heat resistance of the copolymer.
It can be manufactured simply and safely. Therefore, the industrial significance of the present invention is great.
Claims (4)
または水素原子を示し、R2はアルキル基、アリール
基、アラルキル基または水素原子を示す)で表される
B,B’,B”−トリアルキニルボラジン類と、 一般式(2) (R7C≡C)mR8 (2) (式中、R7はアルキル基、アリール基、アラルキル基
または水素原子を示し、R8は、置換基を有していても
良い芳香族または脂肪族の2価または3価の基を示し、
mはR8が2価の基では2、R8が3価の基では3であ
る)で表されるジイン又はトリイン化合物をともに用い
て、それらを一般式(3) 【化2】 (式中、R3およびR4はアルキル基、アリール基、ア
ラルキル基または水素原子の中から選ばれる同一あるい
は相異なる1価の基を示し、R5は置換基を有していて
も良い芳香族の2価の基)で表される少なくとも2個以
上のヒドロシリル基を有するケイ素化合物と反応させて
得られるボラジン含有ケイ素系共重合ポリマー。1. A compound of the general formula (1) (Wherein, R 1 represents an alkyl group, an aryl group, an aralkyl group, or a hydrogen atom, and R 2 represents an alkyl group, an aryl group, an aralkyl group, or a hydrogen atom). Trialquinyl borazines and a compound represented by the general formula (2) (R 7 C≡C) m R 8 (2) (wherein R 7 represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 8 is An aromatic or aliphatic divalent or trivalent group which may have a group,
m by using both the diyne or avian compound represented by the R 8 is a divalent group in 2, R 8 is a trivalent group is 3), they general formula (3) ## STR2 ## (Wherein, R 3 and R 4 are the same or different monovalent groups selected from an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 5 is an aromatic group which may have a substituent. A borazine-containing silicon-based copolymer obtained by reacting with a silicon compound having at least two hydrosilyl groups represented by the following formula:
よびR8は、前記一般式(1)、(2)および(3)中
のものと同じであり、c、d、e、f、g、hおよびi
は0以上の整数で、式(4)ではc+d≧1およびe≧
1、また式(5)ではf+g≧1およびh+i≧1であ
る)で表される繰り返し単位を有することを特徴とする
請求項1に記載のボラジン含有ケイ素系共重合ポリマ
ー。2. The following general formula (4): Or the general formula (5): (In these formulas, R 1 , R 2 , R 3 , R 4 , R 5 , R 7 and R 8 are the same as those in the general formulas (1), (2) and (3), and c , D, e, f, g, h and i
Is an integer greater than or equal to 0, and in formula (4), c + d ≧ 1 and e ≧
The borazine-containing silicon-based copolymer according to claim 1, further comprising a repeating unit represented by Formula (5), wherein f + g ≧ 1 and h + i ≧ 1 in Formula (5).
以上であることを特徴とする請求項1又は2に記載のボ
ラジン含有ケイ素系共重合ポリマー。3. The 5% weight loss temperature in air is 200 ° C.
The borazine-containing silicon-based copolymer according to claim 1 or 2, wherein:
または水素原子を示し、R2はアルキル基、アリール
基、アラルキル基または水素原子を示す)で表される
B,B’,B”−トリアルキニルボラジン類と、一般式
(2) (R7C≡C)mR8 (2) (式中、R7はアルキル基、アリール基、アラルキル基
または水素原子を示し、R8は、置換基を有していても
良い芳香族または脂肪族の2価または3価の基を示し、
mはR8が2価の基では2、R8が3価の基では3であ
る)で表されるジインまたはトリイン化合物をともに用
いて、それらを一般式(3) 【化6】 (式中、R3およびR4はアルキル基、アリール基、ア
ラルキル基または水素原子の中から選ばれる同一あるい
は相異なる1価の基を示し、R5は置換基を有していて
も良い芳香族の2価の基)で表される2個のヒドロシリ
ル基を有するケイ素化合物と、白金触媒存在下で混合
し、その溶液を塗布することを特徴とするボラジン含有
ケイ素系共重合ポリマーの薄膜の製造方法。4. A compound of the general formula (1) (Wherein, R 1 represents an alkyl group, an aryl group, an aralkyl group, or a hydrogen atom, and R 2 represents an alkyl group, an aryl group, an aralkyl group, or a hydrogen atom). Trialquinyl borazines and a compound represented by the general formula (2) (R 7 C≡C) m R 8 (2) (wherein R 7 represents an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 8 is An aromatic or aliphatic divalent or trivalent group which may have a group,
m by using both the diyne or avian compound represented by the R 8 is a divalent group in 2, R 8 is a trivalent group is 3), they general formula (3) embedded image (Wherein, R 3 and R 4 are the same or different monovalent groups selected from an alkyl group, an aryl group, an aralkyl group or a hydrogen atom, and R 5 is an aromatic group which may have a substituent. A borazine-containing silicon-based copolymer thin film, which is mixed with a silicon compound having two hydrosilyl groups represented by the following formula: Production method.
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JP2004137473A (en) * | 2002-09-26 | 2004-05-13 | Hitachi Chem Co Ltd | Borazine resin and method for producing the same, borazine resin composition, insulating film and method for forming the same |
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JP2008518054A (en) * | 2004-10-22 | 2008-05-29 | ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン | Covalent organic skeletons and polyhedra |
JP2010516869A (en) * | 2007-01-24 | 2010-05-20 | ザ レジェンツ オブ ザ ユニヴァースティ オブ カリフォルニア | Crystalline 3D- and 2D-covalent organic frameworks |
JP2011102402A (en) * | 2002-09-26 | 2011-05-26 | Hitachi Chem Co Ltd | Borazine-based resin composition and method for producing the same, insulation coating and method for forming the same, and electronic part |
JP2011137161A (en) * | 2002-09-26 | 2011-07-14 | Hitachi Chem Co Ltd | Borazine-based resin composition, insulation coating and method for forming the insulation coating |
US8362199B2 (en) | 2002-09-26 | 2013-01-29 | Hitachi Chemical Co., Ltd. | Borazine-based resin, process for its production, borazine-based resin composition, insulating film and method for its formation |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP3459985B2 (en) | 2000-09-07 | 2003-10-27 | 独立行政法人産業技術総合研究所 | Method for producing thin film of borazine-containing silicon polymer and borazine-containing silicon polymer |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3459985B2 (en) | 2000-09-07 | 2003-10-27 | 独立行政法人産業技術総合研究所 | Method for producing thin film of borazine-containing silicon polymer and borazine-containing silicon polymer |
JP2004137473A (en) * | 2002-09-26 | 2004-05-13 | Hitachi Chem Co Ltd | Borazine resin and method for producing the same, borazine resin composition, insulating film and method for forming the same |
JP2004137475A (en) * | 2002-09-26 | 2004-05-13 | Hitachi Chem Co Ltd | Method for producing borazine-based resin, borazine-based resin composition, insulating film and method for forming the same |
JP2011102402A (en) * | 2002-09-26 | 2011-05-26 | Hitachi Chem Co Ltd | Borazine-based resin composition and method for producing the same, insulation coating and method for forming the same, and electronic part |
JP2011137161A (en) * | 2002-09-26 | 2011-07-14 | Hitachi Chem Co Ltd | Borazine-based resin composition, insulation coating and method for forming the insulation coating |
US8362199B2 (en) | 2002-09-26 | 2013-01-29 | Hitachi Chemical Co., Ltd. | Borazine-based resin, process for its production, borazine-based resin composition, insulating film and method for its formation |
JP2008518054A (en) * | 2004-10-22 | 2008-05-29 | ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン | Covalent organic skeletons and polyhedra |
JP2010516869A (en) * | 2007-01-24 | 2010-05-20 | ザ レジェンツ オブ ザ ユニヴァースティ オブ カリフォルニア | Crystalline 3D- and 2D-covalent organic frameworks |
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